TWI499834B - Manufacturing method of electro-optic modulator and electro-optic modulator manufactured using the same - Google Patents
Manufacturing method of electro-optic modulator and electro-optic modulator manufactured using the same Download PDFInfo
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- IAXXETNIOYFMLW-COPLHBTASA-N [(1s,3s,4s)-4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl] 2-methylprop-2-enoate Chemical compound C1C[C@]2(C)[C@@H](OC(=O)C(=C)C)C[C@H]1C2(C)C IAXXETNIOYFMLW-COPLHBTASA-N 0.000 description 1
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Description
本發明是有關於一種電光調制器的製造方法及應用此方法製成的電光調制器,且特別是有關於一種利用單層塗佈即可形成保護膜的電光調制器的製造方法及應用此方法製成的電光調制器。The invention relates to a method for manufacturing an electro-optic modulator and an electro-optic modulator produced by the method, and particularly to a method for manufacturing an electro-optic modulator capable of forming a protective film by single-layer coating and applying the method A fabricated electro-optic modulator.
傳統電光調制器包括基板、液晶層及介電保護層,液晶層形成於基板上,而介電保護層額外貼附於液晶層,藉以保護液晶。The conventional electro-optic modulator includes a substrate, a liquid crystal layer and a dielectric protective layer. The liquid crystal layer is formed on the substrate, and the dielectric protective layer is additionally attached to the liquid crystal layer to protect the liquid crystal.
然而,介電保護層導致電光調制器的驅動電壓上升且在檢測電性時,容易磨傷而降低元件壽命。However, the dielectric protective layer causes the driving voltage of the electro-optic modulator to rise and, when detecting electrical properties, is easily scratched to reduce the life of the device.
本發明係有關於一種電光調制器的製造方法及應用此方法製成的電光調制器,可改善電光調制器的驅動電壓過高的問題。The invention relates to a method for manufacturing an electro-optic modulator and an electro-optic modulator produced by the method, which can improve the problem that the driving voltage of the electro-optic modulator is too high.
根據本發明之另一實施例,提出一種電光調制器的製造方法,製造方法包括以下步驟。提供一基板,其中基板包括一透光基板及一導電膜,導電膜形成於透光基板上;形成一液晶聚合層於導電膜上,其中液晶聚合層包括混合之數個液晶分子及數個高分子材料;以及,藉由高分子材料反應性的不同,分離液晶聚合層形成一聚合保護膜及一 液晶層。According to another embodiment of the present invention, a method of fabricating an electro-optic modulator is provided, the method of manufacture comprising the following steps. Providing a substrate, wherein the substrate comprises a transparent substrate and a conductive film, the conductive film is formed on the transparent substrate; forming a liquid crystal polymer layer on the conductive film, wherein the liquid crystal polymer layer comprises a plurality of mixed liquid crystal molecules and several high a molecular material; and, by different reactivity of the polymer material, separating the liquid crystal polymer layer to form a polymeric protective film and a Liquid crystal layer.
根據本發明之一實施例,提出一種電光調制器。電光調制器包括一基板及一液晶聚合層。基板包括一透光基板及一導電膜。導電膜形成於透光基板上。液晶聚合層形成於導電膜上且包括一聚合保護膜及一液晶層。液晶層包含一聚合膜及數個液晶分子,該些液晶分子分散於聚合膜中。其中,液晶層位於導電膜與聚合保護膜之間,且聚合保護膜的厚度小於液晶層的厚度。According to an embodiment of the invention, an electro-optic modulator is proposed. The electro-optic modulator comprises a substrate and a liquid crystal polymer layer. The substrate includes a light transmissive substrate and a conductive film. The conductive film is formed on the light transmissive substrate. The liquid crystal polymer layer is formed on the conductive film and includes a polymeric protective film and a liquid crystal layer. The liquid crystal layer comprises a polymer film and a plurality of liquid crystal molecules dispersed in the polymer film. Wherein, the liquid crystal layer is located between the conductive film and the polymeric protective film, and the thickness of the polymeric protective film is less than the thickness of the liquid crystal layer.
