1331557 (1) 九、發明說明 【發明所屬之技術領域】 本發明係關於積層成形裝置及積層成形方法，詳而言 之，該積層成形裝置係具備：藉由將積層材和被積層材實 施加熱及加壓以積層成形爲中間積層品之積層機、將該積 層機所積層成形出之中間積層品於既定溫度下加壓而使其 表面形成平坦之平坦化壓機'將前述中間積層品從積層機 搬運至平坦化壓機之搬運手段；該積層成形方法，係將積 層材和被積層材用積層機實施加熱及加壓以積層成形爲中 間積層品，將該中間積層品從積層機搬運至平坦化壓機， 再將前述中間積層品用平坦化壓機於既定溫度下加壓而使 其表面形成平坦。 【先前技術】 例如，爲了製造複數層構成之增層基板，必須反覆進 行以下步驟：在絕緣材構成之基板上形成電路圖案的步驟 、在該基板之電路圖案上積層絕緣材之步驟、使絕緣材硬 化之步驟、在絕緣材表面形成電路圖案之步驟。爲了在基 板的電路圖案上所積層的絕緣材上進一步形成電路圖案再 積層絕緣材，在基板（被積層材）之電路圖案上積層絕緣 材（積層材）後的積層物的表面必須平滑，且全體厚度形 成均一。另外，在基板（被積層材）表面的絕緣材上，爲 了形成電路圖案而積層光阻（積層材）時同樣的，光阻表 面必須平滑且全體厚度形成均一。 -4- (2) (2)1331557 然而，一般而言，在基板（被積層材）之電路圖案上 所積層之絕緣材（積層材），係成形爲膜狀。在基板表面 ’由於電路圖案的存在會形成凹凸，若將膜狀絕緣材以密 合的方式積層於該表面，絕緣材會塡入對應的凹凸中，因 此無法形成平滑的表面。 於是，已知之積層成形裝置係具備：將積層材和被積 層材實施加熱及加壓以積層成形出表面具有凹凸之中間積 層品之積層機、鄰接於該積層機而設置之平坦化壓機（將 該中間積層品以既定的溫度加壓而使其表面形成平滑）（ 專利文獻1及專利文獻2 )。 專利文獻I所揭示之積層板之積層裝置，係由：在減 壓空間內藉由膜體將積層材和被積層材實施加壓以成形出 中間積層品之真空積層裝置、配設於前述真空積層裝置後 的步驟而將前述中間積層品予以加壓之平坦化壓機裝置、 所構成之積層板之積層裝置；其特徵在於，前述平坦化壓 機裝置係具備：配設有熱板之固定盤、配設有熱板且與前 述固定盤相對向之可動盤、在前述熱板間將前述中間積層 品予以加壓之複數個加壓機構、將前述複數個加壓機構分 成二組以上而分別控制之控制機構、或是選擇性地使前述 複數個加壓機構動作之控制機構等等。專利文獻1揭示之 積層板之積層裝置，其特徵在於，係具備：配設於可動盤 的對角線的交點附近之第一加壓機構、配設於前述可動盤 之前述對角線的交點附近和前述可動盤的角隅之間之第二 加壓機構（相對於待加壓之中間積層板，配置於平面投影 -5- (3) (3)1331557 視呈重疊的位置）。在專利文獻1記載著：在使可動盤上 昇之閉模步驟，使配設於可動盤的大致中央之增壓缸機構 動作〔0 0 2 6〕；在熱板間挾持中間積層品之大致同時，使 用副缸和主缸來進行中間積層品之加壓步驟〔0027〕。 專利文獻2揭示之積層方法，其特徵在於：使用具有 真空室（設置附有可撓性片3之上部片1及附有可撓性片 4之下部片2)之真空積層裝置6，在該室內之上下片之 間，將具有凹凸之基板5a和膜狀樹脂層5b所構成之積層 體5予以緊壓後，使用具有上下加壓塊之平面加壓裝置9 ，在該上下加壓塊之間將前述積層體5邊加熱邊實施面均 —加工；其另一特徵在於：在上下加壓塊之至少一加壓塊 附設可擺頭之支承點接頭10，將該支承點接頭10連接於 油壓缸或氣壓缸11以使該加壓塊動作；又另一特徵在於 :可擺頭之支承點接頭10是使用軸接頭。在專利文獻2 記載著：「所謂面均一加工是指，從待加壓之工件、亦即 基板之較厚部位起將加壓塊之加壓面的一部分予以抵接， 依序朝工件較薄的部位進行加壓塊的加壓面之抵接，當基 板全面都抵接於加壓面後，以均一的壓力進行加壓加工； 單純的加壓加工，並無法沿著基板之厚度不均而形成均一 厚度的絕緣樹脂」〔0006〕。另外，依據前述構成，在專 利文獻2記載著：「對於基板之厚度不均，從基板之較厚 部位朝較薄部位依序，用該等缸體將下部加壓塊予以抵接 ，將其挾持於上下加壓塊間進行加壓，而能沿著基板之厚 度不均形成均一厚度的樹脂」[ 0036〕。另外，在專利文 -6- (4) (4)1331557 獻2記載著··「習知之積層方法，如第9圖所示，積層於 基板上之樹脂組成物層的厚度不定（χ^γ)，因此在積 層基板時，基板間之絕緣性會有不同；但在本發明，如第 10圖所示，積層於基板上之樹脂組成物層的厚度一定（ x = Y) j 〔 0069〕。 [專利文獻1]日本特開2005-66967號公報 [專利文獻2]日本特開2002-36272號公報 【發明內容】 在專利文獻1，藉由具備複數個加壓機構或是第1及 第2加壓機構，可提高熱板彼此之平行度而使積層板之板 厚形成均一；但平坦化壓機之製造成本高，且各加壓機構 之控制很麻煩。又在專利文獻1中，係在豎設之4根繫桿 以可滑動的方式配設可動盤，由於在可動盤和繫桿間會產 生些微的間隙〔0015〕，可動盤對各繫桿之滑動會產生偏 差等，如此將無法保持固定盤和可動盤之平行度，因此無 法形成全體均一的厚度。此外，在專利文獻1，從油壓源 連接至4具副缸之供油管的長度和彎曲度的不同，以及缸 體之摩耗度不同等的問題，在中間積層品加壓步驟，要使 4具副缸完全同步動作會有困難。因此，在專利文獻1， 在從閉模步驟轉移至中間積層品加壓步驟時，亦即，在藉 由熱盤14' 15挾持中間積層品之大致同時，藉由前述副 缸開始進行加壓，而在加壓初期，可能無法對中間積層品 施加均等的加壓力。 (5) (5)1331557 另外，在專利文獻2，係採用在平面加壓裝置之加壓 塊附設可擺頭的支承點接頭之構造，當加壓塊藉由支承點 接頭進行擺頭時，兩加壓塊之加壓面無法保持平行。另外 ，專利文獻2是爲了藉由「面均一」加工來使樹脂組成物 層之厚度形成一定（參照專利文獻2之第10圖），但並 無法使基板和樹脂組成物層之積層物全體厚度形成一定（ 參照專利文獻2之第9圖）。在專利文獻2，由於是從基 板較厚的部位將加壓塊之加壓面的一部分予以抵接〔0006 〕，因受熱而變得容易變形之樹脂組成物層會從基板層流 出，如此並無法形成具有既定厚度之樹脂組成物層。 本發明係爲了解決上述問題而構成者，其目的係提供 —種積層成形裝置及積層成形方法，利用簡單的構造，在 固定盤和可動盤彼此的加壓面維持平行度之狀態下，相對 於固定盤，使可動盤朝與其對向面正交的方向進行直線移 動，藉此，能從中間積層品成形出均一厚度的積層成形品 〇 請求項1之積層成形裝置之發明，爲了達成上述目的 ，係具備：將積層材和被積層材藉由加熱及加壓而積層成 形爲中間積層品之積層機、將該積層機所積層成形出之中 間積層品於既定溫度下加壓而使其表面形成平坦之平坦化 壓機、將前述中間積層品從積層機搬運至平坦化壓機之搬 運手段而構成之積層成形裝置；其特徵在於，前述平坦化 壓機係具備：呈相對向配置且彼此的對向面具有平滑的加 壓面之固定盤及可動盤、相對於固定盤，使可動盤朝接近 -8- (6) (6)1331557 或遠離的方向移動以將前述積層機所積層成形出之中間積 層品予以加壓之緊壓手段、相對於固定盤，將可動盤以朝 與其對向面正交的方向直線移動的方式進行引導之直線移 動手段；該直線移動手段係具備：以沿可動盤直線移動的 方向延伸的方式配設之複數個滾珠栓槽軸'設於可動盤之 角隅部且分別插通於前述各滾珠栓槽軸之滾珠栓槽筒。 請求項2之積層成形裝置之發明，係在請求項1記載 之發明中，前述平坦化壓機之緊壓手段僅單一個且接合於 可動盤的中央。 請求項3之積層成形裝置之發明，係在請求項1或2 記載之發明中，在前述平坦化壓機之可動盤之各角隅部設 置複數個滾珠栓槽筒，將該複數個滾珠栓槽筒分別插通於 各滾珠栓槽軸。 請求項4之積層成形方法之發明，係將積層材和被積 層材用積層機實施加熱及加壓以積層成形爲中間積層品， 將該中間積層品從積層機搬運至平坦化壓機，再將前述中 間積層品用平坦化壓機於既定溫度下加壓而使其表面形成 平坦之積層成形方法；其特徵在於，前述平坦化壓機係具 備：呈相對向配置且彼此的對向面具有平滑的加壓面之固 定盤及可動盤、相對於固定盤，使可動盤朝接近或遠離的 方向移動以將前述積層機所積層成形出之中間積層品予以 加壓之緊壓手段、相對於固定盤，將可動盤以朝與其對向 面正交的方向直線移動的方式進行引導之直線移動手段； 該直線移動手段係具備：以沿可動盤直線移動的方向延伸 -9- (7) 1331557 的方式配設之複數個滾珠栓槽軸、 分別插通於前述各滾珠栓槽軸之滾 積層品從積層機搬運至平坦化壓機 ，藉由在前述滾珠栓槽軸插通滾珠 動手段將前述可動盤朝與前述對向 時藉由緊壓手段使可動盤朝固定盤 中間積層品於既定溫度下加壓而使 依據請求項〗之積層成形裝置 將積層材和被積層材實施加熱及加 層品，再藉由搬運手段將中間積層 化壓機之固定盤和可動盤之間。平 和可動盤彼此的對向面具有平滑的 ，係在可動盤之各角隅部設置滾珠 之直線移動方向延伸的方式配設複 珠栓槽筒插通於滾珠栓槽軸。因此 動盤朝固定盤的位置接近移動，且 中間積層品之表面形成平坦時，同 可動盤以確實地朝與其對向面正交 進行引導，因此，固定盤和可動盤 面的平行度可從加壓初期起確實保 實且均等地加壓而形成平坦且均一 依據請求項2之積層成形裝置 記載之發明中，平坦化壓機之緊壓 可動盤的中央；藉此，設於可動盤 設於可動盤之角隅部且 珠栓槽筒：將前述中間 之固定盤和可動盤之間 栓槽筒而構成之直線移 面正交的方向引導，同 的位置接近移動，且將 其表面形成平坦。 之發明，係藉由積層機 壓以積層成形出中間積 品從積層機搬運至平坦 坦化壓機，係在固定盤 加工面。直線移動手段 栓槽筒，且以沿可動盤 數滾珠栓槽筒，又將滾 ，在藉由緊壓手段使可 於既定溫度下加壓而使 時藉由直線移動手段將 的方向直線移動的方式 之對向面上所設之加壓 持，能將中間積層品確 的厚度。 :之發明，係在請求項1 手段僅單一個且接合於 之滾珠栓槽筒可分別相 -10- (8) (8)1331557 對於滾珠栓槽軸進行均等的滑動，且因加壓中間積層品所 造成之固定盤和可動盤的變形不會產生偏差，因此能將中 間積層品確實且均等地加壓而形成平坦且均一的厚度。 依據請求項3之積層成形裝置之發明，係在請求項1 或請求項2記載之發明中，在平坦化壓機之可動盤的各角 隅部分別設置複數個滾珠栓槽筒，使複數個滾珠栓槽筒在 軸方向相連且分別插通各滾珠栓槽軸，藉此，相對於滾珠 栓槽軸，滾珠栓槽筒的長度變長，俾將可動盤以確實地朝 與其對向面正交的方向直線移動的方式進行引導。 依據請求項4之積層成形方法之發明，平坦化壓機係 具備：呈相對向配置且彼此的對向面具有平滑的加壓面之 固定盤及可動盤、相對於固定盤，使可動盤朝接近或遠離 的方向移動以將前述積層機所積層成形出之中間積層品予 以加壓之緊壓手段、相對於固定盤，將可動盤以朝與其對 向面正交的方向直線移動的方式進行引導之直線移動手段 ;該直線移動手段係具備：以沿可動盤直線移動的方向延 伸的方式配設之複數個滾珠栓槽軸、設於可動盤之角隅部 且分別插通於前述各滾珠栓槽軸之滾珠栓槽筒。 藉由積層機將積層材和被積層材實施加熱及加壓以積 層成形出中間積層品，再藉由搬運手段將中間積層品從積 層機搬運至平坦化壓機之固定盤和可動盤之間。平坦化壓 機，係在固定盤和可動盤彼此的對向面具有平滑的加工面 。直線移動手段，係在可動盤之各角隅部設置滾珠栓槽筒 ，且以沿可動盤之直線移動方向延伸的方式配設複數滾珠 -11 - (9) 1331557 栓槽筒，又將滾珠栓槽筒插通於滾珠栓槽軸。將積 被積層材用積層機實施加熱及加壓以積層成形出中 品，將該中間積層品從積層機搬運至平坦化壓機之 和可動盤之間。平坦化壓機，係藉由緊壓手段使可 固定盤的位置接近移動，且於既定溫度下加壓而使 層品之表面形成平坦。在此時，直線移動手段，係 盤之各角隅部設置滾珠栓槽筒，且以沿可動盤之直 方向延伸的方式配設複數滾珠栓槽筒，又將滾珠栓 通於滾珠栓槽軸；因此直線移動手段能將可動盤以 朝與其對向面正交的方向直線移動的方式進行引導 ，固定盤和可動盤之對向面上所設之加壓面的平行 加壓初期起確實保持，能將中間積層品確實且均等 而形成平坦且均一的厚度。 關於平坦化壓機，宜爲能使可動盤進行昇降移 型壓機。關於平坦化壓機之可動盤相對於固定盤之 程，在進行中間積層品的成形時之打開量，相對於 養時等之最大打開量宜設定在10〜20 %的範圍。 坦化壓機，相對於滾珠栓槽軸之軸方向長度，滾珠 之軸方向長度宜設定在60〜70%的範圍。相對於 的厚度，滾珠栓槽筒之軸方向長度宜設定在200 -的範圍。 依據本發明之積層成形裝置，直線移動手段係 以沿可動盤直線移動的方向延伸的方式配設之複數 栓槽軸、設於可動盤之角隅部且分別插通於前述各 層材和 間積層 固定盤 動盤朝 中間積 在可動 線移動 槽筒插 確實地 ，因此 度可從 地加壓 動之縱 昇降衝 維修保 關於平 栓槽筒 可動盤 ^ 250 % 具備： 個滾珠 滾珠栓 -12- (10) (10)1331557 槽軸之滾珠栓槽筒；藉此，可將平坦化壓機之固定盤和可 動盤彼此的加壓面的平行度維持在高精度的狀態下，相對 於固定盤使可動盤朝與其對向面正交的方向直線移動，因 此，可將中間積層品以均一的厚度確實地予以成形》 依據本發明之積層成形方法，平坦化壓機之直線移動 手段係具備：以沿可動盤直線移動的方向延伸的方式配設 之複數個滾珠栓槽軸、設於可動盤之角隅部且分別插通於 前述各滾珠栓槽軸之滾珠栓槽筒；將中間積層品配置於平 坦化壓機之固定盤和可動盤之間，藉由直線移動手段（在 滾珠栓槽軸插通滾珠栓槽筒而構成）將可動盤朝與其對向 面正交的方向引導，並藉由緊壓手段使可動盤朝固定盤的 位置接近移動，且將中間積層品於既定的溫度下加壓；藉 由採用如此的構成，能在維持固定盤和可動盤彼此的加壓 面的平行度的狀態下，相對於固定盤，使可動盤朝與其對 向面正交的方向直線移動，因此能將中間積層品以均一的 厚度確實地予以成形。 【實施方式】 根據第1圖至第7圖來詳細說明本發明之一實施形態 。在圖式中，對相同或相當的部分賦予相同的符號。