TWI590000B - Photosensitive composition - Google Patents
Photosensitive composition Download PDFInfo
- Publication number
- TWI590000B TWI590000B TW102119930A TW102119930A TWI590000B TW I590000 B TWI590000 B TW I590000B TW 102119930 A TW102119930 A TW 102119930A TW 102119930 A TW102119930 A TW 102119930A TW I590000 B TWI590000 B TW I590000B
- Authority
- TW
- Taiwan
- Prior art keywords
- photosensitive composition
- acid
- compound
- acrylate
- group
- Prior art date
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- 239000000203 mixture Substances 0.000 title claims description 105
- -1 isocyanate compound Chemical class 0.000 claims description 92
- 150000001875 compounds Chemical class 0.000 claims description 76
- 125000004432 carbon atom Chemical group C* 0.000 claims description 32
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 claims description 26
- 125000000217 alkyl group Chemical group 0.000 claims description 24
- QMOWYWSHERGNQQ-UHFFFAOYSA-N N=C=O.CCCCCCCCCC Chemical compound N=C=O.CCCCCCCCCC QMOWYWSHERGNQQ-UHFFFAOYSA-N 0.000 claims description 21
- 239000003999 initiator Substances 0.000 claims description 16
- 239000011159 matrix material Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 15
- 239000000049 pigment Substances 0.000 claims description 13
- 239000003513 alkali Substances 0.000 claims description 11
- 239000007822 coupling agent Substances 0.000 claims description 11
- 239000002981 blocking agent Substances 0.000 claims description 9
- 239000003086 colorant Substances 0.000 claims description 9
- 239000012948 isocyanate Substances 0.000 claims description 6
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Natural products C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 claims description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 51
- 239000004593 Epoxy Substances 0.000 description 32
- 238000004040 coloring Methods 0.000 description 31
- 239000000463 material Substances 0.000 description 26
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 25
- 239000002253 acid Substances 0.000 description 24
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 23
- 229920005989 resin Polymers 0.000 description 20
- 239000011347 resin Substances 0.000 description 20
- 239000002904 solvent Substances 0.000 description 19
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 15
- 125000005843 halogen group Chemical group 0.000 description 15
- 238000006243 chemical reaction Methods 0.000 description 14
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 12
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 12
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 12
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 11
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 11
- 239000000975 dye Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- 239000006229 carbon black Substances 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 10
- 125000003710 aryl alkyl group Chemical group 0.000 description 9
- 150000007519 polyprotic acids Polymers 0.000 description 9
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 8
- 150000008065 acid anhydrides Chemical class 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- 150000002148 esters Chemical class 0.000 description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 8
- 150000002484 inorganic compounds Chemical class 0.000 description 8
- 229910010272 inorganic material Inorganic materials 0.000 description 8
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 7
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 7
- 150000001299 aldehydes Chemical class 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 125000000524 functional group Chemical group 0.000 description 7
- 239000005011 phenolic resin Substances 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 6
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 6
- 125000003545 alkoxy group Chemical group 0.000 description 6
- 150000001412 amines Chemical class 0.000 description 6
- 150000008064 anhydrides Chemical class 0.000 description 6
- 125000003118 aryl group Chemical group 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 6
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- 239000011342 resin composition Substances 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 239000004094 surface-active agent Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 229920000877 Melamine resin Polymers 0.000 description 5
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 5
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 5
- 238000006482 condensation reaction Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 5
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 150000002576 ketones Chemical class 0.000 description 5
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 5
- 239000011976 maleic acid Substances 0.000 description 5
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 5
- 229920003986 novolac Polymers 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 229920000647 polyepoxide Polymers 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- 229920002554 vinyl polymer Polymers 0.000 description 5
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 4
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 4
- OGRAOKJKVGDSFR-UHFFFAOYSA-N 2,3,5-trimethylphenol Chemical compound CC1=CC(C)=C(C)C(O)=C1 OGRAOKJKVGDSFR-UHFFFAOYSA-N 0.000 description 4
- NKTOLZVEWDHZMU-UHFFFAOYSA-N 2,5-xylenol Chemical compound CC1=CC=C(C)C(O)=C1 NKTOLZVEWDHZMU-UHFFFAOYSA-N 0.000 description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- GJYCVCVHRSWLNY-UHFFFAOYSA-N 2-butylphenol Chemical compound CCCCC1=CC=CC=C1O GJYCVCVHRSWLNY-UHFFFAOYSA-N 0.000 description 4
- TUAMRELNJMMDMT-UHFFFAOYSA-N 3,5-xylenol Chemical compound CC1=CC(C)=CC(O)=C1 TUAMRELNJMMDMT-UHFFFAOYSA-N 0.000 description 4
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 4
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 4
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 239000003377 acid catalyst Substances 0.000 description 4
- 125000003342 alkenyl group Chemical group 0.000 description 4
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 4
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 235000014113 dietary fatty acids Nutrition 0.000 description 4
- 239000002270 dispersing agent Substances 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 239000000194 fatty acid Substances 0.000 description 4
- 229930195729 fatty acid Natural products 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 4
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- QNGNSVIICDLXHT-UHFFFAOYSA-N para-ethylbenzaldehyde Natural products CCC1=CC=C(C=O)C=C1 QNGNSVIICDLXHT-UHFFFAOYSA-N 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 238000007639 printing Methods 0.000 description 4
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000012429 reaction media Substances 0.000 description 4
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 4
- NHGXDBSUJJNIRV-UHFFFAOYSA-M tetrabutylammonium chloride Chemical compound [Cl-].CCCC[N+](CCCC)(CCCC)CCCC NHGXDBSUJJNIRV-UHFFFAOYSA-M 0.000 description 4
- CWERGRDVMFNCDR-UHFFFAOYSA-N thioglycolic acid Chemical compound OC(=O)CS CWERGRDVMFNCDR-UHFFFAOYSA-N 0.000 description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 3
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 3
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 3
- JVERADGGGBYHNP-UHFFFAOYSA-N 5-phenylbenzene-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C(C(=O)O)=CC(C=2C=CC=CC=2)=C1C(O)=O JVERADGGGBYHNP-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical group C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 229930185605 Bisphenol Natural products 0.000 description 3
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 3
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- 235000000177 Indigofera tinctoria Nutrition 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 3
- 125000002723 alicyclic group Chemical group 0.000 description 3
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 3
- SMWDFEZZVXVKRB-UHFFFAOYSA-N anhydrous quinoline Natural products N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 3
- 239000001000 anthraquinone dye Substances 0.000 description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 3
- 229910000420 cerium oxide Inorganic materials 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
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- 229930003836 cresol Natural products 0.000 description 3
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- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 3
- JBTWLSYIZRCDFO-UHFFFAOYSA-N ethyl methyl carbonate Chemical compound CCOC(=O)OC JBTWLSYIZRCDFO-UHFFFAOYSA-N 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 3
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 3
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- 239000000976 ink Substances 0.000 description 3
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 3
- 239000011572 manganese Substances 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
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- 230000003287 optical effect Effects 0.000 description 3
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
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- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 3
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 3
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- 229920002223 polystyrene Polymers 0.000 description 3
- 239000001294 propane Substances 0.000 description 3
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 3
- XMGQYMWWDOXHJM-JTQLQIEISA-N (+)-α-limonene Chemical compound CC(=C)[C@@H]1CCC(C)=CC1 XMGQYMWWDOXHJM-JTQLQIEISA-N 0.000 description 2
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 2
- ZKUUXSLYLXLCFQ-UHFFFAOYSA-N 1,1,1-triethoxytridecane Chemical compound C(C)OC(CCCCCCCCCCCC)(OCC)OCC ZKUUXSLYLXLCFQ-UHFFFAOYSA-N 0.000 description 2
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 2
- PMBXCGGQNSVESQ-UHFFFAOYSA-N 1-Hexanethiol Chemical compound CCCCCCS PMBXCGGQNSVESQ-UHFFFAOYSA-N 0.000 description 2
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
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- XVKLLVZBGMGICC-UHFFFAOYSA-N o-[3-propanethioyloxy-2,2-bis(propanethioyloxymethyl)propyl] propanethioate Chemical compound CCC(=S)OCC(COC(=S)CC)(COC(=S)CC)COC(=S)CC XVKLLVZBGMGICC-UHFFFAOYSA-N 0.000 description 1
- FSAJWMJJORKPKS-UHFFFAOYSA-N octadecyl prop-2-enoate Chemical compound CCCCCCCCCCCCCCCCCCOC(=O)C=C FSAJWMJJORKPKS-UHFFFAOYSA-N 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- ANISOHQJBAQUQP-UHFFFAOYSA-N octyl prop-2-enoate Chemical compound CCCCCCCCOC(=O)C=C ANISOHQJBAQUQP-UHFFFAOYSA-N 0.000 description 1
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- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- YLNSNVGRSIOCEU-UHFFFAOYSA-N oxiran-2-ylmethyl butanoate Chemical compound CCCC(=O)OCC1CO1 YLNSNVGRSIOCEU-UHFFFAOYSA-N 0.000 description 1
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- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- FXLOVSHXALFLKQ-UHFFFAOYSA-N p-tolualdehyde Chemical compound CC1=CC=C(C=O)C=C1 FXLOVSHXALFLKQ-UHFFFAOYSA-N 0.000 description 1
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- 239000002245 particle Substances 0.000 description 1
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- HVAMZGADVCBITI-UHFFFAOYSA-N pent-4-enoic acid Chemical compound OC(=O)CCC=C HVAMZGADVCBITI-UHFFFAOYSA-N 0.000 description 1
- GXOHBWLPQHTYPF-UHFFFAOYSA-N pentyl 2-hydroxypropanoate Chemical compound CCCCCOC(=O)C(C)O GXOHBWLPQHTYPF-UHFFFAOYSA-N 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
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- 239000013034 phenoxy resin Substances 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- 229940100595 phenylacetaldehyde Drugs 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- XKJCHHZQLQNZHY-UHFFFAOYSA-N phthalimide Chemical compound C1=CC=C2C(=O)NC(=O)C2=C1 XKJCHHZQLQNZHY-UHFFFAOYSA-N 0.000 description 1
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- 239000004033 plastic Substances 0.000 description 1
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- 229910052697 platinum Inorganic materials 0.000 description 1
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- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920001228 polyisocyanate Polymers 0.000 description 1
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- 229920000193 polymethacrylate Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- CHWRSCGUEQEHOH-UHFFFAOYSA-N potassium oxide Chemical compound [O-2].[K+].[K+] CHWRSCGUEQEHOH-UHFFFAOYSA-N 0.000 description 1
- 229910001950 potassium oxide Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- 229940080818 propionamide Drugs 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- KIDHWZJUCRJVML-UHFFFAOYSA-N putrescine Chemical compound NCCCCN KIDHWZJUCRJVML-UHFFFAOYSA-N 0.000 description 1
- 150000003217 pyrazoles Chemical class 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- IZMJMCDDWKSTTK-UHFFFAOYSA-N quinoline yellow Chemical compound C1=CC=CC2=NC(C3C(C4=CC=CC=C4C3=O)=O)=CC=C21 IZMJMCDDWKSTTK-UHFFFAOYSA-N 0.000 description 1
- 229940051201 quinoline yellow Drugs 0.000 description 1
- 239000004172 quinoline yellow Substances 0.000 description 1
- 235000012752 quinoline yellow Nutrition 0.000 description 1
- 150000004060 quinone imines Chemical class 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- SMQUZDBALVYZAC-UHFFFAOYSA-N salicylaldehyde Chemical compound OC1=CC=CC=C1C=O SMQUZDBALVYZAC-UHFFFAOYSA-N 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 150000003346 selenoethers Chemical class 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000003549 soybean oil Substances 0.000 description 1
- 235000012424 soybean oil Nutrition 0.000 description 1
- 235000015096 spirit Nutrition 0.000 description 1
- 210000003802 sputum Anatomy 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 239000001384 succinic acid Substances 0.000 description 1
- KZNICNPSHKQLFF-UHFFFAOYSA-N succinimide Chemical class O=C1CCC(=O)N1 KZNICNPSHKQLFF-UHFFFAOYSA-N 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- ADXGNEYLLLSOAR-UHFFFAOYSA-N tasosartan Chemical compound C12=NC(C)=NC(C)=C2CCC(=O)N1CC(C=C1)=CC=C1C1=CC=CC=C1C=1N=NNN=1 ADXGNEYLLLSOAR-UHFFFAOYSA-N 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- SJMYWORNLPSJQO-UHFFFAOYSA-N tert-butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)(C)C SJMYWORNLPSJQO-UHFFFAOYSA-N 0.000 description 1
- 125000001973 tert-pentyl group Chemical group [H]C([H])([H])C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- MCZDHTKJGDCTAE-UHFFFAOYSA-M tetrabutylazanium;acetate Chemical compound CC([O-])=O.CCCC[N+](CCCC)(CCCC)CCCC MCZDHTKJGDCTAE-UHFFFAOYSA-M 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 238000004227 thermal cracking Methods 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 239000001017 thiazole dye Substances 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 150000003573 thiols Chemical class 0.000 description 1
- NJRXVEJTAYWCQJ-UHFFFAOYSA-N thiomalic acid Chemical compound OC(=O)CC(S)C(O)=O NJRXVEJTAYWCQJ-UHFFFAOYSA-N 0.000 description 1
- NBOMNTLFRHMDEZ-UHFFFAOYSA-N thiosalicylic acid Chemical compound OC(=O)C1=CC=CC=C1S NBOMNTLFRHMDEZ-UHFFFAOYSA-N 0.000 description 1
- 229940103494 thiosalicylic acid Drugs 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 239000001003 triarylmethane dye Substances 0.000 description 1
- 235000013337 tricalcium citrate Nutrition 0.000 description 1
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical compound C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 description 1
- XHGIFBQQEGRTPB-UHFFFAOYSA-N tris(prop-2-enyl) phosphate Chemical compound C=CCOP(=O)(OCC=C)OCC=C XHGIFBQQEGRTPB-UHFFFAOYSA-N 0.000 description 1
- 229940036248 turpentine Drugs 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- 150000003672 ureas Chemical class 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 229920006163 vinyl copolymer Polymers 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- NLVXSWCKKBEXTG-UHFFFAOYSA-N vinylsulfonic acid Chemical compound OS(=O)(=O)C=C NLVXSWCKKBEXTG-UHFFFAOYSA-N 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 150000003739 xylenols Chemical class 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- NDKWCCLKSWNDBG-UHFFFAOYSA-N zinc;dioxido(dioxo)chromium Chemical compound [Zn+2].[O-][Cr]([O-])(=O)=O NDKWCCLKSWNDBG-UHFFFAOYSA-N 0.000 description 1
- XKMZOFXGLBYJLS-UHFFFAOYSA-L zinc;prop-2-enoate Chemical compound [Zn+2].[O-]C(=O)C=C.[O-]C(=O)C=C XKMZOFXGLBYJLS-UHFFFAOYSA-L 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/54—Silicon-containing compounds
- C08K5/544—Silicon-containing compounds containing nitrogen
- C08K5/5465—Silicon-containing compounds containing nitrogen containing at least one C=N bond
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/23—Photochromic filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0751—Silicon-containing compounds used as adhesion-promoting additives or as means to improve adhesion
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0755—Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Medicinal Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Polymerisation Methods In General (AREA)
Description
本發明為關於含有由封端異氰酸酯矽烷所構成的矽烷偶合劑之感光性組成物、於該感光性組成物中添加著色劑之著色感光性組成物、及使用該著色感光性組成物之黑色矩陣,詳細為關於,與基材之密接性為優越之著色感光性組成物及使用其之黑色矩陣。 The present invention relates to a photosensitive composition containing a decane coupling agent composed of blocked isocyanate decane, a colored photosensitive composition containing a coloring agent to the photosensitive composition, and a black matrix using the colored photosensitive composition. Specifically, it relates to a color-sensitive photosensitive composition superior in adhesion to a substrate and a black matrix using the same.
感光性樹脂組成物為光硬化性之樹脂組成物,作為代表的組成,可舉例具有乙烯性不飽和鍵之化合物、及含有光聚合起始劑者。由於此感光性樹脂組成物可藉由照射紫外線或者電子束而使聚合硬化,故被使用於光硬化性油墨、感光性印刷版、印刷配線板、各種光阻等。 The photosensitive resin composition is a photocurable resin composition, and examples of the composition include a compound having an ethylenically unsaturated bond and a photopolymerization initiator. Since the photosensitive resin composition can be polymerized and cured by irradiation with ultraviolet rays or electron beams, it can be used for photocurable inks, photosensitive printing plates, printed wiring boards, various photoresists, and the like.
