TWI418462B - Method for transferring thin film to substrate - Google Patents
Method for transferring thin film to substrate Download PDFInfo
- Publication number
- TWI418462B TWI418462B TW098131375A TW98131375A TWI418462B TW I418462 B TWI418462 B TW I418462B TW 098131375 A TW098131375 A TW 098131375A TW 98131375 A TW98131375 A TW 98131375A TW I418462 B TWI418462 B TW I418462B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- substrate
- patterned
- film
- conductive film
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims description 201
- 238000000034 method Methods 0.000 title claims description 37
- 239000010409 thin film Substances 0.000 title claims description 12
- 239000010410 layer Substances 0.000 claims description 215
- 239000010408 film Substances 0.000 claims description 200
- 238000012546 transfer Methods 0.000 claims description 98
- 239000000853 adhesive Substances 0.000 claims description 85
- 230000001070 adhesive effect Effects 0.000 claims description 85
- 239000000463 material Substances 0.000 claims description 22
- 239000004020 conductor Substances 0.000 claims description 10
- 239000004033 plastic Substances 0.000 claims description 10
- 229920003023 plastic Polymers 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000000059 patterning Methods 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 4
- 239000012790 adhesive layer Substances 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 1
- GRPQBOKWXNIQMF-UHFFFAOYSA-N indium(3+) oxygen(2-) tin(4+) Chemical compound [Sn+4].[O-2].[In+3] GRPQBOKWXNIQMF-UHFFFAOYSA-N 0.000 claims 1
- 239000002356 single layer Substances 0.000 description 63
- 239000011521 glass Substances 0.000 description 28
- 238000000926 separation method Methods 0.000 description 13
- 230000003667 anti-reflective effect Effects 0.000 description 7
- 239000006059 cover glass Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000012780 transparent material Substances 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 4
- 238000003486 chemical etching Methods 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 4
- 238000010297 mechanical methods and process Methods 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 241000699670 Mus sp. Species 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
- B32B37/025—Transfer laminating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
- B32B2457/208—Touch screens
Landscapes
- Laminated Bodies (AREA)
- Position Input By Displaying (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
本發明大體上係關於將薄膜轉移至目標基板,且更特定言之,係關於將導電材料之單層薄膜自臨時表面轉移至觸敏表面。The present invention generally relates to transferring a film to a target substrate, and more particularly to transferring a single layer film of conductive material from a temporary surface to a touch sensitive surface.
目前有許多類型之輸入器件可用於執行計算系統中之操作,諸如按鈕或按鍵、滑鼠、軌跡球、觸控式感測器面板、操縱桿、觸控式螢幕及類似物。詳言之,觸控式螢幕由於其操作容易性及多功能性以及其下降之價格而變得日益風行。觸控式螢幕可包括:一觸控式感測器面板,其可為具有一觸敏表面之透明面板;及一顯示器件,諸如LCD面板,其可部分或完全位於該觸控式感測器面板之後使得該觸敏表面可覆蓋該顯示器件之可視區域之至少一部分。觸控式螢幕可允許使用者藉由使用手指、觸控筆(stylus)或其他物件於正由該顯示器件顯示之使用者介面(UI)所指示之位置處觸摸該觸控式感測器面板來執行各種功能。大體上,觸控式螢幕可辨識觸摸事件及該觸摸事件在觸控式感測器面板上發生之位置,且一計算系統可接著根據在該觸摸事件發生時出現之顯示來解譯該觸摸事件,且其後可基於該觸摸事件來執行一或多個動作。There are many types of input devices currently available for performing operations in computing systems, such as buttons or buttons, mice, trackballs, touch sensor panels, joysticks, touch screens, and the like. In particular, touch screens are becoming increasingly popular due to their ease of operation and versatility, as well as their reduced price. The touch screen can include: a touch sensor panel, which can be a transparent panel having a touch sensitive surface; and a display device, such as an LCD panel, which can be partially or completely located in the touch sensor The panel is then such that the touch sensitive surface can cover at least a portion of the viewable area of the display device. The touch screen allows the user to touch the touch sensor panel by using a finger, stylus or other object at a location indicated by a user interface (UI) being displayed by the display device. To perform various functions. In general, the touch screen can recognize the touch event and the location of the touch event on the touch sensor panel, and a computing system can then interpret the touch event based on the display that occurs when the touch event occurs. And thereafter one or more actions can be performed based on the touch event.
在一些實施例中,可將一觸控式感測器面板實施為像素之陣列,該等像素係由導電材料(諸如氧化銦錫(ITO))形成,經圖案化成跨越多條感測線之多條驅動線且藉由介電材料彼此分隔。該導電材料可安置於該觸敏表面之背側上以便偵測在該觸敏表面之前側上接收到的觸摸。該等驅動線與該等感測線可形成於一基板之相對側上。或者,該等驅動線與該等感測線可彼此相鄰或接近地形成於一基板之單側上的同一層上。用於該導電材料之典型基板可由玻璃或足夠堅固以直接將驅動線及感測線製造於其上的某其他透明基板製成。然而,隨著對更小、更薄、可撓及非平坦觸控式感測器面板之日益增加的需要,直接在此等面板所要求之基板上製造驅動線及感測線可為困難且昂貴的。In some embodiments, a touch sensor panel can be implemented as an array of pixels formed of a conductive material, such as indium tin oxide (ITO), patterned to span multiple sensing lines. The strips are driven and separated from one another by a dielectric material. The electrically conductive material can be disposed on the back side of the touch sensitive surface to detect a touch received on a front side of the touch sensitive surface. The driving lines and the sensing lines may be formed on opposite sides of a substrate. Alternatively, the drive lines and the sense lines may be formed adjacent to each other or in close proximity on the same layer on a single side of a substrate. A typical substrate for the conductive material can be made of glass or some other transparent substrate that is sufficiently strong to directly fabricate the drive and sense lines thereon. However, with the ever-increasing need for smaller, thinner, flexible and non-flat touch sensor panels, it is difficult and expensive to fabricate drive and sense lines directly on the substrates required for such panels. of.
本發明係關於將導電材料之單層薄膜自一臨時基板轉移至一用在諸如觸控式感測器面板之器件中的目標基板。在一些實施例中,可藉由以下行為來達成轉移:製造一包括一基底層、一單層薄膜及一臨時基板之組塊;將該組塊轉移至一目標基板;及移除該臨時基板。在一些實施例中,可藉由以下行為來達成轉移:製造一包括一基底層、一單層薄膜及一臨時基板之大組塊;將該大組塊切割成個別較小組塊;將每一個別小組塊轉移至一目標基板;及自每一個別小組塊移除該臨時基板。The present invention relates to the transfer of a single layer of a conductive material from a temporary substrate to a target substrate for use in a device such as a touch sensitive sensor panel. In some embodiments, the transfer can be achieved by: fabricating a block comprising a substrate layer, a single layer film, and a temporary substrate; transferring the block to a target substrate; and removing the temporary substrate . In some embodiments, the transfer can be achieved by: fabricating a large block comprising a substrate layer, a single layer film, and a temporary substrate; cutting the large block into individual smaller blocks; The individual sub-blocks are transferred to a target substrate; and the temporary substrate is removed from each individual sub-block.
在對較佳實施例之以下描述中,參看附圖,該等附圖形成本文之一部分且在其中以說明之方式展示可實踐本發明的特定實施例。應理解,在不脫離本發明之較佳實施例之範疇的情況下,可利用其他實施例且可進行結構改變。In the following description of the preferred embodiments, reference to the drawings Other embodiments may be utilized and structural changes may be made without departing from the scope of the preferred embodiments of the invention.
本發明係關於將導電材料之單層薄膜轉移至用在諸如觸控式感測器面板之器件中的基板。在一些實施例中,可藉由在一轉移基板之一側上圖案化一單層導電材料且接著將該經圖案化材料自該轉移基板轉移至一目標基板上來達成轉移。此種做法有利地允許將該經圖案化材料轉移至任何目標基板,其中該目標基板可為不可耐受標準製造過程之基板(例如,軟塑膠基板或非常薄之基板),或為無法配合標準製造設備之基板(例如,非平坦基板)。The present invention relates to the transfer of a single layer film of electrically conductive material to a substrate for use in a device such as a touch sensitive sensor panel. In some embodiments, the transfer can be achieved by patterning a single layer of conductive material on one side of a transfer substrate and then transferring the patterned material from the transfer substrate to a target substrate. This approach advantageously allows the patterned material to be transferred to any target substrate, where the target substrate can be a substrate that is not tolerant to standard manufacturing processes (eg, a soft plastic substrate or a very thin substrate), or A substrate (eg, a non-planar substrate) of the fabrication equipment.
儘管在本文中按照觸控式感測器面板來描述及說明本發明之實施例,但應理解,本發明之實施例不限於此等面板,而是大體上可適用於利用其他觸摸及近接感測技術的面板及可將製造薄膜轉移至其上的任何基板。Although embodiments of the invention are described and illustrated herein in terms of a touch sensor panel, it should be understood that embodiments of the invention are not limited to such panels, but are generally applicable to other touch and proximity The panel of the test technology and any substrate onto which the film can be fabricated.
圖1A說明根據本發明之實施例的具有一製造薄片之例示性薄膜組塊,其中一基底層在該薄片之表面上。在圖1A之實例中,薄片105具有安置於一表面上之基底層110。該薄片105可包括玻璃或任何其他合適材料,該等合適材料能夠提供用以製造薄膜組塊之臨時平台且接著易於自該組塊移除。該基底層110可包括蝕刻終止材料,諸如氮化矽、二氧化矽或對可用以藉由化學蝕刻而移除薄片105之化學品(例如,氟化氫)不起化學反應的任何其他合適材料。可藉由電漿增強化學氣相沈積(PECVD)或任何其他合適沈積方法將該基底層110沈積於薄片105之表面上。該基底層110可視該薄膜組塊之應用而為剛性、半剛性、可撓性或可變形的。1A illustrates an exemplary film block having a sheet for forming a substrate layer on the surface of the sheet in accordance with an embodiment of the present invention. In the example of FIG. 1A, the sheet 105 has a substrate layer 110 disposed on a surface. The sheet 105 can comprise glass or any other suitable material that can provide a temporary platform for making a film block and then be easily removed from the block. The base layer 110 can include an etch stop material such as tantalum nitride, hafnium oxide or any other suitable material that does not chemically react with chemicals (eg, hydrogen fluoride) that can be used to remove the flakes 105 by chemical etching. The base layer 110 may be deposited on the surface of the sheet 105 by plasma enhanced chemical vapor deposition (PECVD) or any other suitable deposition method. The substrate layer 110 can be rigid, semi-rigid, flexible or deformable depending on the application of the film block.
