1270671 玖、發明說明： 【發明所屬之技術領域】 本發明係就電子零件安裝用的FPC以及薄膜承載膠帶[TAB (膠帶 自動黏合(Tap Automated bonding))膠帶、τ一BGA (球格柵陣列(Tape Ball Grid Array))膠帶、CSP (晶片尺寸封裝(chip Size Package)) 膠帶、ASIC (特殊積體電路應用（Application Specific Integrated Circuit))膠帶、COF (薄膜覆晶(Chip 〇n Film))膠帶、雙金屬（兩 面配線）膠帶]等的軟印刷電路板以及使用玻璃環氧基板等的硬印刷電 路板般之形成有電子零件安裝用印刷電路板的配線圖案的各工件，藉 由攝影該工件所得的影像資料與主圖案比較而檢出配線圖案的不良部 分的有無，且對所檢出的該不良部份進行確認的電子零件安裝用印刷 電路板的檢查裝置以及使用該檢查裝置的圖案不良的確認方法。再 者，在本說明書中，「電子零件安裝用印刷電路板」一詞不僅包含安裝 電子零件前的印刷電路板亦包含安裝電子零件後的印刷電路板。 【先前技術】 為了組裝1C (積體電路）和LSI (大型積體電路）等的電子零件 於行動電話、個人電腦和電視等具有液晶顯示器的裝置或印表機等， 採用使用軟式的FPC以及TAB膝帶等的電子零件安裝用薄膜承載膠帶 以及硬式的PWB (印刷電路板(print Wiring B〇ard))的安裝方式。這 些電子零件安裝用印刷電路板，在安裝電子零件於電路板的前後，需 就其品質，例如配線圖案的斷線、短路、破片和突起等的不良進行檢 查。 習知，對於在TAB膠帶等中所形成的各配線圖案，已提出自動檢 查斷線、短路、破片和突鱗不㈣各種影像處理裝置（例如，參考 特開平6-341960號公報、特開2000-151198公報和特開2003-141508 號公報）。這些影像處理裝置係將TAB膠帶等的配線圖案與主圖案進行 比較的影像處理而檢出不良。例如在檢查TAB膠帶的情況，從良品的 TAB膠帶為基雜絲_，賊登齡雜峨體，藉由使以線細 相機攝取檢查對象的TAB膠帶的配線圖案所得到的影像資料與主圖案 IP040087/SF-1051f 5 1270671 進行比較處理，就斷線、銪敗 又，因為此影像處無進行判斷。 ^ZlZT^TJ ' 產生的疑似不良的情況，因 _ $埃因光反射場合 用峨裝置以目視及顧裝置，使 性不良或為酬；良。像處理裝置職㈣各η部分是為真 示各ΪΓίΐΓΐ像處理裝置檢出不良的各位置進行攝影，放大辟 ::r::==:r ⑴叫β: 良部分目賺是不 如此，就工件内的等選擇輸入其結果。 入結果，確認哪-個不良==^^位進行目視判斷以及輸 位置，咖不良檢出 於在工件峨檢’ _依_序目視判斷，對 率地==此種習知技術的問題點，其目的係提供可有效1270671 发明Invention Description: [Technical Field] The present invention relates to an FPC for mounting electronic components and a film carrying tape [TAB (Tap Automated Bonding) tape, τ-BGA (ball grid array ( Tape Ball Grid Array)) Tape, CSP (chip size package) tape, ASIC (Application Specific Integrated Circuit) tape, COF (Chip 〇n Film) tape a soft printed circuit board such as a bimetal (double-sided wiring) tape or a workpiece in which a wiring pattern of a printed circuit board for electronic component mounting is formed using a hard printed circuit board such as a glass epoxy substrate, and the workpiece is photographed by photographing the workpiece When the obtained image data is compared with the main pattern, the presence or absence of the defective portion of the wiring pattern is detected, and the inspection device for the electronic component mounting printed circuit board that confirms the detected defective portion and the pattern using the inspection device are defective. Confirmation method. In the present specification, the term "printed circuit board for mounting electronic components" includes not only a printed circuit board before mounting electronic components but also a printed circuit board on which electronic components are mounted. [Prior Art] In order to assemble electronic components such as 1C (integrated circuit) and LSI (large-scale integrated circuit), a device or a printer with a liquid crystal display such as a mobile phone, a personal computer, or a television is used. A film-carrying tape for mounting electronic parts such as TAB knee straps and a hard PWB (printed Wiring B). These printed circuit boards for mounting electronic components are required to be inspected for defects such as disconnection, short-circuit, fragmentation, and protrusion of the wiring pattern before and after the mounting of electronic components on the board. Conventionally, for each wiring pattern formed in a TAB tape or the like, it has been proposed to automatically check for disconnection, short-circuit, fragmentation, and squashing. (IV) Various image processing apparatuses (for example, refer to Japanese Patent Laid-Open No. Hei 6-341960, No. 2000) -151198 Gazette and JP-A-2003-141508). These image processing apparatuses detect a defect by performing image processing in