TWI647546B - Detection design for preventing board offset - Google Patents

Abstract

An anti-plate bias detection design has a machine body, a bearing platform, a first detecting component, a second detecting component and a control device. The carrying platform is disposed in the machine body, and the exposed surface of the carrying platform is used to carry the component to be exposed. The first detecting component includes two first detectors, and the two first detectors can detect the first side of the component to be exposed. The second detecting component includes two second detectors, and the two second detectors can detect the second side of the component to be exposed. The control device can detect the result of the first side and the second side of the object to be exposed according to the first detecting component and the second detecting component, and determine whether the object to be exposed is correctly disposed on the carrying platform, and the control device The warning device can be activated to remind the user when the item to be exposed is not correctly disposed on the carrying platform.

Description

Anti-plate bias detection design

The invention relates to the design of an internal component of an exposure apparatus, in particular to an anti-plate bias detection design suitable for use in an exposure apparatus.

In the existing exposure apparatus, the position is corrected only before the board is fed into the exposure apparatus, and after the board enters the exposure apparatus, the exposure operation is directly performed. Therefore, the existing exposure apparatus is prone to the problem that the board enters the exposure apparatus, because the position of the board relative to the exposure film is deviated, resulting in the board being exposed, the whole piece cannot be used and must be scrapped. Accordingly, the inventors have diligently studied and cooperated with the application of the theory, and proposed a present invention which is rational in design and effective in improving the above problems.

The main object of the present invention is to provide an anti-plate bias detection design, which is suitable for use in an exposure apparatus. The anti-plate bias detection design is used to improve existing exposure equipment, and it is prone to positional deviation of the circuit board, resulting in exposure. The board must be scrapped.

In order to achieve the above object, the present invention provides an anti-plate bias detection design, which is suitable for an exposure apparatus, and the anti-plate bias detection design is used for exposing an object to be exposed, and the anti-plate bias detection design includes: The machine body, a carrying platform, a first detecting component, a second detecting component and a control device. The machine body is provided with an exposure device for exposing the object to be exposed. The carrying platform is disposed on the machine body, the carrying platform has an exposure surface, and the exposed surface is used for carrying the object to be exposed, and the two sides of the exposure surface perpendicular to each other are respectively defined as a first reference line and a second reference. line. The first detecting component includes two first detecting devices for detecting a position of a first side of the member to be exposed disposed on the exposure surface relative to the first reference line. The second detecting component includes two second detecting devices for detecting a position of a second side of the member to be exposed disposed on the exposure surface relative to the second reference line. Wherein the first side is perpendicular to the second side. The control device is electrically connected to the first detecting component and the second detecting component, and the control device can detect the result of the position of the first side of the object to be exposed relative to the first reference line according to the two first detectors, and The two second detectors detect the position of the second side of the object to be exposed relative to the second reference line to control the actuation of a warning device when the member to be exposed is not properly disposed on the exposure surface; The device can detect the result of the position of the first side of the object to be exposed relative to the first reference line according to the two first detectors, and the second side detector detects the second side of the object to be exposed As a result of the position of the second reference line, when the member to be exposed is correctly placed on the exposure surface, the exposure device is controlled to perform an exposure operation on the object to be exposed.

The anti-plate bias detection design of the invention can achieve the following effects: before the exposure work to be exposed, the first detection component and the second detection component can be used to detect the position of the exposure component, Determining whether the object to be exposed is correctly disposed on the carrying platform, and cooperates with the control device and the warning device to perform an exposure operation when determining that the object to be exposed is correctly disposed on the carrying platform; if the item to be exposed is not correctly set When the platform is on the carrying platform, the exposure operation is not performed, and the relevant personnel are immediately notified through the warning device. In this way, it is possible to greatly reduce the problem that the object to be exposed is not properly placed on the carrier platform, and the exposure operation is performed, and the exposed object to be exposed after exposure is unusable.

For a better understanding of the features and technical aspects of the present invention, reference should be made to the accompanying drawings.

