1320833 九、發明說明： 【發明所屬之技術領域】 本發明大致有關於閥，且更精確言之，係有關 制腐#性流體之流動的高流量延伸衝程閥。 【先前技術】 多種形式之閥均被使用在半導體工業中，以控 腐蝕性流體之流體的流動。基本上，這些閥不會 動途徑中導致靜止或死部位，不會導致流體成為 化或捕捉固體而造成流體的污染。在半導體生產 流率有時必須為一顯著的量，且確保被使用在管 的任何閥，不會導致過度之壓力損失或限制流率 要。此外，很重要的，由於高腐蝕性流體經常被 導體工業中，潛在洩漏源或密封件之數量必須保 這些閥必須由對腐蝕性流體具有高抗性之材料 常應避免腐蝕性流體與金屬部件之接觸。接觸流 件典型均由諸如全氟烷氧基（PFA)、聚偏二氟乙稀 或聚四氟乙烤（PTFE)的含氟聚合物所形成。典型 接觸流體之閥的部位，諸如閥本體、閥與閥座、主 及密封件或墊片，均由含氟聚合物所形成。 通常經由一延伸衝程引動器將提動閥提升一較 以增加在閥與閥座之間的間隙可減少通過一該閥 制。但在使用含氟聚合物隔膜之閥中，問題在於 常不具有長的疲乏壽命，易於在相當短時間中磨4 具有充分的可撓性以妥適地與一延伸衝程引動器 312/發明說明書(補件)/93-10/93丨20647 於用以控 制包含高 在流體流 腐壞與劣 中的流體 路糸統中 係非常重 使用在半 持最小。 製成。通 體之組成 (PVDF)、 地，直接 要隔膜、 大距離， 的流動限 該隔膜通 員。此外’ 作用的含 5 1320833 氟聚合物隔膜可能為易碎的且易於承受過度應力，導致間 的過早故障。在精密半導體處理作業中的閥故障，會造成 昂貴的處理延遲及損壞精密的設備與產品之結果。 在該工業中仍需要一供腐蝕性流體用之延伸衝程提動 閥，其可具有可延長閥之服務壽命的特色。 【發明内容】 本發明提供一種特別適合供處理腐蝕性流體之延伸衝 程提動閥，其與先前之閥比較，具有可延長閥之服務壽命 的特色。閥包含一二部件主要隔膜組件，其具有一由高抗 疲乏性含氟聚合物材料製成的濕式隔膜，及一由高強度含 氟聚合物材料製成的隔膜支持物，其被設計以耐受由一延 伸閥衝程所施加之高應力負載。此二層組合在一主要隔膜 組件中，產生一高耐用性、抗化學腐蝕性、可使用在一長 衝程提動閥中且具有相當長服務壽命之隔膜。可直接改善 閥之耐用性與服務壽命，進而改善處理效率並減少成本。 依此，隔膜閥包含一閥本體，用以界定一入口路徑、一 出口路徑、及一流體室。流體室具有一内部壁與一開啟側。 入口路徑與出口路徑形成一開口在内部壁中，因此，入口 路徑、出口路徑、及流體室均互相流體地連通。一閥座部 位環繞在流體室中之入口路徑開口 。一可撓隔膜組件係位 於可密封地封閉流體室之開啟側的位置。可挽隔膜具有一 朝向進入流體室之閥部位，且可選擇地位移在至少一閥部 位係密封地結合閥座部位以阻塞流動通過該閥的流體之閥 封閉位置，與閥部位自閥座間隔開使流體可流動通過該閥 6 312/發明說明書(補件)/93-10/93120647 1320833 構 支 隔 件 〇 引 中 28 30 環 件 此 ng 系 接 焊 % 膜 含 7 的閥開啟位置之間。可撓隔膜組件包含一主要隔膜組件 其包括一由抗疲乏性含氟聚合物材料所形成之主要隔膜 件，及一由高強度含氟聚合物材料所形成之鄰近的隔膜 持物構件。隔膜組件可進一步包含一自主要隔膜組件間 開之副隔膜。閥亦可包含一引動器組件，可動地與可撓隔膜組 耦合，用以可選擇地定位可撓隔膜組件在閥開啟與閥封閉位置 【實施方式】 延伸衝程閥1 0大致上包含本體1 2、隔膜組件1 4、及 動器組件1 6。本體1 2具有一設有一對突出螺紋接管2 0 2 2的中央部位1 8。入口路徑2 4自螺紋接管2 0延伸進入 央部位 1 8内，向上轉向且終止於流體室 2 6中。閥座 環繞在流體室 2 6中的入口路徑 2 4之終端。出口路徑 自流體室2 6延伸通過中央部位1 8及螺紋接管2 2。配合 3 2自中央部位 1 8向上地延伸，且具有用以承接隔膜組 1 4與引動器組件1 6之内螺紋區域3 4與外螺紋區域3 6， 將於下進一步詳述。每一螺紋接管2 0、2 2具有用以承接 螺紋直 口 接頭套筒（threaded compression fitti sleeve)40之螺紋區域38，使閥10可被裝附至管路或管 (未顯示）。當然，亦可使用任何型式之配件或接頭來連 管路或管系至閥1 0，包含喇°八口接頭、直螺紋接頭、或 接。 隔膜組件14 一般包含主要隔膜組件42、隔膜扣圈44 副隔膜4 6、及桿4 8。主要隔膜組件4 2 —般包含濕式隔 5 0及隔膜支持物5 2。濕式隔膜5 0係較佳由高抗疲乏性 312/發明說明書(補件)/93-10/93120647 1320833 氟聚合物材料所形成，較佳為PTFE材料。目前最佳之供濕 式隔膜 5 0用的材料，係日本D a i k i η I n d u s t r i e s L t d ·製 造的D a i k i η M 1 1 2。另一較佳材料係"H y Q " P T F E。隔膜支持 物5 2係較佳由高強度改良含氟聚合物材料所形成，較佳為 P T F E材料。目前最佳之供隔膜支持物 5 2用的材料，係 Newark, Delaware 的 W. L. Gore & Associates, Inc.製造 的GORE-TEX®。當然，可輕易了解，濕式隔膜50亦可由高 強度改良含氟聚合物材料製成，而隔膜支持物52亦可由高 抗疲乏性含氟聚合物材料製成。 濕式隔膜5 0具有被一薄可撓部位5 8所連接之周邊環5 6 及中央部位5 4。周邊環5 6被密封地承接在本體1 2之中央 部位1 8的朝上槽6 0中。閥構件6 2自中央部位5 4向下地 突出，且具有一設有底部表面 66的放大頭部 64。傾斜密 封部位6 8被形成在底部表面6 6上，且其位置及尺寸被配 置成可密封地配接閥座2 8。凹處7 0被形成在中央部位5 4 的頂部表面7 2中，且具有用以承接桿4 8之内螺紋7 3，此 將於下詳述。 隔膜扣圈 44具有外螺紋區域74且螺入配合環 32的内 螺紋區域3 4内。濕式隔膜5 0與隔膜支持物5 2均被配置在 隔膜扣圈 4 4與本體 1 2的凸肩 7 6之間，最佳如圖6與 7 所示。在隔膜扣圈 4 4被緊固時，周邊環 5 6被壓入槽 6 0 内，因而形成在主要隔膜組件42之周邊處的密封。隔膜扣 圈44具有一中央孑L 口 78。桿48延伸通過中央孑L 口 78以 結合凹處7 0。 8 312/發明說明書(補件)/93-10/93120647 1320833 副隔膜46覆蓋隔膜扣圈44，且具有被一薄可撓部位84 所連接之中央環8 2與周邊環8 0。在中央環8 2中的孔口 8 6 配接且結合桿4 8的中間部位8 8。副隔膜4 6的底部表面9 0 結合桿4 8之凸肩9 2，而周邊環8 0配接進入配合環3 2的 上部凸肩94内。在洩漏通過主要隔膜組件42的情況中， 副隔膜4 6係作用為一上部抑制屏障，且可由任何適合之具 有合適強度特性的可撓、抗疲乏性材料製成。目前最佳係 使用P T F E、織物、及含氟彈性體材料之併合物作為副隔膜 4 6的材料。較佳之含氟彈性體材料係W i 1 m i n g t ο η，D e 1 a w a r e 之 DuPont Dow Elastomers L.L.P.製造的 Viton®。 桿48具有下部螺紋部位96、放大部位98、階式中間部 位8 8、及上部螺紋部1 0 0。下部螺紋部位9 6具有用以結合 在主要隔膜組件 4 2中的凹處 7 0之内螺紋7 3的外部螺紋 1 0 2。放大部位9 8具有一承載在主要隔膜組件4 2之頂部表 面7 2上的底部表面1 0 4。上部螺紋部位1 0 0結合引動器組 件1 6，此將於後進一步詳述。 引動器組件1 6 —般包含活塞1 0 6、彈簧套件1 0 8、密封 環1 1 0、1 1 2、外罩1 1 4及扣圈環1 1 6。活塞1 0 6被可滑動 地裝設在外罩1 1 4中，且一般包含被膜板部位1 2 2所連接 之側緣1 2 0與桿部位 1 1 8。桿部位1 1 8具有自底部側1 2 6 延伸之孔1 2 4。孔1 2 4可具有用以承接桿4 8之上部螺紋部 位1 0 0的内螺紋1 2 8。側緣1 2 0具有尺寸被設定為用以承 接密封環1 1 〇之周邊槽1 3 0 ’其與外罩1 1 4之内部壁1 3 2 形成一滑動密封件。桿部位1 1 8、腹板部位1 2 2與側緣1 2 0 9 312/發明說明書(補件)/93- ] 0/93丨20647 1320833 均較佳係被定向使得活塞1 0 6係具有一向上導向‘凹處1 3 4 的杯型。彈簧套件108配接在凹處134内，且推向凹處134 的内表面1 3 6及外罩1 1 4的内部壁1 3 2，以施加向下偏壓 至活塞1 0 6與隔膜組件1 4。在所示具體例中，彈簧套件1 0 8 包含一外彈簧138、一中間彈簧140、及一内彈簧142。但 可輕易了解的，彈簧套件108可包含任何數量與組態之彈 簧，只要其可與閥所使用之流體壓力及閥1 〇 ‘所使用之特定 引動器的特性一致即可。亦可輕易了解的，雖然於此說明 —普通的封閉型式閥組態，本發明之隔膜組件1 4亦可被應 用在一普通的開啟型式閥設計中。 外罩114具有在頂部壁146中的孔口 144。活塞106的 桿部位1 1 8延伸通過且滑動在孔口 1 4 4内。密封環1 1 2配 接在桿部位1 1 8上且被承接在周邊槽1 4 7中。密封環1 1 2 作用以預防經由孔口 1 4 4且環繞桿部位1 1 8之洩漏。外罩 1 1 4亦具有一被扣圈環1 1 6所結合之周邊凸緣1 4 8。扣圈環 1 1 6具有内螺紋1 5 0，其與配合環3 2的外螺紋區域3 6結合 以保持引動器組件1 6至本體1 2。一動力或手動引動器裝 置（未顯示）可與桿部位1 1 8結合，使可選擇地在外罩1 1 4 内移動活塞1 0 6。 可設置一警告洩漏口 152，在主要隔膜組件42的周邊處 自一區域1 5 4延伸，以提供流體洩漏或通過主要隔膜組件 4 2之警示。警告洩漏口 1 5 2可被以一小含氟聚合物柱塞（未 顯示）密封，該柱塞可被洩漏所施加之流體壓力推出。此 外，如圖9所示，可設置一螺紋接管1 5 3可以連接管系（未 10 312/發明說明書(補件)/93-10/93120647 1320833 顯示），使得任何經由洩漏口 1 5 2 洩漏之流體可自鄰 1 0處排出。 在作業中，彈簧套件1 〇 8在閥封閉位置中通常偏壓 1 0 6與隔膜組件 1 4，因此，閥構件 6 2係密封地結合 2 8，截斷流動通過閥1 0之流體。