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US1081289A - Etching-machine. - Google Patents

Etching-machine. Download PDF

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Publication number
US1081289A
US1081289A US69968912A US1912699689A US1081289A US 1081289 A US1081289 A US 1081289A US 69968912 A US69968912 A US 69968912A US 1912699689 A US1912699689 A US 1912699689A US 1081289 A US1081289 A US 1081289A
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United States
Prior art keywords
blast
nozzle
etching
etched
air
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Expired - Lifetime
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US69968912A
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Eugen Albert
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Individual
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles

Definitions

  • his invention relates to improvements etching metallic git has reference especially to the means for carrying into practice my process for etching with a concentrated air blast either with, or without, a resistance directly opposed to the air blast for the purpose of creating a violently ebullient layer of acid contiguous to the metallic surface.
  • Figure l is a perspective view showing in section the device for bringing an. air blast near the surface of the plate to be'etched;
  • Fig. 2 shows the application of the air blast of a roller;
  • Fig. 3 is a perspective view showing the general construction of a complete machine for etching plates, in an etching bath.
  • a is a tray, or bath, which is filled up to e with acid;
  • 0 is a tube for supplying compressed air to the saddle shaped casing or double nozzle 6, provided with the two converging outlet branches h and 2' opening above the surface of the late 03 to be etched, but below the level of the surface e of the acid.
  • the release of the compressed air from it and 6 produces a violent whirling, or ebullient, zone f betweenthe branches it and a and there the etching of the plate takes place with increased effect owing to the continued movement of the acid.
  • g is an exhaust tube through which it may be arranged that the injurious acid vapors exhaustinto the open air without the use of any fan, or like device, but merely owing to the pressure of the air blast within the saddle-shaped nozzle 6.
  • Fig. 2 shows the device applied to etching a roller, the bath being indicated by a, .the surface of the acid by e and the air tube by c.
  • the surface at to be etched in this case forms the resistance to the air blast from the blast nozzle 6 ormation of a concentrated whirling zone f between the outlet 11' and the roller (2 along the wholelength of the latter.
  • roller is rotated in order to present new surfaces to the whirling zone, and it will readily be seen that a similar zone may be formed with asecond nozzle on of the roller if desired.
  • the trough or bath a, and the blast nozzle Z) are as prmiously dothe plate; simplythe air isproduced by the fan j operated by the motor ic, and both of these together with the air pipe 0, and the double nozzle 6, are supported by a platform 72 which is movable on the flanged wheels 0, 0, so as to enable the said nozzle to be moved from end to end of the trough a.
  • the wheels 0, o are arranged to run on the rails q and the movement backward and forward is efthe end rail 2 located between adjacent ends of the rails g gand connecting said rod to by introducing an active resistance to the blast therefroma still greater effect is produced; owing to the greater concentration of the action.
  • etching machine the combination of a two assage blast nozzle having downwardly directed converging out-lets just beneath the surface of a considerable bulk of etching fluid, means for bringing compressed air to the said nozzle, an exhaust pipe connected to the space between the outlet branches of the blast device, and means for causing longitudinal movement of the surface being etched and the blast nozzles in regard to each other, substantially as and for the purpose set forth.
  • a blast nozzle having downwardly directed converging outlet branches the whole width of the nozzle, with a fan an air pipe connected thereto, an etching trough arranged at a level to hold the object to be etched adjacent to the blast nozzle outlets, and means for causing reciprocation of the said blast outlets in relation to the said trough, substantially as described herein.
  • a blast nozzle having downwardly directed converging outlet branches the whole width of the nozzle, with a fan an air pipe connected thereto, an etching trough arranged at a level to hold the object to be etched adjacent to the blast nozzle outlets, a platform carrying the fan, a motor operating same and the blast nozzle, wheels to the said platform and rails for carrying same, and means for causing reciprocation of the said platform, substantially as described.
  • a blast nozzle having downwardly directed converging outlet branches the whole width of the casing, with a fan and air pipe connected thereto, an etching trough arrangedat a level to hold the object to be etched adjacent to the blast nozzle outlets, a platform carrying the fan, a motor operating the fan and theblast nozzle, wheels to the said platform and rails for carrying same, a rod anchored to the rail frame at one end, an endless chain an sprocket wheels mounted on the said platform and operated by gearing from the fan motor spindle, and an attachment connecting the free end of the anchored rod to a point on the endless chain, all substantially as and for the purpose set forth.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • ing And Chemical Polishing (AREA)