1‧‧‧Anti-plate bias detection design

10‧‧‧ machine body

10a‧‧‧Exposure space

101‧‧‧Event opening

11‧‧‧Loading platform

111‧‧‧Exposure

12‧‧‧Upper frame device

121‧‧‧Fixed surface

13‧‧‧Exposure device

131‧‧‧Under exposure unit

132‧‧‧Upper exposure unit

14‧‧‧Control device

15‧‧‧First detection component

151‧‧‧First detector

152‧‧‧First detector

16‧‧‧Second detection component

161‧‧‧Second detector

162‧‧‧Second detector

17‧‧‧First adjustment component

171‧‧‧Connecting arm

172‧‧‧ drive

173‧‧‧Connecting arm

174‧‧‧ drive

175‧‧‧ Slider

176‧‧‧rails

177‧‧‧Limited components

18‧‧‧Second adjustment component

181‧‧‧Connecting arm

182‧‧‧ drive

183‧‧‧ Slider

184‧‧‧rails

185‧‧‧Limited components

S‧‧‧To be exposed

S1‧‧‧ first side

S2‧‧‧ second side

C1‧‧‧ first baseline

C2‧‧‧ second baseline

C21‧‧‧Auxiliary baseline

D1‧‧‧ separation distance

D2‧‧‧ separation distance

Q‧‧‧Connecting board

Fig. 1 is a schematic view showing the design of the anti-plate bias detection of the present invention.

2 is a carrying platform for the anti-plate bias detection design of the present invention and a first detection thereof Schematic diagram of the device.

FIG. 3 is a schematic diagram of the upper frame device, one of the first detectors and the second detecting component of the anti-plate bias detection design of the present invention.

4 is a schematic diagram of a load bearing platform, a top frame device, a first detecting component, and a second detecting component of the anti-plate bias detection design of the present invention.

FIG. 5 is a schematic diagram showing the installation position of the carrying platform, the first detecting component and the second detecting component of the anti-plate bias detection design of the present invention.

6 to FIG. 12 are schematic diagrams showing various states in which the member to be exposed is placed on the carrying platform of the anti-plate bias detection design of the present invention.

FIG. 13 is a schematic diagram of one of the first detector and the first adjustment component of the anti-plate bias detection design of the present invention.

FIG. 14 is a schematic diagram of one of the first detector and the first adjustment component of the anti-plate bias detection design of the present invention.

FIG. 15 is a schematic diagram of two second detectors and a second adjustment component of the anti-plate bias detection design of the present invention.

The embodiments of the anti-plate bias detection design of the present invention are described below by way of specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in the present specification. The present invention may be embodied or applied in various other specific embodiments, and various modifications and changes may be made without departing from the spirit and scope of the invention. Further, the drawings of the present invention are merely illustrative, and are not depicted in actual dimensions, that is, the actual dimensions of the related structures are not reflected, which will be described first. The following embodiments are intended to describe the present invention in further detail, but are not intended to limit the scope of the invention. In the following description, if reference is made to a specific drawing or as shown in the specific drawings, it is only used to emphasize that in the following description, the relevant content of the description is mostly in the specific drawing. However, it is not limited to the specific description in the following description.

Please refer to FIG. 1 , which is a schematic diagram of the anti-plate bias detection design of the present invention. this invention The anti-plate bias detection design is applied to an exposure apparatus, and in particular, it can be applied to an exposure apparatus for performing exposure work on a circuit board. The anti-plate bias detection design 1 includes a machine body 10, a carrier platform 11, an upper frame device 12, an exposure device 13, and a control device 14. The machine body 10 has an exposure space 10a therein. The appearance of the machine body 10 may be changed according to requirements. The machine body 10 may be an independent device, or may be connected to other machine devices, and is not limited thereto. The machine body 10 includes a movable opening 101 through which the user can perform maintenance, replacement, cleaning, and the like on the relevant components in the machine body 10.