圖1B說明根據本發明之實施例的在該基底層之一表面上圖案化有一單層薄膜的圖1A中所示之例示性薄膜組塊。在圖1B之實例中,薄膜115之圖案可以單層形式沈積於基底層110之一表面上。該等薄膜圖案可用作用於載運信號之導電跡線且可包括透明材料,諸如單層氧化銦錫(SITO)。儘管為達成說明目的可在本文中參考SITO,但應理解,根據本發明之實施例亦可使用其他導電材料。該等薄膜圖案可形成用於載運觸敏器件(諸如觸控式面板)中之觸摸之影像的觸控式感測器之部分。可使用濺鍍或用於將該經圖案化薄膜115安置於該基底層110上的任何其他合適方法來將該經圖案化薄膜沈積於該基底層之一表面上。1B illustrates an exemplary thin film block of FIG. 1A patterned with a single layer of film on one surface of the substrate layer in accordance with an embodiment of the present invention. In the example of FIG. 1B, the pattern of the film 115 may be deposited on a surface of one of the base layers 110 in a single layer. The thin film patterns can be used as conductive traces for carrying signals and can include transparent materials such as a single layer of indium tin oxide (SITO). Although SITO may be referred to herein for illustrative purposes, it should be understood that other conductive materials may also be used in accordance with embodiments of the present invention. The thin film patterns can form part of a touch sensor for carrying a touch image in a touch sensitive device, such as a touch panel. The patterned film can be deposited on one surface of the substrate layer using sputtering or any other suitable method for placing the patterned film 115 on the substrate layer 110.
圖1C說明根據本發明之實施例的具有一轉移層的圖1B中所示之例示性薄膜組塊,該轉移層藉由可移除式黏著劑黏附至該經圖案化之單層薄膜。在圖1C之實例中,一層可移除式黏著劑120可塗布該經圖案化薄膜115。該可移除式黏著劑120可包括水不溶膠或能夠將兩層臨時黏附在一起且接著被溶解或以其他方式移除的任何其他合適材料。可將轉移層125置放於該可移除式黏著劑120之頂部上,此有助於將該轉移層黏附至該下伏經圖案化薄膜115。該轉移層125可包括諸如聚對苯二甲酸乙二酯(PET)之聚合物或根據本發明之實施例能夠支撐一薄膜組塊使之轉移至一基板的任何其他合適材料。可將該轉移層125層壓或以其他方式置放於該可移除式黏著劑120上。該轉移層125可視該薄膜組塊之應用而為剛性、半剛性、可撓性或可變形的。1C illustrates an exemplary film block of FIG. 1B having a transfer layer adhered to the patterned single layer film by a removable adhesive, in accordance with an embodiment of the present invention. In the example of FIG. 1C, a layer of removable adhesive 120 can coat the patterned film 115. The removable adhesive 120 can include water non-sol or any other suitable material that can temporarily adhere the two layers together and then be dissolved or otherwise removed. A transfer layer 125 can be placed on top of the removable adhesive 120, which helps to adhere the transfer layer to the underlying patterned film 115. The transfer layer 125 can comprise a polymer such as polyethylene terephthalate (PET) or any other suitable material capable of supporting a film block for transfer to a substrate in accordance with embodiments of the present invention. The transfer layer 125 can be laminated or otherwise placed on the removable adhesive 120. The transfer layer 125 can be rigid, semi-rigid, flexible or deformable depending on the application of the film block.
圖1D說明根據本發明之實施例的該製造薄片已移除的圖1C中所示之例示性薄膜組塊。在圖1D之實例中,可移除薄片105以為將該薄膜組塊轉移至一基板作準備。可使用諸如氟化氫之化學品藉由化學蝕刻來移除薄片105。或者,可藉由機械方法或組合化學-機械方法來移除薄片105。FIG. 1D illustrates the exemplary film block of FIG. 1C with the manufactured sheet removed, in accordance with an embodiment of the present invention. In the example of FIG. 1D, the sheet 105 can be removed to prepare the film block for transfer to a substrate. The sheet 105 can be removed by chemical etching using a chemical such as hydrogen fluoride. Alternatively, the sheet 105 can be removed by mechanical means or a combination of chemical-mechanical methods.
圖1E說明根據本發明之實施例的具有圖1D中所示之例示性薄膜組塊的例示性基板,該例示性薄膜組塊轉移至該基板之一表面且藉由永久黏著劑黏附至該基板。在圖1E之實例中,可將一層永久黏著劑130層壓或以其他方式黏附至該薄膜組塊之基底層110。該永久黏著劑130可黏附至基底層110的與安置有經圖案化薄膜115之基底層表面相對的表面。可將該永久黏著劑130連同該薄膜組塊層壓或以其他方式黏附至基板140之一表面。因此,堆疊次序可為基板140、永久黏著劑130、基底層110、經圖案化薄膜115、可移除式黏著劑120,及轉移層125。視情況,可將不透明材料135黏附至基板140及永久黏著劑130之邊緣以為該基板提供美學邊沿。該永久黏著劑130可包括水不溶膠或能夠將兩層永久黏附在一起的任何其他合適材料。該基板140可包括玻璃、塑膠或任何其他透明材料。該基板140可視該基板之應用而為剛性、半剛性、可撓性或可變形的。在一些實施例中,該基板140可為用於觸敏器件之覆蓋材料,其中該基板140之前側可接收觸摸,且該基板之背側可具有轉移至其之薄膜組塊以偵測所接收之觸摸。1E illustrates an exemplary substrate having the exemplary film block illustrated in FIG. 1D transferred to a surface of the substrate and adhered to the substrate by a permanent adhesive, in accordance with an embodiment of the present invention. . In the example of FIG. 1E, a layer of permanent adhesive 130 may be laminated or otherwise adhered to the base layer 110 of the film block. The permanent adhesive 130 can be adhered to a surface of the base layer 110 opposite the surface of the base layer on which the patterned film 115 is disposed. The permanent adhesive 130 can be laminated or otherwise adhered to one surface of the substrate 140 along with the film block. Thus, the stacking order can be substrate 140, permanent adhesive 130, substrate layer 110, patterned film 115, removable adhesive 120, and transfer layer 125. Optionally, opaque material 135 can be adhered to the edges of substrate 140 and permanent adhesive 130 to provide an aesthetic edge to the substrate. The permanent adhesive 130 can include any other suitable material that is non-solufiable or capable of permanently adhering the two layers together. The substrate 140 can comprise glass, plastic or any other transparent material. The substrate 140 can be rigid, semi-rigid, flexible or deformable depending on the application of the substrate. In some embodiments, the substrate 140 can be a cover material for a touch sensitive device, wherein the front side of the substrate 140 can receive a touch, and the back side of the substrate can have a film block transferred thereto to detect the received Touch.
圖1F說明根據本發明之實施例的該轉移層已自該薄膜組塊移除的圖1E中所示之例示性基板及薄膜組塊。在圖1F之實例中,可藉由剝層或以其他方式自該可移除式黏著劑120移除該轉移層125,且接著藉由溶解或以其他方式自該經圖案化薄膜115移除該可移除式黏著劑,來自該薄膜移除該轉移層。或者,可溶解該可移除式黏著劑120或以其他方式自該薄膜移除該可移除式黏著劑120,藉此連同該可移除式黏著劑120一起移除該轉移層125。所得基板及薄膜組塊目前可準備好作進一步處理。在一些實施例中,可將一撓性電路之一末端黏合至該經圖案化薄膜115,且可將一抗反射膜層壓或以其他方式塗布於該經圖案化薄膜115上以進一步形成一觸敏器件。視情況,可將一或多個墊片附接至該抗反射膜以為該觸敏器件之其他組件提供連接。1F illustrates the exemplary substrate and film block shown in FIG. 1E with the transfer layer removed from the film block in accordance with an embodiment of the present invention. In the example of FIG. 1F, the transfer layer 125 can be removed from the removable adhesive 120 by delamination or otherwise, and then removed or otherwise removed from the patterned film 115. The removable adhesive from the film removes the transfer layer. Alternatively, the removable adhesive 120 can be dissolved or otherwise removed from the film, thereby removing the transfer layer 125 along with the removable adhesive 120. The resulting substrate and film block are currently ready for further processing. In some embodiments, one end of a flexible circuit can be bonded to the patterned film 115, and an anti-reflective film can be laminated or otherwise coated on the patterned film 115 to further form a Touch sensitive device. Optionally, one or more spacers can be attached to the anti-reflective film to provide a connection for other components of the touch sensitive device.
圖2說明根據本發明之實施例的用於將薄膜轉移至基板的例示性方法。可提供一玻璃薄片,作為用以製造一可轉移薄膜組塊的臨時平台。可將一蝕刻終止層(例如,圖1A中之基底層110)施加至該玻璃薄片(205)。可將該蝕刻終止層沈積、層壓或以其他方式施加至該薄片。可在該蝕刻終止層之一表面上圖案化一單層薄膜(210)。舉例而言,該經圖案化薄膜可為SITO。可藉由可移除式黏著劑將一轉移層黏附至該經圖案化單層(215)。可將該可移除式黏著劑塗覆至該經圖案化薄膜,且接著將該轉移層層壓或以其他方式置放於該可移除式黏著劑之頂部上。2 illustrates an exemplary method for transferring a film to a substrate in accordance with an embodiment of the present invention. A glass sheet can be provided as a temporary platform for making a transferable film block. An etch stop layer (e.g., base layer 110 in FIG. 1A) can be applied to the glass sheet (205). The etch stop layer can be deposited, laminated or otherwise applied to the sheet. A single layer of film (210) can be patterned on one of the etch stop layers. For example, the patterned film can be SITO. A transfer layer can be adhered to the patterned monolayer (215) by a removable adhesive. The removable adhesive can be applied to the patterned film and the transfer layer then laminated or otherwise placed on top of the removable adhesive.
在已製造該可轉移薄膜組塊後,可移除該玻璃薄片(220)。為此,可將該薄膜組塊曝露至可蝕刻掉該玻璃薄片之蝕刻化學品。該蝕刻終止層可保護該薄膜組塊之剩餘部分使之免受化學損害。或者,可使用機械方法來移除該玻璃薄片。可將該剩餘薄膜組塊(包含該轉移層、可移除式黏著劑、經圖案化薄膜及蝕刻終止層)轉移至一基板,且使用永久黏著劑將其黏附至該基板(225)。可將該永久黏著劑層壓或以其他方式黏附至該蝕刻終止層,且接著層壓或以其他方式黏附至該基板之一表面。因而,該蝕刻終止層可最接近於該基板,接著係該經圖案化薄膜,接著係該可移除式黏著劑,以及距該基板最遠的該轉移層。After the transferable film block has been fabricated, the glass sheet (220) can be removed. To this end, the film block can be exposed to an etch chemistry that etches away the glass flakes. The etch stop layer protects the remainder of the film stack from chemical damage. Alternatively, a mechanical method can be used to remove the glass flakes. The remaining film stack (including the transfer layer, removable adhesive, patterned film, and etch stop layer) can be transferred to a substrate and adhered to the substrate (225) using a permanent adhesive. The permanent adhesive can be laminated or otherwise adhered to the etch stop layer and then laminated or otherwise adhered to one of the surfaces of the substrate. Thus, the etch stop layer can be closest to the substrate, followed by the patterned film, followed by the removable adhesive, and the transfer layer furthest from the substrate.
可自該經圖案化薄膜移除該轉移層及該可移除式黏著劑(230)。該可移除式黏著劑可溶解於溶劑中或以其他方式移除該可移除式黏著劑,藉此連同可移除式黏著劑一起移除該轉移層。或者,可將該轉移層剝層或以其他方式自該可移除式黏著劑移除該轉移層,且接著將該可移除式黏著劑溶解或以其他方式自該經圖案化薄膜移除該可移除式黏著劑。可進一步處理所得基板-薄膜組塊組合以提供一合適電路。The transfer layer and the removable adhesive (230) can be removed from the patterned film. The removable adhesive can be dissolved in a solvent or otherwise removed from the removable adhesive, thereby removing the transfer layer along with the removable adhesive. Alternatively, the transfer layer can be stripped or otherwise removed from the removable adhesive and then the removable adhesive can be dissolved or otherwise removed from the patterned film. The removable adhesive. The resulting substrate-film block combination can be further processed to provide a suitable circuit.
