TWI809518B - Automatic mirror precision detection system and its detection method - Google Patents

Abstract

An automatic mirror precision detection system includes a lens uploading device, a mirror detection device and a lens downloading device. The lens uploading device is used to input a lens, and the mirror surface detection device is used to receive the lens carried by the lens uploading device. The mirror surface detection device can perform optical interference on the mirror surface of the lens to generate a Newton ring image. Image acquisition of the Newton ring image to obtain an interference frame, and control the displacement of the lens to capture the local interference fringes in the Newton ring image to obtain a detection frame, and determine that the mirror surface of the lens does not conform to Quality specification; the lens downloading device is used to receive the lens carried by the mirror inspection device and meet the quality specification and output it. An automatic mirror precision detection method is also disclosed herein.

Description

Automatic mirror precision detection system and its detection method

The invention is related to the application field of lens detection; in particular, it refers to an automatic mirror precision detection system and a detection method thereof.

With the evolution of the times, the shipments of optical imaging products continue to grow, which in turn drives the rapid growth of optical component manufacturers. Coupled with the evolution of technology, mass production of optical components has become easier than before, the time for producing optical components has been shortened, and the cost has also begun to decrease. As a result, the optical component market has also flourished.

The current optical components can be divided into two categories: optical plastic lenses and optical glass lenses according to their materials. The differences between the two mainly lie in cost, quality, weight, and durability. For example, the advantages of optical glass lenses are better quality and durability, but higher cost and heavier weight, so they are more suitable for professional camera lenses; compared with optical plastic lenses, the advantages are lower cost and Lighter in weight, but relatively poor in quality and durability, plastic lenses are suitable for use in mobile phone lenses.

Since the current optical manufacturing process has not yet developed fully automatic machinery and equipment, the above-mentioned optical components require a lot of labor costs in the process inspection; for optical glass lenses, after the optical glass lens is ground, the surface accuracy of the lens needs to be manually Inspection, the existing surface accuracy inspection method is to use the Newton ring pattern projected by the laser interferometer on the mirror surface, and compare it manually according to the standard image. Except for the differences in the specifications and inspection standards of different lenses, the inspection The process takes a lot of time to adjust the position, and the detection of the mirror surface does not Accurate standard data is used to judge whether the optical glass lens meets the quality specification, so as to increase the error rate of lens judgment.

Therefore, how to construct a highly intelligent and fully automatic precision optical glass lens accuracy inspection system that meets the accuracy inspection of the lens surface to replace the manual inspection method is an important issue for designers.

In view of this, the purpose of the present invention is to provide an automatic mirror surface precision detection system and its detection method, which can automatically detect the surface precision of the lens with high intelligence, in addition to effectively saving labor costs, and can also improve the surface precision detection of optical glass lenses. Accuracy.

In order to achieve the above purpose, the present invention provides an automatic mirror precision inspection system, which includes a lens uploading device, a mirror inspection device and a lens downloading device. The lens uploading device inputs a lens; the mirror detection device is connected to the lens uploading device to receive the lens carried by the lens uploading device, and the mirror detection device includes an axial adjustment module, an optical interference module, An image processing module and an image interpretation module, the axial adjustment module can provide the lens placement, the optical interference module performs optical interference on the mirror surface of the lens to generate a Newton ring image, the Newton ring The image has a central ring and a plurality of rings of interference fringes surrounding the central ring. The image processing module captures the image of the Newton ring with the central ring as the center to obtain an interference frame and controls the The axial adjustment module drives the lens to shift, so that the central ring in the interference image is shifted, so as to capture the local interference fringes in the Newton ring image to obtain a detection image. The image interpretation module A set of two adjacent interference fringes in the detection screen defines a plurality of image feature points, and calculates a Yass detection value and a library of oblique detection values for these image feature points. The image interpretation module presets a Yas tolerance interval and a library skew tolerance interval; if the Yas detection value exceeds the Yas Allowable interval, or the library tilt detection value exceeds the library tilt allowable interval, the image interpretation module determines that the mirror surface of the lens does not meet the quality standard; if the Yass detection value does not exceed the Yass allowable interval, and the If the library inclination detection value does not exceed the allowable range of the library inclination, the image interpretation module determines that the mirror surface of the lens meets the quality specification; Specification of the lens removed.

