TWI629477B - Method for producing a multiphase matrix sensor and sensor thus obtained - Google Patents

Abstract

A method for manufacturing a multi-phase matrix sensor, comprising the steps A1 to A5: (A1) providing a substrate; (A2) forming an insulating layer on the substrate; (A3) forming at least one detecting electrode on the insulating layer (A4) forming a blocking portion on the insulating layer, the blocking portion surrounding the detecting electrode, and forming an accommodating space on the detecting electrode; and (A5) placing a sensing portion in the blocking portion The accommodating space and a reaction sensing film are formed, thereby obtaining a multi-phase matrix sensor. The reaction sensing film includes a carbon-containing porous material and a sensing material attached to the carbon-containing porous material, and the carbon-containing porous material is produced by a foaming emulsification method.

Description

Method for manufacturing multiphase matrix sensor and sensor obtained thereby

The invention relates to a multi-phase matrix sensor, in particular to a multi-phase matrix sensor with low manufacturing cost and simple process.

Multiphase sensors generally refer to devices that detect the physical or chemical properties of gases, liquids, or solids. When a probe is used to detect a sample, such devices are tested for physical or chemical changes according to their design principles. In turn, an identification signal corresponding to the sample is generated. Multiphase sensors are widely used in various fields such as medical, industrial, scientific, and environmental protection because of their sensitivity and accuracy.

For example, the Republic of China Invention Patent Publication No. I458464 proposes that a respirator capable of early detection and identification of pneumonia type includes a spout end line and a gas identification device for analyzing a patient by using a gas identification wafer. a mixed gas exhaled by the exhalation end line to identify the type of pneumonia the patient suffers from, the gas identification chip system comprising a sensor array, a sensor interface circuit, a random neural network chip, and a memory And a microcontroller that couples the sensor interface circuit, the random neural network chip and the memory and controls its operation. In this way, the type of pneumonia can be detected and identified early to provide more effective treatment.

The prior art mostly uses semiconductor processes to fabricate such sensor arrays, but such sensor arrays are often complicated in architecture, and the manufacturing process of semiconductor processes is expensive, thus limiting the commercial development of such sensors.

The main object of the present invention is to solve the problem that the sensor array structure of the conventional sensor is complicated, and the semiconductor process has a large time and high manufacturing cost.

In order to achieve the above object, the present invention provides a method of manufacturing a multi-phase matrix sensor, comprising the steps of:

Step A1: providing a substrate;

Step A2: forming an insulating layer on the substrate;

Step A3: forming at least one detecting electrode on the insulating layer;

Step A4: forming a blocking portion on the insulating layer, the blocking portion surrounding the detecting electrode, and forming an accommodating space on the detecting electrode;

Step A5: placing a sensing portion in the accommodating space in the blocking portion and forming a reaction sensing film to obtain a multi-phase matrix sensor;

Wherein, the reaction sensing film comprises a carbon-containing porous material and a sensing material attached to the carbon-containing porous material, and the carbon-containing porous material is produced by a foaming emulsification method.

The invention also relates to a multiphase matrix sensor made by the foregoing method.

Therefore, the efficacies achieved by the present invention over the prior art are that the multi-phase matrix sensor fabricated by the method of the present invention is relatively simple in structure and convenient to manufacture, and does not require semiconductor equipment or processes. And the input cost is low, suitable for mass production.

The detailed description and technical content of the present invention will now be described as follows:

1 is a schematic cross-sectional view of a multi-phase matrix sensor according to the present invention. The multi-phase matrix sensor mainly includes: a substrate 10; an insulating layer 30 formed on the substrate 10; a detecting electrode 40, The barrier layer 50 is formed on the insulating layer 30 and includes a plurality of upwardly extending barrier walls 51. The barrier walls 51 surround the detecting electrode 40 on the detecting electrode 40. An accommodating space 52 is formed, and a sensing portion 60 is disposed in the accommodating space 52 to form a reaction sensing film 61.