在一替代實施例中,可用可黏合至該玻璃薄片之一塑膠或聚醯亞胺層來替換該蝕刻終止層。可接著藉由使該玻璃薄片與該塑膠或聚醯亞胺層解黏合(de-bonding)來自該薄膜組塊移除該薄片。In an alternate embodiment, the etch stop layer can be replaced with a plastic or polyimide layer that can be bonded to one of the glass sheets. The sheet can then be removed from the film block by de-bonding the glass sheet to the plastic or polyimide layer.
圖3說明根據本發明之實施例的用於將薄膜轉移至基板的另一例示性方法。針對成本效益,可在大玻璃薄片上一次製造多個薄膜組塊,且接著將其分離以供轉移至個別基板。在圖3之實例中,可提供一大玻璃薄片,其上將由一大薄膜組塊製造多個薄膜組塊。可在該玻璃薄片上製造大薄膜組塊(305)。該大薄膜組塊可具有形成於該玻璃薄片上之一基底層、圖案化於該基底層之一表面上的一單層薄膜(例如,SITO)、形成於該經圖案化薄膜上之一可移除式黏著劑層,及形成於該可移除式黏著劑層上之一轉移層。可使用(例如)圖2之方法來製造該大薄膜組塊。FIG. 3 illustrates another exemplary method for transferring a film to a substrate in accordance with an embodiment of the present invention. For cost effectiveness, multiple film patches can be fabricated on a large glass sheet at a time and then separated for transfer to individual substrates. In the example of Figure 3, a large glass sheet can be provided on which a plurality of film blocks will be fabricated from a large film block. A large film block (305) can be fabricated on the glass sheet. The large film block may have a base layer formed on one of the glass sheets, a single layer film (for example, SITO) patterned on one surface of the base layer, and one of the patterned films may be formed on the patterned film. A removable adhesive layer and a transfer layer formed on the removable adhesive layer. The large film block can be fabricated using, for example, the method of FIG.
可將該玻璃薄片及製造於其上之薄膜組塊模切成多個較小組塊(310)。可將該等較小組塊切割成適於轉移至基板的任何尺寸。每一較小組塊可包括該玻璃薄片之一部分、該基底層之形成於該玻璃薄片部分上之一部分、該經圖案化薄膜之形成於該基底層部分上之一部分、該可移除式黏著劑之形成於該經圖案化薄膜部分上之一部分,及該轉移層之形成於該可移除式黏著劑部分上之一部分。The glass flakes and the film stack fabricated thereon can be die cut into a plurality of smaller chunks (310). The smaller chunks can be cut to any size suitable for transfer to the substrate. Each of the smaller blocks may include a portion of the glass sheet, a portion of the substrate layer formed on the glass sheet portion, a portion of the patterned film formed on the substrate layer portion, the removable adhesive Forming a portion of the patterned film portion and a portion of the transfer layer formed on the removable adhesive portion.
對於每一較小組塊而言,可使用(例如)圖2之方法來移除該玻璃薄片部分。可藉由永久黏著劑將該較小薄膜組塊之剩餘部分施加至個別防護玻璃罩(315)。可使用(例如)圖2之方法來施加該較小薄膜組塊。可使用(例如)圖2之方法將該轉移層及該可移除式黏著劑自該經圖案化薄膜移除(320)。可將一撓性電路附接至該經圖案化薄膜以形成一觸控式面板,其中該防護玻璃罩可接收一觸摸且附接至其之薄膜組塊可偵測該觸摸(325)。視情況,一抗反射層或任何其他合適層可塗布該經圖案化薄膜,且可將一墊片附接至該抗反射層以連接其他組件。For each smaller chunk, the glass flake portion can be removed using, for example, the method of FIG. The remainder of the smaller film block can be applied to the individual cover glass (315) by a permanent adhesive. The smaller film block can be applied using, for example, the method of FIG. The transfer layer and the removable adhesive can be removed (320) from the patterned film using, for example, the method of FIG. A flexible circuit can be attached to the patterned film to form a touch panel, wherein the cover glass can receive a touch and the film block attached thereto can detect the touch (325). Optionally, an anti-reflective layer or any other suitable layer can be applied to the patterned film, and a spacer can be attached to the anti-reflective layer to join other components.
圖4A至圖4D說明根據本發明之實施例的具有轉移至其的例示性薄膜組塊之例示性彎曲基板。在圖4A之實例中,可藉由一永久黏著劑430將基底層410黏附至彎曲基板440之一凹入表面。可將經圖案化之單層薄膜415安置於該基底層410之一表面上。在圖4B之實例中,可藉由一永久黏著劑430將基底層410黏附至彎曲基板440之一凸起表面。可將經圖案化之單層薄膜415安置於該基底層410之一表面上。在圖4C之實例中,彎曲基板440可具有一凸起表面及一與該凸起表面相對之平坦表面。可藉由一永久黏著劑430將該基底層410黏附至該彎曲基板440之平坦表面。可將經圖案化之單層薄膜415安置於該基底層410之一表面上。在圖4D之實例中,彎曲基板440可具有一凹入表面及一與該凹入表面相對之平坦表面。可藉由一永久黏著劑430將該基底層410黏附至該彎曲基板440之平坦表面。可將經圖案化之單層薄膜415安置於該基底層410之一表面上。4A-4D illustrate an exemplary curved substrate having an exemplary film block transferred thereto in accordance with an embodiment of the present invention. In the example of FIG. 4A, the base layer 410 can be adhered to one of the concave surfaces of the curved substrate 440 by a permanent adhesive 430. A patterned single layer film 415 can be disposed on one surface of the substrate layer 410. In the example of FIG. 4B, the base layer 410 can be adhered to one of the convex surfaces of the curved substrate 440 by a permanent adhesive 430. A patterned single layer film 415 can be disposed on one surface of the substrate layer 410. In the example of FIG. 4C, the curved substrate 440 can have a raised surface and a flat surface opposite the raised surface. The base layer 410 can be adhered to the flat surface of the curved substrate 440 by a permanent adhesive 430. A patterned single layer film 415 can be disposed on one surface of the substrate layer 410. In the example of FIG. 4D, curved substrate 440 can have a concave surface and a flat surface opposite the concave surface. The base layer 410 can be adhered to the flat surface of the curved substrate 440 by a permanent adhesive 430. A patterned single layer film 415 can be disposed on one surface of the substrate layer 410.
該彎曲基板可為剛性、半剛性、可撓性或可變形的。該剛性彎曲基板可永久地形成為彎曲的。該半剛性、可撓性及可變形彎曲基板可動態地形成為彎曲的及不形成為彎曲的。應理解,基板不限於彎曲形狀,而是根據本發明之實施例可包括能夠使一經轉移薄膜組塊與之相關聯的任何大體上非平坦表面。The curved substrate can be rigid, semi-rigid, flexible or deformable. The rigidly curved substrate can be permanently formed to be curved. The semi-rigid, flexible, and deformable curved substrate can be dynamically formed to be curved and not formed to be curved. It should be understood that the substrate is not limited to a curved shape, but may include any substantially non-planar surface with which a transferred film block can be associated in accordance with embodiments of the present invention.
圖5A說明根據本發明之實施例的具有一製造薄片之例示性薄膜組塊,其中一基底層在該薄片之表面上。在圖5A之實例中,薄片505具有安置於一表面上之基底層510。該薄片505可包括玻璃或任何其他合適材料,該等合適材料能夠提供用以製造薄膜組塊之臨時平台且接著易於自該組塊移除。該基底層510可包括蝕刻終止材料,諸如氮化矽、二氧化矽或對可用以藉由化學蝕刻而移除薄片505之化學品(例如,氟化氫)不起化學反應的任何其他合適材料。可藉由PECVD或任何其他合適沈積方法將該基底層510沈積於該薄片505之表面上。該基底層510可視該薄膜組塊之應用而為剛性、半剛性、可撓性或可變形的。Figure 5A illustrates an exemplary film block having a sheet for forming a substrate layer on the surface of the sheet in accordance with an embodiment of the present invention. In the example of FIG. 5A, sheet 505 has a substrate layer 510 disposed on a surface. The sheet 505 can comprise glass or any other suitable material that can provide a temporary platform for making a film block and then be easily removed from the block. The substrate layer 510 can include an etch stop material such as tantalum nitride, hafnium oxide or any other suitable material that does not chemically react with chemicals (eg, hydrogen fluoride) that can be used to remove the sheet 505 by chemical etching. The substrate layer 510 can be deposited on the surface of the sheet 505 by PECVD or any other suitable deposition method. The substrate layer 510 can be rigid, semi-rigid, flexible or deformable depending on the application of the film block.
圖5B說明根據本發明之實施例的在該基底層之一表面上圖案化有兩個隔開之單層薄膜的圖5A中所示之例示性薄膜組塊。在圖5B之實例中,薄膜515之圖案可以單層形式沈積於基底層510之一表面上。該等薄膜圖案可用作用於載運信號之導電跡線且可包括透明材料,諸如ITO。該等薄膜圖案可形成用於載運觸敏器件(諸如觸控式面板)中之觸摸之影像的觸控式感測器之部分。可使用濺鍍或用於將該經圖案化薄膜515安置於該基底層510上的任何其他合適方法來將該經圖案化薄膜沈積於該基底層之一表面上。Figure 5B illustrates an exemplary thin film block of Figure 5A patterned with two spaced apart single layer films on one surface of the substrate layer in accordance with an embodiment of the present invention. In the example of FIG. 5B, the pattern of film 515 may be deposited on a surface of one of the substrate layers 510 in a single layer. The thin film patterns can be used as conductive traces for carrying signals and can include transparent materials such as ITO. The thin film patterns can form part of a touch sensor for carrying a touch image in a touch sensitive device, such as a touch panel. The patterned film can be deposited on one surface of the substrate layer using sputtering or any other suitable method for placing the patterned film 515 on the substrate layer 510.
分離層545可安置於該經圖案化薄膜515上。薄膜550之圖案可以單層形式沈積於與分離層545之安置於該經圖案化薄膜515上之表面相對的分離層表面上。如同經圖案化薄膜515,薄膜圖案550可用作用於載運信號之導電跡線且可包括透明材料,諸如ITO。該等薄膜圖案可形成用於載運觸敏器件(諸如觸控式面板)中之觸摸之影像的觸控式感測器之部分。可使用濺鍍或用於將該經圖案化薄膜550安置於該分離層545上的任何其他合適方法來將該經圖案化薄膜沈積於該分離層之一表面上。該分離層545可視該薄膜組塊之應用而為剛性、半剛性、可撓性或可變形的。該分離層545可為玻璃或某其他透明介電材料。該等經圖案化薄膜515、550可於分離層545之相對側上形成為雙層氧化銦錫(DITO)。A separation layer 545 can be disposed on the patterned film 515. The pattern of the film 550 may be deposited in a single layer on the surface of the separation layer opposite to the surface of the separation layer 545 disposed on the patterned film 515. As with the patterned film 515, the thin film pattern 550 can be used as a conductive trace for carrying signals and can include a transparent material such as ITO. The thin film patterns can form part of a touch sensor for carrying a touch image in a touch sensitive device, such as a touch panel. The patterned film can be deposited on one surface of the separation layer using sputtering or any other suitable method for placing the patterned film 550 on the separation layer 545. The separation layer 545 can be rigid, semi-rigid, flexible or deformable depending on the application of the film block. The separation layer 545 can be glass or some other transparent dielectric material. The patterned films 515, 550 can be formed as double layer indium tin oxide (DITO) on opposite sides of the separation layer 545.
