US20150021641A1 - Light emitting device - Google Patents
Light emitting device Download PDFInfo
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- US20150021641A1 US20150021641A1 US14/333,748 US201414333748A US2015021641A1 US 20150021641 A1 US20150021641 A1 US 20150021641A1 US 201414333748 A US201414333748 A US 201414333748A US 2015021641 A1 US2015021641 A1 US 2015021641A1
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- light emitting
- emitting element
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- emitting device
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Images
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- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
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- H10H20/01335—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials the light-emitting regions comprising nitride materials
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
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- H10H20/0361—Manufacture or treatment of packages of wavelength conversion means
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
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- H10H20/853—Encapsulations characterised by their shape
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
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- H10H20/85—Packages
- H10H20/852—Encapsulations
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Definitions
- the present disclosure relates to a light emitting device.
- Patent Literature 1 JP 2012-156443A
- An object of the disclosure is to provide a light emitting device in which occurrence of color unevenness can be suppressed.
- Embodiments of the present invention can provide a light emitting device which can suppress color unevenness.
- FIG. 1 is a schematic cross-sectional view showing a schematic structure of a light emitting device.
- FIG. 2 is a schematic plan view showing the light emitting device.
- FIGS. 3A to 3C are schematic cross-sectional views for illustrating a method of manufacturing the light emitting device.
- FIGS. 4A to 4C are schematic cross-sectional views for illustrating the method of manufacturing the light emitting device.
- FIGS. 5A to 5C are schematic cross-sectional views for illustrating the method of manufacturing the light emitting device.
- FIGS. 6A to 6C are schematic cross-sectional views for illustrating the method of manufacturing the light emitting device.
- FIG. 7 is a schematic cross-sectional view for illustrating the method of manufacturing the light emitting device.
- FIG. 1 is a schematic cross-sectional view showing a structure of a light emitting device 100 .
- FIG. 2 is a schematic plan view showing the light emitting device 100 .
- a light emitting device 100 includes a substrate member 10 , at least one light emitting element 20 , a resin member 30 , an insulating layer 40 , a fluorescent material layer 50 , and a mold member 60 .
- the substrate member 10 includes a substrate body 11 , an n-side wiring electrode 12 , and a p-side wiring electrode 13 .
- the substrate body 11 is made of an electrically insulating material.
- electrically insulating material include glass epoxy and silicone glass, ceramics such as alumina and aluminum nitride, and LTCC (low-temperature calcinated ceramic).
- the n-side wiring electrode 12 and the p-side wiring electrode 13 are arranged on the surface 10 S of the substrate member 10 .
- the n-side wiring electrode 12 and the p-side wiring electrode 13 are connected to respective external electrodes.
- the light emitting element 20 include an n-side electrode 21 , a p-side electrode 22 , and a semiconductor layer 23 .
- the n-side electrode 21 is connected to an n-side wiring electrode 12 via, for example, a bump B 1 made of Au.
- the p-side electrode 22 is connected to a p-side wiring electrode 13 via, for example, a bump B 2 made of Au.
- the light emitting element 20 and the substrate member 10 are to be electrically and physically connected, which can be satisfied by the use of an electrically conductive bonding material (for example, a solder material), as an alternative to the use of the bumps B 1 , B 2 .
- an electrically conductive bonding material for example, a solder material
- Examples of the constituent materials of the n-side electrode 21 and the p-side electrode 22 include Au, Ni, Ti, and Al.
- the semiconductor layer 23 is disposed on the n-side electrode 21 and the p-side electrode 22 .
- the semiconductor layer 23 includes an n-type buffer layer 23 a , an n-type semiconductor layer 23 b, an active layer 23 c, and a p-type semiconductor layer 23 d.
- the n-type buffer layer 23 a, the n-type semiconductor layer 23 b, and the p-type semiconductor layer 23 d may be constituted with at least one of, for example, gallium nitride, aluminum gallium nitride, and aluminum nitride, but are not limited thereto.
- the active layer 23 c can be constituted with indium gallium nitride, but is not limited thereto.
- the n-type buffer layer 23 a serves as the light emission surface 20 S of the light emitting element 20 , but a different layer than the n-type buffer layer 23 a may serve as the light emission surface 20 S.
- the light emission surface 20 S may be constituted with, for example, the n-type semiconductor layer or a growth substrate (a sapphire substrate).
- the light emission surface 20 S of the light emitting element 20 is surrounded by a resin member 30 which has a top portion 31 located higher (an upper side) than the light emission surface 20 S.
- the light emission surface 20 S is covered with the insulating layer 40 .
- the resin member 30 surrounds the sides of the light emitting element 20 .
- the resin member 30 covers the whole periphery of side surfaces of the light emitting element 20 .
- the resin member 30 supports the semiconductor layer 23 during a laser lift-off operation (see FIG. 5C ) to be described below. Accordingly, the resin member 30 is preferably filled between the substrate member 10 and the light emitting element 20 .
- the resin member 30 is further disposed to be in contact with each of the side surfaces of the light emitting element 20 so as to be narrower (smaller in the thickness as measured in a direction parallel to the substrate 10 ) as the distance from the substrate member 10 increases (i.e. toward the upper side).
- the top portions 31 of the resin member 30 are located at higher positions (upper side) than the light emission surface 20 S of the light emitting element 20 . That is, a recess 32 is defined by the light emission surface 20 S of the light emitting element 20 as its bottom surface and the resin member 30 as its wall portion.
- Such a recess 32 may be formed by, as described below, disposing a resin member 30 reaching to the side surfaces of the sapphire substrate 70 and removing the sapphire substrate 70 from the semiconductor layer 23 side so that the plane of the light emission surface 20 S is lowered by the thickness of the sapphire substrate 70 .
