TWI526383B - Non-contact handling device - Google Patents

Description

Non-contact handling device

The present invention relates to a non-contact conveyance device which is used for production of a large-sized liquid crystal display (LED), a flat panel display (FPD) such as a plasma display (PDP), or a solar panel.

In the production of FPDs, solar panels, etc., it is a method of increasing the productivity by increasing the size of one panel. For example, in the case of an LCD, the 10th generation becomes a size of 2850×3050×0.7 mm. Therefore, as in the prior art, when the liquid crystal glass is placed on a plurality of rollers and rolled and conveyed by rolling, the deflection of the shaft supporting the roller or the degree of deviation of the height of the roller height is strong. It acts on the liquid crystal glass, and damage to the marks, scratches, and the like is given to the liquid crystal glass.

In the technical field of floating and transporting by the air which can avoid the damage of the object to be transported, such as the FPD or the solar panel, the air floating in the patent document 1, the patent document 2, and the patent document 3 are carried out. In addition to the device, various non-contact conveyance devices have been proposed in various ways, and the applicant of the present invention has also proposed a non-contact conveyance device that floats and conveys a conveyed object by a swirling flow (Patent Document 4).

According to the non-contact conveyance device described in the above-mentioned Patent Document 4, the upwardly moving swirling flow is generated on the surface side of the swirling flow forming body to float the object to be transported, whereby the air flow rate of about half of the conventional airflow is used. The advantage of being transportable.

However, in the above-described non-contact conveyance device, when the conveyance distance of the object to be conveyed is to be extended, the conveyance rail is added along the conveyance direction of the conveyed object to extend the distance, but at this time, the conveyance rail and the conveyance rail are When the space portion of the joint of the adjacent conveyance rail becomes large, as shown in Fig. 16, there is no air film pressure acting on the object to be transported (for example, glass) G in the space portion S of the joint. Therefore, the weight of the object G to be transported is deflected at a portion suspended from the conveyance rails 2 and 3, and the end portion of the object G is collided with the end portions of the conveyance rails 2 and 3 to be damaged. In order to avoid this deflection, even if the amount of floating is increased, the deflection of the end portion of the object G to be conveyed is proportionally increased, so that the collision of the object G with the conveyance rails 2 and 3 cannot be avoided.

Patent Document 1: Japanese Patent Laid-Open No. Hei 6-127738

Patent Document 2: Japanese Patent Laid-Open Publication No. 2003-63643

Patent Document 3: Japanese Laid-Open Patent Publication No. 2006-264804

Patent Document 4: International Publication No. 2009/119377

Patent Document 5: International Publication No. 2010/058689

In the technique of avoiding the collision of the conveyed object in the space portion of the joint between the conveyance rails and the conveyance rail of the suspension portion, the above-mentioned Patent Document 2 discloses a conveyance device that is disposed on the conveyance surface. The floating chamber of the box-shaped body having a long conveying direction at the central portion of the width direction in the direction in which the conveyance direction is orthogonal, and the conveyance side at the both ends in the width direction of the conveyance A pair of transport roller rows arranged in the width direction arranged in the ground, and the floating chamber is an upper panel having a cover parallel to the transport surface and corresponding to the box-shaped body, and a plurality of gas discharges are formed on the upper panel. a small hole, and a gap is formed between the upper end edge of the end panel on the rear side in the conveying direction of the floating chamber of the box-shaped body and the rear end edge of the upper panel in the conveying direction, and the moving pressure gas is used to flow from the gap. Pressing means.

Patent Document 3 discloses a non-contact conveying device using a floating unit including: a base body, a gas supply portion, a porous portion, an exhaust portion, a flow rate adjuster, and an edge hole portion; the base body Corresponding to the large-sized glass substrate to be transported, the air supply portion is provided on the bottom surface of the base body, and the porous portion is provided on the upper surface of the base body, and the exhaust portion flows from the air supply portion. The air flowing out of the porous portion and floating out of the substrate flows from the upper surface of the base body to the bottom surface and is discharged to the outside of the base. The flow regulator is disposed at the exhaust portion, and the edge hole portion is The edge portion is formed on the upper surface of the base body, and the substrate is floated by the dynamic air.

