TWI652484B - Probe card on line needle tuning repair system and method thereof - Google Patents

Abstract

A method for repairing a needle on a probe card line, wherein the probe card is used for a predetermined time, and the step of adjusting the needle on the probe card line includes: capturing the first image information, and first image capturing unit Taking a first image information of a plurality of probes of a probe card, and providing the first image information to a control unit; capturing the second image information, and capturing, by the second image capturing unit, the probes a second image information, and the second image information is provided to the control unit; the amount of deformation is determined, and the control unit determines the deformation amount of each probe according to the first image information and the second image information. .

Description

Probe card line needle adjustment system and method thereof

A probe card line adjustment system and method thereof, in particular, an image capture unit is used to capture probe information of a probe card in different axial directions, and then the image information is interpreted to instantly find out The amount of deformation of the needle.

The current probe measuring machine uses the probe of the probe card to contact the object to be tested, and then the conductivity of the feedback is used to know whether the object to be tested is abnormal. However, when a repetitive error occurs in the same position after multiple measurements, the positional state of the reaction probe may be problematic at this time.

When there is a problem with the position of the probe, the staff will remove the probe card for position detection, which is time consuming and labor intensive.

Since the probe measurement is contacted by the probe and then measured by electrical input, it is a destructive measurement. If there is a problem with the position of the probe, it cannot be detected and prevented in time, and continues to be destructive. Measuring the object to be tested may cause the probe with the wrong position to be misplaced, and the object to be tested may cause irreversible damage.

In view of the above, an object of the present invention is to provide a probe card line needle maintenance system and a method thereof, which use an image capturing unit to capture probe information of a probe card in different axial directions, and then interpret the image information. The image information is used to instantly find the amount of deformation of the probe.

The technical means of the present invention is a method for repairing a needle on a probe card line. The probe card is used for a predetermined time. The steps of the method for adjusting the needle on the probe card line include: Taking a first image information, a first image capturing unit captures a first image information of a plurality of probes of a probe card, and provides the first image information to a control unit; capturing the second image Information, a second image capturing unit captures a second image information of the probes, and provides the second image information to the control unit; and finds a deformation amount, the control unit is configured according to the first image information The second image information is used to find the amount of deformation of each probe.

In an embodiment, a step of determining whether the amount of deformation exceeds a predetermined value, if not, the control unit does not operate; if so, the control unit sends a warning signal or to a cleaning procedure.

In one embodiment, the step of the cleaning process includes: starting a cleaning needle, the probe performing a step of pressing the cleaning module or detecting the electrical property, and feeding back the result detected by the step of detecting the electrical property to the control a unit for determining by the control unit; the pressing cleaning module is configured to press the cleaning module to remove the adhesive of the probes, or the probes press the cleaning module Adjusting the probes; the detecting electrical property is that the probe card is moved to a conductive module, the probes are in contact with the conductive module to detect the conductivity of the probes; and providing a negative pressure Giving the cleaning module to cause the negative pressure to adsorb the adhesive; determining whether the conductivity is normal; if not, performing the step of pressing the cleaning module; if yes, the probes are cleaned, The probe card completes the needle cleaning operation; if the cleaning mold tissue step is repeated a plurality of times, and the probes still fail to reach the normal conductivity, the control unit generates a warning signal, and the number of repetitions is A set value.

A probe card line adjustment service system, the probe card is used for a predetermined time, the probe card line needle adjustment system comprises: a control unit; a first image capture unit, which is connected to the signal Control unit; a second image capturing unit is connected to the control unit; wherein the first image capturing unit captures a first image information of the plurality of probes of the probe card, and the first image information is obtained Provided to the control unit; the second image capturing unit captures a second image information of the probes, and provides the second image information to the control unit; the control unit is configured according to the first image information The second image information is used to find the amount of deformation of each probe.

In an embodiment, the first image capturing unit and the second image capturing unit are disposed on a base, and the control unit controls the base to move in a horizontal manner, a vertical manner, or a swinging manner, so that the The first image capturing unit and the second image capturing unit move to the image capturing position.

In one embodiment, a cleaning module, a negative pressure module and a conductive module; the negative pressure module is coupled to the cleaning module; the conductive module is adjacent to the cleaning module; The needle system presses the cleaning module to remove the adhesive of the probes; the negative pressure module provides a negative pressure to the cleaning module to adsorb the adhesive; the probes contact the conductive The module is configured to detect the conductivity of the probes; the cleaning module is a porous material; the negative pressure module is coupled to the hole of the porous material; the conductive module is a conductive material.

