TWI599759B - An optical inspection device - Google Patents
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Description
本發明為有關一種光學檢測裝置,尤指一種兼具高自由度及彈性化的光學檢測裝置。The present invention relates to an optical detecting device, and more particularly to an optical detecting device having both high degree of freedom and elasticity.
自動光學檢測(Automated Optical Inspection,簡稱AOI)常見於製造業中,係利用光學照明配合影像處理和辨識系統來判斷產品是否有瑕疵,甚可進一步判斷瑕疵的種類或成因,而為品管之一重要環節。Automated Optical Inspection (AOI) is commonly used in manufacturing. It uses optical lighting combined with image processing and identification systems to determine whether a product is flawed. It can be used to further determine the type or cause of cockroaches. Important link.
傳統的自動光學檢測技術如中華民國發明專利公開第200801473號,提出一種COF/TCP之自動光學檢測系統,係用以檢測捲帶上等距排列之COF/TCP,包括一捲帶裝置、一影像擷取裝、一資料儲存/比對裝置、一背光投射裝置及一警示裝置,該捲帶裝置包括一用以釋放一捲帶之釋放輪及一與釋放輪相對設置以回收該捲帶之回收輪,一檢測區供該捲帶於其上定速移動;該影像擷取裝置設於該捲帶之一端,供擷取該檢測區上至少一個COF/TCP之影像;該資料儲存/比對裝置與該影像擷取裝置連接,供儲存該影像擷取裝置所預先擷取之標準影像資料,以與該COF/TCP之影像進行比對;該警示裝置與該資料儲存/比對裝置連接,於該資料儲存/比對裝置比對而檢測到不合格之COF/TCP時,提供現場警示。或如中華民國發明專利公告第I230255號,提出一種自動光學檢查機,用以檢查一工件,其包含一直立平台及少一個電荷耦合元件,該直立平台大體上垂直於地面,用以直立的支撐該工件;該電荷耦合元件用以對該工件進行光學檢查。The conventional automatic optical detection technology, such as the Republic of China Invention Patent Publication No. 200801473, proposes an automatic optical detection system for COF/TCP, which is used for detecting COF/TCP arranged equidistantly on a tape, including a tape winding device and an image. a loading device, a data storage/comparison device, a backlight projection device and a warning device, the tape winding device comprising a release wheel for releasing a tape and a recycling device disposed opposite to the release wheel for recycling the tape a wheel, a detection zone for the tape to be moved at a constant speed; the image capturing device is disposed at one end of the tape for capturing at least one COF/TCP image on the detection zone; the data storage/alignment The device is connected to the image capturing device for storing standard image data pre-captured by the image capturing device for comparison with the image of the COF/TCP; the warning device is connected to the data storage/comparison device. On-site alerts are provided when the data storage/comparison device is compared and a non-conforming COF/TCP is detected. Or, as disclosed in the Republic of China Invention Patent Publication No. I230255, an automatic optical inspection machine for inspecting a workpiece comprising an upright platform and one less charge coupled element, the upright platform being substantially perpendicular to the ground for upright support The workpiece; the charge coupled component is used to optically inspect the workpiece.
其中,中華民國發明專利公開第200801473號中的背光投射裝置和影像擷取裝置係以固定的方式架設,並無法移動,使得檢測的範圍、方式或待測物的種類均有所限制,並不利於應用;而中華民國發明專利公告第I230255號,其中的電荷耦合元件雖可移動,但僅限於單方向的移動,因此,使其可應用的範疇亦受限。於以上先前技術之中,對於使用者來說,當欲更換待測物,或調整檢測角度或方法時,需購置不同類型的自動光學檢測設備才能達成;而對供應者來說,面對不同的客戶需求,亦需要針對其機構重新進行調整和設計,才能符合客戶需求。因此,現有之自動光學檢測設備係缺乏彈性化的功能,不利於產業的發展。The backlight projection device and the image capturing device in the Republic of China Invention Patent Publication No. 200801473 are erected in a fixed manner and cannot be moved, so that the scope, manner or type of the object to be tested are limited, and it is not advantageous. In the application, and the Republic of China Invention Patent Publication No. I230255, the charge-coupled element is movable, but is limited to single-direction movement, and therefore, the scope of application thereof is also limited. In the above prior art, for the user, when the object to be tested is to be replaced, or the detection angle or method is adjusted, different types of automatic optical detecting equipment are required to be obtained; and for the supplier, the face is different. The customer needs also need to be re-adjusted and designed for their organization to meet customer needs. Therefore, the existing automatic optical inspection equipment lacks the flexibility function, which is not conducive to the development of the industry.