在一替代實施例中,可省去分離層545,且該等經圖案化薄膜515、550可彼此層疊地形成為雙SITO。In an alternate embodiment, the separation layer 545 can be omitted and the patterned films 515, 550 can be laminated to each other to form a dual SITO.
圖5C說明根據本發明之實施例的具有一轉移層的圖5B中所示之例示性薄膜組塊,該轉移層藉由可移除式黏著劑黏附至該等經圖案化之單層薄膜中之最外層。在圖5C之實例中,一層可移除式黏著劑520可塗布該等經圖案化薄膜550之最外層。該可移除式黏著劑520可包括水不溶膠或能夠將兩層臨時黏附在一起且接著被溶解或以其他方式移除的任何其他合適材料。可將轉移層525置放於該可移除式黏著劑520之頂部上,此有助於將該轉移層黏附至該下伏經圖案化薄膜515。該轉移層525可包括諸如PET之聚合物或根據本發明之實施例能夠支撐一薄膜組塊使之轉移至一基板的任何其他合適材料。可將該轉移層525層壓或以其他方式置放於該可移除式黏著劑520上。該轉移層525可視該薄膜組塊之應用而為剛性、半剛性、可撓性或可變形的。5C illustrates an exemplary film block of FIG. 5B having a transfer layer adhered to the patterned single layer film by a removable adhesive, in accordance with an embodiment of the present invention. The outermost layer. In the example of FIG. 5C, a layer of removable adhesive 520 can coat the outermost layers of the patterned films 550. The removable adhesive 520 can include water non-sol or any other suitable material that can temporarily adhere the two layers together and then be dissolved or otherwise removed. A transfer layer 525 can be placed on top of the removable adhesive 520, which helps to adhere the transfer layer to the underlying patterned film 515. The transfer layer 525 can comprise a polymer such as PET or any other suitable material capable of supporting a film block for transfer to a substrate in accordance with embodiments of the present invention. The transfer layer 525 can be laminated or otherwise placed on the removable adhesive 520. The transfer layer 525 can be rigid, semi-rigid, flexible or deformable depending on the application of the film block.
圖5D說明根據本發明之實施例的該製造薄片已移除的圖5C中所示之例示性薄膜組塊。在圖5D之實例中,可移除薄片505以為將該薄膜組塊轉移至一基板作準備。可使用諸如氟化氫之化學品藉由化學蝕刻來移除薄片505。或者,可藉由機械方法或組合化學-機械方法來移除薄片505。Figure 5D illustrates the exemplary film block of Figure 5C with the manufactured sheet removed, in accordance with an embodiment of the present invention. In the example of Figure 5D, the sheet 505 can be removed to prepare the film block for transfer to a substrate. The sheet 505 can be removed by chemical etching using a chemical such as hydrogen fluoride. Alternatively, the sheet 505 can be removed by mechanical means or a combination of chemical-mechanical methods.
圖5E說明根據本發明之實施例的具有圖5D中所示之例示性薄膜組塊的例示性基板,該例示性薄膜組塊轉移至該基板之一表面且藉由永久黏著劑黏附至該基板。在圖5E之實例中,可將一層永久黏著劑530層壓或以其他方式黏附至該薄膜組塊之基底層510。該永久黏著劑530可黏附至基底層510的與安置有經圖案化薄膜515之基底層表面相對的表面。可將該永久黏著劑530連同該薄膜組塊層壓或以其他方式黏附至基板540之一表面。因此,堆疊次序可為基板540、永久黏著劑530、基底層510、經圖案化薄膜515、分離層545、第二經圖案化薄膜550、可移除式黏著劑520,及轉移層525。視情況,可將不透明材料535黏附至基板540及永久黏著劑530之邊緣以為該基板提供美學邊沿。該永久黏著劑530可包括水不溶膠或能夠將兩層永久黏附在一起的任何其他合適材料。該基板540可包括玻璃、塑膠或任何其他透明材料。該基板540可視該基板之應用而為剛性、半剛性、可撓性或可變形的。在一些實施例中,該基板540可為用於觸敏器件之覆蓋材料,其中該基板540之前側可接收觸摸,且該基板之背側上可具有轉移至其之薄膜組塊以偵測所接收之觸摸。5E illustrates an exemplary substrate having the exemplary film block of FIG. 5D transferred to a surface of the substrate and adhered to the substrate by a permanent adhesive, in accordance with an embodiment of the present invention. . In the example of FIG. 5E, a layer of permanent adhesive 530 can be laminated or otherwise adhered to the base layer 510 of the film block. The permanent adhesive 530 can be adhered to a surface of the base layer 510 opposite the surface of the base layer on which the patterned film 515 is disposed. The permanent adhesive 530 can be laminated or otherwise adhered to one surface of the substrate 540 along with the film block. Thus, the stacking order can be substrate 540, permanent adhesive 530, substrate layer 510, patterned film 515, separation layer 545, second patterned film 550, removable adhesive 520, and transfer layer 525. Optionally, an opaque material 535 can be adhered to the edges of the substrate 540 and the permanent adhesive 530 to provide an aesthetic edge to the substrate. The permanent adhesive 530 can include water that is not sol or any other suitable material that can permanently adhere the two layers together. The substrate 540 can comprise glass, plastic or any other transparent material. The substrate 540 can be rigid, semi-rigid, flexible or deformable depending on the application of the substrate. In some embodiments, the substrate 540 can be a cover material for a touch sensitive device, wherein the front side of the substrate 540 can receive a touch, and the back side of the substrate can have a film block transferred thereto to detect Receive the touch.
圖5F說明根據本發明之實施例的該轉移層已自該薄膜組塊移除的圖5E中所示之例示性基板及薄膜組塊。在圖5F之實例中,可藉由剝層或以其他方式自該可移除式黏著劑520移除該轉移層525,且接著藉由溶解或以其他方式自該經圖案化薄膜550移除該可移除式黏著劑,來自該薄膜移除該轉移層。或者,可溶解該可移除式黏著劑520或以其他方式自該薄膜550移除該可移除式黏著劑520,藉此連同該可移除式黏著劑520一起移除該轉移層525。所得基板及薄膜組塊目前可準備好作進一步處理。在一些實施例中,可將一撓性電路之一末端黏合至該等經圖案化薄膜515、550中之一者或兩者,且可將一抗反射膜層壓或以其他方式塗布於該經圖案化薄膜550上以進一步形成一觸敏器件。視情況,可將一或多個墊片附接至該抗反射膜以為該觸敏器件之其他組件提供連接。Figure 5F illustrates the exemplary substrate and film block shown in Figure 5E with the transfer layer removed from the film block in accordance with an embodiment of the present invention. In the example of FIG. 5F, the transfer layer 525 can be removed from the removable adhesive 520 by delamination or otherwise, and then removed or otherwise removed from the patterned film 550. The removable adhesive from the film removes the transfer layer. Alternatively, the removable adhesive 520 can be dissolved or otherwise removed from the film 550, thereby removing the transfer layer 525 along with the removable adhesive 520. The resulting substrate and film block are currently ready for further processing. In some embodiments, one end of a flexible circuit can be bonded to one or both of the patterned films 515, 550, and an anti-reflective film can be laminated or otherwise coated The patterned film 550 is patterned to further form a touch sensitive device. Optionally, one or more spacers can be attached to the anti-reflective film to provide a connection for other components of the touch sensitive device.
圖6說明根據本發明之實施例的用於將薄膜轉移至基板的例示性方法。可提供一玻璃薄片,作為用以製造一可轉移薄膜組塊的臨時平台。可將一蝕刻終止層施加至該玻璃薄片(605)。可將該蝕刻終止層沈積、層壓或以其他方式施加至該薄片。可在該蝕刻終止層之一表面上圖案化一或多個單層薄膜(610)。對於多個層而言,可在每一經圖案化薄膜之間沈積一分離層。舉例而言,該經圖案化薄膜可為SITO、DITO或雙SITO。可藉由可移除式黏著劑將一轉移層黏附至該等經圖案化單層中之最外層(615)。可將該可移除式黏著劑塗覆至該經圖案化薄膜,且接著將該轉移層層壓或以其他方式置放於該可移除式黏著劑之頂部上。Figure 6 illustrates an exemplary method for transferring a film to a substrate in accordance with an embodiment of the present invention. A glass sheet can be provided as a temporary platform for making a transferable film block. An etch stop layer can be applied to the glass flakes (605). The etch stop layer can be deposited, laminated or otherwise applied to the sheet. One or more single layer films (610) may be patterned on one surface of the etch stop layer. For multiple layers, a separate layer can be deposited between each patterned film. For example, the patterned film can be SITO, DITO or dual SITO. A transfer layer can be adhered to the outermost layer (615) of the patterned single layers by a removable adhesive. The removable adhesive can be applied to the patterned film and the transfer layer then laminated or otherwise placed on top of the removable adhesive.
在已製造好該可轉移薄膜組塊後,可移除該玻璃薄片(620)。為此,可將該薄膜組塊曝露至可蝕刻掉該玻璃薄片之蝕刻化學品。該蝕刻終止層可保護該薄膜組塊之剩餘部分使之免受化學損害。或者,可使用機械方法來移除該玻璃薄片。可將該剩餘薄膜組塊(包含該轉移層、可移除式黏著劑、一或多個經圖案化薄膜、一或多個分離層,及蝕刻終止層)轉移至一基板,且使用永久黏著劑將其黏附至該基板(625)。可將該永久黏著劑層壓或以其他方式黏附至該蝕刻終止層,且接著層壓或以其他方式黏附至該基板之一表面。因而,該蝕刻終止層可最接近於該基板,接著係該一或多個經圖案化薄膜及分離層,接著係該可移除式黏著劑,及距該基板最遠的該轉移層。After the transferable film block has been fabricated, the glass sheet (620) can be removed. To this end, the film block can be exposed to an etch chemistry that etches away the glass flakes. The etch stop layer protects the remainder of the film stack from chemical damage. Alternatively, a mechanical method can be used to remove the glass flakes. The remaining film block (including the transfer layer, removable adhesive, one or more patterned films, one or more separation layers, and an etch stop layer) can be transferred to a substrate and permanently bonded The agent adheres it to the substrate (625). The permanent adhesive can be laminated or otherwise adhered to the etch stop layer and then laminated or otherwise adhered to one of the surfaces of the substrate. Thus, the etch stop layer can be closest to the substrate, followed by the one or more patterned films and separation layers, followed by the removable adhesive, and the transfer layer furthest from the substrate.
可將該轉移層及該可移除式黏著劑自該經圖案化薄膜移除(630)。該可移除式黏著劑可溶解於溶劑中或以其他方式移除,藉此將連同可移除式黏著劑一起移除該轉移層。或者,可將該轉移層剝層或以其他方式自該可移除式黏著劑移除該轉移層,且接著將該可移除式黏著劑溶解或以其他方式自該經圖案化薄膜移除該可移除式黏著劑。可進一步處理所得基板-薄膜組塊組合以提供一合適電路。The transfer layer and the removable adhesive can be removed (630) from the patterned film. The removable adhesive can be dissolved in the solvent or otherwise removed, whereby the transfer layer will be removed along with the removable adhesive. Alternatively, the transfer layer can be stripped or otherwise removed from the removable adhesive and then the removable adhesive can be dissolved or otherwise removed from the patterned film. The removable adhesive. The resulting substrate-film block combination can be further processed to provide a suitable circuit.
