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US3609062A - Getter pump - Google Patents

Getter pump Download PDF

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Publication number
US3609062A
US3609062A US866336A US3609062DA US3609062A US 3609062 A US3609062 A US 3609062A US 866336 A US866336 A US 866336A US 3609062D A US3609062D A US 3609062DA US 3609062 A US3609062 A US 3609062A
Authority
US
United States
Prior art keywords
getter
pump
strip
getter material
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US866336A
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English (en)
Inventor
Mario Zucchinelli
Bruno Ferrario
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Application granted granted Critical
Publication of US3609062A publication Critical patent/US3609062A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18Means for absorbing or adsorbing gas, e.g. by gettering

Definitions

  • Getter pumps have found wide acceptance for producing and maintaining vacuum in closed vessels. These getter pumps generally have a substrate coated with a nonevaporable getter material. In these prior pumps the substrate is horizontally pleated and then formed into a circle which is coaxially disposed around a central heater. In operation the heater heats the substrate and the nonevaporable getter material rendering it sorptive to active gases such as oxygen and nitrogen. The nonevaporable getter material then sorbs these gases reducing the pressure in the closed vessel. While such pumps have found great acceptance, they suffer from a number of disadvantages which has limited their wider use.
  • Another object is to provide getter pumps which can be manufactured with a large total sorptive capacity while having a single pleated strip.
  • a further object is to provide getter pumps having an increased pumping speed.
  • a still further object is to provide getter pumps which do not require the presence of an external retainer to coaxially position the pleated strip around the central heater.
  • Yet another object is to provide getter pumps wherein substantially all of the getter material is useful for pumping.
  • FIG. 1 is a partially cut away view of the getter pump of the present invention taken along line 11 of FIG. 2;
  • FIG. 2 is a top view of the getter pump of FIG. I.
  • FIG. 3 is a partially cutaway view of a prior getter pump not representative of those of the present invention.
  • a pump having a central axis and comprising an upper retainer 11 and a lower retainer 12.
  • the upper retainer 11 can be made as a single piece but as shown is made of two pieces attached to one another.
  • the upper retainer 11 comprises a cylindrical sleeve 13 and a flange 14.
  • the lower retainer 12 is identical also having a sleeve and a flange 16.
  • the retainers 11 and 12 can be attached to a strip 17 by any convenient means such as spot welding. Circularly disposed around the retainers 11 and 12 in contact with sleeves 13 and 15 and flanges 14 and 16 is the strip 17 the central portion of which is coated with a nonevaporable getter material 18.
  • the strip 17 has a plurality of discrete segments 19. Adjacent discrete segments 19 are connected to each other by means of bridging attachments 20 lying in a getter-free margin 21 of the strip 17. Adjacent discrete segments 19 are connected via bridging attachments 20 whereas alternate discrete portions 19 are connected via bridging attachments 22.
  • the bridging attachments 20 and 22 constitute folds in the strip 17 which are along lines radial to the axis of the pump 10.
  • Surrounding the strip 17 is an upper band 23 and a lower band 24 attached to the strip 17 by any convenient means such as spot welds shown schematically as indentations 25.
  • a heater 30 comprising an insulator 31 wound with a wire 32 which can be connected to a source of power not shown.
  • the strip 17 can be of any suitable material, but is preferably a metal such as iron or stainless steel, which is softer than the getter material 18.
  • the getter material 18 can be any well-known nonevaporable getter material, examples of which include, among others, zirconium, titanium, tantalum or niobium, as well as alloys of two or more of the above.
  • the preferred getter material 18 is an alloy of zirconium and aluminum containing 5 to 30 weight percent aluminum, balance zirconium and most preferably 16 percent aluminum and 84 percent zirconium available commercially as StlOl from S. A. E. S. Getters S. p. A. of Milan, Italy.
  • the getter material 18 is employed as a powder in order to have a high surface area to mass ratio facilitating gas sorption.
  • the powder is preferably one which passes through a U.S. standard screen of I40 mesh/inch and is attached to the strip 17 by any suitable means such as rolling or pressing which does not materially reduce the total surface area of the powder.
  • the pump 10 is placed in the tube or vessel to be evacuated and the wire 32 connected in series with a switch and a source of power not shown, preferably outside the vessel.
  • the vessel is then evacuated to the extent possible by any suitable means, such as a mechanical pump, a zeolite pump, a sputter ion pump, or a diffusion pump in order to conserve the pumping capacity of the pump 10.
  • the switch is closed, causing the wire 32 to heat. This heat is radiated to the strip 17 and the getter material 18 activating the getter material 18 is a known manner by driving previously sorbed gases to the center of each particle of getter material leaving a fresh and clean gas-sorptive surface.
  • Power is supplied to the wire 32 such that the temperature of the getter material 18 is held at 600 to 900 and preferably 700 to 800 C. At temperatures below the broad range activation is too slow to be practical whereas at temperatures above this range sinterization of the particles of the getter material 18 begins to occur together with diffusion of the metal of the strip 17 both of which tend to reduce the gas-sorptive capacity of the getter material 18.
  • the getter material 18 is gas sorptive at room temperature but the rate of gas sorption can be increased by heating the getter material 18 as described above or more preferably at temperatures of 250 to 400 C. to avoid the evolution of hydrogen, which can be present in the getter material as a solid solution due to previous hydrogen sorption.
  • the getter material 18 remains gas sorptive after heating is terminated and continues to sorb gases evolved during subsequent running of the system.
  • Other methods of heating the strip 17 such as by passing a current through it can also be employed.
  • Pump 40 comprises an upper retainer 41 and a plurality of horizontally pleated strips 42 and 43, each of which is coated with the getter material 44.
  • the strips 42 and 43 are coaxially held by a screen 45 and are positioned around a central heater not shown.
  • the discrete portions of each strip 42 and 43 are attached to one another by small bridging attachments 46.
  • the pumping rate is further reduced by virtue of the impedance to gas flow caused by the screen 45 and retainer 41.
  • no corresponding screen or cover is required in the pumps 10 of the present invention.
  • the discrete portions 19 are spaced from one another permitting effective sorption by all of the getter material 18.
  • the getter pumps of the present invention find utility as supplements to sputter ion pumps and diffusion pumps and can be used to create and maintain vacuum in continuously pumped vacuum systems as well as in sorbed vacuum systems. These pumps can also be permanently installed in klystron tubes and image intensifier tubes as so-called appendage pumps.
  • a getter pump having a central axis and a nonevaporable getter material coated on a substrate wherein the substrate is folded along lines which are radial to the central axis.
  • the getter pump of claim 2 wherein the getter material is an alloy of 5 to 30 weight percent aluminum, balance: zirconi- 4.
  • the getter pump of claim 3 wherein the getter material is an alloy of 16 percent aluminum and 84 percent zirconium.
  • a getter pump having a central axis the pump comprising:
  • a getter pump for sorbing gases having a vertical axis and 5 lar intervals along lines which are radial to said vertical axis.
  • a getter pump comprising:
  • A. an upper retainer comprising a cylindrical sleeve, and a flange attached to the sleeve;
  • a lower retainer comprising a cylindrical sleeve, and a flange attached to the sleeve;
  • strip comprising a plurality of coaxially disposed, substantially parallel discrete segments wherein adjacent discrete segments are attached to each other at one end and adjacent alternate discrete segments are attached to each other at the other end, the ends of said discrete segments resting on facing portions of the flanges and outside portions of the sleeves;

