TWI870209B - Laser treatment system for skin - Google Patents

Abstract

The present invention provides a laser treatment system for skin including a image acquisition assembly, a controlling assembly, a laser light source, a depth detection apparatus, a laser scan operation apparatus, and a driving apparatus. The image acquisition assembly is configured to obtain a first image of the skin and transmit the image to the controlling assembly. The laser light source is configured to emit a laser light. The depth detection apparatus is configured to emit a detection light beam. The laser scan operation apparatus is configured to receive the laser light and applied the laser light to the skin. The driving apparatus is configured to drive the laser scan operation apparatus to change a position of the laser light applied on the skin. The controlling assembly determines a target region based on the first image of the skin, obtains a second image of the target region through the image acquisition assembly, and obtains depth information of the target region through the detection light beam. The controlling assembly controls the driving apparatus based on the second image and the depth information of the target region, such that the laser scan operation apparatus can apply the laser light towards the target region.

Description

Laser treatment systems for the skin

The present invention relates to a laser treatment system for the skin.

The present invention relates to a laser treatment system for skin. The earliest application of laser on skin can be traced back to 1963 when American dermatologist Goldman published an article on the use of ruby laser to treat various skin lesions. After that, argon laser and carbon dioxide laser, which were used for vascular proliferative diseases and various epidermal and dermal diseases respectively, came out in 1964. However, both types of lasers are prone to side effects, such as hypertrophic scars or excessive pigmentation.

After that, Anderson and Parrish proposed the "Selective photothermalysis" theory in 1983. It uses the principle that lasers of different wavelengths have corresponding absorption spectra for different pigments, and selects a pulse length that is less than or equal to the thermal delay time of the pigment to achieve the effect of destroying the pigment without damaging the surrounding tissue, so that the treatment efficiency reaches the peak. This theory has become an important development foundation for the application of modern lasers on the skin. Pulsed dye lasers, pulsed carbon dioxide lasers, and various Q-switched lasers have been developed successively, bringing dermatology and plastic surgery into a common field - laser cosmetic medicine.

Laser resurfacing is a procedure in laser cosmetic medicine that uses far-infrared laser light to absorb and vaporize water molecules in tissues, removing them layer by layer starting from the surface. Pulsed CO2 laser (approved by the US FDA in 1996) was the first laser used for resurfacing. Compared to the early continuous wave CO2 laser, which easily causes excessive thermal damage to tissues and leads to scarring, pulsed CO2 laser can further reduce the risk of thermal damage to surrounding tissues. Laser resurfacing can be divided into ablative resurfacing and non-ablative resurfacing. The main difference is whether skin tissue is removed. Generally speaking, non-ablative resurfacing has a shorter recovery period, but at the same time, the number of treatments required will increase, and the effect of wrinkle removal is less obvious than ablative resurfacing. Although ablative resurfacing has significant effects, it has more side effects due to its strong destructive power.

From the above description of the application of laser on the skin, it can be seen that there is still room for improvement in the field of laser cosmetic medicine, for example, how to accurately apply the laser to the target area to be treated during the process of laser treatment of the skin, and how to reduce the thermal damage to the surrounding tissues.

The object of the present invention is to provide a laser treatment system for skin, which can accurately apply laser to the target area to be treated on the skin and can also avoid causing unnecessary damage to the surrounding tissue outside the target area on the skin.

The laser treatment system for skin provided according to the present invention includes: an imaging component, configured to obtain a first image of the skin; a control component, connected to the imaging component to control the imaging component and receive the first image of the skin from the imaging component; a laser light source, connected to the control component and configured to emit a laser beam; a depth detection device, connected to the control component and configured to emit a detection beam; a laser scanning application device, configured to receive the laser beam from the laser light source and guide the laser beam to be applied to the skin; and a driving device, connected to the control component and configured to drive the laser scanning application device to change the position where the laser beam is applied to the skin. The control component can determine the target area of the skin to be treated based on the first image of the skin obtained by the camera component, and after determining the target area, control the camera component again to obtain a second image of the target area, and make the depth detection device emit a detection beam to the target area to obtain depth information of the target area. The control component then controls the driving device to drive the laser scanning application device based on the second image of the target area and the depth information, so that the laser scanning application device can apply a laser beam to the target area.

