1285179 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於一種爲了防止異物附著在製造LSI或液 晶面板時之微影步驟當中所使用的遮罩（photomask)或光 罩（reticle)而使用的薄膜之收納容器，尤其是關於大型薄 膜的收納容器。 【先前技術】 過去，在製造半導體電路圖案等時，一般是使用被稱 爲薄膜（pellicle)的防塵手段來防止異物附著在遮罩或光罩 (例如參照專利文獻1 )。薄膜是將厚度1 Ομηι以下的硝化纖 維素（nitrocellulose)、纖維素衍生物、非晶質氟樹脂等的 透明高分子膜（以下稱爲薄狀膜（pellicle film))展開而接著 在具有配合遮罩或光罩之形狀的形狀，且厚度爲數毫米程 度的框體的上緣面，並且在該框體的下緣面塗上黏著材， 同時以預定的黏著力將保護膜黏貼在此黏著材上。 前述黏著材是用來將薄膜固接於遮罩或光罩。而保護 膜是用來保護該黏著材的黏著面，俾使該黏著材在其使用 之前得以維持該黏著材的黏著力。從製造者將此薄膜搬運 至使用者時，爲了防止異物附著在薄狀膜（Pellicle film) 等、或是防止薄膜受損，一般是將該薄膜收納在托盤及蓋 體所構成的收納容器，再收納於防麈袋等而進行搬運。 過去，收納在具有前述構造之收納容器的方式是以第 7圖及第8圖所示的方式進行。亦即’在第7圖及第8圖當中 -5- (2) (2)1285179 ，薄狀膜（pellicle film)52是以展開（與插銷貼住）的狀態接 著在框體51之一方的上緣面，在框體51的另一面（下緣面） 設有適當厚度的黏著材53，在黏著材53的下面又貼有保護 膜（圖面當中未圖示）而構成薄膜。此薄膜是以保護膜（圖 面當中未圖示）與托盤55之平坦面的設置面55a上相接的方 式而放置，以免黏著材變形。 載置於托盤55之設置面55a上的薄膜，過去是藉由設 在托盤5 5的突起狀支柱5 5 b來限制左右的移動，接下來從 上方蓋上蓋體56，並藉由夾具57固定蓋體56及托盤55的四 個角落而收納（專利文獻1 )。該結果，前述薄膜是形成由 蓋體56之斜面56a、支柱55b及設置面55a包圍，然後受到 限制而收納的狀態。另外，也揭示了使上述托盤的周緣形 成肋部構造（專利文獻2)。再者，亦可取代夾具57而使用 黏著膠帶來使整個周圍密閉。 然而，要收納如本發明之面積有1 〇 〇 0 c m2以上的大型 薄膜的情況下，可能無法獲得充分的保護效果。 而且，收納容器一般是使用樹脂材料，然後藉由擠出 成形或真空成形而製造。然而，5英吋或6英吋之半導體用 薄膜的收納容器雖然很多也是藉由擠出成形而成形，但面 積有1 000cm2以上的大型薄膜用的收納容器大多是藉由真 空成形來製作。擠出成形雖可尺寸精度良好地成形，但擠 出成形很難製作出這種大型成形品，真空成形則可容易製 造出薄壁的大型一體成形品。然而，薄膜越大，收納容器 也會變大，因而可能會有以下的問題點產生。 -6 - (3) (3)1285179 亦即，收納容器的成形形變會變大，收納容器的翹曲 量會變大。翹曲量大時，在水平保管（將薄膜放入收納容 器，然後以水平狀態加以保管）當中，其形狀便容易轉寫 至遮罩黏著材並且變形。 一旦黏著材變形，要黏貼遮罩時就可能會引起遮罩黏 著材的一部分無法貼在遮罩上等的黏貼不良。 再者，由於收納容器的剛性不足，在搬運時，可能會 發生收納容器因爲收納容器之把持方式的不同而形變、或 是在直立保管（將薄膜放入收納容器，然後使收納容器立 起來而加以保管）時導致收納容器形變的問題。一旦收納 容器形變，托盤的形變形狀就可能會轉印至黏著材。一旦 黏著材變形，就可能會發生先前所述的黏貼不良。 而且，一旦收納容器形變，依收納容器之設計的不同 ，可能會有因爲薄膜與收納容器之蓋體的摩擦而引起發塵 ，以致異物附著在薄膜的問題。 因此，爲了使其具有剛性，可考慮增加容器的厚度， 但可想而知重量會變重，操作性會變得極差。 而且，即使爲了使其具有剛性而設置肋部，在面積爲 1 000cm2的大型薄膜收納容器當中，也有可能會使收納容 器中的凹凸增加’並且使洗淨性、異物附著有無確認作業 性變差，因此並不理想。 [專利文獻1]日本特開2000-1 7 3 887號公報 [專利文獻2 ]日本特開平8 _ 6 2 8 2 8號公報 (4) (4)1285179 【發明內容】 [發明所欲解決之課題] 有鑑於上述問題點，本發明之課題在於提供一種在搬 運•保管後也可維持大型薄膜本來之功能的收納容器。 [用以解決課題之手段] 因此，本案發明者群致力檢討的結果發現’只要是具 有以下構造的收納容器，在搬運•保管後也可維持大型薄 膜本來的功能，並且完成了本發明。 亦即，本發明是： 1. 一種收納容器，是由用來收納薄膜的托盤、以及用 來覆蓋托盤的蓋體所構成，而且面積爲l〇〇〇cm2以上的大 型薄膜用收納容器；其特徵爲：該蓋體及/或托盤是包含 具有蜂巢狀構造的材料所成。 2 .如上述1 ·所記載之收納容器，其中具有：由於前述 蓋體及/或托盤之表面上的至少一部分配置有前述蜂巢狀 構造之板狀材料的構造、以及於前述蓋體及/或托盤的至 少一部分埋入有前述蜂巢狀構造之板狀材料的構造之中， 選擇至少一種構造。 3 ·如上述1 ·或2 ·所記載之收納容器，其中：該收納容 器具有在前述蓋體及/或托盤的外面側配置有本身具有蜂 巢狀構造之板狀材料的構造。 4.如上述1〜3中任一項所記載之收納容器，其中：前 述托盤爲，形成載置大型薄膜的部分與該托盤的其他部分 (5) 1285179 位於同一平面上的形態、或是相對於該托 起的形態，並且具有前述蜂巢狀構造之材 埋入該載置的部份之構造。 5 ·如上述1〜4中任一項所記載之收納 前述蓋體及/或托盤的全面上及/或內部， 狀構造之材料的構造。 6·如上述1〜5中任一項所記載之收納 :前述托盤本身是由具有蜂巢狀構造的材 7 · —種大型薄膜收納構造體，其特: 1〜6中任一項所記載的收納容器、以及收 的薄膜所成。 [發明之效果] 根據本發明，可提供一種剛性高，平 '淨性佳的大型薄膜用的收納容器。因此， 會變形，而可防止薄膜相對於遮罩或光罩 I ’可防止因爲收納容器之搬運時的把持 t彳呆管時，薄膜與大型薄膜收納容器摩擦 埃附著在薄膜上。因此，從製造者搬運到 不會損壞薄膜的功能，使用者可經常使用 ^明對於品質的穩定化有很大的貢獻 【實施方式】 以下，詳細說明本發明。 盤的其他部分隆 料爲具有配置或 容器，其中：於 配置有前述蜂巢 容器，其中具有 料所成。 戰爲：包含上述 容在該收納容器 坦性佳，而且洗 薄膜的黏著材不 的黏貼不良。而 方式、或是在直 所產生的微小塵 使用者的期間， 品質穩定的薄膜 - 9- (6) (6)1285179 本發明的一個樣態是在面積爲l〇〇〇cm2以上的大型薄 膜用收納容器當中’藉由在蓋體及/或托盤之表面上的至 少一部分設置補強板’使補強板仿照收納容器的形變’使 其具有平坦性。藉此，由於可使該收納容器具有剛性，因 此在搬運時、直立保管時，可防止容器形變。此外，藉由 將補強板配置在蓋體及/或托盤的外面側（非面向用來載置 薄膜之側的一側），比起補強收納容器之蓋體或托盤之內 面側（薄膜之載置側）的情況，比較不會產生凹凸，因此也 就不會影響確認異物附著之有無的作業的容易度，而可獲 得更好的效果。 而且，本發明的另一個樣態當中，亦可藉由將補強板 埋入蓋體及/或托盤而獲得與上述相同的效果。埋入補強 板的情況下，可使補強板的一方之面露出在蓋體及/或托 盤的表面、或是包埋住補強板全體。如上述藉由將補強板 埋入蓋體及/或托盤，就不會產生凹凸而可達成平坦性之 維持及剛性之提升。 本發明之又其他樣態當中，亦可藉由將補強板配置在 收納容器的全面，以防止薄膜之黏著材部的變形，並且使 容器的剛性更爲提升。 而且，本發明當中，在托盤是形成一種使用來載置薄 膜的部分與該托盤的其他部分位於同一平面上的形態、或 是相對於該托盤的其他部分隆起的形態的情況下，便可藉 由在用來載置薄膜的部分配置或是埋入補強板來保持收納 容器的平坦性，並且使剛性提升。藉此便可達成本發明的 -10- ' (7) *1285179 效果。' 本發明所使用的補強板可使用碳鋼或不鏽鋼、鋁 、鈦合金等的金屬板或聚碳酸酯、聚縮醛、聚對苯二 二丁醋（poly bathylene terephthalete)、變性聚苯醚、 纖維強化聚對苯二甲酸乙酯、聚亞苯基硫化物 phenylene sulfide)、聚醚醯亞胺、聚醯胺-醯亞胺、 亞胺等的工程塑料板。形狀則可使用如穿孔金屬一樣 中空或蜂巢狀構造的板體。尤其以蜂巢狀構造的板體 。藉由使用蜂巢狀構造的板體，可一面盡量抑制由於 補強板所導致的重量增加，一面達成收納容器之平坦 維持、剛性之提升。 蜂巢狀的孔室尺寸等只要從剛性、平坦性、重量 點來選擇即可，例如亦可從0.1mm至10 Omm等當中選 較佳爲〇.3mm至50mm。