然後，活塞1 0 6可被 地向上定位以抵拒彈簧套件 1 0 8之偏壓，以將閥構卡 移動至遠離閥座28之閥開啟位置，因而，可使流體流 過入口路徑2 4、流體室2 6及出口路徑3 0。因此，隔 件1 4與閥構件6 2係可選擇地放置在一閥開啟與一閥 位置。 圖9顯示延伸衝程閥1 5 6之另一具體例。閥1 5 6大 包含本體158、隔膜組件160、及引動器組件162。本體 具有一設有一對突出螺紋接管1 6 6、1 6 8的中央部位] 入口路徑1 7 0自螺紋接管1 6 6延伸進入中央部位1 6 4 向上轉向且終止於流體室1 7 2中。閥座1 7 4環繞在流 1 7 2中的入口路徑1 7 0之终端。出口路徑1 7 6自流體室 延伸通過中央部位1 6 4及螺紋接管1 6 8。配合環1 7 8 央部位1 6 4向上地延伸，且如前述具有用以承接隔膜 1 6 0與引動器組件 1 6 2之内螺紋區域 1 8 0與外螺紋 1 8 2。同樣地，每一螺紋接管1 6 6、I 6 8具有用以承接 紋直口接頭套筒1 8 6之螺紋區域1 8 4。 隔膜組件 1 6 0 —般包含濕式隔膜組件 1 8 8、隔膜 1 9 0、及桿1 9 2。主要隔膜組件1 8 8 —般包含濕式隔膜 及隔膜支持物1 9 6。同樣地，濕式隔膜1 9 4係較佳由 312/發明說明書(補件)/93-10/93120647 近閥 活塞 閥座 選擇 卜62 動通 膜組 封閉 致上 1 58 .64° 内， 體室 1 72 自中 組件 區域 一螺 扣圈 1 94 南抗 11 1320833 疲乏性含氟聚合物材料所形成，較佳為 P T F E材料，諸如 D a 1 k 1 η Μ 1 1 2或n H y Q " P T F E。隔膜支持物1 9 6係較佳由高強 度改良含氟聚合物材料形成，較佳為諸如 G0RE-TEX®t PTFE ° 濕式隔膜1 9 4具有被一薄可撓部位2 0 2所連接之周邊環 2 0 0及中央部位1 9 8。周邊環2 0 0被密封地承接在本體1 5 8 之中央部位1 6 4的朝上槽2 0 4中。閥構件2 0 6自中央部位 1 9 8向下地突出，且具有一設有底部表面 2 1 0的放大頭部 2 0 8。傾斜密封部位2 1 2被形成在底部表面2 1 0上，且其位 置及尺寸被配置成可密封地配接閥座1 7 4。凹處 2 1 4被形 成在中央部位1 9 8的頂部表面2 1 6中，且具有用以承接桿 1 9 2的内螺紋2 1 8。 隔膜扣圈1 9 0具有外螺紋區域2 2 0且螺入配合環1 7 8的 内螺紋區域1 8 0内。濕式隔膜1 9 4與隔膜支持物1 9 6均被 配置在隔膜扣圈190與本體158的凸肩222之間。將周邊 環2 0 0壓入槽2 0 4内，隔膜扣圈1 9 0便被緊固，因而形成 在濕式隔膜組件1 8 8之周邊處的密封。隔膜扣圈1 9 0具有 一中央孔口 224。桿192延伸通過中央孔口 224以結合凹 處 2 1 4。 桿 1 9 2具有下部螺紋部位 2 2 6 '放大部位 2 2 8、及上部 螺紋部位 2 3 0。下部螺紋部位 2 2 6具有用以結合在濕式隔 膜組件1 8 8中的凹處2 1 4之内螺紋2 1 8的外部螺紋2 3 2。 放大部位2 2 8具有一承載在濕式隔膜組件1 8 8之頂部表面 2 1 6上的底部表面2 3 2。上部螺紋部位2 3 0結合引動器組件 12 312/發明說明書(補件)/93-] 0/93120647 1320833 1 6 2，此將於此進一步詳述。 引動器組件1 6 2 —般包含活塞2 3 4、彈簧套件2 3 6、密 封環2 3 8、2 4 0、外罩2 4 2及扣圈環2 4 4。活塞2 3 4被可滑 動地裝設在外罩2 4 2中，且一般包含被腹板部位2 5 0所連 接之侧緣2 4 8與桿部位2 4 6。桿部位2 4 6具有自底部側2 5 4 延伸之孔2 5 2。孔2 5 2可具有用以承接桿1 9 2之上部螺紋 部位2 3 0的内螺紋2 5 6。側緣2 4 8具有尺寸被設定為用以 承接密封環2 3 8之周邊槽2 5 8，其與外罩2 4 2之内部壁2 6 0 形成一滑動密封件。桿部位2 4 6、腹板部位2 5 0與側緣2 4 8 均較佳係被定向使得活塞2 3 4係具有一向上導向凹處2 6 2 的杯型。彈簧套件236配接在凹處262内，且推向凹處262 的内表面264及外罩242的内部壁260，以施加向下偏壓 至活塞2 3 4與隔膜組件1 6 0。在所示具體例中，彈簧包裝 件 236包含一 *卜彈簧 266、一中間彈簧 268、及一内彈簧 2 7 0 »但可輕易了解的，彈簧包裝件2 3 6可包含任何數量與 組態之彈簧，只要其可與間所使用之流體壓力及閥1 5 6所 使用之特定引動器的特性一致即可。亦可輕易了解的，雖 然於此說明一普通的封閉型式閥组態，本發明之隔膜組件 1 6 0亦可被應用在一普通的開啟型式閥設計中。 外罩242具有在頂部壁274中的孔口 272。活塞234的 桿部位2 4 6延伸通過且滑動在孔口 2 7 2内。密封環2 4 0配 接在桿部位2 4 6上且被承接在周邊槽2 7 6中。密封環2 4 0 作用以預防經由孔口 2 7 2且環繞桿部位2 4 6之洩漏。外罩 2 4 2亦具有一被扣圈環2 4 4所結合之周邊凸緣2 7 8。扣圈環 13 312/發明說明書(補件)/93-10/93120647 1320833 2 4 4具有内螺紋 2 8 0，其與配合環1 7 8的外螺紋區域1 8 2 結合以保持引動器組件1 6 2至本體1 5 8。一動力或手動引 動器裝置（未顯示）可與桿部位2 4 6結合，使可選擇地在外 罩2 4 2内移動活塞234。 在示於圖9的具體例中，以0型環提供第二限制。活塞 2 3 4具有界定凹處2 8 4之下垂側緣部位2 8 2。桿1 9 2的放大 部位2 2 8被承接在凹處2 8 4中。隔膜扣圈1 9 0具有朝上凹 處 2 8 6。0型環2 8 8被配接在凹處 2 8 6中且環繞側緣部位 2 8 2的外表面 2 9 0。此外，隔膜扣圈1 9 0具有朝外之凹處 2 9 2，以承接0型環2 9 4在外罩2 4 2的内部壁2 6 0與隔膜扣 圈1 9 0之間。又，本體1 5 8的配合環1 7 8具有一在上部表 面2 9 8中的凹處2 9 6，以承接0型環3 0 0在配合環1 7 8與 外罩2 4 2之間。這些0型環2 8 8、2 9 4、3 0 0提供額外之限 制，以抑制來自通過濕式隔膜組件1 9 4之流體的破裂或滲 流之茂漏。 可設置一警告洩漏口 3 0 2，在濕式隔膜組件1 9 4的周邊 處自一區域3 0 4延伸，以提供流體洩漏或通過濕式隔膜組 件1 9 4之警示。警告洩漏口 3 0 2可被以一小含氟氯合物柱 塞（未顯示）密封，該柱塞可被洩漏所施加之流體壓力推 出。此外，可配置一配件 3 0 6，以連接管系（未顯示），使 得任何經由洩漏口 3 0 2洩漏之流體可自鄰近閥1 5 2處排出。 本發明之隔膜組件 1 4、1 6 0擁有比習知技術顯著之優 點。主要/濕式隔膜組件4 2、1 8 8的二部件構造，包含一由 高抗疲乏性含氟聚合物材料製成的濕式隔膜，及一由高強 14 312/發明說明書(補件)/93-丨0/93丨20647 1320833 度含氟聚合物材料製成的隔膜支持物，係被設計以耐受由 一延伸之閥衝程所施加之高應力載荷。此二層組合在單一 主要隔膜組件中，產生一高耐用性、抗化學腐蝕性、可使 用在一長衝程提動間中且具有相當長使用壽命之隔膜。可 直接改善閥之耐用性及使用壽命，進而改善處理效率及減 少成本。雖然於此說明通常為封閉之二位置二路提動閥， 可輕易了解的，本發明之隔膜組件可應用在多種之延伸衝 程閥組態中，包含通常為開啟及三與四路閥。 【圖式簡單說明】 圖1係依據本發明之閥的立體圖。 圖2係圖1中之閥的頂部平面圖。 圖3係依據本發明之閥的分解圖。 圖4係沿圖2之4-4線的橫剖面圖，顯示在閥封閉位置 之閥。 圖5係沿圖2之5-5線的橫剖面圖，顯示在閥開啟位置 之閥。 圖6係圖4的一部份之放大橫剖面圖。 圖7係圖5的一部份之放大橫剖面圖。 圖8係沿圖2之8-8線的橫剖面圖。 圖9係本發明之間的另一具體例之橫剖面圖。 【主要元件符號說明】 10 延伸衝程閥 12 本體 14 隔膜組件 16 引動器組件 15 3丨2/發明說明書(補件)/93-10/93120647 1320833 18 中 央 部 20 螺 紋 接 22 螺 紋 接 24 入 σ 路 26 流 體 室 28 閥 座 30 出 口 路 32 S己 合 環 34 内 螺 紋 36 外 螺 紋 38 螺 紋 40 螺 紋 直 4 2 主 要 隔 44 隔 膜 扣 46 副 隔 膜 48 桿 5 0 濕 式 隔 52 隔 膜 支 54 中 央 部 56 周 邊 環 58 可 換 部 60 槽 62 閥 構 件 64 放 大 頭 66 底 部 表 68 傾 斜 密 70 凹 處 72 頂 部 表 73 内 螺 紋 位 管 管 徑 徑 區域 區域 域 口接頭套筒 膜組件 圈 膜 持物 位 位 部 面 封部位 面 16 3 12/發明說明書(補件)/93-10/93丨20647 1320833 74 外 螺 紋 區 域 76 凸 肩 78 中 央 孔 D 80 周 邊 環 82 中 央 環 84 薄 可 撓 部 位 86 孔 D 88 中 間 部 位 90 底 部 表 面 92 凸 肩 94 上 部 凸 肩 96 下 部 螺 紋 部 位 98 放 大 部 位 10 0 上 部 螺 紋 部 位 1 02 外 部 螺 紋 1 04 底 部 表 面 1 06 活 塞 108 彈 簧 包 裝 件 110 密 封 環 112 密 封 環 114 外 罩 116 扣 圈 環 118 桿 部 位 120 側 緣 122 腹 板 部 位 1 24 孔 126 底 部 側 128 内 螺 紋 130 周 邊 槽 17 312/發明說明書(補件)/93-丨0/93120647 1320833 132 内 部 壁 134 凹 處 136 内 表 面 138 外 彈 簧 140 中 間 彈 簧 142 内 彈 簧 1 44 孔 σ 14 6 頂 部 壁 14 7 周 邊 槽 14 8 周 邊 凸 緣 15 0 内 螺 紋 15 2 擎 告 >’曳 漏 σ 15 3 螺 紋 接 管 1 54 區 域 156 延 伸 衝 程 閥 158 本 體 160 隔 膜 組 件 1 62 引 動 器 組 件 1 64 中 央 部 位 16 6 螺 紋 接 管 1 68 螺 紋 接 管 1 70 入 σ 路 徑 1 72 流 體 室 1 74 閥 座 1 76 出 D 路 徑 1 78 酉己 合 環 1 80 内 螺 紋 區 域 1 82 外 