[go: up one dir, main page]

TWI684707B - Energy-saving exhaust gas pumping system - Google Patents

Energy-saving exhaust gas pumping system Download PDF

Info

Publication number
TWI684707B
TWI684707B TW108106824A TW108106824A TWI684707B TW I684707 B TWI684707 B TW I684707B TW 108106824 A TW108106824 A TW 108106824A TW 108106824 A TW108106824 A TW 108106824A TW I684707 B TWI684707 B TW I684707B
Authority
TW
Taiwan
Prior art keywords
pump
exhaust
central
intake
chamber
Prior art date
Application number
TW108106824A
Other languages
Chinese (zh)
Other versions
TW202032008A (en
Inventor
林敬淵
Original Assignee
亞台富士精機股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 亞台富士精機股份有限公司 filed Critical 亞台富士精機股份有限公司
Priority to TW108106824A priority Critical patent/TWI684707B/en
Priority to CN201910243777.3A priority patent/CN111622973A/en
Application granted granted Critical
Publication of TWI684707B publication Critical patent/TWI684707B/en
Publication of TW202032008A publication Critical patent/TW202032008A/en

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/005—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by changing flow path between different stages or between a plurality of compressors; Load distribution between compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

An energy-saving pumping system capable of reducing operating energy by pumping out exhaust gas is disclosed. The pumping system includes a front-end pump comprising a front-end intake side, a front-end intake valve, a front-end exhaust side and a front-end pump rotor, along with a back-end pump comprising a back-end intake side, a back-end intake valve, a back-end exhaust side and a back-end pump rotor. The back-end pump rotor can selectively pump out gas in the front-end exhaust side and reduce the pressure difference between the front-end intake side and the front end exhaust side, thereby reducing the operating energy of the front-end pump. The back-end pump rotor can selectively pump out gas in the front-end exhaust side to reduce the pressure difference between the back-end intake side and the back-end exhaust side while also reducing the operating energy of the back-end pump.

Description

尾氣真空節能幫浦系統 Exhaust vacuum energy-saving pump system

本發明係關於一種幫浦系統，尤指一種可節省幫浦運轉時所耗能源的幫浦系統。 The invention relates to a pump system, in particular to a pump system which can save energy consumption when the pump is in operation.

一般來說，真空幫浦在運轉時所耗能量與幫浦進氣端與排氣端的氣壓差相關。當幫浦的進氣端(一般連通於製程腔體)與排氣端(一般連通於外界)的壓力差越大，該幫浦運轉時所耗的能量越大。在使用真空幫浦的製程中，由於腔體在製程的初始階段仍處於常壓或一特定氣壓值，該真空幫浦在製程的初始階段最為耗能。當製程穩定後，製程腔體的氣壓已因真空幫浦抽取氣體而降低，因此幫浦的進氣端氣壓較製程的初始階段較低，亦較幫浦的排氣端氣壓低。此時，若該幫浦的排氣端與吸氣端的氣壓差越大，幫浦在製程穩定時的運轉能量消耗則越大。因此，如何降低真空幫浦運轉的能耗為此發明所欲解決的課題。 Generally speaking, the energy consumed by the vacuum pump during operation is related to the air pressure difference between the intake and exhaust ends of the pump. The greater the pressure difference between the intake end of the pump (generally connected to the process chamber) and the exhaust end (generally connected to the outside world), the greater the energy consumed by the pump during operation. In the process of using a vacuum pump, since the cavity is still at normal pressure or a specific air pressure value at the initial stage of the process, the vacuum pump is the most energy consuming at the initial stage of the process. When the process is stable, the air pressure in the process chamber has been reduced by the vacuum pump. Therefore, the air pressure at the inlet end of the pump is lower than the initial stage of the process and lower than the air outlet end of the pump. At this time, if the air pressure difference between the exhaust end and the suction end of the pump is greater, the operating energy consumption of the pump when the process is stable is greater. Therefore, how to reduce the energy consumption of the vacuum pump operation is the subject to be solved by this invention.

本發明提供一種可節省幫浦運轉時所消耗能量的幫浦系統，以解決上述問題。 The present invention provides a pump system that can save energy consumed during pump operation to solve the above problems.

為了達成上述目的，本發明揭露一種幫浦系統，包含一前端幫浦以及一末端幫浦，其中該前端幫浦包含一前端進氣端、一前端排氣端、一前端腔體，其內形成一前端腔室，該前端腔室連通該前端進氣端與該前端排氣端；及 一前端幫浦轉子，設置於該前端腔室內。該末端幫浦包含一末端進氣端、一末端排氣端、一末端腔體，其內形成一末端腔室，該末端腔室連通該末端進氣端與該末端排氣端；及一末端幫浦轉子，設置於該末端腔室內。其中，該末端幫浦轉子選擇性地用以將該末端進氣端的氣體抽取至該末端排氣端或將該前端排氣端的氣體抽取至該末端排氣端，該前端幫浦轉子選擇性地用以將該前端進氣端的氣體抽取至該前端排氣端或將該末端排氣端的氣體抽取至該前端排氣端。 In order to achieve the above object, the present invention discloses a pump system including a front end pump and a end pump, wherein the front end pump includes a front end intake end, a front end exhaust end, and a front end cavity formed therein A front-end chamber, which connects the front-end inlet end and the front-end outlet end; and A front-end pump rotor is disposed in the front-end chamber. The end pump includes an end intake end, an end exhaust end, and an end cavity, in which an end cavity is formed, and the end cavity connects the end intake end and the end exhaust end; and an end The pump rotor is arranged in the end cavity. Wherein, the end pump rotor is selectively used to extract the gas at the end inlet end to the end exhaust end or the gas at the front end exhaust end to the end exhaust end, the front end pump rotor selectively It is used to extract the gas at the inlet end of the front end to the exhaust end at the front end or extract the gas at the exhaust end of the end to the exhaust end at the front end.

根據本發明其中之一實施方式，該幫浦系統另包含一中置幫浦組，該中置幫浦組包含至少一中置幫浦，該至少一中置幫浦包含一中置進氣端、一中置排氣端、一中置腔體，其內形成一中置腔室，該中置腔室連通該中置進氣端與該中置排氣端；及一中置幫浦轉子，設置於該中置腔室內，該中置幫浦轉子選擇性地用以將該中置進氣端的氣體抽取至該中置排氣端或該前端排氣端的氣體抽取至該中置排氣端。 According to one embodiment of the present invention, the pump system further includes a central pump group, the central pump group includes at least one central pump, and the at least one central pump includes a central intake port , A central exhaust end, a central cavity, which forms a central cavity, the central cavity connects the central intake end and the central exhaust end; and a central pump rotor , Located in the central chamber, the central pump rotor is used to selectively extract the gas from the central intake end to the central exhaust end or the front end exhaust end to the central exhaust end.

根據本發明其中之一實施方式，該中置幫浦另包含一中置進氣閥，設置於該中置腔體上，該中置進氣閥選擇性地將該中置腔室連通於該中置進氣端或該前端排氣端；一中置排氣閥，設置於該中置腔體上，該中置排氣閥選擇性地將該中置腔室連通於該末端進氣閥或一外界。 According to one embodiment of the present invention, the central pump further includes a central intake valve disposed on the central cavity, the central intake valve selectively connects the central chamber to the A mid-position intake end or the front-end exhaust end; a mid-position exhaust valve is provided on the mid-position cavity, the mid-position exhaust valve selectively connects the mid-position chamber to the end intake valve Or an outside world.