另外，孔室高度並沒有特別 定，例如亦可從1 m m至2 0 0 m m當中選擇。較佳爲3 m 1 0 0 m m。另外，頂板、底板的厚度也沒有特別的限定 如亦可從〇·1 mm至3 00mm的範圍當中選擇。較佳爲〇 至 2 0 m m。 而且，孔室的形狀雖然沒有特別指定，但可爲六 0X、彎曲、二等分、羽狀等，較佳爲六角。 而且，本發明的一個樣態當中，亦可使收納容器 體及/或托盤本身由具有上述蜂巢狀構造的材料本身 。如此，除了可達成剛性之提升、平坦性之維持，還 時實現更輕量化。 合金 甲酸 玻璃 (poly 聚醯 部分 爲佳 使用 性的 的觀 擇。 的限 m至 ，例 • 2 mm 角、 的蓋 構成 可同 • 11 - (8) (8)1285179 就本發明可使用之具有蜂巢狀構造的板狀的材料而言 ，一般是只要具有蜂巢狀構造則可爲任何材料。依使用形 態的不同，亦可爲經由蜂巢狀構造的部分使頂板與底板相 對向的材料（第1圖的（1 ))、只有蜂巢狀構造的部分及頂板 的材料（第1圖的（2 ))、只有蜂巢狀構造的部分及底板的材 料（第1圖的（3))。另外，亦可爲僅由蜂巢狀構造構成的材 料(第1圖的（4))。 例如，將具有蜂巢狀構造的板狀材料（以下稱爲蜂巢 狀板）配置在托盤的表面上的情況下，要將蜂巢狀板配置 在載置薄膜之側時，藉由將頂板及蜂巢狀構造的部分所構 成的板狀材料配置成使托盤的配置面具有底板的功能，則 由於不使用底板，因此可抑制重量的增加及凹凸的大小。 反之，要在不載置薄膜之側使用蜂巢狀板時，藉由將 底板及蜂巢狀構造的部分所構成的板狀材料配置成使托盤 的配置面具有頂板的功能，則由於不使用頂板，因此可抑 制重量的增加及凹凸的大小。 此外，本發明當中，蜂巢狀構造之部分的材質並沒有 限定，但如先前所敘述，可使用碳鋼或不鏽鋼、鋁合金、 鈦合金等的金屬板或聚碳酸酯、聚縮醛、聚對苯二甲酸二 丁酯（poly bathylene terephthalete)、變性聚苯醚、玻璃纖 維強化聚對苯二甲酸乙酯、聚亞苯基硫化物（p〇Jy phenylene sulfide)、聚醚醯亞胺、聚醯胺-醯亞胺、聚醯 亞胺等的工程塑料板等，較佳爲金屬，更佳爲鋁合金。另 外，從使用前之異物附著有無確認作業性的觀點來看’亦 -12- 1285179 Ο) 可爲進行過黑色氧化鋁膜處理或噴粒處理及其雙方的材質 〇 以下，使用圖面來更爲具體地說明本發明的一個樣態 之使用蜂巢狀板而構成的大型薄膜用收納容器。 首先，本發明的大型薄膜收納容器的全體圖顯示於第 2圖。 如第2 A圖所示，大型薄膜收納容器是用來將薄膜1收 納在內部，並且由托盤2及蓋體3所構成。薄膜1是由薄狀 膜（pellicle film)ll、貼有薄狀膜（pellicle 的框體 1 2、以及用來將框體貼在遮罩或光罩的黏著材1 3等所構成 。在此，本實施形態當中的薄膜1是薄狀膜（pellicle film)ll之面積超過1 000cm2的大型薄膜。 在托盤2沿著周邊形成有可載置薄膜1的隆起部21，隆 起部21的內側（中央側）是形成平面部22。托盤2是藉由真 空成形而製造，在隆起部2 1的外面側則形成有凹槽部23。 另外，在隆起部2 1的上部直立突設有與薄膜1之保護膜的 外形部相接，並且用來限制橫向之移動的複數個肋部24。 由於所要收納的薄膜之面積超過l〇〇〇cm2，因此平面部22 的面積也是以此爲準。 蓋體3與托盤2同樣是藉由真空成形而製造，而且是如 第2B圖所示，藉由覆蓋在托盤2而收納薄膜1。使托盤2與 蓋體3合起來以後，藉由將未圖示的黏著膠帶在周邊沿著 端邊黏貼而加以密封。 托盤2及蓋體3的材質並沒有特別的指定，但只要使用 -13- (10) (10)1285179 丙烯酸樹脂或聚對苯二甲酸乙酯樹脂、丁腈•丁二烯•苯 乙烯樹脂等即可。而且除了上述樹脂以外，亦可使用聚對 苯二甲酸乙酯以外的聚酯樹脂、聚乙烯或聚丙烯等的烯系 樹脂、聚苯乙烯或丙烯腈•苯乙烯樹脂等的聚苯乙烯系樹 脂等。 在上述構成當中，托盤2及蓋體3—般是使外圍附近彎 曲，因此在周邊部具有某種程度的剛性。然而，如果平面 部22的強度弱，又其面積有1 000cm2以上，則容器全體的 剛性就會變得不夠，因而容易發生翹曲或彎曲。因此，本 發明之一個樣態是在托盤2的外面側安裝有蜂巢狀板4。藉 此可更進一步提升容器全體的剛性。 第3圖是將蜂巢狀板配置或埋入於收納容器的蓋體及/ 或托盤之表面的情況（蜂巢狀板之面出現在表面的情況）下 之蜂巢狀板的配置樣態的俯視意像圖。外圍部相當於用來 載置薄膜的框體的形狀，但從圖面可以明白，在沿著框體 形狀的部分以外也配置有蜂巢狀板。此外，在沿著框體形 狀的部分配置蜂巢狀板雖然較爲理想，但即使沒有配置也 具有效果。 此外，在蓋體及/或托盤的表面配置蜂巢狀板的情況 下，即使配置在內面側也可提升剛性，但若是配置在外面 側，除了可提升剛性之外，也可提升平坦性，因此較爲理 想。 第4A圖及第4B圖是在托盤之用來載置薄膜之側的相' 反側（外面側）使用蜂巢狀板來補強時的剖面的意像圖。第 -14- 、 (11) 、 (11)1285179 4A圖是將蜂巢狀板作爲補強板而載置於托盤之全面的示 意圖。第4B圖是將蜂巢狀板作爲補強板而載置於托盤之 外圍部的示意圖。 第5A圖及第5B圖是於托盤使用蜂巢狀板本身時的剖 面的意像圖。第5A圖是將蜂巢狀板本身作爲托盤來使用 時的剖面的意像圖，而且是托盤全面形成蜂巢狀板時的圖 。第5B圖是將蜂巢狀板本身作爲托盤來使用時的剖面的 意像圖，而且是在托盤的外圍部使用蜂巢狀板時的圖。 第6圖是於托盤使用蜂巢狀板本身時的俯視意像圖。 於托盤使用蜂巢狀板本身時，蜂巢狀板可以僅由頂板及蜂 巢狀構造的部分構成，亦可由頂板及蜂巢狀構造的部分以 及底板所構成〜另外’在框體的外圍部使用蜂巢狀板時， 可包含沒有蜂巢狀板的中央部於托盤全面使用頂板，亦可 僅於外圍部設置蜂巢狀部及頂板。 本發明當中，於補強板或托盤使用蜂巢狀板的收納容 器最好設置覆蓋體以防止來自蜂巢狀部側面的發塵。 [產業上的利用可能性] 本發明的大型薄膜用收納容器能以穩定的狀態收納面 積爲1000 cm2以上的大型薄膜，而且可使大型薄膜不受損 而安全地進行搬運·保管。 【圖式簡單說明】 第1圖是例示出各種蜂巢狀板的剖面圖。 -15- (12) (12)1285179 第2A圖是蓋體、薄膜及托盤的剖面圖。 第2B圖是在蓋體及托盤所構成的大型薄膜收納容器 之內部收納有薄膜的收納構造體的側面剖面圖。 第3圖是補強板貼在收納容器之樣態的俯視圖。 第4A圖是將蜂巢狀板作爲補強板而載置於托盤的全 面之樣態的側面剖面圖。 第4 B圖是將蜂巢狀板作爲補強板而載置於托盤的外· 圍部之樣態的側面剖面圖。 第5 A圖是使用蜂巢狀板本身作爲托盤時之樣態的側 面剖面圖，而且是托盤全面形成蜂巢狀板時的圖。 第5 B圖是使用蜂巢狀板本身作爲托盤時之樣態的側 面剖面圖，而且是在托盤的’外圍部使用蜂巢狀板時的圖:。 第6圖是將蜂巢狀板本身使用於托盤時的俯視意像圖 〇 第7圖是在本發明之收納容器收納有薄膜之樣態的俯 視透視圖。 第8圖是在本發明之收納容器收納有薄膜之樣態的側 面剖面圖。 【主要元件符號說明】 1 薄膜 2 托盤 3 蓋體 4 蜂巢狀板 -16- (13) 12851791285179 (1) EMBODIMENT OF THE INVENTION [Technical Field] The present invention relates to a photomask or a reticle used to prevent foreign matter from adhering to a lithography step in manufacturing an LSI or a liquid crystal panel. The storage container for the film to be used is, in particular, a storage container for a large film. [Prior Art] In the past, when manufacturing a semiconductor circuit pattern or the like, a dustproof means called a pellicle is generally used to prevent foreign matter from adhering to the mask or the mask (for example, see Patent Document 1). The film is formed by spreading a transparent polymer film (hereinafter referred to as a