TWI376691B - Recording medium, its manufacturing method, mother disc for recording medium, and its manufacturing method - Google Patents

Description

1376691 IX. Description of the Invention: The present invention relates to a recording medium and a method of manufacturing the same, a master for a recording medium, and a method of manufacturing the same. More specifically, the present invention relates to a recording medium having a first region in which a first trench is formed and a second region in which a second trench is formed. The present invention contains the subject matter related to the copending patent application JP 2007-161675, filed on Jun. 19, 2007, which is hereby incorporated by reference. [Prior Art] For one of the copyright protection technologies in DVD (Multi-Function Digital Disc) _R〇M (Read-Only Memory), Recording VD or 疋-like media, this technology is not recorded in 6 In the state of the slice, the binary information called the media ID and unique to the media is recorded in the innermost ring zone (burning

The area, hereinafter referred to as BCA), and the medium (1) is used to encrypt the content material to be recorded. In addition, in the same CD-ROM, such as a Blu-ray disc (registered trademark, hereinafter referred to as BD) or a similar disc, as disclosed in ρ_Α·厅_5 Delete 5 (Patent Document 1), It is proposed to record a type of bar code mark (hereinafter referred to as a weave mark) in the bca as a technique of binary information. In Patent Document 1, p _ is not the following technique: the crystal state of the phase change recording film is used with non-BCA Φ, ~, to record the BCA mark; the track gate formed in the groove or groove is made in The previous day 1 is a distance of 128886.doc 1376691 of the adjacent area is five times or more; the BC A mark is formed in the radial direction, thus traversing a plurality of tracks; and a similar technique. Further, the following technique is also disclosed: in the case of reproducing the BCA mark, a regenerative waveform obtained when the BCA mark is reproduced by the tracking servo control using the grooves is compared with the non-tracking servo A regenerative waveform obtained by controlling to regenerate the BCA mark is compared to detect a change in the BCA mark. In the state where the signal is recorded or reproduced, a laser beam spot is focused by a focus servo control on a signal surface. Up, and the obey will be accurately tracked by the tracking servo control. On the other hand, the BCA area also considers a technique that enables information to be read more easily in a state where the tracking servo control is not performed in accordance with the focus servo control and the tracking servo control is not performed. It is assumed that 'the grooves (that is, the tracks) are also formed in the BCA and a signal recording layer made of alloy, layer separation type, or the like is also connected to a lead-in area to form . Among the Be A having the signal recording layer described above after formation, the BCA mark can be formed in the following manner. For example, at the manufacturing stage, in the initial state, the signal recording layer is in an unrecorded state. For example, in the case of a data area, the recording is performed by irradiating a laser beam based on a blue high power laser over the entire area. In the BCA, for example, the BCa marks are formed by irradiating the laser beam only to the desired portion in the circumferential direction in accordance with the bar code pattern corresponding to the content of a disc ID. By the above steps, according to a picture 128886.doc 1376691, a piece of information in the form of a code having a strip-like portion in the unrecorded state and a recorded state in the recording state is recorded. Strip part. Fig. 1 is an example of a reproduced signal waveform of a BCA mark of BD (in this case, tracking servo control is not performed). In the unrecorded state, a high level of the reproduced signal IH is obtained because of the high reflection coefficient. In the • Recording state, because of the low reflection coefficient, a low level of the reproduced signal IL is obtained. • [Invention] However, in a high-density optical disc, such as a BD in the related art, when the servo control is not performed, the regenerated laser beam passes through a plurality of grooves and the BCA mark is taken, and the signal is taken. It will be modulated by the diffraction caused by the grooves. Therefore, as shown in FIG. 1, the problem is that due to the crosstalk of the groove signal, a level shift will be caused in the reproduced signal of the BCA mark and the signal regeneration of the BCA mark will become quite stable. For example, in the BD standard, in order to stably regenerate the BCA mark, β has specified the ratio of the low level IL of the k number to the high level IH obtained after the reproduced signal of the BCA mark passes the LpF. Equal to less than 0.5. As shown in Fig. 1, when the level shift is large, the ratio between the minimum level IHmin of the high level and the maximum value ILmaXi of the low level is difficult to satisfy the above standard value. Accordingly, the present invention is intended to provide a recording medium capable of stably reproducing binary information previously recorded in a predetermined area, and providing a method of manufacturing the recording medium for a master of the recording medium and the master 128886.doc 1376691 Method of manufacture. According to an embodiment of the present invention, a recording medium is provided, comprising: a substrate having a first region in which a first trench is formed and a second region in which a second trench is formed; At least one information device is disposed on the substrate; and a protective layer is disposed on the information layer

The first-order partial information has been recorded on the first trench first, and the first trench is shallower or narrower than the second trench. According to another embodiment of the present invention, there is provided a method comprising the steps of: transferring a shape of a face to a resin material to form a substrate by transferring a stamper;