- the distance (i.e. height) between the light emission surface 20 S of the light emitting element 20 and the top portions 31 is approximately the same as the thickness of the sapphire substrate 70 which is about 10 ⁇ m to about 150 ⁇ m.
- the resin member 30 includes outer wall surfaces 30 S and inner wall surfaces 30 T.
- the outer wall surfaces 30 S and the inner wall surfaces 30 T of the top portions 31 are covered with an insulating layer 40 .
- the resin member 30 can be made of at least one insulating materials selected from, for example, a silicone resin, an epoxy resin, and a fluororesin. Particularly, a silicone resin which has high heat-resisting property and high light-resisting property is preferable. Also, the resin member 30 preferably contains a light-reflecting member. For example, a white filler material such as titanium oxide, silicon oxide, or alumina may be mixed in the resin member 30 to improve the light extraction efficiency of the light emitting device 100 . In addition, mixing of such a filler material allows for enhancing the strength of the resin member 30 , so that the holding strength of the semiconductor layer 23 during laser lift-off of the sapphire substrate 70 or after the completion of the light emitting device 100 can be enhanced. Thus, reliability in the event of detachment of the substrate member 10 or in use of the light emitting device 100 can be improved.
- a silicone resin which has high heat-resisting property and high light-resisting property is preferable.
- the insulating layer 40 at least covers the light emission surface 20 S of the light emitting element 20 and the outer wall surfaces 30 S, the inner wall surfaces 30 T, and the top portions 31 of the resin member 30 .
- the insulating layer 40 has light-transmissive property.
- the insulating layer 40 can be constituted with, for example, an oxide of at least one element of Si and Al (more specifically SiO 2 , Al 2 O 3 etc.)
- the insulating layer 40 can have a thickness of about 0.1 ⁇ m to about 5 ⁇ m, for example.
- the insulating layer 40 may be a single layer or has a stacked-layer structure. Particularly, in the case where the fluorescent material layer 50 to be described below is formed by way of electrodeposition or electrostatic deposition, a stacked-layer structure is preferably employed.
- an insulating layer (see the insulating layer 40 a in FIG. 6A ) is disposed, then an electrically conductive layer (see the electrically conductive layer 40 b in FIG. 6B ) is disposed prior to dispose the fluorescent layer 50 .
- an insulating processing is performed to make the electrically conductive layer into insulating.
- an insulating layer made of a plurality of layers with an insulating layer on an insulating layer may be formed.
- an insulating layer obtained by insulating an electrically conductive layer by processing as described above is needed to be light-transmissive after insulated. Examples of the materials thereof include aluminum (which becomes insulating and light-transmissive aluminum oxide
- the electrically conductive layer formed on an insulating layer can retain its conductivity, as long as it is light-transmissive. In the case the layer is used retaining its conductivity, in order to prevent short circuit, the layer is needed to be disposed on the insulating layer and also at a position so as not to be in contact with the wiring for external connection of the substrate member 10 .
- a light-transmissive electrically conductive layer can be made of, for example, an oxide of at least one element of Zn, In, and Sn (more specifically, ITO, ZnO, In 2 O 3 , SnO 2 etc).
- the light-transmissive electrically conductive layer may be made with a light-transmissive metal layer formed in a mesh shape or a matrix shape, or a metal layer of Ag, Au, Cu, Ni etc., with a thickness which allows light to transmit therethrough.
- the thickness of the light-transmissive electrically conductive layer can be designed appropriately in view of the light-absorbing property, the electric resistance property, and the emission wavelength, and for example, a thickness of 0.3 ⁇ m or less can be employed.
- the fluorescent material layer 50 covers the surface of the insulating layer 40 which is disposed on the inner wall surfaces 30 T, the outer wall surfaces 30 S, including the top portions of the resin member 30 .
- the fluorescent material layer 50 covers, as shown in FIG. 2 , the entire upper surface of the insulating layer 40 .
- the fluorescent material layer 50 may cover the surface of the light-transmissive electrically conductive layer. As described above, disposing the fluorescent material layer 50 not only on the light emission surface 20 S of the light emitting element 20 but also on the surface of the resin member 30 which is disposed surrounding the emission surface 20 S, color unevenness can be reduced.
- covering the external surfaces 30 S, the inner wall surfaces 30 T, including the top portions 31 of the resin member 30 , at the region of the resin member 30 which has a smaller thickness, particularly the portion apart from the substrate member (i.e. upper side) allows reliable irradiation of light from the light emitting element 20 on the fluorescent material layer 50 , even in the case where the thickness of the resin member 30 is small to allow light to transmit therethrough, and therefore, color unevenness can be reduced.
- the fluorescent material layer 50 preferably has a thickness which is approximately uniform over the light emission surface 20 S and over the resin member 30 . Particularly, as shown in FIG. 1 , the fluorescent material layer 50 preferably has a thickness which is smaller than the distance (height) from the light emission surface 20 S of the light emitting element 20 to the top portions 31 of the resin member 30 , and preferably covers the surface of the resin member with such a thickness. More specifically, the fluorescent material layer 50 preferably has a thickness of about 5 ⁇ m to about 50 ⁇ m. The portions of the resin member 30 near the top portions 31 have a small thickness, so that disposition of the fluorescent material layer 50 with a large thickness may result in a reduction in the light extraction efficiency, and therefore undesirable.
- the fluorescent material layer 50 absorbs at least a part of emission from the light emitting element 20 and emits light of a different wavelength.
