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US2508317A - Electronic microscope - Google Patents

Electronic microscope Download PDF

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Publication number
US2508317A
US2508317A US25611A US2561148A US2508317A US 2508317 A US2508317 A US 2508317A US 25611 A US25611 A US 25611A US 2561148 A US2561148 A US 2561148A US 2508317 A US2508317 A US 2508317A
Authority
US
United States
Prior art keywords
space
holder
vacuous
object holder
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US25611A
Other languages
English (en)
Inventor
Verhoeff Adrianus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hartford National Bank and Trust Co
Original Assignee
Hartford National Bank and Trust Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hartford National Bank and Trust Co filed Critical Hartford National Bank and Trust Co
Application granted granted Critical
Publication of US2508317A publication Critical patent/US2508317A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Definitions

  • This invention relates to an electronic microscope comprising a lock device for the introduction of the object to be reproduced into the beam of rays. It is common practice to house the object in a space which communicates through two narrow, diametrically-provided apertures for the passage of the beam of rays with the evacuated space of the microscope.
  • these apertures are first closed to prevent air from penetrating into the vacuous space. Upon changing the object it is desirable that as little air as possible is allowed to leak in and the change is carried out rapidly and by simple manipulations.
  • the object holder is arranged in a space recessed in a body which exhibits rotational symmetry and which body is passed through the wall of the discharge tube in an air-tight manner.
  • This body exactly fits in a tube, one end of which is closed and the wall of which exhibits the two said apertures for the passage of the beam of rays. Turning the body causes the apertures to be closed, whilst the object space is then brought into communication with a channel through which the object may be led to the exterior.
  • the supply of air from the outside Prior to the establishment of the communication with the vacuous space, the supply of air from the outside is shut-off, so that the amount of air that is to be evacuated by the pump is restricted to the contents of the object space.
  • the rotary body in the form of a tube, one end of which is closed, the admission of air being prevented in that the object holder closes the tube when the object is located in the beam of rays.
  • the object holder cannot be removed until the apertures through which the object space and the vacuous space communicate with one another are closed by turning the tube.
  • the object of the invention is to obviate the said disadvantages.
  • the object is supported by a holder which closes, in a vacuum-tight manner, the space which houses the object and which communicates with the vacuous space through two diametrical apertures, for the passage of the beam of rays.
  • the object holder displaces a movable member which, subsequent to the removal of the holder, brings about the air-tight closure of the object space.
  • Fig. 1 is a sectional view of the lock device, the object being in a position in which the electron beam is capable of passing through it, whereas Fig. 2 shows the same device the object holder being withdrawn to such extent that the object space is precisely closed.
  • the part of the discharge tube adjacent the lock device has a cylindrical metal wall I, which constitutes the upright edge of a circular metal plate 2, by which the vacuous space of the microscope is divided into two parts.
  • the plate is provided with aperture 3 to allow the passage of the electron beam.
  • the plate has furthermore provided in it two diametrically opposite channels 4 and 5, the channel 5 being larger in diameter than the channel 4. The former extends beyond the aperture 3.
  • the bore 4 contains the object holder 6, one end of which is provided with a handle or knob l, to enable it to be shifted to and fro and turned.
  • a perforated and threaded plug 8 is secured to the wall of the tube and presses against a ring 9 of resilient material, which thus embraces the object holder hermetically.
  • theobject holder 6 forces a member ID, housed in the space 5 so as to be slidable against a guide bush [4, so as to allow the electron beam to strike the object through the aperture 3.
  • this member is displaced under the action of the pressure of a. spring l3, in the direction of the object holder 6 until it engages the edges of the channel 4, thus closing the aperture thereof in an air-tight manner.
  • the correct position of the object with respect to the direction of passage of the beam of rays be checked externally by providing a mark on the knob I.
  • a lock device for the introduction of an object into the field of said microscope, said lock device having means including opposing wall portions enclosing a, first vacuous and a second vacuous space, a plate member extending transversely between the said opposing wall portions and interposed between said first vacuous space and the said second vacuous space and having an aperture connecting the said vacuous spaces, one wall portion and the plate member having internal surface means defining .a passage therethrough which passage also extends transversely to the said wall portions and forms with the said aperture in said plate member an object space, an object holder in said passage and slidably'engaging the surface means thereof and hermetically sealing the said object space: from the exterior of the said lock device inthe operative position of the said objectholder, a plug member, means supporting said plug member in said passage and in compressive relation withsaid object holder in the operative position of said object holder whereby upon removal of said object holder the said plug member is moved tossed the said aperture.
  • a look device for 4 the introduction of an object into the field of said microscope said lock device having means including opposing wall portions enclosing a first vacuous and a second vacuous space, a plate member extending transversely between the said opposing wall portions and interposed between said first vacuous space and the said second vacuous space and having an aperture connecting the said vacuous spaces, one wall portion and the plate member having internal surface means defining a passage therethrough which assage also extends transversely to the said wall portions and forms with the said aperture in said plate member an object space, abutment means defining one end of said object space, an object holder in said passage and slidably engaging the surface means thereof and hermetically sealing the said object space from the exterior of the said lock device in the operative position of the said object holder, a plug member, means supporting the said plug member in said passage and in compressive relation with said object holder in the operative position of said object holder whereby upon removal of said object holder the said plug member is
  • a lock device for the introduction of an object into the field of said microscope, said lock device having means including opposing wall portions enclosing a first vacuous and a second vacuous space, a plate member extending transversely between the said opposing wall portions and interposed between said first vacuous space and the said second vacuous space and having an aperture connecting the said vacuous spaces, one wall portion and the plate member having internal surface means defining a passage therethrough which passage also extends transversely to the said wall portions and forms with the said aperture in said plate member an object space, outwardly tapering abutment surface portions of said internal surface means defining onev end of said object space, an object holder in said passage and slidably engaging the surface means thereof and hermetically sealing the said object space from the exterior of the said lock device in the operative position of the said object holder, a plug member, means supporting the said plug member in said passage and in compressive relation with said object holder in the operative position of said object holder whereby upon removal of