Forming an information layer on the substrate; forming a protective layer on the information layer and t' the stamping template having a first stamping template trench-first trench, and the first region of the substrate Forming a second stamper trench and a second trench, and forming a second region of the substrate at or narrower than the first embodiment, providing a two-press template trench. The first die plate groove for recording medium is further according to the present invention, which further comprises: 128886.doc a first zone in which a -th-groove has been formed; and a second zone, Wherein the second trench has been formed, wherein the first trench in the first region is shallower or narrower than the second trench in the second region. According to still another embodiment of the present invention, a method for manufacturing a master for a recording medium includes the steps of: forming a resin layer on a substrate; by exposing a region in the first region of the substrate a resin layer to form a first trench pattern; a second trench pattern formed by exposing a resin layer in a second region of the substrate; and developing the exposed resin layer, wherein the first layer is formed The power of the exposure beam of the trench pattern is less than the power of the exposure beam used to form the first trench pattern. According to a specific embodiment of the present invention, since the first trench formed in the first region is shallower or narrower than the second trench formed in the second region t, the signal can be reduced in the first region The phenomenon of the diffraction caused by the first groove in the middle is modulated. That is, '彳 to reduce the level shift caused by the reproduced signal of the binary information of the first zone. As described above, according to a specific embodiment of the present invention, since the first groove formed in the first region is shallower or narrower than the second groove formed in the second region, the formation of the 彳S number can be reduced. The diffraction generated by the first trench in the first region and the binary information can be preferably reproduced. Other features of the present invention will be apparent from the following description, taken in conjunction with the accompanying drawings, in which the same reference numerals refer to the same or identical parts throughout the drawings. [Embodiment] Hereinafter, specific embodiments of the present invention will be described with reference to the drawings. (1) First embodiment - G·1) Configuration of optical disc - Fig. 2 shows an example of a disc construction according to the first embodiment of the present invention. For example, the optical disc is a w RM (write once) type optical disc • and in its configuration, the information recording layer 2 and a cover layer 3 are sequentially stacked on the substrate 1, as shown in FIG. Shown. 3 is an example of a region set on the optical disk in accordance with the first embodiment of the present invention. The disc has a disk shape with an opening at the center. As shown in Fig. 3, a BCA n, a pic (control data of the disc) area (not shown), and a data recording area 13 are disposed on the optical disc from the inner ring side toward the outer ring side. The information signal recording and reproduction of the optical disc is performed by irradiating a laser beam from the cover layer 3 side to the information recording layer 2. For example, a laser beam having a wavelength of 400 nm to 410 nm is collected by an objective lens 10 having a numerical aperture of g.g4 to 〇.86 and irradiated from the side of the cover layer 3 to the information recording layer 2 to perform an information signal. Record or regenerate. For example, BD R can be described as this disc. Next, the substrate 1' information recording layer 2 and the cover layer 3 constituting the optical disk will be described in order. (Substrate) 128886.doc 1376691 The substrate 1 has a ring shape with a core hole at the center. A principal plane of the substrate 系 is a concave/convex surface, and (subsidiary = 2) soil is formed as a film on the concave/convex surface. Below, in the concave/convex surface, away from the laser beam The concave portion of the plane s is referred to as an inner groove core, and the convex portion of the concave/convex surface near the incident plane s of the laser beam is referred to as an outer groove G 〇 n. The convex outer groove of the BCA u provided for the substrate 1 The groove G〇n is an example of the first groove. The convex outer groove Gon of the data recording area 13 provided for the substrate is an example of the second groove. For example, the concave inner groove Gin and For the shape of the convex outer groove Q〇n, various shapes may be mentioned herein, for example, a spiral concentric shape, and the like. The inner groove Gin and/or the outer groove G〇n may oscillate, For the purpose of adding address information, from the viewpoint of preferably reproducing a code signal, the outer groove G〇n of the BCA 111 may desirably have a v-shape. The width d of the outer groove Gon of the BCA 11 is narrower than the data recording area 13 The width d of the middle and outer trench Gon and/or the depth of the outer trench Gon in the BCA 11 (the height is shallower than (below) the outer trench G in the data recording region 13 Depth of 〇n (height) h ^ The distance between adjacent outer grooves Gem in BCA 11 , that is, the track pitch Tp, may be different from the distance between adjacent outer grooves Gon in the data recording area 13. BCA The track pitch τ 111 111 is wider than the track pitch Tp in the data recording area 13. According to the above configuration, the phenomenon that the BCA signal is modulated by the diffraction of the outer groove Q 〇 n can be reduced. That is, the BCA mark can be reduced. The level shift in the regenerative signal, in other words, can improve the contrast value IH/IL. In BCA 11, the 'best line' is the phase depth λ/αη of the outer trench G〇n (where 'λ: for recording or The wavelength of the regenerated laser beam; α: 128886.doc 12 1376691 groove depth coefficient; η: the refractive index of the cover layer for the laser beam used for recording or reproduction) is from λ/296.8η In the range of λ/16.0η, a more preferable system falls within the range from λ/296.8η to λ/63·6η. This is because by setting the phase depth to a value within this range, Improved contrast value IH/IL. In BCA 11, the preferred system, the depth of the outer trench G〇n is from 0.9 nm to 16.7 nm. In the range, the better system ' falls within the range from 〇9 1^ to 4.2 nm. This is because the contrast value IH/IL can be improved by setting the depth to a value within this range. Preferably, the width d of the outer trench G〇n falls within a range from 55 rrni to 126 nm, and more preferably falls within a range of 55 ηπ^95 nm. The contrast value IH/IL can be improved by setting the value of the width within this range. In the BCA 11, preferably, the ratio (d/Tp) of the width d of the outer groove G〇n to the track pitch Tp falls within a range from 0.0275 to 0.063, and more preferably In the range of 0.0275 to 0.0475. This is because the comparison value IH/IL can be improved by setting the ratio to a value within this range. The width d of the outer groove Gon is equal to the maximum width dlmax of the width d1 of the outer groove Gon on the side of the incident plane S of the laser beam and the width d2 of the side of the bottom portion of the outer groove Gon opposite to the side of the incident plane S. The average value of the minimum width d2min (dlmax + d2min) / 2. Mm For example, 'the diameter of the substrate 1 will be 12 〇mm ^ The thickness of the substrate 1 is preferably selected to fall within a range from 0.3 mrn or more to i_3 mm or less; if considering the rigidity In the case of a better system, it falls within the range of 0.6 128886.doc or more to 1.3 mm or less. For example, the thickness of the substrate i is selected to be 1.1 mm. For example, the diameter of the center hole will be chosen to be 15 mm. For example, although a resin material (for example, a polycarbonate resin, a polyolefin resin, an acrylic resin, or the like) or glass may be used as the material of the substrate 1; however, a preferred system is used. Cost or similar factors are considered resin materials. Specifically, for example, ZEONEX or polycarbonate (PC) (refractive index: 1 59) can be used as the resin material. As for the method of forming the substrate 1, a method capable of achieving the shape and smoothness of the surface of the substrate having sufficient optical properties can be used, and it is not particularly limited. For example, an injection molding method (ejection method) or a photopolymer method using a UV-curable resin (21> method: photopolymerization) can be used. According to the injection molding method, a formed master stamper template is arranged in a die cavity for fabricating a disc substrate, and a transparent resin (for example, polycarbonate or the like) is ejected, and A concave/convex shape of the mother stamper template is transferred onto the resin to fabricate the substrate 1. (Data Recording Layer) For example, the material recording layer 2 has at least one inorganic recording film. For example, the inorganic s recording film is a WORM type inorganic recording film. For example, as far as the type of the inorganic recording film is concerned, a phase change type, an alloy type, or the like may be mentioned herein. For example, in the case of a phase change type inorganic recording film, recording ruthenium made of ruthenium (Te), palladium (Pd), and oxygen may be used. For example, in the case of an alloy type inorganic recording film, a recording film made by laminating a 128886.doc 1376691 矽 (Si) film and a copper (Cu) alloy film may be used. The first example of the information recording layer 2 shown in FIG. The information recording layer 2 is formed by sequentially laminating an inorganic recording film 2 and a dielectric film on the substrate 1. Formed. The inorganic recording film 21 includes a first recording film 23 and a second recording film 2b which are sequentially laminated on the concave/convex surface of the substrate. The first recording film 2a is provided on the concave/convex surface side of the substrate i. The second recording film is placed on the side of the dielectric film 2 . For example, the first recording film 2a contains titanium Ti as a main component. Preferably, the first recording film 2& contains a metal having a low thermal conductivity such as manganese (Mn), zirconium (Zr), hafnium (Hf), or the like as a power edge improvement. additive. In terms of power margin improvement, the content of the low thermal conductivity metal is preferably equal to 1 to 4% by atom; more preferably, from 2 to 30. / atomic percentage of 〇; and further preferred system, to swim. Atomic percentage. Also preferably, the first recording film 2a contains a small amount of nitrogen (Ν) β. The film thickness of the first recording film 2a is preferably 1 〇 to 5 〇 nm, from the viewpoint of recording sensitivity adjustment.

For example, the second recording film 2b contains an oxide of germanium (Ge) as a main component. The oxide content of germanium (Ge) in the second recording film 2b is preferably equal to "the atomic percentage of up to 97 Å/〇; the atomic percentage of (10) to 97% is more preferable; and the atomic percentage of 90 to 95% is the most Also preferably, the second recording film 2b contains tin (tetra) as an additive from the viewpoint of improvement in durability. The tin (Sn) content in the second recording film 2b is equal to 3 to 12 Å. The percentage is better; the atomic percentage is preferably from 3 to 10%; and the atomic percentage is from 5 to 5. This is because the tin (Sn) content is equal to or greater than the original 128886.doc -15·1376691 percentage. Excellent durability is achieved; and if the tin (Sn) content is equal to less than 12% by atomic percentage, excellent signal characteristics can be achieved. If the first recording film 2a contains titanium Ti as a main component and the second recording film 2b contains bismuth ( The oxide of Ge) as a main component can basically achieve good recording characteristics.