為了對本發明之上述及其他方面有更佳的瞭解,下文特舉實施例,並配合所附圖式,作詳細說明如下:In order to provide a better understanding of the above and other aspects of the present invention, the following detailed description of the embodiments and the accompanying drawings
請參照第1圖,其繪示依照本發明一實施例之電光調制器的剖視圖。電光調制器100包括基板110及液晶聚合層120。Referring to FIG. 1, a cross-sectional view of an electro-optic modulator in accordance with an embodiment of the present invention is shown. The electro-optic modulator 100 includes a substrate 110 and a liquid crystal polymerization layer 120.
基板110包括透光基板111及導電膜112。透光基板111的材料包括玻璃或塑膠。導電膜112形成於透光基板111上。液晶聚合層120形成於導電膜112上且包括聚合保護膜121及液晶層122。The substrate 110 includes a light transmissive substrate 111 and a conductive film 112. The material of the transparent substrate 111 includes glass or plastic. The conductive film 112 is formed on the light-transmitting substrate 111. The liquid crystal polymer layer 120 is formed on the conductive film 112 and includes a polymeric protective film 121 and a liquid crystal layer 122.
聚合保護膜121例如是胺酯丙烯酸酯(Urethaneacrylates)、甲基丙烯酸環型酯單体(如Isobornylmethacrylate,IBOMA)、聚酯丙烯酸酯(Polyesteracrylates)或環氧丙烯酸酯(Epoxy Acrylate,Aldrich)等。聚合保護膜121係由適合的光趨官能基1212在光起始劑121’(第2B圖)的作用下,藉由光的控制聚 合而成。聚合後之聚合保護膜121具有硬質耐刮特性,可保護液晶層122。The polymeric protective film 121 is, for example, an urethane acrylates, a methacrylic cyclic ester monomer (such as Isobornylmethacrylate, IBOMA), a polyester acrylate (Polyester acrylates), or an epoxy acrylate (Epoxy Acrylate, Aldrich). The polymeric protective film 121 is controlled by a light-acting functional group 1212 under the action of a photoinitiator 121' (Fig. 2B) by light control. Made up. The polymerized protective film 121 after polymerization has a hard scratch resistance and can protect the liquid crystal layer 122.
光趨官能基1212、光起始劑121’及液晶分子1222於照光前混合於同一層120’中,然於藉由光的控制照光後形成聚合保護膜121及液晶層122,其中聚合保護膜121與液晶層122之間具有一明顯界面。此外,聚合保護膜121的厚度T11小於液晶層122的厚度T12,一例中,厚度T11及T12關係滿足下式(1)。The photoactive functional group 1212, the photoinitiator 121' and the liquid crystal molecules 1222 are mixed in the same layer 120' before illumination, and then the photoprotective film 121 and the liquid crystal layer 122 are formed by photo-control, wherein the protective film is formed. There is a distinct interface between the 121 and the liquid crystal layer 122. Further, the thickness T11 of the polymeric protective film 121 is smaller than the thickness T12 of the liquid crystal layer 122. In an example, the relationship between the thicknesses T11 and T12 satisfies the following formula (1).
由於聚合保護膜121的厚度T11相對較薄,使採用電光調制器100對待測面板進行測試時所需的驅動電壓V較小,因此可避免待測面板受到大電壓的破壞。Since the thickness T11 of the polymeric protective film 121 is relatively thin, the driving voltage V required for testing the panel to be tested by the electro-optic modulator 100 is small, so that the panel to be tested is prevented from being damaged by a large voltage.
液晶層122位於導電膜112與聚合保護膜121之間,且包含聚合膜1221及數個液晶分子1222,此些液晶分子1222分散於聚合膜1221中。The liquid crystal layer 122 is disposed between the conductive film 112 and the polymeric protective film 121 and includes a polymer film 1221 and a plurality of liquid crystal molecules 1222 dispersed in the polymer film 1221.
請參照第2A至2G圖,其繪示依照本發明一實施例之電光調制器的製造過程圖。Please refer to FIGS. 2A to 2G for illustrating a manufacturing process diagram of an electro-optic modulator according to an embodiment of the present invention.