- the fluorescent material layer 50 can be constituted with, for example, a nitride-based fluorescent material and/or an oxynitride-based fluorescent material which contains a lanthanoid series element such as Eu and Ce.
- the fluorescent material layer 50 may contain either one type of fluorescent material or plural types of fluorescent materials.
- the fluorescent material layer 50 may have a single-layer structure or a multi-layer structure.
- the molding member 60 seals the light emitting element 20 on the substrate member 10 .
- the mold member 60 is to protect the light emitting element 20 from dust, moisture, or external force.
- Examples of the materials of the mold member 60 include a silicone resin, an epoxy resin, a urea resin, and glass.
- the mold member 60 may contain a coloring agent, a light diffusing agent, and/or a filler material. Forming the mold member 60 in a lamp shape or a convex-lens shape allows the mold member 60 to serve as a lens.
- FIG. 3A through FIG. 7 are diagrams for illustrating a method of manufacturing the light emitting device 100 .
- FIG. 3A through FIG. 4C show an example of a method of manufacturing a light emitting element.
- a method of manufacturing a light emitting device may not include manufacturing of a light emitting element and a prepared light emitting element may be employed.
- a sapphire substrate 70 as a base substrate is prepared.
- the main surface of the sapphire substrate 70 may be flat or may be provided with dimples (protrusions and recesses). In conformity to the dimples, protrusions and recesses are formed on the light emission surface 20 S of the light emitting element 20 , which allows for reflection of light propagating substantially in parallel to the light emission surface 20 S to a direction substantially perpendicular to the emission surface 20 S.
- an n-type buffer layer 23 a, an n-type semiconductor layer 23 b, an active layer 23 c and a p-type semiconductor layer 23 d are formed in this order on the sapphire substrate 70 .
- a resist layer 80 is formed on the entire upper surface of the p-type semiconductor layer 23 d, and through a mask having openings in a predetermined shape, ultraviolet is irradiated, then the resist layer 80 is developed to form openings 80 a in a part of the resist layer 80 . In each of the openings 80 a, a part of an upper surface of the p-type semiconductor layer 23 d is exposed.
- etching is performed to remove the p-type semiconductor layer 23 d, the active layer 23 c, and a part of the n-type semiconductor layer 23 b which are in each opening 80 a.
- an exposed surface exposing a part of the n-type semiconductor layer 23 b is formed.
- the resist layer 80 is removed to expose the p-type semiconductor layer 23 d which remains without being subjected to the etching.
- a resist layer 90 having openings 90 a which are defined approximately in conformity to the upper surface of the p-type semiconductor layer 23 d is disposed on the p-type semiconductor layer 23 d and the n-type semiconductor layer 23 b, and an ohmic electrode 22 a is formed in each of the openings 90 a, that is on approximately entire portion of the exposed upper surface of the p-type semiconductor layer in each opening 90 a.
- the resist layer 90 is removed.
- a protective layer having openings in conformity to the upper surface of the ohmic electrodes 22 a and the exposed upper surfaces of the n-type semiconductor layer 23 b is formed.
- the protective layer is electrically insulating so as not to create a short circuit between the p-side electrode 22 and the n-side electrode 21 .
- the protective layer is also light-transmissive to allow the light from the light emitting element 20 to pass through. After forming such a protective layer, as shown in FIG.
- a p-side pad electrode 22 b is formed on the upper surface of each of the ohmic electrodes 22 a, and simultaneously an n-side pad electrode (which is an n-side electrode 21 ) is formed on each of the exposed surfaces of the n-type semiconductor layer 23 b .
- the ohmic electrode 22 a and the p-side pad electrode 22 b constitute the p-side electrode 22 .
- the n-side electrodes and the p-side electrodes may be formed in different processes.
- the protective layer may be disposed, besides in the process described above, after forming the p-side and n-side pad electrodes.
- the semiconductor layer 23 and the sapphire substrate 70 is cut by way of scribing or the like, to obtain individual light emitting elements 20 .
- the n-side electrode 21 is connected to the n-side wiring electrode 12 of the substrate member 10 via the bump B 1 and the p-side electrode 22 is connected to the n-side wiring electrode 13 of the substrate member 10 via the bump B 2 .
- the bumps B 1 , B 2 may either be disposed at the substrate member 10 side or at the light emitting element 20 side. In the case where a light emitting element 20 with preformed bumps B 1 , B 2 is employed, the process to form the bumps B 1 , B 2 can be eliminated.
- a resin member 30 is formed between the light emitting element 20 and the substrate 10 (underside of the light emitting element 20 ).
- the viscosity and the use amount of the resin member 30 is adjusted so that the resin member 30 appropriately creeps up from the side surfaces of the light emitting element 20 to the side surfaces of the sapphire substrate.
- the resin member 30 is not formed on the light emission surface 20 S so as not to affect the laser irradiation of next process.
- the resin member 30 may be so provided as to cover the upper surface of the light emitting element 20 , then a part of the resin member 30 is removed by way of blasting.
- the resin member 30 can be formed in a shape, as shown in FIG. 5B , inclined from the upper surface of the substrate member 10 toward the side surfaces of the sapphire substrate 70 , in other words, a shape with an upwardly decreasing width (thickness).
- a laser beam for example Nd:YAG laser beam, KrF excimer laser beam
- a laser beam which can pass through the sapphire substrate 70 is irradiated from the upper surface side (the opposite side from the surface where the semiconductor layer 23 is formed) of the sapphire substrate 70 to induce decomposition reaction at the interface (light emission surface 20 S) between the sapphire substrate 70 and the semiconductor layer 23 , to remove the sapphire substrate 70 from the semiconductor layer 23 .
