US5907403A - Optical dual Fabry-Perot interferometric strain/temperature sensor, and system for separate reading thereof - Google Patents
Optical dual Fabry-Perot interferometric strain/temperature sensor, and system for separate reading thereof Download PDFInfo
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- US5907403A US5907403A US08/637,017 US63701796A US5907403A US 5907403 A US5907403 A US 5907403A US 63701796 A US63701796 A US 63701796A US 5907403 A US5907403 A US 5907403A
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- 230000003287 optical effect Effects 0.000 title claims description 33
- 230000009977 dual effect Effects 0.000 title 1
- 239000000835 fiber Substances 0.000 claims abstract description 117
- 239000013307 optical fiber Substances 0.000 claims abstract description 93
- 239000011521 glass Substances 0.000 claims abstract description 36
- 230000001419 dependent effect Effects 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims 2
- 230000001902 propagating effect Effects 0.000 claims 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 11
- 230000004927 fusion Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000000926 separation method Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- 230000002277 temperature effect Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35303—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using a reference fibre, e.g. interferometric devices
Definitions
- This invention relates to optical strain sensors which are sensitive to temperature, and to Fabry-Perot interferometric sensors, and to systems for reading strain and temperature separately.
- Optical fiber sensors allow simultaneous measurements of a plurality of parameters, such as the combination of axial strain and temperature. It has proven to be difficult to make optical fibers which are insensitive to temperature, or which are self-compensating.
- the general problem in the prior art is that of independently sensing the strain, or of separating the strain from temperature effects.
- sensor systems capable of separation of the two effects have used sensors in the form of (a) a combination of interferometric and polarimetric sensors, (b) two interferometers along independent eigen axes, or (c) two Bragg gratings on a high-index optical fiber.
- FIG. 1a illustrates a conceptual Fabry-Perot etalon 10, such as that described in U.S. Pat. No. 5,276,501, issued Jan. 4, 1994, in the name of McClintock et al.
- Etalon 10 includes a lead-in optical fiber 12 with an end or face 14, and another optical fiber 16 with an end or face 18, with a gap 20 therebetween.
- Fresnel reflections occur at the ends 14 and 18, due to the change in index of refraction between the air of the gap and that of the optical fibers.
- the Fresnel reflections are partial, in that only a portion of the incident light is reflected, and another portion is transmitted past the glass/air interface.
- the reflection from end 18 of fiber 16 is delayed or phase-shifted relative to the reflection from end 14, because of the length S of gap 20.
- the reflection from face 18 is delayed by the round-trip transit time through the gap, corresponding to a distance 2S.
- GRIN gradient-index
- FIG. 1b illustrates a prior-art in-line Fabry-Perot etalon (EFPI) sensor 22 in which the fibers are held in position by an in-line tube, to define an intrinsic Fabry-Perot etalon (ILFE).
- ILFE 22 is sensitive to strain in the axial direction.
- glass tube 24 has an outer diameter substantially equal to that of the lead-in fiber 12 and the lead-out fiber 16, and also defines a bore 26. Partial reflections take place at that part of face 14 of fiber 12 which is within the bore, because of the glass/air interface within the bore. A similar reflection takes place at face 18 of fiber 16.
- FIG. 1c illustrates a prior-art etalon, as described, for example, in U.S. Pat. No. 5,359,405, issued Oct. 25, 1994 in the name of Andrews, in which the fibers are held in position within the bore of a tube to define an extrinsic Fabry-Perot etalon (EFPI).
- EFPI extrinsic Fabry-Perot etalon
- Such a structure is termed a "Fizeau" sensor in U.S. Pat. No. 5,301,001, issued Apr. 5, 1994, in the name of Murphy et al.
- a glass tube 30 has a bore 32 and first and second ends 34 and 36, respectively.
- Face 14 of lead-in optical fiber 12 is within bore 32 of tube 30, together with a portion of fiber 12, and face 18 of optical fiber 16 is also within bore 32. Faces 14 and 18 together define a multiple reflection etalon similar to that of FIG. 1a. As described in the Andrews patent, the fiber faces 14 and 18 have reflection magnitudes of about 4% if uncoated, and may be coated to change the reflection magnitude. The support of the fibers 12 and 16 within the bore 32 of tube 30 allows full utilization of the area of reflective surfaces 14 and 18. Fibers 12 and 16 are fastened to tube 30, as by fusion welds, at locations 38 and 40, which are near tube ends 36 and 38, respectively.
