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TWI850928B - Testing method for temperature detection integrated circuit and test device thereof - Google Patents

Testing method for temperature detection integrated circuit and test device thereof Download PDF

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Publication number
TWI850928B
TWI850928B TW111150188A TW111150188A TWI850928B TW I850928 B TWI850928 B TW I850928B TW 111150188 A TW111150188 A TW 111150188A TW 111150188 A TW111150188 A TW 111150188A TW I850928 B TWI850928 B TW I850928B
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temperature
test
integrated circuit
tested
host
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TW111150188A
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TW202426947A (en
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曾建財
陳志銘
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新唐科技股份有限公司
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Priority to CN202310544412.0A priority patent/CN118258518A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K15/00Testing or calibrating of thermometers
    • G01K15/005Calibration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The present invention relates to a testing method for temperature detection integrated circuit and a test device thereof. The testing method includes: setting a specific temperature on a temperature test device; transporting a golden IC and a plurality of ICs to be tested into the temperature test device; acquiring an offset value according to the setting temperature and an output temperature of the golden IC; acquiring a plurality of temperature testing value by output temperature of the IC to be tested deducting the offset value; and qualifying IC(s) which output temperature value in the qualified range.

Description

具有測試溫度功能之積體電路的測試校準方法以及使用其之測試裝置 Test calibration method for integrated circuit with temperature test function and test device using the same

本發明涉及一種積體電路的測試技術,且特別是一種具有測試溫度功能之積體電路的測試校準方法以及使用其之測試裝置。 The present invention relates to a testing technology for integrated circuits, and in particular to a testing calibration method for integrated circuits with a temperature testing function and a testing device using the same.

針對具備溫度應用功能的積體電路,目前普遍用於積體電路溫度測試的方式,是定義出一個理想溫度,例如:25℃,將此理想溫度的正負一定區間範圍作為是否通過溫度測試的判斷標準,例如:25℃+/-3℃=22℃~28℃,並且在積體電路測試載板(Load Board)上加裝一個做為對照標準的標準樣品積體電路(Golden Sample IC或Golden IC)。在此有一個前提,標準樣品積體電路並非絕對百分之百精確,但是相對於其他被測試的積體電路具有更為準確的特性,所以使用者信賴它,採取它的測試結果做為參考的標準。此外,標準樣品積體電路與被測試的積體電路不一定是同樣的產品,例如:被測試積體電路是A公司的積體電路、標準樣品積體電路是B公司的積體電路,依據標準樣品積體電路的測試結果進行調整,使標準樣品積體電路本身的最終測試結 果接近定義的理想溫度,在調整的規則確定之後,所有被測試的積體電路將於進行溫度測試的時候,依照確定後的該調整規則進行測試結果的調整。 For integrated circuits with temperature application functions, the current commonly used method for integrated circuit temperature testing is to define an ideal temperature, such as 25°C, and use a certain range of positive and negative temperature of this ideal temperature as the judgment standard for whether the temperature test has passed, such as 25°C+/-3°C=22°C~28°C, and install a standard sample integrated circuit (Golden Sample IC or Golden IC) as a reference standard on the integrated circuit test load board (Load Board). There is a premise here that the standard sample integrated circuit is not absolutely 100% accurate, but it has more accurate characteristics than other tested integrated circuits, so users trust it and take its test results as a reference standard. In addition, the standard sample integrated circuit and the tested integrated circuit are not necessarily the same product. For example, the tested integrated circuit is the integrated circuit of Company A, and the standard sample integrated circuit is the integrated circuit of Company B. Adjustments are made based on the test results of the standard sample integrated circuit so that the final test results of the standard sample integrated circuit itself are close to the defined ideal temperature. After the adjustment rules are determined, all tested integrated circuits will adjust the test results according to the determined adjustment rules when performing temperature tests.

舉例來說,B公司的被測試的積體電路要進行25℃溫度測試,此時,溫度測試的規格為25℃+/-3℃=22℃~28℃,另選用A公司的積體電路作為溫度測試的標準樣品積體電路,測試程序是先對標準樣品積體電路進行溫度測試,以此取得調整資料進行之後的測試。首先,令A公司的標準樣品積體電路的測試結果於調整後接近定義的理想溫度,再將調整規則運用於被測試之B公司的積體電路IC的溫度測試。假設,使用之A公司標準樣品積體電路的溫度測試結果為24℃,那麼,標準樣品積體電路的調整值就是25℃-24℃=1℃,使用者將標準樣品積體電路的測試值(24)再加上偏移值1就能得到25,以作為調整規則。之後,所有被測試的積體電路一律將其溫度測試值再加上1作為最終的測試結果,此最終結果只要符合前述溫度測試規格22℃~28℃,就是通過溫度測試,反之,就是未通過溫度測試,未通過溫度測試的積體電路將不再進行其他功能測試,直接歸入不良品且不可出貨。假設,被測試之積體電路的溫度測試結果為21℃,那麼,被測試之積體電路IC的最終測試結果(也就是調整後的結過)為21℃+1℃=22℃,22℃符合測試規格,此積體電路便通過溫度測試。 For example, the tested integrated circuit of Company B needs to be tested at 25℃. At this time, the temperature test specification is 25℃+/-3℃=22℃~28℃. The integrated circuit of Company A is selected as the standard sample integrated circuit for temperature test. The test procedure is to first perform temperature test on the standard sample integrated circuit to obtain adjustment data for subsequent tests. First, the test results of the standard sample integrated circuit of Company A are adjusted to be close to the defined ideal temperature, and then the adjustment rules are applied to the temperature test of the tested integrated circuit IC of Company B. Assume that the temperature test result of the standard sample integrated circuit of company A is 24℃, then the adjustment value of the standard sample integrated circuit is 25℃-24℃=1℃. The user adds the offset value 1 to the test value (24) of the standard sample integrated circuit to get 25 as the adjustment rule. After that, all the tested integrated circuits will add 1 to their temperature test value as the final test result. As long as this final result meets the aforementioned temperature test specification of 22℃~28℃, it has passed the temperature test. Otherwise, it has failed the temperature test. The integrated circuit that has failed the temperature test will no longer undergo other functional tests and will be directly classified as a defective product and cannot be shipped. Assuming that the temperature test result of the tested integrated circuit is 21℃, then the final test result of the tested integrated circuit IC (that is, the adjusted junction) is 21℃+1℃=22℃. 22℃ meets the test specifications, and the integrated circuit passes the temperature test.

上述的測試方法忽略了一個環境變數,須知前述定義的理想溫度是由測試設備之一的處理主機(Handler)提供一個溫度目標,例如:處理主機設定測試環境溫度25℃,而處理主機內部的相關部件在提供25℃的同時也在隨時監控溫度的變化,使其提供的溫度盡量收斂在一定的溫度範圍,即便有溫度上的變化差異也不至於過大,此處的溫度變化差異就是一種環境變數,使得不 同的時間點、不同的被測試積體電路、位於相同的機構位置、面對不同環境溫度差異。通常,測試設備對於設定的參數目標,無法提供絕對的準確,只能提供相對的準確,例如:處理主機保證設備顯示的溫度誤差在+/-0.5℃,例如:溫度顯示面板顯示溫度25℃,保證溫度為25℃+/-0.5℃=24.5℃~25.5℃,這個保證溫度的範圍是透過設備本身的溫度監控才能維持,如果沒有了溫度監控的機制,處理主機提供的溫度,誤差將會非常大,可能如同處理主機外部的室內環境溫度,從22℃~28℃都是可能的。 The above test method ignores an environmental variable. It should be noted that the ideal temperature defined above is a temperature target provided by the processing host (Handler), one of the test equipment. For example, the processing host sets the test environment temperature to 25℃, and the relevant components inside the processing host monitor the temperature changes at any time while providing 25℃, so that the temperature provided by it is as close as possible to a certain temperature range. Even if there is a temperature change difference, it will not be too large. The temperature change difference here is an environmental variable, which makes different time points, different tested integrated circuits, located in the same mechanical position, face different environmental temperature differences. Usually, the test equipment cannot provide absolute accuracy for the set parameter targets, but can only provide relative accuracy. For example, the processing host guarantees that the temperature error displayed by the equipment is +/-0.5℃. For example, the temperature display panel shows a temperature of 25℃, and the guaranteed temperature is 25℃+/-0.5℃=24.5℃~25.5℃. This guaranteed temperature range can only be maintained through the temperature monitoring of the equipment itself. If there is no temperature monitoring mechanism, the temperature provided by the processing host will have a very large error, which may be as large as the indoor ambient temperature outside the processing host, ranging from 22℃~28℃.