本發明的主要目的,在於解決習知光學檢測裝置的光學或影像擷取元件係採固定或單向移動式的設計,而造成光學檢測裝置的自由度較低且不具有彈性化的調整的問題。The main object of the present invention is to solve the problem that the optical or image capturing component of the conventional optical detecting device adopts a fixed or one-way moving design, resulting in a low degree of freedom of the optical detecting device and no elastic adjustment. .
為達上述目的,本發明提供一種光學檢測裝置,包含一平台及一檢測單元,該平台具有一供一待檢測物放置的檢測位置,該檢測單元包括一光源元件、一影像擷取元件及一移動機構,該光源元件相對該檢測位置設置,該影像擷取元件相對該檢測位置移動,該移動機構與該影像擷取元件連接且控制該影像擷取元件相對該檢測位置沿一第一軌跡移動,其中,該第一軌跡所構成之一第一移動平面符合一球面的至少一部分以令該影像擷取元件經過該第一軌跡的各點時和該檢測位置之間的距離均相等。In order to achieve the above object, the present invention provides an optical detecting device comprising a platform and a detecting unit, the platform having a detecting position for placing a to-be-detected object, the detecting unit comprising a light source component, an image capturing component and a a moving mechanism, the light source component is disposed relative to the detecting position, the image capturing component is moved relative to the detecting position, the moving mechanism is coupled to the image capturing component and controls the image capturing component to move along a first trajectory relative to the detecting position The first moving plane formed by the first track conforms to at least a portion of a spherical surface such that the image capturing element passes through each point of the first track and the distance between the detecting positions is equal.
由以上可知,本發明相較於習知技藝可達到之功效在於,由於本發明的該光學檢測裝置係利用該影像擷取元件於符合該球面的該第一移動平面上進行多點移動,並非習知係以固定方式架設或僅以水平移動方式來移動,故對該待檢測物之不同的一檢測條件進行檢測時,仍可精準且快速地調整至相對應的該檢測條件,使本案的該光學檢測裝置具有高自由度的檢測方式。另一方面,由於該影像擷取元件係以符合該球面的該第一移動平面來移動,故當該影像擷取元件以不同角度擷取一待分析影像時,不因工作位置的改變而影響該影像擷取元件與該檢測位置相距的一工作距離與檢測的準確性,進而使生產產品良率提高而大幅降低生產成本。It can be seen from the above that the illuminating effect of the present invention compared to the prior art is that the optical detecting device of the present invention uses the image capturing element to perform multi-point movement on the first moving plane conforming to the spherical surface, which is not The conventional system is erected in a fixed manner or only moved in a horizontal manner. Therefore, when detecting a different detection condition of the object to be detected, the detection condition can be accurately and quickly adjusted to the corresponding detection condition. The optical detecting device has a high degree of freedom detection method. On the other hand, since the image capturing component moves in the first moving plane that conforms to the spherical surface, when the image capturing component captures an image to be analyzed at different angles, it does not affect the working position. The image capture component is separated from the detection position by a working distance and the accuracy of the detection, thereby increasing the yield of the produced product and greatly reducing the production cost.