特別是作為顏料為使用碳黑之著色感光性樹脂組成物,其係適合作為用來提高顯示對比或發色效果而設置於彩色濾光片(colorfilter)之R、G、B之著色層間之邊界部分的黑色矩陣。 In particular, the pigment is a colored photosensitive resin composition using carbon black, which is suitable as a boundary between the color layers of R, G, and B which are provided in a color filter for improving display contrast or color development. Part of the black matrix.
關於如此般的著色感光性組成物,經曝光、顯影、後硬化後所得之黑色圖型(黑色矩陣),其與透明 基板的密接性不充分,於反覆形成黑色圖型之剝離步驟中,已先形成的著色圖型之一部分會有同時被剝離、圖型脫落等情況,而具有曝光硬化部不會殘留於透明基板上之問題。 A black pattern (black matrix) obtained by exposure, development, and post-hardening of such a color-sensitive photosensitive composition, which is transparent The adhesion of the substrate is insufficient, and in the peeling step of forming the black pattern repeatedly, one part of the color pattern formed first is peeled off at the same time, the pattern is peeled off, and the exposure hardened portion does not remain on the transparent substrate. The problem.
在專利文獻1中揭示一種具有下述雙方官能基之化合物,所述官能基為:與透明基板為進行化學性鍵結之官能基、及與感光性著色材料中之成分所具有之官能基為可聚合之官能基;特別是揭示一種含有矽烷偶合劑之著色像素圖型形成用感光性著色材料。 Patent Document 1 discloses a compound having a functional group which is a functional group which is chemically bonded to a transparent substrate and a functional group which is a component of the photosensitive coloring material. A polymerizable functional group; in particular, a photosensitive coloring material for forming a colored pixel pattern containing a decane coupling agent.
又,在專利文獻2~4中揭示著,由具有特定結構之封端異氰酸酯矽烷所構成的矽烷偶合劑。 Further, Patent Documents 2 to 4 disclose a decane coupling agent composed of a blocked isocyanate decane having a specific structure.
[專利文獻1]日本國特開2004-191724號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-191724
[專利文獻2]日本國特開平08-291186號公報 [Patent Document 2] Japanese Patent Publication No. 08-291186
[專利文獻3]日本國特開平10-067787號公報 [Patent Document 3] Japanese Patent Laid-Open No. Hei 10-067787
[專利文獻4]日本國特開2009-144255號公報 [Patent Document 4] Japanese Patent Laid-Open Publication No. 2009-144255
然而,上述專利文獻1記載之發明,其係限定於藉由使用乾膜之乾式顯影的圖型形成者,又,對於與基材之密接性,仍有改良之空間。又,在專利文獻2~4中 亦未記載或教示,將分別文獻記載之矽烷偶合劑使用至感光性樹脂組成物之情事。 However, the invention described in Patent Document 1 is limited to a pattern-former who uses dry development of a dry film, and has a space for improvement in adhesion to a substrate. Also, in Patent Documents 2 to 4 There is no description or teaching, and the decane coupling agent described in the literature is used for the photosensitive resin composition.
因此,本發明之目的為提供可形成期望的圖型之感光性組成物,及著色圖型之對基材之密接性為提昇之著色感光性組成物。 Accordingly, an object of the present invention is to provide a coloring photosensitive composition which can form a desired pattern and a coloring pattern which is improved in adhesion to a substrate.
本發明團隊為了解決上述課題,經深入研究之結果得知,一種含有由特定封端異氰酸酯矽烷所構成的矽烷偶合劑之感光性組成物,其係可達成上述目的,又,得知一種於上述感光性組成物中添加著色劑之著色感光性組成物,其係適合於黑色矩陣,遂而完成本發明。 In order to solve the above problems, the inventors of the present invention have found that a photosensitive composition containing a decane coupling agent composed of a specific blocked isocyanate decane can achieve the above object, and it is known that The colored photosensitive composition in which a coloring agent is added to the photosensitive composition is suitable for a black matrix, and the present invention has been completed.
即,本發明之感光性組成物,其特徵係含有由封端異氰酸酯矽烷所構成的矽烷偶合劑,前述封端異氰酸酯矽烷為使下述通式(I)所示的異氰酸酯化合物與封端化劑反應所得到者,
(式中,R1示為碳原子數1~8之烷基,n為1~10之數,a為1~3之數,b為0~2之數,a+b=3)。 (wherein R 1 is represented by an alkyl group having 1 to 8 carbon atoms, n is a number from 1 to 10, a is a number from 1 to 3, b is a number from 0 to 2, and a + b = 3).
又,本發明之著色感光性組成物,其特徵為於上述感光性組成物中添加著色劑者。 Further, the colored photosensitive composition of the present invention is characterized in that a coloring agent is added to the photosensitive composition.
本發明之感光性組成物及著色感光性組成物,較佳為含有具有乙烯性不飽和鍵之聚合性化合物、及 光聚合起始劑。 The photosensitive composition and the coloring photosensitive composition of the present invention preferably contain a polymerizable compound having an ethylenically unsaturated bond, and Photopolymerization initiator.
又,本發明之著色感光性組成物,較佳為含有黑色顏料。 Further, the colored photosensitive composition of the present invention preferably contains a black pigment.
又,本發明之感光性組成物及著色感光性組成物,較佳為鹼顯影性。 Moreover, the photosensitive composition of the present invention and the coloring photosensitive composition are preferably alkali developability.
又,本發明之感光性組成物及著色感光性組成物,較佳為前述封端化劑為肟化合物。 Further, in the photosensitive composition of the present invention and the colored photosensitive composition, it is preferred that the blocking agent is an anthracene compound.
本發明之黑色矩陣,其特徵為將上述著色感光性組成物於基材上硬化而成。 The black matrix of the present invention is characterized in that the colored photosensitive composition is cured on a substrate.
本發明之彩色濾光片,其特徵為具備上述之黑色矩陣。 The color filter of the present invention is characterized by comprising the above-described black matrix.
藉由本發明,能提供可形成期望的圖型之感光性組成物,又,能提供著色圖型之對基材之密接性為提昇之著色感光性組成物,及使用其之黑色矩陣。本發明之著色感光性組成物之硬化物,其係適合於顯示裝置用彩色濾光片及液晶顯示面板,以及有機EL顯示面板。 According to the present invention, it is possible to provide a photosensitive composition which can form a desired pattern, and a coloring photosensitive composition which can improve the adhesion to a substrate of a colored pattern, and a black matrix using the same. The cured product of the colored photosensitive composition of the present invention is suitable for a color filter for a display device, a liquid crystal display panel, and an organic EL display panel.
以下,對於本發明之感光性組成物及著色感光性組成物,根據較佳實施形態來進行說明。 Hereinafter, the photosensitive composition of the present invention and the coloring photosensitive composition will be described based on preferred embodiments.
本發明之感光性組成物,其係設為含有使上述通式(I)所示的異氰酸酯化合物與封端化劑反應所得 到的封端異氰酸酯矽烷者。作為其他成分,以具有乙烯性不飽和鍵之聚合性化合物、光聚合起始劑等為適合,但不限定於此等。 The photosensitive composition of the present invention contains a reaction obtained by reacting an isocyanate compound represented by the above formula (I) with a blocking agent. To the blocked isocyanate decane. The polymerizable compound having an ethylenically unsaturated bond, a photopolymerization initiator, or the like is suitable as the other component, but is not limited thereto.
又,本發明之著色感光性組成物,其係於本發明之感光性組成物中添加著色劑者。作為著色劑,較佳為含有碳黑等之黑色顏料。藉由含有黑色顏料,在作為用來形成黑色矩陣之感光性組成物為適合。再者,由於可對環境不造成負荷來進行顯影,故鹼顯影性為佳。 Further, the colored photosensitive composition of the present invention is a coloring agent added to the photosensitive composition of the present invention. As the colorant, a black pigment containing carbon black or the like is preferable. It is suitable as a photosensitive composition for forming a black matrix by containing a black pigment. Further, since development can be carried out without causing a load on the environment, alkali developability is preferred.
作為上述通式(I)之R1所示的碳原子數1~8之烷基,可舉例甲基、乙基、丙基、iso-丙基、丁基、sec-丁基、tert-丁基、iso-丁基、戊基、iso-戊基、tert-戊基、己基、2-己基、3-己基、環己基、1-甲基環己基、庚基、2-庚基、3-庚基、iso-庚基、tert-庚基、1-辛基、iso-辛基、tert-辛基等。 The alkyl group having 1 to 8 carbon atoms represented by R 1 of the above formula (I) may, for example, be methyl, ethyl, propyl, iso-propyl, butyl, sec-butyl or tert-butyl. Base, iso-butyl, pentyl, iso-pentyl, tert-pentyl, hexyl, 2-hexyl, 3-hexyl, cyclohexyl, 1-methylcyclohexyl, heptyl, 2-heptyl, 3- Heptyl, iso-heptyl, tert-heptyl, 1-octyl, iso-octyl, tert-octyl and the like.
在上述通式(I)中,就原料取得之容易度之點而言,R1較佳為甲基、乙基或丙基。 In the above formula (I), R 1 is preferably a methyl group, an ethyl group or a propyl group in terms of the ease of obtaining the raw material.
又,就沸點之點而言,n較佳為2~4。沸點較佳為較預烘烤溫度或後烘烤溫度高。 Further, n is preferably 2 to 4 in terms of the boiling point. The boiling point is preferably higher than the prebaking temperature or the post-baking temperature.
又,就密接性之點而言,a較佳為3,b較佳為0。 Further, in terms of the adhesion, a is preferably 3, and b is preferably 0.
作為用來得到在本發明所使用的封端異氰酸酯矽烷之封端化劑,其係可使用以往所使用者。可列舉例如丙二酸二甲酯、丙二酸二乙酯等之羧酸酯類;丙二酸、乙醯丙酮、乙醯乙酸酯(乙醯乙酸甲酯、乙醯乙酸乙酯等)等之活性亞甲基化合物;甲醯胺肟、乙醯胺肟、丙酮肟 、二乙醯單肟、二苯基酮肟、環己酮肟、甲基乙基酮肟(MEK肟)、甲基異丁基酮肟(MIBK肟)、二甲基酮肟、二乙基酮肟等之肟化合物;甲醇、乙醇、丙醇、丁醇、2-乙基己醇、庚醇、己醇、辛醇、異壬醇、硬脂醇、苄醇等之一元醇或此等之異構物;甲甘醇(methylglycol)、乙甘醇、乙基二甘醇、乙基三甘醇、丁甘醇、丁基二甘醇、乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單丁基醚、丙二醇單甲基醚等之甘醇衍生物;酚、甲酚、二甲酚、乙基酚、丙基酚、丁基酚、辛基酚、壬基酚、硝基酚、氯基酚等之酚類或此等之異構物:乳酸甲酯、乳酸戊酯等之含有羥基之酯;二丁基胺、二異丙基胺、二-tert-丁基胺、二-2-乙基己基胺、二環己基胺、苄基胺、二苯基胺、苯胺、咔唑等之胺化合物;伸乙亞胺、聚伸乙亞胺等之亞胺化合物;單甲基乙醇胺、二乙基乙醇胺、三乙基乙醇胺等之醇胺;α-吡咯啶酮、β-丁內醯胺、β-丙內醯胺、γ-丁內醯胺、δ-戊內醯胺、ε-己內醯胺等之內醯胺類;丁基硫醇、己基硫醇、月桂基硫醇等之硫醇類;咪唑、2-乙基咪唑等之咪唑類;乙醯苯胺、丙烯醯胺、醋醯胺、二聚酸胺等之醯胺類;丁二醯亞胺、馬來醯亞胺、鄰苯二甲醯亞胺等之醯亞胺類;脲、硫脲、乙烯脲等之脲化合物;苯并三唑類;3,5-二甲基吡唑等之吡唑類等。此等可為單獨1種,或2種以上併用。 As a blocking agent for obtaining the blocked isocyanate decane used in the present invention, a conventional user can be used. Examples thereof include carboxylates such as dimethyl malonate and diethyl malonate; malonic acid, acetamidineacetone, and ethyl acetate (ethyl acetate, ethyl acetate, etc.). Active methylene compound; methotrexate, acetophenone, acetone oxime , diethyl hydrazine, diphenyl ketone oxime, cyclohexanone oxime, methyl ethyl ketone oxime (MEK 肟), methyl isobutyl ketone oxime (MIBK 肟), dimethyl ketone oxime, diethyl An oxime compound such as ketone oxime; methanol, ethanol, propanol, butanol, 2-ethylhexanol, heptanol, hexanol, octanol, isodecyl alcohol, stearyl alcohol, benzyl alcohol, etc. Isomers; methylglycol, ethylene glycol, ethyl diglycol, ethyl triethylene glycol, butanol, butyl diglycol, ethylene glycol monomethyl ether, ethylene glycol Glycol derivatives such as ethyl ether, ethylene glycol monobutyl ether, propylene glycol monomethyl ether; phenol, cresol, xylenol, ethyl phenol, propyl phenol, butyl phenol, octyl phenol, hydrazine a phenol such as a phenol, a nitrophenol or a chlorophenol or an isomer thereof: a hydroxyl group-containing ester such as methyl lactate or amyl lactate; dibutylamine, diisopropylamine, di-tert - amine compounds such as butylamine, di-2-ethylhexylamine, dicyclohexylamine, benzylamine, diphenylamine, aniline, carbazole, etc.; sub-ethylenimine, polyethylenimine, etc. Amine compound; monomethylethanolamine, diethylethanolamine, triethyl Alcoholamines such as ethanolamine; snails such as α-pyrrolidone, β-butyrolactam, β-propionamide, γ-butyrolactam, δ-valeroinamide, ε-caprolactam, etc. Amines; thiols such as butyl mercaptan, hexyl mercaptan, lauryl mercaptan; imidazoles such as imidazole and 2-ethylimidazole; acetophenone, acrylamide, acetamide, dimer acid amine Such as guanamines; succinimides such as butylenediamine, maleic imine, phthalimide, urea compounds such as urea, thiourea, ethylene urea, etc.; benzotriazoles; Pyrazoles such as 3,5-dimethylpyrazole. These may be used alone or in combination of two or more.
上述封端化劑之中,解離溫度為100~200℃者,於預烘烤時為穩定存在,就於後烘烤時進行反應之點而言為 佳,其中又以肟化合物為佳。 Among the above blocking agents, the dissociation temperature is 100 to 200 ° C, which is stable during prebaking, and is the point at which the reaction is carried out after post baking. Good, among them, bismuth compounds are preferred.
為獲得上述封端異氰酸酯矽烷之封端化反應,可藉由周知之反應方法來進行。封端化劑的添加量,相對於遊離的異氰酸酯基,通常以1~2當量、較佳為以1.05~1.5當量。 The blocking reaction for obtaining the blocked isocyanate decane can be carried out by a known reaction method. The amount of the blocking agent to be added is usually from 1 to 2 equivalents, preferably from 1.05 to 1.5 equivalents, per equivalent of the isocyanate group.
封端化反應之反應溫度,通常以50~150℃,較佳為60~120℃。反應時間,以1~7小時左右來進行為佳。又,亦可添加觸媒或溶劑(芳香烴類、酯系、醚系、酮系,及此等2種以上之混合溶劑等)。 The reaction temperature of the blocking reaction is usually 50 to 150 ° C, preferably 60 to 120 ° C. The reaction time is preferably about 1 to 7 hours. Further, a catalyst or a solvent (an aromatic hydrocarbon, an ester system, an ether system, a ketone system, or a mixed solvent of two or more kinds thereof) may be added.
在本發明之感光性組成物中,上述矽烷偶合劑之含有量,係本發明之感光性組成物中以固形物換算為0.1~30質量%,特佳為0.5~10質量%。當上述矽烷偶合劑之含有量較0.1質量%為小時,有密接性不充分之情形;若較30質量%為大時,在感光性組成物中有矽烷偶合劑析出之情形。 In the photosensitive composition of the present invention, the content of the decane coupling agent is 0.1 to 30% by mass, particularly preferably 0.5 to 10% by mass, based on the solid content of the photosensitive composition of the present invention. When the content of the decane coupling agent is less than 0.1% by mass, the adhesion may be insufficient. When the amount is 30% by mass, the decane coupling agent may be precipitated in the photosensitive composition.