Another object of the present invention is to provide an automatic mirror surface precision detection method, which includes the following steps: step A, optically interfere with one of the mirror surfaces of a lens to generate a Newton ring image; step B, use one of the Newton ring images The central ring is used as the center to capture an image, and an interference picture is obtained, in which there are a plurality of rings of interference fringes surrounding the central ring; step C, controlling the displacement of the lens so that the central ring in the interference picture is Move and capture the local interference fringes in the Newton ring image to obtain a detection frame; step D, in the detection frame, a plurality of image feature points are defined and distributed on two adjacent interference fringes, and then These image feature points are calculated a Yass detection value and a library skew detection value; and step E, analyzing whether the Yass detection value exceeds a Yass allowable interval, and whether the library skew detection value exceeds a library If the Yass test value exceeds the Yass allowable range, or if the library skew test value exceeds the library tilt allowable range, it is determined that the mirror surface of the lens does not meet the quality standard; if the Yass test value is not If it exceeds the Yass allowable range, and the library tilt detection value does not exceed the library tilt allowable range, then it is determined that the mirror surface of the lens meets the quality standard.

The effect of the present invention is that the automatic mirror surface precision detection system and method can automatically detect the surface precision of the lens with high intelligence. In addition to effectively saving labor costs, in the mirror surface detection equipment, the image processing module 33 can automatically control the lens. Axial displacement is carried out, and the image interpretation module can analyze the detection screen of the Yass detection value and the library inclination detection setting value, and judge whether the surface precision of the optical glass lens meets the quality specification; in addition In addition, the mirror inspection equipment can also automatically flip the optical glass lens to provide The effect of the surface precision of the mirror surfaces on both sides is to achieve the purpose of improving the accuracy of the surface precision detection of optical glass lenses.

〔this invention〕

100: Automatic mirror surface precision detection system

110: lens

110A: the first mirror

110B: second mirror surface

10: Lens upload device

20:Thickness testing equipment

30: Mirror inspection equipment

30A: The first mirror detection area

30B: Second mirror detection area

30C: Buffer

31: Axial adjustment module

32: Optical interference module

33: Image processing module

331: image capture unit

332: Interference image judging unit

333:Spatial Calculus Unit

34: Image Interpretation Module

341: Surface precision calculation unit

342: Data collection unit

343: Data analysis unit

35: Flip Module

40: Lens download device

50: Arm transfer module

S1: The first detection area

S2: Second detection area

S3: The third detection area

S4: The fourth detection area

P: image feature point

A: Newton ring image

r: center ring

f: interference fringes

D: center thickness

A~F: steps

Fig. 1 is a system architecture diagram of an automatic mirror precision detection system according to a preferred embodiment of the present invention.

Fig. 2 is a schematic diagram of the lens structure of an automatic mirror precision detection system according to a preferred embodiment of the present invention.

Fig. 3 is a structural block diagram of the mirror surface inspection equipment of the automatic mirror surface precision inspection system of a preferred embodiment of the present invention.

FIG. 4 is a structural block diagram of an image processing module of an automated mirror precision inspection system according to a preferred embodiment of the present invention.

FIG. 5 is a structural block diagram of an image interpretation processing module of an automated mirror surface precision inspection system according to a preferred embodiment of the present invention.

FIG. 6 is a schematic diagram of an interference picture of an automated mirror precision detection system according to a preferred embodiment of the present invention.

Fig. 7 is a schematic diagram of the change from the interference picture to the detection picture of the automated mirror surface precision testing system according to a preferred embodiment of the present invention.

Fig. 8 is a schematic diagram of the surface precision analysis of the detection screen of the automatic mirror surface precision detection system according to a preferred embodiment of the present invention.

FIG. 9 is a flow chart of the steps of the automatic mirror surface precision detection method in a preferred embodiment of the present invention.

FIG. 10 is a flow chart of image judgment of an automatic mirror precision detection method according to a preferred embodiment of the present invention.

Fig. 11 is a surface accuracy interpretation flow of an automatic mirror surface accuracy detection method in a preferred embodiment of the present invention map.

Fig. 12 is a flow chart of the newly added step F of the automatic mirror precision detection method according to a preferred embodiment of the present invention.

In order to illustrate the present invention more clearly, preferred embodiments are given and detailed descriptions are given below in conjunction with drawings. Please refer to Fig. 1 and Fig. 2, provide a kind of automatic mirror precision detection system 100 for a preferred embodiment of the present invention, in order to detect the surface precision of a lens 110; 110 has a first mirror surface 110A and a second mirror surface 110B opposite to the first mirror surface 110A; in other embodiments, the structure of the lens 110 can be selected from other lenses as required.

The automatic mirror surface precision detection system 100 includes a lens uploading device 10, a thickness detection device 20, a mirror surface detection device 30, a lens downloading device 40 and a plurality of arm transfer modules 50, wherein the arm transfer modules 50 It is a mechanical arm, which is individually arranged between the lens uploading device 10 and the thickness testing device 20, between the thickness testing device 20 and the mirror testing device 30, and between the mirror testing device 30 and the lens downloading device 40. Each of the arm transfer modules 50 is used to automatically transfer the lens 110; in other embodiments, the arm transfer modules 50 can be replaced with other automatic transfer components, and are not limited to mechanical arms.

The lens uploading device 10 is used to input the lens 110. In this embodiment, the lens 110 is placed on a tray, and then the lens 110 is input to the lens uploading device 10, but the input method of the lens 110 is not limited thereto.

The thickness testing device 20 is connected between the lens uploading device 10 and the mirror surface testing device 30, and is used to receive the lens 110 carried by the lens uploading device 10, and detect The central thickness D of the lens 110; as shown in FIG. 2, the thickness detection device 20 can first detect the center positions of the first mirror surface 110A and the second mirror surface 110B of the lens 110, and measure the first mirror surface 110A and the second mirror surface 110B. The central thickness D between the two mirror surfaces 110B.

The mirror inspection device 30 is located on one side of the thickness inspection device 20, and is used to receive the lens 110 carried by the thickness inspection device 20, and the mirror inspection device 30 can detect the surface accuracy of the lens 110; as shown in FIG. 3, the mirror detection device 30 includes a first mirror detection area 30A, a second mirror detection area 30B, and a buffer zone 30C, wherein the first mirror detection area 30A and the second mirror detection area 30B are respectively It is used to detect the surface accuracy of the lens 110, and the first mirror inspection area 30A and the second mirror inspection area 30B are respectively equipped with an axial adjustment module 31, an optical interference module 32, and an image processing module 33 And an image interpretation module 34, the difference between the first mirror inspection area 30A and the second mirror inspection area 30B is that the first mirror inspection area 30A is used to detect and judge the surface accuracy of the first mirror 110A of the lens 110 , the second mirror detection area 30B is used to detect and judge the surface accuracy of the second mirror 110B of the lens 110; the buffer zone 30C is located between the first mirror detection area 30A and the second mirror detection area 30B for Receiving the lens 110 carried by the first mirror detection area 30A, the buffer zone 30C is provided with a turning module 35 capable of turning the lens 110 from the first mirror 110A to the second mirror 110B, and then inputting the lens 110 The second mirror inspection area 30B performs surface precision inspection of the second mirror 110B.

Please refer to FIG. 3 to FIG. 5, the axial adjustment module 31 can provide the placement of the lens 110, and the axial adjustment module 31 can drive the lens 110 to perform axial displacement of at least the X axis, the Y axis, and the Z axis; The optical interference module 32 is an interferometer, which can perform optical interference on the mirror surface of the lens 110 to generate a Newton's ring image A, as shown in Figure 6, the Newton's ring image A has a central ring r and A plurality of rings of interference fringes f surround the central ring r; the image processing module 33 includes an image capture unit 331, an interference image judging unit 332 and a spatial processing unit 332. A calculation unit 333, the image capture unit 331 is used to capture an image of the mirror surface, and the image capture unit 331 first captures the image of the Newton ring image A centered on the central ring r to obtain An interference frame (refer to FIG. 6 ), the interference image judging unit 332 is used for judging whether there are deformation lines on the interference fringes of the Newton ring image A. The deformed lines of the interference fringes described herein refer to curved and irregular lines, which make the interference fringes form non-flat curves. If the interference fringes f have deformation lines, it is determined that the mirror surface of the lens 110 does not meet the quality standard; if the interference fringes f are flat curves without deformation lines, it is determined that the mirror surface of the lens 110 meets the quality standard.

The space calculation unit 333 defines four detection areas and at least eight detection directions for the Newton ring image A centered on the central ring r in the interference frame; as shown in FIG. 7 , the interference frame uses a plane as a center To illustrate, the space calculation unit 333 defines the Newton ring image A as a center with the central ring r as a first detection area S1, a second detection area S2, a third detection area S3 and a fourth detection area S4 , wherein the first detection area S1 is represented by the coordinate axis in the range of (Xi, Zc) and (Yb, Zc), and the second detection area S2 is represented by the coordinate axis in the range of (Xa, Zc) and (Yb, Zc) The range of the area, the third detection area S3 is located in the range of (Xa, Zc) and (Yj, Zc) with the coordinate axis, and the fourth detection area S4 is located in the area of (Xi, Zc) and (Yj, Zc) with the coordinate axis Zc), and the detection directions are evenly distributed in the first detection area S1, the second detection area S2, the third detection area S3 and the fourth detection area S4, and the spatial calculation unit 333 It is possible to control the axial adjustment module 31 to drive the lens 110 to perform axial displacement of at least two of the X-axis, Y-axis, and Z-axis according to each of the orientations, and generate the detection images individually in each of the detection areas (see eg FIG. 7 ), wherein the number of the interference fringes f in the detection frame is between 4 and 8.

Since the lens 110 first detects the central thickness D of the lens 110 in the thickness detection device 20, the space calculation unit 333 can reduce the thickness D in advance during the space interpretation process. The Z-axis variation factor of the lens 110 is used to efficiently adjust the displacement direction and position of the lens 110 to improve the efficiency of surface precision detection.

In other embodiments, the thickness detection device 20 can be omitted, as long as the mirror surface detection device 30 is connected to the lens uploading device 10 and can receive the lens 110 carried by the lens uploading device 10 for surface accuracy detection. It is not limited to detect the center thickness D of the lens 110 in advance; as long as the image processing module 33 can obtain at least one detection frame, it will be used as the effect of subsequent detection of surface accuracy.

The image interpretation module 34 defines a plurality of image feature points P in the two adjacent interference fringes in the detection screen, and calculates a Yass detection value and a library oblique detection value for these image feature points P; As shown in Figures 5 and 8, the image interpretation module 34 includes a surface precision calculation unit 341, a data collection unit 342, and a data analysis unit 343. The surface precision calculation unit 341 first distributes the image feature points P On the two adjacent interference fringes f; as shown in Figure 8, the image feature points P are six image feature points P, wherein four image feature points P are respectively arranged at the two ends of the adjacent two interference fringes, In addition, image feature points P are respectively set at the center positions of two adjacent interference fringes f, and the surface precision calculation unit 341 uses these image feature points P to calculate the distance between the midpoints of two adjacent interference fringes f. An adjacent distance of the aforementioned two interference fringes, a length distance between the corresponding two ends of the aforementioned two interference fringes, and an offset distance of one of the aforementioned two interference fringes, and according to the lens diameter, the adjacent distance, the The length distance and the offset distance are calculated to integrate the Yass detection value and the library tilt detection value.

The data collection unit 342 pre-stores the Yass tolerance interval and the library tilt tolerance interval; in this embodiment, the Yass tolerance interval and the library tilt tolerance interval are measured by collecting surface accuracy of multiple lenses 110 with different specifications The obtained Yass detection value and library skew inspection setting value are used to establish the standard Yass tolerance interval and the library skew tolerance interval, but not limited thereto; the data analysis unit 343 receives the Yass detection value and the library Slant detection set value, and from the data collection unit 342 Extracting the Yass allowable range and the database tilt allowable range for comparison to judge whether the lens 110 meets the quality standard; if the data analysis unit 343 analyzes that the Yass detection value exceeds the Yass allowable range, or the If the tilt detection value exceeds the allowable interval of the tilt in the library, it is determined that the mirror surface of the lens 110 does not meet the quality standard; If it does not exceed the allowable range of library tilt, it is determined that the mirror surface of the lens 110 meets the quality standard.

In addition, after the surface accuracy inspection of the first mirror surface 110A of the lens 110 by the first mirror inspection area 30A is completed, if the mirror surface of the lens 110 meets the quality standard, the lens 110 that meets the quality standard is input into the buffer zone 30C In this process, the mirror 110 is flipped from the first mirror 110A to the second mirror 110B by the flipping module 35 , and then input into the second mirror inspection area 30B for surface accuracy inspection of the second mirror 110B.

The lens downloading device 40 is connected to the mirror detection device 30, and is used to remove the lens 110 carried by the mirror detection device 30 and meets the quality specification. In this embodiment, the lens downloading device 40 can use The lens 110 that meets the quality specification and the lens 110 that does not meet the quality specification are individually removed by the arm transfer module 50 and placed in a specific position; in other embodiments, the lens downloading device 40 can use The lens 110 that meets the quality specification and the lens 110 that does not meet the quality specification are removed by the arm transfer module 50 and then sorted.

In this way, the automatic mirror surface precision detection system 100 of the present invention can automatically detect the surface precision of the lens with high intelligence. In addition to effectively saving labor costs, in the mirror surface detection device 30, the image processing module 33 can automatically control the lens 110 to perform At least two of the X-axis, Y-axis, and Z-axis are axially displaced, and the image interpretation module 34 can analyze the Yass detection value and the library tilt detection value on the detection screen, and interpret the optical glass Whether the surface precision of the mirror surface of the lens meets the quality standard, and improve the accuracy of the surface precision detection of the optical glass lens; in addition, the mirror surface The detection device 30 can also automatically flip the optical glass lens to provide the effect of detecting the surface accuracy of the mirror surfaces on both sides of the optical glass lens.

The following description is based on the automatic mirror surface precision detection system 100 to realize the automatic mirror surface precision detection method. Please refer to Fig. 9, the automatic mirror precision detection method includes the following steps:

In step A, optical interference is performed on the mirror surface of the lens 110 to generate the Newton ring image A; in this embodiment, the center thickness D of the lens 110 is measured first, and then the optical interference is performed on the mirror surface.

In step B, image capture is performed centering on the central ring r of the Newton ring image A, and the interference frame is obtained. In the interference frame, there are a plurality of rings of interference fringes f surrounding the central ring r; in this embodiment, As shown in Figure 10, after the interference picture is obtained, it can be judged whether the interference fringes f of the Newton ring image A in the interference picture have deformation lines; If the mirror surface does not meet the quality standard, stop the subsequent steps; if the interference fringes f are flat curves and have no deformation lines, it is preliminarily determined that the mirror surface of the lens 110 meets the quality standard, and proceed to step C.

Step C, controlling the displacement of the lens 110, shifting the central ring r in the interference frame and capturing the local interference fringes f in the Newton ring image A to obtain the detection frame; as shown in Figure 7 As shown, in this embodiment, four detection areas and at least eight detection directions are defined on the interference screen with the central ring r as the center, and then the lens 110 is controlled to perform at least X according to each detection direction. Two of the axis, Y axis and Z axis are axially displaced to individually generate the detection frame in each detection area, and the number of the interference fringes f in the detection frame is between 4 and 8.

In step D, a plurality of image feature points P are defined in the detection screen and distributed on two adjacent interference fringes f, and then the image feature points P are calculated for the Yass detection value and the library oblique detection value, wherein the calculation of the Yass detection value and the library oblique detection value is based on the distribution of the image feature points P to calculate the distance between the midpoints of two adjacent interference fringes f It is obtained by calculating an adjacent distance of , a length distance between the corresponding two ends of the aforementioned two interference fringes f, and an offset distance of one of the aforementioned two interference fringes f.

Step E, analyzing whether the Yass detection value exceeds the Yass tolerance interval, and whether the library skew detection value exceeds the library skews tolerance interval; as shown in Figure 11, if the Yass detection value exceeds the Yass Allowable range, or the library tilt detection value exceeds the library tilt tolerance range, then it is determined that the mirror surface of the lens 110 does not meet the quality specification; if the Yass detection value does not exceed the Yass tolerance range, and the library tilt detection value If it does not exceed the allowable range of library tilt, it is determined that the mirror surface of the lens 110 meets the quality standard.

Please refer to FIG. 12 , step F is also included after step E in this embodiment;

Step F, after the mirror surface on one side of the lens 110 is inspected, the lens 110 is turned over to the other mirror surface, and the above steps A to E are repeated to detect the quality specification of the other mirror surface of the lens 110 .

With the design of the present invention, the automatic mirror surface precision detection system 100 and the method can automatically detect the surface precision of the lens with high intelligence. In addition to effectively saving labor costs, in the mirror surface detection equipment 30, the image processing module 33 can automatically control The lens 110 undergoes axial displacement of at least two of the X-axis, Y-axis, and Z-axis, and the image interpretation module 34 can analyze the detection screen, the Yass detection value and the library tilt detection value, and Interpret whether the surface accuracy of the mirror surface of the optical glass lens meets the quality standard; in addition, the mirror inspection device 30 can also automatically flip the optical glass lens to provide the effect of detecting the surface accuracy of the mirror surfaces on both sides of the optical glass lens, so as to The purpose of improving the accuracy of surface precision detection of the optical glass lens is achieved.

The above description is only a preferred feasible embodiment of the present invention. It should be noted that the data listed in the above table is not intended to limit the present invention. After referring to the present invention, those with ordinary knowledge can make appropriate changes to its parameters or settings, but they should fall within the scope of the present invention. All equivalent changes made by applying the description of the present invention and the patent scope of the application should be included in the patent scope of the present invention.

100: Automatic mirror surface precision detection system 10: Lens upload device 20:Thickness testing equipment 30: Mirror inspection equipment 40: Lens download device 50: Arm transfer module

Claims (16)

