US20170084602A1 - Electrostatic discharge protection device and method for producing an electrostatic discharge protection device - Google Patents
Electrostatic discharge protection device and method for producing an electrostatic discharge protection device Download PDFInfo
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- US20170084602A1 US20170084602A1 US14/920,902 US201514920902A US2017084602A1 US 20170084602 A1 US20170084602 A1 US 20170084602A1 US 201514920902 A US201514920902 A US 201514920902A US 2017084602 A1 US2017084602 A1 US 2017084602A1
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- H—ELECTRICITY
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- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
- H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
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- H—ELECTRICITY
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- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
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- H01L27/0259—
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- H01L21/823475—
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- H01L21/8249—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
- H10D30/65—Lateral DMOS [LDMOS] FETs
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- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
- H10D62/393—Body regions of DMOS transistors or IGBTs
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- H—ELECTRICITY
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- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0107—Integrating at least one component covered by H10D12/00 or H10D30/00 with at least one component covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating IGFETs with BJTs
- H10D84/0109—Integrating at least one component covered by H10D12/00 or H10D30/00 with at least one component covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating IGFETs with BJTs the at least one component covered by H10D12/00 or H10D30/00 being a MOS device
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- H—ELECTRICITY
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- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
- H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
- H10D84/0149—Manufacturing their interconnections or electrodes, e.g. source or drain electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
- H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
- H10D89/811—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements
- H10D89/813—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements specially adapted to provide an electrical current path other than the field-effect induced current path
Definitions
- the invention relates to an electrostatic discharge protection structure, and more particularly, to an electrostatic discharge protection structure capable of enduring negative voltage.
- Electrostatic discharge is an effect due to electrical charges in an object flowing to another object through a discharging path when two electrically charged objects contact or short to each other.
- the electrostatic discharge can generate huge currents in a very short time and can damage an integrated circuit. Since the human body, machines used to package integrated circuits, and instruments for testing integrated circuits are all common charged bodies, the static electric charges of a charged body may discharge to a chip and cause irreversible harm to the chip once the charged body contacts with the chip. Therefore, an electrostatic discharge protection device is designed to provide a low resistance discharge path for the huge currents induced during electrostatic discharge to pass by and to protect the integrated circuit from being blown out.
- the holding voltage of the electrostatic discharge protection device should be outside of the operational voltage range of the chip.
- the operational voltage range of a chip may include negative voltage.
- the operational voltage range may be ⁇ 3V to 3V.
- the upper limit and the lower limit of the operational voltage range may even be unsymmetrical, such as an operational voltage range between ⁇ 10V to 20V.
- the common electrostatic discharge protection device may only protect the chip from being damaged by currents in the same direction and within limited ranges of voltage. Therefore, the design of the electrostatic discharge protection device is rather inflexible and may even cause inconvenience when producing the electrostatic discharge protection device.
- the electrostatic discharge protection structure comprises an anode, a cathode, a first negative voltage holding transistor and a first positive voltage holding transistor.
- the anode is coupled to an input terminal
- the cathode is coupled to a ground terminal.
- the first negative voltage holding transistor comprises an N-well
- the first positive voltage holding transistor comprises an N-well coupled to the N-well of the first negative voltage holding transistor.
- the first negative voltage holding transistor and the first positive voltage holding transistor are coupled in series between the anode and the cathode in a manner of back-to-back.
- the N-well of the first positive voltage holding transistor is floating.
- Another embodiment of the present invention discloses a method for producing an electrostatic discharge protection structure.
- the method comprises deriving an operational voltage range of an input terminal to be protected, determining types of at least one negative voltage holding transistor and at least one positive voltage holding transistor according to the operational voltage range, determining a total number of the at least one negative voltage holding transistor and a total number of the at least one positive voltage holding transistor according to the operational voltage range and the types of the at least one negative voltage holding transistor and the at least one positive voltage holding transistor, coupling the at least one negative voltage holding transistor and the at least one positive voltage holding transistor in series between the input terminal and aground terminal in a manner of back-to-back, and coupling an N-well of a first positive voltage holding transistor of the at least one positive voltage holding transistor to an N-well of a first negative voltage holding transistor of the at least one negative voltage holding transistor.
- the N-well of first positive voltage holding transistor is floating.
- FIG. 1 shows an electrostatic discharge protection device according to one embodiment of the present invention.
- FIG. 2 shows a cross section of the structure of the discharge protection device in FIG. 1 .
- FIG. 3 shows an electrostatic discharge protection device according to another embodiment of the present invention.
- FIG. 4 shows a cross section of a structure of the discharge protection device in FIG. 3 .
- FIG. 5 shows an electrostatic discharge protection device according to another embodiment of the present invention.
- FIG. 6 shows an electrostatic discharge protection device according to another embodiment of the present invention.
- FIG. 7 shows an electrostatic discharge protection device according to another embodiment of the present invention.
- FIG. 8 shows an electrostatic discharge protection device according to another embodiment of the present invention.
- FIG. 9 shows a cross section of a structure of the discharge protection device in FIG. 8 .
- FIG. 10 shows a flow chart of a method for producing an electrostatic discharge protection device according to one embodiment of the present invention.
- FIG. 11 shows a flow chart of parts of the method for producing an electrostatic discharge protection device in FIG. 10 .
- FIG. 12 shows a flow chart of parts of the method for producing an electrostatic discharge protection device in FIG. 10 .
- FIG. 13 shows a flow chart of parts of the method for producing an electrostatic discharge protection device in FIG. 10 .
- FIG. 1 shows an electrostatic discharge protection device 100 according to one embodiment of the present invention.
- the electrostatic discharge protection device 100 includes an anode 110 , a cathode 120 , a negative voltage holding transistor NX 1 and a positive voltage holding transistor NY 1 .
- the anode 110 is coupled to an input terminal of a chip C 1 to be protected, and the cathode 120 is coupled to a ground terminal GND.
- the negative voltage holding transistor NX 1 and the positive voltage holding transistor NY 1 are both N-type metal oxide semiconductor transistors.
- the negative voltage holding transistor NX 1 has a first terminal, a second terminal, a control terminal and an N-well DNW NX1
- the positive voltage holding transistor NY 1 also has a first terminal, a second terminal, a control terminal and an N-well DNW NY1 .
- the N-well DNW NY1 of the positive voltage holding transistor NY 1 is coupled to the N-well DNW NX1 of the negative voltage holding transistor NX 1
- the N-well DNW NY1 of the positive voltage holding transistor NY 1 is floating. That is, although the N-well DNW NY1 of the positive voltage holding transistor NY 1 and the N-well DNW NY1 of the negative voltage holding transistor NX 1 are coupled together, they are not coupled to any other fixed voltages.
- FIG. 2 shows a cross-section of the structure of the electrostatic discharge protection device 100 .
- the first terminal of the negative voltage holding transistor NX 1 is an N-type region A NX1
- the second terminal of the negative voltage holding transistor NX 1 is an N-type region B NX1
- the control terminal of the negative voltage holding transistor NX 1 includes a gate G NX1 .
- the N-type regions A NX1 and B NX1 are both disposed in a P-well PW NX1 of the negative voltage holding transistor NX 1
- the P-well PW NX1 of the negative voltage holding transistor NX 1 is disposed in the N-well DNW NX1 of the negative voltage holding transistor NX 1 .
- the N-well DNW NX1 of the negative voltage holding transistor NX 1 can be a deep N-well disposed on the P substrate Psub.
- the P substrate Psub can be coupled to the ground terminal GND.
- the control terminal of the negative voltage holding transistor NX 1 can be used for controlling the voltage of the P-well PW NX1 under the gate G NX1 .
- the control terminal of the negative voltage holding transistor NX 1 can further include a P-type region C NX1 in the P-well PW NX1 .
- the first terminal of the positive voltage holding transistor NY 1 is an N-type region A NY1
- the second terminal of the positive voltage holding transistor NY 1 is an N-type region B NY1
- the control terminal of the positive voltage holding transistor NY 1 includes a gate G NY1 .
- the N-type regions A NY1 and B NY1 are both disposed in a P-well PW NY1 of the positive voltage holding transistor NY 1
- the P-well PW NY1 of the positive voltage holding transistor NY 1 is disposed in the N-well DNW NY1 of the positive voltage holding transistor NY 1 .
- the N-well DNW NY1 of the positive voltage holding transistor NY 1 can be a deep N-well disposed on the P substrate Psub.
- control terminal of the positive voltage holding transistor NY 1 can be used for controlling the voltage of the P-well PW NY1 under the gate G NY1 .
- the control terminal of the positive voltage holding transistor NY 1 can further include a P-type region C NY1 in the P-well PW NY1 .
- an N-type region D NX1 can be disposed in the N-well DNW NX1 of the negative voltage holding transistor NX 1 so the N-well DNW NX1 can be coupled to the external elements via the N-type region D NX1 .
- an N-type region D NY1 can be disposed in the N-well DNW NY1 of the positive voltage holding transistor NY 1 so the N-well DNW NY1 can be coupled to the external elements via the N-type region D NY1 .
- the external elements can also be coupled to the N-well DNW NX1 and N-well DNW NY1 directly without going through the N-type region D NX1 and N-type region D NY1 .
- the first terminal (N-type region A NX1 ) of the negative voltage holding transistor NX 1 is coupled to the control terminal (the gate G NX1 and the P-type region C NX1 ) of the negative voltage holding transistor NX 1
- the second terminal (N-type region B NX1 ) of the negative voltage holding transistor NX 1 is coupled to the N-well DNW NX1 of the negative voltage holding transistor NX 1 directly or via the N-type region D NX1 .
- the control terminal (the gate G NX1 and the P-type region C NX1 ) of the negative voltage holding transistor NX 1 is coupled to the anode 110 .
- the first terminal (N-type region A NY1 ) of the positive voltage holding transistor NY 1 is coupled to the second terminal (N-type region B NX1 ) of the negative voltage holding transistor NX 1
- the second terminal (N-type region B NY1 ) of the positive voltage holding transistor NY 1 is coupled to the control terminal (gate G NY1 and P-type region C NY1 ) of the positive voltage holding transistor NY 1
- the control terminal (the gate G NY1 and the P-type region C NY1 ) of the positive voltage holding transistor NY 1 is coupled to the cathode 120 .
- the N-well DNW NX1 of the negative voltage holding transistor NX 1 can also be coupled to the N-well DNW NY1 of the positive voltage holding transistor NY 1 via the N-type regions D NX1 and D NY1 .