如第2A圖所示,提供基板110,其中基板110包括透光基板111及導電膜112。本例中,導電膜112預形成於透光基板111上,且為一全覆蓋導電膜,也就是說,導電膜112沒有圖案化;然另一例中,導電膜112亦可為圖案化導電膜。As shown in FIG. 2A, a substrate 110 is provided, wherein the substrate 110 includes a light-transmitting substrate 111 and a conductive film 112. In this example, the conductive film 112 is pre-formed on the transparent substrate 111 and is a full-covering conductive film, that is, the conductive film 112 is not patterned; in another example, the conductive film 112 may also be a patterned conductive film. .
如第2B圖所示,可採用例如是單層塗佈方法,形成 液晶聚合層120’於導電膜112上,其中液晶聚合層120’係均相混合物流體,其包括混合之數個液晶分子1222、數個光趨官能基1212及數個光起始劑121’,其中,此些光趨官能基1212的比例約介於30%與70%之間,而液晶分子1222的比例約介於70%與30%之間。當此些光趨官能基1212的比例愈高,則電光調制器100所需驅動電壓V(第3圖)愈高(驅動電壓愈高,待測面板愈容易受到電壓破壞),但對比度卻較佳;當此些光趨官能基1212佔液晶聚合層120’的比例愈低,則電光調制器100所需驅動電壓V愈低,不過對比度卻愈差。當使用PDLC(Polymer dispersed liquid crystal)型材料,其可獲得佳的對比度及小的驅動電壓V。一例中,光趨官能基1212與液晶分子1222的比例約1:1,然本發明實施例不限於使用PDLC,亦可使用PNLC或PSLC,其光趨官能基1212及液晶分子的比例不同於PDLC。As shown in FIG. 2B, for example, a single layer coating method can be used to form The liquid crystal polymer layer 120' is on the conductive film 112, wherein the liquid crystal polymer layer 120' is a homogeneous mixture fluid, which comprises a plurality of mixed liquid crystal molecules 1222, a plurality of photo-functional groups 1212, and a plurality of photoinitiators 121'. Wherein, the ratio of the photo-functional groups 1212 is between about 30% and 70%, and the ratio of the liquid crystal molecules 1222 is between about 70% and 30%. When the proportion of such photo-functional groups 1212 is higher, the higher the driving voltage V (Fig. 3) required for the electro-optic modulator 100 (the higher the driving voltage, the more susceptible the panel to be tested is to voltage damage), but the contrast ratio is higher. Preferably, the lower the ratio of the photo-functional groups 1212 to the liquid crystal polymer layer 120', the lower the driving voltage V required for the electro-optic modulator 100, but the worse the contrast. When a PDLC (Polymer Dispersed Liquid Crystal) type material is used, it can obtain good contrast and a small driving voltage V. In one example, the ratio of the photo-functional group 1212 to the liquid crystal molecule 1222 is about 1:1. However, the embodiment of the present invention is not limited to the use of PDLC, and PNLC or PSLC may also be used, and the ratio of the photo-functional group 1212 and the liquid crystal molecule is different from that of the PDLC. .
光趨官能基1212可以是單體、預聚物或高分子聚合物。一例中,光趨官能基1212係壓克力基。光趨官能基1212包括單鍵官能基、雙鍵官能基與其它多鍵官能基中至少一者的混合,其中雙鍵官能基例如是三丙二醇二丙烯酸酯(TPGDA)、1,6己二醇二丙烯酸酯(HDDA)、二乙二醇二丙烯酸酯(DEGDA)、新戊二醇二丙烯酸酯(NPGDA)或其它合適材料,而多鍵官能基例如是三羟甲基丙烷三丙烯酸酯(TMPTA)、三丙烯酸異戊四醇酯(PETA)或其它合適材料。光趨官能基1212的鍵數愈多時,則所形成之聚合結構的聚合速度愈高,且聚合後之聚合結構的硬度愈高。The photo-functional group 1212 can be a monomer, a prepolymer or a high molecular polymer. In one example, the photo-functional group 1212 is an acrylic group. The photo-functional group 1212 comprises a single bond functional group, a mixture of a double bond functional group and at least one of the other multi-bond functional groups, wherein the double bond functional group is, for example, tripropylene glycol diacrylate (TPGDA), 1,6 hexanediol. Diacrylate (HDDA), diethylene glycol diacrylate (DEGDA), neopentyl glycol diacrylate (NPGDA) or other suitable materials, and the multi-bond functional group is, for example, trimethylolpropane triacrylate (TMPTA) ), pentaerythritol triacrylate (PETA) or other suitable material. The more the number of bonds of the photo-functional group 1212, the higher the polymerization rate of the formed polymer structure, and the higher the hardness of the polymerized structure after polymerization.