本發明之感光性組成物,可使用具有乙烯性不飽和鍵之聚合性化合物。作為上述具有該乙烯性不飽和鍵之聚合性化合物,並無特別限定,可使用以往用於感光性組成物者,列舉例如:乙烯、丙烯、丁烯、異丁烯、氯乙烯、偏二氯乙烯、偏二氟乙烯、四氟乙烯等不飽和脂肪族烴;(甲基)丙烯酸、α-氯基丙烯酸、伊康酸、順丁烯二酸、檸康酸、反丁烯二酸、腐植酸、丁烯酸、異丁烯酸、乙烯基乙酸、烯丙基乙酸、桂皮酸、山梨酸、中康酸、琥珀酸單〔2-(甲基)丙烯醯氧基乙基〕酯、鄰苯二 甲酸單〔2-(甲基)丙烯醯氧基乙基〕酯、ω-羧基聚己內酯單(甲基)丙烯酸酯等,在兩末端具有羧基與羥基之聚合物之單(甲基)丙烯酸酯;羥乙基(甲基)丙烯酸酯.順丁烯二酸酯、羥丙基(甲基)丙烯酸酯.順丁烯二酸酯、二環戊二烯.順丁烯二酸酯或具有1個羧基與2個以上(甲基)丙烯醯基之多官能(甲基)丙烯酸酯等之不飽和多元酸;(甲基)丙烯酸-2-羥乙酯、(甲基)丙烯酸-2-羥丙酯、(甲基)丙烯酸縮水甘油酯、下述化合物No.A1~No.A4、(甲基)丙烯酸甲酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸-t-丁酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸n-辛酯、(甲基)丙烯酸異辛酯、(甲基)丙烯酸異壬酯、(甲基)丙烯酸十八酯、(甲基)丙烯酸月桂酯、(甲基)丙烯酸甲氧基乙酯、(甲基)丙烯酸二甲基胺基甲酯、(甲基)丙烯酸二甲基胺基乙酯、(甲基)丙烯酸胺基丙酯、(甲基)丙烯酸二甲基胺基丙酯、(甲基)丙烯酸乙氧基乙酯、(甲基)丙烯酸聚(乙氧基)乙酯、(甲基)丙烯酸丁氧基乙氧基乙酯、(甲基)丙烯酸乙基己酯、(甲基)丙烯酸苯氧基乙酯、(甲基)丙烯酸四氫呋喃酯、(甲基)丙烯酸乙烯酯、(甲基)丙烯酸烯丙酯、(甲基)丙烯酸苄酯、乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、1,4-丁二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯 酸酯、三羥甲基乙烷三(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、三環癸烷羥甲基二(甲基)丙烯酸酯、三〔(甲基)丙烯醯基乙基〕異氰尿酸酯、聚酯(甲基)丙烯酸酯低聚物等不飽和一元酸及多元醇或多元酚之酯;(甲基)丙烯酸鋅、(甲基)丙烯酸鎂等不飽和多元酸之金屬鹽;順丁烯二酸酐、伊康酸酐、檸康酸酐、甲基四氫鄰苯二甲酸酐、四氫鄰苯二甲酸酐、三烷基四氫鄰苯二甲酸酐、5-(2,5-二氧代四氫呋喃基)-3-甲基-3-環己烯-1,2-二羧酸酐、三烷基四氫鄰苯二甲酸酐-順丁烯二酸酐加成物、十二烯基琥珀酸酐、甲基腐植酸酐等不飽和多元酸之酸酐;(甲基)丙烯醯胺、亞甲基雙-(甲基)丙烯醯胺、二乙烯三胺三(甲基)丙烯醯胺、苯二甲基雙(甲基)丙烯醯胺、α-氯基丙烯醯胺、N-2-羥基乙基(甲基)丙烯醯胺等不飽和一元酸及多價胺之醯胺;丙烯醛等之不飽和醛;(甲基)丙烯腈、α-氯基丙烯腈、氰化亞乙烯基(vinylidene cyanide)、氰化烯丙基(allyl cyanide)等之不飽和腈;苯乙烯、4-甲基苯乙烯、4-乙基苯乙烯、4-甲氧基苯乙烯、4-羥苯乙烯、4-氯基苯乙烯、二乙烯基苯、乙烯基甲苯、乙烯基苯甲酸、乙烯酚、乙烯磺酸、4-乙烯苯磺酸、乙烯基苄基甲基醚、乙烯基苄基縮水甘油醚等之不飽和芳香族化合物;甲基乙烯基酮等不飽和酮;乙烯基胺、烯丙胺、N-乙烯基吡咯啶 酮、乙烯基哌啶等不飽和胺化合物;烯丙醇、巴豆醇等乙烯醇;乙烯基甲基醚、乙烯基乙基醚、n-丁基乙烯基醚、異丁基乙烯基醚、烯丙基縮水甘油醚等乙烯基醚;馬來醯亞胺、N-苯基馬來醯亞胺、N-環己基馬來醯亞胺等不飽和醯亞胺類;茚、1-甲基茚等茚類;1,3-丁二烯、異戊二烯、氯基戊二烯等之脂肪族共軛二烯類;聚苯乙烯、聚(甲基)丙烯酸甲酯、聚(甲基)丙烯酸正丁酯、聚矽氧烷等,於聚合物分子鏈之末端具有單(甲基)丙烯醯基之巨單體類;氯乙烯、氯亞乙烯、琥珀酸二乙烯酯、酞酸二烯丙酯、磷酸三烯丙酯、異氰脲酸三烯丙酯、乙烯基硫醚、乙烯基咪唑、乙烯基唑、乙烯基咔唑、乙烯基吡咯啶酮、乙烯基吡啶、含有羥基之乙烯單體及聚異氰酸酯化合物之乙烯胺基甲酸酯化合物、含有羥基之乙烯基單體及聚環氧化合物之乙烯環氧化合物。 As the photosensitive composition of the present invention, a polymerizable compound having an ethylenically unsaturated bond can be used. The polymerizable compound having the ethylenically unsaturated bond is not particularly limited, and those conventionally used for the photosensitive composition may, for example, be ethylene, propylene, butylene, isobutylene, vinyl chloride or vinylidene chloride. Unsaturated aliphatic hydrocarbons such as vinylidene fluoride and tetrafluoroethylene; (meth)acrylic acid, α-chloroacrylic acid, itaconic acid, maleic acid, citraconic acid, fumaric acid, humic acid, Butenoic acid, methacrylic acid, vinyl acetic acid, allyl acetic acid, cinnamic acid, sorbic acid, mesaconic acid, succinic acid mono [2-(methyl) propylene methoxyethyl] ester, phthalic acid single [2-(Methyl)propenyloxyethyl]ester, ω-carboxypolycaprolactone mono(meth)acrylate, etc., mono(meth)acrylate having a polymer of a carboxyl group and a hydroxyl group at both terminals ; hydroxyethyl (meth) acrylate. Maleate, hydroxypropyl (meth) acrylate. Maleate, dicyclopentadiene. An unsaturated polybasic acid such as a maleic acid ester or a polyfunctional (meth) acrylate having one or more carboxyl groups and two or more (meth) acrylonitrile groups; 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, glycidyl (meth)acrylate, the following compounds No. A1 to No. A4, methyl (meth)acrylate, butyl (meth)acrylate, (A) Isobutyl acrylate, t-butyl (meth)acrylate, cyclohexyl (meth)acrylate, n-octyl (meth)acrylate, isooctyl (meth)acrylate, (methyl) Isodecyl acrylate, octadecyl (meth) acrylate, lauryl (meth) acrylate, methoxyethyl (meth) acrylate, dimethylaminomethyl (meth) acrylate, (methyl) Dimethylaminoethyl acrylate, aminopropyl (meth) acrylate, dimethylaminopropyl (meth) acrylate, ethoxyethyl (meth) acrylate, (meth) acrylate poly ( Ethoxy)ethyl ester, butoxyethoxyethyl (meth)acrylate, ethylhexyl (meth)acrylate, phenoxyethyl (meth)acrylate, tetrahydrofurfuryl (meth)acrylate, (meth)acrylic acid vinyl ester, (meth)acrylic acid Propyl ester, benzyl (meth) acrylate, ethylene glycol di(meth) acrylate, diethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, polyethylene glycol Di(meth)acrylate, propylene glycol di(meth)acrylate, 1,4-butanediol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate, trishydroxyl Ethylene tri(meth)acrylate, trimethylolpropane tri(meth)acrylate, dipentaerythritol hexa(meth)acrylate, dipentaerythritol penta(meth)acrylate, pentaerythritol tetra(methyl) Acrylate, pentaerythritol tri(meth)acrylate, tricyclodecane hydroxymethyl di(meth) acrylate, tris[(meth) propylene decylethyl]isocyanurate, polyester (methyl ) an unsaturated monobasic acid such as an acrylate oligomer and an ester of a polyhydric or polyhydric phenol; a metal salt of an unsaturated polybasic acid such as zinc (meth) acrylate or magnesium (meth) acrylate; maleic anhydride; Anhydride, citraconic anhydride, methyltetrahydrophthalic anhydride, tetrahydrophthalic anhydride, trialkyltetrahydrophthalic anhydride, 5-(2,5-dioxotetrahydrofuranyl)-3 -methyl- Unsaturated polybasic acid such as 3-cyclohexene-1,2-dicarboxylic anhydride, trialkyltetrahydrophthalic anhydride-maleic anhydride adduct, dodecenyl succinic anhydride, methyl humic anhydride Anhydride; (meth) acrylamide, methylene bis-(meth) acrylamide, diethylene triamine tri (meth) acrylamide, benzyl bis (meth) acrylamide, An unsaturated monobasic acid such as α-chloropropenylamine or N-2-hydroxyethyl(meth)acrylamide or a polyamine of a polyvalent amine; an unsaturated aldehyde such as acrolein; (meth)acrylonitrile; Unsaturated nitrile such as α-chloroacrylonitrile, vinylidene cyanide, allyl cyanide, etc.; styrene, 4-methylstyrene, 4-ethylstyrene, 4 -methoxystyrene, 4-hydroxystyrene, 4-chlorostyrene, divinylbenzene, vinyl toluene, vinylbenzoic acid, vinylphenol, vinylsulfonic acid, 4-vinylbenzenesulfonic acid, vinyl An unsaturated aromatic compound such as benzyl methyl ether or vinylbenzyl glycidyl ether; an unsaturated ketone such as methyl vinyl ketone; vinylamine, allylamine, N-vinylpyrrolidone or vinylpiperidine Wait no And amine compounds; vinyl alcohols such as allyl alcohol and crotyl alcohol; vinyl groups such as vinyl methyl ether, vinyl ethyl ether, n-butyl vinyl ether, isobutyl vinyl ether, allyl glycidyl ether Ether; unsaturated quinone imines such as maleic imine, N-phenylmaleimide, N-cyclohexylmaleimide; anthracene such as hydrazine or 1-methylhydrazine; Aliphatic conjugated dienes of butadiene, isoprene, chloropentadiene, etc.; polystyrene, poly(methyl) methacrylate, poly(meth) acrylate, n-oxygen An alkane or the like, a macromonomer having a mono(meth)acrylonitrile group at the end of a polymer molecular chain; vinyl chloride, vinylidene chloride, divinyl succinate, diallyl phthalate, triallyl phosphate , triallyl isocyanurate, vinyl sulfide, vinyl imidazole, vinyl Ethylene with azole, vinyl carbazole, vinyl pyrrolidone, vinyl pyridine, vinyl monomer containing hydroxyl group and polyisocyanate compound, vinyl monomer containing hydroxyl group and polyepoxide Epoxy compound.
又,作為上述具有乙烯性不飽和鍵之聚合性化合物,亦可使用:丙烯酸酯之共聚物、或酚及/或甲酚酚醛環氧樹脂;具有多官能環氧基之聚苯基甲烷型環氧樹脂;環氧丙烯酸酯樹脂;使下述通式(II)所示之環氧化合物等環氧化合物與不飽和一元酸作用,並進而再與多元酸酐作用而獲得的樹脂。此等中,較佳為使下述通式(II)所示之環氧化合物等環氧化合物與不飽和一元酸作用,並進而再與多元酸酐作用而獲得的樹脂。又,此等化合物中較佳為含有0.2~1.0當量之不飽和基。 Further, as the polymerizable compound having an ethylenically unsaturated bond, a copolymer of acrylate or a phenol and/or a cresol novolac epoxy resin; a polyphenylmethane ring having a polyfunctional epoxy group may be used. Oxygen resin; epoxy acrylate resin; a resin obtained by reacting an epoxy compound such as an epoxy compound represented by the following formula (II) with an unsaturated monobasic acid and further reacting with a polybasic acid anhydride. In the above, a resin obtained by reacting an epoxy compound such as an epoxy compound represented by the following formula (II) with an unsaturated monobasic acid and further reacting with a polybasic acid anhydride is preferred. Further, it is preferred that these compounds contain 0.2 to 1.0 equivalent of an unsaturated group.
(式中,X1表示直接鍵結、亞甲基、碳原子數1~4之亞烷基、碳原子數3~20之脂環式烴基、O、S、SO2、SS、SO、CO、OCO或下述式(i)、(ii)或(iii)所示之取代基,上述亞烷基,可經鹵素原子取代,R2、R3、R4及R5分別獨立表示氫原子、碳原子數1~5之烷基、碳原子數1~8之烷氧基、碳原子數2~5之烯基或鹵素原子,上述烷基、烷氧基及烯基,可經鹵素原子取代,m為0~10 之整數,m不為0時所存在之光學異構物可為任意異構物)。 (wherein X 1 represents a direct bond, a methylene group, an alkylene group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, O, S, SO 2 , SS, SO, CO Or OCO or a substituent represented by the following formula (i), (ii) or (iii), wherein the above alkylene group may be substituted by a halogen atom, and R 2 , R 3 , R 4 and R 5 each independently represent a hydrogen atom; An alkyl group having 1 to 5 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an alkenyl group having 2 to 5 carbon atoms or a halogen atom, and the above alkyl group, alkoxy group and alkenyl group may pass through a halogen atom Instead, m is an integer from 0 to 10, and the optical isomer present when m is not 0 may be any isomer).
(式中,Z1表示氫原子、可經碳原子數1~10之烷基或碳原子數1~10之烷氧基取代之苯基、或可經碳原子數1~10之烷基或碳原子數1~10之烷氧基取代之碳原子數3~10之環烷基,Y1表示碳原子數1~10之烷基、碳原子數1~10之烷氧基、碳原子數2~10之烯基或鹵素原子,上述烷基、烷氧基及烯基,可經鹵素原子取代,b為0~5之整數)。 (wherein Z 1 represents a hydrogen atom, a phenyl group which may be substituted by an alkyl group having 1 to 10 carbon atoms or an alkoxy group having 1 to 10 carbon atoms, or an alkyl group having 1 to 10 carbon atoms or a cycloalkyl group having 3 to 10 carbon atoms which is substituted by an alkoxy group having 1 to 10 carbon atoms, and Y 1 represents an alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, and a carbon number. An alkenyl group or a halogen atom of 2 to 10, the above alkyl group, alkoxy group and alkenyl group may be substituted by a halogen atom, and b is an integer of 0 to 5).
(式中,Y2及Z2分別獨立表示可經鹵素原子取代之碳原子數1~10之烷基、可經鹵素原子取代之碳原子數6~20之芳基、可經鹵素原子取代之碳原子數6~20之芳氧基、可經鹵素原子取代之碳原子數6~20之芳硫基、可經鹵素原子取代之碳原子數6~20之芳烯基、可經鹵素原子 取代之碳原子數7~20之芳烷基、可經鹵素原子取代之碳原子數2~20之雜環基、或鹵素原子,上述烷基及芳烷基中的伸烷基部份可經不飽和鍵、-O-或-S-中斷,Z2可與鄰接之Z2彼此形成環,p表示0~4之整數,q表示0~8之整數,r表示0~4之整數,s表示0~4之整數,r與s之數合計為2~4之整數)。 (wherein Y 2 and Z 2 each independently represent an alkyl group having 1 to 10 carbon atoms which may be substituted by a halogen atom, an aryl group having 6 to 20 carbon atoms which may be substituted by a halogen atom, and may be substituted by a halogen atom; An aryloxy group having 6 to 20 carbon atoms, an arylthio group having 6 to 20 carbon atoms which may be substituted by a halogen atom, an aralkenyl group having 6 to 20 carbon atoms which may be substituted by a halogen atom, may be substituted by a halogen atom An aralkyl group having 7 to 20 carbon atoms, a heterocyclic group having 2 to 20 carbon atoms which may be substituted by a halogen atom, or a halogen atom, and an alkyl group in the above alkyl group and aralkyl group may be Saturated bond, -O- or -S-interrupt, Z 2 can form a ring with adjacent Z 2 , p represents an integer from 0 to 4, q represents an integer from 0 to 8, r represents an integer from 0 to 4, and s represents An integer from 0 to 4, the total number of r and s is an integer from 2 to 4.
作為與上述環氧化合物作用之上述不飽和一元酸,可列舉如:丙烯酸、甲基丙烯酸、丁烯酸、桂皮酸、山梨酸、羥乙基甲基丙烯酸酯.順丁烯二酸酯、羥乙基丙烯酸酯.順丁烯二酸酯、羥丙基甲基丙烯酸酯.順丁烯二酸酯、羥丙基丙烯酸酯.順丁烯二酸酯、二環戊二烯.順丁烯二酸酯等。 Examples of the unsaturated monobasic acid which acts on the above epoxy compound include acrylic acid, methacrylic acid, crotonic acid, cinnamic acid, sorbic acid, and hydroxyethyl methacrylate. Maleate, hydroxyethyl acrylate. Maleic acid ester, hydroxypropyl methacrylate. Maleic acid ester, hydroxypropyl acrylate. Maleate, dicyclopentadiene. Maleic acid ester and the like.