- the negative voltage holding transistor NX 1 and the positive voltage holding transistor NY 1 can be coupled in series between the anode 110 and the cathode 120 in a manner of the back-to-back, that is, the control terminal (gate G NY1 and P-type region C NY1 ) of the positive voltage holding transistor NY 1 is coupled to the second terminal (N-type region B NY1 ) of the positive voltage holding transistor NY 1 , which is closer to the cathode 120 , while the control terminal (gate G NX1 and P-type region C NX1 ) of the negative voltage holding transistor NX 1 is coupled to the first terminal (N-type region A NX1 ) of the negative voltage holding transistor NX 1 , which is closer to the anode 110 .
- the P-type region C NX1 and the N-type region A NX1 of the negative voltage holding transistor NX 1 are both at the voltage V 1
- the P-type region C NY1 and the N-type region B NY1 of the positive voltage holding transistor NY 1 are both at the ground voltage.
- the P-well PW NX1 and the N-type region B NX1 of the negative voltage holding transistor NX 1 can be seen as a forward diode
- the N-type region A NY1 and the P-well PW NY1 of the positive voltage holding transistor NY 1 can be seen as a reverse diode.
- N-well DNW NX1 of the negative voltage holding transistor NX 1 and the N-well DNW NY1 of the positive voltage holding transistor NY 1 are coupled to the N-type region B NX1 of the negative voltage holding transistor NX 1 and the N-type region A NY1 of the positive voltage holding transistor NY 1 , voltages of the N-well DNW NX1 of the negative voltage holding transistor NX 1 and the N-well DNW NY1 of the positive voltage holding transistor NY 1 are both higher than the ground voltage of the P-type substrate Psub, preventing current leakage of the electrostatic discharge protection device 100 .
- the electrostatic discharge protection device 100 can provide a discharge path for the huge current induced by the electrostatic discharge and prevent the chip from being damaged by the huge current.
- the P-well PW NX1 and the N-type region B NX1 of the negative voltage holding transistor NX 1 can be seen as a reverse diode
- the N-type region A NY1 and the P-well PW NY1 of the positive voltage holding transistor NY 1 can be seen as a forward diode. That is, as long as the negative voltage gap between the voltage V 2 and the ground voltage does not exceed the breakdown voltage of the negative voltage holding transistor NX 1 , the reverse diode between P-well PW NX1 and the N-type region B NX1 of the negative voltage holding transistor NX 1 will stay off so that the electrostatic discharge protection device 100 will not conduct any currents.
- the N-well DNW NX1 of the negative voltage holding transistor NX 1 and the N-well DNW NY1 of the positive voltage holding transistor NY 1 may slightly lower than the ground voltage of the P-type substrate Psub, there is still no current path available around the P-type substrate Psub, avoiding the electrostatic discharge protection device 100 from generating any leakage current. That is, the leakage current can be avoided because the N-well DNW NX1 of the negative voltage holding transistor NX 1 and the N-well DNW NY1 of the positive voltage holding transistor NY 1 are coupled to the N-type region B NX1 of the negative voltage holding transistor NX 1 and the N-type region A NY1 of the positive voltage holding transistor NY 1 .
- the electrostatic discharge protection device 100 can provide a discharge path for the huge current induced by the electrostatic discharge and prevent the chip from being damaged by the huge current.
- the electrostatic discharge protection device 100 will not be turned on when the input signals of the chip C 1 is within the operational voltage range so that the chip C 1 can be operated normally.
- the negative voltage holding transistor NX 1 or the positive voltage holding transistor NY 1 may break down so that the electrostatic discharge protection device 100 can provide a discharge path for the huge current induced by the electrostatic discharge and prevent the chip from being damaged.
- the electrostatic discharge protection device 100 can protect the chip C 1 from being damaged by the positive or negative electrostatic discharge.
- FIG. 1 the anode 110 of the electrostatic discharge protection device 100 is coupled to the negative voltage holding transistor NX 1
- the cathode 120 of the electrostatic discharge protection device 100 is coupled to the positive voltage holding transistor NY 1
- the negative voltage holding transistor can also be coupled to the cathode
- the positive voltage holding transistor can also be coupled to the anode.
- FIG. 3 shows an electrostatic discharge protection device 200 according to one embodiment of the present invention.
- the electrostatic discharge protection device 200 includes an anode 210 , a cathode 220 , a negative voltage holding transistor NX 1 ′, and a positive voltage holding transistor NY 1 ′.
- the negative voltage holding transistor NX 1 ′ has a similar structure as the negative voltage holding transistor NX 1 does, and the positive voltage holding transistor NY 1 ′ has a similar structure as the positive voltage holding transistor NY 1 does.
- the main difference between the electrostatic discharge protection devices 100 and 200 is in the connection.
- FIG. 4 shows a cross-section of the structure of the electrostatic discharge protection device 200 .
- the positive voltage holding transistor NY 1 ′ has a first terminal, a second terminal, a control terminal, and an N-well DNW NY1′
- negative voltage holding transistor NX 1 ′ has a first terminal, a second terminal, a control terminal, and a N-well DNW NX1′
- the first terminal of the positive voltage holding transistor NY 1 ′ is the N-type region A NY1′
- the second terminal of the positive voltage holding transistor NY 1 ′ is the N-type region B NY1′
- the control terminal of the positive voltage holding transistor NY 1 ′ includes the gate G NY1′ .
- the first terminal of the negative voltage holding transistor NX 1 ′ is the N-type region A NX1′
- the second terminal of the negative voltage holding transistor NX 1 ′ is the N-type region B NX1′
- the control terminal of the negative voltage holding transistor NX 1 ′ includes the gate G NX1′
- the control terminal of the positive voltage holding transistor NY 1 ′ can be used to control the voltage level of the P-well PW NY1′ , under the gate G NY1′ .
- the control terminal of the positive voltage holding transistor NY 1 ′ can further include a P-type region C NY1′ in the P-well PW NY1′ .
- the control terminal of the negative voltage holding transistor NX 1 ′ can further include a P-type region C NX1′ in the P-well PW NX1′ .
- the first terminal (N-type region A NY1′ ) of the positive voltage holding transistor NY 1 ′ is coupled to the anode 210
- the second terminal (N-type region B NY1′ ) of the positive voltage holding transistor NY 1 ′ is coupled to the control terminal (the gate G NY1′ and the P-type region C NY1′ ) of the positive voltage holding transistor NY 1 ′ and coupled to the N-well DNW NY1′ of the positive voltage holding transistor NY 1 ′ via the N-type region D NY1′ .
- the first terminal (N-type region A NX1′ ) of the negative voltage holding transistor NX 1 ′ is coupled to control terminal (the gate G NX1′ and the P-type region C NX1′ ) of the negative voltage holding transistor NX 1 ′, and the second terminal (N-type region B NX1′ ) of the negative voltage holding transistor NX 1 ′ is coupled to the cathode 220 .
- the control terminal (the gate G NX1′ and the P-type region C NX1′ ) of the negative voltage holding transistor NX 1 ′ is coupled to the second terminal (N-type region B NY1′ ) of the positive voltage holding transistor NY 1 ′, and the N-well DNW NY1′ of the positive voltage holding transistor NY 1 ′ is coupled to the N-well DNW NX1′ of the negative voltage holding transistor NX 1 ′ via the N-type regions D NX1′ and D NY1 ′.
- the electrostatic discharge protection device 200 is still able to protect the chip C 1 .
- the electrostatic discharge protection device 200 will be turned on only when the voltage gap between the voltage V 1 and the ground voltage exceeds the breakdown voltage of the positive voltage holding transistor NY 1 ′.
- the electrostatic discharge protection device 200 will be turned on only when the negative voltage gap between the voltage V 2 and the ground voltage exceeds the breakdown voltage of the negative voltage holding transistor NX 1 ′. Consequently, the electrostatic discharge protection device 200 can protect the chip C 1 from being damaged without affecting the normal operations of the chip C 1 .
- the electrostatic discharge protection devices 100 and 200 both include one negative voltage holding transistor and one positive voltage holding transistor, in some embodiments of the present invention, the electrostatic discharge protection device may adjust the number of negative voltage holding transistors and positive voltage holding transistors according to the operational voltage range of the chip to be protected.
- FIG. 5 shows an electrostatic discharge protection device 300 .
- the electrostatic discharge protection device 300 includes an anode 310 , a cathode 320 , a plurality of negative voltage holding transistors and a plurality of positive voltage holding transistors.
- the anode 310 is coupled to an input terminal IN of a chip C 2 to be protected, and the cathode 320 is coupled to the ground terminal GND. If the operational voltage range of the chip C 2 to be protected is between ⁇ 8V and 14V and the breakdown voltages of the negative voltage holding transistors and the positive voltage holding transistors are about 5V, then the electrostatic discharge device 300 may include two negative voltage holding transistors NX 1 and NX 2 and three positive voltage holding transistors NY 1 , NY 2 , and NY 3 .
- the negative voltage holding transistors NX 1 and NX 2 and the positive voltage holding transistors NY 1 , NY 2 , and NY 3 are all N-type metal oxide semiconductor transistors.
- the first terminal (N-type region) of the negative voltage holding transistor NX 2 is coupled to the control terminal (P-type region) of the negative voltage holding transistor NX 2
- the second terminal (N-type region) of the negative voltage holding transistor NX 2 is coupled to the N-well DNW NX2 of the negative voltage holding transistor NX 2
- the control terminal (P-type region) of the negative voltage holding transistor NX 2 is coupled to the anode 310 .
- the first terminal (N-type region) of the negative voltage holding transistor NX 1 is coupled to the control terminal (P-type region) of the of the negative voltage holding transistor NX 1
- the second terminal (N-type region) of the negative voltage holding transistor NX 1 is coupled to the N-well DNW NX1 of the negative voltage holding transistor NX 1
- the control terminal (P-type region) of the negative voltage holding transistor NX 1 is coupled to the second terminal (N-type region) of the negative voltage holding transistor NX 2 .
- the first terminal (N-type region) of the positive voltage holding transistor NY 1 is coupled to the second terminal (N-type region) of the negative voltage holding transistor NX 1 and the N-well DNW NY1 of the positive voltage holding transistor NY 1 , and the second terminal (N-type region) of the positive voltage holding transistor NY 1 is coupled to the control terminal (P-type region) of the positive voltage holding transistor NY 1 .
- the first terminal (N-type region) of the positive voltage holding transistor NY 2 is coupled to the second terminal (N-type region) of the positive voltage holding transistor NY 1 and the N-well DNW NY2 of the positive voltage holding transistor NY 2 , and the second terminal (N-type region) of the positive voltage holding transistor NY 2 is coupled to the control terminal (P-type region) of the positive voltage holding transistor NY 2 .
- the first terminal (N-type region) of the positive voltage holding transistor NY 3 is coupled to the second terminal (N-type region) of the positive voltage holding transistor NY 2 and the N-well DNW NY3 of the positive voltage holding transistor NY 3 , the second terminal (N-type region) of the positive voltage holding transistor NY 3 is coupled to the control terminal (P-type region) of the positive voltage holding transistor NY 3 , and the control terminal (P-type region) of the positive voltage holding transistor NY 3 is coupled to the cathode 320 .