有關本發明的詳細說明及技術內容,現就配合圖式說明如下:The detailed description and technical content of the present invention will now be described as follows:
請搭配參閱『圖1』所示,為本發明一實施例的光學檢測裝置的側視示意圖,本發明為一種光學檢測裝置,包含有一平台10以及一檢測單元20,該平台10具有一供一待檢測物11放置的檢測位置,該檢測單元20包括一光源元件201、一影像擷取元件202及一移動機構。Please refer to FIG. 1 for a side view of an optical detecting device according to an embodiment of the present invention. The present invention is an optical detecting device including a platform 10 and a detecting unit 20, the platform 10 having one for one The detecting unit 20 includes a light source component 201, an image capturing component 202, and a moving mechanism.
於一實施例中,該光源元件201相對該檢測位置固定,該影像擷取元件202相對該檢測位置移動,該移動機構與該影像擷取元件202連接並控制該影像擷取元件202相對該檢測位置沿一第一軌跡移動,其中該第一軌跡所構成之一第一移動平面30符合一球面的至少一部分以令該影像擷取元件202經過該第一軌跡的各點時和該檢測位置之間的距離均相等。In one embodiment, the light source component 201 is fixed relative to the detection position, the image capture component 202 is moved relative to the detection position, and the movement mechanism is coupled to the image capture component 202 and controls the image capture component 202 relative to the detection. Positioning along a first trajectory, wherein the first trajectory constitutes a first moving plane 30 that conforms to at least a portion of a spherical surface such that the image capturing element 202 passes through points of the first trajectory and the detected position The distance between them is equal.
於另一實施例中,該光源元件201及該影像擷取元件202分別相對該檢測位置移動,該移動機構控制該光源元件201和該影像擷取元件202相對該檢測位置分別沿一第二軌跡和一第一軌跡移動,其中該第一軌跡和該第二軌跡所構成之一第一移動平面30和一第二移動平面31分別符合一球面的至少一部分,以令該光源元件201經過該第二軌跡的各點和該檢測位置之間的距離均相等,且該影像擷取元件202經過該第一軌跡的各點時和該檢測位置之間的距離均相等。In another embodiment, the light source component 201 and the image capturing component 202 are respectively moved relative to the detecting position, and the moving mechanism controls the light source component 201 and the image capturing component 202 to respectively follow a second track relative to the detecting position. And a first trajectory movement, wherein the first trajectory and the second trajectory comprise a first moving plane 30 and a second moving plane 31 respectively conforming to at least a part of a spherical surface, so that the light source component 201 passes the first The distance between each point of the two tracks and the detected position are equal, and the distance between the image capturing element 202 passing through the points of the first track and the detecting position is equal.
於本發明中,該影像擷取元件202及該光源元件201分別與該檢測位置相距一第一工作距離和一第二工作距離,該第二工作距離和該第一工作距離可分別依該光源元件201所提供的一檢測光源的強弱以及該影像擷取元件202對該待檢測物11的一檢測條件而調整,該檢測條件可為該影像擷取元件202所擷取的一待分析影像的解析度、欲擷取該待檢測物11的景深範圍、欲擷取該待檢測物11的視野範圍或上述組合。另,該影像擷取元件202的種類為一感光耦合元件(Charge coupled device,簡稱CCD)攝影機或一互補式金屬氧化物半導體(Complementary metal oxide semiconductor,簡稱CMOS)攝影機。In the present invention, the image capturing component 202 and the light source component 201 are respectively separated from the detecting position by a first working distance and a second working distance, and the second working distance and the first working distance are respectively dependent on the light source. The intensity of a detection light source provided by the component 201 and the image capturing component 202 are adjusted for a detection condition of the object to be detected 11, and the detection condition may be an image to be analyzed captured by the image capturing component 202. The resolution, the depth of field range of the object 11 to be detected, the field of view of the object 11 to be detected, or the combination thereof. In addition, the type of the image capturing component 202 is a photosensitive coupled device (CCD) camera or a complementary metal oxide semiconductor (CMOS) camera.