螺 紋 [ft 域 1 84 螺 紋 區 域 18 312/發明說明書(補件)/93· 10/93120647 1320833 186 螺 紋 直 D 接 頭套筒 188 濕 式 隔 膜 組 件 190 隔 膜 扣 圈 19 2 桿 194 濕 式 隔 膜 19 6 隔 膜 支 持 物 198 中 央 部 位 20 0 周 邊 環 202 可 撓 部 位 204 槽 2 0 6 閥 構 件 20 8 放 大 頭 部 2 10 底 部 表 面 2 12 傾 斜 密 封 部 位 2 14 凹 處 2 16 頂 部 表 面 2 18 内 螺 紋 220 外 螺 紋 部 位 2 2 2 凸 肩 224 中 央 孔 口 226 下 部 螺 紋 部 位 228 放 大 部 位 230 上 部 螺 紋 部 位 232 外 螺 紋 234 活 塞 236 彈 簧 包 裝 件 2 3 8 密 封 環 240 密 封 環 242 外 罩 19 312/發明說明書(補件)/93-丨0/93120647 1320833 244 扣圈環 2 4 6 桿部位 2 4 8 側緣 2 5 0 腹板部位 2 5 2 ?i 2 5 4 底部側 2 5 6 内螺紋 2 5 8 周邊槽 2 6 0 内部壁 2 6 2 凹處 264 内表面 2 6 6 外部彈簧 2 6 8 中間彈簧 2 7 0 内部彈簧 2 7 2 孔口 2 7 4 頂部壁 2 7 6 周邊槽 2 7 8 周邊凸緣 2 8 0 内螺紋 2 8 2 側緣部位 2 8 4 凹處 2 8 6 凹處 288 0型環 2 9 0 外部表面 2 9 2 凹處 294 0型環 2 9 6 凹處 2 9 8 上部表面 300 0型環 20 312/發明說明書(補件)/93-10/93 ] 20647 3021320833 警告洩漏口 304 306 區域 配件 21 3 ] 2/發明說明書(補件)/93-10/931206471320833 IX. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates generally to valves and, more precisely, to high flow extended stroke valves for the flow of rotted fluids. [Prior Art] Various forms of valves are used in the semiconductor industry to control the flow of fluids of corrosive fluids. Basically, these valves do not cause static or dead parts in the path, and do not cause fluids to become fluid or trap solids and cause fluid contamination. The flow rate in semiconductor production must sometimes be a significant amount and ensure that any valves used in the tube do not cause excessive pressure loss or limit flow rates. In addition, it is important that since highly corrosive fluids are often used in the conductor industry, the number of potential leak sources or seals must be such that these valves must be protected from corrosive fluids and metal parts by materials that are highly resistant to corrosive fluids. Contact. Contact streams are typically formed from fluoropolymers such as perfluoroalkoxy (PFA), polyvinylidene fluoride or polytetrafluoroethylene (PTFE). Typical parts of the valve that contact the fluid, such as the valve body, valve and valve seat, main and seal or gasket, are formed from a fluoropolymer. The poppet valve is typically raised by an extended stroke actuator to increase the clearance between the valve and the valve seat to reduce the passage of the valve. However, in valves using fluoropolymer membranes, the problem is that they often do not have a long fatigue life, and it is easy to have sufficient flexibility in a relatively short period of time to properly fit an extended stroke actuator 312 / invention specification ( The supplement) /93-10/93丨20647 is used to control the inclusion of high fluid flow in the fluid flow system and is very heavy in the semi-holding. production. The composition of the body (PVDF), the ground, the direct diaphragm, the large distance, the flow limit of the diaphragm. In addition, the role of the 5 1320833 fluoropolymer membrane may be fragile and prone to excessive stress, leading to premature failure. Valve failures in precision semiconductor processing operations can result in costly processing delays and damage to sophisticated equipment and products. There is still a need in the industry for an extended stroke poppet valve for corrosive fluids that can be characterized as extending the service life of the valve. SUMMARY OF THE INVENTION The present invention provides an extended stroke poppet valve that is particularly suitable for treating corrosive fluids, which has the advantage of extending the service life of the valve as compared to prior valves. The valve comprises a two-part main diaphragm assembly having a wet diaphragm made of a highly fatigue-resistant fluoropolymer material and a diaphragm support made of a high-strength fluoropolymer material designed to Withstands the high stress loads imposed by the stroke of an extended valve. This two layers are combined in a main diaphragm assembly to produce a high durability, chemically resistant membrane that can be used in a long stroke poppet valve and has a relatively long service life. It improves the durability and service life of the valve directly, improving process efficiency and reducing costs. Accordingly, the diaphragm valve includes a valve body for defining an inlet path, an outlet path, and a fluid chamber. The fluid chamber has an inner wall and an open side. The inlet path and the outlet path form an opening in the inner wall such that the inlet path, the outlet path, and the fluid chamber are in fluid communication with one another. A valve seat portion surrounds the inlet