以下 的說明所針對的情形，係在形成有電路圖案且表面具有凹 凸之基板層（被積層材）上，進行積層材之絕緣層的積層 ，使絕緣層的表面形成平坦，最終製造出增層基板。 本發明之積層成形裝置，主要具備：將積層材A1和 -13- (11) (11)1331557 被積層材A2實施加熱及加壓以積層成形出中間積層品A3 之積層機1、將該積層機1所積層成形出之中間積層品 A3於既定溫度下加壓而使其表面形成平坦之平坦化壓機 2、將中間積層品A3從積層機1搬運至平坦化壓機2之 搬運手段3。該平坦化壓機2係具備：呈相對向配置且彼 此的對向面具有平滑的加壓面之固定盤20及可動盤21' 相對於固定盤20，使可動盤21朝接近或遠離的方向移動 以將積層機1所積層成形出之中間積層品A3予以加壓之 緊壓手段22、相對於固定盤20，將可動盤21以朝與其對 向面正交的方向直線移動的方式進行引導之直線移動手段 23。該直線移動手段23係具備：以沿可動盤21直線移動 的方向延伸的方式配設之複數個滾珠栓槽軸24、設於可 動盤21之角隅部且分別插通於各滾珠栓槽軸24之滾珠栓 槽筒25。另外，緊壓手段22係由單一個緊壓缸所構成， 緊壓缸22之衝柱22a接合於可動盤21的中央。在平坦化 壓機2之可動盤21的各角隅部，將複數個滾珠栓槽筒25 、25呈縱列配置且分別插通於各滾珠栓槽軸24。 另外，本發明之積層成形方法，係將積層材A1和被 積層材A2用積層機1實施加熱及加壓以積層成形爲中間 積層品A3 ’將該中間積層品A3從積層機1搬運至平坦化 壓機2，再將中間積層品A3用平坦化壓機2於既定溫度 下加壓而使其表面形成平坦；平坦化壓機2係具備：呈相 對向配置且彼此的對向面具有平滑的加壓面41之固定盤 20及可動盤21、相對於固定盤20，使可動盤21朝接近 -14- (12) (12)1331557 或遠離的方向移動以將中間積層品A3予以加壓之緊壓手 段22、相對於固定盤20，將可動盤21以朝與其對向面正 交的方向直線移動的方式進行引導之直線移動手段23; 直線移動手段23係具備：以沿可動盤21直線移動的方向 延伸的方式配設之複數個滾珠栓槽軸24、設於可動盤21 之各角隅部且分別插通於各滾珠栓槽軸24之滾珠栓槽筒 25 ;將中間積層品A3從積層機1搬運至平坦化壓機2之 固定盤20和可動盤21之間，藉由在滾珠栓槽軸24插通 滾珠栓槽筒25而構成之直線移動手段23將可動盤21朝 與其對向面正交的方向引導，同時藉由緊壓手段22使可 動盤2 1朝固定盤20的位置接近移動，且將中間積層品 A3於既定溫度下加壓而使其表面形成平坦。 作爲積層材之絕緣層A1，例如是由環氧系等的熱固 性樹脂所構成，厚度例如爲3 0〜1 00私m左右之膜狀物； 其最初的狀態，是在一面以可剝離的方式貼合聚對苯二甲 酸乙二酯等所構成之膜狀支承體，在另一面以可剝離的方 式貼合保護膜。絕緣層A1，除了環氧系樹脂以外，也能 由例如聚醯亞胺、液晶聚合物、聚對苯二甲酸乙二酯等所 構成之熱塑性或熱固性的絕緣性材料（配合有各種樹脂、 清漆而構成者）。用來積層絕緣層之基板層A2的表面， 形成有銅箔構成之電路圖案（凹凸）。基板層A2，例如 具有1〜2mm左右的厚度。在第丨圖.、第4圖係顯示在基 板層A2的兩面積層絕緣層A1的情形，但本發明也適用 於在基板層A2的一面積層絕緣層Ai的情形。絕緣層A1 -15- (14) (14)1331557 (1) The present invention relates to a laminated forming apparatus and a laminated forming method. More specifically, the laminated forming apparatus includes heating a laminated material and a laminated material. And a laminator that presses the intermediate layer product by lamination, and presses the intermediate layer product formed by laminating the laminator at a predetermined temperature to form a flattening presser on the surface. The laminating machine transports the flattening press to the flattening press. The laminated forming method heats and presses the laminated material and the laminated material to form an intermediate laminated product by laminating, and transports the intermediate laminated product from the laminating machine. After the flattening press is pressed, the intermediate laminate is pressed at a predetermined temperature by a flattening press to form a flat surface. [Prior Art] For example, in order to manufacture a build-up substrate composed of a plurality of layers, the following steps must be repeated: a step of forming a circuit pattern on a substrate made of an insulating material, a step of laminating an insulating material on a circuit pattern of the substrate, and insulating The step of hardening the material and the step of forming a circuit pattern on the surface of the insulating material. In order to further form a circuit pattern on the insulating material laminated on the circuit pattern of the substrate and then laminate the insulating material, the surface of the laminate after the insulating material (layered material) is laminated on the circuit pattern of the substrate (layered material) must be smooth, and The overall thickness is uniform. Further, in the insulating material on the surface of the substrate (layered material), in order to form a circuit pattern and laminate a photoresist (laminated material), the photoresist surface must be smooth and uniform in thickness. -4- (2) (2) 1331557 In general, an insulating material (laminated material) laminated on a circuit pattern of a substrate (layered material) is formed into a film shape. When the surface of the substrate is formed by the presence of the circuit pattern, irregularities are formed. When the film-shaped insulating material is laminated on the surface, the insulating material is immersed in the corresponding unevenness, so that a smooth surface cannot be formed. Then, the known layer forming apparatus includes a laminator that heats and presses the laminated material and the laminated material to laminate an intermediate laminate having irregularities on the surface thereof, and a flattening press provided adjacent to the laminator ( The intermediate laminate is pressed at a predetermined temperature to smooth the surface thereof (Patent Document 1 and Patent Document 2). The laminating device for a laminated board disclosed in Patent Document 1 is a vacuum laminating device for forming an intermediate laminated product by pressurizing a laminated material and a laminated material by a film body in a decompression space, and is disposed in the vacuum A flattening press device for pressurizing the intermediate laminate product and a laminate device comprising the laminated plate formed by the step of laminating the device; wherein the flattening press device is provided with a fixing by a hot plate a disk, a movable plate having a hot plate and facing the fixed disk, a plurality of pressing mechanisms for pressurizing the intermediate laminated product between the hot plates, and dividing the plurality of pressing mechanisms into two or more groups A control mechanism that is separately controlled, or a control mechanism that selectively operates the plurality of pressurizing mechanisms, and the like. The laminated device of the laminated plate disclosed in Patent Document 1 is characterized in that the first pressurizing mechanism disposed near the intersection of the diagonals of the movable disk and the intersection of the diagonal lines disposed on the movable disk are provided A second pressing mechanism between the vicinity and the corner of the movable disk (relative to the intermediate laminate to be pressurized, disposed at a plane projection -5 - (3) (3) 1331557 is in an overlapping position). Patent Document 1 discloses that in the mold closing step of raising the movable disk, the supercharger mechanism disposed substantially at the center of the movable plate is operated [0 0 2 6]; and the intermediate laminated product is held between the hot plates at substantially