The absorption coefficient k of the second recording film 2b falls from O b or more to 0.90 or less from the viewpoints of the degree of modulation and the carrier noise ratio (hereinafter referred to as C/N ratio) or the like. The range is preferably in the range of from 〇2〇 or more to 0.70 or less; and further preferably in the range of from 〇25 or more to 0.60 or less. The film thickness of the second recording film is preferably equal to 10 to 35 nm. The absorption coefficient in this specification is measured at a wavelength of 41 〇 nm. The absorption coefficient k can be obtained by an ellipsometer (manufactured by Rud〇iph c〇, Ud; trade name Auto EL-462P17) by the following method. The tangential enthalpy is measured by the ellipsometer, which is derived from the phase angle of an elliptically polarized light:

And the amplitude intensity ratio of an ellipse IB is obtained. The complex refractive index N and the absorption coefficient are obtained from the film thickness obtained by a surface profile measuring instrument (manufactured by T_r c., Ud; the commercial furnace name is IM5). (4) Use (4) Use this: The least square method in the commercial accessory analysis software of the round meter or a similar method is used. The dielectric film 2c is disposed on the edge of the flawless recording film 2 and is used for optically and mechanically protecting the inorganic recording film 2, that is, & good durability and: suppressing deformation, that is, recording mode The embossing of the inorganic recording film 2, and the like. As for the material of the dielectric film 2c, for example, 128, 886. Preferably, ZnS Si〇2 is used. This is because the s/N ratio of the recorded signal is improved and excellent signal characteristics can be obtained. The thickness of the dielectric film (4) is preferably 10 to 100 nm. A second example of the information recording layer 2 shown in FIG. The information recording layer 2 is formed by sequentially laminating a reflective film 2a, a dielectric film 2b, an inorganic recording film 2c, and a dielectric film 2d on the substrate 1.

As the material for forming the dielectric films 2b' and 2d, for example, SiN, ZnS-Si〇2, A1N, Al2〇3, scz, or the like can be used. Preferably, ZnS_Si〇2 is used. For example, the inorganic recording film. Contains Sb_Zn_s_Si〇2 as the main component. For example, in terms of the material forming the reflective film 2a, a simple substance such as Ag, AU, Ni, Cr, Ti, Pd, Co,

Si, Ta, W, Mo, Ge, or the like, or an alloy containing them is the main force. In terms of practicality, specifically, among them, a material of the A1 system, the Ag system, the Au system, the Si system, and the & For example, it is preferred to use A1_Ti, Al_Cr, Al_Cu, (1), Ag_Pd_Cu 'Ag_pd_Ti, Si_B, or the like as the alloy. Preferably, optical and thermal features are contemplated to provide a plurality of materials for the materials. For example, consideration is given to the fact that there is still high reflectivity in the short-wavelength region, and it is preferred to use an A1-based or Ag-based material. (Cover Layer) The cover layer 3 is disposed above the information recording layer 2. The cover layer 3 is formed to protect the information recording layer 2 or the like layer 128886.doc 17 1376691. For example, the recording and reproduction of the information signal is performed by concentrating the laser beam on the information recording layer 2 via the cover layer 3. For example, the cover layer 3 is a resin coating type or a sheet-adhesive type cover resin coating type cover layer 3, which is a cover layer 3 which is formed by a resin coating method. The cover layer 3 of the sheet-adhesive type refers to the cover layer 3 which is formed by the sheet adhesion method. The resin coating method and the sheet bonding method will be described below. The thickness of the cover layer 3 is preferably selected from the range of 1 〇 to 177 and, for example, 100 μηη. High density recording can be achieved by combining this thin cover layer 3 with an objective lens having a high ΝΑ (numerical aperture) (about 85). For example, the diameter (diameter) of the cover layer 3 is set to 22 7 mm. The resin coating type cover layer 3 is a resin cover layer composed of a light-sensitive resin (for example, a UV resin or the like). For example, the film-adhesive cover layer 3 is formed by an annular light transmissive sheet and an adhesive layer for adhering the light transmissive sheet to the substrate crucible. For example, the adhesive layer is made of uv resin or pressure sensitive adhesive (hereinafter referred to as PSA). Preferably, the thickness of the light transmissive sheet is equal to 〇3 or smaller' and the more preferred ' is equal to 3 to 丨77 pm, for example, 8 〇 μπι. For example, the thickness of the adhesive layer is equal to 2 Å. Preferably, the light transmissive sheet and the resin cover layer are made of a material having low absorption efficiency for a laser beam for recording and reproduction. Specifically, the preferred system is made of a material having a transmission coefficient equal to greater than 9 Å/0. As the material of the light-transmitting sheet, for example, a polycarbonate resin, a polyolefin resin (for example, ζΕ〇ΝΕχ128886.doc 1376691 (registered trademark)), or the like may be mentioned herein. Material ◊ In terms of the material of the resin cap layer, for example, an ultraviolet light curing type acrylic resin may be mentioned herein. (Each area of the optical disc) Hereinafter, the BCA 11, the PIC area 12, and the material recording area 13 which are disposed on the optical disc according to the first embodiment of the present invention will be explained. The diagram concept shows an example of a groove layout of the information recording layer 2 on the optical disk according to the first embodiment of the present invention. Here, a case where the outer groove G〇n becomes a track for recording data will be described as an example. In FIG. 6, for the sake of simplifying the drawing, it is assumed that the width of the outer groove Gon disposed in each of the BCA 11 and the PIC area 12 is almost equal to the width of the outer groove Gon disposed in the material recording area 13. . However, as mentioned above, the width d of the outer trench Gon disposed in the bCa 11 may be set to be narrower than the width d of the outer trench Gon disposed in each of the pic region 12 and the data recording region 13. . A groove layout with a track pitch of 2 〇〇〇 mm is formed in the BCA 11 on the innermost ring side. A wobble groove layout with a track pitch of 35 〇 nm is formed in the PIC area 12 outside the BCA 11. Further, a wobble groove having a track pitch of 320 nm is formed in the material recording area 13 outside the PICg 12. A groove formed in each of the regions is formed on the surface of the substrate so as to be located in a spiral. A track pitch transition region (not shown) is arranged between the regions where the track pitch is changed to switch the track pitch. The BCA 11 series is set in the range of the radius r (= 21.3 mm to 22.0 mm). The grooved tracks are formed in the BCA 11. The lane spacing is equal to 2000 nm and shows a sufficiently wide spacing. A 3CA mark 14 will be recorded 128886.doc •19· in the BCA 11. The 8 (8 mark) is a bar code data of a binary information, which is used to indicate a serial number, a batch number, or the like. For the information specific to the light, the BC A mark 14 is used for copyright protection. The BC A mark 14 is formed in such a manner that each of the plurality of strip marks extends in the radial direction so as to traverse a plurality of grooves formed in the BCA 11 on a circumference of the disc. The BC A mark 14 is recorded after the optical disk is manufactured. In the initial state of the optical disk, the information recording layer is in an unrecorded state. The information recording layer is formed by the laser beam. Only the illumination is corresponding to the desired portion (the oblique portion in Fig. 6) of the BCA mark 14 and is set to the recorded state. Since the result of this step will be based on bc A 11 of the information recording layer 2 A pattern records information in the form of a code having a strip portion having a desired width in the circumferential direction and a strip portion in an unrecorded state. The PIC area 12 is a read only District and system set in half In the range of r (= 22 4 „1111 to 23.197 mm), a plurality of trenches including a rectangular wobble groove layout are formed in the PIC area 12, and the track pitch is 35 〇 information will swing from the rectangles Reproduction in the groove layout. The data recording area 13 is set in the range of the radius r (= 23.2 mm to 58.5 mm). A plurality of sinusoidal wobble grooves are formed in the data recording area 13. The track pitch is equal to 320 nm. Since it is desirable to narrow the track pitch to obtain a large capacity', this will result in longer recording and reproduction. The data will actually be recorded in an area on the peripheral side of the radius r (= 24.0 mm). A control signal is used to form a trench adapted to each zone I28886.doc • 20· 1376691. In the case where the Dc trenches are formed in the BCA 11, the control signal is a direct current (DC) signal. In the case where the rectangular wobble grooves are formed in the PIC area 12, the control signal is a bi-phase modulated rectangular signal. In the case where the wobble grooves are formed in the data recording area 13, the use is performed. a pair of multiplexed signals 956 [kHz] MSK (minimum offset key) and a stw (saw tooth swing). The multiplex signal composed of MSK and STW will record the swing information of the address. The multiplex swing composed of MSK and STW The reason for the signal is as follows. In the case of the MSK system, although an excellent S/N ratio (signal-to-noise ratio) is obtained, the problem is that 'when the wobble shift occurs, it is difficult to detect the address. In the case of STW In the middle, it is able to resist the wobble offset and detect the address without significant deterioration. Therefore, the address can be surely obtained by combining them. In the overwrite type BD-RE (overwriteable Blu-ray disc) In the disc, a total of 56 wobbles are used to represent the one-digit "〇" or "丨". The 56 wobbles are grouped into one unit and are referred to as an ADIP (pre-groove intermediate address) unit. By continuously reading 83 ADIP units, an Amp group for displaying an address is formed. The ADIP block contains address information of 24-bit length, auxiliary data of 12-bit length, a reference (correction) area, error correction data, and the like. In BD_RE, each RUB (recording unit block, which is a unit of 64k bytes) is assigned to three ADIp blocks for recording master data. (1 _2) Manufacturing Method of Optical Disc Next, an example of a manufacturing method of the 128886.doc 21 optical disc having the above-mentioned configuration will be described with reference to Figs. 7A to 8E. (Manufacturing Step of Mother Sheet for Optical Disc) First, as shown in Fig. 7A, a dish (disc) substrate 41 is prepared. For example, the substrate 41 is a quartz substrate, a Si substrate, or the like. Next, as shown in Fig. 7B, a photoresist layer 42 is formed on the surface of the substrate 41. The photoresist layer 42 is made of an organic photoresist or an inorganic photoresist. For the organic photoresist, for example, a gradual photoresist, a chemically strengthened photoresist, or the like can be used. In the case of inorganic photoresist, for example, an incomplete oxide of a transition metal can be used. In the case of transition metals, for example, Ti, V, Cr, Mn, Fe, Nb, Cu,