pellicle film) such as nitrocellulose, a cellulose derivative or an amorphous fluororesin having a thickness of 1 μm or less. a shape of a shape of a cover or a reticle, and an upper edge surface of the frame having a thickness of several millimeters, and an adhesive material is applied to the lower edge surface of the frame, and the protective film is adhered thereto by a predetermined adhesive force. On the material. The aforementioned adhesive material is used to fix the film to the mask or the reticle. The protective film is used to protect the adhesive surface of the adhesive, so that the adhesive maintains the adhesion of the adhesive before it is used. When the manufacturer transports the film to the user, in order to prevent foreign matter from adhering to the Pellicle film or the like, or to prevent damage to the film, the film is generally housed in a storage container composed of a tray and a lid. It is stored in an anti-smash bag or the like and then transported. In the past, the storage container having the above-described structure has been carried out in the manner shown in Figs. 7 and 8. That is, in the 7th and 8th drawings, -5 - (2) (2) 1285179, the pellicle film 52 is in the state of being unfolded (attached to the pin) and then on one side of the frame 51. On the upper edge surface, an adhesive material 53 having an appropriate thickness is provided on the other surface (lower edge surface) of the frame 51, and a protective film (not shown in the drawing) is attached to the lower surface of the adhesive material 53 to form a film. This film is placed in such a manner that the protective film (not shown in the drawing) is in contact with the flat surface 55a of the tray 55 to prevent the adhesive from being deformed. The film placed on the setting surface 55a of the tray 55 has been restricted from moving left and right by the projecting pillars 5 5 b provided on the tray 55, and then the lid body 56 is covered from above and fixed by the jig 57. The cover 56 and the four corners of the tray 55 are housed (Patent Document 1). As a result, the film is formed in a state in which it is surrounded by the inclined surface 56a of the lid 56, the pillar 55b, and the installation surface 55a, and is then housed and restrained. Further, it has also been disclosed that the peripheral edge of the tray is formed into a rib structure (Patent Document 2). Further, instead of the jig 57, an adhesive tape may be used to seal the entire periphery. However, in the case of accommodating a large-sized film having an area of 1 〇 〇 0 c m2 or more as in the present invention, a sufficient protective effect may not be obtained. Further, the storage container is generally made of a resin material and then formed by extrusion molding or vacuum forming. However, many storage containers for semiconductor films of 5 inches or 6 inches are formed by extrusion molding, but containers for large films having a size of 1 000 cm 2 or more are often produced by vacuum molding. Although the extrusion molding can be formed with good dimensional accuracy, it is difficult to produce such a large-sized molded article by extrusion molding, and it is easy to produce a thin and large-sized integrally molded product by vacuum molding. However, the larger the film, the larger the storage container, and the following problems may occur. -6 - (3) (3) 1285179 That is, the forming deformation of the storage container is increased, and the amount of warpage of the storage container is increased. When the amount of warpage is large, the shape is easily transferred to the mask adhesive and deformed while being stored horizontally (the film is placed in the storage container and then stored in a horizontal