In an embodiment, when the detected target is a gas, the multi-phase matrix sensor can further sandwich a heating layer 20 between the substrate 10 and the insulating layer 30. The degassing effect is achieved by heating the heating layer 20 to a certain temperature to drive out the gas remaining in the apparatus. The material of the heating layer 20 can be used as long as it can be heated so that the temperature of the heating layer 20 is higher than room temperature. For example, the heating layer 20 can be formed of indium tin oxide; the so-called "certain temperature" can be practical. The situation may be selected (for example, considering the heating temperature range of the materials used), for example, it may be heated to a temperature range of 30 ° C to 500 ° C, preferably between 30 ° C and 350 ° C. However, the method of degassing is not limited to the above, and for example, the gas remaining in the apparatus can be driven out by injecting an inert gas, and the degassing effect can also be achieved.

The manufacturing method of the multi-phase matrix sensor having the above structure will be described in detail below.

First embodiment

Please refer to the schematic diagram of the process flow of FIG. 2 in combination with the cross-sectional schematic diagram of the multi-phase matrix sensor of FIG. 1. The manufacturing method of the multi-phase matrix sensor according to the first embodiment of the present invention includes the following steps:

Step A1: providing a substrate 10, the material of the substrate 10 may be selected from the group consisting of glass, indium tin oxide (ITO), and polyethylene terephthalate (PET) or a combination thereof.

Step A2: forming an insulating layer 30 on the substrate 10. The material of the insulating layer 30 may be polyethylene terephthalate. In this embodiment, after the heating layer 20 is formed on the substrate 10, the insulating layer 30 is formed, and the heating layer 20 is interposed between the substrate 10 and the insulating layer 30. The insulating layer 30 prevents the current of the heating layer 20 from being conducted to the substrate 10.

Step A3: Form at least one detecting electrode 40 on the insulating layer 30. For the structure of the detecting electrode 40, refer to FIG. 3 . The detecting electrode 40 includes a first electrode 401 and a second electrode 402. The first electrode 401 includes a first strip electrode 4011 and a first finger electrode 4012, and the second electrode 402 includes a second strip. An electrode 4021 and a second finger electrode 4022, the first strip electrode 4011 and the second strip electrode 4021 are arranged in a first axial direction and parallel; and the first finger electrode 4012 is along a second An axial direction extends from the first strip electrode 4011 toward the second strip electrode 4021, and the second finger electrode 4022 is along the second axial direction from the second strip electrode 4021 toward the first strip electrode The first finger electrode 4012 is parallel to the second finger electrode 4022 and arranged alternately with each other. The first axial direction and the second axial direction are different. Specifically, in the embodiment, the first axial direction and the second axial direction are perpendicular to each other. The material of the detecting electrode 40 may be selected from indium tin oxide, copper, nickel, chromium, iron, tungsten, phosphorus, cobalt, silver or a combination thereof. In addition, in the multi-phase matrix sensor of the present invention, the number of the detecting electrodes 40 can be adjusted according to actual needs without particular limitation. For example, the number of the detecting electrodes 40 in each of the multi-phase matrix sensors can be four, and depending on the process, the material, or the purpose of controlling the resistance, the distance between them will follow. And there are different designs. In general, the multiphase matrix sensors may be spaced apart from each other by 1 μm to 750 μm, preferably from 1 μm to 30 μm, although the invention is not limited thereto.

Step A4: forming a blocking portion 50 on the insulating layer 30, the blocking portion 50 surrounding the detecting electrode 40, and forming an accommodating space 52 on the detecting electrode 40, wherein the blocking portion 50 includes a plurality of distances The barrier layer 51 extends upwardly from the insulating layer 30, and the barrier wall 51 surrounds the accommodating space 52.

Step A5: A sensing portion 60 is placed in the accommodating space 52 in the blocking portion 50 and a reaction sensing film 61 is formed, thereby producing a multi-phase matrix sensor.

In this embodiment, the reaction sensing film 61 comprises a carbon-containing porous material and a sensing material attached to the carbon-containing porous material, wherein the carbon-containing porous material is made by a foaming emulsification method. Please refer to the steps in Figure 4:

Step B1: mixing a first solvent, a first carbon material and a first surfactant to form a first dispersion. Wherein, the first solvent is water, the first carbon material may be a carbon nanotube, a graphene, a nano carbon sheet or a combination thereof, and the first surfactant may be polyvinylpyrrolidone (Poly(vinylpyrrolidone), PVP), Hexadecyl trimethyl ammonium, acrylic sodium salt polymer (ASAP), sodium ligninsulfonate and its lignin derivatives, carboxymethyl Carboxymethylcellulose sodium (CMC), sodium dodecyl sulfate (SDS), ester peptide, saponin, hexadecyl trimethyl ammonium bromide, Sodium laureth sulfate (SLES), polyethylene conjugated polymer or a combination thereof, the first dispersion formed after mixing has a range of 10 cps to 100000 cps Preferably, it is between 2000 cps and 50,000 cps, and more preferably from 2000 cps to 30,000 cps.

