TWI431656B - Electromagnetic wave vacuum window - Google Patents
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- TWI431656B TWI431656B TW100144251A TW100144251A TWI431656B TW I431656 B TWI431656 B TW I431656B TW 100144251 A TW100144251 A TW 100144251A TW 100144251 A TW100144251 A TW 100144251A TW I431656 B TWI431656 B TW I431656B
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本發明是有關於一種電磁波真空窗，尤指一種可作為電子迴旋共振電漿機台與微波電漿設備之使用，而達到具有良好之頻寬、可調整石英玻璃之尺寸與厚度、避免元件過熱，以及降低成本之功效者。The invention relates to an electromagnetic wave vacuum window, in particular to a use as an electron cyclotron resonance plasma machine and a microwave plasma device, and achieves a good bandwidth, adjustable quartz glass size and thickness, and avoids overheating of components. And the ability to reduce costs.
按，傳統技術對於要同時達到電磁波穿透與擋真空，主要是利用石英玻璃與O型環介面，但是如果O型環介面沒有適當設計，電磁波穿透時會有部份能量消耗於O型環介面，會產生熱能甚至電弧，可能會破壞石英玻璃，導致真空度受到影響，也造成電磁波的能量損耗。According to the traditional technology, it is necessary to simultaneously achieve electromagnetic wave penetration and vacuum blocking, mainly using quartz glass and O-ring interface, but if the O-ring interface is not properly designed, some energy is consumed in the O-ring when electromagnetic waves penetrate. The interface generates heat or even an electric arc, which may damage the quartz glass, causing the vacuum to be affected and the energy loss of the electromagnetic wave.
一般電磁波窗口的設計大多利用介電物質和空氣接面所產生的反射波在半波長厚度的介電物質中達成軸向共振穿透。介電材料尺寸受限於操作頻率與截止頻率，無法隨意的變動。其頻寬以及穿透效率和介質的介電常數有很大關係。以陶瓷材料氧化鋁(95%,Al2 O3 )為例，其介電常數約為9，在空氣接面的反射率大，雖然最高穿透效率可達99%以上，但可用頻寬卻很窄。Generally, the design of the electromagnetic wave window mostly utilizes the reflected wave generated by the dielectric substance and the air junction to achieve axial resonance penetration in a dielectric material having a half-wavelength thickness. Dielectric material size is limited by the operating frequency and cutoff frequency, and cannot be arbitrarily changed. Its bandwidth and penetration efficiency are strongly related to the dielectric constant of the medium. Taking ceramic material alumina (95%, Al 2 O 3 ) as an example, its dielectric constant is about 9, and the reflectivity at the air junction is large. Although the highest penetration efficiency is over 99%, the available bandwidth is Very narrow.
且由於習用之電磁波真空窗係利用波導管的軸向共振結構，輔以中央的介電物質來達到寬頻穿透。透過改變軸向共振腔體形狀以及腔體間距的方式，決定頻寬和中心工作頻率的位置，由於工作參數不單只是依賴材料的介電係數和它的厚度，故可選用各式材料，厚度也不受半波長限制，對設計元件方面 有更大的彈性。在滿足結構強度的條件下，可選用較薄的結構(直徑厚度比0.05)，一方面降低成本，二方面又可減低電磁波經過介質所產生的熱損耗。And because the conventional electromagnetic wave vacuum window system utilizes the axial resonance structure of the waveguide, the central dielectric material is used to achieve broadband penetration. By changing the shape of the axial cavity and the spacing of the cavity, the position of the bandwidth and the center operating frequency are determined. Since the operating parameters are not only dependent on the dielectric constant of the material and its thickness, various materials and thicknesses can be selected. Not limited by half wavelength, in terms of design components Have more flexibility. Under the condition of satisfying the structural strength, a thinner structure (diameter-to-thickness ratio of 0.05) can be selected, which can reduce the cost on the one hand and reduce the heat loss generated by the electromagnetic wave passing through the medium on the other hand.
有鑑於此，本案之發明人特針對前述習用發明問題深入探討，並藉由多年從事相關產業之研發與製造經驗，積極尋求解決之道，經過長期努力之研究與發展，終於成功的開發出本發明「電磁波真空窗」，藉以改善習用之種種問題。In view of this, the inventors of this case have intensively discussed the above-mentioned problems of conventional inventions, and actively pursued solutions through years of experience in R&D and manufacturing of related industries. After long-term efforts in research and development, they finally succeeded in developing this book. Invented the "electromagnetic wave vacuum window" to improve the problems of the conventional use.
本發明之主要目的係在於，可作為電子迴旋共振電漿機台之使用，而達到具有良好之頻寬、可調整石英玻璃之尺寸與厚度、避免元件過熱，以及降低成本之功效。The main object of the present invention is to use as an electron cyclotron resonance plasma machine to achieve the advantages of good bandwidth, adjustable quartz glass size and thickness, avoiding overheating of components, and cost reduction.
為達上述之目的，本發明係一種電磁波真空窗其包含有：一具有第一、第二、第三及第四反射邊界之電磁波真空窗；以及一填充於第二與第三反射邊界間之石英玻璃，使該電磁波真空窗之第一~第四反射邊界內存在至少兩個共振頻率，且共振頻率之頻寬交疊程度係隨著石英玻璃厚度增加而變高。For the above purposes, the present invention is an electromagnetic wave vacuum window comprising: an electromagnetic wave vacuum window having first, second, third and fourth reflection boundaries; and a filling between the second and third reflection boundaries The quartz glass has at least two resonance frequencies in the first to fourth reflection boundaries of the electromagnetic wave vacuum window, and the overlapping degree of the resonance frequency becomes higher as the thickness of the quartz glass increases.
於本發明之一實施例中，該電磁波真空窗內係包含有第一、第二及第三內徑。In an embodiment of the invention, the electromagnetic wave vacuum window includes first, second and third inner diameters.
於本發明之一實施例中，該第一及第二內徑係為相同之寬度。In an embodiment of the invention, the first and second inner diameters are the same width.
於本發明之一實施例中，該第二及第三內徑係為相同之厚度。In an embodiment of the invention, the second and third inner diameters are the same thickness.
於本發明之一實施例中，該石英玻璃之介電係數係為3.78。In an embodiment of the invention, the quartz glass has a dielectric constant of 3.78.
請參閱『第1及第2圖』所示，係分別為本發明之架構示意圖及本發明之反射狀態示意圖。如圖所示：本發明係一種電磁波真空窗，其至少包含有一電磁波真空窗1以及一石英玻璃2所構成。Please refer to the "1st and 2nd drawings" for a schematic diagram of the structure of the present invention and a schematic diagram of the reflective state of the present invention. As shown in the figure, the present invention is an electromagnetic wave vacuum window comprising at least one electromagnetic wave vacuum window 1 and a quartz glass 2.
上述所提電磁波真空窗1之內部係包含有第一、第二、第三及第四反射邊界11、12、13、14，且該電磁波真空窗1內係包含有第一、第二及第三內徑15、16、17，而該第一及第二內徑15、16係為相同之寬度，該第二及第三內徑16、17係為相同之厚度。The interior of the electromagnetic wave vacuum window 1 includes first, second, third, and fourth reflective boundaries 11, 12, 13, and 14, and the electromagnetic wave vacuum window 1 includes first, second, and The three inner diameters 15, 16, and 17, and the first and second inner diameters 15, 16 are the same width, and the second and third inner diameters 16, 17 are the same thickness.
該石英玻璃2係填充於第二與第三反射邊界12、13之間，而該石英玻璃2之介電係數係為3.78，使該電磁波真空窗1之第一~第四反射邊界11、12、13、14內存在至少兩個共振頻率，且共振頻率之頻寬交疊程度係隨著石英玻璃2厚度增加而變高。如是，藉由上述之設計構成一全新之電磁波真空窗。The quartz glass 2 is filled between the second and third reflective boundaries 12, 13, and the quartz glass 2 has a dielectric constant of 3.78, so that the first to fourth reflective boundaries 11 and 12 of the electromagnetic wave vacuum window 1 At least two resonance frequencies exist in 13, 13 and the frequency overlap of the resonance frequency becomes higher as the thickness of the quartz glass 2 increases. If so, a new electromagnetic wave vacuum window is constructed by the above design.
