TWI551948B - A photosensitive resin composition for forming a spacer, a spacer, a display device, and a method for forming a spacer - Google Patents
A photosensitive resin composition for forming a spacer, a spacer, a display device, and a method for forming a spacer Download PDFInfo
- Publication number
- TWI551948B TWI551948B TW101135580A TW101135580A TWI551948B TW I551948 B TWI551948 B TW I551948B TW 101135580 A TW101135580 A TW 101135580A TW 101135580 A TW101135580 A TW 101135580A TW I551948 B TWI551948 B TW I551948B
- Authority
- TW
- Taiwan
- Prior art keywords
- group
- spacer
- photosensitive resin
- forming
- resin composition
- Prior art date
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- 125000006850 spacer group Chemical group 0.000 title claims description 131
- 239000011342 resin composition Substances 0.000 title claims description 78
- 238000000034 method Methods 0.000 title claims description 25
- 150000001875 compounds Chemical class 0.000 claims description 100
- -1 sulfino, sulfo, sulfonato, phosphino, phosphinyl Chemical group 0.000 claims description 62
- 229920005989 resin Polymers 0.000 claims description 58
- 239000011347 resin Substances 0.000 claims description 58
- 125000000962 organic group Chemical group 0.000 claims description 47
- 125000004432 carbon atom Chemical group C* 0.000 claims description 42
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 28
- 230000015572 biosynthetic process Effects 0.000 claims description 27
- 239000000178 monomer Substances 0.000 claims description 25
- 125000003396 thiol group Chemical group [H]S* 0.000 claims description 17
- 125000001424 substituent group Chemical group 0.000 claims description 15
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 13
- 239000003999 initiator Substances 0.000 claims description 12
- 125000003118 aryl group Chemical group 0.000 claims description 11
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 11
- 125000005842 heteroatom Chemical group 0.000 claims description 11
- 125000000101 thioether group Chemical group 0.000 claims description 11
- 239000003086 colorant Substances 0.000 claims description 10
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 125000004122 cyclic group Chemical group 0.000 claims description 8
- 125000005843 halogen group Chemical group 0.000 claims description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 7
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 6
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 claims description 6
- 125000003277 amino group Chemical group 0.000 claims description 5
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 5
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 5
- 125000000018 nitroso group Chemical group N(=O)* 0.000 claims description 5
- 125000005328 phosphinyl group Chemical group [PH2](=O)* 0.000 claims description 5
- 125000000626 sulfinic acid group Chemical group 0.000 claims description 5
- 125000001273 sulfonato group Chemical group [O-]S(*)(=O)=O 0.000 claims description 5
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical group OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 claims description 4
- 125000003342 alkenyl group Chemical group 0.000 claims description 4
- 125000004414 alkyl thio group Chemical group 0.000 claims description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-O ammonium group Chemical group [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims description 3
- 125000005160 aryl oxy alkyl group Chemical group 0.000 claims description 3
- 125000005496 phosphonium group Chemical group 0.000 claims description 3
- GQPLMRYTRLFLPF-UHFFFAOYSA-N nitrous oxide Inorganic materials [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims 1
- 125000000394 phosphonato group Chemical group [O-]P([O-])(*)=O 0.000 claims 1
- 125000001476 phosphono group Chemical group [H]OP(*)(=O)O[H] 0.000 claims 1
- 125000000547 substituted alkyl group Chemical group 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 52
- 239000000758 substrate Substances 0.000 description 33
- 125000002723 alicyclic group Chemical group 0.000 description 31
- 125000003700 epoxy group Chemical group 0.000 description 31
- 229920001577 copolymer Polymers 0.000 description 28
- 239000000049 pigment Substances 0.000 description 24
- 125000000217 alkyl group Chemical group 0.000 description 21
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 17
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 16
- 150000002430 hydrocarbons Chemical group 0.000 description 16
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 15
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 15
- 239000000470 constituent Substances 0.000 description 13
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 12
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 11
- 239000002904 solvent Substances 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 238000011156 evaluation Methods 0.000 description 10
- 150000001735 carboxylic acids Chemical class 0.000 description 9
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 9
- 239000006229 carbon black Substances 0.000 description 8
- 239000000975 dye Substances 0.000 description 8
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 8
- 238000006116 polymerization reaction Methods 0.000 description 8
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 6
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 6
- 239000000654 additive Substances 0.000 description 6
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 6
- 239000002585 base Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 6
- 239000002270 dispersing agent Substances 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 6
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 5
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 5
- 239000006096 absorbing agent Substances 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 5
- 238000007334 copolymerization reaction Methods 0.000 description 5
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 5
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 5
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 4
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 4
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 4
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 4
- 150000002148 esters Chemical class 0.000 description 4
- 125000001072 heteroaryl group Chemical group 0.000 description 4
- 125000000592 heterocycloalkyl group Chemical group 0.000 description 4
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 4
- 239000011976 maleic acid Substances 0.000 description 4
- 239000012860 organic pigment Substances 0.000 description 4
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 125000003367 polycyclic group Chemical group 0.000 description 4
- 239000011541 reaction mixture Substances 0.000 description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 4
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 3
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Natural products P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 3
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 3
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 125000003545 alkoxy group Chemical group 0.000 description 3
- 239000012965 benzophenone Substances 0.000 description 3
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 3
- 229940018557 citraconic acid Drugs 0.000 description 3
- 125000000392 cycloalkenyl group Chemical group 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 3
- 150000002170 ethers Chemical class 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 3
- 150000002790 naphthalenes Chemical class 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 3
- UEZVMMHDMIWARA-UHFFFAOYSA-M phosphonate Chemical compound [O-]P(=O)=O UEZVMMHDMIWARA-UHFFFAOYSA-M 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 125000000542 sulfonic acid group Chemical group 0.000 description 3
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 3
- 229920001567 vinyl ester resin Polymers 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- QYGBYAQGBVHMDD-XQRVVYSFSA-N (z)-2-cyano-3-thiophen-2-ylprop-2-enoic acid Chemical compound OC(=O)C(\C#N)=C/C1=CC=CS1 QYGBYAQGBVHMDD-XQRVVYSFSA-N 0.000 description 2
- MBNMGGKBGCIEGF-UHFFFAOYSA-N 1,1-diethoxypropane Chemical compound CCOC(CC)OCC MBNMGGKBGCIEGF-UHFFFAOYSA-N 0.000 description 2
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 2
- GYPMBQZAVBFUIZ-UHFFFAOYSA-N 1,2-dimethoxy-4-methylbenzene Chemical compound COC1=CC=C(C)C=C1OC GYPMBQZAVBFUIZ-UHFFFAOYSA-N 0.000 description 2
- VZXTWGWHSMCWGA-UHFFFAOYSA-N 1,3,5-triazine-2,4-diamine Chemical compound NC1=NC=NC(N)=N1 VZXTWGWHSMCWGA-UHFFFAOYSA-N 0.000 description 2
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 2
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-dioxonaphthalene Natural products C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 2
- BOKGTLAJQHTOKE-UHFFFAOYSA-N 1,5-dihydroxynaphthalene Chemical compound C1=CC=C2C(O)=CC=CC2=C1O BOKGTLAJQHTOKE-UHFFFAOYSA-N 0.000 description 2
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 2
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 2
- FENFUOGYJVOCRY-UHFFFAOYSA-N 1-propoxypropan-2-ol Chemical compound CCCOCC(C)O FENFUOGYJVOCRY-UHFFFAOYSA-N 0.000 description 2
- FGQLGYBGTRHODR-UHFFFAOYSA-N 2,2-diethoxypropane Chemical compound CCOC(C)(C)OCC FGQLGYBGTRHODR-UHFFFAOYSA-N 0.000 description 2
- GFISDBXSWQMOND-UHFFFAOYSA-N 2,5-dimethoxyoxolane Chemical compound COC1CCC(OC)O1 GFISDBXSWQMOND-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- DZZAHLOABNWIFA-UHFFFAOYSA-N 2-butoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCCCC)C(=O)C1=CC=CC=C1 DZZAHLOABNWIFA-UHFFFAOYSA-N 0.000 description 2
- FLFWJIBUZQARMD-UHFFFAOYSA-N 2-mercapto-1,3-benzoxazole Chemical compound C1=CC=C2OC(S)=NC2=C1 FLFWJIBUZQARMD-UHFFFAOYSA-N 0.000 description 2
- 229940054266 2-mercaptobenzothiazole Drugs 0.000 description 2
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- MWDGNKGKLOBESZ-UHFFFAOYSA-N 2-oxooctanal Chemical compound CCCCCCC(=O)C=O MWDGNKGKLOBESZ-UHFFFAOYSA-N 0.000 description 2
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 2
- CGOJOQBYEAVATL-UHFFFAOYSA-N 3-(4-methoxyphenyl)prop-2-enoyl chloride Chemical compound COC1=CC=C(C=CC(Cl)=O)C=C1 CGOJOQBYEAVATL-UHFFFAOYSA-N 0.000 description 2
- DKIDEFUBRARXTE-UHFFFAOYSA-N 3-mercaptopropanoic acid Chemical compound OC(=O)CCS DKIDEFUBRARXTE-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 2
- ALYNCZNDIQEVRV-UHFFFAOYSA-N 4-aminobenzoic acid Chemical compound NC1=CC=C(C(O)=O)C=C1 ALYNCZNDIQEVRV-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N Acrylic acid Chemical class OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical group [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
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- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
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Landscapes
- Materials For Photolithography (AREA)
- Liquid Crystal (AREA)
Description
本發明係關於間隔物形成用感光性樹脂組成物、間隔物、顯示裝置、及間隔物之形成方法。 The present invention relates to a photosensitive resin composition for forming a spacer, a spacer, a display device, and a method of forming a spacer.
液晶顯示裝置、有機EL方式之顯示裝置等之顯示裝置中因應各種之目的,於2枚基板間形成既定高度之空間用之間隔物受到利用。例如,液晶面板中,由於係採用將液晶材料以2枚玻璃基板等之透明基板予以夾芯之構造,故若要可填充液晶材料,則必須在2枚基板間形成間隔物。 In a display device such as a liquid crystal display device or an organic EL display device, a spacer for forming a space of a predetermined height between two substrates is used for various purposes. For example, in the liquid crystal panel, since the liquid crystal material is sandwiched by a transparent substrate such as two glass substrates, it is necessary to form a spacer between the two substrates in order to fill the liquid crystal material.
過往,形成間隔物係採用在基板之全表面上散佈成為間隔物之圓珠粒子的方法。但,此方法則難以在高位置精度下形成間隔物,且由於畫素顯示部分亦會附著圓珠,而有造成畫像之對比或顯示畫質降低之問題。因此,近年來已提出各種藉由感光性樹脂組成物而形成此間隔物之方法(參考專利文獻1、2等)。此方法係將感光性樹脂組成物塗布於基板上,經由既定之遮罩進行曝光後,予以顯像而形成點(dot)狀等之間隔物者,亦可單僅在畫素顯示部分以外之既定部分形成間隔物。 In the past, the formation of a spacer was a method of dispersing ball beads which were spacers on the entire surface of the substrate. However, this method makes it difficult to form spacers with high positional accuracy, and since the pixel display portion also adheres to the beads, there is a problem that the contrast of the portraits or the display image quality is lowered. Therefore, various methods for forming such a spacer by a photosensitive resin composition have been proposed in recent years (refer to Patent Documents 1, 2, etc.). In this method, a photosensitive resin composition is applied onto a substrate, exposed to light through a predetermined mask, and then developed to form a spacer such as a dot, or may be used only in the pixel display portion. The predetermined portion forms a spacer.
[專利文獻1]日本特開2006-184841號公報 [Patent Document 1] Japanese Laid-Open Patent Publication No. 2006-184841
[專利文獻2]日本特開2006-308961號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2006-308961
液晶顯示裝置等之顯示裝置逐年為了取得高精細之畫像而增加畫素數量,伴隨於此,形成於基板上之間隔物之直徑亦必須進行小徑化。但,過往形成間隔物用所使用之感光性樹脂組成物具有難以形成小徑間隔物之問題。 A display device such as a liquid crystal display device increases the number of pixels in order to obtain a high-definition image, and accordingly, the diameter of the spacer formed on the substrate must be reduced in diameter. However, the photosensitive resin composition used for forming spacers in the past has a problem that it is difficult to form a small-diameter spacer.
又,近年來對於各種顯示裝置期望低價格化,在顯示裝置之複雜製造步驟中亦強烈希望降低成本。 Further, in recent years, it has been desired to reduce the price of various display devices, and it is strongly desired to reduce the cost in the complicated manufacturing steps of the display device.
由降低成本之觀點,在使用感光性樹脂組成物形成間隔物之步驟中,曝光裝置係以使用接近式曝光裝置為佳。其係由於接近式曝光裝置較為平價,故可減少設備投資額。但,在使用接近式曝光裝置時,由在光罩與基板之間會產生曝光間隙,而尤其有難以形成小徑之間隔物之問題。 From the viewpoint of cost reduction, in the step of forming a spacer using the photosensitive resin composition, it is preferable to use a proximity exposure device in the exposure apparatus. Because the proximity exposure device is relatively cheap, it can reduce equipment investment. However, when a proximity exposure apparatus is used, an exposure gap is generated between the photomask and the substrate, and in particular, it is difficult to form a spacer having a small diameter.
本發明係有鑑於此般過往之實情所完成者,以提供即使在曝光裝置係使用接近式曝光裝置形成間隔物之情況時,仍可容易形成小徑之間隔物之間隔物形成用感光性樹脂組成物、由該感光性樹脂組成物所形成之間隔物、具備該間隔物之顯示裝置、及使用該感光性樹脂組成物之間隔物之形成方法為目的者。 The present invention has been made in view of the facts of the past, and provides a photosensitive resin for spacer formation which can easily form a spacer having a small diameter even when a spacer is formed using a proximity exposure apparatus in an exposure apparatus. A composition, a spacer formed of the photosensitive resin composition, a display device including the spacer, and a method of forming a spacer using the photosensitive resin composition are intended.
本發明者們為了解決上述課題經過精心研究。其結果發現藉由對包含鹼可溶性樹脂(A)、光聚合性單體(B)及光聚合起始劑(C)之間隔物形成用感光性樹脂組成物配合特定構造之化合物,即可解決上述課題,進而完成了本發明。具體而言,本發明係提供如以下者。 The present inventors have carefully studied in order to solve the above problems. As a result, it has been found that a compound having a specific structure can be prepared by combining a photosensitive resin composition for forming a spacer containing an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C). The above problems have further completed the present invention. In particular, the present invention provides the following.
本發明之第一態樣為一種間隔物形成用感光性樹脂組成物,其係含有鹼可溶性樹脂(A)、光聚合性單體(B)、光聚合起始劑(C)及下述式(1)所表示之化合物。 The first aspect of the present invention is a photosensitive resin composition for forming a spacer, which comprises an alkali-soluble resin (A), a photopolymerizable monomer (B), a photopolymerization initiator (C), and the following formula (1) The compound represented.
本發明之第二態樣為一種間隔物,其係由第一態樣之間隔物形成用感光性樹脂組成物所形成者。 A second aspect of the present invention is a spacer formed by forming a spacer resin composition of a first aspect.
本發明之第三態樣為一種顯示裝置,其係具備第二態樣之間隔物。 A third aspect of the invention is a display device having a second aspect spacer.
本發明之第四態樣為一種間隔物之形成方法,其係包含在基板上塗布第一態樣之間隔物形成用感光性樹脂組成物而形成感光性樹脂層的塗布步驟、因應既定間隔物之圖型而曝光感光性樹脂層的曝光步驟、顯像已曝光之感光性樹脂層而形成間隔物圖型的顯像步驟。 A fourth aspect of the present invention provides a method for forming a spacer, comprising: applying a photosensitive resin composition for forming a spacer of a first aspect on a substrate to form a photosensitive resin layer, and applying a predetermined spacer; In the pattern, the exposure step of exposing the photosensitive resin layer, and the exposure of the exposed photosensitive resin layer to form a spacer pattern are developed.
根據本發明可提供即使在曝光裝置係使用接近式曝光裝置形成間隔物之情況時,仍可容易形成小徑之間隔物之間隔物形成用感光性樹脂組成物、由該感光性樹脂組成物所形成之間隔物、具備該間隔物之顯示裝置、及使用該感光性樹脂組成物之間隔物之形成方法。 According to the present invention, it is possible to provide a photosensitive resin composition for spacer formation which can easily form a spacer having a small diameter even when a spacer is formed by a proximity exposure apparatus, and the photosensitive resin composition is used. A spacer formed, a display device including the spacer, and a method of forming a spacer using the photosensitive resin composition.
本發明之間隔物形成用感光性樹脂組成物(以下,亦稱為「感光性樹脂組成物」)至少含有鹼可溶性樹脂(A)、光聚合性單體(B)、光聚合起始劑(C)、及上述之式(1)所表示之化合物。以下,詳細說明關於本發明之間隔物形成用感光性樹脂組成物中所含有之各成分。 The photosensitive resin composition for forming a spacer of the present invention (hereinafter also referred to as "photosensitive resin composition") contains at least an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator ( C), and a compound represented by the above formula (1). Hereinafter, each component contained in the photosensitive resin composition for forming a spacer of the present invention will be described in detail.
