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US4464599A - Piezoelectric resonator with integrated capacitances - Google Patents

Piezoelectric resonator with integrated capacitances Download PDF

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Publication number
US4464599A
US4464599A US06/306,557 US30655781A US4464599A US 4464599 A US4464599 A US 4464599A US 30655781 A US30655781 A US 30655781A US 4464599 A US4464599 A US 4464599A
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US
United States
Prior art keywords
crystal
capacitance
films
piezoelectric resonator
opening
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US06/306,557
Inventor
Wolfgang Briese
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent NV
Original Assignee
International Standard Electric Corp
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Filing date
Publication date
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Assigned to INTERNATIONAL STANDARD ELECTRIC CORPORATION reassignment INTERNATIONAL STANDARD ELECTRIC CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: BRIESE, WOLFGANG
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Publication of US4464599A publication Critical patent/US4464599A/en
Assigned to ALCATEL N.V., DE LAIRESSESTRAAT 153, 1075 HK AMSTERDAM, THE NETHERLANDS, A CORP OF THE NETHERLANDS reassignment ALCATEL N.V., DE LAIRESSESTRAAT 153, 1075 HK AMSTERDAM, THE NETHERLANDS, A CORP OF THE NETHERLANDS ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: INTERNATIONAL STANDARD ELECTRIC CORPORATION, A CORP OF DE
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Expired - Fee Related legal-status Critical Current

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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders or supports
    • H03H9/0504Holders or supports for bulk acoustic wave devices
    • H03H9/0514Holders or supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • GPHYSICS
    • G04HOROLOGY
    • G04FTIME-INTERVAL MEASURING
    • G04F5/00Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/04Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
    • G04F5/06Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
    • G04F5/063Constructional details
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders or supports
    • H03H9/0538Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0542Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement

Definitions

  • the present invention relates to piezoelectric resonators with electrode films deposited on the crystal and with holding members holding the crystal at vibration nodes.
  • FIG. 1 shows part of the oscillator circuit of a quartz-crystal watch module.
  • 1 is a piezoelectric resonator
  • 2 is an amplifier
  • C L1 and C L2 are load capacitors.
  • the load capacitors C L1 and C L2 can be realized therein as junction capacitances only with very great difficulty and with low Qs. Therefore, they had to be inserted into the circuit as discrete components.
  • filter circuits with piezoelectric resonators require capacitances which also had to be implemented with discrete components.
  • the present invention therefore has for its object to integrate these capacitances into the piezoelectric resonator, thereby eliminating the need for special components which would take up additional space. This object is attained by the means set forth in the claims.
  • FIG. 1a shows the oscillator circuit diagram mentioned above
  • FIG. 1b shows the circuit diagram of FIG. 1a with the equivalent circuit of the resonator
  • FIGS. 2a and 2b show a conventional circular resonator in top and sectional views
  • FIG. 3 shows a circular resonator according to the invention with additional insulating layers and films for two additional capacitances
  • FIG. 4 shows a circular resonator according to the invention with additional counter films deposited for the pads
  • FIG. 5 shows the resonator of FIG. 4 in a holder
  • FIG. 6 shows a rectangular resonator according to the invention with additional integrated capacitances whose corners rest on the rim of a circular opening, and
  • FIG. 7 shows a resonator as illustrated in FIG. 6 which is mounted by means of blocks attached at the four corners.
  • FIG. 1b the piezoelectric resonator 1 in the above-described circuit diagram of FIG. 1a has been replaced by its equivalent circuit.
  • C 1 , L 1 , and R 1 are the equivalent values for the series resonance used, and C o is the unavoidable shunt capacitance given by the capacitance of the electrode films.
  • the electrode films are designated 5 and 6, it can be seen that the film 5 is connected to a plate of the load capacitor C L1 , while the film 6 is connected to a plate of the load capacitor C L2 .
  • FIGS. 2a and 2b show a conventional circular resonator in top and cross-sectional views, respectively.
  • the piezoelectric crystal is designated 1; 5 and 6 are the electrode films, and 9 and 10 are the pads of the electrode films.
  • an electrode film 5 or 6 can be used as a plate for such a capacitance, while the necessary counter (corresponding opposite plate) film 7 or 8 is deposited on a dielectric insulating layer 13 or 14, as shown in FIG. 3.
  • 9 and 10 are the pads f the electrode films 5 and 6, and 11 and 12 are the pads of the counter films 7 and 8. While the dielectric insulating layers 13, 14 and the counter films 7, 8 are really bonded to the electrode films 5, 6 and their pads 9, 10 on the piezoelectric crystal 1 with no space therebetween, spaces are shown in FIG. 3 to permit a graphical representation.
  • FIG. 4 shows another possibility of implementing two capacitances each having one plate connected to one of the electrode films.
  • One of the plates is formed by the pads of the electrode films, while the associated counter film is deposited opposite them on the other side of the crystal plate.
  • 1 is again the crystal plate
  • 5 and 6 are the electrode plates
  • 9 and 10 are their pads
  • 7 and 8 are the counter films
  • 11 and 12 are the pads of the counter films.
  • FIGS. 5 to 7 show holders for such piezoelectric resonators with integrated capacitances.
  • the resonator shown in FIG. 4 is secured by means of three retaining springs mounted on a three-pole plug base 3.
  • the reference numerals correspond to those of FIG. 4.
  • FIG. 6 the corners of a rectangular resonator 1 rest on the rim of a circular opening at the points 4, and its films 5, 6 and 7, 8 are connected, via pads 9, 10 or directly at these corners, to conductive strips on the substrate 3 by soldering or by means of a conductive adhesive.
  • the resonator may also be supported by and attached to chamfered corners of the rectangular opening.
  • the resonator shown in FIG. 7 has the same film structure and is connected to the conductive strips on the substrate 3 via blocks at the points 4 by soldering or by means of a conductive adhesive.
  • the capacitance counter films of the resonators shown in FIGS. 4 to 7 may also be deposited on a dielectric insulating layer applied to the pads 9 and 10. In the same manner, capacitances may be implemented which use neither of the two electrode films.