Description

E. ALBERT. ETCHING MACHINE. APPLIUATION FILED MAY 25, 1012.
0Q 11 9 1 6 1 C 6 D d e t n 1% a P 2 SHEBTSQSEBET 1.
[raw/2201' 2559612 97556)- M hwww. b. p 4,. ,1, WM/J/ E. ALBERT. ETCHING MACHINE. APPLIOATION FILED MAY 25, 1912,
2 SHEETS-SHEET 2.
Patented Dec. 16, 1913.-
in etching machines for to the etching vided in the case of Fi AT NIr F inn.
enema nannies,
on name's, Ghanaian. nrcnrnctmnonritn.
Specification of teens Patent. Pat nt m as, was, Application filed ma at, 1am. serial-no. eeaaaa placement of the particles of acid against the surface of the metallic plate, causing increased rapidity quick removal of OXlClS from the ing etched. in
To all whom, it may concern."
Be it known that l, linens ALBERT, a sub ject of the Emperor of Germany, residing at Kaufingerstrasse 11, Munich, Germany, have invented certain new and useful llmprovements in Etching-Machines, of which the following is a specification.
his invention relates to improvements etching metallic git has reference especially to the means for carrying into practice my process for etching with a concentrated air blast either with, or without, a resistance directly opposed to the air blast for the purpose of creating a violently ebullient layer of acid contiguous to the metallic surface.
he accompanying drawings illustrate the apparatus employed.
Figure l is a perspective view showing in section the device for bringing an. air blast near the surface of the plate to be'etched; Fig. 2 shows the application of the air blast of a roller; and Fig. 3 is a perspective view showing the general construction of a complete machine for etching plates, in an etching bath.
Referring first to Fig. 1, a is a tray, or bath, which is filled up to e with acid; 0 is a tube for supplying compressed air to the saddle shaped casing or double nozzle 6, provided with the two converging outlet branches h and 2' opening above the surface of the late 03 to be etched, but below the level of the surface e of the acid. The release of the compressed air from it and 6 produces a violent whirling, or ebullient, zone f betweenthe branches it and a and there the etching of the plate takes place with increased effect owing to the continued movement of the acid.
g is an exhaust tube through which it may be arranged that the injurious acid vapors exhaustinto the open air without the use of any fan, or like device, but merely owing to the pressure of the air blast within the saddle-shaped nozzle 6.
It should be observed that an increased h a is given a reciprocating movement in relation to the double nozzle 6, or said nozzle is moved and the bath held stationary as in Fig. 3. When only one nozzle is employed a furrow is produced which forces the particles of liquid under goods with acid the resistance in this deformation of the surface of the liquid to produce the furrow.
Fig. 2 shows the device applied to etching a roller, the bath being indicated by a, .the surface of the acid by e and the air tube by c. The surface at to be etched in this case forms the resistance to the air blast from the blast nozzle 6 ormation of a concentrated whirling zone f between the outlet 11' and the roller (2 along the wholelength of the latter. roller is rotated in order to present new surfaces to the whirling zone, and it will readily be seen that a similar zone may be formed with asecond nozzle on of the roller if desired.
Referring to Fig. 3, the trough or bath a, and the blast nozzle Z) are as prmiously dothe plate; simplythe air isproduced by the fan j operated by the motor ic, and both of these together with the air pipe 0, and the double nozzle 6, are supported by a platform 72 which is movable on the flanged wheels 0, 0, so as to enable the said nozzle to be moved from end to end of the trough a. The wheels 0, o are arranged to run on the rails q and the movement backward and forward is efthe end rail 2 located between adjacent ends of the rails g gand connecting said rod to by introducing an active resistance to the blast therefroma still greater effect is produced; owing to the greater concentration of the action. Such resistance is pro- 1 by a second air blast namely from k whlch, meeting the first blast beneath the surface of the acid, gives rise to a much increased rapidity of disconnected travels around the wheels n. The whole surface of any plate in the trough a is thus successively covered by the whirling zone within the double nozzle 6, and equally of etching owing to the and causes the fected by pivotally anchoring a rod m to surface and the blast nozzle in regard to but relatively opposite location to the first face being etched and the blast nozzle in regard to each other, substantially as described.
5. In an etching machine, the combination of a two assage blast nozzle having downwardly directed converging out-lets just beneath the surface of a considerable bulk of etching fluid, means for bringing compressed air to the said nozzle, an exhaust pipe connected to the space between the outlet branches of the blast device, and means for causing longitudinal movement of the surface being etched and the blast nozzles in regard to each other, substantially as and for the purpose set forth.
