TWI655704B - Reloading jig and its use method - Google Patents

Abstract

This disclosure provides a reproduced fixture. The reproduction fixture includes a first bearing member and a shell. The first bearing member includes three supporting structures to support the object to be retransmitted, and the three supporting structures are substantially parallel to each other. The casing is used for accommodating the object to be reproduced.

Description

Reproduced fixtures and methods of use

This disclosure relates to a reprinting jig, and in particular to a reprinting jig in which wafers or substrates are being transported.

During the fabrication of integrated circuits, wafers or substrates undergo multiple processes (such as handling between different production lines or plants), and wafers are often moved during this process. Generally, during the transportation process, a plurality of wafers or substrates (for example, 13 to 15 wafers) are placed on the same shelf or storage box. After being moved to the destination, the wafers or substrates are manually removed. One is reproduced on another shelf or storage box.

Since at least one surface of a wafer or a substrate may have many circuits, manual reprinting may easily cause damage or cracks (scratch) to the surface of the wafer or substrate, thereby reducing the yield of integrated circuit manufacturing. Although there are special reprinting machines, they are expensive and can only be used in clean rooms without good mobility. In addition, the current reprinting machine has only two support rods for supporting wafers or substrates. It can only recirculate round objects, but it is difficult to provide sufficient support for rectangular objects, causing the middle section of the rectangular objects to be sunken. Easy to cause damage to the reprinted.

An embodiment of the present disclosure provides a reproduction fixture. The reproduction fixture includes a first load-bearing component including three supporting structures to support an object to be reproduced, the three supporting structures being substantially parallel to each other; and a housing for receiving the object to be reproduced. In one or more embodiments, the transfer fixture further includes a lifting portion connected to the first bearing member to control the first bearing member to move in a first direction, wherein the first direction and the three The extending direction of the support structure is substantially vertical. In one or more embodiments, the housing is configured to move toward or away from the first bearing member along a second direction. In one or more embodiments, the reproduction fixture further includes at least one vacuum chuck, and the vacuum chuck is disposed on at least one support structure of the support structures to support the object to be reproduced. In one or more embodiments, the transfer fixture further includes a plurality of vacuum suction cups, and the vacuum suction cups are respectively disposed on the three supporting structures to support the object to be transferred. In one or more embodiments, the reproduction fixture further includes an extraction motor or an air blowing motor connected to the vacuum suction cup, and the extraction motor or the air blowing motor is configured to provide an object to be reproduced with a Adsorption. In one or more embodiments, the reprinting fixture further includes an air blowing portion provided at a first end in the housing, the air blowing portion is used to provide a gas to the inside of the housing; and The air part is arranged at a second end in the casing, and the air return part is used for providing a suction force to the gas in the casing. In one or more embodiments, the casing is used for accommodating a plurality of rectangular substrates, the rectangular substrates are parallel to each other and separated from each other in a first direction, and the blowing part and the rectangular substrates are in the No overlap in the first direction. In one or more embodiments, the reprinting fixture further includes a second supporting member including three supporting structures, the three supporting structures being substantially parallel to each other, wherein the three supporting structures of the second supporting member Aligned with the three support structures of the first bearing member, respectively. In one or more embodiments, the three support structures include a first support structure, a second support structure, and a third support structure. The second support structure is located on the first support structure and the third support structure. Between; the first support structure has a first vacuum chuck, the second support structure has a second vacuum chuck and the third support structure has a third vacuum chuck; and the second vacuum chuck is more vacuum than the first vacuum chuck The suction cup or the third vacuum suction cup is far from the casing.