當本發明於運用時，係可運用於電漿產生設備，特別是指用以提供電子迴旋共振電漿設備與微波電漿設備上，而當電磁波經過電磁波真空窗1時，會引起逕向方向及軸向方向之共振效應，因此，整體結構可視為兩個共振腔之耦合，故，共振穿透窗口會分離成兩個，利用此原理可以在工作頻率附近得到良好之頻寬；若將本發明之技術加以延伸，亦可利用第一、第二、第三及第四反射邊界11、12、13、14，達到二重甚至三重共振之效果，藉以加強電磁波之穿透效果。When the invention is used, it can be applied to a plasma generating device, in particular to provide an electron cyclotron resonance plasma device and a microwave plasma device, and when the electromagnetic wave passes through the electromagnetic wave vacuum window 1, it will cause a radial direction. And the resonance effect of the axial direction, therefore, the overall structure can be regarded as the coupling of the two resonant cavities, so the resonance penetration window will be separated into two, and the principle can obtain a good bandwidth near the working frequency; The technique of the invention is extended, and the first, second, third and fourth reflective boundaries 11, 12, 13, 14 can also be utilized to achieve the effect of double or even triple resonance, thereby enhancing the penetration effect of electromagnetic waves.
今本發明以上述之設計運用於圓形導波管之電磁波真空 窗1，並利用HFSS電磁波模擬分析軟體模擬分析；本發明是利用最低次軸向模達到共振穿透，然而二次軸向共振頻率離操作頻已遠與最低次軸向模的交疊程度低，故操作頻寬窄；以電磁波中常用之微波為例，當該圖線條為微波通過電磁波真空窗1時，在不同微波頻率下之反射，A、B代表反射最少的部份，由於商用微波頻率為2.45GHz，故靠近2.45GHz能達到反射低者為佳，即微波通過電磁波真空窗1時，可讓大多數的微波功率通過，損耗極小(如第2圖所示)；因此，在此多重反射邊界結構裡存在兩個共振頻率，其共振頻寬的交疊程度隨著石英玻璃2厚度增加而變高，而可阻隔真空，並使高功率電磁波能順利穿透，讓高功率電磁波進入共振艙，並且電磁波真空窗1能阻絕真空，使電漿區維持在真空環境，以產生電漿；藉以使本發明可至少達到下列之優點：The present invention is applied to the electromagnetic wave vacuum of a circular waveguide in the above design. Window 1, and using HFSS electromagnetic wave simulation analysis software simulation analysis; the present invention uses the lowest secondary axial mode to achieve resonance penetration, but the secondary axial resonance frequency is far from the operating frequency and the lowest sub-axial mode overlap Therefore, the operation bandwidth is narrow; taking the microwave commonly used in electromagnetic waves as an example, when the line is the microwave passing through the electromagnetic wave vacuum window 1, the reflection at different microwave frequencies, A and B represent the least reflected part, due to the commercial microwave frequency. It is 2.45 GHz, so it is better to achieve low reflection near 2.45 GHz, that is, when the microwave passes through the electromagnetic wave vacuum window 1, most of the microwave power can pass, and the loss is extremely small (as shown in Fig. 2); therefore, multiple There are two resonance frequencies in the reflection boundary structure, and the overlapping degree of the resonance bandwidth becomes higher as the thickness of the quartz glass 2 increases, and the vacuum can be blocked, and the high-power electromagnetic wave can be smoothly penetrated, so that the high-power electromagnetic wave enters the resonance. The cabin, and the electromagnetic wave vacuum window 1 can block the vacuum and maintain the plasma zone in a vacuum environment to generate plasma; thereby enabling the present invention to at least achieve the following advantages:
藉著調整第一、第二及第三內徑15、16、17之徑向共振腔大小和間距，分離共振頻率，使雙共振穿透窗口在指定的工作頻率附近涵蓋一個很寬的-20dB反射損耗頻寬。By adjusting the size and spacing of the radial cavity of the first, second and third inner diameters 15, 16, 17 to separate the resonant frequency, the double resonance penetration window covers a very wide -20 dB around the specified operating frequency. Reflectance loss bandwidth.
高功率雙共振電磁波窗口的頻寬特性並非只依賴中央處之石英玻璃2(介電物質)，所以它可以調整使用石英玻璃2之尺寸和厚度，可選用適合之厚度以符合實驗的強度。(例：在電磁波真空窗1抽真空的狀態下，選用的材料要能承受產生的壓力。)The bandwidth characteristics of the high-power double-resonance electromagnetic wave window do not depend solely on the quartz glass 2 (dielectric substance) at the center, so it can be adjusted to the size and thickness of the quartz glass 2, and a suitable thickness can be selected to meet the experimental strength. (Example: In the state where the electromagnetic wave vacuum window 1 is evacuated, the material selected should be able to withstand the generated pressure.)