Ni, Co, Mo, Ta, w, Zr, Ru, Ag, or a similar metal. Among us, the preferred system uses M〇, w'Cr, Fe, or Mb. From the viewpoint of achieving a large chemical change due to the relationship between visible light or ultraviolet light, M 〇 4 w is preferably used. Not only one of the transition metals but also two or more of them may be used. Next, the substrate 41 is placed on the turntable of a cutting device (not shown) and the substrate 41 is simultaneously rotated, and an exposure beam is moved from the center of the substrate 4 to the outer circumferential side. Therefore, as shown in FIG. 7C, a latent image "a." is formed on the entire surface of the photoresist layer 根据 according to the illumination trajectory of the exposure beam. Line ', will be ΜΑ丄1. The force rate ° is again less than the cutting power in the data recording area 13. 3. Clearly the preferred line 'BCA 11 cutting power falls from 1 50% to 100% Within the range; a better system, falling within the range from 1% to 12%. Next, the substrate 41 will be placed on a turntable of a developing device (not shown) 128886.doc • 22· 1376691 And simultaneously rotating the substrate 41 in a horizontal surface, a developing solution is dropped on the photoresist layer 42 and the photoresist layer 42 is developed. Therefore, as shown in FIG. 7D, the photoresist layer 42 is removed. The photoresist in the exposed portion or the unexposed portion. That is, a predetermined photoresist pattern is formed. An example of removing the photoresist in the exposed portion is as shown in FIG. 7D. The target master of the disc will be obtained. (Manufacturing procedure of the stamper) Next, the disc will be directed to the disc by electroless plating. A conductive film 'such as a nickel coating film or the like is formed on the concave/convex pattern of the obtained mother sheet. Then, the optical disk master on which the conductor film has been formed is attached to an electroforming apparatus and Electroplating is performed by electroplating to obtain a layer having a thickness of about 300 ± 5 [μηι] on the conductor film, thereby forming a plating layer having the concave/convex pattern. For example, nickel or a similar metal may be used. Next, the plating layer is peeled off from the master of the optical disk by a cutter or the like. Then, the plating layer is trimmed by trimming the plating layer. It is set to a preset size and the photoresist resisted on the signal forming surface of the electric ore layer is cleaned by using acetone or the like. In this way, a target main as shown in Fig. 8A is obtained. The die plate 51 has a ring shape, an opening is formed in the center, and a plurality of grooves are formed on a main plane. For each groove, the main pressure die plate 51 will be formed hereinafter. The concave part on it is called The outer groove Gin' and the convex portion formed between the inner grooves Gin is called the outer groove Gon. The inner groove Gin and the outer groove G〇n have the inner groove 128886 of the substrate 1. Doc -23- 1376691

Gin has the same shape as the outer groove Gon. The BCA 11, PIC area (not shown), and data recording area 丨3 are sequentially disposed on a principal plane of the main pressing template 51 from the central portion toward the peripheral portion in a manner similar to that of the front substrate 1. The width d of the outer trench G〇n in the BCA n is narrower than the width 0 of the outer trench Gon in the data recording region 13 and/or the depth h of the outer trench Gon in the BCA u is shallower than the depth of the outer trench G〇n in the data recording region 13. h. The distance between the adjacent outer grooves Gon of the BCA 11 t, that is, the track pitch Tp, may be different from the distance between adjacent outer grooves G〇n in the data recording area 13. The track pitch Tp in the BCA 11 is wider than the track pitch Tp in the data recording area 丨3. Then, a mother pressing die plate 52 is formed from the main die plate 51 by the MMS (master master die plate) transfer technique as the back pressure die plate of the master die plate 51. As shown in FIG. 8A, an outer groove Gon and an inner groove having an opposite shape of the groove Gon and the inner groove Gin outside the main die plate 51 are formed on a principal plane of the master die plate 52. Gin. (Manufacturing Step of Optical Disc) Next, for example, injection molding (ejection method) or photopolymer method (2P method: photopolymerization) or the like may be used to mold from the master sheet die plate 52. The substrate j as shown in Figs. 8A to 8E is molded. The first s recording film 2a, the first s recording film 2b, and the dielectric film 2c are sequentially laminated on the substrate 1 by a bismuth ore method; or, the reflective film 2&| The electric cymbal 2b', the inorganic recording film 2c', and the dielectric film 2d' are sequentially laminated on the substrate 1. Therefore, the information recording layer 2 is formed on the substrate i as shown in Fig. 8D. 128886.doc -24· 1376691 Next, as shown in Fig. 8E, the cover layer 3 is formed on the information recording layer 2. As the method of forming the cover layer 3, for example, a resin coating method, a sheet bonding method, or the like can be used. From the viewpoint of cost reduction, a preferred resin coating method is preferred. According to the resin coating method, a photosensitive resin such as a UV resin or the like is used to spin-coat the surface of the information recording layer 2 and light (for example, uv light or the like) is irradiated onto the photosensitive resin. The cover layer 3 is formed as a resin cover layer. According to the sheet bonding method, a light transmissive sheet is adhered to the concave/convex surface side of the substrate 1 by an adhesive, thereby forming the cover layer 3. As the sheet bonding method, for example, a sheet resin adhesion method, a sheet PSA adhesion method, or the like can be used. According to the sheet resin adhesion method, the light transmitting sheet is adhered to the concave/convex surface side of the substrate 1 by a photosensitive resin (for example, a UV resin or the like) coated on the information recording layer 2, thereby forming The cover layer 3. According to the sheet pSa adhesion method, the light-transmitting sheet is adhered to the concave/convex surface side of the substrate 1 by using a pressure-sensitive adhesive (PSA) which is previously and uniformly coated on a principal plane of the sheet, thereby forming The overlay 3 » Next, for example, a type of bar code recording redundancy is formed in the BCA 11. With regard to the formation method of the recording mark, the following method may be mentioned herein. A laser beam modulated by a pulse shape is irradiated from the side of the cover layer 3, thereby changing the physical characteristics of the information recording layer 2 (the recording method is similar to Method of data δ recorded area 13); or illuminating the pulse-shaped modulated laser beam from the side of the substrate 1 to melt and remove the information recording layer 2 0 128886.doc -25 - 1376691 In this manner, the target optical disc β is obtained. (2) Second Embodiment (2-1) Configuration of Optical Disc FIG. 9 shows an example of the optical disc configuration according to the second embodiment of the present invention. For example, the optical disc is a _w〇 RM type optical disc, and the straight structure stacks a first information recording layer 5, an intermediate layer 4, a second information recording layer 6, and the cover layer 3 in this order. The substrate is raised above the raft 1 as shown in FIG. The same parts as in the previous-specific embodiment will utilize the same element