在一替代實施例中,可用可黏合至該玻璃薄片之一塑膠或聚醯亞胺層來替換該蝕刻終止層。可接著藉由使該玻璃薄片與該塑膠或聚醯亞胺層解黏合來自該薄膜組塊移除該薄片。In an alternate embodiment, the etch stop layer can be replaced with a plastic or polyimide layer that can be bonded to one of the glass sheets. The sheet can then be removed from the film stack by debonding the glass sheet from the plastic or polyimide layer.
圖7A說明可包括觸控式感測器面板724、顯示器件730及其他計算系統區塊的例示性行動電話736,其中該觸控式感測器面板可具有製造於一轉移基板之一側上之單層中且自該轉移基板轉移至該觸控式感測器面板之背側的複數個共平面單層觸控式感測器。7A illustrates an exemplary mobile phone 736 that can include a touch sensor panel 724, display device 730, and other computing system blocks, wherein the touch sensor panel can be fabricated on one side of a transfer substrate And a plurality of coplanar single-layer touch sensors in the single layer and transferred from the transfer substrate to the back side of the touch sensor panel.
圖7B說明可包括觸控式感測器面板724、顯示器件730及其他計算系統區塊的例示性數位媒體播放器740,其中該觸控式感測器面板可具有製造於一轉移基板之一側上之單層中且自該轉移基板轉移至該觸控式感測器面板之背側的複數個共平面單層觸控式感測器。7B illustrates an exemplary digital media player 740 that can include a touch sensor panel 724, a display device 730, and other computing system blocks, wherein the touch sensor panel can have one of a transfer substrate fabricated A plurality of coplanar single-layer touch sensors in a single layer on the side and transferred from the transfer substrate to the back side of the touch sensor panel.
圖7C說明可包括觸控式感測器面板(軌跡板)724及顯示器730及其他計算系統區塊的例示性個人電腦744,其中該觸控式感測器面板可具有製造於一轉移基板之一側上之單層中且自該轉移基板轉移至該觸控式感測器面板之背側的複數個共平面單層觸控式感測器。7C illustrates an exemplary personal computer 744 that can include a touch sensor panel (trackpad) 724 and display 730 and other computing system blocks, wherein the touch sensor panel can be fabricated on a transfer substrate. A plurality of coplanar single-layer touch sensors in a single layer on one side and transferred from the transfer substrate to the back side of the touch sensor panel.
圖7A、圖7B及圖7C之行動電話、媒體播放器及個人電腦可具有根據本發明之實施例的易於製造及轉移之觸控式感測器。The mobile phone, media player, and personal computer of Figures 7A, 7B, and 7C can have a touch sensor that is easy to manufacture and transfer in accordance with an embodiment of the present invention.
圖8說明可包括上文所描述的本發明之實施例中之一或多者的例示性計算系統800。計算系統800可包括一或多個面板處理器802及周邊器件804,及面板子系統806。周邊器件804可包括(但不限於)隨機存取記憶體(RAM)或其他類型之記憶體或儲存器、監視計時器(watchdog timer)及其類似物。面板子系統806可包括(但不限於)一或多個感測通道808、通道掃描邏輯810及驅動器邏輯814。通道掃描邏輯810可存取RAM 812、自主讀取來自該等感測通道之資料且提供對該等感測通道之控制。另外,通道掃描邏輯810可控制驅動器邏輯814以產生可選擇性地施加至觸控式感測器面板824之驅動線的各種頻率及相位之刺激信號816。在一些實施例中,面板子系統806、面板處理器802及周邊器件804可整合至單一特殊應用積體電路(ASIC)中。FIG. 8 illustrates an exemplary computing system 800 that can include one or more of the embodiments of the invention described above. Computing system 800 can include one or more panel processors 802 and peripheral devices 804, and panel subsystem 806. Peripheral device 804 can include, but is not limited to, a random access memory (RAM) or other type of memory or memory, a watchdog timer, and the like. Panel subsystem 806 can include, but is not limited to, one or more sense channels 808, channel scan logic 810, and driver logic 814. Channel scan logic 810 can access RAM 812, autonomously read data from the sense channels, and provide control of the sense channels. Additionally, channel scan logic 810 can control driver logic 814 to generate various frequency and phase stimulation signals 816 that can be selectively applied to the drive lines of touch sensor panel 824. In some embodiments, panel subsystem 806, panel processor 802, and peripheral device 804 can be integrated into a single application specific integrated circuit (ASIC).
觸控式感測器面板824可包括具有複數條驅動線及複數條感測線之一電容性感測媒體,然而亦可使用其他感測媒體。根據本發明之實施例,驅動線及感測線中之任一者或兩者可製造於一轉移基板上且自該轉移基板轉移至該觸控式感測器面板。驅動線與感測線之每一交叉點可表示一電容性感測節點且可被視為圖像元素(像素)826,其在將觸控式感測器面板824視為擷取一觸摸之「影像」時可尤其有用。(換言之,在面板子系統806已判定在該觸控式感測器面板中之每一觸控式感測器處是否已偵測到一觸摸事件後,發生觸摸事件的多點觸控式面板中之觸控式感測器之圖案可被視為觸摸之「影像」(例如,觸摸該面板之手指的圖案))。觸控式感測器面板824之每一感測線可驅動面板子系統806中之感測通道808(本文中亦被稱作事件偵測及解調變電路)。The touch sensor panel 824 can include a capacitive sensing medium having a plurality of driving lines and a plurality of sensing lines, although other sensing media can also be used. According to an embodiment of the invention, either or both of the drive line and the sense line can be fabricated on a transfer substrate and transferred from the transfer substrate to the touch sensor panel. Each intersection of the drive line and the sense line can represent a capacitive sensing node and can be viewed as an image element (pixel) 826 that is considered to capture a touch of the touch sensor panel 824 It can be especially useful. (In other words, the multi-touch panel in which the touch event occurs after the panel subsystem 806 has determined whether a touch event has been detected at each touch sensor in the touch sensor panel. The pattern of the touch sensor can be regarded as the "image" of the touch (for example, the pattern of the finger touching the panel). Each sense line of touch sensor panel 824 can drive sense channel 808 (also referred to herein as an event detection and demodulation circuit) in panel subsystem 806.
計算系統800亦可包括主機處理器828以用於接收來自面板處理器802之輸出並基於該等輸出來執行動作,該等動作可包括(但不限於)移動諸如游標或指標之物件、捲動或平移(pan)、調整控制設定、開啟檔案或文件、檢視選單、進行選擇、執行指令、操作耦接至主機器件之周邊器件、接聽電話、撥打電話、掛斷電話、改變音量或音訊設定、儲存與電話通信有關的資訊(諸如地址、常撥號碼、已接聽來電、未接來電)、登入電腦或電腦網路、准許經授權個人存取電腦或電腦網路之限制性區域、載入與使用者偏好之電腦桌面配置相關聯之使用者設定檔、准許存取web內容、啟動特定程式、加密或解碼訊息,及/或類似動作。主機處理器828亦可執行可能不與面板處理有關之額外功能,且可耦接至程式儲存器832及諸如LCD面板之顯示器件830以向器件之使用者提供UI。顯示器件830連同觸控式感測器面板824在部分或完全位於該觸控式感測器面板下方時可形成觸控式螢幕818。Computing system 800 can also include host processor 828 for receiving output from panel processor 802 and performing actions based on the outputs, which can include, but are not limited to, moving objects such as cursors or indicators, scrolling Or pan, adjust control settings, open files or files, view menus, make selections, execute commands, operate peripheral devices coupled to the host device, answer calls, make calls, hang up calls, change volume or audio settings, Store information related to telephone communications (such as address, frequently dialed number, answered calls, missed calls), login to a computer or computer network, restricted access to authorized computers to access computers or computer networks, loading and The user preferences of the computer desktop configuration associated user profiles, permission to access web content, launch specific programs, encrypt or decode messages, and/or the like. Host processor 828 can also perform additional functions that may not be associated with panel processing, and can be coupled to program storage 832 and display device 830, such as an LCD panel, to provide a UI to a user of the device. The display device 830, together with the touch sensor panel 824, can form a touch screen 818 when partially or completely under the touch sensor panel.
請注意,上述功能中之一或多者可藉由儲存於記憶體(例如,圖8中之周邊器件804中之一者)中且由面板處理器802執行、或儲存於程式儲存器832中且由主機處理器828執行的韌體來執行。亦可在任何電腦可讀媒體內儲存及/或傳送該韌體以用於由一指令執行系統、裝置或器件使用或與之結合使用,該指令執行系統、裝置或器件諸如基於電腦之系統、含處理器之系統,或可自該指令執行系統、裝置或器件取得指令並執行該等指令的其他系統。在此文件之背景內容中,「電腦可讀媒體」可為可含有或儲存程式以由該指令執行系統、裝置或器件使用或與之結合使用的任何媒體。該電腦可讀媒體可包括(但不限於)電子、磁性、光學、電磁、紅外線或半導體系統、裝置或器件、攜帶型電腦磁片(磁性)、隨機存取記憶體(RAM)(磁性)、唯讀記憶體(ROM)(磁性)、可抹除可程式化唯讀記憶體(EPROM)(磁性)、攜帶型光碟(諸如CD、CD-R、CD-RW、DVD、DVD-R或DVD-RW),或快閃記憶體(諸如壓縮快閃卡、安全數位卡、USB記憶體器件、記憶棒及其類似物)。Please note that one or more of the above functions may be stored in a memory (eg, one of the peripheral devices 804 in FIG. 8) and executed by the panel processor 802 or stored in the program storage 832. And executed by the firmware executed by the host processor 828. The firmware may also be stored and/or transferred in any computer readable medium for use by or in connection with an instruction execution system, apparatus or device, such as a computer based system, A system containing a processor, or other system that can take instructions from the instruction execution system, apparatus, or device and execute the instructions. In the context of this document, a "computer-readable medium" can be any medium that can contain or store a program for use by or in connection with the instruction execution system, apparatus, or device. The computer readable medium can include, but is not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or device, portable magnetic disk (magnetic), random access memory (RAM) (magnetic), Read-only memory (ROM) (magnetic), erasable programmable read-only memory (EPROM) (magnetic), portable optical disc (such as CD, CD-R, CD-RW, DVD, DVD-R or DVD) -RW), or flash memory (such as a compact flash card, a secure digital card, a USB memory device, a memory stick, and the like).
該韌體亦可在任何傳輸媒體內傳播以由一指令執行系統、裝置或器件使用或與之結合使用,該指令執行系統、裝置或器件諸如基於電腦之系統、含處理器之系統,或可自該指令執行系統、裝置或器件取得指令並執行該等指令的其他系統。在此文件之背景內容中,「傳輸媒體」可為可傳達、傳播或傳輸程式以由該指令執行系統、裝置或器件使用或與之結合使用的任何媒體。該傳輸可讀媒體可包括(但不限於)電子、磁性、光學、電磁或紅外線有線或無線傳播媒體。The firmware may also be propagated in any transmission medium for use by or in connection with an instruction execution system, apparatus or device, such as a computer-based system, a processor-containing system, or Other systems from which the instruction execution system, device, or device takes instructions and executes the instructions. In the context of this document, "transmission medium" can be any medium that can communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device. The transmission readable medium can include, but is not limited to, an electronic, magnetic, optical, electromagnetic or infrared wired or wireless communication medium.