Please refer to FIG. 1 and FIG. 2 together. FIG. 2 is a schematic diagram of the carrying platform. The carrying platform 11 is disposed in the machine body 10 and correspondingly located in the exposure space 10a. The carrying platform 11 has an exposed surface 111 for transmitting light, and the exposed surface 111 is for carrying an object to be exposed (for example, a circuit board). In practical applications, the exposure surface 111 may have a plurality of air venting holes (not shown), and the plurality of air venting holes are correspondingly connected to at least one air extracting device (not shown), through the air extracting device and the plurality of air venting holes. The cooperation can be performed by attaching the member to be exposed on the exposure surface 111 to the exposure surface 111. The lower exposure unit 131 of the exposure device 13 is disposed in the machine body 10, and the exposure light beam emitted by the lower exposure unit 131 can be illuminated by the exposure surface 111 to the object to be exposed.

As shown in FIGS. 1, 3, and 4, the upper frame device 12 is disposed in the machine body 10, and the upper frame device 12 is located in the exposure space 10a. The upper frame device 12 has a fixed surface 121 for transmitting light, and the fixing surface 121 is for setting an exposure film. An upper exposure unit 132 of the exposure device 13 is disposed in the machine body 10, and the exposure light beam emitted by the upper exposure unit 132 can be illuminated on the exposure film through the fixing surface 121. In various embodiments, the anti-plate bias detection design 1 may include only the lower exposure unit 131 and not the upper exposure unit 132.

The control device 14 is electrically connected to the exposure device 13, and the control device 14 can control the upper exposure unit 132 and the lower exposure unit 131 to expose the exposure object by using the exposure beam emitted by the upper exposure unit 132 and the lower exposure unit 131. operation. In practical applications, the control device 14 may be disposed in the machine body 10 The computer, the processor, etc., or the control device 14 may be a computer independent of the machine body 10, and is not limited herein.

Referring to FIG. 2 to FIG. 5 , the exposure surface 111 has a rectangular shape, and the two sides of the exposure surface 111 perpendicular to each other are defined as a first reference line C1 and a second reference line C2 . The anti-board detection design 1 further includes a first detecting component 15 and a second detecting component 16. The first detecting component 15 includes two first detectors 151 and 152, and the second detecting component 16 includes two second detectors 161 and 162. The two first detectors 151, 152 and the two second detectors 161, 162 are electrically connected to the control device 14, respectively, and the control device 14 can control the two first detectors 151, 152 and two The detectors 161, 162 are configured to determine whether the member to be exposed S (shown in FIG. 6) disposed on the carrier platform 11 is correctly set.

Further, the two first detectors 151, 152 may be respectively disposed on the carrying platform 11 and the upper frame device 12, and the two first detectors 151, 152 are not disposed facing each other, and two The first detectors 151, 152 are disposed substantially adjacent to the first reference line C1. In a practical application, the setting positions of the two first detectors 151 and 152 of the first detecting component 15 relative to the first reference line C1 may be designed according to requirements, for example, two first detections. The 151, 152 may be at a distance of no more than 0.5 cm in the direction of the second reference line C2, or alternatively, one of the first detectors 151, 152 may be correspondingly located on the first reference line C1, and the other first The detectors 151, 152 are in the direction of the second reference line C2, and the distance from the first reference line C1 is not more than 0.5 cm.

Each of the first detectors 151 and 152 can generate a detection signal according to whether the object S to be exposed is detected, and the control device 14 can detect the detection signals generated by the two first detectors 151 and 152. To determine the position of the first side S1 (shown in FIG. 6) of the member S to be exposed relative to the first reference line C1. For example, each of the first detectors 151, 152 may be a proximity sensor. When the first detectors 151, 152 do not detect the member S to be exposed, the first detectors 151, 152 may be Any signal is generated, and when the first detector 151, 152 detects the item S to be exposed, it may be the corresponding product. Give birth to a first signal. Of course, the first detectors 151 and 152 detect the to-be-exposed component S, and the manner of generating the signal is not limited thereto. In different embodiments, the first detectors 151 and 152 may also be used. When the component S to be exposed is not detected, a detection signal is generated correspondingly, and when the component S to be exposed is detected, another detection signal is generated correspondingly.

