1285916 在可撓性管24之外伽# • /沾夕频他” 4 彳配置有可朝軸方向彈性變形自 在的多摺伸縮囊（以下鳄雜 .〇/： ^ i Λ Λτ< ， "為伸縮管）(Bell〇ws)26。伸縮管 26係由内從d之小型伸输总 26a 如 鈿S $ 26b及内徑D之大型伸縮管 邵26a所構成。在可择鉍总 28 /几吕24與伸縮管20之間的幫浦室 封入有非屡縮性禅辦。 管部26a之門崎署古Γ 伸縮管部26b與大型伸縮 社°又有作動碟片部30，作動碟片部30係連 之方向往復運動。 #32係利用馬達朝箭頭Α所示 該藥液供給裝置係如下所述進行動作。亦即，首先利 甩控制裝置22使幫浦18夕a P百先利 能你U1 8之—次側的開閉閥16成為開放狀 :’使一二人側之開_2〇成為關閉 動且往復機構32會動作，作動心却_ :運進订駆 o^u 乍動碟片邛30會被變位在小型 伸鈿官部26b之侧，伸縮管26 主 ^ ^ ^ ^ 円側之谷積會增加，可撓性 吕24朝直徑方向膨脹，使筚 浦18中。 1文市及合裔1〇之液晶被吸入至幫 其广利用控制裝置2 2使幫浦i 8之一次侧的開閉闕 成為關閉狀態，使二次側之開閉閥2G成為開放狀態， ==了復機構32會動作，作動碟片部％ 二破交位在大型伸縮管部26a之側，伸縮管％ 會減少，可撓性管24朝亩 > 古A ^ 曰曰m = 向收縮，使幫浦中之液 1曰曰2^出70性官24被推出，且通過藥液供給路從喷嘴裝置 藥液供給裝置係藉由反覆進行幫浦18之該吸入 出的動作，將藥液容器10之液晶供給至噴嘴裝置/，、、 ^ ’再 317397 6 1285916 從噴嘴裝置12送出。 [專利文獻1]日本特開10-61558號公報 [專利文獻2]曰本特開2〇〇3_197513號 【發明内容】 (發明所欲解決之課題） 、夜曰ΐΓ ’以幫浦18將液晶供給至噴嘴裝置12時，由於 /日日係黏性較高之液體，因此 、 力予以供給。因此，供給液晶之初;==㈣ 18或藥液供給配管14之内部會若干膨 '二i力幫浦 收液晶之供給量，對應從喷嘴裝會略吸 片部30之叙你田^ U出之液日日的作動碟 原本應‘遽上曰 出流量係如第10圖之線b所示， 奋遽幵至设定値，但從喷嘴裝置12送出之液曰的 Α迗出流量（nU/see)並未快速 液曰曰的 圖之線a所示，緩緩地上昇。且在 曰値’而如第10 將液晶塗布在玻璃美柘μ出里上昇條件下， 定値薄。 土 τ，廷出初期之液晶膜厚會比設 出」1匕主以在运出初期之液晶並未使用在塗布，而在逆 更成為設定倍時，才在破璃基板上進行液晶之=运 而’如此無法利用液晶之送出初 ：。 二’:此使液晶基板之生產性之提 極 使迗出初期之送出流量迅 而要求 間，以提升液晶基板之生產性/彳利用送出初期之時 本|明之目的健供—射 初期的流量上昇期間，而定曰曰等之I夜之送出 升生產性的藥液供給裝置。 317397 7 1285916 (解決課題之手段） -喷嘴Γ二月術供給裝置係由設置在用以將藥液供給至 之樂液供給路之途中的主幫浦及副幫浦所構成， Γ封: 幫浦係在起動狀態時之供給流量⑽/似)為 幫浦之關係’而在通常供給狀態時之供給流量 (ml/sec)為主幫浦 > 副幫浦之關係。 則述主4浦及W述副幫浦，在起動狀態時之内 谷積的膨服量係主幫浦 > 副幫浦之關係。 的每本！:月，藥液供給裝置，在起動狀態時之前述副幫浦 時間的供給流量A(ml/钟及在起動狀態時之 該之内容積的每一單位時間的膨脹量(，、與 二：厂給路之内容積的每一單位時間的增加量⑽/㈣ 之和B(ml/Sec)的關係為a^b。 而進=作幫浦及前述副幫浦係由控制裝置所控制 耳明之樂液供給裝置亦可在前述主幫浦之一次側串 耳外叹置前述副幫浦 介可卢义 前述副幫浦 』述主幫浦之二次側串聯設置 述副ΐί明之藥液供給裝置亦可並聯設置前述主幫浦及前 述副=明之藥液供給裝置亦可一體設置前述主幫浦及前 (發明之效果） 本發明之藥液供給裝置係在藥液之送出初期，使從喷 317397 8 1285916 紫裝置12送出之藥液的每—時間之流量短時間内上昇，且 :短時間内到達設^値，因此可將送出初期之時間利用在 =之生產’因此具有可使商品之生產性提升的 【貫施方式】 士藉由使用田ij承浦，而達成藥液之送出初期的流量上昇 :間亦可利用在液晶基板之生產，且提升液晶基板之 性的目的。 ，（實施例1) . 第1圖係本發明一實施例之藥液供給 ，。在w圖中’丨。係置入液晶之藥液容器:魏 谷态10至賀嘴裝置12形成有藥液供給路，利用藥液供給 路將液晶從藥液容器10供給至喷嘴裝置12。 藥液供給路係由從藥液容器10至喷嘴裝置12之藥夜 供給配管14、設置在藥液供給配f 14之中途且從離藥液 容器10較近之一方朝喷嘴裝置12侧依序設置的開閉閥 16、主幫浦4〇、副幫浦42及開閉閥2〇所構成。 ^在此，開閉閥16、主幫浦40、副幫浦42及開閉閥2〇 係由控制裝置控制其動作。又，主幫浦4〇係使用具備與本 案說明書之先前技術所說明之藥液供給裝置之幫浦Μ同 様構造之Tube-phram幫浦。又，副幫浦π係使用如第2 圖所不之膜片（diaphragm)式回吸（sack back)閥。 在第2圖中，44係中空之閥本體，在閥本體44之壁 部以露出閥本體44之内側的狀態設置有膜片46。在骐片 46之背侧（閥本體44之外側）一體設置有活塞棒48，而在 317397 9 1285916 活塞棒48連結有活塞5G。在活塞5()之—方侧（第2圖中 上側）形成有第1空氣室52,而在活塞5G之另—方側形成 有第2空亂室54。活塞5〇係利用氣缸管％可滑動地支 周圍’並利用彈簧58被彈壓至第i空氣室52側。、 其次’茶照第3圖所示之時序圖說明該藥液供給 之動作。 、 首先，在之前的動作中結束主幫浦40之送出後，利用 控制裝£22使開閉閥16成為開狀態，使 ..狀^並使主幫浦40及副幫浦42進行吸入動作，= 液谷為10之液晶吸入在主幫浦4〇及副幫浦42。 在此，利用主幫浦40進行液晶之吸入動 技術㈣之動作相同。又，利用副幫浦42進行液晶之= 動作係藉由停止將空氣供給第 氣室内之Μ力而進行。 4至’亚解除第1空 亦即，停止將空氣供給至第】空氣室 >氣室狀Μ力時，活塞5G及活塞棒 ^ : 動至第1空氣室52側，連結於活塞棒48之^ == 部分會被引拉至第〗空氣室52之：片：二中央 46往第1空氣室％之側略膨脹，而在膜片：了膜片 產生負壓，且在此吸入液晶。 、 之极路側會 其次，利用控制裝置22使 開閉闕2〇成為開狀態，使副幫浦42進行態，使 同時使主幫浦40進行送出動作。 仃$出動作，接著 在此，利用主幫浦4〇進行液晶之送出動作係與在先前 317397 10 1285916 主幫浦40之伸縮管26係如第4 出動作之上昇時略為膨脹。因此，在、、，：所不，在送 伸縮管26内之液體不會立即成二出動作之上昇時’ 出流量會缓慢地增加至所希望的送出汽旦的壓力’液晶之送 再者，利用副幫浦42之液晶的送:：作 供給至第i空氣室52而進行 卞仔稭由將空乳 52時，第丨*氣官π # A厂、工軋七、給至第1空氣室 i二二： 内的壓力會增高，活塞5〇係藉由第 、、舌之壓力被移動至第2空氣室54侧，連妹於 棒48之膜片46的中央部分會在閥本體44之内部：： :’而闕本體44内之液晶會從闕本體Μ内被推出而送 副幫浦42之膜片牝具有充分的剛性 壓下變形。