根據本發明其中之一實施方式，該前端幫浦另包含一前端進氣閥，設置於該前端腔體上，該前端進氣閥選擇性地將該前端腔室連通於該前端進氣端或該末端排氣端；一前端排氣閥，設置於該前端腔體上，該前端排氣閥選擇性地將該前端排氣端連通於該末端進氣端或該外界。 According to one embodiment of the present invention, the front-end pump further includes a front-end intake valve disposed on the front-end cavity, and the front-end intake valve selectively connects the front-end chamber to the front-end intake end or The front end exhaust end; a front end exhaust valve is disposed on the front end cavity, and the front end exhaust valve selectively connects the front end exhaust end to the end intake end or the outside world.

根據本發明其中之一實施方式，該末端幫浦另包含一末端進氣閥，設置於該末端腔體上，該末端進氣閥選擇性地將該末端腔室連通於該末端進氣端或該前端排氣端或該中置排氣端；一末端排氣閥，設置於該末端腔體上，該末端排氣閥選擇性地將該末端排氣端連通於該前端進氣閥或該外界。 According to one embodiment of the present invention, the end pump further includes an end intake valve disposed on the end cavity, the end intake valve selectively connects the end cavity to the end intake end or The front end exhaust end or the middle exhaust end; an end exhaust valve, which is disposed on the end cavity, and the end exhaust valve selectively connects the end exhaust end to the front end intake valve or the outside world.

綜上所述，本發明所述之幫浦系統包含一前端幫浦、一末端幫浦以及選擇性地包含一中置幫浦組，該中置幫浦組包含至少一中置幫浦。當末端進氣閥連通於該前端排氣端時，該末端幫浦可抽取該前端幫浦的前端排氣端的氣體，以降低該前端幫浦的該前端進氣端與該末端排氣端的氣壓差，達到降低該前端幫浦能耗的功效。同理，當該中置進氣閥連通於該前端排氣端時，該中置幫浦可抽取該前端幫浦的前端排氣端的氣體，以降低該前端幫浦的該前端進氣端與該前端排氣端的氣壓差，達到降低該前端幫浦能耗的功效。同理，當該前端進氣閥連通於該末端排氣端時，該前端幫浦可抽取該末端幫浦的末端排氣端的氣體，以降低該末端幫浦的該末端進氣端與該末端排氣端的氣壓差，達到降低該末端幫浦能耗的功效。有關本發明之前述及其他技術內容、特點與功效，在以下配合參考圖式之實施例的詳細說明中，將可清楚的呈現。 In summary, the pump system according to the present invention includes a front-end pump, an end pump, and optionally a central pump group. The central pump group includes at least one central pump. When the end intake valve communicates with the front end exhaust end, the end pump can extract the gas at the front end exhaust end of the front end pump to reduce the air pressure at the front end intake end and the end exhaust end of the front end pump Poor, to achieve the effect of reducing the energy consumption of the front-end pump. Similarly, when the center intake valve communicates with the front end exhaust end, the center pump can extract gas from the front end exhaust end of the front end pump to reduce the front end inlet end of the front end pump The air pressure difference at the exhaust end of the front end reduces the energy consumption of the front end pump. Similarly, when the front-end intake valve communicates with the end exhaust end, the front-end pump can extract gas from the end exhaust end of the end pump to reduce the end intake end and the end of the end pump The air pressure difference at the exhaust end achieves the effect of reducing the energy consumption of the pump at the end. The foregoing and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description with reference to the embodiments of the drawings.

A‧‧‧主製程腔體 A‧‧‧Main process chamber

B‧‧‧中置製程腔體 B‧‧‧ Center process cavity

C‧‧‧末端製程腔體 C‧‧‧End process cavity

D‧‧‧外界 D‧‧‧Outside

1‧‧‧幫浦系統 1‧‧‧ pump system

100‧‧‧前端幫浦 100‧‧‧Front end pump

101‧‧‧前端進氣端 101‧‧‧Front inlet

102‧‧‧前端排氣端 102‧‧‧Front end

103‧‧‧前端腔體 103‧‧‧Front cavity

104‧‧‧前端腔室 104‧‧‧ Front chamber

105‧‧‧前端幫浦轉子 105‧‧‧ Front-end pump rotor

106‧‧‧前端進氣閥 106‧‧‧Front inlet valve

107‧‧‧前端排氣閥 107‧‧‧ Front-end exhaust valve

200‧‧‧末端幫浦 200‧‧‧End Pump

201‧‧‧末端進氣端 201‧‧‧End intake end

202‧‧‧末端排氣端 202‧‧‧Exhaust end

203‧‧‧末端腔體 203‧‧‧End cavity

204‧‧‧末端腔室 204‧‧‧End chamber

205‧‧‧末端幫浦轉子 205‧‧‧End pump rotor

206‧‧‧末端進氣閥 206‧‧‧End intake valve

207‧‧‧末端排氣閥 207‧‧‧End exhaust valve

300‧‧‧中置幫浦組 300‧‧‧Central Pump Group

300a‧‧‧中置幫浦 300a‧‧‧Central Pump

301‧‧‧中置進氣端 301‧‧‧ mid intake port

302‧‧‧中置排氣端 302‧‧‧Central exhaust end

303‧‧‧中置腔體 303‧‧‧Central cavity

304‧‧‧中置腔室 304‧‧‧Central chamber

305‧‧‧中置幫浦轉子 305‧‧‧Central pump rotor

306‧‧‧中置進氣閥 306‧‧‧Central intake valve

307‧‧‧中置排氣閥 307‧‧‧Central exhaust valve

第1圖為本發明實施例幫浦系統於第一模式運作的示意圖。 FIG. 1 is a schematic diagram of the pump system operating in the first mode according to an embodiment of the present invention.

第2圖為本發明實施例幫浦系統於第二模式運作的示意圖。 FIG. 2 is a schematic diagram of the pump system operating in the second mode according to an embodiment of the present invention.

第3圖為本發明實施例幫浦系統於第三模式運作的示意圖。 FIG. 3 is a schematic diagram of the pump system operating in the third mode according to an embodiment of the present invention.

第4圖為本發明實施例幫浦系統於第一模式與第二模式運作時，各幫浦與腔體連接關係的示意圖。 FIG. 4 is a schematic diagram of the connection relationship between each pump and the cavity when the pump system operates in the first mode and the second mode according to an embodiment of the present invention.

第5圖為本發明實施例幫浦系統於第三模式運作時，各幫浦與腔體連接關係的示意圖。 FIG. 5 is a schematic diagram of the connection relationship between each pump and the cavity when the pump system operates in the third mode according to an embodiment of the present invention.