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)

Abstract

If a piezoelectric crystal is used in circuits containing ICs with low supply voltage, the additional capacitors required in oscillator or filter circuits cannot be implemented as junction capacitances. To eliminate the need for additional discrete capacitors, these capacitances are implemented with additional films on the crystal.

Description

BACKGROUND OF THE INVENTION
The present invention relates to piezoelectric resonators with electrode films deposited on the crystal and with holding members holding the crystal at vibration nodes.
If such resonators are used in oscillator or filter circuits, small load, trimming or coupling capacitances are needed in most cases. As an example, FIG. 1 shows part of the oscillator circuit of a quartz-crystal watch module. 1 is a piezoelectric resonator, 2 is an amplifier, and CL1 and CL2 are load capacitors. The other divider stages present on an integrated-circuit chip used for such purposes, such as the IC 1115, are not shown. Because of the low supply voltage of such an integrated circuit, the load capacitors CL1 and CL2 can be realized therein as junction capacitances only with very great difficulty and with low Qs. Therefore, they had to be inserted into the circuit as discrete components. Similarly, filter circuits with piezoelectric resonators require capacitances which also had to be implemented with discrete components.
SUMMARY OF THE INVENTION
The present invention therefore has for its object to integrate these capacitances into the piezoelectric resonator, thereby eliminating the need for special components which would take up additional space. This object is attained by the means set forth in the claims.
BRIEF DESCRIPTION OF THE DRAWING
The invention will now be described by way of example with reference to the accompanying drawing, in which:
FIG. 1a shows the oscillator circuit diagram mentioned above;
FIG. 1b shows the circuit diagram of FIG. 1a with the equivalent circuit of the resonator;
FIGS. 2a and 2b show a conventional circular resonator in top and sectional views;
FIG. 3 shows a circular resonator according to the invention with additional insulating layers and films for two additional capacitances;
FIG. 4 shows a circular resonator according to the invention with additional counter films deposited for the pads;
FIG. 5 shows the resonator of FIG. 4 in a holder;
FIG. 6 shows a rectangular resonator according to the invention with additional integrated capacitances whose corners rest on the rim of a circular opening, and
FIG. 7 shows a resonator as illustrated in FIG. 6 which is mounted by means of blocks attached at the four corners.
DESCRIPTION OF THE PREFERRED EMBODIMENT
In FIG. 1b, the piezoelectric resonator 1 in the above-described circuit diagram of FIG. 1a has been replaced by its equivalent circuit. C1, L1, and R1 are the equivalent values for the series resonance used, and Co is the unavoidable shunt capacitance given by the capacitance of the electrode films. If the electrode films are designated 5 and 6, it can be seen that the film 5 is connected to a plate of the load capacitor CL1, while the film 6 is connected to a plate of the load capacitor CL2. FIGS. 2a and 2b show a conventional circular resonator in top and cross-sectional views, respectively. The piezoelectric crystal is designated 1; 5 and 6 are the electrode films, and 9 and 10 are the pads of the electrode films.
To accommodate capacitances on the piezoelectric plate in addition to the shunt capacitance Co provided by the electrode films, an electrode film 5 or 6 can be used as a plate for such a capacitance, while the necessary counter (corresponding opposite plate) film 7 or 8 is deposited on a dielectric insulating layer 13 or 14, as shown in FIG. 3. 9 and 10 are the pads f the electrode films 5 and 6, and 11 and 12 are the pads of the counter films 7 and 8. While the dielectric insulating layers 13, 14 and the counter films 7, 8 are really bonded to the electrode films 5, 6 and their pads 9, 10 on the piezoelectric crystal 1 with no space therebetween, spaces are shown in FIG. 3 to permit a graphical representation.
FIG. 4 shows another possibility of implementing two capacitances each having one plate connected to one of the electrode films. One of the plates is formed by the pads of the electrode films, while the associated counter film is deposited opposite them on the other side of the crystal plate. 1 is again the crystal plate, 5 and 6 (invisible) are the electrode plates, 9 and 10 are their pads, 7 and 8 are the counter films, and 11 and 12 are the pads of the counter films.
FIGS. 5 to 7 show holders for such piezoelectric resonators with integrated capacitances. In the arrangement of FIG. 5, the resonator shown in FIG. 4 is secured by means of three retaining springs mounted on a three-pole plug base 3. The reference numerals correspond to those of FIG. 4. In FIG. 6, the corners of a rectangular resonator 1 rest on the rim of a circular opening at the points 4, and its films 5, 6 and 7, 8 are connected, via pads 9, 10 or directly at these corners, to conductive strips on the substrate 3 by soldering or by means of a conductive adhesive. The resonator may also be supported by and attached to chamfered corners of the rectangular opening. The resonator shown in FIG. 7 has the same film structure and is connected to the conductive strips on the substrate 3 via blocks at the points 4 by soldering or by means of a conductive adhesive.
It is obvious that, as in the case of the resonator of FIG. 3, the capacitance counter films of the resonators shown in FIGS. 4 to 7 may also be deposited on a dielectric insulating layer applied to the pads 9 and 10. In the same manner, capacitances may be implemented which use neither of the two electrode films.