Another embodiment of the present disclosure provides a reproduction fixture. The reproduction fixture includes a bearing member, the bearing member includes: a first supporting structure; a second supporting structure; a third supporting structure; and a connecting member connecting the first supporting structure and the second supporting structure And the third support structure, wherein the first support structure, the second support structure, and the third support structure are parallel to each other, and the second support structure is located between the first support structure and the third support structure; A first suction cup is located on the first support structure; a second suction cup is located on the second support structure; and a third suction cup is located on the third support structure, wherein the second suction cup is more than the first A suction cup or the third suction cup is close to the connecting member. In one or more embodiments, the length of the second support structure is less than the length of the first support structure or the third support structure. In one or more embodiments, the second suction cup is configured to be adjacent to or located at a center of an object to be reproduced.

Another embodiment of the present disclosure provides a method for operating a reproduction fixture. The method includes: moving a first housing for receiving a rectangular substrate to a carrier member so that the rectangular substrate is above the carrier member; moving the carrier member so that the carrier member lifts the rectangular substrate; and moving The first casing is kept away from the bearing member. In one or more embodiments, the method further includes: moving a second housing toward the carrying member so that the rectangular substrate is located in the second housing; moving the carrying member so that the carrying member moves down the rectangular substrate To place the rectangular substrate on a supporting structure in the second casing to support the rectangular substrate; and move the second casing away from the bearing member. In one or more embodiments, the step of moving the supporting member so that the supporting member lifts the rectangular substrate further includes attaching at least one vacuum chuck provided on the supporting member to a lower surface of the rectangular substrate, and An adsorption force is provided to the rectangular substrate through the at least one vacuum chuck. In one or more embodiments, the method further comprises: providing a gas in the bottom of one end of the first housing away from the bearing member; and extracting the gas in the bottom of the first housing near the bottom of one end of the bearing member. . In one or more embodiments, the gas is nitrogen, and the gas system is provided at a flow rate of 10 L / min to 30 L / min. In one or more embodiments, the gas system is provided at a flow rate of 20 L / min to 30 L / min. In one or more embodiments, the flow rate of the gas is provided greater than the flow rate of the extracted gas.

This disclosure provides several different implementation methods or embodiments that can be used to implement different features of the present invention. To simplify the description, this disclosure also describes examples of specific components and arrangements. Please note that these specific examples are provided for demonstration purposes only and not for any limitation. For example, in the following description of how the first feature is on or above the second feature, some embodiments may be included, where the first feature is in direct contact with the second feature, and the description may also include other differences In the embodiment, there are other features between the first feature and the second feature, so that the first feature and the second feature are not in direct contact. In addition, various examples in this disclosure may use repeated reference numbers and / or textual annotations to make the document more simple and clear. These repeated reference numbers and annotations do not represent the correlation between different embodiments and configurations.

In addition, this disclosure uses space-related narrative words such as "below", "low", "down", "above", "up", "above", and the like, For ease of description, their usage is to describe the relative relationship between one element or feature and another element or features in the illustration. In addition to the angular directions shown in the illustration, these spatial relative terms are also used to describe the possible angles and directions of the device during use and operation. The angular direction of the device may be different (rotated 90 degrees or other orientation), and these spatially related narratives used in this disclosure can be interpreted in the same way.

As used herein, the terms “first,” “second,” “third,” and “fourth” describe various elements, components, regions, layers, and / or sections. These elements, components, regions, Layers and / or sections should not be limited to these words. These terms may be used only for one element, component, region, layer, or section and another element, component, region, layer, or section. Unless the context clearly indicates otherwise, the terms "first," "second," "third," and "fourth" when used herein do not imply a sequence or order. .

The reprinting fixture described in this disclosure can provide stable support during the reloading process of the reprinted object (such as a wafer or a substrate), avoid damage caused by the reprinted object sliding or shifting, and can be applied to square objects without Causes depression in the middle. In addition, the reproduction fixture described in this disclosure can be manufactured at a lower cost.