In practical applications, the two first detectors 151 and 152 are electrically connected to the control device 14 independently, and the control device 14 transmits the first detections according to the two first detectors 151 and 152. The test signal is used to determine a first deviation amount of the first side S1 of the member S to be exposed relative to the first reference line C1. In different embodiments, the results of the detection by the two first detectors 151 and 152 may be integrated into a single result signal through the microprocessor to the control device 14, and the control device 14 can directly The result signal determines the position of the first side S1 of the member S to be exposed relative to the first reference line C1.

In a practical application, the first detector 151 disposed on the carrying platform 11 can also be used to detect whether the component S to be exposed is disposed on the exposure surface 111, thereby, when the control device 14 is disposed on the carrying platform. When the first detector 151 detects the result of the detection by the first detector 151, the control device 14 can control the warning device (not shown, for example, a warning light, a warning speaker, etc.). To remind the user that the item to be exposed is not provided on the carrying platform 11. In contrast, the first detector 152 disposed on the upper frame device 12 may be configured to detect whether the exposure film is disposed on the fixed surface 121, thereby, when the control device 14 is disposed according to the upper frame device 12 When the first detector 152 determines that the upper frame device 12 is not provided with the exposure film, the control device 14 can control the operation of the warning device to remind the user.

Specifically, the position of each of the first detectors 151 and 152 relative to the first reference line C1 may be different according to the detection manner of the first detectors 151 and 152. For example, as shown in FIG. 6, the first detector 151 may be correspondingly disposed on the first reference line C1, and the first detector 152 may be located on the first reference line C1 in the positive Y-axis direction of the figure. The location of the move. And each first detector 151 (152) may transmit the first to the control device 14 when the first side S1 of the member S to be exposed S is detected (ie, a portion of each of the first detectors 151 (152) is shielded by the member S to be exposed) A detection signal; when each of the first detectors 151 (152) is completely blocked by the object to be exposed S, the second detection signal may be sent to the control device 14; each of the first detectors 151 (152) When the device S is not completely obscured, the third detection signal may be transmitted to the control device 14.

As shown in FIG. 6, when the first side S1 of the member to be exposed S is substantially aligned with the first reference line C1, the control device 14 will receive the first type of control signal transmitted from the first detector 151. (meaning that the first side S1 is detected) and the second detection signal transmitted from the first detector 152 (ie, the first side S1 is detected), thereby controlling The device 14 can thereby determine that the first side S1 of the member S to be exposed S is in the correct position with respect to the first reference line C1.

As shown in FIG. 7, when the control device 14 receives the two third detection signals transmitted by the two first detectors 151, 152 (that is, the first side S1 or the to-be-exposure is not detected) In S), the control device 14 can determine that the first side S1 of the member S to be exposed is offset from the first reference line C1 in the positive Y-axis direction of the figure, and thus may represent the carrier platform 11 The member S to be exposed is set, or the member to be exposed S is placed at a position that is completely incorrect on the carrying platform 11.

As shown in FIG. 8, when the control device 14 receives the two second detection signals transmitted by the two first detectors 151, 152 (that is, only the device to be exposed S is detected but not detected) When the first side S1), the control device 14 can determine that the first side S1 of the member S to be exposed is offset from the first reference line C1 in the negative Y-axis direction in the figure.

As shown in FIG. 9, when an angle is formed between the first side S1 of the member S to be exposed and the first reference line C1 (ie, the member S to be exposed is rotated counterclockwise with respect to the carrier platform 11), the two first Detectors The detectors 151, 152 will transmit two first detection signals to the control device 14, so that the control device 14 will know that the two first detectors 151, 152 detect the first to be exposed S One side S1, so that it can be determined that the first side S1 of the member to be exposed S is obliquely disposed with respect to the first reference line C1, and the member to be exposed S is not It is correctly disposed on the carrying platform 11.

It should be noted that the first side detectors 151 and 152 are used to detect the first side S1 of the object to be exposed S, and correspondingly transmit different types of detection signals to the control device 14 in the embodiment. The two first detectors 151, 152 must be non-simultaneously located on the first reference line C1, and the two first detectors 151, 152 may be one corresponding to the first reference line C1, and the other is offset from the first A reference line C1 is disposed, or the two first detectors 151, 152 may be respectively offset toward both sides of the first reference line C1.