The symbols are represented, and their explanations are omitted here. Fig. 10 shows an example in which various regions on the optical disk are disposed in accordance with a second embodiment of the present invention. This disc has a disk shape with an opening formed at the center of the t. As shown in Fig. 10, the BCA u, PIC (control material of the disc) area (not shown), and the data recording area 13 are again placed on the optical disc from the inner ring side toward the outer ring side.

The information signal recording and reproduction of the optical disc is performed by irradiating the laser beam from the cover layer 3 side to the first information recording layer 5 or the second information recording layer 6. For example, a laser beam having a wavelength of 400 nm to 410 nm is collected by an objective lens 1 of a value of 0.84 to 0.86 and irradiated from the side of the cover layer 3 to the first information recording layer 5 or the second information record. Layer 6 to perform recording or reproduction of information signals. For example, a dual layer BD-R can be described as this disc. The first information recording layer 5, the second information recording layer 6, and the intermediate layer 4 constituting the optical disk will be sequentially explained below. For example, each of the first information recording layer 5 and the second information recording layer 6 has an inorganic recording film of 128886.doc. For example, the inorganic recording film is an inorganic recording film of the WORM type. For example, as far as the type of the inorganic recording film is concerned, the phase change type, the alloy type, or the like may be mentioned herein. An example of the first information recording layer 5 and the second information recording layer 6 shown in Fig. 1 is shown. The first information recording layer 5 is formed by sequentially laminating a reflective film 2a, a dielectric layer 2b1, an inorganic recording layer 2c, and a dielectric layer on the substrate 1. The second information recording layer 6 is formed by sequentially laminating a dielectric film 2b, an inorganic recording film 2C', and a dielectric film 2d on the intermediate layer 4. The intermediate layer 4 is formed on the first information recording layer 5 and its thickness is set to 25 μm. The intermediate layer 4 is made of a resin material having transparency. As the resin material, for example, a plastic material such as a polycarbonate resin, a polyolefin resin, an acrylic resin, or the like can be used. The surface serving as the cover layer 3 side of the intermediate layer 4 is a concave/convex surface which includes the inner groove Gin and the outer groove G〇n in the same manner as the substrate 1. The second information recording layer 6 is a film formed on the concave/convex surface. For example, the intermediate layer 4 is formed in a vacuum environment by the following method. A transparent resin dust template is imprinted on an ultraviolet curing resin that has been flatly coated on the first information layer 6 Upper, the concave/convex portions of the stamper are transferred onto the ultraviolet curable resin, and ultraviolet rays are irradiated onto the ultraviolet curable resin to harden the resin. Further, in the intermediate layer 4, 'the same as the front substrate 1, the concave portion of the concave/convex surface away from the incident plane S of the laser beam is referred to as an inner groove Gin, and the concave/convex surface is The outer 128886.doc •27- convex portion near the incident plane s of the laser beam is called the outer trench Gon. For example, in terms of the shape of the concave inner groove Gin and the convex outer groove Gon, various shapes such as a spiral shape, a concentric shape, and the like may be mentioned herein. The inner trench Gin and/or the outer trench G〇n have been swung to add address information. For example, the outer groove Gon in the inner ring region 11' and the outer groove Gon in the data recording region 13 have the same shape. That is, the inner ring region 1 丨, the width d and the depth (height) h of the inner and outer grooves Gon are equal to the width d and the depth (height) h of the outer groove Gon in the data recording region 13. For example, the inner groove Gin and the outer groove Gon disposed in the inner ring region 11· and the material recording region 13 of the intermediate layer 4 have the same shape as the groove formed in the data recording region 13 of the substrate 1. The distance between adjacent outer grooves Gon in the inner ring region 1 ,, that is, the track pitch Tp ' is different from the distance between adjacent outer grooves G 〇 n in the data recording region 13. Manufacturing method of optical disk in the inner ring region 11' in which the track pitch Tp is wider than the track pitch Tp 〇 (2-2) in the data recording region 13 An example of a method of manufacturing the optical disk having the above-described configuration will now be described with reference to FIGS. 12A and 12B. First, the execution of the steps up to the manufacturing step of the first information recording layer 5 is the same as that of the first embodiment, so that the substrate 1 on which the first information s recording layer 5 is formed is manufactured. For example, the main pressing template 53 as shown in Fig. 12A is formed by laser exposure or the like. The main pressing die plate 53 has a ring shape, an opening is formed in the central portion, and a plurality of grooves 128886.doc -28- 1376691 grooves are formed on a main plane. For each groove, the following will be formed in the main groove. The concave portion on the press template 53 is referred to as an inner groove Gin, and the convex portion formed between the inner grooves Gin is referred to as an outer groove G〇n. The inner ring region 11', the pic region (not shown), and the data recording region 13 are sequentially disposed at the main pressure from the central portion toward the peripheral side in the same manner as the main pressing template 51 in the first specific embodiment. A main plane of the template 53. The inner ring region U• and the data recording region 13 of the main die template 53 are respectively present in the radial regions almost the same as the BCA 11 of the main die template 51 and the data recording region π. For example, the outer groove G〇n in the inner ring region 11, and the outer groove G〇n in the data recording region 13 have almost the same shape. The distance between adjacent outer grooves G〇n in the inner ring region 1 ,, that is, the track pitch Tp 'is different from the distance between adjacent outer grooves Gon in the data recording portion 13. In the inner ring zone II, the intermediate track pitch Tp is wider than the track pitch Tp in the data recording area 13. Next, for example, injection molding (ejection method) or photopolymer method (2P method: photopolymerization) or the like may be used to mold from the main press template 53 as shown in FIG. 12B. The resin is pressed by the template 54. Next, for example, the ultraviolet curable resin is uniformly coated on the surface of the substrate 1 by spin coating. Then, the inner grooves Gin of the resin press dies 54 and the outer grooves Gon are transferred onto the ultraviolet light curing resin which has been uniformly coated on the substrate 1, and the ultraviolet light curing resin is hardened. Therefore, the intermediate layer 4' having the inner grooves Gin and the outer grooves Gon is formed as shown in Fig. 13A. Then, for example, a layer of 128886.doc -29-...film 2b' inorganic recording layer 2c, and a dielectric film 2d are sequentially formed on the intermediate layer 4 by sputtering, and thus, The second information recording layer 6 is formed on 1, as shown in the other drawing. Next, the enamel cover layer 3 is formed on the first information recording layer 6 in the same manner as the first embodiment. . Shown in . Next, for example, a recording mark of a bar code is formed in the job u of the first information recording layer 5. In this way, the target disc will be obtained. [Examples] Although the present invention will be specifically explained by way of examples, the present invention is not limited to the examples. In the following examples, the parts corresponding to the previous specific embodiments will be denoted by the same reference numerals. An optical recording apparatus (also referred to as a cutting apparatus) for manufacturing a glass master will be described first with reference to FIG. The optical recording apparatus has a laser light source 21, a moving optical table 25, a turntable 32, and a rotation servo 33 as main units. The laser light source 21 is a light source for exposing the photoresist layer 42, and the photoresist layer 42 is formed as a film on