In the laser treatment system for skin of the present invention, through the cooperation of the control component, the camera component and the depth detection device, the laser treatment system can not only automatically identify the target area (e.g., lesion) on the skin, but also further obtain the depth information of the target area on the skin. In this case, the laser scanning application device can be controlled based on the second image and depth information of the identified target area to accurately apply the laser beam to the target area for treatment.

Preferably, in the above-mentioned laser treatment system for skin, the camera assembly may include a camera and a zoom device, the camera is configured to obtain a first image of the skin and a second image of the target area, and after determining the target area, the zoom device can change the focal length of the camera under the control of the control assembly to obtain an enlarged image of the target area. More preferably, the camera can be a wide-angle camera.

Preferably, the laser treatment system for skin may further include a first spectroscope, which is disposed between the depth detection device and the laser scanning application device, and between the laser light source and the laser scanning application device, so that the detection beam from the depth detection device can be transmitted through the first spectroscope and enter the laser scanning application device, and the laser beam from the laser light source can be reflected by the first spectroscope and enter the laser scanning application device.

Preferably, the laser treatment system for skin may further include a second spectroscope, which is disposed between the imaging component and the skin, and between the laser scanning application device and the skin, so that the imaging component can obtain a first image of the skin and a second image of the target area through the second spectroscope, and the laser beam from the laser light source and passing through the laser scanning application device and the detection beam from the depth detection device and passing through the laser scanning application device can be reflected toward the target area through the second spectroscope.

Preferably, the laser treatment system for skin may further include a movable part, on which the camera assembly, the depth detection device, the laser scanning application device, the driving device, the first spectroscope and the second spectroscope are all disposed. More preferably, the movable part may be a robotic arm, and the control component may control the robotic arm so that the camera assembly, the depth detection device, the laser scanning application device, the driving device, the first spectroscope and the second spectroscope disposed on the robotic arm can move along the X direction, the Y direction and/or the Z direction.

Preferably, in the above-mentioned laser treatment system for skin, the depth detection device can be a confocal detection device or an ocular tomography scanning device.

Preferably, in the above-mentioned laser treatment system for skin, the control component may include a central processor and a user interface, the central processor is configured to receive a first image of the skin and a second image of the target area obtained from the camera component and depth information of the target area obtained from the depth detection device and display it on the user interface, and the user interface is also configured to allow the operator to input relevant treatment parameters.

Preferably, in the above-mentioned laser treatment system for skin, the camera assembly can continue to obtain a second image of the target area while the laser scanning application device applies a laser beam to the target area, and the depth detection device can continue to emit a detection beam to obtain depth information of the target area while the laser scanning application device applies a laser beam to the target area, and the control component is further configured to control the depth of the target area based on the camera assembly. The control component is configured to determine whether the target area is offset in the X direction and/or the Y direction based on the second image of the target area continuously obtained by the depth detection device, and the control component is also configured to determine the extent to which the laser beam has been applied to the target area in the Z direction based on the depth information of the target area continuously obtained by the depth detection device, so as to further control the laser beam applied to the target area by the laser scanning application device.

Preferably, in the above-mentioned laser treatment system for skin, the laser light source may be a femtosecond laser light source. More preferably, the femtosecond laser beam emitted by the femtosecond laser light source may have a wavelength from 500 nanometers to 1500 nanometers, a spot size from 5 micrometers to 50 micrometers, a laser pulse width from 300 femtoseconds to 5000 femtoseconds, and a laser repetition rate below 1 million Hz.

Preferably, in the above-mentioned laser treatment system for skin, the laser light source may be a deep violet laser light source. More preferably, the deep violet laser light beam emitted by the deep violet laser light source may have a wavelength from 193 nanometers to 308 nanometers, a spot size from 50 micrometers to 500 micrometers, and a laser repetition rate below 1000 Hz.

In the laser treatment system for skin of the present invention, since the control component can determine in real time whether the target area is offset in the X direction and/or the Y direction by using the image of the target area obtained by the camera component, in this case, even if the target area (lesion) on the skin moves during the process of treating the skin with a laser beam, the control component can control the laser scanning application device in real time to correct the position where the laser beam is applied to the skin for accurate treatment. In addition, since the control component can also judge the extent to which the target area on the skin has been treated in the Z direction by the laser beam in real time through the depth information of the target area obtained by the depth detection device, during the process of treating the target area on the skin with the laser beam, the laser treatment system for skin of the present invention can also avoid improper treatment of the target area on the skin by the laser beam (for example, excessive treatment), and further avoid damage to normal skin tissue outside the target area.