鹼可溶性樹脂係指藉由樹脂濃度20質量%之樹脂溶液(溶劑:丙二醇單甲基醚乙酸酯),在基板上形成膜厚1μm之樹脂膜,且浸漬於濃度0.05質量%之KOH水溶液中1分鐘後,溶解膜厚0.01μm以上者。 The alkali-soluble resin is a resin film having a film thickness of 1 μm formed on a substrate by a resin solution (solvent: propylene glycol monomethyl ether acetate) having a resin concentration of 20% by mass, and is immersed in a KOH aqueous solution having a concentration of 0.05% by mass. After 1 minute, the film thickness was 0.01 μm or more.
鹼可溶性樹脂(A)只要係過往間隔物形成用感光性樹脂組成物所使用之樹脂即無特別限制,可適宜選擇使用。作為適宜之鹼可溶性樹脂(A),由可容易取得破壞強度或對基板之密著性優異之間隔物之觀點,可舉出如包含至少使不飽和羧酸(a1)與含脂環式環氧基之不飽和化合物(a2)聚合之共聚物(A1)者。 The alkali-soluble resin (A) is not particularly limited as long as it is a resin used for the photosensitive resin composition for forming a spacer, and can be suitably used. The alkali-soluble resin (A) is preferably a material containing at least an unsaturated carboxylic acid (a1) and an alicyclic ring, from the viewpoint of easily obtaining a separator having excellent breaking strength or adhesion to a substrate. The copolymer (A1) in which the oxy unsaturated compound (a2) is polymerized.
不飽和羧酸(a1)可舉出如(甲基)丙烯酸、丁烯酸等之單羧酸;馬來酸、富馬酸、檸康酸、中康酸、伊康酸等之二羧酸;此等二羧酸之酐等。此等之中,由共聚合反應性、所得之樹脂之鹼溶解性、取得容易性等之觀點,亦以(甲基)丙烯酸及無水馬來酸為佳。此等不飽和羧酸(a1)可使用單獨使用或可將2種以上組合使用。 The unsaturated carboxylic acid (a1) may, for example, be a monocarboxylic acid such as (meth)acrylic acid or crotonic acid; or a dicarboxylic acid such as maleic acid, fumaric acid, citraconic acid, mesaconic acid or itaconic acid. Such anhydrides of dicarboxylic acids and the like. Among these, (meth)acrylic acid and anhydrous maleic acid are also preferable from the viewpoints of copolymerization reactivity, alkali solubility of the obtained resin, ease of availability, and the like. These unsaturated carboxylic acids (a1) may be used alone or in combination of two or more.
含脂環式環氧基之不飽和化合物(a2)只要係具有脂 環式環氧基之不飽和化合物即無特別限定。構成脂環式環氧基之脂環式基可為單環亦可為多環。單環之脂環式基可舉出如環戊基、環己基等。又,多環之脂環式基可舉出如降莰基、異莰基、三環壬基、三環癸基、四環十二基等。此等含脂環式環氧基之不飽和化合物(a2)可單獨使用或可將2種以上組合使用。 The alicyclic epoxy group-containing unsaturated compound (a2) is as long as it has a fat The cyclic epoxy group-unsaturated compound is not particularly limited. The alicyclic group constituting the alicyclic epoxy group may be a single ring or a polycyclic ring. The monocyclic alicyclic group may, for example, be a cyclopentyl group or a cyclohexyl group. Further, examples of the polycyclic alicyclic group include a thiol group, an isodecyl group, a tricyclic fluorenyl group, a tricyclic fluorenyl group, a tetracyclic decyl group, and the like. These alicyclic epoxy group-containing unsaturated compounds (a2) may be used singly or in combination of two or more.
具體而言,含脂環式環氧基之不飽和化合物(a2),可舉出例如下述式(a2-1)~(a2-16)所表示之化合物。此等之中,為了可作成適宜顯像性者,亦以下述式(a2-1)~(a2-6)所表示之化合物為佳,下述式(a2-1)~(a2-4)所表示之化合物為較佳。 Specifically, the alicyclic epoxy group-containing unsaturated compound (a2) may, for example, be a compound represented by the following formulas (a2-1) to (a2-16). Among these, in order to obtain suitable imaging properties, compounds represented by the following formulas (a2-1) to (a2-6) are preferred, and the following formulas (a2-1) to (a2-4) are preferred. The compound represented is preferred.
上述式中,R11表示氫原子或甲基,R12表示碳數1~6之2價脂肪族飽和烴基,R13表示碳數1~10之2價烴基,n表示0~10之整數。R12以為直鏈狀或分支鏈狀之伸烷基,例如亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基為佳。R13例如以亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基、伸苯基、伸環己基、-CH2-Ph-CH2-(Ph表示伸苯基)為佳。 In the above formula, R 11 represents a hydrogen atom or a methyl group, R 12 represents a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, R 13 represents a divalent hydrocarbon group having 1 to 10 carbon atoms, and n represents an integer of 0 to 10. R 12 that extends straight or branched chain alkyl group of, for example, methylene, ethyl stretching, stretch propyl, tetramethylene, ethyl extending ethyl, pentamethylene, hexamethylene preferred. R 13 is, for example, methylene, ethyl, propyl, tetramethylene, ethylethyl, pentamethylene, hexamethylene, phenyl, cyclohexyl, -CH 2 -Ph- CH 2 - (Ph represents a phenylene group) is preferred.
共聚物(A1)亦可為使上述不飽和羧酸(a1)及上述含脂環式環氧基之不飽和化合物(a2)一同與不具有環氧基之含脂環式基之不飽和化合物(a3)聚合而成者。 The copolymer (A1) may be an unsaturated compound containing the above unsaturated carboxylic acid (a1) and the above alicyclic epoxy group-containing unsaturated compound (a2) together with an alicyclic group-free unsaturated compound having no epoxy group. (a3) Polymerization.
含脂環式基之不飽和化合物(a3)只要係具有脂環式基之不飽和化合物即無特別限定。脂環式基可為單環亦可為多環。單環之脂環式基可舉出如環戊基、環己基等。又,多環之脂環式基可舉出如金剛烷基、降莰基、異莰基、三環壬基、三環癸基、四環十二基等。此等含脂環式基之不飽和化合物(a3)可單獨使用或可將2種以上組合使用。 The alicyclic group-containing unsaturated compound (a3) is not particularly limited as long as it is an unsaturated compound having an alicyclic group. The alicyclic group may be a single ring or a polycyclic ring. The monocyclic alicyclic group may, for example, be a cyclopentyl group or a cyclohexyl group. Further, examples of the polycyclic alicyclic group include an adamantyl group, a decyl group, an isodecyl group, a tricyclodecanyl group, a tricyclic fluorenyl group, and a tetracyclic decyl group. These alicyclic group-containing unsaturated compounds (a3) may be used singly or in combination of two or more.
具體而言,含脂環式基之不飽和化合物(a3)例如可舉出下述式(a3-1)~(a3-7)所表示之化合物。此等之中,為了作成適宜顯像性者,亦以下述式(a3-3)~(a3-8)所表示之化合物為佳,下述式(a3-3),(a3-4)所表示之化合物為較佳。 Specifically, examples of the alicyclic group-containing unsaturated compound (a3) include compounds represented by the following formulas (a3-1) to (a3-7). Among these, in order to obtain suitable imaging properties, compounds represented by the following formulas (a3-3) to (a3-8) are preferred, and the following formulas (a3-3) and (a3-4) are preferred. The compound represented is preferred.
上述式中、R21表示氫原子或甲基,R22表示單鍵或碳數1~6之2價脂肪族飽和烴基,R23表示氫原子或碳數1~5之烷基。R22係以單鍵、直鏈狀或分支鏈狀之伸烷基,例如亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基為佳。R23例如係以甲基、乙基為佳。 In the above formula, R 21 represents a hydrogen atom or a methyl group, R 22 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, and R 23 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. R 22 extends to line a single bond, a linear or branched alkyl chain of, for example, methylene, ethyl stretching, stretch propyl, tetramethylene, ethyl extending ethyl, pentamethylene, hexamethylene The base is good. R 23 is preferably, for example, a methyl group or an ethyl group.
又,共聚物(A1)亦為可使上述不飽和羧酸(a1)及上述含脂環式環氧基之不飽和化合物(a2),再與上述含脂環式基之不飽和化合物(a3)一同與不具有脂環式基之含環氧基之不飽和化合物(a4)聚合而成者。 Further, the copolymer (A1) is also an unsaturated compound (a2) which can make the above unsaturated carboxylic acid (a1) and the above alicyclic epoxy group-containing unsaturated compound (a3), and the above alicyclic group-containing unsaturated compound (a3) And the polymerization of the epoxy group-containing unsaturated compound (a4) having no alicyclic group.
含環氧基之不飽和化合物(a4)可舉出如環氧丙基(甲基)丙烯酸酯、2-甲基環氧丙基(甲基)丙烯酸酯、3,4-環氧丁基(甲基)丙烯酸酯、6,7-環氧庚基(甲基) 丙烯酸酯等之(甲基)丙烯酸環氧烷酯類;α-乙基丙烯酸環氧丙酯、α-n-丙基丙烯酸環氧丙酯、α-n-丁基丙烯酸環氧丙酯、α-乙基丙烯酸6,7-環氧庚基等之α-烷基丙烯酸環氧烷酯類等。此等之中,由共聚合反應性、硬化後之樹脂之強度等之觀點,以環氧丙基(甲基)丙烯酸酯、2-甲基環氧丙基(甲基)丙烯酸酯、及6,7-環氧庚基(甲基)丙烯酸酯為佳。此等含環氧基之不飽和化合物(a4)可單獨使用或可將2種以上組合使用。 The epoxy group-containing unsaturated compound (a4) may, for example, be epoxypropyl (meth)acrylate, 2-methylepoxypropyl (meth)acrylate or 3,4-epoxybutyl ( Methyl) acrylate, 6,7-epoxyheptyl (methyl) Epoxyalkyl (meth)acrylates such as acrylate; glycyl propyl α-ethyl acrylate, glycyl propyl α-n-propyl acrylate, glycidyl α-n-butyl acrylate, α An α-alkyl acrylate alkylene carbonate or the like such as 6,7-epoxyheptyl ethacrylate. Among these, epoxypropyl (meth)acrylate, 2-methylepoxypropyl (meth)acrylate, and 6 are used from the viewpoints of copolymerization reactivity, strength of the resin after curing, and the like. , 7-epoxyheptyl (meth) acrylate is preferred. These epoxy group-containing unsaturated compounds (a4) may be used singly or in combination of two or more.
又,共聚物(A1)亦可為使上述以外之其他化合物再使之聚合而成者。此般其他化合物可舉出如(甲基)丙烯酸酯類、(甲基)丙烯醯胺類、烯丙基化合物、乙烯基醚類、乙烯基酯類、苯乙烯類等。此等化合物可單獨使用或可將2種以上組合使用。 Further, the copolymer (A1) may be obtained by polymerizing other compounds than the above. Examples of such other compounds include (meth) acrylates, (meth) acrylamides, allyl compounds, vinyl ethers, vinyl esters, and styrenes. These compounds may be used singly or in combination of two or more.
(甲基)丙烯酸酯類可舉出如甲基(甲基)丙烯酸酯、乙基(甲基)丙烯酸酯、丙基(甲基)丙烯酸酯、戊基(甲基)丙烯酸酯、t-辛基(甲基)丙烯酸酯等之直鏈狀或分支鏈狀之烷基(甲基)丙烯酸酯;氯乙基(甲基)丙烯酸酯、2,2-二甲基羥基丙基(甲基)丙烯酸酯、2-羥基乙基(甲基)丙烯酸酯、三羥甲基丙烷單(甲基)丙烯酸酯、苄基(甲基)丙烯酸酯、糠基(甲基)丙烯酸酯等。 Examples of the (meth) acrylate include methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, pentyl (meth) acrylate, and t-octyl. a linear or branched alkyl (meth) acrylate such as a (meth) acrylate; chloroethyl (meth) acrylate, 2,2-dimethyl hydroxy propyl (methyl) Acrylate, 2-hydroxyethyl (meth) acrylate, trimethylolpropane mono (meth) acrylate, benzyl (meth) acrylate, decyl (meth) acrylate, and the like.
(甲基)丙烯醯胺類可舉出如(甲基)丙烯醯胺、N-烷基(甲基)丙烯醯胺、N-芳基(甲基)丙烯醯胺、N,N-二烷基(甲基)丙烯醯胺、N,N-芳基(甲基)丙烯醯胺、 N-甲基-N-苯基(甲基)丙烯醯胺、N-羥基乙基-N-甲基(甲基)丙烯醯胺等。 Examples of the (meth) acrylamide include (meth) acrylamide, N-alkyl (meth) acrylamide, N-aryl (meth) acrylamide, N, N-dioxane. (meth)acrylamide, N,N-aryl (meth) acrylamide, N-methyl-N-phenyl (meth) acrylamide, N-hydroxyethyl-N-methyl (meth) acrylamide, and the like.
烯丙基化合物可舉出如乙酸烯丙酯、己酸烯丙酯、辛酸烯丙酯、月桂酸烯丙酯、棕櫚酸烯丙酯、硬脂酸烯丙酯、安息香酸烯丙酯、乙醯乙酸烯丙酯、乳酸烯丙酯等之烯丙基酯類;烯丙氧基乙醇等。 The allyl compound may, for example, be allyl acetate, allyl hexanoate, allyl octanoate, allyl laurate, allyl palmitate, allyl stearate, allyl benzoate, B. Allyl esters such as allyl acetate, allyl lactate, etc.; allyloxyethanol and the like.
乙烯基醚類可舉出如己基乙烯基醚、辛基乙烯基醚、癸基乙烯基醚、乙基己基乙烯基醚、甲氧基乙基乙烯基醚、乙氧基乙基乙烯基醚、氯乙基乙烯基醚、1-甲基-2,2-二甲基丙基乙烯基醚、2-乙基丁基乙烯基醚、羥基乙基乙烯基醚、二乙二醇乙烯基醚、二甲基胺基乙基乙烯基醚、二乙基胺基乙基乙烯基醚、丁基胺基乙基乙烯基醚、苄基乙烯基醚、四氫糠基乙烯基醚等之烷基乙烯基醚;乙烯基苯基醚、乙烯基甲苯基醚、乙烯基氯苯基醚、乙烯基-2,4-二氯苯基醚、乙烯基萘基醚、乙烯基蒽基醚等之乙烯基芳基醚等。 Examples of the vinyl ethers include hexyl vinyl ether, octyl vinyl ether, mercapto vinyl ether, ethylhexyl vinyl ether, methoxyethyl vinyl ether, and ethoxyethyl vinyl ether. Chloroethyl vinyl ether, 1-methyl-2,2-dimethylpropyl vinyl ether, 2-ethylbutyl vinyl ether, hydroxyethyl vinyl ether, diethylene glycol vinyl ether, Alkylethylene such as dimethylaminoethyl vinyl ether, diethylaminoethyl vinyl ether, butylaminoethyl vinyl ether, benzyl vinyl ether or tetrahydrofurfuryl vinyl ether Vinyl phenyl ether, vinyl tolyl ether, vinyl chlorophenyl ether, vinyl-2,4-dichlorophenyl ether, vinyl naphthyl ether, vinyl decyl ether, etc. Aryl ether and the like.
乙烯基酯類可舉出如乙烯基丁酸酯、乙烯基異丁酸酯、乙烯基三甲基乙酸酯、乙烯基二乙基乙酸酯、乙烯基戊酸酯、乙烯基己酸酯、乙烯基氯乙酸酯、乙烯基二氯乙酸酯、乙烯基甲氧基乙酸酯、乙烯基丁氧基乙酸酯、乙烯基苯基乙酸酯、乙烯基乙醯乙酸酯、乙烯基乳酸酯、乙烯基-β-苯基丁酸酯、安息香酸乙烯酯、柳酸乙烯酯、氯安息香酸乙烯酯、四氯安息香酸乙烯酯、萘甲酸乙烯酯等。 Examples of the vinyl esters include vinyl butyrate, vinyl isobutyrate, vinyl trimethyl acetate, vinyl diethyl acetate, vinyl valerate, and vinyl hexanoate. , vinyl chloroacetate, vinyl dichloroacetate, vinyl methoxy acetate, vinyl butoxyacetate, vinyl phenyl acetate, vinyl acetonitrile acetate, Vinyl lactate, vinyl-β-phenylbutyrate, vinyl benzoate, vinyl laurate, vinyl chlorobenzoate, vinyl tetrachlorobenzoate, vinyl naphthate, and the like.