In summary, the probe card line adjustment system and method thereof of the present invention can immediately detect by using the first image capturing unit and the second image capturing unit, thereby shortening the detection time and reducing the manual consumption. Furthermore, the present invention can instantly detect the deformation of the probe to cause the needle tip position to be wrong, so as to prevent the probe from being misplaced and the destructive object to be tested, and at the same time, it does not cause irreversible damage to the object to be tested.

10‧‧‧ Pedestal

11‧‧‧Second image capture unit

12‧‧‧First image capture unit

13‧‧‧Control unit

20‧‧‧ Probe Card

21‧‧‧ probe

211‧‧‧ needle tip

30‧‧‧cleaning module

300‧‧‧ hole

31‧‧‧Negative pressure module

32‧‧‧Electrical Module

S1~S9‧‧‧Steps

A‧‧‧ first predetermined value

B‧‧‧second predetermined value

1 is a schematic view of a probe card line adjustment system according to the present invention.

Figure 2 is a schematic diagram of a cleaning module, a negative pressure module and a conductive module.

FIG. 3 is a schematic flow chart of a method for repairing a needle on a probe card line according to the present invention.

Figure 4 is a schematic diagram of a first image information.

Figure 5 is a schematic diagram of a second image information.

Figure 6 is a schematic flow diagram of a cleaning procedure.

As shown in FIG. 1 , the present invention is a probe card line needle maintenance system having a base 10 , a first image capturing unit 12 , a second image capturing unit 11 and a control unit 13 . .

The first image capturing unit 12 and the second image capturing unit 11 are connected to the susceptor 10 . The pedestal 10, the first image capturing unit 12 and the second image capturing unit 11 are connected to the signal control unit 13.

The first image capturing unit 12 captures a first image information of the plurality of probes 21 of the probe card 20 and provides the first image information to the control unit 13 . The second image capturing unit 11 captures a second image information of the probes 21 and provides the second image information to the control unit 13 . The control unit 13 determines the amount of deformation of each probe 21 based on the first image information and the second image information.

Referring to FIG. 2 , the present invention further has a cleaning module 30 , a negative pressure module 31 and a conductive module 32 .

The cleaning module 30 has a plurality of holes 300. The cleaning module 30 is a porous material. The porous material is ceramic. The conductive module 32 is adjacent to the cleaning module 30. The conductive module 32 is a conductive material, and the conductive material is a gold plated block. The negative pressure module 31 is coupled to the hole 300 of the cleaning module 30.

The probe 21 presses the cleaning module 30 to remove the adherence of the probe 21. The negative pressure module 31 provides a negative pressure to the cleaning module 30 to adsorb the adhesive, thereby preventing the contamination from being sucked in the machine and causing contamination of the object to be tested. The probe 21 is in contact with the conductive module 32 to detect the conductivity of the probe.

Please refer to FIG. 3 and FIG. 1 together. The present invention is a method for repairing a needle on a probe card line, and the steps thereof include:

In step S1, the first image information is captured. A probe card 20 is moved to an image capturing position and waits for a product (object to be tested) to exit the image capturing position. The probe card 20 has a plurality of probes 21. The control unit 13 controls the base 10 to move in a horizontal manner, a vertical manner, or a swinging manner, and moves the first image capturing unit 12 and the second image capturing unit 11 to the image capturing position. The first image capturing unit 12 captures the first image information of the tip of the probe 21 of the probe card 20 in a first axial direction. The first image information is supplied to the control unit 13.

In step S2, the second image information is captured. The second image capturing unit 11 captures the second image information of the tip of the probe 21 of the probe card 20 in a second axial direction. The second image information is supplied to the control unit 13. As described above, the first image capturing unit 12 and the second image capturing unit 11 are moved to the image capturing position, and the first image information and the second image information are respectively captured on the tip of the probe 21 in different axial directions. .

In another embodiment, the first image capturing unit 12 and the second image capturing unit 11 can simultaneously perform image capturing on the tip of the probe 21; or the image capturing unit 11 first performs image capturing. Then, the first image capturing unit 12 performs image capturing.

