M278782 八、新型說明： 【新型所屬之技術領域】 本創作係闕於泵裝置。 【先前技術】 真空泵係吾人所熟知在其真空腔室中為無油者，因此其 在諸如半導體製造產業令所發現之該等潔淨環境中係有用 的。在此一環境下，如果在該真空腔室中存在潤滑材料， 則此材料可能回游進入該半導體作業腔室内，且如此可導 :製造中之產品的污染。此”乾式”真空栗通常係為多級排 量泵’其在該泵之每一級的真空腔室中使用若干相互嚙合 之轉，。該等轉子在每一腔室中可具有相同類型之輪廊: 或者該輪廓可從腔室到腔室逐一變化。 在一 Roots、螺旋式或Northey(”爪式”）類型器件中，每一 腔室典型地由該果之兩個分開加工之定子部件所界定，’使 該泵之若干轉子部件被定位於該等定子部件間所界定之腔 中。為了防止被泵送之作業氣體從該腔茂漏以及防止任何 周圍環境氣體進入該腔’有必要在該等定子部件之間提供 一密封。通常係以提供-⑽環密封來執行此_密封功能: =寻㈣典型地係由諸如威騰（VIT⑽)之氟化彈性材 構成。 乾式真空系經常被運用在各種應用場合，此等場合需要 其泵送大量腐蝕性流體，特別是函化氣體與溶劑。此二 料侵蝕0形環密封，結果係此等^ ^ ^ ^ ^ ^ 此文成過度塑性或非 书跪弱’這可嚴重地影響在該等定子部件之間所提供之密 97764.doc M278782 封的完整性。 對該密封侵蝕之強度決定於許多變數，其包括例如被系 运流體之性質、構成該〇形環密封之材料、及該泵之溫度。 有鑑於此’實很難預估替換該等密封之時間間隔以便保持 泵之完整性。很少對此等密封進行外部檢查。 當從半導體作業設備泵送諸如氟之活性氣體時，此等問 題尤其嚴重，其中氣體之組成因該半導體作業設備中之反 應而變化。此處，甚至是與通向該作業腔室之氣流有關的 精確知識亦不足以預測進入該泵之活性氣體的量或性質並 因此而得預估其有效密封壽命。推薦之維護通常包括經常 之密封洩漏檢查，但是此代價係昂貴的、不便於進行，因 此有時被忽略。 原則上，可使用其他類型之轉換器來嘗試測定該等密封 之完整剝蝕程度且因此測定該等密封之狀態。例如，可運 用分光鏡或化學技術來測定氣體組成。然而，此技術將需 要複雜之校準程式且實施起來代價昂貴。 而 【創作内容】 在至少其較佳實施例中， 題。 本創作尋求解決此等及其他問 本創作提供泵裝置，其 工作容積之密封腔室；一 j 該導管包含一流動阻抗，； 流動速率；以及用於確定一 其包含：-泵工作容積；一環繞該 【實施方式】 一用於供應流體至該腔室之導管， ，其用於限制到達該腔室之流體的 •一橫跨該流動阻抗之壓差的構件。 97764.doc M278782 現在將僅藉由實例並配合參考附圖以說明本創作之較佳 特徵如下文。 圖1係從一乾式泵之一排出級來圖解表示一定子部件工之 表面3。一第二定子部件（未顯示）之一表面與該定子部件1 之相應表面3相接觸，且一腔2在該等相鄰之定子部件之間 形成。當該泵被組合時，該腔2便形成以容納該泵之轉子部 件（未顯示），且通常被稱為一泵之工作容積。一乾式泵典型 地包含數個此型式之腔，每一腔2係經由—通孔4而與= 鄰腔相通。 在該腔2之外圍周邊提供 弟M278782 8. Description of the new model: [Technical field to which the new model belongs] This creation belongs to the pump device. [Prior art] Vacuum pumps are well known to us as oil-free in their vacuum chambers, so they are useful in clean environments such as those found in the semiconductor manufacturing industry ordinance. In this environment, if there is a lubricating material in the vacuum chamber, the material may migrate back into the semiconductor operation chamber, and this can lead to pollution of products in manufacturing. This "dry" vacuum pump is usually a multi-stage displacement pump 'which uses a number of intermeshing revolutions in the vacuum chamber of each stage of the pump. The rotors can have the same type of rim in each chamber: or the profile can be changed from chamber to chamber one by one. In a Roots, Spiral or Northey ("claw") type device, each cavity is typically defined by two separately processed stator components of the fruit, 'causing the rotor components of the pump to be positioned at the In the cavity defined between the stator components. In order to prevent the pumped working gas from leaking out of the cavity and to prevent any ambient gas from entering the cavity 'it is necessary to provide a seal between the stator components. This seal function is usually performed by providing a ⑽ ring seal: = Xun ㈣ typically consists of a fluorinated elastic material such as VIT 腾. Dry vacuum systems are often used in a variety of applications, which require them to pump large amounts of corrosive fluids, especially functional gases and solvents. These two materials erode the 0-ring seal, and the result is these ^ ^ ^ ^ ^ ^ This text is excessively plastic or weak, which can seriously affect the tightness provided between the stator parts. 