以下實施例中所提到的方向用語，例如：上、下、左、右、前或後等，僅是參考附加圖式的方向。因此，使用的方向用語是用來說明並非用來限制本發明。請參閱第1圖、第2圖與第4圖，第1圖為本發明第一實施例一幫浦系統1於第一模式運作的示意圖，第2圖為本發明第一實施例該幫浦系統1於第二模式運作的示意圖，第4圖為本發明實施例幫浦系統於第一模式與第二模式運作時，各幫浦與腔體連接關係的示意圖。 The direction words mentioned in the following embodiments, for example: up, down, left, right, front or back, etc., are only for the directions referring to the attached drawings. Therefore, the directional terminology is used to illustrate rather than limit the invention. Please refer to FIG. 1, FIG. 2 and FIG. 4, FIG. 1 is a schematic diagram of a pump system 1 operating in a first mode according to the first embodiment of the present invention, and FIG. 2 is a pump according to the first embodiment of the present invention. FIG. 4 is a schematic diagram of the operation of the system 1 in the second mode. FIG. 4 is a schematic diagram of the connection relationship between each pump and the cavity when the pump system operates in the first mode and the second mode according to an embodiment of the present invention.

請參考第1圖及第2圖。在本發明第一實施例中，該幫浦系統1包含一前端幫浦100以及一末端幫浦200。其中該前端幫浦100包含一前端進氣端101、一前端進氣閥106、一前端排氣端102、一前端排氣閥107、一前端腔體103以及一前端幫浦轉子105，該前端進氣端101連通於一主製程腔體A，該前端腔體103內形成有一前端腔室104，該前端幫浦轉子105設置於該前端腔體103的該前端腔室104內。該前端進氣閥106與該前端排氣閥107皆設置於該前端腔體103上，而該前端腔室104分別經由該前端進氣閥106與該前端排氣閥107連通該前端進氣端101與該前端排氣端102。該末端幫浦200包含一末端進氣端201、一末端進氣閥206、一末端排氣端202、一末端排氣閥207、一末端腔體203以及一末端幫浦轉子205。該末端進氣端201連通於一末端製程腔體C，該末端腔體203內形成有一末端腔室204，而該末端幫浦轉子205設置於該末端腔體203的該末端腔室204內。該末端進 氣閥206與該末端排氣閥207皆設置於該末端腔體203上，而該末端腔室204分別經由該末端進氣閥206與該末端排氣閥207連通該末端進氣端201與該末端排氣端202。 Please refer to Figure 1 and Figure 2. In the first embodiment of the invention, the pump system 1 includes a front end pump 100 and an end pump 200. The front end pump 100 includes a front end intake end 101, a front end intake valve 106, a front end exhaust end 102, a front end exhaust valve 107, a front end cavity 103, and a front end pump rotor 105, the front end The intake end 101 communicates with a main process chamber A. A front-end chamber 104 is formed in the front-end chamber 103. The front-end pump rotor 105 is disposed in the front-end chamber 104 of the front-end chamber 103. The front-end intake valve 106 and the front-end exhaust valve 107 are both disposed on the front-end cavity 103, and the front-end chamber 104 communicates with the front-end intake valve 106 through the front-end intake valve 106 and the front-end exhaust valve 107, respectively. 101 and the front end exhaust end 102. The end pump 200 includes an end intake end 201, an end intake valve 206, an end exhaust end 202, an end exhaust valve 207, an end cavity 203, and an end pump rotor 205. The end inlet end 201 communicates with an end process chamber C, an end chamber 204 is formed in the end chamber 203, and the end pump rotor 205 is disposed in the end chamber 204 of the end chamber 203. Into this end The gas valve 206 and the end exhaust valve 207 are both disposed on the end cavity 203, and the end chamber 204 communicates with the end intake end 201 and the end through the end intake valve 206 and the end exhaust valve 207, respectively. The end exhaust end 202.

在本發明的第一實施例中，該前端進氣閥106將該前端腔室104連通於該前端進氣端101，而該前端排氣閥107選擇性地將該前端排氣端102連通於該末端進氣閥206或一外界D。該末端進氣閥206選擇性地將該末端腔室204連通於該末端進氣端201或該前端排氣端102，而該末端排氣閥207將該末端排氣端202連通於該外界D。 In the first embodiment of the present invention, the front-end intake valve 106 communicates the front-end chamber 104 to the front-end intake end 101, and the front-end exhaust valve 107 selectively communicates the front-end exhaust port 102 to The end intake valve 206 or an outside environment D. The end intake valve 206 selectively connects the end chamber 204 to the end intake end 201 or the front end exhaust end 102, and the end exhaust valve 207 connects the end exhaust end 202 to the outside world D .

其中，各幫浦的進氣閥與排氣閥可為一三向電子控制閥或一三向機械閥，端視實際需求而定。各幫浦設有一運轉電流偵測器，各幫浦的進氣端與排氣端亦設有一氣壓感測器。該進氣端的電子控制閥係由該氣壓感測器所測得之管路氣壓或該運轉電流偵測器所測得之電流值判斷該電子控制閥應將各幫浦腔室連通於該幫浦的進氣端或上游幫浦的排氣端。該排氣端的電子控制閥係由該排氣端下游管路的製程腔體是否有製程來判斷該電子控制閥應將各幫浦腔室連通於下游幫浦的進氣端或外界D，以將製程氣體排出。各幫浦之排氣閥前亦可配置一逆止閥以防止所抽取之氣體回流至各幫浦腔室內。本文所稱「製程」，係指需要使用真空幫浦執行的製程，其中包括可能產生反應氣體的化學反應(如加熱反應、物體燃燒)、物理反應(如相變化)，或需使用反應氣體的製程(如薄膜氣相沉積)，但實施上不在此限。各幫浦的幫浦轉子係用以將各幫浦的進氣端的氣體吸入，並透過各幫浦的腔室傳至各幫浦的排氣端。此外，各幫浦轉子可經由各幫浦的進氣閥選擇性地將該幫浦的進氣端的氣體抽取至該幫浦的排氣端或將該幫浦上游排氣端的氣體抽取至該幫浦的排氣端。各幫浦進氣閥、排氣閥以及 各閥件與各幫浦其餘部件的連通關係將於下詳述。 Among them, the intake valve and exhaust valve of each pump can be a three-way electronic control valve or a three-way mechanical valve, depending on the actual needs. Each pump is provided with a running current detector, and each pump is also provided with an air pressure sensor at the intake end and the exhaust end. The electronic control valve at the intake end is determined by the pipeline air pressure measured by the air pressure sensor or the current value measured by the running current detector. The electronic control valve should connect each pump chamber to the pump The intake end of the pump or the exhaust end of the upstream pump. The electronic control valve at the exhaust end is judged by the process chamber of the downstream pipeline of the exhaust end to determine whether the electronic control valve should connect each pump chamber to the intake end or the outside D of the downstream pump to Exhaust process gas. A check valve can also be arranged in front of the exhaust valve of each pump to prevent the extracted gas from flowing back into each pump chamber. The term "process" as used herein refers to a process that needs to be performed using a vacuum pump, which includes chemical reactions (such as heating reactions, object burning), physical reactions (such as phase changes) that may generate reactive gases, or those that require the use of reactive gases Process (such as thin film vapor deposition), but the implementation is not limited to this. The pump rotor of each pump is used to suck the gas at the intake end of each pump and pass it through the chamber of each pump to the exhaust end of each pump. In addition, each pump rotor can selectively extract the gas at the intake end of the pump to the exhaust end of the pump or the gas at the exhaust end upstream of the pump to the pump through the intake valve of each pump The exhaust end of the pump. Each pump intake valve, exhaust valve and The communication relationship between each valve and the remaining parts of each pump will be described in detail below.