如『圖2』所示,為本發明第一實施例中四連桿球型移動機構的示意圖,該移動機構包括一第一曲軸連桿40、一第二曲軸連桿41及一第一曲面板42,該第一曲軸連桿40具有一固定於該平台10的第一樞軸401以及一連接於該第一曲面板42的第二樞軸402,該第二曲軸連桿41具有一固定於該平台10的第三樞軸411以及一連接於該第一曲面板42的第四樞軸412,該第一曲面板42夾持該光源元件201或該影像擷取元件202並與該第二移動平面31或該第一移動平面30貼齊而移動,其中本實施例係以夾持該影像擷取元件202為舉例,若需同時以不同軌跡移動該光源元件201或該影像擷取元件202時,可將該光源元件201和該影像擷取元件202分別夾持於不同的該移動機構。該第一樞軸401與該第二樞軸402之間的長度以及該第三樞軸411與該第四樞軸412之間的長度彼此固定,以令該第一曲面板42於該第一移動平面30或該第二移動平面31上任意點以該檢測位置為中心進行多點移動。As shown in FIG. 2, it is a schematic diagram of a four-link ball type moving mechanism according to a first embodiment of the present invention. The moving mechanism includes a first crankshaft link 40, a second crankshaft link 41, and a first track. The first crankshaft link 40 has a first pivot 401 fixed to the platform 10 and a second pivot 402 coupled to the first curved panel 42. The second crankshaft 41 has a fixed a third pivot 411 of the platform 10 and a fourth pivot 412 connected to the first curved panel 42 . The first curved panel 42 clamps the light source component 201 or the image capturing component 202 and the same The moving plane 31 or the first moving plane 30 is aligned and moved. In this embodiment, the image capturing component 202 is clamped as an example. If the light source component 201 or the image capturing component is moved at different trajectories at the same time, At 202 o'clock, the light source element 201 and the image capturing element 202 can be respectively clamped to different moving mechanisms. The length between the first pivot 401 and the second pivot 402 and the length between the third pivot 411 and the fourth pivot 412 are fixed to each other to make the first curved panel 42 The moving plane 30 or any point on the second moving plane 31 performs multi-point movement centering on the detected position.
於本發明中,為了使該光源元件201和該影像擷取元件202的移動範圍提升,可使用一種高自由度的移動機構,如『圖3』所示,為本發明第二實施例中四連桿球型移動機構的示意圖,該移動機構包括一第三曲軸連桿43、一第四曲軸連桿44及一第二曲面板45,該第三曲軸連桿43具有一固定的第五樞軸431以及一連接於該第二曲面板45的第六樞軸432,該第四曲軸連桿44具有一固定的第七樞軸441以及一連接於該第二曲面板45的第八樞軸442,該第二曲面板45夾持該光源元件201或該影像擷取元件202並與該第二移動平面31或該第一移動平面30貼齊而移動,其中本實施例係以夾持該影像擷取元件202為舉例,需進一步說明的是,上述該些樞軸具有兩轉動結構,使分別設置於該轉動結構的物體可彼此轉動,以上僅舉四連桿球型移動機構為例,只要使該光源元件201或該影像擷取元件202能於球面軌跡上移動之機構即可,不以本案之舉例為限。In the present invention, in order to increase the range of movement of the light source element 201 and the image capturing element 202, a high degree of freedom moving mechanism can be used, as shown in FIG. 3, which is a fourth embodiment of the present invention. A schematic diagram of a connecting rod ball type moving mechanism, the moving mechanism includes a third crank connecting rod 43, a fourth crank connecting rod 44 and a second curved panel 45, the third crank connecting rod 43 having a fixed fifth pivot a shaft 431 and a sixth pivot 432 connected to the second curved panel 45. The fourth crankshaft link 44 has a fixed seventh pivot 441 and an eighth pivot connected to the second curved panel 45. 442, the second curved panel 45 holds the light source component 201 or the image capturing component 202 and moves in alignment with the second moving plane 31 or the first moving plane 30, wherein the embodiment clamps the The image capturing component 202 is exemplified. For example, the pivots have two rotating structures, so that the objects respectively disposed on the rotating structure can be rotated with each other. For example, the four-bar ball type moving mechanism is taken as an example. As long as the light source element 201 or the image capturing element 2 is made 02 The mechanism that can move on the spherical track can not be limited to the example of this case.