97764.doc M278782 seals Integrity. The strength of the seal erosion depends on a number of variables, including, for example, the nature of the fluid being transported, the material making up the O-ring seal, and the temperature of the pump. In view of this, it is difficult to estimate the time interval for replacing these seals in order to maintain the integrity of the pump. External inspections of such seals are rarely performed. These problems are particularly serious when an active gas such as fluorine is pumped from a semiconductor work equipment, in which the composition of the gas changes due to the reaction in the semiconductor work equipment. Here, even the precise knowledge related to the air flow to the working chamber is not enough to predict the amount or nature of the active gas entering the pump and therefore to estimate its effective seal life. Recommended maintenance often includes frequent seal leak inspections, but this is expensive, inconvenient, and is sometimes overlooked. In principle, other types of converters can be used to try to determine the complete erosion of the seals and therefore the condition of the seals. For example, spectroscopic or chemical techniques can be used to determine gas composition. However, this technique will require complex calibration procedures and is expensive to implement. [Creation Content] In at least its preferred embodiments, the title. This work seeks to address these and other issues. This work provides a pump device with a sealed chamber of its working volume; a j the conduit contains a flow impedance; a flow rate; and a method for determining that it contains:-a pump working volume; a Around the [embodiment] a conduit for supplying a fluid to the chamber, a means for limiting the fluid reaching the chamber, a pressure difference across the flow impedance. 97764.doc M278782 The preferred features of this creation will now be described by way of example only and with reference to the accompanying drawings. Figure 1 illustrates a surface 3 of a certain subassembly from a discharge stage of a dry pump. One surface of a second stator component (not shown) is in contact with the corresponding surface 3 of the stator component 1, and a cavity 2 is formed between the adjacent stator components. When the pumps are combined, the cavity 2 is formed to accommodate a rotor component (not shown) of the pump, and is often referred to as the working volume of a pump. A dry pump typically contains several cavities of this type, each cavity 2 communicating with the -adjacent cavity via -through hole 4. Provided around the periphery of the cavity 2
磙岔封5。此〇形環密 封5較佳地由一諸如威騰（VIT〇N)之氟化彈性材料形成，I 在相鄰之定子部件之間提供_流體緊密封，藉此使得當使 用該泵時可防止經由該腔2而被料之作業氣體或清:氣 體從該腔2處洩漏，以及防止周圍環境之氣體進入該胪2。 ::而，如先前在上面所討論的，此等氣體可能為特別：有 侵蝕性且可能易於導致該泵之許多部分損壞。通常，在此 情況之下’該Ο形環密封5將為第一個失效之部件。考慮到 這些’在該第-〇形環密封5與該腔2之外圍間提供一類好磙 叉 封 5. The O-ring seal 5 is preferably formed of a fluorinated elastic material such as VITON. I provides a fluid tight seal between adjacent stator parts, thereby making it possible to use the pump when it is in use. Prevent the working gas or liquid that is fed through the cavity 2 from leaking from the cavity 2 and prevent the ambient gas from entering the plutonium 2. :: While, as previously discussed above, these gases may be special: aggressive and may easily cause damage to many parts of the pump. Usually, in this case, the O-ring seal 5 will be the first component to fail. Considering that these 'provide a kind of goodness between the -0 ring seal 5 and the periphery of the cavity 2
