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TWI348736B - Method of removing oxides - Google Patents

Method of removing oxides

Info

Publication number
TWI348736B
TWI348736B TW097102348A TW97102348A TWI348736B TW I348736 B TWI348736 B TW I348736B TW 097102348 A TW097102348 A TW 097102348A TW 97102348 A TW97102348 A TW 97102348A TW I348736 B TWI348736 B TW I348736B
Authority
TW
Taiwan
Prior art keywords
removing oxides
oxides
Prior art date
Application number
TW097102348A
Other languages
Chinese (zh)
Other versions
TW200933731A (en
Inventor
Kuo Chih Lai
yi wei Chen
Nien Ting Ho
Teng Chun Tsai
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW097102348A priority Critical patent/TWI348736B/en
Publication of TW200933731A publication Critical patent/TW200933731A/en
Application granted granted Critical
Publication of TWI348736B publication Critical patent/TWI348736B/en

Links

TW097102348A 2008-01-22 2008-01-22 Method of removing oxides TWI348736B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW097102348A TWI348736B (en) 2008-01-22 2008-01-22 Method of removing oxides

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097102348A TWI348736B (en) 2008-01-22 2008-01-22 Method of removing oxides

Publications (2)

Publication Number Publication Date
TW200933731A TW200933731A (en) 2009-08-01
TWI348736B true TWI348736B (en) 2011-09-11

Family

ID=44866052

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097102348A TWI348736B (en) 2008-01-22 2008-01-22 Method of removing oxides

Country Status (1)

Country Link
TW (1) TWI348736B (en)

Also Published As

Publication number Publication date
TW200933731A (en) 2009-08-01

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