請參閱第1圖與第4圖。本發明之第一實施例之幫浦系統1的第一模式中，主製程腔體A有製程進行並有氣體產生，且第一模式使用兩個幫浦，即該前端幫浦100與該末端幫浦200。其中第4圖所示「連通」代表該欄的連接部位連通於右方欄位的元件或部位。舉例來說，於第一模式中，該前端進氣端101連通於該前端進氣閥106，且該前端進氣閥106連通於該前端腔室104，以此類推。而該前端排氣閥107連通於該外界D，以將該主製程腔體A的氣體排出。 Please refer to Figure 1 and Figure 4. In the first mode of the pump system 1 according to the first embodiment of the present invention, the main process chamber A has a process and gas is generated, and the first mode uses two pumps, namely the front end pump 100 and the end Pump 200. Among them, "connected" shown in Figure 4 represents that the connection part of this column communicates with the element or part of the column on the right. For example, in the first mode, the front-end intake port 101 communicates with the front-end intake valve 106, and the front-end intake valve 106 communicates with the front-end chamber 104, and so on. The front-end exhaust valve 107 communicates with the outside environment D to exhaust the gas from the main process chamber A.

當該末端製程腔體C有製程進行時，該末端進氣閥206關閉該前端排氣閥107連通於該末端進氣閥206的管路(如第1圖虛線箭頭所示)，並連通該末端進氣端201與該末端腔室204。另外，該前端進氣閥106連通該前端進氣端101與該前端腔室104。同時，該末端排氣閥207將該末端腔室204與該末端排氣端202連通於該外界D，以及該前端排氣閥107將該前端腔室104與該前端排氣端102連通於該外界D，此時本發明的該幫浦系統1處於第一模式操作。於此，該前端幫浦轉子105及該末端幫浦轉子205可分別對該主製程腔體A及該末端製程腔體C進行真空作業。如此一來，該主製程腔體A所產生的氣體透過連通於該主製程腔體A的該前端進氣端101流至該前端進氣閥106與該前端腔室104，再流至該前端排氣端102。由於該前端排氣閥107將該前端排氣端102連通於該外界D，該主製程腔體A所產生的氣體將由該前端排氣端102排至該外界D，且該主製程腔體A所產生的氣體並不會排至該末端幫浦200的該末端進氣端201或該末端腔室204。而該末端製程腔體C的製程氣體則由該末端進氣端201透過該末端進氣閥206流至該末端腔室204與該末端排氣端202，再透過連通於該外界D的該末端排氣閥207排出。於此模式中，該前端幫浦100與該末端幫浦200皆獨立運轉。 When a process is performed in the end process chamber C, the end intake valve 206 closes the front end exhaust valve 107 to the pipeline of the end intake valve 206 (as indicated by the dotted arrow in FIG. 1), and communicates with the The terminal inlet end 201 and the terminal chamber 204. In addition, the front end intake valve 106 communicates the front end intake end 101 and the front end chamber 104. At the same time, the end exhaust valve 207 communicates the end chamber 204 and the end exhaust end 202 to the outside world D, and the front end exhaust valve 107 connects the front end chamber 104 and the front end exhaust end 102 to the Outside D, the pump system 1 of the present invention is operating in the first mode. Here, the front end pump rotor 105 and the end pump rotor 205 can perform vacuum operations on the main process chamber A and the end process chamber C, respectively. In this way, the gas generated by the main process chamber A flows through the front end intake end 101 connected to the main process chamber A to the front end intake valve 106 and the front end chamber 104, and then to the front end Exhaust end 102. Since the front-end exhaust valve 107 connects the front-end exhaust port 102 to the outside world D, the gas generated by the main process chamber A will be discharged from the front-end exhaust port 102 to the outside world D, and the main process chamber A The generated gas will not be discharged to the end inlet end 201 or the end chamber 204 of the end pump 200. The process gas of the end process chamber C flows from the end inlet end 201 through the end inlet valve 206 to the end chamber 204 and the end exhaust end 202, and then passes through the end connected to the outside world D The exhaust valve 207 is discharged. In this mode, the front end pump 100 and the end end pump 200 operate independently.

請參閱第2圖與第4圖。本發明之第一實施例之幫浦系統1的第二模式與第一模式的差別在於第二模式中，該末端製程腔體C無製程進行，且該前端排氣閥107關閉該前端排氣閥107連通於該外界D的管路(如第2圖上側虛線箭頭所示)，並連通該末端進氣閥206。此時該末端進氣閥206關閉連通於該末端進氣端201的管路(如第2圖下側虛線箭頭所示)並將該前端排氣閥107連通於該末端腔室204，以及該末端排氣閥207將末端腔室204與該末端排氣端202連通於該外界D。此時本發明的該幫浦系統1處於第二模式操作。於此，該前端幫浦轉子105可對該主製程腔體A進行真空作業，而該末端幫浦轉子205可對該前端排氣閥107連通於該末端進氣閥206的管路進行真空作業。如此一來，該主製程腔體A所產生的氣體透過連通於該主製程腔體A的該前端進氣端101流至該前端進氣閥106與該前端腔室104，再流至該前端排氣端102。由於該前端排氣閥107將該前端排氣端102連通於該末端進氣閥206，該主製程腔體A所產生的氣體將經由該前端排氣端102流至該末端進氣閥206與該末端腔室204以及該末端排氣端202。於此模式操作時，該末端排氣閥207連通於該外界D，以將該主製程腔體A所產生的氣體由該末端排氣端202排至該外界D，且該主製程腔體A所產生的氣體並不會排至該末端幫浦200的該末端進氣端201。該前端幫浦100經由該前端排氣閥107與該末端進氣閥206連通於該末端幫浦200，且該前端幫浦100與該末端幫浦200同時運轉。 Please refer to Figure 2 and Figure 4. The difference between the second mode and the first mode of the pump system 1 of the first embodiment of the present invention is that in the second mode, the end process chamber C is performed without a process, and the front end exhaust valve 107 closes the front end exhaust The valve 107 communicates with the pipeline of the outside world D (as indicated by the dotted arrow on the upper side of FIG. 2) and communicates with the terminal intake valve 206. At this time, the terminal intake valve 206 closes the pipeline connected to the terminal intake end 201 (as shown by the dotted arrow on the lower side of FIG. 2) and connects the front end exhaust valve 107 to the terminal chamber 204, and the The end exhaust valve 207 connects the end chamber 204 and the end exhaust end 202 to the outside environment D. At this time, the pump system 1 of the present invention is operating in the second mode. Here, the front end pump rotor 105 can perform vacuum operation on the main process chamber A, and the end pump rotor 205 can perform vacuum operation on the pipeline where the front end exhaust valve 107 communicates with the end intake valve 206 . In this way, the gas generated by the main process chamber A flows through the front end intake end 101 connected to the main process chamber A to the front end intake valve 106 and the front end chamber 104, and then to the front end Exhaust end 102. Since the front-end exhaust valve 107 communicates the front-end exhaust port 102 with the end intake valve 206, the gas generated by the main process chamber A will flow through the front-end exhaust port 102 to the end intake valve 206 and The end chamber 204 and the end exhaust end 202. When operating in this mode, the end exhaust valve 207 communicates with the outside environment D to exhaust the gas generated by the main process chamber A from the end exhaust end 202 to the outside environment D, and the main process chamber A The generated gas will not be discharged to the end inlet end 201 of the end pump 200. The front end pump 100 communicates with the end pump 200 via the front end exhaust valve 107 and the end intake valve 206, and the front end pump 100 and the end pump 200 operate simultaneously.