二第-〇形環密封5之第二〇形環密封6。該等〇形環密封L 猎由一形成於槽8、8a之間之淺槽道或槽7而被分隔開，該 曰、8a在圖2中顯示係用於在該等相鄰定子部件 位該等〇形環密封5、6。該槽道7允許少量流體（例如…者 如鼠之氣體）被捕獲於該兩個相鄰定子部件與該等〇形環穷 封5、6之間’該兩個相鄰之定子部件與該等⑽環密封^ 6 97764.doc M278782 共同界定該氣體之一密封腔室。該氣體從一氣體貯槽（如圖 3中表示之16)經由一導管9並通過通孔7a而進入該槽道7。 如圖3所示’該導管9包含一流動阻抗丨〇以及一單向闕 11。兩個壓力轉換器12、13被設置以便可與該流動阻抗1〇 之各別端部形成流體連通。 該流動阻抗10可由略微多孔之燒結材料所構成，其可抑 制氣體之流動以便使得該流動阻抗1〇在被放置於導管9中 時頗像似一水壩，使得僅有小量之氣體可自其經過。或者， 可藉由一精細計量閥，或是藉由設置一穿過固體材料之精 細毛細管孔而提供該流動阻抗丨〇。 該單向閥11可防止萬一當該泵中壓力升至超過氣體供應 壓力呀導致该供應貯槽之污染。再者，倘若氣體供應將暫 打中斷或因其他原因而受影響時，該閥丨丨將可用以最小化 位於該閥11下游處之該導管9中的壓力波動。 該等壓力轉換器12、13分別測量該流動阻抗1〇每一側上 之該導管9中的壓ΛΡ2#Ρ1，並將表示已測得麼力之信號傳 遞至一控制器14。 藉由氣體模組15可控制供至該導管9之氣體供應。在此配 置中，該氣體模組15係為-活動歧管，其可調節從該貯槽 供至該導管9中之氣體供應。該氣體模組丨 -信號至該控制器14,以便指示正供入該導管 -或多種特性，諸如流動速率及壓力。此一氣體模組可被 用以將氣體分配至該泵中之不同位置處，例如氣體將被用 作為一清洗氣體以供從該泵處沖洗雜質之位置。 97764.doc M278782 吏用和·加壓之氣體（通常為大約6 psi)將沿該導管9流過 。亥抓動阻抗1 〇並進入該槽道7，直到在該流動阻抗⑺下游處 之氣體與該流動阻抗10上游處之氣體間達到一壓力平衡時 為止。由於在該流動阻抗1G下游處之該槽道7中存在經加麼 =體’故在使㈣泵期間橫過該第二〇形環密封6將承受 -顯著之壓差，此乃因為當該泵處於正常穩定狀態操作條 件下之時’該腔2(該泵之工作容積）中之被泵送的氣體將低 於大氣壓力（通常為8〇〇 mbar)之故。在此狀態下，當該第二 形％在封6疋新的且無缺陷時，從該等壓力轉換器a、13 所輸出之信號將為大約相等且無波動。然而，如果該第二〇 形環密封6因被泵送之氣體而遭充分損壞以致該第二〇形環 在封6之完整性受到破壞之情況發生，則由於在該槽道7中 ，在一相對較高壓力之氣體且在該腔2中存在-相對較低 壓力之軋體’所以經加壓之氣體可能開始從該槽道7洩漏進 入》亥脸2而11亥洩漏係試圖平衡這些壓力。由於在該導管9 中存在》亥抓動阻^ ，藉由該壓力轉換器工2測量之壓力Μ 將開始下P奢如圖4中所不，同時藉由該壓力轉換器1 3測量 之堡力pi將保持處於該供應麼力。因此，該轉力mm 之差異將為氣體洩漏進入該腔2内之指示，且因此亦為該第 一 0形％在封6失效之指示。這可使得從該等壓力轉換器 12、13接收信號輸出之控制器，輸出一警報，例如經由一 顯示器，其將在如果該壓差超出—預定值用以指示該第二〇 形環密封6之失效。 因此乂上所述之裝置可提供位於一栗中之臨界密封狀 97764.doc M278782 態之-可靠指示。此—指示可在無須侵人干擾下延長維修 間隔及降低操作成本。由於此等臨界部件之磨損的預測可 被改進，因此降低了潛在危險洩漏之可能性。 總而言之，-導管將—氣流供應至_環繞著—泵之該工 作容積周圍之密封腔室。該導管包含—流動阻抗，其用於 限制到達該密封腔室之氣體的流動速率。從該流動阻抗之 每-側上所設置之壓力轉換器處所輸出之信號被用來偵測 從該密封之腔室進入該泵之工作容積内之氣體㈣漏，、藉 而指示該環繞工作容積之密封的狀態。 【圖式簡單說明】 圖1係一顯示一密封總成之一定子部件之前視圖； 圖2係圖1之該密封總成之一側視圖，· 圖3圖解展示用於監測該密封總成之完整性之裝置；以及 圖4為一顯示在該密封總成内之一氣體壓力隨時間 之圖表。 【主要元件符號說明】 1 定子部件 2 腔 3 定子之表面 4 通孔 5 第一 0形環密封 6 第二〇形環密封 7 槽道 7a 通孔 97764.doc 槽 槽 導管 流動阻抗 單向閥 壓力轉換器 壓力轉換器 控制器 氣體模組 貯槽 壓力 壓力 -12-Second o-ring seal 6 of second o-ring seal 5. The O-ring seals L are separated by a shallow channel or slot 7 formed between slots 8, 8a, which is shown in FIG. 2 for use in the adjacent stator components. Bit O-ring seals 5 and 6. The channel 7 allows a small amount of fluid (for example, a gas such as a rat) to be captured between the two adjacent stator components and the O-ring seals 5, 6 'the two adjacent stator components and the Iso-ring seal ^ 6 97764.doc M278782 Together define one of the gases to seal the chamber. The gas enters the channel 7 from a gas storage tank (shown as 16 in Fig. 3) through a conduit 9 and through a through hole 7a. As shown in FIG. 3 ', the catheter 9 includes a flow impedance and a unidirectional 阙 11. Two pressure transducers 12, 13 are provided so as to be in fluid communication with respective ends of the flow impedance 10. The flow resistance 10 can be made of a slightly porous sintered material, which can suppress the flow of gas so that the flow resistance 10 looks like a dam when placed in the conduit 9, so that only a small amount of gas can pass from it. through. Alternatively, the flow impedance can be provided by a fine metering valve, or by providing a fine capillary hole through a solid material. The check valve 11 prevents contamination of the supply tank in case the pressure in the pump rises above the gas supply pressure. Furthermore, if the gas supply is temporarily interrupted or affected for other reasons, the valve will be used to minimize pressure fluctuations in the conduit 9 located downstream of the valve 11. The pressure transducers 12 and 13 measure the pressure ΛP2 # Ρ1 in the conduit 9 on each side of the flow impedance 10, and transmit a signal indicating the measured force to a controller 14. The gas supply to the duct 9 can be controlled by the gas module 15. In this configuration, the gas module 15 is a -manifold, which regulates the gas supply from the tank to the conduit 9. The gas module 丨-signals to the controller 14 to indicate that the conduit is being supplied-or a number of characteristics, such as flow rate and pressure. This gas module can be used to distribute the gas to