In addition, in the laser treatment system for skin of the present invention, since the laser light source can adopt a femtosecond laser light source, and the instantaneous ultra-high power of the femtosecond can make the tissue in the skin go from solid to gaseous state (plasma vaporization) via almost negligible liquid state, and break the molecular bonds between tissues without generating any thermal effect, or, since the laser light source can adopt a deep violet laser light source, and the photon energy of the deep violet light is high enough to directly vaporize the tissue in the skin, the laser treatment system for skin of the present invention can also significantly reduce the probability of causing thermal damage to the tissue around the target area on the skin during the process of laser treatment of the skin.

1: Camera components

2: Control components

3: Laser light source

4: Depth detection device

5: Laser scanning application device

6: Driving device

7: First spectroscope

8: Second spectroscope

9: Movable parts

11: Camera equipment

12: Zoom device

21: Central Processing Unit

22: User Interface

100:Laser treatment system

200:Methods

LB: Laser beam

DB: Detection beam

S1~S9: Steps

T: Target area

A more complete understanding of the present invention and its many attendant advantages will become readily apparent with reference to the following detailed description, particularly when considered in conjunction with the accompanying drawings, wherein: FIG1 is a block diagram of a laser treatment system for skin according to an embodiment of the present invention.

The second and third figures are flow charts of the method for treating the skin using a laser treatment system for the skin according to an embodiment of the present invention.

The following is a specific embodiment to illustrate the implementation method of the "laser treatment system for skin" disclosed in the present invention. The technical personnel in this field can understand the advantages and effects of the present invention from the content disclosed in this manual. The present invention can be implemented or applied through other different specific embodiments, and the details in this manual can also be modified and changed based on different viewpoints and applications without deviating from the concept of the present invention. In addition, the attached drawings of the present invention are only for simple schematic illustrations and are not depicted according to actual sizes. Please note in advance. The following implementation method will further explain the relevant technical content of the present invention in detail, but the disclosed content is not used to limit the scope of protection of the present invention.

It should be understood that although the terms "first", "second", "third" and so on may be used in this article to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used in this article may include any one or more combinations of the related listed items depending on the actual situation.

An embodiment of the present invention will be described below with reference to the attached drawings.

The first figure is a block diagram of a laser treatment system 100 for skin according to an embodiment of the present invention. As shown in the first figure, the laser treatment system 100 for skin includes an imaging component 1, a control component 2, a laser light source 3, a depth detection device 4, a laser scanning application device 5, and a driving device 6.

The imaging component 1 is configured to obtain a first image of the skin and transmit it to the control component 2. The control component 2 can determine the target area T to be treated based on the first image of the skin obtained by the imaging component 1, and control the imaging component 1 to obtain a second image of the target area T.

More specifically, the camera assembly 1 may include a camera 11 and a zoom device 12, wherein the camera 11 is configured to obtain a first image of the skin and a second image of the target area T, and after the control assembly 2 determines the target area T, the zoom device 12 may change the focal length of the camera 11 under the control of the control assembly 2 to obtain an enlarged image of the target area T. In an embodiment of the present invention, the camera 11 may be a wide-angle camera to capture as large an area of the image as possible when initially obtaining the first image of the skin, and provide the control assembly 2 for identification, so as to save the time required to determine the target area T to be treated.

The laser light source 3 is configured to emit a laser beam LB toward the laser scanning application device 5. In an embodiment of the present invention, the laser light source 3 may be a femtosecond laser light source, and the laser beam emitted by it is a femtosecond laser light beam. More specifically, the femtosecond laser light beam preferably has a wavelength from 500 nanometers to 1500 nanometers, a spot size from 5 micrometers to 50 micrometers, a laser pulse width from 300 femtoseconds to 5000 femtoseconds, and a laser repetition rate of less than 1 million hertz. Alternatively, the laser light source 3 may be a deep violet laser light source, and the deep violet laser light beam emitted by it has a wavelength from 193 nanometers to 308 nanometers, a spot size from 50 micrometers to 500 micrometers, and a laser repetition rate of less than 1000 hertz. However, the present invention is not limited to this. Various laser light sources and the laser beams they emit can be appropriately selected according to the treatment required for the skin.