1285916 In addition to the flexible tube 24, the gamma #• / 沾夕频他” 4 彳 is equipped with a multi-fold bellows that can be elastically deformed in the direction of the axis (the following crocodile. 〇/: ^ i Λ Λτ< , " It is a telescopic tube (Bell〇ws) 26. The telescopic tube 26 is composed of a small telescopic tube 26a with a small extension 26a such as 钿S $26b and an inner diameter D. The pump room between the Lulu 24 and the telescopic tube 20 is sealed with a non-recessive zen. The tube section 26a of the Gosaki Department has a telescopic tube section 26b and a large telescopic society. The unit 30 reciprocates in the direction of the line. #32 is a motor supply device that operates as indicated by the arrow Α as follows. First, the control device 22 first makes the pump 18 The opening and closing valve 16 of the U1 8-secondary side can be made open: 'The opening of one or two sides is turned off and the reciprocating mechanism 32 is actuated, and the yoke is _: 运:入駆o^u 乍The movable disc 邛 30 will be displaced on the side of the small extension unit 26b, and the valley product of the telescopic tube 26 main ^ ^ ^ ^ 円 side will increase, and the flexible Lu 24 will expand in the diameter direction. The swell is made to make the 筚浦18. 1 The liquid crystal of the city and the ancestors is sucked up to help the wide use of the control device 2 2 The opening and closing 一次 of the primary side of the pump i 8 is turned off, and the secondary side is opened and closed. The valve 2G is in an open state, == the reciprocating mechanism 32 is actuated, and the disc portion % is broken at the side of the large telescopic tube portion 26a, the telescopic tube % is reduced, and the flexible tube 24 is facing the mu> ^ 曰曰m = contraction, so that the liquid in the pump is 1 曰曰 2 ^ out 70 genus 24 is pushed out, and the liquid supply device from the nozzle device is passed through the medicinal liquid supply device by repeating the pump 18 In the operation of the inhalation, the liquid crystal of the liquid chemical container 10 is supplied to the nozzle device /, and is sent from the nozzle device 12 to the ' 317 397 6 1285916. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 10-61558 [Patent Document 2]曰本特开2〇〇3_197513 [Summary of the Invention] (Problems to be Solved by the Invention), Nightingale 'When the liquid crystal is supplied to the nozzle device 12 by the pump 18, the liquid is highly viscous/day-day. Therefore, the force is supplied. Therefore, the liquid crystal is supplied at the beginning; == (four) 18 or the inside of the chemical supply pipe 14 There will be a number of expansions, and the supply of liquid crystals will be collected from the nozzles. As shown by line b of Fig. 10, it is set to 値, but the discharge flow rate (nU/see) of the liquid helium sent from the nozzle device 12 is not as shown by the line a of the fast liquid helium. Slowly rise, and in the case of 曰値', as in the 10th, the liquid crystal is coated in the glass, and the temperature is reduced. In the case of soil τ, the thickness of the liquid crystal film at the beginning of the Ting will be set to "1", and the liquid crystal at the beginning of the shipment is not used for coating, but