又,上述不飽和一元酸作用後,作為再與其作用的上述多元酸酐,可列舉如:聯苯四羧酸二酐、四氫鄰苯二甲酸酐、琥珀酸酐、聯苯四甲酸二酐(biphthalic anhydride)、順丁烯二酸酐、偏苯三甲酸酐、均苯四甲酸酐、2,2’-3,3’-二苯基酮四羧酸酐、乙二醇雙偏苯三甲酸酐酯、甘油三偏苯三甲酸酐酯、六氫鄰苯二甲酸酐、甲基四氫鄰苯二甲酸酐、耐地酸酐、甲基耐地酸酐、三烷基四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、5-(2,5-二氧代四氫呋喃基)-3-甲基-3-環己烯-1,2-二羧酸酐、三烷基四氫鄰苯二甲酸酐-順丁烯二酸酐加成物、十二烯基琥珀酸酐、甲基腐植酸酐等。 Further, after the action of the above unsaturated monobasic acid, examples of the polybasic acid anhydride which acts further include biphenyltetracarboxylic dianhydride, tetrahydrophthalic anhydride, succinic anhydride, and biphthalic acid dianhydride (biphthalic). Anhydride), maleic anhydride, trimellitic anhydride, pyromellitic anhydride, 2,2'-3,3'-diphenyl ketone tetracarboxylic anhydride, ethylene glycol trimellitate, glycerol Pyromellitic anhydride, hexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, ceric anhydride, methylic acid anhydride, trialkyltetrahydrophthalic anhydride, hexahydroortylene Methyl anhydride, 5-(2,5-dioxotetrahydrofuranyl)-3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride, trialkyltetrahydrophthalic anhydride-butylene A dianhydride adduct, dodecenyl succinic anhydride, methyl humic anhydride, and the like.
上述環氧化合物、上述不飽和一元酸、及上 述多元酸酐之反應莫耳比,較佳為如下所述。 The above epoxy compound, the above unsaturated monobasic acid, and The reaction molar ratio of the polybasic acid anhydride is preferably as follows.
即,於具有相對於上述環氧化合物之1個環氧基而加成0.1~1.0個上述不飽和一元酸之羧基而成之結構的環氧加成物中,較佳為使上述多元酸酐之酸酐結構相對於該環氧加成物之1個羥基而成為0.1~1.0個的比例。 In other words, in the epoxy adduct having a structure in which 0.1 to 1.0 of the carboxyl groups of the unsaturated monobasic acid are added to one epoxy group of the epoxy compound, the polybasic acid anhydride is preferably used. The acid anhydride structure is in a ratio of 0.1 to 1.0 with respect to one hydroxyl group of the epoxy adduct.
上述環氧化合物、上述不飽和一元酸、及上述多元酸酐之反應可依據常法來進行。 The reaction of the above epoxy compound, the above unsaturated monobasic acid, and the above polybasic acid anhydride can be carried out according to a usual method.
作為上述具有乙烯性不飽和鍵之聚合性化合物,亦可使用下述通式(III)所示之聚合物。 As the polymerizable compound having an ethylenically unsaturated bond, a polymer represented by the following formula (III) can also be used.
(式中,X11表示氫原子或甲基,Y11表示二價連結基、R11表示碳原子數1~20之烷基、碳原子數6~20之芳基或碳原子數7~20之芳烷基,該烷基、芳基及芳烷基,可經鹵素原子、羥基或硝基取代,該烷基及芳烷基中的亞甲基,可用-O-、-S-、-CO-、-COO-、-OCO-或-NH-,或者是組合此等之連結基來中斷,R12、R13及R14分別獨立為氫原子或碳原子,0.1≦t≦0.65,0.3≦m≦0.8, 0≦n≦0.2,t+m+n=1)。 (wherein X 11 represents a hydrogen atom or a methyl group, Y 11 represents a divalent linking group, R 11 represents an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms or a carbon number of 7 to 20 The aralkyl group, the alkyl group, the aryl group and the aralkyl group, may be substituted by a halogen atom, a hydroxyl group or a nitro group, and the methylene group in the alkyl group and the aralkyl group may be -O-, -S-, - CO-, -COO-, -OCO- or -NH-, or a combination of these linkages to interrupt, R 12 , R 13 and R 14 are each independently a hydrogen atom or a carbon atom, 0.1 ≦t ≦ 0.65, 0.3 ≦m≦0.8, 0≦n≦0.2, t+m+n=1).
作為上述通式(III)中Y11所示的二價連結基,可列舉如下述式(1)所示之結構。 The divalent linking group represented by Y 11 in the above formula (III) is a structure represented by the following formula (1).
(式中,X11表示-CR20R21-、-NR20-、二價碳原子數1~35之鏈狀烴基、二價碳原子數3~35之脂環式烴基、二價碳原子數6~35之芳香族烴基或二價碳原子數2~35之雜環基,或者是將此等基複數組合之基,R20及R21表示氫原子、碳原子數1~8之烷基、碳原子數6~20之芳基或碳原子數7~20之芳烷基,Z11及Z12分別獨立表示直接鍵結、-O-、-S-、-SO2-、-SO-、-NR10-、-PR10-,R10表示氫原子、碳原子數1~8之烷基、碳原子數6~20之芳基或碳原子數7~20之芳烷基,該烷基、芳基及芳烷基,可經鹵素原子、羥基或硝基取代,該烷基及芳烷基中的亞甲基,可用-O-、-S-、-CO-、-COO-、-OCO-或-NH-,或者是組合此等之連結基來中斷。但,上述通式(1)所示之基為碳原子數1~35的範圍內)。 (wherein X 11 represents -CR 20 R 21 -, -NR 20 -, a chain hydrocarbon group having a divalent carbon number of 1 to 35, an alicyclic hydrocarbon group having a divalent carbon number of 3 to 35, and a divalent carbon atom; a 6 to 35 aromatic hydrocarbon group or a divalent carbon group having 2 to 35 carbon atoms, or a combination of these groups; R 20 and R 21 represent a hydrogen atom and an alkyl group having 1 to 8 carbon atoms; a group, an aryl group having 6 to 20 carbon atoms or an aralkyl group having 7 to 20 carbon atoms, and Z 11 and Z 12 each independently represent a direct bond, -O-, -S-, -SO 2 -, -SO -, -NR 10 -, -PR 10 -, R 10 represents a hydrogen atom, an alkyl group having 1 to 8 carbon atoms, an aryl group having 6 to 20 carbon atoms or an aralkyl group having 7 to 20 carbon atoms. Alkyl, aryl and aralkyl groups may be substituted by a halogen atom, a hydroxyl group or a nitro group, and the methylene group in the alkyl group and the aralkyl group may be -O-, -S-, -CO-, -COO- And -OCO- or -NH-, or a combination of these linkage groups, is interrupted. However, the group represented by the above formula (1) is in the range of 1 to 35 carbon atoms.
上述具有乙烯性不飽和鍵之聚合性化合物之中,若使用具有酸價之化合物時,可賦予本發明之感光性組成物為鹼顯影性。若使用上述具有酸價之化合物時,其使用量較佳設為上述具有乙烯性不飽和鍵之聚合性化合物整體之50~99質量%。 Among the polymerizable compounds having an ethylenically unsaturated bond, when a compound having an acid value is used, the photosensitive composition of the present invention can be provided with alkali developability. When the compound having an acid value is used, the amount thereof is preferably from 50 to 99% by mass based on the entire polymerizable compound having an ethylenically unsaturated bond.
又,上述具有酸價之化合物,亦可進而藉由與單官能 或多官能環氧化合物反應以調整酸價後予以使用。藉由調整上述具有酸價之化合物之酸價,可改良感光性樹脂之鹼顯影性。上述具有酸價之化合物(即,具有賦予鹼顯影性之乙烯性不飽和鍵之聚合性化合物),固形物之酸價以5~120mgKOH/g之範圍為佳,單官能或多官能環氧化合物之使用量,以能滿足上述酸價之方式來選擇者為佳。 Further, the above-mentioned compound having an acid value can be further controlled by a monofunctional Or a polyfunctional epoxy compound is reacted to adjust the acid value and then used. The alkali developability of the photosensitive resin can be improved by adjusting the acid value of the above-mentioned acid-valent compound. The above-mentioned compound having an acid value (that is, a polymerizable compound having an ethylenically unsaturated bond imparting alkali developability), the acid value of the solid matter is preferably in the range of 5 to 120 mgKOH/g, and the monofunctional or polyfunctional epoxy compound is preferred. The amount of use is preferably selected in such a manner as to satisfy the above-mentioned acid value.
作為上述單官能環氧化合物,列舉例如:甲基丙烯酸縮水甘油酯、甲基縮水甘油醚、乙基縮水甘油醚、丙基縮水甘油醚、異丙基縮水甘油醚、丁基縮水甘油醚、異丁基縮水甘油醚、t-丁基縮水甘油醚、戊基縮水甘油醚、己基縮水甘油醚、庚基縮水甘油醚、辛基縮水甘油醚、壬基縮水甘油醚、癸基縮水甘油醚、十一烷基縮水甘油醚、十二烷基縮水甘油醚、十三烷基縮水甘油醚、十四烷基縮水甘油醚、十五烷基縮水甘油醚、十六烷基縮水甘油醚、2-乙基己基縮水甘油醚、烯丙基縮水甘油醚、炔丙基縮水甘油醚、p-甲氧基乙基縮水甘油醚、苯基縮水甘油醚、p-甲氧基縮水甘油醚、p-丁基酚基縮水甘油醚、甲苯酚基縮水甘油醚、2-甲基甲苯酚基縮水甘油醚、4-壬基苯基縮水甘油醚、苄基縮水甘油醚、p-異丙苯基苯基縮水甘油醚、三苯甲基縮水甘油醚、甲基丙烯酸2,3-環氧丙酯、環氧化大豆油、環氧化亞麻仁油、丁酸縮水甘油酯、乙烯基環己烷一氧化物、1,2-環氧基-4-乙烯基環己烷、苯乙烯氧化物、蒎烯氧化物、甲基苯乙烯氧化物、環氧環己烷、環氧丙烷、上述化合物為No.A2、No.A3等。 Examples of the monofunctional epoxy compound include glycidyl methacrylate, methyl glycidyl ether, ethyl glycidyl ether, propyl glycidyl ether, isopropyl glycidyl ether, butyl glycidyl ether, and the like. Butyl glycidyl ether, t-butyl glycidyl ether, pentyl glycidyl ether, hexyl glycidyl ether, heptyl glycidyl ether, octyl glycidyl ether, decyl glycidyl ether, decyl glycidyl ether, ten Monoalkyl glycidyl ether, lauryl glycidyl ether, tridecyl glycidyl ether, tetradecyl glycidyl ether, pentadecyl glycidyl ether, hexadecyl glycidyl ether, 2-B Hexyl hexyl glycidyl ether, allyl glycidyl ether, propargyl glycidyl ether, p-methoxyethyl glycidyl ether, phenyl glycidyl ether, p-methoxy glycidyl ether, p-butyl Phenol glycidyl ether, cresyl glycidyl ether, 2-methyl cresyl glycidyl ether, 4-mercaptophenyl glycidyl ether, benzyl glycidyl ether, p-isopropylphenyl phenyl glycidol Ether, trityl glycidyl ether, methacrylic acid 2,3-epoxypropyl ester, epoxidized soybean oil, epoxidized linseed oil, glycidyl butyrate, vinylcyclohexane monooxide, 1,2-epoxy-4-vinylcyclohexane A styrene oxide, a decene oxide, a methyl styrene oxide, an epoxycyclohexane, a propylene oxide, and the said compound are No. A2, No. A3, etc..
作為上述多官能環氧化合物,若使用選自由雙酚型環氧化合物及縮水甘油醚類所組成之群中的一種以上之化合物時,可得到特性更加良好的著色感光性樹脂組成物,故宜。 When one or more compounds selected from the group consisting of bisphenol type epoxy compounds and glycidyl ethers are used as the polyfunctional epoxy compound, a coloring photosensitive resin composition having better characteristics can be obtained, and thus it is preferable. .
作為上述雙酚型環氧化合物,除了可使用上述通式(II)所示之環氧化合物以外,亦可使用例如氫化雙酚型環氧化合物等雙酚型環氧化合物。 As the bisphenol type epoxy compound, in addition to the epoxy compound represented by the above formula (II), a bisphenol type epoxy compound such as a hydrogenated bisphenol type epoxy compound can be used.
又,作為上述縮水甘油醚類,可使用:乙二醇二縮水甘油醚、丙二醇二縮水甘油醚、1,4-丁二醇二縮水甘油醚、1,6-己二醇二縮水甘油醚、1,8-辛二醇二縮水甘油醚、1,10-癸二醇二縮水甘油醚、2,2-二甲基-1,3-丙二醇二縮水甘油醚、二乙二醇二縮水甘油醚、三乙二醇二縮水甘油醚、四乙二醇二縮水甘油醚、六乙二醇二縮水甘油醚、1,4-環己二甲醇二縮水甘油醚、1,1,1-三(縮水甘油氧基甲基)丙烷、1,1,1-三(縮水甘油氧基甲基)乙烷、1,1,1-三(縮水甘油氧基甲基)甲烷、1,1,1,1-四(縮水甘油氧基甲基)甲烷等。 Further, as the glycidyl ether, ethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, 1,4-butanediol diglycidyl ether, 1,6-hexanediol diglycidyl ether, or the like can be used. 1,8-octanediol diglycidyl ether, 1,10-nonanediol diglycidyl ether, 2,2-dimethyl-1,3-propanediol diglycidyl ether, diethylene glycol diglycidyl ether , triethylene glycol diglycidyl ether, tetraethylene glycol diglycidyl ether, hexaethylene glycol diglycidyl ether, 1,4-cyclohexane dimethanol diglycidyl ether, 1,1,1-three (shrinkage Glyceryloxymethyl)propane, 1,1,1-tris(glycidoxymethyl)ethane, 1,1,1-tris(glycidoxymethyl)methane, 1,1,1,1 - Tetra(glycidoxymethyl)methane or the like.
此外亦可使用:苯酚酚醛型環氧化合物、聯苯酚醛型環氧化合物、甲酚酚醛型環氧化合物、雙酚A酚醛型環氧化合物、二環戊二烯酚醛型環氧化合物等之酚醛型環氧化合物;3,4-環氧基-6-甲基環己基甲基-3,4-環氧基-6-甲基環己烷羧酸酯、3,4-環氧環己基甲基-3,4-環氧環己烷羧酸酯、1-環氧乙基-3,4-環氧環己烷等之脂環式環氧化合物;鄰苯二甲酸二縮水甘油酯、四氫鄰苯二甲酸二縮水甘油 酯、二聚酸縮水甘油酯等之縮水甘油酯類;四縮水甘油基二胺基二苯基甲烷、三縮水甘油基對胺基苯酚、N,N-二縮水甘油基苯胺等之縮水甘油基胺類;1,3-二縮水甘油基-5,5-二甲基乙內醯脲、異氰脲酸三縮水甘油酯等雜環式環氧化合物;二環戊二烯二氧化物等之二氧化物化合物;萘型環氧化合物;三苯基甲烷型環氧化合物;二環戊二烯型環氧化合物等。 Further, a phenolic novolac type epoxy compound, a biphenol novolak type epoxy compound, a cresol novolac type epoxy compound, a bisphenol A novolac type epoxy compound, a dicyclopentadiene novolac type epoxy compound, or the like may be used. Epoxy compound; 3,4-epoxy-6-methylcyclohexylmethyl-3,4-epoxy-6-methylcyclohexanecarboxylate, 3,4-epoxycyclohexyl An alicyclic epoxy compound such as a 3-,4-epoxycyclohexanecarboxylate or 1-epoxyethyl-3,4-epoxycyclohexane; diglycidyl phthalate, four Hydrogen phthalic acid diglycidyl Glycidyl esters such as esters, glycidyl dimerates, glycidyl groups such as tetraglycidyldiaminediphenylmethane, triglycidyl-aminophenol, N,N-diglycidylaniline, etc. a heterocyclic epoxy compound such as an amine; 1,3-diglycidyl-5,5-dimethylhydantoin or triglycidyl isocyanurate; a dicyclopentadiene dioxide or the like a dioxide compound; a naphthalene type epoxy compound; a triphenylmethane type epoxy compound; a dicyclopentadiene type epoxy compound.