The depth detection device 4 is configured to emit a detection beam DB. The laser scanning application device 5 is configured to receive the laser beam LB and apply it to the skin (e.g., the target area T).

After determining the target area T, the control component 2 will control the depth detection device 4 to emit a detection beam DB, and obtain the depth information of the target area T of the skin by passing the detection beam DB of the laser scanning application device 5. In the embodiment of the present invention, the depth detection device 4 is preferably a confocal detection device or an ocular tomography scanning device, both of which are configured to obtain the depth information of the target area T of the skin.

Furthermore, the laser treatment system 100 for skin according to the embodiment of the present invention also includes a first spectroscope 7 and a second spectroscope 8.

The first spectroscope 7 is disposed between the depth detection device 4 and the laser scanning application device 5, and between the laser light source 3 and the laser scanning application device 5, so that the detection beam DB from the depth detection device 4 can be transmitted through the first spectroscope 7 and enter the laser scanning application device 5, and the laser beam LB from the laser light source 3 can be reflected by the first spectroscope 7 and enter the laser scanning application device 5.

The second spectroscope 8 is disposed between the imaging component 1 and the skin (e.g., the target area T), and between the laser scanning application device 5 and the skin (e.g., the target area T), so that the imaging component 1 can obtain a first image of the skin and a second image of the target area T through the second spectroscope 8, and the laser beam LB from the laser light source 3 and passing through the laser scanning application device 5 and the detection beam DB from the depth detection device 4 and passing through the laser scanning application device 5 can be reflected toward the target area T through the second spectroscope 8.

The driving device 6 is configured to drive the laser scanning application device 5 to change the position where the laser beam LB is applied to the skin. Preferably, the laser treatment system 100 for skin according to the embodiment of the present invention further includes a movable part 9, and the camera assembly 1, the depth detection device 4, the laser scanning application device 5, the driving device 6, the first spectroscope 7 and the second spectroscope 8 are all arranged on this movable part 9. In the embodiment of the present invention, the movable part 9 is preferably a robot arm, and the control component 2 can control the movable part 9 (robot arm) so that the camera component 1, the depth detection device 4, the laser scanning application device 5, the driving device 6, the first spectroscope 7 and the second spectroscope 8 arranged on the movable part 9 (robot arm) can move along the X direction, the Y direction and/or the Z direction.

Because the laser beam LB and the detection beam DB are applied to the target area T simultaneously and continuously, and the camera assembly 1 needs to continuously obtain the image of the target area T, making the above devices move synchronously is conducive to the laser scanning application device 5 applying the laser beam LB to the target area T on the skin with high precision.

The control component 2 may include a central processor 21 and a user interface 22. The central processor 21 is configured to receive the first image of the skin and the second image of the target area T obtained from the camera component 1 and the depth information of the target area T obtained from the depth detection device 4 and display it on the user interface 22. The user interface 22 is also configured to allow the operator to input relevant treatment parameters. In an embodiment of the present invention, the user interface 22 may include a screen and a keyboard, but is not limited thereto. For example, the user interface 22 may also be a touch screen, etc.

Next, a flow chart of a method 200 for treating skin using a laser treatment system 100 for skin according to an embodiment of the present invention will be described with reference to the second figure.

First, in step S1, the first image of the skin is obtained by the camera component 1, and the first image of the skin is transmitted to the control component 2.

Next, in step S2, the control component 2 recognizes the first image of the skin transmitted from the imaging component 1 and determines the target area T (e.g., lesion) on the skin to be treated.

Next, in step S3, the control component 2 controls the imaging component 1 to obtain a second image of the target area T (e.g., an enlarged image of the lesion).

Next, in step S4, the control component 2 controls the depth detection device 4 to emit a detection beam DB to obtain the depth information of the target area T (e.g., the depth of the lesion).

Finally, in step S5, according to the second image and depth information of the target area T obtained in step S3, the control component 2 controls the driving device 6 to drive the laser scanning application device 5 to apply the laser beam LB to the target area T. It should be noted that in the embodiment of the present invention, while the laser scanning application device 5 applies the laser beam LB to the target area T, the camera component 1 continues to obtain the second image of the target area T, and the depth detection device 4 continues to emit the detection beam DB to continue to obtain the depth information of the target area T. Next, refer to the third figure for explanation.