different locations in the pump, for example the gas will be used as a purge gas for the location where impurities are flushed from the pump. 97764.doc M278782 Official and pressurized gas (usually about 6 psi) will flow through the conduit 9. He grasps the impedance 10 and enters the channel 7 until a pressure equilibrium is reached between the gas downstream of the flow impedance ⑺ and the gas upstream of the flow impedance 10. Due to the presence of an additive body in the channel 7 downstream of the flow impedance 1G, the second O-ring seal 6 will withstand a significant pressure difference during the pumping operation, because when the When the pump is under normal steady state operating conditions, the gas being pumped in the cavity 2 (the working volume of the pump) will be lower than the atmospheric pressure (usually 800 mbar). In this state, when the second form% 6 is new and free of defects, the signals output from the pressure converters a, 13 will be approximately equal and free of fluctuations. However, if the second O-ring seal 6 is sufficiently damaged by the gas being pumped so that the integrity of the second O-ring in the seal 6 is damaged, then in the channel 7, the A relatively high pressure gas exists in the cavity 2-a relatively low pressure rolling body ', so the pressurized gas may start to leak from the channel 7 into the "Haiface 2" and the 11Hai leakage is trying to balance these pressure. Due to the existence of the "hatch grasping resistance" in the conduit 9, the pressure M measured by the pressure converter 2 will start to be as shown in Figure 4, and at the same time the pressure measured by the pressure converter 1 3 Will the force pi remain at that supply? Therefore, the difference in the rotational force mm will be an indication that gas leaks into the cavity 2, and therefore also an indication that the first 0%% seal 6 has failed. This allows the controllers that receive signal outputs from the pressure converters 12, 13 to output an alarm, such as via a display, which will indicate if the pressure difference exceeds a predetermined value to indicate the second O-ring seal 6 Its failure. Therefore, the device described above can provide a critical seal in a chestnut. 97764.doc M278782 State-reliable indication. This—indicates that maintenance intervals can be extended and operating costs reduced without intrusive interference. As the prediction of wear on these critical components can be improved, the potential for potentially dangerous leaks is reduced. In summary, the-duct supplies-the air flow to-surrounding-the sealed chamber around the working volume of the pump. The conduit contains a flow impedance, which is used to limit the flow rate of the gas reaching the sealed chamber. The signal output from the pressure transducer provided on each side of the flow impedance is used to detect gas leaks from the sealed chamber into the working volume of the pump, thereby indicating the surrounding working volume Hermetically sealed. [Schematic description] Figure 1 is a front view of a stator assembly showing a sealing assembly; Figure 2 is a side view of the sealing assembly of Fig. 1; Integrity device; and Figure 4 is a graph showing the pressure of a gas in the seal assembly over time. [Symbol description of main components] 1 Stator component 2 Cavity 3 Surface of the stator 4 Through hole 5 First 0-ring seal 6 Second O-ring seal 7 Channel 7a Through hole 97764.doc Slotted duct Flow resistance check valve pressure Converter pressure converter controller gas module tank pressure pressure -12-