又,本發明之感光性組成物,亦可含有不具有乙烯性不飽和鍵之能賦予鹼顯影性之化合物,作為如此般化合物,只要是具有酸價且為可溶於鹼水溶液之化合物即可,未特別限定,但作為代表性者可舉例鹼可溶性酚醛樹脂(以下簡稱為「酚醛樹脂」)。酚醛樹脂為於酸觸媒之存在下,將酚類與醛類縮聚合所得到者。 Further, the photosensitive composition of the present invention may contain a compound capable of imparting alkali developability without an ethylenically unsaturated bond, and as such a compound, any compound having an acid value and being soluble in an aqueous alkali solution may be used. Although not particularly limited, an alkali-soluble phenol resin (hereinafter simply referred to as "phenolic resin") can be exemplified as a representative. The phenolic resin is obtained by polycondensation of a phenol and an aldehyde in the presence of an acid catalyst.
作為上述酚類,可使用例如:酚、o-甲酚、m-甲酚、p-甲酚、o-乙基酚、m-乙基酚、p-乙基酚、o-丁基酚、m-丁基酚、p-丁基酚、2,3-二甲酚、2,4-二甲酚、2,5-二甲酚、3,4-二甲酚、3,5-二甲酚、2,3,5-三甲基酚、p-苯酚、氫醌、兒茶酚、間苯二酚、2-甲基間苯二酚、苯三酚、α-萘酚、雙酚A、二羥苯甲酸酯、没食子酸酯等;此等酚類之中,較佳為酚、o-甲酚、m-甲酚、p-甲酚、2,5-二甲酚、3,5-二甲酚、2,3,5-三甲基酚、間苯二酚、2-甲基間苯二酚及雙酚A。此等酚類可以單獨或混合2種以上來使用。 As the phenol, for example, phenol, o-cresol, m-cresol, p-cresol, o-ethylphenol, m-ethylphenol, p-ethylphenol, o-butylphenol, or the like can be used. M-butylphenol, p-butylphenol, 2,3-xylenol, 2,4-xylenol, 2,5-xylenol, 3,4-xylenol, 3,5-dimethyl Phenol, 2,3,5-trimethylphenol, p-phenol, hydroquinone, catechol, resorcinol, 2-methylresorcinol, benzenetriol, α-naphthol, bisphenol A , dihydroxybenzoic acid ester, gallic acid ester, etc.; among these phenols, preferred are phenol, o-cresol, m-cresol, p-cresol, 2,5-xylenol, 3, 5-xylenol, 2,3,5-trimethylphenol, resorcinol, 2-methylresorcinol and bisphenol A. These phenols may be used alone or in combination of two or more.
作為上述醛類,可使用例如:甲醛、三聚甲 醛、乙醛、丙醛、苯甲醛、苯乙醛、α-苯丙醛、β-苯丙醛、o-羥苯甲醛、m-羥苯甲醛、p-羥苯甲醛、o-氯基苯甲醛、m-氯基苯甲醛、p-氯基苯甲醛、o-硝基苯甲醛、m-硝基苯甲醛、p-硝基苯甲醛、o-甲基苯甲醛、m-甲基苯甲醛、p-甲基苯甲醛、p-乙基苯甲醛、p-n-丁基苯甲醛等;此等化合物之中,較佳為甲醛、乙醛及苯甲醛。此等醛類可以單獨或混合2種以上來使用。相對於每1莫耳酚類,較佳以0.7~3莫耳,特佳以0.7~2莫耳之比例來使用醛類。 As the above aldehyde, for example, formaldehyde or trimeric can be used. Aldehyde, acetaldehyde, propionaldehyde, benzaldehyde, phenylacetaldehyde, α-phenylpropanal, β-phenylpropanal, o-hydroxybenzaldehyde, m-hydroxybenzaldehyde, p-hydroxybenzaldehyde, o-chlorobenzene Formaldehyde, m-chlorobenzaldehyde, p-chlorobenzaldehyde, o-nitrobenzaldehyde, m-nitrobenzaldehyde, p-nitrobenzaldehyde, o-methylbenzaldehyde, m-methylbenzaldehyde , p-methylbenzaldehyde, p-ethylbenzaldehyde, pn-butylbenzaldehyde, etc.; among these compounds, formaldehyde, acetaldehyde and benzaldehyde are preferred. These aldehydes can be used alone or in combination of two or more. The aldehyde is preferably used in an amount of 0.7 to 3 moles, particularly preferably 0.7 to 2 moles, per 1 mole of phenol.
作為上述酸觸媒,可使用例如:鹽酸、硝酸、硫酸等之無機酸、或甲酸、蓚酸、乙酸等之有機酸。此等酸觸媒之使用量,相對於每1莫耳酚類,較佳為1×10-4~5×10-1莫耳。在縮合反應中,通常作為反應媒質為使用水,但在縮合反應所使用之酚類為不溶解於醛類之水溶液中,而自反應初期起為不均勻系時,作為反應媒質亦可使用親水性溶劑。作為此等親水性溶劑,可列舉例如:甲醇、乙醇、丙醇、丁醇等之醇類,或四氫呋喃、二噁烷等之環狀醚類。此等反應媒質之使用量,相對於反應原料每100質量份,通常為20~1000質量份。縮合反應之反應溫度,可因應反應原料之反應性作適當調整,但通常為10~200℃,較佳為70~150℃。縮合反應終了後,為除去在系內存在之未反應原料、酸觸媒及反應媒質,通常為將內溫使其上昇至130~230℃,在減壓下將揮發分餾去,接著將熔融的酚醛樹脂流涎至鋼製輸送帶等之上並予以回收。 As the acid catalyst, for example, an inorganic acid such as hydrochloric acid, nitric acid or sulfuric acid, or an organic acid such as formic acid, citric acid or acetic acid can be used. The amount of such an acid catalyst to be used is preferably from 1 × 10 -4 to 5 × 10 -1 mol per 1 mol of phenol. In the condensation reaction, water is usually used as the reaction medium. However, when the phenol used in the condensation reaction is not dissolved in the aqueous solution of the aldehyde, and the heterogeneous system is used from the initial stage of the reaction, the hydrophilic material may be used as the reaction medium. Solvent. Examples of such a hydrophilic solvent include alcohols such as methanol, ethanol, propanol, and butanol, and cyclic ethers such as tetrahydrofuran and dioxane. The amount of the reaction medium used is usually 20 to 1000 parts by mass per 100 parts by mass of the reaction raw material. The reaction temperature of the condensation reaction can be appropriately adjusted depending on the reactivity of the reaction raw material, but it is usually 10 to 200 ° C, preferably 70 to 150 ° C. After the end of the condensation reaction, in order to remove the unreacted raw materials, the acid catalyst and the reaction medium present in the system, the internal temperature is usually raised to 130 to 230 ° C, and the volatiles are fractionated under reduced pressure, followed by melting. The phenolic resin flows onto a steel conveyor belt or the like and is recovered.
又,於縮合反應終了後,使反應混合物溶解於前述親水性溶劑中,藉由添加水、n-己烷、n-庚烷等之沈澱劑,使酚醛樹脂析出,將析出物分離,藉由進行加熱乾燥亦可回收。 Further, after the condensation reaction is completed, the reaction mixture is dissolved in the hydrophilic solvent, and a precipitant such as water, n-hexane or n-heptane is added to precipitate the phenol resin to separate the precipitate. It can also be recovered by heating and drying.
除了上述酚醛樹脂以外,作為不具有乙烯性不飽和鍵之能賦予鹼顯影性之化合物之例,可舉例如:聚羥苯乙烯或其衍生物、苯乙烯-順丁烯二酸酐共聚物、聚乙烯羥苯甲酸酯等。 In addition to the above-mentioned phenol resin, examples of the compound capable of imparting alkali developability without an ethylenically unsaturated bond may, for example, be polyhydroxystyrene or a derivative thereof, a styrene-maleic anhydride copolymer, or a poly Vinyl hydroxybenzoate and the like.
本發明之感光性組成物,可使用光聚合起始劑。作為此等光聚合起始劑,可使用以往既知之化合物,列舉例如:二苯基酮、苯聯苯酮、1-羥基-1-苯甲醯環己烷、安息香、苄基二甲基縮酮、1-苄基-1-二甲基胺基-1-(4’-啉基苯甲醯)丙烷、2-嗎啉基-2-(4’-甲基巰基)苯甲醯丙烷、噻吨酮(thioxanthone)、1-氯基-4-丙氧基噻吨酮、異丙基噻吨酮、二乙基噻吨酮、乙基蒽醌、4-苯甲醯-4’-甲基二苯基硫醚、安息香丁基醚、2-羥基-2-苯甲醯丙烷、2-羥基-2-(4’-異丙基)苯甲醯丙烷、4-丁基苯甲醯三氯基甲烷、4-苯氧基苯甲醯二氯基甲烷、苯甲醯甲酸甲酯、1,7-雙(9’-吖啶基)庚烷、9-n-丁基-3,6-雙(2’-啉基異丁醯基)咔唑、2-甲基-4,6-雙(三氯基甲基)-s-三、2-苯-4,6-雙(三氯基甲基)-s-三、2-萘-4,6-雙(三氯基甲基)-s-三、2,2-雙(2-氯基苯)-4,5,4’,5’-四苯-1-2’-聯咪唑、4,4-偶氮雙異丁腈、三苯基膦、樟腦醌、過氧化苯甲醯等;作為市售物,可舉例如:N-1414、N- 1717、N-1919、PZ-408、NCI-831、NCI-930((股)ADEKA公司製)、IRGACURE369、IRGACURE907、IRGACURE OXE 01、IRGACURE OXE 02(BASF(股)公司製)等。 As the photosensitive composition of the present invention, a photopolymerization initiator can be used. As such a photopolymerization initiator, a conventionally known compound can be used, and examples thereof include diphenyl ketone, benzophenone, 1-hydroxy-1-benzhydrylcyclohexane, benzoin, and benzyldimethyl group. Ketone, 1-benzyl-1-dimethylamino-1-(4'- Phenylbenzimidyl)propane, 2-morpholinyl-2-(4'-methylindenyl) benzhydrazine, thioxanthone, 1-chloro-4-propoxythioxanthone, Isopropyl thioxanthone, diethyl thioxanthone, ethyl hydrazine, 4-benzylidene-4'-methyldiphenyl sulfide, benzoin butyl ether, 2-hydroxy-2-benzamide Propane, 2-hydroxy-2-(4'-isopropyl)benzimidazole, 4-butylbenzhydryltrichloromethane, 4-phenoxybenzhydryldichloromethane, benzamidinecarboxylic acid Methyl ester, 1,7-bis(9'-acridinyl)heptane, 9-n-butyl-3,6-bis (2'- Olinoisobutyl) carbazole, 2-methyl-4,6-bis(trichloromethyl)-s-three 2-Benzene-4,6-bis(trichloromethyl)-s-three 2-naphthalene-4,6-bis(trichloromethyl)-s-three , 2,2-bis(2-chlorophenyl)-4,5,4',5'-tetraphenyl-1-2'-biimidazole, 4,4-azobisisobutyronitrile, triphenylphosphine , camphor sputum, benzammonium peroxide, etc.; as a commercial product, for example, N-1414, N-1717, N-1919, PZ-408, NCI-831, NCI-930 (made by ADEKA) ), IRGACURE 369, IRGACURE 907, IRGACURE OXE 01, IRGACURE OXE 02 (manufactured by BASF Co., Ltd.), and the like.
在本發明之感光性組成物中,上述光聚合起始劑之含有量為本發明之感光性組成物中的0.1~30質量%,特佳為0.5~10質量%。當上述光聚合起始劑之含有量較0.1質量%為小時,藉由曝光之硬化有不充分之情形;若較30質量%為大時,在感光性組成物中有起始劑析出之情形。 In the photosensitive composition of the present invention, the content of the photopolymerization initiator is from 0.1 to 30% by mass, particularly preferably from 0.5 to 10% by mass, based on the photosensitive composition of the present invention. When the content of the photopolymerization initiator is less than 0.1% by mass, the curing by exposure is insufficient; if 30% by mass is large, the initiator is precipitated in the photosensitive composition. .
於本發明之感光性組成物中可進而添加著色劑,使成為著色感光性組成物。作為該著色劑,可舉例如:無機著色料、有機著色料。此等著色料可單獨使用1種,亦可併用2種以上。 Further, a coloring agent may be further added to the photosensitive composition of the present invention to form a coloring photosensitive composition. As the coloring agent, for example, an inorganic coloring material or an organic coloring material can be mentioned. These coloring materials may be used alone or in combination of two or more.
作為上述無機著色料及有機著色料,可使用例如:亞硝基化合物、硝基化合物、偶氮化合物、雙偶氮化合物、二苯并哌喃化合物、喹啉化合物、蒽醌化合物、香豆素化合物、酞藍素化合物、異吲哚啉酮化合物、異吲哚啉化合物、喹吖酮化合物、蒽締蒽酮(anthanthrone)化合物、紫環酮化合物、苝化合物、二酮基吡咯并吡咯化合物、硫靛藍化合物、二噁嗪化合物、三苯基甲烷化合物、喹啉黃化合物、萘四羧酸;偶氮染料、花藍染料之金屬錯合物;色澱顏料;藉由爐法、槽法、熱裂法所得之碳黑、或乙炔黑、科琴黑或燈黑等之碳黑;將上述碳黑以環 氧樹脂來作調整、被覆者,將上述碳黑預先在溶劑中以樹脂作分散處理並使吸著20~200mg/g之樹脂者,將上述碳黑作酸性或鹼性表面處理者,以平均粒徑為8nm以上且DBP吸油量為90ml/100g以下者,自於950℃之揮發分中的CO、CO2所算出之總氧量以碳黑之表面積每100m2為9mg以上者;黑鉛、黑鉛化碳黑、活性碳、碳纖維、奈米碳管、微螺旋碳纖維、碳奈米角、碳氣凝膠、富勒烯;苯胺黑、顏料黑7、鈦黑;疏水性樹脂、氧化鉻綠、米洛麗藍、鈷綠、鈷藍、錳系、亞鐵氰化物、磷酸鹽群藍、鐵藍、群藍(ultramarine)、天藍藍(ceruleanblue)、鉻綠色、翡翠綠、硫酸鉛、鉛黃、鋅黃、紅鐵(紅色氧化鐵(III))、鎘紅、合成鐵黑、棕土等之無機顏料或有機顏料。 As the inorganic coloring material and the organic coloring material, for example, a nitroso compound, a nitro compound, an azo compound, a disazo compound, a dibenzopyran compound, a quinoline compound, an anthraquinone compound, or a coumarin compound can be used. , indigo compound, isoindolinone compound, isoporphyrin compound, quinophthalone compound, anthanthrone compound, purple ring ketone compound, hydrazine compound, diketopyrrolopyrrole compound, sulfur Indigo compound, dioxazine compound, triphenylmethane compound, quinoline yellow compound, naphthalenetetracarboxylic acid; metal complex of azo dye, flower blue dye; lake pigment; by furnace method, channel method, thermal cracking Carbon black obtained by the method, or carbon black such as acetylene black, ketjen black or lamp black; if the carbon black is adjusted and coated with an epoxy resin, the carbon black is previously dispersed in a solvent with a resin. When the resin of 20~200mg/g is adsorbed, the carbon black is treated as an acidic or alkaline surface, and the average particle diameter is 8 nm or more and the DBP oil absorption is 90 ml/100 g or less, and the volatile matter from 950 ° C is used. CO in The calculated total oxygen amount of CO 2 to carbon black surface area per 100m 9mg 2 more; graphite, graphite carbon black, activated carbon, carbon fibers, carbon nanotubes, micro spiral carbon fibers, carbon nano horn, carbon Aerogel, fullerene; aniline black, pigment black 7, titanium black; hydrophobic resin, chrome oxide green, milorie blue, cobalt green, cobalt blue, manganese, ferrocyanide, phosphate blue, Iron blue, ultramarine, ceruleanblue, chrome green, emerald green, lead sulfate, lead yellow, zinc yellow, red iron (red iron oxide (III)), cadmium red, synthetic iron black, brown soil Inorganic or organic pigments.