因此,在一些實施例中,揭示一種用於將一薄膜轉移至一基板之方法,該方法包含:在一製造薄片上提供一可撓性轉移組塊,該可撓性轉移組塊包含置放於該製造薄片上之一可撓性層、形成於該可撓性層之頂部上的一經圖案化單層薄膜,及黏附於該經圖案化單層之頂部上的一轉移層;自該可撓性層移除該製造薄片;將該可撓性轉移組塊轉移至具有一大體上非平坦表面之一基板,使該可撓性層相鄰於該基板;及自該經圖案化單層移除該轉移層。Accordingly, in some embodiments, a method for transferring a film to a substrate is disclosed, the method comprising: providing a flexible transfer block on a manufacturing sheet, the flexible transfer block comprising the placement a flexible layer on the sheet, a patterned single layer film formed on top of the flexible layer, and a transfer layer adhered to the top of the patterned single layer; The flexible layer removes the manufactured sheet; transferring the flexible transfer block to a substrate having a substantially non-planar surface, the flexible layer being adjacent to the substrate; and from the patterned single layer Remove the transfer layer.
在該大體上非平坦表面為一彎曲表面的一些實施例中,該可撓性轉移組塊係轉移至該基板之該彎曲表面以與之一致。In some embodiments where the substantially non-planar surface is a curved surface, the flexible transfer block is transferred to the curved surface of the substrate to conform thereto.
在該大體上非平坦表面為一與一大體上平坦表面相對之彎曲表面的一些實施例中,該可撓性轉移組塊係轉移至該基板之該大體上平坦表面。In some embodiments where the substantially non-planar surface is a curved surface opposite a generally planar surface, the flexible transfer block is transferred to the substantially planar surface of the substrate.
在該基板可變形以便形成大體上非平坦表面的一些實施例中,該可撓性轉移組塊隨該基板變形以便與該基板之該可變形大體上非平坦表面一致。In some embodiments in which the substrate is deformable to form a substantially non-planar surface, the flexible transfer block is deformed with the substrate to conform to the deformable substantially non-planar surface of the substrate.
在該基板為可撓性以便形成大體上非平坦表面的一些實施例中,該可撓性轉移組塊隨該基板撓曲以便與該基板之該可撓性大體上非平坦表面一致。In some embodiments in which the substrate is flexible to form a substantially non-planar surface, the flexible transfer block flexes with the substrate to conform to the flexible substantially non-planar surface of the substrate.
在一些實施例中,揭示一種用於將一薄膜轉移至一基板之方法,該方法包含:形成一薄膜組塊,其具有形成於一製造薄片上之一基底層、在該基底層上形成一圖案之一單層薄膜,及黏附於該經圖案化單層之頂部上的一臨時層;將該薄膜組塊切割成較小組塊,每一較小組塊具有該製造薄片之一部分、該基底層之形成於該透明薄片之該部分上的一部分、該單層薄膜之在該基底層之該部分上形成一圖案的一部分,及該臨時層之黏附於該經圖案化單層之該部分之頂部上的一部分;及針對每一較小組塊,將該製造薄片之該部分自該基底層之該部分移除,將該基底層、該經圖案化單層及該臨時層之組合部分施加至一防護玻璃罩之一表面,該基底層之該部分黏附至該防護玻璃罩之該表面,及自該經圖案化單層之該部分移除該臨時層之該部分。In some embodiments, a method for transferring a film to a substrate is disclosed, the method comprising: forming a film block having a substrate layer formed on a fabrication sheet, forming a layer on the substrate layer a single layer film of a pattern, and a temporary layer adhered to the top of the patterned single layer; the film block is cut into smaller blocks, each smaller block having a portion of the manufactured sheet, the substrate layer a portion of the single layer of film formed on the portion of the substrate, a portion of the pattern formed on the portion of the substrate layer, and a portion of the temporary layer adhered to the portion of the patterned layer a portion of the upper portion; and for each of the smaller chunks, the portion of the fabricated sheet is removed from the portion of the base layer, and the combined portion of the base layer, the patterned single layer, and the temporary layer is applied to A surface of the cover glass, the portion of the base layer adhered to the surface of the cover glass, and the portion of the temporary layer is removed from the portion of the patterned single layer.
在一些實施例中,該方法進一步包含:針對每一較小組塊,在移除該臨時層之該部分後將一撓性電路附接至該經圖案化單層之該部分。In some embodiments, the method further comprises, for each smaller chunk, attaching a flex circuit to the portion of the patterned monolayer after removing the portion of the temporary layer.
在一些實施例中,該方法進一步包含:針對每一較小組塊,在移除該臨時層之該部分後將一抗反射層施加至該經圖案化單層之該部分。In some embodiments, the method further comprises, for each smaller chunk, applying an anti-reflective layer to the portion of the patterned monolayer after removing the portion of the temporary layer.
在一些實施例中,該防護玻璃罩具有一經組態以接收一接觸的前表面及一與該前表面相對之背表面,該背表面黏附至該基底層之該部分。In some embodiments, the cover glass has a front surface configured to receive a contact and a back surface opposite the front surface, the back surface being adhered to the portion of the base layer.
在一些實施例中,該防護玻璃罩及該基底層與該經圖案化單層之組合部分形成一觸敏器件。In some embodiments, the cover glass and the combined portion of the base layer and the patterned monolayer form a touch sensitive device.
在一些實施例中,在包括具有一觸控式表面之一感測器面板的一系統中,該觸控式表面具有經組態以接收一觸摸之一前側及與該前側相對的一背側,揭示一種用於將一薄膜轉移至該感測器面板之方法,該方法包含:將一基底層施加至一基板;將至少一單層薄膜圖案化至該基底層中,該至少一單層薄膜包含經組態以偵測該觸摸之導電材料;將一轉移層黏附於該至少一經圖案化單層之頂部上;自該基底層移除該基板;將該組合基底層、至少一經圖案化單層及轉移層轉移至該觸控式表面之該背側,其中將該基底層安置於該背側上且該轉移層經安置而距該背側最遠;及自該至少一經圖案化單層移除該轉移層。In some embodiments, in a system including a sensor panel having a touch surface, the touch surface has a front side configured to receive a touch and a back side opposite the front side A method for transferring a film to the sensor panel, the method comprising: applying a substrate layer to a substrate; patterning at least one single layer film into the substrate layer, the at least one single layer The film includes a conductive material configured to detect the touch; a transfer layer is adhered to the top of the at least one patterned single layer; the substrate is removed from the substrate layer; the combined substrate layer is at least patterned Transferring the single layer and the transfer layer to the back side of the touch surface, wherein the base layer is disposed on the back side and the transfer layer is disposed farthest from the back side; and from the at least one patterned single The layer removes the transfer layer.
在一些實施例中,圖案化該至少一單層薄膜包含:將一第一單層薄膜圖案化至該基底層上;將一介電材料置放於該第一經圖案化單層薄膜之頂部上;及在該介電材料之頂部上圖案化一第二單層薄膜,其中該轉移層係黏附於該第二經圖案化單層之頂部上。In some embodiments, patterning the at least one single layer film comprises: patterning a first single layer film onto the substrate layer; placing a dielectric material on top of the first patterned single layer film And patterning a second single layer film on top of the dielectric material, wherein the transfer layer is adhered to the top of the second patterned single layer.
在一些實施例中,圖案化該至少一單層薄膜包含:將一第一單層薄膜圖案化至該基底層上;及在該第一單層之頂部上圖案化一第二單層薄膜,其中該轉移層係黏附於該第二經圖案化單層之頂部上。In some embodiments, patterning the at least one single layer film comprises: patterning a first single layer film onto the substrate layer; and patterning a second single layer film on top of the first single layer, Wherein the transfer layer is adhered to the top of the second patterned single layer.
在一些實施例中,揭示一種包括一觸控式感測器面板之行動電話,該觸控式感測器面板包含:一觸控式表面,其具有一經組態以接收一觸摸之前側及一與該前側相對的背側;及複數個共平面單層觸控式感測器,其經組態以偵測該觸摸,該等觸控式感測器已製造於一轉移基板之一側上的一單層中且自該轉移基板之該一側轉移至該觸控式表面之該背側。In some embodiments, a mobile phone including a touch sensor panel is disclosed. The touch sensor panel includes: a touch surface having a configuration to receive a touch front side and a a back side opposite the front side; and a plurality of coplanar single-layer touch sensors configured to detect the touch, the touch sensors being fabricated on one side of a transfer substrate And moving from one side of the transfer substrate to the back side of the touch surface.
在一些實施例中,揭示一種包括一觸控式感測器面板之數位媒體播放器,該觸控式感測器面板包含:一觸控式表面,其具有一經組態以接收一觸摸之前側及一與該前側相對的背側;及複數個共平面單層觸控式感測器,其經組態以偵測該觸摸,該等觸控式感測器已製造於一轉移基板之一側上的一單層中且自該轉移基板之該一側轉移至該觸控式表面之該背側。In some embodiments, a digital media player including a touch sensor panel is disclosed. The touch sensor panel includes: a touch surface having a configuration configured to receive a touch front side And a back side opposite to the front side; and a plurality of coplanar single-layer touch sensors configured to detect the touch, the touch sensors being fabricated on one of the transfer substrates In a single layer on the side and from the side of the transfer substrate to the back side of the touch surface.
在一些實施例中,揭示一種包括一觸控式感測器面板之電腦,該觸控式感測器面板包含:一觸控式表面,其具有一經組態以接收一觸摸之前側及一與該前側相對的背側;及複數個共平面單層觸控式感測器,其經組態以偵測該觸摸,該等觸控式感測器已製造於一轉移基板之一側上的一單層中且自該轉移基板之該一側轉移至該觸控式表面之該背側。In some embodiments, a computer including a touch sensor panel is disclosed. The touch sensor panel includes: a touch surface having a configuration to receive a touch front side and a The opposite side of the front side; and a plurality of coplanar single-layer touch sensors configured to detect the touch, the touch sensors being fabricated on one side of a transfer substrate And transferring from one side of the transfer substrate to the back side of the touch surface.
儘管已參看附圖結合本發明之實施例來充分描述本發明,但應注意,各種改變及修改對於熟習此項技術者而言將變得顯而易見。此等改變及修改將被理解為包括於如藉由所附申請專利範圍界定的本發明之範疇內。Although the present invention has been fully described in connection with the embodiments of the present invention, it will be understood that Such changes and modifications are to be understood as included within the scope of the invention as defined by the appended claims.
