TWI676762B - Tank for liquid chemicals - Google Patents

Abstract

The present invention relates to a storage tank for a liquid chemical substance, which can be suitably used as a storage tank for a high-purity liquid chemical substance such as high-purity trichlorosilane, and to prevent pollution of the liquid chemical substance as much as possible. The above-mentioned main technical problems can be solved by setting the connection unit attached to the storage tank body as a unique structure in which the chemical substance flow path and the gas flow path are each equipped with a dual on-off valve mechanism.

Description

Tanks for liquid chemicals

The present invention relates to a reusable storage tank for filling a liquid chemical substance from a chemical substance supply source, such as a liquid chemical substance manufacturing apparatus, and being transported to a chemical substance consuming device installed away from the chemical substance supply source. Position and supply the liquid chemical substance to the chemical substance consuming device.

As is known, it is necessary to supply high-purity trichlorosilane to an epitaxial wafer manufacturing apparatus, and generally, a supply method as described below is used. The liquid high-purity trichlorosilane produced by the high-purity trichlorosilane production device is filled into a storage tank, and the storage tank is transported to an area where an epitaxial wafer manufacturing device is installed, and the high-purity trichlorosilane filled in the storage tank is filled. Chlorosilane is supplied to an epitaxial manufacturing device. When the high-purity trichlorosilane in the storage tank is consumed, the storage tank is transported back to the area where the trichlorosilane production device is installed for reuse, and the high-purity trichlorosilane is filled into the storage tank again.

As a liquid chemical substance such as high-purity trichlorosilane, the storage tank disclosed in the following Patent Document 1 can be exemplified as the storage tank used in the above-mentioned supply method. The storage tank is composed of a storage tank body and a connection unit attached to the storage tank body. The connection unit includes: a chemical substance flow path, which is immersed in, for example, a tank body The impregnated portion in the liquid chemical substance of the high-purity trichlorosilane inside, the extension portion extending from the tank body; and the gas flow path extending from one end connected to the tank body. An opening and closing valve mechanism is provided in the chemical substance flow path, and an opening and closing valve mechanism is also provided in the gas flow path. Furthermore, a connection flow path is also provided, which connects the on-off valve mechanism in the chemical substance flow path and the on-off valve mechanism in the gas flow path, and an on-off valve mechanism is also provided in the connection flow path. Patent Document 1 also describes purging the connection unit with an inert gas such as helium (however, a cleaning method is not explicitly described).

[Previous Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Publication No. 2011-500470

In addition, it is important to prevent contamination of high-purity trichlorosilane chemical substances from contact with air or water, and to maintain high purity. However, in the storage tank disclosed in the above-mentioned Patent Document 1, the flow path of the chemical substance and The gas flow channels are each provided with a single on-off valve mechanism, and the prevention of pollution is not sufficient.

The present invention has been made in view of the above-mentioned facts, and its main purpose is not particularly limited to this, but to provide an improved storage tank for liquid chemical substances, which can be used as a storage tank for high-purity liquid chemical substances such as high-purity trichlorosilane. It is suitable for use and prevents the contamination of liquefied chemicals as much as possible.

As a result of intensive research and experiments by the inventors, it was found that the above-mentioned main technical problems can be solved by setting the connection unit attached to the tank body as a unique configuration of a chemical substance flow channel and a gas flow channel with a dual on-off valve mechanism. .

