US3137595A - Method of producing boron-gold alloy foil - Google Patents
Method of producing boron-gold alloy foil Download PDFInfo
- Publication number
- US3137595A US3137595A US21591A US2159160A US3137595A US 3137595 A US3137595 A US 3137595A US 21591 A US21591 A US 21591A US 2159160 A US2159160 A US 2159160A US 3137595 A US3137595 A US 3137595A
- Authority
- US
- United States
- Prior art keywords
- boron
- gold
- foil
- powder
- mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 19
- 229910001020 Au alloy Inorganic materials 0.000 title claims description 8
- OPEKUPPJGIMIDT-UHFFFAOYSA-N boron gold Chemical compound [B].[Au] OPEKUPPJGIMIDT-UHFFFAOYSA-N 0.000 title claims description 8
- 239000003353 gold alloy Substances 0.000 title claims description 8
- 239000011888 foil Substances 0.000 title description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 43
- 239000000463 material Substances 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 16
- 238000002844 melting Methods 0.000 claims description 15
- 230000008018 melting Effects 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 13
- 238000005496 tempering Methods 0.000 claims description 11
- 238000002156 mixing Methods 0.000 claims description 5
- 238000005245 sintering Methods 0.000 claims description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 40
- 229910052796 boron Inorganic materials 0.000 description 30
- 229910052737 gold Inorganic materials 0.000 description 22
- 239000010931 gold Substances 0.000 description 22
- 238000005275 alloying Methods 0.000 description 11
- 229910052797 bismuth Inorganic materials 0.000 description 7
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910052717 sulfur Inorganic materials 0.000 description 5
- 239000011593 sulfur Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 241000416536 Euproctis pseudoconspersa Species 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- OFLYIWITHZJFLS-UHFFFAOYSA-N [Si].[Au] Chemical compound [Si].[Au] OFLYIWITHZJFLS-UHFFFAOYSA-N 0.000 description 1
- 239000000370 acceptor Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012899 de-mixing Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/02—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the solid state
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/02—Alloys based on gold
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Definitions
- This invention is based upon our discovery that the boron-containing gold required for such purposes is advantageously produced by first intimately mixing gold powder and boron powder, then compacting the mixture under pressure, thereafter tempering the pressed body at a temperature below the melting temperature of gold, subsequently melting the pressed and sintered body, and thereafter rolling the remelted material down to foil thickness.
- This discovery was made in the face of prior views that boron cannot be melted together with gold because it tends to become expelled from the melt, as explained below.
- solid boron be introduced into the liquid gold-silicon alloy. This can be done, for example, by first mechanically rolling amorphous boron in powder form into a gold foil or by spreading the solid boron in fine distribution upon the foil, whereafter the gold foil is placed upon the semiconductor body and the assembly is subsequently heated. Then the gold forms a liquid alloy with a portion of the semiconductor material, in which alloy the boron penetrates down to the alloying front.
- the boron content of the foil may be 0.001 to 0.3%, being preferably about 0.1%, in respect to the gold, all percentages herein being by Weight.
- a preferred embodiment of the method is as follows.
- Gold powder and boron powder are intimately mixed with each other and are then subjected to pressure.
- the mixture of gold powder and boron powder may contain 0.01 to 0.5% boron.
- An advantageous embodiment of the invention contained 0.35% boron in the powder mixture.
- the finished foil then contains about 0.3% b0- ron, because slight quantities of boron precipitate at the external surfaces. It has been found preferable to apply the highest feasible pressure, for example in the order of 10,000 atm.
- the preferred range of the pressures to be employed is from 10 to 100,000 atmospheres, with a pressure of at least 2000 atmospheres desirable, since higher pressures yield better results.
- the compressed and thus shaped body is tempered in vacuum or protective atmosphere such as nitrogen gas at about 900 C. for several days, preferably at least 48 hours.
- the value of 48 hours as minimum period for the processing time is suitable. Very good results were obtained with periods of 50 to hours.
- the tempering temperature must in any event remain below the melting temperature of gold (1,063 C.).
- the tempering temperature should be at least 825 C. with a temperature of about 900 C. having been found to be particularly favorable.
- the boron content is determined of a portion of the pressed body, and the other portion is melted together with a correspondingly dimensioned quantity of Suitgether with the gold.
- a portion of bismuth may be roasted, i.e., heated with ingress of air, and another portion of bismuth may be sulfurized, i.e., heated in pulverulent form together with sulfur flower to melting.
- corresponding quantities of these two types of prepared bismuth are added to the tempered pressed material, if desired together with another portion of untreated bismuth.
- These melting operations are preferably also performed in vacuum or under protective gas.
- a method of producing boron-containing gold foil for p-doping a body of essentially monocrystalline silicon semiconductor material comprising intimately mixing gold powder and boron powder,'the mixture containing from 0. 01 to 0.5% by'weight of boron powder, compacting the mixture under a pressure between and.
- the boron-containing gold foil having from 0.001 to 0.01% of sulfur in-' corporated therein.