state). Once the adhesive is deformed, it may cause a problem that a part of the mask adhesive cannot be attached to the mask or the like when the mask is adhered. In addition, since the rigidity of the storage container is insufficient, the storage container may be deformed due to the difference in the holding manner of the storage container during transportation, or may be stored in an upright position (the film is placed in the storage container, and then the storage container is stood up. When it is stored, it causes a problem that the storage container is deformed. Once the container is deformed, the deformed shape of the tray may be transferred to the adhesive. Once the adhesive is deformed, the previously described poor adhesion may occur. Further, once the storage container is deformed, depending on the design of the storage container, dust may be generated due to friction between the film and the lid of the storage container, so that foreign matter adheres to the film. Therefore, in order to make it rigid, it is conceivable to increase the thickness of the container, but it is conceivable that the weight becomes heavy and the workability becomes extremely poor. In addition, even if a rib is provided in order to make it rigid, the large-sized film storage container having an area of 1 000 cm 2 may increase the unevenness in the storage container, and the cleaning property and the adhesion of the foreign matter may be deteriorated. Therefore, it is not ideal. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2000-1 7 3 887 [Patent Document 2] Japanese Patent Application Laid-Open No. Hei No. Hei No. Hei 8 _ 6 2 8 2 8 (4) (4) 1285179 [Summary of the Invention] Problem In view of the above problems, an object of the present invention is to provide a storage container capable of maintaining the original function of a large-sized film after transportation and storage. [Means for Solving the Problem] As a result of the review by the inventors of the present invention, it has been found that the present invention can be maintained as long as it is a storage container having the following structure, and can maintain the original function of the large-sized film after handling and storage. That is, the present invention is: 1. A storage container comprising a tray for accommodating a film and a lid for covering the tray, and a large-sized film storage container having an area of 1 cm 2 or more; The feature is that the cover and/or the tray are made of a material having a honeycomb structure. 2. The storage container according to the above aspect, comprising: a structure in which at least a part of the surface of the lid body and/or the tray is disposed with the sheet-like material of the honeycomb structure, and the lid body and/or the lid body and/or At least a part of the tray is embedded in the structure of the sheet-like material of the honeycomb structure described above, and at least one structure is selected. (3) The storage container according to the above-mentioned item, wherein the storage container has a structure in which a plate-like material having a honeycomb structure itself is disposed on an outer surface side of the lid body and/or the tray. 4. The storage container according to any one of the above 1 to 3, wherein the tray has a form in which a portion on which a large-sized film is placed is placed on the same plane as another portion (5) 1285179 of the tray, or is relatively In the form of the support, and the structure in which the honeycomb structure is embedded in the mounted portion. The structure of a material for accommodating the entire surface and/or the inner structure of the lid body and/or the tray as described in any one of the above 1 to 4. 