As shown in FIG. 2, FIG. 4, FIG. 5 and FIG. 13, in different applications, the first detecting component 15 may be connected to a first adjusting component 17, and the first adjusting component 17 can be controlled by the control device 14 to Corresponding to changing the distance of the at least one first detector 151, 152 relative to the first reference line C1, or the first adjusting component 17 may also be used to change the two first detectors 151, 152 to the first reference line C1. The distance in the direction of the distance D1.

For example, the first adjustment component 17 can include two connection arms 171, 173 and two drivers 172, 174. The first detector 151 disposed on the carrying platform 11 may be connected to the connecting arm 171, and the connecting arm 171 is connected to the driver 172. The driver 172 can be controlled by the control device 14 to drive the connecting arm 171 to operate, thereby making the first The detector 151 approaches or moves away from the first reference line C1 toward the second reference line C2.

As shown in FIG. 3, FIG. 5 and FIG. 14, the first detector 152 disposed on the upper frame device 12 may be a connection connecting arm 173, and the connecting arm 173 is connected to the driver 174, and the driver 174 can be controlled by the control device 14. The first detector 152 is moved in the direction of the carrying platform 11 through the connecting arm 173.

In addition, the first adjusting component 17 can also include a slider 175, a sliding rail 176 and a limiting member 177. The first detector 152 disposed on the upper frame device 12 may also be connected to the slider 175, and the slider 175 is slidably disposed on the slide rail 176, and the slide rail 176 is correspondingly fixedly disposed on the upper frame device. 12, and slider 175 The slide rail 176 can also be coupled to the limit member 177, which can be operated by the user to prevent the slider 175 from moving relative to the slide rail 176. The slide rail 176 may be disposed along the first reference line C1, and the user may control the slider 175 to move along the slide rail 176 by manual or electronic control, so that the first detector 151 is along the first reference. The direction of the line C1 is moved, and after the user moves the first detector 151 to the desired position, the user can manually or electronically control the limiting member 177 to cause the slider 175 to The slide rails 176 are fixed to each other, whereby the slider 175 can no longer be moved relative to the slide rails 176. Of course, the slider 175, the slide rail 176, and the limiting member 177 may also be applied to the first detector 151 disposed on the carrying platform 11.

Referring to FIG. 3, FIG. 4, FIG. 5 and FIG. 15, the two second detectors 161, 162 may be disposed on the upper frame device 12, and the two second detectors 161, 162 can be used to detect The position of the second side S2 of the exposure member S relative to a second reference line C2 of the carrying platform 11 is measured. The second side S2 and the first side S1 are perpendicular to each other, and the second reference line C2 and the first reference line C1 are perpendicular to each other.

The actual operation manners of the two second detectors 161 and 162 are substantially the same as the two first detectors 151 and 152, and the difference is only that the two first detectors 151 and 152 are used for detecting The position of the first side S1 of the exposure member S relative to the first reference line C1 is measured, and the two second detectors 161 and 162 are used to detect the second side S2 of the member S to be exposed relative to The position of the second reference line C2 is as follows. Only the parts that need to be particularly emphasized in the second detectors 161 and 162 will be described below. For the remaining parts that are not described in detail, refer to the foregoing for the first detectors 151 and 152. Description.

As shown in FIG. 3, FIG. 5 and FIG. 15, the two second detectors 161, 162 may be disposed together with the upper frame device 12, and the two second detectors 161, 162 are substantially adjacent to the second. Baseline C2 is set. In a practical application, the positions of the two second detectors 161 and 162 of the second detecting component 16 relative to the second reference line C2 may be designed according to requirements, for example, two second detections. The 161, 162 may be at a distance D2 of not more than 0.5 cm in the direction of the first reference line C1, or One of the second detectors 161, 162 may be correspondingly located on the second reference line C2, and the distance of the other second detectors 161, 162 in the direction of the first reference line C1 from the second reference line C2 is not More than 0.5 cm.