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)
US866336A 1968-10-28 1969-10-14 Getter pump Expired - Lifetime US3609062A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT2303768 1968-10-28

Publications (1)

Publication Number Publication Date
US3609062A true US3609062A (en) 1971-09-28

Family

ID=11203134

Family Applications (1)

Application Number Title Priority Date Filing Date
US866336A Expired - Lifetime US3609062A (en) 1968-10-28 1969-10-14 Getter pump

Country Status (6)

Country Link
US (1) US3609062A (nl)
JP (1) JPS4917764B1 (nl)
DE (1) DE1947413A1 (nl)
FR (1) FR2021693B1 (nl)
GB (1) GB1281227A (nl)
NL (1) NL163055C (nl)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870917A (en) * 1971-05-10 1975-03-11 Itt Discharge device including channel type electron multiplier having ion adsorptive layer
DE2446833A1 (de) * 1973-10-01 1975-04-10 Getters Spa Getterpumpe
DE2747186A1 (de) * 1976-11-03 1978-05-18 Getters Spa Modulare getter-pumpe
EP0144523A2 (de) * 1983-09-09 1985-06-19 Siemens Aktiengesellschaft Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
EP0146685A2 (de) * 1983-09-09 1985-07-03 Siemens Aktiengesellschaft Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
US5154582A (en) * 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
US5161955A (en) * 1991-08-20 1992-11-10 Danielson Associates, Inc. High vacuum pump using bulk getter material
US20040051507A1 (en) * 2000-08-10 2004-03-18 Gabrys Christopher W. Long-life vacuum system for energy storage flywheels
US20110155125A1 (en) * 2008-06-11 2011-06-30 Cristoforo Benvenuti Evecuated solar panel with a non evaporable getter pump
US20160069338A1 (en) * 2014-08-08 2016-03-10 Vaclab Inc. Non-evaporable getter and non-evaporable getter pump
US20160141160A1 (en) * 2014-11-19 2016-05-19 Hamilton Sundstrand Corporation Ion pumps and ion pump elements