the surface of the glass mother substrate 41 serving as a recording medium. For example, a laser source 21 is used to oscillate the laser beam for recording with a wavelength λ (= 266 nm). However, the light source used for exposure is not particularly limited to this laser light source. The laser beam emitted from the laser source 21 will travel along a straight line in a parallel beam and will be reflected by the mirrors M1 and M2 such that its direction will be changed and the laser beam will be guided. Lead to the moving optical platform 25. An AOM/AOD (acoustic-to-light modulator/acoustic-light polarizing plate) 23 and two wedge-shaped ribs 128886.doc • 30· The mirror 22 is discharged onto the moving optical table 25. The AOM/AOD 23 and the dovetails 22 are arranged such that the laser beam enters in a parallel beam, and the grid plane formed by the AOM/AOD 23 satisfies the Bragg's condition. And the beam level does not change. As the acousto-optic element for the AOM/AOD 23, cerium oxide (Te02) is quite suitable. A predetermined signal is supplied by a driver 24 for driving to the AOM/AOD 23. The linear outer groove Gon is formed in the BCA 11, and the signal is a predetermined level of DC signal. A high frequency signal is supplied from a VCO (Voltage Controlled Oscillator) 26 to the driver 24 for driving. A control signal is supplied to the VCO 26 from a formatter 27. The AOM/AOD 23 is manufactured in such a way that the intensity of the main diffracted light in a Bragg diffraction is almost proportional to the power of an ultrasonic wave. The AOM/AOD 23 modulates the ultrasonic power based on the recorded signal to modulate the laser beam. To achieve Bragg diffraction, the positional relationship and attitude of the AOM/AOD 23 relative to the optical axis of the laser beam are set to satisfy the Bragg condition (2dsin0=r^), where *d: grid spacing λ: The wavelength of the laser beam Θ: the angle η between the laser beam and the plane of the grid: an integer from the control signal of the VCO 26, a direct current (DC) signal is used in the BCA 11; A two-phase modulated rectangular signal is used in zone 12; a dual-wavelength multiplexed signal is used in data record zone 13 by the MSK (minimum offset key) of 128886.doc 31 1376691 956 [kHz] and STW (saw tooth swing) is composed. The laser beam which has been modulated and deflected in the manner as described above is irradiated to the photoresist layer 42 of the glass mother substrate 41 by a mirror M3 and an objective lens L2, and BCA 11, respectively, is formed. 1 (: area 12, and the latent image of the outer grooves Gon in the data recording area 13. - (manufacturing steps of the mother sheet for the optical disc) First, an optical recording apparatus having the above configuration is used under the following conditions The cutting is performed. When the cutting is performed, the rotational speed of the turntable 32 is controlled so that the linear velocity in the longitudinal direction of the track is equal to 5 28 [m/sec], and the feed pitch of the moving optical table 25 is Each area will change and exposure will be implemented. The position of the moving optical platform 25 is detected by a position sensor 31, and the time and spacing for performing the exposure will correspond to each area, and B ca 11, The latent images of the groove patterns in the PIC area 12 and the data recording area 13 are respectively formed in the photoresist layer 42 on the glass mother substrate 41. The operation of the servo feed 29 and the air bearing 28 is utilized. The wavelength detected by a laser scale 30 (for example, 〇78 μΐΏ) is controlled as a reference, and the distance of the moving optical table 25 is gradually changed. In the group corresponding to BCA 11 Groups 1 to 7 will be from 160% to 1 〇% is reduced by 10°/. Each time the power is cut, exposure is performed from group 1 to group 7. In group 8 corresponding to PIC area 12' and group 9 corresponding to data recording area 13 The cutting power with 10 is set to 2〇〇〇/0. 128886.doc •32· 1376691 The distance in BCA 11 will be set to 2.000 μπι (2000 nm), and the distance in the PIC area 12 will be Set to 0.3 50 μm (350 nm), the pitch in the data recording area 13 is set to 0.320 μπι (320 nm). Specifically, in a region of BCA 11 (radius r = 21.0 mm to 22.0 mm) The lead distance will be set to 2 〇〇〇 nm. In the track pitch transition area (radius r = 22.0 mm to 22.4 mm) between BCA 11 and PIC area 12, the pitch will gradually change from 2000 nm to 35〇11111. The forward distance in a region of 10 zone 12 (radius 1 = 22.4 111111 to 23.197 | 11111) is set to 350 nm. The track pitch transition between the PIC zone 12 and the data recording zone 13 In the zone (radius Γ=23.197 mm to 23.2 mm), the distance will gradually change from 350 nm to 320 nm. The distance in the area of the data recording area 13 radius r=23.2 mm to 58.5 mm) will be set to 32. 〇 nm ° then 'developing the glass master 41 using a developing device (not shown). First, the glass master 41 on which the outer trenches G?n have been formed as described above is placed on the turntable of the developing device to set the photoresist layer 42 in an upper portion. in. In this state, the glass master 41 is rotated in a horizontal plane. Then, a developing solution is dropped on the photoresist layer 42 and the photoresists are developed. Therefore, the groove track in the bca 11, the groove track in the PIC area 12, and the groove track in the data recording area 13 are formed in a spiral. Specifically, an outer trench Gon having a track pitch of 2 〇〇〇 nm is formed in BCA u, and a rectangular wobble groove (outer trench Gem) having a track pitch of 35 〇 nm is formed in the PICG 12 with a track pitch of 3 A 20 mm swing groove (outer groove G〇n) is formed in the data recording area η. 128886.doc • 33- (Manufacturing Step of Press Template) Next, a conductor film made of a nickel coating film was formed on the concave/convex pattern of the glass mother sheet 41 by electroless plating. Then, the glass mother substrate 41 on which the conductor film has been formed is attached to the electroforming apparatus and a nickel plating layer is formed on the conductor film by an electro-recording method to have a thickness of about 3 μm. Then, the nickel plating layer is peeled off from the glass mother substrate 41 on which the nickel plating layer is formed by a cutter or the like. The photoresist on the surface on which the signal of the nickel plating layer has been removed is cleaned by using acetone or the like. Therefore, the main pressure template 51 is obtained. Next, a mother press template 52 having a concave/convex surface is formed from the main press template 51. (Manufacturing Step of Optical Disc) Next, the concave/convex shape of the mother die template 52 is transferred to a transparent resin by injection molding. Therefore, a substrate 1 having a thickness of "mm" is obtained. For the transparent resin, a polycarbonate (refractive index: 159) is used. Next, an AFM (Atomic Force Microscope) is used to observe the concave/convex shape of the substrate 1 obtained as described above, and the depth 11 and the width d of the outer groove Gon are obtained. The results are shown in Table 1. The depth 1 of the outer trench G〇n is equal to the distance from the surface of the substrate 1 to the bottom portion of the outer trench Gon. The width d of the outer groove G 〇 η is equal to the average value (dlmax + d2min) / 2 of the maximum width d 丨 m a 表面 on the surface side and the minimum width d2 min on the side of the bottom portion. Next, a ruthenium film 2a having a thickness of 2 Å, a GeO film 2b having a thickness of 24 nm, and having a thickness of 2 Å are sequentially formed on the substrate 1 using a ruthenium forming apparatus (manufactured by Uns Co., Ltd.; trade name: Sprinter).厚6〇 ZnS-Si02臈2c. 128886.doc -34- 1376691 Next, the cover layer 3 is formed by adhering the light transmissive sheet by PSA. The thickness of the light transmissive sheet and the thickness of the PSA are set such that the thickness of the cover layer 3 is equal to 100 μm. Next, the BCA mark conforming to the BD standard is recorded in the BCA 11 of the obtained optical disc. In this way, a disc conforming to the BD standard will be obtained. (Feature Evaluation of IH/IL) Next, the IH/IL characteristic of the reproduced signal of the BCA mark will be evaluated for the optical disk obtained in accordance with the above. The results are shown in Table 1. The BCA-labeled reproduction signal is evaluated by a disc evaluation device having an optical pickup head, wherein the wavelength is equal to 406 nm and ΝΑ is equal to 0.85. This evaluation device has a magnetic scale with a resolution of 5 μηη and is capable of accurately measuring the radial position of the address.