105...薄片105. . . Thin slice
110...基底層110. . . Base layer
115...薄膜/經圖案化薄膜115. . . Film/patterned film
120...可移除式黏著劑120. . . Removable adhesive
125...轉移層125. . . Transfer layer
130...永久黏著劑130. . . Permanent adhesive
135...不透明材料135. . . Opaque material
140...基板140. . . Substrate
410...基底層410. . . Base layer
415...經圖案化之單層薄膜415. . . Patterned single layer film
430...永久黏著劑430. . . Permanent adhesive
440...彎曲基板440. . . Curved substrate
505...薄片505. . . Thin slice
510...基底層510. . . Base layer
515...薄膜/經圖案化薄膜515. . . Film/patterned film
520...可移除式黏著劑520. . . Removable adhesive
525...轉移層525. . . Transfer layer
530...永久黏著劑530. . . Permanent adhesive
535...不透明材料535. . . Opaque material
540...基板540. . . Substrate
545...分離層545. . . Separation layer
550...經圖案化薄膜550. . . Patterned film
724...觸控式感測器面板724. . . Touch sensor panel
730...顯示器730. . . monitor
736...例示性行動電話736. . . Exemplary mobile phone
740...例示性數位媒體播放器740. . . Exemplary digital media player
744...例示性個人電腦744. . . Exemplary personal computer
800...例示性計算系統800. . . Exemplary computing system
802...面板處理器802. . . Panel processor
804...周邊器件804. . . Peripheral device
806...面板子系統806. . . Panel subsystem
808...感測通道808. . . Sensing channel
810...通道掃描邏輯810. . . Channel scan logic
812...隨機存取記憶體(RAM)812. . . Random access memory (RAM)
814...驅動器邏輯814. . . Drive logic
815...電荷泵815. . . Charge pump
816...刺激信號816. . . Stimulus signal
824...觸控式感測器面板824. . . Touch sensor panel
826...圖像元素(像素)826. . . Image element (pixel)
828...主機處理器828. . . Host processor
830...顯示器件830. . . Display device
832...程式儲存器832. . . Program storage
圖1A說明根據本發明之實施例的具有一製造薄片之例示性薄膜組塊,其中一基底層在該薄片之表面上;1A illustrates an exemplary film block having a sheet formed thereon, wherein a substrate layer is on the surface of the sheet, in accordance with an embodiment of the present invention;
圖1B說明根據本發明之實施例的在該基底層之一表面上圖案化有一單層薄膜的圖1A中所示之例示性薄膜組塊;1B illustrates an exemplary thin film block of FIG. 1A patterned with a single layer of film on one surface of the substrate layer in accordance with an embodiment of the present invention;
圖1C說明根據本發明之實施例的具有一轉移層的圖1B中所示之例示性薄膜組塊,該轉移層藉由可移除式黏著劑黏附至該經圖案化之單層薄膜;1C illustrates an exemplary film block of FIG. 1B having a transfer layer adhered to the patterned single layer film by a removable adhesive, in accordance with an embodiment of the present invention;
圖1D說明根據本發明之實施例的該製造薄片自其移除的圖1C中所示之例示性薄膜組塊;1D illustrates an exemplary film block of FIG. 1C from which the fabricated sheet is removed, in accordance with an embodiment of the present invention;
圖1E說明根據本發明之實施例的具有圖1D中所示之例示性薄膜組塊的例示性基板,該例示性薄膜組塊轉移至該基板之一表面且藉由永久黏著劑黏附至該基板;1E illustrates an exemplary substrate having the exemplary film block illustrated in FIG. 1D transferred to a surface of the substrate and adhered to the substrate by a permanent adhesive, in accordance with an embodiment of the present invention. ;
圖1F說明根據本發明之實施例的該轉移層自該薄膜組塊移除的圖1E中所示之例示性基板及薄膜組塊;1F illustrates the exemplary substrate and film block of FIG. 1E removed from the film stack in accordance with an embodiment of the present invention;
圖2說明根據本發明之實施例的用於將薄膜轉移至基板的例示性方法;2 illustrates an exemplary method for transferring a film to a substrate in accordance with an embodiment of the present invention;
圖3說明根據本發明之實施例的用於將薄膜轉移至基板的另一例示性方法;3 illustrates another exemplary method for transferring a film to a substrate in accordance with an embodiment of the present invention;
圖4A說明根據本發明之實施例的具有一例示性薄膜組塊的例示性彎曲基板,該例示性薄膜組塊轉移至該基板之一凹入表面且藉由永久黏著劑黏附至該基板;4A illustrates an exemplary curved substrate having an exemplary film block transferred to a concave surface of the substrate and adhered to the substrate by a permanent adhesive, in accordance with an embodiment of the present invention;
圖4B說明根據本發明之實施例的具有一例示性薄膜組塊的例示性彎曲基板,該例示性薄膜組塊轉移至該基板之一凸起表面且藉由永久黏著劑黏附至該基板;4B illustrates an exemplary curved substrate having an exemplary film block transferred to a raised surface of the substrate and adhered to the substrate by a permanent adhesive, in accordance with an embodiment of the present invention;
圖4C說明根據本發明之實施例的具有一凸起表面及一平坦表面的例示性基板,其中一例示性薄膜組塊轉移至該基板之該平坦表面且藉由永久黏著劑黏附至該基板;4C illustrates an exemplary substrate having a raised surface and a flat surface, wherein an exemplary film stack is transferred to the planar surface of the substrate and adhered to the substrate by a permanent adhesive, in accordance with an embodiment of the present invention;
圖4D說明根據本發明之實施例的具有一凹入表面及一平坦表面的例示性基板,其中一例示性薄膜組塊轉移至該基板之該平坦表面且藉由永久黏著劑黏附至該基板;4D illustrates an exemplary substrate having a recessed surface and a flat surface, wherein an exemplary film stack is transferred to the planar surface of the substrate and adhered to the substrate by a permanent adhesive, in accordance with an embodiment of the present invention;
圖5A說明根據本發明之實施例的具有一製造薄片之例示性薄膜組塊,其中一基底層在該薄片之表面上;5A illustrates an exemplary film block having a sheet for making a substrate layer on the surface of the sheet in accordance with an embodiment of the present invention;
圖5B說明根據本發明之實施例的在該基底層之一表面上圖案化有兩個隔開之單層薄膜的圖5A中所示之例示性薄膜組塊;5B illustrates an exemplary thin film block of FIG. 5A patterned with two spaced apart single layer films on one surface of the substrate layer in accordance with an embodiment of the present invention;
圖5C說明根據本發明之實施例的具有一轉移層的圖5B中所示之例示性薄膜組塊,該轉移層藉由可移除式黏著劑黏附至該等經圖案化之單層薄膜中之最外層;5C illustrates an exemplary film block of FIG. 5B having a transfer layer adhered to the patterned single layer film by a removable adhesive, in accordance with an embodiment of the present invention. Outermost layer;
圖5D說明根據本發明之實施例的該製造薄片自其移除的圖5C中所示之例示性薄膜組塊;Figure 5D illustrates an exemplary film block of Figure 5C from which the fabricated sheet is removed, in accordance with an embodiment of the present invention;
圖5E說明根據本發明之實施例的具有圖5D中所示之例示性薄膜組塊的例示性基板,該例示性薄膜組塊轉移至該基板之一表面且藉由永久黏著劑黏附至該基板;5E illustrates an exemplary substrate having the exemplary film block of FIG. 5D transferred to a surface of the substrate and adhered to the substrate by a permanent adhesive, in accordance with an embodiment of the present invention. ;
圖5F說明根據本發明之實施例的該轉移層自該薄膜組塊移除的圖5E中所示之例示性基板及薄膜組塊;Figure 5F illustrates the exemplary substrate and film block of Figure 5E removed from the film stack in accordance with an embodiment of the present invention;
圖6說明根據本發明之實施例的用於將薄膜轉移至一基板的另一例示性方法;6 illustrates another exemplary method for transferring a film to a substrate in accordance with an embodiment of the present invention;
圖7A說明根據本發明之實施例的具有一觸控式感測器面板的例示性行動電話,該觸控式感測器面板包括一轉移至其上的薄膜;7A illustrates an exemplary mobile phone having a touch sensor panel including a film transferred thereto, in accordance with an embodiment of the present invention;
圖7B說明根據本發明之實施例的具有一觸控式感測器面板的例示性數位媒體播放器,該觸控式感測器面板包括一轉移至其上的薄膜;7B illustrates an exemplary digital media player having a touch sensor panel including a film transferred thereto, in accordance with an embodiment of the present invention;
圖7C說明根據本發明之實施例的具有一觸控式感測器面板的例示性電腦,該觸控式感測器面板包括一轉移至其上的薄膜;及7C illustrates an exemplary computer having a touch sensor panel including a film transferred thereto; and
圖8說明根據本發明之實施例的包括一觸控式感測器面板的例示性計算系統,該觸控式感測器面板利用一轉移至其上的薄膜。8 illustrates an exemplary computing system including a touch sensor panel utilizing a film transferred thereto in accordance with an embodiment of the present invention.