Patent Document 5 discloses a non-contact conveyance device that transports a plurality of conveyance rails along a conveyance direction of a conveyed object, and conveys the conveyed object while floating on the plurality of conveyance rails, and is characterized in that: a fluid ejecting means and a second fluid ejecting means; the first fluid ejecting means is a transport surface provided at an end of the transport rail, and generates a rising swirling flow to float the object to be transported, and the second fluid ejecting means Is a transport surface provided at the end of the transport rail, and when the end of the transported object on the transport rail is transported to the joint between the adjacent transport rails or the vicinity thereof, the object to be transported The end is sprayed with fluid and the end of the object is floated unit.

The technique of colliding with the conveyance rail at the portion of the conveyed rail of the conveyed object in the space portion of the joint between the conveyance rails described in Patent Document 2, Patent Document 3, and Patent Document 5 is a material to be transported. When being conveyed to the front end side of the conveyance direction of the conveyance rail, the air is sprayed from the lower side to the front end part of the conveyed object, and the end of the conveyed object is floated.

In the device described in Patent Document 3, it is necessary to provide a flow rate adjusting device for each of the floating units, and in the device described in Patent Document 5, it is necessary to provide a discharge groove of the second discharge means for each conveyance rail. This leads to an increase in the cost of the device body and a problem of complicated installation work and the like.

The present invention has been made in view of the above-described problems, and an object thereof is to provide a non-contact conveying device that suppresses the cost of the device to a low level, facilitates the installation work, and prevents the front end portion of the object to be conveyed from being phased. It hits an adjacent carrying track and can be transferred to an adjacent carrying track.

In order to achieve the above object, a non-contact conveying device of the present invention is characterized in that: a non-contact conveying rail, and another non-contact conveying rail, and a non-contact suction device; the other non-contact conveying rail is The non-contact conveyance rails are arranged adjacent to each other in the conveyance direction of the object to be conveyed, and the non-contact suction device is located above the joint of the non-contact conveyance rails with the space portion interposed therebetween It is configured to attract the above-mentioned objects to be transported.

According to the non-contact conveying device of the present invention, the non-contact suction device disposed opposite to the space portion of the joint is placed over the joint of the non-contact conveyance rail, and is non-contact with the suction device. Attracting protection The front end portion of the conveyed object does not collide with each other while being held by the space portion of the joint while being held and held by the suction device. The non-contact conveyance rail adjacent to the conveyance direction does not damage the conveyed object.

The suction holding body is composed of a base body that is square in plan view and a swirling flow forming body that is attached to the base body, and the surface on which the side of the swirling flow forming body is attached is fixed as a lower surface. Installed on the lower surface of the ceiling.

The base body may include a cylindrical housing recess, a belt-shaped cylindrical wall surface portion, an air passage, and an air supply port, and the cylindrical housing recess has an opening that is circular in plan view from the upper surface. Further, the bottom surface portion is formed by expanding the diameter of the cylindrical inner wall surface portion of the cylindrical housing recess portion via the cylindrical inner wall surface portion and the annular shoulder portion, and the air passage is along the The base body is formed in the longitudinal direction, and a part of the air supply opening is open to the bottom surface of the cylindrical housing recess. The air supply port has one end open to the back surface of the base and the other end open to the air passage.

The swirling flow forming body includes a cylindrical body, a ring-shaped flange portion, a plurality of engaging lower portions, a recessed portion, an air ejection port, and an air introduction port. The cylindrical body includes: One end portion has a substantially circular opening portion in plan view, and the other end portion has a bottom surface portion of a cylindrical recessed portion formed in a cylindrical shape of the cylindrical body. The outer peripheral edge of the opening of the concave portion, the plurality of engaging lower portions are suspended downward from the outer peripheral surface of the annular portion, and have a card at the front end The protrusion is formed in a radial direction with respect to the outer peripheral surface, and the recessed portion is located in a tangential direction of the inner wall surface of the cylindrical recessed portion of the cylindrical recessed portion, and is sandwiched by the cylindrical shape a center of the concave portion at a position facing the diagonal line, and a triangular shape in plan view from the cylindrical inner wall surface toward the radially outer side, the air ejection port being formed on the inner side wall surface of each of the concave portions And opening to the opposite side in the cylindrical inner wall surface side of the cylindrical recessed portion, the air introduction port being connected to the air ejection port and opening to the outside of the concave portion protruding from the outer peripheral surface of the cylindrical body In the wall surface portion, the outer peripheral surface of the annular flange portion of the cylindrical body is press-fitted into the cylindrical inner wall surface portion of the cylindrical housing recessed portion of the base body, and the engagement is performed. The locking projections of the lower portion are respectively engaged with the annular shoulder portions of the cylindrical inner wall surface portion of the base body and are attached to the cylindrical housing recessed portions of the base body.