when the inverse is set to be doubled, the liquid crystal is performed on the glass substrate. It’s so impossible to use the LCD to send out: Second': This makes the productivity of the liquid crystal substrate extremely high, so that the initial flow rate of the liquid crystal is required to be improved, and the productivity of the liquid crystal substrate is improved, and the initial flow of the liquid crystal substrate is used. During the ascent period, I will send a production liquid chemical supply device to the I night. 317397 7 1285916 (Means for Solving the Problem) - The nozzle Γ February supply device is composed of a main pump and a sub-pull set on the way to supply the liquid to the liquid supply path, Γ封: 帮In the startup state, the supply flow rate (10)/like is the relationship between the pump and the supply flow (ml/sec) in the normal supply state is the relationship between the auxiliary pump and the auxiliary pump. Then, the main 4 Pu and the W-deputy Pu, in the starting state, the amount of expansion of the valley product is the main pump > Every one! : month, the chemical supply device, the supply flow rate A of the aforementioned auxiliary pump time in the startup state (ml/clock and the amount of expansion per unit time of the internal volume in the startup state (,, and two: The relationship between the increase of each unit time of the internal volume of the plant (10)/(4) and the relationship of B(ml/Sec) is a^b. The input = the pump and the aforementioned auxiliary pump are controlled by the control device. The Mingzhi Le liquid supply device can also sigh the above-mentioned auxiliary gangs in the first side of the main gang. The above-mentioned auxiliary gang can be used in the secondary side of the main gang. The apparatus may be provided in parallel with the main pump and the sub-electrode supply device of the sub-description, and the main pump and the front (the effect of the invention) may be integrally provided. The liquid medicine supply device of the present invention is in the initial stage of the delivery of the liquid medicine, so that the Spray 317397 8 1285916 The flow rate of the liquid medicine sent out by the purple device 12 rises in a short time, and: the device reaches the setting in a short time, so the initial time of the delivery can be utilized in the production of =. The way of productivity improvement Ij Chengpu, and the increase in the flow rate at the initial stage of the delivery of the chemical liquid can be utilized for the production of the liquid crystal substrate, and the liquid crystal substrate can be improved. (Example 1). Fig. 1 is an embodiment of the present invention. In the figure of w, the liquid medicine container is placed in the liquid crystal container: Weigu state 10 to the mouthpiece device 12 is formed with a chemical liquid supply path, and the liquid crystal is supplied from the liquid medicine container 10 by the chemical liquid supply path. The chemical supply path is provided by the drug night supply pipe 14 from the drug solution container 10 to the nozzle device 12, and is disposed in the middle of the drug solution supply device f 14 and is closer to the drug solution container 10 The nozzle device 12 is provided with an on-off valve 16, a main pump 4, a sub-pump 42 and an on-off valve 2 in order. ^ Here, the on-off valve 16, the main pump 40, the sub-pull 42 and the on-off valve The 〇 由 is controlled by the control device. In addition, the main gang is using the Tube-phram pump with the Μ Μ 様 。 