- the electrostatic discharge protection device 300 will be turned on only when the voltage gap between the voltage V 1 and the ground voltage exceeds the sum of the breakdown voltages of the positive voltage holding transistors NY 1 , NY 2 , and NY 3 , that is, when the voltage gap between the voltage V 1 and the ground voltage exceeds 15V.
- the electrostatic discharge protection device 300 Since the operational voltage range of the chip C 2 is between ⁇ 8V and 14V and does not exceed the sum of the breakdown voltages of the positive voltage holding transistors NY 1 , NY 2 , and NY 3 , the electrostatic discharge protection device 300 will not be turned on under normal operations so the chip C 2 can still function normally.
- the first terminal (N-type region) and the P-well below the control terminal in the negative voltage holding transistor NX 1 will forma reverse diode and the first terminal (N-type region) and the P-well below the control terminal in the negative voltage holding transistor NX 2 will form a reverse diode.
- the N-well DNW NX1 of the negative voltage holding transistor NX 1 and the N-well DNW NX2 of the negative voltage holding transistor NX 2 are not coupled to any fixed voltage, there is no discharging path between the N-wells DNW NX1 and DNW NX2 and the P-type substrate.
- the electrostatic discharge protection device 300 will be turned on only when the negative voltage gap between the voltage V 2 and the ground voltage exceeds the sum of the breakdown voltages of the negative voltage holding transistors NX 1 and NX 2 , that is, when the negative voltage gap between the voltage V 2 and the ground voltage exceeds ⁇ 10V. Since the operational voltage range of the chip C 2 is between ⁇ 8V and 14V and does not exceed the sum of the breakdown voltages of the negative voltage holding transistors NX 1 and NX 2 , the electrostatic discharge protection device 300 will not be turned on under normal operations so the chip C 2 can still function normally.
- the electrostatic discharge protection device 300 can increase the holding voltage by adding positive voltage holding transistors or negative voltage holding transistors to protect the chip C 2 from being damaged by the electrostatic discharge without affecting the normal operations of the chip C 2 .
- the N-well DNW NY1 of the positive voltage holding transistor NY 1 , the N-well DNW NY2 of the positive voltage holding transistor NY 2 and the N-well DNW NY3 of the positive voltage holding transistor NY 3 are coupled to the first terminal of the positive voltage holding transistor NY 1 , the first terminal of the positive voltage holding transistor NY 2 , and the first terminal of the positive voltage holding transistor NY 3 respectively, and the N-well DNW NX1 of the negative voltage holding transistor NX 1 and the N-well DNW NX2 of the negative voltage holding transistor NX 2 are coupled to the first terminal of the negative voltage holding transistor NX 1 and the first terminal of the negative voltage holding transistor NX 2 respectively.
- the N-well DNW NY1 of the positive voltage holding transistor NY 1 , the N-well DNW NY2 of the positive voltage holding transistor NY 2 , the N-well DNW NY3 of the positive voltage holding transistor NY 3 , the N-well DNW NX1 of the negative voltage holding transistor NX 1 and the N-well DNW NX2 of the negative voltage holding transistor NX 2 can all be coupled together.
- FIG. 6 shows an electrostatic discharge device 400 .
- the electrostatic discharge device 400 includes an anode 410 , a cathode 420 , positive voltage holding transistors NY 1 , NY 2 and NY 3 , and negative voltage holding transistors NX 1 and NX 2 .
- the electrostatic discharge protection devices 400 and 300 have similar structures, and the main difference between these two is in that the N-well DNW NY1 of the positive voltage holding transistor NY 1 , the N-well DNW NY2 of the positive voltage holding transistor NY 2 , the N-well DNW NY3 of the positive voltage holding transistor NY 3 , the N-well DNW NX1 of the negative voltage holding transistor NX 1 and the N-well DNW NX2 of the negative voltage holding transistor NX 2 can all be coupled together at a same node in the electrostatic discharge protection device 400 .
- the electrostatic discharge device 400 can still increase the holding voltage by adding positive voltage holding transistors or negative voltage holding transistors to meet the requirement of the system.
- FIG. 7 shows an electrostatic discharge protection device 500 .
- the electrostatic discharge protection devices 500 and 300 have similar structures and operation principles, however, the positive voltage holding transistors NY 1 ′, NY 2 ′ and NY 3 ′ and the negative voltage holding transistors NX 1 ′ and NX 2 ′ in the electrostatic discharge protection device 500 are coupled between the anode 510 and the cathode 520 in an order of the positive voltage holding transistor NY 1 ′, the negative voltage holding transistor NX 1 ′, the positive voltage holding transistor NY 2 ′, the negative voltage holding transistor NX 2 ′, and the positive voltage holding transistor NY 3 ′.
- each of the positive voltage holding transistors is coupled to the neighboring negative voltage holding transistors with a manner of back-to-back
- each of the negative voltage holding transistors is coupled to the neighboring positive voltage holding transistors with a manner of back-to-back
- the N-wells DNW NY1′ , DNW NY2′ and DNW NY3′ of the positive voltage holding transistors NY 1 ′, NY 2 ′ and NY 3 ′ and the N-wells DNW NX1′ and DNW NX2′ of the negative voltage holding transistors NX 1 ′ and NX 2 ′ are all floating without being coupled to any fixed voltage
- the breakdown voltages of the positive voltage holding transistors NY 1 ′, NY 2 ′ and NY 3 ′ can still be added to increase the holding voltage of the electrostatic discharge protection device 500 and breakdown voltages of the negative voltage holding transistors NX 1 ′ and NX 2 ′ can also be added to increase the holding voltage of the electrostatic discharge protection device 500 .
- the electrostatic discharge protection device may include a corresponding number of negative voltage holding transistors and/or positive voltage holding transistors while each of the negative voltage holding transistors and positive voltage holding transistors can be coupled in a random order with a manner of back-to-back.
- the electrostatic discharge protection device 100 may further include at least one negative voltage holding transistor between the anode 110 and the negative voltage holding transistor NX 1 , or at least one negative voltage holding transistor between the positive voltage holding transistor NY 1 and the cathode 120 , or at least one positive voltage holding transistor between the anode 110 and the negative voltage holding transistor NX 1 , or at least one positive voltage holding transistor between the positive voltage holding transistor NY 1 and the cathode 120 .
- FIG. 8 shows an electrostatic discharge protection device 600 and FIG. 9 shows a cross-section of the structure of the electrostatic discharge protection device 600 .
- the electrostatic discharge device 600 includes an anode 610 , a cathode 620 , a negative voltage holding transistor PX 1 and a positive voltage holding transistor PY 1 .
- the anode 610 is coupled to the input terminal IN of the chip C 1 to be protected, and the cathode 620 is coupled to the ground terminal GND.
- the negative voltage holding transistor PX 1 and the positive voltage holding transistor PY 1 are both P-type metal oxide semiconductor transistors.
- the negative voltage holding transistor PX 1 has a first terminal, a second terminal, a control terminal, and an N-well NW PX1
- the positive voltage holding transistor PY 1 has a first terminal, a second terminal, a control terminal, and an N-well NW PY1
- the P-type regions A PX1 and B PX1 are disposed in the N-well NW PX1
- the P-type regions A PY1 and B PY1 are disposed in the N-well NW PY1
- the N-well NW PY1 and N-well NW PX1 are disposed in the P-type substrate Psub.
- the first terminal of the negative voltage holding transistor PX 1 is the P-type region A PX1
- the second terminal of the negative voltage holding transistor PX 1 is the P-type region B PX1
- the control terminal of the negative voltage holding transistor PX 1 includes a gate G PX1
- the first terminal of the positive voltage holding transistor PY 1 is the P-type region A PY1
- the second terminal of the positive voltage holding transistor PY 1 is the P-type region B PY1
- the control terminal of the positive voltage holding transistor PY 1 includes a gate G PY1 .
- the gate G PY1 of the positive voltage holding transistor PY 1 can be used for controlling the voltage of the N-well NW PY1 under the gate G PY1
- the gate G PX1 of the negative voltage holding transistor PX 1 can be used for controlling the voltage of the N-well NW PX1 under the gate G PX1 . Therefore, to control the voltage level of the N-well NW PY1 of the positive voltage holding transistor PY 1 even more effectively, an N-type region C PY1 can be disposed in the N-well NW PY1 for coupling to external elements. Also to control the voltage level of the N-well NW PX1 of the negative voltage holding transistor PX 1 even more effectively, an N-type region C PX1 can be disposed in the N-well NW PX1 for coupling to external elements.
- the first terminal (P-type region A PX1 ) of the negative voltage holding transistor PX 1 is coupled to the anode 610
- the second terminal (P-type region B PX1 ) of the negative voltage holding transistor PX 1 is coupled to the control terminal (gate G PX1 ) of the negative voltage holding transistor PX 1 and coupled to the N-well NW PX1 of the negative voltage holding transistor PX 1 via the N-type region C PX1 .
- the first terminal (P-type region A PY1 ) of the positive voltage holding transistor PY 1 is coupled to the control terminal (gate G PY1 ) of the positive voltage holding transistor PY 1
- the second terminal (P-type region B PY1 ) of the positive voltage holding transistor PY 1 is coupled to the cathode 620
- the control terminal (gate G PY1 ) of the positive voltage holding transistor PY 1 is coupled to the second terminal (P-type region B PX1 ) of the negative voltage holding transistor PX 1 .
- the N-well NW PY1 of the positive voltage holding transistor PY 1 is coupled to N-well NW PX1 of the negative voltage holding transistor PX 1 , but the N-well NW PY1 of the positive voltage holding transistor PY 1 and the N-well NW PX1 of the negative voltage holding transistor PX 1 are not coupled to any fixed voltage.
- the N-well NW PX1 of the negative voltage holding transistor PX 1 , the N-well NW PY1 of the positive voltage holding transistor PY 1 , the second terminal (P-type region B PX1 ) of the negative voltage holding transistor PX 1 , and the first terminal (P-type region A PY1 ) of the positive voltage holding transistor PY 1 are coupled together.
- the control terminal (gate G PX1 ) and the N-type region C PX1 of the negative voltage holding transistor PX 1 can both be used to input voltage to the N-well NW PX1 so the control terminal (gate G PX1 ) and the N-type region C PX1 of the negative voltage holding transistor PX 1 are at the same voltage level.
- control terminal (gate G PY1 and the N-type region C PY1 of the positive voltage holding transistor PY 1 can both be used to input voltage to the N-well NW PY1 so the control terminal (gate G PY1 ) and the N-type region C PY1 of the positive voltage holding transistor PY 1 are at the same voltage level.