That is, according to the present invention, as a storage tank for a liquid chemical substance that achieves the above-mentioned main purpose, a storage tank is provided, which is a storage tank for a liquid chemical substance, and includes a storage tank body and a connection unit attached to the storage tank body. , Characterized in that the connection unit includes a chemical substance flow path having an impregnation part impregnated with a chemical substance in the body of the storage tank, an extension part extending from the storage tank body, and a gas flow path that is self-connected to the storage tank One end of the body extends; and the extension of the chemical substance flow path is provided with a first on-off valve mechanism, which is located on the downstream side from the observation of the direction in which the chemical substance is filled in the tank body; and a second on-off valve mechanism The observation system from the filling direction of the chemical substance is located on the upstream side; and the gas flow path is provided with a third opening and closing valve mechanism, which is located on the downstream side from the observation direction of the gas flowing into the tank body; and the fourth opening and closing The valve mechanism is located on the upstream side when viewed from the direction in which the gas flows in, and further includes: a connection flow path that connects the first on-off valve mechanism in the chemical substance flow path. And the second portion between the valve mechanism opening and closing the gas flow channel portion between the third opening and closing the valve mechanism and the fourth on-off valve mechanism; and the connection flow passage is provided with a fifth on-off valve mechanism.

The invention is used for a chemical substance supply source with a connection adapter and a chemical substance consumption device with a connection adapter. The connection adapters each include: a chemical substance connection channel, one end of which is connected to the chemical substance supply source. Or the chemical substance consuming device, and the other end is connected to the extended end of the chemical substance flow path; the gas connection flow path, one end of which is connected to the atmosphere through a harmless mechanism, and the other end is connected to the extended end of the gas flow path; One end of the first gas supply flow path is connected to the chemical substance connection flow path, and the other end is connected to the gas supply source; and the second gas supply flow path, one end is connected to the gas connection flow path, and the other end is connected to The gas supply source; and the chemical substance connection flow path is provided with a sixth on-off valve mechanism, which is located closer to the downstream side than the one end of the first gas supply flow path when viewed from the direction of the body of the tank; And a seventh on-off valve mechanism, which is located on an upstream side from the one end of the first gas supply flow path when viewed from a direction toward the body of the tank; The flow path is provided with: an eighth on-off valve mechanism, which is located on the downstream side from the one end of the second gas supply flow path when viewed from the direction of the body of the tank; and a ninth on-off valve mechanism, which is directed toward the The direction observation in the tank body is located on the upstream side than the one end of the second gas supply flow path; and the first gas supply flow path is provided with a tenth on-off valve mechanism, and the second gas supply flow path is provided. With an eleventh on-off valve mechanism.

As can be clearly understood from the following description, the storage tank according to the present invention is sufficient to prevent chemical substances from being contaminated in any of the following cases: When the liquid chemical substance is filled in the body; when the tank filled with the liquid chemical substance is transported to the area where the chemical substance consumption device is installed; when the chemical substance consumption device is provided, the chemical substance in the tank body is supplied to When the chemical substance consumption device is used; and when the chemical substance consumption body in the tank body is returned to the area where the chemical substance production device is installed.

2‧‧‧ storage tank

4‧‧‧ tank body

6‧‧‧ Connection unit

8‧‧‧ Chemical channel

8a‧‧‧Immersion Department

8b‧‧‧ extension

10‧‧‧Gas runner

12‧‧‧ connecting runners

14‧‧‧The first opening and closing valve mechanism

16‧‧‧Second on-off valve mechanism

18‧‧‧ flange

20‧‧‧ the third opening and closing valve mechanism

22‧‧‧Fourth opening and closing valve mechanism

23‧‧‧ flange

24‧‧‧Fifth on-off valve mechanism

26‧‧‧ Chemical source

28 and 28 ' ‧‧‧ connect adapter

30 and 30 ' ‧‧‧ Chemical substance connecting flow channel

32 and 32 ' ‧‧‧Gas connection runner

34 and 34 ' ‧‧‧ the first gas supply runner

36 and 36 ' ‧‧‧Second gas supply runner

37 and 37 ' ‧‧‧ gas supply sources

38 and 38 ' ‧‧‧ Sixth On-Off Valve Mechanism

40 and 40 ' ‧‧‧ seventh on-off valve mechanism

42 and 42 ' ‧‧‧ Eighth on-off valve mechanism

44 and 44 ' ‧‧‧ Ninth On-off Valve Mechanism

46 and 46 ' ‧‧‧ Tenth on-off valve mechanism

48 and 48 ' ‧‧‧ Eleventh on-off valve mechanism

50‧‧‧ Chemical Consumption Device

52‧‧‧Auxiliary connection adapter

54‧‧‧ Chemical Substance Subsidy

56‧‧‧Gas-assisted connection runner

58‧‧‧The twelfth opening and closing valve mechanism

60‧‧‧Thirteenth on-off valve mechanism

[Fig. 1] A schematic diagram showing a preferred embodiment of a storage tank constructed in accordance with the present invention.