6. The storage according to any one of the above 1 to 5, wherein the tray itself is a material having a honeycomb structure, a large-sized film storage structure, or any one of the following: The storage container and the collected film are formed. [Effects of the Invention] According to the present invention, it is possible to provide a storage container for a large film having high rigidity and good flatness. Therefore, it is possible to prevent the film from being prevented from adhering to the film by the friction between the film and the large-sized film container when the film is held by the container or the mask 1 ′. Therefore, the user can often use the function of carrying out the function of not damaging the film, and the user can often use it to contribute to the stabilization of the quality. [Embodiment] Hereinafter, the present invention will be described in detail. The other part of the disc is provided with a configuration or container, wherein: the honeycomb container is configured as described above. The battle is as follows: the above-mentioned contents are contained in the storage container, and the adhesion of the film to the film is not good. In the same way, or in the case of a small dust user generated by straight, a stable film - 9- (6) (6) 1285179 One aspect of the present invention is a large film having an area of l〇〇〇cm 2 or more. In the storage container, 'the reinforcing plate is provided with at least a part of the surface of the lid body and/or the tray to make the reinforcing plate follow the deformation of the storage container' to have flatness. Thereby, since the storage container can be made rigid, it is possible to prevent the container from being deformed during transportation and during storage in an upright position. Further, by arranging the reinforcing plate on the outer surface side of the lid body and/or the tray (the side not facing the side on which the film is placed), the inner surface side of the lid body or the tray of the reinforcing storage container (the film side) In the case of the mounting side, since the unevenness is not generated, the easiness of the work for confirming the presence or absence of foreign matter adhesion is not affected, and a better effect can be obtained. Further, in another aspect of the present invention, the same effects as described above can be obtained by embedding the reinforcing plate in the lid body and/or the tray. When the reinforcing plate is embedded, one surface of the reinforcing plate may be exposed on the surface of the lid body and/or the tray, or the entire reinforcing plate may be embedded. As described above, by embedding the reinforcing plate in the lid body and/or the tray, unevenness can be prevented and the flatness can be maintained and the rigidity can be improved. In still other aspects of the present invention, the reinforcing plate may be disposed in the entirety of the container to prevent deformation of the adhesive portion of the film and to increase the rigidity of the container. Further, in the present invention, in the case where the tray is formed in a form in which the portion on which the film is placed is placed on the same plane as the other portion of the tray, or in a form in which the portion of the tray is raised relative to the other portion of the tray, The flatness of the container is maintained and the rigidity is increased by arranging or embedding the reinforcing plate in the portion for placing the film. Thereby, the effect of -10- ' (7) * 12855179 of the present invention can be achieved. The reinforcing plate used in the present invention may be a metal plate of carbon steel or stainless steel, aluminum, titanium alloy or the