The suction and discharge device including the suction body formed by the base body and the swirling flow forming body provided in the base body, and the compressed air is supplied from the air passage of the base body through the cylindrical housing recessed portion of the base body. When the swirling flow forming body of the cylindrical housing recess is formed, the compressed air is discharged from the fluid discharge hole into the cylindrical recess through the fluid supply port of the swirling flow forming body, and becomes a swirling flow in the internal space of the cylindrical recess. The flow out from the opening of the cylindrical recess. When the object to be conveyed is placed at a position facing the end surface of the annular flange portion of the swirling flow forming body, the air flows out along the end surface of the annular flange portion and flows out. Therefore, the end surface of the annular flange portion and the object to be conveyed become a negative pressure. With this negative pressure, the object to be transported is attracted to the end face side of the annular beak, on the one hand, by the circle The opening of the cylindrical recess flows out, and the air which is interposed between the end surface of the annular flange and the object to be transported receives a repulsive force, and by the balance, the object to be transported is opposed to the annular portion. In the state of the end face, it is held in non-contact.

In this manner, the object to be transported is a non-contact suction device that is disposed in the transport direction by interposing a space portion of the joint between the transport rails, and is sucked and held by the suction device in a non-contact state. At the suction device side, the front end portion of the conveyed object in the conveyance direction does not collide with the non-contact conveyance rail adjacent to the conveyance direction, and the object to be conveyed is not damaged.

As described above, according to the present invention, it is possible to provide a non-contact conveying device that suppresses the device cost to a low level, facilitates the installation work, and prevents the front end portion of the object to be transported from colliding with the adjacent one. The rails are transported and can be transferred to adjacent transport rails.

Hereinafter, embodiments of the present invention will be described in more detail based on preferred examples shown in the drawings. In the following description, a case where the liquid crystal glass (hereinafter referred to as "glass") is transported as a conveyed object will be described as an example.

In the first to third figures, the non-contact conveyance device 1 is composed of the non-contact conveyance rail 2, the non-contact conveyance rail 3, the non-contact suction devices 5, 5, and the drive roller 7 in this example. The non-contact conveyance rail 2 is disposed in the width direction in three consecutive rows at a predetermined interval, and the non-contact conveyance rail 3 is in the conveyance direction X with the non-contact conveyance rail 2 In the three rows in which the adjacent portions are arranged, the non-contact suction devices 5 and 5 are above the space portion S of the joint 4 in the conveyance direction X of the non-contact conveyance rails 2 and 3, and the space portion of the seam 4 is interposed therebetween. S is disposed in the conveyance direction X, and the drive roller 7 is rotatably supported by the wall portions 6 and 6 in which the non-contact conveyance rails 2 and 3 are disposed along the conveyance direction X. The plurality of driving devices, the glass G is conveyed by the driving roller 7 in the conveying direction X.

The non-contact suction device 5 is composed of a pair of pillars 8, 8 and ceilings 9, 9 and suction holding bodies 10, 10; the pair of pillars 8, 8 are interposed therebetween with respect to the non-contact conveyance rail 2 The space portion S of the joint 4 in the conveyance direction X of the third portion 3 is erected so as to be opposed to each other with the drive roller 7 interposed therebetween, and the ceilings 9 and 9 are suspended between the pillars 8 and the suction The holders 10, 10 are fixedly attached to the lower surfaces of the ceilings 9, 9.

The suction holding body 10 is formed by a base body 11 that is square in plan view and the swirling flow forming bodies 12 and 13 that are attached to the base body 11.