- FIG. 1c allows strains in external tube 30 as a result of externally applied stresses to be effectively magnified, by comparison with the arrangement of FIG. 1b. More particularly, external force or stress applied axially to the tube 24 of FIG. 1b, as, for example by imbedding the tube in a structure to be measured, is applied across the length S of tube, and the resulting strain (deformation in the form of stretch or compression) is some constant K times S, or KS, where K depends upon the nature of the glass tube 30. This strain is measured across gap distance S in the arrangement of FIG. 1b.
- KS constant K times S
- the length of the tube 30 is Y times S, so the force tending to cause deformation is applied across a longer portion of the tube, and the resulting strain is correspondingly longer, namely Y times KS, or YKS, which is Y times greater than in the case of FIG. 1b.
- the greater strain appears across the same gap length S, because fibers 12 and 16 are free to move within tube bore 32, being constrained only at or near the ends 34 and 36 of the tube 30. Consequently, a strain Y times that of FIG. 1b appears across the same gap length S in the arrangement of FIG. 1c, with the result of higher sensitivity in the form of more strain or motion of a given gap length for the arrangement of FIG. 1c by comparison with that of FIG. 1b.
- Optical fiber 12 is a single-mode fiber
- fiber 16 is either a single-mode or a multimode fiber.
- sensors 16 of FIG. 1b and 28 of FIG. 1c when connected to a readout system, are capable of measuring strain.
- the strain is manifested as a change in dimension S of cavity 20.
- Strain is defined as change in length divided by length, or ⁇ L/L, and may be caused by either a physical force applied to the ends of the tube, or it may be caused by the temperature coefficient of physical expansion of the support tube 24 or 30. Without knowing the actual temperature of the sensor, then, it may not be possible to know the amount of change of dimension of the cavity which is due to external forces, rather than to temperature changes.
- the use of multiple measurement sensors in the same physical structure tends to weaken the structure, and the presence of the one sensor near another can itself affect the desired measurements. Improved sensors are desired.
- a sensor includes a single-mode, optical first fiber with first and second ends.
- the first optical fiber has a particular length between its first and second ends.
- a lead-in or lead-out optical fiber (an optical second fiber) includes a first end.
- the first end of the second fiber is affixed to the first end of the first optical fiber, to thereby define a first partially reflective surface at the joined first ends of the first and second fibers. This junction may be made by fusion welding.
- the other one of the lead-in and lead-out fibers (an optical third fiber) has its first end located at a second particular length or distance from the second end of the first fiber, which thereby defines an air (or vacuum) gap or cavity, with partially reflective end faces.
- the sensor includes a glass tube which has a bore and a diameter.
- the glass tube is affixed to at least the third fiber, for holding the first end of the third fiber in a manner defining coaxial optical partial reflectors at the second end of the first fiber and at the first end of the third fiber.
- the sensor has three distinct reflective surfaces, namely at the junction of the first and second fibers, and at the glass/air interfaces between the first fiber and the cavity, and between the third fiber and the cavity.
- the second fiber is the lead-in fiber, and it is a single-mode fiber.
- the bore of the glass tube has a diameter large enough to accommodate the first, second and third optical fibers, and the first optical fiber is located within the bore of the glass tube, with the first ends of the second and third fibers also located within the bore of the glass tube, but portions of the second and third fibers remote from the first ends thereof are without the bore of the glass tube.
- the glass tube has ends, and is affixed, as by a fusion weld, at those ends to the second and third fibers, whereby at least the first fiber is free for axial motion within the tube.
- An optical readout system separately determines the temperature of the sensor, and the strain.
- FIG. 1a illustrates a conceptual Fabry-Perot etalon sensor
- FIG. 1b illustrates a prior-art etalon in which the fibers are held in position by an in-line tube, to define an intrinsic Fabry-Perot etalon (ILFE)
- FIG. 1c illustrates a prior-art etalon in which the fibers are held in position within the bore of a tube to define an extrinsic Fabry-Perot interferometer (EFPI)
- ILFE intrinsic Fabry-Perot etalon
- EFPI extrinsic Fabry-Perot interferometer
- FIG. 2a is a perspective or isometric view, partially cut away to reveal interior details, of a sensor according to the invention
- FIG. 2b is a side elevation view of the arrangement of FIG. 2a taken along section lines 2b--2b;
- FIG. 3 is a simplified block diagram of a readout system according to the invention, for use with the sensors of FIGS. 2a or 2b.