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
US25611A 1947-07-08 1948-05-07 Electronic microscope Expired - Lifetime US2508317A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL266225X 1947-07-08

Publications (1)

Publication Number Publication Date
US2508317A true US2508317A (en) 1950-05-16

Family

ID=19781734

Family Applications (1)

Application Number Title Priority Date Filing Date
US25611A Expired - Lifetime US2508317A (en) 1947-07-08 1948-05-07 Electronic microscope

Country Status (6)

Country Link
US (1) US2508317A (de)
CH (1) CH266225A (de)
DE (1) DE810796C (de)
FR (1) FR968764A (de)
GB (1) GB653934A (de)
NL (1) NL73665C (de)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2602899A (en) * 1950-02-23 1952-07-08 Gen Electric Introduction of specimens into discharge vessels
US3405264A (en) * 1965-08-24 1968-10-08 Rca Corp Specimen injector for electron microscopes with a rotatable specimen holder
US3419717A (en) * 1964-12-10 1968-12-31 Commw Scient Ind Res Org Manipulator for accurately positioning specimens within an electron microscope or an electron diffraction camera
US3578969A (en) * 1968-11-25 1971-05-18 Electronic Associates Solid sample inlet system for a mass spectrometer
US3967127A (en) * 1975-07-03 1976-06-29 Gca Corporation Sample introducer
US5026995A (en) * 1989-06-19 1991-06-25 Hitachi, Ltd. Particle beam surface analyzer
US5093578A (en) * 1990-01-10 1992-03-03 U.S. Philips Corporation Valve device for a particle beam apparatus
US20130200271A1 (en) * 2010-07-28 2013-08-08 Hitachi High-Technologies Corporation Charged particle beam device
EP3106728A1 (de) * 2015-06-16 2016-12-21 VAT Holding AG Vakuumventil mit linearer führungseinheit und ventilsystem mit ebensolchem ventil und antrieb

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1032442B (de) * 1952-12-06 1958-06-19 Licentia Gmbh Vorrichtung zum Einstellen eines Geraetes, das zur Bearbeitung fester Koerper mit Ladungstraegerstrahlen dient
DE1220949B (de) * 1961-07-10 1966-07-14 Jenoptik Jena Gmbh Verstelleinrichtung fuer einen stabfoermigen Objekt- oder Blendenhalter in Korpuskularstrahlapparaten
DE1196034B (de) * 1961-10-06 1965-07-01 Koppers Gmbh Heinrich Einrichtung zum Einfuehren von stabfoermigen Messgeraeten in unter Druck stehende Reaktions-raeume

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2264209A (en) * 1939-01-26 1941-11-25 Krause Friedrich Packing for vacuum and pressure apparatus
US2264210A (en) * 1937-11-20 1941-11-25 Krause Karl Means for mounting objects in electron microscopes
US2272843A (en) * 1940-07-31 1942-02-10 Rca Corp Electron microscope specimen chamber

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2264210A (en) * 1937-11-20 1941-11-25 Krause Karl Means for mounting objects in electron microscopes
US2264209A (en) * 1939-01-26 1941-11-25 Krause Friedrich Packing for vacuum and pressure apparatus
US2272843A (en) * 1940-07-31 1942-02-10 Rca Corp Electron microscope specimen chamber

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2602899A (en) * 1950-02-23 1952-07-08 Gen Electric Introduction of specimens into discharge vessels
US3419717A (en) * 1964-12-10 1968-12-31 Commw Scient Ind Res Org Manipulator for accurately positioning specimens within an electron microscope or an electron diffraction camera
US3405264A (en) * 1965-08-24 1968-10-08 Rca Corp Specimen injector for electron microscopes with a rotatable specimen holder
US3578969A (en) * 1968-11-25 1971-05-18 Electronic Associates Solid sample inlet system for a mass spectrometer
US3967127A (en) * 1975-07-03 1976-06-29 Gca Corporation Sample introducer
US5026995A (en) * 1989-06-19 1991-06-25 Hitachi, Ltd. Particle beam surface analyzer
US5093578A (en) * 1990-01-10 1992-03-03 U.S. Philips Corporation Valve device for a particle beam apparatus
US20130200271A1 (en) * 2010-07-28 2013-08-08 Hitachi High-Technologies Corporation Charged particle beam device
US8933422B2 (en) * 2010-07-28 2015-01-13 Hitachi High-Technologies Corporation Charged particle beam device
EP3106728A1 (de) * 2015-06-16 2016-12-21 VAT Holding AG Vakuumventil mit linearer führungseinheit und ventilsystem mit ebensolchem ventil und antrieb
WO2016202782A1 (de) * 2015-06-16 2016-12-22 Vat Holding Ag Vakuumventil mit linearer führungseinheit und ventilsystem mit ebensolchem ventil und antrieb

Also Published As

Publication number Publication date
FR968764A (fr) 1950-12-05
NL73665C (de)
DE810796C (de) 1951-08-13
CH266225A (de) 1950-01-15
GB653934A (en) 1951-05-30

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