[Fig. 2] A partial plan view of the storage tank shown in Fig. 1. [Fig.

[Fig. 3] It is a schematic diagram for explaining a use method of the storage tank when the storage tank body is filled with liquid chemical substances in the storage tank illustrated in Fig. 1. [Fig.

[Fig. 4] It is a schematic diagram for explaining a use method of a storage tank when a liquid chemical substance is supplied from a storage tank body to a chemical substance consuming device in the storage tank illustrated in Fig. 1. [Fig.

[Fig. 5] A schematic diagram showing an additional connection unit used in the storage tank shown in Fig. 1. [Fig.

[Best mode for carrying out the invention]

Hereinafter, a storage tank constructed in accordance with the present invention will be described in more detail with reference to the drawings.

1, the tank 2 constructed in accordance with the present invention is composed of a tank body 4 and a connection unit 6 attached to the tank body 4. The tank body 4 made of a suitable material such as stainless steel is suitable. The hollow structure is sufficient, but the embodiment shown in the figure is a cylindrical shape that extends long and slender in the lateral direction (in the left-right direction of FIG. 1), and both sides (on the left and right sides in FIG. 1) are convex. In addition, the connection unit 6 is attached to the upper surface of the tank body 4 in this way.

1 and FIG. 2, the connection unit 6 includes a chemical substance flow path 8, a gas flow path 10, and a connection flow path 12.

The chemical substance flow path 8 includes an immersion portion 8 a that is impregnated with a liquid chemical substance (not shown) filled in the tank body 4, and an extension portion 8 b that extends from the tank body 4. The extension portion 8b of the chemical substance flow path 8 is provided with the first on-off valve mechanism 14 which is an on-off valve mechanism that observes the chemical substance filling direction (downward in FIG. 1) toward the tank body 4 and observes the above. The second on-off valve mechanism 16 which is an on-off valve mechanism that is located upstream in the direction of filling the chemical substance. In the illustrated embodiment, the second on-off valve mechanism 16 is disposed at the extended end of the chemical substance flow path 8. As can be understood by referring to FIG. 2, the chemical substance flow path 8 can be ideally constituted by a straight tube member extending straightly defining the flow channel and an elbow tube member bent approximately at a right angle as required to be connected by sandwiching the following members: Appropriate valve members constituting the first on-off valve mechanism 14 and the second on-off valve mechanism 16; and the embodiment shown in the figure is a spherical valve member provided with a manually operated handle. The mutual connection between the pipe members can be achieved by an appropriate connection method such as a splice, and the connection of the valve member to the straight pipe member and the elbow pipe member can be achieved by the following: the connection arranged at one end of the valve member The flange is clamped into an appropriate gasket and fastened to a connecting flange arranged at one end of the pipe member by a suitable fastening mechanism such as a bolt and a nut. The connection with the tank body 4 can be performed by connecting the flange 18 (FIG. 2) of the pipe member attached to the required portion with the opening formed by the tank body 4 in an airtight closed state.

The gas flow path 10 extends from one end communicating with the inside of the tank body 4. This gas flow channel 10 is provided with a third on-off valve mechanism 20, which is an on-off valve mechanism for observing a gas inflow direction (downward in FIG. 1) toward the tank body 4, and a position for observing the above-mentioned gas inflow direction. The fourth on-off valve mechanism 22 is an on-off valve mechanism on the upstream side. In the illustrated embodiment, the fourth on-off valve mechanism 22 is disposed at the extended end of the gas flow path 10. In this way, the gas flow channel 10 can also be ideally constituted by making the straight tube member that defines the flow channel and the elbow tube member bent at a substantially right angle as required by the above-mentioned chemical substance flow channel 8 as follows: Appropriate valve members constituting the third on-off valve mechanism 20 and the fourth on-off valve mechanism 22; and the embodiment shown in the figure is a spherical valve member provided with a manually operated handle. The connection with the tank main body 4 can be performed by connecting the flange 23 (FIG. 2) of the pipe member attached to a required part with the opening formed by the tank main body 4 in an airtight closed state.