- the electrostatic discharge protection device 600 will be turned on only when the voltage gap between the voltage V 1 and the ground voltage exceeds the breakdown voltage of the positive voltage holding transistor PY 1 .
- the voltage V 2 of the anode 610 is lower than the ground voltage of the cathode 620
- the N-well NW PX1 and the P-type region A PX1 of the positive voltage holding transistor PX 1 will form a reverse diode.
- the electrostatic discharge protection device 600 will be turned on only when the negative voltage gap between the voltage V 2 and the ground voltage exceeds the breakdown voltage of the negative voltage holding transistor PX 1 . Therefore, the electrostatic discharge protection device 600 can protect the chip C 1 from being damaged by the electrostatic discharge without affecting the normal operation of the chip C 1 .
- the electrostatic discharge protection device may adopt laterally diffused metal oxide semiconductor transistors, double diffused drain metal oxide semiconductor transistors, fully depleted metal oxide semiconductor transistors and/or bipolar junction transistors to be the negative voltage holding transistors and/or the positive voltage holding transistors.
- FIG. 10 shows a flow chart of a method 700 for producing an electrostatic discharge protection device.
- the method 700 includes steps S 710 to S 750 .
- S 750 coupling an N-well of a first positive voltage holding transistor of the at least one positive voltage holding transistor to an N-well of a first negative voltage holding transistor of the at least one negative voltage holding transistor, the N-well of first positive voltage holding transistor being floating.
- step S 710 the operational voltage range of the chip to be protected is derived firstly, and in step S 720 , the types of the negative voltage holding transistors and the positive voltage holding transistors are determined according to the operational voltage range.
- the step S 720 may include determining the positive voltage holding transistor to be N-type metal oxide semiconductor transistors, P-type metal oxide semiconductor transistors, PNP bipolar junction transistors, or NPN bipolar junction transistors when an upper limit of the operational voltage range is below 15V, determining the positive voltage holding transistors to be N-type double diffused drain metal oxide semiconductor transistors or P-type double diffused drain metal oxide semiconductor transistors when the upper limit of the operational voltage range is between 15V and 30V, determining the positive voltage holding transistors to be N-type fully depleted metal oxide semiconductor transistors, P-type fully depleted metal oxide semiconductor transistors, N-type laterally diffused metal oxide semiconductor transistors or P-type laterally diffused metal oxide semiconductor transistors when the upper limit of the operational voltage range is between 30V and 65V, and/or determining the positive voltage holding transistors to be N-type laterally diffused metal oxide semiconductor transistors or P-type laterally diffused metal oxide semiconductor transistors when the upper limit of the operational voltage range is greater than 65V.
- the step S 720 may also include determining the negative voltage holding transistor to be N-type metal oxide semiconductor transistors, P-type metal oxide semiconductor transistors, PNP bipolar junction transistors, or NPN bipolar junction transistors when an lower limit of the operational voltage range is above ⁇ 15V, determining the negative voltage holding transistors to be N-type double diffused drain metal oxide semiconductor transistors or P-type double diffused drain metal oxide semiconductor transistors when the lower limit of the operational voltage range is between ⁇ 15V and ⁇ 30V, determining the negative voltage holding transistors to be N-type fully depleted metal oxide semiconductor transistors, P-type fully depleted metal oxide semiconductor transistors, N-type laterally diffused metal oxide semiconductor transistors or P-type laterally diffused metal oxide semiconductor transistors when the lower limit of the operational voltage range is between ⁇ 30V and ⁇ 65V, and/or determining the negative voltage holding transistors to be N-type laterally diffused metal oxide semiconductor transistors or P-type laterally diffused metal oxide semiconductor transistors when the lower limit of the operational voltage range is between
- the positive voltage holding transistors and the negative voltage holding transistors may be implemented by using N-type metal oxide semiconductor transistors, P-type metal oxide semiconductor transistors, PNP bipolar junction transistors, or NPN bipolar junction transistors due to the operational voltage range of the chip C 2 is below 15V and above ⁇ 15V.
- the total number of the negative voltage holding transistors and the total number of the positive voltage holding transistors is determined according to the operational voltage range and the types of the negative voltage holding transistors and the positive voltage holding transistors.
- the sum of breakdown voltages of the positive voltage holding transistors should not be smaller than the upper limit of the operational voltage range and the sum of breakdown voltages of the negative voltage holding transistors should not be smaller than an absolute value of the lower limit of the operational voltage range.
- the positive voltage holding transistors and the negative voltage holding transistors can be implemented by N-type metal oxide semiconductor transistors. Also, since the breakdown voltage of an N-type metal oxide semiconductor transistor is about 5V, the total number of the positive voltage holding transistors can be set to 3 and the total number of the negative voltage holding transistors can be set to 2.
- the at least one negative voltage holding transistor and the at least one positive voltage holding transistor can be coupled in series between the input terminal and the ground terminal in a manner of back-to-back.
- the positive voltage holding transistors and the negative voltage holding transistors can be coupled between the input terminal IN of the chip C 2 and the ground terminal GND as the electrostatic discharge protection device 300 shown in FIG. 3 .
- the N-well DNW NY1 of the positive voltage holding transistor NY 1 will be coupled to the N-well DNW NX1 of the negative voltage holding transistor NX 1 in the step S 750 while the N-well DNW NY1 of the positive voltage holding transistor NY 1 and the N-well DNW NX1 of the negative voltage holding transistor NX 1 remain floating.
- the method 700 may further include steps S 810 to S 860 for producing the electrostatic discharge protection device 100 after determining the types and the total numbers of the positive voltage holding transistor and the negative voltage holding transistor.
- FIG. 11 shows a flow chart of the steps S 810 to S 860 .
- FIG. 12 shows a flow chart of the steps S 910 to S 960 .
- the method 700 may further include steps S 910 to S 960 for producing the electrostatic discharge protection device 200 .
- FIG. 13 shows a flow chart of the steps S 1010 to S 1060 .
- the method 700 may further include steps S 1010 to S 1060 and can be used for producing the electrostatic discharge protection device 600 .
- the method 700 provides a method for producing an electrostatic discharge protection device according to the operational voltage range of a chip to be protected. Also, according to the method 700 , the holding voltage of the electrostatic discharge protection device can be increased by adding positive voltage holding transistors and/or negative voltage holding transistors, and the electrostatic discharge protection device can provide protection to the chip from electrostatic discharge currents of dual directions. Therefore, the design of the electrostatic discharge protection device is even more flexible than the prior art.
- the electrostatic discharge protection device and the method for producing electrostatic discharge protection device provided by the embodiments of the present invention can increase the holding voltage of the electrostatic discharge protection device by adding positive voltage holding transistors and/or negative voltage holding transistors, and are able to protect the chip from electrostatic discharge currents of dual directions. Therefore, the design of the electrostatic discharge protection device can be more flexible than the prior art.
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Abstract
Description
- 1. Field of the Invention
- The invention relates to an electrostatic discharge protection structure, and more particularly, to an electrostatic discharge protection structure capable of enduring negative voltage.
- 2. Description of the Prior Art
- Electrostatic discharge is an effect due to electrical charges in an object flowing to another object through a discharging path when two electrically charged objects contact or short to each other. The electrostatic discharge can generate huge currents in a very short time and can damage an integrated circuit. Since the human body, machines used to package integrated circuits, and instruments for testing integrated circuits are all common charged bodies, the static electric charges of a charged body may discharge to a chip and cause irreversible harm to the chip once the charged body contacts with the chip. Therefore, an electrostatic discharge protection device is designed to provide a low resistance discharge path for the huge currents induced during electrostatic discharge to pass by and to protect the integrated circuit from being blown out.
- To avoid the case that the electrostatic discharge protection device may be accidentally turned on under a normal operation situation and disturb the operation of the protected chip, the holding voltage of the electrostatic discharge protection device should be outside of the operational voltage range of the chip. For example, if the operational voltage range of a chip is between 1.2V and 1.5V, then the holding voltage of the electrostatic discharge protection device should be greater than 1.5V so that the electrostatic discharge protection device will not be turned on when an input voltage of the chip is 1.5V. However, in some applications, the operational voltage range of a chip may include negative voltage. For example, the operational voltage range may be −3V to 3V. In some cases, the upper limit and the lower limit of the operational voltage range may even be unsymmetrical, such as an operational voltage range between −10V to 20V. However, the common electrostatic discharge protection device may only protect the chip from being damaged by currents in the same direction and within limited ranges of voltage. Therefore, the design of the electrostatic discharge protection device is rather inflexible and may even cause inconvenience when producing the electrostatic discharge protection device.
- One embodiment of the present invention discloses an electrostatic discharge protection structure. The electrostatic discharge protection structure comprises an anode, a cathode, a first negative voltage holding transistor and a first positive voltage holding transistor. The anode is coupled to an input terminal, and the cathode is coupled to a ground terminal. The first negative voltage holding transistor comprises an N-well, and the first positive voltage holding transistor comprises an N-well coupled to the N-well of the first negative voltage holding transistor. The first negative voltage holding transistor and the first positive voltage holding transistor are coupled in series between the anode and the cathode in a manner of back-to-back. The N-well of the first positive voltage holding transistor is floating.
- Another embodiment of the present invention discloses a method for producing an electrostatic discharge protection structure. The method comprises deriving an operational voltage range of an input terminal to be protected, determining types of at least one negative voltage holding transistor and at least one positive voltage holding transistor according to the operational voltage range, determining a total number of the at least one negative voltage holding transistor and a total number of the at least one positive voltage holding transistor according to the operational voltage range and the types of the at least one negative voltage holding transistor and the at least one positive voltage holding transistor, coupling the at least one negative voltage holding transistor and the at least one positive voltage holding transistor in series between the input terminal and aground terminal in a manner of back-to-back, and coupling an N-well of a first positive voltage holding transistor of the at least one positive voltage holding transistor to an N-well of a first negative voltage holding transistor of the at least one negative voltage holding transistor. The N-well of first positive voltage holding transistor is floating.
- These and other objectives of the present invention will no doubt become obvious to those of ordinary skill in the art after reading the following detailed description of the preferred embodiment that is illustrated in the various figures and drawings.
