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US2512947A - Electron microscope - Google Patents

Electron microscope Download PDF

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Publication number
US2512947A
US2512947A US766792A US76679247A US2512947A US 2512947 A US2512947 A US 2512947A US 766792 A US766792 A US 766792A US 76679247 A US76679247 A US 76679247A US 2512947 A US2512947 A US 2512947A
Authority
US
United States
Prior art keywords
tube
apertures
specimen
vessel
rollers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US766792A
Other languages
English (en)
Inventor
Poole Jan Bart Le
Verhoeff Adrianus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hartford National Bank and Trust Co
Original Assignee
Hartford National Bank and Trust Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hartford National Bank and Trust Co filed Critical Hartford National Bank and Trust Co
Application granted granted Critical
Publication of US2512947A publication Critical patent/US2512947A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Definitions

  • the invention relates "to electron microscopes and more'particularlyl to 'an electron microscope 'It is an object of the present invention to provide ⁇ a nev.rr and novel specimen-holder arrangement for an electron microscope.
  • a stopper which carries the objectl holder; Along the lWall of this tube are provided diametricaliapertures through which the electron beam of the microscope may pass inl a given position ofthe tube. From the given position these apertures are hermetically closed by means of a solid body bearing against the tube at the apertures.
  • the removal of the ⁇ object-holder which supports the specimen to be examined is onli7 possible vwhen theA tube 'occupies 'a position in which the diametrical a'pertures'iprovided to permit the passage of the electron ⁇ 'beams are closed.
  • the stopper may be Withdrawnin the direction of (ol. 25o-49.5)
  • the specimen under ,observation isV Ilikely to become contaminated by scraps of material ground off the rollers.
  • rthis disadvantage may be obviated by mounting the rollers ⁇ on metal ⁇ spindles and by giving the tube a prolesuch thatl in the openposition .when the electron ⁇ beam may through the aperl tures these spindles bear against the tube and the rollers are-clear thereofyvhereas in the closed position in which passage of the electron beam is lpreventedthe spindles are positioned in depressions of the tube and the .rollers are pressed against the apertures to. close them.
  • p Fig. 1 is a v.cross-sectional view ,through .the
  • the tube is provided with a hand wheel 5.
  • the tube is closed by a stopper having secured to it an object-holder 'I which extends, within the tube 2 over a, length such that' the specimen 8 provided at the end of the holder is located in the centrally 'passing electron beam.
  • object-holder 'I which extends, within the tube 2 over a, length such that' the specimen 8 provided at the end of the holder is located in the centrally 'passing electron beam.
  • two diametrical aper tures 9 and I0 are provided which allow the electron beam to pass through the tube.wal1'.A
  • the stopper 6 may then be taken from the tube and with itvthe object holder 'I and the specimen 8 are removed.l After'the stopper '6 'has been replaced upon the tube 2 lthe latter may be moved again into' its previous position in 'which the apertures 9 and I0 are located in alignment with the apertures I2 and I2a and the object is tr'ansradiatedv by the electron beam. The rair which, after the removal of the stopper 6 entered thetube 2 to llit may now pass through kvtheapertures 9 and III into the discharge vessel,
  • the quantity of airlwhich may leak v into the vessel during the change of specimens is even less than in the aforementioned construction.
  • the object-holder I8 has ra diameter'lwhich is substantially equalto the internal diameter of the tube I3 so that the I interior of thel tube I3 is lled for the major vpart and there remains only little space for air leakageinto the vessel.
  • the sluicing device is provided on a partition of a metal portion of the wall fof discharge vessel as shown more clearly in Fig. 3.
  • FIG. 2r is a cross-section of the vessel taken through a thicker portion ⁇ of this partition' and'Fig.' 3 is a cross-sectional view in a plane passing through the axis perpendicular to the object-holder.
  • Fig. 4 shows in a perspective l view, on a rlarger scale,l a detail of a bayonetl ma metarwau vIt.
  • the tube itself is.A eiosesby means of a stufling box IS'throu'ghwhich passes vided in the form of hooks and 2I gripping Abehind a rim 22 of the knob I9 prevents the ⁇ withdrawal of the object-holder or lspecimenholder I8.
  • knob I9 When the knob I9 is turned a pin 23-secured to the tube I3 and passing through the knob I9 is carried along with it with the result that the tube I3 is rotated about its axis.
  • the knob aperture through which the pin 23 passes Y has an elongated shape so that the pin through a certain'vangle.
  • valve action is effected by valves in the form of rollers 21 and 28 mounted onI spindles 29 and 30 which are pressed'towards'the tube I3 by'springs 3I and 32. .
  • rollers serve to close the beam apertures 25 and 26 of' the tube I3. If, as shown in Figs. 2 and 3, the tube I3 has been turned so that the'beam apertures lie in the axis of'the discharge vessel, the rollers 2l and 28are clear ⁇ of the tube since as may be 'seen in the cross-section taken through thebeam apertures the tube has a reduced external diameter so that solely the spindles bear against the tube.
  • the spindles 29 and 30 consist' of metal whereas, in order to ensure a completely vacuum-tight sea1 the'rollers -21 and 28 are made of rubber or similar elastic material. Since the rollers are normally'clear ofthe tube and are pressed thereon onlyin the closed position Vof the tube they are substantially cured to the holder I8 remains free from impurities which otherwise might bev present due to this wear. f.
  • knob I9 is providedwith a rib36in such manner that in the mid-position of the object-holder it is, with respect to the tube in alignment with the pin 23'passing through the knob. Thus'it In the longitudinal section taken through is possible by touch to determine the position of the specimen within the tube.
  • An electron microscope comprising a discharge vessel, a tube with a closed bottom extending into said vessel and intersecting the axis thereof, said tube being hermetically sealed to said vessel and having apertures for the passage of the electron beam, means for rotating said tube from the outside, an exchangeable carrier arranged in said tube and adapted to support a specimen for observation through said beam aperture, a member for closing said tube and supporting said specimen carrier, and means for closing said beam apertures when said tube is rotated to a position in which said tube closing member is ready for removal.
  • An electron microscope comprising a discharge vessel, a tube with a closed bottom extending into said vessel and intersecting the axis thereof at right angles, said tube being hermetically sealed to said vessel and having apertures for the passage of the electron beam, means for rotating said tube from the outside, an exchangeable carrier arranged in said tube and adapted to support a specimen for observation through said beam apertures, a stopper for closing said tube and supporting said specimen carrier, and a solid body bearing against the tube for closing said beam apertures when said tube is rotated to a position in which said tube closing member is ready for removal.
  • An electron microscope as claimed in claim 1, comprising a locking means for securing said tube closing member while the beam apertures are in open position.
  • An electron microscope comprising a discharge vessel, a tube with a closed bottom extending into said vessel and intersecting the axis thereof at right angles, said tube being hermetically sealed to said vessel and having apertures for the passage of the electron beam, an exchangeable carrier arranged in said tube and adapted to support a specimen for observation through said beam apertures, a stopper for closing said tube and supporting said specimen carrier, a handle adapted to rotate the tube and to lift the specimen carrier out of said tube, a bayonet locking device for securing the handle against withdrawal while the beam apertures are in open position, and means for closing the beam fio apertures when upon rotation of the tube the handle becomes unlocked and ready for withdrawal.
  • An electron microscope comprising a discharge vessel, a tube with a closed bottom extending into said vessel and intersecting the axis thereof, said tube being hermetically sealed to said Vvessel and having apertures for the passage of the electron beam, means for rotating said tube from the outside, an exchangeable carrier arranged in said tube and adapted to support a specimen for observation through said beam apertures, a member for closing said tube and supporting said specimen carrier, and valves for closing said beam apertures when said tube is rotated to a position in which said tube closing member is ready for removal, said valves being in the shape of rollers adapted to bear resiliently against said tube.
  • An electron microscope comprising a dis charge Vessel, a tube with a closed bottom extending into said vessel and intersecting the axis thereof, said tube being hermetically sealed to said vessel and having apertures for the passage of the electron beam, means for rotating said tube from the outside, an exchangeable carrier arranged in said tube and adapted to support a specimen for observation through said beam apertures, a member for closing said tube and supporting said specimen carrier, and valves for closing said beam apertures, said valves consisting of rubber rollers having their axes parallel to the tube axis and being adapted to engage with recesses formed on the outer wall of saidtube, thereby closing said beam apertures when said tube is rotated to a position in which said tube closing member is ready for removal.
  • An electron microscope comprising .a discharge vessel, a tube with a closed bottom extending into said vessel and intersecting the axis thereof, said tube being hermetically sealed to said vessel and having apertures for the passage of the electron beam, means for rotating said tube from the outside, an exchangeable carrier arranged in said tube and adapted to support a specimen for observation through said beam REFERENCES CITED