Step B2: mixing a second solvent, a second carbon material and a second surfactant to form a second dispersion. In this embodiment, the second solvent is an organic solvent, and may be N-methyl-2-pyrrolidone (NMP), dibasic ester (DBE), dimethyl Dimethyl acetamide (DMAC), ethanol, methanol, butanone, diethylene glycol monobutyl ether, ester alcohol, polyethylene glycol (polyethylene glycol, PEG), glycerol, ethylene glycol, tetrahydrofuran (THF), toluene or a combination thereof. The second carbon material may be carbon tube, carbon black, graphene, carbon sheet, carbon fiber and wood fiber, and the second surfactant may be polyvinylpyrrolidone, cellulose acetate, ethylene vinyl alcohol. Ethylene-vinyl alcohol copolymer (EVOH), ethyl cellulose (EC), nitrocellulose (NC), acylpeptide, beta-amyloid (1-40), Human galectin-1 or human albumin) or a combination thereof.

Step B3: mixing the first dispersion liquid with the second dispersion liquid and performing a stirring process to form a first slurry, so that the first dispersion liquid and the second dispersion liquid are mutually soluble to generate an emulsification effect, and then The first slurry is placed in a mold. The agitation process can be blade agitation, planetary agitation, drum agitation, or other conventional agitation methods. And when the first dispersion is mutually miscible with the second dispersion to produce an emulsification, it helps to create pores in the first carbon material and the second carbon material, and at the same time fix the porous structure. However, in order to increase the porosity, a punching agent may be further added in this step, and the puncture agent to be used is not particularly limited, and may be polyethylene glycol (PEG), glycerol or ethylene glycol (polyethylene glycol). Ethylene glycerol, EG), lithium chloride, benzoic acid, oxalic acid, nai pills, yeast powder, etc.

The stirring process of the above step B3 may further comprise the step B3-1 of performing a defoaming process (for example, a vacuum defoaming process) on the first slurry, so that the first slurry is between 0.0001 torr and 1 torr. The pressure between them is preferably 0.01 torr to 1 torr, more preferably 0.01 torr to 0.1 torr, and is continued for 10 minutes to 600 minutes, more preferably for 10 minutes to 300 minutes, thereby removing the presence of the first slurry. The air inside the material.

Step B4: performing a forming process on the first slurry so that the first slurry is at a forming temperature of 70 ° C, thereby removing the first solvent and the second solvent to form a carbon-containing porous material. The carbon-containing porous material is mostly composed of a resin. In this embodiment, the forming process can be selected according to actual conditions without particular limitation, and can be a heat drying, a freeze drying or a vacuum drying, and more specifically, a heat treatment system can be used to make the carbon. The porous material is subjected to the forming process at a drying temperature of between 40 ° C and 400 ° C. Alternatively, the carbon-containing porous material may be subjected to a pressure between 0.0001 torr and 600 torr by a reduced pressure treatment. Thereby, the forming process is performed. After step B4, the method further includes the following step B4-1, wherein the carbon-containing porous material is subjected to a surface treatment process, such as acidification treatment, plasma treatment, hydrogen peroxide treatment or high temperature modification, to increase the carbon content. The activity of porous materials.

Step B5: performing a first drying process on the carbon-containing porous material such that the carbon-containing porous material is at a drying temperature between 70 ° C and 400 ° C.

In the above steps B1 to B5, the carbon-containing porous material having different thicknesses can be produced by changing the viscosity, for example, when the viscosity of the first dispersion is between 2000 cps and 10000 cps, the thickness of the porous material is It is between 0.5 cm and 4 cm, which can be adjusted according to requirements; in addition, whether or not the defoaming process is performed also affects properties such as porosity, and the porosity of the carbonaceous porous material obtained by the defoaming process is about Between 20% and 50%, on the other hand, the carbon-containing porous material obtained without the defoaming process has a porosity of between about 40% and 80%.