As shown in FIGS. 4 to 8 , the base 11 includes a cylindrical housing recess 17 , a belt-shaped cylindrical wall surface portion 20 , and an air passage 21 . The cylindrical housing recess 17 is along the base body. The longitudinal direction Y of the 11 is continuously formed in the width direction of the base 11 in two rows, and has an opening 15 which is circular in plan view and which is open to the upper surface 14 of the base 11 and has a bottom surface portion 16 which is provided in a circular shape. The tubular wall surface portion 20 is expanded in diameter by the cylindrical inner wall surface portion 18 of the cylindrical housing recess portion 17 via the cylindrical inner wall surface portion 18 and the annular shoulder portion 19, and the air passage 21 is along the base body 11. Long side direction Y is formed, and a part of the air passage 21 is opened at the bottom surface portion 16 of the cylindrical housing recessed portion 17, and the other end portion is formed by being screwed and fixed to each other. The closing plug 23 (see Fig. 14) of the female screw portion 22 at the end of the air passage 21 is closed.

On the back surface 24 of the base 11, one end is opened to the back surface 24, and the other end is formed with an air supply port 25 that is opened to the air passage 21, and the air supply port 25 is connected to the supply. Pumped (not shown).

The base 11 is fixedly attached to the lower surface of the ceiling 9 by screws (not shown) that are screwed to a plurality of screw holes 26 provided in the base 11.

The rotation forming body disposed in the cylindrical housing recess 17 of the base 11 is formed by the swirling flow of the swirling flow in the right rotation direction (clockwise direction) shown in the 9th (a)th to 9th (f)th views. The body 12 and the swirling flow forming body 13 that generate the swirling flow in the left rotational direction (counterclock rotation direction) shown in Figs. 10(a) to 10(f) are used alone or in combination.

The swirling flow forming body 12 that generates a swirling flow in the right rotational direction (clockwise direction of rotation) shown in the nineth (a)th to nineth (f)th drawings includes a cylindrical body 12d and a ring-shaped ankle portion 12e, a plurality of hooks 12h, and recesses 12j and 12j, and air outlets 12l and 12l, and air introduction ports 12o and 12o. The cylindrical body 12d has a top view at one end. The substantially circular opening portion 12a is viewed, and the other end portion is provided with a cylindrical recess portion 12c having a bottom surface portion 12b, the ring The trunk portion 12e is formed on the outer peripheral edge of the opening portion 12a of the cylindrical recessed portion 12c of the cylindrical body 12d, and the plurality of branches (four in this example) are engaged with the hanging portion 12h from the ring shape. The outer peripheral surface 12f of the crotch portion 12e is suspended downward, and has a locking projection 12g at the distal end thereof and is formed in a radial direction of the outer peripheral surface 12f. The concave portions 12j and 12j are in the cylinder of the cylindrical concave portion 12c. The wall surface 12i is located in the tangential direction of the cylindrical inner wall surface 12i, and is opposed to the center O of the cylindrical recessed portion 12c at a position facing the diagonal line, and is radially outward from the cylindrical inner wall surface 12i. The square recesses have a triangular shape in a plan view, and the air ejection ports 12l and 12l are formed on the inner wall surface portions 12k and 12k of the respective recessed portions 12j and 12j, and face the cylindrical inner wall surface 12i side of the cylindrical recessed portion 12c, respectively. The air introduction ports 12o, 12o are open to the air ejection ports 12l, 12l, and are open to the outer wall surface portions 12n, 12n of the recesses 12j, 12j protruding from the outer peripheral surface 12m of the cylindrical body 12d. .

The air supplied from the air introduction ports 12o and 12o of the above-described swirling flow forming body 12 is discharged into the cylindrical recessed portion 12c of the cylindrical body 12d via the air ejection ports 12l and 12l, respectively, and the cylindrical recessed portion 12c is formed in the cylindrical recessed portion 12c. The internal space flows out from the opening 12a of the cylindrical recess 12c in a swirling flow (the direction of the arrow C in the ninth (b)) in a right direction of view.