In practical applications, the two second detectors 161, 162 can be electrically connected to the control device 14 independently, and the control device 14 transmits the second second detection according to the two second detectors 161, 162. The test signal is used to determine a second deviation amount of the second side S2 of the member S to be exposed relative to the second reference line C2.

As shown in FIG. 3, FIG. 4, FIG. 5 and FIG. 15, in different applications, the second detecting component 16 can be connected to a second adjusting component 18, and the second adjusting component 18 can be controlled by the control device 14 to Corresponding to changing the distance of the at least one second detector 161, 162 relative to the second reference line C2, or the second adjusting component 18 may also be used to change the two second detectors 161, 162 to the second reference line C2. The distance in the direction of the distance D2.

For example, as shown in FIG. 2, FIG. 3 and FIG. 15, the second adjusting component 18 can include a connecting arm 181 and a driver 182. The second detectors 161 and 162 disposed on the upper frame device 12 are connected to the connecting arm 181, and the connecting arm 181 is connected to the driver 182. The driver 182 can be controlled by the control device 14 to drive the connecting arm 181 to operate, thereby making the second The detectors 161, 162 are closer to or away from the second reference line C2 in the direction of the first reference line C1.

In this embodiment, the two second detectors 161, 162 are disposed on a linkage plate Q, and the connection plate Q is connected to the connection arm 181, and the driver 182 can be simultaneously adjusted through the connection arm 181 and the connection plate Q. The position of the two second detectors 161, 162 relative to the second reference line C2, but not limited thereto. In different implementations, the two second detectors 161 and 162 may also independently connect different connecting arms and drivers, which are not limited herein.

In addition, the second adjusting component 18 can also include a slider 183, a slide rail 184, and a limiting member 185. The second detectors 161, 162 disposed on the upper frame device 12 may be connected to the slider 183, and the slider 183 is slidably disposed on the slide rails. 184, the slide rail 184 is correspondingly fixedly disposed on the upper frame device 12, and a limiting member 185 is disposed between the slider 183 and the slide rail 184, and the user can pass the operation limiting member 185 so that the slider 183 cannot be Moving relative to the slide rail 184. The slide rails 184 may be disposed along the second reference line C2, and the user may control the slider 183 to move along the slide rails 184 by manual or electronic control, so that the second detectors 161, 162 are along the first The direction of the second reference line C2 is moved, and after the user moves the second detectors 161, 162 to the desired position, the user can operate the limiting member 185 to fix by manual or electronic control. The slider 183 prevents the slider 183 from moving relative to the slide rail 184.

The position of each of the second detectors 161 and 162 relative to the second reference line C2 may be different according to the detection manner of the second detectors 161 and 162 and the size of the member to be exposed S. In the following description, the size of the member to be exposed S is significantly smaller than the size of the exposed surface 111, but is not limited thereto. When the size of the member to be exposed S is substantially equal to the size of the exposure surface 111, the two second detectors 161, 162 may not be adjusted by the second adjustment component 18, and the two second detectors 161, 162 It may be used to detect the position of the second side S2 of the member S to be exposed relative to the second reference line C2. In other words, in the following description, the second side S2 of the exposure member S is treated relative to the second reference line C2 after the two second detectors 161, 162 are first adjusted by the second adjustment unit 18. The position of an auxiliary reference line C21 is detected.

Specifically, please refer to FIG. 6 and FIG. 10 to FIG. 12, each second detector 161 (162) may be detecting the second side S2 of the member S to be exposed, that is, each second Detector. When the portion of the detector 161 (162) is shielded by the object to be exposed S, the first type of detection signal is transmitted to the control device 14, and when the second detectors 161 (162) are completely obscured by the member to be exposed S, The second detection signal is sent to the control device 14. When the second detector 161 (162) is completely unmasked by the exposure device S, the third detection signal may be transmitted to the control device 14.

As shown in FIG. 6, when the second side S2 of the member S to be exposed is substantially parallel to the second reference line When C2 is set in parallel, the control device 14 will receive the first type of control signal transmitted from the second detector 161 (ie, the second side S2 is detected), and the second detector 162. The third detection signal transmitted (that is, the second side S2 is not detected and the item S to be exposed is not detected), whereby the control device 14 can determine the second item to be exposed S The side S2 is at the correct position with respect to the second reference line C2.

As shown in FIG. 10, when the control device 14 receives the two third detection signals transmitted by the two second detectors 161, 162 (that is, the second side S2 is not detected and is not detected. When the device S) is to be exposed, the control device 14 can determine that the second side S2 of the member S to be exposed is offset from the second reference line C2 in the positive X-axis direction of the figure, and thus may represent the bearing. The item S to be exposed is not provided on the stage 11, or the item S to be exposed is placed at a completely incorrect position on the carrying platform 11.

As shown in FIG. 11, when the control device 14 receives the two second detection signals transmitted by the two second detectors 161, 162 (that is, only the component S to be exposed is detected but not detected) When the second side S2), the control device 14 can determine that the second side S2 of the member S to be exposed is offset from the second reference line C2 in the negative Y-axis direction in the figure.

As shown in FIG. 12, when an angle is formed between the second side S2 of the member S to be exposed and the second reference line C2 (ie, the member S to be exposed is rotated clockwise with respect to the carrier platform 11), the two second Detectors The detectors 161, 162 will transmit two second detection signals to the control device 14, so that the control device 14 will know that the two second detectors 161, 162 detect the first to be exposed S The two sides S2, so that the second side S2 of the member S to be exposed S is obliquely disposed with respect to the second reference line C2, and the member to be exposed S is not correctly disposed on the carrying platform 11.

It should be noted that, by using the two second detectors 161 and 162, the second side S2 of the to-be-exposed component S is detected, and correspondingly transmitting different types of detection signals to the control device 14, The two second detectors 161, 162 must be non-simultaneously located on the second reference line C2, and the two second detectors 161, 162 may be one corresponding to the second reference line C2, and the other is offset. Two reference lines C2 are set, or two second detectors 161 and 162 may be respectively connected to the second reference line C2. The directions on both sides are deviated.

In summary, the anti-plate bias detection design of the present invention uses two first detectors 151, 152 and two second detectors 161, 162 in conjunction with the control device 14, which can detect the to-be-exposed parts. When S is disposed on the carrier platform 11, it is presented in the correct placement state as shown in FIG. 6, and the placement state as shown in FIG. 7 offset from the positive Y-axis direction of the coordinate system in the figure, as shown in FIG. The placement state of the negative coordinate Y-axis direction of the middle coordinate system, the placement state of the counterclockwise deflection as shown in FIG. 9, and the placement state shifted to the positive X-axis direction of the coordinate system in the figure as shown in FIG. 10, such as Figure 11 shows the state of placement in the negative X-axis direction of the coordinate system in the figure, or the state of counter-clockwise deflection as shown in Figure 12, so that the control device 14 can be exposed according to the different states described above. When the member S is correctly disposed on the carrying platform 11, the exposure device 13 is correspondingly controlled to perform an exposure operation on the object to be exposed S; in contrast, the control device 14 determines that the member to be exposed S is presented in any of the states of FIGS. 7 to 12. The control device 14 can be a control alert device to remind the relevant use The device to be exposed S is not correctly disposed on the carrying platform 11. Of course, in the actual application, when the control device 14 determines that the member to be exposed S is not correctly disposed on the carrying platform 11, the control device 14 may also be a control related carrier device ( For example, a robot arm having a suction cup, etc., to adjust the position of the member S to be exposed relative to the carrying platform 11, or to reposition the member to be exposed S.

As described above, the anti-plate bias detection design 1 of the present invention can perform position detection on the exposure member S before performing the exposure operation on the exposure member S, thereby greatly reducing the position to be exposed S due to incorrect placement. A problem that cannot be used after exposure occurs.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Therefore, equivalent technical changes made by using the present specification and the contents of the drawings are included in the protection scope of the present invention. .