如第2C圖所示,使用滾壓機構140,透過離型層130加壓液晶聚合層120’。離型層130例如是透光離形層。滾壓機構140例如是滾輪組,其包括第一滾輪141及第二滾輪142,其中第一滾輪141與第二滾輪142相隔一距離H。離型層130、液晶聚合層120’及基板110位於第一滾輪141與第二滾輪142之間。當滾壓機構140運轉時,滾壓機構140壓合離型層130、液晶聚合層120’及基板110,使壓合後之離型層130、液晶聚合層120’與基板110的總厚度實值上等於距離H的值。也就是說,透過調整距離H,可控制液晶聚合層120’被壓合後的厚度。一例中,壓合前,基板110的厚度T2約188微米,而離型層130的厚度T3約50微米;壓合後,液晶聚合層120’的厚度T1’被壓縮成厚度T1,其中厚度T1大約是第1圖之厚度T11與T12的合,其值例如是20微米、其它更小或更大的數值,然此厚度T1之值可視實際設計而定,本發明實施例不加以限定。As shown in Fig. 2C, the liquid crystal polymerization layer 120' is pressurized through the release layer 130 by using the rolling mechanism 140. The release layer 130 is, for example, a light transmissive release layer. The rolling mechanism 140 is, for example, a roller set including a first roller 141 and a second roller 142, wherein the first roller 141 is spaced apart from the second roller 142 by a distance H. The release layer 130, the liquid crystal polymerization layer 120', and the substrate 110 are located between the first roller 141 and the second roller 142. When the rolling mechanism 140 is in operation, the rolling mechanism 140 presses the release layer 130, the liquid crystal polymerization layer 120' and the substrate 110 to make the total thickness of the pressed release layer 130, the liquid crystal polymerization layer 120' and the substrate 110 The value is equal to the value of the distance H. That is, by adjusting the distance H, the thickness of the liquid crystal polymer layer 120' after being pressed can be controlled. In one example, before pressing, the thickness T2 of the substrate 110 is about 188 microns, and the thickness T3 of the release layer 130 is about 50 microns; after pressing, the thickness T1' of the liquid crystal polymer layer 120' is compressed to a thickness T1, wherein the thickness T1 The value of the thickness T11 and T12 of the first figure is about 20 micrometers, and the value of the other is smaller or larger. However, the value of the thickness T1 may be determined according to the actual design, and is not limited in the embodiment of the present invention.
另一例中,離型層130可採用旋塗或平移塗佈法(die coating)形成。In another example, the release layer 130 can be formed by spin coating or die coating.
如第2D圖所示,以第一光線L1透過離型層130照射液晶聚合層120’(第2C圖),使此些光趨官能基1212之第一部分及光起始劑121’之第一部分往第一光線L1的方向聚集,而聚合成聚合保護膜121。第一光線L1例如是紫外光。第一光線L1的波長選用可視光趨官能基1212的種類及/或光起始劑121’的種類而定。一例中,第一光線L1的波長可介於340至365奈米(nm)之間或其它合適波長。As shown in FIG. 2D, the first light ray L1 is irradiated through the release layer 130 to illuminate the liquid crystal polymer layer 120' (FIG. 2C), so that the first portion of the light-responsive functional group 1212 and the first portion of the photoinitiator 121' It is concentrated in the direction of the first light ray L1 to be polymerized into the polymeric protective film 121. The first light L1 is, for example, ultraviolet light. The wavelength of the first light ray L1 is determined by the type of visible light responsive functional group 1212 and/or the type of photoinitiator 121'. In one example, the first light L1 may have a wavelength between 340 and 365 nanometers (nm) or other suitable wavelength.