於實際應用中,當該待檢測物11放置於該平台10的該檢測位置上時,先將該光源元件201的該檢測光源照射於該待檢測物11上,使該檢測光源於該待檢測物11之一檢測表面反射或穿透,再藉由該影像擷取元件202擷取該待檢測物11之該檢測表面的該待分析影像,接著將該待分析影像透過一影像捕捉處理、一影像辨識處理及一系統判定處理以判斷該待檢測物11是否有瑕疵。當需進一步對不同的該待檢測物11或者於單個該待檢測物11的不同位置進行檢測時,僅需控制該光源元件201及該影像擷取元件202分別於該第二軌跡和該第一軌跡上移動。如『圖4』所示,以該影像擷取元件202為例,當該影像擷取元件202進行移動後的位置,可為從該第一軌跡之一第一位置的該影像擷取元件202a移動至該第一軌跡之一第二位置的該影像擷取元件202b,本案僅以該影像擷取元件202及兩點位置為例,只要使該光源元件201及該影像擷取元件202分別於該第二軌跡和該第一軌跡上進行多點移動即可,不以本案之舉例為限。In the actual application, when the object to be detected 11 is placed on the detecting position of the platform 10, the detecting light source of the light source element 201 is first irradiated onto the object to be detected 11, so that the detecting light source is to be detected. One of the objects 11 detects the surface reflection or penetration, and the image capturing component 202 captures the image to be analyzed of the detecting surface of the object 11 to be detected, and then passes the image to be analyzed through an image capturing process. The image recognition process and a system determination process determine whether the object to be detected 11 has flaws. When it is required to further detect different different objects 11 to be detected or different positions of the object 11 to be detected, only the light source element 201 and the image capturing element 202 need to be controlled in the second track and the first Move on the track. As shown in FIG. 4, the image capturing component 202 is taken as an example. When the image capturing component 202 is moved, the image capturing component 202a may be a first position from the first track. The image capturing component 202b is moved to the second position of the first track. The image capturing component 202 and the two-point position are taken as an example, as long as the light source component 201 and the image capturing component 202 are respectively The second trajectory and the multi-point movement on the first trajectory are not limited to the example of the present case.
於本發明中,該球面的該部分可為一基於該平台10以上的半球面積,如『圖1』所示、一基於該平台10以下的半球面積或一完整球面積,如『圖4』所示。In the present invention, the portion of the spherical surface may be a hemispherical area based on the platform 10 or more, as shown in FIG. 1 , a hemispherical area based on the platform 10 or a complete spherical area, such as “FIG. 4”. Shown.