(無元件符號說明)(no component symbol description)
Claims (14)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/212,478 US20100066683A1 (en) | 2008-09-17 | 2008-09-17 | Method for Transferring Thin Film to Substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201026498A TW201026498A (en) | 2010-07-16 |
| TWI418462B true TWI418462B (en) | 2013-12-11 |
Family
ID=41435394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098131375A TWI418462B (en) | 2008-09-17 | 2009-09-17 | Method for transferring thin film to substrate |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20100066683A1 (en) |
| CN (1) | CN101676845A (en) |
| TW (1) | TWI418462B (en) |
| WO (1) | WO2010033609A2 (en) |
Families Citing this family (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010079551A1 (en) * | 2009-01-07 | 2010-07-15 | シャープ株式会社 | Touch panel device, manufacturing method therefor, and display device |
| US20100295793A1 (en) * | 2009-05-19 | 2010-11-25 | Sudharshan Srinivasan | Two stroke touch panel data entry system |
| US20100302200A1 (en) * | 2009-05-29 | 2010-12-02 | Delphi Technologies, Inc. | Capacitive touch panel having a non-planar touch surface |
| TWI393494B (en) | 2010-06-11 | 2013-04-11 | 欣興電子股份有限公司 | Substrate strip with wiring and manufacturing method thereof |
| CN102315202B (en) * | 2010-07-02 | 2016-03-09 | 欣兴电子股份有限公司 | Substrate strip with lines and manufacturing method thereof |
| KR20120065687A (en) * | 2010-12-13 | 2012-06-21 | 삼성모바일디스플레이주식회사 | Touch screen panel |
| KR20120072186A (en) * | 2010-12-23 | 2012-07-03 | 엘지이노텍 주식회사 | Touch panel and method for manufacturing electrode member |
| TWI434208B (en) | 2010-12-30 | 2014-04-11 | Au Optronics Corp | Capacitive touch display panel |
| US8693203B2 (en) | 2011-01-14 | 2014-04-08 | Harris Corporation | Method of making an electronic device having a liquid crystal polymer solder mask laminated to an interconnect layer stack and related devices |
| US8844125B2 (en) | 2011-01-14 | 2014-09-30 | Harris Corporation | Method of making an electronic device having a liquid crystal polymer solder mask and related devices |
| US8472207B2 (en) | 2011-01-14 | 2013-06-25 | Harris Corporation | Electronic device having liquid crystal polymer solder mask and outer sealing layers, and associated methods |
| US8867219B2 (en) | 2011-01-14 | 2014-10-21 | Harris Corporation | Method of transferring and electrically joining a high density multilevel thin film to a circuitized and flexible organic substrate and associated devices |
| KR101357592B1 (en) | 2011-09-28 | 2014-02-04 | 엘지이노텍 주식회사 | Touch-Window |
| CN103246410B (en) * | 2012-02-10 | 2016-04-06 | 瀚宇彩晶股份有限公司 | Manufacturing method of touch panel |
| JP5656922B2 (en) * | 2012-06-14 | 2015-01-21 | 日本写真印刷株式会社 | Method for manufacturing touch panel and film with conductive electrode |
| US8981230B2 (en) | 2012-07-24 | 2015-03-17 | Htc Corporation | Electronic apparatus and touch cover |
| KR101552994B1 (en) * | 2012-08-31 | 2015-09-15 | 엘지디스플레이 주식회사 | Organic Emitting Display Device and Method for Manufacturing the Same |
| CN103838442A (en) * | 2012-11-26 | 2014-06-04 | 比亚迪股份有限公司 | Capacitive screen and manufacturing method thereof |
| US10033029B2 (en) | 2012-11-27 | 2018-07-24 | Apple Inc. | Battery with increased energy density and method of manufacturing the same |
| US10211433B2 (en) | 2012-11-27 | 2019-02-19 | Apple Inc. | Battery packaging |
| US9711770B2 (en) | 2012-11-27 | 2017-07-18 | Apple Inc. | Laminar battery system |
| US8877558B2 (en) | 2013-02-07 | 2014-11-04 | Harris Corporation | Method for making electronic device with liquid crystal polymer and related devices |
| US9899661B2 (en) | 2013-03-13 | 2018-02-20 | Apple Inc. | Method to improve LiCoO2 morphology in thin film batteries |
| US9570775B2 (en) | 2013-03-15 | 2017-02-14 | Apple Inc. | Thin film transfer battery systems |
| US9601751B2 (en) | 2013-03-15 | 2017-03-21 | Apple Inc. | Annealing method for thin film electrodes |
| US9887403B2 (en) | 2013-03-15 | 2018-02-06 | Apple Inc. | Thin film encapsulation battery systems |
| US10141600B2 (en) * | 2013-03-15 | 2018-11-27 | Apple Inc. | Thin film pattern layer battery systems |
| US9293438B2 (en) | 2013-07-03 | 2016-03-22 | Harris Corporation | Method for making electronic device with cover layer with openings and related devices |
| CN105975126A (en) | 2013-09-29 | 2016-09-28 | 宸鸿科技(厦门)有限公司 | Touch panel and fabrication method therefor |
| WO2015043298A1 (en) * | 2013-09-29 | 2015-04-02 | 宸鸿科技(厦门)有限公司 | Touch panel |
| CN103870086B (en) * | 2014-03-12 | 2017-02-08 | 汕头超声显示器技术有限公司 | Manufacturing method of capacitive touch screen |
| CN103870015A (en) * | 2014-03-20 | 2014-06-18 | 汕头超声显示器技术有限公司 | Manufacturing method of capacitive touch screen |
| US10930915B2 (en) | 2014-09-02 | 2021-02-23 | Apple Inc. | Coupling tolerance accommodating contacts or leads for batteries |
| KR102267357B1 (en) | 2014-12-15 | 2021-06-21 | 삼성디스플레이 주식회사 | Touch sensor device |
| CN104503628A (en) * | 2015-01-15 | 2015-04-08 | 汕尾金泽科技有限公司 | Touch unit and preparation method thereof |
| KR101554304B1 (en) * | 2015-04-20 | 2015-09-18 | 한솔테크닉스(주) | Curved type rigid board and a Three-dimension antenna manufacturing method of using the same |
| CN106201080A (en) * | 2016-07-01 | 2016-12-07 | 信利光电股份有限公司 | A kind of curved touch screen and manufacture method and electronic equipment |
| CN105955549A (en) * | 2016-07-01 | 2016-09-21 | 信利光电股份有限公司 | Curved surface touch display module, manufacturing method thereof and electronic equipment |
| KR102146150B1 (en) | 2016-10-03 | 2020-08-19 | 김영수 | Apparatus of display having detachable pattern |
| TWI770110B (en) * | 2017-03-30 | 2022-07-11 | 日商日本碍子股份有限公司 | Temporary fixing method for temporarily fixing substrates and electronic components |
| CN109407869B (en) * | 2017-08-15 | 2021-11-09 | 京东方科技集团股份有限公司 | Touch structure, preparation method thereof and display device |
| CN108415604A (en) | 2018-03-20 | 2018-08-17 | 京东方科技集团股份有限公司 | The manufacturing method of touch-control display panel, touch-control display panel |
| CN111752415B (en) * | 2020-06-24 | 2024-01-19 | 京东方科技集团股份有限公司 | Touch module, preparation method thereof and display device |
| US11824220B2 (en) | 2020-09-03 | 2023-11-21 | Apple Inc. | Electronic device having a vented battery barrier |
| CN115685438A (en) * | 2022-10-28 | 2023-02-03 | 京东方科技集团股份有限公司 | Optical waveguide, preparation method and device thereof and vehicle |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW574753B (en) * | 2001-04-13 | 2004-02-01 | Sony Corp | Manufacturing method of thin film apparatus and semiconductor device |
| US20060088698A1 (en) * | 2004-10-21 | 2006-04-27 | Eastman Kodak Company | Polymeric conductor donor and transfer method |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5483261A (en) * | 1992-02-14 | 1996-01-09 | Itu Research, Inc. | Graphical input controller and method with rear screen image detection |
| US5880411A (en) * | 1992-06-08 | 1999-03-09 | Synaptics, Incorporated | Object position detector with edge motion feature and gesture recognition |
| US5488204A (en) * | 1992-06-08 | 1996-01-30 | Synaptics, Incorporated | Paintbrush stylus for capacitive touch sensor pad |
| US5391257A (en) * | 1993-12-10 | 1995-02-21 | Rockwell International Corporation | Method of transferring a thin film to an alternate substrate |
| KR0171092B1 (en) * | 1995-07-06 | 1999-05-01 | 구자홍 | Method of manufacturing substrate |
| US5825352A (en) * | 1996-01-04 | 1998-10-20 | Logitech, Inc. | Multiple fingers contact sensing method for emulating mouse buttons and mouse operations on a touch sensor pad |
| DE19619454A1 (en) * | 1996-05-14 | 1997-11-20 | Gut Ges Fuer Umwelttechnik Mbh | Reactor for doping fuels and fuels with tin-containing materials |
| US5835079A (en) * | 1996-06-13 | 1998-11-10 | International Business Machines Corporation | Virtual pointing device for touchscreens |
| EP0858110B1 (en) * | 1996-08-27 | 2006-12-13 | Seiko Epson Corporation | Separating method, method for transferring thin film device, and liquid crystal display device manufactured by using the transferring method |
| US6327011B2 (en) * | 1997-10-20 | 2001-12-04 | Lg Electronics, Inc. | Liquid crystal display device having thin glass substrate on which protective layer formed and method of making the same |
| US6310610B1 (en) * | 1997-12-04 | 2001-10-30 | Nortel Networks Limited | Intelligent touch display |
| US7663607B2 (en) * | 2004-05-06 | 2010-02-16 | Apple Inc. | Multipoint touchscreen |
| US8479122B2 (en) * | 2004-07-30 | 2013-07-02 | Apple Inc. | Gestures for touch sensitive input devices |
| KR100595924B1 (en) * | 1998-01-26 | 2006-07-05 | 웨인 웨스터만 | Method and apparatus for integrating manual input |
| US6188391B1 (en) * | 1998-07-09 | 2001-02-13 | Synaptics, Inc. | Two-layer capacitive touchpad and method of making same |
| JP2001210789A (en) * | 2000-01-21 | 2001-08-03 | Hitachi Ltd | Electronic circuit with built-in thin film capacitor and method of manufacturing the same |
| US6744425B2 (en) * | 2000-12-26 | 2004-06-01 | Bridgestone Corporation | Transparent electroconductive film |
| JP2003173237A (en) * | 2001-09-28 | 2003-06-20 | Ricoh Co Ltd | Information input / output system, program and storage medium |
| US6690387B2 (en) * | 2001-12-28 | 2004-02-10 | Koninklijke Philips Electronics N.V. | Touch-screen image scrolling system and method |
| US7183582B2 (en) * | 2002-05-29 | 2007-02-27 | Seiko Epson Coporation | Electro-optical device and method of manufacturing the same, element driving device and method of manufacturing the same, element substrate, and electronic apparatus |
| US11275405B2 (en) * | 2005-03-04 | 2022-03-15 | Apple Inc. | Multi-functional hand-held device |
| US6998327B2 (en) * | 2002-11-19 | 2006-02-14 | International Business Machines Corporation | Thin film transfer join process and multilevel thin film module |
| GB0327093D0 (en) * | 2003-11-21 | 2003-12-24 | Koninkl Philips Electronics Nv | Active matrix displays and other electronic devices having plastic substrates |
| JP4748351B2 (en) * | 2005-04-20 | 2011-08-17 | セイコーエプソン株式会社 | Thin film element manufacturing method |
| GB2428306B (en) * | 2005-07-08 | 2007-09-26 | Harald Philipp | Two-dimensional capacitive position sensor |
| US8264466B2 (en) * | 2006-03-31 | 2012-09-11 | 3M Innovative Properties Company | Touch screen having reduced visibility transparent conductor pattern |
| US8552989B2 (en) * | 2006-06-09 | 2013-10-08 | Apple Inc. | Integrated display and touch screen |
| JP4332174B2 (en) * | 2006-12-01 | 2009-09-16 | アルプス電気株式会社 | Input device and manufacturing method thereof |
-
2008
- 2008-09-17 US US12/212,478 patent/US20100066683A1/en not_active Abandoned
-
2009
- 2009-09-16 WO PCT/US2009/057178 patent/WO2010033609A2/en not_active Ceased
- 2009-09-17 CN CN200910174765A patent/CN101676845A/en active Pending
- 2009-09-17 TW TW098131375A patent/TWI418462B/en not_active IP Right Cessation
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW574753B (en) * | 2001-04-13 | 2004-02-01 | Sony Corp | Manufacturing method of thin film apparatus and semiconductor device |
| US20060088698A1 (en) * | 2004-10-21 | 2006-04-27 | Eastman Kodak Company | Polymeric conductor donor and transfer method |
Non-Patent Citations (1)
| Title |
|---|
| Asano, "Low-Temperature Polysilicon TFT color LCD Panel Made of Plastic Substrates," Digest of Technical Papers, 2002 SID international symposium, May 2001, Vol. 32, pages 1196 - 1199 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2010033609A3 (en) | 2011-05-12 |
| US20100066683A1 (en) | 2010-03-18 |
| TW201026498A (en) | 2010-07-16 |
| CN101676845A (en) | 2010-03-24 |
| WO2010033609A2 (en) | 2010-03-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI418462B (en) | Method for transferring thin film to substrate | |
| US9063605B2 (en) | Thin glass processing using a carrier | |
| CN102318054B (en) | Method for manufacturing thin touch sensor panel | |
| US9615448B2 (en) | Method for fabricating thin sheets of glass | |
| TWI430889B (en) | A method for fabricating touch sensor panels | |
| US8368661B2 (en) | Method for fabricating touch sensor panels | |
| JP4787364B2 (en) | Touch screen laminate | |
| CN101515212B (en) | Touch sensor panel and its manufacture method | |
| TWI442851B (en) | Curved touch sensor | |
| TWM406220U (en) | A laminate for fabricating a plurality of touch sensor panels | |
| CN103857640B (en) | For the chemical enhanced punching motherboard of part edge | |
| TWM443227U (en) | Touch panel | |
| HK1141102A (en) | Method for transferring thin film to substrate | |
| CN104571660A (en) | Touch structure and manufacturing method thereof | |
| CN103631407A (en) | Touch panel and manufacturing method thereof | |
| HK1167032B (en) | A method for fabricating touch sensor panels | |
| HK1166180B (en) | A method for fabricating thin touch sensor panels | |
| JP2013196412A (en) | Manufacturing method of touch panel |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |