US20030021694A1 - Nano and micro metric dimensional systems and methods for nanopump based technology - Google Patents
Nano and micro metric dimensional systems and methods for nanopump based technology Download PDFInfo
- Publication number
- US20030021694A1 US20030021694A1 US10/198,550 US19855002A US2003021694A1 US 20030021694 A1 US20030021694 A1 US 20030021694A1 US 19855002 A US19855002 A US 19855002A US 2003021694 A1 US2003021694 A1 US 2003021694A1
- Authority
- US
- United States
- Prior art keywords
- nanopump
- medium
- transmitter
- nano
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000034 method Methods 0.000 title claims abstract description 25
- 238000005516 engineering process Methods 0.000 title abstract description 11
- 230000005855 radiation Effects 0.000 claims abstract description 89
- 238000005086 pumping Methods 0.000 claims abstract description 39
- 238000010521 absorption reaction Methods 0.000 claims abstract description 22
- 238000010438 heat treatment Methods 0.000 claims abstract description 20
- 238000013021 overheating Methods 0.000 claims abstract description 19
- 230000033001 locomotion Effects 0.000 claims abstract description 10
- 238000006243 chemical reaction Methods 0.000 claims abstract description 9
- 238000001228 spectrum Methods 0.000 claims abstract description 7
- 239000007788 liquid Substances 0.000 claims description 39
- 239000000835 fiber Substances 0.000 claims description 17
- 239000002105 nanoparticle Substances 0.000 claims description 14
- 238000002844 melting Methods 0.000 claims description 11
- 230000008018 melting Effects 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 239000011888 foil Substances 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 4
- 239000003124 biologic agent Substances 0.000 claims 2
- 239000010410 layer Substances 0.000 description 44
- 230000005670 electromagnetic radiation Effects 0.000 description 19
- 239000010409 thin film Substances 0.000 description 17
- 239000000523 sample Substances 0.000 description 13
- 230000008016 vaporization Effects 0.000 description 9
- 238000000889 atomisation Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000013307 optical fiber Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 231100000331 toxic Toxicity 0.000 description 3
- 230000002588 toxic effect Effects 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 2
- 238000012377 drug delivery Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 230000005486 microgravity Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052863 mullite Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000013047 polymeric layer Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920001410 Microfiber Polymers 0.000 description 1
- 230000005679 Peltier effect Effects 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005370 electroosmosis Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000003658 microfiber Substances 0.000 description 1
- 239000002121 nanofiber Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000013341 scale-up Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/20—Other positive-displacement pumps
- F04B19/24—Pumping by heat expansion of pumped fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2250/00—Geometry
- F05B2250/80—Size or power range of the machines
- F05B2250/84—Nanomachines
Definitions
- This invention relates generally to the field of conversion of the electromagnetic energy into the thermal energy in the infrared, visible, ultraviolet, gamma- and x-ray portion of the spectrum as well as conversion of the electron and/or ion beamed radiation into thermal energy.
- This invention relates in particular to nano- and micro- metric dimensional systems and methods for no-moving parts nanopump based technology. This thermal energy is utilized for heating up, overheating and pumping of the medium in nano- and/or micro-metric dimensional devices.
- U.S. Pat. No. 6,171,067 provides a micropump that utilizes the electroosmotic pumping of fluid in one channel or region in order to generate pressure that is based on flow of the material in a connected channel that has no electroosmotic flow generated.
- Such pumps are particulary useful in such cases where the application of the electric fields is impossible.
- Miniature pumps use the different variants of the piezoelectrical diaphragm for pumping gas.
- U.S. Pat. No. 5,466,932 provides a microminiature pump that is applied in a solid state mass-spectrograph and pumps gases at low pressure.
- the pump preferably is comprised of at least one piezoelectrically-actuated diaphragm.
- the diaphragm Upon piezoelectrical actuation, the diaphragm accomplishes a suction or compression stroke.
- the suction stroke evacuates the portion of the cavity to which the pump is connected.
- the compression stroke increases the pressure of the gas in the cavity moving into the next pump stage or exhausting into the ambient atmosphere.
- U.S. Pat. No. 6,210,128 provides miniature acoustic-fluidic pump and mixer.
- the quartz wind techniques have been used for generation of steady non-pulsative flow. These techniques do not require valves that could clog.
- the transducer converts radio frequency of electrical energy into an ultrasonic acoustic wave in a fluid that generates directed fluid motion. Acoustic streaming appears as a result of the absorbtion of the acoustic energy in the fluid itself.
- Miniature no-moving parts pump have been used in a number of the microfluidic systems.
- Miniature valve-less membrane pumps that are using fluidic rectifiers, such as nozzle/diffusor have been operated without valves that could open and close, i.e. pumps that employ no-moving parts valves (NMPV).
- NMPV no-moving parts valves
- micropumps [0010] Significant drawbacks of all these micropumps are common. It can be very difficult or impossible to reduce the micrometric dimension of such micropumps to nanometric dimension. Therefore it can be very difficult and not effective to use such micropump in nanotechnology. Miniaturization of the micropumps to nanometric dimension offers numerous advantages for using such nanodevices in the broad areas of the nano- and bio-technology.
- the present invention provides systems and methods that utilize the thermal energy for heating up, overheating and pumping of the medium in nano- and/or micro-metric dimensional devices based on no-moving parts nanopump.
- the present invention also provides methods that can make conversion of the electromagnetic energy into the thermal energy in the infrared, visible, ultraviolet, gamma- and x-ray portion of the spectrum as well as conversion of the electron and/or ion beamed radiation into the thermal energy.
- the nanopump unit is comprised of the source of the beamed radiation energy, and at least one waveguide .
- One side of that particular waveguide is connected with the source of the beamed radiation for transferring the radiation energy to another side of this waveguide.
- Another side of this waveguide is connected with at least one transmitter that converts the beamed radiation energy into the thermal energy.
- This transmitter has at least one thermal resistant tip transparent for the beamed radiation. As part of the transmitter this particular tip is connected with the above mentioned another side of this waveguide.
- This transmitter has at least one layer that has thermal resistant and thermal conductive properties. This layer has good absorption properties for beamed radiation and is connected with the thermal resistant tip on one side and with a medium on the other side.
- the present invention provides new miniaturized nanopump that can be easily used for parallel pumping and regulation of the operation mode of medium flow through nano- and/or micro-metric dimensional channels.
- the present invention provides new miniaturized systems that can be easily used for pumping, positioning, selection, separation and treatment of different types of nano- and/or micro-objects including toxic bio agents in their original forms.
- the present invention provides new miniaturized systems that can be easily used for mixing, stirring and atomization of the medium in nano- and/or micro-metric dimensional volumes. These systems can be useful for drug delivery devices and/or for coating technology in production of nano and/or micro electronic devices (MEMS).
- MEMS micro electronic devices
- the present invention provides new miniaturized systems that can be easily used for heating up, overheating and/or melting medium in nano- and/or micro-metric dimensional devices in the airspace industry.
- the present invention is a method that can be easily applied in space conditions for research and studies of the thermo physical properties of nano- and/or micro-metric dimensional crystals in Microgravity and Material Science.
- the present invention provides new miniaturized nanopumps that can be easily used and do not depend on wall condition, pH or ionicity of the medium.
- the present invention provides new miniaturized nanopump that can be easily used for the movement generations of different nano- and/or micro-devices.
- the present invention provides miniaturized systems and methods based on nanopump technology that can be easily removed and turned “On” and “Off” with a minimum effort.
- This technology is versatile, simple, scale up and scale down friendly for different applications.
- FIG. 1 depicts a schematic representation of this invention
- FIGS. 2 a to 2 h depict a design for transmitter with different form of the tip surface
- FIGS. 3 a to 3 d depict a different variant of the transmitter with thermal resistant layer
- FIG. 4 depicts a nanopump for pumping of liquid in nano- and/or micro-metric dimensional channel
- FIG. 5 depicts a nanopump for pumping of liquid in microfluidic and/or nanometric dimensional array
- FIGS. from 6 a and 6 b depict a design for atomization of the liquid for the drug delivery system
- FIG. 7 depicts a design for moving nano devices using nanopump
- FIG. 8 depicts a nanopump for pumping liquid with nanoparticles and/or nanoparticle structures
- FIGS. 9 a to 9 c depict a continuous wave and/or impulse regime for heating and/or melting of the medium
- the electromagnetic radiation coming from the source of the beamed radiation through waveguide can be utilized in the form of the thermal energy.