the same time. The sub-cylinder and the master cylinder are used to perform the pressurization step of the intermediate laminate [0027]. The method of laminating disclosed in Patent Document 2 is characterized in that a vacuum laminating device 6 having a vacuum chamber (provided with the upper sheet 1 with the flexible sheet 3 and the lower sheet 2 with the flexible sheet 4 attached) is used. Between the upper and lower sheets in the room, the laminated body 5 composed of the uneven substrate 5a and the film-like resin layer 5b is pressed, and then the flat pressing device 9 having the upper and lower pressing blocks is used, and the upper and lower pressing blocks are used. The surface layer 5 is heated while being heated, and the other is characterized in that: at least one pressure block of the upper and lower pressure blocks is provided with a swingable support point joint 10, and the support point joint 10 is connected to The hydraulic cylinder or pneumatic cylinder 11 operates to operate the pressure block; yet another feature is that the swingable support point joint 10 is a shaft joint. Patent Document 2 describes that "the so-called uniform surface processing means that a part of the pressing surface of the pressing block is abutted from the thick portion of the substrate to be pressurized, that is, the thick portion of the substrate, and is sequentially thinner toward the workpiece. The part is pressed against the pressing surface of the pressing block, and after the substrate is completely abutted against the pressing surface, the pressing process is performed under uniform pressure; the simple pressing process does not make the thickness uneven along the substrate. And a uniform thickness of insulating resin is formed" [0006]. Further, according to the above configuration, Patent Document 2 discloses that "the thickness of the substrate is not uniform, and the lower pressurizing block is abutted from the thick portion of the substrate toward the thinner portion, and the lower pressurizing block is abutted. The pressure is applied between the upper and lower pressing blocks, and a resin having a uniform thickness can be formed along the thickness of the substrate" [0036]. In addition, in the patent document 6- (4) (4) 1331557, 2, "the conventional laminated method, as shown in Fig. 9, the thickness of the resin composition layer laminated on the substrate is indefinite (χ^γ) Therefore, when the substrate is laminated, the insulation between the substrates differs. However, in the present invention, as shown in Fig. 10, the thickness of the resin composition layer laminated on the substrate is constant (x = Y) j [0069] [Patent Document 1] Japanese Laid-Open Patent Publication No. JP-A-2002-36272 (Patent Document 1) Patent Document 1 includes a plurality of pressurizing mechanisms or first and second (2) The pressurizing mechanism can increase the parallelism of the hot plates to make the thickness of the laminated plate uniform; however, the flattening press has high manufacturing cost and the control of each pressurizing mechanism is troublesome. Further, in Patent Document 1, The movable tray is slidably arranged on the erected four tie rods. Since a slight gap [0015] is generated between the movable disc and the tie rod, the movable disc can be biased against the sliding of the tie rods, etc. It will not be able to maintain the parallelism between the fixed disk and the movable disk, so it is impossible to form the whole Further, in Patent Document 1, the length and the degree of curvature of the fuel supply pipe connected from the hydraulic source to the four sub-cylinders, and the difference in the degree of wear of the cylinder are different, and the laminated product is pressurized in the middle. In the step, it is difficult to completely synchronize the four sub-cylinders. Therefore, in Patent Document 1, when shifting from the mold closing step to the intermediate layer product pressurizing step, that is, in the middle by the hot plate 14'15 At the same time, the secondary cylinder is pressurized at the same time, and an equal pressure may not be applied to the intermediate laminate at the initial stage of pressurization. (5) (5) 1331557 In addition, in Patent Document 2, In the pressurizing block of the flat pressurizing device, the structure of the swingable support point joint is attached, and when the pressurizing block is swung by the support point joint, the pressing faces of the two pressurizing blocks cannot be kept parallel. (2) In order to make the thickness of the resin composition layer constant by the "surface uniformity" processing (refer to the 10th drawing of Patent Document 2), the thickness of the laminate of the substrate and the resin composition layer cannot be made constant (refer to Patent 2 of FIG. 9). In Patent Document 2, since a part of the pressing surface of the pressing block is brought into contact with a thick portion of the substrate, the resin composition layer which is easily deformed by heat flows out from the substrate layer. It is impossible to form a resin composition layer having a predetermined thickness. The present invention has been made in order to solve the above problems, and an object of the present invention is to provide a laminated forming apparatus and a laminated forming method, in which a parallel structure is maintained in a state in which a pressing surface of a fixed disk and a movable disk are maintained in parallel with a simple structure. In order to achieve the above object, the fixed disk is formed by linearly moving the movable disk in a direction orthogonal to the opposing surface thereof, thereby forming a laminated molding product of the uniform thickness of the laminated product of the uniform thickness from the intermediate laminated product. A laminator that laminates and laminates a laminate and a laminate into an intermediate laminate by heating and pressurization, and presses the