path opening in the fluid chamber. A flexible diaphragm assembly is in a position to sealably close the open side of the fluid chamber. The leapable diaphragm has a valve portion that faces toward the fluid chamber and is selectively displaceably coupled to the valve seat portion at least one valve portion to block a valve closed position of fluid flowing through the valve, spaced from the valve portion from the valve seat Open to allow fluid to flow through the valve 6 312 / invention manual (supplement) / 93-10 / 93120647 1320833 constituting spacer 〇 28 28 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 . The flexible diaphragm assembly includes a primary diaphragm assembly that includes a primary diaphragm member formed from an anti-fatigue fluoropolymer material and an adjacent diaphragm member formed from a high strength fluoropolymer material. The diaphragm assembly can further include a secondary diaphragm spaced from the primary diaphragm assembly. The valve can also include an actuator assembly movably coupled to the flexible diaphragm set for selectively positioning the flexible diaphragm assembly in a valve open and valve closed position. [Embodiment] The extended stroke valve 10 generally includes a body 1 2 , the diaphragm assembly 14 , and the actuator assembly 16 . The body 1 2 has a central portion 18 provided with a pair of protruding nipples 2 0 2 2 . The inlet path 2 4 extends from the nipple 20 into the central portion 18, turns upward and terminates in the fluid chamber 26. The valve seat surrounds the end of the inlet path 24 in the fluid chamber 26. The outlet path extends from the fluid chamber 26 through the central portion 18 and the nipple 22. The fit 3 2 extends upwardly from the central portion 18 and has an internally threaded region 34 and an externally threaded region 3 6 for receiving the diaphragm assembly 14 and the actuator assembly 16 as will be described in further detail below. Each of the nipples 20, 22 has a threaded region 38 for receiving a threaded compression fitti sleeve 40 such that the valve 10 can be attached to a conduit or tube (not shown). Of course, any type of fitting or fitting can be used to connect the tubing or tubing to the valve 10, including a brass eight-port fitting, a straight threaded fitting, or a fitting. The diaphragm assembly 14 generally includes a primary diaphragm assembly 42, a diaphragm retainer 44, a secondary diaphragm 46, and a stem 48. The main diaphragm assembly 4 2 typically includes a wet septum 50 and a septum support 52. The wet diaphragm 50 is preferably formed of a high fatigue resistance 312 / invention specification (supplement) / 93-10 / 93120647 1320833 fluoropolymer material, preferably a PTFE material. At present, the material for the wet type diaphragm 50 is Japanese D a i k i η I n d u s t r i e s L t d · manufactured D a i k i η M 1 1 2 . Another preferred material is "H y Q " P T F E. The membrane support 52 is preferably formed of a high strength modified fluoropolymer material, preferably a P T F E material. The material currently available for diaphragm support 52 is GORE-TEX® manufactured by W. L. Gore & Associates, Inc. of Newark, Delaware. Of course, it will be readily appreciated that the wet diaphragm 50 can also be made of a high strength modified fluoropolymer material, and the diaphragm support 52 can also be made of a highly fatigue resistant fluoropolymer material. The wet diaphragm 50 has a peripheral ring 56 and a central portion 534 that are joined by a thin flexible portion 58. The peripheral ring 56 is sealingly received in the upwardly facing groove 60 of the central portion 18 of the body 12. The valve member 6 2 projects downwardly from the central portion 54 and has an enlarged head 64 provided with a bottom surface 66. A slanted seal portion 68 is formed on the bottom surface 66 and is positioned and sized to sealingly engage the valve seat 28. The recess 70 is formed in the top surface 72 of the central portion 5 4 and has an internal thread 7 3 for receiving the rod 48, as will be described in more detail below. The diaphragm retainer 44 has an externally threaded region 74 and is threaded into the internally threaded region 34 of the mating ring 32. Both the wet diaphragm 50 and the diaphragm holder 52 are disposed between the diaphragm retainer 4 4 and the shoulder 71 of the body 1 2 as best seen in Figures 6 and 7. When the diaphragm retainer 4 4 is tightened, the peripheral ring 56 is pressed into the slot 60, thus forming a seal at the periphery of the main diaphragm assembly 42. The diaphragm collar 44 has a central port 78. The rod 48 extends through the central port 78 to engage the recess 70. 