TWI527769B - Method for recycling calcium fluoride sludge - Google Patents
Method for recycling calcium fluoride sludge Download PDFInfo
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- TWI527769B TWI527769B TW103110635A TW103110635A TWI527769B TW I527769 B TWI527769 B TW I527769B TW 103110635 A TW103110635 A TW 103110635A TW 103110635 A TW103110635 A TW 103110635A TW I527769 B TWI527769 B TW I527769B
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Description
本發明之目的,在揭露一種氟化鈣污泥資源化之方法,尤指利用硫酸根移除劑將廢水處理廠產出之氟化鈣污泥內含之硫酸鈣去除,使氟化鈣污泥不再含有硫酸鈣,而能當成煉鋼時的助熔劑,達到廢棄物資源化的目的。 The object of the present invention is to disclose a method for recycling calcium fluoride sludge, in particular to remove calcium sulfate contained in calcium fluoride sludge produced by a wastewater treatment plant by using a sulfate removing agent to cause calcium fluoride staining. Mud no longer contains calcium sulphate, but can be used as a flux in steelmaking to achieve waste recycling.
半導體製造業或光電材料及元件製造業在製程上需使用含氫氟酸等混酸作為減薄或晶片蝕刻,其產生的廢水由廢水處理設施處理後,會產生含有硫酸鈣的氟化鈣污泥,其硫酸鈣含量往往高達6%以上。 Semiconductor manufacturing or optoelectronic materials and components manufacturing industry need to use mixed acid such as hydrofluoric acid as thinning or wafer etching in the process. The wastewater generated by the wastewater treatment facility will produce calcium fluoride sludge containing calcium sulfate. Its calcium sulfate content is often as high as 6% or more.
這些含有硫酸鈣的含氟污泥,以往均以掩埋處理,近年來則有部分業者先經烘乾再進入水泥窯,當成水泥的部分替代原料。其中掩埋法雖暫時解決氟化鈣污泥的處理問題,但長期來看,由於雨水的沖刷,易造成環境的二次污染,況且氟資源有限,此種處理方法無異是一種資源的浪費。至於用之於水泥的部分替代原料,雖然有許多的相關研究也證明成效良好,但在關家倫等人所撰〝半導體業氟化鈣污泥資源化途徑探討〞文章中指出〝氟化鈣污泥做為水泥添料,雖然在學理上有相關研究證明可行,但由於氟化鈣污泥於高溫中會產生氟及氟化氫氣體,以及添加氟化鈣後,可能會影響水泥品質等問題,因此,必須確實控制污泥添加量來解決這些 問題〞,由於必須克服這些問題,致使氟化鈣污泥未能大量使用於水泥替代原料,氟化鈣污泥的去化仍存在極大的問題。許多文獻建議氟化鈣污泥的氟化鈣含量達60%以上,就可資源化利用於煉鋼廠,但均未指出如何資源化,也未見具體的技術說明,所以氟化鈣污泥應用在煉鋼廠的目標,目前只停留在口號階段並未真正實現。 These fluorine-containing sludges containing calcium sulfate have been treated by landfill in the past. In recent years, some operators have dried and then entered the cement kiln as part of the substitute material for cement. Although the burial method temporarily solves the problem of treatment of calcium fluoride sludge, in the long run, due to the scouring of rainwater, it is easy to cause secondary pollution of the environment, and the fluorine resources are limited. This treatment method is nothing but a waste of resources. As for some of the alternative raw materials used in cement, although there are many related studies that have proved to be effective, but in the article about the recycling of calcium fluoride sludge in the semiconductor industry by Guan Jialun and others, the calcium fluoride sludge is pointed out. As a cement material, although there are related studies in the academic field, it is feasible, because the calcium fluoride sludge will generate fluorine and hydrogen fluoride gas at high temperature, and the addition of calcium fluoride may affect the quality of the cement, etc. Must really control the amount of sludge added to solve these The problem is that, due to the need to overcome these problems, calcium fluoride sludge has not been widely used in cement substitute raw materials, and the decalcification of calcium fluoride sludge still has great problems. Many literatures suggest calcium fluoride of calcium fluoride sludge. If the content is more than 60%, it can be recycled to the steelworks, but they have not pointed out how to recycle, and there is no specific technical description. Therefore, the application of calcium fluoride sludge in steel mills is only at the moment. The slogan phase has not really been achieved.