-
FIG. 1 shows an electrostatic discharge protection device according to one embodiment of the present invention. -
FIG. 2 shows a cross section of the structure of the discharge protection device inFIG. 1 . -
FIG. 3 shows an electrostatic discharge protection device according to another embodiment of the present invention. -
FIG. 4 shows a cross section of a structure of the discharge protection device inFIG. 3 . -
FIG. 5 shows an electrostatic discharge protection device according to another embodiment of the present invention. -
FIG. 6 shows an electrostatic discharge protection device according to another embodiment of the present invention. -
FIG. 7 shows an electrostatic discharge protection device according to another embodiment of the present invention. -
FIG. 8 shows an electrostatic discharge protection device according to another embodiment of the present invention. -
FIG. 9 shows a cross section of a structure of the discharge protection device inFIG. 8 . -
FIG. 10 shows a flow chart of a method for producing an electrostatic discharge protection device according to one embodiment of the present invention. -
FIG. 11 shows a flow chart of parts of the method for producing an electrostatic discharge protection device inFIG. 10 . -
FIG. 12 shows a flow chart of parts of the method for producing an electrostatic discharge protection device inFIG. 10 . -
FIG. 13 shows a flow chart of parts of the method for producing an electrostatic discharge protection device inFIG. 10 . -
FIG. 1 shows an electrostaticdischarge protection device 100 according to one embodiment of the present invention. The electrostaticdischarge protection device 100 includes ananode 110, acathode 120, a negative voltage holding transistor NX1 and a positive voltage holding transistor NY1. Theanode 110 is coupled to an input terminal of a chip C1 to be protected, and thecathode 120 is coupled to a ground terminal GND. - In
FIG. 1 , the negative voltage holding transistor NX1 and the positive voltage holding transistor NY1 are both N-type metal oxide semiconductor transistors. The negative voltage holding transistor NX1 has a first terminal, a second terminal, a control terminal and an N-well DNWNX1, and the positive voltage holding transistor NY1 also has a first terminal, a second terminal, a control terminal and an N-well DNWNY1. The N-well DNWNY1 of the positive voltage holding transistor NY1 is coupled to the N-well DNWNX1 of the negative voltage holding transistor NX1, and the N-well DNWNY1 of the positive voltage holding transistor NY1 is floating. That is, although the N-well DNWNY1 of the positive voltage holding transistor NY1 and the N-well DNWNY1 of the negative voltage holding transistor NX1 are coupled together, they are not coupled to any other fixed voltages. -
FIG. 2 shows a cross-section of the structure of the electrostaticdischarge protection device 100. InFIG. 2 , the first terminal of the negative voltage holding transistor NX1 is an N-type region ANX1, the second terminal of the negative voltage holding transistor NX1 is an N-type region BNX1, and the control terminal of the negative voltage holding transistor NX1 includes a gate GNX1. The N-type regions ANX1 and BNX1 are both disposed in a P-well PWNX1 of the negative voltage holding transistor NX1, and the P-well PWNX1 of the negative voltage holding transistor NX1 is disposed in the N-well DNWNX1 of the negative voltage holding transistor NX1. The N-well DNWNX1 of the negative voltage holding transistor NX1 can be a deep N-well disposed on the P substrate Psub. The P substrate Psub can be coupled to the ground terminal GND. In addition, the control terminal of the negative voltage holding transistor NX1 can be used for controlling the voltage of the P-well PWNX1 under the gate GNX1. To let the P-well PWNX1 of the negative voltage holding transistor NX1 receive the voltage from the control terminal of the negative voltage holding transistor NX1 even more effectively, the control terminal of the negative voltage holding transistor NX1 can further include a P-type region CNX1 in the P-well PWNX1. - The first terminal of the positive voltage holding transistor NY1 is an N-type region ANY1, the second terminal of the positive voltage holding transistor NY1 is an N-type region BNY1, and the control terminal of the positive voltage holding transistor NY1 includes a gate GNY1. The N-type regions ANY1 and BNY1 are both disposed in a P-well PWNY1 of the positive voltage holding transistor NY1, and the P-well PWNY1 of the positive voltage holding transistor NY1 is disposed in the N-well DNWNY1 of the positive voltage holding transistor NY1. The N-well DNWNY1 of the positive voltage holding transistor NY1 can be a deep N-well disposed on the P substrate Psub. In addition, the control terminal of the positive voltage holding transistor NY1 can be used for controlling the voltage of the P-well PWNY1 under the gate GNY1. To let the P-well PWNY1 of the positive voltage holding transistor NY1 receive the voltage from the control terminal of the positive voltage holding transistor NY1 even more effectively, the control terminal of the positive voltage holding transistor NY1 can further include a P-type region CNY1 in the P-well PWNY1.
- In
FIG. 2 , to make it even more convenient for the N-well DNWNX1 of the negative voltage holding transistor NX1 to couple to external elements, an N-type region DNX1 can be disposed in the N-well DNWNX1 of the negative voltage holding transistor NX1 so the N-well DNWNX1 can be coupled to the external elements via the N-type region DNX1. Similarly, to make it even more convenient for the N-well DNWNY1 of the positive voltage holding transistor NY1 to couple to external elements, an N-type region DNY1 can be disposed in the N-well DNWNY1 of the positive voltage holding transistor NY1 so the N-well DNWNY1 can be coupled to the external elements via the N-type region DNY1. However, in some embodiments of the present invention, the external elements can also be coupled to the N-well DNWNX1 and N-well DNWNY1 directly without going through the N-type region DNX1 and N-type region DNY1. - The first terminal (N-type region ANX1) of the negative voltage holding transistor NX1 is coupled to the control terminal (the gate GNX1 and the P-type region CNX1) of the negative voltage holding transistor NX1, and the second terminal (N-type region BNX1) of the negative voltage holding transistor NX1 is coupled to the N-well DNWNX1 of the negative voltage holding transistor NX1 directly or via the N-type region DNX1. The control terminal (the gate GNX1 and the P-type region CNX1) of the negative voltage holding transistor NX1 is coupled to the
anode 110. The first terminal (N-type region ANY1) of the positive voltage holding transistor NY1 is coupled to the second terminal (N-type region BNX1) of the negative voltage holding transistor NX1, and the second terminal (N-type region BNY1) of the positive voltage holding transistor NY1 is coupled to the control terminal (gate GNY1 and P-type region CNY1) of the positive voltage holding transistor NY1. The control terminal (the gate GNY1 and the P-type region CNY1) of the positive voltage holding transistor NY1 is coupled to thecathode 120. Also, the N-well DNWNX1 of the negative voltage holding transistor NX1 can also be coupled to the N-well DNWNY1 of the positive voltage holding transistor NY1 via the N-type regions DNX1 and DNY1. - In other words, the negative voltage holding transistor NX1 and the positive voltage holding transistor NY1 can be coupled in series between the
anode 110 and thecathode 120 in a manner of the back-to-back, that is, the control terminal (gate GNY1 and P-type region CNY1) of the positive voltage holding transistor NY1 is coupled to the second terminal (N-type region BNY1) of the positive voltage holding transistor NY1, which is closer to thecathode 120, while the control terminal (gate GNX1 and P-type region CNX1) of the negative voltage holding transistor NX1 is coupled to the first terminal (N-type region ANX1) of the negative voltage holding transistor NX1, which is closer to theanode 110. - When a voltage V1 of the
anode 110 is higher than the ground voltage of thecathode 120, the P-type region CNX1 and the N-type region ANX1 of the negative voltage holding transistor NX1 are both at the voltage V1, and the P-type region CNY1 and the N-type region BNY1 of the positive voltage holding transistor NY1 are both at the ground voltage. In this case, the P-well PWNX1 and the N-type region BNX1 of the negative voltage holding transistor NX1 can be seen as a forward diode, and the N-type region ANY1 and the P-well PWNY1 of the positive voltage holding transistor NY1 can be seen as a reverse diode. That is, as long as the voltage gap between the voltage V1 and the ground voltage does not exceed the breakdown voltage of the positive voltage holding transistor NY1, the reverse diode between N-type region ANY1 and the P-well PWNY1 of the positive voltage holding transistor NY1 will stay off so that the electrostaticdischarge protection device 100 will not conduct any currents. Furthermore, since the N-well DNWNX1 of the negative voltage holding transistor NX1 and the N-well DNWNY1 of the positive voltage holding transistor NY1 are coupled to the N-type region BNX1 of the negative voltage holding transistor NX1 and the N-type region ANY1 of the positive voltage holding transistor NY1, voltages of the N-well DNWNX1 of the negative voltage holding transistor NX1 and the N-well DNWNY1 of the positive voltage holding transistor NY1 are both higher than the ground voltage of the P-type substrate Psub, preventing current leakage of the electrostaticdischarge protection device 100. - However, if the voltage V1 is induced by electrostatic discharge, the voltage gap between the voltage V1 and the ground voltage may exceed the breakdown voltage of the positive voltage holding transistor NY1. In this case, the reverse diode between N-type region ANY1 and the P-well PWNY1 of the positive voltage holding transistor NY1 will break down and will be turned on so that the electrostatic
discharge protection device 100 can provide a discharge path for the huge current induced by the electrostatic discharge and prevent the chip from being damaged by the huge current. - Contrarily, when a voltage V2 of the
anode 110 is lower than the ground voltage of thecathode 120, that is, when the voltage between theanode 110 and thecathode 120 is negative, the P-type region CNX1 and the N-type region ANX1 of the negative voltage holding transistor NX1 are both at the voltage V2, and the P-type region CNY1 and the N-type region BNY1 of the positive voltage holding transistor NY1 are both at the ground voltage. In this case, the P-well PWNX1 and the N-type region BNX1 of the negative voltage holding transistor NX1 can be seen as a reverse diode, and the N-type region ANY1 and the P-well PWNY1 of the positive voltage holding transistor NY1 can be seen as a forward diode. That is, as long as the negative voltage gap between the voltage V2 and the ground voltage does not exceed the breakdown voltage of the negative voltage holding transistor NX1, the reverse diode between P-well PWNX1 and the N-type region BNX1 of the negative voltage holding transistor NX1 will stay off so that the electrostaticdischarge protection device 100 will not conduct any currents. Furthermore, although the N-well DNWNX1 of the negative voltage holding transistor NX1 and the N-well DNWNY1 of the positive voltage holding transistor NY1 may slightly lower than the ground voltage of the P-type substrate Psub, there is still no current path available around the P-type substrate Psub, avoiding the electrostaticdischarge protection device 100 from generating any leakage current. That is, the leakage current can be avoided because the N-well DNWNX1 of the negative voltage holding transistor NX1 and the N-well DNWNY1 of the positive voltage holding transistor NY1 are coupled to the N-type region BNX1 of the negative voltage holding transistor NX1 and the N-type region ANY1 of the positive voltage holding transistor NY1. - However, if the voltage V2 is induced by electrostatic discharge, the voltage gap between the voltage V2 and the ground voltage may exceed the breakdown voltage of the negative voltage holding transistor NX1. In this case, the reverse diode between P-well PWNX1 and the N-type region BNX1 of the negative voltage holding transistor NX1 will break down and will be turned on so that the electrostatic