作為上述無機著色料及有機著色料,亦可使用市售之顏料,列舉例如:顏料紅1、2、3、9、10、14、17、22、23、31、38、41、48、49、88、90、97、112、119、122、123、144、149、166、168、169、170、171、177、179、180、184、185、192、200、202、209、215、216、217、220、223、224、226、227、228、240、254;顏料橙13、31、34、36、38、43、46、48、49、51、52、55、59、60、61、62、64、65、71;顏料黃1、3、12、13、14、16、17、20、24、55、60、73、81、83、86、93、95、97、98、100、109、110、113、114、117、120、125、126、127、129、137、138、139、147、 148、150、151、152、153、154、166、168、175、180、185;顏料綠7、10、36;顏料藍15、15:1、15:2、15:3、15:4、15:5、15:6、22、24、56、60、61、62、64;顏料紫1、19、23、27、29、30、32、37、40、50等。 As the inorganic coloring material and the organic coloring material, commercially available pigments may be used, and examples thereof include: Pigment Red 1, 2, 3, 9, 10, 14, 17, 22, 23, 31, 38, 41, 48, 49, 88, 90, 97, 112, 119, 122, 123, 144, 149, 166, 168, 169, 170, 171, 177, 179, 180, 184, 185, 192, 200, 202, 209, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 254; Pigment Orange 13, 31, 34, 36, 38, 43, 46, 48, 49, 51, 52, 55, 59, 60, 61, 62, 64, 65, 71; pigment yellow 1, 3, 12, 13, 14, 16, 17, 20, 24, 55, 60, 73, 81, 83, 86, 93, 95, 97, 98, 100, 109, 110, 113, 114, 117, 120, 125, 126, 127, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 166, 168, 175, 180, 185; pigment green 7, 10, 36; pigment blue 15, 15:1, 15:2, 15:3, 15:4, 15:5, 15:6, 22, 24, 56, 60, 61, 62, 64; Pigment Violet 1, 19, 23, 27, 29, 30, 32, 37, 40, 50, and the like.
作為上述無機著色料及有機著色料,亦可使用周知之染料。作為周知之染料,可列舉例如:偶氮染料、蒽醌染料、靛類染料、三芳基甲烷染料、二苯并哌喃染料、茜素染料、吖啶、茋染料、噻唑染料、萘酚染料、喹啉染料、硝基染料、吲達胺染料、染料、酞藍素染料、花藍染料等之染料等。 As the inorganic coloring material and the organic coloring material, a well-known dye can also be used. As known dyes, for example, azo dyes, anthraquinone dyes, anthraquinone dyes, triarylmethane dyes, dibenzopyran dyes, alizarin dyes, acridines, anthraquinone dyes, thiazole dyes, naphthol dyes, Quinoline dye, nitro dye, indamine dye, Dyes such as dyes, indigo dyes, and blue dyes.
於本發明之著色感光性組成物中,上述著色劑之含有量,相對於上述具有乙烯性不飽和鍵之聚合性化合物100質量份,較佳為0~350質量份,更佳為0~250質量份。當超過350質量份時,使用本發明之著色感光性組成物之硬化物,由於顯示裝置用彩色濾光片的光透過率會降低,且顯示裝置的輝度會降低,故不宜。 In the coloring photosensitive composition of the present invention, the content of the coloring agent is preferably 0 to 350 parts by mass, more preferably 0 to 250, per 100 parts by mass of the polymerizable compound having an ethylenically unsaturated bond. Parts by mass. When the amount is more than 350 parts by mass, the cured product of the colored photosensitive composition of the present invention is used, and since the light transmittance of the color filter for a display device is lowered and the luminance of the display device is lowered, it is not preferable.
可於本發明之感光性組成物及著色感光性組成物中進而添加溶劑。作為該溶劑,通常視需要為可溶解或分散上述各成份(本發明之封端異氰酸酯矽烷等)之溶劑,可列舉例如:甲基乙基酮、甲基戊基酮、二乙基酮、丙酮、甲基異丙基酮、甲基異丁基酮、環己酮、2-庚酮等之酮類;乙基醚、二噁烷、四氫呋喃、1,2-二甲氧基乙烷、1,2-二乙氧基乙烷、二丙二醇二甲醚等之醚系溶劑; 乙酸甲酯、乙酸乙酯、乙酸-n-丙酯、乙酸異丙酯、乙酸n-丁酯、乙酸環己酯、乳酸乙酯、琥珀酸二甲酯、texanol等之酯系溶劑;乙二醇單甲基醚、乙二醇單乙基醚等之賽珞蘇系溶劑;甲醇、乙醇、異丙醇或正丙醇、異丁醇或正丁醇、戊醇等之醇系溶劑;乙二醇單甲基乙酸酯、乙二醇單乙基乙酸酯、丙二醇-1-單甲基醚-2-乙酸酯(PGMEA)、二丙二醇單甲基醚乙酸酯、3-甲氧基丁基乙酸酯、乙氧基乙基丙酸酯等之醚酯系溶劑;苯、甲苯、二甲苯等BTX系溶劑;己烷、庚烷、辛烷、環己烷等脂肪族烴系溶劑;松節油、D-檸檬烯、蒎烯等之萜烯烴油;礦油精、SWAZOL # 310(COSMO松山石油(股))、SOLVESSO # 100(EXXON化學(股))等之鏈烷烴系溶劑;四氯化碳、氯仿、三氯基乙烯、二氯甲烷、1,2-二氯基乙烷等之鹵化脂肪族烴系溶劑;氯基苯等之鹵化芳香族烴類溶劑;卡必醇系溶劑、苯胺、三乙基胺、吡啶、乙酸、乙腈、二硫化碳、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基吡咯啶酮、二甲基亞碸、水等,此等溶劑可單獨使用1種,亦可併用2種以上。此等之中又以酮類、醚酯系溶劑等,特別是丙二醇-1-單甲基醚-2-乙酸酯、環己酮等,在感光性組成物為具有乙烯性不飽和鍵之聚合性化合物時,由於該具有該乙烯性不飽和鍵之化合物與光聚合起始劑之相溶性良好,故宜。 Further, a solvent may be further added to the photosensitive composition of the present invention and the colored photosensitive composition. The solvent is usually a solvent which can dissolve or disperse the above components (the blocked isocyanate decane of the present invention, etc.) as needed, and examples thereof include methyl ethyl ketone, methyl amyl ketone, diethyl ketone, and acetone. a ketone such as methyl isopropyl ketone, methyl isobutyl ketone, cyclohexanone or 2-heptanone; ethyl ether, dioxane, tetrahydrofuran, 1,2-dimethoxyethane, 1 An ether solvent such as 2-diethoxyethane or dipropylene glycol dimethyl ether; Ester ester solvent of methyl acetate, ethyl acetate, -n-propyl acetate, isopropyl acetate, n-butyl acetate, cyclohexyl acetate, ethyl lactate, dimethyl succinate, texanol, etc.; Alcohol monomethyl ether, ethylene glycol monoethyl ether, etc.; an alcoholic solvent such as methanol, ethanol, isopropanol or n-propanol, isobutanol or n-butanol or pentanol; Glycol monomethyl acetate, ethylene glycol monoethyl acetate, propylene glycol-1-monomethyl ether-2-acetate (PGMEA), dipropylene glycol monomethyl ether acetate, 3-methyl An ether ester solvent such as oxybutyl acetate or ethoxyethyl propionate; a BTX solvent such as benzene, toluene or xylene; or an aliphatic hydrocarbon such as hexane, heptane, octane or cyclohexane. a solvent; a terpene oil such as turpentine, D-limonene or decene; a paraffinic solvent such as mineral spirits, SWAZOL #310 (COSMO Matsuyama Petroleum Co., Ltd.), SOLVESSO #100 (EXXON Chemical Co., Ltd.); a halogenated aliphatic hydrocarbon solvent such as carbon tetrachloride, chloroform, trichloroethylene, dichloromethane or 1,2-dichloroethane; a halogenated aromatic hydrocarbon solvent such as chlorobenzene; carbitol Solvent, benzene , triethylamine, pyridine, acetic acid, acetonitrile, carbon disulfide, N,N-dimethylformamide, N,N-dimethylacetamide, N-methylpyrrolidone, dimethyl azine, One type of these solvents may be used alone or two or more types may be used in combination. Among these, a ketone or an ether ester solvent, particularly propylene glycol-1-monomethyl ether-2-acetate or cyclohexanone, is used, and the photosensitive composition has an ethylenically unsaturated bond. In the case of a polymerizable compound, it is preferred that the compound having the ethylenically unsaturated bond has good compatibility with a photopolymerization initiator.
在本發明之感光性組成物中,上述溶劑之使用量,以溶劑以外之組成物之濃度(固形物)為成為 5~30質量%來使用為佳。若較5質量%為小時,使膜厚成為厚者為困難,有無法充分吸收所期望之波長光之情形;若超過30質量%時,由於感光性組成物成分之析出而降低組成物之保存性、或黏度上昇而操作性為降低,故不宜。 In the photosensitive composition of the present invention, the amount of the solvent used is determined by the concentration of the composition other than the solvent (solid matter). 5 to 30% by mass is preferred. When it is less than 5% by mass, it is difficult to make the film thickness thick, and it is difficult to sufficiently absorb the light of a desired wavelength. When it exceeds 30% by mass, the storage of the composition is lowered due to precipitation of the photosensitive component. Sex, or viscosity increases and the operability is reduced, so it is not suitable.
於本發明之感光性組成物中,可進而含有無機化合物。作為該無機化合物,可列舉例如:氧化鎳、氧化鐵、氧化銥、氧化鈦、氧化鋅、氧化鎂、氧化鈣、氧化鉀、二氧化矽、氧化鋁等之金屬氧化物;層狀黏土礦物、米洛麗藍、碳酸鈣、碳酸鎂、鈷系、錳系、玻璃粉末、雲母、滑石、高嶺土、亞鐵氰化物、各種金屬硫酸鹽、硫化物、硒化物、矽酸鋁、矽酸鈣、氫氧化鋁、鉑、金、銀、銅等。此等之中,較佳為氧化鈦、二氧化矽、層狀黏土礦物、銀等。於本發明之感光性組成物中,無機化合物之含有量,相對於上述具有乙烯性不飽和鍵之聚合性化合物100質量份,較佳為0.1~50質量份,更佳為0.5~20質量份。此等無機化合物可單獨使用1種,亦可併用2種以上。 The photosensitive composition of the present invention may further contain an inorganic compound. Examples of the inorganic compound include metal oxides such as nickel oxide, iron oxide, cerium oxide, titanium oxide, zinc oxide, magnesium oxide, calcium oxide, potassium oxide, cerium oxide, and aluminum oxide; layered clay minerals; Milose blue, calcium carbonate, magnesium carbonate, cobalt, manganese, glass powder, mica, talc, kaolin, ferrocyanide, various metal sulfates, sulfides, selenides, aluminum citrate, calcium citrate, Aluminum hydroxide, platinum, gold, silver, copper, and the like. Among these, titanium oxide, cerium oxide, layered clay mineral, silver, and the like are preferable. In the photosensitive composition of the present invention, the content of the inorganic compound is preferably 0.1 to 50 parts by mass, more preferably 0.5 to 20 parts by mass, per 100 parts by mass of the polymerizable compound having an ethylenically unsaturated bond. . These inorganic compounds may be used alone or in combination of two or more.
藉由在本發明之感光性組成物中含有無機化合物,可作為感光性糊料組成物使用。該感光性糊料組成物為用來形成電漿顯示面板之隔壁圖型、介電質圖型、電極圖型及黑色矩陣圖型等之燒成物圖型。此等無機化合物,亦適合作為例如:填充劑、抗反射劑、導電劑、穩定劑、難燃劑、機械強度提昇劑、特殊波長吸收劑、撥油墨 劑等來使用。 The photosensitive composition of the present invention contains an inorganic compound and can be used as a photosensitive paste composition. The photosensitive paste composition is a burn-in pattern for forming a partition pattern, a dielectric pattern, an electrode pattern, and a black matrix pattern of a plasma display panel. These inorganic compounds are also suitable as, for example, fillers, antireflective agents, conductive agents, stabilizers, flame retardants, mechanical strength enhancers, special wavelength absorbers, inks Agents, etc. are used.
在本發明之著色感光性組成物中,使用顏料等的著色料或無機化合物時,可添加分散劑。作為該分散劑,只要可使著色料、無機化合物分散、穩定化者,並無限制,可使用市售之分散劑,例如BYKCHEMIE公司製、BYK系列等,適合使用具有鹼性官能基之聚酯、聚醚、由聚胺基甲酸酯所構成的高分子分散劑,具有氮原子作為鹼性官能基、具有氮原子之官能基為胺及/或其四級鹽,且胺價為1~100mgKOH/g者。 When a coloring material such as a pigment or an inorganic compound is used in the coloring photosensitive composition of the present invention, a dispersing agent can be added. The dispersing agent is not limited as long as it can disperse and stabilize the coloring material or the inorganic compound, and a commercially available dispersing agent such as BYKCHEMIE, BYK series or the like can be used, and a polyester having a basic functional group is suitably used. a polyether or a polymer dispersant composed of a polyurethane having a nitrogen atom as a basic functional group, a functional group having a nitrogen atom as an amine and/or a quaternary salt thereof, and an amine value of 1~ 100mgKOH/g.
又、本發明之感光性組成物中,視需要可添加p-苯甲醚、氫醌、焦兒茶酚、t-丁基兒茶酚、酚噻三等熱聚合抑制劑;可塑劑;接著促進劑;填充劑;消泡劑;調平劑;表面調整劑;抗氧化劑;紫外線吸收劑;分散助劑;抗凝聚劑;觸媒;效果促進劑;交聯劑;增黏劑等慣用之添加物。 Further, in the photosensitive composition of the present invention, p-anisole, hydroquinone, pyrocatechol, t-butylcatechol, phenolthiophene may be added as needed. Isothermal polymerization inhibitor; plasticizer; subsequent accelerator; filler; antifoaming agent; leveling agent; surface conditioner; antioxidant; ultraviolet absorber; dispersing aid; anti-agglomerating agent; catalyst; Conventional additives such as cross-linking agents; tackifiers.
於本發明之感光性組成物中,封端異氰酸酯矽烷、具有乙烯性不飽和鍵之聚合性化合物及光聚合起始劑以外之任意成分(但,溶劑除外)之含有量,可依據其使用目的而適當選擇並無特別限制,較佳為相對於上述具有乙烯性不飽和鍵之聚合性化合物之含有量100質量份,以合計設為50質量份以下。 In the photosensitive composition of the present invention, the content of the blocked isocyanate decane, the polymerizable compound having an ethylenically unsaturated bond, and the optional component other than the photopolymerization initiator (excluding the solvent) may be used depending on the purpose of use. The content of the polymerizable compound having an ethylenically unsaturated bond is preferably 100 parts by mass or less based on 100 parts by mass of the total amount of the polymerizable compound having an ethylenically unsaturated bond.
又,藉由使上述具有乙烯性不飽和鍵之聚合性化合物與其他有機聚合物一起使用,亦可改善由本發明之感光性組成物所構成的硬化物特性。作為上述有機聚合 物,列舉例如:聚苯乙烯、聚甲基丙烯酸甲酯、甲基丙烯酸甲酯-丙烯酸乙酯共聚物、聚(甲基)丙烯酸、苯乙烯-(甲基)丙烯酸共聚物、(甲基)丙烯酸-甲基丙烯酸甲酯共聚物、乙烯-氯乙烯共聚物、乙烯-乙烯基共聚物、聚氯乙烯樹脂、ABS樹脂、尼龍6、尼龍66、尼龍12、胺基甲酸酯樹脂、聚碳酸酯聚乙烯丁醛、纖維素酯、聚丙烯醯胺、飽和聚酯、酚樹脂、苯氧基樹脂、聚醯胺醯亞胺樹脂、聚醯胺酸樹脂、環氧樹脂等,此等之中,較佳為聚苯乙烯、(甲基)丙烯酸-甲基丙烯酸甲酯共聚物、環氧樹脂。 Further, by using the above polymerizable compound having an ethylenically unsaturated bond together with another organic polymer, the properties of the cured product composed of the photosensitive composition of the present invention can be improved. As the above organic polymerization For example, polystyrene, polymethyl methacrylate, methyl methacrylate-ethyl acrylate copolymer, poly(meth)acrylic acid, styrene-(meth)acrylic acid copolymer, (methyl) Acrylic-methyl methacrylate copolymer, ethylene-vinyl chloride copolymer, ethylene-vinyl copolymer, polyvinyl chloride resin, ABS resin, nylon 6, nylon 66, nylon 12, urethane resin, polycarbonate Ester polyvinyl butyral, cellulose ester, polypropylene decylamine, saturated polyester, phenol resin, phenoxy resin, polyamidoximine resin, polyamine resin, epoxy resin, etc. Preferred are polystyrene, (meth)acrylic acid-methyl methacrylate copolymer, and epoxy resin.
於使用其他有機聚合物時,其使用量相對於上述具有乙烯性不飽和鍵之聚合性化合物100質量份,較佳為10~500質量份。 When the other organic polymer is used, the amount thereof is preferably from 10 to 500 parts by mass based on 100 parts by mass of the polymerizable compound having an ethylenically unsaturated bond.
本發明之感光性組成物中,可進而併用具有不飽和鍵之單體、鏈轉移劑、增感劑、界面活性劑、三聚氰胺等。 In the photosensitive composition of the present invention, a monomer having an unsaturated bond, a chain transfer agent, a sensitizer, a surfactant, melamine or the like can be used in combination.
作為具有上述不飽和鍵之單體,可舉例如:丙烯酸-2-羥乙酯、丙烯酸-2-羥丙酯、丙烯酸異丁酯、丙烯酸n-辛酯、丙烯酸異辛酯、丙烯酸異壬酯、丙烯酸十八酯、丙烯酸甲氧基乙酯、丙烯酸二甲基胺基乙酯、丙烯酸鋅、1,6-己二醇二丙烯酸酯、三羥甲基丙烷三丙烯酸酯、甲基丙烯酸-2-羥乙酯、甲基丙烯酸-2-羥丙酯、甲基丙烯酸丁酯、甲基丙烯酸第三丁酯、甲基丙烯酸環己酯、三羥甲基丙烷三甲基丙烯酸酯、二季戊四醇五丙烯酸酯、二季 戊四醇六丙烯酸酯、季戊四醇四丙烯酸酯、季戊四醇三丙烯酸酯、雙酚A二縮水甘油醚(甲基)丙烯酸酯、雙酚F二縮水甘油醚(甲基)丙烯酸酯、雙酚Z二縮水甘油醚(甲基)丙烯酸酯、三丙二醇二(甲基)丙烯酸酯等。 The monomer having the above unsaturated bond may, for example, be 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, isobutyl acrylate, n-octyl acrylate, isooctyl acrylate or isodecyl acrylate. , octadecyl acrylate, methoxyethyl acrylate, dimethylaminoethyl acrylate, zinc acrylate, 1,6-hexanediol diacrylate, trimethylolpropane triacrylate, methacrylic acid-2 -Hydroxyethyl ester, 2-hydroxypropyl methacrylate, butyl methacrylate, tert-butyl methacrylate, cyclohexyl methacrylate, trimethylolpropane trimethacrylate, dipentaerythritol Acrylate, second season Pentaerythritol hexaacrylate, pentaerythritol tetraacrylate, pentaerythritol triacrylate, bisphenol A diglycidyl ether (meth) acrylate, bisphenol F diglycidyl ether (meth) acrylate, bisphenol Z condensed water Glycerol ether (meth) acrylate, tripropylene glycol di (meth) acrylate, and the like.
作為上述鏈轉移劑、增感劑,通常為使用含有硫原子之化合物。列舉例如:硫代乙醇酸、硫代蘋果酸、硫代水楊酸、2-巰基丙酸、3-巰基丙酸、3-巰基丁酸、N-(2-巰基丙醯基)甘胺酸、2-巰基菸鹼酸、3-〔N-(2-巰基乙基)胺甲醯基〕丙酸、3-〔N-(2-巰基乙基)胺基〕丙酸、N-(3-巰基丙醯基)丙胺酸、2-巰基乙磺酸、3-巰基丙磺酸、4-巰基丁磺酸、月桂基(4-甲硫基)苯醚、2-巰基乙醇、3-巰基-1,2-丙二醇、1-巰基-2-丙醇、3-巰基-2-丁醇、巰基酚、2-巰基乙基胺、2-巰基咪唑、2-巰基苯并咪唑、2-巰基-3-吡啶酚、2-巰基苯并噻唑、巰基乙酸、三羥甲基丙烷三(3-巰基丙酸酯)、季戊四醇四(3-巰基丙酸酯)等之巰基化合物;將該巰基化合物氧化而獲得的二硫醚化合物;碘乙酸、碘丙酸、2-碘乙醇、2-碘乙磺酸、3-碘丙磺酸等之碘烷基化合物;三羥甲基丙烷三(3-巰基異丁酸酯)、丁二醇雙(3-巰基異丁酸酯)、己烷二硫醇、癸烷二硫醇、1,4-二甲基巰基苯、丁二醇雙硫代丙酸酯、丁二醇雙硫代乙醇酸酯、乙二醇雙硫代乙醇酸酯、三羥甲基丙烷三硫代乙醇酸酯、丁二醇雙硫代丙酸酯、三羥甲基丙烷三硫代丙酸酯、三羥甲基丙烷三硫代乙醇酸酯、季戊四醇四硫代丙酸酯、季戊四醇四硫代乙醇酸酯、三羥 基乙基三硫代丙酸酯;下述化合物No.C1、三巰基丙酸三(2-羥乙基)異氰脲酸酯等之脂肪族多官能硫醇化合物;昭和電工公司製Karenz MT BD1、PE1、NR1等。 As the chain transfer agent or the sensitizer, a compound containing a sulfur atom is usually used. For example: thioglycolic acid, thiomalic acid, thiosalicylic acid, 2-mercaptopropionic acid, 3-mercaptopropionic acid, 3-mercaptobutyric acid, N-(2-amidinopropyl)glycine , 2-mercaptonicotinic acid, 3-[N-(2-mercaptoethyl)amine,carbenyl]propionic acid, 3-[N-(2-mercaptoethyl)amino]propanoic acid, N-(3 - mercaptopropyl) alanine, 2-mercaptoethanesulfonic acid, 3-mercaptopropanesulfonic acid, 4-mercaptobutanesulfonic acid, lauryl (4-methylthio)phenyl ether, 2-mercaptoethanol, 3-mercapto -1,2-propanediol, 1-mercapto-2-propanol, 3-mercapto-2-butanol, nonylphenol, 2-mercaptoethylamine, 2-mercaptoimidazole, 2-mercaptobenzimidazole, 2-mercapto a mercapto compound such as 3-pyridylphenol, 2-mercaptobenzothiazole, thioglycolic acid, trimethylolpropane tris(3-mercaptopropionate), pentaerythritol tetrakis(3-mercaptopropionate); a disulfide compound obtained by oxidation; an iodoalkyl compound such as iodoacetic acid, iodopropionic acid, 2-iodoethanol, 2-iodoethanesulfonic acid or 3-iodopropanesulfonic acid; trimethylolpropane tris(3- Mercaptoisobutyrate), butanediol bis(3-mercaptoisobutyrate), hexanedithiol, decanedithiol, 1,4-dimethylnonylbenzene Butanediol dithiopropionate, butanediol dithioglycolate, ethylene glycol dithioglycolate, trimethylolpropane trithioglycolate, butanediol dithiopropionic acid Ester, trimethylolpropane trithiopropionate, trimethylolpropane trithioglycolate, pentaerythritol tetrathiopropionate, pentaerythritol tetrathioglycolate, trihydroxyl Alkyl trithiopropionate; an aliphatic polyfunctional thiol compound such as the following compound No. C1, tris(2-hydroxyethyl)isocyanurate; and Karenz MT manufactured by Showa Denko BD1, PE1, NR1, and the like.
作為上述界面活性劑,可使用全氟烷基磷酸酯、全氟烷基羧酸鹽等之氟素界面活性劑;高級脂肪酸鹼式鹽、烷基磺酸鹽、烷基硫酸鹽等陰離子系界面活性劑、高級胺鹵酸鹽、四級銨鹽等陽離子系界面活性劑;聚乙二醇烷基醚、聚乙二醇脂肪酸酯、山梨糖醇酐脂肪酸酯、脂肪酸單甘油脂等非離子界面活性劑;兩性界面活性劑;聚矽氧系界面活性劑等界面活性劑,此等亦可組合使用。 As the surfactant, a fluorochemical surfactant such as a perfluoroalkyl phosphate or a perfluoroalkyl carboxylate; an anionic system such as a higher fatty acid basic salt, an alkyl sulfonate or an alkyl sulfate; Cationic surfactants such as surfactants, higher amine halides, and quaternary ammonium salts; polyethylene glycol alkyl ethers, polyethylene glycol fatty acid esters, sorbitan fatty acid esters, fatty acid monoglycerides, etc. A nonionic surfactant; an amphoteric surfactant; a surfactant such as a polyoxymethylene surfactant, or these may be used in combination.
作為上述三聚氰胺化合物,可列舉如:(聚)羥甲基三聚氰胺、(聚)羥甲基甘脲、(聚)羥甲基苯并胍胺、(聚)羥甲基脲等氮化合物中之活性羥甲基(CH2OH基)之全部或一部分(至少2個)為經烷基醚化之化合物。此處,作為構成烷基醚之烷基,可列舉:甲基、乙基或丁基,此等可互相相同,亦可互相不同。又,未經烷基醚化之羥甲基,可在一分子內進行自身縮合,亦可在二分子間進行縮合,其結果亦可形成低聚物成分。具體而言,可使用六甲氧基甲基三聚氰胺、六丁氧基甲基三 聚氰胺、四甲氧基甲基甘脲、四丁氧基甲基甘脲等。此等中又以六甲氧基甲基三聚氰胺、六丁氧基甲基三聚氰胺等經烷基醚化之三聚氰胺為佳。 Examples of the melamine compound include activities in nitrogen compounds such as (poly)methylol melamine, (poly)hydroxymethyl glycoluril, (poly)hydroxymethylbenzoguanamine, and (poly)hydroxymethylurea. All or a portion (at least 2) of the methylol group (CH 2 OH group) is a compound etherified with an alkyl group. Here, examples of the alkyl group constituting the alkyl ether include a methyl group, an ethyl group, and a butyl group, and these may be the same or different from each other. Further, the methylol group which is not alkyl etherified can be self-condensed in one molecule or condensed between two molecules, and as a result, an oligomer component can be formed. Specifically, hexamethoxymethyl melamine, hexabutoxymethyl melamine, tetramethoxymethyl glycoluril, tetrabutoxymethyl glycoluril or the like can be used. Among these, melamine which is alkyl etherified, such as hexamethoxymethyl melamine or hexabutoxymethyl melamine, is preferred.
本發明之感光性組成物可利用旋轉塗佈機、輥塗佈機、棒式塗佈機、模塗佈機、淋幕式塗佈機、各種印刷、浸漬等周知手段,適用於鈉玻璃、石英玻璃、半導體基板、金屬、紙、塑膠等之支持基體上。又,亦可暫時施加在薄膜等之支持基體上後,再轉印至其他支持基體上,其適用方法並無限制。 The photosensitive composition of the present invention can be applied to soda glass by a known means such as a spin coater, a roll coater, a bar coater, a die coater, a curtain coater, various printing, and dipping. On the supporting substrate of quartz glass, semiconductor substrate, metal, paper, plastic, etc. Further, it may be temporarily applied to a support substrate such as a film, and then transferred to another support substrate, and the application method is not limited.
又,作為本發明之感光性組成物硬化時所使用之活性光之光源,可使用發出波長300~450nm之光,例如可使用超高壓水銀、水銀蒸氣弧燈、碳弧燈、氙弧燈等。 Further, as the light source of the active light used for curing the photosensitive composition of the present invention, light having a wavelength of 300 to 450 nm can be used, and for example, ultrahigh pressure mercury, mercury vapor arc lamp, carbon arc lamp, xenon arc lamp, or the like can be used. .
進而、藉由使用雷射光作為曝光光源,不使用遮罩,由電腦等之數位資訊直接形成圖像的雷射直接繪圖法,不但可提高生產性,而且對解像性或位置精度等之提昇為適合的,作為該雷射光,適宜使用波長為340~430nm之光,亦可使用氬離子雷射、氦氖雷射、YAG雷射、及半導體雷射等可發出可見光至紅外光區域之光者。於使用此等雷射時,係添加能吸收可見光至紅外光之該等區域的增感色素。 Further, by using laser light as an exposure light source, a laser direct drawing method in which an image is directly formed by digital information such as a computer without using a mask can improve productivity and improve resolution or positional accuracy. Suitably, as the laser light, light having a wavelength of 340 to 430 nm is suitably used, and light of a visible light to an infrared light region such as an argon ion laser, a krypton laser, a YAG laser, or a semiconductor laser may be used. By. When such lasers are used, sensitizing dyes capable of absorbing visible light to the infrared light are added.
本發明之感光性組成物(或其硬化物),可用於光硬化性塗料或清漆;光硬化性接著劑;印刷基板或彩色電視、PC螢幕、攜帶型資訊終端機、數位相機等彩 色顯示之液晶顯示面板中的彩色濾光片;CCD影像感測器之彩色濾光片;觸控面板;電漿顯示面板用電極材料;粉末塗層;印刷油墨;印刷版;接著劑;牙科用組成物;光造形用樹脂、凝膠塗層;電子學用光阻劑;電鍍阻劑;蝕刻阻劑;液狀及乾燥膜之雙方;防焊劑;絶緣膜;用以製造各種顯示用途用之彩色濾光片,或於電漿顯示面板、電氣發光顯示裝置、及LCD之製造步驟中,用以形成結構的抗蝕劑;用以封裝電氣及電子零件之組成物;阻焊劑;磁氣記錄材料;微小機械零件;波導;光開關;鍍敷用遮罩;蝕刻遮罩、色彩試驗系統、玻璃纖維電纜塗層、網板印刷用模板;用於藉由立體微影技術製造三維物體之材料;全像記錄用材料;圖像記錄材料;微細電子電路;脫色材料;用於圖像記錄材料之脫著材料;使用微膠囊之圖像記錄材料用之脫色材料、印刷配線板用光阻劑材料;UV及可見雷射直接圖像系統用之光阻劑材料;印刷電路基板之逐次積層中形成介電層所使用的光阻劑材料或保護膜等各種用途,其用途並無特別限制。 The photosensitive composition of the present invention (or a cured product thereof) can be used for a photocurable paint or varnish; a photocurable adhesive; a printed circuit board, a color television, a PC screen, a portable information terminal, a digital camera, etc. Color filter in color display liquid crystal display panel; color filter of CCD image sensor; touch panel; electrode material for plasma display panel; powder coating; printing ink; printing plate; adhesive; Composition; photo-forming resin, gel coating; electronic photoresist; plating resist; etching resist; both liquid and dry film; solder resist; insulating film; a color filter, or a resist for forming a structure in a manufacturing step of a plasma display panel, an electroluminescence display device, and an LCD; a package for packaging electrical and electronic parts; a solder resist; a magnetic gas Recording material; micro mechanical parts; waveguide; optical switch; plating mask; etching mask, color test system, fiberglass cable coating, template for screen printing; Material; holographic recording material; image recording material; fine electronic circuit; decolorizing material; detaching material for image recording material; decolorizing material for image recording material using microcapsule, A photoresist material for a brush wiring board; a photoresist material for a UV and visible laser direct image system; a photoresist material or a protective film used for forming a dielectric layer in a successive layer of a printed circuit board, Its use is not particularly limited.
本發明之著色感光性組成物,以使用於形成黑色矩陣為目的。該黑色矩陣特以對於液晶顯示面板等圖像顯示裝置用之顯示裝置用彩色濾光片為適合。 The colored photosensitive composition of the present invention is used for the purpose of forming a black matrix. This black matrix is suitable for a color filter for a display device for an image display device such as a liquid crystal display panel.
又,本發明之顯示裝置用彩色濾光片,除本發明之硬化物之外,亦可具有紅、綠、藍、橙、紫及黑之光學要素。 Further, the color filter for a display device of the present invention may have optical elements of red, green, blue, orange, purple, and black in addition to the cured product of the present invention.
上述黑色矩陣,較佳可藉由如下步驟而形 成:(1)於基板上形成本發明之著色感光性組成物(特以著色鹼顯影性感光性組成物)之塗膜之步驟,(2)經由具有特定圖型形狀之遮罩對此等塗膜照射活性光之步驟,(3)將曝光後之該被膜以顯影液(特以鹼顯影液)進行顯影之步驟,(4)對顯影後之該等被膜進行加熱之步驟。又,本發明之著色感光性組成物,亦適合有利作為無顯影步驟之噴墨方式、轉印方式之著色組成物。 The above black matrix is preferably formed by the following steps (1) a step of forming a coating film of the coloring photosensitive composition of the present invention (specifically, a coloring alkali-developing photosensitive composition) on a substrate, and (2) using a mask having a specific pattern shape. The step of irradiating the active light with the coating film, (3) the step of developing the film after exposure with a developing solution (specifically, an alkali developing solution), and (4) the step of heating the film after development. Further, the colored photosensitive composition of the present invention is also suitable as a coloring composition which is advantageous as an inkjet method and a transfer method without a developing step.
用於液晶顯示面板等之彩色濾光片之製造,可使用本發明或其他以外之著色組成物,反覆進行上述(1)~(4)之步驟,組合2色以上之圖型而製成。 For the production of a color filter for a liquid crystal display panel or the like, the coloring composition of the present invention or the like can be used, and the steps (1) to (4) described above can be repeated to combine two or more patterns.
以下,列舉實施例等對本發明進行更詳細說明,但本發明並不限定此等實施例。 Hereinafter, the present invention will be described in more detail by way of examples, but the invention is not limited thereto.
在氮雰囲氣下,將甲基乙基酮肟500質量份、及丙二醇-1-單甲基醚-2-乙酸酯(PGMEA)100質量份裝入於四頸燒瓶中,使甲基乙基酮肟溶解於PGMEA中。接著,將內溫保持在40℃以下,邊持續攪拌,並以1小時來添加3-異氰酸酯三乙氧基丙基矽烷200質量份,之後,以內溫40℃下攪拌1小時。用IR確認異氰酸酯基之波峰已消失後,獲得封端異氰酸酯矽烷No.1。 500 parts by mass of methyl ethyl ketone oxime and 100 parts by mass of propylene glycol-1-monomethyl ether-2-acetate (PGMEA) were placed in a four-necked flask under nitrogen atmosphere to obtain a methyl group. Ethyl ketoxime is dissolved in PGMEA. Next, while maintaining the internal temperature at 40 ° C or lower, stirring was continued, and 200 parts by mass of 3-isocyanate triethoxypropyl decane was added over 1 hour, followed by stirring at an internal temperature of 40 ° C for 1 hour. After confirming that the peak of the isocyanate group had disappeared by IR, blocked isocyanate decane No. 1 was obtained.
在氮雰囲氣下,裝入3,5-二甲基吡唑500質量份、及丙二醇-1-單甲基醚-2-乙酸酯(PGMEA)100質量份,使甲基乙基酮肟溶解於PGMEA中。接著,內溫保持40℃以下,持續攪拌,以1小時來添加3-異氰酸酯三乙氧基丙基矽烷200質量份,之後,以內溫40℃下攪拌1小時。用IR確認異氰酸酯基之波峰已消失後,獲得作為PGMEA溶液之封端異氰酸酯矽烷No.2。 500 parts by mass of 3,5-dimethylpyrazole and 100 parts by mass of propylene glycol-1-monomethyl ether-2-acetate (PGMEA) were added under a nitrogen atmosphere to make methyl ethyl ketone肟 is dissolved in PGMEA. Then, the internal temperature was maintained at 40 ° C or lower, and stirring was continued. 200 parts by mass of 3-isocyanate triethoxypropyl decane was added over 1 hour, and then the mixture was stirred at an internal temperature of 40 ° C for 1 hour. After confirming that the peak of the isocyanate group had disappeared by IR, blocked isocyanate decane No. 2 as a PGMEA solution was obtained.
裝入1,1-雙〔4-(2,3-環氧丙基氧基)苯基〕茚烷30.0g、丙烯酸7.52g、2,6-二-t-丁基-p-甲酚0.080g、四丁基氯化銨0.183g、及PGMEA11.0g,於90℃下攪拌1小時、於105℃下攪拌1小時及於120℃下17小時攪拌。冷卻至室溫後添加琥珀酸酐8.11g、四丁基氯化銨0.427g及PGMEA11.1g,於100℃下攪拌5小時。再者,添加1,1-雙〔4-(2,3-環氧丙基氧基)苯基〕茚烷12.0g、2,6-二-t-丁基-p-甲酚0.080g、及PGMEA0.600g,於90℃下攪拌90分、於120℃下攪拌5小時後,添加PGMEA24.0g後獲得作為PGMEA溶液之鹼顯影性感光性樹脂No.1(Mw=4900、Mn=2250,酸價(固形物)47mg.KOH/g)。 3,1 g of 1,1-bis[4-(2,3-epoxypropyloxy)phenyl]decane, 7.52 g of acrylic acid, and 2,6-di-t-butyl-p-cresol 0.080 g, tetrabutylammonium chloride 0.183 g, and PGMEA 11.0 g were stirred at 90 ° C for 1 hour, at 105 ° C for 1 hour, and at 120 ° C for 17 hours. After cooling to room temperature, 8.11 g of succinic anhydride, 0.427 g of tetrabutylammonium chloride and 11.1 g of PGMEA were added, and the mixture was stirred at 100 ° C for 5 hours. Further, 12.0 g of 1,1-bis[4-(2,3-epoxypropyloxy)phenyl]decane and 0.080 g of 2,6-di-t-butyl-p-cresol were added. And PGMEA 0.600 g, stirred at 90 ° C for 90 minutes, and stirred at 120 ° C for 5 hours, and then added 24.0 g of PGMEA to obtain an alkali-developable photosensitive resin No. 1 as a PGMEA solution (Mw=4900, Mn=2250, Acid value (solids) 47 mg.KOH/g).
裝入雙酚茀型環氧樹脂(環氧當量231)184g、丙烯酸58g、2,6-二-tert-丁基-p-甲酚0.26g、四-n-丁基溴化銨0.11g、及PGMEA23g,於120℃下攪拌16小時。將反應液冷卻至室溫添加PGMEA35g、聯苯四甲酸二酐59g及四-n-丁基溴化銨0.24g,於120℃下攪拌4小時。進而,添加四氫鄰苯二甲酸酐20g,於120℃下攪拌4小時、於100℃下攪拌3小時、於80℃下攪拌4小時、於60℃下攪拌6小時、於40℃下攪拌11小時後,添加PGMEA90g獲得作為PGMEA溶液之鹼顯影性感光性樹脂No.2(Mw=5000、Mn=2100、酸價(固形物)92.7mgKOH/g)。 184 g of bisphenolphthalein type epoxy resin (epoxy equivalent 231), 58 g of acrylic acid, 0.26 g of 2,6-di-tert-butyl-p-cresol, and 0.11 g of tetra-n-butylammonium bromide were charged. And PGMEA23g, stirred at 120 ° C for 16 hours. The reaction solution was cooled to room temperature, and 35 g of PGMEA, 59 g of biphenyltetracarboxylic dianhydride, and 0.24 g of tetra-n-butylammonium bromide were added, and the mixture was stirred at 120 ° C for 4 hours. Further, 20 g of tetrahydrophthalic anhydride was added, and the mixture was stirred at 120 ° C for 4 hours, at 100 ° C for 3 hours, at 80 ° C for 4 hours, at 60 ° C for 6 hours, and at 40 ° C for 11 hours. After an hour, PGMEA 90 g was added to obtain an alkali-developable photosensitive resin No. 2 (Mw=5000, Mn=2100, acid value (solid content): 92.7 mgKOH/g) as a PGMEA solution.
裝入1,1-雙(4’-環氧丙基氧基苯基)-1-(1”-聯苯)-1-環己基甲烷43g、丙烯酸11g、2,6-二-tert-丁基-p-甲酚0.05g、四丁基乙酸銨0.11g及PGMEA23g,於120℃下攪拌16小時。冷卻至室溫添加PGMEA35g及聯苯四羧酸二酐9.4g,於120℃下攪拌8小時。再者,添加四氫鄰苯二甲酸酐6.0g,於120℃下攪拌4小時、於100℃下攪拌3小時、於80℃下攪拌4小時、於60℃下攪拌6小時、於40℃下攪拌11小時後,添加PGMEA29g,獲得作為目標物之PGMEA溶液之鹼顯影性感光性樹脂No.3(Mw=4000、Mn=2100、酸價(固形物)86mgKOH/g)。 Loading 1,1-bis(4'-epoxypropyloxyphenyl)-1-(1"-biphenyl)-1-cyclohexylmethane 43g, acrylic acid 11g, 2,6-di-tert-butyl 0.05 g of p-cresol and 0.11 g of tetrabutylammonium acetate and 23 g of PGMEA were stirred at 120 ° C for 16 hours. After cooling to room temperature, 35 g of PGMEA and 9.4 g of biphenyltetracarboxylic dianhydride were added, and the mixture was stirred at 120 ° C. In addition, 6.0 g of tetrahydrophthalic anhydride was added, and the mixture was stirred at 120 ° C for 4 hours, at 100 ° C for 3 hours, at 80 ° C for 4 hours, and at 60 ° C for 6 hours at 40 ° C. After stirring at ° C for 11 hours, 29 g of PGMEA was added to obtain an alkali-developable photosensitive resin No. 3 (Mw=4000, Mn=2100, acid value (solid content) 86 mgKOH/g) of the target PGMEA solution.
根據下述表1及表2之配合,獲得著色感光性組成物No.1~No.7(分別對應於實施例1-1~實施例1-7)、感光性組成物No.8(對應於實施例1-8)及比較著色感光性組成物No.1~No.2(分別對應於比較例1-1、比較例1-2)。尚,數字係表示質量份。 Coloring photosensitive compositions No. 1 to No. 7 (corresponding to Examples 1-1 to 1-7, respectively) and photosensitive composition No. 8 (corresponding to the following Tables 1 and 2) In the examples 1-8) and the colored photosensitive compositions No. 1 to No. 2 (corresponding to Comparative Example 1-1 and Comparative Example 1-2, respectively). Still, the numbers are for mass.
A-1 封端異氰酸酯矽烷No.1 A-1 blocked isocyanate decane No.1
A-2 封端異氰酸酯矽烷No.2 A-2 blocked isocyanate decane No. 2
A’-1 3-異氰酸酯丙基三乙氧基矽烷 A'-1 3-isocyanate propyl triethoxy decane
A’-2 3-環氧丙氧基丙基三乙氧基矽烷 A'-2 3-glycidoxypropyltriethoxydecane
B-1 鹼顯影性感光性樹脂No.1 B-1 Alkali-developed photosensitive resin No.1
B-2 鹼顯影性感光性樹脂No.2 B-2 Alkali-developed photosensitive resin No. 2
B-3 鹼顯影性感光性樹脂No.3 B-3 Alkali-developed photosensitive resin No.3
B-4 SPC-1000(丙烯樹脂;昭和電工公司製) B-4 SPC-1000 (acrylic resin; manufactured by Showa Denko)
C-1 IRGACURE907(光聚合起始劑;BASF公司製) C-1 IRGACURE907 (photopolymerization initiator; manufactured by BASF Corporation)
C-2 NCI-831(光聚合起始劑;ADEKA公司製) C-2 NCI-831 (photopolymerization initiator; manufactured by ADEKA)
C-3 N-1919(光聚合起始劑;ADEKA公司製) C-3 N-1919 (photopolymerization initiator; manufactured by ADEKA)
C-4 NCI-930(光聚合起始劑;ADEKA公司製) C-4 NCI-930 (photopolymerization initiator; manufactured by ADEKA)
D-1 KAYARAD R-684(三環癸烷二甲醇二丙烯酸酯;日本化藥公司製) D-1 KAYARAD R-684 (tricyclodecane dimethanol diacrylate; manufactured by Nippon Kayaku Co., Ltd.)
D-2 ARONIX M-405(多官能丙烯酸酯;東亞合成公司製) D-2 ARONIX M-405 (multifunctional acrylate; manufactured by Toagosei Co., Ltd.)
D-3 ARONIX M-402(多官能丙烯酸酯;東亞合成公司製) D-3 ARONIX M-402 (multifunctional acrylate; manufactured by Toagosei Co., Ltd.)
E 碳黑(MA100;三菱化學公司製) E carbon black (MA100; manufactured by Mitsubishi Chemical Corporation)
F-1 環己酮 F-1 cyclohexanone
F-2 PGMEA F-2 PGMEA
將封端異氰酸酯矽烷No.2的1.0質量份、NK ORIGO EA-1020(雙酚A型環氧丙烯酸酯;新中村化學工業公司製)58.8質量份、ARONIX M-313(多官能丙烯酸酯;東亞合成公司製)39.2質量份、NCI-930的1.0質量份,用3軸輥進行混練,接著用行星式混合機來攪拌消泡。在50mm×25mm×厚度4.0mm之無鹼玻璃上使用分配器(dispenser)進行塗佈,使其貼合同尺寸玻璃。藉由通過400nm短波長濾波器之高壓水銀燈(750W),將405nm的光以3000mJ/cm2來照射,以120℃×1小時來使其硬化。 1.0 parts by mass of blocked isocyanate decane No. 2, NK ORIGO EA-1020 (bisphenol A epoxy acrylate; manufactured by Shin-Nakamura Chemical Co., Ltd.) 58.8 parts by mass, ARONIX M-313 (polyfunctional acrylate; East Asia) 39.2 parts by mass of a synthetic product company and 1.0 part by mass of NCI-930 were kneaded by a 3-axis roll, followed by stirring and defoaming with a planetary mixer. It was coated on a 50 mm × 25 mm × 4.0 mm thick alkali-free glass using a dispenser to coat a contract size glass. The light of 405 nm was irradiated at 3000 mJ/cm 2 by a high-pressure mercury lamp (750 W) passing through a 400 nm short-wavelength filter, and hardened at 120 ° C for 1 hour.
除不使用封端異氰酸酯矽烷No.2以外,與實施例2以同樣作法來使比較感光性組成物硬化。 The comparative photosensitive composition was cured in the same manner as in Example 2 except that the blocked isocyanate decane No. 2 was not used.
將實施例1-1~1-7所得之著色感光性組成物No.1~No.7、實施例1-8所得之感光性組成物No.8及比較例1-1~1-2所得之比較著色感光性組成物No.1~No.2,以410rpm×7秒之條件下塗佈於玻璃基板上,用加熱板使其乾燥(90℃、90秒)。使用超高壓水銀燈對所得之塗膜以(150mJ/cm2)進行曝光。使用作為顯影液之2.5質量%碳酸鈉水溶液,以旋轉式顯影機45秒顯影後,充份地水洗,於230℃下後烘烤30分後使圖型定著。對於後烘烤後之塗膜,進行下述評價。將結果表示於表1及表2中。 The coloring photosensitive compositions No. 1 to No. 7 obtained in Examples 1-1 to 1-7, the photosensitive composition No. 8 obtained in Example 1-8, and Comparative Examples 1-1 to 1-2 were obtained. The colored photosensitive compositions No. 1 to No. 2 were applied to a glass substrate at 410 rpm × 7 seconds, and dried by a hot plate (90 ° C, 90 seconds). The obtained coating film was exposed to (150 mJ/cm 2 ) using an ultrahigh pressure mercury lamp. After developing in a rotary developing machine for 45 seconds using a 2.5% by mass aqueous sodium carbonate solution as a developing solution, the mixture was washed with water, and baked at 230 ° C for 30 minutes to fix the pattern. For the coating film after post-baking, the following evaluation was performed. The results are shown in Tables 1 and 2.
依據JIS K5600-5-6之棋盤格膠帶法(格子法),於後烘烤後之塗膜上置入切痕,將所得測試片放入壓力鍋測試機中,於120℃/100%RH/2氣壓之條件下,進行2小時處理。以膠帶剝除,藉由計算棋盤格100個中之剝離個數,作為附著性測試。 According to the checkerboard tape method (lattice method) of JIS K5600-5-6, a cut mark is placed on the film after post-baking, and the obtained test piece is placed in a pressure cooker test machine at 120 ° C / 100% RH / Under 2 conditions, the treatment was carried out for 2 hours. Stripping with tape was performed as an adhesion test by calculating the number of peels in 100 of the checkerboard.
對於實施例2及比較例2所得之測試片,使用萬用測試機HG-200(島津科學公司製)來測定接著強度。結果表示於表3中。 For the test pieces obtained in Example 2 and Comparative Example 2, the joint strength was measured using a universal tester HG-200 (manufactured by Shimadzu Scientific Co., Ltd.). The results are shown in Table 3.
由以上結果可得知,含有由封端異氰酸酯矽烷所成的矽烷偶合劑之本發明之著色感光性組成物,其為密接性優越者。因此,本發明之著色感光性組成物為適合於黑色矩陣。 From the above results, it is understood that the colored photosensitive composition of the present invention containing a decane coupling agent composed of blocked isocyanate decane is excellent in adhesion. Therefore, the colored photosensitive composition of the present invention is suitable for a black matrix.
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JP5251393B2 (en) * | 2008-03-28 | 2013-07-31 | 日立化成株式会社 | Adhesive composition, adhesive for circuit connection, and connection body using the same |
JP2009294538A (en) * | 2008-06-06 | 2009-12-17 | Hitachi Chem Co Ltd | Photosensitive resin composition and photosensitive element |
JP5357570B2 (en) * | 2009-02-24 | 2013-12-04 | 東京応化工業株式会社 | Photosensitive resin composition, color filter, and liquid crystal display |
JPWO2013146130A1 (en) * | 2012-03-30 | 2015-12-10 | 東レ株式会社 | Silane coupling agent, photosensitive resin composition, cured film, and touch panel member |
-
2013
- 2013-05-23 JP JP2014521241A patent/JP6301249B2/en active Active
- 2013-05-23 KR KR1020147034008A patent/KR102092659B1/en active Active
- 2013-05-23 WO PCT/JP2013/064404 patent/WO2013187209A1/en active Application Filing
- 2013-05-23 CN CN201380031157.4A patent/CN104380199A/en active Pending
- 2013-06-05 TW TW102119930A patent/TWI590000B/en active
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JP6301249B2 (en) | 2018-03-28 |
JPWO2013187209A1 (en) | 2016-02-04 |
KR20150027076A (en) | 2015-03-11 |
CN104380199A (en) | 2015-02-25 |
WO2013187209A1 (en) | 2013-12-19 |
TW201413390A (en) | 2014-04-01 |
KR102092659B1 (en) | 2020-03-24 |
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