In this case, as shown in step S6 of the third figure, the control component 2 can also determine in real time whether the target area T is offset in the X direction and/or the Y direction based on the second image of the target area T continuously obtained by the camera component 1.

For example, as shown in step S7 of the third figure, if the control component 2 determines that the target area T is offset in the X direction and/or the Y direction, it can control the laser scanning application device 5 to pause applying the laser beam LB to the target area T, and control the driving device 6 to adjust the position of the laser beam LB applied by the laser scanning application device 5 to the skin, and then continue to treat the target area T on the skin with the laser beam LB.

As shown in step S8 of the third figure, the control component 2 can judge the degree of treatment of the target area T in the Z direction by the laser beam LB in real time based on the depth information of the target area T continuously obtained by the depth detection device 4, and further control the laser beam LB applied to the target area T by the laser scanning application device 5. In addition, as shown in step S9 of the third figure, if the control component 2 judges that the degree of treatment of the target area T in the Z direction by the laser beam LB has reached the set target value (for example, the lesion has been removed), it can control the laser scanning application device 5 to stop applying the laser beam LB to the target area T and end the treatment.

With the cooperation of the control component, the imaging component and the depth detection device, the laser treatment system for skin of the embodiment of the present invention can not only automatically identify the target area (e.g., lesion) on the skin by the imaging component and the control component, but also further obtain the depth information of the target area on the skin by the depth detection device. Therefore, the laser scanning application device can be controlled based on the second image and depth information of the identified target area to apply a laser beam to the target area on the skin with very high accuracy for treatment.

In addition, in the laser treatment system for skin of the present invention, since the control component can judge whether the target area is offset in the X direction and/or Y direction in real time through the second image of the target area obtained by the camera component, even if the target area (lesion) on the skin moves during the process of treating the skin with a laser beam (for example, the patient moves), the laser treatment system for skin of the present invention can also correct the position of the laser beam applied to the skin in real time to avoid causing damage to other non-target areas on the skin.

On the other hand, in the laser treatment system for skin of the present invention, since the control component can also judge the degree of treatment of the target area in the Z direction by the laser beam in real time through the depth information of the target area obtained by the depth detection device, during the process of treating the target area on the skin with the laser beam, the laser treatment system for skin of the present invention can also avoid improper treatment of the target area on the skin by the laser beam (for example, excessive treatment), and further avoid damage to normal skin tissue outside the target area.

Finally, in the laser treatment system for skin of the present invention, if the laser light source adopts a femtosecond laser light source or a deep violet laser light source, the instantaneous ultra-high power of the femtosecond can make the tissue in the skin go from solid to gaseous state (plasma vaporization) via an almost negligible liquid state, breaking the molecular bonds between tissues without generating any thermal effect, or because the photon energy of the deep violet light is high enough to directly vaporize the tissue in the skin, the laser treatment system for skin of the present invention can also significantly reduce the probability of causing thermal damage to the tissues around the target area on the skin during the laser treatment of the skin.

The drawings of the embodiments described herein are intended to provide an understanding of the present invention. In other words, the drawings are representative only and may not be drawn to scale. Certain proportions in the drawings may be exaggerated, while other proportions may be reduced. Accordingly, the drawings should be regarded as illustrative rather than restrictive.

Although various embodiments of the present invention have been described in the above embodiments with reference to the attached drawings, the above embodiments are only preferred embodiments of the present invention and are not intended to limit the present invention to the features and structures described above and shown in the attached drawings. It should be understood that various other omissions, substitutions, changes and modifications that can be imagined by a person skilled in the art without departing from the scope of the present invention are also included in the scope of the present invention.