所以,處理主機提供一個溫度目標(箭靶)、而標準樣品積體電路(弓箭)則提供一個趨近溫度目標的方法(調整校正),因此,如前述一般將標準樣品積體電路安裝於處理主機外部的載板(Load Board)上的做法,將使標準樣品積體電路與被測試積體電路分別處於不同的溫度環境,例如:被測試積體電路位於處理主機內部進行測試,而處理主機溫度顯示為24.5℃;標準樣品積體電路位於處理主機外部進行測試,而處理主機外部溫度可為22℃,以位於22℃環境的標準樣品積體電路替位於25℃環境的被測試積體電路做溫度測試結果的調整,就是忽略了另一種環境變數的差異,盲目追求溫度數字25的美化,忽略對真實環境溫度的影響,對於精確性要求較高的進行IC溫度測試,將是一種品質上的危害。例如:載板上的標準樣品積體電路位於22℃的環境,並且標準樣品積體電路的溫度測試值為21℃,按照25℃的溫度測試目標,標準樣品積體電路的調整值為25℃-21℃=4℃,而處理主機內部的被測試積體電路位於25.5C的環境,被測試積體電路的溫度測試量測值為26℃,其最終測試結果為26℃+4℃=30℃,若以22℃~28℃做為測試規格,就是未通過溫度測試,此被測試積體電路將會被視為不良品處理。然而,進一步假設,倘若標準樣品積體電路和被 測試積體電路都是放置在處理主機內部,想必標準樣品積體電路的溫度測試量測值應該會在25℃附近,如此,被測試積體電路的溫度測試量測值再加上調整值之後,也會遠低於30℃,因而可以通過溫度測試。 Therefore, the processing host provides a temperature target (target), and the standard sample integrated circuit (bow and arrow) provides a method to approach the temperature target (adjustment and correction). Therefore, as mentioned above, the standard sample integrated circuit is generally installed on a load board outside the processing host. Board) will cause the standard sample integrated circuit and the tested integrated circuit to be in different temperature environments. For example, the tested integrated circuit is located inside the processing host for testing, and the processing host temperature is displayed as 24.5℃; the standard sample integrated circuit is located outside the processing host for testing, and the external temperature of the processing host may be 22℃. The standard sample integrated circuit located in the 22℃ environment is used to replace the tested integrated circuit located in the 25℃ environment to adjust the temperature test results. This ignores the difference in another environmental variable and blindly pursues the beautification of the temperature number 25, ignoring the impact on the actual environmental temperature. For IC temperature testing with high accuracy requirements, it will be a quality hazard. For example: the standard sample integrated circuit on the carrier board is located in an environment of 22℃, and the temperature test value of the standard sample integrated circuit is 21℃. According to the temperature test target of 25℃, the adjustment value of the standard sample integrated circuit is 25℃-21℃=4℃, and the tested integrated circuit inside the processing host is located in an environment of 25.5C. The temperature test value of the tested integrated circuit is 26℃. The final test result is 26℃+4℃=30℃. If 22℃~28℃ is used as the test specification, it means that the temperature test has not passed, and the tested integrated circuit will be treated as a defective product. However, let's further assume that if the standard sample integrated circuit and the tested integrated circuit are both placed inside the processing host, the temperature test value of the standard sample integrated circuit should be around 25°C. In this way, the temperature test value of the tested integrated circuit plus the adjustment value will also be much lower than 30°C, so it can pass the temperature test.

本發明提供一種具有測試溫度功能之積體電路的測試校準方法以及使用其之測試裝置,用以更準確的判斷被測試積體電路是否符合規範,並且減少誤判,進而節省成本,增加良率。 The present invention provides a test calibration method for an integrated circuit with a temperature test function and a test device using the same, which is used to more accurately determine whether the tested integrated circuit meets the specifications and reduce misjudgment, thereby saving costs and increasing yield.

本發明的實施例提供了一種具有測試溫度功能之積體電路的測試校準方法,此具有測試溫度功能之積體電路的測試校準方法包括:將一溫度測試裝置設置到一指定測試溫度;將一標準樣品積體電路以及多個被測試積體電路運輸進入一溫度測試裝置;根據該標準樣品積體電路所測試的溫度以及所設定的指定測試溫度,讀取出一偏差值;將每一個被測試積體電路所輸出的溫度扣除該偏差值,獲得對應之多數個溫度測試值;以及將該些溫度測試值中,在合格範圍規格內之溫度測試值所對應之被測試積體電路作為合格之積體電路。 The embodiment of the present invention provides a test calibration method for an integrated circuit with a test temperature function, and the test calibration method for an integrated circuit with a test temperature function includes: setting a temperature test device to a specified test temperature; transporting a standard sample integrated circuit and a plurality of tested integrated circuits into a temperature test device; reading a deviation value according to the temperature tested by the standard sample integrated circuit and the set specified test temperature; deducting the deviation value from the temperature output by each tested integrated circuit to obtain a plurality of corresponding temperature test values; and treating the tested integrated circuit corresponding to the temperature test value within the qualified range specification among the temperature test values as a qualified integrated circuit.

依照本發明較佳實施例所述的具有測試溫度功能之積體電路的測試校準方法,其中,在運輸被測試積體電路進入該溫度測試裝置時,更包括:透過運輸設備,量測每一該些被測試積體電路對應之地區溫度;將該些被測試積體電路對應之地區溫度傳送至測試主機;以及將該些地區溫度的一預設範圍,作為對應上述被測試積體電路對應之合格範圍規格。 According to the test calibration method of the integrated circuit with the test temperature function described in the preferred embodiment of the present invention, when the tested integrated circuit is transported into the temperature test device, it further includes: measuring the regional temperature corresponding to each of the tested integrated circuits through the transport equipment; transmitting the regional temperature corresponding to the tested integrated circuits to the test host; and using a preset range of the regional temperature as the qualified range specification corresponding to the above-mentioned tested integrated circuit.

依照本發明較佳實施例所述的具有測試溫度功能之積體電路的測試校準方法,其中,運輸設備包括多個積體電路吸引裝置,其中,每一該些積體電路吸引裝置分別包括一溫度測量裝置,用以在放置每一該些被測試積體電路時,量測每一該些被測試積體電路對應之地區溫度。 According to the test calibration method of the integrated circuit with the test temperature function described in the preferred embodiment of the present invention, the transport equipment includes a plurality of integrated circuit attraction devices, wherein each of the integrated circuit attraction devices includes a temperature measuring device, which is used to measure the temperature of the area corresponding to each of the tested integrated circuits when each of the tested integrated circuits is placed.

本發明的實施例另外提供了一種具有測試溫度功能之積體電路的測試校準方法,此具有測試溫度功能之積體電路的測試校準方法包括:將一溫度測試裝置設置到一指定測試溫度;將多個被測試積體電路運輸進入一溫度測試裝置;在運輸被測試積體電路進入該溫度測試裝置時,透過運輸設備,量測每一該些被測試積體電路對應之地區溫度;將該些被測試積體電路對應之地區溫度傳送至測試主機;將該些地區溫度的一預設範圍,作為對應上述被測試積體電路對應之合格範圍規格;將每一個被測試積體電路所輸出的溫度,作為對應之多數個溫度測試值;以及將該些溫度測試值中,在合格範圍規格內之溫度測試值所對應之被測試積體電路作為合格之積體電路。 The embodiment of the present invention further provides a test calibration method for an integrated circuit having a test temperature function, the test calibration method for an integrated circuit having a test temperature function comprising: setting a temperature test device to a specified test temperature; transporting a plurality of tested integrated circuits into a temperature test device; when transporting the tested integrated circuits into the temperature test device, measuring the corresponding location of each of the tested integrated circuits through the transport equipment. The regional temperatures corresponding to the tested integrated circuits are transmitted to the test host; a preset range of the regional temperatures is used as the qualified range specification corresponding to the tested integrated circuits; the temperature output by each tested integrated circuit is used as the corresponding plurality of temperature test values; and the tested integrated circuit corresponding to the temperature test value within the qualified range specification among the temperature test values is used as a qualified integrated circuit.

依照本發明較佳實施例所述的具有測試溫度功能之積體電路的測試校準方法,其中,運輸設備包括多個積體電路吸引裝置,其中,每一該些積體電路吸引裝置分別包括一溫度測量裝置,用以在放置每一該些被測試積體電路時,量測每一該些被測試積體電路對應之地區溫度。 According to the test calibration method of the integrated circuit with the test temperature function described in the preferred embodiment of the present invention, the transport equipment includes a plurality of integrated circuit attraction devices, wherein each of the integrated circuit attraction devices includes a temperature measuring device, which is used to measure the temperature of the area corresponding to each of the tested integrated circuits when each of the tested integrated circuits is placed.