。 。 。 。 。 。 。 。 。 。 。 The Pu π system uses a diaphragm back suction back valve as shown in Fig. 2. In Fig. 2, the 44-series hollow valve body is provided with a diaphragm 46 in a state in which the valve body 44 is exposed inside the valve body 44. The back side of the cymbal 46 (outside the valve body 44) is integrated. A piston rod 48 is provided, and a piston 5G is coupled to the piston rod 48 at 317397 9 1285916. A first air chamber 52 is formed on the side of the piston 5 () (the upper side in Fig. 2), and another in the piston 5G. The second air chamber 54 is formed on the square side. The piston 5 is slidably supported by the cylinder tube % and is biased to the ith air chamber 52 side by the spring 58. Next, the timing shown in Fig. 3 The figure illustrates the action of the supply of the liquid. First, after the main pump 40 is sent out in the previous operation, the opening and closing valve 16 is opened by the control device £22, and the main pump 40 and the sub pump 42 are sucked in. = Liquid valley is 10 liquid crystals inhaled in the main pump 4 〇 and the auxiliary pump 42. Here, the operation of the liquid crystal suction technique (4) by the main pump 40 is the same. Further, the operation of the liquid crystal by the sub-pump 42 is performed by stopping the supply of air to the inside of the second air chamber. 4 to 'After releasing the first air, that is, when the air is stopped from being supplied to the first air chamber>, the piston 5G and the piston rod are moved to the first air chamber 52 side and connected to the piston rod 48. The ^ == portion will be drawn to the first air chamber 52: the sheet: the center 46 is slightly expanded toward the side of the first air chamber, and in the diaphragm: the diaphragm generates a negative pressure, and the liquid crystal is sucked therein. . Next, the second side of the circuit is opened by the control device 22, and the auxiliary pump 42 is placed in the state, and the main pump 40 is simultaneously sent. The operation of the liquid crystal is performed by the main pump 4, and the extension tube 26 of the main pump 40 of the previous 317397 10 1285916 is slightly expanded as the fourth operation is increased. Therefore, when the liquid in the telescopic tube 26 does not rise immediately into the second-out operation, the flow rate will slowly increase to the desired pressure of the delivery of the vapor. , the use of the liquid of the auxiliary pump 42:: supply to the ith air chamber 52 and carry out the clams of the oysters by the empty milk 52, the third 气 * gas officer π # A plant, work rolling seven, to the first The air chamber i22: the pressure inside will increase, the piston 5 is moved to the second air chamber 54 side by the pressure of the first and the tongue, and the central portion of the diaphragm 46 of the rod 48 will be in the valve body. The inside of 44:: : ' and the liquid crystal in the body 44 is pushed out from the body of the body and the diaphragm of the auxiliary pump 42 has sufficient rigidity to deform.