- the resin member 30 with the top portions 31 located higher than the light emission surface 20 S of the light emitting element 20 can be formed.
- an insulating layer 40 a is formed to cover the upper surface of the light emitting element 20 and the entire upper surface of the resin member 30 .
- the insulating member 40 a may be formed on a part of the upper surface 10 S of the substrate 10 .
- the region to form the insulating layer 40 a may be limited by providing a mask etc.
- the electrically conductive layer 40 b is formed to cover the upper surface 10 S of the substrate member 10 and the entire upper surface of the insulating layer 40 a.
- the fluorescent material layer 50 is formed to cover the entire surface of the electrically conductive layer 40 b.
- a member which hardly transmits light is employed for the electrically conductive layer 40 b .
- processing to obtain sufficient light transmissive property is necessary.
- aluminum is employed as the electrically conductive layer 40 without change, aluminum absorbs light from the light emitting element 20 .
- an insulation processing is performed on the electrically conductive layer 40 b to form an insulating layer 40 made of the insulating layer 40 a and the insulated electrically conductive layer 40 b.
- a mold member 60 is formed by way of potting method, compression molding method, injection molding method, or printing method.
- the mold member 60 may directly or indirectly cover the fluorescent material layer 50 .
- the fluorescent material layer 50 may be impregnated with a mold member 60 .
- the light emitting device 100 shown in FIG. 1 can be completed.
- the resin member 30 surrounds the sides of the light emitting element 20 .
- the resin member 30 includes the recess 32 whose bottom surface is defined by the light emission surface 20 S of the light emitting element 20 .
- the fluorescent material layer 50 at least covers the light emission surface 20 S of the light emitting element 20 and the outer wall surfaces 30 S, the inner wall surfaces 30 T, and the top portions 31 of the resin member 30 .
- the color of emission from the light emission surface 20 S and the color of reflected light at the outer wall surfaces 30 S of the same color system can be obtained, which can therefore suppress color unevenness.
- the semiconductor layer 23 includes an n-type buffer layer 23 a, an n-type semiconductor layer 23 b, an active layer 23 c, and a p-type semiconductor layer 23 d, but is not limited thereto.
- the semiconductor layer 23 may not include the n-type buffer layer 23 a.
- the semiconductor layer 23 may be a reverse-conductivity type made of a p-type semiconductor layer 23 d, an active layer 23 c, and an n-type semiconductor layer 23 b stacked in this order on a sapphire substrate 70 .
- the light emitting device 100 is provided with a single light emitting element 20 , but a plurality of light emitting elements 20 may be provided.
- the resin member 30 includes a plurality of recessed portions 32 each defined by the bottom surface which is the light emission surface 20 S of corresponding light emitting element 20 , and the fluorescent material layer 50 covers each of the insulating layers 40 and the resin member 30 .
- the light emitting device can be used for various kinds of light sources, such as illumination light sources, light sources for various kinds of indicators, light sources for automobile use, light sources for displays, back light sources for liquid crystal displays, light sources for sensors, signals, automobile use, channel control characters for channel boards.
- illumination light sources such as illumination light sources, light sources for various kinds of indicators, light sources for automobile use, light sources for displays, back light sources for liquid crystal displays, light sources for sensors, signals, automobile use, channel control characters for channel boards.
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Abstract
Description
- This application claims priority to Japanese Patent Application No. 2013-150181, filed on Jul. 19, 2013. The entire disclosure of Japanese Patent Application No. 2013-150181 is hereby incorporated herein by reference.
- 1. Technical Field
- The present disclosure relates to a light emitting device.
- 2. Background Art
- There has been proposed a light emitting device which includes a substrate, a light emitting element arranged on the substrate, and a reflecting member which surrounds the underside and sides of the light emitting element (see, for example, Patent Literature 1: JP 2012-156443A).
- An object of the disclosure is to provide a light emitting device in which occurrence of color unevenness can be suppressed.
- Embodiments of the present invention can provide a light emitting device which can suppress color unevenness.
-
FIG. 1 is a schematic cross-sectional view showing a schematic structure of a light emitting device. -
FIG. 2 is a schematic plan view showing the light emitting device. -
FIGS. 3A to 3C are schematic cross-sectional views for illustrating a method of manufacturing the light emitting device. -
FIGS. 4A to 4C are schematic cross-sectional views for illustrating the method of manufacturing the light emitting device. -
FIGS. 5A to 5C are schematic cross-sectional views for illustrating the method of manufacturing the light emitting device. -
FIGS. 6A to 6C are schematic cross-sectional views for illustrating the method of manufacturing the light emitting device. -
FIG. 7 is a schematic cross-sectional view for illustrating the method of manufacturing the light emitting device. - Next, embodiments of the invention will be described with reference to the drawings. In the description of the drawings below, the same or similar components are denoted by the same or similar reference symbols. However, it should be noted that the drawings are drawn schematically, and the dimensional ratios and the like of the components may differ from the actual ratios. Accordingly, the specific dimension and the like should be determined in consideration of the description below. In addition, it is needless to say that the drawings may also include the components that have different dimensional relations and ratios among one another.
- A structure of a
light emitting device 100 according to an embodiment will be described with reference to the drawings.FIG. 1 is a schematic cross-sectional view showing a structure of alight emitting device 100.FIG. 2 is a schematic plan view showing thelight emitting device 100. - A
light emitting device 100 includes asubstrate member 10, at least onelight emitting element 20, aresin member 30, aninsulating layer 40, afluorescent material layer 50, and amold member 60. - The
substrate member 10 includes asubstrate body 11, an n-side wiring electrode 12, and a p-side wiring electrode 13. - The
substrate body 11 is made of an electrically insulating material. Examples of electrically insulating material include glass epoxy and silicone glass, ceramics such as alumina and aluminum nitride, and LTCC (low-temperature calcinated ceramic). - The n-
side wiring electrode 12 and the p-side wiring electrode 13 are arranged on thesurface 10S of thesubstrate member 10. The n-side wiring electrode 12 and the p-side wiring electrode 13 are connected to respective external electrodes. - The
light emitting element 20 include an n-side electrode 21, a p-side electrode 22, and asemiconductor layer 23. - The n-
side electrode 21 is connected to an n-side wiring electrode 12 via, for example, a bump B1 made of Au. The p-side electrode 22 is connected to a p-side wiring electrode 13 via, for example, a bump B2 made of Au. Thelight emitting element 20 and thesubstrate member 10 are to be electrically and physically connected, which can be satisfied by the use of an electrically conductive bonding material (for example, a solder material), as an alternative to the use of the bumps B1, B2. Examples of the constituent materials of the n-side electrode 21 and the p-side electrode 22 include Au, Ni, Ti, and Al. - The
semiconductor layer 23 is disposed on the n-side electrode 21 and the p-side electrode 22. Thesemiconductor layer 23 includes an n-type buffer layer 23 a, an n-type semiconductor layer 23 b, anactive layer 23 c, and a p-type semiconductor layer 23 d. The n-type buffer layer 23 a, the n-type semiconductor layer 23 b, and the p-type semiconductor layer 23 d may be constituted with at least one of, for example, gallium nitride, aluminum gallium nitride, and aluminum nitride, but are not limited thereto. Theactive layer 23 c can be constituted with indium gallium nitride, but is not limited thereto. In the present embodiment, the n-type buffer layer 23 a serves as thelight emission surface 20S of thelight emitting element 20, but a different layer than the n-type buffer layer 23 a may serve as thelight emission surface 20S. Thelight emission surface 20S may be constituted with, for example, the n-type semiconductor layer or a growth substrate (a sapphire substrate). Thelight emission surface 20S of thelight emitting element 20 is surrounded by aresin member 30 which has atop portion 31 located higher (an upper side) than thelight emission surface 20S. Thelight emission surface 20S is covered with theinsulating layer 40. - The
resin member 30 surrounds the sides of thelight emitting element 20. Theresin member 30 covers the whole periphery of side surfaces of thelight emitting element 20. Theresin member 30 supports thesemiconductor layer 23 during a laser lift-off operation (seeFIG. 5C ) to be described below. Accordingly, theresin member 30 is preferably filled between thesubstrate member 10 and thelight emitting element 20. - The
resin member 30 is further disposed to be in contact with each of the side surfaces of thelight emitting element 20 so as to be narrower (smaller in the thickness as measured in a direction parallel to the substrate 10) as the distance from thesubstrate member 10 increases (i.e. toward the upper side). Thetop portions 31 of theresin member 30 are located at higher positions (upper side) than thelight emission surface 20S of thelight emitting element 20. That is, arecess 32 is defined by thelight emission surface 20S of thelight emitting element 20 as its bottom surface and theresin member 30 as its wall portion. Such arecess 32 may be formed by, as described below, disposing aresin member 30 reaching to the side surfaces of thesapphire substrate 70 and removing thesapphire substrate 70 from thesemiconductor layer 23 side so that the plane of thelight emission surface 20S is lowered by the thickness of thesapphire substrate 70. Of theresin member 30, the distance (i.e. height) between thelight emission surface 20S of thelight emitting element 20 and thetop portions 31 is approximately the same as the thickness of thesapphire substrate 70 which is about 10 μm to about 150 μm. - The
resin member 30 includesouter wall surfaces 30S andinner wall surfaces 30T. In the present embodiment, the outer wall surfaces 30S and the inner wall surfaces 30T of the top portions 31 (portions of the inner wall surfaces which are higher than the side surfaces of the light emitting element) are covered with an insulatinglayer 40. - The
resin member 30 can be made of at least one insulating materials selected from, for example, a silicone resin, an epoxy resin, and a fluororesin. Particularly, a silicone resin which has high heat-resisting property and high light-resisting property is preferable. Also, theresin member 30 preferably contains a light-reflecting member. For example, a white filler material such as titanium oxide, silicon oxide, or alumina may be mixed in theresin member 30 to improve the light extraction efficiency of thelight emitting device 100. In addition, mixing of such a filler material allows for enhancing the strength of theresin member 30, so that the holding strength of thesemiconductor layer 23 during laser lift-off of thesapphire substrate 70 or after the completion of thelight emitting device 100 can be enhanced. Thus, reliability in the event of detachment of thesubstrate member 10 or in use of thelight emitting device 100 can be improved. - The insulating
layer 40 at least covers thelight emission surface 20S of thelight emitting element 20 and the outer wall surfaces 30S, the inner wall surfaces 30T, and thetop portions 31 of theresin member 30. The insulatinglayer 40 has light-transmissive property. The insulatinglayer 40 can be constituted with, for example, an oxide of at least one element of Si and Al (more specifically SiO2, Al2O3 etc.) The insulatinglayer 40 can have a thickness of about 0.1 μm to about 5 μm, for example. - The insulating
layer 40 may be a single layer or has a stacked-layer structure. Particularly, in the case where thefluorescent material layer 50 to be described below is formed by way of electrodeposition or electrostatic deposition, a stacked-layer structure is preferably employed. - In this case, first, an insulating layer (see the insulating
layer 40 a inFIG. 6A ) is disposed, then an electrically conductive layer (see the electricallyconductive layer 40 b inFIG. 6B ) is disposed prior to dispose thefluorescent layer 50. After disposing thefluorescent material layer 50, an insulating processing is performed to make the electrically conductive layer into insulating. As described above, initially forming a stacked layer structure having an electrically conductive layer on an insulating layer, then performing an insulating processing, an insulating layer made of a plurality of layers with an insulating layer on an insulating layer may be formed. Moreover, an insulating layer obtained by insulating an electrically conductive layer by processing as described above is needed to be light-transmissive after insulated. Examples of the materials thereof include aluminum (which becomes insulating and light-transmissive aluminum oxide - The electrically conductive layer formed on an insulating layer can retain its conductivity, as long as it is light-transmissive. In the case the layer is used retaining its conductivity, in order to prevent short circuit, the layer is needed to be disposed on the insulating layer and also at a position so as not to be in contact with the wiring for external connection of the
substrate member 10. Such a light-transmissive electrically conductive layer can be made of, for example, an oxide of at least one element of Zn, In, and Sn (more specifically, ITO, ZnO, In2O3, SnO2 etc). The light-transmissive electrically conductive layer may be made with a light-transmissive metal layer formed in a mesh shape or a matrix shape, or a metal layer of Ag, Au, Cu, Ni etc., with a thickness which allows light to transmit therethrough. The thickness of the light-transmissive electrically conductive layer can be designed appropriately in view of the light-absorbing property, the electric resistance property, and the emission wavelength, and for example, a thickness of 0.3 μm or less can be employed. - The
fluorescent material layer 50 covers the surface of the insulatinglayer 40 which is disposed on the inner wall surfaces 30T, the outer wall surfaces 30S, including the top portions of theresin member 30. In the present embodiment, thefluorescent material layer 50 covers, as shown inFIG. 2 , the entire upper surface of the insulatinglayer 40. In the case where a light-transmissive electrically conductive layer is disposed on the insulatinglayer 40, thefluorescent material layer 50 may cover the surface of the light-transmissive electrically conductive layer. As described above, disposing thefluorescent material layer 50 not only on thelight emission surface 20S of thelight emitting element 20 but also on the surface of theresin member 30 which is disposed surrounding theemission surface 20S, color unevenness can be reduced. In detail, covering theexternal surfaces 30S, the inner wall surfaces 30T, including thetop portions 31 of theresin member 30, at the region of theresin member 30 which has a smaller thickness, particularly the portion apart from the substrate member (i.e. upper side) allows reliable irradiation of light from thelight emitting element 20 on thefluorescent material layer 50, even in the case where the thickness of theresin member 30 is small to allow light to transmit therethrough, and therefore, color unevenness can be reduced. - The
fluorescent material layer 50 preferably has a thickness which is approximately uniform over thelight emission surface 20S and over theresin member 30. Particularly, as shown inFIG. 1 , thefluorescent material layer 50 preferably has a thickness which is smaller than the distance (height) from thelight emission surface 20S of thelight emitting element 20 to thetop portions 31 of theresin member 30, and preferably covers the surface of the resin member with such a thickness. More specifically, thefluorescent material layer 50 preferably has a thickness of about 5 μm to about 50 μm. The portions of theresin member 30 near thetop portions 31 have a small thickness, so that disposition of thefluorescent material layer 50 with a large thickness may result in a reduction in the light extraction efficiency, and therefore undesirable. - The
fluorescent material layer 50 absorbs at least a part of emission from thelight emitting element 20 and emits light of a different wavelength. Thefluorescent material layer 50 can be constituted with, for example, a nitride-based fluorescent material and/or an oxynitride-based fluorescent material which contains a lanthanoid series element such as Eu and Ce. Thefluorescent material layer 50 may contain either one type of fluorescent material or plural types of fluorescent materials. Thefluorescent material layer 50 may have a single-layer structure or a multi-layer structure. - The
molding member 60 seals thelight emitting element 20 on thesubstrate member 10. Themold member 60 is to protect thelight emitting element 20 from dust, moisture, or external force. Examples of the materials of themold member 60 include a silicone resin, an epoxy resin, a urea resin, and glass. Themold member 60 may contain a coloring agent, a light diffusing agent, and/or a filler material. Forming themold member 60 in a lamp shape or a convex-lens shape allows themold member 60 to serve as a lens. - Next, a method of manufacturing the
light emitting device 100 will be described with reference to the drawings.FIG. 3A throughFIG. 7 are diagrams for illustrating a method of manufacturing thelight emitting device 100. - First, a light emitting element having a
semiconductor layer 23 is prepared.FIG. 3A throughFIG. 4C show an example of a method of manufacturing a light emitting element. In the present embodiment, a method of manufacturing a light emitting device may not include manufacturing of a light emitting element and a prepared light emitting element may be employed. - First, as shown in
FIG. 3A , asapphire substrate 70 as a base substrate is prepared. The main surface of thesapphire substrate 70 may be flat or may be provided with dimples (protrusions and recesses). In conformity to the dimples, protrusions and recesses are formed on thelight emission surface 20S of thelight emitting element 20, which allows for reflection of light propagating substantially in parallel to thelight emission surface 20S to a direction substantially perpendicular to theemission surface 20S. - Next, as shown in
FIG. 3B , for example, by way of MOVPE (metal organic vapor phase epitaxy), an n-type buffer layer 23 a, an n-type semiconductor layer 23 b, anactive layer 23 c and a p-type semiconductor layer 23 d are formed in this order on thesapphire substrate 70. - Next, as shown in
FIG. 3C , a resistlayer 80 is formed on the entire upper surface of the p-type semiconductor layer 23 d, and through a mask having openings in a predetermined shape, ultraviolet is irradiated, then the resistlayer 80 is developed to formopenings 80 a in a part of the resistlayer 80. In each of theopenings 80 a, a part of an upper surface of the p-type semiconductor layer 23 d is exposed. - Then, as shown in
FIG. 4A , etching is performed to remove the p-type semiconductor layer 23 d, theactive layer 23 c, and a part of the n-type semiconductor layer 23 b which are in each opening 80 a. Thus, an exposed surface exposing a part of the n-type semiconductor layer 23 b is formed. - Next, the resist
layer 80 is removed to expose the p-type semiconductor layer 23 d which remains without being subjected to the etching. Then, as shown inFIG. 4B , a resistlayer 90 having openings 90 a which are defined approximately in conformity to the upper surface of the p-type semiconductor layer 23 d is disposed on the p-type semiconductor layer 23 d and the n-type semiconductor layer 23 b, and anohmic electrode 22 a is formed in each of the openings 90 a, that is on approximately entire portion of the exposed upper surface of the p-type semiconductor layer in each opening 90 a. Then, the resistlayer 90 is removed. - Next, a protective layer having openings in conformity to the upper surface of the
ohmic electrodes 22 a and the exposed upper surfaces of the n-type semiconductor layer 23 b is formed. The protective layer is electrically insulating so as not to create a short circuit between the p-side electrode 22 and the n-side electrode 21. The protective layer is also light-transmissive to allow the light from thelight emitting element 20 to pass through. After forming such a protective layer, as shown inFIG. 4C , a p-side pad electrode 22 b is formed on the upper surface of each of theohmic electrodes 22 a, and simultaneously an n-side pad electrode (which is an n-side electrode 21) is formed on each of the exposed surfaces of the n-type semiconductor layer 23 b. Theohmic electrode 22 a and the p-side pad electrode 22 b constitute the p-side electrode 22. The n-side electrodes and the p-side electrodes may be formed in different processes. The protective layer may be disposed, besides in the process described above, after forming the p-side and n-side pad electrodes. - Next, the
semiconductor layer 23 and thesapphire substrate 70 is cut by way of scribing or the like, to obtain individuallight emitting elements 20. - The processes described below are implemented in a same way when using prepared light emitting elements.
- Next, in each of the light emitting elements, as shown in
FIG. 5A , the n-side electrode 21 is connected to the n-side wiring electrode 12 of thesubstrate member 10 via the bump B1 and the p-side electrode 22 is connected to the n-side wiring electrode 13 of thesubstrate member 10 via the bump B2. The bumps B1, B2 may either be disposed at thesubstrate member 10 side or at thelight emitting element 20 side. In the case where alight emitting element 20 with preformed bumps B1, B2 is employed, the process to form the bumps B1, B2 can be eliminated. - Next, as shown in
FIG. 5B , by way of potting, printing, transfer molding, or compression molding, aresin member 30 is formed between the light emittingelement 20 and the substrate 10 (underside of the light emitting element 20). In the case where theresin member 30 is formed by way of potting, the viscosity and the use amount of theresin member 30 is adjusted so that theresin member 30 appropriately creeps up from the side surfaces of thelight emitting element 20 to the side surfaces of the sapphire substrate. In this case, it is preferable that theresin member 30 is not formed on thelight emission surface 20S so as not to affect the laser irradiation of next process. Also, in the case where theresin member 30 is disposed by way of printing, transfer molding, or compression molding, theresin member 30 may be so provided as to cover the upper surface of thelight emitting element 20, then a part of theresin member 30 is removed by way of blasting. Thus, theresin member 30 can be formed in a shape, as shown inFIG. 5B , inclined from the upper surface of thesubstrate member 10 toward the side surfaces of thesapphire substrate 70, in other words, a shape with an upwardly decreasing width (thickness). - Next, as shown in
FIG. 5C , a laser beam (for example Nd:YAG laser beam, KrF excimer laser beam) which can pass through thesapphire substrate 70 is irradiated from the upper surface side (the opposite side from the surface where thesemiconductor layer 23 is formed) of thesapphire substrate 70 to induce decomposition reaction at the interface (light emission surface 20S) between thesapphire substrate 70 and thesemiconductor layer 23, to remove thesapphire substrate 70 from thesemiconductor layer 23. Thus, theresin member 30 with thetop portions 31 located higher than thelight emission surface 20S of thelight emitting element 20 can be formed. - Next, as shown in
FIG. 6A , an insulatinglayer 40 a is formed to cover the upper surface of thelight emitting element 20 and the entire upper surface of theresin member 30. At this time, the insulatingmember 40 a may be formed on a part of theupper surface 10S of thesubstrate 10. The region to form the insulatinglayer 40 a may be limited by providing a mask etc. - Next, as shown in
FIG. 6B , the electricallyconductive layer 40 b is formed to cover theupper surface 10S of thesubstrate member 10 and the entire upper surface of the insulatinglayer 40 a. - Next, as shown in
FIG. 6C , by way of electrodeposition method or electrostatic coating method, thefluorescent material layer 50 is formed to cover the entire surface of the electricallyconductive layer 40 b. In the case where a member which hardly transmits light is employed for the electricallyconductive layer 40 b, processing to obtain sufficient light transmissive property is necessary. For example, in the case where aluminum is employed as the electricallyconductive layer 40 without change, aluminum absorbs light from thelight emitting element 20. - For this reason, oxidation processing is performed to modify aluminum into aluminum oxide.