intermediate laminate formed by laminating the laminate at a predetermined temperature to form a surface. A flat forming apparatus that forms a flat flattening press and transports the intermediate laminated product from the laminating machine to the flattening press, wherein the flattening press is disposed to face each other and to each other a fixed disk with a smooth pressing surface on the opposite side and a movable disk, with respect to the fixed disk, the movable disk is oriented close to -8-(6) (6) 1331557 or a pressing means for moving the intermediate layered product formed by laminating the laminator in a direction away from the fixed plate, and guiding the movable disk to move linearly in a direction orthogonal to the opposing surface thereof a linear moving means; the linear moving means includes: a plurality of ball latching groove shafts disposed to extend in a direction in which the movable disk linearly moves in a corner portion of the movable disk, and are respectively inserted into the respective ball latching grooves The ball cage of the shaft. According to the invention of claim 1, in the invention of claim 1, the pressing means of the flattening press is joined to the center of the movable plate only one by one. According to the invention of claim 1 or 2, in the invention of claim 1 or 2, a plurality of ball-bolt cylinders are provided at each corner portion of the movable disk of the flattening press, and the plurality of ball plugs are The groove cylinders are respectively inserted into the respective ball bolt groove shafts. In the invention of the method for forming a laminate according to claim 4, the laminate and the laminate are heated and pressed by a laminator to form an intermediate laminate by laminating, and the intermediate laminate is conveyed from the laminator to a flattening press. A method for forming a laminate in which the intermediate laminate is pressed at a predetermined temperature by a flattening press to form a flat surface; wherein the flattening press has a facing surface that faces each other and has a facing surface a pressing plate and a movable plate of a smooth pressing surface, and a pressing means for moving the movable layer in a direction of approaching or moving away from the fixed disk to press the intermediate layered product formed by the laminating machine, a linear disk moving means for guiding the movable disk to linearly move in a direction orthogonal to the opposing surface thereof; the linear moving means is provided to extend in a direction of linear movement along the movable disk - 9 - (7) 1331557 The plurality of ball-bolt shafts disposed in the manner, and the rolled laminated products respectively inserted into the respective ball-bolt shafts are transported from the laminating machine to the flattening press, by the foregoing The ball-bolt-slot shaft insertion ball moving means presses the movable disk toward the intermediate plate of the fixed disk by pressing means at a predetermined temperature by the pressing means, so that the laminated forming device according to the request item The laminated material and the laminated material are heated and layered, and then between the fixed plate and the movable plate of the intermediate laminating press by means of conveyance. The opposing faces of the movable and movable disks are smooth, and the bead pin grooved cylinder is inserted into the ball pin groove shaft so as to extend in the linear movement direction of the balls at the respective corners of the movable plate. Therefore, when the position of the movable plate approaches the fixed disk and the surface of the intermediate laminated product is flat, the same movable plate is guided orthogonally to the opposite surface thereof, so that the parallelism between the fixed disk and the movable disk surface can be increased from In the invention described in the laminated layer forming apparatus according to claim 2, the flattening press presses the center of the movable plate, and the movable disk is provided on the movable disk. The corner of the movable plate and the bead pin groove: guiding the direction in which the linearly moving surface formed by the grooved cylinder between the fixed plate and the movable plate in the middle is orthogonal, the same position is moved, and the surface is flattened. . According to the invention, the intermediate product is formed by laminating the laminated product and transported from the laminating machine to the flattening press, and is attached to the processing surface of the fixed disk. The linear movement means that the grooved cylinder is inserted, and the ball is inserted along the movable disk, and the roller is linearly moved by the linear movement means when the pressure is pressed by the pressing means at a predetermined temperature. The pressure holding on the opposite side of the method can make the thickness of the intermediate layer. The invention is based on the claim 1 means that only one single piece and the ball-bolt tube can be joined to each other -10- (8) (8) 1331557 for the ball bolt groove shaft to be evenly slid, and the intermediate layer is laminated due to pressure Since the deformation of the fixed disk and the movable disk caused by the product does not vary, the intermediate laminated product can be reliably and uniformly pressurized to form a flat and uniform thickness. According to the invention of claim 3, in the invention of claim 1 or claim 2, a plurality of ball-bolt cylinders are respectively provided at each corner portion of the movable disk of the flattening press to make a plurality of The ball bolt groove cylinders are connected in the axial direction and are respectively inserted into the respective ball bolt groove shafts, whereby the length of the ball bolt groove cylinder becomes longer with respect to the ball bolt groove shaft, and the movable disk is positively directed toward the opposite surface thereof. The