- the energy from the source of the beamed radiation connected with one side of the waveguide is transferred to another side of the waveguide.
- the transmitter with at least one transparent for the beamed radiation thermal resistant tip on the other side of the waveguide is connected with at least one thermal conductive layer having good absorption properties for the beamed radiation.
- the transmitter converts the energy from the source of the beamed radiation into the thermal energy and this thermal energy can be transmitted to the medium for heating up and overheating of this medium in a close proximity to the transmitter.
- the expansion of the overheated medium generates directed pumping force and motion of the medium in a close proximity to the transmitter and delivers this motion to another parts of the medium for the pumping of this medium in nano- and/or micro channels.
- the alternative way to implement each primary element of this invention is the following: the source of the beamed radiation can be a laser with impulse and/or continuous wave (cw) optically connected with one side of the fiber optic for transferring of the radiation energy.
- cw continuous wave
- a fiber optic has at least one thermal resistant nanoprobe tip transparent for cw and/or impulse beamed radiation with subwavelength aperture.
- This nanoprobe tip transparent for the beamed radiation has on the surface at least one thin film layer with good absorption properties for the beamed radiation and good thermal conductivity properties.
- a nanoprobe tip transparent for the beamed radiation has on the surface at least one thin film layer with good absorption properties for the beamed radiation and good thermal conductivity properties, converts the radiation energy into the thermal energy, and transfers this thermal energy to the medium for overheating this medium in a close proximity to the transmitter.
- the overheated medium by using of cw and/or impulse beamed radiation generates directed pumping force and provides a cw and/or impulse nano- and/or micro-size jet stream.
- An impulse and/or nano- and/or micro-size jet stream provides pumping of the medium in nano- and micro-metric dimensional channels.
- an impulse and/or nano- and/or micro-size jet stream provides positioning, selection and/or separation of the different types of nano- and/or micro-objects including toxic bio agents in their original forms.
- an impulse and/or nano- and/or micro-size jet stream provides mixing, stirring and/or atomization of the medium in nano- and/or micro-metric dimensional volume for ultra-cleaning procedures in particle-producing processes like chemical mechanical planarization (CMP).
- CMP chemical mechanical planarization
- an impulse and/or nano- and/or micro-size jet stream provides mixing, stirring and/or atomization of the medium in nano- and/or micro-metric dimensional volume in drag delivery system and/or in coating technology for production of the nano- and/or micro electronic devices (MEMS).
- MEMS micro electronic devices
- an impulse and/or nano- and/or micro-size jet stream provides moving of the nano gear and/or another nano- and/or micro-devices.
- An impulse and/or nano- and/or micro-size jet stream removes heat from the working area of nano- and/or micro-metric dimensional devices of various types.
- a near field optic microscope, electron microscope and/or another nano-, micro-scopic device implement the control for jet stream operation.
- each primary element in this invention is the following: the source of cw and/or impulse multi wavelength radiation connected with fiber optic through the optical filters on one end of the fiber optic transfers the radiation energy.
- An optical filter is used for the selection of the specific wavelength of the cw and/or impulse beamed radiation.
- a nanoprobe tip transparent for the beamed radiation has at least one layer with good absorption properties, opaque for the beamed radiation with wavelength A, and transparent and /or semi-transparent for the beamed radiation with wavelength B.
- a nanoprobe tip transparent for the beamed radiation has at least one thin film layer with good thermal conductivity properties that covers the surface of the first thin film layer with good absorption properties for the beamed radiation.
- both layers are covering the nanoprobe tip transparent for the beamed radiation and are positioned one after the other.
- the first layer with good absorption properties covers the surface of the nanoprobe tip
- the second layer with good thermal conductivity covers the surface of the first layer
- the beamed radiation with wavelength B can be an X-ray radiation and /or microwave radiation for the treatment of the toxic bio agents in the medium.
- a heat pipe is in a close proximity to a transmitter and provides additional heating and /or cooling medium.
- the overheating and /or cooling medium between a transmitter and a heat pipe provides the regulation of the mode of operation of the medium flow in nano- and /or micro-metric dimensional channels.
- the overheated medium can be in the form of gas and/or vapor conditions.
- At least one and /or array of the heat pipes is/are connected with a transmitter for transferring of the heat to the different devices that are used in extreme conditions, including space studies and research.
- an ultrasonic tip in a close proximity to the transmitter regulates the mode of operation of the medium flow in nano- and /or micro-metric dimensional channels.
- the source of the beamed radiation is a miniature pulsed xenon system that produces high peak optical energy from the deep ultraviolet (160 nm) to infrared (above 4 microns). Those systems are available at Perkin-Elmer.
- the source of the beamed radiation emits the infrared, visible, ultraviolet and x-ray portion of the spectrum and uses the filter unit that permits the passage of the relatively narrow band of the electromagnetic radiation.
- the medium can be in various forms, including liquid, gas, solid and/or mixed substances.
- various devices can be used as a waveguide (for example, fiber optic, duct, optical filters, etc.) in nano- and/or micro-and/or metric dimension or medium (as gas, liquid, solid, vacuum) and are designed to confine and direct the propagation of electromagnetic waves in the infrared, visible, ultraviolet and x-ray portion of the spectrum and/or electron and/or ion beamed radiation.
- a waveguide for example, fiber optic, duct, optical filters, etc.
- nano- and/or micro-and/or metric dimension or medium as gas, liquid, solid, vacuum
- the transmitter can be any device that contains a mechanism for converting the energy from a source of the beamed radiation into the equivalent thermal energy.
- FIG. 1 depicts a schematic representation of the embodiment of this invention.
- the source of the beamed electromagnetic radiation is preferably the source of the impulse beamed radiation.
- the source could be the continuous wave radiation (cw).
- the continuous wave radiation can be useful for heating, boiling, melting of the medium in a close proximity to the transmitter.
- the waveguide 102 is used for collection of the beamed radiation from source 101 and transmitting this radiation to transmitter 103 .
- the heat-resistant transmitter 103 converts the radiation energy from the source of the beamed radiation 101 into the thermal energy and transmits this thermal energy to the medium 104 in a close proximity to the transmitter 103 and heats up and overheats this medium 104 .
- the overheated medium 104 is expanded. The expansion of the overheated medium 104 generates directed pumping force and motion of the medium in a close proximity to the transmitter 103 and delivers this motion to another parts of the medium 105 for pumping of this medium.
- the overheating means the increase of the temperature and/or process of vaporizing and/or melting of the medium in a close proximity to the transmitter.
- FIGS. 2 a to 2 h depict a portion 103 of an embodiment 200 of this invention in which the transmitter is made as nano- and/or micro-optical fiber probe with different forms of the tip surface. Further details about fabrication of the tip that permits the reproducible production of highly transmissive probes with aperture sizes below 100 nm can be found elsewhere [T. Yatsuia, M. Kourogi, M. Ohtsu, Appl. Phis. Lett. 73 (1998) 2090].
- FIGS. 2 a to 2 f depict different forms 201 , 202 , 203 , 204 , 205 and 207 of nano- and/or micro optical fiber probe of the transmitter as alternative embodiments of this invention.
- the forms can be oval, triangular and others.
- FIG. 2 d depicts an embodiment of this invention with the rough surface of the optical fiber nano-and/or micro-probe tip 204 .
- the rough surface causes the increase of the contact area between nano- and/or micro-probe tip and the medium. Therefore the overheating time of this medium decreases substantially.
- FIG. 2 f depicts an embodiment of this invention in which the transmitter is made from the bundle 206 of the optical fiber probes. Changing the length of the optical fiber probe in this bundle causes the surface form of this transmitter to change. Each optical fiber in this bundle can transmit the specific portion of the electromagnetic energy. In this case the transmitter can control and change the direction (alfa-var) of the pumping force vector (F pump).
- F pump pumping force vector
- FIGS. 2 g and FIG. 2 h depict the alternative embodiments of this invention cross section of the optical fiber nano-and/or micro probe transmitter.
- the cross section can be oval, triangular, square and other. It depends on the usage of the cross section in the nano- and/or micro-metric dimensional channel.
- FIGS. 3 a to 3 c depict a portion 103 of an embodiment 300 of this invention in which the transmitter is made as nano-and/or micro-fiber probe with different type of the thin film layer attached to the surface of a nano-and/or micro-probe tip.