以往電磁波真空窗1受制於材料之特性，而只有少數幾種 材料可選擇，在輸入功率很高的情況下，產生的高熱將會損毀元件，固需要考慮散熱結構。而本發明高功率雙共振之電磁波真空窗1可選用的材料範圍大很多，透過選用有低損耗、良導熱率的特性的材質，可以避免元件過熱的問題。In the past, the electromagnetic wave vacuum window 1 was subject to the characteristics of the material, but only a few The material can be selected. In the case of high input power, the high heat generated will damage the components, and the heat dissipation structure needs to be considered. The high-power double-resonance electromagnetic wave vacuum window 1 of the present invention can be used in a wide range of materials. By selecting a material having low loss and good thermal conductivity, the problem of overheating of the components can be avoided.
由於高功率雙共振之電磁波真空窗1之結構在加工上比較困難，結構的散熱也稍差一些，但是這些可藉由選用特定材料來解決，以使本發明高功率雙共振電磁波真空窗1可大幅縮減介電物質的使用量，有效壓低整體元件的製作成本。Since the structure of the high-power double-resonance electromagnetic wave vacuum window 1 is difficult to process, the heat dissipation of the structure is also slightly worse, but these can be solved by selecting a specific material, so that the high-power double-resonance electromagnetic wave vacuum window 1 of the present invention can be The amount of dielectric material used is greatly reduced, effectively reducing the manufacturing cost of the overall component.
綜上所述，本發明電磁波真空窗可有效改善習用之種種缺點，可作為電子迴旋共振電漿機台之使用，而達到具有良好之頻寬、可調整石英玻璃之尺寸與厚度、避免元件過熱，以及降低成本之功效；進而使本發明之產生能更進步、更實用、更符合消費者使用之所須，確已符合發明專利申請之要件，爰依法提出專利申請。In summary, the electromagnetic wave vacuum window of the present invention can effectively improve various disadvantages of the conventional use, and can be used as an electron cyclotron resonance plasma machine to achieve a good bandwidth, adjustable quartz glass size and thickness, and avoid overheating of components. And the effect of reducing the cost; and thus making the invention more progressive, more practical, and more in line with the needs of the consumer, has indeed met the requirements of the invention patent application, and filed a patent application according to law.
惟以上所述者，僅為本發明之較佳實施例而已，當不能以此限定本發明實施之範圍；故，凡依本發明申請專利範圍及發明說明書內容所作之簡單的等效變化與修飾，皆應仍屬本發明專利涵蓋之範圍內。However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto; therefore, the simple equivalent changes and modifications made in accordance with the scope of the present invention and the contents of the invention are modified. All should remain within the scope of the invention patent.
1‧‧‧電磁波真空窗1‧‧‧Electromagnetic wave vacuum window
11‧‧‧第一反射邊界11‧‧‧First reflection boundary
12‧‧‧第二反射邊界12‧‧‧second reflection boundary
13‧‧‧第三反射邊界13‧‧‧ Third reflection boundary
14‧‧‧第四反射邊界14‧‧‧ fourth reflection boundary
15‧‧‧第一內徑15‧‧‧First inner diameter
16‧‧‧第二三內徑16‧‧‧second three inner diameter
17‧‧‧第三內徑17‧‧‧ third inner diameter
2‧‧‧石英玻璃2‧‧‧Quartz glass
A、B‧‧‧代表反射最少的部份A, B‧‧‧ represents the least reflective part
第1圖，係本發明之架構示意圖。Figure 1 is a schematic diagram of the architecture of the present invention.
第2圖，係本發明之反射狀態示意圖。Fig. 2 is a schematic view showing the state of reflection of the present invention.
1‧‧‧電磁波真空窗1‧‧‧Electromagnetic wave vacuum window
11‧‧‧第一反射邊界11‧‧‧First reflection boundary
12‧‧‧第二反射邊界12‧‧‧second reflection boundary
13‧‧‧第三反射邊界13‧‧‧ Third reflection boundary
14‧‧‧第四反射邊界14‧‧‧ fourth reflection boundary
15‧‧‧第一內徑15‧‧‧First inner diameter
16‧‧‧第二三內徑16‧‧‧second three inner diameter
17‧‧‧第三內徑17‧‧‧ third inner diameter
2‧‧‧石英玻璃2‧‧‧Quartz glass
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| TW100144251A TWI431656B (en) | 2011-12-01 | 2011-12-01 | Electromagnetic wave vacuum window |
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