技術說明之動作相同 幾乎不會在高 诘、H、主幫浦之膨脹量與副幫浦之膨脹量係成為主幫 /曰1 I浦之關係，因此通過藥液供給配管14供鈐至嗜 =12之液晶，係在從主幫浦4〇供給的液晶加：從副幫 浦42供給的液晶。 、亦即，主幫浦40或藥液供給配管14等容積係因主幫 ^ 40之送出動作時_力上昇而增加，由於該增加供給初 ^之供給流量會減低至比設定値小，但可利用由副幫浦42 供給之液晶補足供給流量，如第5圖之Β線所示，在液晶 之i、…初期’液晶之送出流量會立即達到設定値。 僅利用主幫浦40供給液晶，而未使副幫浦作動時， π 317397 1285916 液晶之送出流量係如第5圖之線A所示，呈平緩之上昇。 在前述實施例中，在主幫浦40之二次側設置有副幫浦 • 42,但如第6圖所示，亦可在主幫浦4〇之一次侧設置有副 幫浦42。且在前述實施例中，係將主幫浦4〇及副幫浦42 分別設置，但亦可一體設置主幫浦4〇及副幫浦42。 在前述實施例中，係串聯設置主幫浦4〇及副幫浦42， 但如第7圖所示’亦可並聯設置主幫浦4〇及副幫浦42。 .此時，主幫浦4〇及副幫浦42係個別之線，因此副幫浦42 …P使在主桌浦4 0吐出·吸入中亦可進行吸入。且主幫浦 4〇及副幫浦42係個別之線，因此可個別控制主幫浦4〇及 副幫浦42。因此，設定範圍廣且容易進行動作條件之設定。 在前述實施例中，主幫浦40係使用Tube-phram幫浦， 但主幫浦4〇之種類並無限制，亦可使用其他任何幫浦。 又’副幫浦42係使用膜片式回吸閥，但亦可使用伸縮管式 式回吸閥、管式式回吸閥、伸縮管幫浦、膜片幫浦、 φ Tube_Phram幫浦、氣缸幫浦、加熱方式體積變化裝置、壓 電元件方式體積變化裝置、及由形狀記憶合金所構成之體 積變化裝置等。 (產業上之利用可能性） 本發明係不僅可使用在供給液晶且製造液晶基板之情 形’亦可使用在將漿狀之食品填充在容器的情形等。 【圖式簡單說明】 第1圖係本發明一實施例之藥液供給裝置（例丨）的說 明圖。 12 317397 !285916 第2圖係隔壁式回吸閥之說明圖。 第3圖係本發明一實施例之藥液供給裝置（例1)之動 作狀態的時序圖。 第4圖係Tube-phram幫浦之送出時的伸縮管之狀態的 說明圖。 第5圖係從噴嘴裝置送出之藥液之送出流量與時間之 關係的曲線圖。 φ 第6圖係本發明其他實施例之藥液供給裝置（例2)的 /說明圖。 第7圖係本發明其他實施例之藥液供給裝置（例”的 說明圖。 第8圖係習知藥液供給裝置之一例之說明圖。 第9圖係Tube-phram幫浦之說明圖。 第1〇圖係從噴嘴裝置送出之藥液之送出流量與時 之關係的曲線圖。 ❿【主要元件符號說明】 1〇 藥液容器 14 藥液供給配管 14b 送出側配管部 18 幫浦 22 控制裝置 26 伸縮管 26b 小型伸縮管部 3〇 作動碟片部 12 噴嘴裝置 14a 供給側配管部 16 開閉閥 2〇 開閉閥 24 可撓性管 26a 大型伸縮管部 28 幫浦室 32 往復機構 317397 13 1285916 34 馬達 40 主幫浦 ^ 42 副幫浦 44 閥本體 • 46 膜片 48 活塞棒 50 活塞 52 第1空氣室 54 第2空氣室 56 氣缸管 58 彈簧 317397The technical description of the action is almost the same as the sorghum, H, the main swell and the amount of expansion of the auxiliary pump is the main gang / 曰 1 I Pu relationship, so the medicinal supply pipe 14 supply 钤 to the hobby The liquid crystal of =12 is supplied from the liquid crystal supplied from the main pump 4: the liquid crystal supplied from the sub pump 42. In other words, the volume of the main pump 40 or the chemical supply pipe 14 is increased due to the increase in the force of the main service 40, and the supply flow rate of the supply is reduced to be smaller than the set value. The liquid supply supplied by the auxiliary pump 42 can be used to supplement the supply flow rate. As shown by the enthalpy line in Fig. 5, in the initial stage of the liquid crystal i, ... the liquid crystal delivery flow rate immediately reaches the set value. When only the main pump 40 is used to supply the liquid crystal, and the sub-pull is not actuated, the flow rate of the liquid crystal of π 317397 1285916 is as shown by the line A of Fig. 5, and rises gently. In the foregoing embodiment, the sub-pull is provided on the secondary side of the main pump 40. However, as shown in Fig. 6, the sub-pump 42 may be provided on the primary side of the main pump 4. In the foregoing embodiment, the main pump 4 and the auxiliary pump 42 are separately provided, but the main pump 4 and the auxiliary pump 42 may be integrally provided. In the foregoing embodiment, the main