依照本發明較佳實施例所述的具有測試溫度功能之積體電路的測試校準方法,其中,上述具有測試溫度功能之積體電路的測試校準方法更包括:將一標準樣品積體電路以及上述多個被測試積體電路運輸進入一溫度測試裝置;以及根據該標準樣品積體電路所測試的溫度以及所設定的指定測試溫度,讀取出一偏差值。 According to the test and calibration method of the integrated circuit with the test temperature function described in the preferred embodiment of the present invention, the test and calibration method of the integrated circuit with the test temperature function further includes: transporting a standard sample integrated circuit and the plurality of tested integrated circuits into a temperature testing device; and reading out a deviation value according to the temperature tested by the standard sample integrated circuit and the set designated test temperature.

依照本發明較佳實施例所述的具有測試溫度功能之積體電路的測試校準方法,其中,將每一個被測試積體電路所輸出的溫度,作為對應之多數個溫度測試值,包括:將每一個被測試積體電路所輸出的溫度扣除該偏差值,獲得對應之多數個溫度測試值。 According to the test calibration method of the integrated circuit with the test temperature function described in the preferred embodiment of the present invention, the temperature output by each tested integrated circuit is used as a corresponding plurality of temperature test values, including: deducting the deviation value from the temperature output by each tested integrated circuit to obtain the corresponding plurality of temperature test values.

本發明的實施例另外提供了一種溫度測試裝置,此溫度測試裝置包括一處理主機以及一測試主機。處理主機包括一測試倉室以及多數個測試臺座。測試倉室用以提供並維持一指定測試溫度。測試臺座配置於測試倉室,用以容納多數個被測試積體電路。測試主機接收處理主機的回傳資訊,以判定被測試積體電路是否符合規範。標準樣品積體電路以及上述被測試積體電路被運輸進入測試倉室。根據標準樣品積體電路所測試的溫度以及所設定的指定測試溫度,讀取出一偏差值,並回傳至測試主機。處理主機回傳每一個被測試積體電路所輸出的溫度。測試主機將每一個被測試積體電路所輸出的溫度,扣除偏差值,獲得對應之多數個溫度測試值,並將該些溫度測試值中,在合格範圍內之溫度測試值對應之被測試積體電路作為符合規範之被測試積體電路。 An embodiment of the present invention further provides a temperature testing device, which includes a processing host and a test host. The processing host includes a test chamber and a plurality of test benches. The test chamber is used to provide and maintain a specified test temperature. The test bench is configured in the test chamber to accommodate a plurality of tested integrated circuits. The test host receives feedback information from the processing host to determine whether the tested integrated circuit meets the specifications. The standard sample integrated circuit and the above-mentioned tested integrated circuit are transported into the test chamber. Based on the temperature tested by the standard sample integrated circuit and the set specified test temperature, a deviation value is read out and sent back to the test host. The processing host returns the temperature output by each tested integrated circuit. The test host deducts the deviation value from the temperature output by each tested integrated circuit to obtain the corresponding multiple temperature test values, and takes the tested integrated circuits corresponding to the temperature test values within the qualified range among these temperature test values as the tested integrated circuits that meet the specifications.

依照本發明較佳實施例所述的溫度測試裝置,其中,上述處理主機更包括多個運輸積體電路設備,其中,該些運輸積體電路設備將該些被測試積體電路放置至對應之測試臺座時,運輸積體電路設備量測每一該些被測試積體電路對應之地區溫度。其中,處理主機將該些被測試積體電路對應之地區溫度傳送至測試主機。測試主機將上述地區溫度的一預設範圍,作為對應上述被測試積體電路對應之合格範圍規格。測試主機將每一個被測試積體電路所輸出的溫度,扣除偏差值,作為對應之多數個溫度測試值。測試主機將上述溫度測試值中,在對應之合格範圍規格內的溫度測試值所對應之被測試積體電路,作為合格之積體電路。 According to the temperature testing device described in the preferred embodiment of the present invention, the processing host further includes a plurality of transport integrated circuit devices, wherein when the transport integrated circuit devices place the tested integrated circuits on the corresponding test benches, the transport integrated circuit devices measure the regional temperature corresponding to each of the tested integrated circuits. The processing host transmits the regional temperatures corresponding to the tested integrated circuits to the test host. The test host uses a preset range of the regional temperatures as the qualified range specification corresponding to the tested integrated circuits. The test host uses the temperature output by each tested integrated circuit, minus the deviation value, as the corresponding plurality of temperature test values. The test host regards the tested integrated circuit corresponding to the temperature test value within the corresponding qualified range specification among the above temperature test values as a qualified integrated circuit.

本發明的實施例另外提供了一種溫度測試裝置,此溫度測試裝置包括一處理主機以及一測試主機。處理主機包括一測試倉室以及多數個測試臺座。測試倉室用以提供並維持一指定測試溫度。測試臺座配置於測試倉室,用以容納多數個被測試積體電路。測試主機接收處理主機的回傳資訊,以判定被測試積體電路是否符合規範。處理主機將該些被測試積體電路對應之地區溫度傳送至測試主機。測試主機將該些地區溫度的一預設範圍,作為對應上述被測試積體電路對應之合格範圍規格。測試主機將每一個被測試積體電路所輸出的溫度,作為對應之多數個溫度測試值。測試主機將該些溫度測試值中,在對應之合格範圍規格內的溫度測試值所對應之被測試積體電路,作為合格之積體電路。 An embodiment of the present invention further provides a temperature testing device, which includes a processing host and a test host. The processing host includes a test chamber and a plurality of test benches. The test chamber is used to provide and maintain a specified test temperature. The test bench is configured in the test chamber to accommodate a plurality of tested integrated circuits. The test host receives feedback information from the processing host to determine whether the tested integrated circuits meet the specifications. The processing host transmits the regional temperatures corresponding to the tested integrated circuits to the test host. The test host uses a preset range of the regional temperatures as the qualified range specification corresponding to the above-mentioned tested integrated circuits. The test host uses the temperature output by each tested integrated circuit as the corresponding multiple temperature test values. The test host uses the tested integrated circuit corresponding to the temperature test value within the corresponding qualified range specification among these temperature test values as a qualified integrated circuit.

依照本發明較佳實施例所述的溫度測試裝置,其中,上述處理主機更包括多個運輸積體電路設備,其中,該些運輸積體電路設備將該些被測試積體電路放置至對應之測試臺座時,運輸積體電路設備量測每一該些被測試積體電路對應之地區溫度。 According to the temperature testing device described in the preferred embodiment of the present invention, the processing host further includes a plurality of transport integrated circuit devices, wherein when the transport integrated circuit devices place the tested integrated circuits on the corresponding test bench, the transport integrated circuit devices measure the temperature of the area corresponding to each of the tested integrated circuits.

依照本發明較佳實施例所述的溫度測試裝置,其中,上述標準樣品積體電路以及該些被測試積體電路被運輸進入該測試倉室。根據標準樣品積體電路所測試的溫度以及所設定的指定測試溫度,讀取出一偏差值,並回傳至該測試主機。測試主機將每一個被測試積體電路所輸出的溫度,扣除偏差值,獲得對應之多數個溫度測試值。 According to the temperature testing device described in the preferred embodiment of the present invention, the above-mentioned standard sample integrated circuit and the tested integrated circuits are transported into the test chamber. According to the temperature tested by the standard sample integrated circuit and the set specified test temperature, a deviation value is read out and sent back to the test host. The test host deducts the deviation value from the temperature output by each tested integrated circuit to obtain a corresponding plurality of temperature test values.

綜上所述,本發明之一實施例利用將標準樣品積體電路與被測試積體電路同時送入溫度測試裝置,讓標準樣品積體電路與被測試積體電路處於相同環境,並且讀取出標準樣品積體電路輸出的溫度值,藉此,和待測溫度比對以找出偏移值,藉由上述偏移值修正被測試積體電路的輸出溫度,以判定被測試積體電路是否合格。另外,在本發明之另一實施例中,上述溫度測試裝置 在測量被測試積體電路前,會先測量被測試積體電路附近的地區溫度,藉此獲得每一個被測試積體電路對應的合格溫度範圍。如此,更可以減少測試的誤差,增加測試準確度。 In summary, one embodiment of the present invention uses a standard sample integrated circuit and a tested integrated circuit to be simultaneously sent to a temperature testing device, so that the standard sample integrated circuit and the tested integrated circuit are in the same environment, and the temperature value output by the standard sample integrated circuit is read out, thereby comparing it with the temperature to be tested to find out the offset value, and the output temperature of the tested integrated circuit is corrected by the offset value to determine whether the tested integrated circuit is qualified. In addition, in another embodiment of the present invention, the temperature testing device before measuring the tested integrated circuit, it will first measure the temperature of the area near the tested integrated circuit, thereby obtaining the qualified temperature range corresponding to each tested integrated circuit. In this way, the test error can be reduced and the test accuracy can be increased.