In short, the foaming emulsification method in the present invention is carried out by forming two or more kinds of dispersion liquids and mixing the dispersion liquids. For example, in the above embodiment, a first dispersion liquid and a second dispersion liquid are formed, so that a first carbon material and a second carbon material are respectively in the first dispersion liquid and the second dispersion liquid. Fully dispersed and created holes. Subsequently, when the first dispersion is mixed with the second dispersion to produce an emulsification, the emulsification contributes to the creation of pores in the first carbon material and the second carbon material, while fixing the porous structure, which is advantageous Forming. Compared with the conventional process, the present invention can perform the carbonization process and generate voids without high-temperature equipment, thereby reducing the process cost. On the other hand, the use of emulsification to generate pores enables the carbon-containing porous material to have high conductivity and high specific surface area characteristics.

After step B5, steps B6 and B7 are performed to obtain the reaction sensing film 61:

Step B6: mixing a sensing material and a dispersing agent to form a sensing solution, and coating the sensing solution on the surface of the carbon-containing porous material through a custom process, wherein the sensing material is The weight percentage in the sensing solution can be between 0.1 wt.% and 50 wt.%, and the drop custom process can be a micro titrator titration or an inkjet print titration.

In this embodiment, the sensing material may be carboxymethylcellulose ammonium (CMC-NH4), polystyrene (PS), poly(ethylene adipate), polyethylene oxide (polyethylene oxide). Poly(ethylene oxide), PEO), polycaprolactone, polyethylene glycol, poly(vinylbenzyl chloride, PVBC), methyl vinyl ether-maleic acid alternating copolymer (poly(methyl vinyl ether-alt-maleic acide)), poly(4-vinylphenol-co-methyl methacrylate), ethyl cellulose, vinylidene chloride-acrylonitrile Copolymer (poly(vinylidene chloride-co-acrylonitrile), PVdcAN), polyepichlorohydrin (PECH), polyethyleneimine, peptide, human galactose agglutination, styrene-allyl alcohol copolymerization (styrene/allyl alcohol copolymer, SAA), poly(ethylene-co-vinyl acetate), polyisobutylene (PIB), acrylonitrile-butadiene copolymer poly(acrylonitrile- Co-butadiene), poly(4-vinylpyridine), hyprothenol Hydroxypropyl methyl cellulose, polyisoprene, poly(alpha-methylstyrene), 3-chloro-1,2-epoxypropane-ethylene oxide copolymer (poly (epichlorohydrin-co-ethylene oxide), poly(vinyl butyral-co-vinyl alcohol-vinyl acetate), polystyrene (PS), lignosulfonate (lignin), fat Peptide, poly(vinyl proplonate), polyvinylpyrrolidone, poly(dimer acid-co-alkyl polyamine), poly(4-ethylphenol) (poly(diethyl)) 4-vinylphenol)), poly(2-hydroxyethyl methacrylate), poly(vinyl chloride-co-vinyl acetate), cellulose triacetate (cellulose) Triacetate), poly(vinyl stearate), poly(bisphenol A carbonate, PC), poly(vinylidene fluoride, PVDF) Or a combination thereof.

In this embodiment, the dispersing agent may be water, N-methylpyrrolidone, methyl ethyl ketone (MEK), isopropyl alcohol (IPA), dimethylformamide (dimethylformamide, DMAC), ethanol, tetrahydrofuran, propylene glycol monomethyl ether acetate (PMA), dimethyl sulfoxide (DMSO) or a combination thereof.

Step B7: performing a second drying process on the sensing solution, so that the sensing solution is at a drying temperature between 50 ° C and 380 ° C, thereby removing the dispersing agent, so that the sensing material is cured in the containing The surface of the porous material of carbon forms the reaction sensing film 61 having an adsorption capacity.

Second embodiment

The structure of the multi-phase matrix sensor according to the second embodiment of the present invention is the same as that of the first embodiment. The difference lies in the manufacturing method of the reaction sensing film 61. Please refer to the flow of the reaction sensing film manufacturing step in FIG. Schematic and description of the steps below.

Step C1: mixing a first solvent, a first carbon material and a first surfactant to form a first dispersion; mixing a second solvent, a second carbon material and a second surfactant to form a first solvent a second dispersion; and mixing a third solvent with a polymer material to form a third dispersion.

In this embodiment, the first solvent, the first carbon material, the first surfactant, the second solvent, the second carbon used to form the first dispersion and the second dispersion may be selected. The composition of the material and the second surfactant is the same as that of the first embodiment, and will not be further described herein.