請參閱第3圖與第5圖。第3圖為本發明第二實施例的該幫浦系統1於第三模式運作的示意圖。第5圖為本發明實施例幫浦系統於第三模式運作時，各幫浦與腔體連接關係的示意圖。 Please refer to Figure 3 and Figure 5. FIG. 3 is a schematic diagram of the pump system 1 operating in the third mode according to the second embodiment of the present invention. FIG. 5 is a schematic diagram of the connection relationship between each pump and the cavity when the pump system operates in the third mode according to an embodiment of the present invention.

如第3圖所示，在第二實施例中，該幫浦系統1除了該前端幫浦100與 該末端幫浦200外，另可選擇性地包含一中置幫浦組300，該中置幫浦組300包含至少一中置幫浦300a。其中，該中置幫浦300a包含一中置進氣端301、一中置進氣閥306、一中置排氣端302、一中置排氣閥307、一中置腔體303以及一中置幫浦轉子305。該中置進氣端301連通於一中置製程腔體C，該中置腔體303內形成有一中置腔室304，而該中置幫浦轉子305設置於該中置腔體303的該中置腔室304內。該中置進氣閥306與該中置排氣閥307皆設置於該中置腔體303上，而該中置腔室304分別經由該中置進氣閥306與該中置排氣閥307連通該中置進氣端301與該中置排氣端302。該中置進氣閥306選擇性地將該中置腔室304連通於該中置進氣端301或該前端排氣端102，該中置排氣閥307選擇性地將該中置排氣端302連通於該末端進氣閥206或該外界D。 As shown in FIG. 3, in the second embodiment, the pump system 1 except the front-end pump 100 and In addition to the end pump 200, a central pump group 300 may be optionally included, and the central pump group 300 includes at least one central pump 300a. The central pump 300a includes a central intake end 301, a central intake valve 306, a central exhaust end 302, a central exhaust valve 307, a central cavity 303 and a central Set the pump rotor 305. The central intake end 301 communicates with a central process chamber C, a central chamber 304 is formed in the central chamber 303, and the central pump rotor 305 is disposed in the central chamber 303 In the middle chamber 304. The central intake valve 306 and the central exhaust valve 307 are both disposed on the central cavity 303, and the central chamber 304 passes through the central intake valve 306 and the central exhaust valve 307, respectively The middle intake end 301 and the middle exhaust end 302 are connected. The center intake valve 306 selectively connects the center chamber 304 to the center intake end 301 or the front end exhaust end 102, and the center exhaust valve 307 selectively exhausts the center The end 302 communicates with the end intake valve 206 or the outside D.

如第3圖與第5圖所示，本發明的第二實施例以三個幫浦為例，然而實施上幫浦數量不在此限，可視需求增加中置幫浦300a的數量。其中第5圖所示「連通」代表該欄的連接部位連通於右方欄位的元件或部位，且中置幫浦300a連接至下一列的末端幫浦200。舉例來說，該前端進氣端101連通於該前端進氣閥106，且該前端進氣閥106連通於該前端腔室104。該前端排氣閥107連通於該中置進氣閥306而非連通於該外界D。該中置排氣閥307連通於該末端進氣閥206而非連通於該外界D。該末端排氣閥207則連通於該前端進氣閥106，以使得該幫浦系統1之管路達成一封閉循環。 As shown in FIG. 3 and FIG. 5, the second embodiment of the present invention uses three pumps as an example. However, the number of pumps is not limited to this. The number of central pumps 300a can be increased according to requirements. The “connected” shown in FIG. 5 indicates that the connection part of the column is connected to the element or part in the right column, and the central pump 300a is connected to the end pump 200 of the next row. For example, the front-end intake end 101 communicates with the front-end intake valve 106, and the front-end intake valve 106 communicates with the front-end chamber 104. The front-end exhaust valve 107 communicates with the central intake valve 306 instead of the outside D. The center exhaust valve 307 communicates with the terminal intake valve 206 instead of the outside D. The end exhaust valve 207 is connected to the front end intake valve 106, so that the pipeline of the pump system 1 achieves a closed cycle.