苯乙烯類可舉出如苯乙烯;甲基苯乙烯、二甲基苯乙 烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、異丙基苯乙烯、丁基苯乙烯、己基苯乙烯、環己基苯乙烯、癸基苯乙烯、苄基苯乙烯、氯甲基苯乙烯、三氟甲基苯乙烯、乙氧基甲基苯乙烯、乙醯氧基甲基苯乙烯等之烷基苯乙烯;甲氧基苯乙烯、4-甲氧基-3-甲基苯乙烯、二甲氧基苯乙烯等之烷氧基苯乙烯;氯苯乙烯、二氯苯乙烯、三氯苯乙烯、四氯苯乙烯、五氯苯乙烯、溴苯乙烯、二溴苯乙烯、碘苯乙烯、氟苯乙烯、三氟苯乙烯、2-溴-4-三氟甲基苯乙烯、4-氟-3-三氟甲基苯乙烯等之鹵化苯乙烯等。 Examples of the styrene include styrene; methyl styrene and dimethyl benzene. Alkene, trimethylstyrene, ethylstyrene, diethylstyrene, isopropylstyrene, butylstyrene, hexylstyrene, cyclohexylstyrene, mercaptostyrene, benzylstyrene, chlorine Alkyl styrene such as methyl styrene, trifluoromethyl styrene, ethoxymethyl styrene, ethoxymethyl methyl styrene; methoxy styrene, 4-methoxy-3-methyl Alkoxystyrenes such as styrene and dimethoxystyrene; chlorostyrene, dichlorostyrene, trichlorostyrene, tetrachlorostyrene, pentachlorostyrene, bromostyrene, dibromostyrene And halogenated styrene such as iodine styrene, fluorostyrene, trifluorostyrene, 2-bromo-4-trifluoromethylstyrene, 4-fluoro-3-trifluoromethylstyrene, and the like.
源自上述不飽和羧酸(a1)之構成單位佔共聚物(A1)中之比例係以1~30質量%為佳,以5~20質量%為較佳。 The proportion of the constituent unit derived from the unsaturated carboxylic acid (a1) in the copolymer (A1) is preferably from 1 to 30% by mass, more preferably from 5 to 20% by mass.
又,共聚物(A1)中所佔之源自上述含脂環式環氧基之不飽和化合物(a2)之構成單位之比例與源自上述含環氧基之不飽和化合物(a4)之構成單位之比例之合計,以71質量%以上為佳,71~95質量%為較佳,75~90質量%為更佳。尤其,源自上述含脂環式環氧基之不飽和化合物(a2)之構成單位在共聚物(A1)中所佔之比例,以其單獨為71質量%以上為佳,71~80質量%為較佳。上述源自含脂環式環氧基之不飽和化合物(a2)之構成單位之比例藉由設在上述範圍內,可更使感光性樹脂組成物之經時安定性提升。 Further, the proportion of the constituent unit derived from the above-mentioned alicyclic epoxy group-containing unsaturated compound (a2) in the copolymer (A1) and the composition derived from the above epoxy group-containing unsaturated compound (a4) The total ratio of the units is preferably 71% by mass or more, 71 to 95% by mass, and more preferably 75 to 90% by mass. In particular, the proportion of the constituent unit derived from the above-mentioned alicyclic epoxy group-containing unsaturated compound (a2) in the copolymer (A1) is preferably 71% by mass or more, and 71 to 80% by mass. It is better. When the ratio of the constituent unit derived from the alicyclic epoxy group-containing unsaturated compound (a2) is within the above range, the temporal stability of the photosensitive resin composition can be further improved.
又,源自上述含脂環式基之不飽和化合物(a3)之構成單位佔共聚物(A1)中之比例,以1~30質量%為佳, 5~20質量%為較佳。 Further, the proportion of the constituent unit derived from the alicyclic group-containing unsaturated compound (a3) in the copolymer (A1) is preferably from 1 to 30% by mass. 5 to 20% by mass is preferred.
共聚物(A1)之質量平均分子量(Mw:由凝膠滲透層析法(GPC)以苯乙烯換算所得之測定值。本說明書中皆同。)係以2000~200000為佳,以5000~30000為較佳。藉由設在上述之範圍,有容易取得感光性樹脂組成物之膜形成能、曝光後之顯像性之平衡的傾向。 The mass average molecular weight of the copolymer (A1) (Mw: the measured value obtained by gel permeation chromatography (GPC) in terms of styrene. The same applies in the present specification.) It is preferably from 2,000 to 200,000, and from 5,000 to 30,000. It is better. By setting it in the said range, it is easy to acquire the balance of the film formation energy of the photosensitive resin composition, and the imaging property after exposure.
共聚物(A1)係為使上述不飽和羧酸(a1)、上述含脂環式環氧基之不飽和化合物(a2)、上述含環氧基之不飽和化合物(a4)以外之化合物予以聚合而成者時,共聚物(A1)係可藉由公知之自由基聚合法而製造。即,可使各化合物以及公知之自由基聚合起始劑溶解於聚合溶劑後,藉由加熱攪拌而製造。 The copolymer (A1) is a polymer obtained by polymerizing the unsaturated carboxylic acid (a1), the alicyclic epoxy group-containing unsaturated compound (a2), and the epoxy group-containing unsaturated compound (a4). In the case of the original, the copolymer (A1) can be produced by a known radical polymerization method. In other words, each compound and a known radical polymerization initiator can be produced by dissolving in a polymerization solvent and heating and stirring.
另一方面,共聚物(A1)並非係使上述不飽和羧酸(a1)、上述含脂環式環氧基之不飽和化合物(a2)、上述含環氧基之不飽和化合物(a4)以外之化合物予以聚合而成者時,通常之自由基聚合法下,不飽和羧酸(a1)之羧基與上述含脂環式環氧基之不飽和化合物(a2)或上述含環氧基之不飽和化合物(a4)之環氧基進行反應而有導致膠化之情況。 On the other hand, the copolymer (A1) is not other than the unsaturated carboxylic acid (a1), the alicyclic epoxy group-containing unsaturated compound (a2), and the epoxy group-containing unsaturated compound (a4). When the compound is polymerized, the carboxyl group of the unsaturated carboxylic acid (a1) and the above-mentioned alicyclic epoxy group-containing unsaturated compound (a2) or the above epoxy group-containing one are not usually used in the radical polymerization method. The epoxy group of the saturated compound (a4) is reacted to cause gelation.
因此,此種情況時,首先使不飽和羧酸與特定之反應性化合物進行反應而取得反應混合物(反應步驟),其次,藉由使此反應混合物與含脂環式環氧基之不飽和化合物或含環氧基之不飽和化合物進行共聚合(聚合步驟)而製造共聚物(A1)。因應必要在最後亦可施以純化‧洗淨 (純化步驟)。 Therefore, in this case, the unsaturated carboxylic acid is first reacted with a specific reactive compound to obtain a reaction mixture (reaction step), and secondly, by reacting the reaction mixture with an alicyclic epoxy group-containing unsaturated compound Or the epoxy group-containing unsaturated compound is subjected to copolymerization (polymerization step) to produce a copolymer (A1). Purified and washed at the end if necessary (Purification step).
首先,反應步驟係將不飽和羧酸,與選自下述式(i)~(iii)所表示之化合物(反應性化合物)之至少一種化合物放入燒瓶等之適當反應容器中,藉由加熱攪拌而取得反應混合物。 First, in the reaction step, at least one compound selected from the compounds (reactive compounds) represented by the following formulas (i) to (iii) is placed in a suitable reaction vessel such as a flask by heating. The reaction mixture was obtained by stirring.
【化7】R 31 -O-R 33 -O-R 32 (i)(式(i)中,R31及R32各自獨立表示碳數1~4之烷基,R33表示亦可含有氧原子之碳數1~4之直鏈狀或分支鏈狀之烴基。) [7] of the R 31 -OR 33 -OR 32 (i ) ( formula (i), R 31 and R 32 each independently represent an alkyl group having 1 to 4 carbon atoms of, R 33 represents an oxygen atom may also contain a carbon number of a linear or branched chain hydrocarbon group of 1 to 4.
上述式(i)所表示之化合物可舉出如1,2-二甲氧基乙烷、1,2-二乙氧基乙烷、1,2-二丙氧基乙烷、1,2-二丁氧基乙烷、二乙氧基甲烷、二丙氧基甲烷、二丁氧基甲烷、1,1-二甲氧基丙烷、1,1-二乙氧基丙烷、1,1-二丙氧基丙烷、1,1-二丁氧基丙烷、2,2-二甲氧基丙烷、2,2-二乙氧基 丙烷、2,2-二丙氧基丙烷、2,2-二丁氧基丙烷、二乙二醇二甲基醚、二乙二醇乙基甲基醚、二乙二醇二乙基醚、二乙二醇二丙基醚、二乙二醇二丁基醚等。 The compound represented by the above formula (i) may, for example, be 1,2-dimethoxyethane, 1,2-diethoxyethane, 1,2-dipropoxyethane, 1,2- Dibutoxyethane, diethoxymethane, dipropoxymethane, dibutoxymethane, 1,1-dimethoxypropane, 1,1-diethoxypropane, 1,1-di Propoxypropane, 1,1-dibutoxypropane, 2,2-dimethoxypropane, 2,2-diethoxy Propane, 2,2-dipropoxypropane, 2,2-dibutoxypropane, diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, diethylene glycol diethyl ether, Diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, and the like.
上述式(ii)所表示之化合物可舉出如2,5-二甲氧基四氫呋喃、2,5-二乙氧基四氫呋喃、2,5-二丙氧基四氫呋喃、2,5-二丁氧基四氫呋喃等。 The compound represented by the above formula (ii) may, for example, be 2,5-dimethoxytetrahydrofuran, 2,5-diethoxytetrahydrofuran, 2,5-dipropoxytetrahydrofuran or 2,5-dibutoxy Tetrahydrofuran and the like.
上述式(iii)所表示之化合物可舉出如3,4-二甲氧基甲苯、3,4-二乙氧基甲苯、3,4-二丙氧基甲苯、3,4-二丁氧基甲苯、1,2-二甲氧基苯、1,2-二乙氧基苯、1,2-二丙氧基苯、1,2-二丁氧基苯等。 The compound represented by the above formula (iii) may, for example, be 3,4-dimethoxytoluene, 3,4-diethoxytoluene, 3,4-dipropoxytoluene or 3,4-dibutoxy Toluene, 1,2-dimethoxybenzene, 1,2-diethoxybenzene, 1,2-dipropoxybenzene, 1,2-dibutoxybenzene, and the like.
此等反應性化合物之中,由與不飽和羧酸之反應性之觀點,亦以二乙氧基甲烷、1,2-二甲氧基乙烷、1,2-二乙氧基乙烷、二乙二醇二甲基醚、二乙二醇乙基甲基醚、2,5-二甲氧基四氫呋喃、1,1-二乙氧基丙烷、及2,2-二乙氧基丙烷為佳。此等反應性化合物可單獨使用或可將2種以上組合使用。 Among these reactive compounds, from the viewpoint of reactivity with an unsaturated carboxylic acid, diethoxymethane, 1,2-dimethoxyethane, 1,2-diethoxyethane, Diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, 2,5-dimethoxytetrahydrofuran, 1,1-diethoxypropane, and 2,2-diethoxypropane are good. These reactive compounds may be used singly or in combination of two or more.
不飽和羧酸與反應性化合物之莫耳比雖並無特別限定,但以1:0.5~1:3為佳,1:0.8~1:2為較佳。又,反應溫度係以60~150℃為佳,80~120℃為較佳。反應時間係以10分鐘~10小時為佳,30分鐘~5小時為較佳。 Although the molar ratio of the unsaturated carboxylic acid to the reactive compound is not particularly limited, it is preferably from 1:0.5 to 1:3, and preferably from 1:0.8 to 1:2. Further, the reaction temperature is preferably 60 to 150 ° C, and preferably 80 to 120 ° C. The reaction time is preferably from 10 minutes to 10 hours, and from 30 minutes to 5 hours is preferred.
其次,聚合步驟係使反應步驟中取得之反應混合物及含脂環式環氧基之不飽和化合物或含環氧基之不飽和化合物一同與公知之自由基聚合起始劑在聚合溶劑中溶解後,藉由加熱攪拌而取得共聚物。 Next, the polymerization step is such that the reaction mixture obtained in the reaction step and the unsaturated compound containing an alicyclic epoxy group or the unsaturated compound containing an epoxy group are dissolved together with a known radical polymerization initiator in a polymerization solvent. The copolymer was obtained by heating and stirring.
最後,純化步驟中係例如藉由使用貧溶劑等進行洗淨而去除殘留物。 Finally, in the purification step, the residue is removed, for example, by washing with a poor solvent or the like.
又,鹼可溶性樹脂(A)可適宜使用包含上述源自不飽和羧酸(a1)之構成單位與至少具有後述之具有可與光聚合性單體(B)聚合部位之構成單位的共聚物(A2),或上述源自不飽和羧酸(a1)之構成單位、上述源自含環氧基之不飽和化合物(a4)之構成單位與後述之至少具有可與光聚合性單體(B)聚合部位之構成單位的共聚物(A3)的樹脂。鹼可溶性樹脂(A)包含共聚物(A2)或(A3)時,可提高感光性樹脂組成物對基板之密著性、感光性樹脂組成物之硬化後之破壞強度。 In addition, as the alkali-soluble resin (A), a copolymer comprising the above-mentioned constituent unit derived from the unsaturated carboxylic acid (a1) and at least a constituent unit having a polymerization site of the photopolymerizable monomer (B) described later (for example) can be suitably used ( A2) or the constituent unit derived from the unsaturated carboxylic acid (a1), the constituent unit derived from the epoxy group-containing unsaturated compound (a4), and at least the photopolymerizable monomer (B) described later. A resin of a copolymer (A3) which is a constituent unit of a polymerization site. When the alkali-soluble resin (A) contains the copolymer (A2) or (A3), the adhesion of the photosensitive resin composition to the substrate and the breaking strength of the photosensitive resin composition after curing can be improved.
共聚物(A2)及共聚物(A3)亦可係為再使其與在共聚物(A1)中記載作為其他化合物之(甲基)丙烯酸酯類、(甲基)丙烯醯胺類、烯丙基化合物、乙烯基醚類、乙烯基酯類、苯乙烯類等共聚合而成者。 The copolymer (A2) and the copolymer (A3) may be further described as (meth) acrylates, (meth) acrylamides, olefins described as other compounds in the copolymer (A1). A compound obtained by copolymerization of a base compound, a vinyl ether, a vinyl ester, or a styrene.
具有可與光聚合性單體(B)聚合部位之構成單位中,其可與光聚合性單體(B)聚合部位係以具有乙烯性不飽和基者為佳。具有此般構成單位之共聚物化在共聚物(A2)時,係可藉由使上述不飽和羧酸(a1)之均聚物所含之羧基之一部分,與選自上述含脂環式環氧基之不飽和化合物(a2)及不具有環氧基之含脂環式基之不飽和化合物(a3)的含環氧基之不飽和化合物進行反應而調製。又,共聚物(A3)係可藉由使具有上述源自不飽和羧酸(a1)之構成單位與上述源自含環氧基之不飽和化合物 (a4)之構成單位之共聚物中之環氧基之一部分,與不飽和羧酸(a1)反應而調製。 Among the constituent units having a polymerizable portion capable of reacting with the photopolymerizable monomer (B), it is preferred that the polymerizable portion of the photopolymerizable monomer (B) has an ethylenically unsaturated group. When the copolymer (A2) has a copolymerization unit, the copolymer (A2) may be a part of a carboxyl group contained in the homopolymer of the unsaturated carboxylic acid (a1), and an alicyclic epoxy group selected from the above The ethylenically unsaturated compound (a2) and an epoxy group-containing unsaturated compound having an alicyclic group-containing unsaturated compound (a3) having no epoxy group are reacted and prepared. Further, the copolymer (A3) can be obtained by having the above-mentioned constituent unit derived from the unsaturated carboxylic acid (a1) and the above-mentioned unsaturated compound derived from an epoxy group-containing compound. A part of the epoxy group in the copolymer of the constituent unit (a4) is prepared by reacting with the unsaturated carboxylic acid (a1).
共聚物(A2)及共聚物(A3)之質量平均分子量係以2000~50000為佳,5000~30000為較佳。藉由設在上述範圍內,有容易取得感光性樹脂組成物之膜形成能、曝光後之顯像性之平衡的傾向。 The mass average molecular weight of the copolymer (A2) and the copolymer (A3) is preferably from 2,000 to 50,000, more preferably from 5,000 to 30,000. When it is set in the said range, it is easy to acquire the balance of the film formation energy of the photosensitive resin composition, and the imaging property after exposure.
尚且,鹼可溶性樹脂(A)除了選自共聚物(A1)、(A2)及(A3)之樹脂以外,尚亦可包含過往公知之其他鹼可溶性樹脂。但,鹼可溶性樹脂(A)中所佔之選自共聚物(A1)、(A2)及(A3)之樹脂之比例係以80質量%以上為佳,90質量%以上為較佳,100質量%為最佳。 Further, the alkali-soluble resin (A) may contain, in addition to the resins of the copolymers (A1), (A2) and (A3), other alkali-soluble resins which have been conventionally known. However, the ratio of the resin selected from the copolymers (A1), (A2) and (A3) in the alkali-soluble resin (A) is preferably 80% by mass or more, more preferably 90% by mass or more, and 100% by mass. % is the best.