In step S3, the amount of deformation is found. Referring to FIG. 4, the control unit 13 finds the amount of deformation of each probe 21 based on the first image information and the second image information of the needle tip 211. If further explained, the first image information indicates the position of the tip 211 of the probe 21 in the first axial direction. If the tip 211 of the probe 21 exceeds the first predetermined value A, the tip 211 is indicated. One axial direction has a deformation amount. If the needle tip 211 does not exceed the first predetermined value A, it indicates that the position of the needle tip 211 in the first axial direction is within the allowable range.

Referring to FIG. 5, the second image information shows the position of the tip 211 of the probes 21 in the second axial direction. If the tips 211 of the probes 21 exceed the second predetermined value B, It is indicated that the needle tip 211 has a deformation amount in the second axial direction. If the needle tip 211 does not exceed the second predetermined value B, it indicates that the position of the needle tip 211 in the second axial direction is still within the allowable range.

In step S4, it is judged whether the amount of deformation exceeds a predetermined value. If not, the control unit 13 does not operate; if so, the control unit 13 issues a warning signal or to a cleaning procedure. The alert signal can be a sound, light, flash, message or telecommunications message to inform the operator to perform a test or repair.

As mentioned above, please refer to the figures 6 and 2, if the cleaning procedure, the steps include:

In step S5, the cleaning needle is activated. The probe 21 performs a step of pressing the cleaning module (step S6) or detecting the electrical property (step S8), and returns the result detected by the step of detecting the electrical property (step S8) to the control unit 13 for The control unit 13 makes a decision.

In step S6, the cleaning module is pressed. The probe 21 of the probe card 20 presses the cleaning module 30 to remove the adhesive of the probe 21; or the probe 21 presses the cleaning module 30 to adjust the probe 21 in the first axial direction or the second axial direction. position.

In step S7, the negative pressure adsorbs the adherend. The negative pressure module 31 provides a negative pressure to the hole 300 of the cleaning module 30 to cause the hole 300 of the cleaning module 30 to adsorb the adherend.

In step S8, electrical properties are detected. The probe card 20 is moved to the conductive module 32, and the probe 21 is in contact with the conductive module 32 to detect the conductivity of the probe 21, and the result of detecting the electrical property is fed back to the control unit 13.

In step S9, it is judged whether or not the conductivity is normal. If not, the step of pressing the cleaning module in step S6 is performed; if yes, the probe 21 is cleaned, and the probe card 20 completes the needle cleaning operation; if the cleaning step is repeated a plurality of steps S6 In the step, when the probe 21 still fails to reach the normal conductivity, the control unit 13 generates an alert signal, and the number of times of repeating is a set value. The alert signal can be a sound, light, flash, message or telecommunications message.

In the foregoing embodiment, as shown in FIG. 4 or FIG. 5, the control unit 13 determines whether the position of the probe 211 exceeds the first predetermined value A or the second predetermined value B. However, in another embodiment, since the probe card 20 is known before the upper thread is used, the positions of the probes 21 thereon are known, and the relative positions of the probe tips 211 of the probes 21 relative to each other are also known. Therefore, the control unit 13 can also determine whether the relative positions of the respective needle tips 211 relative to each other exceed a predetermined value.

In the above, a probe card line adjustment system and method thereof are provided, wherein the first image capturing unit 12 and the second image capturing unit 11 are moved to an image capturing position, and each has a different axial direction. The first image information and the second image information are captured on the tip of the probe 21. The control unit 13 further uses the first image information and the second image information to find the amount of deformation or determine whether the amount of deformation exceeds a predetermined value.

If the amount of deformation exceeds a predetermined value, the probe 21 can be further adjusted by the cleaning module, or the adhering matter located on the probe 21 can be removed. In this way, when there is a problem in the positional state of the probe 21, the first image capturing unit 12 and the second image capturing unit 11 can be used for detection, thereby shortening the detection time and reducing the labor consumption. Furthermore, the present invention can detect and prevent it in real time to avoid destructive measurement of the object to be tested, and at the same time, it does not cause irreversible damage to the object to be tested.

The specific embodiments described above are only used to exemplify the features and functions of the present invention, and are not intended to limit the scope of the present invention, and may be used without departing from the spirit and scope of the invention. Equivalent changes and modifications made to the disclosure of the invention are still covered by the scope of the following claims.