Claims (10)

An anti-plate bias detection design for exposing an object to be exposed, the anti-plate bias detection design comprising: a machine body, which is provided with an exposure device, and the exposure device is configured to The exposure member is exposed; a carrying platform is disposed on the machine body, the carrying platform has an exposure surface, the exposure surface is used to carry the object to be exposed, and the two sides of the exposure surface are perpendicular to each other The sides are respectively defined as a first reference line and a second reference line; the exposure beam generated by the exposure device can be irradiated to the object to be exposed through the exposure surface; a first detecting component including Two first detectors for detecting a position of a first side of the object to be exposed disposed on the exposure surface relative to the first reference line; a second detecting component The second detector is configured to detect a position of a second side of the object to be exposed disposed on the exposure surface relative to the second reference line; The first side is perpendicular to the second side; a control device The first detection component and the second detection component are electrically connected to the first detection component, and the control device can detect the first side of the to-be-exposed component relative to the two first detectors. As a result of the position of the first reference line, and the results of the two second detectors detecting the position of the second side of the member to be exposed relative to the second reference line, Controlling an alarm device to act when the object to be exposed is not correctly disposed on the exposure surface; the control device is capable of detecting the first portion of the object to be exposed according to the two first detectors As a result of the position of one side relative to the first reference line, and the two second detectors detect the position of the second side of the member to be exposed relative to the second reference line Result in the stated When the object to be exposed is correctly disposed on the exposure surface, the exposure device is controlled to perform an exposure operation on the object to be exposed. The anti-plate bias detection design of claim 1, wherein the distance between the two first detectors of the first detecting component in the direction of the second reference line is not more than 0.5 cm. The anti-plate bias detection design of claim 1, wherein the distance between the two second detectors of the second detecting component in the direction of the first reference line is not more than 0.5 cm. The anti-plate bias detection design of claim 1, wherein the two first detectors of the first detecting component can respectively detect the to-be-exposed component disposed on the exposure surface The first side of the first detection signal is generated correspondingly, and the control device can determine the first side of the object to be exposed according to the two first detection signals. a first amount of deviation of the edge relative to the first reference line. The anti-plate bias detection design of claim 1, wherein the two second detectors of the second detecting component are respectively capable of detecting the to-be-exposed component disposed on the exposure surface The second side of the second detection signal is generated correspondingly, and the control device can determine the second side of the to-be-exposed component according to the two second detection signals. a second amount of deviation of the edge relative to the second reference line. The anti-plate bias detection design according to claim 1, wherein the anti-plate bias detection design further includes an upper frame device disposed on the machine body, and the upper frame device is correspondingly located in the Above the carrying platform, the upper frame device can be controlled by the control device to abut the side of the carrying platform having the exposed surface; two of the first detectors are respectively disposed on the carrying a platform and the upper frame device. The anti-plate bias detection design according to claim 6, wherein the first detector disposed on the carrying platform can be used to detect whether the to-be-exposed component is disposed on the carrying platform; When the control device determines that the carrying platform is not provided with the to-be-exposed component according to the result detected by the first detector disposed on the carrying platform, the control device controls the corresponding control The warning device is activated. The anti-plate bias detection design of claim 1, wherein the first detecting component is coupled to a first adjusting component, and the first adjusting component is controllable by the control device to correspondingly change at least one The distance of the first detector relative to the first reference line. The anti-plate bias detection design of claim 1, wherein the second detecting component is coupled to a second adjusting component, and the second adjusting component is controllable by the control device to correspondingly change at least one The distance between the second detector and the second reference line; the two second detecting components that are adjusted by the second adjusting component can be used to detect the second component to be exposed. The position of the side edge relative to an auxiliary reference line parallel to the second reference line. The anti-plate bias detection design of claim 1, wherein one of the first detectors is corresponding to the first reference line, and the other of the first detectors is to the second reference line. The direction of the deviation from the first reference line is not more than 0.5 cm; one of the second detectors is correspondingly located on the second reference line, and the other of the second detectors is directed to the first reference line The direction of the deviation from the second reference line is no more than 0.5 cm.