pump 4 and the sub pump 42 are disposed in series, but as shown in Fig. 7, the main pump 4 and the sub pump 42 may be disposed in parallel. At this time, the main pump 4 and the auxiliary pump 42 are separate lines, so the auxiliary pump 42 ... P can be inhaled at the main table Pu 40 and inhaled. The main pump 4 and the auxiliary pump 42 are separate lines, so the main pump 4 and the auxiliary pump 42 can be controlled individually. Therefore, the setting range is wide and the setting of the operating conditions is easy. In the foregoing embodiment, the main pump 40 system uses the Tube-phram pump, but the type of the main pump 4 is not limited, and any other pump can be used. Also, the 'Deputy Pump 42 Series uses a diaphragm type suction valve, but it can also use a telescopic tube type suction valve, a tube type suction valve, a telescopic tube pump, a diaphragm pump, a φ Tube_Phram pump, and a cylinder. A pump, a heating type volume changing device, a piezoelectric element type volume changing device, and a volume changing device composed of a shape memory alloy. (Industrial Applicability) The present invention can be used not only in the case of supplying a liquid crystal but also in producing a liquid crystal substrate, and can also be used in a case where a paste-like food is filled in a container. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an explanatory view showing a liquid chemical supply device (Example) of an embodiment of the present invention. 12 317397 !285916 Figure 2 is an explanatory diagram of the partition type suction valve. Fig. 3 is a timing chart showing the state of operation of the chemical supply device (Example 1) according to an embodiment of the present invention. Fig. 4 is an explanatory diagram showing the state of the bellows when the Tube-phram pump is delivered. Fig. 5 is a graph showing the relationship between the discharge flow rate of the chemical liquid sent from the nozzle device and time. φ Fig. 6 is a diagram for explaining the liquid chemical supply device (Example 2) of another embodiment of the present invention. Fig. 7 is an explanatory view showing an example of a chemical liquid supply device according to another embodiment of the present invention. Fig. 8 is an explanatory view showing an example of a conventional chemical liquid supply device. Fig. 9 is an explanatory view of a Tube-phram pump. Fig. 1 is a graph showing the relationship between the flow rate of the chemical liquid sent from the nozzle device and the time. ❿ [Description of main component symbols] 1 〇 medicinal solution container 14 medicinal solution supply pipe 14b delivery side piping unit 18 pump 22 control Device 26 Telescopic tube 26b Small telescopic tube portion 3 〇 Operating disc portion 12 Nozzle device 14a Supply side piping portion 16 Opening and closing valve 2 〇 Opening and closing valve 24 Flexible tube 26a Large telescopic tube portion 28 Pump chamber 32 Reciprocating mechanism 317397 13 1285916 34 Motor 40 Main pump ^ 42 Vice pump 44 Valve body • 46 Diaphragm 48 Piston rod 50 Piston 52 First air chamber 54 Second air chamber 56 Cylinder tube 58 Spring 317397