FIG. 1 is a perspective view of a reprinting jig 10 according to an embodiment of the disclosure. As shown in FIG. 1, the reproduction fixture 10 may include a plurality of bearing members 100, a casing 200, a plurality of suction cups 300, a lifting portion 400 and a moving portion 500. FIG. 1 also shows a plurality of objects 600 to be reproduced contained in the housing 200. In some embodiments, the object 600 for retransmission may be a circular or rectangular wafer or substrate. In some embodiments, the object to be reproduced 600 may include glass or resin, for example, may include glass having a thickness of about 1.1 mm or resin having a thickness of about 0.8 mm. In some embodiments, the object 600 to be reproduced may have a total thickness of about 1.9 mm.

The plurality of bearing members 100 may be arranged at intervals along a first direction D1 (for example, a vertical direction). The supporting members 100 are separated from each other in the first direction D1. Each of the bearing members 100 may include at least three supporting structures 120 for supporting the object 600 to be reproduced during the box changing (or shell changing) process of the object 600 to be reproduced. The three supporting structures 120 may extend substantially parallel to each other, and may also include mutually uneven portions. As shown in FIG. 1, in this embodiment, the three supporting structures 120 extend along a second direction D2, and the second direction D2 may be perpendicular to the first direction D1. For example, the second direction D2 may be a horizontal direction. For example, the second direction may be the direction of the casing 200 relative to the bearing members 100.

The supporting structure 120 of each bearing member 100 may include a first supporting structure 121, a second supporting structure 122 and a third supporting structure 123. The first support structure 121, the second support structure 122, and the third support structure 123 may be arranged along a third direction D3 and connected by a connecting member 125, and the second support structure 122 is located between the first support structure 121 and the third Between the support structures 123. The third direction D3 may be perpendicular to the first direction D1 and the second direction D2, respectively. In the embodiment shown in FIG. 1, the length of the second support structure 122 may be smaller than the length of the first support structure 121 or the third support structure 123. In other embodiments, the first support structure 121, the second support structure 122, and the third support structure 123 may have the same length. In some embodiments, each of the three supporting structures 120 of any two of the plurality of bearing members 100 may be aligned with each other in the first direction D1. In addition, according to different embodiments, the first support structure 121, the second support structure 122, or the third support structure 123 may have a rectangular, circular, or other shaped cross section.

In some embodiments, each supporting component includes only two supporting structures (for example, only the supporting structure 121 and the supporting structure 123 shown in FIG. 1). However, for some load-bearing objects (such as wafers or substrates with larger sizes, thinner thicknesses, or rectangles), the two support structures cannot provide sufficient support, which can cause the middle portion of the load-bearing objects to sag or even cause The load object is broken. According to some embodiments of the present disclosure, with the design of at least three support structures 120, the middle support structure 122 can be used to support the central portion (such as the center or the center of mass) of the object 600 to be reproduced, so that each The carrying member 100 can provide better support for the object 600 to be transferred without causing deformation of the object 600 to be transferred (such as a wafer or a substrate having a larger size, a thinner thickness, or a rectangle). In some embodiments, according to different design requirements, each supporting component 100 may include N supporting structures, where N is an integer greater than 3. For example, each load-bearing component 100 may include four support structures arranged along the third direction D3 and connected by a connecting member 125, wherein the length of the two support structures located in the middle is shorter than those of the support structures on both sides.