The connecting flow path 12 connects the following parts: a part between the first on-off valve mechanism 14 and the second on-off valve mechanism 16 in the chemical substance flow path 8; and the third on-off valve mechanism in the gas flow path 10. 20 and the fourth on-off valve mechanism 22. A fifth on-off valve mechanism 24, which is an on-off valve mechanism, is disposed on the connection flow path 12. As shown in FIG. 2, the connecting flow channel 12 is ideally constituted by a straight tube member extending straightly defining the flow channel and an elbow tube member bent approximately at a right angle as required to be connected by sandwiching the following members: An appropriate valve member of the five-way valve mechanism 24; and the embodiment shown in the figure is a spherical valve member provided with a manually operated handle. One end (to the right end in FIG. 1 series) of the connecting flow path 12 is connected to the extension portion 8b of the chemical substance flow path 8 and the other end (to the left end in FIG. 1 series) is connected to the gas flow path 10. More specifically, as shown in FIG. 2, one end of the pipe member constituting the connection flow path 12 is connected to a connection portion formed by a side surface of the pipe member constituting the chemical substance flow path 8 and communicates with the chemical substance. The flow path 8 has one end of the other tube members constituting the connection flow path 12 connected to a connection portion formed on a side surface of the tube member constituting the gas flow path 10 and communicates with the gas flow path 10.

Next, the usage of the storage tank 2 as described above will be described.

[Filling of chemical substances]

Referring to FIG. 3, when the tank body 4 of the storage tank 2 is filled with a chemical substance such as trichlorosilane, the storage tank is moved to a chemical substance such as a liquid chemical substance manufacturing facility or a liquid chemical substance storage facility. The area where the supply source 26 exists. The chemical substance supply source 26 is provided with a connection adapter 28. The connection adapter 28 includes a chemical substance connection channel 30 and a gas connection channel 32. One end of the chemical substance connection flow path 30 is connected to the chemical substance supply source 26, and one end of the gas connection flow path 32 is opened to the atmosphere through an appropriate detoxification mechanism (not shown) for detoxifying the chemical substance. On the other hand, when a liquid chemical substance is filled in the tank body 4, the other end of the chemical substance connection flow path 30 and the other end of the gas connection flow path 32 are respectively connected to the chemical substance flow path in the connection unit 6 of the storage tank 2. The extended end of 8 and the extended end of the gas flow path 10. The connection adapter 28 further includes a first gas supply flow path 34 and a second gas supply flow path 36. One end of the first gas supply flow path 34 is connected to the chemical substance connection flow path 30, and one end of the second gas supply flow path 36 is connected to the gas connection flow path 32. The other end of the first gas supply flow path 34 and the other end of the second gas supply flow path 36 are connected to a gas supply source 37. The gas supply source 37 is used to supply an inert gas such as argon, hydrogen, nitrogen, and helium. Sealed gas. The chemical substance connecting flow path 30 is provided with an on-off valve mechanism which is located further downstream than the one end of the first gas supply flow path 34 as viewed in a direction toward the inside of the tank body 4 (to the left in FIG. 1). That is, the sixth on-off valve mechanism 38 and the seventh on-off valve mechanism 40 which is an on-off valve mechanism located upstream from the one end of the first gas supply flow path 34 toward the inside of the tank body 4 when viewed. The above-mentioned gas connection flow path 32 is arranged in a direction looking toward the inside of the tank body 4 (as shown in the figure). (1 system is to the left) and the eighth on-off valve mechanism 42 which is located on the downstream side from the one end of the second gas supply flow channel 36, and the eighth on-off valve mechanism 42 is viewed from the direction toward the inside of the tank body 4. The ninth on-off valve mechanism 44 that is an on-off valve mechanism on the upstream side of the one end of the second gas supply flow path 36 is located further upstream. A tenth on-off valve mechanism 46, which is an on-off valve mechanism, is provided in the first air supply flow path 34. An eleventh on-off valve mechanism 48, which is an on-off valve mechanism, is provided in the second atmospheric supply flow path 36. The chemical substance connection flow path 30, the gas connection flow path 32, the first gas supply flow path 34, and the second gas supply flow path 36 can be configured by passing an appropriate pipe member through a required opening and closing valve mechanism. Connect properly. The on-off valve mechanism may be ideally constituted by a ball valve having a manually operated grip.