為了進一步理解本發明的技術、手段和效果,可以參考以下詳細描述和附圖,從而可以徹底和具體地理解本發明的目的、特徵和概念。然而,以下詳細描述和附圖僅用於參考和說明本發明的實現方式,其並非用於限制本發明。 In order to further understand the technology, means and effects of the present invention, you can refer to the following detailed description and drawings, so that you can thoroughly and specifically understand the purpose, features and concepts of the present invention. However, the following detailed description and drawings are only used for reference and explanation of the implementation of the present invention, and are not used to limit the present invention.

10:處理主機 10:Host processing

11:測試主機 11: Test host

101:測試倉室 101:Testing room

102:測試臺座 102: Test bench

103:積體電路吸取頭 103: Integrated circuit suction head

104:被測試積體電路 104: Tested integrated circuit

105:標準樣品積體電路(Golden IC) 105: Standard sample integrated circuit (Golden IC)

S201~S206、S301~S308、S401~S408:本發明一實施例的具有測試溫度功能之積體電路的測試校準方法之各步驟 S201~S206, S301~S308, S401~S408: The steps of the test calibration method of an integrated circuit with a temperature test function according to an embodiment of the present invention

提供的附圖用以使本發明所屬技術領域具有通常知識者可以進一步理解本發明,並且被併入與構成本發明之說明書的一部分。附圖示出了本發明的示範實施例,並且用以與本發明之說明書一起用於解釋本發明的原理。 The attached figures are provided to enable a person having ordinary knowledge in the technical field to which the present invention belongs to further understand the present invention, and are incorporated into and constitute a part of the specification of the present invention. The attached figures show exemplary embodiments of the present invention, and are used together with the specification of the present invention to explain the principles of the present invention.

圖1繪示為本發明一實施例的溫度測試裝置之示意圖。 Figure 1 is a schematic diagram of a temperature testing device according to an embodiment of the present invention.

圖2繪示為本發明一較佳實施例的具有測試溫度功能之積體電路的測試校準方法之流程圖。 FIG2 is a flow chart of a test calibration method for an integrated circuit with a temperature test function according to a preferred embodiment of the present invention.

圖3繪示為本發明一較佳實施例的具有測試溫度功能之積體電路的測試校準方法之流程圖。 FIG3 is a flow chart of a test calibration method for an integrated circuit with a temperature test function according to a preferred embodiment of the present invention.

圖4繪示為本發明一較佳實施例的具有測試溫度功能之積體電路的測試校準方法之流程圖。 FIG4 is a flow chart of a test calibration method for an integrated circuit with a temperature test function according to a preferred embodiment of the present invention.

現在將詳細參考本發明的示範實施例,其示範實施例會在附圖中被繪示出。在可能的情況下,在附圖和說明書中使用相同的元件符號來指代相同或相似的部件。另外,示範實施例的做法僅是本發明之設計概念的實現方式之一,下述的該等示範皆非用於限定本發明。 Now, we will refer to the exemplary embodiments of the present invention in detail, which will be illustrated in the attached drawings. Where possible, the same element symbols are used in the attached drawings and the specification to refer to the same or similar parts. In addition, the exemplary embodiments are only one of the ways to realize the design concept of the present invention, and the following examples are not used to limit the present invention.

雖然先前技術中的溫度測試的做法操作容易,但是在測試機台與測試程序上有缺陷,舉例來說,標準樣品積體電路被配置在溫度測試裝置的外部,而受測試積體電路被設置在溫度測試裝置的內部,環境不相同的情況下,導致許多原本應當是良品的受測試積體電路被錯誤地判定為不良品,而且,許多原本應當被判定是不良品的受測試積體電路被錯誤地判定為良品,除了造成成本上升外,還容易造成下游客戶對產品的不信任。以下提出一種溫度測試裝置以及一種具有測試溫度功能之積體電路的測試校準方法來改善先前技術的缺點。 Although the temperature test method in the prior art is easy to operate, it has defects in the test machine and test procedure. For example, the standard sample integrated circuit is configured outside the temperature test device, and the tested integrated circuit is set inside the temperature test device. Under different environmental conditions, many tested integrated circuits that should have been good products are mistakenly judged as defective products. Moreover, many tested integrated circuits that should have been judged as defective products are mistakenly judged as good products. In addition to causing cost increases, it is also easy to cause downstream customers to distrust the product. The following proposes a temperature test device and a test calibration method for an integrated circuit with a temperature test function to improve the shortcomings of the prior art.

圖1繪示為本發明一實施例的溫度測試裝置之示意圖。請參考圖1,此溫度測試裝置包括一處理主機10以及一測試主機11。處理主機10包括一測試倉室101、多數個測試臺座102以及一積體電路吸取頭103。測試倉室101用以提供並維持一指定測試溫度。測試臺座102配置於測試倉室101,用以容納多數個被測試積體電路104。測試主機11接收處理主機10的回傳資訊,以判定被測試積體電路104是否符合規範。在此實施例中,標準樣品積體電路(Golden IC)105以及上述多個被測試積體電路104同時被運輸進入測試倉室101中,故在此實施例中,標準樣品積體電路(Golden IC)105與上述多個被測試積體電路104被設置在同一個環境中。 FIG1 is a schematic diagram of a temperature testing device according to an embodiment of the present invention. Referring to FIG1 , the temperature testing device includes a processing host 10 and a testing host 11. The processing host 10 includes a testing chamber 101, a plurality of testing benches 102, and an integrated circuit suction head 103. The testing chamber 101 is used to provide and maintain a specified testing temperature. The testing bench 102 is disposed in the testing chamber 101 to accommodate a plurality of tested integrated circuits 104. The testing host 11 receives feedback information from the processing host 10 to determine whether the tested integrated circuit 104 meets the specifications. In this embodiment, the standard sample integrated circuit (Golden IC) 105 and the above-mentioned multiple tested integrated circuits 104 are transported into the test chamber 101 at the same time, so in this embodiment, the standard sample integrated circuit (Golden IC) 105 and the above-mentioned multiple tested integrated circuits 104 are set in the same environment.

另外,在此實施例中,所設定的指定測試溫度以及標準樣品積體電路105所輸出的溫度會被透過無線傳輸協定(例如射頻識別傳輸協定)回傳到測試主機11。測試主機11則會記錄標準樣品積體電路105所輸出的溫度,並且根據設定的指定測試溫度與上述標準樣品積體電路105所輸出的溫度的差值,作為一偏差值。處理主機10在此實施例中,將每一個被測試積體電路104所輸出的溫度,包含標準樣品積體電路105所輸出的溫度回傳給測試主機11。測試主機11將每一個被測試積體電路104所輸出的溫度,扣除上述偏差值,獲得對應之多數個溫度測試值,並據以確認每一個被測試積體電路104是否通過測試。 In addition, in this embodiment, the set designated test temperature and the temperature output by the standard sample integrated circuit 105 are transmitted back to the test host 11 via a wireless transmission protocol (e.g., a radio frequency identification transmission protocol). The test host 11 records the temperature output by the standard sample integrated circuit 105, and uses the difference between the set designated test temperature and the temperature output by the standard sample integrated circuit 105 as a deviation value. In this embodiment, the processing host 10 transmits the temperature output by each tested integrated circuit 104, including the temperature output by the standard sample integrated circuit 105, back to the test host 11. The test host 11 deducts the above deviation value from the temperature output by each tested integrated circuit 104 to obtain a plurality of corresponding temperature test values, and uses them to confirm whether each tested integrated circuit 104 has passed the test.

舉例來說,測試倉室101內部設定溫度是25℃,標準樣品積體電路(Golden IC)105測試出來的溫度是24.8℃,故在此實施例中,偏差值是負0.2℃。測試規格例如是22℃~28℃。若此時,其中一個被測試積體電路104輸出的溫度是27.9℃,將此輸出的溫度是27.9℃扣除偏差值負0.2℃後,校正後的溫度測試值是28.1℃,此溫度測試值超出了測試規格,故會被判定為不合格。再假設,另一個被測試積體電路104輸出的溫度是22.1℃,將此輸出的溫度是22.1℃扣除偏差值負0.2℃後,校正後的溫度測試值是22.3℃,此溫度測試值在測試規格中,故會被判定為合格。 For example, the internal temperature of the test chamber 101 is set to 25°C, and the temperature of the standard sample integrated circuit (Golden IC) 105 is tested to be 24.8°C, so in this embodiment, the deviation value is negative 0.2°C. The test specification is, for example, 22°C to 28°C. If at this time, the temperature output by one of the tested integrated circuits 104 is 27.9°C, after deducting the deviation value of negative 0.2°C from the output temperature of 27.9°C, the corrected temperature test value is 28.1°C. This temperature test value exceeds the test specification, so it will be judged as unqualified. Assume that the temperature output by another tested integrated circuit 104 is 22.1℃. After deducting the deviation value of -0.2℃ from this output temperature of 22.1℃, the corrected temperature test value is 22.3℃. This temperature test value is within the test specification and will be judged as qualified.