Regarding the third dispersion, the third solvent may be water, N-methylpyrrolidone, dimethyl nylon, dimethylacetamide, ester alcohol, polyethylene glycol, glycerin or a combination thereof. The polymer material may be polyvinylidene fluoride, polytetrafluoroethene (PTFE), polyacrylonitrile (PAN), phenolic resins, BT resin (bismaleimide Triazine Resin), aluminum. Gel, cerium oxide gel, conductive polymer, polyethylene glycol, azo compound, sulfonium compound, nitroso compound, carbonate or a combination thereof.

Step C2: performing a stirring process to mix the first dispersion liquid, the second dispersion liquid, and the third dispersion liquid to form a second slurry, and placing the second slurry into a mold. As in the first embodiment, in the embodiment, the stirring process can be performed by blade stirring, planetary stirring or drum stirring, and a pore punching agent can be added to increase the porosity, and the mixed second slurry has a medium. It is between 10 cps and 100,000 cps, preferably between 2000 cps and 50,000 cps, and more preferably between 2000 cps and 30,000 cps. In addition, after the stirring process is completed, the step C2-1 may be further included, and the second slurry is subjected to a defoaming process (for example, a vacuum defoaming process), so that the second slurry is between 0.0001 torr. The pressure between 1 torr, preferably 0.01 torr to 1 torr, more preferably 0.01 torr to 0.1 torr, and for 10 minutes to 600 minutes, thereby removing air present inside the second slurry.

Step C3: performing a forming process on the second slurry, so that the second slurry is at a forming temperature of 70 ° C, thereby removing the first solvent, the second solvent and the third solvent, thereby forming a carbonaceous Porous material. The carbon-containing porous material is mostly composed of a resin. In this embodiment, the forming process may be heat drying, freeze drying or reduced pressure drying. More specifically, the heat treatment system may be used to place the carbon containing porous material between 40 ° C and 400 ° C. The forming process is carried out by drying the temperature; the forming process may be carried out by subjecting the carbon-containing porous material to a pressure of between 0.0001 torr and 600 torr by a reduced pressure treatment. After the step C3, the step C3-1 may further comprise performing a surface treatment process, such as acidification treatment, plasma treatment, hydrogen peroxide treatment or high temperature modification, on the carbon-containing porous material to increase the carbon content. The activity of porous materials.

Step C4: performing a third drying process on the carbon-containing porous material such that the carbon-containing porous material is at a drying temperature between 70 ° C and 400 ° C.

Step C5: mixing a sensing material and a dispersing agent to form a sensing solution, and coating the sensing solution on a surface of one of the carbon-containing porous materials through a custom process, wherein the sensing material is The weight percentage in the sensing solution is between 0.1 wt.% and 50 wt.%, and the custom flow can be a micro titrator titration or an inkjet print titration. In the present embodiment, the sensing material and the dispersion for dispersing the sensing material are the same as those of the first embodiment, and therefore will not be further described.

Step C6: performing a fourth drying process on the sensing solution, so that the sensing solution is at a drying temperature between 50 ° C and 380 ° C to remove the dispersing agent, and curing the sensing material to the carbon-containing material. One of the porous materials is surfaced and formed with the reaction sensing film 61 having an adsorption capacity, thereby obtaining a multiphase matrix sensor.

In addition, the ordinal numbers preceding the elements or steps, such as "first", "second", etc., are for convenience of description, so that those skilled in the art can understand the present invention more, the ordinal number "first", "Second" and the like are not intended to limit the order or content of use. For example, the "first drying process" and the "second drying process" represent two drying processes, and the conditions or contents of the processes may be the same or different from each other; similarly, the "first solvent" and the "second solvent" It is only used to represent the use of solvents in different steps, and the types of solvents may be the same or different from each other.

In the actual application, please refer to FIG. 1 , the reaction sensing film 61 of the sensing unit 60 is configured to adsorb a sample to be tested and perform a physical reaction with the detecting electrode 40 to generate the detecting electrode 40 . A pair of identification signals that should be tested. In addition, in the present invention, the detecting electrode 40 can be used in addition to the above embodiment, and a Hall sensor can be used. When the reaction sensing film 61 adsorbs the object to be tested, the physical reaction is performed, and then the borrowing is performed. A Hall sensor detects a carrier concentration generated by the Hall effect due to a Hall effect, so that the Hall sensor generates a pair of identification signals that should be tested. In the present invention, different detecting units and detecting means can be used in accordance with the requirements of the present invention, and are not limited to the examples of the present invention.