direction in which the intersection is moved linearly is guided. According to the invention of the method of forming a laminate according to claim 4, the flattening press comprises: a fixed disk and a movable disk having a smooth pressing surface disposed opposite to each other and facing each other, and the movable disk is opposed to the fixed disk a pressing means for moving the intermediate layered product formed by stacking the laminated machine in a direction close to or away from the fixed plate, and moving the movable disk linearly in a direction orthogonal to the opposing surface thereof with respect to the fixed disk a linear moving means for guiding, wherein the linear moving means includes a plurality of ball latching groove shafts extending in a direction in which the movable disk linearly moves, and is disposed at a corner portion of the movable disk and inserted into each of the balls The ball screw grooved cylinder of the slotted shaft. The laminated material and the laminated material are heated and pressurized by a laminator to form an intermediate laminated product by lamination, and the intermediate laminated product is transported from the laminating machine to the fixed plate of the flattening press and the movable plate by means of conveying means. . The flattening press has a smooth machined surface on the opposing faces of the fixed disk and the movable disk. The linear moving means is provided with a ball bolt groove at each corner of the movable plate, and a plurality of balls 11 - (9) 1331557 bolt groove tube are arranged to extend in a linear moving direction of the movable plate, and the ball pin is further inserted. The groove is inserted into the ball bolt groove shaft. The laminated material is heated and pressurized by a laminator to form a middle product by lamination, and the intermediate laminated product is conveyed from the laminator to the movable platen between the flattening press. In the flattening press, the position of the fixable disk is moved close by the pressing means, and the surface of the layer is flattened by pressurization at a predetermined temperature. At this time, the linear moving means, the corners of the corners of the mooring are provided with the ball bolt groove cylinders, and the plurality of ball bolt groove cylinders are arranged to extend in the straight direction of the movable disk, and the ball bolts are passed through the ball bolt groove shafts. Therefore, the linear moving means can guide the movable disk to move linearly in a direction orthogonal to the opposing surface thereof, and the parallel pressing of the pressing surface provided on the opposing faces of the fixed disk and the movable disk is surely maintained. The intermediate laminate can be made to be uniform and uniform to form a flat and uniform thickness. Regarding the flattening press, it is preferable to make the movable plate move the lift type press. Regarding the movement of the movable plate of the flattening press relative to the fixed disk, the opening amount at the time of forming the intermediate laminated product is preferably set to be in the range of 10 to 20% with respect to the maximum opening amount of the cultivating time or the like. The length of the axial direction of the ball should be set in the range of 60 to 70% with respect to the length of the axial direction of the ball screw groove shaft. The axial length of the ball pin groove cylinder should be set in the range of 200 - with respect to the thickness. According to the laminated forming apparatus of the present invention, the linear moving means is provided with a plurality of bolt shafts extending in a direction in which the movable disk linearly moves, and is provided at a corner portion of the movable disk and inserted into each of the above-mentioned respective layers and interlayers The fixed disc moving plate accumulates in the middle of the movable line to move the trough into the ground. Therefore, the degree can be lifted from the ground and the vertical lifting and repairing is carried out. The movable disc is movable on the flat bolt trough. ^ 250 %: One ball bearing bolt-12- (10) (10) 1331557 The ball screw grooved cylinder of the groove shaft; thereby, the parallelism of the pressing faces of the fixed plate and the movable plate of the flattening press can be maintained at a high precision, with respect to the fixed plate Since the movable disk is linearly moved in a direction orthogonal to the opposing surface thereof, the intermediate laminated product can be reliably formed with a uniform thickness. According to the laminated forming method of the present invention, the linear moving means of the flattening press has: a plurality of ball bolt groove shafts arranged to extend in a direction in which the movable disk moves linearly, and a ball pin groove tube which is disposed at a corner portion of the movable disk and is respectively inserted into each of the ball pin groove shafts; Arranging the intermediate laminated product between the fixed plate and the movable plate of the flattening press, and moving the movable plate to be orthogonal to the opposite surface thereof by a linear moving means (the ball plug groove shaft is inserted into the ball bolt grooved cylinder) Directionally guiding, and moving the movable disk toward the fixed disk by the pressing means, and pressurizing the intermediate laminated product at a predetermined temperature; by adopting such a configuration, the fixed disk and the movable disk can be maintained In the state in which the pressure surface is parallel, the movable disk is linearly moved in a direction orthogonal to the opposing surface of the fixed disk, so that the intermediate laminated product can be reliably molded with a uniform thickness. [Embodiment] An embodiment of the present invention will be described in detail based on Figs. 1 to 7 . In the drawings, the same or equivalent parts are given the