8 312 / Inventive Specification (Repair) / 93-10 / 93120647 1320833 The secondary diaphragm 46 covers the diaphragm retainer 44 and has a central ring 8 2 and a peripheral ring 80 that are joined by a thin flexible portion 84. The aperture 8 6 in the central ring 8 2 is mated and engages the intermediate portion 8 8 of the rod 48. The bottom surface 90 of the secondary diaphragm 46 is coupled to the shoulder 92 of the stem 48 and the peripheral ring 80 mates into the upper shoulder 94 of the mating ring 3 2 . In the event of leakage through the primary diaphragm assembly 42, the secondary diaphragm 46 acts as an upper suppression barrier and can be made of any suitable flexible, fatigue resistant material having suitable strength characteristics. It is currently preferred to use a combination of P T F E, a fabric, and a fluoroelastomer material as the material of the sub-membrane 46. A preferred fluoroelastomer material is Viton® manufactured by DuPont Dow Elastomers L.L.P., W i 1 m i n g t ο η, D e 1 a w a r e. The rod 48 has a lower threaded portion 96, an enlarged portion 98, a stepped intermediate portion 88, and an upper threaded portion 100. The lower threaded portion 96 has an outer thread 1 0 2 for engaging the inner thread 7 3 of the recess 70 in the main diaphragm assembly 42. The enlarged portion 98 has a bottom surface 104 that is carried on the top surface 72 of the main diaphragm assembly 42. The upper threaded portion 100 is coupled to the actuator assembly 166, which will be described in further detail below. The actuator assembly 16 generally includes a piston 1 0 6 , a spring kit 1 0 8 , a seal ring 1 1 0, 1 1 2, a cover 1 1 4 and a collar ring 1 16 . The piston 106 is slidably mounted in the outer casing 1 14 and generally includes a side edge 1 2 0 and a rod portion 1 1 8 joined by the diaphragm portion 1 2 2 . The rod portion 1 18 has a hole 1 2 4 extending from the bottom side 1 2 6 . The bore 1 2 4 may have an internal thread 1 28 for receiving the threaded portion 1 0 0 of the upper portion of the rod 48. The side edge 120 has a peripheral groove 1 3 0 ' sized to receive the seal ring 1 1 其 which forms a sliding seal with the inner wall 1 3 2 of the outer cover 1 14 . Rod portion 1 18, web portion 1 2 2 and side edge 1 2 0 9 312 / invention specification (supplement) / 93- ] 0/93 丨 20647 1320833 are preferably oriented such that the piston 106 has A cup type that is oriented upwards into the 'recess 1 3 4 '. The spring set 108 is mated within the recess 134 and urges toward the inner surface 136 of the recess 134 and the inner wall 133 of the outer cover 1 14 to apply a downward bias to the piston 106 and the diaphragm assembly 1 4. In the illustrated embodiment, the spring kit 110 includes an outer spring 138, an intermediate spring 140, and an inner spring 142. However, it will be readily appreciated that the spring kit 108 can include any number and configuration of springs as long as it is compatible with the fluid pressure used by the valve and the characteristics of the particular actuator used by the valve 〇 ‘. It will also be readily appreciated that although the conventional closed type valve configuration is described herein, the diaphragm assembly 14 of the present invention can also be utilized in a conventional open type valve design. The outer shroud 114 has an aperture 144 in the top wall 146. The rod portion 1 18 of the piston 106 extends through and slides within the orifice 14 4 . The sealing ring 1 12 is attached to the rod portion 1 18 and received in the peripheral groove 147. The seal ring 1 1 2 acts to prevent leakage through the orifice 1 4 4 and around the stem portion 1 18 . The outer cover 1 14 also has a peripheral flange 1 4 8 joined by a buckle ring 1 16 . The collar ring 1 16 has an internal thread 150 that combines with the externally threaded region 36 of the mating ring 32 to hold the actuator assembly 16 to the body 12. A power or manual actuator assembly (not shown) can be coupled to the stem portion 1 18 to selectively move the piston 106 in the outer casing 1 14 . A warning leak port 152 can be provided extending from a region 154 at the periphery of the main diaphragm assembly 42 to provide a fluid leak or warning through the primary diaphragm assembly 42. WARNING The leak port 1 5 2 