like, polycarbonate, polyacetal, poly bathylene terephthalete, denatured polyphenylene ether, Engineering plastic sheets such as fiber-reinforced polyethylene terephthalate, phenylene sulfide, polyether phthalimide, polyamidamine-imine, imine, and the like. The shape may be a hollow or honeycomb structure such as a perforated metal. Especially in the form of a honeycomb structure. By using the honeycomb body structure, the flatness of the storage container can be improved and the rigidity can be improved while suppressing the weight increase due to the reinforcing plate. The size of the honeycomb-shaped cells and the like may be selected from the viewpoints of rigidity, flatness, and weight. For example, it may be preferably from 0.3 mm to 10 mm in a range of from 0.1 mm to 10 mm. In addition, the height of the cell is not particularly limited, and for example, it can be selected from 1 m m to 200 m m . It is preferably 3 m 1 0 0 m m. Further, the thickness of the top plate and the bottom plate is not particularly limited, and may be selected from the range of 〇·1 mm to 300 mm. It is preferably 〇 to 20 m m. Further, although the shape of the cell is not particularly specified, it may be sixty-two, curved, bisect, feathered, etc., preferably hexagonal. Further, in one aspect of the invention, the storage container body and/or the tray itself may be made of the material itself having the honeycomb structure described above. In this way, in addition to achieving an increase in rigidity and maintenance of flatness, it is also possible to achieve a lighter weight. Alloy formic acid glass (poly polyfluorene part is a good choice for use. The limit of m to, for example, 2 mm angle, the cover composition can be the same as 11 - (8) (8) 1285179 The material of the honeycomb structure of the honeycomb structure is generally any material as long as it has a honeycomb structure, and may be a material that faces the top plate and the bottom plate via a honeycomb structure depending on the form of use (first) (1)), the material of only the honeycomb structure and the top plate (Fig. 1 (2)), the honeycomb-only structure, and the material of the bottom plate (Fig. 1 (3)). It may be a material composed only of a honeycomb structure ((4) of Fig. 1). For example, when a plate-like material having a honeycomb structure (hereinafter referred to as a honeycomb plate) is placed on the surface of the tray, When the honeycomb plate is placed on the side on which the film is placed, by arranging the plate-shaped material composed of the top plate and the honeycomb structure portion so that the arrangement surface of the tray has the function of the bottom plate, since the bottom plate is not used, it is possible to suppress Increase in weight and unevenness On the other hand, when the honeycomb plate is used on the side where the film is not placed, the plate material composed of the bottom plate and the honeycomb structure portion is arranged such that the arrangement surface of the tray has the function of the top plate, since it is not used. Further, in the present invention, the material of the honeycomb structure is not limited, but as described above, carbon steel or stainless steel, aluminum alloy, titanium alloy, or the like can be used. Metal plate or polycarbonate, polyacetal, polybutylene terephthalete, denatured polyphenylene ether, glass fiber reinforced polyethylene terephthalate, polyphenylene sulfide (p〇 Jy phenylene sulfide), an engineering plastic plate such as polyether phthalimide, polyamine amide, phthalimide, or polyimine, etc., preferably a metal, more preferably an aluminum alloy, and whether or not the foreign matter adheres before use. From the viewpoint of confirming the workability, it is also possible to perform the black alumina film treatment or the blasting treatment and the materials of both of them. One type of large-sized film storage container formed using a honeycomb plate. First, the overall view of the large-sized film storage container of the present invention is shown in Fig. 2 . As shown in Fig. 2A, the large-sized film storage container is for accommodating the film 1 and is composed of the tray 2 and the lid 3. The film 1 is composed of a pellicle film 11, a thin film (a pellicle frame 12, and an adhesive 13 for attaching the frame to a mask or a mask). The film 1 in the present embodiment is a large film in which the area of the pellicle film 11 exceeds 1 000 cm 2 . The ridge portion 21 on which the film 1 can be placed is formed along the periphery of the tray 2, and the inside of the ridge portion 21 (center) The side portion is formed into a flat portion 22. The tray 2 is manufactured by vacuum forming, and a groove portion 23 is formed on the outer surface side of the ridge portion 2 1. Further, the upper portion of the ridge portion 21 is vertically protruded from the film 1 The outer portions of the protective film are joined to each other and are used to restrict the lateral movement of the plurality of ribs 24. Since the area of the film to be accommodated exceeds 10 cm 2 , the area of the flat portion 22 is also subject to this. Similarly to the tray 2, the body 3 is manufactured by vacuum forming, and as shown in Fig. 2B, the film 1 is housed by covering the tray 2. After the tray 2 and the lid body 3 are combined, The adhesive tape shown is sealed at the periphery along the end and sealed. 2 and the material of the lid 3 is not specifically specified, but only -13-(10) (10)1285179 acrylic resin, polyethylene terephthalate resin, butyronitrile butadiene styrene resin, etc. Further, in addition to the above resin, a polyester resin other than polyethylene terephthalate, an olefin resin such as polyethylene or polypropylene, or a polystyrene such as polystyrene or acrylonitrile styrene resin may be used. In the above configuration, the tray 2 and the lid 3 generally have a certain degree of rigidity in the peripheral portion when the periphery is bent. However, if the strength of the flat portion 22 is weak, the area is 1 000 cm 2 . As described above, the rigidity of the entire container becomes insufficient, and warping or bending is likely to occur. Therefore, in one aspect of the invention, the honeycomb-shaped plate 4 is attached to the outer surface side of the tray 2. Thereby, the container can be further lifted. The rigidity of the whole is shown in Fig. 3 is a configuration of the honeycomb-shaped board in which the honeycomb-shaped board is placed or embedded in the lid of the storage container and/or the surface of the tray (when the surface of the honeycomb-shaped board appears on the surface) State The outer peripheral portion corresponds to the shape of the frame on which the film is placed. However, it can be understood from the drawing that the honeycomb plate is disposed in addition to the portion along the frame shape. Although it is preferable to arrange the honeycomb plate, it is effective even if it is not disposed. Further, when the honeycomb plate is disposed on the surface of the lid body and/or the tray, the rigidity can be increased even if it is disposed on the inner surface side, but If it is disposed on the outer side, it can improve the flatness in addition to the rigidity, and therefore it is preferable. Figures 4A and 4B show the phase on the side of the tray on which the film is placed (the outer side) An image of the section when the honeycomb plate is used to reinforce. No. -14-, (11), (11) 1285179 4A is a schematic view of the overall placement of the honeycomb plate as a reinforcing plate on the tray. Fig. 4B is a schematic view showing the honeycomb plate as a reinforcing plate and placed on the outer peripheral portion of the tray. Fig. 5A and Fig. 5B are image views of the cross section of the tray when the honeycomb panel itself is used. Fig. 5A is an image view of a cross section when the honeycomb plate itself is used as a tray, and is a view when the tray is fully formed into a honeycomb plate. Fig. 5B is an image view of a cross section when the honeycomb panel itself is used as a tray, and is a view when a honeycomb panel is used in a peripheral portion of the tray. Fig. 6 is a top view image of the use of the honeycomb panel itself in the tray. When the honeycomb panel itself is used for the tray, the honeycomb panel may be composed only of the top plate and the honeycomb structure, or may be composed of the top plate and the honeycomb structure portion and the bottom plate. - In addition, the honeycomb plate is used at the outer periphery of the frame body. In the case of the central portion having no honeycomb plate, the top plate may be used in the tray, or the honeycomb portion and the top plate may be provided only in the outer portion. In the present invention, it is preferable that the storage container using the honeycomb plate in the reinforcing plate or the tray is provided with a covering body to prevent dust from the side surface of the honeycomb portion. [Industrial Applicability] The large-sized film storage container of the present invention can store a large-sized film having a surface area of 1000 cm 2 or more in a stable state, and can safely carry and store the large-sized film without being damaged. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing various honeycomb sheets. -15- (12) (12) 1285179 Figure 2A is a cross-sectional view of the cover, film and tray. Fig. 2B is a side cross-sectional view showing a storage structure in which a film is accommodated in a large-sized film storage container formed of a lid body and a tray. Fig. 3 is a plan view showing a state in which the reinforcing plate is attached to the storage container. Fig. 4A is a side cross-sectional view showing a state in which a honeycomb plate is placed as a reinforcing plate on the entire surface of the tray. Fig. 4B is a side cross-sectional view showing a state in which a honeycomb plate is placed as a reinforcing plate on the outer and outer portions of the tray. Fig. 5A is a side cross-sectional view showing a state in which the honeycomb plate itself is used as a tray, and is a view when the tray is fully formed into a honeycomb plate. Fig. 5B is a side cross-sectional view showing a state in which the honeycomb plate itself is used as a tray, and is a view when a honeycomb plate is used in the outer periphery of the tray: Fig. 6 is a plan view showing a state in which the honeycomb panel itself is used for a tray. Fig. 7 is a top perspective view showing a state in which a film is accommodated in the storage container of the present invention. Fig. 8 is a side cross-sectional view showing a state in which a film is accommodated in the storage container of the present invention. [Main component symbol description] 1 film 2 tray 3 cover 4 honeycomb plate -16- (13) 1285179
11 薄狀膜（pellicle film) 12 框體 13 黏著材 2 1 隆起部 22 平面部 23 凹槽部 24 肋部 5 1 框體 52 薄狀膜（pellicle fi lm) 53 黏著材 55 托盤 55a 設置面 55b 支柱 56 蓋體 56a 斜面 57 夾具 -1711 pellicle film 12 frame 13 adhesive 2 1 raised portion 22 flat portion 23 groove portion 24 rib portion 5 1 frame 52 thin film (pellicle fi lm) 53 adhesive material 55 tray 55a setting surface 55b Pillar 56 Cover 56a Bevel 57 Clamp -17