same symbols. In the case of the following description, the insulating layer of the laminated material is laminated on the substrate layer (layered material) having the circuit pattern and having irregularities on the surface thereof, and the surface of the insulating layer is flattened to finally form a build-up layer. Substrate. The laminated forming apparatus of the present invention mainly comprises a laminator 1 for laminating the laminated materials A1 and 13-(11) (11) 1331557 by heating and pressurizing the laminated material A2, and laminating the intermediate laminated product A3. The flattening press 2 in which the intermediate laminated product A3 formed by lamination of the machine 1 is pressed at a predetermined temperature to form a smooth flattening press 2, and the intermediate laminated product A3 is transported from the laminating machine 1 to the flattening press 2 . The flattening press 2 includes a fixed disk 20 having a smooth pressing surface disposed opposite to each other and a movable disk 21' with respect to the fixed disk 20, and the movable disk 21 is moved toward or away from the fixed disk 21. The pressing means 22 for pressurizing the intermediate laminated product A3 formed by laminating the laminated machine 1 and guiding the movable disk 21 so as to linearly move in a direction orthogonal to the opposing surface thereof with respect to the fixed disk 20 The linear movement means 23. The linear movement means 23 includes a plurality of ball-bolt shafts 24 that are disposed to extend in a direction in which the movable disk 21 linearly moves, and are provided at the corners of the movable disk 21, and are respectively inserted into the respective ball-bolt shafts. 24 ball pin groove cylinder 25. Further, the pressing means 22 is constituted by a single pressing cylinder, and the punch 22a of the pressing cylinder 22 is joined to the center of the movable plate 21. In each of the corner portions of the movable platen 21 of the flattening press 2, a plurality of ball pin chutes 25 and 25 are arranged in a row and are respectively inserted into the respective ball stud shafts 24. Further, in the layer forming method of the present invention, the laminated product A1 and the laminated material A2 are heated and pressurized by the laminator 1 to form a laminated product A3'. The intermediate laminated product A3 is conveyed from the laminating machine 1 to the flat layer. In the chemical press 2, the intermediate laminated product A3 is pressed by the flattening press 2 at a predetermined temperature to form a flat surface, and the flattening press 2 is provided with a smooth arrangement on the opposite faces and opposite sides of each other. The fixed disk 20 and the movable disk 21 of the pressing surface 41 move relative to the fixed disk 20 toward the direction of -14-(12) (12) 1331557 or away from the fixed plate 21 to pressurize the intermediate laminated product A3. The pressing means 22 is a linear moving means 23 for guiding the movable disk 21 linearly moving in a direction orthogonal to the opposing surface thereof with respect to the fixed disk 20. The linear moving means 23 is provided with the movable disk 21 a plurality of ball bolt groove shafts 24 disposed in a direction in which the linear movement direction is extended, and a ball bolt groove cylinder 25 provided at each corner portion of the movable plate 21 and inserted into each of the ball bolt groove shafts 24; A3 is transported from the laminator 1 to the flattening press 2 Between the fixed disk 20 and the movable disk 21, the movable disk 21 is guided in a direction orthogonal to the opposing surface thereof by the linear moving means 23 formed by inserting the ball pin groove cylinder 25 into the ball pin groove shaft 24, by The pressing means 22 moves the movable disk 21 toward the fixed disk 20, and presses the intermediate laminated product A3 at a predetermined temperature to form a flat surface. The insulating layer A1 which is a laminated material is, for example, a thermosetting resin such as an epoxy resin, and has a thickness of, for example, a film of about 30 to 100 sec. The initial state is a peelable manner on one side. A film-shaped support made of polyethylene terephthalate or the like is bonded to the other surface, and the protective film is attached to the other surface in a peelable manner. In addition to the epoxy resin, the insulating layer A1 can be made of a thermoplastic or thermosetting insulating material composed of, for example, polyimide, liquid crystal polymer, polyethylene terephthalate or the like (with various resins and varnishes). And the constituents). A circuit pattern (concavity and convexity) formed of a copper foil is formed on the surface of the substrate layer A2 on which the insulating layer is laminated. The substrate layer A2 has a thickness of, for example, about 1 to 2 mm. In the case of the second layer insulating layer A1 of the substrate layer A2, the present invention is also applicable to the case of the one-layer insulating layer Ai of the substrate layer A2. Insulation A1 -15- (14) (14)