discharge protection device 100 can provide a discharge path for the huge current induced by the electrostatic discharge and prevent the chip from being damaged by the huge current. - In other words, as long as the operational voltage range of the chip C1 does not exceed the breakdown voltage of the negative voltage holding transistor NX1 and the positive voltage holding transistor NY1, the electrostatic
discharge protection device 100 will not be turned on when the input signals of the chip C1 is within the operational voltage range so that the chip C1 can be operated normally. Once the electrostatic discharge occurs, the negative voltage holding transistor NX1 or the positive voltage holding transistor NY1 may break down so that the electrostaticdischarge protection device 100 can provide a discharge path for the huge current induced by the electrostatic discharge and prevent the chip from being damaged. - Consequently, the electrostatic
discharge protection device 100 can protect the chip C1 from being damaged by the positive or negative electrostatic discharge. - In
FIG. 1 , theanode 110 of the electrostaticdischarge protection device 100 is coupled to the negative voltage holding transistor NX1, and thecathode 120 of the electrostaticdischarge protection device 100 is coupled to the positive voltage holding transistor NY1. However, in some embodiments of the present invention, the negative voltage holding transistor can also be coupled to the cathode and the positive voltage holding transistor can also be coupled to the anode.FIG. 3 shows an electrostaticdischarge protection device 200 according to one embodiment of the present invention. The electrostaticdischarge protection device 200 includes ananode 210, acathode 220, a negative voltage holding transistor NX1′, and a positive voltage holding transistor NY1′. The negative voltage holding transistor NX1′ has a similar structure as the negative voltage holding transistor NX1 does, and the positive voltage holding transistor NY1′ has a similar structure as the positive voltage holding transistor NY1 does. The main difference between the electrostaticdischarge protection devices FIG. 4 shows a cross-section of the structure of the electrostaticdischarge protection device 200. - In
FIG. 3 the positive voltage holding transistor NY1′ has a first terminal, a second terminal, a control terminal, and an N-well DNWNY1′, and negative voltage holding transistor NX1′ has a first terminal, a second terminal, a control terminal, and a N-well DNWNX1′. InFIG. 4 , the first terminal of the positive voltage holding transistor NY1′ is the N-type region ANY1′, the second terminal of the positive voltage holding transistor NY1′ is the N-type region BNY1′, and the control terminal of the positive voltage holding transistor NY1′ includes the gate GNY1′. The first terminal of the negative voltage holding transistor NX1′ is the N-type region ANX1′, the second terminal of the negative voltage holding transistor NX1′ is the N-type region BNX1′, and the control terminal of the negative voltage holding transistor NX1′ includes the gate GNX1′. In addition, the control terminal of the positive voltage holding transistor NY1′ can be used to control the voltage level of the P-well PWNY1′, under the gate GNY1′. To let the P-well PWNY1′ of the positive voltage holding transistor NY1′ receive the voltage from the control terminal of the positive voltage holding transistor NY1′ even more effectively, the control terminal of the positive voltage holding transistor NY1′ can further include a P-type region CNY1′ in the P-well PWNY1′. To let the P-well PWNX1′ of the negative voltage holding transistor NX1′ receive the voltage from the control terminal of the negative voltage holding transistor NX1′ even more effectively, the control terminal of the negative voltage holding transistor NX1′ can further include a P-type region CNX1′ in the P-well PWNX1′. - The first terminal (N-type region ANY1′) of the positive voltage holding transistor NY1′ is coupled to the
anode 210, and the second terminal (N-type region BNY1′) of the positive voltage holding transistor NY1′ is coupled to the control terminal (the gate GNY1′ and the P-type region CNY1′) of the positive voltage holding transistor NY1′ and coupled to the N-well DNWNY1′ of the positive voltage holding transistor NY1′ via the N-type region DNY1′. The first terminal (N-type region ANX1′) of the negative voltage holding transistor NX1′ is coupled to control terminal (the gate GNX1′ and the P-type region CNX1′) of the negative voltage holding transistor NX1′, and the second terminal (N-type region BNX1′) of the negative voltage holding transistor NX1′ is coupled to thecathode 220. The control terminal (the gate GNX1′ and the P-type region CNX1′) of the negative voltage holding transistor NX1′ is coupled to the second terminal (N-type region BNY1′) of the positive voltage holding transistor NY1′, and the N-well DNWNY1′ of the positive voltage holding transistor NY1′ is coupled to the N-well DNWNX1′ of the negative voltage holding transistor NX1′ via the N-type regions DNX1′ and DNY1′. - Since the negative voltage holding transistor NX1′ and the positive voltage holding transistor NY1′ are still coupled in series with a manner of back-to-back, the electrostatic
discharge protection device 200 is still able to protect the chip C1. In other words, when the voltage V1 of theanode 210 is higher than the ground voltage of thecathode 220, the N-type region ANY1′ and the P-well PWNY1′ of the positive voltage holding transistor NY1′ will form a reverse diode. Therefore, the electrostaticdischarge protection device 200 will be turned on only when the voltage gap between the voltage V1 and the ground voltage exceeds the breakdown voltage of the positive voltage holding transistor NY1′. Similarly, when the voltage V2 of theanode 210 is lower than the ground voltage of thecathode 220, the N-type region BNX1′ and the P-well PWNX1′ of the negative voltage holding transistor NX1′ will form a reverse diode. Therefore, the electrostaticdischarge protection device 200 will be turned on only when the negative voltage gap between the voltage V2 and the ground voltage exceeds the breakdown voltage of the negative voltage holding transistor NX1′. Consequently, the electrostaticdischarge protection device 200 can protect the chip C1 from being damaged without affecting the normal operations of the chip C1. - In addition, although the electrostatic
discharge protection devices -
FIG. 5 shows an electrostaticdischarge protection device 300. The electrostaticdischarge protection device 300 includes ananode 310, acathode 320, a plurality of negative voltage holding transistors and a plurality of positive voltage holding transistors. Theanode 310 is coupled to an input terminal IN of a chip C2 to be protected, and thecathode 320 is coupled to the ground terminal GND. If the operational voltage range of the chip C2 to be protected is between −8V and 14V and the breakdown voltages of the negative voltage holding transistors and the positive voltage holding transistors are about 5V, then theelectrostatic discharge device 300 may include two negative voltage holding transistors NX1 and NX2 and three positive voltage holding transistors NY1, NY2, and NY3. - In this embodiment, the negative voltage holding transistors NX1 and NX2 and the positive voltage holding transistors NY1, NY2, and NY3 are all N-type metal oxide semiconductor transistors. The first terminal (N-type region) of the negative voltage holding transistor NX2 is coupled to the control terminal (P-type region) of the negative voltage holding transistor NX2, the second terminal (N-type region) of the negative voltage holding transistor NX2 is coupled to the N-well DNWNX2 of the negative voltage holding transistor NX2, and the control terminal (P-type region) of the negative voltage holding transistor NX2 is coupled to the
anode 310. The first terminal (N-type region) of the negative voltage holding transistor NX1 is coupled to the control terminal (P-type region) of the of the negative voltage holding transistor NX1, the second terminal (N-type region) of the negative voltage holding transistor NX1 is coupled to the N-well DNWNX1 of the negative voltage holding transistor NX1, and the control terminal (P-type region) of the negative voltage holding transistor NX1 is coupled to the second terminal (N-type region) of the negative voltage holding transistor NX2. - The first terminal (N-type region) of the positive voltage holding transistor NY1 is coupled to the second terminal (N-type region) of the negative voltage holding transistor NX1 and the N-well DNWNY1 of the positive voltage holding transistor NY1, and the second terminal (N-type region) of the positive voltage holding transistor NY1 is coupled to the control terminal (P-type region) of the positive voltage holding transistor NY1. The first terminal (N-type region) of the positive voltage holding transistor NY2 is coupled to the second terminal (N-type region) of the positive voltage holding transistor NY1 and the N-well DNWNY2 of the positive voltage holding transistor NY2, and the second terminal (N-type region) of the positive voltage holding transistor NY2 is coupled to the control terminal (P-type region) of the positive voltage holding transistor NY2. The first terminal (N-type region) of the positive voltage holding transistor NY3 is coupled to the second terminal (N-type region) of the positive voltage holding transistor NY2 and the N-well DNWNY3 of the positive voltage holding transistor NY3, the second terminal (N-type region) of the positive voltage holding transistor NY3 is coupled to the control terminal (P-type region) of the positive voltage holding transistor NY3, and the control terminal (P-type region) of the positive voltage holding transistor NY3 is coupled to the
cathode 320. - Consequently, when the voltage V1 of the
anode 310 is higher than the ground voltage of thecathode 320, the first terminal (N-type region) and the P-well below the control terminal in the positive voltage holding transistor NY1 will form a reverse diode, the first terminal (N-type region) and the P-well below the control terminal in the positive voltage holding transistor NY2 will form a reverse diode, and the first terminal (N-type region) and the P-well below the control terminal in the positive voltage holding transistor NY3 will form a reverse diode. Also, since the N-well DNWNY1 of the positive voltage holding transistor NY1, the N-well DNWNY2 of the positive voltage holding transistor NY2, and the N-well DNWNY3 of the positive voltage holding transistor NY3 are not coupled to any fixed voltage, there is no discharging path between the N-wells DNWNY1, DNWNY2 and DNWNY3 and the P-type substrate. Therefore, the electrostaticdischarge protection device 300 will be turned on only when the voltage gap between the voltage V1 and the ground voltage exceeds the sum of the breakdown voltages of the positive voltage holding transistors NY1, NY2, and NY3, that is, when the voltage gap between the voltage V1 and the ground voltage exceeds 15V. Since the operational voltage range of the chip C2 is between −8V and 14V and does not exceed the sum of the breakdown voltages of the positive voltage holding transistors NY1, NY2, and NY3, the electrostaticdischarge protection device 300 will not be turned on under normal operations so the chip C2 can still function normally. - Contrarily, when the voltage V2 of the
