TWM599377U - Improved volatile organic waste gas treatment system with dual wheels - Google Patents

Abstract

This creation is an improvement of a volatile organic waste gas treatment system with double wheels, mainly through a continuous combustion incinerator (TO), a first heat exchanger, a second heat exchanger, a third heat exchanger, The combined design of a first adsorption runner, a second adsorption runner and a chimney, and through the first heat exchanger, the second heat exchanger and the third heat exchanger are installed in the direct-fired incinerator ( In the furnace of TO), the high temperature generated by the furnace head of the direct-fired incinerator (TO) can be used for heat exchange, so that the second heat exchanger and the third heat exchanger can respectively provide high-temperature hot gas to The use of the desorption zone of the first adsorption runner and the desorption zone of the second adsorption runner enables high-temperature desorption performance, and the overall processing efficiency is increased from 95% to over 97%.

Description

Improved volatile organic waste gas treatment system with dual wheels

This creation is related to an improvement of a volatile organic waste gas treatment system with dual wheels, especially one that can improve the efficiency of organic waste gas treatment and is suitable for waste gas treatment in factories in the semiconductor industry, optoelectronic industry or chemical-related industries.

At present, volatile organic gas (VOC) is generated in the manufacturing process of semiconductor industry or optoelectronic industry. Therefore, processing equipment for processing volatile organic gas (VOC) will be installed in each plant area to avoid volatile organic gas (VOC). ) Directly discharged into the air and cause air pollution.

However, in recent years, both the central government and local governments have attached great importance to air pollution. Therefore, air quality standards for suspended particulates (PM ₁₀ ) and fine suspended particulates (PM _2.5 ) have been set in the emission standards of chimneys. And based on the results of its domestic health impact research, with health impact as the priority consideration, the 24-hour value of "fine suspended particulates (PM _2.5 )" is set at 35μg/m ³ and the annual average value is set at 15μg/m ³ . In addition, the Environmental Protection Agency preliminarily plans to achieve the national average concentration of fine suspended particulates of 15μg/m ³ in 109 (2020). At the same time, it will review its fine suspended particulates (PM _2.5 ) air quality standards in accordance with the development of international control trends. , And to achieve the air quality guidelines proposed by the WHO (the 24-hour value is set at 25μg/m ³ and the annual average is set at 10μg/m ³ ) as the air quality improvement target.

Therefore, in view of the above-mentioned shortcomings, the creator hopes to propose a The improvement of the volatile organic waste gas treatment system with dual-rotor for the exhaust gas treatment efficiency of the machine makes it easy for users to operate and assemble. It is researched and designed with great concentration to provide user convenience. This is what the creator wants to develop Creative motivation.

The main purpose of this creation is to provide an improved volatile organic waste gas treatment system with dual wheels, mainly through a continuous combustion incinerator (TO), a first heat exchanger, a second heat exchanger, and a second heat exchanger. The combination design of three heat exchangers, a first adsorption runner, a second adsorption runner and a chimney, and through the first heat exchanger, the second heat exchanger and the third heat exchanger are arranged in the straight In the hearth of a combustion incinerator (TO), the high temperature generated by the furnace head of the direct combustion incinerator (TO) can be used for heat exchange, so that the second heat exchanger and the third heat exchanger can be Provide high-temperature hot air to the desorption zone of the first adsorption runner and the desorption zone of the second adsorption runner, so that it has high temperature desorption performance, and the overall processing efficiency is increased from 95% to 97%. The above further increases the overall practicality.

Another purpose of this creation is to provide an improved volatile organic waste gas treatment system with double wheels, and through the direct-fired incinerator (TO) is provided with an inlet and an outlet, wherein the inlet is located on the burner The inlet is connected to the other end of the first cold-side pipeline of the first heat exchanger, and the outlet is located at the furnace, and the outlet is connected to the chimney, thereby making the organic waste gas It can enter the furnace head through the inlet for combustion, and then allow the combusted gas to pass through the furnace and be discharged from the outlet to the chimney for discharge, so as to save energy and increase the overall usability .