1331557 實施形態，係藉由載帶膜F、供應輥30及捲取輥31 成搬運手段3。關於載帶膜F的作用，除了搬運絕 A1、基板層A2、中間積層品A3、成形品A4以外， —作用在於：防止絕緣層A1被積層機1加熱後產生 而附著於周圍、或防止中間積層品3中的絕緣層A 1 坦化壓機2以既定溫度加熱後產生熔融而附著於周圍 坦化壓機2不限於1台，也能在積層機1和捲取輥 間配置複數台的平坦化壓機2。 本實施形態之積層機1係具備：呈相對向配置之 10和下盤11、用以使下盤11昇降移動（使其接近或 上盤10)之開閉缸12'將上盤10和下盤11閉合後 成之室內予以減壓之減壓手段（未圖示）、用來將 10和下盤11所配設之絕緣層A1和基板層A2實施加 膜體13 (後述）以及用來加熱成既定溫度之熱板^ 體13，例如由肖氏A硬度20〜60度、厚度1〜4mm 之矽橡膠所構成。熱板14上，例如安裝有插裝加熱 cartridge heater)。除了在熱板14上安裝插裝加熱 外，也能在膜體13或熱板14的表面貼合橡膠加熱器 如此般構成之積層機1，當藉由載帶膜F之送進 而將絕緣層A1和基板層A2搬運於下盤10和下盤 間，藉由開閉缸12使上盤10和下盤11衝合而形成 ，將室內減壓，對下方和上方至少一方的膜體13之 側供應壓縮空氣以使膜體13膨脹，藉此對絕緣層/ 基板層A2例如以0.3〜0.9MPa左右加壓，同時藉由 來構 緣層 其另 熔融 被平 〇平 31之 上盤 ，遠離 所形 上盤 丨壓之 卜膜 左右 器（ 器以 〇 動作 11之 ，室後 背面 U和 I熱盤 -17- (17) (17)1331557 致在固定盤20的下面形成緩衝。藉由在殼體部21a內縱 列配設2個滾珠栓槽筒25、25，其和形成於繫桿27之滾 珠栓槽軸24的卡合長度，變得比僅設置單一滾珠栓槽筒 25的情形更長，因此能穩定地引導可動盤21之昇降移動 。具體而言，當可動盤21的厚度L21例如爲1 20mm，各 滾珠栓槽筒25的長度例如爲125mm時，將2個縱列配置 時之全體長度L25成爲250mm，變得比可動盤21的厚度 L21長很多。複數個滾珠栓槽筒25全體的長度L25，宜 設定成可動盤21厚度L21之1.3倍〜3.0倍。這時，當後 述般可動盤21之最大衝程LM(參照第5圖之中心線右方 )爲130mm時，形成於繫桿27之滾珠栓槽軸24的長度 L24成爲3 80mm，滾珠栓槽筒25實際可移動之有效衝程 爲385mm左右。相對於滾珠栓槽軸24之軸方向長度L24 ，複數個滾珠栓槽筒25全體之軸方向長度L25宜設定在 50〜70%的範圍。平坦化壓機2，有別於圓柱形的繫桿27 ，可另外設置複數個可動盤引導用之滾珠栓槽軸24。 在第5圖中，中心軸線C-C左方代表通常成形時可動 盤2 1打開的狀態，中心軸線C-C右方代表維修保養時等 之可動盤21打開最大的狀態。滾珠栓槽軸之長度L24係 設定成：比起可動盤21相對於固定盤20之最大昇降衝程 LM和呈縱列配置之複數個滾珠栓槽筒25、25的全體長度 L25的合計長度，係同等程度或更長。可動盤21相對於 固定盤20之最大昇降衝程，係將中間積層品A3的表面 進行平坦成形時之打開量設定在維修保養時等的最大打開 -20- (20) 1331557 21的速度設定爲高速，因此不會拉長成形循環時間。 在無法控制可動盤21的速度時，可動盤21高速移動會 中間積層品A3施加必要以上的初期加壓力，如此容易 形的樹脂會朝中間積層品A3的外部流出，但本發明並 會發生這種問題。又在加壓時，藉由壓力控制，能以所 望的加壓力進行中間積層品A3之加壓。 在本發明，藉由將衝柱2 2a接合於可動盤21的中 ，可避免可動盤21中央部以外的部分被緊壓而對中間 層品A3形成偏抵狀態。特別是不會對中間積層品A3 加不均等的初期加壓力。另外，由於是對可動盤21的 央部施壓，可動盤21會彎曲變形，但作用於中間積層 A3中心附近的加壓力不會低於作用於周邊附近之加壓 。因此，構成中間積層品A3之絕緣層A1，會被熱板 調整成既定的溫度，且被鏡面板41 (透過緩衝層42來 裝）以不致發生初期加壓力較弱部分的方式大致均等的 壓，因此絕緣層A1之容易變形的樹脂不會流向中間積 品A3的外部，而能成形出表面平坦且具有均一厚度的 形品A 4。 將中間積層品A3以30〜60秒、70〜120°C進行加 而成形出表面平坦且具有均一厚度的成形品A4後，將 壓缸22之衝柱22a進行退縮驅動’如第5圖之中心軸 C-C之左方所示，可動盤21以較小的衝程LS下降而離 固定盤20。之後，藉由載帶膜F之進給，將成形品A4 固定盤20和可動盤21的鏡面板4〗間朝第1圖之左方 又 對 變 不 期 央 積 施 中 品 力 40 安 加 層 成 壓 緊 線 開 從 搬 -23- (21) (21)1331557 出。成形品A4之絕緣層A1的表面上所貼合之支承體， 視需要可予以剝離。又當成形品A4爲增層基板用的情形 ’在使絕緣層A1硬化的步驟之後，在絕緣層A1的表面 形成電路圖案，再度疊合絕緣層A1，而反覆進行本發明 之積層成形方法。 另一方面，在對平坦化壓機2進行維修保養時，係使 緊壓缸22之衝柱22a進行退縮驅動，如第5圖之中心軸 線C-C之右方所示，可動盤21會以較大的衝程LM下降 ，而和固定盤20間隔足夠大的距離。因此，容易進行平 坦化壓機2之維修保養。 本發明並不限於上述實施形態，例如在表面具有銅箔 等的導電層之基板層（被積層材）上，積層光阻層（積層 材），而使該中間積層品的表面形成平坦的情形等等其他 製品的積層成形，本發明都能適用。另外，平坦化壓機2 ，也能將固定盤20配置於下方，將可動盤21配置於上方 。本發明並不限於增層基板之製造，只要是將中間積層品 的表面以平坦且均一厚度進行成形的情形都能適用。 【圖式簡單說明】 第1圖係用來說明本發明的積層成形裝置之一實施形 態之槪念圖。 第2圖係平坦化壓機之前視圖，其顯示將中間積層品 加壓後的狀態。 第3圖係平坦化壓機的可動盤之俯視圖。 -24- (22) (22)1331557 第4圖係平坦化壓機之局部放大圖。 第5圖係顯示平坦化壓機的各構成部分之尺寸關係的 說明圖》 第6圖係顯示對平坦化壓機之固定盤及可動盤安裝熱 板之局部放大圖。 第7圖係本發明之平坦化壓機之由滾珠栓槽軸（設於 繫桿）和滾珠栓槽筒（設於可動盤）所構成之直線移動手 段之截面圖。 【主要元件符號說明】 A1 :緣層（積層材） A2:基板層（被積層材） A3 :中間積層品 A4 :表面平坦且均一厚度之成形品 F :載帶膜 1 :積層機 2 :平坦化壓機 3 :搬運手段 20 :固定盤 21 :可動盤 22 :緊壓缸（緊壓手段） 23 :直線移動手段 24 :滾珠栓槽軸 25 :滾珠栓槽筒 -25- (23) (23)13315571331557 In the embodiment, the conveying means 3 is formed by the carrier film F, the supply roller 30, and the take-up roller 31. The action of the carrier film F is to prevent the insulating layer A1 from being generated by the laminator 1 and adhering to the surroundings, or to prevent the middle, in addition to the carrier A1, the substrate layer A2, the intermediate laminate A3, and the molded article A4. The insulating layer A 1 in the laminated product 3 is heated at a predetermined temperature and melted to adhere to the surrounding canalizing press 2, and is not limited to one, and a plurality of sets can be disposed between the laminating machine 1 and the winding roller. Flatten the press 2. The laminating machine 1 of the present embodiment includes an opening and closing cylinder 12' for placing the upper and lower discs 11 and the lower tray 11 and moving the lower tray 11 (to bring it closer to or above the upper tray 10). 11: a decompression means (not shown) for decompressing the inside of the closed chamber, an insulating layer A1 for disposing the 10 and the lower tray 11, and a substrate layer A2 to be applied to the filming body 13 (described later) and for heating The hot plate body 13 having a predetermined temperature is composed of, for example, a rubber having a Shore A hardness of 20 to 60 degrees and a thickness of 1 to 4 mm. On the hot plate 14, for example, a cartridge heater is mounted. In addition to the insertion of the plug-in heating on the hot plate 14, the laminator 1 of the rubber heater can be attached to the surface of the film body 13 or the hot plate 14, and the insulating layer can be formed by the carrier film F. A1 and the substrate layer A2 are transported between the lower tray 10 and the lower tray, and the upper tray 10 and the lower tray 11 are formed by the opening and closing cylinder 12, and the chamber is depressurized to the side of the film body 13 at least one of the lower side and the upper side. The compressed air is supplied to expand the film body 13, whereby the insulating layer/substrate layer A2 is pressurized, for example, at a pressure of about 0.3 to 0.9 MPa, while the other is melted by the rim layer, which is further flattened by the flat plate 31, away from the shape. The upper and lower sides of the film are pressed by the upper and lower sides of the device. The rear side U and I hot plates -17-(17) (17) 1331557 cause buffering under the fixed disk 20. By the housing Two ball pin groove cylinders 25 and 25 are disposed in the longitudinal direction of the portion 21a, and the engagement length with the ball bolt groove shaft 24 formed on the tie rod 27 becomes longer than the case where only the single ball bolt groove cylinder 25 is provided. Therefore, the lifting movement of the movable platen 21 can be stably guided. Specifically, when the thickness L21 of the movable platen 21 is, for example, 1 20 mm When the length of each of the ball studs 25 is, for example, 125 mm, the entire length L25 of the two rows is 250 mm, which is much longer than the thickness L21 of the movable disk 21. The length L25 of the entire number of the ball barrels 25 is large. It is preferable to set it to 1.3 times to 3.0 times the thickness L21 of the movable disk 21. At this time, when the maximum stroke LM of the movable disk 21 (refer to the right side of the center line of Fig. 5) is 130 mm, the ball formed on the tie bar 27 is formed. The length L24 of the bolt shaft 24 is 380 mm, and the effective stroke of the ball bolt groove 25 is about 385 mm. The axial direction of the plurality of ball bolt grooves 25 relative to the axial length L24 of the ball bolt shaft 24 The length L25 is preferably set in the range of 50 to 70%. The flattening press 2 is different from the cylindrical tie bar 27, and a plurality of ball latching groove shafts 24 for guiding the movable disk can be additionally provided. In Fig. 5, The left side of the center axis