又,鹼可溶性樹脂(A)之含有量係相對於感光性樹脂組成物之固形分,以40~85質量%為佳,45~75質量%為較佳。藉由設在上述範圍內,有容易取得顯像性平衡的傾向。 Further, the content of the alkali-soluble resin (A) is preferably from 40 to 85% by mass, and preferably from 45 to 75% by mass, based on the solid content of the photosensitive resin composition. By setting it in the said range, it is easy to acquire the imaging balance.
本發明之間隔物形成用感光性樹脂組成物中所含有之光聚合性單體(B)(以下,亦稱為「(B)成分」)較佳可使用具有乙烯性不飽和基之單體。此具有乙烯性不飽和基之單體則有單官能單體與多官能單體。 The photopolymerizable monomer (B) (hereinafter also referred to as "(B) component") contained in the photosensitive resin composition for spacer formation of the present invention is preferably a monomer having an ethylenically unsaturated group. . The monomer having an ethylenically unsaturated group has a monofunctional monomer and a polyfunctional monomer.
單官能單體可舉出如(甲基)丙烯醯胺、羥甲基(甲基)丙烯醯胺、甲氧基甲基(甲基)丙烯醯胺、乙氧基甲基(甲基)丙烯醯胺、丙氧基甲基(甲基)丙烯醯胺、丁 氧基甲氧基甲基(甲基)丙烯醯胺、N-羥甲基(甲基)丙烯醯胺、N-羥基甲基(甲基)丙烯醯胺、(甲基)丙烯酸、富馬酸、馬來酸、無水馬來酸、伊康酸、無水伊康酸、檸康酸、無水檸康酸、丁烯酸、2-丙烯醯胺-2-甲基丙烷磺酸、tert-丁基丙烯醯胺磺酸、甲基(甲基)丙烯酸酯、乙基(甲基)丙烯酸酯、丁基(甲基)丙烯酸酯、2-乙基己基(甲基)丙烯酸酯、環己基(甲基)丙烯酸酯、2-羥基乙基(甲基)丙烯酸酯、2-羥基丙基(甲基)丙烯酸酯、2-羥基丁基(甲基)丙烯酸酯、2-苯氧基-2-羥基丙基(甲基)丙烯酸酯、2-(甲基)丙烯醯氧基-2-羥基丙基酞酸酯、丙三醇單(甲基)丙烯酸酯、四氫糠基(甲基)丙烯酸酯、二甲基胺基(甲基)丙烯酸酯、環氧丙基(甲基)丙烯酸酯、2,2,2-三氟乙基(甲基)丙烯酸酯、2,2,3,3-四氟丙基(甲基)丙烯酸酯、酞酸衍生物之半(甲基)丙烯酸酯等。此等單官能單體可單獨使用或可將2種以上組合使用。 The monofunctional monomer may, for example, be (meth) acrylamide, hydroxymethyl (meth) acrylamide, methoxymethyl (meth) acrylamide, ethoxymethyl (meth) propylene. Guanamine, propoxymethyl (meth) acrylamide, butyl Oxymethoxymethyl (meth) acrylamide, N-methylol (meth) acrylamide, N-hydroxymethyl (meth) acrylamide, (meth) acrylic acid, fumaric acid , maleic acid, anhydrous maleic acid, itaconic acid, anhydrous itaconic acid, citraconic acid, anhydrous citraconic acid, crotonic acid, 2-propenylamine-2-methylpropane sulfonic acid, tert-butyl Acrylamine sulfonic acid, methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, cyclohexyl (methyl Acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 2-phenoxy-2-hydroxypropane Base (meth) acrylate, 2-(meth) propylene oxy-2-hydroxypropyl phthalate, glycerol mono (meth) acrylate, tetrahydroindenyl (meth) acrylate, Dimethylamino (meth) acrylate, epoxy propyl (meth) acrylate, 2, 2, 2-trifluoroethyl (meth) acrylate, 2, 2, 3, 3-tetrafluoro A propyl (meth) acrylate, a half (meth) acrylate of a decanoic acid derivative, or the like. These monofunctional monomers may be used singly or in combination of two or more.
另一方面,多官能單體可舉出如乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、丙三醇二(甲基)丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯、季 戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、2,2-雙(4-(甲基)丙烯醯氧基二乙氧基苯基)丙烷、2,2-雙(4-(甲基)丙烯醯氧基聚乙氧基苯基)丙烷、2-羥基-3-(甲基)丙烯醯氧基丙基(甲基)丙烯酸酯、乙二醇二環氧丙基醚二(甲基)丙烯酸酯、二乙二醇二環氧丙基醚二(甲基)丙烯酸酯、酞酸二環氧丙基酯二(甲基)丙烯酸酯、丙三醇三丙烯酸酯、丙三醇聚環氧丙基醚聚(甲基)丙烯酸酯、胺基甲酸酯(甲基)丙烯酸酯(即,甲伸苯基二異氰酸酯)、三甲基六亞甲基二異氰酸酯與六亞甲基二異氰酸酯等與2-羥基乙基(甲基)丙烯酸酯之反應物、亞甲基雙(甲基)丙烯醯胺、(甲基)丙烯醯胺亞甲基醚、多元醇與N-羥甲基(甲基)丙烯醯胺之縮合物等之多官能單體,或1,3,5-三丙烯醯基六氫-1,3,5-三嗪(triacrylformal)等。此等多官能單體係可單獨使用或可將2種以上組合使用。 On the other hand, examples of the polyfunctional monomer include ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, and propylene glycol di( Methyl) acrylate, polypropylene glycol di(meth) acrylate, butane diol di(meth) acrylate, neopentyl glycol di(meth) acrylate, 1,6-hexanediol di(methyl) Acrylate, trimethylolpropane tri(meth)acrylate, glycerol di(meth)acrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, season Pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, 2 , 2-bis(4-(methyl)propenyloxydiethoxyphenyl)propane, 2,2-bis(4-(methyl)propenyloxypolyethoxyphenyl)propane, 2 -hydroxy-3-(methyl)propenyloxypropyl (meth) acrylate, ethylene glycol diepoxypropyl ether di(meth) acrylate, diethylene glycol diepoxy propyl ether (Meth) acrylate, diepoxypropyl phthalate di(meth) acrylate, glycerol triacrylate, glycerol polyepoxypropyl ether poly(meth) acrylate, amine group A Reaction of acid ester (meth) acrylate (ie, methyl phenyl diisocyanate), trimethyl hexamethylene diisocyanate and hexamethylene diisocyanate with 2-hydroxyethyl (meth) acrylate a polyfunctional monomer such as a condensate of methylene bis(meth) acrylamide, (meth) acrylamide dimethylamine ether, a polyol and N-methylol (meth) acrylamide , or 1,3,5-tripropylene decyl hexahydro-1,3,5-three Triacrylformal and the like. These polyfunctional single systems may be used singly or in combination of two or more.
此等具有乙烯性不飽和基之單體中,由提高間隔物形成用感光性樹脂組成物對基板之密著性、感光性樹脂組成物硬化後之破壞強度的觀點,以3官能以上之多官能單體為佳,6官能以上之多官能單體為較佳。 Among the monomers having an ethylenically unsaturated group, the adhesion of the photosensitive resin composition for forming a spacer to the substrate and the breaking strength of the photosensitive resin composition after curing are more than three or more A functional monomer is preferred, and a polyfunctional monomer having 6 or more functional groups is preferred.
(B)成分之含有量係相對於間隔物形成用感光性樹脂組成物之固形分而言,以5~50質量%為佳,10~40質量%為較佳。藉由設在上述範圍內,有容易取得感度、顯像 性、解像性之平衡的傾向。 The content of the component (B) is preferably 5 to 50% by mass, and preferably 10 to 40% by mass, based on the solid content of the photosensitive resin composition for spacer formation. By setting it within the above range, it is easy to obtain sensitivity and imaging. The tendency to balance sex and resolution.
本發明之間隔物形成用感光性樹脂組成物中所含有之光聚合起始劑(C)(以下,亦稱為「(C)成分」)並無特別限定,可使用過往公知之光聚合起始劑。 The photopolymerization initiator (C) (hereinafter also referred to as "(C) component)) contained in the photosensitive resin composition for spacer formation of the present invention is not particularly limited, and conventionally known photopolymerization can be used. Starting agent.
光聚合起始劑具體地可舉出如1-羥基環己基苯基酮、2-羥基-2-甲基-1-苯基丙-1-酮、1-〔4-(2-羥基乙氧基)苯基〕-2-羥基-2-甲基-1-丙-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙-1-酮、1-(4-十二基苯基)-2-羥基-2-甲基丙-1-酮、2,2-二甲氧基-1,2-二苯基乙-1-酮、雙(4-二甲基胺基苯基)酮、2-甲基-1-〔4-(甲硫基)苯基〕-2-嗎啉基丙-1-酮、2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁-1-酮、乙酮,1-[9-乙基-6-(2-甲基苄醯基)-9H-咔唑-3-基],1-(O-乙醯肟)、1,2-辛二酮,1-[4-(苯硫基)-,2-(O-苄醯基肟)]、2,4,6-三甲基苄醯基二苯基膦氧化物、4-苄醯基-4’-甲基二甲基硫化物、4-二甲基胺基安息香酸、4-二甲基胺基安息香酸甲酯、4-二甲基胺基安息香酸乙酯、4-二甲基胺基安息香酸丁酯、4-二甲基胺基-2-乙基己基安息香酸、4-二甲基胺基-2-異戊基安息香酸、苄基-β-甲氧基乙基縮醛、苄基二甲基縮酮、1-苯基-1,2-丙二酮-2-(O-乙氧基羰基)肟、o-苄醯基安息香酸甲酯、2,4-二乙基噻吨酮、2-氯噻吨酮、2,4-二甲基噻吨酮、1-氯-4-丙氧基噻吨酮(thioxanthone)、噻吨(thioxanthene)、 2-氯噻吨、2,4-二乙基噻吨、2-甲基噻吨、2-異丙基噻吨、2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌、偶氮雙異丁腈、苄醯基過氧化物、過氧化異丙苯、2-巰基苯并咪唑、2-巰基苯并噁唑、2-巰基苯并噻唑、2-(o-氯苯基)-4,5-二(m-甲氧基苯基)-咪唑基二聚物、二苯甲酮、2-氯二苯甲酮、p,p’-雙二甲基胺基二苯甲酮、4,4’-雙二乙基胺基二苯甲酮、4,4’-二氯二苯甲酮、3,3-二甲基-4-甲氧基二苯甲酮、苄基、安息香、安息香甲基醚、安息香乙基醚、安息香異丙基醚、安息香-n-丁基醚、安息香異丁基醚、安息香丁基醚、苯乙酮、2,2-二乙氧基苯乙酮、p-二甲基苯乙酮、p-二甲基胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、p-tert-丁基苯乙酮、p-二甲基胺基苯乙酮、p-tert-丁基三氯苯乙酮、p-tert-丁基二氯苯乙酮、α,α-二氯-4-苯氧基苯乙酮、噻吨酮、2-甲基噻吨酮、2-異丙基噻吨酮、二苯并環庚烯酮、戊基-4-二甲基胺基苯甲酸酯、9-苯基吖啶、1,7-雙-(9-吖啶基)庚烷、1,5-雙-(9-吖啶基)戊烷、1,3-雙-(9-吖啶基)丙烷、p-甲氧基三嗪、2,4,6-參(三氯甲基)-s-三嗪、2-甲基-4,6-雙(三氯甲基)-s-三嗪、2-[2-(5-甲基呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-[2-(呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-[2-(4-二乙基胺基-2-甲基苯基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-[2-(3,4-二甲氧基苯基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-s-三嗪、2- (4-乙氧基苯乙烯基)-4,6-雙(三氯甲基)-s-三嗪、2-(4-n-丁氧基苯基)-4,6-雙(三氯甲基)-s-三嗪、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯基-s-三嗪、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯基-s-三嗪、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯乙烯基苯基-s-三嗪、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯乙烯基苯基-s-三嗪等。此等光聚合起始劑係可單獨使用或可將2種以上組合使用。 The photopolymerization initiator may specifically be, for example, 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1-[4-(2-hydroxyethoxyl) Phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropan-1-one, 1 -(4-dodecylphenyl)-2-hydroxy-2-methylpropan-1-one, 2,2-dimethoxy-1,2-diphenylethan-1-one, bis (4 -Dimethylaminophenyl)one, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinylpropan-1-one, 2-benzyl-2-dimethyl Amino-1-(4-morpholinylphenyl)-butan-1-one, ethyl ketone, 1-[9-ethyl-6-(2-methylbenzylidene)-9H-carbazole- 3-yl], 1-(O-acetamidine), 1,2-octanedione, 1-[4-(phenylthio)-, 2-(O-benzylindenyl)], 2,4 ,6-trimethylbenzylidenediphenylphosphine oxide, 4-benzylindolyl-4'-methyldimethyl sulfide, 4-dimethylaminobenzoic acid, 4-dimethylamino Methyl benzoate, ethyl 4-dimethylaminobenzoate, butyl 4-dimethylaminobenzoate, 4-dimethylamino-2-ethylhexylbenzoic acid, 4-dimethyl Amino-2-isopentylbenzoic acid, benzyl-β-methoxyethyl acetal, benzyldimethylketal, 1-phenyl-1 , 2-propanedione-2-(O-ethoxycarbonyl) fluorene, methyl o-benzyl benzoate, 2,4-diethyl thioxanthone, 2-chlorothioxanthone, 2,4 - dimethyl thioxanthone, 1-chloro-4-propoxythene thioxanthone, thioxanthene, 2-chlorothioxanthene, 2,4-diethylthioxanthene, 2-methylthioxanthene, 2-isopropylthioxanthene, 2-ethylhydrazine, octamethylguanidine, 1,2-benzophenone Bismuth, 2,3-diphenylanthracene, azobisisobutyronitrile, benzamidine peroxide, cumene peroxide, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2- Mercaptobenzothiazole, 2-(o-chlorophenyl)-4,5-di(m-methoxyphenyl)-imidazolyl dimer, benzophenone, 2-chlorobenzophenone, p , p'-bisdimethylaminobenzophenone, 4,4'-bisdiethylaminobenzophenone, 4,4'-dichlorobenzophenone, 3,3-dimethyl 4-methoxybenzophenone, benzyl, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin-n-butyl ether, benzoin isobutyl ether, benzoin butyl ether , acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropiophenone, dichloroacetophenone, trichloroacetophenone, p- Tert-butylacetophenone, p-dimethylaminoacetophenone, p-tert-butyltrichloroacetophenone, p-tert-butyldichloroacetophenone, alpha, alpha-dichloro- 4-phenoxyacetophenone, thioxanthone, 2-methylthioxanthone, 2 - Isopropylthioxanthone, dibenzocycloheptenone, pentyl-4-dimethylaminobenzoate, 9-phenyl acridine, 1,7-bis-(9-acridinyl) Heptane, 1,5-bis-(9-acridinyl)pentane, 1,3-bis-(9-acridinyl)propane, p-methoxytriazine, 2,4,6-para (trichloromethyl)-s-triazine, 2-methyl-4,6-bis(trichloromethyl)-s-triazine, 2-[2-(5-methylfuran-2-yl) Vinyl]-4,6-bis(trichloromethyl)-s-triazine, 2-[2-(furan-2-yl)vinyl]-4,6-bis(trichloromethyl)-s -Triazine, 2-[2-(4-diethylamino-2-methylphenyl)vinyl]-4,6-bis(trichloromethyl)-s-triazine, 2-[2 -(3,4-dimethoxyphenyl)vinyl]-4,6-bis(trichloromethyl)-s-triazine, 2-(4-methoxyphenyl)-4,6- Bis(trichloromethyl)-s-triazine, 2- (4-ethoxystyryl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4-n-butoxyphenyl)-4,6-bis(trichloro) Methyl)-s-triazine, 2,4-bis-trichloromethyl-6-(3-bromo-4-methoxy)phenyl-s-triazine, 2,4-bis-trichloromethane 6-(2-bromo-4-methoxy)phenyl-s-triazine, 2,4-bis-trichloromethyl-6-(3-bromo-4-methoxy)styryl Phenyl-s-triazine, 2,4-bis-trichloromethyl-6-(2-bromo-4-methoxy)styrylphenyl-s-triazine, and the like. These photopolymerization initiators may be used singly or in combination of two or more.
此等之中,由感度之面觀之,亦以使用肟系光聚合起始劑為特佳。肟系光聚合起始劑之中,特佳者可舉出如乙酮,1-[9-乙基-6-(2-甲基苄醯基)-9H-咔唑-3-基],1-(O-乙醯肟)、及1,2-辛二酮,1-[4-(苯硫基)-,2-(O-苄醯基肟)]。 Among these, it is particularly preferable to use a lanthanide photopolymerization initiator from the viewpoint of sensitivity. Among the oxime-based photopolymerization initiators, for example, ethyl ketone, 1-[9-ethyl-6-(2-methylbenzylidene)-9H-carbazol-3-yl, 1-(O-acetamidine), and 1,2-octanedione, 1-[4-(phenylthio)-, 2-(O-benzylindenyl).
(C)成分之含有量係相對於間隔物形成用感光性樹脂組成物之固形分而言,以0.5~30質量%為佳,1~20質量%為較佳。藉由設在上述範圍內,可取得充分耐熱性、耐藥品性,且可使塗膜形成能提升並可抑制硬化不良。 The content of the component (C) is preferably from 0.5 to 30% by mass, and preferably from 1 to 20% by mass, based on the solid content of the photosensitive resin composition for spacer formation. By setting it in the said range, sufficient heat resistance and chemical-resistance are acquired, and formation of a coating film can be improved, and hardening failure can be suppressed.
又,亦可對此(C)成分組合光起始助劑。光起始助劑可舉出如三乙醇胺、甲基二乙醇胺、三異丙醇胺、4-二甲基胺基安息香酸甲酯、4-二甲基胺基安息香酸乙酯、4-二甲基胺基安息香酸異戊酯、4-二甲基胺基安息香酸2-乙基己酯、安息香酸2-二甲基胺基乙酯、N,N-二甲基對甲苯胺、4,4’-雙(二甲基胺基)二苯甲酮、9,10-二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧基蒽、2-乙基-9,10-二乙氧基蒽、2-巰基苯并噻唑、2-巰基苯并噁唑、2- 巰基苯并咪唑、2-巰基-5-甲氧基苯并噻唑、3-巰基丙酸、3-巰基丙酸甲酯、季戊四醇四巰基乙酸酯、3-巰基丙酸酯等之硫醇化合物等。此等光起始助劑可單獨使用或可將2種以上組合使用。 Further, a photoinitiator may be combined with the component (C). The photoinitiating aid may, for example, be triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, 4-di Isoamyl methylamino benzoate, 2-ethylhexyl 4-dimethylaminobenzoate, 2-dimethylaminoethyl benzoate, N,N-dimethyl-p-toluidine, 4 , 4'-bis(dimethylamino)benzophenone, 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxy Bismuth, 2-ethyl-9,10-diethoxyanthracene, 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, 2- Thiol compounds such as mercaptobenzimidazole, 2-mercapto-5-methoxybenzothiazole, 3-mercaptopropionic acid, methyl 3-mercaptopropionate, pentaerythritol tetradecyl acetate, 3-mercaptopropionate Wait. These photoinitiating aids may be used singly or in combination of two or more.
本發明之間隔物形成用感光性樹脂組成物中含有下述式(1)所表示之化合物。使間隔物形成用感光性樹脂組成物含有此化合物時,即便在曝光裝置係使用接近式曝光裝置而形成間隔物之情況,仍亦變得可容易形成小徑之間隔物。又,式(1)所表示之化合物不易對感光性樹脂組成物之半色調特性及感度,或取得之間隔物之破壞強度造成不良影響,本發明之間隔物形成用感光性樹脂組成物在關於此等之特性上,則具備不遜色於不包含式(1)所表示之化合物的過往感光性樹脂組成物之特性。 The photosensitive resin composition for forming a spacer of the present invention contains a compound represented by the following formula (1). When the photosensitive resin composition for forming a spacer contains such a compound, even when a spacer is formed by using a proximity exposure apparatus in an exposure apparatus, a spacer having a small diameter can be easily formed. Further, the compound represented by the formula (1) is less likely to adversely affect the halftone characteristics and sensitivity of the photosensitive resin composition or the fracture strength of the obtained spacer, and the photosensitive resin composition for spacer formation of the present invention is These characteristics are inferior to those of the conventional photosensitive resin composition which does not contain the compound represented by the formula (1).
上述式(1)中,R1及R2各自獨立表示氫原子或有機基,但R1及R2之至少一者表示有機基。 In the above formula (1), R 1 and R 2 each independently represent a hydrogen atom or an organic group, but at least one of R 1 and R 2 represents an organic group.
R1及R2中之有機基可舉出如烷基、烯基、環烷基、環烯基、芳基、芳烷基等。此有機基在該有機基中亦可包含雜原子等之烴基以外之鍵合或取代基。又,此有機基可為 直鏈狀、分支鏈狀、環狀之任一者。此有機基通常為1價,但在形成環狀構造時,可成為2價以上之有機基。 The organic group in R 1 and R 2 may, for example, be an alkyl group, an alkenyl group, a cycloalkyl group, a cycloalkenyl group, an aryl group or an aralkyl group. The organic group may further contain a bond or a substituent other than the hydrocarbon group such as a hetero atom in the organic group. Further, the organic group may be any of a linear chain, a branched chain, and a ring. The organic group is usually monovalent, but when it forms a cyclic structure, it can be an organic group having two or more valences.
R1及R2彼等亦可鍵結而形成環狀構造,亦可更含有雜原子之鍵結。環狀構造可舉出如雜環烷基、雜芳基等,亦可為縮合環。 R 1 and R 2 may be bonded to each other to form a cyclic structure, and may further contain a bond of a hetero atom. The cyclic structure may, for example, be a heterocycloalkyl group or a heteroaryl group, or may be a condensed ring.
R1及R2之有機基中之烴基以外之鍵結,在不損及本發明之效果內即無特別限定,可舉出如包含氧原子、氮原子、矽原子等之雜原子的鍵結。具體例可舉出如醚鍵、硫醚鍵、羰基鍵、硫羰基鍵、酯鍵、醯胺鍵、胺基甲酸酯鍵、亞胺基鍵(-N=C(-R)-、-C(=NR)-:R表示氫原子或有機基)、碳酸酯鍵、磺醯基鍵、亞磺醯基鍵、偶氮鍵等。 The bonding other than the hydrocarbon group in the organic group of R 1 and R 2 is not particularly limited as long as the effects of the present invention are not impaired, and examples thereof include bonding of hetero atoms including an oxygen atom, a nitrogen atom, and a ruthenium atom. . Specific examples thereof include an ether bond, a thioether bond, a carbonyl bond, a thiocarbonyl bond, an ester bond, a guanamine bond, a urethane bond, and an imido bond (-N=C(-R)-, - C(=NR)-: R represents a hydrogen atom or an organic group), a carbonate bond, a sulfonyl bond, a sulfinium bond, an azo bond, or the like.
由耐熱性之觀點,R1及R2之有機基中之烴基以外之鍵結係以醚鍵、硫醚鍵、羰基鍵、硫羰基鍵、酯鍵、醯胺鍵、胺基甲酸酯鍵、亞胺基鍵(-N=C(-R)-、-C(=NR)-:R表示氫原子或1價有機基)、碳酸酯鍵、磺醯基鍵、亞磺醯基鍵為佳。 From the viewpoint of heat resistance, the bond other than the hydrocarbon group in the organic group of R 1 and R 2 is an ether bond, a thioether bond, a carbonyl bond, a thiocarbonyl bond, an ester bond, a guanamine bond, or a urethane bond. , an imido bond (-N=C(-R)-, -C(=NR)-: R represents a hydrogen atom or a monovalent organic group), a carbonate bond, a sulfonyl bond, a sulfinyl bond good.
R1及R2之有機基中之烴基以外之取代基在不損及本發明之效果內即無特別限定,可舉出如鹵素原子、羥基、巰基、硫化物基、氰基、異氰基、氰氧基、異氰氧基、硫氰氧基、異硫氰氧基、矽基、矽醇基、烷氧基、烷氧基羰基、胺甲醯基、硫胺甲醯基、硝基、亞硝基、羧基、羧酸根基、醯基、醯氧基、亞磺酸基、磺酸基、磺酸根基、膦基、氧膦基、膦醯基、膦酸根基、羥基亞胺基、烷基醚基、烯基醚基、烷基硫醚基、烯基硫醚基、芳基醚基、芳 基硫醚基、胺基(-NH2、-NHR、-NRR’:R及R’各自獨立表示烴基)等。上述取代基所含之氫原子亦可被烴基所取代。又,上述取代基所含之烴基可為直鏈狀、分支鏈狀及環狀之任一者。 The substituent other than the hydrocarbon group in the organic group of R 1 and R 2 is not particularly limited, and examples thereof include a halogen atom, a hydroxyl group, a mercapto group, a sulfide group, a cyano group, and an isocyano group. , cyanooxy, isocyanooxy, thiocyanooxy, isothiocyanooxy, decyl, decyl, alkoxy, alkoxycarbonyl, aminemethanyl, thiamine, nitro , nitroso, carboxyl, carboxylate, sulfhydryl, decyloxy, sulfinate, sulfonate, sulfonate, phosphino, phosphinyl, phosphonium, phosphonate, hydroxyimido , alkyl ether group, alkenyl ether group, alkyl sulfide group, alkenyl sulfide group, aryl ether group, aryl sulfide group, amine group (-NH 2 , -NHR, -NRR': R and R' each independently represents a hydrocarbon group) and the like. The hydrogen atom contained in the above substituent may be substituted by a hydrocarbon group. Further, the hydrocarbon group contained in the substituent may be any of a linear chain, a branched chain, and a cyclic group.
R1及R2之有機基中之烴基以外之取代基係以鹵素原子、羥基、巰基、硫化物基、氰基、異氰基、氰氧基、異氰氧基、硫氰氧基、異硫氰氧基、矽基、矽醇基、烷氧基、烷氧基羰基、胺甲醯基、硫胺甲醯基、硝基、亞硝基、羧基、羧酸根基、醯基、醯氧基、亞磺酸基、磺酸基、磺酸根基、膦基、氧膦基、膦醯基、膦酸根基、羥基亞胺基、烷基醚基、烯基醚基、烷基硫醚基、烯基硫醚基、芳基醚基、芳基硫醚基為佳。 The substituent other than the hydrocarbon group in the organic group of R 1 and R 2 is a halogen atom, a hydroxyl group, a thiol group, a sulfide group, a cyano group, an isocyano group, a cyanooxy group, an isocyanato group, a thiocyanoxy group, or a different one. Thiocyanate, sulfhydryl, decyl, alkoxy, alkoxycarbonyl, aminemethanyl, thiamine, nitro, nitroso, carboxyl, carboxylate, sulfhydryl, hydrazine Base, sulfinate, sulfonate, sulfonate, phosphino, phosphinyl, phosphonium, phosphonate, hydroxyimino, alkyl ether, alkenyl ether, alkyl sulfide An alkenyl sulfide group, an aryl ether group or an aryl sulfide group is preferred.
以上之中,R1及R2亦以至少一者為碳數1~12之烷基或碳數1~12之芳基,或相互鍵結而形成碳數2~20之雜環烷基或雜芳基者為佳。雜環烷基可舉出如哌啶基、嗎啉基等,雜芳基可舉出如咪唑基、吡唑基等。 In the above, R 1 and R 2 are at least one of an alkyl group having 1 to 12 carbon atoms or an aryl group having 1 to 12 carbon atoms, or bonded to each other to form a heterocycloalkyl group having 2 to 20 carbon atoms or Heteroaryl is preferred. Examples of the heterocycloalkyl group include a piperidinyl group and a morpholinyl group, and examples of the heteroaryl group include an imidazolyl group and a pyrazolyl group.
上述式(1)中,R3表示單鍵或有機基。 In the above formula (1), R 3 represents a single bond or an organic group.
R3中之有機基可舉出如從烷基、烯基、環烷基、環烯基、芳基、芳烷基等去除1個氫原子之基。此有機基在該有機基中亦可含有取代基。取代基可舉出如在R1及R2中所例示者。又,此有機基亦可為直鏈狀、分支鏈狀之任一者。 The organic group in R 3 may, for example, be a group in which one hydrogen atom is removed from an alkyl group, an alkenyl group, a cycloalkyl group, a cycloalkenyl group, an aryl group or an aralkyl group. The organic group may further contain a substituent in the organic group. The substituents are exemplified as in R 1 and R 2 . Further, the organic group may be either a linear chain or a branched chain.
以上之中,R3亦以單鍵、或從碳數1~12之烷基或碳數1~12之芳基去除1個氫原子之基為佳。 Among the above, R 3 is preferably a single bond or a group in which one hydrogen atom is removed from an alkyl group having 1 to 12 carbon atoms or an aryl group having 1 to 12 carbon atoms.
上述式(1)中,R4及R5各自獨立表示氫原子、鹵素原子、羥基、巰基、硫化物基、矽基、矽醇基、硝基、亞硝基、亞磺酸基、磺酸基、磺酸根基、膦基、氧膦基、膦醯基、膦酸根基、或有機基。 In the above formula (1), R 4 and R 5 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, a mercapto group, a sulfide group, silicon based, silanol groups, a nitro group, a nitroso group, a sulfinic acid group, a sulfonic acid a base, a sulfonate group, a phosphino group, a phosphinyl group, a phosphonium group, a phosphonate group, or an organic group.
R4及R5中之有機基可舉出如在R1及R2中所例示者。此有機基與R1及R2之情形同樣地,在該有機基中亦可含有雜原子等之烴基以外之鍵結或取代基。又,此有機基亦可為直鏈狀、分支鏈狀、環狀之任一者。 The organic group in R 4 and R 5 may be exemplified as in R 1 and R 2 . Similarly to the case of R 1 and R 2 , the organic group may contain a bond or a substituent other than a hydrocarbon group such as a hetero atom in the organic group. Further, the organic group may be any of a linear chain, a branched chain, and a ring.
以上之中亦以R4及R5各自獨立為氫原子、碳數1~10之烷基、碳數4~13之環烷基、碳數4~13之環烯基、碳數7~16之芳氧基烷基、碳數7~20之芳烷基、具有氰基之碳數2~11之烷基、具有羥基之碳數1~10之烷基、碳數1~10之烷氧基、碳數2~11之醯基、碳數1~10之烷硫基、碳數1~10之醯基、碳數2~11之酯基(-COOR、-OCOR:R表示烴基)、碳數6~20之芳基、經電子供給性基及/或電子吸引性基取代之碳數6~20之芳基、經電子供給性基及/或電子吸引性基取代之苄基、氰基、甲硫基為佳。更佳為R4及R5之兩者皆為氫原子,或R4為甲基而R5為氫原子。 In the above, R 4 and R 5 each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, a cycloalkyl group having 4 to 13 carbon atoms, a cycloalkenyl group having 4 to 13 carbon atoms, and a carbon number of 7 to 16 An aryloxyalkyl group, an aralkyl group having 7 to 20 carbon atoms, an alkyl group having 2 to 11 carbon atoms having a cyano group, an alkyl group having 1 to 10 carbon atoms and a alkoxy group having 1 to 10 carbon atoms a thiol group having 2 to 11 carbon atoms, an alkylthio group having 1 to 10 carbon atoms, a fluorenyl group having 1 to 10 carbon atoms, and an ester group having 2 to 11 carbon atoms (-COOR, -OCOR: R represents a hydrocarbon group), An aryl group having 6 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms substituted by an electron-donating group and/or an electron-attracting group, a benzyl group or a cyanogen substituted with an electron-donating group and/or an electron-attracting group; The base and methylthio group are preferred. More preferably, both of R 4 and R 5 are a hydrogen atom, or R 4 is a methyl group and R 5 is a hydrogen atom.
上述式(1)中,R6、R7、R8、及R9各自獨立表示氫原子、鹵素原子、羥基、巰基、硫化物基、矽基、矽醇基、硝基、亞硝基、亞磺酸基、磺酸基、磺酸根基、膦基、氧膦基、膦醯基、膦酸根基、胺基、銨基、或有機基。 The above-described formula (1), R 6, R 7, R 8, and R 9 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, a mercapto group, a sulfide group, silicon based, silanol groups, nitro, nitroso, A sulfinic acid group, a sulfonic acid group, a sulfonate group, a phosphino group, a phosphinyl group, a phosphonium group, a phosphonate group, an amine group, an ammonium group, or an organic group.
R6、R7、R8、及R9中之有機基可舉出如在R1及R2中所 例示者。此有機基係與R1及R2之情形同樣地,在該有機基中亦可包含雜原子等之烴基以外之鍵結或取代基。又,此有機基亦可為直鏈狀、分支鏈狀、環狀之任一者。 The organic group in R 6 , R 7 , R 8 and R 9 may be exemplified as in R 1 and R 2 . Similarly to the case of R 1 and R 2 , the organic group may contain a bond or a substituent other than a hydrocarbon group such as a hetero atom in the organic group. Further, the organic group may be any of a linear chain, a branched chain, and a ring.
尚且,上述式(1)中,R6及R7不為羥基。 Further, in the above formula (1), R 6 and R 7 are not a hydroxyl group.
R6、R7、R8、及R9彼等2個以上鍵結而形成環狀構造亦可,亦可包含雜原子之鍵結。環狀構造可舉出如雜環烷基、雜芳基等,亦可為縮合環。例如,R6、R7、R8、及R9彼等2個以上鍵結,共有R6、R7、R8及R9所鍵結之苯環之原子而形成萘、蒽、菲、茚等之縮合環亦可。 R 6 , R 7 , R 8 , and R 9 may be bonded to each other to form a cyclic structure, and may also contain a bond of a hetero atom. The cyclic structure may, for example, be a heterocycloalkyl group or a heteroaryl group, or may be a condensed ring. For example, R 6 , R 7 , R 8 , and R 9 are bonded to each other by two or more atoms, and the atoms of the benzene ring bonded by R 6 , R 7 , R 8 and R 9 are bonded to form naphthalene, anthracene, phenanthrene, A condensed ring such as hydrazine may also be used.
以上之中亦以R6、R7、R8、及R9各自獨立為氫原子、碳數1~10之烷基、碳數4~13之環烷基、碳數4~13之環烯基、碳數7~16之芳氧基烷基、碳數7~20之芳烷基、具有氰基之碳數2~11之烷基、具有羥基之碳數1~10之烷基、碳數1~10之烷氧基、碳數2~11之醯胺基、碳數1~10之烷硫基、碳數1~10之醯基、碳數2~11之酯基、碳數6~20之芳基、經電子供給性基及/或電子吸引性基取代之碳數6~20之芳基、經電子供給性基及/或電子吸引性基取代之苄基、氰基、甲硫基、硝基為佳。 In the above, R 6 , R 7 , R 8 and R 9 are each independently a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, a cycloalkyl group having 4 to 13 carbon atoms, and a cycloolefin having 4 to 13 carbon atoms. Base, aryloxyalkyl group having 7 to 16 carbon atoms, aralkyl group having 7 to 20 carbon atoms, alkyl group having 2 to 11 carbon atoms having a cyano group, alkyl group having 1 to 10 carbon atoms having a hydroxyl group, carbon Alkoxy groups of 1 to 10, amidino groups having 2 to 11 carbon atoms, alkylthio groups having 1 to 10 carbon atoms, fluorenyl groups having 1 to 10 carbon atoms, ester groups having 2 to 11 carbon atoms, and carbon number 6 An aryl group of ~20, an aryl group having 6 to 20 carbon atoms substituted by an electron-donating group and/or an electron-attracting group, a benzyl group substituted with an electron-donating group and/or an electron-attracting group, a cyano group, and a group Sulfur-based and nitro are preferred.
又,R6、R7、R8、及R9彼等2個以上鍵結,共有R6、R7、R8、及R9所鍵結之苯環之原子而形成萘、蒽、菲、茚等之縮合環時,亦因吸收波長會成為長波長化而為佳。 Further, R 6 , R 7 , R 8 and R 9 are bonded to each other by two or more atoms, and the atoms of the benzene ring bonded to R 6 , R 7 , R 8 and R 9 form a naphthalene, an anthracene or a phenanthrene. In the case of a condensed ring such as hydrazine, it is preferred that the absorption wavelength is long-wavelength.
更佳為R6、R7、R8及R9皆為氫原子,或R6、R7、R8及R9之任一個為硝基,剩餘3個為氫原子。 More preferably, R 6 , R 7 , R 8 and R 9 are each a hydrogen atom, or any one of R 6 , R 7 , R 8 and R 9 is a nitro group, and the remaining three are hydrogen atoms.
上述式(1)中,R10表示氫原子或有機基。 In the above formula (1), R 10 represents a hydrogen atom or an organic group.
R10中之有機基可舉出如在R1及R2中所例示者。此有機基係與R1及R2之情形場合同樣地,在該有機基中亦可含有雜原子等之烴基以外之鍵結或取代基。又,此有機基可為直鏈狀、分支鏈狀、環狀之任一者。 The organic group in R 10 can be exemplified as in R 1 and R 2 . Similarly to the case of R 1 and R 2 , the organic group may contain a bond or a substituent other than a hydrocarbon group such as a hetero atom in the organic group. Further, the organic group may be any of a linear chain, a branched chain, and a ring.
上述式(1)所表示之化合物因在苯環之對位上具有-OR10基,故對溶劑之溶解性良好。 Since the compound represented by the above formula (1) has a -OR 10 group in the para position of the benzene ring, it has good solubility in a solvent.
以上之中,R10亦以氫原子、或碳數1~12之烷基為佳,以甲基為較佳。 Among the above, R 10 is preferably a hydrogen atom or an alkyl group having 1 to 12 carbon atoms, and a methyl group is preferred.
上述式(1)所表示之化合物中,特佳之具體例可舉出如下述式所表示之化合物。 Among the compounds represented by the above formula (1), a specific example of the compound represented by the following formula is exemplified.
上述式(1)所表示之化合物之合成方法並無特別限定,可依照後述實施例中記載之方法進行合成。 The method for synthesizing the compound represented by the above formula (1) is not particularly limited, and it can be synthesized in accordance with the method described in the examples below.
間隔物形成用感光性樹脂組成物中之上述式(1)所表示之化合物之含有量,在不阻礙本發明目的之範圍內即無特別限定。上述式(1)所表示之化合物之含有量,典型地係相對於鹼可溶性樹脂(A)與光聚合性單體(B)之合計量100質量份而言,以0.01~2.5質量份為佳,0.01~0.5質量份為較佳。間隔物形成用感光性樹脂組成物中之上述 式(1)所表示之化合物之含有量藉由設在該範圍時,容易形成對基板之密著性優良之間隔物。 The content of the compound represented by the above formula (1) in the photosensitive resin composition for spacer formation is not particularly limited as long as it does not inhibit the object of the present invention. The content of the compound represented by the above formula (1) is preferably 0.01 to 2.5 parts by mass based on 100 parts by mass of the total of the alkali-soluble resin (A) and the photopolymerizable monomer (B). 0.01 to 0.5 parts by mass is preferred. The above-mentioned photosensitive resin composition for spacer formation When the content of the compound represented by the formula (1) is within this range, it is easy to form a spacer excellent in adhesion to the substrate.
本發明之間隔物形成用感光性樹脂組成物更亦可包含著色劑(D)。尤其,在間隔物形成用感光性樹脂組成物係包含遮光劑作為著色劑時,可適宜使用於黑色間隔物之形成。藉由黑色間隔物,可抑制來自顯示裝置中之間隔物部分之漏光,而可製造可顯示高對比且適宜畫像之顯示裝置。 The photosensitive resin composition for forming a spacer of the present invention may further contain a coloring agent (D). In particular, when the photosensitive resin composition for forming a spacer contains a light-shielding agent as a colorant, it can be suitably used for the formation of a black spacer. By the black spacer, light leakage from the spacer portion in the display device can be suppressed, and a display device capable of displaying a high contrast and suitable image can be manufactured.
本發明之間隔物形成用感光性樹脂組成物所含有之著色劑(D)並無特別限定,例如,被分類在色指數(C.I.;The Society of Dyers and Colourists公司發行)中之顏料(Pigment)的化合物,具體而言,較佳使用編號有下述之色指數(C.I.)編號者。 The coloring agent (D) contained in the photosensitive resin composition for spacer formation of the present invention is not particularly limited, and is, for example, a pigment classified in a color index (CI; issued by The Society of Dyers and Colourists). The compound, specifically, is preferably numbered with the color index (CI) number described below.
可適宜使用之黃色顏料之例,可舉出如C.I.顏料黃1(以下,同樣「C.I.顏料黃」,但僅記載編號)、3、11、12、13、14、15、16、17、20、24、31、53、55、60、61、65、71、73,74、81、83、86、93、95、97、98、99、100、101、104、106、108、109、110、113、114、116、117、119、120、125、126、127、128、129、137、138、139、147、148、150、151、152、153、154、155、156、166、167、168、175、180、及185。 Examples of the yellow pigment which can be suitably used include, for example, CI Pigment Yellow 1 (hereinafter, similarly, "CI Pigment Yellow", but only the number is described), 3, 11, 12, 13, 14, 15, 16, 17, 20 , 24, 31, 53, 55, 60, 61, 65, 71, 73, 74, 81, 83, 86, 93, 95, 97, 98, 99, 100, 101, 104, 106, 108, 109, 110 , 113, 114, 116, 117, 119, 120, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 166, 167 , 168, 175, 180, and 185.
可適宜使用之橙色顏料之例,可舉出如C.I.顏料橙1 (以下,同樣為「C.I.顏料橙」,但僅記載編號)、5、13、14、16、17、24、34、36、38、40、43、46、49、51、55、59、61、63、64、71、及73。 An example of an orange pigment which can be suitably used is, for example, C.I. Pigment Orange 1 (Hereinafter, it is also "CI Pigment Orange", but only the numbers), 5, 13, 14, 16, 17, 24, 34, 36, 38, 40, 43, 46, 49, 51, 55, 59, 61 , 63, 64, 71, and 73.
可適宜使用之紫色顏料之例,可舉出如C.I.顏料紫1(以下,同樣為「C.I.顏料紫」,但僅記載編號)、19、23、29、30、32、36、37、38、39、40、及50。 Examples of the purple pigment which can be suitably used include CI Pigment Violet 1 (hereinafter, similarly, "CI Pigment Violet", but only the number is described), 19, 23, 29, 30, 32, 36, 37, 38, 39, 40, and 50.
可適宜使用之紅色顏料之例,可舉出如C.I.顏料紅1(以下,同樣為「C.I.顏料紅」,但僅記載編號)2、3、4、5、6、7、8、9、10、11、12、14、15、16、17、18、19、21、22、23、30、31、32、37、38、40、41、42、48:1、48:2、48:3、48:4、49.1、49:2、50:1、52:1、53:1、57、57:1、57:2、58.2、58:4、60:1、63:1、63:2、64:1、81:1、83、88、90:1、97、101、102、104、105、106、108、112、113、114、122、123、144、146、149、150、151、155、166、168、170、171、172、174、175、176、177、178、179、180、185、187、188、190、192、193、194、202、206、207、208、209、215、216、217、220、223、224、226、227、228、240、242、243、245、254、255、264、及265。 Examples of the red pigment which can be suitably used include CI Pigment Red 1 (hereinafter, similarly, "CI Pigment Red", but only the number is described) 2, 3, 4, 5, 6, 7, 8, 9, 10 , 11, 12, 14, 15, 16, 17, 18, 19, 21, 22, 23, 30, 31, 32, 37, 38, 40, 41, 42, 48:1, 48:2, 48:3 , 48:4, 49.1, 49:2, 50:1, 52:1, 53:1, 57, 57:1, 57:2, 58.2, 58:4, 60:1, 63:1, 63:2 , 64:1, 81:1, 83, 88, 90:1, 97, 101, 102, 104, 105, 106, 108, 112, 113, 114, 122, 123, 144, 146, 149, 150, 151 , 155, 166, 168, 170, 171, 172, 174, 175, 176, 177, 178, 179, 180, 185, 187, 188, 190, 192, 193, 194, 202, 206, 207, 208, 209 , 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 242, 243, 245, 254, 255, 264, and 265.
可適宜使用之藍色顏料之例,可舉出如C.I.顏料藍1(以下,同樣為「C.I.顏料藍」,但僅記載編號)、2、15、15:3、15:4、15:6、16、22、60、64、及66。 Examples of the blue pigment which can be suitably used include, for example, CI Pigment Blue 1 (hereinafter, similarly, "CI Pigment Blue", but only the number is described), 2, 15, 15:3, 15:4, 15:6 , 16, 22, 60, 64, and 66.
可適宜使用之上述其他色相之顏料之例,可舉出如C.I.顏料綠7、C.I.顏料綠36、C.I.顏料綠37等之綠色顏 料、C.I.顏料棕23、C.I.顏料棕25、C.I.顏料棕26、C.I.顏料棕28等之棕色顏料、C.I.顏料黑1、C.I.顏料黑7等之黑色顏料。 Examples of the pigments of the above other hue which can be suitably used include green pigments such as C.I. Pigment Green 7, C.I. Pigment Green 36, C.I. Pigment Green 37, and the like. Black pigments such as C.I. Pigment Brown 23, C.I. Pigment Brown 25, C.I. Pigment Brown 26, C.I. Pigment Brown 28, etc., C.I. Pigment Black 1, C.I. Pigment Black 7, etc.
又,將著色劑作成遮光劑時,遮光劑係以使用黑色顏料為佳。黑色顏料如可舉出碳黑、芘黑、鈦黑、銅、鐵、錳、鈷、鉻、鎳、鋅、鈣、銀等之金屬氧化物、複合氧化物、金屬硫化物、金屬硫酸鹽、金屬碳酸鹽等,不論有機物、無機物之各種顏料。此等之中,亦以使用具有高遮光性之碳黑為佳。 Moreover, when a coloring agent is used as an opacifier, it is preferable to use a black pigment as an opacifier. Examples of the black pigment include metal oxides such as carbon black, black, titanium black, copper, iron, manganese, cobalt, chromium, nickel, zinc, calcium, and silver, composite oxides, metal sulfides, and metal sulfates. Metal carbonates and the like, regardless of various pigments of organic matter and inorganic matter. Among these, carbon black having high light blocking property is also preferred.
碳黑可使用槽黑、爐黑、熱碳黑、燈黑等之公知之碳黑,但以使用遮光性優良之槽黑為佳。又,亦可使用經樹脂被覆之碳黑。 As the carbon black, a known carbon black such as channel black, furnace black, hot carbon black, or lamp black can be used, but it is preferable to use a groove black having excellent light shielding properties. Further, carbon black coated with a resin can also be used.
又,為了調整碳黑之色調,亦可適宜添加上述之有機顏料作為輔助顏料。 Further, in order to adjust the color tone of carbon black, the above organic pigment may be suitably added as an auxiliary pigment.
為了使上述著色劑可均勻地分散於間隔物形成用感光性樹脂組成物中,亦可更使用分散劑。此般分散劑係以使用聚乙烯亞胺系、胺基甲酸酯樹脂系、丙烯酸樹脂系之高分子分散劑為佳。尤其,在著色劑係使用碳黑時,分散劑係以使用丙烯酸樹脂系之分散劑為佳。 In order to uniformly disperse the coloring agent in the photosensitive resin composition for forming a spacer, a dispersing agent may be further used. As the dispersant, a polyethyleneimine-based, urethane-based resin or acrylic resin-based polymer dispersant is preferably used. In particular, when carbon black is used as the colorant, the dispersant is preferably an acrylic resin-based dispersant.
又,無機顏料及有機顏料可各別單獨使用,亦可將兩種以上予以併用,而在併用時,相對於無機顏料與有機顏料之總量100質量份,以在10~80質量份之範圍內使用有機顏料為佳,在20~40質量份之範圍使用為較佳。 Further, the inorganic pigment and the organic pigment may be used singly or in combination of two or more kinds, and in combination, in the range of 10 to 80 parts by mass based on 100 parts by mass of the total of the inorganic pigment and the organic pigment. It is preferred to use an organic pigment in the range, and it is preferably used in the range of 20 to 40 parts by mass.
間隔物形成用感光性樹脂組成物中之著色劑之使用量 在不阻礙本發明目的之範圍可適宜選擇,典型地係相對於間隔物形成用感光性樹脂組成物之固形分合計100質量份而言,以5~70質量份為佳,25~60質量份為較佳。藉由設在上述範圍內,可容易形成所期望之形狀之間隔物。 The amount of the coloring agent used in the photosensitive resin composition for spacer formation The range of the solid content of the photosensitive resin composition for spacer formation is preferably from 5 to 70 parts by mass, preferably from 25 to 60 parts by mass, based on 100 parts by mass of the solid content of the photosensitive resin composition for spacer formation. It is better. By being set within the above range, a spacer of a desired shape can be easily formed.
尤其,在使用間隔物形成用感光性樹脂組成物形成黑色間隔物時,係以調整間隔物形成用感光性樹脂組成物中遮光劑之量使黑色間隔物之被膜每1μm之OD值成為0.5以上為佳。黑色間隔物之被膜每1μm之OD值若在0.5以上,則可良好地容易抑制來自顯示裝置之間隔物部分之漏光,且可取得充分顯示對比。 In particular, when a black spacer is formed using the photosensitive resin composition for spacer formation, the amount of the light-shielding agent in the photosensitive resin composition for spacer formation is adjusted so that the OD value per 1 μm of the film of the black spacer becomes 0.5 or more. It is better. When the OD value per 1 μm of the film of the black spacer is 0.5 or more, light leakage from the spacer portion of the display device can be easily suppressed, and sufficient display contrast can be obtained.
著色劑係在使用分散劑以適當濃度予以分散作成分散液後,添加至負型感光性樹脂組成物為佳。 The coloring agent is preferably added to the negative photosensitive resin composition after being dispersed in a suitable concentration to form a dispersion using a dispersing agent.
本發明之間隔物形成用感光性樹脂組成物因應必要亦可含有光吸收劑(E)(以下,亦稱為「(E)成分」)。光吸收劑(E)並無特別限定,可使用可吸曝光之光者,特別係以吸收200~450nm之波長領域之光者為佳。例如可舉出如萘化合物、二萘化合物、蒽化合物、啡啉化合物、染料等。 The photosensitive resin composition for forming a spacer of the present invention may contain a light absorbing agent (E) (hereinafter also referred to as "(E) component)" as necessary. The light absorbing agent (E) is not particularly limited, and those which can absorb light for exposure can be used, and in particular, those which absorb light in the wavelength range of 200 to 450 nm are preferable. For example, a naphthalene compound, a dinaphthyl compound, an anthraquinone compound, a phenanthroline compound, a dye, etc. are mentioned.
具體地可舉出α-萘酚、β-萘酚、α-萘酚甲基醚、α-萘酚乙基醚、1,2-二羥基萘、1,3-二羥基萘、1,4-二羥基萘、1,5-二羥基萘、1,6-二羥基萘、1,7-二羥基萘、1,8-二羥基萘、2,3-二羥基萘、2,6-二羥基萘、2,7-二羥基萘、 蒽、9,10-二羥基蒽等之萘衍生物或蒽或其衍生物;偶氮系染料、二苯甲酮系染料、胺基酮系染料、喹啉系染料、蒽醌系染料、二苯基氰基丙烯酸酯系染料、三嗪系染料、p-胺基安息香酸系染料等之染料等。此等之中亦以使用萘衍生物為佳,以具有羥基之萘衍生物為特佳。此等之光吸收劑可單獨使用或可將2種以上組合使用。 Specific examples thereof include α-naphthol, β-naphthol, α-naphthol methyl ether, α-naphthol ethyl ether, 1,2-dihydroxynaphthalene, 1,3-dihydroxynaphthalene, 1,4 -dihydroxynaphthalene, 1,5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 1,7-dihydroxynaphthalene, 1,8-dihydroxynaphthalene, 2,3-dihydroxynaphthalene, 2,6-di Hydroxynaphthalene, 2,7-dihydroxynaphthalene, a naphthalene derivative such as ruthenium, 9,10-dihydroxyindole or an anthracene or a derivative thereof; an azo dye, a benzophenone dye, an aminoketone dye, a quinoline dye, an anthraquinone dye, A dye such as a phenyl cyanoacrylate dye, a triazine dye, or a p-amino benzoic acid dye. Among these, a naphthalene derivative is preferably used, and a naphthalene derivative having a hydroxyl group is particularly preferred. These light absorbers may be used singly or in combination of two or more.
(D)成分之含有量係相對於(A)成分及(B)成分之合計100質量份而言,以0.01~10質量份為佳,0.05~7質量份為較佳,以0.1~5質量份為更佳。藉由設在上述範圍內,可同時良好地保有硬化後之破壞強度,並可使在改變曝光量時之樹脂圖型之膜厚變化之比例增大。 The content of the component (D) is preferably 0.01 to 10 parts by mass, more preferably 0.05 to 7 parts by mass, and 0.1 to 5 parts by mass based on 100 parts by mass of the total of the components (A) and (B). The serving is better. By setting it within the above range, the breaking strength after hardening can be favorably maintained at the same time, and the ratio of the film thickness change of the resin pattern at the time of changing the exposure amount can be increased.
本發明之間隔物形成用感光性樹脂組成物為了改善塗布性、調整黏度,係以含有有機溶劑(S)(以下,亦稱為「(S)成分」)為佳。 The photosensitive resin composition for forming a spacer of the present invention preferably contains an organic solvent (S) (hereinafter also referred to as "(S) component") in order to improve coatability and adjust viscosity.
有機溶劑具體地可舉出乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單-n-丙基醚、乙二醇單-n-丁基醚、二乙二醇單甲基醚、二乙二醇單乙基醚、二乙二醇單-n-丙基醚、二乙二醇單-n-丁基醚、三乙二醇單甲基醚、三乙二醇單乙基醚、丙二醇單甲基醚、丙二醇單乙基醚、丙二醇單-n-丙基醚、丙二醇單-n-丁基醚、二丙二醇單甲基醚、二丙二醇單乙基醚、二丙二醇單-n-丙基醚、二丙二醇單-n-丁基醚、三丙二醇單甲基醚、三丙二醇單乙基醚等之(聚)烷 二醇單烷基醚類;乙二醇單甲基醚乙酸酯、乙二醇單乙基醚乙酸酯、二乙二醇單甲基醚乙酸酯、二乙二醇單乙基醚乙酸酯、丙二醇單甲基醚乙酸酯(PGMEA)、丙二醇單乙基醚乙酸酯等之(聚)烷二醇單烷基醚乙酸酯類;二乙二醇二甲基醚、二乙二醇甲基乙基醚、二乙二醇二乙基醚、四氫呋喃等之其他醚類;甲基乙基酮、環己酮、2-庚酮、3-庚酮等之酮類;2-羥基丙酸甲酯、2-羥基丙酸乙酯等之乳酸烷基酯類;2-羥基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯、3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基丙酸酯、乙酸乙酯、乙酸n-丙酯、乙酸i-丙酯、乙酸n-丁酯、乙酸i-丁酯、蟻酸n-戊酯、乙酸i-戊酯、丙酸n-丁酯、丁酸乙酯、丁酸n-丙酯、丁酸i-丙酯、丁酸n-丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸n-丙酯、乙醯乙酸甲酯、乙醯乙酸乙酯、2-側氧丁酸乙酯等之其他酯類;甲苯、茬等之芳香族烴類;N-甲基吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等之醯胺類等。此等之中,亦以烷二醇單烷基醚類、烷二醇單烷基醚乙酸酯類、上述其他之醚類、乳酸烷基酯類、上述其他之酯類為佳,以烷二醇單烷基醚乙酸酯類、上述其他之醚類、上述其他之酯類為較佳。此等溶劑可單獨使用或可將2種以上組合使用。 Specific examples of the organic solvent include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl ether, and diethylene glycol single Methyl ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol Monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, two Propylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether, etc. Glycol monoalkyl ethers; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether (poly)alkylene glycol monoalkyl ether acetates such as acetate, propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monoethyl ether acetate, etc.; diethylene glycol dimethyl ether, two Other ethers such as ethylene glycol methyl ethyl ether, diethylene glycol diethyl ether, tetrahydrofuran; ketones such as methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone; - alkyl lactate such as methyl hydroxypropionate or ethyl 2-hydroxypropionate; ethyl 2-hydroxy-2-methylpropionate, methyl 3-methoxypropionate, 3-methoxy Ethyl propionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxyacetate, ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutanoate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutylpropionate, ethyl acetate, acetic acid n- Propyl ester, i-propyl acetate, n-butyl acetate, i-butyl acetate, n-pentyl formate, i-pentyl acetate, n-butyl propionate, ethyl butyrate, butyl Acid n-propyl ester, i-propyl butyrate, n-butyl butyrate, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetate, ethyl acetate, 2 Other esters such as ethyl acetobutanoate; aromatic hydrocarbons such as toluene and hydrazine; N-methylpyrrolidone, N,N-dimethylformamide, N,N-dimethyl B Amidoxime, such as guanamine. Among these, alkanediol monoalkyl ethers, alkanediol monoalkyl ether acetates, the above other ethers, alkyl lactates, and the other esters described above are preferred. The alcohol monoalkyl ether acetates, the above other ethers, and the other esters described above are preferred. These solvents may be used singly or in combination of two or more.
(S)成分之含有量並無特限定,以在基板等上可塗 布之濃度,因應塗布膜厚而適宜設定。感光性樹脂組成物之黏度係以5~500cp為佳,10~50cp為較佳,20~30cp為更佳。又,固形分濃度係以5~100質量%為佳,以20~50質量%為較佳。 The content of the (S) component is not particularly limited, and may be applied to a substrate or the like. The concentration of the cloth is appropriately set depending on the thickness of the coating film. The viscosity of the photosensitive resin composition is preferably 5 to 500 cp, preferably 10 to 50 cp, and more preferably 20 to 30 cp. Further, the solid content concentration is preferably 5 to 100% by mass, and more preferably 20 to 50% by mass.
本發明之感光性樹脂組成物中,因應必要亦可含有界面活性劑、密著性向上劑、熱聚合禁止劑、消泡劑等之添加劑。任一之添加劑皆可使用過往公知者。界面活性劑可舉出如陰離子系、陽離子系、非離子系等之化合物,密著性向上劑可舉出如過往公知之矽烷耦合劑,熱聚合禁止劑可舉出如氫醌、氫醌單乙基醚等,消泡劑可舉出如聚矽氧系、氟系化合物等。 The photosensitive resin composition of the present invention may contain an additive such as a surfactant, an adhesion-promoting agent, a thermal polymerization inhibiting agent, or an antifoaming agent, if necessary. Any of the additives can be used in the past. Examples of the surfactant include compounds such as anionic, cationic, and nonionic. Examples of the adhesion-promoting agent include a conventionally known decane coupling agent, and examples of the thermal polymerization inhibitor include hydroquinone and hydroquinone. Examples of the antifoaming agent such as ethyl ether include a polyfluorene-based compound and a fluorine-based compound.
本發明之感光性樹脂組成物係可將上述各成分以三輥磨機、球磨機、碾砂機等之攪拌機予以混合(分散‧混練),因應必要以5μm膜濾器等之濾器進行過濾而調製。 In the photosensitive resin composition of the present invention, the above components may be mixed (dispersed, kneaded) in a mixer such as a three-roll mill, a ball mill, or a sand mill, and may be prepared by filtration using a filter such as a 5 μm membrane filter.
本發明之間隔物除了使用上述之間隔物形成用感光性樹脂組成物以外,其他係與使用感光性樹脂組成物所形成之過往間隔物相同。又,本發明之顯示裝置除了具備藉由上述之間隔物形成用感光性樹脂組成物所形成之間隔物以 外,其他係與過往之顯示裝置相同。以下單僅說明關於間隔物之形成方法。 The spacer of the present invention is the same as the conventional spacer formed using the photosensitive resin composition except that the above-described photosensitive resin composition for spacer formation is used. Moreover, the display device of the present invention includes a spacer formed of the photosensitive resin composition for forming a spacer described above. In addition, the other systems are the same as the previous display devices. The following list only describes the method of forming the spacer.
使用上述之間隔物形成用感光性樹脂組成物形成間隔物之方法並無特別限制,可適宜選自從過往既已採用之顯示裝置用之間隔物之形成方法。適宜間隔物之形成方法可舉出如包含將上述間隔物形成用感光性樹脂組成物塗布於基板上而形成感光性樹脂層的塗布步驟、使感光性樹脂層因應既定之間隔物圖型而曝光的曝光步驟、顯像已曝光之感光性樹脂層而形成間隔物之圖型的顯像步驟的方法。 The method of forming the spacer by using the above-described spacer-forming photosensitive resin composition is not particularly limited, and may be suitably selected from a method of forming a spacer for a display device which has been used in the past. The method of forming a suitable spacer includes a coating step of applying a photosensitive resin composition for forming a spacer onto a substrate to form a photosensitive resin layer, and exposing the photosensitive resin layer to a predetermined spacer pattern. The exposure step and the method of developing the photosensitive resin layer which has been exposed to form a pattern of the spacer pattern.
首先,塗布步驟係在應形成間隔物之基板上,使用輥塗布器、反向塗布器、刮棒塗布器等之接觸轉印型塗布裝置或旋轉塗布器(回轉式塗布裝置)、幕塗流動塗布器等之非接觸型塗布裝置塗布本發明之感光性樹脂組成物,因應必要藉由乾燥去除溶劑而形成感光性樹脂層。 First, the coating step is performed on a substrate on which spacers are to be formed, and a contact transfer type coating device or a spin coater (rotary coating device) using a roll coater, a reverse coater, a bar coater, or the like, and a curtain coating flow In the non-contact type coating device such as an applicator, the photosensitive resin composition of the present invention is applied, and it is necessary to form a photosensitive resin layer by drying and removing the solvent.
顯示裝置中之間隔物係為了在以對向配置之2種基板間形成既定高度之空間所使用者,感光性樹脂層可形成於2種基板之任一之表面上。具體而言,例如,在顯示裝置係使用TFT液晶面板者時,感光性樹脂層可形成於TFT基板上,亦可形成於濾色器基板上。 The spacer in the display device is a user who can form a space of a predetermined height between the two substrates arranged in the opposite direction, and the photosensitive resin layer can be formed on either surface of the two types of substrates. Specifically, for example, when a TFT liquid crystal panel is used as the display device, the photosensitive resin layer may be formed on the TFT substrate or may be formed on the color filter substrate.
其次,將表面上形成有感光性樹脂層之基板供給至曝光步驟。曝光步驟係經由負型遮罩,對感光性樹脂層照射紫外線、準分子雷射光等之活性能量線,因應既定之間隔物之圖型而部分地曝光感光性樹脂層。曝光可使用高壓水銀燈、超高壓水銀燈、氙燈、碳弧燈等之發出紫外線之光 源。曝光量雖係根據感光性樹脂組成物之組成而相異,例如以10~600mJ/cm2程度為佳。 Next, the substrate on which the photosensitive resin layer is formed on the surface is supplied to the exposure step. In the exposure step, the photosensitive resin layer is irradiated with an active energy ray such as ultraviolet rays or excimer laser light through a negative mask, and the photosensitive resin layer is partially exposed in accordance with a pattern of a predetermined spacer. The exposure may use a high-pressure mercury lamp, an ultra-high pressure mercury lamp, a xenon lamp, a carbon arc lamp, or the like that emits ultraviolet light. The amount of exposure differs depending on the composition of the photosensitive resin composition, and is preferably, for example, about 10 to 600 mJ/cm 2 .
曝光步驟中使用之曝光裝置並無特別限定,可使用鏡面投射方式之曝光裝置或接近式曝光裝置等。鏡面投射方式之曝光裝置之具體例可舉出如MPA-7800CF(佳能股份有限公司製)等。鏡面投射方式之曝光裝置在光罩與基板之間因無曝光間隙,故可容易形成微小徑之間隔物。接近式曝光裝置之具體例可舉出如TME-150RTO(股份有限公司TOPCON製)等。接近式曝光裝置因平價而可降低顯示裝置之製造成本,但曝光時因在光罩與基板之間產生曝光間隙,故有間隔物之徑容易變大之傾向。但,若係使用上述之間隔物形成用感光性樹脂組成物,即便在使用接近式曝光裝置施行曝光時,仍可容易形成小徑之間隔物。 The exposure device used in the exposure step is not particularly limited, and a mirror projection type exposure device, a proximity exposure device, or the like can be used. Specific examples of the mirror-projection type exposure apparatus include, for example, MPA-7800CF (manufactured by Canon Inc.). Since the exposure apparatus of the mirror projection method has no exposure gap between the photomask and the substrate, a spacer having a small diameter can be easily formed. Specific examples of the proximity exposure apparatus include TME-150RTO (manufactured by TOPCON Co., Ltd.). The proximity exposure apparatus can reduce the manufacturing cost of the display device because of the parity, but the exposure gap is formed between the photomask and the substrate during exposure, so that the diameter of the spacer tends to become large. However, when the above-described photosensitive resin composition for spacer formation is used, even when exposure is performed using a proximity exposure apparatus, a spacer having a small diameter can be easily formed.
基板為TFT基板等之於基板上已形成有元件者時,則有必要在元件上,或在與形成有元件之基板成對之基板之元件為相對向之場所上形成間隔物之情況。於該情況時,考量到元件之高度,因有必要在形成有元件之場所與在其他之場所上改變間隔物之高度,故以經由半色調遮罩進行曝光為佳。使用上述之間隔物形成用感光性樹脂組成物時,藉由經由半色調遮罩進行曝光,可容易地形成高度相異之間隔物。 When the substrate is a TFT substrate or the like, and a component is formed on the substrate, it is necessary to form a spacer on the component or on a substrate facing the substrate on which the component is formed. In this case, considering the height of the element, it is preferable to perform exposure by a halftone mask because it is necessary to change the height of the spacer at a place where the element is formed and at another place. When the photosensitive resin composition for forming a spacer described above is used, it is possible to easily form spacers having different heights by exposure through a halftone mask.
顯像步驟係藉由將曝光後之感光性樹脂層以顯像液進行顯像而形成間隔物。顯像方法並無特別限定,可使用浸漬法、噴霧法等。顯像液之具體例可舉出如單乙醇胺、二 乙醇胺、三乙醇胺等之有機系者,或氫氧化鈉、氫氧化鉀、碳酸鈉、氨、4級銨鹽等之水溶液。本發明之感光性樹脂組成物因顯現適度顯像性,故可適當顯像。 In the developing step, a spacer is formed by developing the exposed photosensitive resin layer as a developing liquid. The development method is not particularly limited, and a dipping method, a spray method, or the like can be used. Specific examples of the developing liquid include, for example, monoethanolamine and An organic system such as ethanolamine or triethanolamine, or an aqueous solution of sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia or a quaternary ammonium salt. Since the photosensitive resin composition of the present invention exhibits moderate developability, it can be appropriately developed.
且,因應必要對顯像後之間隔物施以後烘烤進行加熱硬化。後烘烤之溫度係以150~250℃為佳。 Moreover, it is necessary to heat-harden the spacer after the development after the application. The post-baking temperature is preferably 150 to 250 °C.
以下,根據實施例更詳細地說明本發明,但本發明並非係受到此等實施例所限定者。 Hereinafter, the present invention will be described in more detail based on examples, but the present invention is not limited by the examples.
混合下述表1中所示之各成分,並使其溶解於溶劑中成為固形分含有量為37質量%,而調製成感光性樹脂組成物。尚且,溶劑係使用由丙二醇單甲基醚乙酸酯(PM)10質量%與二乙二醇甲基醚(MEDG)90質量%所構成之混合溶劑。 Each component shown in the following Table 1 was mixed and dissolved in a solvent to have a solid content of 37% by mass to prepare a photosensitive resin composition. Further, as the solvent, a mixed solvent composed of 10% by mass of propylene glycol monomethyl ether acetate (PM) and 90% by mass of diethylene glycol methyl ether (MEDG) was used.
表1中,各略稱係分別代表以下者,括弧內之數值為 配合量(質量份)。 In Table 1, each abbreviated number represents the following, and the values in parentheses are The amount of blending (parts by mass).
A:甲基丙烯酸:2,3-環氧環己-1-基甲基甲基丙烯酸酯:三環[5.2.1.02,6]癸-8-基甲基丙烯酸酯=12:71:17(質量比)之樹脂(質量平均分子量12000) A: methacrylic acid: 2,3-epoxycyclohex-1-ylmethyl methacrylate: tricyclo[5.2.1.0 2,6 ]癸-8-yl methacrylate = 12:71:17 (mass ratio) resin (mass average molecular weight 12000)
B:甲基丙烯酸:2,3-環氧環己-1-基甲基甲基丙烯酸酯:三環[5.2.1.02,6]癸-8-基甲基丙烯酸酯=14:71:15(質量比)之樹脂(質量平均分子量8000) B: methacrylate: 2,3-epoxy-1-yl methacrylate: tricyclo [5.2.1.0 2,6] deca-8-yl methacrylate = 14: 71: 15 (mass ratio) resin (mass average molecular weight 8000)
DPHA:二季戊四醇六丙烯酸酯 DPHA: dipentaerythritol hexaacrylate
OXE01:1,2-辛二酮,1-[4-(苯硫基)-,2-(O-苄醯基肟)](BASF公司製「IRGACURE OXE01」) OXE01:1, 2-octanedione, 1-[4-(phenylthio)-, 2-(O-benzylindenyl)] ("IRGACURE OXE01", manufactured by BASF Corporation)
OXE02:乙酮,1-[9-乙基-6-(2-甲基苄醯基)-9H-咔唑-3-基],1-(O-乙醯肟)(BASF公司製「IRGACURE OXE02」) OXE02: ethyl ketone, 1-[9-ethyl-6-(2-methylbenzyl)-9H-indazol-3-yl], 1-(O-acetamidine) (IRGACURE, manufactured by BASF Corporation) OXE02")
C-1:3-巰基丙酸(光起始助劑) C-1: 3-mercaptopropionic acid (photoinitiator)
實施例及比較例中,將與實施例所用之式(1)所表示之化合物及比較例所用之式(1)所表示之化合物類似 之構造之化合物稱之為「添加劑化合物」。 In the examples and comparative examples, the compounds represented by the formula (1) used in the examples and the compounds represented by the formula (1) used in the comparative examples are similar. The compound of the structure is referred to as "additive compound".
實施例及比較例中係使用以下之化合物作為添加劑化合物。添加劑化合物中,關於式(1)所表示之化合物之MCIMA及MCDEA之合成方法則係如記述如下。 In the examples and comparative examples, the following compounds were used as the additive compounds. Among the additive compounds, the synthesis method of MCIMA and MCDEA of the compound represented by the formula (1) is as follows.
使氯化3-(4-甲氧基苯基)丙烯酸5.90g(30 mmol)溶解於50ml之已乾燥之醚,添加三乙基胺4.59ml(當量比1.1)、咪唑2.25ml(當量比1.1),在室溫下攪拌1小時。以水50ml、飽和NaHCO3水溶液50ml、及1N鹽酸洗淨後,以硫酸鎂進行乾燥並在減壓下進行濃縮。將己烷-乙酸乙酯作為展開溶劑,以矽膠為支撐載體並藉由管柱層析法進行純化,而取得MCIMA(3.41g,15 mmol)。以氯化丙烯酸為基準之收率為50%。 5.90 g (30 mmol) of 3-(4-methoxyphenyl)acrylic acid chloride was dissolved in 50 ml of the dried ether, and 4.59 ml (equivalent ratio of 1.1) of triethylamine and 2.25 ml of imidazole (equivalent ratio of 1.1) were added. ), stirred at room temperature for 1 hour. After washing with 50 ml of water, 50 ml of a saturated aqueous NaHCO 3 solution, and 1N hydrochloric acid, the mixture was dried over magnesium sulfate and concentrated under reduced pressure. The hexane-ethyl acetate was used as a developing solvent, and the silica gel was used as a support carrier and purified by column chromatography to obtain MCIMA (3.41 g, 15 mmol). The yield based on chlorinated acrylic acid was 50%.
使氯化3-(4-甲氧基苯基)丙烯酸5.90g(30 mmol) 溶解於50ml之已乾燥之醚,添加三乙基胺4.59ml(當量比1.1)、二乙基胺2.41ml(當量比1.1),在室溫下攪拌1小時。以水50ml、飽和NaHCO3水溶液50ml、及1N鹽酸洗淨後,以硫酸鎂進行乾燥並在減壓下進行濃縮。將己烷-乙酸乙酯作為展開溶劑,以矽膠為支撐載體並藉由管柱層析法進行純化,而取得MCDEA(4.65g,20 mmol)。以氯化丙烯酸為基準之收率為67%。 5.90 g (30 mmol) of 3-(4-methoxyphenyl)acrylic acid chloride was dissolved in 50 ml of the dried ether, and 4.59 ml (equivalent ratio of 1.1) of triethylamine and 2.41 ml of diethylamine were added. The equivalent ratio was 1.1) and the mixture was stirred at room temperature for 1 hour. After washing with 50 ml of water, 50 ml of a saturated aqueous NaHCO 3 solution, and 1N hydrochloric acid, the mixture was dried over magnesium sulfate and concentrated under reduced pressure. The hexane-ethyl acetate was used as a developing solvent, and the silica gel was used as a support carrier and purified by column chromatography to obtain MCDEA (4.65 g, 20 mmol). The yield based on chlorinated acrylic acid was 67%.
1,5DON:1,5-二羥基萘 1,5DON: 1,5-dihydroxynaphthalene
在6吋玻璃基板(道‧康寧公司製,1737玻璃)上塗布上述各實施例及比較例中調製之感光性樹脂組成物後,以80℃乾燥5分鐘,取得具有3.8μm膜厚之感光性樹脂層。其次,使用接近式曝光裝置(製品名:TME-150RTO(股份有限公司TOPCON製)),經由遮罩尺寸9μm之負型遮罩對此感光性樹脂層選擇性地照射紫外線,使用濃度0.05質量%之KOH水溶液作為顯像液,藉由在23℃下進行噴霧顯像而取得點狀之圖型。其後,藉由計測未曝光部完全溶解為止之時間(BP:Break Point,分界點)而評價顯像性。其結果係如下述表2所示。 The photosensitive resin composition prepared in each of the above Examples and Comparative Examples was applied onto a 6-inch glass substrate (manufactured by Dow Corning Co., Ltd., 1737 glass), and then dried at 80 ° C for 5 minutes to obtain a photosensitive film having a film thickness of 3.8 μm. Resin layer. Next, using a proximity exposure apparatus (product name: TME-150RTO (manufactured by TOPCON Co., Ltd.)), the photosensitive resin layer was selectively irradiated with ultraviolet rays via a negative mask having a mask size of 9 μm, and the use concentration was 0.05% by mass. The KOH aqueous solution was used as a developing solution, and a dot pattern was obtained by performing spray development at 23 °C. Thereafter, the development performance was evaluated by measuring the time (BP: Break Point, demarcation point) until the unexposed portion was completely dissolved. The results are shown in Table 2 below.
在6吋玻璃基板(道‧康寧公司製,1737玻璃)上塗 布上述各實施例及比較例中調製之感光性樹脂組成物後,以80℃乾燥5分鐘,取得具有3.8μm膜厚之感光性樹脂層。其次,使用接近式曝光裝置(製品名:TME-150RTO(股份有限公司TOPCON製)),經由遮罩尺寸9μm之負型遮罩,以曝光量50mJ/cm2選擇性地照射紫外線,使用濃度0.05質量%之KOH水溶液作為顯像液,藉由在23℃下進行噴霧顯像而形成點狀之圖型。其後,以100℃、10分鐘,其次以220℃、40分鐘之條件在加熱板上實施後烘烤,並測量後烘烤後所形成之間隔物之徑。 The photosensitive resin composition prepared in each of the above Examples and Comparative Examples was applied onto a 6-inch glass substrate (manufactured by Dow Corning Co., Ltd., 1737 glass), and then dried at 80 ° C for 5 minutes to obtain a photosensitive film having a film thickness of 3.8 μm. Resin layer. Next, using a proximity exposure apparatus (product name: TME-150RTO (manufactured by TOPCON Co., Ltd.)), a negative-type mask having a mask size of 9 μm was used, and ultraviolet rays were selectively irradiated at an exposure amount of 50 mJ/cm 2 using a concentration of 0.05. A mass% KOH aqueous solution was used as a developing solution to form a dot pattern by performing spray development at 23 °C. Thereafter, post-baking was carried out on a hot plate at 100 ° C for 10 minutes, followed by 220 ° C for 40 minutes, and the diameter of the spacer formed after post-baking was measured.
且,使用以下之評價基準進行評價密著而殘留之最小間隔物徑。其結果係如下述表2所示。 Further, the minimum spacer diameter remaining in the adhesion was evaluated using the following evaluation criteria. The results are shown in Table 2 below.
○:間隔物徑未滿10μm。 ○: The spacer diameter is less than 10 μm.
×:間隔物徑為10μm以上。 x: The spacer diameter is 10 μm or more.
與上述「顯像性評價」同樣地施行而形成點狀之圖型。顯像時間係將上述之分界點(BP)作為基準,而設成BP之約1.5倍。其後,以純水洗淨,藉由對已形成之圖型實施在100℃下10分鐘,其次220℃下40分鐘之後烘烤而形成點狀圖型。 In the same manner as the "development evaluation" described above, a dot pattern is formed. The development time is set to be about 1.5 times BP based on the above-mentioned boundary point (BP). Thereafter, it was washed with pure water, and formed into a dot pattern by baking the formed pattern at 100 ° C for 10 minutes and then at 220 ° C for 40 minutes.
且,在曝光量50mJ/cm2下調查可顯像之點狀圖型尺寸並施以密著性之評價。密著性之判定基準係如以下所述。其結果係如下述表2所示。 Further, the dot pattern size which can be developed was examined under an exposure amount of 50 mJ/cm 2 and evaluated for adhesion. The criteria for determining the adhesion are as follows. The results are shown in Table 2 below.
◎:密著之最小遮罩尺寸為5μm以下。 ◎: The minimum mask size of the adhesion is 5 μm or less.
○:密著之最小遮罩尺寸為7μm以下。 ○: The minimum mask size of the adhesion is 7 μm or less.
△:密著之最小遮罩尺寸為10μm以下。 △: The minimum mask size of the adhesion is 10 μm or less.
×:密著之最小遮罩尺寸為15μm以下。 ×: The minimum mask size of the adhesion is 15 μm or less.
在6吋玻璃基板(道‧康寧公司製,1737玻璃)上塗布上述各實施例及比較例中調製之感光性樹脂組成物後,以100℃乾燥2分鐘,取得具有3.8μm膜厚之感光性樹脂層。其次,使用接近式曝光裝置(製品名:TME-150RTO,股份有限公司TOPCON製)),以ghi混合光源對感光性樹脂層進行曝光。曝光量係設成10、20、30、40、50mJ/cm2。其次,使用濃度0.05質量%之KOH水溶液作為顯像液,以23℃進行盛液顯像60秒鐘。其後,在100℃、10分鐘,其次220℃、40分鐘之條件在加熱板上實施後烘烤,並測量後烘烤後之膜厚。 The photosensitive resin composition prepared in each of the above Examples and Comparative Examples was applied onto a 6-inch glass substrate (manufactured by Dow Corning Co., Ltd., 1737 glass), and then dried at 100 ° C for 2 minutes to obtain a photosensitive film having a film thickness of 3.8 μm. Resin layer. Next, the photosensitive resin layer was exposed by a ghi mixed light source using a proximity exposure apparatus (product name: TME-150RTO, manufactured by TOPCON Co., Ltd.). The exposure amount was set to 10, 20, 30, 40, and 50 mJ/cm 2 . Next, a KOH aqueous solution having a concentration of 0.05% by mass was used as a developing solution, and liquid imaging was carried out at 23 ° C for 60 seconds. Thereafter, post-baking was carried out on a hot plate at 100 ° C for 10 minutes, followed by 220 ° C for 40 minutes, and the film thickness after post-baking was measured.
且,使用以下之評價基準評價感光性樹脂組成物之半色調特性(HT特性)。其結果係如下述表2所示。 Further, the halftone characteristics (HT characteristics) of the photosensitive resin composition were evaluated using the following evaluation criteria. The results are shown in Table 2 below.
○:在曝光量10mJ/cm2之情況與50mJ/cm2之情況下,後烘烤後之膜厚差為0.5μm以上。 ○: In the case of an exposure amount of 10 mJ/cm 2 and 50 mJ/cm 2 , the difference in film thickness after post-baking is 0.5 μm or more.
×:在曝光量10mJ/cm2之情況與50mJ/cm2之情況下,後烘烤後之膜厚差為未滿0.5μm。 X: In the case of an exposure amount of 10 mJ/cm 2 and 50 mJ/cm 2 , the difference in film thickness after post-baking was less than 0.5 μm.
除了經由15μm徑之遮罩並以曝光量50mJ/cm2曝光 感光性樹脂層以外,其他與上述「半色調(HT)特性之評價」同樣地施行而形成點狀之樹脂圖型。 A dot-like resin pattern was formed in the same manner as the above-mentioned "evaluation of halftone (HT) characteristics" except that the photosensitive resin layer was exposed to a mask having a diameter of 15 μm and an exposure amount of 50 mJ/cm 2 .
且,以14.2mN/秒之加成速度進行加壓,調查直至圖型被破壞為止所必需之力,使用以下之評價基準評價樹脂圖型之破壞強度。其結果係如下述表2所示。 Further, the pressure was applied at a rate of addition of 14.2 mN/sec, and the force necessary until the pattern was broken was examined, and the breaking strength of the resin pattern was evaluated using the following evaluation criteria. The results are shown in Table 2 below.
○:破壞為止所必需之力為150mN以上。 ○: The force necessary for destruction is 150 mN or more.
×:破壞為止所必需之力為未滿150mN。 ×: The force necessary for destruction is less than 150 mN.
根據實施例1~15可得知,若係含有鹼可溶性樹脂(A)、光聚合性單體(B)、光聚合起始劑(C)及式(1)所表示之化合物的間隔物形成用感光性樹脂組成 物,則即使在使用接近式曝光裝置之情況時,仍可容易形成小徑之間隔物。另一方面,根據比較例1~4可得知,在不包含間隔物形成用感光性樹脂組成物係式(1)所表示之化合物之情況時,則難以形成小徑之間隔物。又,根據比較例5可得知,即使係包含間隔物形成用感光性樹脂組成物係與式(1)所表示之化合物類似之構造之化合物,仍然亦難以形成小徑之間隔物。 According to Examples 1 to 15, it is understood that spacers containing the alkali-soluble resin (A), the photopolymerizable monomer (B), the photopolymerization initiator (C), and the compound represented by the formula (1) are formed. Composition with photosensitive resin However, even when a proximity exposure apparatus is used, a spacer of a small diameter can be easily formed. On the other hand, according to the comparative examples 1 to 4, when the compound represented by the formula (1) for forming a spacer for the spacer is not contained, it is difficult to form a spacer having a small diameter. Further, according to the comparative example 5, it is found that even if a compound having a structure similar to the compound represented by the formula (1) is formed, the photosensitive resin composition for spacer formation is difficult to form a spacer having a small diameter.
並且,根據實施例1~15與比較例1~4之比較可得知,即使對間隔物形成用感光性樹脂組成物配合式(1)所表示之化合物,其半色調特定、破壞強度等之特性上,仍不會遜色於不包含式(1)所表示之化合物之間隔物形成用感光性樹脂組成物之此等特性。 In addition, according to the comparison of the examples 1 to 15 and the comparative examples 1 to 4, it is understood that the compound represented by the formula (1) is blended with the photosensitive resin composition for forming a spacer, and the halftone specificity, the breaking strength, and the like are The characteristics are not inferior to those of the photosensitive resin composition for forming a spacer which does not contain the compound represented by the formula (1).
又,根據實施例1~11可得知,由間隔物對基板之密著性優良之觀點,間隔物形成用感光性樹脂組成物中之式(1)所表示之化合物之含有量,相對於鹼可溶性樹脂(A)與光聚合性單體(B)之合計量100質量份而言,以0.01~2.5質量份為佳,以0.01~0.5質量份為較佳。 Further, according to Examples 1 to 11, it is understood that the content of the compound represented by the formula (1) in the photosensitive resin composition for spacer formation is superior to the viewpoint of the excellent adhesion of the spacer to the substrate. The 100 parts by mass of the total amount of the alkali-soluble resin (A) and the photopolymerizable monomer (B) is preferably 0.01 to 2.5 parts by mass, more preferably 0.01 to 0.5 parts by mass.
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