氟化鈣污泥未能資源化利用於煉鋼廠的原因,是因為大部分的氟化鈣污泥含有硫酸鈣高達6%以上。由於氟化鈣於煉鋼時的功能,除了當成助熔劑之外,還兼具鋼液中除硫及除磷的功效,如氟化鈣含硫量過高會大幅降低其效能,甚至會造成煉鋼困難,所以煉鋼廠對於氟化鈣的含硫量有著嚴格的規範。近期有業者直接將氟化鈣污泥進料至廢氫氟酸中,藉由廢氫氟酸的酸度溶解污泥,再重新製造氟化鈣,因氟化鈣與硫酸鈣不論在廢水處理時或廢氫氟酸製造氟化鈣時,均會產生共沈現象,故此舉仍然無法解決氟化鈣含硫量的問題。所以,如何建立一套氟化鈣污泥資源化的方法,使氟化鈣污泥由廢棄物轉化成有用的資源,實有待努力與改進。有鑑於此,發明人多年來從事化工製程設計,術有專精且深具實務經驗,有感於業界對於氟化鈣污泥資源化的重要性,潛心研究始完成本案之〝氟化鈣污泥資源化之方法〞。 The reason why calcium fluoride sludge cannot be recycled to steel mills is because most of the calcium fluoride sludge contains calcium sulfate up to 6% or more. Due to the function of calcium fluoride in steelmaking, in addition to being a flux, it also has the effect of removing sulfur and dephosphorization in molten steel. For example, if the calcium content of calcium fluoride is too high, the efficiency will be greatly reduced, and even Steelmaking is difficult, so steel mills have strict specifications for the sulphur content of calcium fluoride. Recently, some companies directly feed calcium fluoride sludge into waste hydrofluoric acid, dissolve the sludge by the acidity of waste hydrogen fluoride acid, and re-manufacture calcium fluoride, because calcium fluoride and calcium sulfate are used in wastewater treatment. Or the production of calcium fluoride by waste hydrofluoric acid will cause co-sinking, so this problem still cannot solve the problem of sulfur content of calcium fluoride. Therefore, how to establish a method for recycling calcium fluoride sludge to convert calcium fluoride sludge into useful resources from waste is urgently needed and improved. In view of this, the inventor has been engaged in chemical process design for many years, with specialization and practical experience. He feels the importance of the industry in the recycling of calcium fluoride sludge, and has devoted himself to researching the calcium fluoride pollution in this case. The method of mud resource utilization.
本發明之其一目的,在提供一種氟化鈣污泥資源化之方法。俾能去除與氟化鈣的共同沈澱物硫酸鈣,使氟化鈣污泥不再含有硫酸鈣。 It is an object of the present invention to provide a method of recycling calcium fluoride sludge.俾 can remove the co-precipitate calcium sulphate with calcium fluoride, so that the calcium fluoride sludge no longer contains calcium sulphate.
本發明之其二目的,在提供一種氟化鈣污泥資源化之方法。俾能使含有硫酸鈣的氟化鈣污泥能由含氟污泥廢棄物轉化成有用的氟化鈣 產品,可資利用於化工業或煉鋼業。除了避免氟化鈣污泥對於環境的衝擊之外,尚可製造廣泛的經濟效益。 A second object of the present invention is to provide a method for recycling calcium fluoride sludge.俾Using calcium fluoride sludge containing calcium sulphate can be converted from fluoride-containing sludge waste into useful calcium fluoride Products can be used in the chemical industry or steel industry. In addition to avoiding the impact of calcium fluoride sludge on the environment, a wide range of economic benefits can be created.
為達上述目的,本發明先使用粉碎機將氟化鈣污泥粉碎至極細顆粒,繼之於反應槽中加入清水使氟化鈣顆粒繼續碎化並達到均質化的狀態,之後加入硫酸根移除劑進行硫酸鈣中硫酸根的移除反應,使硫酸根脫離硫酸鈣並由固相轉移至液相。反應液經過濾後,濾餅已不再含有硫酸鈣沈澱物。濾餅經粉碎後再水洗,可將濾餅中含有的硫酸根及其他離子加以洗淨,再過濾後即得可用於化工業或煉鋼業的氟化鈣產品。 In order to achieve the above object, the present invention first uses a pulverizer to pulverize the calcium fluoride sludge to extremely fine particles, and then adds clear water to the reaction tank to continue to reduce the calcium fluoride particles and achieve homogenization, and then add sulfate radicals. The removing agent performs a sulfate removal reaction in the calcium sulfate to remove the sulfate from the calcium sulfate and transfer it from the solid phase to the liquid phase. After the reaction solution is filtered, the filter cake no longer contains calcium sulfate precipitate. After the filter cake is pulverized and then washed, the sulfate and other ions contained in the filter cake can be washed, and then filtered to obtain a calcium fluoride product which can be used in the chemical industry or the steel industry.
M1‧‧‧第一粉碎機 M1‧‧‧First Crusher
R1‧‧‧反應槽 R1‧‧‧ reaction tank
F1‧‧‧第一過濾機 F1‧‧‧First filter
M2‧‧‧第二粉碎機 M2‧‧‧Second Crusher
C1‧‧‧水洗槽 C1‧‧‧Washing tank
F2‧‧‧第二過濾機 F2‧‧‧Second filter
10‧‧‧氟化鈣污泥進料管線 10‧‧‧calcium fluoride sludge feed line
20‧‧‧粉碎後氟化鈣污泥進料管線 20‧‧‧Pulverized calcium fluoride sludge feed line after crushing
30‧‧‧第一清水進料管線 30‧‧‧First fresh water feed line
40‧‧‧硫酸根移除劑進料管線 40‧‧‧ Sulfate Remover Feed Line
50‧‧‧反應液出料管線 50‧‧‧Reaction liquid discharge line
60‧‧‧反應後濾餅出料管線 60‧‧‧Filter cake discharge line after reaction
70‧‧‧粉碎後濾餅出料管線 70‧‧‧Crushed filter cake discharge line
80‧‧‧第二清水進料管線 80‧‧‧Second clear water feed line
90‧‧‧清洗液出料管線 90‧‧‧Clean liquid discharge line
100‧‧‧產品出料管線 100‧‧‧Product discharge line
第1圖係本發明之流程圖 Figure 1 is a flow chart of the present invention
塊狀的氟化鈣污泥經由氟化鈣污泥進料管線10進入第一粉碎機M1粉碎成極細顆粒,再經由粉碎後氟化鈣污泥進料管線20進料至反應槽R1,同時清水亦經由第一清水進料管線30進入反應槽R1進行氟化鈣顆粒的再碎化,並使其達均質化的狀態,其中清水與氟化鈣污泥的重量係介於0.5:1至30:1之間。之後,硫酸根移除劑經由硫酸根移除劑進料管線40進料至反應槽R1,進行硫酸鈣中硫酸根的移除反應,使固相中的硫酸根脫離硫酸鈣並轉移至液相,其中硫酸根移除劑內含的碳酸根與硫酸鈣內含的硫酸根之重量比係介於0.6:1至1.88:1之間,而硫酸根移除劑係指碳酸鈉、碳酸氫鈉、碳酸鉀、碳酸氫鉀、碳酸、二氧化碳、碳酸銨及碳酸氫銨;單一物質或它們的混合物。 The bulk calcium fluoride sludge is pulverized into the fine granules through the calcium sulphate sludge feed line 10 into the first pulverizer M1, and then fed to the reaction tank R1 via the pulverized calcium fluoride sludge feed line 20 while The clean water also enters the reaction tank R1 via the first clean water feed line 30 to re-crush the calcium fluoride particles, and is homogenized, wherein the weight of the clear water and the calcium fluoride sludge is between 0.5:1. Between 30:1. Thereafter, the sulfate removing agent is fed to the reaction tank R1 via the sulfate removing agent feed line 40, and the sulfate removal reaction in the calcium sulfate is performed to remove the sulfate in the solid phase from the calcium sulfate and transfer to the liquid phase. The weight ratio of the carbonate contained in the sulfate removing agent to the sulfate contained in the calcium sulfate is between 0.6:1 and 1.88:1, and the sulfate removing agent refers to sodium carbonate and sodium hydrogencarbonate. , potassium carbonate, potassium hydrogencarbonate, carbonic acid, carbon dioxide, ammonium carbonate and ammonium hydrogencarbonate; a single substance or a mixture thereof.