As shown in FIG. 1, a plurality of suction cups 300 may be disposed on each of the supporting members 100 and used to support the object 600 to be retransmitted during the retransmission process of the object 600 to be retransmitted. The suction cup 300 may be a vacuum suction cup and may include a soft or elastic structure such as a rubber material. In this embodiment, the first support structure 121, the second support structure 122, and the third support structure 123 of the three support structures 120 of each bearing member 100 are respectively provided with two suction cups 300. It should be noted that this is only an example, and the arrangement manner and number of the plurality of suction cups 300 are not limited to this, as long as the suction cups 300 can provide stable support for the object 600 to be reproduced. For example, each support structure may have N suction cups 300, where N is a positive integer. As shown in FIG. 1, a suction cup 300 provided on the second support structure 122 may be farther from the housing 200 than a suction cup 300 provided on the first support structure 121 or a suction cup 300 provided on the third support structure 123. Alternatively, a suction cup 300 provided on the second support structure 122 may be closer to the connecting member 125 than a suction cup 300 provided on the first support structure 121 or a suction cup 300 provided on the third support structure 123. In some embodiments, a suction cup 300 disposed on the second support structure 122 is configured to be adjacent to or located at the center (or center of mass) of the object 600 to be reprinted during the reprinting process. In some embodiments, the geometric distribution centers of the plurality of suction cups 300 disposed on the same bearing member 100 are configured to be adjacent to or located at the center of the object 600 to be transferred during the transfer process.

In some embodiments, the reproduction fixture 10 may further include or be connected to an extraction motor or an air blowing motor (not shown), which may be connected to a plurality of suction cups 300 and configured to The plurality of suction cups 300 provide an adsorption force to the object 600 to be reproduced, thereby more stably supporting the object 600 to be reproduced during the reprinting process, and the object to be reproduced 600 can be prevented from sliding or falling off. In some embodiments, the adsorption force is approximately 1 kpa. In addition, through the soft or elastic structure of the suction cup 300, it can adapt to the deformation (such as warpage, etc.) of the object 600 to be reproduced during the reprinting process to generate appropriate deformation to support the object 600 to be reproduced more closely. .

As shown in FIG. 1, the lifting portion 400 may be connected to a plurality of bearing members 100 and configured to control the plurality of bearing members 100 to move up and down in, for example, the first direction D1, and then lift or lower the load to be reloaded during the reloading process. Object 600.

The housing 200 may be used for accommodating the object 600 to be reproduced, and is configured to move toward or away from the carrier member 100 along, for example, the second direction D2. The object to be reproduced 600 may be a rectangular substrate, for example, a rectangular substrate having a size of approximately 300 mm x 300 mm. The objects to be reproduced 600 may be arranged parallel to each other and separated from each other in the first direction D1. That is, the plurality of objects to be reproduced 600 may be arranged at intervals along the moving direction perpendicular to the casing 200. In some embodiments, the distance between any two adjacent objects 600 to be reproduced is at least 2 mm. In addition, in some embodiments, the volume of the housing 200 is not greater than 455 mm x 375 mm x 335 mm.

The moving part 500 is used to move the housing 200 relative to the lifting part 400 or the bearing member 100 in, for example, the second direction D2, and may include, for example, a slide rail or a pulley assembly. In some embodiments, the lifting portion 400 or the bearing member 100 may also move relative to the housing 200 in, for example, the second direction D2.

FIG. 2 is a bottom perspective view of a housing 200 of a repost fixture according to an embodiment of the disclosure. As shown in FIG. 2, a blowing part 220 and a returning part 240 (or a suction part) may be arranged along the second direction D2 and respectively disposed at two opposite ends of the housing 200. For example, referring to FIG. 1 at the same time, the air blowing part 220 may be disposed at a bottom end 200b of the housing 200 which is farther away from a first end of the bearing member 100 during retransmission. In contrast, the air return part 240 may be disposed at the housing 200 The bottom portion 200b is closer to a second end of the load-bearing component 100 during the transfer process. In some embodiments, as shown in FIG. 2, the blowing part 220 may include two blowing parts 221 and 222 arranged near both sides of the housing 200, and the return part 240 may include two times arranged near both sides of the housing 200.气 件 241 and 242. In some embodiments, the air blowing part 220 may be disposed so as not to overlap with the object to be reproduced or the retransmitted object contained in the housing 200 in, for example, the first direction D1, so as to avoid the gas provided by the air blowing part 220 directly. Obscured by the bottommost object to be reprinted or reprinted. In addition, the housing 200 may further include a cover 250 that can cover the housing 200 during a non-reproducing process to protect the object to be reprinted or the reprinted object contained therein. In some embodiments, the cover 250 may be omitted.