In order to have a better understanding of the features, characteristics and technical content of this creation, please refer to the detailed description and drawings of this creation below, but the attached drawings are only for reference and explanation Use, not to limit this creation.

10: Direct-fired incinerator (TO)

101: burner

102: Hearth

11: entrance

12: Exit

20: The first heat exchanger

21: The first cold side pipeline

22: The first hot side pipeline

23: The first cold side delivery pipeline

30: second heat exchanger

31: The second cold side pipeline

32: The second hot side pipeline

40: third heat exchanger

41: The third cold side pipeline

42: The third hot side pipeline

60: The first adsorption wheel

601: Adsorption Zone

602: Cooling Zone

603: Desorption Zone

61: Exhaust gas intake pipe

611: Exhaust gas connection pipeline

6111: Exhaust gas connection control valve

62: The first clean gas discharge pipeline

621: The first clean air connection pipeline

6211: The first clean air connection control valve

63: The first cooling air intake line

64: The first cooling gas delivery pipeline

65: The first hot gas delivery pipeline

66: The first desorption concentrated gas pipeline

661: Fan

70: The second adsorption wheel

701: Adsorption Zone

702: Cooling Zone

703: Desorption Zone

71: The second clean gas discharge pipeline

711: Fan

72: The second cooling air intake line

73: The second cooling gas delivery pipeline

74: The second hot gas delivery pipeline

75: The second desorption concentrated gas pipeline

751: Fan

80: Chimney

Figure 1 is a schematic diagram of the main system architecture of the implementation architecture of this creation.

Figure 2 is a schematic diagram of a system architecture with an exhaust gas communication pipeline and a first clean gas communication pipeline for the implementation architecture of this creation.

Figure 3 is a schematic diagram of the system architecture of the creative implementation architecture.

Please refer to Figures 1 to 3, which are schematic diagrams of this creative embodiment. The best implementation of the improvement of the volatile organic waste gas treatment system with double wheels in this creation is to apply to the waste gas treatment of the factories in the semiconductor industry, optoelectronic industry or chemical-related industries, and through the design of this creation, the double wheels With high temperature desorption performance, the overall processing performance has been increased from 95% to over 97%.

The implementation framework of this creation has a dual-wheel volatile organic waste gas treatment system improvement, mainly through a direct combustion incinerator (TO) 10, a first heat exchanger 20, a second heat exchanger 30, and a The combined design of the third heat exchanger 40, a first adsorption runner 60, a second adsorption runner 70 and a chimney 80 (as shown in Figures 1 to 3), wherein the first heat exchanger 20 A first cold side pipeline 21 and a first hot side pipeline 22 are provided. The second heat exchanger 30 is provided with a second cold side pipeline 31 and a second hot side pipeline 32. The third heat exchange The device 40 is provided with a third cold side pipeline 41 and a third hot side pipeline 42. In addition, the direct-fired incinerator (TO) 10 is provided with a furnace head 101 and a furnace 102, the furnace head 101 is in communication with the furnace 102, and the first heat exchanger 20, the second heat exchanger 30 and Third heat exchange The device 40 is respectively arranged in the hearth 102 of the direct-fired incinerator (TO) 10, and the direct-fired incinerator (TO) 10 is provided with an inlet 11 and an outlet 12, and the inlet 11 is arranged in the furnace Head 101, and the inlet 11 is connected to the other end of the first cold-side pipe 21 of the first heat exchanger 20 (as shown in Figures 1 to 3), and the outlet 12 is provided At the furnace 102, the outlet 12 is connected to the chimney 80, so that the organic waste gas can enter the furnace head 101 through the inlet 11 for combustion, and then the combusted gas can pass through the The furnace 102 is discharged from the outlet 12 to the chimney 80 for discharge, so as to save energy.