The swirling flow forming body 13 that generates the swirling flow in the left rotational direction (counterclock rotation direction) shown in the tenth (a)th to tenth (f)th drawings is the same as the above-described swirling flow forming body 12, and includes a cylinder. The main body 13d, the annular crotch portion 13e, and the plurality of sub-clamping lower portions 13h, and the concave portions 13j, 13j And the air ejection ports 13l and 13l and the air introduction ports 13o and 13o. The cylindrical body 13d includes an opening 13a having a substantially circular shape in a plan view at one end, and the other end The portion includes a cylindrical recessed portion 13c having a bottom surface portion 13b that is formed on the outer peripheral edge of the opening portion 13a of the cylindrical recessed portion 13c of the cylindrical body 13d, and the plurality of branches (in this example) The four hooks 13h are suspended downward from the outer peripheral surface 13f of the annular flange portion 13e, and have a locking projection 13g at the distal end thereof and are formed in the radial direction of the outer circumferential surface 13f. 13j and 13j are in the tangential direction of the cylindrical inner wall surface 13i of the cylindrical recessed portion 13c, and are opposed to each other across the center O of the cylindrical recessed portion 13c. The position of the direction toward the radially outer side of the cylindrical inner wall surface 13i is a triangular shape, and the air ejection ports 13l, 13l are formed on the inner wall surface portions 13k, 13k of the respective concave portions 13j, 13j. And opening to the opposite side of the cylindrical inner wall surface 13i of the cylindrical recess 13c In the direction, the air introduction ports 13o and 13o are the outer wall surface portions 13n and 13n that communicate with the air ejection ports 13l and 13l and are opened to the concave portions 13j and 13j that protrude from the outer peripheral surface 13m of the cylindrical body 13d.

The air supplied from the air introduction ports 13o and 13o of the above-described swirling flow forming body 13 is a cylindrical recessed portion 13c that is ejected to the cylindrical body 13d via the air ejection ports 13l and 13l, respectively, in the cylindrical recessed portion. The internal space of 13c is a swirling flow (the arrow direction F direction in the 10th (b) figure) which looked at the left rotation direction in plan view, and flows out from the opening part 13a of this cylindrical recessed part 13c.

These swirling flow formers 12 and 13 are formed, for example, of a thermoplastic synthetic resin such as polyacetal resin or polyphenylene sulfite resin (PPS).

In the above-described swirling flow forming body 12, the outer surface 12f of the annular flange portion 12e of the cylindrical body 12d is press-fitted into the cylindrical inner wall surface portion 18 of the cylindrical housing recessed portion 17 of the base body 11, and the card is inserted. The locking projection 12g of the lower hanging portion 12h is engaged with the annular shoulder portion 19 of the cylindrical inner wall surface portion 18 of each of the base members 11, thereby being attached to the cylindrical housing recess portion 17 of the base body 11.

The swirling flow forming body 13 is also attached to the cylindrical housing recess 17 of the base 11 by the same method as the above-described swirling flow forming body 12.

The suction holding body 10 formed by the swirling flow forming body 12 is attached to the cylindrical housing recess 17 of the base 11, and is fixedly attached to the side on which the swirling flow forming body 12 is attached, in other words, the base body The upper surface 14 of the 11 is fixed to the lower surface of the ceiling 9 (see FIGS. 1 to 3) so as to face downward.

Hereinafter, the operation of the non-contact conveyance device 1 formed by the above-described structure will be described with reference to the first and second drawings.

The glass G disposed on the non-contact conveyance rail 2 is conveyed on the conveyance rail 2 while being conveyed toward the conveyance direction X by the drive roller 7. The compressed air is supplied to the non-contact suction device 5 just before the glass G reaches the space portion S of the seam 4 between the conveyance rail 2 and the conveyance rail 3 adjacent to the conveyance rail 2 in the conveyance direction X. 5, the air supply port 25 of the suction holding body 10, the compressed air is flowing from the The air passage 21 communicates with the bottom surface portion 16 of the cylindrical housing recess 17 of the air passage 21. The compressed air flowing through the cylindrical housing recess 17 is ejected from the air introduction ports 12o and 12o of the swirling flow forming body 12 installed in the cylindrical housing recess 17 through the air ejection ports 12l and 12l to the cylindrical body 12d. The cylindrical recess 12c. The compressed air that has been ejected to the cylindrical recessed portion 12c flows out of the opening portion 12a of the cylindrical recessed portion 12c in the internal space of the cylindrical recessed portion 12c in a swirling flow in the right direction of rotation.

At this time, since the glass G is conveyed to a position facing the end surface of the annular flange portion 12e of the swirling flow forming body 12, the air flowing out from the opening portion 12a of the cylindrical recessed portion 12c is along the ring shape. Since the end surface of the dam portion 12e is flown at a high speed and flows out, the end surface of the annular dam portion 12e and the glass G become a negative pressure. The negative pressure glass G is sucked to the annular flange portion 12e side, but flows out from the opening portion 12a of the cylindrical recess portion 12c and is interposed between the end surface of the annular flange portion 12e and the glass G as a swirling flow. The air receives the repulsive force, and the balance between the repulsive force and the negative pressure is maintained in a non-contact state in a state where the glass G faces the end surface of the annular crotch portion 12e.

In this manner, the glass G is sucked and held by the suction holding body 10 while being kept in a non-contact state, so that the glass G does not need to hang over the space portion S of the joint 4 between the conveyance rails 2, 3, and It can collide with the transport rail 3 and can be transferred to the adjacent transport rail 3.

In the above description, the suction holding body formed by the cylindrical housing recess 17 in which the swirling flow forming body 12 is attached to the base 11 has been described. In the form of 10, the suction holding body 10 formed by attaching the swirling flow forming body 13 to the cylindrical housing recess 17 of the base 11 may be used, and the swirling flow forming bodies 12 and 13 may be alternately mounted in the conveying direction X. It is also possible to provide the suction holding body 10 formed. Further, as shown in Fig. 15, as the suction holding body 10, the suction holding body 10 in which the swirling flow forming bodies 12 and 13 are attached to the base body 11 in the longitudinal direction may be used.

As described above, it is possible to provide a non-contact conveyance device that is a front end portion in the conveyance direction of the glass G that is floated and conveyed along the non-contact conveyance rail 2, and is just conveyed to the non-contact conveyance rail. 2, before the space portion S of the joint 4 of the non-contact conveyance rail 3 adjacent to the conveyance direction, the non-contact suction device 5 provided in the conveyance direction is interposed between the space portion S of the seam 4 5, by forming the suction holding body 10 of the suction device 5, the suction holding body 10 is sucked and held in a non-contact state, and is held by the space portion S of the seam 4 while being held in a state of being sucked and held. Therefore, the front end portion of the glass G in the conveyance direction does not collide with the non-contact conveyance rail 3 adjacent to the conveyance direction, and does not damage the glass G.

1‧‧‧ Non-contact handling device

2, 3‧‧‧ Non-contact handling track

4‧‧‧ seams

5‧‧‧ Non-contact suction device

6‧‧‧ wall

7‧‧‧ drive roller

8‧‧‧ pillar

9‧‧‧ ceiling

10‧‧‧Attraction

11‧‧‧ base

12, 13‧‧‧ rotating flow forming body

14‧‧‧Top

15‧‧‧ openings

16‧‧‧ bottom part

17‧‧‧Cylinder containment recess

18‧‧‧Cylinder inner wall face

19‧‧‧Ringed shoulder

20‧‧‧Striped cylindrical wall

21‧‧‧Air access

22‧‧‧Female screw

23‧‧‧Closed plug

24‧‧‧Back

25‧‧‧Air supply port

26‧‧‧ screw holes

Fig. 1 is a plan view showing the entire non-contact conveying device of the present invention.

Fig. 2 is a cross-sectional front view of Fig. 1.

Fig. 3 is a sectional view taken along line I-I of Fig. 1.

Figure 4 is a plan view of the substrate.

Fig. 5 is a sectional view taken along line II-II of Fig. 4.

Fig. 6 is a partially enlarged sectional view of Fig. 5.

Fig. 7 is a sectional view taken along line III-III of Fig. 4.

Figure 8 is a rear view of the substrate.

Fig. 9 is a view showing a swirling flow forming body in which a swirling flow in a right rotation direction (clockwise direction of rotation) is viewed in plan view; (a) is a front view, (b) is a plan view, and (c) is a bottom view; (d) is a cross-sectional view taken along line IV-IV of (b), (e) is an enlarged cross-sectional view of part A of (c), and (f) is an enlarged cross-sectional view of part B of (d).

Fig. 10 is a view showing a swirling flow forming body in which a swirling flow in a left rotation direction (counterclock rotation direction) is viewed in plan view; (a) is a front view, (b) is a plan view, (c) is a bottom view, (d) is a cross-sectional view of the VV line of (c), (e) is an enlarged cross-sectional view of the portion D of (c), and (f) is an enlarged cross-sectional view of the portion E of (d).

Fig. 11 is a plan view showing a suction holding body in which a swirling flow forming body is attached to a base.

Fig. 12 is a sectional view taken along line VI-VI of Fig. 11.

Figure 13 is a partially enlarged cross-sectional view of Fig. 12.

Figure 14 is a right side view of Figure 11.

Fig. 15 is a plan view showing another form of the suction holding body.

Fig. 16 is an explanatory view showing the relationship between the space portion of the joint between the conveyance rails and the object to be conveyed.

2, 3‧‧‧ Non-contact handling track

6‧‧‧ wall

7‧‧‧ drive roller

G‧‧‧Transportation

11‧‧‧ base

10‧‧‧Attraction

12(13)‧‧‧Rotating flow forming body

5‧‧‧ Non-contact suction device

8‧‧‧ pillar

S‧‧‧ space section

1‧‧‧ Non-contact handling device

9‧‧‧ ceiling

4‧‧‧ seams

X‧‧‧Transportation direction

Claims (3)

A non-contact conveying device characterized by: a non-contact conveying rail, and another non-contact conveying rail, and a non-contact suction device; the other non-contact conveying rail is associated with the non-contact conveying rail The non-contact suction device is disposed adjacent to the conveyance direction of the conveyed object, and the space portion interposed between the non-contact conveyance rails is disposed to face the space, and the object to be conveyed is sucked. The non-contact suction device includes a suction holding body composed of a base body that is square in plan view, and a swirling flow forming body that is mounted on the base body, the base body including a cylindrical housing recessed portion, and a belt-shaped cylindrical wall surface portion, an air passage, and an air supply port; the cylindrical housing recess having an opening that is circular in a plan view and has a bottom portion, and a bottom portion, the strip-shaped cylindrical wall surface The cylindrical inner wall surface portion of the cylindrical housing recess is expanded in diameter via the cylindrical inner wall surface portion and the annular shoulder portion, and the air passage is along the longitudinal direction of the base body. Percent, and the bottom portion of the opening portion of the cylindrical portion of the receiving recess, the air supply port is opened in the one end portion of the back surface of the substrate, and the other end is open to the air passage. The non-contact conveying device according to claim 1, wherein the non-contact suction device comprises: a pair of pillars, a ceiling, And a suction holding body; the pair of pillars are opposed to each other across a space portion of the joint of the non-contact conveyance rail, and are erected with respect to a width direction of the non-contact conveyance rail, and the ceiling is spanned The pillars are erected, and the suction holding body is fixedly attached to the lower surface of the ceiling. The non-contact conveying device according to claim 1, wherein the swirling flow forming body includes a cylindrical body, a ring-shaped dam, a plurality of engaging lower portions, a recess, and air. a discharge port having an opening having a substantially circular opening in a plan view and a bottom portion having a bottom surface at the other end, the cylindrical body having a bottom portion The annular crotch portion is an outer peripheral edge of the opening portion of the cylindrical recessed portion of the cylindrical body, and the plurality of engaging lower portions are suspended downward from the outer peripheral surface of the annular crotch portion, and are at the front end The locking projection is formed in a radial direction with respect to the outer peripheral surface, and the concave portion is located in a tangential direction of the inner wall surface of the cylindrical recessed portion of the cylindrical recessed portion, and is interposed therebetween. The center of the cylindrical recess is opposite to the diagonal line, and is recessed from the inner wall surface of the cylinder toward the radially outer side in a triangular shape, and the air ejection port is formed inside the respective recesses. Wall face, And opening to the opposite side in the cylindrical inner wall surface side of the cylindrical recessed portion, the air introduction port is an outer wall surface portion that communicates with the air ejection port and opens into a concave portion that protrudes from the outer peripheral surface of the cylindrical body. In the swirling flow forming body, the outer circumferential surface of the annular flange portion of the cylindrical body is press-fitted into the cylindrical inner wall surface portion of the cylindrical housing recessed portion of the base body, and the engaging lower portion The locking projections are respectively engaged with the annular shoulders of the cylindrical inner wall surface portion of the base body and are attached to the cylindrical housing recesses of the base body.