which a wiring pattern such as a TAB tape is compared with a main pattern. For example, in the case of inspecting the TAB tape, the TAB tape from the good product is the base fiber _, the thief ageing cockroach body, and the image data and the main pattern obtained by taking the wiring pattern of the TAB tape to be inspected by the line camera are taken. IP040087/SF-1051f 5 1270671 For comparison processing, it is disconnected and defeated because there is no judgment at this image. ^ZlZT^TJ ' The suspected bad situation caused by _ $ Ein light reflection occasions use the device to visually and care about the device, making bad or rewarding; good. For example, each η part of the processing device (4) is used to photograph each position where the 处理 ΐΓΐ ΐΓΐ ΐΓΐ ΐΓΐ 处理 处理 : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : The selection within the workpiece selects the result. Into the result, confirm which one is bad ==^^ bit to make visual judgment and the position of the change, the badness of the coffee is detected in the workpiece inspection _ _ according to the order of visual judgment, the problem of the rate == this kind of conventional technology , its purpose is to provide effective
Lt=:=r良的判斷的電子安裝用印刷電路板的檢查 置及使麟檢查裝置_案不良的確認方法。 【發明内容】 配線零料如£卩職路㈣檢查裝置係-㈣形成有 路板的檢ΐΐ置=:良有無進行檢查的電子零件安裝用印刷電 前述檢查裝置具備：對於藉由攝 圈案比_料__線_“=== IP040087/SF-1051f 6 1270671 認部 前述不良確認部具備： 段 以旦=攝3!^件中所區分蚊的攝影範_得的影像資料， 以衫像=包含丨或丨社的前料良部分_攝影範圍的顯示手段； 含尺寸為取大的前述不良部分的前述攝影範圍為優先順序， :於則述顯科段巾娜細示前賴影範圍啸制_示控制手 對於以影細秘前賴斜㈣前述攝職圍對㈣確定被 ^於此攝影範®的至少丨_前述不良部分是否為真性不良或被包 含於此攝影範圍的全部的前述不良部分是否為擬 的結果進_職人賭人手段。 邮日祝顺 又’本發明的電子零件安裝用印刷電路板的檢查裝置之特徵係 具備：將攝取前駐件職_像資贿”案啸，進行前述工件 的配線圖案衫良部分有無之鑽錢計算不良部分尺寸的影像處理 部。 又’本發_電子零件安裝脚職路板的檢查裝置，其特徵係： 前述影像處理部在判斷前述工件的配線圖案中有不良部分的情 況，對前述不良確認部輸出不良信號； 月 前述不良確認部，具備： 前述目視判斷的結果在包含於前述各攝影範圍的前述不良部分全 部為擬似不良的情況’將自前述影像處理部所輸出的前述不良部分訂 正為良品信號而確定的良品信號確定手段。 又，本發明的電子零件安裝用印刷電路板的檢查裝置，其特徵係 具備：基於前述不良信號，對應於該不良信號的前述工件施予不良標 記的不良標記部。 义不 又，本發明的電子零件安裝用印刷電路板的圖案不良的確認方 法，係利用猎由影像處理檢出各工件的配線圖案的不良部分的電子零 件安裝用印刷電路板的檢查裝置而檢出該不良部分的確認方法，其 徵係： BP040087/SF-1051f 7 Ϊ270671 圍中位於哪 個=τ良部分在前述工件内區分設定的各攝影範 基於包含攝影此被算出的攝影範圍所得的i個或Η固以上的前 ^部分的該娜範_影像龍，以包含尺寸最场前述不良部分 、則销影細紐先轉，棚科段巾以影細讀述攝影範圍； 對前麵科段巾崎像顯帥前麵織圍巾，對包含此攝影 的至少1個的刖述不良部分是否為真性不良或包含於此攝影範圍 、部的前述不良部分是否為擬似不良進行目視判斷； 以輸入手段選擇輸入前述目視判斷的結果而確定。Lt=:========================================================== [Disclosed] Wiring materials such as 卩 路 路 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 : : : : : : : : : : : : : : : : : : : : : : : : : : : : : _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Like = including the front part of the 丨 or 丨 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The scope of the whistle system _ shows the control hand for the shadow of the sneak peek (four) the above-mentioned camera division (four) to determine at least 摄影 _ _ the above-mentioned bad part is not true or included in the scope of this photography Whether or not the above-mentioned defective part is a result of the intended result is a gambling person's means. The postal inspection apparatus of the electronic component mounting printed circuit board of the present invention is characterized by: "The whistle, the wiring diagram of the aforementioned workpiece Shirt good portion of money calculate whether the bad part of the drill size of the image processing unit. In addition, the image processing unit detects that there is a defective portion in the wiring pattern of the workpiece, and outputs a defective signal to the defect confirmation unit; The confirmation unit includes: the result of the visual