Claims (11)

I claim:
1. A piezoelectric resonator arrangement comprising:
a substrate having an opening;
a resonator crystal;
at least two electrode films positioned on said crystal;
means for holding said crystal on said substrate and over said opening at the vibration nodes of said crystal;
at least two capacitance films deposited on said crystal to provide circuit capacitance; and
conductive means for providing electrical connection to said capacitance films via said holding means.
2. The piezoelectric resonator arrangement as claimed in claim 1 wherein one of each of said electrode films and capacitance films is positioned on one of the sides and the other of said electrode and capacitance films is positioned on the opposite side of the crystal such that each capacitance film is superimposed on the associated electrode film to form said circuit capacitance.
3. The piezoelectric resonator arrangement as claimed in claim 1 wherein one of said capacitance films is located on one side and the other capacitance film is located on the opposite side of said crystal and wherein said crystal constitutes a dielectric, said films and said crystal forming said circuit capacitance.
4. The piezoelectric resonator arrangement as claimed in claim 2, further comprising an insulating layer positioned between each of said capacitance films and said electrode films to form said circuit capacitance.
5. The piezoelectric resonator arrangement as claimed in claim 1 wherein the area of said capacitance films is varied to adjust said circuit capacitance.
6. The piezoelectric resonator arrangement is claimed in claim 1 wherein said opening is rectangular and has chamfered corners and said holding means is positioned on said chamfered corners.
7. The piezoelectric resonator arrangement as claimed in claim 1 wherein said holding means is a plurality of blocks.
8. The piezoelectric resonator arrangement as claimed in claim 1 wherein said opening is circular and said holding means is positioned on the rim of said circular opening.
9. The piezoelectric resonator arrangement as claimed in claim 1 wherein said holding means is a conductive adhesive.
10. An oscillator arrangement comprising:
a piezoelectric resonator arrangement including
a substrate an opening
a resonator crystal,
at least two electrode films positioned on said crystal,
means for holding said crystal on said substrate and over said opening at the vibration nodes of said crystal,
at least two capacitance films deposited on said crystal to provide load capacitance, and
conductive means for providing electrical connection to said capacitance films via said holding means.
11. A filter circuit arrangement comprising:
a piezoelectric resonator arrangement including
a substrate an opening,
a resonator crystal,
a least two electrode films positioned on said crystal,
means for holding said crystal on said substrate and over said opening at the vibration nodes of said crystal,
at least two capacitance films deposited on said crystal to provide circuit capacitance, and
conductive means for providing electrical connection to said capacitance films via said holding means.
US06/306,557 1980-10-10 1981-09-28 Piezoelectric resonator with integrated capacitances Expired - Fee Related US4464599A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3038260 1980-10-10
DE19803038260 DE3038260A1 (en) 1980-10-10 1980-10-10 PIEZOELECTRIC RESONATOR WITH INTEGRATED CAPACITIES

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US4464599A true US4464599A (en) 1984-08-07

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JP (1) JPS57127317A (en)
DE (1) DE3038260A1 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4719384A (en) * 1985-09-24 1988-01-12 Centre National De La Recherche Scientifique Miniature thermostatted oscillator
US5369862A (en) * 1990-02-26 1994-12-06 Murata Manufacturing Co., Ltd. Method of producing a piezoelectric device
US5406230A (en) * 1992-02-25 1995-04-11 Murata Manufacturing Co., Ltd. Chip type oscillator and oscillation circuit using this oscillator
US5892317A (en) * 1985-08-05 1999-04-06 Canon Kabushiki Kaisha Vibration wave motor
US6377135B1 (en) * 1999-08-27 2002-04-23 Murata Manufacturing Co., Ltd. Piezoelectric resonator and piezoelectric resonant element
US20030015942A1 (en) * 2001-07-09 2003-01-23 Murata Manufacturing Co., Ltd. Piezoelectric electroacoustic transducer
US20110073240A1 (en) * 2009-09-29 2011-03-31 Fujitsu Limited Crystal-oscillator fabricating apparatus and method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3488530A (en) * 1968-04-22 1970-01-06 North American Rockwell Piezoelectric microresonator
US3527967A (en) * 1968-06-04 1970-09-08 Gen Electric & English Electri Monolithic crystal filters with ultrasonically lossy mounting means
US4013982A (en) * 1974-10-22 1977-03-22 International Standard Electric Corporation Piezoelectric crystal unit
US4283650A (en) * 1978-03-16 1981-08-11 Sharp Kabushiki Kaisha Piezo-vibrator unit ceramic package with integral capacitor
US4329613A (en) * 1979-05-10 1982-05-11 Siemens Aktiengesellschaft Resonator component module

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53131788A (en) * 1977-04-22 1978-11-16 Seikosha Kk Crystal oscillator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3488530A (en) * 1968-04-22 1970-01-06 North American Rockwell Piezoelectric microresonator
US3527967A (en) * 1968-06-04 1970-09-08 Gen Electric & English Electri Monolithic crystal filters with ultrasonically lossy mounting means
US4013982A (en) * 1974-10-22 1977-03-22 International Standard Electric Corporation Piezoelectric crystal unit
US4283650A (en) * 1978-03-16 1981-08-11 Sharp Kabushiki Kaisha Piezo-vibrator unit ceramic package with integral capacitor
US4329613A (en) * 1979-05-10 1982-05-11 Siemens Aktiengesellschaft Resonator component module

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5892317A (en) * 1985-08-05 1999-04-06 Canon Kabushiki Kaisha Vibration wave motor
US5952766A (en) * 1985-08-05 1999-09-14 Canon Kabushiki Kaisha Vibration wave motor
US4719384A (en) * 1985-09-24 1988-01-12 Centre National De La Recherche Scientifique Miniature thermostatted oscillator
US5369862A (en) * 1990-02-26 1994-12-06 Murata Manufacturing Co., Ltd. Method of producing a piezoelectric device
US5406230A (en) * 1992-02-25 1995-04-11 Murata Manufacturing Co., Ltd. Chip type oscillator and oscillation circuit using this oscillator
US6377135B1 (en) * 1999-08-27 2002-04-23 Murata Manufacturing Co., Ltd. Piezoelectric resonator and piezoelectric resonant element
US20030015942A1 (en) * 2001-07-09 2003-01-23 Murata Manufacturing Co., Ltd. Piezoelectric electroacoustic transducer
US6894423B2 (en) * 2001-07-09 2005-05-17 Murata Manufacturing Co., Ltd. Piezoelectric electroacoustic transducer
US20110073240A1 (en) * 2009-09-29 2011-03-31 Fujitsu Limited Crystal-oscillator fabricating apparatus and method
US8968498B2 (en) * 2009-09-29 2015-03-03 Fujitsu Limited Crystal-oscillator fabricating apparatus and method

Also Published As

Publication number Publication date
DE3038260A1 (en) 1982-04-29
JPS57127317A (en) 1982-08-07

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Owner name: INTERNATIONAL STANDARD ELECTRIC CORPORATION; 320 P

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:BRIESE, WOLFGANG;REEL/FRAME:003931/0102

Effective date: 19810918

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Owner name: ALCATEL N.V., DE LAIRESSESTRAAT 153, 1075 HK AMSTE

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Effective date: 19920809

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