於第二實施例中，若該中置製程腔體B或該末端製程腔體C有製程進行，則該前端幫浦100、該中置幫浦組300與該末端幫浦200處於第一模式操作，為求簡潔，於此不再贅述。當該中置製程腔體B與該末端腔體C皆無製程進行時，該前端排氣閥107、該中置排氣閥307與該末端排氣閥207皆關閉該閥件連通於該 外界D的管路(如第3圖虛線箭頭所示)，並分別連通下游的進氣閥，即該前端排氣閥107連通該中置進氣閥306，而該中置排氣閥307連通該末端進氣閥206。此時該中置進氣閥306與該末端進氣閥206分別關閉連通於該中置進氣端301與該末端進氣端201的管路(如第3圖中間與下側虛線箭頭所示)並分別將上游的該前端排氣閥107連通於該中置腔室304與該中置排氣閥307連通於該末端腔室204。此時本發明的該幫浦系統1處於第三模式操作。於此，該中置幫浦轉子305及該末端幫浦轉子205可分別對該前端排氣閥107連通於該中置進氣閥306的管路與該中置排氣閥307連通於該末端進氣閥206的管路進行真空作業。如此一來，該主製程腔體A所產生的氣體透過連通於該主製程腔體A的該前端進氣端101流至該前端進氣閥106與該前端腔室104，再流至該前端排氣端102。由於該前端排氣閥107將該前端排氣端102連通於該中置進氣閥306，使得主製程腔體A所產生的氣體經由該前端排氣端102流至該中置進氣閥306與該中置腔室304，再流至該中置排氣端302。由於該中置排氣閥307將該中置排氣端302連通於該末端進氣閥206，使得主製程腔體A所產生的氣體經由該中置排氣端302與該末端進氣閥206流至該末端腔室204與該末端排氣端202。該第三模式與該第一、第二模式不同之處在於該末端排氣閥207可選擇性地連通該外界D(如第3圖的下側虛線箭頭所示)，使得主製程腔體A所產生的氣體經由該外界D排出，或該末端排氣閥207可連通該前端進氣閥106，使得主製程腔體A所產生的氣體再經由前端腔室104循環於幫浦系統1的管路中。第3圖的第三模式即以該末端排氣閥207連通該前端進氣閥106為例。於此模式操作時，該主製程腔體A所產生的氣體由該末端排氣端202排至該前端進氣閥106，且該主製程腔體A所產生的氣體並不會排至該外界D。該前端幫浦100、該中置幫浦組300以及該末端幫浦200分別經由該前端排氣閥107、該中置進氣閥306、該中置排氣閥307、該末端進氣閥206以及該末端排氣閥207相連動，使得該前端幫浦100、該中置幫浦組300與該末端幫浦200同時運轉。 In the second embodiment, if a process is performed in the middle process chamber B or the end process chamber C, the front end pump 100, the middle pump group 300, and the end pump 200 are in the first mode Operation, for simplicity, will not repeat them here. When neither the middle process chamber B nor the end chamber C has a process, the front end exhaust valve 107, the middle exhaust valve 307, and the end exhaust valve 207 are closed. The valve is connected to the The pipeline of the outside world D (as shown by the dotted arrow in Figure 3), and respectively communicate with the downstream intake valve, that is, the front-end exhaust valve 107 communicates with the central intake valve 306, and the central exhaust valve 307 communicates The end intake valve 206. At this time, the central intake valve 306 and the terminal intake valve 206 respectively close the pipelines connecting the central intake end 301 and the terminal intake end 201 (as shown by the dotted arrows in the middle and lower side of FIG. 3) ) And connect the upstream front exhaust valve 107 to the middle chamber 304 and the middle exhaust valve 307 to the end chamber 204, respectively. At this time, the pump system 1 of the present invention is operating in the third mode. Here, the central pump rotor 305 and the end pump rotor 205 can respectively connect the pipeline of the front exhaust valve 107 to the central intake valve 306 and the central exhaust valve 307 to the end The line of the intake valve 206 performs vacuum operation. In this way, the gas generated by the main process chamber A flows through the front end intake end 101 connected to the main process chamber A to the front end intake valve 106 and the front end chamber 104, and then to the front end Exhaust end 102. Since the front-end exhaust valve 107 communicates the front-end exhaust port 102 with the central intake valve 306, the gas generated in the main process chamber A flows to the central intake valve 306 via the front-end exhaust port 102 And the central chamber 304, and then flow to the central exhaust end 302. Since the center exhaust valve 307 communicates the center exhaust end 302 with the end intake valve 206, the gas generated in the main process chamber A passes through the center exhaust end 302 and the end intake valve 206 Flow to the end chamber 204 and the end exhaust end 202. The third mode is different from the first and second modes in that the end exhaust valve 207 can selectively communicate with the outside world D (as indicated by the dashed arrow on the lower side of FIG. 3), so that the main process chamber A The generated gas is discharged through the outside D, or the end exhaust valve 207 can communicate with the front-end intake valve 106, so that the gas generated in the main process chamber A is circulated to the pipe of the pump system 1 through the front-end chamber 104 In the road. The third mode in FIG. 3 is an example in which the end exhaust valve 207 communicates with the front end intake valve 106. When operating in this mode, the gas generated by the main process chamber A is discharged from the end exhaust end 202 to the front end intake valve 106, and the gas generated by the main process chamber A is not discharged to the outside world D. The front end pump 100, the center set 300 and the end pump 200 respectively pass through the front end exhaust valve 107, the center intake valve 306, the center exhaust valve 307, and the end intake valve 206 And the end exhaust valve 207 is connected, so that the front end pump 100, the central pump group 300 and the end pump 200 operate simultaneously.

綜上所述，當本發明的幫浦系統1於第一模式運作時，該前端排氣端102與該末端排氣端202皆連通於該外界D，使得該前端幫浦100與該末端幫浦200皆獨立運轉，且該主製程腔體A與該末端製程腔體C產生的氣體皆排至該外界D。當本發明的幫浦系統1於第二模式運作時，該前端排氣端102連通於該末端進氣閥206，且該前端幫浦100與該末端幫浦200同時運轉，使得該前端幫浦100藉由該前端幫浦轉子105抽取該主製程腔體A產生的氣體至該前端排氣端102，且該末端幫浦200藉由該末端幫浦轉子205抽取該前端排氣端102的氣體，以降低該前端幫浦100的該前端進氣端101與該前端排氣端102的氣壓差，達到降低該前端幫浦100能耗的功效。同理，當本發明的幫浦系統1於第三模式運作時，該前端排氣端102與中置排氣端302分別連通於該中置進氣閥306與該末端進氣閥206，且該前端幫浦100、該中置幫浦組300與該末端幫浦200同時運轉，使得該前端幫浦100藉由該前端幫浦轉子105抽取該主製程腔體A產生的氣體至該前端排氣端102，該中置幫浦組300與該末端幫浦200可分別藉由該中置幫浦轉子305與該末端幫浦轉子205抽取該前端排氣端102與該中置排氣端302的氣體，以降低該前端進氣端101與該前端排氣端102的氣壓差，達到降低該前端幫浦100能耗的功效。藉由此設計，該中置進氣端301與該中置排氣端302的氣壓差亦可降低，以達到降低該中置幫浦300a能耗的功效。此外，該末端排氣端202亦可連通於該前端進氣閥106，使得該前端幫浦100可抽取該末端排氣端202的氣體，以降低該末端進氣端201與該末端排氣端202的氣壓差，達到降低該末端幫浦200能耗的功效。 In summary, when the pump system 1 of the present invention operates in the first mode, the front end exhaust port 102 and the end exhaust port 202 are both connected to the outside world D, so that the front end pump 100 and the end pump Both of the pumps 200 operate independently, and the gases generated by the main process chamber A and the end process chamber C are discharged to the outside world D. When the pump system 1 of the present invention operates in the second mode, the front end exhaust port 102 communicates with the end intake valve 206, and the front end pump 100 and the end pump 200 operate simultaneously, so that the front end pump 100 uses the front-end pump rotor 105 to extract the gas produced by the main process chamber A to the front-end exhaust end 102, and the end-pump 200 extracts the gas at the front-end exhaust end 102 through the end-pump rotor 205 In order to reduce the air pressure difference between the front-end intake end 101 and the front-end exhaust end 102 of the front-end pump 100, the energy consumption of the front-end pump 100 is reduced. Similarly, when the pump system 1 of the present invention operates in the third mode, the front-end exhaust port 102 and the central exhaust port 302 communicate with the central intake valve 306 and the end intake valve 206, respectively, and The front-end pump 100, the center-mounted pump group 300 and the end-pump 200 are operated simultaneously, so that the front-end pump 100 extracts the gas generated by the main process chamber A to the front-end row by the front-end pump rotor 105 The gas end 102, the central pump group 300 and the end pump 200 can extract the front end exhaust end 102 and the center exhaust end 302 through the center pump rotor 305 and the end pump rotor 205, respectively To reduce the air pressure difference between the front-end intake end 101 and the front-end exhaust end 102, so as to reduce the energy consumption of the front-end pump 100. With this design, the air pressure difference between the central intake end 301 and the central exhaust end 302 can also be reduced to achieve the effect of reducing the energy consumption of the central pump 300a. In addition, the end exhaust end 202 can also communicate with the front end intake valve 106, so that the front end pump 100 can extract gas from the end exhaust end 202 to reduce the end intake end 201 and the end exhaust end The air pressure difference of 202 achieves the effect of reducing the energy consumption of the pump 200 at the end.