An automatic mirror surface precision detection system is used to detect the surface precision of a lens. The automatic mirror surface precision detection system includes: a lens uploading device for inputting the lens; a mirror surface detection device for receiving the lens carried by the lens uploading device The lens, the mirror detection equipment includes an axial adjustment module, an optical interference module, an image processing module and an image interpretation module, wherein the axial adjustment module can provide the lens placement; The optical interference module performs optical interference on the mirror surface of the lens to generate a Newton ring image, the Newton ring image has a central ring and a plurality of rings of interference fringes surrounding the central ring; the image processing module uses the The central ring is used as the center to capture the image of the Newton ring to obtain an interference picture, and the axial adjustment module is controlled to drive the lens to shift, so that the central ring in the interference picture is offset, so that Capture the local interference fringes in the Newton ring image to obtain a detection frame; the image interpretation module defines a plurality of image feature points on two adjacent interference fringes in the detection frame, and analyzes the image features point to calculate an Yass detection value and a library skew detection setting value, the image interpretation module presets a Yass tolerance interval and a library skew tolerance interval; wherein, if the Yass detection value exceeds the Yass tolerance range, or the library tilt detection value exceeds the library tilt allowable range, the image interpretation module determines that the mirror surface of the lens does not meet the quality standards; if the Yass detection value does not exceed the Yass allowable range, and the library If the inclination detection value does not exceed the allowable range of inclination in the library, the image interpretation module determines that the mirror surface of the lens meets the quality specification; The lenses meeting the quality specifications are individually removed. The automatic mirror precision inspection system as described in claim 1, wherein the mirror inspection equipment includes a first mirror inspection area and a second mirror inspection area, the first mirror inspection The measuring area and the second mirror detection area respectively include the axial adjustment module, the optical interference module, the image processing module and the image interpretation module, and the lens has a first mirror and a second The mirror surface is opposite to the first mirror surface, the first mirror surface detection device is used for detecting and judging the first mirror surface, and the second mirror surface detection area is used for detecting and judging the second mirror surface. The automatic mirror precision inspection system as described in claim 2, wherein the mirror inspection equipment includes a buffer zone located between the first mirror inspection area and the second mirror inspection area for receiving the For the lens, the buffer zone is provided with an inverting module capable of inverting the lens from the first mirror to the second mirror, and then inputting the lens into the second mirror detection area. The automatic mirror surface precision detection system as described in claim 2, comprising a thickness detection device, the thickness detection device is located between the lens uploading device and the mirror surface detection device, and is used to receive the lens carried by the lens uploading device, the The thickness detection device detects the center positions of the first mirror and the second mirror, and measures the center thickness between the first mirror and the second mirror. The automatic mirror surface accuracy detection system as described in claim 4 includes a plurality of arm transfer modules, and the arm transfer modules are individually arranged between the lens uploading device and the thickness detection device, the thickness detection device and the thickness detection device. Between the mirror inspection equipment, and between the mirror inspection equipment and the lens downloading equipment, each of the arm transfer modules is used to automatically transport the lens. The automatic mirror surface precision detection system as described in Claim 1, wherein the axial adjustment module has a placement part for the lens to be placed, and the axial adjustment module can drive the lens to at least X-axis, Y-axis, Z-axis axial displacement of the shaft. The automatic mirror precision detection system as described in claim 6, wherein the image processing module has an image capture unit, an interference image judgment unit and a space calculation unit, the image capture unit is used to capture images of the mirror surface, the interference image judging unit is used to judge whether there are deformation lines on the interference fringes of the Newton ring image, and the space calculation unit takes the central ring as The center defines four detection areas and at least eight detection directions for the interference image, and the space calculation unit can control the axial adjustment module to drive the lens to move according to each detection direction, and individually in each detection area The detection screen is generated. The automatic mirror precision inspection system as described in Claim 7, wherein the number of the interference fringes in the inspection screen is between 4 and 8. The automatic mirror surface precision detection system as described in claim 1, wherein the image interpretation module has a surface precision calculation unit, and the surface precision calculation unit calculates the distance between the midpoints of two adjacent interference fringes by using the image feature points An adjacent distance of the aforementioned two interference fringes, a length distance between the corresponding two ends of the aforementioned two interference fringes, and an offset distance of one of the aforementioned two interference fringes, and according to the lens diameter, the adjacent distance, the The length distance and the offset distance are calculated to integrate the Yass detection value and the library tilt detection value. The automatic mirror accuracy detection system as described in claim 9, wherein the image interpretation module has a data collection unit and a data analysis unit, the data collection unit pre-stores the Yass allowable interval and the library skew allowable interval, the The data analysis unit receives the Yass detection value and the library tilt detection setting value, and extracts the Yass allowable range and the library tilt allowable range from the data collection unit for comparison to judge whether the lens meets the quality standard. An automatic mirror precision detection method includes the following steps: step A, perform optical interference on a mirror surface of a lens to generate a Newton ring image; step B, take a central ring of the Newton ring image as the center to perform an image Capture, obtaining an interference frame, in which there are a plurality of rings of interference fringes surrounding the central ring; step C, controlling the displacement of the lens, offsetting the central ring in the interference frame and capturing the Newton ring The local interference fringes in the image to obtain a detection picture, Step D, a plurality of image feature points are defined in the detection frame and distributed on two adjacent interference fringes, and then a Yass detection value and a library oblique detection value are calculated for these image feature points; and Step E , to analyze whether the Yass detection value exceeds a Yass tolerance interval, and whether the library skew detection value exceeds a library skew tolerance interval; if the Yass detection value exceeds the Yass tolerance interval, or the library skew detection If the value exceeds the allowable range of the library tilt, it is determined that the mirror surface of the lens does not meet the quality specification; Then it is determined that the mirror surface of the lens meets the quality standard. The automatic mirror surface precision detection method as described in Claim 11, wherein in step A, the center thickness of the lens is measured first, and then optical interference is performed on the mirror surface. The automatic mirror accuracy detection method as described in claim 11, wherein in step B, it is judged whether the interference fringes of the Newton ring image in the interference frame have deformation lines; if there are deformation lines on the interference fringes, it is determined that the The mirror surface of the lens does not meet the quality standard, and the subsequent steps are stopped; if the interference fringes are flat curves and no deformation lines, it is preliminarily determined that the mirror surface of the lens meets the quality standard, and the step C is continued. The automatic mirror surface precision detection method as described in claim 11, wherein in step C, four detection areas and at least eight detection directions are defined on the interference screen with the center ring as the center, and then according to each detection The direction controls the lens to perform axial displacement of at least the X-axis, Y-axis, and Z-axis, and the detection screen is individually generated in each detection area, and the number of the interference fringes in the detection screen is between 4 and 8 between. The automatic mirror surface precision detection method as described in claim 11, wherein in step D, the calculation of the Yass detection value and the library tilt detection value is based on the distribution of these image feature points to calculate the adjacent two An adjacent distance between the midpoints of the interference fringes, a length distance between the corresponding two ends of the aforementioned two interference fringes, and one of the aforementioned two interference fringes An offset distance of the interference fringes is calculated. The automatic mirror surface precision detection method as described in claim 11, including step F, after the mirror surface is detected on one side of the lens, the lens is turned over to the other mirror surface, and the above steps A to E are repeated to detect The quality specification of the other mirror surface of the lens.

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