綜上所述,由於本發明的該光學檢測裝置係利用該光源元件及該影像擷取元件分別於符合該球面的該第二移動平面和該第一移動平面上進行多點移動,並非習知係以固定方式架設或僅以水平移動方式來移動,故對該待檢測物之不同的該檢測條件進行檢測時,仍可精準且快速地調整至相對應的該檢測條件,使本案的該光學檢測裝置具有高自由度的檢測方式。另一方面,由於該光源元件及該影像擷取元件係以符合該球面的該第二移動平面和該第一移動平面來移動,故當以不同角度提供該檢測光源及擷取該待分析影像時,不因工作位置的改變而影響該第一工作距離、該第二工作距離以及檢測的準確性,進而使生產產品良率提高而大幅降低生產成本。In summary, the optical detecting device of the present invention uses the light source component and the image capturing component to perform multi-point movement on the second moving plane and the first moving plane that conform to the spherical surface, respectively. The device is erected in a fixed manner or moved only in a horizontal manner. Therefore, when the detection condition of the object to be detected is different, the detection condition can be accurately and quickly adjusted to the corresponding detection condition. The detection device has a high degree of freedom of detection. On the other hand, since the light source component and the image capturing component are moved by the second moving plane and the first moving plane that conform to the spherical surface, the detecting light source is provided at different angles and the image to be analyzed is captured. When the working position is not changed, the first working distance, the second working distance, and the accuracy of the detection are not affected, thereby improving the yield of the produced product and greatly reducing the production cost.
以上已將本發明做一詳細說明,惟以上所述者,僅爲本發明的一較佳實施例而已,當不能限定本發明實施的範圍。即凡依本發明申請範圍所作的均等變化與修飾等,皆應仍屬本發明的專利涵蓋範圍內。The present invention has been described in detail above, but the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the scope of the invention. That is, the equivalent changes and modifications made by the scope of the present application should remain within the scope of the patent of the present invention.
10‧‧‧平台10‧‧‧ platform
11‧‧‧待檢測物11‧‧‧Testables
20‧‧‧檢測單元20‧‧‧Detection unit
201‧‧‧光源元件201‧‧‧Light source components
202、202a、202b‧‧‧影像擷取元件202, 202a, 202b‧‧‧ image capture components
30‧‧‧第一移動平面30‧‧‧First moving plane
31‧‧‧第二移動平面31‧‧‧ second moving plane
40‧‧‧第一曲軸連桿40‧‧‧First crankshaft connecting rod
401‧‧‧第一樞軸401‧‧‧ first pivot
402‧‧‧第二樞軸402‧‧‧Second pivot
41‧‧‧第二曲軸連桿41‧‧‧Second crankshaft connecting rod
411‧‧‧第三樞軸411‧‧‧ third pivot
412‧‧‧第四樞軸412‧‧‧fourth pivot
42‧‧‧第一曲面板42‧‧‧First panel
43‧‧‧第三曲軸連桿43‧‧‧ Third crankshaft connecting rod
431‧‧‧第五樞軸431‧‧‧ fifth pivot
432‧‧‧第六樞軸432‧‧‧ sixth pivot
44‧‧‧第四曲軸連桿44‧‧‧fourth crankshaft connecting rod
441‧‧‧第七樞軸441‧‧‧ seventh pivot
442‧‧‧第八樞軸442‧‧‧ eighth pivot
45‧‧‧第二曲面板45‧‧‧Second panel
『圖1』,為本發明一實施例中,光學檢測裝置的側視示意圖。 『圖2』,為本發明第一實施例中,四連桿球型移動機構的示意圖。 『圖3』,為本發明第二實施例中,四連桿球型移動機構的示意圖。 『圖4』,為本發明一實施例中,影像擷取元件之移動方式的示意圖。FIG. 1 is a side elevational view of an optical detecting device in accordance with an embodiment of the present invention. Fig. 2 is a schematic view showing a four-link ball type moving mechanism in the first embodiment of the present invention. 3 is a schematic view of a four-link ball type moving mechanism in a second embodiment of the present invention. FIG. 4 is a schematic diagram showing a moving manner of an image capturing component according to an embodiment of the present invention.
10‧‧‧平台 10‧‧‧ platform
11‧‧‧待檢測物 11‧‧‧Testables
20‧‧‧檢測單元 20‧‧‧Detection unit
201‧‧‧光源元件 201‧‧‧Light source components
202‧‧‧影像擷取元件 202‧‧‧Image capture component
30‧‧‧第一移動平面 30‧‧‧First moving plane
31‧‧‧第二移動平面 31‧‧‧ second moving plane
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