Claims (10)

A method for repairing a needle on a probe card line, wherein the probe card is used for a predetermined time, and the step of adjusting the needle on the probe card line includes: capturing the first image information, and first image capturing unit Taking a first image information of a plurality of probes of a probe card, and providing the first image information to a control unit; capturing the second image information, and capturing, by the second image capturing unit, the probes a second image information, and the second image information is provided to the control unit; the amount of deformation is found, and the control unit determines the tip of each probe according to the first image information and the second image information. The first image information indicates the position of the probe tip in a first axial direction. If the tip of the probe exceeds a first predetermined value, the needle tip is in the first axial direction. The second image information indicates the position of the probe tip in a second axial direction. If the tip of the probe exceeds a second predetermined value, the needle tip is at the second The axial direction has a deformation amount. The method for adjusting the needle on the probe card line according to the first aspect of the patent application, further comprising the step of determining whether the deformation amount exceeds a predetermined value, and if not, the control unit does not operate; if yes, the control unit Send a warning signal or go to a cleaning procedure. The method for repairing a probe card on the probe card according to the first aspect of the invention, wherein the probe card is moved to an image capturing position, and waiting for a product to exit the image capturing position, the first image capturing The unit and the second image capturing unit move to the image capturing position, and the first image information and the second image information are respectively captured by the tips of the probes in different axial directions; In the step, the control unit determines the deformation amount of each probe according to the first image information of the needle tips and the second image information. The method for repairing a probe card on the probe card according to the first aspect of the invention, wherein the first image capturing unit and the second image capturing unit are disposed on a base, and the control unit controls the base The first image capturing unit and the second image capturing unit are moved to the image capturing position by moving in a horizontal manner, in a vertical manner, or in a swinging manner. The method for repairing a probe card on the probe card according to claim 2, wherein the step of the cleaning process comprises: starting a cleaning needle, the probe performing a step of pressing the cleaning module or detecting the electrical property, and Returning the result of the step of detecting the electrical property to the control unit for the control unit to make a judgment; pressing the cleaning module, the probes are pressed against a cleaning module to remove the probes Sticking, or the probes pressing the cleaning module to adjust the probes; the detecting electrical property is that the probe card is moved to a conductive module, and the probes are in contact with the conductive module Detecting the conductivity of the probes; providing a negative pressure to the cleaning module to cause the negative pressure to adsorb the adhesive; determining whether the conductivity is normal, and if not, executing the pressing cleaning module If the probes are cleaned, the probe card completes the needle cleaning operation; if the cleaning mold tissue step is repeated a plurality of times, the probes still fail to reach the normal conductivity, the control The unit generates a warning signal, and the number of repetitions is repeated Set a value. The method for repairing a probe card on the probe card according to the second or fourth aspect of the invention, wherein the first image information is an image of the probes in a first axis; the second image information is The probes are in a second axial image. A probe card line adjustment maintenance system, the probe card is used for a predetermined time, the probe card line needle adjustment system comprises: a control unit; a first image capturing unit connected to the control unit; and a second image capturing unit connected to the control unit; wherein the first image capturing unit captures a plurality of probe cards a first image information of the probes, and the first image information is provided to the control unit; the second image capturing unit captures a second image information of the probes, and the second image information is obtained Provided to the control unit; the control unit is configured to find the deformation amount of the tip of each probe according to the first image information and the second image information; the first image information shows the tip of the probes in a first An axial position state, if the tip of the probes exceeds a first predetermined value, it indicates that the needle tips have the deformation amount in the first axial direction; and the second image information indicates that the probe tips of the probes are in one The second axial position state, if the tip of the probes exceeds a second predetermined value, indicates that the needle tips have a deformation amount in the second axial direction. The probe card line adjustment system of claim 7, wherein the first image capturing unit and the second image capturing unit are disposed on a base, and the control unit controls the base The first image capturing unit and the second image capturing unit are moved to the image capturing position by moving in a horizontal manner, in a vertical manner, or in a swinging manner. The first image capturing unit captures the first image information of the tip of the probes; the second image capturing unit; The second image information of the needle tips is captured. For example, the probe card line needle repair system described in claim 7 further has a cleaning module, a negative pressure module and a conductive module; the negative pressure module is coupled to the cleaning module The conductive module is adjacent to the cleaning module; the probes press the cleaning module to remove the adhesive of the probes; the negative pressure module provides a negative pressure to the cleaning module Group to adsorb the adherent; the probe systems Contacting the conductive module to detect the conductivity of the probes; the cleaning module is a porous material; the negative pressure module is coupled to the hole of the porous material; the conductive module is a conductive Material.