- a method of producing boron-containing gold foil for p-doping a body of essentially monocrystalline silia con semiconductor material comprising intimately mixing gold powder and boron powder, the mixture containing from 0.01 to 0.5 by weight of boron powder, compacting the mixture under pressure, tempering and sintering the compacted mixture at a temperature below the melting point of gold for a period of time suificient to form a boron-goldalloy, subsequently melting the sintered, pressed boron-gold alloy, and thereafter forming the material into a foil, the tempering being carried out for at least a day at atemperature of at least about 900 C., the compacting being at a pressure of at least 2,000 atmospheres. a j V 9.
- a method of producing boron-containing gold foil for p-doping a body" of essentiallymonocrystalline silicon semiconductor material comprising intimately mixing gold powder and boron powder, the mixture containpressure and tempering and sintering the compacted mixture for at least two days at a temperature-of at least 825 C. but below the melting temperature of gold, while under said pressure, subsequently melting the pressed body, and thereafter rolling the re -solidified material down to a foil.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Powder Metallurgy (AREA)
- Contacts (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES0062963 | 1959-05-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3137595A true US3137595A (en) | 1964-06-16 |
Family
ID=7496010
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US21591A Expired - Lifetime US3137595A (en) | 1959-05-12 | 1960-04-12 | Method of producing boron-gold alloy foil |
Country Status (5)
Country | Link |
---|---|
US (1) | US3137595A (fr) |
BE (2) | BE590762A (fr) |
CH (1) | CH398797A (fr) |
FR (1) | FR1244844A (fr) |
GB (1) | GB911235A (fr) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3211550A (en) * | 1959-11-02 | 1965-10-12 | Hughes Aircraft Co | Gold boron alloy and method of making the same |
US3214653A (en) * | 1959-11-02 | 1965-10-26 | Hughes Aircraft Co | Gold bonded, boron containing semiconductor devices |
US3339269A (en) * | 1962-03-15 | 1967-09-05 | Gen Motors Corp | Method of bonding |
US4005454A (en) * | 1975-04-05 | 1977-01-25 | Semikron Gesellschaft Fur Gleichrichterbau Und Elektronik M.B.H. | Semiconductor device having a solderable contacting coating on its opposite surfaces |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2686118A (en) * | 1952-12-23 | 1954-08-10 | Ontario Research Foundation | Method of making metal products directly from ores |
US2701326A (en) * | 1949-11-30 | 1955-02-01 | Bell Telephone Labor Inc | Semiconductor translating device |
US2937113A (en) * | 1956-05-15 | 1960-05-17 | Siemens Ag | Method of producing an electrodecarrying silicon semiconductor device |
US2965519A (en) * | 1958-11-06 | 1960-12-20 | Bell Telephone Labor Inc | Method of making improved contacts to semiconductors |
US3009840A (en) * | 1958-02-04 | 1961-11-21 | Siemens Ag | Method of producing a semiconductor device of the junction type |
US3068127A (en) * | 1959-06-02 | 1962-12-11 | Siemens Ag | Method of producing a highly doped p-type zone and an appertaining contact on a semiconductor crystal |
-
0
- BE BE590792D patent/BE590792A/xx unknown
- BE BE590762D patent/BE590762A/xx unknown
-
1960
- 1960-01-11 FR FR815343A patent/FR1244844A/fr not_active Expired
- 1960-01-18 GB GB1783/60A patent/GB911235A/en not_active Expired
- 1960-04-12 US US21591A patent/US3137595A/en not_active Expired - Lifetime
- 1960-04-20 CH CH440660A patent/CH398797A/de unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2701326A (en) * | 1949-11-30 | 1955-02-01 | Bell Telephone Labor Inc | Semiconductor translating device |
US2686118A (en) * | 1952-12-23 | 1954-08-10 | Ontario Research Foundation | Method of making metal products directly from ores |
US2937113A (en) * | 1956-05-15 | 1960-05-17 | Siemens Ag | Method of producing an electrodecarrying silicon semiconductor device |
US2974074A (en) * | 1956-05-15 | 1961-03-07 | Siemens Ag | Method of producing a silicon semiconductor device |
US3009840A (en) * | 1958-02-04 | 1961-11-21 | Siemens Ag | Method of producing a semiconductor device of the junction type |
US2965519A (en) * | 1958-11-06 | 1960-12-20 | Bell Telephone Labor Inc | Method of making improved contacts to semiconductors |
US3068127A (en) * | 1959-06-02 | 1962-12-11 | Siemens Ag | Method of producing a highly doped p-type zone and an appertaining contact on a semiconductor crystal |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3211550A (en) * | 1959-11-02 | 1965-10-12 | Hughes Aircraft Co | Gold boron alloy and method of making the same |
US3214653A (en) * | 1959-11-02 | 1965-10-26 | Hughes Aircraft Co | Gold bonded, boron containing semiconductor devices |
US3339269A (en) * | 1962-03-15 | 1967-09-05 | Gen Motors Corp | Method of bonding |
US4005454A (en) * | 1975-04-05 | 1977-01-25 | Semikron Gesellschaft Fur Gleichrichterbau Und Elektronik M.B.H. | Semiconductor device having a solderable contacting coating on its opposite surfaces |
Also Published As
Publication number | Publication date |
---|---|
BE590792A (fr) | |
FR1244844A (fr) | 1960-10-28 |
CH398797A (de) | 1966-03-15 |
GB911235A (en) | 1962-11-21 |
BE590762A (fr) |
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