1: Camera components

2: Control components

3: Laser light source

4: Depth detection device

5: Laser scanning application device

6: Driving device

7: First spectroscope

8: Second spectroscope

9: Movable parts

11: Camera equipment

12: Zoom device

21: Central Processing Unit

22: User Interface

100:Laser treatment system

LB: Laser beam

DB: Detection beam

T: Target area

Claims (14)

A laser treatment system for skin, comprising: an imaging component configured to obtain a first image of a skin; a control component connected to the imaging component to control the imaging component and receive the first image of the skin from the imaging component; a laser light source connected to the control component and configured to emit a laser beam; a depth detection device connected to the control component and configured to emit a detection beam; a laser scanning application device configured to receive the laser beam from the laser light source and guide the laser beam to be applied to the skin; and a driving device connected to the control component and configured to drive the laser scanning application device to change the laser The control component can determine a target area of the skin to be treated based on the first image of the skin obtained by the imaging component, and after determining the target area, the control component controls the imaging component again to obtain a second image of the target area, and causes the depth detection device to emit the detection beam to the target area to obtain depth information of the target area, and based on the second image of the target area and the depth information obtained, the control component controls the driving device to drive the laser scanning application device, so that the laser scanning application device can apply the laser beam from the laser light source to the target area. A laser treatment system for skin as described in claim 1, wherein the camera assembly includes a camera device and a zoom device, the camera device is configured to obtain the first image of the skin and the second image of the target area, and after determining the target area, under the control of the control assembly, the zoom device is configured to change a focal length of the camera device to obtain an enlarged image of the target area. A laser treatment system for skin as described in claim 2, wherein the camera is a wide-angle camera. The laser treatment system for skin as described in claim 1 further includes a first spectroscope, which is disposed between the depth detection device and the laser scanning application device, and between the laser light source and the laser scanning application device, so that the detection beam from the depth detection device can be transmitted through the first spectroscope and enter the laser scanning application device, and the laser beam from the laser light source can be reflected by the first spectroscope and enter the laser scanning application device. The laser treatment system for skin as described in claim 4 further includes a second spectroscope, which is disposed between the imaging component and the skin, and between the laser scanning application device and the skin, so that the imaging component can obtain the first image of the skin and the second image of the target area through the second spectroscope, and the laser beam from the laser light source and passing through the laser scanning application device and the detection beam from the depth detection device and passing through the laser scanning application device can be reflected toward the target area through the second spectroscope. The laser treatment system for skin as described in claim 5 further includes a movable part, wherein the imaging component, the depth detection device, the laser scanning application device, the driving device, the first spectroscope and the second spectroscope are all arranged on the movable part. The laser treatment system for skin as described in claim 6, wherein the movable part is a robot arm, and the control component can control the robot arm so that the camera component, the depth detection device, the laser scanning application device, the driving device, the first spectroscope and the second spectroscope disposed on the robot arm move along the X direction, the Y direction and/or the Z direction. A laser treatment system for skin as described in claim 4, wherein the depth detection device is a confocal detection device or a tomographic scanning device. A laser treatment system for skin as described in claim 1, wherein the control component includes a central processor and a user interface, the central processor is configured to receive the first image of the skin and the second image of the target area obtained from the camera component and the depth information of the target area obtained from the depth detection device and display it on the user interface, and the user interface is also configured to allow the operator to input relevant treatment parameters. The laser treatment system for skin as described in claim 1, wherein the camera component continues to obtain the second image of the target area while the laser scanning application device applies the laser beam to the target area, and the depth detection device continues to emit the detection beam to obtain the depth information of the target area while the laser scanning application device applies the laser beam to the target area, and the control component is also configured to The imaging component continuously obtains the second image of the target area to instantly determine whether the target area is offset in the X direction and/or the Y direction, and the control component is also configured to instantly determine the extent to which the laser beam has been applied to the target area in the Z direction based on the depth information of the target area continuously obtained by the depth detection device, so as to further control the laser beam applied to the target area by the laser scanning application device. A laser treatment system for skin as described in any one of claims 1 to 10, wherein the laser light source is a femtosecond laser light source. A laser treatment system for skin as described in claim 11, wherein the femtosecond laser beam emitted by the femtosecond laser light source has a wavelength from 500 nanometers to 1500 nanometers, a spot size from 5 micrometers to 50 micrometers, a laser pulse width from 300 femtoseconds to 5000 femtoseconds, and a laser repetition rate below 1 million Hz. A laser treatment system for skin as described in any one of claims 1 to 10, wherein the laser light source is a deep purple laser light source. A laser treatment system for skin as described in claim 13, wherein the deep violet laser beam emitted by the deep violet laser light source has a wavelength from 193 nm to 308 nm, a spot size from 50 μm to 500 μm, and a laser repetition rate below 1000 Hz.