can be sealed with a small fluoropolymer plunger (not shown) that can be pushed out by the fluid pressure applied by the leak. In addition, as shown in Fig. 9, a nipple 1 5 3 can be provided to connect the pipe system (not shown in 10 312 / invention manual (supplement) / 93-10/93120647 1320833), so that any leak through the leak port 1 5 2 The fluid can be discharged from the adjacent 10 points. In operation, the spring set 1 〇 8 is normally biased 16 6 with the diaphragm assembly 14 in the valve closed position, so that the valve member 6 2 is sealingly coupled 2 8 to interrupt the flow of fluid through the valve 10 . The piston 106 can then be positioned upwardly to resist the bias of the spring set 108 to move the valve clamp away from the valve open position of the valve seat 28, thereby allowing fluid to flow through the inlet path 2 4 , fluid chamber 26 and outlet path 30. Thus, the spacer 14 and the valve member 62 are selectively placed in a valve open and a valve position. Fig. 9 shows another specific example of the extended stroke valve 156. The valve 156 includes a body 158, a diaphragm assembly 160, and an actuator assembly 162. The body has a central portion provided with a pair of protruding nipples 166, 168. The inlet path 170 extends from the nipple 166 into the central portion 164 and steers upwardly and terminates in the fluid chamber 172. The valve seat 174 surrounds the end of the inlet path 170 in the stream 172. The outlet path 167 extends from the fluid chamber through the central portion 164 and the nipple 168. The mating ring 1 7 8 central portion 164 extends upwardly and has an internally threaded region 1 800 and an external thread 1 8 2 for receiving the diaphragm 160 and the actuator assembly 162 as previously described. Similarly, each of the nipples 166, I6 8 has a threaded region 184 for receiving the straight joint sleeve 186. The diaphragm assembly 1 6 0 generally includes a wet diaphragm assembly 1 8 8, a diaphragm 1 90, and a rod 1 9 2 . The main diaphragm assembly 1 8 8 typically includes a wet diaphragm and a diaphragm support 196. Similarly, the wet diaphragm 1 94 is preferably enclosed by the 312/invention specification (supplement)/93-10/93120647 near-valve piston seat selection, and the movable diaphragm group is closed to 1 58.64°. Chamber 1 72 from the middle of the component area a threaded ring 1 94 South anti 11 1320833 formed of a fatigue fluoropolymer material, preferably a PTFE material, such as D a 1 k 1 η Μ 1 1 2 or n H y Q " ; PTFE. The membrane support 196 is preferably formed of a high strength modified fluoropolymer material, preferably such as a G0RE-TEX® t PTFE ° wet membrane 194 having a thin flexible portion 202 connected thereto. The peripheral ring 200 and the central part 1 9 8 . The peripheral ring 200 is sealingly received in the upward groove 220 of the central portion 164 of the body 158. The valve member 206 extends downwardly from the central portion 198 and has an enlarged head 2 0 8 provided with a bottom surface 210. An inclined sealing portion 2 1 2 is formed on the bottom surface 210, and is positioned and sized to sealably fit the valve seat 174. The recess 2 1 4 is formed in the top surface 2 16 of the central portion 198 and has an internal thread 2 18 for receiving the rod 192. The diaphragm retaining ring 190 has an externally threaded region 2 2 0 and is threaded into the internally threaded region 180 of the mating ring 178. Both the wet diaphragm 194 and the diaphragm support 196 are disposed between the diaphragm collar 190 and the shoulder 222 of the body 158. Pressing the peripheral ring 200 into the groove 2 0 4, the diaphragm retaining ring 1 90 is tightened, thus forming a seal at the periphery of the wet diaphragm assembly 108. The diaphragm collar 190 has a central aperture 224. Rod 192 extends through central aperture 224 to engage recess 2 1 4 . The rod 1 9 2 has a lower threaded portion 2 2 6 'magnified portion 2 2 8 and an upper threaded portion 2 3 0. The lower threaded portion 2 2 6 has an external thread 2 3 2 for engaging the internal thread 2 1 8 of the recess 2 1 4 in the wet diaphragm assembly 186. The enlarged portion 2 2 8 has a bottom surface 2 3 2 carried on the top surface 2 16 of the wet diaphragm assembly 108. The upper threaded portion 230 is combined with the actuator assembly 12 312 / invention specification (supplement) / 93-] 0/93120647 1320833 1 6 2, which will be further detailed herein. The actuator assembly 1 6 2 generally