上述較佳實施例雖然解決了標準樣品積體電路(Golden IC)105與被測試積體電路104配置在不同環境下所造成的誤判情況,但是,除了上述情況外,在測試倉室101內部設定的溫度,與標準樣品積體電路105或被測試積體電路104附近的溫度,有很大的可能會有誤差。這樣的誤差,也常常會導致 判定錯誤問題。故本發明提出另一較佳實施例的具有測試溫度功能之積體電路的測試校準方法。 Although the above preferred embodiment solves the misjudgment caused by the standard sample integrated circuit (Golden IC) 105 and the tested integrated circuit 104 being configured in different environments, in addition to the above situation, there is a high possibility that the temperature set inside the test chamber 101 and the temperature near the standard sample integrated circuit 105 or the tested integrated circuit 104 will have errors. Such errors often lead to the problem of misjudgment. Therefore, the present invention proposes another preferred embodiment of the test calibration method of the integrated circuit with the test temperature function.

在下述實施例中,同樣測試倉室101提供理想的溫度目標,但是也不拘溺於測試倉室101必須達到完美的理想溫度,因為最終的溫度測試規格是浮動的,以實際的測試倉室101溫度加減一定區間做為當次測試積體電路104的測試規格,如此,就不必擔心測試倉室101溫度漂移變動的情況,因為測試倉室101溫度改變,測試規格也跟著變,功能正常的被測試積體電路104感測到的溫度也理應跟著改變。 In the following embodiments, the test chamber 101 also provides an ideal temperature target, but the test chamber 101 is not limited to reaching the perfect ideal temperature, because the final temperature test specification is floating, and the actual test chamber 101 temperature plus or minus a certain range is used as the test specification of the current test integrated circuit 104. In this way, there is no need to worry about the temperature drift of the test chamber 101, because the test chamber 101 temperature changes, the test specification also changes, and the temperature sensed by the tested integrated circuit 104 with normal function should also change accordingly.

在處理主機10的機構部件中,與提供溫度加熱有關的為:加熱托盤(Tray)、傳送梭(Shuttle)、測試區的積體電路吸取頭103,本案採用處理主機10測試區之積體電路吸取頭103的溫度做為溫度測試計算基礎。在積體電路吸取頭103將標準樣品積體電路(Golden IC)105以及上述多個被測試積體電路104向下移動使被測試積體電路進入測試定位(測試臺座102)之後,即測試每一個積體電路被放置之位置的溫度。之後,將上述所測得的地區溫度(積體電路吸取頭103測得之溫度)加減一定區間做為測試規格,例如:測試倉室101內部設定溫度是25℃,但某一特定積體電路吸取頭103當時測得溫度為24.5℃。之後,測試主機11收到上述特定積體電路吸取頭103當時測得溫度24.5℃後,以+/-1℃做為測試規格,測試規格就是(24.5℃-1℃)~(24.5℃+1℃)=23.5℃~25.5℃,意即,特定積體電路吸取頭103對應的被測試積體電路104在溫度測試的過程中,經過一連串的溫度測試結果調整,最終若輸出溫度符合此規格,便通過溫度測試。 Among the components of the processing host 10, those related to providing temperature heating are: the heating tray, the shuttle, and the integrated circuit suction head 103 in the test area. In this case, the temperature of the integrated circuit suction head 103 in the test area of the processing host 10 is used as the basis for temperature test calculation. After the integrated circuit suction head 103 moves the standard sample integrated circuit (Golden IC) 105 and the above-mentioned multiple tested integrated circuits 104 downward so that the tested integrated circuits enter the test position (test platform 102), the temperature of each position where the integrated circuit is placed is tested. Afterwards, the above-measured regional temperature (temperature measured by the integrated circuit suction head 103) is added or subtracted by a certain range as the test specification. For example, the internal temperature of the test chamber 101 is set to 25°C, but the temperature measured by a specific integrated circuit suction head 103 is 24.5°C. Afterwards, the test host 11 receives the temperature of 24.5℃ measured by the above-mentioned specific integrated circuit suction head 103, and uses +/-1℃ as the test specification. The test specification is (24.5℃-1℃)~(24.5℃+1℃)=23.5℃~25.5℃, which means that the tested integrated circuit 104 corresponding to the specific integrated circuit suction head 103 undergoes a series of temperature test result adjustments during the temperature test process. If the output temperature finally meets this specification, it passes the temperature test.

在上述實施例中,處理主機10以及測試主機11之間是使用無線傳輸的方式進行測試溫度的傳輸。於處理主機10與測試主機11的電腦主機內分別例如配置射頻識別寫入/讀取裝置(RFID Writer/Reader),或Wi-Fi、藍芽(Bluetooth)等傳輸電路,配合相容於處理主機10與測試主機11電腦主機作業系統的應用軟體,擷取、傳輸、即時或依軟體設定的資料更新頻率接收處理主機10的溫度資料,然後再由測試主機11的電腦主機端的讀取裝置讀取資料或Wi-Fi接收器接收檔案,並且透過介面軟體將資料寫入一個檔案,待測試主機11的溫度測試程序呼叫使用。 In the above embodiment, the test temperature is transmitted between the processing host 10 and the test host 11 by wireless transmission. For example, a radio frequency identification writing/reading device (RFID Writer/Reader) or a transmission circuit such as Wi-Fi or Bluetooth is configured in the computer host of the processing host 10 and the test host 11, respectively, and the application software compatible with the computer host operating system of the processing host 10 and the test host 11 is used to capture, transmit, and receive the temperature data of the processing host 10 in real time or according to the data update frequency set by the software. Then, the reading device on the computer host side of the test host 11 reads the data or the Wi-Fi receiver receives the file, and the data is written into a file through the interface software, waiting to be called and used by the temperature test program of the test host 11.

在此實施例中,綜合上述兩實施例的修正後的溫度測試較詳細的方式如下。首先,標準樣品積體電路(Golden IC)105與被測試積體電路104由處理主機10進料區送入處理主機10的加熱托盤預熱。之後,標準樣品積體電路105與被測試積體電路104被放置到傳送梭後,傳送梭將標準樣品積體電路105與被測試積體電路104傳送至測試倉室101。測試倉室101的積體電路吸取頭103將標準樣品積體電路105與被測試積體電路104自傳送梭放置到測試定位。以圖1的配置為例,標準樣品積體電路105例如放置於吸取頭103中Head1對應的第一位置、被測試積體電路104放置於吸取頭103中Head2對應的第二位置。處理主機10擷取出Head1的溫度:26.6、擷取出Head2的溫度:26.3。處理主機10將Head1的溫度26.6℃與Head2的溫度:26.3℃寫入射頻識別標籤。測試主機11的射頻識別讀取裝置讀取處理主機10電腦主機的射頻識別標籤,取得Head1的溫度26.6℃以及Head2的溫度26.3℃,並將Head1的溫度26.6℃、Head2的溫度26.3℃寫入一個暫存檔案File_Head。處理主機10與測試主機11開始執行標準樣品積體電路專屬的溫度測試程序,在此實施例中例如 測得標準樣品積體電路105的溫度量測值為26.5℃,此溫度量測值26.5℃暫存於測試程序宣告的變數Golden_Temp。測試程序開啟暫存檔案File_Head,讀入Head1的溫度26.6℃、Head2的溫度26.3℃,26.6℃暫存於測試程序宣告的變數Head1_Temp、26.3℃暫存於測試程序宣告的變數Head2_Temp。測試程序計算出適用於被測試積體電路的溫度測試規格,計算方式如下:Head2_Temp+2=26.3+2=28.3℃,此28.3℃暫存於測試程序宣告的變數Spec_Max;Head2_Temp-2=26.3-2=24.3℃,24.3℃暫存於測試程序宣告的變數Spec_Min。測試程序計算出標準樣品積體電路105溫度調整值:Golden_Temp-Head1_Temp=26.5-26.6=-0.1℃,此-0.1℃暫存於測試程序宣告的變數Golden_Offset。 In this embodiment, the detailed method of the modified temperature test combining the above two embodiments is as follows. First, the standard sample integrated circuit (Golden IC) 105 and the tested integrated circuit 104 are sent from the feeding area of the processing host 10 to the heating tray of the processing host 10 for preheating. After that, the standard sample integrated circuit 105 and the tested integrated circuit 104 are placed on the transfer shuttle, and the transfer shuttle transfers the standard sample integrated circuit 105 and the tested integrated circuit 104 to the test chamber 101. The integrated circuit suction head 103 of the test chamber 101 places the standard sample integrated circuit 105 and the tested integrated circuit 104 from the transfer shuttle to the test position. Taking the configuration of FIG. 1 as an example, the standard sample integrated circuit 105 is placed at the first position corresponding to Head 1 in the suction head 103, and the tested integrated circuit 104 is placed at the second position corresponding to Head 2 in the suction head 103. The processing host 10 extracts the temperature of Head 1: 26.6, and the temperature of Head 2: 26.3. The processing host 10 writes the temperature of Head 1: 26.6°C and the temperature of Head 2: 26.3°C into the RF identification tag. The RF identification reader of the test host 11 reads the RF identification tag of the computer host of the processing host 10, obtains the temperature of Head 1 of 26.6°C and the temperature of Head 2 of 26.3°C, and writes the temperature of Head 1 of 26.6°C and the temperature of Head 2 of 26.3°C into a temporary file File_Head. The processing host 10 and the test host 11 start to execute the temperature test program dedicated to the standard sample integrated circuit. In this embodiment, for example, the temperature measurement value of the standard sample integrated circuit 105 is measured to be 26.5°C, and this temperature measurement value 26.5°C is temporarily stored in the variable Golden_Temp declared in the test program. The test program opens the temporary file File_Head, reads the temperature of Head1 (26.6°C) and Head2 (26.3°C), and temporarily stores 26.6°C in the variable Head1_Temp and 26.3°C in the variable Head2_Temp declared in the test program. The test program calculates the temperature test specification applicable to the tested integrated circuit as follows: Head2_Temp+2=26.3+2=28.3°C, and this 28.3°C is temporarily stored in the variable Spec_Max declared in the test program; Head2_Temp-2=26.3-2=24.3°C, and 24.3°C is temporarily stored in the variable Spec_Min declared in the test program. The test program calculates the temperature adjustment value of the standard sample integrated circuit 105: Golden_Temp-Head1_Temp=26.5-26.6=-0.1℃. This -0.1℃ is temporarily stored in the variable Golden_Offset declared by the test program.