以上所述僅為本發明之較佳實施例，凡依本發明申請專利範圍所做之均等變化與修飾，皆應屬本發明之涵蓋範圍。 The above are only the preferred embodiments of the present invention, and all changes and modifications made in accordance with the scope of the patent application of the present invention shall fall within the scope of the present invention.

A‧‧‧主製程腔體 A‧‧‧Main process chamber

B‧‧‧中置製程腔體 B‧‧‧ Center process cavity

C‧‧‧末端製程腔體 C‧‧‧End process cavity

D‧‧‧外界 D‧‧‧Outside

1‧‧‧幫浦系統 1‧‧‧ pump system

100‧‧‧前端幫浦 100‧‧‧Front end pump

101‧‧‧前端進氣端 101‧‧‧Front inlet

102‧‧‧前端排氣端 102‧‧‧Front end

103‧‧‧前端腔體 103‧‧‧Front cavity

104‧‧‧前端腔室 104‧‧‧ Front chamber

105‧‧‧前端幫浦轉子 105‧‧‧ Front-end pump rotor

106‧‧‧前端進氣閥 106‧‧‧Front inlet valve

107‧‧‧前端排氣閥 107‧‧‧ Front-end exhaust valve

200‧‧‧末端幫浦 200‧‧‧End Pump

201‧‧‧末端進氣端 201‧‧‧End intake end

202‧‧‧末端排氣端 202‧‧‧Exhaust end

203‧‧‧末端腔體 203‧‧‧End cavity

204‧‧‧末端腔室 204‧‧‧End chamber

205‧‧‧末端幫浦轉子 205‧‧‧End pump rotor

206‧‧‧末端進氣閥 206‧‧‧End intake valve

207‧‧‧末端排氣閥 207‧‧‧End exhaust valve

300‧‧‧中置幫浦組 300‧‧‧Central Pump Group

300a‧‧‧中置幫浦 300a‧‧‧Central Pump

301‧‧‧中置進氣端 301‧‧‧ mid intake port

302‧‧‧中置排氣端 302‧‧‧Central exhaust end

303‧‧‧中置腔體 303‧‧‧Central cavity

304‧‧‧中置腔室 304‧‧‧Central chamber

305‧‧‧中置幫浦轉子 305‧‧‧Central pump rotor

306‧‧‧中置進氣閥 306‧‧‧Central intake valve

307‧‧‧中置排氣閥 307‧‧‧Central exhaust valve

Claims (12)

一種具有尾氣真空節能功能的幫浦系統，包含：一前端幫浦，包含：一前端進氣端；一前端排氣端；一前端腔體，其內形成一前端腔室，該前端腔室連通該前端進氣端與該前端排氣端；及一前端幫浦轉子，設置於該前端腔室內；及一末端幫浦，包含：一末端進氣端；一末端排氣端；一末端腔體，其內形成一末端腔室，該末端腔室連通該末端進氣端與該末端排氣端；及一末端幫浦轉子，設置於該末端腔室內；其中，該末端幫浦轉子選擇性地用以將該末端進氣端的氣體抽取至該末端排氣端或將該前端排氣端的氣體抽取至該末端排氣端；其中，該前端幫浦轉子選擇性地用以將該前端進氣端的氣體抽取至該前端排氣端或將該末端排氣端的氣體抽取至該前端排氣端。 A pump system with exhaust gas vacuum energy-saving function, comprising: a front-end pump, including: a front-end intake end; a front-end exhaust end; and a front-end cavity in which a front-end chamber is formed, and the front-end chamber is in communication The front-end intake end and the front-end exhaust end; and a front-end pump rotor, which is disposed in the front-end chamber; and a terminal pump, including: a terminal intake end; a terminal exhaust end; and a terminal cavity , An end chamber is formed therein, the end chamber connects the end inlet end and the end exhaust end; and an end pump rotor is disposed in the end chamber; wherein, the end pump rotor is selectively It is used to extract the gas at the end intake end to the end exhaust end or the gas at the front end exhaust end to the end exhaust end; wherein, the front end pump rotor is used to selectively The gas is extracted to the front end exhaust end or the gas at the end exhaust end is extracted to the front end exhaust end. 如請求項1所述的幫浦系統，另包含：一中置幫浦組，包含至少一中置幫浦，該至少一中置幫浦包含：一中置進氣端；一中置排氣端；一中置腔體，其內形成一中置腔室，該中置腔室連通該中置進氣端與 該中置排氣端；及一中置幫浦轉子，設置於該中置腔室內，該中置幫浦轉子選擇性地用以將該中置進氣端的氣體抽取至該中置排氣端或將該前端排氣端的氣體抽取至該中置排氣端。 The pump system according to claim 1, further comprising: a central pump group including at least one central pump, the at least one central pump including: a central intake end; a central exhaust End; a central cavity, which forms a central cavity, the central cavity communicates with the central intake end and The central exhaust end; and a central pump rotor disposed in the central chamber, the central pump rotor is selectively used to extract the gas at the central intake end to the central exhaust end Or the gas at the exhaust end of the front end is extracted to the central exhaust end. 如請求項2所述的幫浦系統，其中該中置幫浦另包含：一中置進氣閥，設置於該中置腔體上，該中置進氣閥選擇性地將該中置腔室連通於該中置進氣端或該前端排氣端。 The pump system according to claim 2, wherein the central pump further comprises: a central intake valve disposed on the central cavity, and the central intake valve selectively connects the central cavity The chamber communicates with the middle intake end or the front end exhaust end. 如請求項3所述的幫浦系統，其中該中置幫浦另包含：一中置排氣閥，設置於該中置腔體上，該中置排氣閥選擇性地將該中置排氣端連通於該末端進氣閥或一外界。 The pump system according to claim 3, wherein the central pump further includes: a central exhaust valve disposed on the central cavity, the central exhaust valve selectively exhausting the central pump The gas end communicates with the terminal inlet valve or an outside world. 如請求項1所述的幫浦系統，其中該前端幫浦另包含：一前端進氣閥，設置於該前端腔體上，該前端進氣閥選擇性地將該前端腔室連通於該前端進氣端或該末端排氣端。 The pump system according to claim 1, wherein the front-end pump further includes: a front-end intake valve disposed on the front-end cavity, the front-end intake valve selectively communicating the front-end chamber to the front-end The intake end or the exhaust end of the end. 如請求項5所述的幫浦系統，其中該前端幫浦另包含：一前端排氣閥，設置於該前端腔體上，該前端排氣閥選擇性地將該前端排氣端連通於該末端進氣閥或一外界。 The pump system according to claim 5, wherein the front-end pump further includes: a front-end exhaust valve disposed on the front-end cavity, and the front-end exhaust valve selectively connects the front-end exhaust end to the End intake valve or an outside world. 如請求項2所述的幫浦系統，其中該前端幫浦另包含：一前端進氣閥，設置於該前端腔體上，該前端進氣閥選擇性地將該前端腔室連通於該前端進氣端或該末端排氣端。 The pump system according to claim 2, wherein the front-end pump further includes: a front-end intake valve disposed on the front-end cavity, and the front-end intake valve selectively connects the front-end chamber to the front-end The intake end or the exhaust end of the end. 如請求項7所述的幫浦系統，其中該前端幫浦另包含：一前端排氣閥，設置於該前端腔體上，該前端排氣閥選擇性地將該前端排氣端連通於該中置進氣閥或一外界。 The pump system according to claim 7, wherein the front-end pump further includes: a front-end exhaust valve disposed on the front-end cavity, and the front-end exhaust valve selectively connects the front-end exhaust end to the The central intake valve or an outside world. 如請求項1所述的幫浦系統，其中該末端幫浦另包含：一末端進氣閥，設置於該末端腔體上，該末端進氣閥選擇性地將該末端腔室連通於該末端進氣端或該前端排氣端。 The pump system according to claim 1, wherein the end pump further comprises: an end intake valve disposed on the end cavity, and the end intake valve selectively connects the end chamber to the end The intake end or the exhaust end of the front end. 如請求項9所述的幫浦系統，其中該末端幫浦另包含：一末端排氣閥，設置於該末端腔體上，該末端排氣閥將該末端排氣端連通於該外界。 The pump system according to claim 9, wherein the end pump further comprises: an end exhaust valve, which is disposed on the end cavity, and the end exhaust valve communicates the end exhaust end with the outside world. 如請求項4所述的幫浦系統，其中該末端幫浦另包含：一末端進氣閥，設置於該末端腔體上，該末端進氣閥選擇性地將該末端腔室連通於該末端進氣端或該中置排氣端。 The pump system according to claim 4, wherein the end pump further comprises: an end intake valve disposed on the end cavity, and the end intake valve selectively connects the end chamber to the end The intake end or the central exhaust end. 如請求項11所述的幫浦系統，其中該末端幫浦另包含：一末端排氣閥，設置於該末端腔體上，該末端排氣閥選擇性地將該末端排氣端連通於該前端進氣閥或該外界。 The pump system according to claim 11, wherein the terminal pump further comprises: a terminal exhaust valve, disposed on the terminal cavity, the terminal exhaust valve selectively connecting the terminal exhaust end to the Front intake valve or the outside world.
TW108106824A 2019-02-27 2019-02-27 Energy-saving exhaust gas pumping system TWI684707B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW108106824A TWI684707B (en) 2019-02-27 2019-02-27 Energy-saving exhaust gas pumping system
CN201910243777.3A CN111622973A (en) 2019-02-27 2019-03-28 Tail gas vacuum energy-saving pumping system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW108106824A TWI684707B (en) 2019-02-27 2019-02-27 Energy-saving exhaust gas pumping system

Publications (2)

Publication Number Publication Date
TWI684707B true TWI684707B (en) 2020-02-11
TW202032008A TW202032008A (en) 2020-09-01

Family

ID=70413284

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108106824A TWI684707B (en) 2019-02-27 2019-02-27 Energy-saving exhaust gas pumping system

Country Status (2)

Country Link
CN (1) CN111622973A (en)
TW (1) TWI684707B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12049908B2 (en) 2022-11-14 2024-07-30 Industrial Technology Research Institute Pressure difference generating apparatus

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011121322A2 (en) * 2010-03-31 2011-10-06 Edwards Limited Vacuum pumping system
US20130259711A1 (en) * 2012-03-30 2013-10-03 Pfeiffer Vaccum Gmbh Pumping system for evacuating gas from a plurality of chambers and method for controlling the pumping system
EP2569541B1 (en) * 2010-05-11 2014-11-19 Edwards Limited Vacuum pumping system
JP2015102036A (en) * 2013-11-26 2015-06-04 オリオン機械株式会社 Suction system
CN205937023U (en) * 2016-05-16 2017-02-08 苏州新纳晶光电有限公司 Vacuum pumping system is used in LED processing
CN107850062A (en) * 2015-06-26 2018-03-27 莱宝有限公司 Vacuum pump system
JP2018173026A (en) * 2017-03-31 2018-11-08 株式会社荏原製作所 Roots type vacuum pump and operation method of roots type vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5377666B2 (en) * 2009-12-28 2013-12-25 株式会社アルバック Vacuum exhaust apparatus, vacuum exhaust method and substrate processing apparatus
GB2510829B (en) * 2013-02-13 2015-09-02 Edwards Ltd Pumping system

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011121322A2 (en) * 2010-03-31 2011-10-06 Edwards Limited Vacuum pumping system
EP2569541B1 (en) * 2010-05-11 2014-11-19 Edwards Limited Vacuum pumping system
US20130259711A1 (en) * 2012-03-30 2013-10-03 Pfeiffer Vaccum Gmbh Pumping system for evacuating gas from a plurality of chambers and method for controlling the pumping system
JP2015102036A (en) * 2013-11-26 2015-06-04 オリオン機械株式会社 Suction system
CN107850062A (en) * 2015-06-26 2018-03-27 莱宝有限公司 Vacuum pump system
CN205937023U (en) * 2016-05-16 2017-02-08 苏州新纳晶光电有限公司 Vacuum pumping system is used in LED processing
JP2018173026A (en) * 2017-03-31 2018-11-08 株式会社荏原製作所 Roots type vacuum pump and operation method of roots type vacuum pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12049908B2 (en) 2022-11-14 2024-07-30 Industrial Technology Research Institute Pressure difference generating apparatus

Also Published As

Publication number Publication date
TW202032008A (en) 2020-09-01
CN111622973A (en) 2020-09-04

Similar Documents

Publication Publication Date Title
TWI267581B (en) Vacuum exhaust device and method for operating such vacuum exhaust device
US8136549B2 (en) Sluice system for a vacuum facility
KR101410076B1 (en) Evacuation device, vacuum processing device, and evacuation method
TWI503481B (en) A vacuum venting device and a vacuum venting method, and a substrate processing device
TWI684707B (en) Energy-saving exhaust gas pumping system
JP4365059B2 (en) Operation method of vacuum exhaust system
CN102322443A (en) Single-stage centrifugal pump with balanced axial force
JP5102068B2 (en) Multistage vacuum pump
JP3992176B2 (en) Vacuum exhaust method and vacuum exhaust device
WO2022142603A1 (en) Vacuum pumping system and vacuum packaging machine comprising same
CN201763565U (en) Vacuum pump system
JP3906973B2 (en) Vacuum exhaust device
CN211777613U (en) Novel steam turbine low pressure cylinder exhaust enthalpy measurement system
CN206175233U (en) High -efficient compact is from inhaling double entry pump
JP2004169677A (en) Positive pressure/negative pressure supply device
JPH0727089A (en) Vacuum pump device
JPS6325348Y2 (en)
JP2008008302A (en) Energy saving method of multistage system volume transfer type dry vacuum pump
CN206116345U (en) Utilize real empty can device of evacuation with higher speed
CN211343544U (en) Internal circulation integrated hybrid electromagnetic valve
CN111336004A (en) Two-stage turbocharging system and method capable of controlling connection mode
CN221973755U (en) Air pump
CN221824548U (en) A pneumatic control valve for correction
WO2009018724A1 (en) A blower or an air inducing device
CN211025166U (en) Closed spray dryer one-key start intelligent system