includes a piston 2 3 4, a spring kit 2 3 6 , a seal ring 2 3 8 , 2 4 0 , a cover 2 4 2 and a collar ring 24 4 . The piston 2 3 4 is slidably mounted in the outer cover 242 and generally includes a side edge 2 4 8 and a stem portion 246 that are joined by the web portion 250. The rod portion 2 4 6 has a hole 2 5 2 extending from the bottom side 2 5 4 . The bore 2 5 2 may have an internal thread 256 for receiving the threaded portion 2 3 0 of the upper portion of the rod 1 9 2 . The side edge 248 has a peripheral groove 255 that is sized to receive the seal ring 238 and forms a sliding seal with the inner wall 260 of the outer cover 242. The rod portion 246, the web portion 250 and the side edge 2 4 8 are preferably oriented such that the piston 234 has a cup shape that is directed upwardly into the recess 262. Spring assembly 236 is mated within recess 262 and urges toward inner surface 264 of recess 262 and inner wall 260 of outer cover 242 to apply downward biasing to piston 234 and diaphragm assembly 160. In the particular embodiment shown, the spring package 236 includes a spring 266, an intermediate spring 268, and an inner spring 270 » but as readily appreciated, the spring package 263 can include any number and configuration The spring is as long as it is compatible with the fluid pressure used and the characteristics of the particular actuator used by the valve 156. It can also be easily understood that although a conventional closed type valve configuration is described herein, the diaphragm assembly 160 of the present invention can also be used in a conventional open type valve design. Housing 242 has an aperture 272 in top wall 274. The rod portion 246 of the piston 234 extends through and slides within the aperture 273. The seal ring 240 is coupled to the stem portion 246 and received in the peripheral groove 276. The seal ring 240 acts to prevent leakage through the orifice 273 and around the stem portion 246. The outer cover 2 4 2 also has a peripheral flange 2 7 8 joined by a buckle ring 24 4 . Buckle ring 13 312 / invention specification (supplement) / 93-10 / 93120647 1320833 2 4 4 has an internal thread 280 which is combined with the external threaded region 1 8 2 of the mating ring 178 to hold the actuator assembly 1 6 2 to the body 1 5 8. A power or manual actuator assembly (not shown) can be coupled to the stem portion 246 to selectively move the piston 234 within the outer cover 242. In the specific example shown in Figure 9, the second limit is provided with a 0-ring. The piston 2 3 4 has a recessed portion 2 8 4 defining a recess 2 8 4 . The enlarged portion 2 2 8 of the rod 1 9 2 is received in the recess 2 8 4 . The diaphragm retaining ring 1 90 has an upwardly facing recess 2 8 6 . The 0-ring 2 8 8 is mated in the recess 2 8 6 and surrounds the outer surface 2 9 0 of the side edge portion 2 8 2 . In addition, the diaphragm retaining ring 190 has an outwardly facing recess 2 9 2 to receive the 0-ring 2 94 from the inner wall 260 of the outer cover 242 and the diaphragm retaining ring 190. Further, the mating ring 178 of the body 158 has a recess 296 in the upper surface 298 to receive the 0-ring 300 between the mating ring 178 and the outer cover 242. These 0-rings 2 8 8 , 2 9 4, 300 provide additional limits to inhibit leakage or bleed from fluid passing through the wet diaphragm assembly 194. A warning leak port 3 0 2 can be provided extending from a region 340 at the periphery of the wet diaphragm assembly 194 to provide a fluid leak or warning through the wet diaphragm assembly 194. WARNING The leak port 3 0 2 can be sealed with a small fluorochloride plug (not shown) that can be pushed out by the fluid pressure applied by the leak. In addition, an accessory 306 can be configured to connect the tubing (not shown) so that any fluid leaking through the leak port 322 can be expelled from the adjacent valve 152. The diaphragm assembly of the present invention has a significant advantage over the prior art. The two-part construction of the main/wet diaphragm assembly 4 2, 1 8 8 includes a wet diaphragm made of a highly fatigue-resistant fluoropolymer material, and a high-strength 14 312/invention specification (supplement)/ 93-丨0/93丨20647 1320833 The diaphragm support made of fluoropolymer material is designed to withstand the high stress loads imposed by an extended valve stroke. This two-layer combination produces a high durability, chemical resistance, diaphragm that can be used in a long stroke lift room and has a long service life in a single primary diaphragm assembly. It can directly improve the durability and service life of the valve, thereby improving processing efficiency and reducing costs. Although this description is generally a closed two position two way poppet valve, it will be readily appreciated that the diaphragm assembly of the present invention can be utilized in a variety of extended stroke valve configurations, including normally open and three and four way valves. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of a valve in accordance with the present invention. Figure 2 is a top plan view of the valve of Figure 1. Figure 3 is an exploded view of the valve in accordance with the present invention. Figure 4 is a cross-sectional view taken along line 4-4 of Figure 2 showing the valve in the closed position of the valve. Figure 5 is a cross-sectional view taken along line 5-5 of Figure 2 showing the valve in the valve open position. Figure 6 is an enlarged cross-sectional view of a portion of Figure 4. Figure 7 is an enlarged cross-sectional view of a portion of Figure 5. Figure 8 is a cross-sectional view taken along line 8-8 of Figure 2. Figure 9 is a cross-sectional view showing another specific example between the present invention. [Main component symbol description] 10 Extended stroke valve 12 Body 14 Diaphragm assembly 16 Pilot assembly 15 3丨2/Invention manual (supplement)/93-10/93120647 1320833 18 Center 20 Threaded 22 Threaded 24 Into σ Road 26 Fluid chamber 28 Seat 30 Outlet 32 S-closed ring 34 Internal thread 36 External thread 38 Thread 40 Thread straight 4 2 Main compartment 44 Diaphragm buckle 46 Secondary diaphragm 48 Rod 5 0 Wet compartment 52 Diaphragm branch 54 Central section 56 Perimeter Ring 58 replaceable part 60 slot 62 valve member 64 enlarged head 66 bottom table 68 inclined dense 70 recess 72 top table 73 internal thread position pipe diameter area area domain joint sleeve membrane module ring Part face 16 3 12/Invention manual (supplement)/93-10/93丨20647 1320833 74 Externally threaded area 76 Shoulder 78 Center hole D 80 Peripheral ring 82 Central ring 84 Thin flexible part 86 Hole D 88 Intermediate part 90 Bottom surface 92 shoulder 94 upper shoulder 96 lower thread Part 98 Magnified part 10 0 Upper threaded part 1 02 External thread 1 04 Bottom surface 1 06 Piston 108 Spring package 110 Sealing ring 112 Sealing ring 114 Housing 116 Ring ring 118 Rod part 120 Side edge 122 Web part 1 24 Hole 126 Bottom side 128 Internal thread 130 Peripheral groove 17 312 / Invention specification (supplement) / 93-丨0/93120647 1320833 132 Inner wall 134 Recess 136 Inner surface 138 Outer spring 140 Intermediate spring 142 Inner spring 1 44 Hole σ 14 6 Top Wall 14 7 Peripheral groove 14 8 Peripheral flange 15 0 Internal thread 15 2 Engine > 'Leakage σ 15 3 Threaded socket 1 54 Area 156 Extended stroke valve 158 Body 160 Diaphragm assembly 1 62 Actuator assembly 1 64 Central portion 16 6 Threaded connection 1 68 Threaded connection 1 70 into σ path 1 72 fluid chamber 1 74 seat 1 76 out D path 1 78 酉 合 ring 1 80 internal thread area 1 82 outside Pattern [ft field 1 84 threaded area 18 312 / invention manual (supplement) / 93· 10/93120647 1320833 186 threaded straight D joint sleeve 188 wet diaphragm assembly 190 diaphragm retainer 19 2 rod 194 wet diaphragm 19 6 diaphragm Support 198 Central part 20 0 Peripheral ring 202 Flexible part 204 Slot 2 0 6 Valve member 20 8 Enlarged head 2 10 Bottom surface 2 12 Tilted sealing part 2 14 Recessed 2 16 Top surface 2 18 Internal thread 220 Externally threaded part 2 2 2 shoulder 224 central opening 226 lower threaded portion 228 enlarged portion 230 upper threaded portion 232 external thread 234 piston 236 spring package 2 3 8 sealing ring 240 sealing ring 242 housing 19 312 / invention manual (supplement) / 93 -丨0/93120647 1320833 244 Ring ring 2 4 6 Rod part 2 4 8 Side edge 2 5 0 Web part 2 5 2 ?i 2 5 4 Bottom side 2 5 6 Internal thread 2 5 8 Peripheral groove 2 6 0 Interior Wall 2 6 2 recess 264 inner surface 2 6 6 outer spring 2 6 8 medium Spring 2 7 0 Internal spring 2 7 2 Port 2 7 4 Top wall 2 7 6 Peripheral groove 2 7 8 Peripheral flange 2 8 0 Internal thread 2 8 2 Side edge 2 8 4 Recess 2 8 6 Recess 288 0 Ring 2 9 0 External surface 2 9 2 Recess 294 0 ring 2 9 6 Recess 2 9 8 Upper surface 300 0 ring 20 312 / invention manual (supplement) / 93-10/93 ] 20647 3021320833 Warning leak Port 304 306 Area Accessories 21 3 ] 2/Invention Manual (Supplement) /93-10/93120647