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
US766792A 1946-08-30 1947-08-06 Electron microscope Expired - Lifetime US2512947A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL646440X 1946-08-30

Publications (1)

Publication Number Publication Date
US2512947A true US2512947A (en) 1950-06-27

Family

ID=19791936

Family Applications (1)

Application Number Title Priority Date Filing Date
US766792A Expired - Lifetime US2512947A (en) 1946-08-30 1947-08-06 Electron microscope

Country Status (5)

Country Link
US (1) US2512947A (fr)
DE (1) DE810887C (fr)
FR (1) FR952559A (fr)
GB (1) GB646440A (fr)
NL (1) NL75362C (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2602899A (en) * 1950-02-23 1952-07-08 Gen Electric Introduction of specimens into discharge vessels
US8637836B1 (en) * 2012-09-27 2014-01-28 International Business Machines Corporation High aspect ratio sample holder

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE968396C (de) * 1951-05-06 1958-02-13 Zeiss Carl Fa Elektronenmikroskop mit elektrostatischen Abbildungslinsen
US3038993A (en) * 1958-05-21 1962-06-12 Masuda Tatsunosuke Aperture system for electron optical instrument

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB518317A (en) * 1937-08-24 1940-02-23 Fides Gmbh Improvements in or relating to devices for introducing objects into the evacuated spaces of electron microscopes
US2264210A (en) * 1937-11-20 1941-11-25 Krause Karl Means for mounting objects in electron microscopes
US2420561A (en) * 1944-04-27 1947-05-13 Gen Electric Electron microscope structure

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB518317A (en) * 1937-08-24 1940-02-23 Fides Gmbh Improvements in or relating to devices for introducing objects into the evacuated spaces of electron microscopes
US2264210A (en) * 1937-11-20 1941-11-25 Krause Karl Means for mounting objects in electron microscopes
US2420561A (en) * 1944-04-27 1947-05-13 Gen Electric Electron microscope structure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2602899A (en) * 1950-02-23 1952-07-08 Gen Electric Introduction of specimens into discharge vessels
US8637836B1 (en) * 2012-09-27 2014-01-28 International Business Machines Corporation High aspect ratio sample holder
US20140082920A1 (en) * 2012-09-27 2014-03-27 International Business Machines Corporation High aspect ratio sample holder

Also Published As

Publication number Publication date
FR952559A (fr) 1949-11-21
GB646440A (en) 1950-11-22
NL75362C (fr)
DE810887C (de) 1951-08-13

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