The air blowing part 220 may be used to provide a gas to the inside of the housing 200 (that is, a space for accommodating an object to be retransmitted or an object that has been retransmitted). The gas may be an inert or anti-oxidation gas, such as nitrogen. In some embodiments, the blowing part 220 provides the gas at a flow rate of 10 L / min to 30 L / min. In a preferred embodiment, the blowing part 220 supplies the gas at a flow rate of 20 L / min to 30 L / min. The air return portion 240 may be used to provide a suction force to the gas in the housing 200. In some embodiments, the flow rate of the gas provided by the air blowing unit 220 may be greater than the flow rate of the gas extracted by the air return unit 240. For example, the flow rate of the gas provided by the blowing part 220 may be 562 mm / s, and the flow rate of the extracted gas by the return part 240 may be 160 mm / s. In some embodiments, the air blowing part 220 may be a part of an external air supplier, and the air return part 240 may be a part of an external air suction motor. With the above configuration, an inert or anti-oxidizing gas can be caused to flow inside the casing 200, thereby preventing oxidation of objects inside the casing 200 and achieving a dust removal effect. In addition, the above design of the positions, flow rates, or flow rates of the blowing part 220 and the returning part 240 does not cause a turbulent flow of the inert or anti-oxidant gas inside the housing 200.

FIG. 3A to FIG. 3D illustrate a method of operating a reproduction fixture 10 according to an embodiment of the present disclosure.

Referring to FIG. 3A and FIG. 3B, a first housing 200 containing a plurality of objects 600 (which may be round or square wafers or substrates) to be reproduced is moved toward a plurality of supporting members 100 (for example, by a slide The moving part 500) of the rail assembly allows a plurality of objects 600 to be reproduced to be located above a bearing member 100, respectively. Then, the carrier members 100 are moved (for example, by a moving part 400) to lift the carrier members 100 to a plurality of objects to be retransmitted 600 (for example, each object to be retransmitted 600 is raised 2 mm), and then the plurality The objects to be reproduced 600 are separated from the first housing 200. In some embodiments, at least one suction cup 300 (for example, a vacuum suction cup) may be provided on each of the supporting members 100, and when each of the supporting members 100 is lifted, the suction cup 300 is attached to the object to be transferred 600 The lower surface provides a suction force to the object 600 to be reproduced through the suction cup 300. This step can more securely fix the object 600 to be reproduced on the carrying member 100.

Next, referring to FIG. 3C, the first housing 200 (for example, by a moving part 500 including a slide rail assembly) is moved away from the bearing members 100 and a plurality of objects to be reproduced 600 supported by the bearing members 100. . Next, referring to FIG. 3D, a second casing 200n is moved toward the supporting members 100, so that the object 600 for retransmission is located in the second casing 200n. Then, the supporting members 100 are moved (for example, by a moving part 400), so that the supporting members 100 are moved down the waiting-to-be-reproduced object 600 to place the waiting-to-be-reproduced object 600 in the second housing 200n for supporting One of the supporting structures (not shown) on the object 600 to be reproduced. In some embodiments, when the object 600 to be reproduced is placed in the second housing 200n, a step of releasing the suction force of the suction cup 300 to the object 600 to be reproduced may be included. Finally, the second housing 200n is moved away from the load-carrying members 100 to complete the reloading operation of the object 600 to be reloaded.