The burner head 101 of the above-mentioned direct-fired incinerator (TO) 10 is capable of transporting the burned high-temperature gas to one side of the third hot side pipe 42 of the third heat exchanger 40 for heat exchange. The other side of the third hot side pipe 42 of the third heat exchanger 40 transports the incineration high temperature gas to one side of the second hot side pipe 32 of the second heat exchanger 30. Perform heat exchange, and then the incineration high-temperature gas is transported to the first hot-side pipe of the first heat exchanger 20 from the other side of the second hot-side pipe 32 of the second heat exchanger 30 22 for heat exchange, and finally from the other side of the first hot side pipeline 22 of the first heat exchanger 20 to the outlet 12 of the furnace 102 (as shown in Figures 1 to 3 ), and then transported from the outlet 12 of the furnace 102 to the chimney 80 for discharge through the chimney 80.

In addition, the first adsorption runner 60 of this creation is provided with an adsorption zone 601, a cooling zone 602 and a desorption zone 603. The first adsorption runner 60 is connected with an exhaust gas inlet pipe 61 and a first clean gas discharge pipe. Path 62, a first cooling gas inlet pipe 63, a first cooling gas delivery pipe 64, a first hot gas delivery pipe 65, and a first desorption concentrated gas pipe 6 6 (as shown in Figures 1 to 3), the second adsorption runner 70 is provided with an adsorption zone 701, a cooling zone 702 and a desorption zone 703, and the second adsorption runner 70 is connected with a second The clean gas discharge pipeline 71, a second cooling gas inlet pipeline 72, a second cooling gas delivery pipeline 73, a second hot gas delivery pipeline 74 and a second desorption concentrated gas pipeline 75. The first adsorption runner 60 and the second adsorption runner 70 are respectively a zeolite concentration runner or a concentration runner of other materials.

One end of the exhaust gas inlet pipe 61 is connected to one side of the adsorption zone 601 of the first adsorption rotor 60, so that the exhaust gas inlet pipe 61 can transport organic waste gas to the first adsorption rotor 60 One side of the adsorption zone 601, and one end of the first clean gas discharge pipeline 62 is connected to the other side of the adsorption zone 601 of the first adsorption rotor 60, and one end of the first clean gas discharge pipeline 62 Is connected to one side of the adsorption zone 701 of the second adsorption runner 70, so that the organic waste gas can adsorb organic matter through the adsorption zone 601 of the first adsorption runner 60 and then pass through the first clean gas discharge pipeline 62 to transport to the adsorption zone 701 of the second adsorption rotor 70. In addition, the other side of the adsorption zone 701 of the second adsorption rotor 70 is connected with the second clean gas discharge pipeline 71 to connect to the chimney 80 through the other end of the second clean gas discharge pipeline 71, And the second clean gas discharge pipeline 71 is provided with a fan 711 (as shown in Figure 3), which enables the blower 711 to push and pull the adsorbed gas in the second clean gas discharge pipeline 71 to The chimney 80 can be discharged.

In addition, one side of the cooling zone 602 of the first adsorption runner 60 is connected to the first cooling gas inlet pipe 63 for air to enter the cooling zone 602 of the first adsorption runner 60 for cooling. The other side of the cooling zone 602 of the first adsorption runner 60 is connected to one end of the first cooling gas delivery pipe 64, and the other side of the first cooling gas delivery pipe 64 The end is connected to one end of the third cold-side pipeline 41 of the third heat exchanger 40 to transport the gas entering the cooling zone 602 of the first adsorption rotor 60 to the third heat exchanger 40 Heat exchange (as shown in Figures 1 to 3). Furthermore, one end of the first hot gas conveying pipe 65 is connected to the other side of the desorption zone 603 of the first adsorption rotor 60, and the The other end of the first hot gas conveying pipe 65 is connected to the other end of the third cold side pipe 41 of the third heat exchanger 40, so as to allow the high temperature hot gas that undergoes heat exchange through the third heat exchanger 40 to pass through The first hot gas delivery pipeline 65 is delivered to the desorption zone 603 of the first adsorption rotor 60 for desorption use.

The cooling zone 602 of the first adsorption runner 60 is provided with two embodiments. The first implementation is that the first cooling air is connected to one side of the cooling zone 602 of the first adsorption runner 60. The air pipe 63 is for fresh air or outside air to enter (as shown in Figure 1), and the fresh air or outside air is used to provide the cooling zone 602 of the first adsorption rotor 60 for cooling. Another second embodiment is that the exhaust gas intake pipe 61 is provided with an exhaust gas communication pipe 611 (as shown in Figures 2 and 3), and the other end of the exhaust gas communication pipe 611 is connected to the first The cooling air intake pipe 63 is connected to allow the exhaust gas in the exhaust gas intake pipe 61 to be transported to the cooling zone 602 of the first adsorption runner 60 through the exhaust gas communication pipe 611 for cooling. The exhaust gas communication pipeline 611 is provided with an exhaust gas communication control valve 6111 to control the air volume of the exhaust gas communication pipeline 611.

In addition, one side of the cooling zone 702 of the second adsorption runner 70 is connected to the second cooling gas inlet pipe 72 for gas to enter the cooling zone 702 of the second adsorption runner 70 for cooling. The other side of the cooling zone 702 of the second adsorption runner 70 is connected to one end of the second cooling gas delivery pipe 73, and the other side of the second cooling gas delivery pipe 73 The end is connected to one end of the second cold-side pipeline 31 of the second heat exchanger 30, so as to transport the gas entering the cooling zone 702 of the second adsorption rotor 70 to the second heat exchanger 30. Heat exchange (as shown in Figures 1 to 3). Furthermore, one end of the second hot gas conveying pipe 74 is connected to the other side of the desorption zone 703 of the second adsorption rotor 70, and the The other end of the second hot gas conveying pipe 74 is connected to the other end of the second cold side pipe 31 of the second heat exchanger 30, so that the high temperature hot gas that undergoes heat exchange through the second heat exchanger 30 can be permeated The second hot gas delivery pipeline 74 is delivered to the desorption zone 703 of the second adsorption rotor 70 for desorption use.

The cooling zone 702 of the second adsorption runner 70 is provided with two embodiments. The first implementation is that the second cooling air is connected to one side of the cooling zone 702 of the second adsorption runner 70. The air pipe 72 is for fresh air or outside air to enter (as shown in Figure 1), and the fresh air or outside air is used to provide the cooling zone 702 of the second adsorption rotor 70 for cooling. Another second embodiment is that the first clean gas discharge pipeline 62 is provided with a first clean gas communication pipeline 621 (as shown in FIGS. 2 and 3), and the first clean gas communication pipeline 621 The other end is connected to the second cooling gas inlet pipe 72, so that the gas in the first clean gas discharge pipe 62 can be transported to the second adsorption converter through the first clean gas communication pipe 621 The cooling zone 702 of the wheel 70 is used for cooling, and the first clean air communication pipeline 621 is provided with a first clean air communication control valve 6211 to control the air volume of the first clean air communication pipeline 621.

In addition, one end of the first desorption concentrated gas pipeline 66 is connected to one side of the desorption zone 603 of the first adsorption rotor 60, and the other end of the first desorption concentrated gas pipeline 66 is connected to the One end of the first cold side pipeline 21 of a heat exchanger 20 is connected, and the first The other end of the first cold-side pipeline 21 of the heat exchanger 20 is connected to the inlet 11 of the direct-fired incinerator (TO) 10, wherein the other end of the first cold-side pipeline 21 of the first heat exchanger 20 is One end is provided with a first cold side conveying pipe 23 (as shown in Figures 1 to 3), and one end of the first cold side conveying pipe 23 is connected to the first cold side of the first heat exchanger 20 The other end of the pipeline 21 is connected, and the other end of the first cold-side conveying pipeline 23 is connected to the inlet 11 of the direct-fired incinerator (TO) 10, so as to be able to desorb the desorbed by high temperature The concentrated gas can be transported into the first cold-side pipe 21 of the first heat exchanger 20 through the first desorbed concentrated gas pipe 66, and through the first cold-side pipe of the first heat exchanger 20 21 to the furnace head 101 in the inlet 11 of the direct-fired incinerator (TO) 10 for high-temperature cracking to reduce volatile organic compounds. In addition, the first desorption concentrated gas pipeline 66 is provided with a fan 661 (as shown in Fig. 3) to push and pull the desorbed concentrated gas into the first cold side pipeline 21 of the first heat exchanger 20 Inside.

In addition, one end of the second desorption concentrated gas pipeline 75 is connected to one side of the desorption zone 703 of the second adsorption rotor 70, and the other end of the second desorption concentrated gas pipeline 75 is connected to the exhaust gas. The gas pipeline 61 is connected (as shown in Figures 1 to 3), so that the concentrated gas can enter the adsorption zone 601 of the first adsorption rotor 60 through the exhaust gas inlet pipeline 61 to perform Attach again. In addition, the second desorption concentrated gas pipeline 75 is provided with a fan 751 (as shown in FIG. 3) to push and pull the desorbed concentrated gas into the exhaust gas inlet pipeline 61. The desorption gas generated through the desorption zone 703 of the second adsorption rotor 70 can enter the adsorption zone 601 of the first adsorption rotor 60 for recycling, so that the treatment efficiency of organic waste gas can be improved.

Through the above detailed description, those who are familiar with this art can understand that this creation is indeed To achieve the aforementioned purpose, it has actually complied with the provisions of the Patent Law, so I filed a patent application.

However, the above are only the preferred embodiments of this creation, and should not be used to limit the scope of implementation of this creation; therefore, all simple equivalent changes and modifications made in accordance with the scope of the patent application for this creation and the content of the creation specification , Should still be within the scope of this creation patent.

10: Direct-fired incinerator (TO)

101: burner

102: Hearth

11: entrance

12: Exit

20: The first heat exchanger

21: The first cold side pipeline

22: The first hot side pipeline

23: The first cold side delivery pipeline

30: second heat exchanger

31: The second cold side pipeline

32: The second hot side pipeline

40: third heat exchanger

41: The third cold side pipeline

42: The third hot side pipeline

60: The first adsorption wheel

601: Adsorption Zone

602: Cooling Zone

603: Desorption Zone

61: Exhaust gas intake pipe

62: The first clean gas discharge pipeline

63: The first cooling air intake line

64: The first cooling gas delivery pipeline

65: The first hot gas delivery pipeline

66: The first desorption concentrated gas pipeline

70: The second adsorption wheel

701: Adsorption Zone

702: Cooling Zone

703: Desorption Zone

71: The second clean gas discharge pipeline

72: The second cooling air intake line

73: The second cooling gas delivery pipeline

74: The second hot gas delivery pipeline

75: The second desorption concentrated gas pipeline

80: Chimney

Claims (10)

An improved volatile organic waste gas treatment system with double runners includes: A direct-fired incinerator (TO), the direct-fired incinerator (TO) is equipped with a furnace head and a furnace, and the furnace head is in communication with the furnace; A first heat exchanger, the first heat exchanger is arranged in the hearth of the direct-fired incinerator (TO), and the first heat exchanger is provided with a first cold side pipe and a first hot side pipe road; A second heat exchanger, the second heat exchanger is arranged in the hearth of the direct-fired incinerator (TO), the second heat exchanger is provided with a second cold side pipe and a second hot side pipe road; A third heat exchanger, the third heat exchanger is arranged in the furnace of the direct-fired incinerator (TO), the third heat exchanger is provided with a third cold side pipe and a third hot side pipe road; A first adsorption runner, the first adsorption runner system is provided with an adsorption zone, a cooling zone and a desorption zone, the first adsorption runner system is connected with an exhaust gas intake pipeline, a first clean gas discharge pipeline, A first cooling gas inlet pipeline, a first cooling gas delivery pipeline, a first hot gas delivery pipeline, and a first desorption concentrated gas pipeline, one end of the exhaust gas inlet pipeline is connected to the first One side of the adsorption zone of an adsorption runner, one end of the first clean air discharge pipeline is connected to the other side of the adsorption zone of the first adsorption runner, and one end of the first cooling gas inlet pipeline Connected to one side of the cooling zone of the first adsorption runner, one end of the first cooling gas delivery pipeline is connected to the other side of the cooling zone of the first adsorption runner, the first cooling gas delivery pipeline The other end is connected to one end of the third cold side pipeline of the third heat exchanger, and one end of the first hot gas conveying pipeline is connected to the other side of the desorption zone of the first adsorption runner. The other end of the first hot gas conveying pipeline is connected to the other end of the third cold side pipeline of the third heat exchanger, and the first desorption concentrated gas One end of the body pipeline is connected to one side of the desorption zone of the first adsorption runner, and the other end of the first desorption concentrated gas pipeline is connected to the first cold side pipeline of the first heat exchanger One end connected A second adsorption runner. The second adsorption runner system is provided with an adsorption zone, a cooling zone and a desorption zone. The second adsorption runner system is connected with a second clean air discharge pipeline and a second cooling air intake Pipeline, a second cooling gas delivery pipeline, a second hot gas delivery pipeline, and a second desorption concentrated gas pipeline, one end of the first clean gas discharge pipeline is connected to the second adsorption runner On one side of the adsorption zone, one end of the second clean air discharge pipeline is connected to the other side of the adsorption zone of the second adsorption runner, and one end of the second cooling gas inlet pipeline is connected to the second adsorption One side of the cooling zone of the runner is connected, one end of the second cooling gas delivery pipeline is connected with the other side of the cooling zone of the second adsorption runner, and the other end of the second cooling gas delivery pipeline is connected with One end of the second cold side pipeline of the second heat exchanger is connected, one end of the second hot gas delivery pipeline is connected to the other side of the desorption zone of the second adsorption runner, the second hot gas delivery pipe The other end of the path is connected to the other end of the second cold side pipeline of the second heat exchanger, and one end of the second desorption concentrated gas pipeline is connected to one side of the desorption zone of the second adsorption runner Connected, the other end of the second desorption concentrated gas pipeline is connected with the exhaust gas inlet pipeline; and A chimney, and the other end of the second clean gas discharge pipeline is connected with the chimney. For example, the improvement of the volatile organic waste gas treatment system with dual wheels as described in item 1 of the scope of patent application, wherein the direct-fired incinerator (TO) is provided with an inlet and an outlet, and the inlet is set at the burner head, The inlet is connected to the other end of the first cold side pipeline of the first heat exchanger, the outlet is arranged at the furnace, and the outlet is connected to the chimney. The improvement of the volatile organic waste gas treatment system with dual wheels as described in item 1 of the scope of patent application, wherein the first cooling air intake pipe is further supplied with fresh air or external air. The improvement of the volatile organic waste gas treatment system with dual wheels as described in item 1 of the scope of patent application, wherein the second cooling air intake pipe is further supplied with fresh air or external air. The improvement of the volatile organic waste gas treatment system with dual wheels as described in the first item of the patent application, wherein the exhaust gas inlet pipeline is further provided with an exhaust gas communication pipeline, and the exhaust gas communication pipeline is connected to the first cooling system. The air intake pipeline is connected, and the exhaust gas communication pipeline system is further provided with an exhaust gas communication control valve to control the air volume of the exhaust gas communication pipeline. The improvement of the volatile organic waste gas treatment system with double runners as described in item 1 of the scope of patent application, wherein the first clean gas discharge pipeline is further provided with a first clean gas communication pipeline, the first clean gas communication The pipeline system is connected with the second cooling air inlet pipeline, and the first clean air communication pipeline system is further provided with a first net air communication control valve to control the air volume of the first net air communication pipeline. The improvement of the volatile organic waste gas treatment system with dual wheels as described in item 1 of the scope of patent application, wherein the first desorption concentrated gas pipeline is further provided with a fan. The improvement of the volatile organic waste gas treatment system with dual wheels as described in item 1 of the scope of patent application, wherein the second desorption concentrated gas pipeline is further provided with a fan. The improvement of the volatile organic waste gas treatment system with dual wheels as described in item 1 of the scope of patent application, wherein the second clean gas discharge pipeline is further provided with a fan. The improvement of the volatile organic waste gas treatment system with dual wheels as described in the second item of the scope of patent application, wherein the other end of the first cold side pipeline of the first heat exchanger is further provided with a first cold side conveying pipe One end of the first cold-side delivery pipeline is connected to the other end of the first cold-side pipeline of the first heat exchanger, and the other end of the first cold-side delivery pipeline is connected to the direct-fired Connection to the entrance of the incinerator (TO).

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