- FIG. 2a is a perspective or isometric view
- FIG. 2b is a side elevation view, partially cut away to reveal interior details, of a sensor according to the invention.
- elements corresponding to the Extrinsic Fabry-Perot (EFPI) sensor of FIG. 1c are designated by like reference numerals.
- sensor 210 includes a single-mode lead-in optical fiber 12 with an end face 12e.
- a second single-mode fiber 212 has a first end face 212e, adjacent to end face 12e of lead-in optical fiber 12, and also has a second end face 212e 2 .
- First end face 212e 1 of single-mode optical fiber 212 is bonded, as by a fusion weld, to end face 12e of lead-in optical fiber 12, to form a partially reflective interface or junction 214.
- the surface of one or both of the adjacent fibers may be coated with a reflection-enhancing material.
- Second end 212e 2 of optical fiber 212 is adjacent cavity 20, and the glass/air interface forms partially reflecting surface 14.
- Face 18 of lead-out optical fiber 16 also faces cavity 20, and forms a partially reflective air/glass interface therewith.
- Optical fiber 16 is either single-mode or a multimode fiber.
- a mounting tube 30 includes a bore 32, which is dimensioned to clear optical fibers 12, 16, and 212.
- Mounting tube 30 has a length L, which is selected to be longer than the sum of the length 1 of optical fiber 212 and the length S of gap 20, so that the ends 34 and 36 of tube 30 overlie portions of lead-in fiber 12 and lead-out fiber 16.
- the ends 34 and 36 are fastened or connected to optical fibers 12 and 16, as by welds or adhesive 38, 40. With this arrangement, the ends 12e and 16e of optical fibers 12 and 16, and all of optical fiber 212, are free to move within bore 32 of tube 30.
- the relative lack of temperature-dependent change in the index of refraction, and therefore of the optical length, of air cavity 20, together with the relative lack of sensitivity of fiber 212 to stress, allows the temperature to be determined independent of the strain, and therefore allows separation of stress and temperature effects on the sensor.
- phase response of the air-gap between faces 14 and 18 is strongly responsive to strain but weakly responsive to temperature, while the phase response of the two discontinuities 14 and 214 separated by glass (“glass gap”) is strongly sensitive to both temperature and temperature-induced strain.
- glass gap phase response of the two discontinuities 14 and 214 separated by glass
- a wavelength-tuned readout system such as that described in the abovementioned McClintock et al. patent, allows reading the optical length of fiber 212 independently of the length of gap 20, so long as the lengths are sufficiently different so that they can be resolved. Since the optical length of fiber 212 depends only upon its temperature-induced strain and its temperature coefficient of index of refraction, and the length of the gap depends upon strain but not upon temperature effects on index of refraction, separation is possible.
- FIG. 3 is a simplified block diagram of a readout system according to an aspect of the invention, for reading temperature and strain independently from the sensor of FIGS. 2a and 2b.
- This readout system uses a short-coherence-length light source, such as a light-emitting diode, together with a correlation scheme which allows determination of the optical length or separation between of two separate sets of reflections, so long as the sets differ sufficiently in length so that they can be resolved.
- a readout system 310 includes a light-emitting diode 312, which provides light by way of a directional coupler 314 to lead-in fiber 12 of sensor 210 of FIGS. 2a and 2b.
- sensor 210 produces three separate optical reflections, which return along fiber 12, and which are divided in coupler 314 into two portions, one of which propagates back to source 312 and is lost, and another portion which propagates along a fiber 316 to a further optical splitter 318, which again divides amplitude, and couples a portion of each of the three reflections onto fibers 320 and 322. That portion of the optical signal on fiber 320 is again divided in a splitter 324, and applied over two fiber paths 326 and 330 of an interferometer 325 to a combiner 334.
- Optical fiber 326 is wound about a piezoelectric cylinder 328, and fiber 330 is wound about another piezoelectric cylinder 332.
- Piezoelectric cylinders 328 and 332 change in diameter in response to control voltages applied thereto over a path 344, and therefore tend to affect the physical lengths of their respective fibers, and therefore affect the path lengths of their respective sides of the interferometer 325.
- the two output signals from combiner 334 of FIG. 3 are applied to individual optical detectors 336 and 338, which detect the optical power.
- a strain sensor includes a first optical fiber (212) including first (212e 1 ) and second (212e 2 ) ends.
- the first optical fiber has a length defined by a first particular distance (L) between its first (212e 1 ) and second (212e 2 ) ends.
- the sensor also includes lead-in (12) and lead-out (16) optical fibers.
- One (12) of the lead-in and the lead-out fiber includes a first end (12e).
- the first end (12e) of the one of the lead-in (12) and lead-out (16) fibers is affixed to the first end (212e 1 ) of the first optical fiber (12), to thereby define a first partially reflective surface (214) at the first end (212e 1 ) of the first fiber (212) and the first end (12e) of the one (12) of the lead-in (12) and lead-out (16) fibers.
- the other one (16) of the lead-in (12) and lead-out (16) fibers has a first end (16e) located at a second particular distance (S) from the second end (212e 2 ) of the first fiber (212).
- the sensor further includes a glass tube (30), which has a bore (32) and a diameter.
- the glass tube (30) is affixed to at least the other one (16) of the lead-in (12) and lead-out (16) fibers, for holding the first end (16e) of the other one (16) of the lead-in (12) and lead-out (16) fibers in a manner defining mutually coaxial optical partial reflectors (14, 18) at the second end (212e 2 ) of the first optical fiber (212) and at the first end (16e) of the other one (16) of the lead-in (12) and lead-out (16) fibers.
- the one (12) of the lead-in (12) and lead-out (16) fibers is the lead-in (12) fiber, and it is a single-mode fiber.
- the bore (32) of the glass tube (30) has a diameter large enough to accommodate the first (212), lead-in (12), and lead-out (16) optical fibers, and the first optical fiber (212) is located within the bore (32) of the glass tube, and the first ends (12e, 16e) of the lead-in (12) and lead-out (16) fibers are also located within the bore (32) of the glass tube (30), but portions of the lead-in (12) and lead-out (16) fibers remote from the first ends (12e, 16e) thereof are without the bore (32) of the glass tube (30).
- the glass tube (30) has ends (34, 36), and is affixed at those ends (34, 36) to the lead-in (12) and lead-out (16) fibers, whereby at least the first fiber (212) is free for axial motion within the bore (32) of the tube (30).
- the optical fibers may be selected for low loss at the optical wavelengths of the optical source, and they may be protected from environmental conditions by suitable coverings. While fusion welds have been described, adhesive junctions between fibers, and/or between fibers and support tubes, may be used.
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Abstract
Description
Δφ.sup.ILFE =2βn.sub.D (Lε+Sξ.sup.a ΔT)(1)
Δφ.sup.IFPI =2βlnΔT(α+ξ) (2)
TABLE 1 ______________________________________ n 1.458 n.sub.0 1.000 ξ 8.916 · 10.sup.-6 (° C..sup.-1) ξ.sup.a 0.112 · 10.sup.-6 (° C..sup.-1) α 0.5 · 10.sup.-6 (° C..sup.-1) ______________________________________
Claims (7)
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US08/637,017 US5907403A (en) | 1996-01-22 | 1996-04-24 | Optical dual Fabry-Perot interferometric strain/temperature sensor, and system for separate reading thereof |
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US1040196P | 1996-01-22 | 1996-01-22 | |
US08/637,017 US5907403A (en) | 1996-01-22 | 1996-04-24 | Optical dual Fabry-Perot interferometric strain/temperature sensor, and system for separate reading thereof |
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US20030035626A1 (en) * | 2001-08-09 | 2003-02-20 | Smith James A. | Measurement of fiber strain during processing |
US6671055B1 (en) * | 2000-04-13 | 2003-12-30 | Luna Innovations, Inc. | Interferometric sensors utilizing bulk sensing mediums extrinsic to the input/output optical fiber |
WO2004027361A1 (en) * | 2002-09-17 | 2004-04-01 | University Of Virginia Patent Foundation | Remote temperature sensing of small volume and related apparatus thereof |
US20050050962A1 (en) * | 2003-09-04 | 2005-03-10 | Zerwekh Paul S. | Optical sensor with co-located pressure and temperature sensors |
US20050146726A1 (en) * | 2002-10-15 | 2005-07-07 | Balakumar Balachandran | Fiber tip based sensor system for measurements of pressure gradient, air particle velocity and acoustic intensity |
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