- This layer has to be heat-resistant with good absorption and thermal conductive properties and properly attached to the surface of the nano- and/or micro-probe tip.
- FIG. 3 a depicts an embodiment of this invention in which one thin film layer 301 is made from mullite (3Al2O3+2SiO2), that meets the above mentioned requirements. Further detail can be found elsewhere [S. Varadarajan, A. K. Pattanaik, K. Sarin “Mullite interfacial coatings for SiC fiber “Surface and Coating Technology 139 (2001) 153-160].
- the heat-resistant layer 301 absorbs the electromagnetic energy causing the heating of this layer without any vaporization on the contrary to the method of laser transfer deposition described in U.S. Pat. No. 4,987,006, where the polymeric layer absorbs laser energy and as a result of this absorption causes both heating and vaporization of this polymeric layer.
- the thermal energy that is formed in this type of transmitter never oversteps the vaporization limit of the heat-resistant layer 301 .
- the quantity of the thermal energy absorbed from the source of the beamed radiation can be regulated by different ways.
- the absorption of the energy from the source of the beamed radiation by layer 301 can be changed by using the different materials of such layer and/or increasing the surface area by changing the roughness of the surface of the nano- and/or micro-probe tip 204 (FIG. 2 d ).
- the coefficient of absorption of absorbing materials is generally increasing when the electromagnetic radiation has shorter wavelength.
- the different types of the commercially available lasers can generate the electromagnetic radiation with different wavelength.
- the eximer laser generates the electromagnetic radiation with 193 nm, 248 nm, 308 nm and 351 nm wavelengths.
- the NdYAG laser generates the electromagnetic radiation with 1,064 nm wavelengths.
- the carbon dioxide laser generates the electromagnetic radiation with 10,600 nm wavelengths.
- the frequency and/or pulse period of the beamed radiation can change the quantity of the radiation energy that is absorbed by the transmitter.
- FIG. 3 b depicts an alternative embodiment of this invention, at least two thin film layers.
- First layer 302 has good absorption properties for the beamed radiation
- the second one 303 has good thermal conductivity and oxidation resistance properties for working in chemical active areas. Both layers are heat-resistant. The thermal expansion properties of both layers are matched with the material of the nano-and/or micro-probe tip.
- FIG. 3 c depicts an alternative embodiment of this invention in which a thin film layer 304 is made from monolayer C60.
- a thin film layer 304 is made from monolayer C60.
- the further details can be found elsewhere [E. A. Katz, Faiman, S. Shtutina, A. Isakina “Deposition and structural characterization of high quality textured C60 thin films”, Thin Solid Films 368 (2000) 49-54].
- FIG. 3 d depicts an alternative embodiment of this invention using the electron beamed radiation.
- the electron beamed radiation 310 passes through the hollow vacuum sealed tube 309 and is absorbed by aluminum foil 308 . After absorption of the electron beamed radiation the temperature of the aluminum foil increases and the medium in a close proximity to aluminum foil 305 will get overheated. If the energy of the electron beamed radiation overreaches the threshold level of the X-ray radiation 307 this X-ray radiation can be used for sterilization purpose.
- the X-ray radiation 307 is the result of the interaction between the electron beamed radiation and the aluminum foil 308 .
- FIG. 4 illustrates another embodiment 400 of this invention, a nanopump for pumping of liquid flow 406 through nano- and/or micro-channel 408 .
- Electromagnetic radiation 402 is transmitted from a source of radiation (not shown) via fiber 401 to transmitter 410 .
- the transmitter 410 is composed of two layers.
- the first thin film layer 403 has good absorption properties for the specific kind of the electromagnetic radiation (broad band or narrow band or just one wavelength).
- the second thin film layer 404 has good thermal conductive properties. Both layers are heat-resistant.
- the electromagnetic energy is converted to the thermal energy in the transmitter 410 .
- This thermal energy is heating up and/or overheating and/or vaporizing the liquid or another medium 409 in a close proximity to the transmitter.
- This vaporized liquid 409 is expanded to generate the pumping effect in liquid 406 that is placed in a close proximity to liquid 409 .
- the inner wall 405 of the nano- and/or micro-channel serves as diffuser to increase the pumping effect.
- the thermoelectric cooling device 407 based on the Peltier effect is placed for cooling of the pumping liquid in nano- and/or micro channel 408 .
- FIG. 5 depicts another embodiment of this invention, a system 500 for pumping of the liquid flow 505 through nano- and/or micro- dimensional channel in microfluidic array 506 .
- the electromagnetic radiation 502 is transmitted from a source of the beamed radiation (not shown) via fiber 501 to the transmitter 503 .
- the transmitter 503 is made from the thin film layer C60 with good absorption properties for the beamed radiation. This layer has good thermal conductive properties too.
- the electromagnetic energy is converted to the thermal energy into the transmitter 503 .
- This thermal energy is overheating and vaporizing the liquid in a close proximity to the transmitter.
- This overheated liquid 504 is expanded to generate the pumping effect in liquid 505 .
- the inner wall 508 of nano- and/or micro-channel serves as diffusers 509 to increase the pumping effect.
- the heat exchanger 507 is placed in the channels 506 of the nano- and/or microfluidic array for cooling of the pumping liquid.
- FIGS. 6 a and 6 b illustrate another embodiment 600 of this invention, a nanopump for atomization of the liquid drop 604 .
- Electromagnetic radiation 602 is transmitted from a source of radiation (not shown) via fiber 601 to the transmitter 603 .
- the transmitter is composed of two layers with rough surface.
- the first thin film layer is with good absorption properties for the electromagnetic radiation that passes through the fiber optic 601 .
- the second thin film layer is with good thermal conductive properties. Both layers are heat-resistant.
- the electromagnetic energy is converted to the thermal energy in this transmitter 603 .
- the thermal energy is overheating and vaporizing the liquid 605 in a close proximity to the transmitter.
- This liquid 605 is expanded to generate the atomization effect of liquid drops 606 .
- FIG. 7 depicts another embodiment 700 of this invention, a nanopump for moving of nano gears 705 and 706 .
- the electromagnetic radiation 702 is transmitted from a source of radiation (not shown) via fiber 701 to the transmitter.
- the electromagnetic energy is converted to the thermal energy into this transmitter 703 .
- the thermal energy is overheating and vaporizing the liquid 704 in a close proximity to the transmitter.
- This overheated liquid 704 is expanded to generate the pumping effect in liquid 707 .
- This liquid stream 707 is used for moving of nano gears 705 and 706 .
- FIG. 8 a illustrates another embodiment 800 of this invention, a nanopump for pumping of liquid with nanoparticles 804 and/or nanoparticle structures 806 .
- the electromagnetic radiation 802 is transmitted from a source of radiation (not shown) via fiber 801 to the transmitter 803 .
- the transmitter is composed of two layers with rough surface.
- the second thin film layer with good thermal conductive properties is embedded into rough surface by melting.
- the electromagnetic energy is converted to the thermal energy in the transmitter 803 .
- the thermal energy is overheating and vaporizing the liquid 805 in a close proximity to the transmitter.
- This overheated liquid 805 is expanded to pump liquid 807 in micro- and/or nano-metric dimensional channel 808 with nanoparticles 804 and/or nanoparticle structures 806 .
- the combination of this nanopump with a near field optic microscope can be used for selection, separation and positioning of the nanoparticles and nanoparticle structures with and/or without bio agents.
- FIGS. 9 a to 9 c depict another embodiment 900 of this invention, a nanopump for heating and/or melting of the medium.
- the electromagnetic radiation 902 (FIG. 9 a ) is transmitted from a source of radiation (not shown) via fiber 901 to transmitter 903 .
- the electromagnetic energy in the continuous wave regime is converted to the thermal energy in the transmitter 903 .
- the thermal energy is heating the liquid 908 .
- the electromagnetic radiation 902 (FIG. 9 b ) is transmitted from a source of radiation (not shown) via fiber 901 to the transmitter 903 .
- the electromagnetic energy in the continuous wave regime is converted to the thermal energy in the transmitter 903 .
- the thermal energy is causing the heating and melting 907 of the solid medium 905 and 906 in a close proximity to the transmitter 903 .
- this method can be used in the coating technology.
- the electromagnetic radiation 902 (FIG. 9 c ) is transmitted from a source of radiation (not shown) via fiber 901 to the transmitter 903 .
- the electromagnetic energy in the continuous wave regime is converted to the thermal energy in the transmitter 903 .
- the thermal energy is heating the heat pipe array 909 that is connected with the transmitter 903 .
- the thermal energy can be transmitted to any devices that need extra energy for normal operation.
- this method can be easily used for heating up, overheating and/or melting of the medium in nano- and/or micro-metric dimensional devices in airspace industry with antiterrorism purpose and/or in space studies of the thermal physical properties of nano- and/or micro-metric dimension crystals in Microgravity.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The systems and methods for no-moving parts nanopump based technology provide conversion of the electromagnetic energy in the infrared, visible, ultraviolet, gamma- and x-ray portion of the spectrum, electron and/or ion beamed radiation into the thermal energy. The thermal energy is utilized for heating up, overheating and pumping of the medium in nano- and/or micro-metric dimensional devices. Nanopump includes a source of the radiation energy connected with one side of the waveguide for transferring of the radiation energy. The transmitter with at least one transparent for the radiation energy thermal resistant tip on the other side of the waveguide is connected with at least one thermal conductive layer having good absorption properties for the radiation energy. The transmitter converts the energy from the source of the radiation energy into the thermal energy and this thermal energy can be transmitted to the medium for heating up and overheating of this medium in a close proximity to the transmitter. The expansion of the overheated medium generates directed pumping force and motion of the medium in a close proximity to the transmitter and delivers this motion to another parts of the medium for pumping of this medium in nano- and/or micro channels.
Description
- This application claims the benefit of U.S. Provisional Application, titled “Nanopump”, inventor Oleg A. Yevin, No. 60/307,746, filed Jul. 25, 2001.
- 1. Field of the Invention
- This invention relates generally to the field of conversion of the electromagnetic energy into the thermal energy in the infrared, visible, ultraviolet, gamma- and x-ray portion of the spectrum as well as conversion of the electron and/or ion beamed radiation into thermal energy. This invention relates in particular to nano- and micro- metric dimensional systems and methods for no-moving parts nanopump based technology. This thermal energy is utilized for heating up, overheating and pumping of the medium in nano- and/or micro-metric dimensional devices.
- 2. Description of Related Art
- The earlier apparatus and methods for pumping of different kinds of the medium by dimensional devices size of 1 mm and more were based on various types of bulky pumps. The moving parts of these bulky pumps have converted different types of energy to pumping force creating pumping effect in different types of medium. Various physical principals for pumping medium in micro size dimensional channels have been used in micro size dimensional pumps. New applications in different areas of the nanotechnology have opened broad possibilities for creation and development of new types of nanometric dimensional devices. The nano size of these devices has dictated the need for creation of the multifunctional, simple and reliable nano- and micro-metric dimensional apparatus.
- U.S. Pat. No. 6,171,067 provides a micropump that utilizes the electroosmotic pumping of fluid in one channel or region in order to generate pressure that is based on flow of the material in a connected channel that has no electroosmotic flow generated. Such pumps are particulary useful in such cases where the application of the electric fields is impossible.
- Miniature pumps use the different variants of the piezoelectrical diaphragm for pumping gas. U.S. Pat. No. 5,466,932 provides a microminiature pump that is applied in a solid state mass-spectrograph and pumps gases at low pressure. The pump preferably is comprised of at least one piezoelectrically-actuated diaphragm. Upon piezoelectrical actuation, the diaphragm accomplishes a suction or compression stroke. The suction stroke evacuates the portion of the cavity to which the pump is connected. The compression stroke increases the pressure of the gas in the cavity moving into the next pump stage or exhausting into the ambient atmosphere.
- U.S. Pat. No. 6,210,128 provides miniature acoustic-fluidic pump and mixer. In this invention the quartz wind techniques have been used for generation of steady non-pulsative flow. These techniques do not require valves that could clog. The transducer converts radio frequency of electrical energy into an ultrasonic acoustic wave in a fluid that generates directed fluid motion. Acoustic streaming appears as a result of the absorbtion of the acoustic energy in the fluid itself.
- Miniature no-moving parts pump have been used in a number of the microfluidic systems. Miniature valve-less membrane pumps that are using fluidic rectifiers, such as nozzle/diffusor have been operated without valves that could open and close, i.e. pumps that employ no-moving parts valves (NMPV). U.S. Pat. No. 6,227,809 provides a method that can be used to design and produce NMPV micropumps with structures optimized for maximal pump performance.
- Significant drawbacks of all these micropumps are common. It can be very difficult or impossible to reduce the micrometric dimension of such micropumps to nanometric dimension. Therefore it can be very difficult and not effective to use such micropump in nanotechnology. Miniaturization of the micropumps to nanometric dimension offers numerous advantages for using such nanodevices in the broad areas of the nano- and bio-technology.
- The present invention provides systems and methods that utilize the thermal energy for heating up, overheating and pumping of the medium in nano- and/or micro-metric dimensional devices based on no-moving parts nanopump.
- The present invention also provides methods that can make conversion of the electromagnetic energy into the thermal energy in the infrared, visible, ultraviolet, gamma- and x-ray portion of the spectrum as well as conversion of the electron and/or ion beamed radiation into the thermal energy.
- In certain embodiments of this invention the nanopump unit is comprised of the source of the beamed radiation energy, and at least one waveguide . One side of that particular waveguide is connected with the source of the beamed radiation for transferring the radiation energy to another side of this waveguide. Another side of this waveguide is connected with at least one transmitter that converts the beamed radiation energy into the thermal energy.
- This transmitter has at least one thermal resistant tip transparent for the beamed radiation. As part of the transmitter this particular tip is connected with the above mentioned another side of this waveguide. This transmitter has at least one layer that has thermal resistant and thermal conductive properties. This layer has good absorption properties for beamed radiation and is connected with the thermal resistant tip on one side and with a medium on the other side.
- First, it means that at least one layer with good absorption properties on the surface of the transparent tip provides conversion of the beamed radiation energy into the thermal energy. Second, it means that at least one layer with thermal conductive properties on the surface of the transparent tip provides transfer of the thermal energy from this layer to the medium.
- In certain embodiments, the present invention provides new miniaturized nanopump that can be easily used for parallel pumping and regulation of the operation mode of medium flow through nano- and/or micro-metric dimensional channels.
- In other embodiments, the present invention provides new miniaturized systems that can be easily used for pumping, positioning, selection, separation and treatment of different types of nano- and/or micro-objects including toxic bio agents in their original forms.
- In various embodiments, the present invention provides new miniaturized systems that can be easily used for mixing, stirring and atomization of the medium in nano- and/or micro-metric dimensional volumes. These systems can be useful for drug delivery devices and/or for coating technology in production of nano and/or micro electronic devices (MEMS).
- In some embodiments, the present invention provides new miniaturized systems that can be easily used for heating up, overheating and/or melting medium in nano- and/or micro-metric dimensional devices in the airspace industry.
- In some embodiments, the present invention is a method that can be easily applied in space conditions for research and studies of the thermo physical properties of nano- and/or micro-metric dimensional crystals in Microgravity and Material Science.
- In certain embodiments, the present invention provides new miniaturized nanopumps that can be easily used and do not depend on wall condition, pH or ionicity of the medium.
- In some embodiments, the present invention provides new miniaturized nanopump that can be easily used for the movement generations of different nano- and/or micro-devices.
- In various embodiments, the present invention provides miniaturized systems and methods based on nanopump technology that can be easily removed and turned “On” and “Off” with a minimum effort. This technology is versatile, simple, scale up and scale down friendly for different applications.
- Other objects and advantages of the present invention will become apparent from the following descriptions, taken in connection with the accompanying drawings, wherein, by way of the illustration and example, an embodiment of the present invention is disclosed. The drawings constitute a part of this specification and include exemplary embodiments to the invention, which may be embodied in various forms. It is to be understood that in some instances various aspects of the invention may be shown exaggerated or enlarged to facilitate an understanding of the invention.
- FIG. 1 depicts a schematic representation of this invention
- FIGS. 2 a to 2 h depict a design for transmitter with different form of the tip surface
- FIGS. 3 a to 3 d depict a different variant of the transmitter with thermal resistant layer
- FIG. 4 depicts a nanopump for pumping of liquid in nano- and/or micro-metric dimensional channel
- FIG. 5 depicts a nanopump for pumping of liquid in microfluidic and/or nanometric dimensional array
- FIGS. from 6 a and 6 b depict a design for atomization of the liquid for the drug delivery system
- FIG. 7 depicts a design for moving nano devices using nanopump
- FIG. 8 depicts a nanopump for pumping liquid with nanoparticles and/or nanoparticle structures
- FIGS. 9 a to 9 c depict a continuous wave and/or impulse regime for heating and/or melting of the medium
- Detailed descriptions of the preferred embodiments are provided herein. It is to be understood, however, that the present invention may be embodied in various forms. Therefore, specific details disclosed herein are not to be interpreted as limiting, but rather as a basis for the claims and as a representative basis for teaching one skilled in the art to employ the present invention in virtually any appropriately detailed system, structure or manner.
- The systems and methods disclosed herein have broad applications in nano- and/or bio-technology, medicine and combination of the above. Some embodiments of this invention can be useful for pumping, mixing, atomization, heating up and melting of the medium in nano- and/or micro channels of the devices of different kinds with and without nano objects.
- In the embodiments of the invention the electromagnetic radiation coming from the source of the beamed radiation through waveguide can be utilized in the form of the thermal energy. In accordance with present invention the energy from the source of the beamed radiation connected with one side of the waveguide is transferred to another side of the waveguide. The transmitter with at least one transparent for the beamed radiation thermal resistant tip on the other side of the waveguide is connected with at least one thermal conductive layer having good absorption properties for the beamed radiation.
- In certain embodiments, the transmitter converts the energy from the source of the beamed radiation into the thermal energy and this thermal energy can be transmitted to the medium for heating up and overheating of this medium in a close proximity to the transmitter.
- In other embodiments, the expansion of the overheated medium generates directed pumping force and motion of the medium in a close proximity to the transmitter and delivers this motion to another parts of the medium for the pumping of this medium in nano- and/or micro channels.
- In some embodiments, the alternative way to implement each primary element of this invention is the following: the source of the beamed radiation can be a laser with impulse and/or continuous wave (cw) optically connected with one side of the fiber optic for transferring of the radiation energy.
- In other embodiments, a fiber optic has at least one thermal resistant nanoprobe tip transparent for cw and/or impulse beamed radiation with subwavelength aperture. This nanoprobe tip transparent for the beamed radiation has on the surface at least one thin film layer with good absorption properties for the beamed radiation and good thermal conductivity properties.
- First, it means that a nanoprobe tip transparent for the beamed radiation has on the surface at least one thin film layer with good absorption properties for the beamed radiation and good thermal conductivity properties, converts the radiation energy into the thermal energy, and transfers this thermal energy to the medium for overheating this medium in a close proximity to the transmitter.
- Second, it means that the overheated medium by using of cw and/or impulse beamed radiation generates directed pumping force and provides a cw and/or impulse nano- and/or micro-size jet stream. An impulse and/or nano- and/or micro-size jet stream provides pumping of the medium in nano- and micro-metric dimensional channels.
- In various embodiments, an impulse and/or nano- and/or micro-size jet stream provides positioning, selection and/or separation of the different types of nano- and/or micro-objects including toxic bio agents in their original forms.
- In certain embodiments, an impulse and/or nano- and/or micro-size jet stream provides mixing, stirring and/or atomization of the medium in nano- and/or micro-metric dimensional volume for ultra-cleaning procedures in particle-producing processes like chemical mechanical planarization (CMP). This process is necessary in semiconductor and/or MEMS device fabrication. CMP leaves tens of thousands of sub-micron and micron size particles that must be removed before further processing otherwise they cause defects in finished integrated circuits. (Hymes D., at all, 1998. The challenges of the copper CMP clean. Semicond. Int. 21, 117.)
- In some embodiments, an impulse and/or nano- and/or micro-size jet stream provides mixing, stirring and/or atomization of the medium in nano- and/or micro-metric dimensional volume in drag delivery system and/or in coating technology for production of the nano- and/or micro electronic devices (MEMS).
- In other embodiments, an impulse and/or nano- and/or micro-size jet stream provides moving of the nano gear and/or another nano- and/or micro-devices. An impulse and/or nano- and/or micro-size jet stream removes heat from the working area of nano- and/or micro-metric dimensional devices of various types. A near field optic microscope, electron microscope and/or another nano-, micro-scopic device implement the control for jet stream operation.
- In other embodiments, the alternative way to implement each primary element in this invention is the following: the source of cw and/or impulse multi wavelength radiation connected with fiber optic through the optical filters on one end of the fiber optic transfers the radiation energy. An optical filter is used for the selection of the specific wavelength of the cw and/or impulse beamed radiation.
- In various embodiments, a nanoprobe tip transparent for the beamed radiation has at least one layer with good absorption properties, opaque for the beamed radiation with wavelength A, and transparent and /or semi-transparent for the beamed radiation with wavelength B.
- In certain embodiments, a nanoprobe tip transparent for the beamed radiation has at least one thin film layer with good thermal conductivity properties that covers the surface of the first thin film layer with good absorption properties for the beamed radiation. In this matter, both layers are covering the nanoprobe tip transparent for the beamed radiation and are positioned one after the other.
- First, it means that the first layer with good absorption properties covers the surface of the nanoprobe tip, and the second layer with good thermal conductivity covers the surface of the first layer.
- Second, it means that at least two thin film layers with good absorption properties for the beamed radiation and with good thermal conductivity properties provide conversion of the radiation energy into the thermal energy and transferring of the thermal energy to the medium for overheating this medium.
- In some embodiments, the beamed radiation with wavelength B can be an X-ray radiation and /or microwave radiation for the treatment of the toxic bio agents in the medium.
- In other embodiments, a heat pipe is in a close proximity to a transmitter and provides additional heating and /or cooling medium. The overheating and /or cooling medium between a transmitter and a heat pipe provides the regulation of the mode of operation of the medium flow in nano- and /or micro-metric dimensional channels. The overheated medium can be in the form of gas and/or vapor conditions.
- In certain embodiments, at least one and /or array of the heat pipes is/are connected with a transmitter for transferring of the heat to the different devices that are used in extreme conditions, including space studies and research.
- In some embodiments, an ultrasonic tip in a close proximity to the transmitter regulates the mode of operation of the medium flow in nano- and /or micro-metric dimensional channels.
- In certain embodiments, the source of the beamed radiation is a miniature pulsed xenon system that produces high peak optical energy from the deep ultraviolet (160 nm) to infrared (above 4 microns). Those systems are available at Perkin-Elmer.
- In various embodiments, the source of the beamed radiation emits the infrared, visible, ultraviolet and x-ray portion of the spectrum and uses the filter unit that permits the passage of the relatively narrow band of the electromagnetic radiation. The medium can be in various forms, including liquid, gas, solid and/or mixed substances.
- In other embodiments, various devices can be used as a waveguide (for example, fiber optic, duct, optical filters, etc.) in nano- and/or micro-and/or metric dimension or medium (as gas, liquid, solid, vacuum) and are designed to confine and direct the propagation of electromagnetic waves in the infrared, visible, ultraviolet and x-ray portion of the spectrum and/or electron and/or ion beamed radiation.
- In certain embodiments, the transmitter can be any device that contains a mechanism for converting the energy from a source of the beamed radiation into the equivalent thermal energy.
- While the invention has been described in connection with a preferred embodiment, it is not intended to limit the scope of the invention to the particular form set forth, but on the contrary, it is intended to cover such alternatives, modifications, and equivalents as may be included within the spirit and scope of the invention as defined by the appended claims.
- FIG. 1 depicts a schematic representation of the embodiment of this invention. 101, the source of the beamed electromagnetic radiation is preferably the source of the impulse beamed radiation. But for some embodiments of this invention, the source could be the continuous wave radiation (cw). For example, the continuous wave radiation can be useful for heating, boiling, melting of the medium in a close proximity to the transmitter. The
waveguide 102 is used for collection of the beamed radiation fromsource 101 and transmitting this radiation totransmitter 103. - The heat-
resistant transmitter 103 converts the radiation energy from the source of the beamedradiation 101 into the thermal energy and transmits this thermal energy to the medium 104 in a close proximity to thetransmitter 103 and heats up and overheats this medium 104. Theoverheated medium 104 is expanded. The expansion of theoverheated medium 104 generates directed pumping force and motion of the medium in a close proximity to thetransmitter 103 and delivers this motion to another parts of the medium 105 for pumping of this medium. The overheating means the increase of the temperature and/or process of vaporizing and/or melting of the medium in a close proximity to the transmitter. - FIGS. 2 a to 2 h depict a
portion 103 of anembodiment 200 of this invention in which the transmitter is made as nano- and/or micro-optical fiber probe with different forms of the tip surface. Further details about fabrication of the tip that permits the reproducible production of highly transmissive probes with aperture sizes below 100 nm can be found elsewhere [T. Yatsuia, M. Kourogi, M. Ohtsu, Appl. Phis. Lett. 73 (1998) 2090]. - FIGS. 2 a to 2 f depict
201, 202, 203, 204, 205 and 207 of nano- and/or micro optical fiber probe of the transmitter as alternative embodiments of this invention. The forms can be oval, triangular and others.different forms - FIG. 2 d depicts an embodiment of this invention with the rough surface of the optical fiber nano-and/or
micro-probe tip 204. The rough surface causes the increase of the contact area between nano- and/or micro-probe tip and the medium. Therefore the overheating time of this medium decreases substantially. - FIG. 2 f depicts an embodiment of this invention in which the transmitter is made from the
bundle 206 of the optical fiber probes. Changing the length of the optical fiber probe in this bundle causes the surface form of this transmitter to change. Each optical fiber in this bundle can transmit the specific portion of the electromagnetic energy. In this case the transmitter can control and change the direction (alfa-var) of the pumping force vector (F pump). - FIGS. 2 g and FIG. 2h depict the alternative embodiments of this invention cross section of the optical fiber nano-and/or micro probe transmitter. The cross section can be oval, triangular, square and other. It depends on the usage of the cross section in the nano- and/or micro-metric dimensional channel.
- FIGS. 3 a to 3 c depict a
portion 103 of anembodiment 300 of this invention in which the transmitter is made as nano-and/or micro-fiber probe with different type of the thin film layer attached to the surface of a nano-and/or micro-probe tip. This layer has to be heat-resistant with good absorption and thermal conductive properties and properly attached to the surface of the nano- and/or micro-probe tip. - FIG. 3 a depicts an embodiment of this invention in which one
thin film layer 301 is made from mullite (3Al2O3+2SiO2), that meets the above mentioned requirements. Further detail can be found elsewhere [S. Varadarajan, A. K. Pattanaik, K. Sarin “Mullite interfacial coatings for SiC fiber “Surface and Coating Technology 139 (2001) 153-160]. - The heat-
resistant layer 301 absorbs the electromagnetic energy causing the heating of this layer without any vaporization on the contrary to the method of laser transfer deposition described in U.S. Pat. No. 4,987,006, where the polymeric layer absorbs laser energy and as a result of this absorption causes both heating and vaporization of this polymeric layer. - Therefore in alternative embodiment of this invention the thermal energy that is formed in this type of transmitter never oversteps the vaporization limit of the heat-
resistant layer 301. The quantity of the thermal energy absorbed from the source of the beamed radiation can be regulated by different ways. - By way of example, the absorption of the energy from the source of the beamed radiation by
layer 301 can be changed by using the different materials of such layer and/or increasing the surface area by changing the roughness of the surface of the nano- and/or micro-probe tip 204 (FIG. 2d). - By way of example, the coefficient of absorption of absorbing materials is generally increasing when the electromagnetic radiation has shorter wavelength. The different types of the commercially available lasers can generate the electromagnetic radiation with different wavelength. The eximer laser generates the electromagnetic radiation with 193 nm, 248 nm, 308 nm and 351 nm wavelengths. The NdYAG laser generates the electromagnetic radiation with 1,064 nm wavelengths. The carbon dioxide laser generates the electromagnetic radiation with 10,600 nm wavelengths. By way of example, the frequency and/or pulse period of the beamed radiation can change the quantity of the radiation energy that is absorbed by the transmitter.
- FIG. 3 b depicts an alternative embodiment of this invention, at least two thin film layers.
First layer 302 has good absorption properties for the beamed radiation, the second one 303 has good thermal conductivity and oxidation resistance properties for working in chemical active areas. Both layers are heat-resistant. The thermal expansion properties of both layers are matched with the material of the nano-and/or micro-probe tip. - FIG. 3 c depicts an alternative embodiment of this invention in which a
thin film layer 304 is made from monolayer C60. The further details can be found elsewhere [E. A. Katz, Faiman, S. Shtutina, A. Isakina “Deposition and structural characterization of high quality textured C60 thin films”, Thin Solid Films 368 (2000) 49-54]. - FIG. 3 d depicts an alternative embodiment of this invention using the electron beamed radiation. The electron beamed
radiation 310 passes through the hollow vacuum sealedtube 309 and is absorbed byaluminum foil 308. After absorption of the electron beamed radiation the temperature of the aluminum foil increases and the medium in a close proximity toaluminum foil 305 will get overheated. If the energy of the electron beamed radiation overreaches the threshold level of theX-ray radiation 307 this X-ray radiation can be used for sterilization purpose. TheX-ray radiation 307 is the result of the interaction between the electron beamed radiation and thealuminum foil 308. - FIG. 4 illustrates another
embodiment 400 of this invention, a nanopump for pumping of liquid flow 406 through nano- and/ormicro-channel 408.Electromagnetic radiation 402 is transmitted from a source of radiation (not shown) viafiber 401 to transmitter 410. The transmitter 410 is composed of two layers. The firstthin film layer 403 has good absorption properties for the specific kind of the electromagnetic radiation (broad band or narrow band or just one wavelength). The secondthin film layer 404 has good thermal conductive properties. Both layers are heat-resistant. - The electromagnetic energy is converted to the thermal energy in the transmitter 410. This thermal energy is heating up and/or overheating and/or vaporizing the liquid or another medium 409 in a close proximity to the transmitter. This vaporized liquid 409 is expanded to generate the pumping effect in liquid 406 that is placed in a close proximity to liquid 409. The
inner wall 405 of the nano- and/or micro-channel serves as diffuser to increase the pumping effect. The thermoelectric cooling device 407 based on the Peltier effect is placed for cooling of the pumping liquid in nano- and/ormicro channel 408. - FIG. 5 depicts another embodiment of this invention, a
system 500 for pumping of theliquid flow 505 through nano- and/or micro- dimensional channel inmicrofluidic array 506. Theelectromagnetic radiation 502 is transmitted from a source of the beamed radiation (not shown) viafiber 501 to thetransmitter 503. Thetransmitter 503 is made from the thin film layer C60 with good absorption properties for the beamed radiation. This layer has good thermal conductive properties too. - The electromagnetic energy is converted to the thermal energy into the
transmitter 503. This thermal energy is overheating and vaporizing the liquid in a close proximity to the transmitter. Thisoverheated liquid 504 is expanded to generate the pumping effect inliquid 505. Theinner wall 508 of nano- and/or micro-channel serves asdiffusers 509 to increase the pumping effect. Theheat exchanger 507 is placed in thechannels 506 of the nano- and/or microfluidic array for cooling of the pumping liquid. - FIGS. 6 a and 6 b illustrate another
embodiment 600 of this invention, a nanopump for atomization of theliquid drop 604.Electromagnetic radiation 602 is transmitted from a source of radiation (not shown) viafiber 601 to thetransmitter 603. The transmitter is composed of two layers with rough surface. The first thin film layer is with good absorption properties for the electromagnetic radiation that passes through thefiber optic 601. The second thin film layer is with good thermal conductive properties. Both layers are heat-resistant. - The electromagnetic energy is converted to the thermal energy in this
transmitter 603. The thermal energy is overheating and vaporizing the liquid 605 in a close proximity to the transmitter. This liquid 605 is expanded to generate the atomization effect of liquid drops 606. - FIG. 7 depicts another embodiment 700 of this invention, a nanopump for moving of nano gears 705 and 706. The
electromagnetic radiation 702 is transmitted from a source of radiation (not shown) viafiber 701 to the transmitter. The electromagnetic energy is converted to the thermal energy into thistransmitter 703. The thermal energy is overheating and vaporizing the liquid 704 in a close proximity to the transmitter. Thisoverheated liquid 704 is expanded to generate the pumping effect inliquid 707. Thisliquid stream 707 is used for moving of nano gears 705 and 706. - FIG. 8 a illustrates another
embodiment 800 of this invention, a nanopump for pumping of liquid withnanoparticles 804 and/ornanoparticle structures 806. Theelectromagnetic radiation 802 is transmitted from a source of radiation (not shown) viafiber 801 to thetransmitter 803. The transmitter is composed of two layers with rough surface. The first thin film layer with good absorption properties for the electromagnetic radiation that passes throughfiber optic 801. The second thin film layer with good thermal conductive properties is embedded into rough surface by melting. - The electromagnetic energy is converted to the thermal energy in the
transmitter 803. The thermal energy is overheating and vaporizing the liquid 805 in a close proximity to the transmitter. Thisoverheated liquid 805 is expanded to pump liquid 807 in micro- and/or nano-metricdimensional channel 808 withnanoparticles 804 and/ornanoparticle structures 806. The combination of this nanopump with a near field optic microscope can be used for selection, separation and positioning of the nanoparticles and nanoparticle structures with and/or without bio agents. - FIGS. 9 a to 9 c depict another
embodiment 900 of this invention, a nanopump for heating and/or melting of the medium. The electromagnetic radiation 902 (FIG. 9a) is transmitted from a source of radiation (not shown) viafiber 901 totransmitter 903. The electromagnetic energy in the continuous wave regime is converted to the thermal energy in thetransmitter 903. The thermal energy is heating theliquid 908. - The electromagnetic radiation 902 (FIG. 9b) is transmitted from a source of radiation (not shown) via
fiber 901 to thetransmitter 903. The electromagnetic energy in the continuous wave regime is converted to the thermal energy in thetransmitter 903. The thermal energy is causing the heating andmelting 907 of the 905 and 906 in a close proximity to thesolid medium transmitter 903. When the medium is atomized this method can be used in the coating technology. - The electromagnetic radiation 902 (FIG. 9c) is transmitted from a source of radiation (not shown) via
fiber 901 to thetransmitter 903. The electromagnetic energy in the continuous wave regime is converted to the thermal energy in thetransmitter 903. The thermal energy is heating theheat pipe array 909 that is connected with thetransmitter 903. - The thermal energy can be transmitted to any devices that need extra energy for normal operation. By way of example, this method can be easily used for heating up, overheating and/or melting of the medium in nano- and/or micro-metric dimensional devices in airspace industry with antiterrorism purpose and/or in space studies of the thermal physical properties of nano- and/or micro-metric dimension crystals in Microgravity.
- While the invention has been described in connection with a preferred embodiment, it is not intended to limit the scope of the invention to the particular form set forth, but on the contrary, it is intended to cover such alternatives, modifications, and equivalents as may be included within the spirit and scope of the invention as defined by the appended claims.
Claims (38)
1. A nanopump comprising of:
(a) a source of radiation energy; and
(b) at least one waveguide connected on one side with of said source of radiation; and
(c) at least one transmitter connected with at least one of said waveguide on the other side of said waveguide.
2. A nanopump of claim 1 , wherein said transmitter has at least one thermal resistant tip transparent for the beamed radiation and is connected with at least one of said waveguide on the of said the other side of said waveguide.
3. A nanopump of claim 1 , wherein said a source of radiation energy is a laser.
4. A nanopump of claim 2 , wherein said transmitter has at least one thermal resistant and thermal conductive layer having good absorption properties for the radiation energy and connected on one side with thermal resistant tip and on the other side with the medium.
5. A nanopump of claim 2 , wherein said transmitter has at least one heat pipe having good absorption properties for the radiation energy and connected on one side with the thermal resistant tip and on the other side with the medium.
6. A nanopump of claim 2 , wherein said thermal resistant tip has different diameter.
7. A nanopump of claim 4 , wherein said other side of the transmitter has flat outer surface.
8. A nanopump of claim 4 , wherein said other side of the transmitter has rough outer surface.
9. A nanopump of claim 4 , wherein said other side of the transmitter has oval outer surface.
10. A nanopump of claim 4 , wherein said other side of the transmitter has triangular outer surface.
11. A nanopump of claim 3 , wherein said transmitter has cross-section adaptable to the form of at least one nano- and/or micro-metric dimensional channel.
12. A nanopump of claim 1 , wherein said waveguide is a fiber optic.
13. A nanopump of claim 1 , wherein said waveguide is a vacuum tube sealed by aluminum foil.
14. A nanopump of claim 1 , further comprising a plurality of waveguides, wherein each of said transmitter is connected with at least one of said waveguide.
15. A nanopump of claim 12 , wherein said a plurality of waveguides is assembled in a bundle.
16. A nanopump of claim 14 , wherein said transmitters have common oval outer surface.
17. A nanopump of claim 14 , wherein said transmitters have common triangular outer surface.
18. A nanopump of claim 14 , wherein said transmitters have cross-section adaptable to the form of at least one nano- and/or micro-metric dimensional channel.
19. A nanopump of claims 11, further comprising of a plurality of nano- and/or micro-metric dimensional channels.
20. A nanopump of claim 19 , wherein said nano- and/or micro-metric dimensional channels are arranged in a micro fluidic array.
21. A system for positioning, selection, separation and treatment of nano- and/or micro-objects, comprising of:
(a) at least one nanopump; and
(b) a plurality of sources of the radiation energy that has at least one different range of wavelengths; and
(c) at least one microscope.
(d) plurality of waveguides.
22. A system of claim 21 , wherein said different range of wavelengths is an x-ray portion of the spectrum.
23. A system of claim 21 , wherein said different range of wavelengths is a microwave portion of the spectrum.
24. A system of claim 21 , wherein said plurality of waveguides transmit of said radiation energy with a different range of wavelengths from said plurality of sources to the medium.
25. A system of claim 21 , wherein said plurality of waveguides transmit of said radiation with a different range of wavelengths from said medium to at least one of said microscope.
26. A system of claim 21 , wherein said microscope is a near field optic microscope.
27. A system of claim 24 , wherein said a medium is liquid with nanoparticles and/or nanoparticle structures.
28. A system of claim 24 , wherein said a medium is liquid with at least one biological agent.
29. A system of claim 28 , further comprising of at least one biological agent that is associated with said nanoparticles and/or nanoparticle structures.
30. A system for heating up, overheating and/or melting of nano- and/or micro-objects, comprising of:
(a) at least one nanopump;
(b) plurality of the heat pipes, wherein said plurality of heat pipes is connected with at least one of said nanopump:
(c) plurality of nano- and/or micro-metric dimensional devices,
wherein each of said plurality of nano- and/or micro-metric dimensional devices is connected with at least one of said heat pipes.
31. A system of no-moving parts valve of claim 30 , wherein gap of liquid size nano- or micro-meter exists between the said plurality of heat pipes and of said nanopump.
32. A method for conversion the radiation energy into thermal energy using of said nanopump, comprising the steps of:
(a) illuminating the transmitter with the incident radiation, from a source of the radiation energy of said nanopump; and
(b) conversion of the radiation energy into the thermal energy using of said transmitter.
33. A method of claim 32 , further comprising of transferring of said thermal energy from said transmitter to the medium.
34. A method of claim 33 , further comprising of overheating of said medium using of said thermal energy in a close proximity to the transmitter and generating directed pumping force and motion of said medium in a close proximity to the transmitter and delivering of this motion to another parts of said medium for pumping of said medium.
35. A method of claim 34 , further comprising of the surface to be cleaned and treated by said pumped medium.
36. A method of claim 35 , further comprising of a chemical aggressive liquid added to the said medium.
37. A method of claim 33 , further comprising of the heated up, overheated and/or melted said medium using the heat pipe, wherein of said heat pipe is connected with at least one of said transmitter.