In the present invention, since the multi-phase matrix sensor respectively has adsorption liquid, gas or solid, the plurality of multi-phase matrix sensors can be arranged in an array or a pattern, and the multi-phase matrix sensing can also be performed. The device is fabricated on the same substrate. In this embodiment, the plurality of multi-phase matrix sensors can be arranged in an array of 8×4, preferably spaced apart from each other by 100 μm, so that the detection area is greatly improved and the sampling rate is increased. For fast and accurate detection. In addition, in the present invention, the identification signal can be captured through a chip, and the algorithm can be used to distinguish a liquid, a gas, a solid or a mixture, such as an Artificial Neural Network (ANN).

In summary, the present invention has the following features:

1. The multiphase matrix sensor obtained by the method of the invention has the advantages of simple structure, does not need to use semiconductor process or thin film technology, is convenient to manufacture and has low cost, and is suitable for mass production.

2. The carbon-containing porous material of the multi-phase matrix sensor of the present invention is made of a carbon material, so that it has the advantages of being less rusting, robust in structure, and high in stability.

3. The reaction sensing film of the multiphase matrix sensor of the present invention is coated with the sensing material on the surface of the carbon-containing porous material through a custom process and has the adsorption capability, The porous material of carbon has a large specific surface area, and therefore the reaction sensing film that is relatively coated on the surface of the carbon-containing porous material also has a large specific surface area, so the adsorption capacity is superior to the conventional one. Detector.

4. The present invention can detect the diversity of the multi-phase matrix sensor by forming different reaction sensing films to detect gas, liquid or solid, so as to improve the accuracy of the detection result.

5. The first dispersion of the present invention, when mixed with the second dispersion, will produce an emulsification which facilitates the creation of voids in the first carbon material and the second carbon material while simultaneously fixing the porous The structure is advantageous for its forming. Compared with the conventional process, the present invention can perform the carbonization process and generate voids without high-temperature equipment, and can reduce the process cost.

The present invention has been described in detail above, but the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the scope of the invention. That is, the equivalent changes and modifications made by the scope of the present application should remain within the scope of the patent of the present invention.

A1, A2, A3, A4, A5: Steps B1, B2, B3, B3-1, B4, B4-1, B5, B6, B7: Steps C1, C2, C2-1, C3, C3-1, C4, C5, C6: Step 10: Substrate 20: Heating layer 30: Insulating layer 40: Detection electrode 401: First electrode 4011: First strip electrode 4012: First finger electrode 402: Second electrode 4021: Second strip Shape electrode 4022: second finger electrode 50: barrier portion 51: barrier wall 52: accommodation space 60: sensing portion 61: reaction sensing film

FIG. 1 is a schematic cross-sectional view of a multi-phase matrix sensor according to an embodiment of the present invention. FIG. 2 is a schematic flow chart showing the steps of the first embodiment of the present invention. FIG. 3 is a schematic diagram of a detecting electrode according to an embodiment of the invention. FIG. 4 is a schematic flow chart showing the steps of the reaction sensing film manufacturing process of the first embodiment of the present invention. FIG. 5 is a schematic flow chart showing a step of preparing a reaction sensing film according to a second embodiment of the present invention.

Claims (9)