6. In an etching machine, the combination of a blast nozzle having downwardly directed converging outlet branches the whole width of the nozzle, with a fan an air pipe connected thereto, an etching trough arranged at a level to hold the object to be etched adjacent to the blast nozzle outlets, and means for causing reciprocation of the said blast outlets in relation to the said trough, substantially as described herein.
7. In an etching machine, the combination, of a blast nozzle having downwardly directed converging outlet branches the whole width of the nozzle, with a fan an air pipe connected thereto, an etching trough arranged at a level to hold the object to be etched adjacent to the blast nozzle outlets, a platform carrying the fan, a motor operating same and the blast nozzle, wheels to the said platform and rails for carrying same, and means for causing reciprocation of the said platform, substantially as described.
8. In an etching machine, the combination, of a blast nozzle having downwardly directed converging outlet branches the whole width of the casing, with a fan and air pipe connected thereto, an etching trough arrangedat a level to hold the object to be etched adjacent to the blast nozzle outlets, a platform carrying the fan, a motor operating the fan and theblast nozzle, wheels to the said platform and rails for carrying same, a rod anchored to the rail frame at one end, an endless chain an sprocket wheels mounted on the said platform and operated by gearing from the fan motor spindle, and an attachment connecting the free end of the anchored rod to a point on the endless chain, all substantially as and for the purpose set forth.
In testimony whereof I aflix my signature examination some further etched, but if on f the etching is required for certain parts 0 surface, it can readily be applied there. An advantage of this arrangement is that only the ends of the nozzles need be of acid proof material, and as they are not sub ect to mechanical strain, their construction is easily accomplished. It should be noted that a somewhat stronger resistance to the air blast may be obtained by making its passage from the single outlet 2' intermittent the acid flowing back toward the nozzle ateach cessation of the blast.
What I claim as my invention and desire to secure by Letters Patent is 1. The combination in an etching machine, of a blast nozzle having an outlet just beneath the surface of a considerable bulk of acid in a tray or tub, means for holding the particular part of the object which is to be etched adjacent to but below the level of the blast nozzle, and means for causing longitudinal movement of the said each other.
2. The combination in an etching machine, of a blast nozzle having an outlet just beneath the surface of a considerable bulk of etching fluid in a tray or tub, means for holding the particular part of the object which is being etched in such a position below the surface of the fluid that it interposes a resistance to the current of fiui driven by the blast, and means for causing longitudinal movement of the surface being etched and the blast nozzle in regard to each other, substantially as and for the purpose set forth.
3. The combination in an etching machine, of a blast nozzle having an outlet just beneath the surface of a considerable bulk of etchin fluid in a tray or tub, means for holdin t 1e particular part of the object be= ing etc ied adjacent to but below the surface of the fluid, a second last nozzle in similar blast nozzle in relation to the object to be etched, which projects a second air blast in opposition to the first, for the purpose of creating a resistance thereto in the fluid, and means for causing longitudinal movement of the surface being etched and the blast nozzles in regard to each other, substantially as described herein.
4:. The combination in an etching machine, of a blast nozzle having an outlet just beneath the surface of a considerable bulk of etching fluid in a tray or tub, means for holding the particular part of the object in presence of two witnesses.
being etched adjacent to, but below the sur- EUGEN ALBERT. face of the fluid, means for supplying a \Vitnesses:
blast of air to said nozzle, and means for MATHILDE It. HELD,
causing longitudinal movement of the sur- A. V. W. COTTER.
US69968912A 1912-05-25 1912-05-25 Etching-machine. Expired - Lifetime US1081289A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2828192A (en) * 1954-10-04 1958-03-25 Turco Products Inc Method for etching metals
US2895814A (en) * 1955-02-04 1959-07-21 Turko Products Inc Apparatus and method for removing metal from the surface of a metal object
US3136671A (en) * 1960-05-02 1964-06-09 Tasope Ltd Method of etching a printing plate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2828192A (en) * 1954-10-04 1958-03-25 Turco Products Inc Method for etching metals
US2895814A (en) * 1955-02-04 1959-07-21 Turko Products Inc Apparatus and method for removing metal from the surface of a metal object
US3136671A (en) * 1960-05-02 1964-06-09 Tasope Ltd Method of etching a printing plate

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