一例中,第一光線L1的光強度介於7至10(mW/cm2 ) 之間或其它合適強度值。第一光線L1的光強度控制在一小強度範圍內,故不致使全部的光趨官能基1212都聚合成聚合保護膜121,如此便可保留一些光起始劑121’及一些光趨官能基1212供後續照光製程中形成液晶層122(第2E圖)。In one example, the light intensity of the first light L1 is between 7 and 10 (mW/cm 2 ) or other suitable intensity value. The light intensity of the first light ray L1 is controlled within a small intensity range, so that all of the photo luminescent functional groups 1212 are not polymerized into the polymeric protective film 121, so that some of the photoinitiator 121' and some photo-functional groups can be retained. The 1212 is used to form the liquid crystal layer 122 in the subsequent illumination process (Fig. 2E).
當第一光線L1之光強度愈強,光趨官能基1212的反應性愈強,愈多比例的光起始劑121’及光趨官能基1212會往第一光線L1的方向移動,如此導致聚合保護膜121的聚合速度愈快、聚合後之聚合保護膜121厚度愈厚且硬度愈硬。本例中,第一光線L1的光強度控制在小於第二光線L2的光強度,雖然第一光線L1的光強度較小,藉由控制此些光起始劑121’及光趨官能基1212 中含單鍵、雙鍵或多鍵的官能基的比例,使反應性較強的雙鍵官能基及多鍵官能基比單鍵官能基快速地往第一光線L1的方向聚集而形成聚合保護膜121,餘留下來未聚合的大多是單鍵官能基。When the light intensity of the first light L1 is stronger, the reactivity of the photo-functional group 1212 is stronger, and the more proportions of the photoinitiator 121' and the photo-functional group 1212 move toward the first light L1, thus causing The faster the polymerization rate of the polymeric protective film 121, the thicker the thickness of the polymeric protective film 121 after polymerization and the harder the hardness. In this example, the light intensity of the first light L1 is controlled to be smaller than the light intensity of the second light L2, and although the light intensity of the first light L1 is small, by controlling the light initiator 121' and the photo-functional group 1212 The ratio of the functional group containing a single bond, a double bond or a multiple bond makes the highly reactive double bond functional group and the multi-bond functional group rapidly aggregate toward the first light L1 to form a polymerization protection. The film 121, which remains unpolymerized, is mostly a single bond functional group.
如第2E圖所示,以第二光線L2照射光起始劑121’(第2B圖)之第二部分(餘留部分)及光趨官能基1212(第2B圖)之第二部分(餘留部分),使光趨官能基1212之第二部分聚合成聚合膜1221,其中聚合膜1221與液晶分子1222形成液晶層122。第二光線L2例如是紫外光。第二光線L2的光強度大於第一光線L1的光強度,使光趨官能基1212之餘留部分幾乎或全部聚合成聚合膜1221。As shown in Fig. 2E, the second portion (remaining portion) of the photoinitiator 121' (Fig. 2B) and the second portion of the photofunctional group 1212 (Fig. 2B) are irradiated with the second light L2 (the remaining portion) The remaining portion) polymerizes the second portion of the photo-functional group 1212 into a polymeric film 1221, wherein the polymeric film 1221 and the liquid crystal molecules 1222 form a liquid crystal layer 122. The second light ray L2 is, for example, ultraviolet light. The light intensity of the second light ray L2 is greater than the light intensity of the first light ray L1, and the remaining portion of the light responsive functional group 1212 is polymerized into the polymer film 1221 almost or completely.
如第2F圖所示,可採用例如是剝除方式,移除離型層130,以露出液晶聚合層120。As shown in FIG. 2F, the release layer 130 may be removed by, for example, stripping to expose the liquid crystal polymer layer 120.
如第2G圖所示,可採用例如是溶劑,移除液晶聚合層120之一部分,以透出導電膜112,至此形成第1圖之電光調制器100。As shown in Fig. 2G, a portion of the liquid crystal polymer layer 120 may be removed by, for example, a solvent to permeate the conductive film 112, thereby forming the electro-optic modulator 100 of Fig. 1.
另一例中,可調配光起始劑121’的種類去形成聚合保護膜121,在此設計下,第一光線L1及第二光線L2的光強度不限於相異,亦可實質上相同。舉例來說,第2B圖中,光起始劑121’包括第一光波段起始劑及第二光波段起始劑。第2D圖中,以第一光線L1透過離型層130照射液晶聚合層120’,光趨官能基1212及光起始劑121’之第一光波段起始劑(第一部分)往第一光線L1方向聚集,而使光趨官能基1212聚合成聚合保護膜121。第2E圖中,以第二光線L2照射光起始劑121’之第二光波段起始劑(第二部分)及光趨官能基1212,使光趨官能基1212和液晶分子1222形成液晶層122。In another example, the type of the photoinitiator 121' can be adjusted to form the polymeric protective film 121. In this design, the light intensities of the first light L1 and the second light L2 are not limited to being different, and may be substantially the same. For example, in Figure 2B, photoinitiator 121' includes a first optical band initiator and a second optical band initiator. In the second light diagram, the first light ray L1 is transmitted through the release layer 130 to illuminate the liquid crystal polymer layer 120', and the photo-optic functional group 1212 and the first optical band initiator (first part) of the photoinitiator 121' are directed to the first light. The L1 direction is aggregated, and the photo-functional group 1212 is polymerized into the polymeric protective film 121. In Fig. 2E, the second optical band initiator (second portion) and the photo-functional group 1212 of the photoinitiator 121' are irradiated with the second light L2, so that the photo-functional group 1212 and the liquid crystal molecules 1222 form a liquid crystal layer. 122.
另一例之電光調制器的製造方法中,可以第一熱源(未繪示)取代第一光線L1而形成聚合保護膜121,且以第二熱源(未繪示)取代第二光線L2而形成液晶層122。在此設計下,光起始劑121’需改以熱起始劑取代,而光趨官能基1212需改以熱趨官能基取代。其餘製程步驟可相似第2A至2G圖中的對應步驟。In another method of fabricating an electro-optic modulator, a first heat source (not shown) may be substituted for the first light L1 to form a polymeric protective film 121, and a second heat source (not shown) may be substituted for the second light L2 to form a liquid crystal. Layer 122. Under this design, the photoinitiator 121' needs to be replaced with a hot initiator, and the photo-functional group 1212 needs to be replaced with a thermal-functional group. The remaining process steps can be similar to the corresponding steps in Figures 2A through 2G.
另一例之電光調制器的製造方法中,液晶聚合層120’係均相混合物流體,其包括混合之數個高分子材料、數個液晶分子1222及數個溶劑。在此設計下,光照步驟(第2D及2E圖)改以”揮發溶劑”製程取代。可採用例如是加熱或其它合適方式,控制其溶劑揮發速度後,使液晶聚合 層形成聚合保護膜及液晶層。In another method of fabricating an electro-optic modulator, the liquid crystal polymer layer 120' is a homogeneous mixture fluid comprising a plurality of mixed polymer materials, a plurality of liquid crystal molecules 1222, and a plurality of solvents. Under this design, the illumination step (Fig. 2D and 2E) was replaced by a "volatile solvent" process. The liquid crystal can be polymerized by, for example, heating or other suitable means to control the solvent volatilization rate. The layer forms a polymeric protective film and a liquid crystal layer.
由上可知,形成本發明實施例之保護膜的方法至少有熱引發相分離、溶劑引發相分離及光聚合引發相分離等方法,然只要是單層塗佈可分離液晶聚合層120’為聚合保護膜121及液晶層122的方法,都是本發明實施例可採用的範圍,並且其所使用的液晶聚合層120’的組成可對應調整,並不受上述實施例所限制。It can be seen from the above that the method for forming the protective film of the embodiment of the present invention has at least a method of thermally inducing phase separation, solvent-induced phase separation, and photopolymerization-induced phase separation, and the like, as long as it is a single layer coating, the separable liquid crystal polymer layer 120' is polymerized. The methods of the protective film 121 and the liquid crystal layer 122 are all applicable to the embodiments of the present invention, and the composition of the liquid crystal polymer layer 120' used therein can be adjusted correspondingly, and is not limited by the above embodiments.