As used herein, the words "approximately", "substantially", "substantially" and "about" are used to describe and illustrate small variations. When used in conjunction with an event or situation, such words may refer to a situation in which the event or situation explicitly occurs and a situation in which the event or situation closely resembles. For example, when used in conjunction with numerical values, these terms can refer to a range of variation that is less than or equal to ± 10% of their value, such as less than or equal to ± 5%, less than or equal to ± 4%, less than or equal to ± 3%, Less than or equal to ± 2%, less than or equal to ± 1%, less than or equal to ± 0.5%, less than or equal to ± 0.1%, or less than or equal to ± 0.05%. For another example, "substantially orthogonal" can refer to a range of variation less than or equal to ± 10% of 90 ° (such as less than or equal to ± 5%, less than or equal to ± 4%, less than or equal to ± 3%, less than Or equal to ± 2%, less than or equal to ± 1%, less than or equal to ± 0.5%, less than or equal to ± 0.1%, or less than or equal to ± 0.05%).

In addition, quantities, ratios, and other numerical values are sometimes presented in a range format herein. It should be understood that such a range format is used for convenience and brevity, and should be flexibly understood not only to include values explicitly designated as the limits of the range, but also to cover all individual values or subranges within that range, It's like specifying each value and subrange explicitly.

Although the invention has been described and illustrated with reference to specific embodiments thereof, these descriptions and illustrations do not limit the invention. Those skilled in the art should understand that various changes can be made and replaced with equivalents without departing from the true spirit and scope of the invention as defined by the scope of the appended patent applications. Instructions may not necessarily be drawn to scale. Due to manufacturing processes and tolerances, there may be a difference between the artistic reproduction in the present invention and the actual installation. There may be other embodiments of the present invention that are not specifically described. This specification and drawings are to be regarded as illustrative rather than restrictive. Modifications may be made to adapt a particular situation, material, material composition, method, or process to the objectives, spirit, and scope of the present invention. All such modifications are intended to be within the scope of the patentable applications attached hereto. Although the methods disclosed herein have been described with reference to specific operations performed in a specific order, it should be understood that such operations may be combined, subdivided, or reordered to form equivalent methods without departing from the teachings of the present invention. . Therefore, unless specifically indicated herein, the order and grouping of operations is not a limitation of the present invention.

10‧‧‧ reproduced fixture

100‧‧‧carrying parts

120‧‧‧ support structure

121‧‧‧first support structure

122‧‧‧Second support structure

123‧‧‧Third support structure

125‧‧‧Connector

200‧‧‧shell

200n‧‧‧Second shell

200b‧‧‧ bottom

220‧‧‧Blowing section

221‧‧‧Blowing parts

222‧‧‧Blowing parts

240‧‧‧Air return department

241‧‧‧Return air parts

242‧‧‧Return air parts

250‧‧‧ cover

300‧‧‧ Suction cup

400‧‧‧ Lifting Department

500‧‧‧Mobile

600‧‧‧ Object to be reprinted

The aspects of the disclosure of this application can be best understood from the following detailed description and accompanying drawings. Note that according to industry standard implementations, various features are not drawn to scale. In fact, for clarity of discussion, the dimensions of various features may be arbitrarily increased or reduced. FIG. 1 is a perspective view of a reproduced jig according to an embodiment of the disclosure. FIG. 2 is a bottom perspective view of a housing of a reprinting jig according to an embodiment of the disclosure. FIG. 3A to FIG. 3D illustrate a method of operating a reproduction fixture according to an embodiment of the present disclosure.

Claims (20)