之後,開始對被測試積體電路104進行專屬的溫度測試程序。在此實施例中例如測得被測試積體電路104的輸出溫度值為27.5℃,此27.5℃暫存於測試程序宣告的變數IC_Temp。測試程序計算被測試積體電路104經調整後的最終溫度結果:IC_Temp-Golden_Offset=27.5-(-0.1)=27.6,此27.6℃暫存於測試程序宣告的變數IC_Temp_Final。測試程序判斷被測試積體電路104是否通過溫度測試,根據下列判斷式:Spec_Min<IC_Temp_Final<Spec_Max,24.3℃<27.6℃<28.3℃。故,被測試積體電路104通過溫度測試。之後,此次的被測試積體電路104將被分類至出料區。 After that, a dedicated temperature test procedure is started for the tested integrated circuit 104. In this embodiment, for example, the output temperature value of the tested integrated circuit 104 is measured to be 27.5°C, and this 27.5°C is temporarily stored in the variable IC_Temp declared by the test procedure. The test program calculates the final temperature result of the tested integrated circuit 104 after adjustment: IC_Temp-Golden_Offset=27.5-(-0.1)=27.6, and this 27.6°C is temporarily stored in the variable IC_Temp_Final declared by the test program. The test program determines whether the tested integrated circuit 104 passes the temperature test according to the following judgment formula: Spec_Min<IC_Temp_Final<Spec_Max, 24.3°C<27.6°C<28.3°C. Therefore, the tested integrated circuit 104 passes the temperature test. Afterwards, the tested integrated circuit 104 will be classified into the discharge area.

所有的被測試積體電路104都重複前述步驟,直至完成所有積體電路的測試,本案的運作流程與方法,其目的就是讓所有具備溫度感測應用功能的積體電路,在進行溫度測試的時候透過感測實際的環境溫度,並利用標準樣品積體電路的調整值對於溫度感測的結果做出修正,確保通過溫度測試的每顆積體電路都有相對於目前一般做法更為精確的溫度感測能力。 All the tested integrated circuits 104 repeat the above steps until the test of all integrated circuits is completed. The purpose of the operation process and method of this case is to allow all integrated circuits with temperature sensing application functions to sense the actual ambient temperature during temperature testing, and use the adjustment value of the standard sample integrated circuit to correct the temperature sensing result, so as to ensure that each integrated circuit that passes the temperature test has a more accurate temperature sensing capability than the current general practice.

上述實施例中,雖然是以一個被測試積體電路104舉例,實際使用上可同時或以分時多工的方式,用於多個被測試積體電路104。,故本發明不以此為限。另外,上述測試程序所針對每個被測試積體電路是以吸取頭量測溫度加減2℃作為溫度測試規格範圍,實際使用上,溫度測試規格也可以是加減1℃作為溫度測試規格範圍,故本發明並不限定溫度測試規格範圍,只要是利用吸取頭被量測出實際溫度,適應性地調整溫度測試規格,就應當屬於本發明的範圍。 In the above embodiment, although a tested integrated circuit 104 is used as an example, in actual use, it can be used for multiple tested integrated circuits 104 simultaneously or in a time-division multiplexing manner. Therefore, the present invention is not limited to this. In addition, the above test procedure is for each tested integrated circuit. The temperature measured by the suction head is plus or minus 2°C as the temperature test specification range. In actual use, the temperature test specification can also be plus or minus 1°C as the temperature test specification range. Therefore, the present invention does not limit the temperature test specification range. As long as the actual temperature is measured by the suction head, the temperature test specification is adaptively adjusted, which should belong to the scope of the present invention.

根據上述實施例,本發明可以被歸納為一種具有測試溫度功能之積體電路的測試校準方法,圖2繪示為本發明一較佳實施例的具有測試溫度功能之積體電路的測試校準方法之流程圖。請參考圖2,此具有測試溫度功能之積體電路的測試校準方法包括下列步驟: According to the above-mentioned embodiments, the present invention can be summarized as a test and calibration method for an integrated circuit with a test temperature function. FIG2 is a flow chart of a test and calibration method for an integrated circuit with a test temperature function according to a preferred embodiment of the present invention. Referring to FIG2, the test and calibration method for an integrated circuit with a test temperature function includes the following steps:

步驟S201:開始。 Step S201: Start.

步驟S202:將一溫度測試裝置設置到一指定測試溫度。 Step S202: Set a temperature testing device to a specified testing temperature.

步驟S203:將一標準樣品積體電路以及多個被測試積體電路運輸進入一溫度測試裝置。如上述實施例,標準樣品積體電路105和被測試積體電路104皆進入測試倉室101。 Step S203: transport a standard sample integrated circuit and multiple tested integrated circuits into a temperature testing device. As in the above embodiment, the standard sample integrated circuit 105 and the tested integrated circuit 104 both enter the testing chamber 101.

步驟S204:根據標準樣品積體電路105所測試的溫度以及設定的指定測試溫度,讀取出一偏差值(Offset)。 Step S204: Read out an offset value (Offset) based on the temperature tested by the standard sample integrated circuit 105 and the set designated test temperature.

步驟S205:將每一個被測試積體電路所輸出的溫度扣除偏差值,獲得對應之多數個溫度測試值。 Step S205: Subtract the deviation value from the temperature output by each tested integrated circuit to obtain a plurality of corresponding temperature test values.

步驟S206:將該些溫度測試值中,在合格範圍規格內之溫度測試值所對應之被測試積體電路作為合格之積體電路。 Step S206: The tested integrated circuit corresponding to the temperature test value within the qualified range specification among the temperature test values is regarded as a qualified integrated circuit.

上述實施例是標準樣品積體電路105與被測試積體電路104放至於同一條件下的實施例。以下則是浮動規格的溫度測試實施例。圖3繪示為本發明一較佳實施例的具有測試溫度功能之積體電路的測試校準方法之流程圖。請參考圖3,此具有測試溫度功能之積體電路的測試校準方法包括下列步驟: The above-mentioned embodiment is an embodiment in which the standard sample integrated circuit 105 and the tested integrated circuit 104 are placed under the same conditions. The following is a temperature test embodiment of a floating specification. FIG3 is a flow chart of a test and calibration method for an integrated circuit with a test temperature function according to a preferred embodiment of the present invention. Please refer to FIG3. This test and calibration method for an integrated circuit with a test temperature function includes the following steps:

步驟S301:開始。 Step S301: Start.

步驟S302:將一溫度測試裝置設置到一指定測試溫度。 Step S302: Set a temperature testing device to a specified testing temperature.

步驟S303:將多個被測試積體電路運輸進入一溫度測試裝置。 Step S303: transport multiple tested integrated circuits into a temperature testing device.

步驟S304:在運輸被測試積體電路進入溫度測試裝置時,透過運輸設備,量測每一被測試積體電路對應之地區溫度。如上述實施例所述,此實施例中,標準樣品積體電路是非必要。即便沒有標準樣品積體電路亦可。 Step S304: When the tested integrated circuit is transported into the temperature testing device, the temperature of the area corresponding to each tested integrated circuit is measured through the transport equipment. As described in the above embodiment, in this embodiment, the standard sample integrated circuit is not necessary. Even if there is no standard sample integrated circuit.

步驟S305:將被測試積體電路對應之地區溫度傳送至測試主機。 Step S305: Transmit the regional temperature corresponding to the tested integrated circuit to the test host.

步驟S306:將上述地區溫度的一預設範圍,作為對應上述被測試積體電路對應之合格範圍規格。如上述實施例所述,測試主機11收到上述特定積體電路吸取頭103當時測得溫度24.5℃後,以+/-1℃做為測試規格,測試規格就是(24.5℃-1℃)~(24.5℃+1℃)=23.5℃~25.5℃。 Step S306: A preset range of the temperature in the above-mentioned area is used as the qualified range specification corresponding to the above-mentioned tested integrated circuit. As described in the above-mentioned embodiment, after the test host 11 receives the temperature of 24.5℃ measured by the above-mentioned specific integrated circuit suction head 103, +/-1℃ is used as the test specification, and the test specification is (24.5℃-1℃)~(24.5℃+1℃)=23.5℃~25.5℃.

步驟S307:將每一個被測試積體電路所輸出的溫度,作為對應之多數個溫度測試值。 Step S307: The temperature output by each tested integrated circuit is used as the corresponding plurality of temperature test values.

步驟S308:將溫度測試值中,在合格範圍規格內之溫度測試值所對應之被測試積體電路作為合格之積體電路。 Step S308: The tested integrated circuit corresponding to the temperature test value within the qualified range specification is regarded as a qualified integrated circuit.

上述實施例是每一個被測試積體電路104皆測試地區溫度,並採用浮動規格的實施例。以下則是混合浮動規格以及將標準樣品積體電路(Golden IC)放置於同一環境的溫度測試實施例。圖4繪示為本發明一較佳實施例的具有測試溫度功能之積體電路的測試校準方法之流程圖。請參考圖4,此具有測試溫度功能之積體電路的測試校準方法包括下列步驟: The above-mentioned embodiment is an embodiment in which each tested integrated circuit 104 has a test area temperature and adopts a floating specification. The following is a temperature test embodiment with a mixed floating specification and placing a standard sample integrated circuit (Golden IC) in the same environment. FIG4 is a flow chart of a test and calibration method for an integrated circuit with a test temperature function in a preferred embodiment of the present invention. Please refer to FIG4. This test and calibration method for an integrated circuit with a test temperature function includes the following steps:

步驟S401:開始。 Step S401: Start.

步驟S402:將一溫度測試裝置設置到一指定測試溫度。 Step S402: Set a temperature testing device to a specified testing temperature.

步驟S403:將一標準樣品積體電路以及多個被測試積體電路運輸進入一溫度測試裝置。 Step S403: transport a standard sample integrated circuit and a plurality of tested integrated circuits into a temperature testing device.

步驟S404:根據標準樣品積體電路的地區溫度,以及標準樣品積體電路所測試的溫度,讀取出一偏差值。如上述實施例的Head1的溫度26.6℃;標準樣品積體電路105的溫度量測值(Golden_Temp)為26.5℃,獲得-0.1℃的偏差值(Golden_Offset)。 Step S404: Read out a deviation value based on the regional temperature of the standard sample integrated circuit and the temperature tested by the standard sample integrated circuit. For example, the temperature of Head1 in the above embodiment is 26.6°C; the temperature measurement value (Golden_Temp) of the standard sample integrated circuit 105 is 26.5°C, and a deviation value (Golden_Offset) of -0.1°C is obtained.

步驟S405:量測每一被測試積體電路對應之地區溫度。 Step S405: Measure the temperature of the area corresponding to each tested integrated circuit.

步驟S406:將上述地區溫度的一預設範圍,作為對應上述被測試積體電路對應之合格範圍規格。 Step S406: Use a preset range of the temperature in the above-mentioned area as the qualified range specification corresponding to the above-mentioned tested integrated circuit.

步驟S407:將每一個被測試積體電路所輸出的溫度,扣除偏差值,獲得對應之多數個溫度測試值。如上述實施例所述,IC_Temp-Golden_Offset=27.5-(-0.1)=27.6,此27.6℃暫存於測試程序宣告的變數IC_Temp_Final。 Step S407: Deduct the deviation value from the temperature output by each tested integrated circuit to obtain the corresponding multiple temperature test values. As described in the above embodiment, IC_Temp-Golden_Offset=27.5-(-0.1)=27.6, and this 27.6℃ is temporarily stored in the variable IC_Temp_Final declared by the test program.

步驟S408:將該些溫度測試值中,在合格範圍規格內之溫度測試值所對應之被測試積體電路作為合格之積體電路。 Step S408: The tested integrated circuit corresponding to the temperature test value within the qualified range specification among the temperature test values is regarded as a qualified integrated circuit.

綜合以上所述,本發明之一實施例利用將標準樣品積體電路與被測試積體電路同時送入溫度測試裝置,讓標準樣品積體電路與被測試積體電路處於相同環境,並且讀取出標準樣品積體電路輸出的溫度值,藉此,和待測溫度比對以找出偏移值,藉由上述偏移值修正被測試積體電路的輸出溫度,以判定被測試積體電路是否合格。另外,在本發明之另一實施例中,上述溫度測試裝置在測量被測試積體電路前,會先測量被測試積體電路附近的地區溫度,藉此獲得每一個被測試積體電路對應的合格溫度範圍。如此,更可以減少測試的誤差,增加測試準確度。 In summary, one embodiment of the present invention utilizes the method of simultaneously sending a standard sample integrated circuit and a tested integrated circuit into a temperature testing device, placing the standard sample integrated circuit and the tested integrated circuit in the same environment, and reading the temperature value output by the standard sample integrated circuit, thereby comparing it with the temperature to be tested to find out the offset value, and using the offset value to correct the output temperature of the tested integrated circuit to determine whether the tested integrated circuit is qualified. In addition, in another embodiment of the present invention, the temperature testing device will first measure the temperature of the area near the tested integrated circuit before measuring the tested integrated circuit, thereby obtaining the qualified temperature range corresponding to each tested integrated circuit. In this way, the test error can be reduced and the test accuracy can be increased.

應當理解,本文描述的示例和實施例僅用於說明目的,並且鑑於其的各種修改或改變將被建議給本領域技術人員,並且將被包括在本申請的精神和範圍以及所附權利要求的範圍之內。 It should be understood that the examples and embodiments described herein are for illustrative purposes only, and that various modifications or changes thereto will be suggested to those skilled in the art and are to be included within the spirit and scope of the present application and the scope of the appended claims.

S301~S308:本發明一較佳實施例的具有測試溫度功能之積體電路的測試校準方法之流程步驟 S301~S308: Process steps of a test calibration method for an integrated circuit with a test temperature function according to a preferred embodiment of the present invention

Claims (8)