- Next, as shown in
FIG. 7 , an insulation processing is performed on the electricallyconductive layer 40 b to form an insulatinglayer 40 made of the insulatinglayer 40 a and the insulated electricallyconductive layer 40 b. - Next, a
mold member 60 is formed by way of potting method, compression molding method, injection molding method, or printing method. Themold member 60 may directly or indirectly cover thefluorescent material layer 50. At this time, thefluorescent material layer 50 may be impregnated with amold member 60. Thus, thelight emitting device 100 shown inFIG. 1 can be completed. - The
resin member 30 surrounds the sides of thelight emitting element 20. Theresin member 30 includes therecess 32 whose bottom surface is defined by thelight emission surface 20S of thelight emitting element 20. Thefluorescent material layer 50 at least covers thelight emission surface 20S of thelight emitting element 20 and the outer wall surfaces 30S, the inner wall surfaces 30T, and thetop portions 31 of theresin member 30. Thus, the color of emission from thelight emission surface 20S and the color of reflected light at the outer wall surfaces 30S of the same color system can be obtained, which can therefore suppress color unevenness. - The present invention is described with reference to the embodiment illustrated in the accompanying drawings. It should be understood, however, that the description and the drawings are intended as illustrative of the present invention, and the scope of the present invention is not limited to those described above.
- The
semiconductor layer 23 includes an n-type buffer layer 23 a, an n-type semiconductor layer 23 b, anactive layer 23 c, and a p-type semiconductor layer 23 d, but is not limited thereto. Thesemiconductor layer 23 may not include the n-type buffer layer 23 a. Thesemiconductor layer 23 may be a reverse-conductivity type made of a p-type semiconductor layer 23 d, anactive layer 23 c, and an n-type semiconductor layer 23 b stacked in this order on asapphire substrate 70. - In the embodiments shown above, the
light emitting device 100 is provided with a singlelight emitting element 20, but a plurality oflight emitting elements 20 may be provided. In this case, theresin member 30 includes a plurality of recessedportions 32 each defined by the bottom surface which is thelight emission surface 20S of corresponding light emittingelement 20, and thefluorescent material layer 50 covers each of the insulatinglayers 40 and theresin member 30. - The light emitting device according to the illustrated embodiment can be used for various kinds of light sources, such as illumination light sources, light sources for various kinds of indicators, light sources for automobile use, light sources for displays, back light sources for liquid crystal displays, light sources for sensors, signals, automobile use, channel control characters for channel boards.
- It is to be understood that although the present invention has been described with regard to preferred embodiments thereof, various other embodiments and variants may occur to those skilled in the art, which are within the scope and spirit of the invention, and such other embodiments and variants are intended to be covered by the following claims.
Claims (11)
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JP2013150181A JP6155932B2 (en) | 2013-07-19 | 2013-07-19 | Light emitting device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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EP3886187A1 (en) * | 2015-10-30 | 2021-09-29 | Nichia Corporation | Light emitting device |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090101929A1 (en) * | 2007-10-22 | 2009-04-23 | Philips Lumileds Lighting Company, Llc | Robust led structure for substrate lift-off |
US20110108865A1 (en) * | 2009-11-06 | 2011-05-12 | Koninklijke Philips Electronics N.V. | Silicone based reflective underfill and thermal coupler |
US20110220934A1 (en) * | 2010-03-09 | 2011-09-15 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device and method of fabricating semiconductor light emitting device |
US20120224363A1 (en) * | 2011-03-03 | 2012-09-06 | Van De Ven Antony P | Tunable remote phosphor constructs |
US20130285090A1 (en) * | 2012-04-27 | 2013-10-31 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device |
US20140061704A1 (en) * | 2012-08-31 | 2014-03-06 | Nichia Corporation | Light emitting device and method for manufacturing the same |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008300580A (en) * | 2007-05-30 | 2008-12-11 | Nichia Corp | Light emitting element and light emitting device |
WO2010123059A1 (en) * | 2009-04-22 | 2010-10-28 | シーシーエス株式会社 | Method for manufacturing led light emitting device |
JP5747527B2 (en) | 2011-01-28 | 2015-07-15 | 日亜化学工業株式会社 | Method for manufacturing light emitting device |
JP2012199497A (en) * | 2011-03-23 | 2012-10-18 | Panasonic Corp | Light emitting device |
JP5962102B2 (en) * | 2011-03-24 | 2016-08-03 | 日亜化学工業株式会社 | Light emitting device and manufacturing method thereof |
-
2013
- 2013-07-19 JP JP2013150181A patent/JP6155932B2/en active Active
-
2014
- 2014-07-17 US US14/333,748 patent/US9425366B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090101929A1 (en) * | 2007-10-22 | 2009-04-23 | Philips Lumileds Lighting Company, Llc | Robust led structure for substrate lift-off |
US20110108865A1 (en) * | 2009-11-06 | 2011-05-12 | Koninklijke Philips Electronics N.V. | Silicone based reflective underfill and thermal coupler |
US20110220934A1 (en) * | 2010-03-09 | 2011-09-15 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device and method of fabricating semiconductor light emitting device |
US20120224363A1 (en) * | 2011-03-03 | 2012-09-06 | Van De Ven Antony P | Tunable remote phosphor constructs |
US20130285090A1 (en) * | 2012-04-27 | 2013-10-31 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device |
US20140061704A1 (en) * | 2012-08-31 | 2014-03-06 | Nichia Corporation | Light emitting device and method for manufacturing the same |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3886187A1 (en) * | 2015-10-30 | 2021-09-29 | Nichia Corporation | Light emitting device |
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US9425366B2 (en) | 2016-08-23 |
JP6155932B2 (en) | 2017-07-05 |
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