A reproduction fixture includes: a first load-bearing component comprising three supporting structures for supporting an object to be reproduced, the three supporting structures being substantially parallel to each other; and a shell for containing the to-be-reproduced object. As described in item 1 of the scope of the patent application, the reproduction fixture further includes a lifting portion connected to the first bearing member to control the first bearing member to move in a first direction, wherein the first direction and the three The extending direction of each support structure is substantially vertical. As described in item 1 of the patent application scope, the housing is configured to move along the second direction toward the first bearing member or away from the first bearing member. As described in item 1 of the scope of the patent application, the reproduction fixture further includes at least one vacuum chuck, and the vacuum chuck is provided on at least one support structure of the support structures to support the object to be reproduced. As described in item 1 of the scope of the patent application, the reproduction fixture further includes a plurality of vacuum suction cups, and the vacuum suction cups are respectively disposed on the three supporting structures to support the object to be reproduced. As described in the patent application scope item 4 or 5, the reprinting fixture further includes an extraction motor or an air blowing motor connected to the vacuum suction cup, and the extraction motor or the air blowing motor is configured to reprint the to-be-reproduced The object provides a suction force. The reprinting jig as described in item 1 of the scope of patent application, further comprising: an air blowing part provided at a first end in the housing, the air blowing part for supplying a gas to the inside of the housing; and A gas return portion is disposed at a second end in the casing, and the gas return portion is used to provide a suction force to the gas in the casing. As described in item 7 of the scope of the patent application, the fixture is used for accommodating a plurality of rectangular substrates, the rectangular substrates are parallel to each other and separated from each other in a first direction, and the blowing part and the Equal rectangular substrates do not overlap in the first direction. As described in item 1 of the scope of the patent application, the reproduction fixture further includes a second bearing member including three supporting structures, the three supporting structures being substantially parallel to each other, wherein the three supports of the second bearing member The structures are respectively aligned with the three supporting structures of the first bearing member. According to the reproduced jig described in item 1 of the scope of patent application, the three support structures include a first support structure, a second support structure, and a third support structure. The second support structure is located between the first support structure and the first support structure. Between the third support structure; the first support structure has a first vacuum chuck, the second support structure has a second vacuum chuck and the third support structure has a third vacuum chuck; and the second vacuum chuck It is farther from the casing than the first vacuum chuck or the third vacuum chuck. A reproduction fixture includes a load-bearing component, the load-bearing component includes: a first support structure; a second support structure; a third support structure; and a connecting member connecting the first support structure and the second support The structure and the third supporting structure, wherein the first supporting structure, the second supporting structure and the third supporting structure are parallel to each other, and the second supporting structure is located between the first supporting structure and the third supporting structure; A first suction cup located on the first support structure; a second suction cup located on the second support structure; and a third suction cup located on the third support structure, wherein the second suction cup is more than the The first suction cup or the third suction cup is close to the connecting member. As described in item 11 of the scope of the patent application, the fixture is reproduced, wherein the length of the second support structure is less than the length of the first support structure or the third support structure. As described in item 11 of the patent application scope, the second suction cup is configured to be adjacent to or located at a center of an object to be reproduced. A method for operating a reloading jig, comprising: moving toward a carrier member to receive a first housing of a rectangular substrate so that the rectangular substrate is above the carrier member; moving the carrier member to raise the carrier member Lifting the rectangular substrate; and moving the first casing away from the carrying member. The method according to item 14 of the scope of patent application, further comprising: moving a second housing toward the carrying member so that the rectangular substrate is located in the second housing; moving the carrying member so that the carrying member moves down the rectangle A substrate to place the rectangular substrate on a supporting structure in the second casing to support the rectangular substrate; and move the second casing away from the bearing member. The method according to item 14 of the scope of patent application, wherein the step of moving the supporting member so that the supporting member lifts the rectangular substrate further includes attaching at least one vacuum chuck provided on the supporting member below the rectangular substrate. The surface, and through the at least one vacuum chuck, providing a suction force to the rectangular substrate. The method according to item 14 of the scope of patent application, further comprising: providing a gas in the bottom portion of the first casing far from the end of the bearing member; and extracting the bottom portion of the first casing near the bottom of the bearing member. The gas. The method according to item 17 of the scope of patent application, wherein the gas is nitrogen, and the gas system is provided at a flow rate of 10 L / min to 30 L / min. The method according to item 18 of the scope of patent application, wherein the gas system is provided at a flow rate of 20L / min ~ 30L / min. The method according to item 17 of the scope of patent application, wherein the flow rate of the gas provided is greater than the flow rate of the extracted gas.