After connecting the connection unit 6 of the storage tank 2 and the connection adapter 28 attached to the chemical substance supply source 26 as shown in FIG. 3, the following steps are performed.

Airtight confirmation

In the initial state where the first to eleventh on-off valve mechanisms 14, 16, 20, 22, 24, 38, 40, 42, 44, 46, 48 are closed, the sixth on-off valve mechanism 38 and the eighth on-off valve are opened. The mechanism 42 then opens the tenth on-off valve mechanism 46 and the eleventh on-off valve mechanism 48 to distribute the sealed gas to the chemical substance connection flow path 30 and the gas connection flow path 32. Secondly, check whether the entire equipment is airtight, in other words, check whether leakage of chemical substances and sealing gas has occurred. After confirming that the airtightness is ensured, the tenth on-off valve mechanism 46 and the eleventh on-off valve mechanism 48 are closed.

2. Gas replacement

Next, the second on-off valve mechanism 16, the fourth on-off valve mechanism 22, the fifth on-off valve mechanism 24, and the ninth on-off valve mechanism 44 are opened, and then the tenth on-off valve mechanism 46 is opened, so that the sealing gas flows in The chemical substance-connected flow path 30 and the gas-connected flow path 32 purge the gas existing in the chemical substance-connected flow path 30 and the gas-connected flow path 32. Thereafter, the tenth on-off valve mechanism 46 is closed, and the fifth on-off valve mechanism 24 is closed.

3.fill

Next, the first on-off valve mechanism 14, the third on-off valve mechanism 20, and the seventh on-off valve mechanism 40 are opened, and the liquid chemical substance is supplied from the chemical substance supply source 26 through the chemical substance connection channel 30 and the chemical substance channel 8. It flows into the tank body 4. The filling amount of the liquid chemical substance into the storage tank body 4 can be placed on a load detection element (not shown) via the appropriate base (not shown), for example, and the weight of the storage tank 2 can be measured. Change and recognize. Alternatively, it can also be recognized by using an integral flow meter provided with the chemical substance flow path 8 or the chemical substance connection flow path 30. When a required amount of the liquid chemical substance is filled into the tank body 4, the seventh on-off valve mechanism 40 is closed to stop the filling, and the tenth on-off valve mechanism 46 is opened, and the chemical substance is connected to the flow path 30 by sealing the gas. The liquid chemical substance in the chemical substance flow path 8 is expelled into the tank body 4.

4. Gas pressurization

The third on-off valve mechanism 20 is closed to allow the sealing gas to flow into the tank body 4 and a pressure before and after 100 kPaG is applied, and then the first on-off valve mechanism 14 is closed. When the pressure is reduced because the sealing gas is absorbed into the chemical substance, the first on-off valve mechanism 14 is opened to allow the sealing gas to flow in to increase the pressure.

5. Gas replacement

Then, the fifth on-off valve mechanism 24 is opened, and the gas in the chemical substance connection flow path 30 and the gas connection flow path 32 is purged by sealing the gas.

6. Closed

Next, the fourth on-off valve mechanism 22, the eighth on-off valve mechanism 42, and the ninth on-off valve mechanism 44 are closed, and the tenth on-off valve mechanism 46 is further closed, and the sixth on-off valve mechanism 38 and the second on-off valve mechanism are further closed. 16, and a fifth on-off valve mechanism 24. At this time, it is appropriate to make it a state in which the positive pressure by the gas has been generated in the flow path from the second on-off valve mechanism 16 to the fourth on-off valve mechanism 22 through the fifth on-off valve mechanism 24.

7. Pressure Relief

Secondly, it is preferable to release the positive pressure in the chemical substance connection flow path 30 and / or the gas connection flow path 32 by opening the following mechanism: observe the direction of the chemical substance connection flow path 30 toward the tank body 4 and arrange it in The pressure-relieving on-off valve mechanism (not shown) located downstream of the sixth on-off valve mechanism 38 and / or the gas connection flow path 32 in the direction of the tank body 4 is disposed to be more than the eighth on-off valve mechanism. 42 is an opening / closing valve mechanism (not shown) further downstream. Then, the chemical substance connection channel 30 and the gas connection channel 32 are isolated from the chemical substance channel 8 and the gas channel 10 in the connection unit 6 of the storage tank 2, respectively. Therefore, the storage tank 2 is allowed to be transported from a place where the chemical substance supply source 26 is installed (a region where a chemical substance consuming device is to be described later) to be left. Appropriate occlusion mechanisms (not shown), such as caps or plugs, are suitable for being detachably mounted on the extended end of the chemical substance flow path 8 and the extended end of the gas flow path 10.

[Supply of Chemical Substances]

As described with reference to FIG. 4, as described above, the storage tank 2 filled with the required amount of the liquid chemical substance in the storage tank body 4 is transported to the container by a suitable transport mechanism (not shown) such as a dedicated truck. An area where a chemical substance consuming device 50 such as an epitaxial wafer manufacturing device is provided. The chemical substance consuming device 50 is provided with a connection adapter 28 ′ . This connection adapter 28 ′ may be substantially the same as the connection adapter 28 attached to the chemical substance supply source 26 shown in FIG. 3. 4 the connection of the adapter 28 'of each of the constituent elements denoted in its corresponding connector of the adapter 28 constituting the element number plus''' of the number. In order to avoid duplication of description, the configuration of the connection adapter 28 'is omitted.

One end of the connection adapter 28 ′ is connected to the other end of the chemical substance connection flow path 30 ′ of the chemical substance consuming device, and the other end is connected to the other end of the gas connection flow path 32 ′ which is open to the atmosphere. The extended end of the chemical substance flow path 8 and the extended end of the gas flow path 10 in the connection unit 4 of 2 are connected to the connection adapter 28 ′ attached to the chemical substance consumption device 50. Then follow the next steps.

1. Airtight confirmation and 2. Gas replacement

First, the airtightness confirmation and gas replacement are performed in the same manner as 1. Airtightness confirmation and 2. Gas replacement that have been performed for the filling of the above-mentioned chemical substance. Next, the ninth on-off valve mechanism 44 'is closed.

3. Pre-Supply Processing

Then, the eleventh on-off valve mechanism 48 ′ , the eighth on-off valve mechanism 42 ′ , the fourth on-off valve mechanism 22, and the third on-off valve mechanism 20 are opened, and the required positive pressure in the tank body 4 is sealed by gas. .

4. Supply

Next, the first on-off valve mechanism 14, the second on-off valve mechanism 16, the sixth on-off valve mechanism 38 ' , and the seventh on-off valve mechanism 40 ' are opened, and the liquid chemical substance discharged from the tank body 4 is passed through the chemical substance flow path. The chemical substance is connected to the flow path 30 ′ and supplied to the chemical substance consumption device 50. The supply amount of the liquid chemical substance to the chemical substance consuming device 50 can be obtained by, for example, placing the entire storage tank 2 on a load detection element (not shown) using an appropriate base (not shown), and weighing the storage tank 2 The changes are measured and recognized. The remaining amount of the liquid chemical substance in the tank body 4 can be recognized in the same manner.

5. Supply stop and cleaning

When the substantial amount of the liquid chemical substance in the tank body 4 is discharged and supplied to the chemical substance consuming device 50, the seventh on-off valve mechanism 40 ' is closed to stop the supply of the liquid chemical substance to the chemical substance consuming device 50 Then, the eleventh on-off valve mechanism 48 ′ is closed and the tenth on-off valve mechanism 44 ′ is opened to release the pressure in the tank body 4. Then, the tenth on-off valve mechanism 46 is opened, and the liquid chemical substance remaining in the chemical substance connection flow path 30 ′ and the chemical substance flow path 8 is returned to the storage tank body 4.

6. Gas pressure 7. Gas replacement 8. Sealing 9. Pressure relief

Thereafter, in the same manner as 4. gas pressurization, 5. gas replacement, 6. closure, and 7. pressure relief that have been performed during the filling of the above-mentioned chemical substances, 6. gas pressure 7. gas replacement, 8. Closed and 9. Depressurized. As a result, the storage tank 2 is allowed to be returned from the area where the chemical substance consuming device 50 is installed to the area where the chemical substance supply source 26 is installed. At this time, an appropriate blocking mechanism (not shown), such as a cap or a plug, should also be detachably mounted on the extended end of the chemical substance flow path 8 and the extended end of the gas flow path 10.

Similar to the filling of the liquid chemical substance and / or the supply of the liquid chemical substance, the auxiliary connection adapter 52 can be used in the following cases, as shown in FIG. 5: The difference in the diameter of the flow channel causes the connection unit 28 ( 28 ') in the chemical connector 30 (30 flow channels' the other end) and the gas connection means 32 (32') of the other end of the flow passage easily connected to the tank 2 of 4 chemicals flow channel 8 The extended end and the extended end of the gas flow channel 10. The auxiliary connection adapter 52 includes a chemical substance auxiliary connection channel 54 having one end adapted to be connected to the extended end of the chemical substance flow channel 8 and the other end adapted to be connected to the other end of the chemical substance connection flow channel 30 (30 ′ ). : And the gas auxiliary connection flow path 56, one end of which is suitable for being connected to the extended end of the gas flow path 10, and the other end of which is suitable for being connected to the other end of the gas connection flow path 32 (32 ' ). The chemical substance auxiliary connection passage 54 and the auxiliary connection passage 56 are respectively provided with a twelfth on-off valve mechanism 58 and a thirteenth on-off valve mechanism 60. When the auxiliary adapter 52 is used in this way, the twelfth on-off valve mechanism 58 and the thirteenth on-off valve mechanism 60 are opened and closed corresponding to the opening and closing of the second on-off valve mechanism 16 and the fourth on-off valve mechanism 22, respectively.

Claims (2)

A combination of a storage tank and a chemical substance supply source. The storage tank is a storage tank for a liquid chemical substance, and includes a storage tank body and a connection unit attached to the storage tank body. The chemical substance supply source is provided with a connection adapter. Therefore, the connection unit includes: a chemical substance flow path having an impregnated portion impregnated with the chemical substance in the main body of the storage tank and an extension portion extending from the main body of the storage tank; and a gas flow path self-connected to the main body of the storage tank. One end extends out; and the extension portion of the chemical substance flow path is provided with a first on-off valve mechanism, which is located on the downstream side from the observation of the direction in which the chemical substance is filled in the tank body; and a second on-off valve mechanism, The observation direction of the filling of the chemical substance is located on the upstream side; and the gas flow path is provided with a third on-off valve mechanism, which is located on the downstream side from the direction in which the gas flows into the tank body; and a fourth on-off valve mechanism The system is located on the upstream side when viewed from the direction of the gas inflow; and further includes: a connection flow path that connects the first on-off valve mechanism in the chemical flow path with the A portion between two on-off valve mechanisms, and a portion between the third on-off valve mechanism and the fourth on-off valve mechanism in the gas flow path; and the connecting flow path is provided with a fifth on-off valve mechanism; and the connection The adapters each include: a chemical substance connection channel, one end of which is connected to a chemical substance supply source, and the other end of which is connected to an extended end of the chemical substance flow channel; a gas connection channel, one end of which is connected to the atmosphere through a harmless mechanism And the other end is connected to the extended end of the gas flow path; the first gas supply flow path has one end connected to the chemical substance connection flow path and the other end connected to the gas supply source; and the second gas supply flow path, which One end is connected to the gas connection flow path, and the other end is connected to the gas supply source; and the chemical substance connection flow path is provided with a sixth opening and closing valve mechanism, which is located at a position closer to the tank when viewed from the direction of the tank body. The one end of the first gas supply flow path is further downstream; and the seventh on-off valve mechanism is located at a position that is more than the one end of the first gas supply flow path when viewed from the direction of the tank body. On the upstream side; and the gas connection flow path is provided with: an eighth on-off valve mechanism, which is located further downstream than the one end of the second gas supply flow path when viewed from the direction of the main body of the tank; and The nine on-off valve mechanism is located on the upstream side from the one end of the second gas supply flow path when viewed from the direction of the tank body; and a tenth on-off valve mechanism is provided on the first gas supply flow path. An eleventh on-off valve mechanism is arranged in the second gas supply channel. A combination of a storage tank and a chemical substance consuming device. The storage tank is a storage tank for a liquid chemical substance, and includes a storage tank body and a connection unit attached to the storage tank body. The chemical substance consuming device is provided with a connection adapter. Therefore, the connection unit includes: a chemical substance flow path having an impregnated portion impregnated with the chemical substance in the main body of the storage tank and an extension portion extending from the main body of the storage tank; and a gas flow path self-connected to the main body of the storage tank. One end extends out; and the extension portion of the chemical substance flow path is provided with a first on-off valve mechanism, which is located on the downstream side from the observation of the direction in which the chemical substance is filled in the tank body; and a second on-off valve mechanism, The observation direction of the filling of the chemical substance is located on the upstream side; and the gas flow path is provided with a third on-off valve mechanism, which is located on the downstream side from the direction in which the gas flows into the tank body; and a fourth on-off valve mechanism The system is located on the upstream side when viewed from the direction of the gas inflow, and further includes: a connection flow path that connects the first on-off valve mechanism in the chemical substance flow path. A portion between the second on-off valve mechanism and a portion between the third on-off valve mechanism and the fourth on-off valve mechanism in the gas flow path; and a fifth on-off valve mechanism is provided on the connecting flow path; the The connection adapters each include: a chemical substance connection channel, one end of which is connected to a chemical substance supply source or the chemical substance consumption device, and the other end of which is connected to an extended end of the chemical substance flow channel; a gas connection channel, which has one end via The harmless mechanism is connected to the atmosphere, and the other end is connected to the extended end of the gas flow path; the first gas supply flow path has one end connected to the chemical substance connection flow path, and the other end connected to the gas supply source; and Two gas supply flow paths, one end of which is connected to the gas connection flow path and the other end is connected to the gas supply source; and the chemical substance connection flow path is provided with a sixth on-off valve mechanism, which is directed toward the body of the storage tank. The directional observation system is located further downstream than the one end of the first gas supply flow path; and the seventh on-off valve mechanism is viewed from a direction toward the main body of the tank and is located more than the first observation mechanism. The one end of the gas supply flow path is further upstream; and the gas connection flow path is provided with an eighth on-off valve mechanism, which is located at a position which is more than the second gas supply flow path when viewed from the direction of the main body of the tank. One end is closer to the downstream side; and a ninth on-off valve mechanism is located more upstream than the one end of the second gas supply flow path when viewed from a direction toward the main body of the tank; and at the first gas supply flow path An tenth on-off valve mechanism is provided, and an eleventh on-off valve mechanism is provided in the second gas supply flow path.