一種具有測試溫度功能之積體電路的測試校準方法,包括:將一溫度測試裝置設置到一指定測試溫度;將一標準樣品積體電路以及多個被測試積體電路運輸進入該溫度測試裝置;根據該標準樣品積體電路所測試的溫度以及所設定的該指定測試溫度,獲得一偏差值;將每一個被測試積體電路所輸出的溫度扣除該偏差值,獲得對應之多數個溫度測試值;以及將該些溫度測試值中,在合格範圍規格內之溫度測試值所對應之被測試積體電路作為合格之積體電路,其中,在運輸被測試積體電路進入該溫度測試裝置時,更包括:透過運輸設備,量測每一該些被測試積體電路對應之地區溫度;將該些被測試積體電路對應之地區溫度傳送至測試主機;以及將該些地區溫度的一預設範圍,作為對應上述被測試積體電路對應之合格範圍規格。 A test calibration method for an integrated circuit with a test temperature function, comprising: setting a temperature test device to a specified test temperature; transporting a standard sample integrated circuit and a plurality of tested integrated circuits into the temperature test device; obtaining a deviation value according to the temperature tested by the standard sample integrated circuit and the set specified test temperature; deducting the deviation value from the temperature output by each tested integrated circuit to obtain a plurality of corresponding temperature test values; and In the test value, the tested integrated circuit corresponding to the temperature test value within the qualified range specification is regarded as a qualified integrated circuit, wherein when the tested integrated circuit is transported into the temperature testing device, it further includes: measuring the regional temperature corresponding to each of the tested integrated circuits through the transportation equipment; transmitting the regional temperature corresponding to the tested integrated circuits to the test host; and using a preset range of the regional temperature as the qualified range specification corresponding to the above-mentioned tested integrated circuit. 根據請求項1所述之具有測試溫度功能之積體電路的測試校準方法,其中,該運輸設備包括多個積體電路吸引裝置,其中,每一該些積體電路吸引裝置分別包括一溫度測量裝置,用以在放置每一該些被測試積體電路時,量測每一該些被測試積體電路對應之地區溫度。 According to the test calibration method of the integrated circuit with the test temperature function described in claim 1, the transport equipment includes a plurality of integrated circuit attraction devices, wherein each of the integrated circuit attraction devices includes a temperature measuring device for measuring the temperature of the area corresponding to each of the tested integrated circuits when placing each of the tested integrated circuits. 一種具有測試溫度功能之積體電路的測試校準方法,包括:將一溫度測試裝置設置到一指定測試溫度;將多個被測試積體電路運輸進入該溫度測試裝置;在運輸被測試積體電路進入該溫度測試裝置時,透過運輸設備,量測每一該些被測試積體電路對應之地區溫度;將該些被測試積體電路對應之地區溫度傳送至測試主機;將該些地區溫度的一預設範圍,作為對應上述被測試積體電路對應之合格範圍規格;將每一個被測試積體電路所輸出的溫度,作為對應之多數個溫度測試值;以及將該些溫度測試值中,在合格範圍規格內之溫度測試值所對應之被測試積體電路作為合格之積體電路。 A test calibration method for an integrated circuit with a test temperature function includes: setting a temperature test device to a specified test temperature; transporting a plurality of tested integrated circuits into the temperature test device; when transporting the tested integrated circuits into the temperature test device, measuring the temperature of the area corresponding to each of the tested integrated circuits through the transport equipment; The regional temperatures are transmitted to the test host; a preset range of the regional temperatures is used as the qualified range specification corresponding to the above-mentioned tested integrated circuit; the temperature output by each tested integrated circuit is used as the corresponding plurality of temperature test values; and the tested integrated circuit corresponding to the temperature test value within the qualified range specification among the temperature test values is used as a qualified integrated circuit. 根據請求項3所述之具有測試溫度功能之積體電路的測試校準方法,更包括:將一標準樣品積體電路以及上述多個被測試積體電路運輸進入該溫度測試裝置;以及根據該標準樣品積體電路所測試的溫度以及該標準樣品積體電路所對應的地區溫度,獲得一偏差值。 The test calibration method for an integrated circuit with a temperature test function according to claim 3 further includes: transporting a standard sample integrated circuit and the plurality of tested integrated circuits into the temperature test device; and obtaining a deviation value according to the temperature tested by the standard sample integrated circuit and the temperature of the area corresponding to the standard sample integrated circuit. 一種溫度測試裝置,包括:一處理主機,包括:一測試倉室,用以提供並維持一指定測試溫度;以及 多數個測試臺座,配置於該測試倉室,用以容納多數個被測試積體電路;一測試主機,接收該處理主機的回傳資訊,以判定該些被測試積體電路是否符合規範;其中,一標準樣品積體電路以及該些被測試積體電路被運輸進入該測試倉室;其中,該處理主機回傳每一個被測試積體電路所輸出的溫度以及該標準樣品積體電路所測試的溫度;其中,根據該標準樣品積體電路所測試的溫度以及所設定的該指定測試溫度,獲得一偏差值;其中,該測試主機將每一個被測試積體電路所輸出的溫度,扣除該偏差值,獲得對應之多數個溫度測試值,並將該些溫度測試值中,在合格範圍內之溫度測試值對應之被測試積體電路作為符合規範之被測試積體電路,其中,該處理主機更包括:多個運輸積體電路設備,其中,該些運輸積體電路設備將該些被測試積體電路放置至對應之測試臺座時,運輸積體電路設備量測每一該些被測試積體電路對應之地區溫度;其中,該處理主機將該些被測試積體電路對應之地區溫度傳送至該測試主機;其中,該測試主機將該些地區溫度的一預設範圍,作為對應上述被測試積體電路對應之合格範圍規格; 其中,該測試主機將每一個被測試積體電路所輸出的溫度,扣除該偏差值,作為對應之多數個溫度測試值;以及其中,該測試主機將該些溫度測試值中,在對應之合格範圍規格內的溫度測試值所對應之被測試積體電路,作為合格之積體電路。 A temperature test device comprises: a processing host, including: a test chamber for providing and maintaining a specified test temperature; and a plurality of test benches, arranged in the test chamber, for accommodating a plurality of tested integrated circuits; a test host, receiving feedback information from the processing host to determine whether the tested integrated circuits meet the specifications; wherein a standard sample integrated circuit and the tested integrated circuits are transported into the test chamber; The processing host returns the temperature output by each tested integrated circuit and the temperature tested by the standard sample integrated circuit; wherein a deviation value is obtained according to the temperature tested by the standard sample integrated circuit and the set specified test temperature; wherein the test host deducts the deviation value from the temperature output by each tested integrated circuit to obtain a plurality of corresponding temperature test values, and among the temperature test values, the temperature within the qualified range is The tested integrated circuits corresponding to the test values are taken as the tested integrated circuits that meet the specifications, wherein the processing host further comprises: a plurality of transport integrated circuit devices, wherein when the transport integrated circuit devices place the tested integrated circuits on the corresponding test benches, the transport integrated circuit devices measure the temperature of the regions corresponding to each of the tested integrated circuits; wherein the processing host transmits the temperatures of the regions corresponding to the tested integrated circuits to the testing host; wherein , the test host uses a preset range of the temperature of the regions as the qualified range specification corresponding to the above-mentioned tested integrated circuit; Wherein, the test host uses the temperature output by each tested integrated circuit, minus the deviation value, as the corresponding plurality of temperature test values; and wherein, the test host uses the tested integrated circuit corresponding to the temperature test value within the corresponding qualified range specification among the temperature test values as a qualified integrated circuit. 一種溫度測試裝置,包括:一處理主機,包括:一測試倉室,用以提供並維持一指定測試溫度;以及多數個測試臺座,配置於該測試倉室,用以容納多數個被測試積體電路;一測試主機,接收該處理主機的回傳資訊,以判定該些被測試積體電路是否符合規範;其中,該處理主機將該些被測試積體電路對應之地區溫度傳送至該測試主機;其中,該測試主機將該些地區溫度的一預設範圍,作為對應上述被測試積體電路對應之合格範圍規格;其中,該測試主機將每一個被測試積體電路所輸出的溫度,作為對應之多數個溫度測試值;以及其中,該測試主機將該些溫度測試值中,在對應之合格範圍規格內的溫度測試值所對應之被測試積體電路,作為合格之積體電路。 A temperature testing device comprises: a processing host, comprising: a test chamber for providing and maintaining a specified test temperature; and a plurality of test benches, arranged in the test chamber, for accommodating a plurality of tested integrated circuits; a test host, receiving feedback information from the processing host to determine whether the tested integrated circuits meet the specifications; wherein the processing host transmits the regional temperatures corresponding to the tested integrated circuits to the test host The test host uses a preset range of the temperatures of the regions as the qualified range specification corresponding to the above-mentioned tested integrated circuit; the test host uses the temperature output by each tested integrated circuit as the corresponding plurality of temperature test values; and the test host uses the tested integrated circuit corresponding to the temperature test value within the corresponding qualified range specification among the temperature test values as a qualified integrated circuit. 根據請求項6所述之溫度測試裝置,其中,該處理主機更包括: 多個運輸積體電路設備,其中,該些運輸積體電路設備將該些被測試積體電路放置至對應之測試臺座時,運輸積體電路設備量測每一該些被測試積體電路對應之地區溫度。 According to the temperature test device described in claim 6, the processing host further includes: A plurality of transport integrated circuit devices, wherein when the transport integrated circuit devices place the tested integrated circuits on corresponding test platforms, the transport integrated circuit devices measure the temperature of the area corresponding to each of the tested integrated circuits. 根據請求項6所述之溫度測試裝置,其中,一標準樣品積體電路以及該些被測試積體電路被運輸進入該測試倉室;其中,該處理主機回傳每一個被測試積體電路所輸出的溫度以及該標準樣品積體電路所測試的溫度;其中,根據該標準樣品積體電路所測試的溫度以及該標準樣品積體電路所對應之地區溫度,獲得一偏差值;其中,該測試主機將每一個被測試積體電路所輸出的溫度,扣除偏差值,獲得對應之多數個溫度測試值。 According to the temperature testing device described in claim 6, a standard sample integrated circuit and the tested integrated circuits are transported into the test chamber; the processing host returns the temperature output by each tested integrated circuit and the temperature tested by the standard sample integrated circuit; a deviation value is obtained according to the temperature tested by the standard sample integrated circuit and the temperature of the region corresponding to the standard sample integrated circuit; the test host deducts the deviation value from the temperature output by each tested integrated circuit to obtain a plurality of corresponding temperature test values.
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