38. A method of claim 34 , further comprising of a near field optic microscope, and at least one of said waveguide, wherein said waveguide is connected with said near field optic microscope for positioning, selection, separation and treatment of nano- and/or micro-objects in said liquid medium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/198,550 US20030021694A1 (en) | 2001-07-25 | 2002-07-18 | Nano and micro metric dimensional systems and methods for nanopump based technology |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US30774601P | 2001-07-25 | 2001-07-25 | |
| US10/198,550 US20030021694A1 (en) | 2001-07-25 | 2002-07-18 | Nano and micro metric dimensional systems and methods for nanopump based technology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US20030021694A1 true US20030021694A1 (en) | 2003-01-30 |
Family
ID=26893901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US10/198,550 Abandoned US20030021694A1 (en) | 2001-07-25 | 2002-07-18 | Nano and micro metric dimensional systems and methods for nanopump based technology |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | US20030021694A1 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060045766A1 (en) * | 2004-09-02 | 2006-03-02 | Herbert Harttig | Micropump for delivering liquids at low delivery rates in a push/pull operating mode |
| US20060051218A1 (en) * | 2004-09-06 | 2006-03-09 | Herbert Harttig | Push-pull operated pump for a microfluidic system |
| US20060051214A1 (en) * | 2002-08-15 | 2006-03-09 | Tomas Ussing | Micro liquid handling device and methods for using it |
| US20080105829A1 (en) * | 2004-01-23 | 2008-05-08 | Sri International | Apparatus and Method of Moving Micro-Droplets Using Laser-Induced Thermal Gradients |
| US7632482B1 (en) * | 2006-12-04 | 2009-12-15 | The United States Of America As Represented By The United States Department Of Energy | Method for nano-pumping using carbon nanotubes |
| CN104405613A (en) * | 2014-11-28 | 2015-03-11 | 广东工业大学 | Laser-induced micro pump |
| RU2654547C2 (en) * | 2016-03-18 | 2018-05-21 | Шкилев В.Д. | Device for identification mark manufacturing |
| CN111333019A (en) * | 2018-12-19 | 2020-06-26 | 湖南早晨纳米机器人有限公司 | Nanometer robot and nanometer robot motion control system |
| JP2020138152A (en) * | 2019-02-28 | 2020-09-03 | キヤノン株式会社 | Ultra fine bubble generator |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4792283A (en) * | 1986-06-23 | 1988-12-20 | Kenji Okayasu | Heat-driven pump |
| US5043995A (en) * | 1988-07-01 | 1991-08-27 | Messer Griesheim | Process to electrically excite a laser gas |
| US5053033A (en) * | 1990-10-10 | 1991-10-01 | Boston Advanced Technologies, Inc. | Inhibition of restenosis by ultraviolet radiation |
| US5330465A (en) * | 1991-11-26 | 1994-07-19 | Laser Therapeutics, Inc. | Continuous gradient cylindrical diffusion tip for optical fibers and method for using |
| US5599502A (en) * | 1992-04-27 | 1997-02-04 | Canon Kabushiki Kaisha | Liquid moving apparatus and measuring apparatus utilizing the same |
| US6003388A (en) * | 1997-09-17 | 1999-12-21 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | System for manipulating drops and bubbles using acoustic radiation pressure |
| US6071081A (en) * | 1992-02-28 | 2000-06-06 | Seiko Instruments Inc. | Heat-powered liquid pump |
| US6106245A (en) * | 1997-10-09 | 2000-08-22 | Honeywell | Low cost, high pumping rate electrostatically actuated mesopump |
| US6210128B1 (en) * | 1999-04-16 | 2001-04-03 | The United States Of America As Represented By The Secretary Of The Navy | Fluidic drive for miniature acoustic fluidic pumps and mixers |
-
2002
- 2002-07-18 US US10/198,550 patent/US20030021694A1/en not_active Abandoned
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4792283A (en) * | 1986-06-23 | 1988-12-20 | Kenji Okayasu | Heat-driven pump |
| US5043995A (en) * | 1988-07-01 | 1991-08-27 | Messer Griesheim | Process to electrically excite a laser gas |
| US5053033A (en) * | 1990-10-10 | 1991-10-01 | Boston Advanced Technologies, Inc. | Inhibition of restenosis by ultraviolet radiation |
| US5330465A (en) * | 1991-11-26 | 1994-07-19 | Laser Therapeutics, Inc. | Continuous gradient cylindrical diffusion tip for optical fibers and method for using |
| US6071081A (en) * | 1992-02-28 | 2000-06-06 | Seiko Instruments Inc. | Heat-powered liquid pump |
| US5599502A (en) * | 1992-04-27 | 1997-02-04 | Canon Kabushiki Kaisha | Liquid moving apparatus and measuring apparatus utilizing the same |
| US6003388A (en) * | 1997-09-17 | 1999-12-21 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | System for manipulating drops and bubbles using acoustic radiation pressure |
| US6106245A (en) * | 1997-10-09 | 2000-08-22 | Honeywell | Low cost, high pumping rate electrostatically actuated mesopump |
| US6210128B1 (en) * | 1999-04-16 | 2001-04-03 | The United States Of America As Represented By The Secretary Of The Navy | Fluidic drive for miniature acoustic fluidic pumps and mixers |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060051214A1 (en) * | 2002-08-15 | 2006-03-09 | Tomas Ussing | Micro liquid handling device and methods for using it |
| US20080105829A1 (en) * | 2004-01-23 | 2008-05-08 | Sri International | Apparatus and Method of Moving Micro-Droplets Using Laser-Induced Thermal Gradients |
| US7582858B2 (en) * | 2004-01-23 | 2009-09-01 | Sri International | Apparatus and method of moving micro-droplets using laser-induced thermal gradients |
| US20060045766A1 (en) * | 2004-09-02 | 2006-03-02 | Herbert Harttig | Micropump for delivering liquids at low delivery rates in a push/pull operating mode |
| US20060051218A1 (en) * | 2004-09-06 | 2006-03-09 | Herbert Harttig | Push-pull operated pump for a microfluidic system |
| US7632482B1 (en) * | 2006-12-04 | 2009-12-15 | The United States Of America As Represented By The United States Department Of Energy | Method for nano-pumping using carbon nanotubes |
| CN104405613A (en) * | 2014-11-28 | 2015-03-11 | 广东工业大学 | Laser-induced micro pump |
| RU2654547C2 (en) * | 2016-03-18 | 2018-05-21 | Шкилев В.Д. | Device for identification mark manufacturing |
| CN111333019A (en) * | 2018-12-19 | 2020-06-26 | 湖南早晨纳米机器人有限公司 | Nanometer robot and nanometer robot motion control system |
| JP2020138152A (en) * | 2019-02-28 | 2020-09-03 | キヤノン株式会社 | Ultra fine bubble generator |
| JP7277179B2 (en) | 2019-02-28 | 2023-05-18 | キヤノン株式会社 | Ultra fine bubble generator |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Khan et al. | Micro-nano scale surface coating for nucleate boiling heat transfer: A critical review | |
| Farokhnia et al. | Rational micro/nanostructuring for thin-film evaporation | |
| Chen et al. | Optofluidic guiding, valving, switching and mixing based on plasmonic heating in a random gold nanoisland substrate | |
| US20030021694A1 (en) | Nano and micro metric dimensional systems and methods for nanopump based technology | |
| Jiang et al. | Closed-loop electroosmotic microchannel cooling system for VLSI circuits | |
| EP2179279B1 (en) | Device for controlling fluid motion into micro/nanochannels by means of surface acoustic waves | |
| CN112371065B (en) | Method for generating magnetic core-shell microcapsules based on surface acoustic wave microfluidic device | |
| Jia et al. | PDMS microchannel fabrication technique based on microwire-molding | |
| US20100091459A1 (en) | Streaming-based micro/mini channel electronic cooling techniques | |
| US20040013536A1 (en) | Micro-fluidic pump | |
| CN104321652A (en) | High-speed on-demand droplet generation and single-cell encapsulation driven by induced cavitation | |
| CN102644049A (en) | A microfluidic actuation method based on the wettability of TiO2 nanofilms | |
| WO2011050285A1 (en) | Thermally driven knudsen pump | |
| Heng et al. | Surface roughness analysis and improvement of micro-fluidic channel with excimer laser | |
| CN107497507A (en) | A kind of microfluidic channel structure and preparation method thereof | |
| Saure et al. | Hybrid aeromaterials for enhanced and rapid volumetric photothermal response | |
| Yang et al. | Design and batch fabrication of anisotropic microparticles toward small-scale robots using microfluidics: recent advances | |
| Hirama et al. | Surface modification of a glass microchannel for the formation of multiple emulsion droplets | |
| Saxena et al. | Fabrication of microfilters using excimer laser micromachining and testing of pressure drop | |
| Choe et al. | Valveless micropump driven by acoustic streaming | |
| CN112099149B (en) | Microflow switch based on photophoresis effect | |
| CN104675808B (en) | Optical fiber microfluidic driving device and driving method | |
| Christoforidis et al. | Bubble removal with the use of a vacuum pressure generated by a converging-diverging nozzle | |
| Pinapati et al. | Microbubble generation and large-scale assembly of colloidal particles by graphene oxide microstructures | |
| Prabhakar et al. | Amalgamation of diverse hydrodynamic effects with novel triple-sided membrane valves for developing a microfluidic device for filterless and continuous water purification |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |