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TWI794852B - Water separation device - Google Patents

Water separation device Download PDF

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TWI794852B
TWI794852B TW110123253A TW110123253A TWI794852B TW I794852 B TWI794852 B TW I794852B TW 110123253 A TW110123253 A TW 110123253A TW 110123253 A TW110123253 A TW 110123253A TW I794852 B TWI794852 B TW I794852B
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pipe
sample gas
piping
water
moisture
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TW202206794A (en
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中谷淳司
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日商捷太格特熱處理股份有限公司
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N1/2202Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26Drying gases or vapours
    • B01D53/265Drying gases or vapours by refrigeration (condensation)
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/80Water
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N2001/2282Devices for withdrawing samples in the gaseous state with cooling means

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Abstract

The present invention provides a water separation device that can suppress an increase in equipment cost and installation space, improve cooling efficiency of sample gas to improve water separation ability, and further easily collect water to efficiently guide sample gas.
A sample gas containing water is introduced into a first pipe 11 and flows downward. In the second pipe 12, the first pipe 11 is arranged inside, and the cooling gas is introduced and flows downward. In the outlet chamber 13, the sample gas is introduced from the first pipe 11, and the separated water drops from the lower end portion of the first pipe 11. The water collection chamber 14 communicates with the lower side of the outlet chamber 13 and collects the separated water. The sample gas guiding unit 15 communicates with the outlet chamber 13 and guides the sample gas flowing out to the outlet chamber 13.

Description

水分分離裝置 Moisture separator

本發明係關於一種從包含水分的樣氣分離水分的水分分離裝置。The present invention relates to a moisture separation device for separating moisture from sample gas containing moisture.

在使用紅外線分光光度計等分析計對所採集之樣氣的成分進行分析時,若樣氣中包含大量水分,則成分分析變得困難。再者,在利用紅外線分光光度計進行樣氣的成分分析時,藉由基於紅外線吸收峰值的差異而得之紅外線光譜來進行成分的分析。另一方面,作為水分的水蒸氣吸收紅外線。因此,如樣氣中的水蒸氣飽和之情況、或樣氣為高濕度之情況般,在樣氣中包含大量水分的情況下,於分析對象的樣氣與水分中,紅外線吸收峰值會重疊。因此,若樣氣中包含大量水分,則難以利用紅外線光譜進行成分的分析。When using an analyzer such as an infrared spectrophotometer to analyze the components of the collected sample gas, if the sample gas contains a large amount of water, the component analysis becomes difficult. Furthermore, when the infrared spectrophotometer is used to analyze the composition of the sample gas, the composition is analyzed by using the infrared spectrum obtained based on the difference of the infrared absorption peaks. On the other hand, water vapor, which is moisture, absorbs infrared rays. Therefore, when the sample gas is saturated with water vapor or the sample gas is high in humidity, if the sample gas contains a large amount of water, the infrared absorption peaks will overlap between the sample gas and the water to be analyzed. Therefore, if the sample gas contains a large amount of water, it is difficult to analyze the components by infrared spectroscopy.

如上所述,若樣氣中包含大量水分,則難以利用分析計進行成分的分析。因此,進行下述操作:從包含大量水分的樣氣中分離出一定程度的水分而使水分減少後,將樣氣供給至分析計,進行樣氣成分的分析。作為從包含水分的樣氣分離水分的方法,存在下述方法:使用採用冷卻水等液體冷媒的熱交換器,將包含水分的樣氣暫時冷卻,使樣氣中包含的水分的一部分冷凝而分離。但是,該情況下,需要採用液體冷媒的熱交換器,會導致設備成本及設置空間的增大。As mentioned above, if the sample gas contains a large amount of water, it will be difficult to analyze the components by the analyzer. Therefore, an operation is performed in which a certain amount of water is separated from a sample gas containing a large amount of water to reduce the water content, and then the sample gas is supplied to an analyzer to analyze the components of the sample gas. As a method of separating moisture from sample gas containing moisture, there is a method of temporarily cooling sample gas containing moisture using a heat exchanger using a liquid refrigerant such as cooling water, and condensing part of the moisture contained in the sample gas to separate . However, in this case, a heat exchanger using a liquid refrigerant is required, which leads to an increase in equipment cost and installation space.

相對於此,作為無需採用液體冷媒的熱交換器的空氣冷卻式的水分分離裝置,已知有專利文獻1所揭示者。專利文獻1中揭示的水分分離裝置係構成為具備:排水分離器本體,其係設置在用於將樣氣導入分析計的樣氣管線;及外筒容器,其覆蓋排水分離器本體的周圍且供儀器空氣導入並排出。另外,專利文獻1的水分分離裝置構成為,藉由在外筒容器內對排水分離器本體噴吹儀器空氣,而在排水分離器本體內將樣氣冷卻,使樣氣中的水分分離。再者,排水分離器本體係設置於樣氣管線,樣氣係在排水分離器本體的上端側導入排水分離器本體中,在排水分離器本體的上端側從排水分離器本體被取出。另外,在排水分離器本體內從樣氣分離出的水分係從設置於排水分離器本體的下部的排水排出口排出。 [先前技術文獻] [專利文獻]On the other hand, what is disclosed in Patent Document 1 is known as an air-cooled moisture separator that does not require a heat exchanger using a liquid refrigerant. The moisture separator disclosed in Patent Document 1 is configured to include: a drain separator body provided on a sample gas line for introducing sample gas into an analyzer; and an outer cylinder container covering the periphery of the drain separator body and For instrument air intake and exhaust. In addition, the moisture separator in Patent Document 1 is configured to cool the sample gas inside the drain separator body by blowing instrument air to the drain separator body in the outer cylinder container, thereby separating the moisture in the sample gas. Furthermore, the drainage separator body system is arranged on the sample gas pipeline, and the sample gas system is introduced into the drainage separator body at the upper end side of the drainage separator body, and is taken out from the drainage separator body at the upper end side of the drainage separator body. In addition, the water separated from the sample gas in the drain separator body is discharged from the drain outlet provided at the lower part of the drain separator body. [Prior Art Literature] [Patent Document]

專利文獻1:日本專利特開平10-197422號公報Patent Document 1: Japanese Patent Laid-Open No. H10-197422

(發明所欲解決之問題)(Problem to be solved by the invention)

專利文獻1的水分分離裝置係無需採用液體冷媒的熱交換器,因此能夠抑制設備成本及設置空間的增大。但是,根據專利文獻1的水分分離裝置,樣氣在排水分離器本體的上端側被導入至排水分離器本體,並從排水分離器本體被取出。並且,藉由在外筒容器內對排水分離器本體噴吹儀器空氣,而在排水分離器本體內的上端側區域流動的樣氣被冷卻。因此,無法有效地隔著排水分離器本體進行樣氣與儀器空氣間之熱交換,樣氣的冷卻效率降低。另外,由於樣氣的冷卻效率低,所以難以充分地從樣氣分離水分,水分的分離能力也降低。The moisture separator of Patent Document 1 does not require a heat exchanger using a liquid refrigerant, and thus can suppress an increase in equipment cost and installation space. However, according to the moisture separator of Patent Document 1, the sample gas is introduced into the drain separator body at the upper end side of the drain separator body, and taken out from the drain separator body. And, the sample gas flowing in the upper end region of the drain separator body is cooled by blowing the instrument air to the drain separator body in the outer cylinder container. Therefore, the heat exchange between the sample gas and the instrument air cannot be effectively performed through the drain separator body, and the cooling efficiency of the sample gas is reduced. In addition, since the cooling efficiency of the sample gas is low, it is difficult to sufficiently separate moisture from the sample gas, and the moisture separation capability also decreases.

因此,希望實現一種能夠提高對樣氣的冷卻效率、並且能夠實現水分分離能力的提高的水分分離裝置。另外,在水分分離裝置中,希望在提高對樣氣的冷卻效率與提高水分的分離能力的同時,進而能夠容易地回收從樣氣分離出的水分,並且能夠有效地將分離出水分後的樣氣引導至分析計等供給目的地。Therefore, it is desired to realize a water separation device capable of improving the cooling efficiency of the sample gas and realizing the improvement of the water separation ability. In addition, in the water separation device, it is desired to improve the cooling efficiency of the sample gas and the water separation ability, and at the same time to easily recover the water separated from the sample gas, and to effectively separate the water separated sample. The gas is guided to a supply destination such as an analyzer.

鑒於上述情況,本發明的目的在於提供一種水分分離裝置,其能夠抑制設備成本及設置空間的增大,同時能夠提高對樣氣的冷卻效率而實現水分的分離能力的提高,進而能夠容易地回收水分且有效地引導樣氣。 (解決問題之技術手段)In view of the above circumstances, an object of the present invention is to provide a moisture separator capable of suppressing an increase in equipment cost and installation space, improving the cooling efficiency of a sample gas, realizing an improvement in moisture separation capability, and enabling easy recovery. moisture and guides the sample gas efficiently. (technical means to solve the problem)

(1)為了解決上述課題,本發明之一態樣的水分分離裝置係具備:第1配管,其被導入有包含水分的樣氣,且上述樣氣向下方流動;第2配管,其至少一部分配置於上述第1配管的內側或在其內側配置有上述第1配管的至少一部分,其被導入有溫度低於上述樣氣的冷卻氣體,且上述冷卻氣體向上方或下方流動;出口室,其中,上述第1配管的下端部開口,上述樣氣從上述第1配管導入,且從上述樣氣分離出的上述水分係從上述下端部滴落;水分回收室,其與上述出口室連通且配置於上述出口室的下方,回收從上述樣氣分離出的上述水分;及樣氣引導部,其與上述出口室連通,引導流出到上述出口室的上述樣氣。(1) In order to solve the above-mentioned problems, a moisture separator according to an aspect of the present invention includes: a first pipe into which a sample gas containing moisture is introduced, and the sample gas flows downward; a second pipe in which at least a part Arranged inside the first pipe or at least a part of the first pipe is arranged inside it, which is introduced with a cooling gas having a temperature lower than that of the sample gas, and the cooling gas flows upward or downward; the outlet chamber, wherein , the lower end of the first pipe is open, the sample gas is introduced from the first pipe, and the water separated from the sample gas drips from the lower end; the water recovery chamber communicates with the outlet chamber and is arranged The moisture separated from the sample gas is recovered under the outlet chamber; and a sample gas guide part communicates with the outlet chamber and guides the sample gas flowing out into the outlet chamber.

根據該構成,在第1配管中流動的樣氣與第2配管中流動的冷卻氣體之間進行熱交換,而樣氣被冷卻。並且,藉由樣氣被冷卻,根據溫度所致的飽和水蒸氣量的差異,樣氣中包含的水分的一部分冷凝。藉此,水分從樣氣中冷凝而被分離。因而,根據上述構成,在從樣氣分離水分時,無需採用液體冷媒的熱交換器,因此能夠抑制設備成本及設置空間的增大。According to this configuration, the sample gas is cooled by exchanging heat between the sample gas flowing through the first pipe and the cooling gas flowing through the second pipe. And, when the sample gas is cooled, a part of the moisture contained in the sample gas is condensed according to the difference in the amount of saturated water vapor due to the temperature. In this way, moisture is condensed and separated from the sample gas. Therefore, according to the above-mentioned configuration, when separating water from the sample gas, a heat exchanger using a liquid refrigerant is not required, and thus an increase in equipment cost and installation space can be suppressed.

另外,根據上述構成,樣氣在第1配管中向下方流動,並且冷卻氣體在配置於第1配管的內側或在內側配置有第1配管的第2配管中向上方或下方流動,與此同時,在冷卻氣體與樣氣之間進行熱交換,而樣氣被冷卻。因此,在第1及第2配管中的一者被配置於另一者的內側而沿上下方向延伸的區域中,遍及上下方向的整段長度地,樣氣及冷卻氣體沿著上下方向流動,同時在樣氣與冷卻氣體之間有效地進行熱交換。藉此,能夠實現樣氣的冷卻效率的提高,並能夠實現水分的分離能力的提高。In addition, according to the above configuration, the sample gas flows downward in the first pipe, and the cooling gas flows upward or downward in the second pipe arranged inside the first pipe or inside the first pipe. , heat exchange takes place between the cooling gas and the sample gas, while the sample gas is cooled. Therefore, in the region where one of the first and second pipes is arranged inside the other and extends in the vertical direction, the sample gas and the cooling gas flow in the vertical direction over the entire length in the vertical direction. At the same time there is an efficient heat exchange between the sample gas and the cooling gas. Thereby, the cooling efficiency of the sample gas can be improved, and the water separation ability can be improved.

此外,根據上述構成,供樣氣冷卻而將水分分離並使其向下方流動之第1配管的下端部係在出口室開口,從樣氣分離出的水分滴落至出口室,並且分離出水分後的樣氣也流出到出口室。因此,能夠使有效地進行冷卻並分離的樣氣與水分直接簡單地從第1配管向下方的出口室排出。並且,水分被回收到出口室的下方的水分回收室,分離出水分後的樣氣係由與出口室連通的樣氣引導部所引導,供給至分析計等供給目的地。因此,根據上述構成,能夠容易地回收從樣氣分離出的水分,並且能夠有效地引導分離出水分的樣氣。In addition, according to the above configuration, the lower end of the first pipe that cools the sample gas to separate the moisture and make it flow downward is connected to the outlet chamber opening, and the moisture separated from the sample gas drops to the outlet chamber, and the moisture is separated. The final sample gas also flows out to the outlet chamber. Therefore, the effectively cooled and separated sample gas and moisture can be directly and easily discharged from the first pipe to the outlet chamber below. In addition, the moisture is recovered to the moisture recovery chamber below the outlet chamber, and the sample gas from which the moisture has been separated is guided by the sample gas guide connected to the outlet chamber, and supplied to a supply destination such as an analyzer. Therefore, according to the above configuration, the moisture separated from the sample gas can be easily recovered, and the sample gas from which the moisture has been separated can be efficiently guided.

因此,根據上述構成,可提供一種水分分離裝置,其能夠抑制設備成本及設置空間的增大,同時能夠提高對樣氣的冷卻效率而實現水分的分離能力的提高,進而能夠容易地回收水分且有效地引導樣氣。Therefore, according to the above configuration, it is possible to provide a water separator that can suppress the increase in equipment cost and installation space, and can improve the cooling efficiency of the sample gas to realize the improvement of the water separation ability, and can easily recover the water. Efficiently guide the sample gas.

(2)有如下態樣:上述第1配管及上述第2配管分別設置為直線狀地上下延伸,上述冷卻氣體係沿著與上述第1配管中之上述樣氣的流動方向平行的方向而在上述第2配管中流動。(2) There is an aspect in which the first piping and the second piping are respectively arranged to extend linearly up and down, and the cooling gas system flows in a direction parallel to the flow direction of the sample gas in the first piping. Flow through the above-mentioned 2nd piping.

根據該構成,第1及第2配管分別直線狀地上下延伸,冷卻氣體沿著與樣氣的流動方向平行的方向而流動。因此,能夠更有效地進行在第1配管中流動的樣氣與第2配管中流動的冷卻氣體之間的熱交換。藉此,能夠進一步提高對樣氣的冷卻效率,並進一步提高水分的分離能力。According to this configuration, each of the first and second pipes extends linearly up and down, and the cooling gas flows in a direction parallel to the flow direction of the sample gas. Therefore, heat exchange between the sample gas flowing through the first pipe and the cooling gas flowing through the second pipe can be performed more efficiently. Thereby, the cooling efficiency of the sample gas can be further improved, and the water separation ability can be further improved.

(3) 有如下態樣:上述第1配管係以插入上述第2配管的內側的狀態配置。(3) There is an aspect in which the above-mentioned first piping system is arranged in a state inserted into the inside of the above-mentioned second piping.

根據該構成,樣氣係在插入第2配管內側之第1配管的內側流動,在第2配管中流動的冷卻氣體遍及全周地覆蓋著第1配管周圍並在第1配管的外側流動。因此,經由遍及供樣氣流動的第1配管全周的寬廣面積,冷卻氣體能夠更有效地從樣氣除熱。藉此,能夠進一步提高對樣氣的冷卻效率,進一步提高水分的分離能力。According to this configuration, the sample gas flows inside the first pipe inserted into the second pipe, and the cooling gas flowing through the second pipe covers the entire periphery of the first pipe and flows outside the first pipe. Therefore, the cooling gas can more effectively remove heat from the sample gas through a wide area over the entire circumference of the first pipe through which the sample gas flows. Thereby, the cooling efficiency of the sample gas can be further improved, and the water separation ability can be further improved.

(4) 有如下態樣:上述第1配管與上述第2配管係設置為,呈中心軸線一致的同心狀地配置的雙重管。(4) There is an aspect in which the above-mentioned first piping and the above-mentioned second piping are provided as double pipes arranged concentrically so that the central axes coincide with each other.

根據該構成,在與第1及第2配管的中心軸線垂直的截面上繞著中心軸線的圓周方向的區域中,樣氣及冷卻氣體的流量分佈變得更均勻。因此,能夠進一步降低冷卻氣體對樣氣冷卻的不均,能夠進一步提高對樣氣的冷卻效率,能夠進一步提高水分的分離能力。According to this configuration, the flow distribution of the sample gas and the cooling gas becomes more uniform in the region in the circumferential direction around the central axis on the cross section perpendicular to the central axis of the first and second pipes. Therefore, the uneven cooling of the sample gas by the cooling gas can be further reduced, the cooling efficiency of the sample gas can be further improved, and the water separation ability can be further improved.

(5) 有如下態樣:上述冷卻氣體係沿著相對於上述樣氣的流動方向而平行且相同的方向,在上述第2配管中向下方流動。(5) There is an aspect in which the cooling gas system flows downward in the second piping in a direction parallel to and in the same direction as the flow direction of the sample gas.

根據該構成,冷卻氣體與樣氣係一邊進行熱交換,一邊沿平行且相同的方向流動。因此,冷卻氣體一邊從樣氣除熱一邊流動的方向、與樣氣一邊被冷卻氣體冷卻一邊流動的方向成為相同方向。藉此,可將進行熱交換的冷卻氣體與樣氣間的溫度差設定為較大,而能夠更有效地冷卻樣氣。According to this configuration, the cooling gas and the sample gas flow in parallel and in the same direction while exchanging heat. Therefore, the direction in which the cooling gas flows while removing heat from the sample gas is the same as the direction in which the sample gas flows while being cooled by the cooling gas. Thereby, the temperature difference between the cooling gas for heat exchange and the sample gas can be set larger, and the sample gas can be cooled more effectively.

(6) 有如下態樣:在上述第1配管的上述下端部中,於上述出口室開口的出口側開口係配置在,較上述樣氣引導部連通於上述出口室的位置更為下方。(6) In the lower end portion of the first piping, the outlet-side opening opening to the outlet chamber is arranged below a position where the sample gas guide communicates with the outlet chamber.

根據該構成,第1配管的出口側開口係配置在較樣氣引導部往出口室的連通位置更為下方,因此能夠更確實地防止從出口側開口滴落至出口室的水分侵入樣氣引導部。因此,能夠更確實地防止水分混入至水分被分離而被樣氣引導部引導的樣氣裡之情形。According to this structure, the outlet side opening of the first pipe is arranged below the communication position of the sample gas guide part to the outlet chamber, so it is possible to more reliably prevent moisture dripping from the outlet side opening into the outlet chamber from entering the sample gas guide. department. Therefore, it is possible to more reliably prevent moisture from being mixed into the sample gas separated from the moisture and guided by the sample gas guide section.

(7) 有如下態樣:上述出口室具有:出口室本體部,其中,上述第1配管開口,且其供上述樣氣引導部連通;及連通管部,其從上述出口室本體部的下端向下方延伸且於上述水分回收室開口而連通;上述水分回收室係構成為貯存水,上述連通管部的下端係構成為,在上述水分回收室中,在較貯存於上述水分回收室中之水的水面更下方處開口。(7) There is an aspect in which the outlet chamber has: an outlet chamber body part in which the first piping is opened and which communicates with the sample gas guide part; Extending downward and communicating with the opening of the above-mentioned water recovery chamber; the above-mentioned water recovery chamber is configured to store water, and the lower end of the above-mentioned communication pipe is configured to be in the above-mentioned water recovery chamber. The opening of the water is further below the surface of the water.

根據該構成,從第1配管滴落並排出到出口室本體部的水分係通過連通管部而朝貯存於水分回收室中之水的水面落下,並被回收到水分回收室中。另外,從第1配管流出到出口室本體部的樣氣係向樣氣引導部流動並被樣氣引導部引導,而朝分析計等供給目的地供給。並且,根據上述構成,將出口室本體部與水分回收室連通之連通管部的下端係在較貯存於水分回收室中之水的水面更下方處開口,亦即,在水分回收室內之水中開口。因此,能夠確實地防止出口室本體部外部的空氣從在水分回收室開口的連通管部流入之情形。藉此,能夠確實地防止外部的空氣混入至從出口室本體部向樣氣引導部流動並被樣氣引導部引導的樣氣中之情形。 (對照先前技術之功效) According to this configuration, the water dripped from the first pipe and discharged to the main body of the outlet chamber passes through the communication pipe, falls toward the water surface of the water stored in the water recovery chamber, and is recovered in the water recovery chamber. In addition, the sample gas flowing out from the first pipe to the outlet chamber body part flows toward the sample gas guide part, is guided by the sample gas guide part, and is supplied to a supply destination such as an analyzer. And, according to the above-mentioned configuration, the lower end of the communication pipe portion connecting the outlet chamber main body portion and the water recovery chamber opens at a position lower than the water surface of the water stored in the water recovery chamber, that is, opens into the water in the water recovery chamber. . Therefore, it is possible to reliably prevent the air outside the main body of the outlet chamber from flowing in through the communication pipe portion opened in the water recovery chamber. Thereby, it is possible to reliably prevent outside air from being mixed into the sample gas flowing from the outlet chamber main body to the sample gas guide and being guided by the sample gas guide. (compared to the effect of previous technology)

根據本發明,可提供一種水分分離裝置,其能夠抑制設備成本及設置空間的增大,同時能夠提高對樣氣的冷卻效率而實現水分的分離能力的提高,進而能夠容易地回收水分且有效地引導樣氣。According to the present invention, it is possible to provide a moisture separator capable of suppressing an increase in equipment cost and installation space, improving the cooling efficiency of the sample gas, and improving the ability to separate moisture, thereby enabling easy recovery of moisture and efficient Guide the sample gas.

以下,對於用以實施本發明之形態,參照圖式並進行說明。Hereinafter, modes for implementing the present invention will be described with reference to the drawings.

[水分分離裝置的應用形態] 本發明係作為從樣氣分離水分的水分分離裝置而可廣泛應用於各種用途。例如,從對被處理物進行各種處理時產生的氣體採集樣氣並分離水分,將分離出水分後的樣氣朝分析計等供給目的地供給時,本發明係作為用以從樣氣分離水分之水分分離裝置而被加以應用。在下述說明中,作為實施形態,以於下述系統中應用的水分分離裝置的形態為例而進行說明,該系統係從在熱處理裝置產生的排放氣體中採集的樣氣分離出水分,並將樣氣朝分析計供給。[Application form of water separator] The present invention can be widely used in various applications as a moisture separator for separating moisture from a sample gas. For example, the present invention is used as a method for separating moisture from the sample gas when sample gas is collected from the gas generated when various treatments are performed on the object to be processed, and when the moisture is separated, and the sample gas from which the moisture is separated is supplied to a supply destination such as an analyzer. The water separation device is applied. In the following description, as an embodiment, the form of the water separator used in the system for separating water from the sample gas collected from the exhaust gas generated by the heat treatment device and The sample gas is supplied to the analyzer.

圖1係示意地表示下述系統的圖,該系統中,從由熱處理裝置100產生的排放氣體中採集樣氣,在水分分離裝置1中從樣氣中分離出水分,並將分離出水分後的樣氣朝分析計101供給。Fig. 1 is a diagram schematically showing a system in which a sample gas is collected from exhaust gas generated by a heat treatment device 100, moisture is separated from the sample gas in a moisture separator 1, and after the moisture is separated, The sample gas is supplied to the analyzer 101.

熱處理裝置100構成為利用過熱水蒸氣加熱金屬製的被處理物(省略圖示)而進行被處理物的熱處理的裝置。再者,過熱水蒸氣是被加熱到高於沸點的溫度的水蒸氣,且為溫度高於沸點的乾燥水蒸氣。熱處理裝置100構成為具備呈筒狀地延伸的熱處理室102、及從外部加熱熱處理室102的加熱器103。在熱處理裝置100中,被處理物在熱處理室102內從入口102a向出口102b輸送,同時地,其被過熱水蒸氣加熱,從而進行被處理物的熱處理。再者,過熱水蒸氣係在具備鍋爐與過熱器而構成的過熱水蒸氣生成裝置104中生成。在過熱水蒸氣生成裝置104中,水被加熱而蒸發,生成的飽和水蒸氣被進一步加熱,藉此生成過熱水蒸氣,該過熱水蒸氣被供給至熱處理室102。The heat treatment apparatus 100 is configured as an apparatus that heats a metal to-be-processed object (not shown) with superheated steam to heat-treat the to-be-processed object. In addition, superheated steam is water vapor heated to a temperature higher than the boiling point, and is dry water vapor whose temperature is higher than the boiling point. The heat treatment apparatus 100 is configured to include a heat treatment chamber 102 extending in a cylindrical shape, and a heater 103 for heating the heat treatment chamber 102 from the outside. In the heat treatment apparatus 100, the object to be processed is transported from the inlet 102a to the outlet 102b in the heat treatment chamber 102, and simultaneously heated by superheated steam, thereby performing heat treatment on the object to be processed. In addition, the superheated steam is generated in the superheated steam generating device 104 including a boiler and a superheater. In the superheated steam generating device 104 , water is heated to evaporate, and the generated saturated steam is further heated to generate superheated steam, which is supplied to the heat treatment chamber 102 .

作為在熱處理裝置100中利用過熱水蒸氣進行的對於被處理物的熱處理,可示出例如脫脂處理、燒結處理。在熱處理裝置100中進行脫脂處理的情況下,在熱處理裝置100中的處理前的處理步驟中實施了機械加工等的被處理物係被搬入至熱處理裝置100中。並且,在熱處理裝置100中,附著於被處理物的油脂被過熱水蒸氣加熱而氣化,從被處理物除去。另外,在熱處理裝置100中進行燒結處理的情況下,將作為被燒結材料而構成的被處理物搬入熱處理裝置100,其中,該被燒結材料係利用以油脂成分為主要成分的黏結劑進行結合而形成。並且,在熱處理裝置100中,被處理物被過熱水蒸氣加熱,黏結劑氣化而被除去,接著利用過熱水蒸氣進一步加熱,藉此對除去了以油脂為主要成分的黏結劑的被處理物進行燒結。Examples of the heat treatment of the object to be treated using superheated steam in the heat treatment apparatus 100 include degreasing treatment and sintering treatment. When the degreasing treatment is performed in the heat treatment apparatus 100 , the processed object subjected to machining or the like in the treatment step before the treatment in the heat treatment apparatus 100 is carried into the heat treatment apparatus 100 . In addition, in the heat treatment apparatus 100, the oil and fat adhering to the object to be processed is heated and vaporized by the superheated steam, and removed from the object to be processed. In addition, when the sintering treatment is performed in the heat treatment apparatus 100, the object to be sintered is carried into the heat treatment apparatus 100 as a material to be sintered that is bonded with a binder mainly composed of oil and fat. form. In addition, in the heat treatment apparatus 100, the object to be processed is heated by superheated steam, the binder is vaporized and removed, and then further heated by superheated steam, whereby the object to be processed from which the binder mainly composed of oil and fat has been removed Carry out sintering.

若在熱處理裝置100中進行熱處理,則被處理物從熱處理室102的出口102b被搬出。另外,在熱處理裝置100中進行熱處理時,產生伴隨著熱處理室102內的脫脂處理等而生成的排放氣體。排放氣體係構成為,包含過熱水蒸氣、及藉由脫脂處理等而從被處理物除去的油脂等兩者的氣體。在熱處理裝置100中產生的排放氣體係從設置於熱處理室102中的出口102b附近的排氣口(省略圖示)被排出至排氣系統105。再者,在排氣系統105中例如設有噴射器(省略圖示),該噴射器藉由利用壓縮空氣等高壓流體產生負壓來對排放氣體進行抽吸與排出。藉此,從設置於熱處理室102中的出口102b附近的排氣口抽吸排放氣體並將其排出至排氣系統105。When heat treatment is performed in the heat treatment apparatus 100 , the object to be processed is carried out from the outlet 102 b of the heat treatment chamber 102 . In addition, when the heat treatment is performed in the heat treatment apparatus 100 , exhaust gas is generated accompanying degreasing treatment in the heat treatment chamber 102 and the like. The exhaust gas system is constituted as a gas containing both superheated steam and fats and the like removed from the object to be treated by degreasing treatment or the like. The exhaust gas generated in the heat treatment apparatus 100 is exhausted to the exhaust system 105 from an exhaust port (not shown) provided near the outlet 102 b in the heat treatment chamber 102 . Furthermore, for example, an ejector (not shown) is provided in the exhaust system 105 , and the ejector sucks and discharges the exhaust gas by using a high-pressure fluid such as compressed air to generate a negative pressure. By this, exhaust gas is sucked from an exhaust port provided in the heat treatment chamber 102 near the outlet 102 b and discharged to the exhaust system 105 .

排氣系統105與燃燒裝置106連接。從熱處理室102排出到排氣系統105的排放氣體在排氣系統105中流動並被導入燃燒裝置106中。燃燒裝置106具備:燃燒室(省略圖示) ,其被導入排放氣體;氧供給部(省略圖示),其藉由將外部的空氣供給至燃燒室內而將氧供給至燃燒室內;及加熱器(省略圖示),其設置於燃燒室內,將排放氣體加熱而使其燃燒。並且,燃燒裝置106構成為在將導入的排放氣體與空氣混合的狀態下將排放氣體加熱,使排放氣體燃燒。導入燃燒室中的排放氣體構成為包含過熱水蒸氣與油脂的氣體,藉由燃燒排放氣體,油脂燃燒而成為二氧化碳。構成為包含過熱水蒸氣與油脂之氣體的排放氣體係在燃燒裝置106中燃燒,藉此,該排放氣體係構成為包含過熱水蒸氣與二氧化碳之氣體。The exhaust system 105 is connected to a combustion device 106 . The exhaust gas discharged from the heat treatment chamber 102 to the exhaust system 105 flows in the exhaust system 105 and is introduced into the combustion device 106 . The combustion device 106 includes: a combustion chamber (not shown) into which exhaust gas is introduced; an oxygen supply unit (not shown) that supplies oxygen into the combustion chamber by supplying external air into the combustion chamber; and a heater. (illustration omitted), which is installed in the combustion chamber and heats the exhaust gas to burn it. Furthermore, the combustion device 106 is configured to heat the exhaust gas in a state where the introduced exhaust gas is mixed with air, and burn the exhaust gas. The exhaust gas introduced into the combustion chamber is composed of superheated steam and fat, and the fat is burned to carbon dioxide by combustion of the exhaust gas. The exhaust gas system constituted as a gas containing superheated steam and oil is combusted in the combustion device 106, whereby the exhaust gas system is constituted as a gas containing superheated steam and carbon dioxide.

在燃燒裝置106中燃燒的排放氣體被排出至排出系統107a。排出系統107a的下游端係向外部開放,從燃燒裝置106排出至排出系統107a的排放氣體係通過排出系統107a而排出至外部。另外,採樣系統107b係從排出系統107a分支,從燃燒裝置106排出至排出系統107a的排放氣體的一部分向採樣系統107b流動。藉此,在熱處理裝置100中產生並在燃燒裝置106中燃燒後排出的排放氣體的一部分係作為樣氣而被採集,並向採樣系統107b流動。The exhaust gas combusted in the combustion device 106 is exhausted to the exhaust system 107a. The downstream end of the discharge system 107a is opened to the outside, and the exhaust gas system discharged from the combustion device 106 to the discharge system 107a is discharged to the outside through the discharge system 107a. In addition, the sampling system 107b is branched from the exhaust system 107a, and part of the exhaust gas discharged from the combustion device 106 to the exhaust system 107a flows into the sampling system 107b. Thereby, a part of the exhaust gas generated in the heat treatment device 100 and discharged after combustion in the combustion device 106 is collected as a sample gas, and flows into the sampling system 107b.

從燃燒裝置106排出的排放氣體係構成為包含過熱水蒸氣與二氧化碳的氣體。並且,排出至排出系統107a後,作為排放氣體的一部分而被採集的樣氣係在以配管形式構成的採樣系統107b中流動的期間,藉由採樣系統107b的外部空氣而隔著採樣系統107b的管壁被冷卻。樣氣在採樣系統107b的流動中被冷卻,而溫度降低至接近外部空氣的溫度即室溫(例如,25℃)的溫度,例如,溫度降低至30℃左右。若溫度降低,則樣氣成為如下狀態,即,構成為包含水蒸氣與二氧化碳之氣體。再者,樣氣中的水蒸氣以飽和水蒸氣的狀態包含在樣氣中。並且,在採樣系統107b中流動的樣氣被導入水分分離裝置1中。The exhaust gas system discharged from the combustion device 106 is constituted as a gas containing superheated steam and carbon dioxide. And, after being discharged to the exhaust system 107a, the sample gas collected as part of the exhaust gas flows through the sampling system 107b constituted in the form of piping, and is separated by the outside air of the sampling system 107b through the sampling system 107b. The tube walls are cooled. The sample gas is cooled in the flow of the sampling system 107b, and the temperature is lowered to a temperature close to the temperature of the outside air, that is, room temperature (eg, 25°C), for example, the temperature is lowered to about 30°C. When the temperature is lowered, the sample gas becomes a state in which it is constituted as a gas containing water vapor and carbon dioxide. Furthermore, the water vapor in the sample gas is contained in the sample gas in the state of saturated water vapor. And, the sample gas flowing in the sampling system 107 b is introduced into the water separator 1 .

在水分分離裝置1中,導入的樣氣被冷卻,冷卻至充分低於室溫的溫度,例如冷卻至10℃左右。在水分分離裝置1中,樣氣從導入水分分離裝置1中時的溫度(例如,30℃)被冷卻至充分低於室溫的溫度(例如,10℃),藉此而將因應溫度所致的飽和水蒸氣量的差異而冷凝的水分從樣氣中分離。藉此,水分在水分分離裝置1中充分地從樣氣中分離。在水分分離裝置1中充分分離出水分後的樣氣係被引導至分析計供給系統108,在分析計供給系統108中流動。In the moisture separator 1 , the introduced sample gas is cooled to a temperature sufficiently lower than room temperature, for example, to about 10°C. In the water separator 1, the sample gas is cooled from the temperature (for example, 30°C) when it is introduced into the water separator 1 to a temperature sufficiently lower than room temperature (for example, 10°C), whereby the The condensed moisture is separated from the sample gas due to the difference in the amount of saturated water vapor. As a result, the moisture is sufficiently separated from the sample gas in the moisture separator 1 . The sample gas from which moisture has been sufficiently separated in the moisture separator 1 is led to the analyzer supply system 108 and flows through the analyzer supply system 108 .

在分析計供給系統108中流動的樣氣係在構成為配管的分析計供給系統108的流動中,藉由分析計供給系統108的外部空氣而隔著分析計供給系統108的管壁被加熱。樣氣在分析計供給系統108的流動中被加熱,藉此而升溫至接近外部空氣溫度即室溫(例如,25℃)的溫度,例如,溫度上升至20℃左右。若溫度上升,則樣氣的濕度降低。並且,濕度降低而構成為包含二氧化碳之氣體的樣氣係從分析計供給系統108被供給至分析計101。分析計101例如構成為紅外線分光光度計。若樣氣被供給至分析計101,則在分析計101進行樣氣的成分分析。藉由在分析計101進行樣氣的成分分析,例如可求出樣氣中的二氧化碳的含量。The sample gas flowing through the analyzer supply system 108 is heated through the pipe wall of the analyzer supply system 108 by the outside air of the analyzer supply system 108 in the flow of the analyzer supply system 108 constituted as a pipe. The sample gas is heated while flowing through the analyzer supply system 108 , thereby raising the temperature to a temperature close to room temperature (for example, 25° C.) which is the outside air temperature, for example, the temperature rises to about 20° C. As the temperature rises, the humidity of the sample gas decreases. Then, the sample gas which is a gas containing carbon dioxide with reduced humidity is supplied to the analyzer 101 from the analyzer supply system 108 . The analyzer 101 is configured as an infrared spectrophotometer, for example. When the sample gas is supplied to the analyzer 101 , the component analysis of the sample gas is performed at the analyzer 101 . By analyzing the components of the sample gas with the analyzer 101, for example, the content of carbon dioxide in the sample gas can be obtained.

如上所述,水分分離裝置例如應用於下述系統,該系統係從在熱處理裝置100中產生的排放氣體採集的樣氣中分離水分,並將樣氣供給至分析計101。以下,關於水分分離裝置的詳細實施形態,以第1~第7實施形態為例而進行說明。As described above, the moisture separation device is applied to, for example, a system that separates moisture from a sample gas collected from exhaust gas generated in the heat treatment device 100 and supplies the sample gas to the analyzer 101 . Hereinafter, the detailed embodiments of the water separator will be described by taking the first to seventh embodiments as examples.

[第1實施形態] 圖2係表示本發明之第1實施形態之水分分離裝置1與將冷卻氣體供給至水分分離裝置1的空氣冷卻器109的圖。圖3係表示本發明之第1實施形態之水分分離裝置1的圖。在圖2及圖3中,對於水分分離裝置1,以截面圖而加以圖示。再者,圖1中,例示如下形態:在下述系統中應用第1實施形態的水分分離裝置1,該系統係從在熱處理裝置100中產生的排放氣體採集的樣氣中分離水分,並將樣氣供給至分析計101。[First Embodiment] FIG. 2 is a diagram showing the water separator 1 and the air cooler 109 for supplying cooling gas to the water separator 1 according to the first embodiment of the present invention. Fig. 3 is a diagram showing a water separator 1 according to a first embodiment of the present invention. In FIG. 2 and FIG. 3 , the moisture separator 1 is shown in cross-sectional view. Furthermore, in FIG. 1 , an example is shown in which the water separator 1 of the first embodiment is applied to a system that separates water from a sample gas collected from exhaust gas generated in a heat treatment device 100, and separates the sample gas. The gas is supplied to the analyzer 101.

圖1至圖3所示的水分分離裝置1係將從採樣系統107a導入的樣氣冷卻,分離樣氣中包含的水分,並將樣氣供給至分析計供給系統108。另外,水分分離裝置1係構成為被導入有用於冷卻樣氣之冷卻氣體。本實施形態中,水分分離裝置1與空氣冷卻器109連接,用於冷卻樣氣的冷卻氣體從空氣冷卻器109導入。The moisture separator 1 shown in FIGS. 1 to 3 cools the sample gas introduced from the sampling system 107 a, separates moisture contained in the sample gas, and supplies the sample gas to the analyzer supply system 108 . In addition, the moisture separator 1 is configured to be introduced with cooling gas for cooling the sample gas. In this embodiment, the moisture separator 1 is connected to the air cooler 109 , and the cooling gas for cooling the sample gas is introduced from the air cooler 109 .

再者,空氣冷卻器109構成為下述裝置:藉由供給壓縮空氣,生成溫度充分低於室溫(例如,25°)的空氣作為冷卻氣體。經由壓縮空氣供給系統111,從具備壓縮機和壓縮空氣的儲罐而構成的壓縮空氣供給源110向空氣冷卻器109供給壓縮空氣。若從壓縮空氣供給系統111向空氣冷卻器109供給高壓的壓縮空氣,則高壓的空氣被供給至空氣冷卻器109內的渦流發生器。並且,高壓的空氣係藉由渦流發生器而在筒狀的空氣冷卻器109內沿筒狀的內周面的切線方向排出,形成一邊膨脹一邊以高速旋轉的渦流,同時地,沿著空氣冷卻器109的長度方向流動。並且,利用設置於空氣冷卻器109的一端部109a的調整閥而經調整風量的空氣係以熱風的狀態排出。另一方面,未從一端部109a排出的剩餘空氣係於在空氣冷卻器109的筒內因渦流的離心力形成的內側空洞內,沿著與外側的渦流相同的方向一邊旋轉一邊膨脹,並向空氣冷卻器109的另一端部109b側流動。此時,在渦流的內側向另一端部109b側移動的空氣在膨脹的同時由於因減速所致的制動作用而對外側的渦流產生作用,藉此而使溫度降低至低於室溫且高於0℃的既定溫度。並且,溫度降低至低於室溫的既定溫度的空氣係作為冷風而向另一端部109b流動。空氣冷卻器109的另一端部109b係經由連接配管112而與水分分離裝置1連接,從空氣冷卻器109的端部109b被排出之作為冷風的低溫的空氣係作為冷卻氣體而被導入水分分離裝置1。再者,如上所述,在空氣冷卻器109中生成並導入水分分離裝置1的冷卻氣體的溫度較佳設定為低於室溫且高於0℃的溫度。進而,從空氣冷卻器109導入水分分離裝置1的冷卻氣體的溫度較佳設定為高於0℃的溫度且充分低於室溫的溫度,更具體而言,較佳設定為高於0℃的溫度且與室溫相比更接近0℃的溫度。Furthermore, the air cooler 109 is configured as a device that generates air whose temperature is sufficiently lower than room temperature (for example, 25°) as cooling gas by supplying compressed air. Compressed air is supplied to the air cooler 109 via a compressed air supply system 111 from a compressed air supply source 110 including a compressor and a compressed air storage tank. When high-pressure compressed air is supplied from the compressed air supply system 111 to the air cooler 109 , the high-pressure air is supplied to the vortex generators in the air cooler 109 . And, the high-pressure air system is discharged in the tangential direction of the cylindrical inner peripheral surface in the cylindrical air cooler 109 by the vortex generator, and forms a vortex that rotates at a high speed while expanding, and simultaneously cools the air along the air. The length direction of the device 109 flows. And the air whose air volume is adjusted by the adjustment valve provided in the one end part 109a of the air cooler 109 is discharged|emitted in the state of hot air. On the other hand, the remaining air not discharged from the one end 109a is in the inner cavity formed by the centrifugal force of the vortex in the tube of the air cooler 109, expands while rotating in the same direction as the outer vortex, and is cooled by the air. The other end 109b side of the device 109 flows. At this time, the air moving to the other end portion 109b side inside the vortex acts on the outer vortex due to braking action due to deceleration while expanding, thereby reducing the temperature to below room temperature and above. A given temperature of 0°C. Then, the air whose temperature has been lowered to a predetermined temperature lower than the room temperature flows toward the other end 109b as cold air. The other end 109b of the air cooler 109 is connected to the water separator 1 through the connecting pipe 112, and the low-temperature air discharged from the end 109b of the air cooler 109 as cold air is introduced into the water separator as cooling gas. 1. Furthermore, as described above, the temperature of the cooling gas generated in the air cooler 109 and introduced into the moisture separator 1 is preferably set to a temperature lower than room temperature and higher than 0°C. Furthermore, the temperature of the cooling gas introduced into the water separator 1 from the air cooler 109 is preferably set to a temperature higher than 0°C and sufficiently lower than room temperature, more specifically, preferably set to a temperature higher than 0°C. temperature and is closer to 0°C than room temperature.

如圖1至圖3所示,水分分離裝置1具備第1配管11、第2配管12、出口室13、水分回收室14及樣氣引導部15而構成。As shown in FIGS. 1 to 3 , the water separator 1 includes a first pipe 11 , a second pipe 12 , an outlet chamber 13 , a water recovery chamber 14 , and a sample gas guide 15 .

第1配管11構成為,被導入有包含水分的樣氣且樣氣向下方流動的配管。第1配管11係設置成為,截面呈圓形且細長並呈直線狀地延伸的圓管狀的配管。第1配管11係設置成為,導熱性優異的金屬製的圓管,例如,設置成為不鏽鋼製的圓管。第1配管11係相對於後述的第2配管12而被加以支撐。另外,第1配管11係在其長度方向沿上下方向延伸的狀態下,相對於第2配管12而被加以支撐,本實施形態中,設置成直線狀地上下延伸。The first pipe 11 is configured as a pipe into which a sample gas containing moisture is introduced and the sample gas flows downward. The first pipe 11 is provided as a round tube-shaped pipe that has a circular cross-section, is elongated, and extends linearly. The first piping 11 is provided as a round pipe made of metal having excellent thermal conductivity, for example, a round pipe made of stainless steel. The first pipe 11 is supported with respect to the second pipe 12 described later. Moreover, the 1st piping 11 is supported with respect to the 2nd piping 12 in the state which extended the longitudinal direction along the up-down direction, and in this embodiment, it is provided so that it may extend linearly up and down.

第1配管11的上端部係經由連接器107c而與採樣系統107b的下游側端部連接。包含水分的樣氣係在飽和水蒸氣的狀態下從採樣系統107b導入至第1配管11的上端部。再者,圖3中,以細虛線的箭頭示意地表示樣氣流動的情況。從上方導入第1配管11的上端部的樣氣係在第1配管11的內側沿著第1配管11延伸的上下方向而向下方流動。第1配管11貫通後述的第2配管12的內側,第1配管11的下端部係在後述的出口室13內開口。The upper end of the first pipe 11 is connected to the downstream end of the sampling system 107b via a connector 107c. The sample gas containing moisture is introduced from the sampling system 107b to the upper end of the first pipe 11 in a state saturated with water vapor. Furthermore, in FIG. 3 , the flow of the sample gas is schematically indicated by arrows of thin dotted lines. The sample gas introduced from above to the upper end of the first pipe 11 flows downward inside the first pipe 11 along the vertical direction in which the first pipe 11 extends. The first pipe 11 penetrates inside a second pipe 12 described later, and the lower end of the first pipe 11 opens into an outlet chamber 13 described later.

第2配管12構成為下述配管:內側配置有第1配管11的至少一部分,被導入有溫度低於樣氣的冷卻氣體的同時,冷卻氣體向下方流動。第2配管12係設置成為,截面呈圓形且呈直線狀地延伸的圓筒狀的配管。第2配管12係設置成為,導熱性優異的金屬製的圓管,例如,設置成為不鏽鋼製的圓管。第2配管12例如相對於被固定在水分回收室14的支撐框架16而被固定支撐。另外,第2配管12係在其長度方向沿上下方向延伸的狀態下相對於支撐框架16而被加以支撐,本實施形態中,設置成直線狀地上下延伸。The second pipe 12 is configured as a pipe in which at least a part of the first pipe 11 is arranged inside, and a cooling gas having a temperature lower than that of the sample gas is introduced and the cooling gas flows downward. The second pipe 12 is provided as a cylindrical pipe that has a circular cross section and extends linearly. The second piping 12 is provided as a round pipe made of metal having excellent thermal conductivity, for example, a round pipe made of stainless steel. The second pipe 12 is fixedly supported by, for example, a support frame 16 fixed to the water recovery chamber 14 . Moreover, the 2nd piping 12 is supported with respect to the support frame 16 in the state which extended the longitudinal direction along the up-down direction, and in this embodiment, it is provided so that it may extend linearly up and down.

在第2配管12設有:圓管狀的管本體部12a,其截面呈圓形並直線狀地延伸;上蓋部12b,其堵塞管本體部12a的上端部;及下蓋部12c,其堵塞管本體部12a的下端部。上蓋部12b係設置成為,在中心形成有貫通孔的圓板狀構件,在以氣密狀態與管本體部12a的上端部密合的狀態下被固定於管本體部12a的上端部。並且,在上蓋部12b的貫通孔中插通有第1配管11。第1配管11係在經由密封構件而以氣密狀態對上蓋部12b的貫通孔的緣部密合的狀態下插通於上蓋部12b的貫通孔。下蓋部12c係設置成為,在中心形成有貫通孔的圓板狀構件,在以氣密狀態與管本體部12a的下端部密合的狀態下被固定於管本體部12a的下端部。並且,在下蓋部12c的貫通孔中插通有貫通管本體部12a的第1配管11。第1配管11係在經由密封構件而以氣密狀態對下蓋部12c的貫通孔的緣部密合的狀態下插通於下蓋部12c的貫通孔。The second piping 12 is provided with: a circular pipe-shaped pipe main body 12a whose cross-section is circular and linearly extending; an upper cover 12b which closes the upper end of the pipe main body 12a; and a lower cover 12c which closes the pipe The lower end portion of the main body portion 12a. The upper cover portion 12b is provided as a disc-shaped member having a through hole formed in the center, and is fixed to the upper end of the pipe main body 12a in an airtight state. In addition, the first pipe 11 is inserted into the through hole of the upper cover portion 12b. The first pipe 11 is inserted into the through hole of the upper cover part 12b in a state of being airtightly sealed to the edge of the through hole of the upper cover part 12b via a sealing member. The lower cover portion 12c is provided as a disc-shaped member having a through hole formed in the center, and is fixed to the lower end portion of the pipe main body portion 12a in an airtight state. In addition, the first pipe 11 penetrating through the pipe main body 12 a is inserted into the through hole of the lower cover 12 c. The first pipe 11 is inserted into the through-hole of the lower cover 12c in a state of being airtightly sealed to the edge of the through-hole of the lower cover 12c via a sealing member.

第1配管11係以貫通上蓋部12b、插通管本體部12a、進而貫通下蓋部12c的狀態安裝於第2配管12。因此,第1配管11以插入第2配管12的內側的狀態配置。另外,第1配管11貫通設置於上蓋部12b的中心的貫通孔,同時貫通設置於下蓋部12c的中心的貫通孔。並且,第1配管11係與管本體部12a平行地延伸,沿著其中心軸線插通管本體部12a。因此,第1配管11與第2配管12設置成為,呈中心軸線一致的同心狀地配置的雙重管。The 1st piping 11 is attached to the 2nd piping 12 in the state which penetrated the upper cover part 12b, the insertion pipe main body part 12a, and further penetrated the lower cover part 12c. Therefore, the first pipe 11 is arranged in a state inserted into the second pipe 12 . Moreover, the 1st piping 11 penetrates the through-hole provided in the center of the upper cover part 12b, and penetrates the through-hole provided in the center of the lower cover part 12c simultaneously. And the 1st piping 11 extends parallel to the pipe main body part 12a, and is inserted through the pipe main body part 12a along the center axis|shaft. Therefore, the first pipe 11 and the second pipe 12 are provided as double pipes arranged concentrically so that their central axes coincide.

另外,在水分分離裝置1中,設有冷卻氣體導入管17a及冷卻氣體排出管17b,冷卻氣體導入管17a及冷卻氣體排出管17b係與第2配管12的管本體部12a連接。In addition, the water separator 1 is provided with a cooling gas introduction pipe 17 a and a cooling gas discharge pipe 17 b connected to the pipe main body 12 a of the second pipe 12 .

冷卻氣體導入管17a係設置成管長較短的圓管,其構成為將從空氣冷卻器109供給的冷卻氣體導入至第2配管12。更具體而言,冷卻氣體導入管17a中,管長方向的一端部係連接至與空氣冷卻器109的端部109b連接的連接配管112,管長方向的另一端部係在管本體部12a的上端側連接於管本體部12a。另外,冷卻氣體導入管17a的另一端部係以氣密狀態貫通設置於管本體部12a的上端側並貫通管本體部12a的管壁之貫通孔,而在管本體部12a的內部開口。藉此,空氣冷卻器109的端部109b與第2配管12內的上端側的區域係經由冷卻氣體導入管17a而連通。The cooling gas introduction pipe 17 a is provided as a short circular pipe, and is configured to introduce the cooling gas supplied from the air cooler 109 into the second pipe 12 . More specifically, in the cooling gas introduction pipe 17a, one end in the pipe length direction is connected to the connecting pipe 112 connected to the end 109b of the air cooler 109, and the other end in the pipe length direction is on the upper end side of the pipe main body 12a. Connected to the pipe main body 12a. In addition, the other end portion of the cooling gas introduction pipe 17a is airtightly penetrated through a through hole provided on the upper end side of the pipe main body 12a and penetrates the pipe wall of the pipe main body 12a, and opens inside the pipe main body 12a. Thereby, the end part 109b of the air cooler 109 communicates with the region on the upper end side in the second pipe 12 via the cooling gas introduction pipe 17a.

冷卻氣體排出管17b係設置成管長較短的圓管,其構成為將導入至第2配管12並在第2配管12中流動的冷卻氣體從第2配管12排出。更具體而言,冷卻氣體排出管17b中,管長方向的一端部係在管本體部12a的下端側連接至管本體部12a,管長方向的另一端部側的部分係向管本體部12a的外側突出。並且,冷卻氣體排出管17b的一端部係以氣密狀態貫通設置於管本體部12a的下端側並貫通管本體部12a的管壁的貫通孔,在管本體部12a的內部開口。另一方面,從管本體部12a向外部突出的冷卻氣體排出管17b的另一端部向外部開口。藉此,第2配管12內的下端側的區域與第2配管12的外部係經由冷卻氣體排出管17b而連通。The cooling gas discharge pipe 17b is provided as a short circular pipe, and is configured to discharge the cooling gas introduced into the second pipe 12 and flowing through the second pipe 12 from the second pipe 12 . More specifically, in the cooling gas discharge pipe 17b, one end portion in the pipe length direction is connected to the pipe body portion 12a at the lower end side of the pipe body portion 12a, and a portion on the other end side in the pipe length direction is directed to the outside of the pipe body portion 12a. protrude. In addition, one end of the cooling gas discharge pipe 17b is airtightly penetrated through a through hole provided on the lower end side of the pipe main body 12a and penetrates the pipe wall of the pipe main body 12a, and opens inside the pipe main body 12a. On the other hand, the other end portion of the cooling gas discharge pipe 17b protruding outward from the pipe main body portion 12a is opened to the outside. Thereby, the region on the lower end side in the second pipe 12 communicates with the outside of the second pipe 12 via the cooling gas discharge pipe 17b.

如上所述,在第2配管12的上端側連接有冷卻氣體導入管17a。因此,被空氣冷卻器109冷卻並從端部109b排出的空氣係作為冷卻氣體而經由冷卻氣體導入管17a被導入第2配管12內的上端側的區域。並且,導入第2配管12內的冷卻氣體係在第2配管12內向下方流動。再者,圖3中,以細實線的箭頭示意地表示冷卻氣體流動的情況。As described above, the cooling gas introduction pipe 17 a is connected to the upper end side of the second pipe 12 . Therefore, the air cooled by the air cooler 109 and discharged from the end portion 109b is introduced as cooling gas into the region on the upper end side in the second pipe 12 via the cooling gas introduction pipe 17a. In addition, the cooling air introduced into the second pipe 12 flows downward in the second pipe 12 . In addition, in FIG. 3, the flow of cooling gas is schematically shown by the arrow of thin solid line.

另外,第1配管11及第2配管12均呈直線狀地上下延伸,設置成中心軸線一致的雙重管。並且,樣氣係於在第2配管12內側呈同心狀地配置之第1配管11內側向下方流動,冷卻氣體係在第2配管12的內側且第1配管11的外側的區域中向下方流動。因此,冷卻氣體係沿著與第1配管11中的樣氣的流動方向平行的方向而在第2配管12中流動。進而,冷卻氣體係沿著與樣氣的流動方向平行且相同的方向而在第2配管12中向下方流動。使樣氣在第1配管11的內側向下方流動,冷卻氣體在第2配管12的內側且第1配管11的外側向下方流動,藉此,經由第1配管11之管壁的全周,在樣氣與冷卻氣體之間進行熱交換。藉此,在第1配管11的流動中,樣氣被冷卻,伴隨著因樣氣中的溫度降低引起的飽和水蒸氣量的減少,因應由溫度所致的飽和水蒸氣量的差異而冷凝的水分係在第1配管11內從樣氣中分離出去。在第1配管11內從樣氣中分離出的水分係在第1配管11中落下,從在後述的出口室13內開口的第1配管11的下端部滴落至出口室13內。再者,圖3中,用粗虛線的箭頭示意地表示從樣氣分離出的水分落下的情況。Moreover, both the 1st piping 11 and the 2nd piping 12 extend linearly up and down, and are provided as double pipes whose central axes coincide. In addition, the sample gas flows downward in the first pipe 11 arranged concentrically inside the second pipe 12, and the cooling gas flows downward in a region inside the second pipe 12 and outside the first pipe 11. . Therefore, the cooling gas flows in the second pipe 12 in a direction parallel to the flow direction of the sample gas in the first pipe 11 . Furthermore, the cooling gas system flows downward in the second pipe 12 in the same direction as the flow direction of the sample gas in parallel. The sample gas flows downward inside the first pipe 11, and the cooling gas flows downward inside the second pipe 12 and outside the first pipe 11, thereby passing through the entire circumference of the pipe wall of the first pipe 11, Heat exchange takes place between the sample gas and the cooling gas. As a result, the sample gas is cooled in the flow of the first pipe 11, and the amount of saturated water vapor is condensed according to the difference in the amount of saturated water vapor due to temperature as the temperature in the sample gas decreases. Moisture is separated from the sample gas in the first pipe 11 . The moisture separated from the sample gas in the first pipe 11 falls in the first pipe 11 and drips into the outlet chamber 13 from the lower end of the first pipe 11 opening in the outlet chamber 13 described later. In addition, in FIG. 3 , the situation where the water separated from the sample gas falls is schematically shown by the arrow of the thick dotted line.

另外,在第2配管12的下游端側連接有冷卻氣體排出管17b。因此,在第2配管12中向下方流動並經由第1配管11的管壁而在與樣氣之間進行熱交換的冷卻氣體係向冷卻氣體排出管17b流動,經由冷卻氣體排出管17b而排出至第2配管12的外部。In addition, a cooling gas discharge pipe 17 b is connected to the downstream end side of the second pipe 12 . Therefore, the cooling gas that flows downward in the second pipe 12 and exchanges heat with the sample gas through the pipe wall of the first pipe 11 flows toward the cooling gas discharge pipe 17b, and is discharged through the cooling gas discharge pipe 17b. to the outside of the second piping 12 .

出口室13係配置於第2配管12的下方,且其設置成為,被導入有從第1配管11流出的樣氣的室。在本實施形態中,出口室13係相對於第2配管12而在上下方向相鄰地配置。出口室13係構成為具有出口室本體部18與連通管部19。The outlet chamber 13 is arranged below the second pipe 12 and is provided as a chamber into which the sample gas flowing out from the first pipe 11 is introduced. In the present embodiment, the outlet chamber 13 is arranged adjacent to the second pipe 12 in the vertical direction. The outlet chamber 13 is configured to have an outlet chamber main body portion 18 and a communication pipe portion 19 .

出口室13的出口室本體部18係構成為,在其中,第1配管11開口且其供後述之樣氣引導部15連通,並設置成用於導入樣氣並且將所導入的樣氣送至樣氣引導部15的室。具體而言,出口室本體部18例如具有形成為圓筒狀的側壁18a與形成為圓板狀的底部壁18b。並且,出口室本體部18構成為下述室:側壁18a的上端側被第2配管12的下蓋部12c氣密地封閉,且側壁18a的下端側被底壁部18b氣密地封閉,藉此而被劃分出的室。The outlet chamber main body 18 of the outlet chamber 13 is configured such that the first pipe 11 is opened therein and communicates with a sample gas guide 15 described later, and is provided for introducing a sample gas and sending the introduced sample gas to Chamber of the sample gas guide 15. Specifically, the outlet chamber main body 18 has, for example, a cylindrical side wall 18 a and a disk-shaped bottom wall 18 b. And, the outlet chamber main body portion 18 is constituted as a chamber: the upper end side of the side wall 18a is airtightly closed by the lower cover portion 12c of the second pipe 12, and the lower end side of the side wall 18a is airtightly closed by the bottom wall portion 18b. The room thus divided.

另外,在出口室本體部18內,貫通第2配管12的下蓋部12c的第1配管11係從下蓋部12c向下方延伸。第1配管11在出口室本體部18內從下蓋部12c延伸至出口室本體部18中的上下方向的高度位置的中途位置。再者,本實施形態中,第1配管11在出口室本體部18內延伸至高度方向的大致中央部分的位置。並且,在出口室本體部18內向下方延伸的第1配管11的下端部係在出口室本體部18內開口。另外,在出口室本體部18,於側壁18a連通有後述的樣氣連通部15。Moreover, in the outlet chamber main body part 18, the 1st piping 11 which penetrates the lower cover part 12c of the 2nd piping 12 extends downward from the lower cover part 12c. The first pipe 11 extends from the lower cover portion 12 c to a halfway position in the vertical direction of the outlet chamber body portion 18 in the outlet chamber body portion 18 . In addition, in this embodiment, the 1st piping 11 extends to the position of the substantially center part in the height direction in the outlet chamber main body part 18. As shown in FIG. In addition, the lower end portion of the first pipe 11 extending downward in the outlet chamber main body portion 18 is opened in the outlet chamber main body portion 18 . In addition, in the outlet chamber main body portion 18, a sample gas communication portion 15, which will be described later, communicates with the side wall 18a.

如上所述,由於第1配管11在出口室本體部18內開口,因此從第1配管11流出的樣氣被導入至出口室13。進而,由於第1配管11的下端部在出口室本體部18內開口,因此在第1配管11內從樣氣分離出的水分成為水滴的狀態,沿著第1配管11而向下方落下,從第1配管11的下端部滴落至出口室13。如此,出口室13係構成為,樣氣從第1配管11導入,並且從樣氣分離出的水分從第1配管11的下端部滴落。As described above, since the first pipe 11 opens in the outlet chamber main body 18 , the sample gas flowing out from the first pipe 11 is introduced into the outlet chamber 13 . Furthermore, since the lower end portion of the first pipe 11 is opened in the outlet chamber main body 18, the moisture separated from the sample gas in the first pipe 11 is in the state of water droplets, and falls downward along the first pipe 11, from which The lower end of the first pipe 11 drips into the outlet chamber 13 . In this way, the outlet chamber 13 is configured such that the sample gas is introduced from the first pipe 11 and the water separated from the sample gas drips from the lower end of the first pipe 11 .

出口室13的連通管部19構成為下述管部分:從出口室本體部18的下端向下方延伸,並且在後述的水分回收室14開口而與其連通。連通管部19形成為在上下方向細長地延伸的圓管狀,上端部係連接於出口室本體部18的底壁部18b,下端部係在後述的水分回收室14內開口。在形成為圓板狀的底壁部18b的中心設有貫通孔,連通管部19的上端部係以氣密狀態嵌入並固定於該貫通孔。連通管部19的上端部開口,連通管部19係與出口室本體部18內連通。The communication pipe portion 19 of the outlet chamber 13 is configured as a pipe portion extending downward from the lower end of the outlet chamber body portion 18 and opening to communicate with the water recovery chamber 14 described later. The communication pipe part 19 is formed in the shape of a circular tube elongated in the vertical direction, the upper end part is connected to the bottom wall part 18b of the outlet chamber main body part 18, and the lower end part is opened in the water recovery chamber 14 described later. A through hole is provided at the center of the disk-shaped bottom wall portion 18b, and the upper end portion of the communication pipe portion 19 is fitted into and fixed to the through hole in an airtight state. The upper end of the communication pipe part 19 is open, and the communication pipe part 19 communicates with the inside of the outlet chamber main body part 18 .

連通管部19係以與出口室本體部18內連通的狀態連接於出口室本體部18的下端。因此,從樣氣分離出並在出口室本體部18內從第1配管11的下端部滴落的水分係在出口室本體部18內落下,從出口室本體部18的下端向連通管部19移動。另外,連通管部19係在水分回收室14內開口。因此,向連通管部19移動的水分係在連通管部19中落下,被回收至水分回收室14。再者,本實施形態中,連通管部19的上端部係配置於第1配管11的下端部的鉛直下方。因此,在出口室本體部18內從第1配管11滴落的水分係向下方落下並直接落下到連通管部19的上端部,在連通管部19內通過並回收至水分回收室14。The communication pipe portion 19 is connected to the lower end of the outlet chamber main body portion 18 in a state of communicating with the inside of the outlet chamber main body portion 18 . Therefore, the water separated from the sample gas and dripped from the lower end of the first pipe 11 in the outlet chamber main body 18 falls in the outlet chamber main body 18 and flows from the lower end of the outlet chamber main body 18 to the communication pipe 19. move. In addition, the communication pipe part 19 is opened in the water recovery chamber 14 . Therefore, the water that has moved to the communication pipe portion 19 falls in the communication pipe portion 19 and is collected into the water recovery chamber 14 . In addition, in this embodiment, the upper end part of the communication pipe part 19 is arrange|positioned vertically below the lower end part of the 1st piping 11. As shown in FIG. Therefore, the water dripped from the first pipe 11 in the outlet chamber main body 18 falls downward and directly falls to the upper end of the communication pipe 19 , passes through the communication pipe 19 and is recovered to the water recovery chamber 14 .

水分回收室14構成為下述室:與出口室13連通並配置於出口室13的下方,回收從樣氣分離出的水分。水分回收室14係設置成上方開放的容器,構成為在內側貯存水。再者,圖2及圖3係以截面圖表示在水分回收室14中貯存有水Wa的狀態。水分回收室14例如形成為上表面開放的長方體狀或圓筒狀的容器,相對於出口室13而在上下方向串列地配置,並配置於出口室13的下方。在水分回收室14中開放的上表面係例如配置於與出口室13的出口室本體部18的下端大致相同的高度位置。The moisture recovery chamber 14 is configured as a chamber communicated with the outlet chamber 13 and disposed below the outlet chamber 13, and recovers moisture separated from the sample gas. The water recovery chamber 14 is a container provided with an open top, and is configured to store water inside. In addition, FIG. 2 and FIG. 3 are sectional views showing the state in which the water Wa is stored in the water recovery chamber 14 . Moisture recovery chamber 14 is formed, for example, as a rectangular parallelepiped or cylindrical container with an open upper surface, arranged vertically in series with outlet chamber 13 , and arranged below outlet chamber 13 . The upper surface opened in the moisture recovery chamber 14 is arranged at substantially the same height as the lower end of the outlet chamber main body portion 18 of the outlet chamber 13 , for example.

另外,在水分回收室14設有排水口14a。排水口14a係在水分回收室14的側壁的上端側設置成貫通孔。當水被供給並貯存於水分回收室14時,貯存於水分回收室14中的水Wa的水面上升至排水口14a的高度位置。並且,若向水分回收室14供給的水超過排水口14a的高度位置,則水從排水口14a向水分回收室14的外部排出。再者,本實施形態中,於水分回收室14,在排水口14a的位置連接有排水管14b,從排水口14a排出的水向排水管14b排出。In addition, a drain port 14 a is provided in the water recovery chamber 14 . The drain port 14 a is formed as a through hole on the upper end side of the side wall of the water recovery chamber 14 . When water is supplied and stored in the water recovery chamber 14, the water surface of the water Wa stored in the water recovery chamber 14 rises to the level of the water outlet 14a. And, when the water supplied to the water recovery chamber 14 exceeds the height position of the drain port 14a, the water is discharged to the outside of the water recovery chamber 14 from the water drain port 14a. In addition, in this embodiment, the drain pipe 14b is connected to the water recovery chamber 14 at the position of the drain port 14a, and the water discharged from the drain port 14a is discharged to the drain pipe 14b.

另外,在水分回收室14的內側,從出口室本體部18的下端延伸的連通管部19係從水分回收室14的上表面側向底面側往下方延伸。並且,連通管部19係在水分回收室14內延伸至較排水口14a開口的高度位置更下方的位置。因此,連通管部19的下端係在水分回收室14內於較排水口14a開口的位置更下方處開口。藉此,連通管部19構成為,其下端係於水分回收室14中在較貯存於水分回收室14的水Wa的水面更下方處開口。從樣氣分離出並從第1配管11滴落的水分係通過出口室本體部18而在連通管部19落下,到達水分回收室14內的水Wa的水面,被回收至水分回收室14。In addition, inside the moisture recovery chamber 14 , the communication pipe portion 19 extending from the lower end of the outlet chamber body portion 18 extends downward from the upper surface side to the bottom surface side of the moisture recovery chamber 14 . In addition, the communication pipe part 19 extends to a position lower than the height position at which the drain port 14a opens in the water recovery chamber 14 . Therefore, the lower end of the communication pipe portion 19 opens in the water recovery chamber 14 at a position lower than the opening of the drain port 14a. Thereby, the communication pipe part 19 is comprised so that the lower end may open in the water recovery chamber 14 below the water surface of the water Wa stored in the water recovery chamber 14. As shown in FIG. The water separated from the sample gas and dripped from the first pipe 11 passes through the outlet chamber main body 18 and falls in the communication pipe 19 , reaches the water surface of the water Wa in the water recovery chamber 14 , and is recovered in the water recovery chamber 14 .

樣氣引導部15係設置成與出口室13連接的配管,且其構成為與出口室13連通並對流出到出口室13的樣氣進行引導。更具體而言,樣氣引導部15係設置成圓管,管長方向的一端部係在出口室本體部18的上半側對於出口室13的出口室本體部18的側壁18a而連接。並且,樣氣引導部15的管長方向的另一端部係連接至與分析計101連接的分析計供給系統108。The sample gas guide 15 is a pipe provided to connect to the outlet chamber 13 , and is configured to communicate with the outlet chamber 13 and guide the sample gas flowing out into the outlet chamber 13 . More specifically, the sample gas guide 15 is formed as a circular tube, and one end in the length direction of the tube is connected to the side wall 18a of the outlet chamber body 18 of the outlet chamber 13 on the upper half side of the outlet chamber body 18 . In addition, the other end in the tube length direction of the sample gas guide 15 is connected to an analyzer supply system 108 connected to the analyzer 101 .

另外,樣氣引導部15的一端部係以氣密狀態貫通設置於出口室本體部18的上半側並貫通側壁18a的貫通孔,而在出口室本體部18的內部開口。藉此,出口室本體部18的上半側的區域與分析計供給系統108係經由樣氣引導部15而連通。另外,在出口室本體部18中,樣氣引導部15係在出口室本體部18的高度方向中較中間位置更上方的位置處與出口室本體部18的內部連通。並且,在出口室本體部18內從出口室本體部18的上端側向下方延伸的第1配管11係延伸至出口室本體部18的高度方向中的大致中間位置。因此,在第1配管11的下端部於出口室13開口的出口側開口11a係配置於較樣氣引導部15與出口室13連通的位置更下方處。因此,從出口側開口11a流出至出口室13的樣氣係向樣氣引導部15流動,另一方面,可防止從出口側開口11a滴落的水分向樣氣引導部15流動之情形。In addition, one end of the sample gas guide 15 is airtightly penetrated through a through hole provided on the upper half side of the outlet chamber main body 18 and through the side wall 18 a , and opens inside the outlet chamber main body 18 . Thereby, the upper half area of the outlet chamber main body 18 communicates with the analyzer supply system 108 via the sample gas guide 15 . In addition, in the outlet chamber main body 18 , the sample gas guide 15 communicates with the inside of the outlet chamber main body 18 at a position higher than the middle position in the height direction of the outlet chamber main body 18 . Furthermore, the first pipe 11 extending downward from the upper end side of the outlet chamber main body 18 in the outlet chamber main body 18 extends to a substantially middle position in the height direction of the outlet chamber main body 18 . Therefore, the outlet-side opening 11 a that opens to the outlet chamber 13 at the lower end of the first pipe 11 is disposed below the position where the sample gas guide 15 communicates with the outlet chamber 13 . Therefore, the sample gas flowing out of the outlet opening 11 a to the outlet chamber 13 flows toward the sample gas guide 15 , while water dripping from the outlet opening 11 a is prevented from flowing toward the sample gas guide 15 .

接著,對上述水分分離裝置1的水分分離動作進行說明。分離水分的對象樣氣係從採樣系統107b被導入水分分離裝置1。樣氣係作為在熱處理裝置100中產生後在燃燒裝置106中燃燒並排出至排出系統107a的排放氣體的一部分,被採樣至採樣系統107b。樣氣係在溫度與室溫相比相當高的狀態被採樣至採樣系統107b,但藉由在採樣系統107b中流動,溫度降低至接近外部空氣的溫度即室溫(例如,25℃)的溫度,例如,溫度降低至30℃左右。並且,樣氣係在溫度降低至接近室溫的溫度的狀態下被導入至水分分離裝置1中之第1配管11。Next, the water-separating operation of the above-mentioned water-separating device 1 will be described. The target sample gas for moisture separation is introduced into the moisture separator 1 from the sampling system 107b. The sample gas is sampled to the sampling system 107b as part of the exhaust gas that is generated in the heat treatment device 100, burned in the combustion device 106 and discharged to the exhaust system 107a. The sample gas is sampled to the sampling system 107b in a state where the temperature is relatively high compared with room temperature, but by flowing in the sampling system 107b, the temperature is lowered to a temperature close to the temperature of the outside air, that is, room temperature (for example, 25°C). , for example, the temperature is lowered to around 30°C. In addition, the sample gas is introduced into the first pipe 11 of the moisture separator 1 in a state where the temperature is lowered to a temperature close to room temperature.

另外,從採樣系統107b向水分分離裝置1導入樣氣的同時,從空氣冷卻器109向水分分離裝置1導入冷卻氣體。冷卻氣體在空氣冷卻器109中自壓縮空氣生成,生成為冷卻至溫度充分低於室溫的空氣,例如,生成為冷卻至溫度高於0℃的範圍且溫度充分低於室溫的空氣。冷卻氣體係從空氣冷卻器109經過冷卻氣體導入管17a而被導入第2配管12。In addition, while the sample gas is introduced from the sampling system 107b to the water separator 1 , cooling gas is introduced from the air cooler 109 to the water separator 1 . The cooling gas is generated from compressed air in the air cooler 109 as air cooled to a temperature sufficiently below room temperature, for example, air cooled to a range above 0° C. and sufficiently below room temperature. The cooling gas is introduced from the air cooler 109 to the second pipe 12 through the cooling gas introduction pipe 17a.

樣氣及冷卻氣體係繼續地朝水分分離裝置1導入。樣氣繼續地被導入至第1配管11,冷卻氣體係經過冷卻氣體導入管17a而繼續地被導入第2配管12。樣氣係當如圖3的細虛線的箭頭所示般導入第1配管11時,在上下地延伸的第1配管11中從上方朝下方流動。並且,冷卻氣體係當導入第2配管12時,如圖3的細實線的箭頭所示般,在上下地延伸的第2配管12中從上方朝下方流動。此時,樣氣在配置於第2配管12內側的第1配管11的內側流動,同時地,冷卻氣體在第2配管12的內側且第1配管11的外側流動。並且,樣氣與冷卻氣體係沿相同方向流動,同時地,經由第1配管11之管壁而在樣氣與冷卻氣體之間進行熱交換,而樣氣被冷卻。樣氣係沿著第1配管11流動並被冷卻,藉此,因應樣氣中的溫度所致之飽和水蒸氣量的差異,樣氣中包含的水分的一部分發生冷凝而被分離。The sample gas and cooling gas system are continuously introduced into the moisture separator 1 . The sample gas is continuously introduced into the first pipe 11, and the cooling gas is continuously introduced into the second pipe 12 through the cooling gas introduction pipe 17a. When the sample gas is introduced into the first pipe 11 as indicated by the thin dotted arrow in FIG. 3 , it flows from above to below in the first pipe 11 extending vertically. Furthermore, when the cooling gas system is introduced into the second pipe 12 , it flows from above to below in the second pipe 12 extending vertically as indicated by the thin solid arrow in FIG. 3 . At this time, the sample gas flows inside the first pipe 11 arranged inside the second pipe 12 , and at the same time, the cooling gas flows inside the second pipe 12 and outside the first pipe 11 . Furthermore, the sample gas and the cooling gas flow in the same direction, and at the same time, the sample gas is cooled by heat exchange between the sample gas and the cooling gas through the pipe wall of the first pipe 11 . The sample gas flows along the first pipe 11 and is cooled, whereby a part of the moisture contained in the sample gas is condensed and separated according to the difference in the amount of saturated water vapor due to the temperature in the sample gas.

圖4係表示飽和水蒸氣量與溫度之關係的圖,其係用於對從樣氣分離出的水分進行說明的圖。以樣氣例如在30℃的狀態導入第1配管11的情況為例進行說明。在樣氣中的水蒸氣飽和的情況下(即,濕度100%的情況下),如圖4中的點X1所示,樣氣中包含的水蒸氣的量為30.4g/m3 左右。並且,樣氣一邊在第1配管11中流動,一邊在以高於0℃且充分低於室溫的溫度導入第2配管12並在第2配管12中流動的冷卻氣體之間進行熱交換,而被冷卻。樣氣係在通過第1配管11之配置於第2配管12內側的部分中全程地被冷卻,而被冷卻至低於室溫的溫度。若樣氣被冷卻至例如10℃,則如圖4中的點X2所示,飽和水蒸氣量為9.41g/m3 左右。並且,藉由冷卻樣氣,因應溫度所致之飽和水蒸氣量的差異而冷凝的水分成為液態水,從樣氣中分離。若在樣氣從30℃被冷卻至10℃之情況下,則與30℃的飽和水蒸氣量(30.4g/m3 )及10℃的飽和水蒸氣量(9.41g/m3 )之差對應的水分發生冷凝而從樣氣中分離。Fig. 4 is a graph showing the relationship between the amount of saturated water vapor and the temperature, and is a graph for explaining the moisture separated from the sample gas. A case where the sample gas is introduced into the first pipe 11 in a state of, for example, 30° C. will be described as an example. When the water vapor in the sample gas is saturated (that is, when the humidity is 100%), the amount of water vapor contained in the sample gas is about 30.4 g/m 3 as shown at point X1 in FIG. 4 . Furthermore, while the sample gas flows in the first pipe 11, heat exchange is performed between the cooling gas introduced into the second pipe 12 at a temperature higher than 0° C. and sufficiently lower than room temperature and flowing in the second pipe 12, And was cooled. The sample gas is cooled all the way through the portion of the first pipe 11 disposed inside the second pipe 12 to a temperature lower than room temperature. If the sample gas is cooled to, for example, 10°C, then as shown by point X2 in Fig. 4, the saturated water vapor amount is about 9.41 g/m 3 . And, by cooling the sample gas, the moisture condensed due to the difference in the amount of saturated water vapor caused by temperature becomes liquid water, which is separated from the sample gas. If the sample gas is cooled from 30°C to 10°C, it corresponds to the difference between the saturated water vapor amount (30.4g/m 3 ) at 30°C and the saturated water vapor amount (9.41g/m 3 ) at 10°C The moisture is condensed and separated from the sample gas.

在第2配管12中流動並冷卻樣氣的冷卻氣體係經由冷卻氣體排出管17b而排出至第2配管12的外部。另一方面,樣氣係在第1配管11中流動而被冷卻,且水分被分離時,其係從第1配管11的下端部的出口側開口11a向出口室13流出。分離出水分後朝出口室13流出的樣氣係朝樣氣引導部15流動,而從樣氣引導部15朝分析計供給系統108流動。另外,在第1配管11內從樣氣分離出的水分係從出口側開口11a滴落至出口室13內,進而,落至水分回收室14而由水分回收室14回收。The cooling gas that flows through the second pipe 12 to cool the sample gas is discharged to the outside of the second pipe 12 through the cooling gas discharge pipe 17 b. On the other hand, when the sample gas flows through the first pipe 11 to be cooled and the water is separated, it flows out from the outlet side opening 11 a at the lower end of the first pipe 11 to the outlet chamber 13 . The sample gas that flows out of the outlet chamber 13 after the water is separated flows toward the sample gas guide 15 , and flows from the sample gas guide 15 toward the analyzer supply system 108 . In addition, the moisture separated from the sample gas in the first pipe 11 drops from the outlet opening 11 a into the outlet chamber 13 , and then falls into the moisture recovery chamber 14 to be recovered by the moisture recovery chamber 14 .

從樣氣引導部15朝分析計供給系統108流動的樣氣係於在分析計供給系統108中流動的期間被外部的空氣加熱,溫度上升至接近室溫(例如,25℃)的溫度,例如,溫度上升至20℃左右。樣氣係當在分析計供給系統108中流動而溫度上升時,伴隨著溫度的上升而飽和水蒸氣量增多,因此濕度降低。並且,樣氣係在濕度降低的狀態下被供給至分析計101,而進行分析。The sample gas flowing from the sample gas guide 15 to the analyzer supply system 108 is heated by the outside air while flowing in the analyzer supply system 108, and the temperature rises to a temperature close to room temperature (for example, 25° C.), for example , the temperature rises to around 20°C. When the sample gas flows through the analyzer supply system 108 and its temperature rises, the amount of saturated water vapor increases with the rise in temperature, so the humidity decreases. Then, the sample gas is supplied to the analyzer 101 in a state where the humidity is lowered, and analyzed.

再者,當向分析計供給系統108流動的樣氣的溫度上升至例如20℃時,則如圖4中的點X3所示,飽和水蒸氣量為17.3g/m3 左右。因此,若第1配管11中流動而被冷卻至10℃並分離出水分後的樣氣在分析計供給系統108中流動而升溫至20℃之情況下,樣氣成為相對於17.3g/m3 的飽和水蒸氣量而包含9.41g/m3 的水分的狀態。因此,升溫至20℃的樣氣的濕度為54%左右。這種情況下,於導入水分分離裝置1前在溫度高於室溫且濕度100%的飽和水蒸氣的狀態下包含水分的樣氣係在水分分離裝置1中被冷卻而分離出水分,其後,在溫度接近室溫且濕度大幅降低的狀態下被供給至分析計101。並且,在分析計101中,對濕度大幅降低而水分大幅減少之狀態下的樣氣進行成分的分析。Furthermore, when the temperature of the sample gas flowing into the analyzer supply system 108 rises to, for example, 20° C., the amount of saturated water vapor is about 17.3 g/m 3 as shown at point X3 in FIG. 4 . Therefore, when the sample gas that flows through the first pipe 11 and is cooled to 10°C and the moisture is separated flows through the analyzer supply system 108 and is heated to 20°C, the sample gas becomes 17.3 g/m 3 The saturated water vapor amount contains 9.41g/m 3 of moisture. Therefore, the humidity of the sample gas heated to 20°C is about 54%. In this case, before being introduced into the moisture separator 1, the sample gas containing moisture is cooled in the moisture separator 1 in the state of saturated water vapor with a temperature higher than room temperature and a humidity of 100%, and then the moisture is separated. , is supplied to the analyzer 101 in a state where the temperature is close to room temperature and the humidity is greatly reduced. In addition, in the analyzer 101, the component analysis is performed on the sample gas in a state where the humidity is greatly reduced and the water content is greatly reduced.

如上所述,根據本實施形態的水分分離裝置1,在第1配管11中流動的樣氣與在第2配管12中流動的冷卻氣體之間進行熱交換,從而樣氣被冷卻。並且,藉由冷卻樣氣,因應溫度所致之飽和水蒸氣量的差異,樣氣中包含的水分的一部分冷凝。藉此,水分冷凝而從樣氣中分離。藉此,根據上述構成,在從樣氣分離水分時,無需使用液體冷媒的熱交換器,因此能夠抑制設備成本及設置空間的增大。As described above, according to the water separator 1 of the present embodiment, the sample gas is cooled by exchanging heat between the sample gas flowing through the first pipe 11 and the cooling gas flowing through the second pipe 12 . And, by cooling the sample gas, part of the moisture contained in the sample gas is condensed according to the difference in the amount of saturated water vapor due to the temperature. As a result, the moisture is condensed and separated from the sample gas. Thus, according to the above-mentioned configuration, when separating water from the sample gas, a heat exchanger using a liquid refrigerant is not required, and thus an increase in equipment cost and installation space can be suppressed.

另外,根據本實施形態的水分分離裝置1,樣氣在第1配管11中向下方流動,並且冷卻氣體在內側配置有第1配管11的第2配管12中向下方流動,同時地,在冷卻氣體與樣氣之間進行熱交換,而樣氣被冷卻。因此,在遍及第1配管11配置於第2配管12內側而沿上下方向延伸的區域中之上下方向的全長,樣氣及冷卻氣體沿著上下方向流動,同時地,在樣氣與冷卻氣體之間有效地進行熱交換。藉此,能夠實現樣氣的冷卻效率的提高,而能夠實現水分的分離能力的提高。In addition, according to the water separator 1 of the present embodiment, the sample gas flows downward in the first pipe 11, and the cooling gas flows downward in the second pipe 12 in which the first pipe 11 is disposed. Heat is exchanged between the gas and the sample gas, while the sample gas is cooled. Therefore, the sample gas and the cooling gas flow in the vertical direction throughout the entire length of the vertical direction in the region where the first pipe 11 is arranged inside the second pipe 12 and extends in the vertical direction, and at the same time, there is a gap between the sample gas and the cooling gas. efficient heat exchange. Thereby, the cooling efficiency of the sample gas can be improved, and the water separation ability can be improved.

進而,根據本實施形態的水分分離裝置1,將樣氣冷卻而分離水分並供其向下方流動之第1配管11的下端部係在出口室13開口,從樣氣分離出的水分係滴落到出口室13,並且分離出水分後的樣氣也流出到出口室13。因此,能夠使有效地進行冷卻並分離的樣氣與水分直接簡單地從第1配管11朝下方的出口室13排出。並且,水分被回收到出口室13下方的水分回收室14,分離出水分的樣氣係自與出口室13連通的樣氣引導部15被引導,而朝作為供給目的地的分析計101供給。因此,根據水分分離裝置1,能夠容易地回收從樣氣分離出的水分,並且能夠有效地引導分離出水分的樣氣。Furthermore, according to the water separator 1 of this embodiment, the lower end of the first pipe 11 that cools the sample gas to separate the water and allows it to flow downward is opened in the outlet chamber 13, and the water separated from the sample gas drips. to the outlet chamber 13, and the sample gas after the moisture is separated also flows out to the outlet chamber 13. Therefore, the effectively cooled and separated sample gas and moisture can be directly and easily discharged from the first pipe 11 to the outlet chamber 13 below. The moisture is recovered to the moisture recovery chamber 14 below the outlet chamber 13, and the sample gas from which the moisture has been separated is guided from the sample gas guide 15 communicating with the outlet chamber 13, and supplied to the analyzer 101 as a supply destination. Therefore, according to the moisture separator 1 , the moisture separated from the sample gas can be easily recovered, and the moisture-separated sample gas can be efficiently guided.

因此,根據本實施形態,可提供水分分離裝置1,其能夠抑制設備成本及設置空間的增大,同時能夠提高對樣氣的冷卻效率而實現水分的分離能力的提高,進而能夠容易地回收水分且有效地引導樣氣。Therefore, according to the present embodiment, it is possible to provide a moisture separator 1 that can suppress an increase in equipment cost and installation space, improve the cooling efficiency of the sample gas, improve the moisture separation capability, and can easily recover moisture. And effectively guide the sample gas.

另外,根據水分分離裝置1,第1配管11及第2配管12分別呈直線狀地上下延伸,冷卻氣體沿著與樣氣的流動方向平行的方向流動。因此,能夠更有效地進行在第1配管11中流動的樣氣與在第2配管12中流動的冷卻氣體之間的熱交換。藉此,能夠進一步提高對樣氣的冷卻效率,而進一步提高水分的分離能力。In addition, according to the moisture separator 1 , the first pipe 11 and the second pipe 12 each extend linearly up and down, and the cooling gas flows in a direction parallel to the flow direction of the sample gas. Therefore, heat exchange between the sample gas flowing through the first pipe 11 and the cooling gas flowing through the second pipe 12 can be performed more efficiently. Thereby, the cooling efficiency of the sample gas can be further improved, and the water separation ability can be further improved.

另外,根據水分分離裝置1,樣氣在插入第2配管12內側的第1配管11的內側流動,在第2配管12中流動的冷卻氣體係遍及第1配管11的全周地加以覆蓋,同時在第1配管11的外側流動。因此,經由樣氣流動之遍及第1配管11全周的寬廣面積,冷卻氣體能夠更有效地從樣氣除熱。藉此,能夠進一步提高對樣氣的冷卻效率,而進一步提高水分的分離能力。In addition, according to the water separator 1, the sample gas flows inside the first pipe 11 inserted inside the second pipe 12, and the cooling gas flowing through the second pipe 12 covers the entire circumference of the first pipe 11, and at the same time It flows outside the first pipe 11 . Therefore, the cooling gas can more effectively remove heat from the sample gas through a wide area over the entire circumference of the first pipe 11 through which the sample gas flows. Thereby, the cooling efficiency of the sample gas can be further improved, and the water separation ability can be further improved.

另外,水分分離裝置1設置成,第1配管11與第2配管12呈中心軸線一致的同心狀地配置的雙重管。因此,根據水分分離裝置1,在與第1及第2配管(11、12)的中心軸線垂直的截面中之繞中心軸線的圓周方向之區域中,樣氣及冷卻氣體的流量分佈變得更均勻。藉此,能夠進一步降低冷卻氣體對樣氣的冷卻不均,能夠進一步提高對樣氣的冷卻效率,而能夠進一步提高水分的分離能力。In addition, the water separator 1 is provided as a double pipe in which the first pipe 11 and the second pipe 12 are arranged concentrically so that their central axes coincide. Therefore, according to the water separator 1, the flow rate distribution of the sample gas and the cooling gas becomes better in the region in the circumferential direction around the central axis in the section perpendicular to the central axis of the first and second pipes (11, 12). uniform. Thereby, the uneven cooling of the sample gas by the cooling gas can be further reduced, the cooling efficiency of the sample gas can be further improved, and the water separation ability can be further improved.

另外,根據水分分離裝置1,冷卻氣體與樣氣一邊進行熱交換,一邊平行地且於相同方向上流動。因此,冷卻氣體一邊從樣氣除熱一邊流動的方向、與樣氣一邊被冷卻氣體冷卻一邊流動的方向為相同方向。藉此,可將進行熱交換的冷卻氣體與樣氣之間的溫度差設定為較大,而能夠更有效地冷卻樣氣。In addition, according to the moisture separator 1 , the cooling gas and the sample gas flow in parallel and in the same direction while exchanging heat. Therefore, the direction in which the cooling gas flows while removing heat from the sample gas is the same as the direction in which the sample gas flows while being cooled by the cooling gas. Thereby, the temperature difference between the cooling gas for heat exchange and the sample gas can be set larger, and the sample gas can be cooled more effectively.

另外,根據水分分離裝置1,第1配管11的出口側開口11a配置在較樣氣引導部15朝出口室13的連通位置更下方,因此能夠更確實地防止從出口側開口11a滴落到出口室13的水分侵入樣氣引導部15之情形。因此,能夠更確實地防止水分混入到水分分離後並被樣氣引導部15引導的樣氣裡之情形。In addition, according to the water separator 1 , the outlet-side opening 11 a of the first pipe 11 is disposed below the position where the sample gas guide 15 communicates with the outlet chamber 13 , so that dripping from the outlet-side opening 11 a to the outlet can be more reliably prevented. The moisture in the chamber 13 invades the sample gas guide 15. Therefore, it is possible to more reliably prevent moisture from being mixed into the sample gas that has been separated from the moisture and guided by the sample gas guide section 15 .

另外,根據水分分離裝置1,從第1配管11滴落並排出到出口室本體部18的水分係通過連通管部19而落下到貯存於水分回收室14中的水Wa的水面,並被回收到水分回收室14中。另外,從第1配管11流出到出口室本體部18的樣氣係朝樣氣引導部15流動並被樣氣引導部15引導,而朝供給目的地的分析計101供給。並且,根據水分分離裝置1,將出口室本體部18與水分回收室14連通的連通管部19的下端係在較貯存於水分回收室14中的水Wa的水面更下方處開口,而在水分回收室14內的水Wa中開口。因此,能夠確實地防止出口室本體部18外部的空氣從在水分回收室14開口的連通管部19流入之情形。藉此,能夠確實地防止外部的空氣混入至從出口室本體部18朝樣氣引導部15流動並被樣氣引導部15引導的樣氣中之情形。In addition, according to the water separator 1, the water dripped from the first pipe 11 and discharged to the outlet chamber main body 18 passes through the communication pipe 19, falls to the water surface of the water Wa stored in the water recovery chamber 14, and is recovered. In the moisture recovery chamber 14. In addition, the sample gas flowing out from the first pipe 11 to the outlet chamber main body 18 flows toward the sample gas guide 15 and is guided by the sample gas guide 15 to be supplied to the analyzer 101 of the supply destination. And, according to the water separation device 1, the lower end of the communication pipe portion 19 connecting the outlet chamber main body portion 18 and the water recovery chamber 14 is opened at a place lower than the water surface of the water Wa stored in the water recovery chamber 14, and the moisture The water Wa in the recovery chamber 14 opens. Therefore, it is possible to reliably prevent the air outside the outlet chamber body portion 18 from flowing in through the communication pipe portion 19 opened in the water recovery chamber 14 . Thereby, it is possible to reliably prevent outside air from being mixed into the sample gas flowing from the outlet chamber main body portion 18 toward the sample gas guide portion 15 and guided by the sample gas guide portion 15 .

[第2實施形態] 接著,對本發明的第2實施形態的水分分離裝置2進行說明。圖5係表示本發明之第2實施形態之水分分離裝置2的圖。再者,圖5中,對於水分分離裝置2而以截面圖加以圖示,進而與空氣冷卻器109的一部分一併地圖示。例如,與第1實施形態的水分分離裝置1同樣地,第2實施形態的水分分離裝置2係應用於下述系統,該系統係從在熱處理裝置100中產生的排放氣體採集的樣氣中分離水分,並將樣氣供給至分析計101。再者,在下述第2實施形態的說明中,對與上述第1實施形態不同之處進行說明,對於與上述第1實施形態同樣的構成或對應的構成,在圖式中附加相同符號或引用相同符號,藉此省略重複的說明。另外,圖5中,與圖3相同地,以細虛線的箭頭示意地表示樣氣流動的情況,以細實線的箭頭示意地表示冷卻氣體流動的情況,以粗虛線的箭頭示意地表示從樣氣分離出的水分落下的情況。[Second Embodiment] Next, a water separator 2 according to a second embodiment of the present invention will be described. Fig. 5 is a diagram showing a water separator 2 according to a second embodiment of the present invention. In addition, in FIG. 5 , the moisture separator 2 is shown in a cross-sectional view, and further shown together with a part of the air cooler 109 . For example, like the moisture separator 1 of the first embodiment, the moisture separator 2 of the second embodiment is applied to a system for separating Moisture, and the sample gas is supplied to the analyzer 101. In addition, in the following description of the second embodiment, differences from the above-mentioned first embodiment will be described, and for the same or corresponding configurations as those of the above-mentioned first embodiment, the same symbols or references will be given in the drawings. The same symbols are used to omit repeated explanations. In addition, in FIG. 5 , similar to FIG. 3 , the flow of the sample gas is schematically shown by arrows of thin dotted lines, the flow of cooling gas is schematically shown by arrows of thin solid lines, and the flow of cooling gas is schematically shown by arrows of thick dotted lines. The case where the water separated from the sample gas falls.

與第1實施形態的水分分離裝置1相同地,圖5所示的第2實施形態的水分分離裝置2係將從採樣系統107a導入的樣氣冷卻,而分離樣氣中包含的水分,並朝分析計供給系統108供給樣氣。並且,與水分分離裝置1相同地,水分分離裝置2具備第1配管11、第2配管12、出口室13、水分回收室14及樣氣引導部15而構成。但是,水分分離裝置2係在關於第2配管12中之冷卻氣體的流動方向的構成上與水分分離裝置1不同。Similar to the moisture separator 1 of the first embodiment, the moisture separator 2 of the second embodiment shown in FIG. The analyzer supply system 108 supplies the sample gas. In addition, the water separator 2 includes a first pipe 11 , a second pipe 12 , an outlet chamber 13 , a water recovery chamber 14 , and a sample gas guide 15 similarly to the water separator 1 . However, the moisture separator 2 differs from the moisture separator 1 in terms of the configuration regarding the flow direction of the cooling gas in the second pipe 12 .

在水分分離裝置2中,與水分分離裝置1的第2配管12相同地,第2配管12係在內側配置有第1配管11的一部分,並且以相對於第1配管11而中心軸線一致之方式呈同心狀地配置。並且,構成為,從空氣冷卻器109供給的冷卻氣體係經由冷卻氣體導入管17a而朝第2配管12導入。但是,在水分分離裝置2中,與水分分離裝置1不同地,第2配管12係構成為冷卻氣體向上方流動。In the water separator 2, similarly to the second pipe 12 of the water separator 1, the second pipe 12 is arranged inside a part of the first pipe 11, and is aligned with the central axis of the first pipe 11. Arranged concentrically. Furthermore, the cooling gas system supplied from the air cooler 109 is comprised so that it may introduce into the 2nd piping 12 via the cooling gas introduction pipe 17a. However, in the water separator 2, unlike the water separator 1, the second piping 12 is configured so that the cooling gas flows upward.

在水分分離裝置2中,冷卻氣體導入管17a的管長方向的一端部係連接至與空氣冷卻器109連接的連接配管112,管長方向的另一端部係在第2配管12的管本體部12a的下端側與管本體部12a連接。並且,冷卻氣體導入管17a的另一端部係在氣密狀態下貫通設置於管本體部12a的下端側並貫通管本體部12a的管壁的貫通孔,在管本體部12a的內部開口。藉此,空氣冷卻器109與第2配管12內之下端側的區域係經由冷卻氣體導入管17a而連通,來自空氣冷卻器109的冷卻氣體被導入第2配管12內的下端側的區域。In the water separator 2, one end in the pipe length direction of the cooling gas introduction pipe 17a is connected to the connection pipe 112 connected to the air cooler 109, and the other end in the pipe length direction is connected to the pipe body portion 12a of the second pipe 12. The lower end side is connected to the pipe main body portion 12a. In addition, the other end of the cooling gas introduction pipe 17a is airtightly passed through a through hole provided on the lower end side of the pipe main body 12a and penetrates the pipe wall of the pipe main body 12a, and opens inside the pipe main body 12a. Thereby, the air cooler 109 communicates with the lower end area in the second piping 12 via the cooling gas introduction pipe 17 a, and the cooling air from the air cooler 109 is introduced into the lower end area in the second piping 12 .

另外,從冷卻氣體導入管17a導入第2配管12並在第2配管12中流動的冷卻氣體係經由冷卻氣體排出管17b而從第2配管12排出。冷卻氣體排出管17b之管長方向的一端部係在管本體部12a的上端側與管本體部12a連接,管長方向的另一端部側的部分係向管本體部12a的外側突出。並且,冷卻氣體排出管17b的一端部係在氣密狀態下貫通設置於管本體部12a的上端側並貫通管本體部12a的管壁的貫通孔,在管本體部12a的內部開口。另一方面,從管本體部12a向外部突出的冷卻氣體排出管17b的另一端部係向外部開口。藉此,第2配管12內的上端側的區域與第2配管12的外部係經由冷卻氣體排出管17b而連通。In addition, the cooling gas introduced into the second piping 12 from the cooling gas introduction pipe 17a and flowing through the second piping 12 is discharged from the second piping 12 through the cooling gas discharge pipe 17b. One end of the cooling gas discharge pipe 17b in the pipe length direction is connected to the pipe body 12a on the upper end side of the pipe body 12a, and the other end in the pipe length direction protrudes to the outside of the pipe body 12a. In addition, one end of the cooling gas discharge pipe 17b passes through a through hole provided on the upper end side of the pipe main body 12a in an airtight state and penetrates the pipe wall of the pipe main body 12a, and opens inside the pipe main body 12a. On the other hand, the other end portion of the cooling gas discharge pipe 17b protruding outward from the pipe main body portion 12a is opened to the outside. Thereby, the area on the upper end side in the second pipe 12 communicates with the outside of the second pipe 12 via the cooling gas discharge pipe 17b.

在水分分離裝置2中,從空氣冷卻器109排出的冷卻氣體係經由冷卻氣體導入管17a而被導入第2配管12內的下端側的區域。並且,被導入第2配管12內的冷卻氣體係在第2配管12的內側且第1配管11的外側的區域中向上方流動。另一方面,樣氣係於在第2配管12內側呈同心狀地配置的第1配管11中向下方流動。因此,使樣氣在第1配管11的內側向下方流動,冷卻氣體在第2配管12的內側且第1配管11的外側向上方流動,藉此,經由第1配管11的管壁的全周,在樣氣與冷卻氣體之間進行熱交換。藉此,在第1配管11的流動中,樣氣被冷卻,伴隨著因樣氣中的溫度降低所致之飽和水蒸氣量的減少,因應溫度所致之飽和水蒸氣量的差異而冷凝的水分係在第1配管11內從樣氣中分離。在第1配管11內從樣氣中分離的水分係在第1配管11中落下,從在出口室13內開口的第1配管11的下端部的出口側開口11a滴落至出口室13內,通過出口室13而朝水分回收室14回收。另外,在第2配管12中向上方流動,經由第1配管11的管壁而在與樣氣之間進行熱交換的冷卻氣體係朝冷卻氣體排出管17b流動,經由冷卻氣體排出管17b而被排出至第2配管12的外部。另外,分離出水分的樣氣係從第1配管11流出到出口室13並朝樣氣引導部15流動,從樣氣引導部15經由分析計供給系統108而朝分析計101供給。In the moisture separator 2 , the cooling gas discharged from the air cooler 109 is introduced into the region on the lower end side in the second pipe 12 via the cooling gas introduction pipe 17 a. In addition, the cooling air introduced into the second pipe 12 flows upward in a region inside the second pipe 12 and outside the first pipe 11 . On the other hand, the sample gas flows downward through the first pipe 11 arranged concentrically inside the second pipe 12 . Therefore, the sample gas flows downward inside the first pipe 11 , and the cooling gas flows upward inside the second pipe 12 and outside the first pipe 11 . , heat exchange is performed between the sample gas and the cooling gas. Thus, in the flow of the first pipe 11, the sample gas is cooled, and the amount of saturated water vapor is condensed according to the difference in the amount of saturated water vapor due to the temperature drop along with the decrease in the temperature of the sample gas. Moisture is separated from the sample gas in the first pipe 11 . The moisture separated from the sample gas in the first pipe 11 falls in the first pipe 11 and drops into the outlet chamber 13 from the outlet side opening 11a at the lower end of the first pipe 11 that opens in the outlet chamber 13, It passes through the outlet chamber 13 and is recovered toward the water recovery chamber 14 . In addition, the cooling gas that flows upward in the second pipe 12 and exchanges heat with the sample gas through the pipe wall of the first pipe 11 flows toward the cooling gas discharge pipe 17b, and is discharged through the cooling gas discharge pipe 17b. It is discharged to the outside of the second piping 12 . In addition, the sample gas from which moisture has been separated flows out from the first pipe 11 to the outlet chamber 13 , flows toward the sample gas guide 15 , and is supplied from the sample gas guide 15 to the analyzer 101 through the analyzer supply system 108 .

根據上述水分分離裝置2,與第1實施形態的水分分離裝置1相同地,在從樣氣分離水分時,無需採用液體冷媒的熱交換器,因此能夠抑制設備成本及設置空間的增大。並且,根據水分分離裝置2,樣氣在第1配管11中向下方流動,並且冷卻氣體在內側配置有第1配管11的第2配管12中向上方流動,同時地,在冷卻氣體與樣氣之間進行熱交換,而樣氣被冷卻。因此,在第1配管11配置於第2配管12的內側且沿上下方向延伸的區域中,遍及上下方向的全長,樣氣及冷卻氣體係沿著上下方向流動,同時地,在樣氣與冷卻氣體之間有效地進行熱交換。藉此,能夠實現樣氣的冷卻效率的提高,而能夠實現水分的分離能力的提高。另外,根據水分分離裝置2,與第1實施形態的水分分離裝置1相同地,能夠容易地回收從樣氣分離出的水分,並且能夠有效地引導分離出水分後的樣氣。According to the moisture separator 2 described above, similarly to the moisture separator 1 of the first embodiment, when separating moisture from the sample gas, a heat exchanger using a liquid refrigerant is not required, and thus an increase in equipment cost and installation space can be suppressed. In addition, according to the water separator 2, the sample gas flows downward in the first pipe 11, and the cooling gas flows upward in the second pipe 12 in which the first pipe 11 is disposed. The heat exchange between them, while the sample gas is cooled. Therefore, in the region where the first pipe 11 is disposed inside the second pipe 12 and extends in the vertical direction, the sample gas and the cooling gas system flow in the vertical direction over the entire length in the vertical direction. Efficient heat exchange between gases. Thereby, the cooling efficiency of the sample gas can be improved, and the water separation ability can be improved. In addition, according to the water separator 2 , similarly to the water separator 1 of the first embodiment, the water separated from the sample gas can be easily recovered, and the water-separated sample gas can be efficiently guided.

因此,根據第2實施形態,可以提供水分分離裝置2,其能夠抑制設備成本及設置空間的增大,並且能夠提高對樣氣的冷卻效率而實現水分的分離能力的提高,進而能夠容易地回收水分且有效地引導樣氣。Therefore, according to the second embodiment, it is possible to provide the water separator 2 which can suppress the increase in equipment cost and installation space, and can improve the cooling efficiency of the sample gas to realize the improvement of the water separation ability, and can also be easily recovered. moisture and guides the sample gas efficiently.

[第3實施形態] 接著,對本發明的第3實施形態的水分分離裝置3進行說明。圖6係表示本發明之第3實施形態之水分分離裝置3的圖。再者,圖6中,對於水分分離裝置3,以截面圖而加以圖示。例如,與第1實施形態的水分分離裝置1相同地,第3實施形態的水分分離裝置3係應用於下述系統,該系統係從在熱處理裝置100中產生的排放氣體採集的樣氣中分離水分,並將樣氣供給至分析計101。再者,在下述第3實施形態的說明中,對與上述第1實施形態不同之處進行說明,對於與上述第1實施形態同樣的構成或對應的構成,在圖式中附加相同符號或引用相同符號,藉此省略重複的說明。另外,圖6中,與圖3相同地,以細虛線的箭頭示意地表示樣氣流動的情況,以細實線的箭頭示意地表示冷卻氣體流動的情況,以粗虛線的箭頭示意地表示從樣氣分離出的水分落下的情況。[third embodiment] Next, a water separator 3 according to a third embodiment of the present invention will be described. Fig. 6 is a diagram showing a water separator 3 according to a third embodiment of the present invention. In addition, in FIG. 6, the moisture separator 3 is shown in cross-sectional view. For example, like the moisture separator 1 of the first embodiment, the moisture separator 3 of the third embodiment is applied to a system for separating Moisture, and the sample gas is supplied to the analyzer 101. In addition, in the following description of the third embodiment, differences from the above-mentioned first embodiment will be described, and for the same or corresponding configurations as those of the above-mentioned first embodiment, the same symbols or references will be attached in the drawings. The same symbols are used to omit repeated explanations. In addition, in FIG. 6, similarly to FIG. 3, the flow of the sample gas is schematically shown by arrows of thin dotted lines, the flow of cooling gas is schematically shown by arrows of thin solid lines, and the flow of cooling gas is schematically shown by arrows of thick dotted lines. The case where the water separated from the sample gas falls.

與第1實施形態的水分分離裝置1相同地,圖6所示的第3實施形態的水分分離裝置3係將從採樣系統107a導入的樣氣冷卻,分離出樣氣中包含的水分,並朝分析計供給系統108供給樣氣。並且,與水分分離裝置1相同地,水分分離裝置3具備第1配管11、第2配管12、出口室13、水分回收室14及樣氣引導部15而構成。但是,水分分離裝置3係在具備複數個第1配管11的構成中,與水分分離裝置1不同。Similar to the moisture separator 1 of the first embodiment, the moisture separator 3 of the third embodiment shown in FIG. 6 cools the sample gas introduced from the sampling system 107a, separates the moisture contained in the sample gas, and sends The analyzer supply system 108 supplies the sample gas. In addition, the water separator 3 includes a first pipe 11 , a second pipe 12 , an outlet chamber 13 , a water recovery chamber 14 , and a sample gas guide 15 similarly to the water separator 1 . However, the water separator 3 is different from the water separator 1 in that it includes a plurality of first pipes 11 .

圖7(A)係表示水分分離裝置3之截面的圖,且其係表示從圖6的A-A線箭頭位置觀察之截面的圖。再者,圖7(A)中,作為水分分離裝置3的截面,僅圖示在圖6的A-A線箭頭位置出現的第1配管11及第2配管12的截面,而省略水分分離裝置3中的其他部分的圖示。如圖6及圖7(A)所示,在水分分離裝置3中,第1配管11設有複數個,具體而言,設有2個。FIG. 7(A) is a diagram showing a cross section of the water separator 3, and it is a diagram showing a cross section viewed from the position of the arrow A-A in FIG. 6 . Furthermore, in FIG. 7(A), as a cross section of the water separator 3, only the cross sections of the first piping 11 and the second piping 12 appearing at the arrow position of the A-A line in FIG. 6 are shown, and the water separator 3 is omitted. Graphics for other parts of the . As shown in FIG. 6 and FIG. 7(A), in the moisture separator 3 , a plurality of first pipes 11 are provided, specifically, two are provided.

2個第1配管11各者係與水分分離裝置1的第1配管11同樣地構成,設置成細長並呈直線狀地延伸的金屬製的圓管,且構成為被導入有包含水分的樣氣且該樣氣向下方流動的配管。2個第1配管11各者之一部分係配置於第2配管12的內側,且在其長度方向朝上下方向呈直線狀地延伸的狀態下相對於第2配管12而被支撐。另外,2個第1配管11係在沿上下方向延伸的第2配管12的內側沿著上下方向相互平行地延伸。並且,各第1配管11係相對於第2配管12延伸的方向而平行地延伸。再者,在第2配管12的上蓋部12b及下蓋部12c之各者設有2個供各第1配管11在氣密狀態下插通的貫通孔,各第1配管11係在插通於上蓋部12b及下蓋部12c的貫通孔中的狀態下,被第2配管12支撐。Each of the two first pipes 11 is configured in the same manner as the first pipe 11 of the moisture separator 1, and is provided as a long and thin metal circular pipe extending linearly, and is configured to be introduced into a sample gas containing moisture. And the pipe through which the sample gas flows downward. Parts of each of the two first pipes 11 are arranged inside the second pipe 12 and are supported relative to the second pipe 12 in a state in which the longitudinal direction extends linearly in the vertical direction. In addition, the two first pipes 11 extend parallel to each other in the vertical direction inside the second pipe 12 extending in the vertical direction. Furthermore, each first pipe 11 extends parallel to the direction in which the second pipe 12 extends. Furthermore, each of the upper cover portion 12b and the lower cover portion 12c of the second piping 12 is provided with two through holes for each of the first piping 11 to be inserted in an airtight state, and each of the first piping 11 is inserted. It is supported by the second pipe 12 in a state of being in the through holes of the upper cover part 12b and the lower cover part 12c.

另外,2個第1配管11各者的上端部係相對於採樣系統107b的下游側的端部而連接。再者,在第3實施形態中,採樣系統107b係在下游側分支成2個系統。並且,2個第1配管11各者係相對於在採樣系統107b的下游側分支的2個系統各自的下游側端部而連接。在飽和水蒸氣的狀態下包含水分的樣氣係從採樣系統107a中之分支的系統的下游側端部導入至各第1配管11的上端部。從上方導入至各第1配管11的上端部的樣氣係在各第1配管11的內側沿著各第1配管11延伸的上下方向而朝下方流動。各第1配管11係在第2配管12的內側插通,各第1配管11的下端部係在出口室13內開口。另外,在各第1配管11的下端部於出口室13開口的出口側開口11a係配置於較樣氣引導部15連通於出口室13的位置更為下方。In addition, the upper ends of the two first pipes 11 are connected to the downstream end of the sampling system 107b. In addition, in the third embodiment, the sampling system 107b is branched into two systems on the downstream side. In addition, each of the two first pipes 11 is connected to the respective downstream end portions of the two systems branched on the downstream side of the sampling system 107b. The sample gas containing moisture in a saturated water vapor state is introduced from the downstream side end of the branched system in the sampling system 107 a to the upper end of each first pipe 11 . The sample gas introduced from above to the upper end of each first pipe 11 flows downward inside each first pipe 11 along the vertical direction in which each first pipe 11 extends. Each first pipe 11 is inserted inside the second pipe 12 , and the lower end of each first pipe 11 is opened in the outlet chamber 13 . In addition, the outlet-side opening 11 a that opens to the outlet chamber 13 at the lower end of each first pipe 11 is disposed below the position where the sample gas guide 15 communicates with the outlet chamber 13 .

在水分分離裝置3中,從空氣冷卻器109排出的冷卻氣體係經由冷卻氣體導入管17a被導入第2配管12內的上端側的區域。並且,被導入第2配管12內的冷卻氣體係在第2配管12的內側且2個第1配管11各自的外側的區域中向下方流動。另一方面,樣氣係於以在第2配管12內側上下延伸的方式配置的各第1配管11中向下方流動。因此,樣氣係在各第1配管11的內側向下方流動,冷卻氣體係在第2配管12的內側且各第1配管11的外側向下方流動,藉此,經由各第1配管11之管壁的全周,在樣氣與冷卻氣體之間進行熱交換。藉此,在各第1配管11的流動中,樣氣被冷卻,伴隨著因樣氣中的溫度降低所致之飽和水蒸氣量的減少,因應溫度所致之飽和水蒸氣量的差異而冷凝的水分係在各第1配管11內從樣氣中分離。在各第1配管11內從樣氣中分離的水分係在各第1配管11中落下,從在出口室13內開口的各第1配管11的下端部的出口側開口11a滴落至出口室13內,通過出口室13而被水分回收室14回收。另外,在第2配管12中向下方流動,經由各第1配管11的管壁而在與樣氣之間進行熱交換的冷卻氣體係經由冷卻氣體排出管17b而被排出至第2配管12的外部。另外,分離出水分的樣氣係從各第1配管11流出到出口室13而朝樣氣引導部15流動,並從樣氣引導部15經由分析計供給系統108而被供給至分析計101。In the water separator 3 , the cooling gas discharged from the air cooler 109 is introduced into the region on the upper end side in the second piping 12 through the cooling gas introduction pipe 17 a. Then, the cooling air introduced into the second pipe 12 flows downward in a region inside the second pipe 12 and outside each of the two first pipes 11 . On the other hand, the sample gas flows downward through each of the first pipes 11 arranged to extend vertically inside the second pipe 12 . Therefore, the sample gas flows downward inside the first pipes 11, and the cooling gas flows downward inside the second pipes 12 and outside the first pipes 11. The entire circumference of the wall, heat exchange between the sample gas and the cooling gas. In this way, the sample gas is cooled in the flow of each first pipe 11, and the saturated water vapor amount decreases due to the temperature drop in the sample gas, and condenses according to the difference in the saturated water vapor amount due to the temperature. The water in the system is separated from the sample gas in each first pipe 11. The moisture separated from the sample gas in each of the first pipes 11 falls in each of the first pipes 11, and drips into the outlet chamber from the outlet side opening 11a at the lower end of each of the first pipes 11 that opens in the outlet chamber 13. 13, it is recovered by the water recovery chamber 14 through the outlet chamber 13. In addition, the cooling gas that flows downward in the second pipe 12 and exchanges heat with the sample gas through the pipe wall of each first pipe 11 is discharged to the side of the second pipe 12 through the cooling gas discharge pipe 17b. external. In addition, the sample gas from which moisture has been separated flows out from the first pipes 11 to the outlet chamber 13 and flows toward the sample gas guide 15 , and is supplied to the analyzer 101 from the sample gas guide 15 through the analyzer supply system 108 .

根據上述水分分離裝置3,與第1實施形態的水分分離裝置1相同地,在從樣氣分離水分時,無需採用液體冷媒的熱交換器,因此能夠抑制設備成本及設置空間的增大。並且,根據水分分離裝置3,樣氣在複數個(本實施形態中為2個)第1配管11中向下方流動,並且冷卻氣體係在內側配置有複數個第1配管11的第2配管12中向下方流動,同時地,在冷卻氣體與樣氣之間進行熱交換,而樣氣被冷卻。因此,在各第1配管11配置於第2配管12的內側且沿上下方向延伸的區域中,遍及上下方向的全長,樣氣及冷卻氣體係沿著上下方向而流動,同時地,在樣氣與冷卻氣體之間有效地進行熱交換。藉此,能夠實現樣氣的冷卻效率的提高,而能夠實現水分的分離能力的提高。另外,根據水分分離裝置3,與第1實施形態的水分分離裝置1相同地,能夠容易地回收從樣氣分離出的水分,並且能夠有效地引導分離出水分的樣氣。According to the moisture separator 3 described above, similar to the moisture separator 1 according to the first embodiment, when separating moisture from the sample gas, a heat exchanger using a liquid refrigerant is not required, and thus an increase in equipment cost and installation space can be suppressed. Furthermore, according to the water separator 3, the sample gas flows downward through the plurality of (two in this embodiment) first pipes 11, and the cooling gas system is arranged inside the second pipe 12 of the plurality of first pipes 11. At the same time, heat exchange is performed between the cooling gas and the sample gas, and the sample gas is cooled. Therefore, in the region where each first pipe 11 is arranged inside the second pipe 12 and extends in the vertical direction, the sample gas and the cooling gas system flow in the vertical direction over the entire length in the vertical direction. Effective heat exchange with cooling gas. Thereby, the cooling efficiency of the sample gas can be improved, and the water separation ability can be improved. In addition, according to the moisture separator 3 , similarly to the moisture separator 1 of the first embodiment, the moisture separated from the sample gas can be easily recovered, and the moisture-separated sample gas can be efficiently guided.

因此,根據第3實施形態,可提供水分分離裝置3,其能夠抑制設備成本及設置空間的增大,並且能夠提高對樣氣的冷卻效率而實現水分的分離能力的提高,進而能夠容易地回收水分且有效地引導樣氣。Therefore, according to the third embodiment, the water separator 3 can be provided, which can suppress the increase in equipment cost and installation space, and can improve the cooling efficiency of the sample gas to realize the improvement of the water separation ability, and can also be easily recovered. moisture and guides the sample gas efficiently.

另外,根據水分分離裝置3,樣氣係在複數個第1配管11中向下方流動,並且冷卻氣體係在內側配置有複數個第1配管11的第2配管12中向下方流動,同時地,在冷卻氣體與樣氣之間進行熱交換,而樣氣被冷卻。因此,經由複數個第1配管11之管壁而在樣氣與冷卻氣體之間進行熱交換。並且,在第1配管11為1個的情況與為複數個的情況下,若在總計截面積為相同大小,且樣氣每單位時間的總計流量相同的情況下進行比較,則當第1配管11為複數個時,在與冷卻氣體之間進行熱交換的第1配管11的管壁表面積增大。因此,根據水分分離裝置3,在冷卻氣體與樣氣之間能夠更有效地進行熱交換,因此能夠進一步提高對樣氣的冷卻效率,而實現水分的分離能力的提高。In addition, according to the moisture separator 3, the sample gas flows downward in the plurality of first pipes 11, and the cooling gas flows downward in the second pipe 12 in which the plurality of first pipes 11 are disposed. Simultaneously, Heat exchange takes place between the cooling gas and the sample gas, while the sample gas is cooled. Therefore, heat exchange is performed between the sample gas and the cooling gas via the pipe walls of the plurality of first pipes 11 . In addition, when comparing the case where there is one first pipe 11 and the case where there are plural first pipes, when the total cross-sectional area is the same size and the total flow rate of the sample gas per unit time is the same, then when the first pipe 11 When there are plural numbers of 11, the surface area of the pipe wall of the first pipe 11 that exchanges heat with the cooling gas increases. Therefore, according to the moisture separator 3 , since heat exchange can be more effectively performed between the cooling gas and the sample gas, the cooling efficiency of the sample gas can be further improved, and the moisture separation capability can be improved.

再者,在第3實施形態中,例示設有2個第1配管11的水分分離裝置3的形態,但也可以實施設有更多第1配管11的形態。圖7(B)係表示第3實施形態之變形例之水分分離裝置3a之截面的圖。圖7(C)係表示第3實施形態之另一變形例之水分分離裝置3b之截面的圖。再者,圖7(B)係在水分分離裝置3a中與針對水分分離裝置3以圖6的A-A線箭頭表示的位置對應的位置處的截面。另外,圖7(C)係在水分分離裝置3b中與針對水分分離裝置3以圖6的A-A線箭頭表示的位置對應的位置處的截面。In addition, in 3rd Embodiment, the form which provided the water separator 3 with two 1st piping 11 was illustrated, but the form which provided more 1st piping 11 can also be implemented. Fig. 7(B) is a diagram showing a cross section of a water separator 3a according to a modified example of the third embodiment. Fig. 7(C) is a diagram showing a cross section of a water separator 3b according to another modified example of the third embodiment. In addition, FIG. 7(B) is a cross section at a position corresponding to the position indicated by the A-A line arrow in FIG. 6 for the water separator 3 a in the water separator 3 a. In addition, FIG. 7(C) is a cross section at a position corresponding to the position indicated by the arrow A-A line in FIG. 6 for the water separator 3 b in the water separator 3 b.

圖7(B)所示的變形例的水分分離裝置3a與圖7(C)所示的變形例的水分分離裝置3b均與第3實施形態的水分分離裝置3同樣地構成,但第1配管11的數量不同。圖7(B)所示的水分分離裝置3a係設有3個第1配管11,圖7(C)所示的水分分離裝置3b係設有4個第1配管11。在水分分離裝置3a及水分分離裝置3b之任一者中,複數個第1配管11均分別連接至在採樣系統107b的下游側分支的複數個系統,並分別導入樣氣。並且,在水分分離裝置3a及水分分離裝置3b之任一者中,複數個第1配管11均在第2配管12的內側沿上下方向相互平行地延伸,樣氣在各第1配管11中向下方流動,進而,各第1配管11的下端部的出口側開口11a係在出口室13內開口。The moisture separator 3a of the modified example shown in FIG. 7(B) and the moisture separator 3b of the modified example shown in FIG. The number of 11 varies. The water separator 3 a shown in FIG. 7(B) is provided with three first pipes 11 , and the water separator 3 b shown in FIG. 7(C) is provided with four first pipes 11 . In any one of the water separator 3a and the water separator 3b, the plurality of first pipes 11 are respectively connected to a plurality of systems branched on the downstream side of the sampling system 107b, and sample gases are respectively introduced. In addition, in any one of the water separator 3a and the water separator 3b, the plurality of first pipes 11 extend in parallel to each other in the vertical direction inside the second pipe 12, and the sample gas flows in the first pipes 11 toward each other. Downward flow, and further, the outlet side opening 11 a of the lower end portion of each first pipe 11 is opened in the outlet chamber 13 .

如圖7(B)及圖7(C)所示的變形例的水分分離裝置3a及水分分離裝置3b般,亦可實施設有3個以上第1配管11的形態。根據該形態,可根據第1配管11的數量而進一步增大在與冷卻氣體之間進行熱交換的第1配管11的管壁表面積,能夠進一步提高對樣氣的冷卻效率,而實現水分的分離能力的提高。7(B) and 7(C) like the water separator 3a and the water separator 3b shown in the modified example, it is also possible to implement a form in which three or more first pipes 11 are provided. According to this aspect, the wall surface area of the first pipe 11 that exchanges heat with the cooling gas can be further increased according to the number of the first pipe 11, and the cooling efficiency of the sample gas can be further improved to realize the separation of moisture. ability to improve.

[第4實施形態] 接著,對本發明的第4實施形態的水分分離裝置4進行說明。圖8係表示本發明之第4實施形態之水分分離裝置4的圖。再者,圖8中,對於水分分離裝置4,以截面圖而加以圖示。例如,與第1實施形態的水分分離裝置1相同地,第4實施形態的水分分離裝置4係應用於下述系統,該系統係從在熱處理裝置100中產生的排放氣體採集的樣氣中分離水分,並將樣氣供給至分析計101。再者,在下述第4實施形態的說明中,對與上述第1實施形態不同之處進行說明,對於與上述第1實施形態同樣的構成或對應的構成,在圖式中附加相同符號或引用相同符號,由此省略重複的說明。另外,圖8中,與圖3同樣地,以細虛線的箭頭示意地表示樣氣流動的情況,以細實線的箭頭示意地表示冷卻氣體流動的情況,以粗虛線的箭頭示意地表示從樣氣分離出的水分落下的情況。[Fourth Embodiment] Next, a water separator 4 according to a fourth embodiment of the present invention will be described. Fig. 8 is a diagram showing a water separator 4 according to a fourth embodiment of the present invention. In addition, in FIG. 8, the moisture separator 4 is shown in cross-sectional view. For example, like the moisture separator 1 of the first embodiment, the moisture separator 4 of the fourth embodiment is applied to a system for separating Moisture, and the sample gas is supplied to the analyzer 101. In addition, in the following description of the fourth embodiment, differences from the above-mentioned first embodiment will be described, and for the same or corresponding configurations as those of the above-mentioned first embodiment, the same symbols or references will be added to the drawings. The same symbols are used, so repeated explanations are omitted. In addition, in FIG. 8 , similar to FIG. 3 , the flow of the sample gas is schematically shown by arrows of thin dotted lines, the flow of cooling gas is schematically shown by arrows of thin solid lines, and the flow of cooling gas is schematically shown by arrows of thick dotted lines. The case where the water separated from the sample gas falls.

與第1實施形態的水分分離裝置1同樣地,圖8所示的第4實施形態的水分分離裝置4係將從採樣系統107a導入的樣氣冷卻,分離樣氣中包含的水分,並將樣氣供給至分析計供給系統108。並且,與水分分離裝置1同樣地,水分分離裝置4具備第1配管21、第2配管12、出口室13、水分回收室14及樣氣引導部15而構成。但是,水分分離裝置4係在第1配管21的構成上與水分分離裝置1不同。Like the water separator 1 of the first embodiment, the water separator 4 of the fourth embodiment shown in FIG. 8 cools the sample gas introduced from the sampling system 107a, separates the moisture contained in the sample gas, and separates the sample gas. The gas is supplied to the analyzer supply system 108. In addition, the water separator 4 includes a first pipe 21 , a second pipe 12 , an outlet chamber 13 , a water recovery chamber 14 , and a sample gas guide 15 similarly to the water separator 1 . However, the water separator 4 is different from the water separator 1 in the configuration of the first piping 21 .

在水分分離裝置4中,與水分分離裝置1的第1配管11同樣地,第1配管21係設置成金屬製的圓管,其係構成為被導入有包含水分的樣氣且該樣氣向下方流動的配管。並且,第1配管21的一部分係配置於第2配管12的內側,在插通於上蓋部12b及下蓋部12c的貫通孔中的狀態下相對於第2配管12而被支撐。另外,第1配管21的上端部係連接至採樣系統107b的下游側的端部。並且,第1配管21的下端部係在出口室13內開口,而配置於較樣氣引導部15連通於出口室13的位置更下方處。但是,第1配管21係在配置於第2配管12內側的部分的形狀上與水分分離裝置1的第1配管11不同。In the water separator 4, like the first pipe 11 of the water separator 1, the first pipe 21 is a round pipe made of metal, which is configured to introduce a sample gas containing moisture and send the sample gas to Piping that flows below. In addition, a part of the first pipe 21 is disposed inside the second pipe 12 and supported relative to the second pipe 12 while being inserted into the through holes of the upper cover part 12b and the lower cover part 12c. In addition, the upper end of the first pipe 21 is connected to the downstream end of the sampling system 107b. In addition, the lower end portion of the first pipe 21 opens into the outlet chamber 13 and is disposed below the position where the sample gas guide 15 communicates with the outlet chamber 13 . However, the first piping 21 is different from the first piping 11 of the water separator 1 in the shape of the portion arranged inside the second piping 12 .

第1配管21係設置成在第2配管12的內側複數次地彎曲並向下方延伸。更具體而言,第1配管21設置成,將圓弧狀彎曲並向下方延伸的部分、及沿著相對於鉛直方向而傾斜的方向延伸並向下方延伸的部分兩者交替地重複並向下方延伸。The first pipe 21 is provided so as to bend multiple times inside the second pipe 12 and extend downward. More specifically, the first pipe 21 is provided such that the arc-shaped curved portion extending downward and the portion extending downward in a direction inclined relative to the vertical direction alternately repeats and extends downward. extend.

根據水分分離裝置4,當樣氣被導入第1配管21時,其係沿著在第2配管12內複數次彎曲並向下方延伸的第1配管21而向下方流動。並且,冷卻氣體係在彎曲延伸的第1配管11的外側且第2配管12的內側向下方流動。藉此,經由彎曲並延伸的第1配管21的管壁的全周,在冷卻氣體與樣氣之間有效地進行熱交換,而樣氣被冷卻,水分從樣氣中被分離。According to the water separator 4 , when the sample gas is introduced into the first pipe 21 , it flows downward along the first pipe 21 bent several times in the second pipe 12 and extending downward. In addition, the cooling air system flows downward on the outside of the first pipe 11 that extends in a bend and on the inside of the second pipe 12 . Thereby, heat exchange is efficiently performed between the cooling gas and the sample gas through the entire circumference of the pipe wall of the first pipe 21 which is bent and extended, and the sample gas is cooled and moisture is separated from the sample gas.

藉此,根據第4實施形態,與第1實施形態相同地,可提供水分分離裝置4,其能夠抑制設備成本及設置空間的增大,並且能夠提高對樣氣的冷卻效率而實現水分的分離能力的提高,進而能夠容易地回收水分且有效地引導樣氣。Thus, according to the fourth embodiment, similarly to the first embodiment, it is possible to provide a water separator 4 that can suppress an increase in equipment cost and installation space, and can achieve water separation by improving the cooling efficiency of the sample gas. Improved capacity, which in turn enables easy water recovery and efficient sample gas guidance.

另外,根據水分分離裝置4,樣氣係於在第2配管12內複數次地彎曲並向下方延伸的第1配管21中流動。藉此,樣氣係在第2配管12的內側沿著與直線狀路徑相比具有更長路徑的第1配管21而向下方流動,同時地,經由配管11的管壁而在與冷卻氣體之間進行熱交換並被冷卻,而水分被分離。藉此,若在樣氣每單位時間的流量相同的情況下進行比較,則與直線狀路徑之情況相比,在具有更長路徑的第1配管21中,能夠延長在與冷卻氣體之間進行熱交換的時間。因此,根據水分分離裝置4,在冷卻氣體與樣氣之間能夠更有效地進行熱交換,因此能夠進一步提高對樣氣的冷卻效率,實現水分的分離能力的提高。In addition, according to the moisture separator 4 , the sample gas flows through the first pipe 21 that is bent multiple times in the second pipe 12 and extends downward. Thereby, the sample gas flows downward along the first pipe 21 which has a longer path than the straight path inside the second pipe 12, and at the same time passes through the pipe wall of the pipe 11 between the cooling gas. The heat exchange between them is cooled, while the moisture is separated. In this way, when the flow rate of the sample gas per unit time is the same, compared with the case of a straight path, in the first pipe 21 having a longer path, the distance between the cooling gas and the cooling gas can be extended. time of heat exchange. Therefore, according to the water separator 4 , since heat exchange can be more effectively performed between the cooling gas and the sample gas, the cooling efficiency of the sample gas can be further improved, and the water separation ability can be improved.

[第5實施形態] 接著,對本發明的第5實施形態的水分分離裝置5進行說明。圖9係表示本發明之第5實施形態之水分分離裝置5的圖。再者,圖9中,對於水分分離裝置5,以截面圖而加以圖示。例如,與第1實施形態的水分分離裝置1同樣地,第5實施形態的水分分離裝置5係應用於下述系統,該系統係從在熱處理裝置100中產生的排放氣體採集的樣氣中分離水分,並將樣氣供給至分析計101。再者,在下述第5實施形態的說明中,對與上述第1實施形態不同之處進行說明,對於與上述第1實施形態同樣的構成或對應的構成,在圖式中附加相同符號或引用相同符號,藉此省略重複的說明。另外,圖9中,與圖3同樣地,以細虛線的箭頭示意地表示樣氣流動的情況,以細實線的箭頭示意地表示冷卻氣體流動的情況,以粗虛線的箭頭示意地表示從樣氣分離出的水分落下的情況。[Fifth Embodiment] Next, a water separator 5 according to a fifth embodiment of the present invention will be described. Fig. 9 is a diagram showing a water separator 5 according to a fifth embodiment of the present invention. In addition, in FIG. 9, the moisture separator 5 is shown in cross-sectional view. For example, like the moisture separator 1 of the first embodiment, the moisture separator 5 of the fifth embodiment is applied to a system for separating Moisture, and the sample gas is supplied to the analyzer 101. In addition, in the following description of the fifth embodiment, differences from the above-mentioned first embodiment will be described, and for the same or corresponding configurations as those of the above-mentioned first embodiment, the same symbols or references will be attached in the drawings. The same symbols are used to omit repeated explanations. In addition, in FIG. 9 , similar to FIG. 3 , the flow of the sample gas is schematically shown by arrows of thin dotted lines, the flow of cooling gas is schematically shown by arrows of thin solid lines, and the flow of cooling gas is schematically shown by arrows of thick dotted lines. The case where the water separated from the sample gas falls.

與第1實施形態的水分分離裝置1同樣地,圖9所示的第5實施形態的水分分離裝置5係將從採樣系統107a導入的樣氣冷卻,分離樣氣中包含的水分,並將樣氣供給至分析計供給系統108。並且,與水分分離裝置1同樣地,水分分離裝置5係具備第1配管22、第2配管23、出口室13、水分回收室14即樣氣引導部15而構成。但是,水分分離裝置5係在關於第1配管22及第2配管23配置的構成上與水分分離裝置1不同。Like the water separator 1 of the first embodiment, the water separator 5 of the fifth embodiment shown in FIG. 9 cools the sample gas introduced from the sampling system 107a, separates the moisture contained in the sample gas, and separates the sample gas. The gas is supplied to the analyzer supply system 108. Also, like the water separator 1 , the water separator 5 includes a first pipe 22 , a second pipe 23 , an outlet chamber 13 , a water recovery chamber 14 , and a sample gas guide 15 . However, the water separator 5 is different from the water separator 1 in the structure of arrangement of the first pipe 22 and the second pipe 23 .

第1配管22係構成為,被導入有包含水分的樣氣且樣氣向下方流動的配管。第1配管22係設置成,截面呈圓形並直線狀地延伸的圓筒狀的配管,其係構成為在長度方向的一端部側呈段狀地縮徑。第1配管22係設置成導熱性優異的金屬製的配管,例如,設置成不鏽鋼製的配管。第1配管22係例如相對於被固定在水分回收室14的支撐框架16而被固定支撐。另外,第1配管22係在其長度方向沿上下方向延伸的狀態下相對於支撐框架16而被支撐,在本實施形態中,設置成直線狀地上下延伸。The first pipe 22 is configured as a pipe into which a sample gas containing moisture is introduced and the sample gas flows downward. The first pipe 22 is provided as a cylindrical pipe that has a circular cross section and extends linearly, and is configured to be reduced in diameter in a stepwise manner on one end side in the longitudinal direction. The first pipe 22 is provided as a pipe made of metal having excellent thermal conductivity, for example, a pipe made of stainless steel. The first piping 22 is, for example, fixedly supported with respect to the support frame 16 fixed to the water recovery chamber 14 . Moreover, the 1st piping 22 is supported with respect to the support frame 16 in the state which extended the longitudinal direction in the up-down direction, and is provided in this embodiment so that it may extend linearly up and down.

第1配管22具備大徑管部24與小徑管部25而構成。在大徑管部24設有:大徑管本體部24a;上蓋部24b,其堵塞大徑管本體部24a的上端部;及下蓋部24c,其堵塞大徑管本體部24a的下端部。The first pipe 22 includes a large-diameter pipe portion 24 and a small-diameter pipe portion 25 . The large-diameter pipe part 24 is provided with: a large-diameter pipe body part 24a; an upper cover part 24b that closes the upper end of the large-diameter pipe body part 24a;

大徑管本體部24a係設置成截面呈圓形且直線狀地上下延伸的圓管狀。並且,在大徑管本體部24a的上端側連接有樣氣導入管26。樣氣導入管26係設置成細長的圓管,其構成為將自採樣系統107b供給的樣氣導入至第1配管22。更具體而言,樣氣導入管26中,管長方向的一端部係連接至採樣系統107b的下游側的端部,管長方向的另一端部係在大徑管本體部24a的上端側與大徑管本體部24a連接。並且,樣氣導入管26的另一端部係貫通設置於大徑管本體部24a的上端側並貫通大徑管本體部24a的管壁的貫通孔。另外,樣氣導入管26的另一端部係在經由密封構件而以氣密狀態對大徑管本體部24a上端側的貫通孔的緣部密合的狀態下插通於大徑管本體部24a上端側的貫通孔,而在大徑管本體部24a的內部開口。藉此,採樣系統107b與第1配管22的上端側的區域係經由樣氣導入管26而連通,樣氣被導入於第1配管22的上端側的區域。The large-diameter pipe body part 24a is provided in the shape of a round pipe that has a circular cross section and extends linearly up and down. Furthermore, a sample gas introduction pipe 26 is connected to the upper end side of the large-diameter pipe main body portion 24a. The sample gas introduction pipe 26 is provided as an elongated circular pipe, and is configured to introduce the sample gas supplied from the sampling system 107 b into the first pipe 22 . More specifically, in the sample gas introduction pipe 26, one end in the pipe length direction is connected to the end on the downstream side of the sampling system 107b, and the other end in the pipe length direction is connected to the upper end side of the large-diameter pipe body part 24a and the large-diameter pipe body part 24a. The tube body portion 24a is connected. In addition, the other end portion of the sample gas introduction pipe 26 is a through-hole provided on the upper end side of the large-diameter tube body portion 24a and penetrating the tube wall of the large-diameter tube body portion 24a. In addition, the other end of the sample gas introduction tube 26 is inserted into the large-diameter tube main body 24a in a state of being airtightly sealed to the edge of the through hole on the upper end side of the large-diameter tube main body 24a via a sealing member. The through-hole on the upper end side opens inside the large-diameter pipe main body portion 24a. Thereby, the sampling system 107 b communicates with the area on the upper end side of the first pipe 22 through the sample gas introduction pipe 26 , and the sample gas is introduced into the area on the upper end side of the first pipe 22 .

另外,在大徑管本體部24a的下端側設有貫通大徑管本體部24a的管壁而供後述第2配管23插通的貫通孔。第2配管23插入第1配管22中,其下端側的部分係從大徑管本體部24a的內側向外側貫通大徑管本體部24a的下端側的貫通孔。另外,第2配管23的下端側的部分係在經由密封構件而以氣密狀態對大徑管本體部24a下端側的貫通孔的緣部密合的狀態下插通於大徑管本體部24a下端側的貫通孔,而在大徑管本體部24a的外部開口。In addition, a through-hole through which the second pipe 23 described later is inserted through the pipe wall of the large-diameter pipe main body 24 a is provided on the lower end side of the large-diameter pipe main body 24 a. The second pipe 23 is inserted into the first pipe 22, and its lower end portion is a through hole penetrating the lower end side of the large diameter pipe main body 24a from the inside to the outside of the large diameter pipe main body 24a. In addition, the portion on the lower end side of the second pipe 23 is inserted into the large-diameter pipe main body portion 24a in a state of being airtightly sealed to the edge of the through hole on the lower end side of the large-diameter pipe main body portion 24a via a sealing member. The through-hole on the lower end side opens to the outside of the large-diameter pipe main body portion 24a.

大徑管部24的上蓋部24b係設置成中心形成有貫通孔的圓板狀的構件,在以氣密狀態與大徑管本體部24a的上端部密合的狀態下固定於大徑管本體部24a的上端部。並且,在上蓋部24b的貫通孔中插通有第2配管23。第2配管23係在經由密封構件而以氣密狀態與上蓋部24b的貫通孔的緣部密合的狀態下插通於上蓋部24b的貫通孔。The upper cover part 24b of the large-diameter pipe part 24 is provided as a disc-shaped member with a through-hole formed in the center, and is fixed to the large-diameter pipe main body in a state of airtight contact with the upper end of the large-diameter pipe main body part 24a. The upper end of the portion 24a. In addition, the second pipe 23 is inserted into the through hole of the upper cover part 24b. The second pipe 23 is inserted into the through hole of the upper cover part 24b in a state of being in close contact with the edge of the through hole of the upper cover part 24b in an airtight state via a sealing member.

大徑管部24的下蓋部24c係設置成中心形成有貫通孔的圓板狀的構件,在以氣密狀態與大徑管本體部24a的下端部密合的狀態下固定於大徑管本體部24a的下端部。並且,在下蓋部24c的貫通孔中固定有小徑管部25。The lower cover part 24c of the large-diameter pipe part 24 is provided as a disc-shaped member with a through-hole formed in the center, and is fixed to the large-diameter pipe in a state of airtight contact with the lower end of the large-diameter pipe main body part 24a. The lower end portion of the main body portion 24a. Furthermore, the small-diameter tube part 25 is fixed to the through hole of the lower cover part 24c.

小徑管部25係在大徑管部24的下方與大徑管部24上下串聯排列地設置。另外,小徑管部25係相對於大徑管部24而在同一中心軸線上下排列地設置。並且,小徑管部25係形成為直徑小於大徑管部24的圓管狀,並設置成,沿上下方向細長地延伸,且從大徑管部24的下端在出口室13內向下方延伸。因此,第1配管22係構成為,大徑管部24與小徑管部25依序呈直線狀地上下排列,進而,在從大徑管部24朝小徑管部25連續的下端側,從大徑的大徑管部24朝小徑的小徑管部25呈段狀地縮徑。The small-diameter pipe part 25 is arranged in series with the large-diameter pipe part 24 below the large-diameter pipe part 24 . In addition, the small-diameter pipe portion 25 is arranged vertically on the same central axis with respect to the large-diameter pipe portion 24 . The small-diameter tube portion 25 is formed in a circular tube shape with a diameter smaller than that of the large-diameter tube portion 24 , is provided elongated in the vertical direction, and extends downward in the outlet chamber 13 from the lower end of the large-diameter tube portion 24 . Therefore, the first pipe 22 is configured such that the large-diameter pipe portion 24 and the small-diameter pipe portion 25 are sequentially arranged linearly up and down, and furthermore, on the lower end side continuing from the large-diameter pipe portion 24 to the small-diameter pipe portion 25, The diameter decreases stepwise from the large-diameter large-diameter pipe portion 24 toward the small-diameter small-diameter pipe portion 25 .

另外,小徑管部25的上端部係在氣密狀態下嵌入固定於設置在大徑管部24的下蓋部24c中心的貫通孔,並向大徑管部24開口。藉此,小徑管部25係在其上端部連接至大徑管部24的下蓋部24c而與大徑管部24連通。並且,小徑管部25係在其下端部於出口室13內開口而與出口室13連通。另外,小徑管部25的下端部為第1配管22的下端部,在第1配管22的下端部於出口室13開口的出口側開口22a係配置於較樣氣引導部15連通於出口室13的位置更下方處。In addition, the upper end of the small-diameter tube part 25 is fitted and fixed in an airtight state to a through hole provided at the center of the lower cover part 24 c of the large-diameter tube part 24 , and opens to the large-diameter tube part 24 . Thereby, the small-diameter tube part 25 is connected to the lower cover part 24c of the large-diameter tube part 24 at the upper end part, and communicates with the large-diameter tube part 24. As shown in FIG. In addition, the small-diameter tube portion 25 opens into the outlet chamber 13 at its lower end to communicate with the outlet chamber 13 . In addition, the lower end portion of the small-diameter tube portion 25 is the lower end portion of the first pipe 22, and the outlet-side opening 22a opened to the outlet chamber 13 at the lower end portion of the first pipe 22 is arranged in the comparative sample gas guide portion 15 to communicate with the outlet chamber. The position of 13 is further below.

第2配管23之至少一部分係配置於第1配管22的大徑管部24的內側,其構成為,被導入有溫度低於樣氣的冷卻氣體且供冷卻氣體向下方流動的配管。第2配管23係設置成截面呈圓形且細長地延伸的圓管狀的配管。第2配管23係設置成導熱性優異的金屬製的圓管,例如,設置成不鏽鋼製的圓管。第2配管23係相對於第1配管22而被支撐。另外,第2配管23係具有上下配管部23a及水平配管部23b。At least a part of the second pipe 23 is arranged inside the large-diameter pipe portion 24 of the first pipe 22, and is configured as a pipe through which cooling gas having a lower temperature than the sample gas is introduced and the cooling gas flows downward. The second pipe 23 is a pipe provided in the shape of a round pipe that has a circular cross section and extends elongatedly. The second piping 23 is provided as a round pipe made of metal having excellent thermal conductivity, for example, a round pipe made of stainless steel. The second pipe 23 is supported with respect to the first pipe 22 . Moreover, the 2nd piping 23 has the upper-lower piping part 23a and the horizontal piping part 23b.

第2配管23的上下配管部23a係設置成在上下方向呈直線狀地延伸的部分,並在插入第1配管22的大徑管部24的內側的狀態下配置。上下配管部23a係相對於大徑管部24而呈中心軸線一致的同心狀地配置,配置成與大徑管部24平行地上下延伸。上下配管部23a係於上端側在氣密狀態下貫通設置於大徑管部24的上蓋部24b的貫通孔,而被大徑管部24支撐。另外,上下配管部23a的上端部係從上蓋部24b向上方突出而配置於大徑管部24的外側。並且,上下配管部23a的上端部係經由連接器(省略圖示)而連接至空氣冷卻器109的端部109b。藉此,從空氣冷卻器109供給的冷卻氣體係被導入至第2配管23。The upper and lower piping portions 23 a of the second piping 23 are provided as portions extending linearly in the vertical direction, and are arranged in a state inserted into the large-diameter piping portion 24 of the first piping 22 . The upper and lower piping portions 23 a are concentrically arranged with respect to the large-diameter pipe portion 24 so that the central axes coincide, and are arranged to extend vertically in parallel with the large-diameter pipe portion 24 . The upper and lower pipe parts 23a are supported by the large-diameter pipe part 24 by penetrating through the through-hole provided in the upper cover part 24b of the large-diameter pipe part 24 in an airtight state at the upper end side. Moreover, the upper end part of the upper and lower piping part 23a protrudes upward from the upper cover part 24b, and is arrange|positioned outside the large-diameter pipe part 24. As shown in FIG. And the upper end part of the upper-lower piping part 23a is connected to the end part 109b of the air cooler 109 via the connector (illustration omitted). Thereby, the cooling air system supplied from the air cooler 109 is introduced into the second pipe 23 .

第2配管23的水平配管部23b係設置成在上下配管部23a的下端側與上下配管部23a連續,並且在水平方向上呈直線狀地延伸的部分。水平配管部23b係經由彎曲成大致90°的彎曲部與上下配管部23a連接,水平配管部23b的一端部係與上下配管部23a的下端部連通。並且,水平配管部23b係設置成從與上下配管部23a的下端部連接的部分沿著水平方向延伸,並且從第1配管22的大徑管部24的內側向外側延伸。另外,水平配管部23b係在氣密狀態下貫通設置於大徑管部24的大徑管本體部24a的管壁的貫通孔,而被大徑管部24支撐。並且,水平配管部23b中之與上下配管部23a連接之側的相反側的端部係從大徑管本體部24a向側方突出,而配置於大徑管部24的外側。另外,水平配管部23b係在配置於大徑管部24的外側的端部開口。再者,水平配管部23b亦可藉由連結2個配管部分而構成,從而容易在貫通大徑管本體部24a的管壁並從大徑管本體部24a的內側向外側突出地配置的狀態下形成。即,水平配管部23b亦可藉由將與上下配管部23a連續並貫通大徑管本體部24a的管壁的配管部分、及在大徑管本體部24a的外側延伸的配管部分加以連結而構成。The horizontal piping part 23b of the 2nd piping 23 is provided in the lower end side of the upper and lower piping part 23a continuously with the upper and lower piping part 23a, and is the part extended linearly in the horizontal direction. The horizontal piping portion 23b is connected to the upper and lower piping portions 23a via a bent portion bent at approximately 90°, and one end of the horizontal piping portion 23b communicates with the lower end of the upper and lower piping portion 23a. Furthermore, the horizontal piping portion 23b is provided so as to extend in the horizontal direction from a portion connected to the lower end of the upper and lower piping portions 23a, and to extend from the inside to the outside of the large-diameter pipe portion 24 of the first piping 22 . In addition, the horizontal piping portion 23b is supported by the large-diameter pipe portion 24 through a through-hole provided in the pipe wall of the large-diameter pipe body portion 24a of the large-diameter pipe portion 24 in an airtight state. In addition, the end portion of the horizontal piping portion 23 b on the side opposite to the side connected to the upper and lower piping portions 23 a protrudes laterally from the large-diameter pipe body portion 24 a and is disposed outside the large-diameter pipe portion 24 . In addition, the horizontal piping portion 23 b is opened at an end portion arranged outside the large-diameter pipe portion 24 . Furthermore, the horizontal piping portion 23b can also be constituted by connecting two piping portions, so that it can easily be arranged in a state of penetrating the pipe wall of the large-diameter pipe main body portion 24a and protruding from the inside to the outside of the large-diameter pipe main body portion 24a. form. That is, the horizontal piping portion 23b may be formed by connecting a piping portion that is continuous with the upper and lower piping portions 23a and passes through the pipe wall of the large-diameter pipe main body portion 24a, and a piping portion that extends outside the large-diameter pipe main body portion 24a. .

在水分分離裝置5中,從採樣系統107b排出的樣氣係經由樣氣導入管26而被導入第1配管22內的上端側的區域。並且,被導入第1配管22內的樣氣係在第1配管22的內側且第2配管23的外側的區域中向下方流動。另一方面,從空氣冷卻器109排出的冷卻氣體係被導入第2配管23的上下配管部23a,在配置於第1配管22的大徑管部24的內側的上下配管部23a中向下方流動。因此,冷卻氣體係在第2配管23的上下配管部23a的內側向下方流動,樣氣係在第1配管22的大徑管部24的內側且上下配管部23a的外側向下方流動,藉此,經由第2配管23之上下配管部23a之管壁全周,在樣氣與冷卻氣體之間進行熱交換。藉此,在第1配管22的大徑管部24的流動中,樣氣被冷卻,伴隨著因樣氣中的溫度降低所致之飽和水蒸氣量的減少,因應溫度所致之飽和水蒸氣量的差異而冷凝的水分係在第1配管22的大徑管部24內從樣氣中分離。在大徑管部24內從樣氣中分離的水分係在大徑管部24的下方與其連通的小徑管部25中落下,從在出口室13內開口的小徑管部25的下端部的出口側開口22a朝出口室13內滴落,通過出口室13並被水分回收室14回收。另外,在第2配管23的上下配管部23a中朝下方流動,並經由上下配管部23a的管壁而在與樣氣之間進行熱交換的冷卻氣體係朝水平配管部23b流動,從水平配管部23b的端部排出至第2配管23的外部。另外,分離出水分後的樣氣係從第1配管22流出到出口室13而朝樣氣引導部15流動,從樣氣引導部15經由分析計供給系統108而被供給至分析計101。In the moisture separator 5 , the sample gas discharged from the sampling system 107 b is introduced into the region on the upper end side in the first pipe 22 via the sample gas introduction pipe 26 . Then, the sample gas introduced into the first pipe 22 flows downward in a region inside the first pipe 22 and outside the second pipe 23 . On the other hand, the cooling air discharged from the air cooler 109 is introduced into the upper and lower piping portions 23 a of the second piping 23 , and flows downward in the upper and lower piping portions 23 a arranged inside the large-diameter pipe portion 24 of the first piping 22 . . Therefore, the cooling gas system flows downward inside the upper and lower piping portions 23a of the second piping 23, and the sample gas flows downward inside the large-diameter pipe portion 24 of the first piping 22 and outside the upper and lower piping portions 23a. , through the entire circumference of the pipe wall of the upper and lower pipe portions 23a of the second pipe 23, heat exchange is performed between the sample gas and the cooling gas. As a result, the sample gas is cooled in the flow of the large-diameter pipe part 24 of the first pipe 22, and the amount of saturated water vapor due to the temperature drop in the sample gas decreases, and the saturated water vapor due to temperature decreases. The water condensed due to the difference in amount is separated from the sample gas in the large-diameter pipe part 24 of the first pipe 22 . The water separated from the sample gas in the large-diameter tube part 24 falls in the small-diameter tube part 25 connected with it below the large-diameter tube part 24 , and flows from the lower end of the small-diameter tube part 25 opened in the outlet chamber 13 The outlet side opening 22a of the water drips into the outlet chamber 13, passes through the outlet chamber 13 and is recovered by the water recovery chamber 14. In addition, the cooling gas that flows downward in the upper and lower piping portions 23a of the second piping 23 and exchanges heat with the sample gas through the pipe walls of the upper and lower piping portions 23a flows toward the horizontal piping portion 23b and flows from the horizontal piping to the horizontal piping portion 23b. The end of the portion 23b is discharged to the outside of the second pipe 23 . The sample gas from which moisture has been separated flows out from the first pipe 22 to the outlet chamber 13 to flow toward the sample gas guide 15 , and is supplied from the sample gas guide 15 to the analyzer 101 via the analyzer supply system 108 .

根據上述水分分離裝置5,與第1實施形態的水分分離裝置1同樣地,在從樣氣分離水分時,無需採用液體冷媒的熱交換器,因此能夠抑制設備成本及設置空間的增大。並且,根據水分分離裝置5,樣氣在第1配管22中向下方流動,並且冷卻氣體在配置於第1配管22內側的第2配管23中向下方流動,同時地,在冷卻氣體與樣氣之間進行熱交換,而樣氣被冷卻。因此,在第2配管23配置於第1配管22的內側且沿上下方向延伸的區域中,遍及上下方向的全長,樣氣及冷卻氣體係沿著上下方向流動,同時地,在樣氣與冷卻氣體之間效率良好地進行熱交換。藉此,能夠實現樣氣的冷卻效率的提高,而能夠實現水分的分離能力的提高。另外,根據水分分離裝置5,與第1實施形態的水分分離裝置1同樣地,能夠容易地回收從樣氣分離出的水分,並且能夠有效地引導分離出水分的樣氣。According to the moisture separator 5 described above, similarly to the moisture separator 1 of the first embodiment, when separating moisture from the sample gas, a heat exchanger using a liquid refrigerant is not required, and thus an increase in equipment cost and installation space can be suppressed. And, according to the water separator 5, the sample gas flows downward in the first pipe 22, and the cooling gas flows downward in the second pipe 23 arranged inside the first pipe 22, and at the same time, the cooling gas and the sample gas The heat exchange between them, while the sample gas is cooled. Therefore, in the area where the second pipe 23 is arranged inside the first pipe 22 and extends in the vertical direction, the sample gas and the cooling gas system flow in the vertical direction over the entire length in the vertical direction. Heat is efficiently exchanged between the gases. Thereby, the cooling efficiency of the sample gas can be improved, and the water separation ability can be improved. In addition, according to the water separator 5 , similarly to the water separator 1 of the first embodiment, the water separated from the sample gas can be easily recovered, and the water-separated sample gas can be efficiently guided.

因此,根據第5實施形態,可以提供水分分離裝置5,其能夠抑制設備成本及設置空間的增大,並且能夠提高對樣氣的冷卻效率而實現水分的分離能力的提高,進而能夠容易地回收水分且有效地引導樣氣。Therefore, according to the fifth embodiment, it is possible to provide a water separator 5 that can suppress an increase in equipment cost and installation space, and can improve the cooling efficiency of the sample gas to achieve an improvement in the water separation ability, and can be easily recovered. moisture and guides the sample gas efficiently.

[第6實施形態] 接著,對本發明的第6實施形態的水分分離裝置6進行說明。圖10係表示本發明之第6實施形態之水分分離裝置6的圖。再者,圖10中,對於水分分離裝置6,以截面圖而加以圖示。例如,與第1實施形態的水分分離裝置1同樣地,第6實施形態的水分分離裝置6係應用於下述系統,該系統係從在熱處理裝置100中產生的排放氣體採集的樣氣中分離水分,並將樣氣供給至分析計101。另外,與上述第5實施形態的水分分離裝置5同樣地,第6實施形態的水分分離裝置6係構成為,被導入有冷卻氣體並流動的第2配管23的一部分配置於被導入有樣氣並流動的第1配管22的內側。再者,在下述第6實施形態的說明中,對與上述第1實施形態及第5實施形態不同之處進行說明,對於與上述第1實施形態及第5實施形態同樣的構成或對應的構成,在圖式中附加相同符號或引用相同符號,藉此省略重複的說明。另外,圖10中,與圖3及圖9同樣地,以細虛線的箭頭示意地表示樣氣流動的情況,以細實線的箭頭示意地表示冷卻氣體流動的情況,以粗虛線的箭頭示意地表示從樣氣分離出的水分落下的情況。[Sixth Embodiment] Next, a water separator 6 according to a sixth embodiment of the present invention will be described. Fig. 10 is a diagram showing a water separator 6 according to a sixth embodiment of the present invention. In addition, in FIG. 10, the moisture separator 6 is shown in cross-sectional view. For example, like the moisture separator 1 of the first embodiment, the moisture separator 6 of the sixth embodiment is applied to a system for separating Moisture, and the sample gas is supplied to the analyzer 101. In addition, similarly to the water separator 5 of the fifth embodiment, the water separator 6 of the sixth embodiment is configured such that a part of the second piping 23 into which the cooling gas is introduced and flows is arranged in the area into which the sample gas is introduced. and flow inside the first pipe 22. In addition, in the following description of the sixth embodiment, differences from the above-mentioned first embodiment and fifth embodiment will be described, and the same or corresponding configurations as those of the above-mentioned first embodiment and fifth embodiment will be described. , add or quote the same symbols in the drawings, thereby omitting repeated explanations. In addition, in FIG. 10 , similarly to FIG. 3 and FIG. 9 , the flow of the sample gas is schematically shown by arrows of thin dotted lines, the flow of cooling gas is schematically shown by arrows of thin solid lines, and the flow of cooling gas is schematically shown by arrows of thick dotted lines. It shows the situation where the moisture separated from the sample gas falls.

與第1實施形態的水分分離裝置1及第5實施形態的水分分離裝置5同樣地,圖10所示的第6實施形態的水分分離裝置6係將從採樣系統107a導入的樣氣冷卻,分離樣氣中包含的水分,並將樣氣供給至分析計供給系統108。並且,與水分分離裝置5同樣地,水分分離裝置6具備第1配管22、第2配管23、出口室13、水分回收室14及樣氣引導部15而構成。但是,水分分離裝置6係在具備複數個第2配管23的構成上與水分分離裝置5不同。Like the water separator 1 of the first embodiment and the water separator 5 of the fifth embodiment, the water separator 6 of the sixth embodiment shown in FIG. 10 cools the sample gas introduced from the sampling system 107a, and separates moisture contained in the sample gas, and the sample gas is supplied to the analyzer supply system 108 . Further, like the water separator 5 , the water separator 6 includes a first pipe 22 , a second pipe 23 , an outlet chamber 13 , a water recovery chamber 14 , and a sample gas guide 15 . However, the moisture separator 6 differs from the moisture separator 5 in that it includes a plurality of second pipes 23 .

如圖10所示,在水分分離裝置6中,第2配管23設有複數個,具體而言,設有2個。2個第2配管23各者係與水分分離裝置5的第2配管23同樣地構成,而構成為下述圓管狀的配管:一部分配置於第1配管22的大徑管部24的內側,被導入有溫度低於樣氣的冷卻氣體,並且冷卻氣體向下方流動。As shown in FIG. 10 , in the moisture separator 6 , a plurality of second piping 23 are provided, specifically, two are provided. Each of the two second piping 23 is configured in the same manner as the second piping 23 of the water separator 5, and is configured as a circular pipe-shaped piping: a part is arranged inside the large-diameter pipe portion 24 of the first piping 22, and is A cooling gas having a lower temperature than the sample gas is introduced, and the cooling gas flows downward.

2個第2配管23各者係與水分分離裝置5的第2配管23同樣地構成,該等係具有上下配管部23a及水平配管部23b。各第2配管23的上下配管部23a係配置成,在第1配管22的大徑管部24的內側上下延伸。並且,2個第2配管23的上下配管部23a係在上下延伸的大徑管部24的內側沿著上下方向相互平行地延伸。再者,在大徑管部24的上蓋部24b設有2個在氣密狀態下插通有各第2配管23的上下配管部23a的貫通孔,各第2配管23的上下配管部23a係在插通於上蓋部24b的貫通孔中的狀態下被第1配管22支撐。另外,各第2配管23的水平配管部23b係設置成,相對於各上下配管部23a而在其下端側連續並沿水平方向延伸。並且,各第2配管23的水平配管部23b係從第1配管22的大徑管部24的內側向外側延伸,從大徑管本體部24a向側方突出並在大徑管部24的外側開口。再者,在大徑管本體部24a的管壁設有2個在氣密狀態下插通有各第2配管23的水平配管部23b的貫通孔,各第2配管23的水平配管部23b係在插通於大徑管本體部24a的貫通孔的狀態下被第1配管22支撐。Each of the two second pipes 23 is configured in the same manner as the second pipe 23 of the water separator 5, and these have upper and lower pipe parts 23a and horizontal pipe parts 23b. The upper and lower pipe portions 23 a of the second pipes 23 are disposed so as to extend vertically inside the large-diameter pipe portion 24 of the first pipe 22 . Further, the upper and lower piping portions 23 a of the two second piping 23 extend parallel to each other in the vertical direction inside the large-diameter pipe portion 24 extending vertically. Furthermore, two through holes are provided in the upper cover portion 24b of the large-diameter pipe portion 24, through which the upper and lower piping portions 23a of the second piping 23 are inserted in an airtight state, and the upper and lower piping portions 23a of the second piping 23 are It is supported by the 1st piping 22 in the state inserted in the through-hole of the upper cover part 24b. Moreover, the horizontal piping part 23b of each 2nd piping 23 is provided so that it may extend in the horizontal direction continuously at the lower end side with respect to each upper and lower piping part 23a. In addition, the horizontal pipe portion 23b of each second pipe 23 extends from the inside to the outside of the large-diameter pipe portion 24 of the first pipe 22, protrudes laterally from the large-diameter pipe body portion 24a, and is positioned outside the large-diameter pipe portion 24. Open your mouth. Furthermore, two through holes through which the horizontal piping portions 23b of the second piping 23 are inserted in an airtight state are provided on the pipe wall of the large-diameter pipe main body portion 24a, and the horizontal piping portions 23b of the second piping 23 are It is supported by the first pipe 22 in a state of being inserted into the through hole of the large-diameter pipe main body portion 24a.

另外,2個第2配管23各者係在從大徑管部24的上蓋部24b向上方突出的上下配管部23a的上端部,經由連接配管(省略圖示)而連接至空氣冷卻器109的端部109b。再者,在第6實施形態中,與空氣冷卻器109的端部109b連接的連接配管係在與空氣冷卻器109的端部109b連接的一側的相反側的下游側分支成2個系統。並且,2個第2配管23的上下配管部23a各者係連接至,在與空氣冷卻器109連接的連接配管的下游側分支的2個系統各者的下游側的端部。冷卻氣體係從與空氣冷卻器109連接的連接配管中分支的系統下游側的端部導入至各第2配管23的上下配管部23a的上端部。從上方導入至各第2配管23的上下配管部23a的上端部的冷卻氣體係在各第2配管23的上下配管部23a中向下方流動,接著,在各第2配管23的水平配管部23b中水平流動,而朝各第2配管23的外部排出。In addition, each of the two second pipes 23 is connected to the air cooler 109 via connecting pipes (not shown) at the upper end of the upper and lower pipe parts 23a protruding upward from the upper cover part 24b of the large-diameter pipe part 24. end 109b. Furthermore, in the sixth embodiment, the connection piping connected to the end 109b of the air cooler 109 is branched into two systems on the downstream side opposite to the side connected to the end 109b of the air cooler 109 . And each of the upper and lower piping parts 23a of the two 2nd piping 23 is connected to the downstream end part of each of the two systems branched at the downstream side of the connection piping connected to the air cooler 109. The cooling gas system is introduced into the upper end of the upper and lower piping portions 23 a of the second piping 23 from the downstream end of the system branched from the connecting piping connected to the air cooler 109 . The cooling air introduced from above to the upper end portion of the upper and lower piping portions 23a of each second piping 23 flows downward in the upper and lower piping portions 23a of each second piping 23, and then flows through the horizontal piping portion 23b of each second piping 23. It flows horizontally and is discharged to the outside of each second pipe 23 .

在水分分離裝置6中,從採樣系統107b排出的樣氣係經由樣氣導入管26被導入第1配管22的大徑管部24內的上端側的區域。並且,導入第1配管22的大徑管部24內的樣氣係在大徑管部24的內側且2個第2配管23各者外側的區域中向下方流動。另一方面,從空氣冷卻器109排出的冷卻氣體係被導入2個第2配管23各者的上下配管部23a,在配置於第1配管22的大徑管部24內側的各上下配管部23a中向下方流動。因此,冷卻氣體係在各第2配管23的上下配管部23a的內側向下方流動,樣氣係在第1配管22的大徑管部24的內側且各上下配管部23a的外側向下方流動,藉此,經由各第2配管23之上下配管部23a的管壁全周,而在樣氣與冷卻氣體之間進行熱交換。藉此,在第1配管22的大徑管部24的流動中,樣氣被冷卻,伴隨著因樣氣中的溫度降低導致之飽和水蒸氣量的減少,因應溫度所致之飽和水蒸氣量的差異而冷凝的水分係在第1配管22的大徑管部24內從樣氣中分離。在大徑管部24內從樣氣中分離的水分係在大徑管部24的下方與其連通的小徑管部25中落下,從在出口室13內開口的小徑管部25的下端部的出口側開口22a滴落至出口室13內,通過出口室13而朝水分回收室14回收。另外,在各第2配管23的上下配管部23a中向下方流動,經由各上下配管部23a的管壁而在與樣氣之間進行熱交換後的冷卻氣體係朝各第2配管23的水平配管部23b流動,而從各水平配管部23b的端部排出至各第2配管23的外部。另外,分離出水分後的樣氣係從第1配管22流出到出口室13而朝樣氣引導部15流動,從樣氣引導部15經由分析計供給系統108而被供給至分析計101。In the moisture separator 6 , the sample gas discharged from the sampling system 107 b is introduced into the region on the upper end side in the large-diameter pipe portion 24 of the first pipe 22 through the sample gas introduction pipe 26 . Then, the sample gas introduced into the large-diameter pipe portion 24 of the first pipe 22 flows downward in a region inside the large-diameter pipe portion 24 and outside each of the two second pipes 23 . On the other hand, the cooling air system discharged from the air cooler 109 is introduced into the upper and lower piping portions 23 a of each of the two second piping 23 , and each of the upper and lower piping portions 23 a arranged inside the large-diameter pipe portion 24 of the first piping 22 flow downwards. Therefore, the cooling gas flows downward inside the upper and lower pipe portions 23a of the second pipes 23, and the sample gas flows downward inside the large-diameter pipe portion 24 of the first pipe 22 and outside each of the upper and lower pipe portions 23a. Thereby, heat exchange is performed between the sample gas and the cooling gas via the entire circumference of the pipe wall of the upper and lower pipe portions 23 a of the respective second pipes 23 . As a result, the sample gas is cooled in the flow of the large-diameter pipe part 24 of the first pipe 22, and the amount of saturated water vapor corresponding to the temperature decreases as the temperature in the sample gas decreases. The water condensed by the difference between the two is separated from the sample gas in the large-diameter pipe part 24 of the first pipe 22 . The water separated from the sample gas in the large-diameter tube part 24 falls in the small-diameter tube part 25 connected with it below the large-diameter tube part 24 , and flows from the lower end of the small-diameter tube part 25 opened in the outlet chamber 13 The outlet side opening 22a of the water drips into the outlet chamber 13 and is recovered toward the water recovery chamber 14 through the outlet chamber 13 . In addition, the cooling gas that flows downward in the upper and lower piping portions 23 a of each second piping 23 and passes through the pipe wall of each upper and lower piping portion 23 a to exchange heat with the sample gas is directed toward the level of each second piping 23 . The piping part 23b flows, and it discharge|emits to the exterior of each 2nd piping 23 from the edge part of each horizontal piping part 23b. The sample gas from which moisture has been separated flows out from the first pipe 22 to the outlet chamber 13 to flow toward the sample gas guide 15 , and is supplied from the sample gas guide 15 to the analyzer 101 via the analyzer supply system 108 .

根據上述水分分離裝置6,與第1實施形態的水分分離裝置1及第5實施形態的水分分離裝置5同樣地,在從樣氣分離水分時,無需採用液體冷媒的熱交換器,因此能夠抑制設備成本及設置空間的增大。並且,根據水分分離裝置6,樣氣係在第1配管22中向下方流動,並且冷卻氣體係在配置於第1配管22的內側的複數個(本實施形態中為2個)第2配管23中向下方流動,同時在冷卻氣體與樣氣之間進行熱交換,而樣氣被冷卻。因此,在複數個第2配管23配置於第1配管22的內側且沿上下方向延伸的區域中,遍及上下方向的全長,樣氣及冷卻氣體係沿著上下方向流動,同時地,在樣氣與冷卻氣體之間有效地進行熱交換。藉此,能夠實現樣氣的冷卻效率的提高,而能夠實現水分的分離能力的提高。另外,根據水分分離裝置6,與第1實施形態的水分分離裝置1及第5實施形態的水分分離裝置5同樣地,能夠容易地回收從樣氣分離出的水分,並且能夠有效地引導分離出水分的樣氣。According to the above-mentioned water separator 6, like the water separator 1 of the first embodiment and the water separator 5 of the fifth embodiment, when separating water from the sample gas, there is no need for a heat exchanger using a liquid refrigerant, so it is possible to suppress the Increase in equipment cost and installation space. In addition, according to the water separator 6, the sample gas flows downward through the first pipe 22, and the cooling gas flows through the plurality of (two in this embodiment) second pipes 23 arranged inside the first pipe 22. The middle flows downwards while heat is exchanged between the cooling gas and the sample gas, while the sample gas is cooled. Therefore, in the region where the plurality of second pipes 23 are arranged inside the first pipe 22 and extend in the vertical direction, the sample gas and the cooling gas flow in the vertical direction over the entire length in the vertical direction, and at the same time, the sample gas flows in the vertical direction. Effective heat exchange with cooling gas. Thereby, the cooling efficiency of the sample gas can be improved, and the water separation ability can be improved. In addition, according to the water separator 6, similar to the water separator 1 of the first embodiment and the water separator 5 of the fifth embodiment, the water separated from the sample gas can be easily recovered, and the separated water can be efficiently guided. Moisture sample gas.

因此,根據第6實施形態,可以提供水分分離裝置6,其能夠抑制設備成本及設置空間的增大,並且能夠提高對樣氣的冷卻效率而實現水分的分離能力的提高,進而能夠容易地回收水分且有效地引導樣氣。Therefore, according to the sixth embodiment, it is possible to provide the water separator 6 which can suppress the increase in equipment cost and installation space, and can improve the cooling efficiency of the sample gas to realize the improvement of the water separation ability, and can also be easily recovered. moisture and guides the sample gas efficiently.

另外,根據水分分離裝置6,冷卻氣體係在複數個第2配管23中向下方流動,並且樣氣係在內側配置有複數個第2配管23的第1配管22中向下方流動,同時地,在冷卻氣體與樣氣之間進行熱交換,而樣氣被冷卻。因此,經由複數個第2配管23的管壁,而在樣氣與冷卻氣體之間進行熱交換。並且,在第2配管23為1個的情況與為複數個的情況下,若在總計截面積為相同大小,且冷卻氣體每單位時間的總計流量相同的情況下進行比較,則第2配管23為複數個時,在與冷卻氣體之間進行熱交換的第2配管23的管壁的表面積增大。因此,根據水分分離裝置6,在冷卻氣體與樣氣之間能夠更有效地進行熱交換,因此能夠進一步提高對樣氣的冷卻效率,而實現水分的分離能力的提高。In addition, according to the water separator 6, the cooling gas system flows downward in the plurality of second pipes 23, and the sample gas flows downward in the first pipe 22 in which the plurality of second pipes 23 are arranged, and at the same time, Heat exchange takes place between the cooling gas and the sample gas, while the sample gas is cooled. Therefore, heat exchange is performed between the sample gas and the cooling gas via the pipe walls of the plurality of second pipes 23 . In addition, when comparing the case where there is one second pipe 23 and the case where there are several, the total cross-sectional area is the same size, and the total flow rate of the cooling gas per unit time is the same, the second pipe 23 When there are plural numbers, the surface area of the pipe wall of the second pipe 23 that exchanges heat with the cooling gas increases. Therefore, according to the moisture separator 6 , since heat exchange can be more effectively performed between the cooling gas and the sample gas, the cooling efficiency of the sample gas can be further improved, and the moisture separation capability can be improved.

再者,在第6實施形態中,例示設有2個第2配管23的水分分離裝置6的形態,但也可以實施設有更多第2配管23的形態。即,也可實施在第1配管22的內側配置有3個以上第2配管23的水分分離裝置的形態。In addition, in the sixth embodiment, the form in which the water separator 6 is provided with two second pipes 23 is exemplified, but a form in which more second pipes 23 are provided may also be implemented. That is, a form of the moisture separator in which three or more second pipes 23 are arranged inside the first pipe 22 may also be implemented.

[第7實施形態] 接著,對本發明的第7實施形態的水分分離裝置7進行說明。圖11係表示本發明之第7實施形態之水分分離裝置7的圖。再者,圖11中,對於水分分離裝置7,以截面圖而加以圖示。例如,與第1實施形態的水分分離裝置1同樣地,第7實施形態的水分分離裝置7係應用於下述系統,該系統係從在熱處理裝置100中產生的排放氣體採集的樣氣中分離水分,並將樣氣供給至分析計101。再者,在下述第7實施形態的說明中,對與上述第1實施形態不同之處進行說明,對於與上述第1實施形態同樣的構成或對應的構成,在圖式中附加相同符號或引用相同符號,藉此省略重複的說明。另外,圖11中,與圖3同樣地,以細虛線的箭頭示意地表示樣氣流動的情況,以細實線的箭頭示意地表示冷卻氣體流動的情況,以粗虛線的箭頭示意地表示從樣氣分離出的水分落下的情況。[Seventh Embodiment] Next, a water separator 7 according to a seventh embodiment of the present invention will be described. Fig. 11 is a diagram showing a water separator 7 according to a seventh embodiment of the present invention. In addition, in FIG. 11, the moisture separator 7 is shown in cross-sectional view. For example, like the moisture separator 1 of the first embodiment, the moisture separator 7 of the seventh embodiment is applied to a system for separating Moisture, and the sample gas is supplied to the analyzer 101. In addition, in the following description of the seventh embodiment, differences from the above-mentioned first embodiment will be described, and for the same configurations as or corresponding configurations to the above-mentioned first embodiment, the same symbols or references will be attached in the drawings. The same symbols are used to omit repeated explanations. In addition, in FIG. 11 , similar to FIG. 3 , the flow of the sample gas is schematically shown by arrows of thin dotted lines, the flow of cooling gas is schematically shown by arrows of thin solid lines, and the flow of cooling gas is schematically shown by arrows of thick dotted lines. The case where the water separated from the sample gas falls.

與第1實施形態的水分分離裝置1同樣地,圖11所示的第7實施形態的水分分離裝置7係將從採樣系統107a導入的樣氣冷卻,分離樣氣中包含的水分,並將樣氣供給至分析計供給系統108。並且,與水分分離裝置1同樣地,水分分離裝置7具備第1配管27、第2配管28、第2配管29、出口室13、水分回收室14及樣氣引導部15而構成。但是,水分分離裝置7係在關於第1配管27、第2配管28及第2配管29的構成上與水分分離裝置1不同。Like the water separator 1 of the first embodiment, the water separator 7 of the seventh embodiment shown in FIG. 11 cools the sample gas introduced from the sampling system 107a, separates the moisture contained in the sample gas, and separates the sample gas. The gas is supplied to the analyzer supply system 108. Also, like the water separator 1 , the water separator 7 includes a first pipe 27 , a second pipe 28 , a second pipe 29 , an outlet chamber 13 , a water recovery chamber 14 , and a sample gas guide 15 . However, the water separator 7 is different from the water separator 1 in terms of the configuration of the first pipe 27 , the second pipe 28 , and the second pipe 29 .

圖12係表示水分分離裝置7之截面的圖,其係表示從圖11的B-B線箭頭位置觀察之截面的圖。再者,圖12中,作為水分分離裝置7的截面,僅圖示在圖11的B-B線箭頭位置出現的第1配管27、第2配管28及第2配管29的截面,而省略水分分離裝置7中的其他部分的圖示。如圖11及圖12所示,在水分分離裝置7中,第1配管27的一部分配置於第2配管29的內側,並且第2配管28的一部分配置於第1配管27的內側。FIG. 12 is a diagram showing a cross section of the water separator 7, which is a diagram showing a cross section viewed from the position of the arrow B-B in FIG. 11 . Furthermore, in FIG. 12, as a cross section of the moisture separator 7, only the first piping 27, the second piping 28, and the second piping 29 that appear at the arrow position of the B-B line in FIG. 11 are shown, and the moisture separator is omitted. Illustration of other parts in 7. As shown in FIGS. 11 and 12 , in the water separator 7 , a part of the first pipe 27 is arranged inside the second pipe 29 , and a part of the second pipe 28 is arranged inside the first pipe 27 .

第1配管27係構成為,被導入有包含水分的樣氣且樣氣向下方流動的配管。第1配管27係設置成,截面為圓形並呈直線狀地延伸的圓筒狀的配管,且其構成為在長度方向的一端部側呈段狀地縮徑。第1配管27係設置成導熱性優異的金屬製的配管,例如,設置成不鏽鋼製的配管。第1配管27係相對於後述的第2配管29而被支撐。另外,第1配管27係在其長度方向沿上下方向延伸的狀態下相對於第2配管29而被支撐,本實施形態中,設置成呈直線狀地上下延伸。The first pipe 27 is configured as a pipe into which a sample gas containing moisture is introduced and the sample gas flows downward. The first pipe 27 is provided as a cylindrical pipe that has a circular cross section and extends linearly, and is configured to be reduced in diameter in a stepwise manner on one end side in the longitudinal direction. The first pipe 27 is provided as a pipe made of metal having excellent thermal conductivity, for example, a pipe made of stainless steel. The first pipe 27 is supported with respect to the second pipe 29 described later. Moreover, the 1st piping 27 is supported with respect to the 2nd piping 29 in the state which extended the longitudinal direction in the up-down direction, and in this embodiment, it is provided so that it may extend linearly up and down.

第1配管27係具備大徑管部30與小徑管部31而構成。大徑管部30係設置成截面為圓形且呈直線狀地上下延伸的圓管狀。並且,在大徑管部30的上端側連接有樣氣導入管32。樣氣導入管32係設置成細長的圓管,且其係構成為,將自採樣系統107b供給的樣氣導入第1配管27。更具體而言,樣氣導入管32中,管長方向的一端部係連接至採樣系統107b的下游側的端部,管長方向的另一端部係在大徑管部30的上端側連接於大徑管部30。並且,樣氣導入管32的另一端部係貫通設置於大徑管部30的上端側並貫通大徑管部30的管壁的貫通孔。另外,樣氣導入管32的另一端部係在經由密封構件而在氣密狀態下與大徑管部30的上端側的貫通孔的緣部密合的狀態下插通於大徑管部30的上端側的貫通孔,而在大徑管部30的內部開口。由此,採樣系統107b與第1配管27的上端側的區域係經由樣氣導入管32而連通,樣氣被導入第1配管27的上端側的區域。再者,大徑管部30係配置於後述第2配管29的內側,樣氣導入管32係在貫通第2配管29的管壁的狀態下進而還貫通大徑管部30的管壁。The first piping 27 is configured by including a large-diameter pipe portion 30 and a small-diameter pipe portion 31 . The large-diameter pipe portion 30 is provided in a circular pipe shape that has a circular cross section and extends linearly up and down. Furthermore, a sample gas introduction pipe 32 is connected to the upper end side of the large-diameter pipe part 30 . The sample gas introduction pipe 32 is provided as an elongated circular pipe, and is configured to introduce the sample gas supplied from the sampling system 107 b into the first pipe 27 . More specifically, in the sample gas introduction pipe 32, one end in the pipe length direction is connected to the downstream end of the sampling system 107b, and the other end in the pipe length direction is connected to the large-diameter pipe part 30 on the upper end side. Tube 30. In addition, the other end portion of the sample gas introduction pipe 32 is a through-hole provided on the upper end side of the large-diameter pipe portion 30 and penetrating the pipe wall of the large-diameter pipe portion 30 . In addition, the other end portion of the sample gas introduction pipe 32 is inserted through the large-diameter pipe portion 30 in a state of being in close contact with the edge of the through-hole on the upper end side of the large-diameter pipe portion 30 in an airtight state via a sealing member. The through-hole on the upper end side of the large-diameter pipe portion 30 opens inside. As a result, the sampling system 107b communicates with the area on the upper end side of the first pipe 27 via the sample gas introduction pipe 32 , and the sample gas is introduced into the area on the upper end side of the first pipe 27 . Furthermore, the large-diameter pipe part 30 is arranged inside the second pipe 29 described later, and the sample gas introduction pipe 32 penetrates the pipe wall of the second pipe 29 and further penetrates the pipe wall of the large-diameter pipe part 30 .

另外,在大徑管部30的下端側設有貫通大徑管部30的管壁而插通後述第2配管28的貫通孔。第2配管28係插入第1配管27中,其下端側的部分係在大徑管部30的下端側的貫通孔中從大徑管部30的內側向外側貫通。另外,第2配管28的下端側的部分係在經由密封構件以氣密狀態與大徑管部30的下端側的貫通孔的緣部密合的狀態下插通於大徑管部30的下端側的貫通孔。In addition, a through-hole is provided on the lower end side of the large-diameter pipe portion 30 to pass through the pipe wall of the large-diameter pipe portion 30 and to insert a second pipe 28 which will be described later. The second pipe 28 is inserted into the first pipe 27 , and its lower end part passes through the through hole on the lower end side of the large diameter pipe part 30 from the inside to the outside of the large diameter pipe part 30 . In addition, the portion on the lower end side of the second pipe 28 is inserted through the lower end of the large-diameter pipe portion 30 in a state of being in close contact with the edge of the through-hole on the lower end side of the large-diameter pipe portion 30 in an airtight state via a sealing member. side through hole.

大徑管部30的上端部係藉由中心形成有貫通孔的圓板狀的上蓋構件33而被堵塞。上蓋構件33係在以氣密狀態密合的狀態下固定於大徑管部30的上端部。再者,上蓋構件33的直徑大於大徑管部30的直徑,上蓋構件33係以較大徑管部30更朝徑向突出的狀態設置。並且,在上蓋構件33還固定有後述第2配管29的上端部。另外,在上蓋構件33的貫通孔中插通有第2配管28。第2配管28係在經由密封構件以氣密狀態與上蓋構件33的貫通孔的緣部密合的狀態下插通於上蓋構件33的貫通孔。The upper end portion of the large-diameter tube portion 30 is closed by a disc-shaped upper cover member 33 having a through hole formed in the center. The upper cover member 33 is fixed to the upper end portion of the large-diameter pipe portion 30 in a state of airtight sealing. Furthermore, the diameter of the upper cover member 33 is larger than the diameter of the large-diameter tube portion 30 , and the upper cover member 33 is provided in a state where the larger-diameter tube portion 30 protrudes more radially. Furthermore, an upper end portion of a second pipe 29 to be described later is also fixed to the upper cover member 33 . In addition, the second pipe 28 is inserted through the through hole of the upper cover member 33 . The second pipe 28 is inserted through the through hole of the upper cover member 33 in a state of being in close contact with the edge of the through hole of the upper cover member 33 in an airtight state via a sealing member.

大徑管部30的下端部係藉由中心形成有貫通孔的圓板狀的下蓋構件34而被堵塞。下蓋構件34係在其上表面側在以氣密狀態與大徑管部30的下端部密合的狀態下被固定。再者,下蓋構件34的直徑係大於大徑管部30的直徑,下蓋構件34係以較大徑管部30更朝徑向突出的狀態設置。並且,在下蓋構件34,於其外周的邊緣部分的上表面側,還固定有後述第2配管29的下端部。再者,下蓋構件34係在其外周的邊緣部分的下表面側以氣密狀態密合固定於出口室13的出口室本體部18a的上端部。另外,在下蓋構件34的貫通孔固定有小徑管部31。The lower end portion of the large-diameter pipe portion 30 is closed by a disc-shaped lower cover member 34 having a through hole formed in the center. The lower cover member 34 is fixed in a state where the upper surface thereof is in close contact with the lower end portion of the large-diameter tube portion 30 in an airtight state. Furthermore, the diameter of the lower cover member 34 is larger than the diameter of the large-diameter tube portion 30 , and the lower cover member 34 is provided in a state where the larger-diameter tube portion 30 protrudes more radially. Further, a lower end portion of a second pipe 29 to be described later is also fixed to the upper surface side of the edge portion of the outer periphery of the lower cover member 34 . Furthermore, the lower cover member 34 is airtightly fixed to the upper end portion of the outlet chamber main body portion 18 a of the outlet chamber 13 on the lower surface side of the peripheral edge portion thereof. In addition, the small-diameter tube portion 31 is fixed to the through hole of the lower cover member 34 .

小徑管部31係在大徑管部30的下方與大徑管部30上下串聯排列地設置。另外,小徑管部31係相對於大徑管部30而在同一中心軸線上上下排列地設置。並且,小徑管部31係形成為直徑小於大徑管部30的圓管狀,並設置成,沿上下方向細長地延伸,並且從大徑管部30的下端在出口室13內向下方延伸。因此,第1配管27係構成為,大徑管部30與小徑管部31依序呈直線狀地上下排列,進而,在經由下蓋構件34從大徑管部30向小徑管部31連續的下端側,從大徑的大徑管部30向小徑的小徑管部31呈段狀地縮徑。The small-diameter pipe part 31 is arranged in series with the large-diameter pipe part 30 below the large-diameter pipe part 30 . In addition, the small-diameter pipe portion 31 is arranged vertically on the same central axis with respect to the large-diameter pipe portion 30 . The small-diameter tube portion 31 is formed in a circular tube shape with a diameter smaller than that of the large-diameter tube portion 30 , and is provided elongated in the vertical direction, and extends downward in the outlet chamber 13 from the lower end of the large-diameter tube portion 30 . Therefore, the first piping 27 is configured such that the large-diameter pipe portion 30 and the small-diameter pipe portion 31 are arranged linearly up and down in sequence, and further, the pipe is connected from the large-diameter pipe portion 30 to the small-diameter pipe portion 31 via the lower cover member 34 . The continuous lower end side is gradually reduced in diameter from the large-diameter large-diameter pipe portion 30 to the small-diameter small-diameter pipe portion 31 .

另外,小徑管部31的上端部係以氣密狀態嵌入並固定於設置在下蓋構件34的中心的貫通孔,並於大徑管部30開口。藉此,小徑管部31係在其上端部經由下蓋構件34而連接至大徑管部30並與大徑管部30連通。並且,小徑管部31係在其下端部在出口室13內開口而與出口室13連通。另外,小徑管部31的下端部為第1配管27的下端部,在第1配管27的下端部於出口室13開口的出口側開口27a係配置於較樣氣引導部15連通於出口室13的位置更下方處。In addition, the upper end portion of the small-diameter tube portion 31 is fitted and fixed in an airtight state to a through-hole provided at the center of the lower cover member 34 , and opens to the large-diameter tube portion 30 . Thereby, the small-diameter tube portion 31 is connected at its upper end to the large-diameter tube portion 30 via the lower cover member 34 and communicates with the large-diameter tube portion 30 . In addition, the small-diameter tube portion 31 opens into the outlet chamber 13 at its lower end to communicate with the outlet chamber 13 . In addition, the lower end portion of the small-diameter tube portion 31 is the lower end portion of the first pipe 27, and the outlet-side opening 27a opened to the outlet chamber 13 at the lower end portion of the first pipe 27 is arranged in the comparative sample gas guide portion 15 to communicate with the outlet chamber. The position of 13 is further below.

第2配管28係構成為下述配管:至少一部分配置於第1配管27的大徑管部30的內側,被導入溫度低於樣氣的冷卻氣體,並且冷卻氣體向下方流動。第2配管28設置成截面呈圓形且細長地延伸的圓管狀的配管。第2配管28係設置成導熱性優異的金屬製的圓管,例如,設置成不鏽鋼製的圓管。第2配管28由上蓋構件33、第1配管27及第2配管29支撐。另外,第2配管28具有上下配管部28a與水平配管部28b。The second pipe 28 is configured as a pipe that is at least partially disposed inside the large-diameter pipe portion 30 of the first pipe 27 , is introduced with cooling gas having a lower temperature than the sample gas, and flows downward. The second pipe 28 is provided as a circular pipe that has a circular cross section and extends elongatedly. The second piping 28 is provided as a round pipe made of metal having excellent thermal conductivity, for example, a round pipe made of stainless steel. The second piping 28 is supported by the upper cover member 33 , the first piping 27 and the second piping 29 . Moreover, the 2nd piping 28 has the upper-lower piping part 28a and the horizontal piping part 28b.

第2配管28的上下配管部28a係設置成在上下方向呈直線狀地延伸的部分,以插入第1配管27的大徑管部30的內側的狀態配置。上下配管部28a係相對於大徑管部30而呈中心軸線一致的同心狀地配置,而配置成與大徑管部30平行地上下延伸。上下配管部28a係在上端側以氣密狀態貫通設置於上蓋構件33的貫通孔,而被上蓋構件33支撐。另外,上下配管部28a的上端部係從上蓋構件33向上方突出而配置於大徑管部30的外側。並且,上下配管部28a的上端部係經由連接配管(省略圖示)而連接至空氣冷卻器109的端部109b。藉此,從空氣冷卻器109供給的冷卻氣體被導入第2配管28。The upper and lower piping portions 28 a of the second piping 28 are provided as portions extending linearly in the vertical direction, and are arranged to be inserted into the large-diameter pipe portion 30 of the first piping 27 . The upper and lower piping portions 28 a are concentrically arranged with respect to the large-diameter pipe portion 30 so that their central axes coincide, and are arranged to extend up and down parallel to the large-diameter pipe portion 30 . The upper and lower piping portions 28 a are supported by the upper cover member 33 by penetrating through a through hole provided in the upper cover member 33 in an airtight state on the upper end side. In addition, the upper end portion of the upper and lower piping portions 28 a protrudes upward from the upper cover member 33 and is arranged outside the large-diameter pipe portion 30 . And the upper end part of the upper and lower piping part 28a is connected to the end part 109b of the air cooler 109 via connection piping (illustration omitted). Thereby, the cooling gas supplied from the air cooler 109 is introduced into the second pipe 28 .

第2配管28的水平配管部28b係設置成,在上下配管部28a的下端側與上下配管部28a連續,並且在水平方向上呈直線狀地延伸的部分。水平配管部28b係經由彎曲成大致90°的彎曲部而連接於上下配管部28a,水平配管部28b的一端部係與上下配管部28a的下端部連通。並且,水平配管部28b係設置成,從與上下配管部28a的下端部連接的部分沿著水平方向延伸,並且從第1配管27的大徑管部30的內側向外側延伸,進而從第2配管29的內側向外側延伸。另外,水平配管部28b係以氣密狀態貫通設置於大徑管部30的管壁的貫通孔,而被大徑管部30支撐。進而,水平配管部28b還以氣密狀態貫通設置於配置在大徑管部30的外側的第2配管29的管壁的貫通孔,亦被第2配管29支撐。並且,水平配管部28b中之與上下配管部28a連接一側的相反側的端部係從大徑管部30向側方突出,並且進一步從第2配管29突出,而配置於大徑管部30及第2配管29的外側。另外,水平配管部28b係在配置於大徑管部30及第2配管29的外側的端部開口。The horizontal piping part 28b of the 2nd piping 28 is provided in the lower end side of the upper and lower piping part 28a continuously with the upper and lower piping part 28a, and is the part extended linearly in the horizontal direction. The horizontal piping portion 28b is connected to the upper and lower piping portion 28a via a bent portion bent at approximately 90°, and one end of the horizontal piping portion 28b communicates with the lower end of the upper and lower piping portion 28a. Moreover, the horizontal piping portion 28b is provided so as to extend in the horizontal direction from the portion connected to the lower end portion of the upper and lower piping portion 28a, and extend from the inside to the outside of the large-diameter pipe portion 30 of the first piping 27, and further extend from the second piping portion 27 to the outside. The inside of the pipe 29 extends outward. In addition, the horizontal piping portion 28 b is supported by the large-diameter pipe portion 30 through a through-hole provided in the pipe wall of the large-diameter pipe portion 30 in an airtight state. Furthermore, the horizontal pipe portion 28 b also passes through a through hole provided in the pipe wall of the second pipe 29 disposed outside the large-diameter pipe portion 30 in an airtight state, and is also supported by the second pipe 29 . In addition, the end portion of the horizontal piping portion 28b on the side opposite to the side connected to the upper and lower piping portions 28a protrudes laterally from the large-diameter pipe portion 30, and further protrudes from the second pipe 29, and is disposed on the large-diameter pipe portion. 30 and the outside of the second pipe 29. In addition, the horizontal piping portion 28 b is opened at an end portion arranged outside the large-diameter pipe portion 30 and the second piping 29 .

第2配管29內側配置有第1配管27的一部分的大徑管部30,其構成為,被導入有溫度低於樣氣的冷卻氣體且冷卻氣體向下方流動的配管。第2配管29係設置成截面為圓形並呈直線狀地延伸的圓筒狀的配管。第2配管29係設置成導熱性優異的金屬製的圓管,例如,設置成不鏽鋼製的圓管。第2配管29係例如相對於支撐框架16而被固定支撐。另外,第2配管29係在其長度方向沿上下方向延伸的狀態下相對於支撐框架16而被支撐,本實施形態中,其係設置成呈直線狀地上下延伸。Inside the second pipe 29 , a large-diameter pipe portion 30 , which is a part of the first pipe 27 , is arranged, and is configured as a pipe into which cooling gas having a lower temperature than the sample gas is introduced and the cooling gas flows downward. The second pipe 29 is a cylindrical pipe that has a circular cross section and extends linearly. The second piping 29 is provided as a round pipe made of metal having excellent thermal conductivity, for example, a round pipe made of stainless steel. The second pipe 29 is, for example, fixedly supported with respect to the support frame 16 . Moreover, the 2nd piping 29 is supported with respect to the support frame 16 in the state which extended the longitudinal direction in the up-down direction, and is provided so that it may extend linearly up and down in this embodiment.

第2配管29的上端部係藉由上蓋構件33而被堵塞,第2配管29的下端部係藉由下蓋構件34而被堵塞。上蓋構件33係在以氣密狀態與第2配管29的上端部密合的狀態下被固定,下蓋構件34係在以氣密狀態與第2配管29的下端部密合的狀態下被固定。再者,圓板狀的上蓋構件33係在其外周的邊緣部分的下表面側密合固定於第2配管29的上端部,於徑向內側的部分的下表面側密合固定於大徑管部30的上端部。另外,圓板狀的下蓋構件34係在其外周部分的上表面側密合固定於第2配管29的下端部,於徑向內側的部分的上表面側密合固定於大徑管部30的下端部。The upper end of the second pipe 29 is closed by the upper cover member 33 , and the lower end of the second pipe 29 is closed by the lower cover member 34 . The upper cover member 33 is fixed in a state of airtight contact with the upper end of the second pipe 29, and the lower cover member 34 is fixed in a state of airtight contact with the lower end of the second pipe 29. . Furthermore, the disc-shaped upper cover member 33 is closely fixed to the upper end of the second pipe 29 on the lower surface side of the edge portion of the outer periphery, and is closely fixed to the large-diameter pipe on the lower surface side of the radially inner portion. The upper end of part 30. In addition, the disc-shaped lower cover member 34 is closely fixed to the lower end of the second pipe 29 on the upper surface side of the outer peripheral portion, and is closely fixed to the large-diameter pipe portion 30 on the upper surface side of the radially inner portion. the lower end of.

另外,在第2配管29的上端側連接有冷卻氣體導入管35a。冷卻氣體導入管35a係設置成細長的圓管,且其係構成為將自空氣冷卻器109供給的冷卻氣體導入第2配管29。更具體而言,冷卻氣體導入管35a中,管長方向的一端部係經由連接配管(省略圖示)而連接至空氣冷卻器109的端部109b,管長方向的另一端部係在第2配管29的上端側連接於第2配管29。並且,冷卻氣體導入管35a的另一端部係貫通設置於第2配管29的上端側並貫通第2配管29的管壁的貫通孔。另外,冷卻氣體導入管35a的另一端部係在經由密封構件而以氣密狀態與第2配管29的上端側的貫通孔的緣部密合的狀態下插通於第2配管29的上端側的貫通孔,而在第2配管29的內部開口。藉此,空氣冷卻器109與第2配管29的上端側的區域係經由冷卻氣體導入管35a而連通,冷卻氣體被導入於第2配管29的上端側的區域。再者,冷卻氣體導入管35a的另一端部係在第2配管29內的第1配管27的大徑管部30的外側區域中開口。因此,被導入於第2配管29內的冷卻氣體係在第2配管29內側的區域且第1配管27的大徑管部30外側的區域,即在第2配管29的內周面與大徑管部30的外周面之間的區域中流動。In addition, a cooling gas introduction pipe 35 a is connected to the upper end side of the second pipe 29 . The cooling gas introduction pipe 35 a is provided as an elongated circular pipe, and is configured to introduce the cooling gas supplied from the air cooler 109 into the second pipe 29 . More specifically, in the cooling gas introduction pipe 35a, one end in the pipe length direction is connected to the end 109b of the air cooler 109 via a connection pipe (not shown), and the other end in the pipe length direction is connected to the second pipe 29. The upper end side of the tube is connected to the second pipe 29 . In addition, the other end portion of the cooling gas introduction pipe 35 a is a through hole provided on the upper end side of the second pipe 29 and penetrating the pipe wall of the second pipe 29 . In addition, the other end portion of the cooling gas introduction pipe 35a is inserted through the upper end side of the second pipe 29 in a state of airtight contact with the edge of the through hole on the upper end side of the second pipe 29 via a sealing member. The through-hole is opened inside the second piping 29 . Thereby, the air cooler 109 communicates with the region on the upper end side of the second pipe 29 via the cooling gas introduction pipe 35 a, and the cooling gas is introduced into the region on the upper end side of the second pipe 29 . In addition, the other end portion of the cooling gas introduction pipe 35 a is opened in the outer region of the large-diameter pipe portion 30 of the first pipe 27 in the second pipe 29 . Therefore, the cooling gas introduced into the second pipe 29 is in the area inside the second pipe 29 and outside the large-diameter pipe part 30 of the first pipe 27, that is, between the inner peripheral surface of the second pipe 29 and the large-diameter pipe. The flow flows in the region between the outer peripheral surfaces of the pipe portion 30 .

再者,冷卻氣體導入管35a的一端部及第2配管28的上下配管部28a的上端部係經由連接配管(省略圖示)而連接至空氣冷卻器109的端部109b。第7實施形態中,與空氣冷卻器109的端部109b連接的連接配管係在與空氣冷卻器109的端部109b連接一側的相反側的下游側分支成2個系統。並且,冷卻氣體導入管35a的一端部與上下配管部28a的上端部各者係連接至在與空氣冷卻器109連接的連接配管的下游側分支的2個系統各者的下游側的端部。藉此,自空氣冷卻器109供給的冷卻氣體被導入第2配管28及第2配管29兩者。Furthermore, one end of the cooling gas introduction pipe 35a and the upper end of the upper and lower piping portions 28a of the second piping 28 are connected to the end portion 109b of the air cooler 109 via connection piping (not shown). In the seventh embodiment, the connection piping connected to the end portion 109b of the air cooler 109 is branched into two systems on the downstream side opposite to the side connected to the end portion 109b of the air cooler 109 . In addition, one end of the cooling gas introduction pipe 35 a and the upper end of the upper and lower pipes 28 a are each connected to the downstream end of each of the two systems branched on the downstream side of the connecting pipe connected to the air cooler 109 . Thereby, the cooling gas supplied from the air cooler 109 is introduced into both the second piping 28 and the second piping 29 .

另外,在第2配管29的下端側連接有冷卻氣體排出管35b。冷卻氣體排出管35b係設置成細長的圓管,且其係構成為,將導入第2配管29並在第2配管29中流動的冷卻氣體從第2配管29排出。更具體而言,冷卻氣體排出管35b中,管長方向的一端部係在第2配管29的下端側與第2配管29連接,管長方向的另一端部側的部分係向第2配管29的外側突出。並且,冷卻氣體排出管35b的一端部係以氣密狀態貫通設置於第2配管29的下端側並貫通第2配管29的管壁的貫通孔,在第2配管29的內部開口。另一方面,從第2配管29向外部突出的冷卻氣體排出管35b的另一端部係向外部開口。藉此,第2配管29內的下端側的區域與第2配管29的外部係經由冷卻氣體排出管35b而連通,在第2配管29中流動的冷卻氣體係經由冷卻氣體排出管35b而被排出至外部。In addition, a cooling gas discharge pipe 35 b is connected to the lower end side of the second pipe 29 . The cooling gas discharge pipe 35b is provided as an elongated circular pipe, and is configured to discharge the cooling gas introduced into the second pipe 29 and flowing through the second pipe 29 from the second pipe 29 . More specifically, in the cooling gas discharge pipe 35 b , one end in the pipe length direction is connected to the second pipe 29 at the lower end side of the second pipe 29 , and the other end side in the pipe length direction is directed to the outside of the second pipe 29 . protrude. In addition, one end of the cooling gas discharge pipe 35b is airtightly provided on the lower end side of the second pipe 29 and penetrates through a through hole in the pipe wall of the second pipe 29 , and opens inside the second pipe 29 . On the other hand, the other end portion of the cooling gas discharge pipe 35b protruding to the outside from the second pipe 29 is opened to the outside. Thereby, the region on the lower end side in the second pipe 29 communicates with the outside of the second pipe 29 through the cooling gas discharge pipe 35b, and the cooling gas flowing in the second pipe 29 is discharged through the cooling gas discharge pipe 35b. to the outside.

在水分分離裝置7中,從採樣系統107b排出的樣氣係藉由樣氣導入管32而被導入第1配管27的大徑管部30內的上端側的區域。並且,被導入第2配管27的大徑管部30內的樣氣係在大徑管部30的內側且第2配管28的外側的區域中向下方流動。另一方面,從空氣冷卻器109排出的冷卻氣體係被導入第2配管28的上下配管部28a,並且經由冷卻氣體導入管35a而向第2配管29內的上端側的區域導入。並且,被導入至上下配管部28a的冷卻氣體係在配置於大徑管部30內側的上下配管部28a中向下方流動。另外,被導入至第2配管29的冷卻氣體係在內側配置有大徑管部30的第2配管29的內側的區域且大徑管部30外側的區域中向下方流動。因此,冷卻氣體係在上下配管部28a的內側向下方流動,樣氣係在上下配管部28a的外側且大徑管部30的內側向下方流動,冷卻氣體係在大徑管部30的外側且第2配管29的內側向下方流動。藉此,在第1配管27的大徑管部30中流動的樣氣係在大徑管部30的內側經由第2配管28的上下配管部28a的管壁全周而在與冷卻氣體之間進行熱交換,同時地,亦經由大徑管部30的管壁全周而在與冷卻氣體之間進行熱交換。因此,在第1配管27的大徑管部30的流動中,樣氣係從大徑管部30的內側及外側等兩側被冷卻,伴隨著因樣氣中的溫度降低所致之飽和水蒸氣量的減少,因應溫度所致之飽和水蒸氣量的差異而冷凝的水分係在第1配管27的大徑管部30內從樣氣中被分離。在大徑管部30內從樣氣中分離的水分係在大徑管部30的下方與其連通的小徑管部31中落下,從在出口室13內開口的小徑管部31的下端部的出口側開口27a滴落至出口室13內,通過出口室13而被水分回收室14回收。另外,在第2配管28的上下配管部28a中向下方流動,經由上下配管部28a的管壁而在與樣氣之間進行熱交換的冷卻氣體係向第2配管28的水平配管部28b流動,從水平配管部28b的端部向第2配管28的外部排出。並且,在第2配管29中向下方流動,經由大徑管部30的管壁而在與樣氣之間進行熱交換的冷卻氣體係經由冷卻氣體排出管35b而被排出至第2配管29的外部。另外,分離出水分的樣氣係從第1配管27流出到出口室13並向樣氣引導部15流動,從樣氣引導部15經由分析計供給系統108而被供給至分析計101。In the moisture separator 7 , the sample gas discharged from the sampling system 107 b is introduced into the region on the upper end side in the large-diameter pipe portion 30 of the first pipe 27 through the sample gas introduction pipe 32 . Then, the sample gas introduced into the large-diameter pipe part 30 of the second pipe 27 flows downward in a region inside the large-diameter pipe part 30 and outside the second pipe 28 . On the other hand, the cooling gas discharged from the air cooler 109 is introduced into the upper and lower piping portions 28a of the second piping 28, and is introduced into the upper end side region in the second piping 29 via the cooling gas introduction pipe 35a. Then, the cooling air introduced into the upper and lower piping portions 28 a flows downward in the upper and lower piping portions 28 a arranged inside the large-diameter pipe portion 30 . In addition, the cooling air introduced into the second pipe 29 flows downward in the area inside the second pipe 29 in which the large-diameter pipe portion 30 is disposed and in the area outside the large-diameter pipe portion 30 . Therefore, the cooling gas system flows downward inside the upper and lower piping parts 28a, the sample gas flows downward outside the upper and lower piping parts 28a and inside the large-diameter pipe part 30, and the cooling gas system flows outside the large-diameter pipe part 30 and The inner side of the second pipe 29 flows downward. Thereby, the sample gas flowing in the large-diameter pipe part 30 of the first pipe 27 passes through the entire circumference of the pipe wall of the upper and lower pipe parts 28a of the second pipe 28 inside the large-diameter pipe part 30 and between the cooling gas and the cooling gas. Heat exchange is performed, and at the same time, heat exchange is also performed with the cooling gas via the entire circumference of the tube wall of the large-diameter tube portion 30 . Therefore, in the flow of the large-diameter pipe part 30 of the first pipe 27, the sample gas is cooled from both sides, such as the inside and the outside of the large-diameter pipe part 30, accompanied by the saturation of water due to the temperature drop in the sample gas. As the amount of steam decreases, the moisture condensed due to the difference in the amount of saturated water vapor due to temperature is separated from the sample gas in the large-diameter pipe part 30 of the first pipe 27 . The water separated from the sample gas in the large-diameter tube part 30 falls in the small-diameter tube part 31 connected with it below the large-diameter tube part 30 , and flows from the lower end of the small-diameter tube part 31 opened in the outlet chamber 13 The outlet side opening 27a drops into the outlet chamber 13, passes through the outlet chamber 13, and is recovered by the water recovery chamber 14. In addition, the cooling gas that flows downward through the upper and lower piping portions 28a of the second piping 28 and exchanges heat with the sample gas through the pipe walls of the upper and lower piping portions 28a flows toward the horizontal piping portion 28b of the second piping 28. , is discharged to the outside of the second piping 28 from the end of the horizontal piping portion 28b. In addition, the cooling gas that flows downward in the second pipe 29 and exchanges heat with the sample gas through the pipe wall of the large-diameter pipe part 30 is discharged to the side of the second pipe 29 through the cooling gas discharge pipe 35b. external. In addition, the sample gas from which moisture has been separated flows out from the first pipe 27 to the outlet chamber 13 , flows toward the sample gas guide 15 , and is supplied from the sample gas guide 15 to the analyzer 101 via the analyzer supply system 108 .

根據上述水分分離裝置7,與第1實施形態的水分分離裝置1同樣地,在從樣氣分離水分時,無需採用液體冷媒的熱交換器,因此能夠抑制設備成本及設置空間的增大。並且,根據水分分離裝置7,樣氣係在第1配管27中向下方流動,冷卻氣體係在配置於第1配管27內側的第2配管28中向下方流動,並且冷卻氣體係於在內側配置有第1配管27的第2配管29中向下方流動,同時地,在冷卻氣體與樣氣之間進行熱交換,而樣氣被冷卻。因此,在第1配管27配置於第2配管29的內側,並且第2配管28配置於第1配管27的內側且在上下方向延伸的區域中,遍及上下方向的全長,樣氣及冷卻氣體係沿著上下方向流動,同時地,在樣氣與冷卻氣體之間有效地進行熱交換。藉此,能夠實現樣氣的冷卻效率的提高,而能夠實現水分的分離能力的提高。另外,根據水分分離裝置7,與第1實施形態的水分分離裝置1同樣地,能夠容易地回收從樣氣分離出的水分,並且能夠有效地引導分離出水分後的樣氣。According to the moisture separator 7 described above, similarly to the moisture separator 1 of the first embodiment, when separating moisture from the sample gas, a heat exchanger using a liquid refrigerant is not required, and thus an increase in equipment cost and installation space can be suppressed. In addition, according to the water separator 7, the sample gas flows downward in the first pipe 27, the cooling air flows downward in the second pipe 28 arranged inside the first pipe 27, and the cooling air flows inwardly. The second pipe 29 having the first pipe 27 flows downward, and at the same time, heat exchange is performed between the cooling gas and the sample gas, thereby cooling the sample gas. Therefore, in the area where the first pipe 27 is arranged inside the second pipe 29 and the second pipe 28 is arranged inside the first pipe 27 and extends in the vertical direction, the sample gas and cooling gas system are distributed over the entire length in the vertical direction. Flows in the up and down direction, simultaneously, effectively exchanging heat between the sample gas and the cooling gas. Thereby, the cooling efficiency of the sample gas can be improved, and the water separation ability can be improved. In addition, according to the moisture separator 7 , the moisture separated from the sample gas can be easily recovered and the moisture-separated sample gas can be efficiently guided, similarly to the moisture separator 1 of the first embodiment.

因此,根據第7實施形態,可提供水分分離裝置7,其能夠抑制設備成本及設置空間的增大,並且能夠提高對樣氣的冷卻效率而實現水分的分離能力的提高,進而能夠容易地回收水分且有效地引導樣氣。Therefore, according to the seventh embodiment, the water separator 7 can be provided, which can suppress the increase in equipment cost and installation space, and can improve the cooling efficiency of the sample gas to realize the improvement of the water separation ability, and can be easily recovered. moisture and guides the sample gas efficiently.

另外,在水分分離裝置7中,設有2個第2配管(28、29),一個第2配管28的一部分係配置於第1配管27的內側,另一個第2配管29係在內側配置有第1配管27的一部分。並且,在水分分離裝置7中,樣氣係在第1配管27中向下方流動,冷卻氣體係在配置於第1配管27內側的第2配管28中向下方流動,並且冷卻氣體係於在內側配置有第1配管27的第2配管29中向下方流動,同時地,在冷卻氣體與樣氣之間進行熱交換,而樣氣被冷卻。因此,在第1配管27中流動的樣氣係從第1配管27的內側及外側等兩側被冷卻。藉此,根據水分分離裝置7,在冷卻氣體與樣氣之間能夠更有效地進行熱交換,因此能夠進一步提高對樣氣的冷卻效率,而實現水分的分離能力的提高。In addition, in the water separator 7, two second pipes (28, 29) are provided, and a part of one second pipe 28 is arranged inside the first pipe 27, and the other second pipe 29 is arranged inside the first pipe 27. A part of the first piping 27 . In addition, in the water separator 7, the sample gas flows downward in the first pipe 27, the cooling air flows downward in the second pipe 28 arranged inside the first pipe 27, and the cooling air flows in the inner side. The second pipe 29 in which the first pipe 27 is arranged flows downward, and at the same time, heat exchange is performed between the cooling gas and the sample gas, thereby cooling the sample gas. Therefore, the sample gas flowing through the first pipe 27 is cooled from both sides such as the inside and the outside of the first pipe 27 . Thereby, according to the moisture separator 7 , heat exchange can be more effectively performed between the cooling gas and the sample gas, so the cooling efficiency of the sample gas can be further improved, and the moisture separation capability can be improved.

[變形例] 以上,對本發明的實施形態進行了說明,但是本發明不限於上述實施形態,其能夠在申請專利範圍所記載的範圍內進行各種變更而實施。例如,可以實施下述變形例。[modified example] As mentioned above, although embodiment of this invention was described, this invention is not limited to the said embodiment, It can change and implement variously within the range described in the claim. For example, the following modified examples can be implemented.

上述實施形態中,以應用於下述系統的形態為例而進行了說明,該系統係從在熱處理裝置產生的排放氣體採集的樣氣中分離水分,並供給至分析計,但上述實施形態的水分分離裝置不限於該例,可以廣泛地應用。例如,上述實施形態的水分分離裝置亦可應用於下述系統,該系統係從對被處理物進行熱處理以外的處理時產生的氣體中採集樣氣並分離水分,將分離出水分的樣氣供給至分析計等供給目的地。另外,上述實施形態的水分分離裝置亦可應用於下述系統,該系統係從在各種氣體產生源產生的氣體中採集樣氣並分離水分,將分離出水分的樣氣供給至分析計或分析計以外的各種供給目的地。In the above-mentioned embodiment, the application to the system for separating water from the sample gas collected from the exhaust gas generated in the heat treatment device and supplying it to the analyzer has been described as an example. However, the above-mentioned embodiment The moisture separator is not limited to this example, and can be widely used. For example, the moisture separator of the above-mentioned embodiment can also be applied to a system that collects a sample gas from the gas generated when the object to be processed is processed other than heat treatment, separates moisture, and supplies the sample gas from which moisture has been separated to To the supply destination such as analyzers. In addition, the moisture separator of the above-mentioned embodiment can also be applied to a system that collects sample gas from gas generated by various gas generation sources, separates moisture, and supplies the sample gas from which moisture is separated to an analyzer or analyzer. Various supply destinations other than the meter.

上述實施形態中,以下述形態為例進行了說明,其中,從藉由供給壓縮空氣而生成低溫空氣作為冷卻氣體的空氣冷卻器向水分分離裝置導入冷卻氣體,但也可以不為該形態。即,可實施下述形態:從空氣冷卻器以外的冷卻氣體供給源對水分分離裝置導入冷卻氣體。例如,也可實施下述形態:從下述冷卻氣體供給源對水分分離裝置導入冷卻氣體,該冷卻氣體供給源係具有貯存液態氮的貯氣瓶,其一邊將液態氮的一部分持續降壓一邊從貯氣瓶放出,藉此生成低溫的氮氣而作為冷卻氣體供給。In the above-mentioned embodiment, the form in which the cooling gas is introduced into the water separator from the air cooler that generates low-temperature air as the cooling gas by supplying compressed air is described as an example, but this mode may not be the case. That is, an aspect may be implemented in which the cooling gas is introduced into the water separator from a cooling gas supply source other than the air cooler. For example, it is also possible to implement a mode in which a cooling gas is introduced into the water separator from a cooling gas supply source having a gas cylinder storing liquid nitrogen and continuously reducing the pressure of a part of the liquid nitrogen. Released from the gas cylinder, thereby generating low-temperature nitrogen and supplying it as cooling gas.

上述第1至第4實施形態中,以出口室在第2配管的下端側與第2配管一體地結合而設置之形態為例進行了說明,但也可以不為該形態。例如,第1至第4實施形態中,也可實施下述形態的水分分離裝置:出口室在第2配管的下方與第2配管分離地設置,與外部區隔開,並且第1配管、樣氣引導部及水分回收室連通。In the above-mentioned first to fourth embodiments, the outlet chamber has been described as an example in which the outlet chamber is provided integrally with the second pipe on the lower end side of the second pipe, but this may not be the case. For example, in the first to fourth embodiments, it is also possible to implement the water separator of the following form: the outlet chamber is provided separately from the second pipe under the second pipe, and is separated from the outside area, and the first pipe, sample The air guiding part and the water recovery chamber are connected.

上述第3至第7實施形態中,以構成為冷卻氣體在第2配管中朝下方流動的水分分離裝置的形態為例進行了說明,但也可以不為該形態。在第3至第7實施形態中,也可實施構成為冷卻氣體在第2配管中朝上方流動的水分分離裝置的形態。 (產業上之可利用性)In the above-mentioned third to seventh embodiments, the configuration of the water separator in which the cooling gas flows downward through the second pipe has been described as an example, but this configuration may not be necessary. In the third to seventh embodiments, it is also possible to implement an aspect configured as a moisture separator in which the cooling gas flows upward through the second pipe. (industrial availability)

本發明係作為從包含水分的樣氣分離出水分的水分分離裝置而可廣泛地應用。The present invention can be widely used as a moisture separator for separating moisture from sample gas containing moisture.

1、2、3、3a、3b、4、5、6、7:水分分離裝置 11、21、22、27:第1配管 11a、22a、27a:出口側開口 12、23、28、29:第2配管 12a:管本體部 12b:上蓋部 12c:下蓋部 13:出口室 14:水分回收室 14a:排水口 14b:排水管 15:樣氣引導部(樣氣連通部) 16:支撐框架 17a:冷卻氣體導入管 17b:冷卻氣體排出管 18:出口室本體部 18a:側壁 18b:底部壁(底壁部) 19:連通管部 23a:上下配管部 23b:水平配管部 24:大徑管部 24a:大徑管本體部 24b:上蓋部 24c:下蓋部 25:小徑管部 26:樣氣導入管 28a:上下配管部 28b:水平配管部 30:大徑管部 31:小徑管部 32:樣氣導入管 33:上蓋構件 34:下蓋構件 35a:冷卻氣體導入管 35b:冷卻氣體排出管 100:熱處理裝置 101:分析計 102:熱處理室 102a:入口 102b:出口 103:加熱器 104:過熱水蒸氣生成裝置 105:排氣系統 106:燃燒裝置 107a:排出系統 107b:採樣系統 107c:連接器 108:分析計供給系統 109:空氣冷卻器 109a:(空氣冷卻器的)一端部 109b:(空氣冷卻器的)另一端部 110:壓縮空氣供給源 111:壓縮空氣供給系統 112:連接配管 Wa:水 X1~X3:點1, 2, 3, 3a, 3b, 4, 5, 6, 7: Moisture separation device 11, 21, 22, 27: 1st piping 11a, 22a, 27a: outlet side opening 12, 23, 28, 29: 2nd piping 12a: Tube body 12b: Upper cover 12c: Lower cover 13:Exit room 14: Moisture recovery room 14a: Outlet 14b: drain pipe 15: Sample gas guide part (sample gas connection part) 16: Support frame 17a: Cooling gas inlet pipe 17b: Cooling gas discharge pipe 18: Exit chamber body 18a: side wall 18b: bottom wall (bottom wall part) 19: connecting pipe 23a: Upper and lower piping parts 23b: Horizontal piping section 24: Large diameter pipe department 24a: Large diameter pipe body part 24b: upper cover 24c: Lower cover 25: Small diameter tube 26: Sample gas introduction tube 28a: Upper and lower piping parts 28b: Horizontal piping section 30: Large diameter pipe part 31: Small diameter tube 32: Sample gas introduction tube 33: Upper cover component 34: Bottom cover member 35a: Cooling gas inlet pipe 35b: Cooling gas discharge pipe 100: heat treatment device 101: Analyzer 102: Heat treatment chamber 102a: Entrance 102b: Export 103: heater 104: Superheated steam generating device 105:Exhaust system 106: Combustion device 107a: Exhaust system 107b: Sampling system 107c: connector 108: Analyzer supply system 109: Air cooler 109a: One end (of the air cooler) 109b: (of the air cooler) the other end 110: Compressed air supply source 111: Compressed air supply system 112: Connecting piping Wa: water X1~X3: point

圖1係示意地表示下述系統的圖,該系統中,從由熱處理裝置產生的氣體中採集樣氣,在水分分離裝置中從樣氣分離出水分,並將分離出水分後的樣氣朝分析計供給。 圖2係表示本發明之第1實施形態之水分分離裝置與對水分分離裝置供給冷卻氣體之空氣冷卻器的圖。 圖3係表示本發明之第1實施形態之水分分離裝置的圖。 圖4係表示飽和水蒸氣量與溫度之關係的圖,其係用於對從樣氣分離出的水分進行說明的圖。 圖5係表示本發明之第2實施形態之水分分離裝置的圖。 圖6係表示本發明之第3實施形態之水分分離裝置的圖。 圖7(A)係表示第3實施形態之水分分離裝置之截面的圖,且其係表示從圖6的A-A線箭頭位置觀察之截面的圖。圖7(B)係表示第3實施形態之變形例之水分分離裝置之截面的圖。圖7(C)係表示第3實施形態之另一變形例之水分分離裝置之截面的圖。 圖8係表示本發明之第4實施形態之水分分離裝置的圖。 圖9係表示本發明之第5實施形態之水分分離裝置的圖。 圖10係表示本發明之第6實施形態之水分分離裝置的圖。 圖11係表示本發明之第7實施形態之水分分離裝置的圖。 圖12係表示第7實施形態之水分分離裝置之截面的圖,其係表示從圖11地B-B線箭頭位置觀察之截面的圖。Fig. 1 is a diagram schematically showing a system in which a sample gas is collected from a gas generated by a heat treatment device, moisture is separated from the sample gas in a moisture separator, and the sample gas from which moisture has been separated is sent to Analyzer supply. Fig. 2 is a diagram showing a water separator and an air cooler for supplying cooling gas to the water separator according to the first embodiment of the present invention. Fig. 3 is a diagram showing a water separator according to a first embodiment of the present invention. Fig. 4 is a graph showing the relationship between the amount of saturated water vapor and the temperature, and is a graph for explaining the moisture separated from the sample gas. Fig. 5 is a diagram showing a water separator according to a second embodiment of the present invention. Fig. 6 is a diagram showing a water separator according to a third embodiment of the present invention. Fig. 7(A) is a diagram showing a cross section of a water separator according to a third embodiment, and it is a diagram showing a cross section viewed from the position indicated by the arrow on line A-A in Fig. 6 . Fig. 7(B) is a diagram showing a cross section of a water separator according to a modified example of the third embodiment. Fig. 7(C) is a diagram showing a cross-section of a water separator according to another modified example of the third embodiment. Fig. 8 is a diagram showing a water separator according to a fourth embodiment of the present invention. Fig. 9 is a diagram showing a water separator according to a fifth embodiment of the present invention. Fig. 10 is a diagram showing a water separator according to a sixth embodiment of the present invention. Fig. 11 is a diagram showing a water separator according to a seventh embodiment of the present invention. Fig. 12 is a diagram showing a cross section of a water separator according to a seventh embodiment, which is a diagram showing a cross section viewed from the position of the arrow B-B in Fig. 11 .

1:水分分離裝置 1: Moisture separation device

11:第1配管 11: 1st piping

11a:出口側開口 11a: Outlet side opening

12:第2配管 12: Second piping

12a:管本體部 12a: Tube body

12b:上蓋部 12b: Upper cover

12c:下蓋部 12c: Lower cover

13:出口室 13:Exit room

14:水分回收室 14: Moisture recovery room

14a:排水口 14a: Outlet

14b:排水管 14b: drain pipe

15:樣氣引導部(樣氣連通部) 15: Sample gas guide part (sample gas connection part)

16:支撐框架 16: Support frame

17a:冷卻氣體導入管 17a: Cooling gas inlet pipe

17b:冷卻氣體排出管 17b: Cooling gas discharge pipe

18:出口室本體部 18: Exit chamber body

18a:側壁 18a: side wall

18b:底部壁(底壁部) 18b: bottom wall (bottom wall part)

19:連通管部 19: connecting pipe

108:分析計供給系統 108: Analyzer supply system

Wa:水 Wa: water

Claims (6)

一種水分分離裝置,其係具備:第1配管,其被導入有包含水分的樣氣,且上述樣氣向下方流動;第2配管,其至少一部分配置於上述第1配管的內側或在其內側配置有上述第1配管的至少一部分,其被導入有溫度低於上述樣氣的冷卻氣體,且上述冷卻氣體向上方或下方流動;出口室,其中,上述第1配管的下端部開口,上述樣氣從上述第1配管導入,且從上述樣氣分離出的上述水分係從上述下端部滴落;水分回收室,其與上述出口室連通且配置於上述出口室的下方,回收從上述樣氣分離出的上述水分;及樣氣引導部,其與上述出口室連通,引導流出到上述出口室的上述樣氣;上述出口室具有:出口室本體部,其係構成為一被劃分出的室,於其內部,上述第1配管之下端部呈開口,且其供上述樣氣引導部連通;及連通管部,其從上述出口室本體部的下端向下方延伸,且於上述水分回收室開口而連通;上述水分回收室係構成為貯存水,上述連通管部的下端係構成為,在上述水分回收室中,在較貯存於上述水分回收室中之水的水面更下方處開口。 A moisture separator comprising: a first pipe into which a sample gas containing moisture is introduced, and the sample gas flows downward; and a second pipe at least partly arranged inside or inside the first pipe. At least a part of the above-mentioned first piping is arranged, which is introduced with a cooling gas having a temperature lower than that of the above-mentioned sample gas, and the above-mentioned cooling gas flows upward or downward; an outlet chamber, wherein the lower end of the above-mentioned first piping is opened, and the above-mentioned sample gas The gas is introduced from the above-mentioned first pipe, and the above-mentioned water separated from the above-mentioned sample gas drips from the above-mentioned lower end; the water recovery chamber communicates with the above-mentioned outlet chamber and is arranged below the above-mentioned outlet chamber to recover the separated moisture; and a sample gas guide part, which communicates with the outlet chamber and guides the sample gas flowing out into the outlet chamber; , in its interior, the lower end of the first piping is open, and it communicates with the sample gas guide; and a communication pipe portion, which extends downward from the lower end of the outlet chamber main body, and opens to the water recovery chamber The above-mentioned moisture recovery chamber is configured to store water, and the lower end of the above-mentioned communication pipe portion is configured to open in the above-mentioned moisture recovery chamber below the water surface of the water stored in the above-mentioned moisture recovery chamber. 如請求項1之水分分離裝置,其中,上述第1配管及上述第2配管分別設置為直線狀地上下延伸,上述冷卻氣體係沿著與上述第1配管中之上述樣氣的流動方向平行的 方向而在上述第2配管中流動。 The water separator according to claim 1, wherein the first piping and the second piping are arranged to extend up and down in a straight line, and the cooling gas system is along a direction parallel to the flow direction of the sample gas in the first piping. direction and flow in the above-mentioned second piping. 如請求項2之水分分離裝置,其中,上述第1配管係以插入上述第2配管的內側的狀態配置。 The water separator according to claim 2, wherein the first piping is arranged in a state of being inserted into the second piping. 如請求項2之水分分離裝置,其中,上述第1配管與上述第2配管係設置為呈中心軸線一致的同心狀地配置的雙重管。 The water separator according to claim 2, wherein the first piping and the second piping are double pipes arranged concentrically so that their central axes coincide. 如請求項2之水分分離裝置,其中,上述冷卻氣體係沿著相對於上述樣氣的流動方向而平行且相同的方向,在上述第2配管中向下方流動。 The water separator according to claim 2, wherein the cooling gas flows downward in the second pipe in a direction parallel to and identical to the flow direction of the sample gas. 如請求項1至5中任一項之水分分離裝置,其中,在上述第1配管的上述下端部中,於上述出口室開口的出口側開口係配置在較上述樣氣引導部連通於上述出口室的位置更為下方。 The water separator according to any one of Claims 1 to 5, wherein, in the lower end portion of the first piping, the outlet-side opening of the outlet chamber opening is arranged at a position that communicates with the outlet of the sample gas guide. The chamber is located further down.
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