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL149629B (nl) * 1972-10-18 1976-05-17 Hazemeijer Bv Vacuuemschakelaar met vangstofelement.

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2149658A (en) * 1936-03-12 1939-03-07 Tungsten Electrodeposit Corp Thermionic tube
US2482043A (en) * 1942-05-02 1949-09-13 Hartford Nat Bank & Trust Co Gettering for discharge tubes
US2491284A (en) * 1946-12-13 1949-12-13 Bell Telephone Labor Inc Electrode for electron discharge devices and method of making the same
US3100274A (en) * 1959-12-17 1963-08-06 Raytheon Co Electron tube with electrode having titanium surface serving as getter

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2149658A (en) * 1936-03-12 1939-03-07 Tungsten Electrodeposit Corp Thermionic tube
US2482043A (en) * 1942-05-02 1949-09-13 Hartford Nat Bank & Trust Co Gettering for discharge tubes
US2491284A (en) * 1946-12-13 1949-12-13 Bell Telephone Labor Inc Electrode for electron discharge devices and method of making the same
US3100274A (en) * 1959-12-17 1963-08-06 Raytheon Co Electron tube with electrode having titanium surface serving as getter

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870917A (en) * 1971-05-10 1975-03-11 Itt Discharge device including channel type electron multiplier having ion adsorptive layer
DE2446833A1 (de) * 1973-10-01 1975-04-10 Getters Spa Getterpumpe
DE2747186A1 (de) * 1976-11-03 1978-05-18 Getters Spa Modulare getter-pumpe
FR2370357A1 (fr) * 1976-11-03 1978-06-02 Getters Spa Dispositif d'absorption modulaire a getter ou a substance d'absorption de gaz residuels
EP0144523A2 (de) * 1983-09-09 1985-06-19 Siemens Aktiengesellschaft Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
EP0146685A2 (de) * 1983-09-09 1985-07-03 Siemens Aktiengesellschaft Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
EP0146685A3 (de) * 1983-09-09 1986-10-01 Siemens Aktiengesellschaft Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
EP0144523A3 (de) * 1983-09-09 1986-10-08 Siemens Aktiengesellschaft Getter-Sorptionspumpe mit Wärmespeicher für Hochvakuum- und Gasentladungsanlagen
US5154582A (en) * 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
US5161955A (en) * 1991-08-20 1992-11-10 Danielson Associates, Inc. High vacuum pump using bulk getter material
US20040051507A1 (en) * 2000-08-10 2004-03-18 Gabrys Christopher W. Long-life vacuum system for energy storage flywheels
US7053589B2 (en) * 2000-08-10 2006-05-30 Gabrys Christopher W Long-life vacuum system for energy storage flywheels
US20110155125A1 (en) * 2008-06-11 2011-06-30 Cristoforo Benvenuti Evecuated solar panel with a non evaporable getter pump
US20160069338A1 (en) * 2014-08-08 2016-03-10 Vaclab Inc. Non-evaporable getter and non-evaporable getter pump
US9945368B2 (en) * 2014-08-08 2018-04-17 Vaclab Inc. Non-evaporable getter and non-evaporable getter pump
US20160141160A1 (en) * 2014-11-19 2016-05-19 Hamilton Sundstrand Corporation Ion pumps and ion pump elements
US11508564B2 (en) * 2014-11-19 2022-11-22 Hamilton Sundstrand Corporation Ion pumps and ion pump elements

Also Published As

Publication number Publication date
DE1947413A1 (de) 1970-04-30
NL163055C (nl) 1980-07-15
FR2021693A1 (nl) 1970-07-24
FR2021693B1 (nl) 1973-03-16
GB1281227A (en) 1972-07-12
NL6915137A (nl) 1970-05-01
JPS4917764B1 (nl) 1974-05-04

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