A method for manufacturing a multi-phase matrix sensor includes the following steps: Step A1: providing a substrate; Step A2: forming an insulating layer on the substrate; Step A3: forming at least one detecting electrode on the insulating layer; Step A4: forming a blocking portion on the insulating layer, the blocking portion surrounding the detecting electrode, and forming an accommodating space on the detecting electrode; and step A5: placing a sensing portion in the blocking portion The accommodating space and forming a reaction sensing film to obtain a multi-phase matrix sensor; wherein the reaction sensing film comprises a carbon-containing porous material and a sensing material attached to the carbon-containing porous material The carbon-containing porous material is prepared by a foaming emulsification method, and the foaming emulsification method comprises the following steps: Step B1: mixing a first solvent, a first carbon material and a first surfactant to form a a first dispersion, wherein the first solvent is water, and the first surfactant is selected from the group consisting of polyvinylpyrrolidone, cetyltrimethylammonium bromide, sodium polyacrylate, lignosulfonate and Lignin derivative, carboxymethyl a group consisting of cellulose sodium salt, sodium lauryl sulfate, ester peptide, saponin, cetyltrimethylammonium bromide, sodium lauryl polyoxyether sulfate, and polyethylene conjugated polymer; Step B2: mixing a second solvent, a second carbon material and a second surfactant to form a second dispersion, wherein the second solvent is selected from the group consisting of N-methylpyrrolidone and dimethyl nylon a group consisting of dimethylacetamide, ethanol, methanol, methyl ethyl ketone, diethylene glycol monobutyl ether, ester alcohol, polyethylene glycol, glycerin, ethylene glycol, tetrahydrofuran and toluene, the second interface The active agent is selected from the group consisting of polyvinylpyrrolidone, cellulose acetate, ethylene-vinyl alcohol copolymer, ethyl cellulose, nitrocellulose, lipopeptide and peptide; Step B3: mixing the first dispersion liquid with the second dispersion liquid and performing a stirring process to form a first slurry, so that the first dispersion liquid and the second dispersion liquid are mutually soluble to generate an emulsification effect, and then Putting the first slurry into a mold; Step B4: performing a forming process on the first slurry to remove the first solvent and the second solvent to form the carbon-containing porous material; and the step B5: performing a drying process on the carbon-containing porous material. The method for manufacturing a multiphase matrix sensor according to claim 1, wherein the first carbon material is selected from the group consisting of a carbon nanotube, a graphene, and a nano carbon sheet; The carbon material is selected from the group consisting of carbon tubes, carbon black, graphene, carbon sheets, carbon fibers, and wood fibers; and the sensing material is selected from the group consisting of carboxymethyl cellulose ammonium, polystyrene, Polyethylene adipate, polyethylene oxide, polycaprolactone, polyethylene glycol, polyvinyl benzyl chloride, methyl vinyl ether-maleic acid alternating copolymer, vinyl phenol-methyl methacrylate copolymerization , ethyl cellulose, vinylidene chloride-acrylonitrile copolymer, polyepichlorohydrin, polyethyleneimine, peptide, human galactose agglutination, styrene-allyl alcohol copolymer, ethylene-vinyl acetate copolymerization , polyisobutylene, acrylonitrile-butadiene copolymer, poly(4-vinylpyrimidine), hypromellose, polyisoprene, polyalphamethylstyrene, 3-chloro-1,2-ring Oxypropane-ethylene oxide copolymer, polyvinyl butyral, polystyrene, lignosulfonate, lipopeptide, polypropionic acid, polyethyl b Pyrrolidone, dimer acid-alkyl polyamine copolymer, poly(4-ethylphenol), polyhydroxyethyl methacrylate, vinyl chloride-vinyl acetate copolymer, cellulose triacetate, poly(ethylene stearic acid A group consisting of esters, polybisphenol A carbonates, and polyvinylidene fluoride. The method for manufacturing a multi-phase matrix sensor according to claim 1, wherein a step B3-1 is further included between the step B3 and the step B4: performing a defoaming process on the first slurry, The defoaming process is such that the first slurry is at a pressure of between 0.0001 torr and 1 torr. The method for manufacturing a multiphase matrix sensor according to claim 1, wherein a step B4-1 is further included between the step B4 and the step B5: increasing the activity of the carbon-containing porous material. In the surface treatment process, the surface treatment process is selected from an acidification treatment, a plasma treatment, a hydrogen peroxide treatment, and a high temperature modification treatment. The method of manufacturing a multiphase matrix sensor according to claim 1, wherein the drying process is such that the carbon-containing porous material is at a drying temperature of between 70 ° C and 400 ° C. The method for manufacturing a multiphase matrix sensor according to claim 1, wherein the forming process is a heat treatment or a pressure reduction process. The method of manufacturing a multiphase matrix sensor according to claim 6, wherein the heat treatment is such that the carbon-containing porous material is at a drying temperature of between 40 ° C and 400 ° C. The method of manufacturing a multiphase matrix sensor according to claim 6, wherein the reduced pressure treatment causes the carbonaceous porous material to be at a pressure of between 0.0001 torr and 600 torr. A multiphase matrix sensor is produced by the method of any one of claims 1 to 8.