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UA115118C2 - Парофазне осадження керамічних покриттів - Google Patents

Парофазне осадження керамічних покриттів

Info

Publication number
UA115118C2
UA115118C2 UAA201210995A UAA201210995A UA115118C2 UA 115118 C2 UA115118 C2 UA 115118C2 UA A201210995 A UAA201210995 A UA A201210995A UA A201210995 A UAA201210995 A UA A201210995A UA 115118 C2 UA115118 C2 UA 115118C2
Authority
UA
Ukraine
Prior art keywords
melt
coating
vapor
phase deposition
substrate
Prior art date
Application number
UAA201210995A
Other languages
English (en)
Inventor
Ігор Володимирович Білоусов
Юрій Григорович Кононенко
Анатолій Іванович Кузмічов
Джон Ф. Маллулі
Original Assignee
Юнайтед Текнолоджіз Корпорейшн
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Юнайтед Текнолоджіз Корпорейшн filed Critical Юнайтед Текнолоджіз Корпорейшн
Publication of UA115118C2 publication Critical patent/UA115118C2/uk

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0026—Activation or excitation of reactive gases outside the coating chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)

Abstract

Винахід належить до галузі металургії, а саме до способу та пристрою для нанесення керамічного покриття на підкладку. Пристрій для цього включає камеру осадження, тигель, що утримує розплав матеріалу покриття, який випаровується, при цьому передбачено засіб обертання розплаву під час осадження та контролювання процесу осадження покриття. Спосіб включає застосування цього пристрою та контролювання засобу обертання розплаву для спрямування шлаку, який спливає на поверхню розплаву, до периферії розплаву для мінімізації утворення бризок та крапель розплавленого матеріалу та потрапляння їх на підкладку. Винахід забезпечує підвищення якості покриття.
UAA201210995A 2011-11-23 2012-09-20 Парофазне осадження керамічних покриттів UA115118C2 (uk)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/303,232 US20130129937A1 (en) 2011-11-23 2011-11-23 Vapor Deposition of Ceramic Coatings

Publications (1)

Publication Number Publication Date
UA115118C2 true UA115118C2 (uk) 2017-09-25

Family

ID=47263124

Family Applications (1)

Application Number Title Priority Date Filing Date
UAA201210995A UA115118C2 (uk) 2011-11-23 2012-09-20 Парофазне осадження керамічних покриттів

Country Status (4)

Country Link
US (1) US20130129937A1 (uk)
EP (1) EP2597174B1 (uk)
SG (1) SG190507A1 (uk)
UA (1) UA115118C2 (uk)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160068957A1 (en) * 2013-04-12 2016-03-10 Haydn N.G. Wadley Corrosion resistant metal and metal alloy coatings containing supersaturated concentrations of corrosion inhibiting elements and methods and systems for making the same
WO2019096391A1 (en) * 2017-11-16 2019-05-23 Applied Materials, Inc. Method and apparatus for vapor depositing an insulation layer of metal oxide on a substrate
EP4473628A1 (en) * 2022-02-02 2024-12-11 Harsh Vardhan Sethi An apparatus and a method for providing nano coating on a surface
CN118109786B (zh) * 2024-04-18 2024-08-16 长沙市熔材科技有限公司 一种氧解离辅助物理气相沉积制备热障涂层的装置与方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1488784A (en) * 1976-02-16 1977-10-12 Syaskin J Furnace for melting highly reactive metals
JPS59200758A (ja) * 1983-04-26 1984-11-14 Konishiroku Photo Ind Co Ltd 蒸着装置
JPS6092470A (ja) * 1983-10-26 1985-05-24 Ulvac Corp 斜め方向に指向性を有する蒸発源装置
JPS6115967A (ja) * 1984-06-29 1986-01-24 Sumitomo Electric Ind Ltd 表面処理方法
JPS62180068A (ja) * 1986-02-03 1987-08-07 Ishikawajima Harima Heavy Ind Co Ltd 電子ビ−ム加熱・蒸発装置
US5108574A (en) * 1991-01-29 1992-04-28 The Boc Group, Inc. Cylindrical magnetron shield structure
JPH06108235A (ja) * 1992-09-30 1994-04-19 Kao Corp 磁気記録媒体の製造装置
JP3458585B2 (ja) * 1996-02-26 2003-10-20 松下電工株式会社 薄膜形成方法
US5844192A (en) * 1996-05-09 1998-12-01 United Technologies Corporation Thermal spray coating method and apparatus
EP0851720B1 (de) * 1996-12-23 1999-10-06 Sulzer Metco AG Indirektes Plasmatron
US7509734B2 (en) * 2003-03-03 2009-03-31 United Technologies Corporation Repairing turbine element

Also Published As

Publication number Publication date
SG190507A1 (en) 2013-06-28
US20130129937A1 (en) 2013-05-23
EP2597174A1 (en) 2013-05-29
EP2597174B1 (en) 2017-05-10

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