[Table 1]

Group radial position track pitch [μηι] groove depth [nm] groove width [nm] cutting power [%] groove shape ILmax / IHmin - 0.5 format start [mm] end [mm] 1 20.915 21.153 2 24 170 160 U-shaped 0.51 BCA 2 21.153 21.302 2 16.7 126 150 V-shaped 0.498 BCA 3 21.302 21.451 2 12.4 115 140 V-shaped 0.493 BCA 4 21.451 21.6 2 7.5 103 130 V-shaped 0.485 BCA 5 21.6 21.75 2 4.2 95 120 V-shaped 0.476 BCA 6 21.75 21.899 2 1.7 77 110 V-shape 0.47 BCA 7 21.899 22.05 2 0.9 55 100 V-shape 0.46 BCA 8 22.05 23.25 0.35 24 174 200 U-shaped PIC 9 23.25 58.017 0.32 24 178 200 U-shaped MSK and STW 10 58.017 58.5 0.32 24 176 200 U-shaped MSK 128886.doc -35- 1376691 Table 1 shows the depth h and width d of each outer trench Gon and in. BCA 11 is divided into groups 1 to 7 and the cutting power is from group 1 to 7 each time. The comparison value (ILmax/IHmin) obtained by reducing the situation by 1%. The cutting power in Table 1 is expressed as a percentage of the limit laser power (the laser power of the group 7) capable of forming the groove as a reference value. The following views regarding (a) cutting power, (b) groove depth, and (c) groove width can be seen from Table 1. (a) Cutting power • At a cutting power of 1〇0 to 150% (Groups 2 to 7), the photoresist 42 is not removed before the surface of the glass mother wafer 41 appears, and the outer trench The cross-sectional shape of G〇n becomes a V shape. At 160% of the cutting power (group), the photoresist 42 is always removed to the upper surface of the glass mother 41, and the shape of the scraped surface of the outer groove G〇n becomes a U-subshape. This shape of the outer groove Gon is almost the same as that of the outer groove Gon in the data recording area 13. At 100% to 150°/. Among the groups 2 to 7 manufactured by the cutting power station, ® ILmax/IHmiKO.498 and meet the ILmax/IHmh^〇 5 standard. Also, the BCA mark in the BCA 11 can be preferably reproduced. In groups 5 to 7 manufactured at 1 to 120% cutting power, ILmax/iHmii^ 0.476. That is, the BCA flag in the BCA 11 can be preferably reproduced. Conversely, 'at 160'. In group i manufactured by /◦ cutting power, ILmax/mmin=0.51 and does not meet the criteria of ILmax/IHmij^〇 5. Therefore, from the viewpoint of preferably reproducing the bar code signal, it is preferable to set the cutting power in the BCA 11 to be smaller than the cutting power 128886.doc -36 - 1376691 in the data recording area 13. Specifically, in the preferred embodiment, the cutting power in BC A 11 falls within the range of 100% to 150%; more preferably, it falls within the range of 1% to 12%. From the viewpoint of preferably reproducing the bar code signal, it is preferable to set the cross-sectional shape of the outer groove Gon to a v-shape. (b) Groove depth If the depth of the outer trench G〇n in each of the groups 2 to 7 is set to 〇 9 to 16.7 nm, ILmax/IHminSO.498 and conform to the iLmax/IUmie 0.5 standard. If the depth of the outer trench in each of groups 5 to 7 is set to 0.9 to 4_2 nm, iLmax/IHminSO.476. That is, the BCA mark in the BCA 11 can be preferably reproduced. Conversely, if the depth of the outer trench Gon in the group 1 is set to 24 nm, ILmax/mmin < 0.51 does not meet the standard of ILmax/IHminS0.5. Therefore, from the viewpoint of preferably reproducing the bar code signal, it is preferable to set the depth of the outer trench Gon in the BCA 11 to be shallower than the depth of the outer trench Gon in the data recording region 13. Specifically, preferably, the depth h of the outer trench G〇n falls within the range of 0.9 nm to 16.7 1101, and more preferably falls within the range of 0.9 nm to 4.2 nm. If the depth h of the outer groove Gon in each of the groups 2 to 7 is represented by the phase depth λ/αη, it will fall within the following range. λ/296.8π-λ/16.0η (where 'η: refractive index of the cover layer = ι.52) λ/296.8η (where α=406 [nm]/(1.52x〇.9 [nm])= 296.8) λ/16.0n 128886.doc -37· (where 'α=406 [nm]/(l,52x16.7 [nm])=16.0) if group 5 to 7 are represented by phase depth λ/αη If the depth h of the outer groove Gon in one of them is within the range below. λ/296.8η~λ/63.6η (where 'η: refractive index of the cover layer=152) λ/296·8η (where α=406 [nm]/(1.52x〇.9 [nm]) = 296.8 λ/63 ·6η (where α = 406 [nm] / (1.52x4.2 [nm]) = 63.6) (c) groove width, if the outer grooves Gon of each of groups 2 to 7 The width is set to 55 to 126 nm, iLmax/IHminSO.498 and meets the ILmax/IHminS0.5 standard. If the width of the outer trench Gon in each of the groups 5 to 7 is set to 55 to 95 nm, 'ILmax/IHmin<0.476. That is, the B C A flag ^ in the BCA 11 can be preferably reproduced. On the contrary, if the width of the outer groove Gon in the group 1 is set to 170 nm, ILmax/IHming 0.51 does not conform to the standard of iLmax/IHmin <0.5. Therefore, from the viewpoint of reproducing the bar code signal, it is preferable to set the width d of the outer groove Gon in the BCA 11 to be narrower than the width d of the outer groove Gon in the data recording area 13. Specifically, in a preferred embodiment, the width of the outer trench Gon falls within the range of 55 nm to 126 nm, and more preferably falls within the range of 55 nm to 95 nm. If the width of the outer trench Gon is normalized by the track pitch, (the width d of the outer trench Gon of each of the groups 2 to 7) / (the track pitch Tp) will be as in I28886.doc -38- . 0.0275-0.063 0.0275 (where 55 [nm]/2000 [nm]=0.0275) 0.063 (where 126 [nm]/2000 [nm]=0.063) (outer groove Gon in each of groups 5 to 7) The width d) / (the way distance Tp) will be as follows. 0.0275-0.0475 0.0275 (where 55 [nm] / 2000 [nm] = 0.0275) 0.0475 (where 95 [nm] / 2000 [nm] = 0.0475) As described above, the preferred regeneration is recorded in the BCA 11 In the bar code signal, it is preferable to set the depth h and the width d of the outer groove Gon in the BCA 11 to be shallower and narrower than the depth h and the width d of the outer groove Gon in the data recording area 丨3. Even in the BCA 11, the depth h of the outer trench Gon is set to be shallower than the depth h of the outer trench Gon in the data recording region 13, and the width d of the outer trench Gon in the bca 11 is almost equal to the outer trench G〇n in the data recording region 13. In the case of the width d, the effect of preferably reproducing the bar code signal recorded in the BCA 11 can still be achieved. Even in the BCA 11, the width d of the outer trench Gon is set to be shallower than the width d of the outer trench G〇n in the data recording region 13, and the depth h of the outer trench Gon in the BCA 11 is almost equal to the outer trench G in the data recording region 13. In the case of the depth h of n, the same effect as described above can still be achieved. Although the specific embodiments and examples of the present invention have been explicitly described above, the present invention is not limited to the foregoing specific embodiments and examples, and various modifications may be made in accordance with the technical concept of the present invention in the manner of 128886.doc-39-1376691. For example, the numerical values mentioned in the foregoing specific embodiments and examples are merely examples; if necessary, other numerical values different from them may also be used. The configurations of the foregoing specific embodiments and examples may also be combined with each other without departing from the spirit of the invention. Although the foregoing specific embodiments and examples illustrate the case where the present invention is applied to a WORM type optical disc as an example; however, the present invention is not limited to this example. The invention can also be applied to read-only optical discs and rewritable optical discs. Although the example illustrated in the previous embodiment records and forms the format in a spiral from the inner ring toward the outer ring; however, in the case where the format is recorded and formed from the outer ring toward the inner ring in the opposite manner If the feed accuracy is quite high, the format can be recorded from the outer ring toward the inner ring. The invention is not limited to a single layer, it can also be applied to a multilayer format having two or more layers. The present invention can also be applied to various optical discs other than BD. The present invention can be applied not only to optical discs of the related art, but also to next-generation optical discs having a density much higher than that of BD or similar optical discs. Although the first region (bca) is disposed on the innermost ring side in the case described in the foregoing specific embodiment; however, the position at which the first 1 is disposed is not limited to the innermost ring side, and it may be disposed on the optical disc. Any of the upper regions, such as the region on the outermost ring side, the region between the innermost ring side and the outermost ring side, or the like. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram showing a waveform of a BCA mark reproduction signal of a BD. FIG. 1 is a cross-sectional view showing a first example of the present invention; FIG. 4 is a cross-sectional view showing an example of a first recording layer according to the present invention; FIG. 4 is a cross-sectional view showing a first example of a first recording layer according to the present invention; Information on the disc