請參照第3圖,其繪示第1圖之光調製器之測試示意圖。驅動電壓V耦接光調製器100與待測面板200,其中待測面板200例如是顯示面板、觸控面板或其它種類面板,其具有一待測全面導電或圖案化導電層210。透過驅動電壓V驅動光調製器100與待測面板200,使待測導電層210的圖案反應在光調製器100之導電膜112上,然後再透過影像擷取模組(未繪示)擷取光調製器100之導電膜112上的影像,之後透過所擷取的影像可觀察待測面板之待測導電層210的品質。Please refer to FIG. 3, which is a schematic diagram of the test of the optical modulator of FIG. 1. The driving voltage V is coupled to the light modulator 100 and the panel to be tested 200, wherein the panel to be tested 200 is, for example, a display panel, a touch panel or other type of panel having a fully conductive or patterned conductive layer 210 to be tested. The pattern of the conductive layer 210 to be tested is reflected on the conductive film 112 of the light modulator 100 by the driving voltage V, and then the image capturing module (not shown) is captured. The image on the conductive film 112 of the light modulator 100 can then observe the quality of the conductive layer 210 to be tested of the panel to be tested through the captured image.
綜上所述,雖然本發明已以實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。In conclusion, the present invention has been disclosed in the above embodiments, but it is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.
100‧‧‧電光調制器100‧‧‧Electro-optic modulator
110‧‧‧基板110‧‧‧Substrate
111‧‧‧透光基板111‧‧‧Transparent substrate
112‧‧‧導電膜112‧‧‧Electrical film
120、120’‧‧‧液晶聚合層120, 120'‧‧‧ liquid crystal polymer layer
121‧‧‧聚合保護膜121‧‧‧Polymeric protective film
121'‧‧‧光起始劑121'‧‧‧Photoinitiator
1212‧‧‧光趨官能基1212‧‧‧Photochromic functional groups
122‧‧‧液晶層122‧‧‧Liquid layer
1221‧‧‧聚合膜1221‧‧‧Polymer film
1222‧‧‧液晶分子1222‧‧‧ liquid crystal molecules
130‧‧‧離型層130‧‧‧ release layer
140‧‧‧滾壓機構140‧‧‧Rolling mechanism
200‧‧‧待測基板200‧‧‧Substrate to be tested
210‧‧‧待測導電層210‧‧‧ Conductive layer to be tested
V‧‧‧驅動電壓V‧‧‧ drive voltage
T1、T11、T12、T1’、T2、T3‧‧‧厚度T1, T11, T12, T1', T2, T3‧‧‧ thickness
第1圖繪示依照本發明一實施例之電光調制器的剖視圖。1 is a cross-sectional view of an electro-optic modulator in accordance with an embodiment of the present invention.
第2A至2G圖繪示依照本發明一實施例之電光調制器的製造過程圖。2A to 2G are views showing a manufacturing process of an electro-optic modulator according to an embodiment of the present invention.
第3圖繪示第1圖之光調製器之測試示意圖。Figure 3 is a schematic view showing the test of the light modulator of Figure 1.
100‧‧‧電光調制器100‧‧‧Electro-optic modulator
110‧‧‧基板110‧‧‧Substrate
111‧‧‧透光基板111‧‧‧Transparent substrate
112‧‧‧導電膜112‧‧‧Electrical film
120‧‧‧液晶聚合層120‧‧‧Liquid polymer layer
121‧‧‧聚合保護膜121‧‧‧Polymeric protective film
122‧‧‧液晶層122‧‧‧Liquid layer
1221‧‧‧聚合膜1221‧‧‧Polymer film
1222‧‧‧液晶分子1222‧‧‧ liquid crystal molecules
T11、T12‧‧‧厚度T11, T12‧‧ thickness
Claims (14)
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TW323296B (en) * | 1996-02-12 | 1997-12-21 | Wei-Gwo Jin | Epoxy/acrylate polymer dispersed liquid crystal film |
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US20050077005A1 (en) * | 2003-10-14 | 2005-04-14 | Photon Dynamics, Inc. | Method for fabricating electro-optic light modulator |
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