這些固相不再含硫酸鈣的反應液經由反應液出料管線50進 入第一過濾機F1將液體濾除,濾餅則經由反應後濾餅出料管線60進入第二粉碎機M2進行粉碎,粉碎後之濾餅經由粉碎後濾餅出料管線70,同時清水也經由第二清水進料管線80進入水洗槽C1進行濾餅清洗,將濾餅中的硫酸根及其他離子洗淨,其中清水與濾餅之重量比係介於0.5:1至30:1之間。清洗完後之固體再經由清洗液出料管線90進入第二過濾機F2進行過濾,濾餅經由產品出料管線100出料,即得乾淨且不含硫酸鈣之氟化鈣產品。 The reaction liquid in which the solid phase is no longer containing calcium sulfate is fed through the reaction liquid discharge line 50. The liquid is filtered out by the first filter F1, and the filter cake is pulverized through the filter cake discharge line 60 after entering the second pulverizer M2, and the pulverized filter cake is passed through the pulverized filter cake discharge line 70, and the water is also cleaned. The filter cake is washed through the second fresh water feed line 80 into the washing tank C1 to wash the sulfate and other ions in the filter cake, wherein the weight ratio of the clean water to the filter cake is between 0.5:1 and 30:1. . The cleaned solids are then filtered through the cleaning liquid discharge line 90 into the second filter F2, and the filter cake is discharged through the product discharge line 100 to obtain a calcium fluoride-free calcium fluoride product.
本發明之實際操作結果如下:取晶圓廠廢水處理設施所得之氟化鈣污泥,測得其硫酸根含量為:6.09%(相當於含硫2.03%),經本發明之方法處理後之產品,測得硫酸根含量已減至0.11%(相當於含硫0.036%),符合鋼鐵廠煉鋼所需之氟化鈣的含硫量標準(含硫量小於0.3%)。 The actual operation result of the present invention is as follows: the calcium fluoride sludge obtained from the fab wastewater treatment facility is measured, and the sulfate content thereof is determined to be: 6.09% (corresponding to 2.03% of sulfur), and the product treated by the method of the present invention is obtained. The sulfate content has been reduced to 0.11% (corresponding to 0.036% sulfur), which is in line with the sulfur content of calcium fluoride required for steelmaking in steel plants (sulphur content less than 0.3%).
綜合以上所述,本發明用於氟化鈣污泥資源化,確實具有有效及經濟等多項要求,而與專利要件相符合,惟以上所述揭示者,乃較佳實施例,舉凡局部之變更或修飾而源於本發明之技術思想,而為熟悉該項技術之人士所易於推知者,俱不脫本發明之範圍。 In summary, the present invention is used for the resource utilization of calcium fluoride sludge, and it has many requirements of being effective and economical, and is in conformity with the patent requirements, but the above disclosure is a preferred embodiment, and a partial change is made. It is a modification of the technical idea of the present invention, and is easily inferred by those skilled in the art without departing from the scope of the present invention.
M1‧‧‧第一粉碎機 M1‧‧‧First Crusher
R1‧‧‧反應槽 R1‧‧‧ reaction tank
F1‧‧‧第一過濾機 F1‧‧‧First filter
M2‧‧‧第二粉碎機 M2‧‧‧Second Crusher
C1‧‧‧水洗槽 C1‧‧‧Washing tank
F2‧‧‧第二過濾機 F2‧‧‧Second filter
10‧‧‧氟化鈣污泥進料管線 10‧‧‧calcium fluoride sludge feed line
20‧‧‧粉碎後氟化鈣污泥進料管線 20‧‧‧Pulverized calcium fluoride sludge feed line after crushing
30‧‧‧第一清水進料管線 30‧‧‧First fresh water feed line
40‧‧‧硫酸根移除劑進料管線 40‧‧‧ Sulfate Remover Feed Line
50‧‧‧反應液出料管線 50‧‧‧Reaction liquid discharge line
60‧‧‧反應後濾餅出料管線 60‧‧‧Filter cake discharge line after reaction
70‧‧‧粉碎後濾餅出料管線 70‧‧‧Crushed filter cake discharge line
80‧‧‧第二清水進料管線 80‧‧‧Second clear water feed line
90‧‧‧清洗液出料管線 90‧‧‧Clean liquid discharge line
100‧‧‧產品出料管線 100‧‧‧Product discharge line
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