CC represents the state in which the movable disk 21 is normally opened, and the right side of the center axis CC represents the state in which the movable disk 21 is opened at the time of maintenance. The length L24 of the ball pin groove axis is set to be movable: The maximum rise of the disk 21 relative to the fixed disk 20 The total length L25 of the down-stroke LM and the plurality of ball-bolt cylinders 25, 25 arranged in a column is equal to or longer than the maximum lifting stroke of the movable disk 21 with respect to the fixed disk 20. When the surface of the product A3 is flat-formed, the opening amount is set to the maximum opening during maintenance, etc. -20- (20) 1331557 21 The speed is set to high speed, so the molding cycle time is not lengthened. At the time of the speed, when the movable disk 21 moves at a high speed, the intermediate laminated product A3 is applied with an initial pressing force of more than necessary, and the easily formed resin flows out to the outside of the intermediate laminated product A3. However, this problem occurs in the present invention. Further, at the time of pressurization, by the pressure control, the pressurization of the intermediate laminate A3 can be performed at a desired pressing force. In the present invention, by joining the punch 2 2a to the movable disk 21, it is possible to prevent the portion other than the central portion of the movable disk 21 from being pressed and to form an offset state with respect to the intermediate layer A3. In particular, there is no initial pressure on the intermediate laminate A3. Further, since the movable plate 21 is bent and deformed by pressing the central portion of the movable platen 21, the pressing force acting near the center of the intermediate layer A3 is not lower than the pressure applied to the vicinity of the periphery. Therefore, the insulating layer A1 constituting the intermediate laminate A3 is adjusted to a predetermined temperature by the hot plate, and is substantially equal in pressure by the mirror panel 41 (through the buffer layer 42) so as not to cause a weak initial portion. Therefore, the easily deformable resin of the insulating layer A1 does not flow to the outside of the intermediate product A3, and the shape A 4 having a flat surface and a uniform thickness can be formed. After the intermediate laminate A3 is added at 30 to 60 seconds and 70 to 120 ° C to form a molded article A4 having a flat surface and a uniform thickness, the punch 22a of the cylinder 22 is retracted and driven as shown in Fig. 5. As shown to the left of the central axis CC, the movable disk 21 is lowered away from the fixed disk 20 by a small stroke LS. After that, by the feeding of the carrier film F, the molded article A4 is fixed between the disk 20 and the mirror plate 4 of the movable plate 21 toward the left side of the first figure, and the product is 40 angstroms. The compression line is opened from the moving -23- (21) (21) 1331557. The support bonded to the surface of the insulating layer A1 of the molded article A4 can be peeled off as needed. In the case where the molded article A4 is a build-up substrate, 'after the step of curing the insulating layer A1, a circuit pattern is formed on the surface of the insulating layer A1, and the insulating layer A1 is superposed again, and the layer forming method of the present invention is repeatedly performed. On the other hand, when the flattening press 2 is subjected to maintenance, the punch 22a of the press cylinder 22 is retracted and driven, as shown by the right side of the center axis CC of Fig. 5, the movable plate 21 is compared. The large stroke LM drops and is spaced a sufficient distance from the fixed disk 20. Therefore, it is easy to perform maintenance of the flattening press 2. The present invention is not limited to the above-described embodiment, and for example, a photoresist layer (layered material) is laminated on a substrate layer (layered material) having a conductive layer such as copper foil on its surface, and the surface of the intermediate laminate is flattened. The present invention can be applied to the lamination of other articles. Further, in the flattening press 2, the fixed disk 20 can be placed below, and the movable disk 21 can be placed above. The present invention is not limited to the production of a build-up substrate, and can be applied as long as the surface of the intermediate laminate is formed into a flat and uniform thickness. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view for explaining a state of implementation of one of the laminated forming apparatuses of the present invention. Fig. 2 is a front view of the flattening press showing a state in which the intermediate laminate is pressurized. Figure 3 is a plan view of the movable plate of the flattening press. -24- (22) (22) 1331557 Figure 4 is a partial enlarged view of the flattening press. Fig. 5 is a view showing the dimensional relationship of each component of the flattening press. Fig. 6 is a partially enlarged view showing the fixing plate of the flattening press and the movable plate mounting hot plate. Fig. 7 is a cross-sectional view showing the linear moving hand of the flattening press of the present invention, which is composed of a ball strut shaft (provided in a tie rod) and a ball bolt grooved cylinder (disposed on a movable disc). [Description of main component symbols] A1: Edge layer (laminated material) A2: Substrate layer (laminated material) A3: Intermediate laminated product A4: Shaped product with flat surface and uniform thickness F: Carrier film 1: Laminator 2: Flat Chemical press 3: transport means 20: fixed plate 21: movable plate 22: pressing cylinder (tightening means) 23: linear moving means 24: ball pin groove shaft 25: ball pin grooved cylinder - 25 (23) (23 ) 1331557
26 :底盤 27 :繫桿 40 :熱板 41:鏡面板（加壓面） -26 -26: Chassis 27: tie rod 40: hot plate 41: mirror panel (pressurized surface) -26 -