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TWM300368U - Mask supporter for leading and position - Google Patents

Mask supporter for leading and position

Info

Publication number
TWM300368U
TWM300368U TW95205174U TW95205174U TWM300368U TW M300368 U TWM300368 U TW M300368U TW 95205174 U TW95205174 U TW 95205174U TW 95205174 U TW95205174 U TW 95205174U TW M300368 U TWM300368 U TW M300368U
Authority
TW
Taiwan
Prior art keywords
leading
mask supporter
supporter
mask
Prior art date
Application number
TW95205174U
Other languages
English (en)
Inventor
Ming-Lung Chiu
Original Assignee
Gudeng Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gudeng Prec Ind Co Ltd filed Critical Gudeng Prec Ind Co Ltd
Priority to TW95205174U priority Critical patent/TWM300368U/zh
Priority to US11/521,310 priority patent/US8881906B2/en
Publication of TWM300368U publication Critical patent/TWM300368U/zh
Priority to US13/110,211 priority patent/US8353404B2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Buckles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW95205174U 2006-03-28 2006-03-28 Mask supporter for leading and position TWM300368U (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW95205174U TWM300368U (en) 2006-03-28 2006-03-28 Mask supporter for leading and position
US11/521,310 US8881906B2 (en) 2006-03-28 2006-09-15 Pod with guiding-locking piece therein
US13/110,211 US8353404B2 (en) 2006-03-28 2011-05-18 Pod with guiding-locking piece therein

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95205174U TWM300368U (en) 2006-03-28 2006-03-28 Mask supporter for leading and position

Publications (1)

Publication Number Publication Date
TWM300368U true TWM300368U (en) 2006-11-01

Family

ID=38091555

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95205174U TWM300368U (en) 2006-03-28 2006-03-28 Mask supporter for leading and position

Country Status (2)

Country Link
US (2) US8881906B2 (zh)
TW (1) TWM300368U (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4789566B2 (ja) * 2005-09-30 2011-10-12 ミライアル株式会社 薄板保持容器及び薄板保持容器用処理装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2246470A (en) * 1937-05-26 1941-06-17 Allis Chalmers Mfg Co Receptacle closure
JP3200776B2 (ja) * 1992-08-06 2001-08-20 大日本印刷株式会社 基板保持用ケース
CA2166362A1 (en) * 1995-01-23 1996-07-24 Karl Yetter Device box with integral latching arrangement
US6354601B1 (en) * 1999-01-06 2002-03-12 Fluoroware, Inc. Seal for wafer containers
WO2004032208A1 (en) * 2002-10-01 2004-04-15 Microtome Precision, Inc. Reduction of electric-field-induced damage in field-sensitive articles
TWI224719B (en) * 2003-05-28 2004-12-01 Gudeng Prec Ind Co Ltd Reinforced structure device of mask frame
TWI247974B (en) * 2004-03-11 2006-01-21 Gudeng Prec Ind Co Ltd Optical mask positioning device
US7380668B2 (en) * 2004-10-07 2008-06-03 Fab Integrated Technology, Inc. Reticle carrier
US7293794B2 (en) * 2005-03-31 2007-11-13 Tk Holdings Inc. Cover attachment
US7400383B2 (en) * 2005-04-04 2008-07-15 Entegris, Inc. Environmental control in a reticle SMIF pod
TWM295333U (en) * 2005-10-18 2006-08-01 Gudeng Prec Ind Co Ltd Positioning structure of mask box

Also Published As

Publication number Publication date
US20070227940A1 (en) 2007-10-04
US8353404B2 (en) 2013-01-15
US8881906B2 (en) 2014-11-11
US20110215029A1 (en) 2011-09-08

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Legal Events

Date Code Title Description
MK4K Expiration of patent term of a granted utility model