anode 310 is lower than the ground voltage of thecathode 320, the first terminal (N-type region) and the P-well below the control terminal in the negative voltage holding transistor NX1 will forma reverse diode and the first terminal (N-type region) and the P-well below the control terminal in the negative voltage holding transistor NX2 will form a reverse diode. Also, since the N-well DNWNX1 of the negative voltage holding transistor NX1 and the N-well DNWNX2 of the negative voltage holding transistor NX2 are not coupled to any fixed voltage, there is no discharging path between the N-wells DNWNX1 and DNWNX2 and the P-type substrate. Therefore, the electrostaticdischarge protection device 300 will be turned on only when the negative voltage gap between the voltage V2 and the ground voltage exceeds the sum of the breakdown voltages of the negative voltage holding transistors NX1 and NX2, that is, when the negative voltage gap between the voltage V2 and the ground voltage exceeds −10V. Since the operational voltage range of the chip C2 is between −8V and 14V and does not exceed the sum of the breakdown voltages of the negative voltage holding transistors NX1 and NX2, the electrostaticdischarge protection device 300 will not be turned on under normal operations so the chip C2 can still function normally. - Consequently, the electrostatic
discharge protection device 300 can increase the holding voltage by adding positive voltage holding transistors or negative voltage holding transistors to protect the chip C2 from being damaged by the electrostatic discharge without affecting the normal operations of the chip C2. - In addition, in electrostatic
discharge protection device 300, the N-well DNWNY1 of the positive voltage holding transistor NY1, the N-well DNWNY2 of the positive voltage holding transistor NY2 and the N-well DNWNY3 of the positive voltage holding transistor NY3 are coupled to the first terminal of the positive voltage holding transistor NY1, the first terminal of the positive voltage holding transistor NY2, and the first terminal of the positive voltage holding transistor NY3 respectively, and the N-well DNWNX1 of the negative voltage holding transistor NX1 and the N-well DNWNX2 of the negative voltage holding transistor NX2 are coupled to the first terminal of the negative voltage holding transistor NX1 and the first terminal of the negative voltage holding transistor NX2 respectively. However, in some embodiments, the N-well DNWNY1 of the positive voltage holding transistor NY1, the N-well DNWNY2 of the positive voltage holding transistor NY2, the N-well DNWNY3 of the positive voltage holding transistor NY3, the N-well DNWNX1 of the negative voltage holding transistor NX1 and the N-well DNWNX2 of the negative voltage holding transistor NX2 can all be coupled together. -
FIG. 6 shows anelectrostatic discharge device 400. Theelectrostatic discharge device 400 includes ananode 410, acathode 420, positive voltage holding transistors NY1, NY2 and NY3, and negative voltage holding transistors NX1 and NX2. The electrostaticdischarge protection devices discharge protection device 400. Since the N-well DNWNY1 of the positive voltage holding transistor NY1, the N-well DNWNY2 of the positive voltage holding transistor NY2, the N-well DNWNY3 of the positive voltage holding transistor NY3, the N-well DNWNX1 of the negative voltage holding transistor NX1 and the N-well DNWNX2 of the negative voltage holding transistor NX2 are not coupled to any fixed voltage, there is still no discharge path between P-type substrate and the N-wells DNWNY1, DNWNY2, DNWNY3, DNWNX1 and DNWNX2. Therefore, theelectrostatic discharge device 400 can still increase the holding voltage by adding positive voltage holding transistors or negative voltage holding transistors to meet the requirement of the system. - Although in electrostatic
discharge protection devices FIG. 7 shows an electrostaticdischarge protection device 500. The electrostaticdischarge protection devices discharge protection device 500 are coupled between theanode 510 and thecathode 520 in an order of the positive voltage holding transistor NY1′, the negative voltage holding transistor NX1′, the positive voltage holding transistor NY2′, the negative voltage holding transistor NX2′, and the positive voltage holding transistor NY3′. Since each of the positive voltage holding transistors is coupled to the neighboring negative voltage holding transistors with a manner of back-to-back, each of the negative voltage holding transistors is coupled to the neighboring positive voltage holding transistors with a manner of back-to-back, and the N-wells DNWNY1′, DNWNY2′ and DNWNY3′ of the positive voltage holding transistors NY1′, NY2′ and NY3′ and the N-wells DNWNX1′ and DNWNX2′ of the negative voltage holding transistors NX1′ and NX2′ are all floating without being coupled to any fixed voltage, the breakdown voltages of the positive voltage holding transistors NY1′, NY2′ and NY3′ can still be added to increase the holding voltage of the electrostaticdischarge protection device 500 and breakdown voltages of the negative voltage holding transistors NX1′ and NX2′ can also be added to increase the holding voltage of the electrostaticdischarge protection device 500. - In other words, when the operational voltage of the chip to be protected varies, the electrostatic discharge protection device may include a corresponding number of negative voltage holding transistors and/or positive voltage holding transistors while each of the negative voltage holding transistors and positive voltage holding transistors can be coupled in a random order with a manner of back-to-back. For example, the electrostatic
discharge protection device 100 may further include at least one negative voltage holding transistor between theanode 110 and the negative voltage holding transistor NX1, or at least one negative voltage holding transistor between the positive voltage holding transistor NY1 and thecathode 120, or at least one positive voltage holding transistor between theanode 110 and the negative voltage holding transistor NX1, or at least one positive voltage holding transistor between the positive voltage holding transistor NY1 and thecathode 120. - In addition, the electrostatic
discharge protection devices 100 to 500 all use N-type metal oxide semiconductor transistors. However, in some embodiments of the present invention, the electrostatic discharge protection devices may also use P-type metal oxide semiconductor transistors.FIG. 8 shows an electrostaticdischarge protection device 600 andFIG. 9 shows a cross-section of the structure of the electrostaticdischarge protection device 600. Theelectrostatic discharge device 600 includes ananode 610, acathode 620, a negative voltage holding transistor PX1 and a positive voltage holding transistor PY1. Theanode 610 is coupled to the input terminal IN of the chip C1 to be protected, and thecathode 620 is coupled to the ground terminal GND. The negative voltage holding transistor PX1 and the positive voltage holding transistor PY1 are both P-type metal oxide semiconductor transistors. - In
FIG. 8 , the negative voltage holding transistor PX1 has a first terminal, a second terminal, a control terminal, and an N-well NWPX1, and the positive voltage holding transistor PY1 has a first terminal, a second terminal, a control terminal, and an N-well NWPY1. InFIG. 9 , the P-type regions APX1 and BPX1 are disposed in the N-well NWPX1 the P-type regions APY1 and BPY1 are disposed in the N-well NWPY1, and the N-well NWPY1 and N-well NWPX1 are disposed in the P-type substrate Psub. The first terminal of the negative voltage holding transistor PX1 is the P-type region APX1, the second terminal of the negative voltage holding transistor PX1 is the P-type region BPX1, and the control terminal of the negative voltage holding transistor PX1 includes a gate GPX1. The first terminal of the positive voltage holding transistor PY1 is the P-type region APY1, the second terminal of the positive voltage holding transistor PY1 is the P-type region BPY1, and the control terminal of the positive voltage holding transistor PY1 includes a gate GPY1. The gate GPY1 of the positive voltage holding transistor PY1 can be used for controlling the voltage of the N-well NWPY1 under the gate GPY1, and the gate GPX1 of the negative voltage holding transistor PX1 can be used for controlling the voltage of the N-well NWPX1 under the gate GPX1. Therefore, to control the voltage level of the N-well NWPY1 of the positive voltage holding transistor PY1 even more effectively, an N-type region CPY1 can be disposed in the N-well NWPY1 for coupling to external elements. Also to control the voltage level of the N-well NWPX1 of the negative voltage holding transistor PX1 even more effectively, an N-type region CPX1 can be disposed in the N-well NWPX1 for coupling to external elements. - The first terminal (P-type region APX1) of the negative voltage holding transistor PX1 is coupled to the
anode 610, and the second terminal (P-type region BPX1) of the negative voltage holding transistor PX1 is coupled to the control terminal (gate GPX1) of the negative voltage holding transistor PX1 and coupled to the N-well NWPX1 of the negative voltage holding transistor PX1 via the N-type region CPX1. The first terminal (P-type region APY1) of the positive voltage holding transistor PY1 is coupled to the control terminal (gate GPY1) of the positive voltage holding transistor PY1, the second terminal (P-type region BPY1) of the positive voltage holding transistor PY1 is coupled to thecathode 620, and the control terminal (gate GPY1) of the positive voltage holding transistor PY1 is coupled to the second terminal (P-type region BPX1) of the negative voltage holding transistor PX1. Also, the N-well NWPY1 of the positive voltage holding transistor PY1 is coupled to N-well NWPX1 of the negative voltage holding transistor PX1, but the N-well NWPY1 of the positive voltage holding transistor PY1 and the N-well NWPX1 of the negative voltage holding transistor PX1 are not coupled to any fixed voltage. - In the electrostatic
discharge protection device 600, the N-well NWPX1 of the negative voltage holding transistor PX1, the N-well NWPY1 of the positive voltage holding transistor PY1, the second terminal (P-type region BPX1) of the negative voltage holding transistor PX1, and the first terminal (P-type region APY1) of the positive voltage holding transistor PY1 are coupled together. In this embodiment, the control terminal (gate GPX1) and the N-type region CPX1 of the negative voltage holding transistor PX1 can both be used to input voltage to the N-well NWPX1 so the control terminal (gate GPX1) and the N-type region CPX1 of the negative voltage holding transistor PX1 are at the same voltage level. Also, the control terminal (gate GPY1 and the N-type region CPY1 of the positive voltage holding transistor PY1 can both be used to input voltage to the N-well NWPY1 so the control terminal (gate GPY1) and the N-type region CPY1 of the positive voltage holding transistor PY1 are at the same voltage level. - Consequently, when the voltage V1 of the
anode 610 is higher than the ground voltage of thecathode 620, the N-well NWPY1 and the P-type region BPY1 of the negative voltage holding transistor PY1 will form a reverse diode. Therefore, the electrostaticdischarge protection device 600 will be turned on only when the voltage gap between the voltage V1 and the ground voltage exceeds the breakdown voltage of the positive voltage holding transistor PY1. Similarly, when the voltage V2 of theanode 610 is lower than the ground voltage of thecathode 620, the N-well NWPX1 and the P-type region APX1 of the positive voltage holding transistor PX1 will form a reverse diode. Therefore, the electrostaticdischarge protection device 600 will be turned on only when the negative voltage gap between the voltage V2 and the ground voltage exceeds the breakdown voltage of the negative voltage holding transistor PX1. Therefore, the electrostaticdischarge protection device 600 can protect the chip C1 from being damaged by the electrostatic discharge without affecting the normal operation of the chip C1. - Furthermore, since different types of transistors may have different breakdown voltages, different types of transistors may be chosen to produce the electrostatic discharge protection device according to the operational voltage range of the chip to be protected. For example, the electrostatic discharge protection device may adopt laterally diffused metal oxide semiconductor transistors, double diffused drain metal oxide semiconductor transistors, fully depleted metal oxide semiconductor transistors and/or bipolar junction transistors to be the negative voltage holding transistors and/or the positive voltage holding transistors.
-
FIG. 10 shows a flow chart of amethod 700 for producing an electrostatic discharge protection device. Themethod 700 includes steps S710 to S750. - S710: deriving an operational voltage range of an input terminal to be protected;
- S720: determining types of at least one negative voltage holding transistor and at least one positive voltage holding transistor according to the operational voltage range;
- S730: determining a total number of the at least one negative voltage holding transistor and a total number of the at least one positive voltage holding transistor according to the operational voltage range and the types of the at least one negative voltage holding transistor and the at least one positive voltage holding transistor;
- S740: coupling the at least one negative voltage holding transistor and the at least one positive voltage holding transistor in series between the input terminal and a ground terminal in a manner of back-to-back;
- S750: coupling an N-well of a first positive voltage holding transistor of the at least one positive voltage holding transistor to an N-well of a first negative voltage holding transistor of the at least one negative voltage holding transistor, the N-well of first positive voltage holding transistor being floating.
- In step S710, the operational voltage range of the chip to be protected is derived firstly, and in step S720, the types of the negative voltage holding transistors and the positive voltage holding transistors are determined according to the operational voltage range.
- For example, the step S720 may include determining the positive voltage holding transistor to be N-type metal oxide semiconductor transistors, P-type metal oxide semiconductor transistors, PNP bipolar junction transistors, or NPN bipolar junction transistors when an upper limit of the operational voltage range is below 15V, determining the positive voltage holding transistors to be N-type double diffused drain metal oxide semiconductor transistors or P-type double diffused drain metal oxide semiconductor transistors when the upper limit of the operational voltage range is between 15V and 30V, determining the positive voltage holding transistors to be N-type fully depleted metal oxide semiconductor transistors, P-type fully depleted metal oxide semiconductor transistors, N-type laterally diffused metal oxide semiconductor transistors or P-type laterally diffused metal oxide semiconductor transistors when the upper limit of the operational voltage range is between 30V and 65V, and/or determining the positive voltage holding transistors to be N-type laterally diffused metal oxide semiconductor transistors or P-type laterally diffused metal oxide semiconductor transistors when the upper limit of the operational voltage range is greater than 65V.
- Similarly, the step S720 may also include determining the negative voltage holding transistor to be N-type metal oxide semiconductor transistors, P-type metal oxide semiconductor transistors, PNP bipolar junction transistors, or NPN bipolar junction transistors when an lower limit of the operational voltage range is above −15V, determining the negative voltage holding transistors to be N-type double diffused drain metal oxide semiconductor transistors or P-type double diffused drain metal oxide semiconductor transistors when the lower limit of the operational voltage range is between −15V and −30V, determining the negative voltage holding transistors to be N-type fully depleted metal oxide semiconductor transistors, P-type fully depleted metal oxide semiconductor transistors, N-type laterally diffused metal oxide semiconductor transistors or P-type laterally diffused metal oxide semiconductor transistors when the lower limit of the operational voltage range is between −30V and −65V, and/or determining the negative voltage holding transistors to be N-type laterally diffused metal oxide semiconductor transistors or P-type laterally diffused metal oxide semiconductor transistors when the lower limit of the operational voltage range is below −65V.
- For example, if the operational voltage range of the chip C2 to be protected is between −8V and 14V, then the positive voltage holding transistors and the negative voltage holding transistors may be implemented by using N-type metal oxide semiconductor transistors, P-type metal oxide semiconductor transistors, PNP bipolar junction transistors, or NPN bipolar junction transistors due to the operational voltage range of the chip C2 is below 15V and above −15V.
- After determining the types of the positive voltage holding transistors and the negative voltage holding transistors, in step S730, the total number of the negative voltage holding transistors and the total number of the positive voltage holding transistors is determined according to the operational voltage range and the types of the negative voltage holding transistors and the positive voltage holding transistors. To ensure that the electrostatic discharge device can protect the chip C2 without affecting the normal operations of the chip C2, when determining the total number of the negative voltage holding transistors and the total number of the positive voltage holding transistors, the sum of breakdown voltages of the positive voltage holding transistors should not be smaller than the upper limit of the operational voltage range and the sum of breakdown voltages of the negative voltage holding transistors should not be smaller than an absolute value of the lower limit of the operational voltage range.
- For example, if the operational voltage range of the input terminal of the chip C2 is between −8V and 14V, then the positive voltage holding transistors and the negative voltage holding transistors can be implemented by N-type metal oxide semiconductor transistors. Also, since the breakdown voltage of an N-type metal oxide semiconductor transistor is about 5V, the total number of the positive voltage holding transistors can be set to 3 and the total number of the negative voltage holding transistors can be set to 2.
- After determining the total number and types of the positive voltage holding transistors and the negative voltage holding transistors, in the step S740, the at least one negative voltage holding transistor and the at least one positive voltage holding transistor can be coupled in series between the input terminal and the ground terminal in a manner of back-to-back. For example, the positive voltage holding transistors and the negative voltage holding transistors can be coupled between the input terminal IN of the chip C2 and the ground terminal GND as the electrostatic
discharge protection device 300 shown inFIG. 3 . In this case, the N-well DNWNY1 of the positive voltage holding transistor NY1 will be coupled to the N-well DNWNX1 of the negative voltage holding transistor NX1 in the step S750 while the N-well DNWNY1 of the positive voltage holding transistor NY1 and the N-well DNWNX1 of the negative voltage holding transistor NX1 remain floating. - In some embodiments of the present invention, if the chip to be protected is the chip C1, then the
method 700 may further include steps S810 to S860 for producing the electrostaticdischarge protection device 100 after determining the types and the total numbers of the positive voltage holding transistor and the negative voltage holding transistor.FIG. 11 shows a flow chart of the steps S810 to S860. - S810 coupling a P-type region CNX1 of the negative voltage holding transistor NX1 to the input terminal IN;
- S820 coupling an N-type region BNX1 of the negative voltage holding transistor NX1 to the N-well DNWNX1 of the negative voltage holding transistor NX1;
- S830 coupling an N-type region ANX1 of the negative voltage holding transistor NX1 to the P-type region CNX1 of the negative voltage holding transistor NX1;
- S840 coupling an N-type region ANY1 of the positive voltage holding transistor NY1 to the N-type region BNX1 of the negative voltage holding transistor NX1;
- S850 coupling a P-type region CNY1 of the positive voltage holding transistor NY1 to the ground terminal GND; and
- S860 coupling an N-type region BNY1 of the positive voltage holding transistor NY1 to the P-type region CNY1 of the positive voltage holding transistor NY1.
-
FIG. 12 shows a flow chart of the steps S910 to S960. In some embodiments of the present invention, if the chip to be protected is the chip C1, then themethod 700 may further include steps S910 to S960 for producing the electrostaticdischarge protection device 200. - S910 coupling an N-type region ANY1′ of the positive voltage holding transistor NY1′ to the input terminal IN;
- S920 coupling a P-type region CNY1′ of the positive voltage holding transistor NY1′ to the N-well DNWNY1′ of the positive voltage holding transistor NY1′;
- S930 coupling an N-type region BNY1′ of the positive voltage holding transistor NY1′ to the P-type region CNY1′ of the positive voltage holding transistor NY1′;
- S940 coupling a P-type region CNX1′ of the negative voltage holding transistor NX1′ to the P-type region CNY1′ of the positive voltage holding transistor NY1′;
- S950: coupling an N-type region BNX1′ of the negative voltage holding transistor NX1′ to the ground terminal GND; and
- S960: coupling an N-type region ANX1′ of the negative voltage holding transistor NX1′ to the P-type region CNX1′ of the negative voltage holding transistor NX1′.
-
FIG. 13 shows a flow chart of the steps S1010 to S1060. In some embodiments of the present invention, if P-type metal oxide semiconductor transistors are chosen to implement the positive voltage holding transistor and the negative voltage holding transistor, then themethod 700 may further include steps S1010 to S1060 and can be used for producing the electrostaticdischarge protection device 600. - S1010: coupling a P-type region APX1 of the negative voltage holding transistor PX1 to the input terminal IN;
- S1020: coupling an N-type region CPX1 and a gate GPX1 of the negative voltage holding transistor PX1 to the N-well DNWPX1 of the negative voltage holding transistor PX1;
- S1030: coupling a P-type region BPX1 of the negative voltage holding transistor PX1 to the N-type region CPX1 of the negative voltage holding transistor PX1;
- S1040: coupling an N-type region CPY1 and a gate GPY1 of the positive voltage holding transistor PY1 to the N-type region CPX1 and a gate GPX1 of the negative voltage holding transistor PX1;
- S1050: coupling a P-type region BPY1 of the first positive voltage holding transistor PY1 to the ground terminal GND; and
- S1060: coupling a P-type region APY1 of the positive voltage holding transistor PY1 to the N-type region CPY1 and the gate GPY1 of the positive voltage holding transistor PY1.
- The
method 700 provides a method for producing an electrostatic discharge protection device according to the operational voltage range of a chip to be protected. Also, according to themethod 700, the holding voltage of the electrostatic discharge protection device can be increased by adding positive voltage holding transistors and/or negative voltage holding transistors, and the electrostatic discharge protection device can provide protection to the chip from electrostatic discharge currents of dual directions. Therefore, the design of the electrostatic discharge protection device is even more flexible than the prior art. - In summary, the electrostatic discharge protection device and the method for producing electrostatic discharge protection device provided by the embodiments of the present invention can increase the holding voltage of the electrostatic discharge protection device by adding positive voltage holding transistors and/or negative voltage holding transistors, and are able to protect the chip from electrostatic discharge currents of dual directions. Therefore, the design of the electrostatic discharge protection device can be more flexible than the prior art.
- Those skilled in the art will readily observe that numerous modifications and alterations of the device and method may be made while retaining the teachings of the invention. Accordingly, the above disclosure should be construed as limited only by the metes and bounds of the appended claims.
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EP3382757A1 (en) * | 2017-03-28 | 2018-10-03 | Nxp B.V. | Electrostatic discharge (esd) protection device and method for operating an esd protection device |
US20200194459A1 (en) * | 2018-12-18 | 2020-06-18 | Vanguard International Semiconductor Corporation | Semiconductor devices and methods for fabricating the same |
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Cited By (4)
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EP3382757A1 (en) * | 2017-03-28 | 2018-10-03 | Nxp B.V. | Electrostatic discharge (esd) protection device and method for operating an esd protection device |
CN108666997A (en) * | 2017-03-28 | 2018-10-16 | 恩智浦有限公司 | Electrostatic discharge (ESD) protection device and method for operating an ESD protection device |
US10431578B2 (en) | 2017-03-28 | 2019-10-01 | Nxp B.V. | Electrostatic discharge (ESD) protection device and method for operating an ESD protection device |
US20200194459A1 (en) * | 2018-12-18 | 2020-06-18 | Vanguard International Semiconductor Corporation | Semiconductor devices and methods for fabricating the same |
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CN106549012A (en) | 2017-03-29 |
US9607977B1 (en) | 2017-03-28 |
CN106549012B (en) | 2021-02-02 |
TWI649851B (en) | 2019-02-01 |
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