Figure 5 is a cross-sectional view showing a second example of the information printing layer of the optical disc according to the first embodiment of the present invention; 6 is a schematic conceptual view showing an example of a groove layout of a first embodiment of a flute g _ ^ ^ £ ^ + I 3 according to the present invention; FIGS. 7A to 7D are diagrams for explaining the first embodiment according to the present invention. FIG. 8 is a cross-sectional view showing an example of a method of manufacturing an optical disk according to a first embodiment of the present invention; FIG. 9 is a view showing a method according to the present invention. FIG. 1 is a cross-sectional view showing an example of a region of the optical disc according to a second embodiment of the present invention; FIG. 1 is a second embodiment of the present invention. FIG. 12A and FIG. 12B are cross-sectional views for explaining an example of a method of manufacturing an optical disc according to a second embodiment of the present invention; FIGS. 13A to 13C are diagrams for explaining the present invention. Second Embodiment 128886.doc 1376691 A cross-sectional view showing an example of a method of manufacturing a disc; and FIG. 14 is a schematic view showing a configuration of an optical recording apparatus for manufacturing a glass master. [Main component symbol description]

1 substrate 2 information recording layer 2, inorganic recording film 2a first recording film 2b second recording film 2c dielectric film 2a' reflective film 2b' dielectric film 2c' inorganic recording film 2d' dielectric film 3 cover layer 4 intermediate layer 5 First information recording layer 6 Second information recording layer 10 Objective lens 11 BCA 1 Γ Inner ring area 12 PICS 13 Data recording area 14 BCA mark 128886.doc • 42· 1376691

21 Laser source 22 Wedge 稜鏡 23 AOM/AOD 24 Drive 25 Motion optics platform 26 VCO 27 Formatter 28 Air bearing 29 Feed servo 30 Laser ruler 31 Position sensor 32 Turntable 33 Rotary servo 41 Substrate 42 Photoresist layer 42a Latent image 51 Main pressure template 52 Parent pressure template 53 Main pressure template 54 Resin pressure template L2 Objective lens Ml Mask M2 Mask M3 Mask S Laser beam incident plane 128886.doc •43 -

Claims (1)

1376691, the scope of application for patents: - a kind of recording medium, including: No. 097120799 Patent application year eve month 丨 Chinese application patent scope replacement (May 101) The board has a first groove formed therein a first region and a second region in which a second trench is formed; at least an information layer disposed on the substrate; and a protective layer disposed on the information layer, wherein the preset Information has been recorded on the first groove first, and 2. 3. 4. The recording price is less than or narrower than the recording medium of the item: claim 1, wherein the binary information is recorded to each medium by a laser beam. :: Recording medium without item 1 wherein the binary information is recorded to each medium by a beam of radiation based on the same principle based on the principle to be recorded on the second groove. For example, the recording medium of Item 1 is required The sinuous layer has an inorganic recording film, and the inorganic recording film has a first recording film containing ITO and a second recording film containing an oxide of Ge. 5. The recording medium of claim 1, wherein the ° Hai = shell layer has an inorganic recording film, and the nano inorganic recording film contains SbZnSSiO. 6. The recording medium of claim 1, wherein in the cutting step of the manufactured pressure plate, the exposure beam corresponding to the first to mold the substrate to the groove 128886-1010504.doc 1376691 The power of the call will be set to be less than the power of the exposure beam corresponding to the second trench to produce the stamper. 7. The recording medium of the request item, wherein the depth of the first groove is equal to ο; to 16 · 7 nm 〇 8. The recording medium of claim 1, wherein the first groove has a phase depth equal to λ/296 • 8η to λ/16·0η, where λ • the wavelength of the laser beam used for recording or reproduction, η.—the refractive index of the transparent cover layer to the laser beam used for recording or reproduction. Wherein the width of the first trench is equal to 55. 9. The recording medium of claim 1 to 126 nm 〇 1 〇 = recording medium of claim 1 wherein the first groove (groove width V (track pitch) is equal to 0 〇275 to 〇〇63. 11 • Recording media such as the request item, class bar code mark. — _ capital (10) recorded as - 12. Recording media as requested}, 第... έ T ° 海第-区系- The innermost ring zone, 4th - Q system, a data recording zone. A method of manufacturing a recording medium, comprising the steps of: forming a substrate by pressing a template transfer surface; (4) transferring to a resin material. Forming an information layer on the substrate; and forming a protective layer on the information layer, wherein the stamper has a first stamper trench, forming a 128886-10l0504 in the first region of the substrate. Doc 1376691 a first trench, and a second stamper trench, a second trench, and, in the second region of the substrate, a first stamper trench is formed shallowly 14^^ times Two-pressure template groove. 14. A mother piece for a recording medium, including Two - of regions, wherein a first groove has been formed; and - a second region 'has been formed, a second trench, wherein the first zone of flute Xi, Αι The first trench is shallower or narrower than the second trench β β in the second region. The master/slide method for recording media includes the following step on a substrate. Forming a photoresist layer; forming a first trench pattern by exposing the photoresist layer in the flute_^ region of the substrate; by exposing the flute in the substrate to the first & a photoresist layer to form a second trench pattern; and developing the exposed photoresist layer, wherein a power of the exposure beam for forming the first trench pattern is smaller than that for forming the second trench pattern The power of the exposure beam. 128886-1010504.doc