TWI806246B - Radiation focusing module and processing system having the same - Google Patents

Abstract

A radiation focusing module includes an optical fiber, a first focusing lens, a second focusing lens, and a light convergence element. The optical fiber has an optical axis. The first focusing lens is located between the optical fiber and the second focusing lens. The light convergence element is located between the first focusing lens and the second focusing lens, and the first focusing lens, the second focusing lens, and the light convergence element are arranged along a direction of the optical axis. The light convergence element has an opening.

Description

Radiation focusing module and processing system with radiation focusing module

The disclosure relates to a radiation focusing module and a processing system with the radiation focusing module.

Laser processing is a common technology for high-precision circuit board processing. The laser processing equipment with non-coaxial optical path has problems such as low processing accuracy and lens deviation due to vibration due to the large size of the machine and the difficulty in reducing the weight. Therefore, the processing efficiency of the current laser processing technology still needs to be improved.

In the laser processing equipment with coaxial optical path, the heat source infrared light generated after the processing element is heated by the laser is recovered to detect the temperature. However, it is difficult to effectively focus and couple infrared beams from different heat sources and with different wavelengths. Therefore, the temperature detection accuracy of the current coaxial laser processing equipment is low, which makes it difficult to improve the processing efficiency.

In view of this, how to provide a processing equipment that can improve the above problems is still one of the goals that the industry needs to study urgently.

One technical aspect of the present disclosure is a radiation focusing module.

In an embodiment of the present disclosure, the radiation focusing module includes an optical fiber, a first focusing mirror, a second focusing mirror, and a beam reducer. An optical fiber has an optical axis direction. The first focusing mirror is located between the optical fiber and the second focusing mirror. The beam reducer is located between the first focusing mirror and the second focusing mirror, and the first focusing mirror, the second focusing mirror, and the beam reducer are arranged in the direction of the optical axis, wherein the beam reducer has an opening.

In an embodiment of the present disclosure, the opening is aligned with the direction of the optical axis.

In an embodiment of the present disclosure, the refractive index of the beam reducer is smaller than the refractive index of the first focusing mirror or the second focusing mirror.

In an embodiment of the present disclosure, the beam reducer includes a plano-concave lens and a lens array, and the lens array is located between the plano-concave lens and the second focusing mirror.

In an embodiment of the present disclosure, the lens array includes a plurality of lenses, and the optical axis direction of the lens has an included angle with the optical axis direction of the optical fiber.

In an embodiment of the present disclosure, the beam reducer includes a plano-convex lens and a plano-concave lens, and the plano-convex lens is located between the plano-convex lens and the second focusing lens.

Another technical aspect of the present disclosure is a processing system.

In an embodiment of the present disclosure, the processing system includes an infrared detector, a radiation light source, and a radiation focusing module. The radiation source is electrically connected to the infrared detector, wherein the radiation source is configured to emit processing radiation. The radiation focusing module is configured to transmit light radiated from the heat source. The radiation focusing module includes an optical fiber, a first focusing mirror, a second focusing mirror and a beam reducer. An optical fiber has an optical axis direction. The first focusing mirror is located between the optical fiber and the second focusing mirror. The beam reducer is located between the first focusing mirror and the second focusing mirror, and the first focusing mirror, the second focusing mirror, and the beam reducer are arranged in the direction of the optical axis, wherein the beam reducer has an opening.

In an embodiment of the present disclosure, the diameter of the opening is larger than the diameter of the processing radiation.

In an embodiment of the present disclosure, the diameter of the opening is 1.1 times to 1.3 times the diameter of the processing radiation.

In an embodiment of the present disclosure, the diameter of the opening is smaller than the diameter of the heat source radiating light.

In an embodiment of the present disclosure, the processing radiation includes laser light, X-ray, ultraviolet light, megahertz wave, microwave.

In an embodiment of the present disclosure, the radiated light from the heat source includes infrared light and near-infrared light.

In the above-mentioned embodiments, the radiation focusing module of the present disclosure reduces the diameter of the heat source radiation light to be close to the diameter of the processing radiation light by using a beam reducer, so as to increase the ratio of the heat source radiation light entering the optical fiber and improve temperature detection. accuracy. Furthermore, due to the aperture of the beam reducer, the processing radiation can enter the second focusing mirror without loss of power. Therefore, the radiation focusing module of the present disclosure can maintain the radiation intensity of the processing radiation and increase the ratio of the heat source radiation entering the optical fiber in the same optical path. In this way, there is no need to set up an additional optical path to increase the detection intensity of the radiated light from the heat source, so the processing module of the present disclosure has the advantages of smaller size and lighter weight. In addition, the radiation focusing module of the present disclosure can detect multiple wavelengths of heat source radiation, thereby improving the control effect of the system controller on processing.

Several embodiments of the present invention will be disclosed in the following figures. For the sake of clarity, many practical details will be described together in the following description. It should be understood, however, that these practical details should not be used to limit the invention. That is, in some embodiments of the present invention, these practical details are unnecessary. In addition, in order to simplify the drawings, some commonly used structures and components are shown in a simple and schematic manner in the drawings. Also, the thicknesses of layers and regions in the drawings may be exaggerated for clarity, and the same reference numerals denote the same elements in the description of the drawings.

FIG. 1 is a schematic diagram of a radiation focusing module 100 of a processing system 10 according to an embodiment of the present disclosure. The processing system 10 includes a radiation focusing module 100 and a system controller 200 . The radiation focusing module 100 includes an optical fiber 110 , a first focusing lens 120 , a second focusing lens 130 and a beam reducer 140 . The optical fiber 110 has an optical axis direction A1. The first focusing lens 120 is located between the optical fiber 110 and the second focusing lens 130 . The beam reducer 140 is located between the first focusing lens 120 and the second focusing lens 130 . The second focusing lens 130 , the beam reducer 140 and the first focusing lens 120 are arranged in sequence along the optical axis direction A1 .

The beam reducer 140 includes a plano-concave lens 142 and a lens array 144 , and the lens array 144 is located between the plano-concave lens 142 and the second focusing mirror 130 . In this embodiment, the lens array 144 includes a plurality of surrounding convex lenses, two convex lenses 1442 and 1444 are exemplarily shown in FIG. 1 , but the disclosure is not limited thereto. The plano-concave lens 142 has an opening 142H. The lens array 144 may be a spherical matrix composed of more than two convex lenses. The lens array 144 includes a hole 144H, that is, a plurality of convex lenses 1442 and 1444 of the lens array 144 surround the hole 144H. The optical axis directions of the convex lenses 1442 , 1444 have an included angle with the optical axis direction A1 of the optical fiber 110 , so as to converge toward the plano-concave lens 142 through the lens array 144 .

In this embodiment, the radiation source 210 (see FIG. 2 ) of the system controller 200 emits the processing radiation 102, and the processing radiation 102 passes through the optical fiber 110, the first focusing mirror 120, and the opening 142H of the plano-concave lens 142 in sequence. , the opening 144H of the lens array 144 and the second focusing mirror 130 irradiate onto the processing element 300 . The processing radiation light 102 is focused into a parallel light having a diameter D1 after passing through the first focusing lens 120 . The apertures of the openings 142H and 144H are larger than the diameter D1 of the processing radiation 102 , and the openings 142H and 144H are aligned along the optical axis direction A1 . Therefore, the processing radiation 102 can pass through the opening 142H and the opening 144H, and the power of the processing radiation 102 will not be attenuated by passing through an additional medium. In some embodiments, the diameters of the openings 142H and 144H are 1.1 to 1.3 times the diameter D1 of the processing radiation 102 .

The processing element 300 includes pins 310 and pads 320 disposed on a circuit board 340 . Solder 330 is heated by process radiation 102 to perform soldering. The processing element 300 emits heat source radiation 104 after being heated. The heat source radiant light 104 is composed of radiation light emitted by multiple heat sources, and the heat source radiant light 104 may have multiple wavelengths. The radiation light 104 from the heat source passes through the second focusing mirror 130, the lens array 144, the plano-concave lens 142 and the first focusing mirror 120 in sequence and then enters the optical fiber 110. The radiation light 104 from the heat source is then recovered by the system controller 200 to provide temperature detection and feedback. Control required data.

The radiation light 104 from the heat source is focused into parallel light with a diameter D2 after passing through the second focusing lens 130 . The diameter D2 is larger than the diameter D1 of the processing radiation 102 , and the diameter D2 is close to the diameter of the second focusing mirror 130 . A part of the radiant light 1042 of the heat source can directly pass through the opening 142H of the plano-concave lens 142 and the opening 144H of the lens array 144 . Specifically, as shown in the figure, the heat source radiation 1042 directly passing through the opening 142H and the opening 144H is a portion overlapping with the processing radiation 102 . Another part of the heat source radiant light 1044 is reduced in diameter after passing through the lens array 144 . Specifically, another part of the heat source radiant light 1044 described here is a part located at the periphery of the processing radiant light 102 .

The refractive index of the plano-concave lens 142 and the lens array 144 of the beam reducer 140 is smaller than that of the first focusing lens 120 or the second focusing lens 130 . In this way, the heat source radiant light 1044 can be prevented from being focused before entering the plano-concave lens 142 . In other words, the focal point formed by the plurality of convex lenses 1442 and 1444 in the lens array 144 falls behind the plano-concave lens 142 , so the heat source radiant light 1044 passes through the plano-concave lens 142 before being focused. The heat source radiation light 1044 and the heat source radiation light 1042 passing through the plano-concave lens 142 share a diameter D3, and the diameter D3 is smaller than the diameter D2. The heat source radiation 104 passing through the beam reducer 140 is focused by the first focusing lens 120 , and the diameter of the heat source radiation 104 is close to the aperture of the optical fiber 110 to enter the optical fiber 110 . In other words, the diameters of the openings 142H and 144H are smaller than the diameter D2 of the heat source radiating light 104 . The diameter D2 of the heat source radiant light 104 is reduced to the diameter D3 by the beam reducer 140 , so it is beneficial to increase the ratio of the heat source radiant light 104 entering the optical fiber 110 .

For example, the structural length of the first focusing lens 120 , the beam reducer 140 and the second focusing lens 130 in this embodiment is about 10 cm, which is beneficial to the miniaturization of the radiation focusing module 100 . The first focusing lens 120 and the second focusing lens 130 are made of optical glass (such as N-BK7 glass) with a refractive index of 1.52. The focal length of the first focusing lens 120 is 32 millimeters, and the focal length of the second focusing lens 130 is 100 millimeters. The plano-concave lens 142 and the lens array 144 are made of calcium fluoride (CaF2) with a refractive index of 1.43. The focal length of the plano-concave lens 142 is 60 millimeters.

The diameter D1 of the processed radiation 102 after passing through the first focusing lens 120 is 14 mm. The aperture 142H of the plano-concave lens 142 and the aperture 144H of the lens array 144 of the beam reducer 140 are about 16 mm. In this way, the processing radiation 102 can pass through the opening 142H and the opening 144H and enter the second focusing lens 130 without loss of power.

Processing radiation 102 may include laser light, X-rays, ultraviolet light, megahertz waves, microwaves. The heat source radiated light 104 may include infrared light and near infrared light. The plano-concave lens 142 and the lens array 144 of the beam reducer 140 can be provided with an infrared coating corresponding to the wavelength band of the heat source radiated light 104 to reduce light attenuation rate. In other embodiments, the beam reducer 140 may be a convex lens, a meniscus lens, an axial lens, a secondary reflection lens, a metal mirror, or a combination thereof. The lens array 144 can be an optical element formed by a polygonal mirror or a grating with an opening 144H. As long as the processing radiation 102 can pass through the optical element, and the diameter of the heat source radiation 104 can be reduced.

FIG. 2 is a schematic diagram of the system controller 200 of the processing system 10 according to an embodiment of the present disclosure. The system controller 200 includes a radiation source 210 , a collimator 212 , a light source coupler 214 , an infrared detector 220 , an infrared coupler 222 , a feedback controller 230 and a dichroic mirror 240 . The radiation light 202 emitted by the radiation source 210 passes through the collimator 212 , and is reflected by the dichroic mirror 240 toward the light source coupler 214 to form the processed radiation light 102 as shown in FIG. 1 . The heat source radiant light 104 shown in FIG. 1 passes through the dichroic mirror 240 and then is coupled into the infrared detector 220 through the infrared coupler 222 . The feedback controller 230 is electrically connected to the infrared detector 220 and the radiation source 210 . The feedback controller 230 obtains the processing temperature according to the detection result of the infrared detector 220 , so as to adjust the setting of the radiation light source 210 to maintain the processing efficiency.

According to the above, the radiation focusing module 100 reduces the diameter of the heat source radiation light 104 to be close to the diameter of the processing radiation light 102 through the beam reducer 140, so as to increase the ratio of the heat source radiation light 104 entering the optical fiber 110, which can improve temperature detection. accuracy. In addition, since the plano-concave lens 142 and the lens array 144 of the beam reducer 140 have openings 142H and 144H respectively, the processed radiation 102 can enter the second focusing lens 130 without power loss. Therefore, the radiation focusing module 100 of the present disclosure can maintain the radiation intensity of the processing radiation 102 and increase the ratio of the heat source radiation 104 entering the optical fiber 110 in the same optical path. In this way, there is no need to set up an additional optical path to increase the detection intensity of the heat source radiated light. Therefore, the processing module of the present disclosure has the advantages of smaller size and lighter weight, which can further improve the processing accuracy.

FIG. 3 is a schematic diagram of a radiation focusing module 100a of a processing system 10a according to another embodiment of the present disclosure. The radiation focusing module 100 a is substantially the same as the radiation focusing module 100 , the difference being that the beam reducer 140 a of the radiation focusing module 100 includes a plano-concave lens 142 and a plano-convex lens 144 a. For example, the focal length of the plano-convex lens 144a is 100 mm. The radiation focusing module 100 a has the same technical functions as the radiation focusing module 100 , which will not be repeated here.

FIG. 4 is simulation data of heat source radiation light transmission efficiency of a radiation focusing module according to an embodiment of the present disclosure. In this embodiment, the radiation focusing module 100 shown in FIG. 3 is used as the simulation configuration. The power of the simulated light source is 1 watt, and the wavelengths of 1600 nm and 2300 nm are two simulated heat sources of infrared light. In Fig. 4, the position corresponding to the optical axis direction A1 is defined as the origin of the horizontal position coordinate.

Table 1 shows the infrared power and transmission efficiency received by the analog detector I and the analog detector II when the infrared light of the above two simulated heat sources comes from the heat source S1. The infrared detectors 400 in FIG. 4 are respectively used to simulate detectors of different sizes. As shown in Table 1, the analog detector I is 50.8 mm by 50.8 mm, and the analog detector II is 0.8 mm by 0.8 mm. As shown in Table 1, the data in columns 2 to 4 respectively list the simulation results of conventional radiation focusing modules, and the data in columns 5 to 7 respectively list the radiation focusing models shown in Figure 3 Simulation results for group 100a.

The transmission efficiency can be obtained from the received power of the analog detector I and the received power of the analog detector II. It can be seen from the information in the third column and the sixth column of Table 1 that the transmission efficiency of the radiation focusing module 100 of the present invention for the heat source infrared light with a wavelength of 1600 nm can be increased from 26.980% to 77.132%. It can be seen from the information in the fourth column and the seventh column of Table 1 that the transmission efficiency of the radiation focusing module 100 of the present invention for the heat source infrared light with a wavelength of 2300 nm can be increased from 32.158% to 67.377%. Wavelength (nm) position (cm) Wavelength (nm) position (cm) Analog detector I received power Analog Detector II Received Power Transmission efficiency (%) Accustomed to know 1600 0 2300 0 1.84 0.5442 1600 0 0.9177 0.2476 26.980 2300 0 0.9223 0.2966 32.158 this invention 1600 0 2300 0 1.903 1.375 1600 0 0.95139 0.73383 77.132 2300 0 0.75161 0.64117 67.377 Table 1. Simulation data of transmission efficiency of radiation focusing module

Table 2 shows the infrared power and transmission efficiency received by the analog detector I and the analog detector II when the infrared light from the above two simulated heat sources comes from the heat source S1 and the heat source S2 respectively. It can be seen from the information in the third column and the sixth column of Table 2 that the transmission efficiency of the radiation focusing module 100 of the present invention for the heat source infrared light with a wavelength of 1600 nm can be increased from 26.980% to 77.132%. It can be seen from the data in the fourth column and the seventh column of Table 1 that the transmission efficiency of the radiation focusing module 100 of the present invention for the heat source infrared light with a wavelength of 2300 nm can be increased from 33.509% to 54.081%. In other words, even if the heat source S2 has a lateral offset of 0.5 cm compared to the optical axis direction A1 in the figure, its corresponding transmission efficiency is still significantly higher than that of conventional radiation focusing modules. Wavelength (nm) position (cm) Wavelength (nm) position (cm) Analog detector I receive power Analog Detector II Received Power Transmission efficiency (%) Accustomed to know 1600 0 2300 0.5 1.839 0.5437 1600 0 0.9177 0.2476 26.980 2300 0.5 0.9213 0.2903 31.509 this invention 1600 0 2300 0.5 1.9025 1.2482 1600 0 0.95139 0.73383 77.132 2300 0.5 0.75111 0.51437 54.081 Table 2. Simulation data of transmission efficiency of radiation focusing module

FIG. 5 is simulation data of infrared transmission efficiency of a radiation focusing module according to an embodiment of the present disclosure. The configuration of the radiation focusing module in Fig. 5 is the same as that described in Fig. 4, the difference is that the positions of the heat source S3 and the heat source S4 in this embodiment are located at the horizontal coordinates -.25 cm and 0.25 cm, respectively. Table 3 shows the infrared power and transmission efficiency received by the analog detector I and the analog detector II when the infrared light from the above two simulated heat sources comes from the heat source S3 and the heat source S4 respectively. From the data in columns 3, 4 and 6, 7 of Table 3, it can be seen that the radiation focusing module 100 of the present invention has obvious improvements compared with the conventional radiation focusing modules. In other words, even though both the heat source S3 and the heat source S4 are laterally shifted relative to the optical axis direction A1, their corresponding transmission efficiency is still significantly higher than that of conventional radiation focusing modules. Wavelength (nm) position (cm) Wavelength (nm) position (cm) Analog detector I received power Analog Detector II Received Power Transmission efficiency (%) Accustomed to know 1600 -0.25 2300 0.25 1.84 0.5442 1600 -0.25 0.9178 0.2460 26.803 2300 0.25 0.9222 0.2962 32.118 this invention 1600 -0.25 2300 0.25 1.9017 1.3182 1600 -0.25 0.95168 0.7285 76.522 2300 0.25 0.95112 0.58995 62.027 Table 3. Simulation data of transmission efficiency of radiation focusing module

FIG. 6 is simulation data of infrared transmission efficiency of a radiation focusing module according to an embodiment of the present disclosure. The configuration of the radiation focusing module in Fig. 6 is the same as that described in Fig. 4, the difference is that the positions of the heat source S5 and the heat source S6 in this embodiment are located at the origin of the horizontal coordinates and 0.5 cm respectively. Table 4 shows the infrared power and transmission efficiency received by the analog detector I and the analog detector II when the infrared light from the above two simulated heat sources comes from the heat source S5 and the heat source S6 respectively. From the data in columns 3, 4 and 6, 7 of Table 4, it can be known that the radiation focusing module 100 of the present invention has obvious improvements compared with the conventional radiation focusing modules. In other words, even if the heat source S5 has a lateral offset of −0.5 cm relative to the optical axis direction A1, its corresponding transmission efficiency is still significantly higher than that of conventional radiation focusing modules. Wavelength (nm) position (cm) Wavelength (nm) position (cm) Analog detector I received power Analog Detector II Received Power Transmission efficiency (%) Accustomed to know 1600 0.5 2300 0 1.8400 0.5383 1600 0.5 0.9182 0.2405 26.1926 2300 0 0.9218 0.2978 32.3064 this invention 1600 0.5 2300 0 1.9028 1.3530 1600 0.5 0.9514 0.7108 74.7152 2300 0 0.9514 0.6421 67.4963. Table 4. Simulation data of transmission efficiency of radiation focusing module

As mentioned above, when the actual processing element is heated to emit heat source radiant light, the heat source radiant light is composed of radiation light emitted by multiple heat sources, so the actual heat source radiant light may have multiple wavelengths. As shown in Table 1 to Table 4, when the heat source infrared light with a wavelength of 1600 nm and the heat source infrared light with a wavelength of 2300 nm are detected simultaneously (columns 2 and 5), the received power and the heat source with a wavelength of 1600 nm The received powers of the infrared light and the heat source infrared light with a wavelength of 2300 nm are similar when they are respectively detected (column 3, column 4 and column 6, column 7). From the results, it can be inferred that the detection results of the actual processing components can be obtained based on the simulated data of the heat source infrared light with a single wavelength.

See Figure 2. Generally speaking, the detection effect of the infrared detector 220 will be affected by the surrounding environment. When the intensity of the recovered heat source radiant light 104 is too small, the feedback controller 230 may not be able to perform effective feedback control according to the detection result of the infrared detector 220 . The radiation focusing module of the present disclosure can detect multiple wavelengths, so the processing temperature can be estimated by means of beat frequency calculation, and the control effect of the system controller 200 on processing can be improved.

To sum up, the radiation focusing module of this disclosure reduces the diameter of the heat source radiation light to be close to the diameter of the processing radiation light by using a beam reducer, so as to increase the proportion of the heat source radiation light entering the optical fiber and improve the accuracy of temperature detection. sex. Furthermore, due to the aperture of the beam reducer, the processing radiation can enter the second focusing mirror without loss of power. Therefore, the radiation focusing module of the present disclosure can maintain the radiation intensity of the processing radiation and increase the ratio of the heat source radiation entering the optical fiber in the same optical path. In this way, there is no need to set up an additional optical path to increase the detection intensity of the heat source radiated light. Therefore, the processing module of the present disclosure has the advantages of smaller size and lighter weight, which can further improve the processing accuracy. In addition, the radiation focusing module of the present disclosure can detect multiple wavelengths of heat source radiation, thereby improving the control effect of the system controller on processing.

10,10a: Processing system 100,100a: Radiation Focus Module 102: Processing radiant light 104, 1042, 1044: Heat source radiates light 110: optical fiber 120: The first focusing mirror 130: second focusing mirror 140,140a: beam reducer 142: plano-concave lens 142H: opening 144: Lens array 1442,1444: convex lens 144H: opening 144a: plano-convex lens 200: System Controller 202: Radiant light 210: Radiation light source 212: Collimator 214: Light source coupler 220: infrared detector 222: Infrared coupler 230: Feedback controller 240: dichroic mirror 300: processing components 310: pin 320: Pad 330: Solder 340: circuit board 400: infrared detector A1: Optical axis direction D1, D2, D3: Diameter S1, S2, S3, S4, S5, S6: heat source

FIG. 1 is a schematic diagram of a radiation focusing module of a processing system according to an embodiment of the present disclosure. FIG. 2 is a schematic diagram of a system controller of a processing system according to an embodiment of the present disclosure. FIG. 3 is a schematic diagram of a radiation focusing module of a processing system according to another embodiment of the present disclosure. FIG. 4 is the simulation data of the infrared transmission efficiency of the radiation focusing module according to an embodiment of the present disclosure. FIG. 5 is simulation data of infrared transmission efficiency of a radiation focusing module according to an embodiment of the present disclosure. FIG. 6 is simulation data of infrared transmission efficiency of a radiation focusing module according to an embodiment of the present disclosure.

10: Processing system 100: Radiation Focus Module 102: Processing radiant light 104, 1042, 1044: Heat source radiates light 110: optical fiber 120: The first focusing mirror 130: second focusing mirror 140: beam reducer 142: plano-concave lens 142H: opening 144: Lens array 1442,1444: convex lens 144H: opening 200: System Controller 300: processing components 310: pin 320: Pad 330: Solder 340: circuit board A1: Optical axis direction D1, D2, D3: Diameter

Claims (12)

A radiation focusing module, comprising: an optical fiber with an optical axis direction; a first focusing mirror and a second focusing mirror, wherein the first focusing mirror is located between the optical fiber and the second focusing mirror; and a A beam reducer is located between the first focusing lens and the second focusing lens, and the first focusing lens, the second focusing lens, and the beam reducer are arranged in the direction of the optical axis, wherein the beam reducer The device has an opening and a plano-concave lens, and the diameter of the radiant light of a heat source is reduced by the beam reducer, so as to increase the ratio of the radiant light of the heat source entering the optical fiber. The radiation focusing module as claimed in claim 1, wherein the opening is aligned with the optical axis direction. The radiation focusing module as claimed in claim 1, wherein a refractive index of the beam reducer is smaller than a refractive index of the first focusing mirror or the second focusing mirror. The radiation focusing module as claimed in claim 1, wherein the beam reducer includes a lens array, and the lens array is located between the plano-concave lens and the second focusing mirror. The radiation focusing module as claimed in item 4, wherein the lens array includes a plurality of lenses, and the optical axes of the lenses are in the same direction as the optical fiber The direction of the optical axis has an included angle. The radiation focusing module as claimed in claim 1, wherein the beam reducer includes a plano-convex lens, and the plano-convex lens is located between the plano-concave lens and the second focusing lens. A processing system comprising: an infrared detector; a radiation source electrically connected to the infrared detector, wherein the radiation source is configured to emit a processing radiation; and a radiation focusing module configured to transmit a heat source radiation Light, wherein the radiation focusing module includes: an optical fiber with an optical axis direction; a first focusing lens and a second focusing lens, wherein the first focusing lens is located between the optical fiber and the second focusing lens; and a beam reducer, located between the first focusing lens and the second focusing lens, and the first focusing lens, the second focusing lens, and the beam reducer are arranged in the direction of the optical axis, wherein the The beam reducer has an opening and a plano-concave lens. The diameter of the heat source radiated light is reduced by the beam reducer to increase the ratio of the heat source radiated light entering the optical fiber. The processing system as claimed in claim 7, wherein an aperture of the opening is larger than a diameter of the processing radiation. The processing system according to claim 7, wherein an aperture of the opening is 1.1 to 1.3 times the diameter of the processing radiation. The processing system as claimed in claim 7, wherein a diameter of the opening is smaller than a diameter of the heat source radiating light. The processing system according to claim 7, wherein the processing radiation includes laser light, X-ray, ultraviolet light, megahertz wave, microwave. The processing system according to claim 7, wherein the heat source radiates light including infrared light and near-infrared light.

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