determination is that the defective portion included in each of the imaging ranges is a pseudo-defective condition, and the good signal determined by correcting the defective portion output from the image processing unit as a good signal is determined. means. Moreover, the inspection apparatus for a printed circuit board for mounting an electronic component according to the present invention is characterized in that the defective marking portion for applying a defective mark to the workpiece corresponding to the defective signal is provided based on the defective signal. In addition, the method for confirming the pattern defect of the printed circuit board for electronic component mounting according to the present invention is detected by an inspection device for a printed circuit board for electronic component mounting in which a defective portion of the wiring pattern of each workpiece is detected by image processing. The method for confirming the defective portion is as follows: BP040087/SF-1051f 7 Ϊ270671 Which one of the surrounding areas is located in the above-mentioned workpiece, and each of the photographing ranges set based on the photographing range in which the photographing is calculated is based on Or tamping the above-mentioned part of the Nafan _ image dragon, to include the size of the most bad part of the above-mentioned, the pin-shadow fine first turn, shed section of the towel to read the scope of photography; Kawasaki looks like a front weaving scarf, and it is visually judged whether or not the defective part including at least one of the photographs is genuinely bad or whether the defective part included in the photographing range and the part is a pseudo-defect; It is determined by inputting the result of the aforementioned visual judgment.
又，本Μ jf：子科安制印刷電路板的_不良的確認方 〜’其特徵係：藉由比較攝取前述工件所得影像資料和主圖案而進行 則述影像處理，基於此比較絲進行前述卫件的崎圖案的不良部分 有無的判斷以及算出不良部分的尺寸。 、、又，本發明的電子零件安裝用印刷電路板的圖案不良的確認方 法，其特徵係：在前述目視判_結果為包含於前述各攝影範圍的前 述不良全部為擬似不良的情況，對由前述影像處理的不良判斷時 所輸出的不良信號進行訂正而以良品信號輸出。 、、又，本發明的電子零件安裝用印刷電路板的圖案不良的確認方Further, the present invention is based on the fact that the image data and the main pattern obtained by the ingestion of the workpiece are compared, and the image processing is performed, and the comparison is performed based on the comparative yarn. Judgment of the presence or absence of the defective part of the Sakae pattern of the guard and the size of the defective part. Further, in the method for confirming the pattern defect of the printed circuit board for mounting an electronic component according to the present invention, it is characterized in that the result of the visual judgment is that all of the defects included in the respective imaging ranges are pseudo-defective. The defective signal outputted during the failure of the image processing is corrected and output as a good signal. Further, the method for confirming the pattern defect of the printed circuit board for mounting electronic parts of the present invention
法，其特娜：胁前財良健，賊於料良錢的前述工件施 予不良標記。 若由上述的本發明電子零件安裝用印刷電路板的檢查裝置以及圖 案不良的確認方法，攝影範圍分割成既定尺寸，從包含尺寸較大的不 良部分之攝影範圍依順序顯示棚示手段而進行目視觸，且因為將 包含不僅1個的複數個不良部分的攝影範圍作為單位進行目視判斷， 所以可有效地進行真性不良與擬似不良的判斷。 【實施方式】 以下，參照圖式就本發明的實施形態加以說明。第6圖係顯示本 發明一實施形態的電子零件安裝用印刷電路板的檢查裝置（以下，稱 「檢查裝置」）的概略構成圖。如該圖所示，此檢查裝置具備檢杳捲出 IP040087/SF-1051f 8 1270671 配列於長轴方向的各工件的配線圖案不良有無的電子零件安裝用印刷 電路板（以下，進行TAB膠帶等的電子零件安裝用薄膜承載膠帶（以 下’稱為薄膜承載膠帶）的檢查為例說明）的捲出部1]L、藉由影像處 理對薄膜承載膠帶的各工件判斷配線圖案的不良有無且在檢出不良的 清況下异出不良部分的尺寸的影像處理部12、對影像處理部12所檢出 的不良部分為真性不良或為擬似不良進行判斷的不良確認部、基於 不良確認部13確定的不良信號施予不良工件標記的不良標記部14、捲 取結束檢查的薄膜承載膠帶的捲取部15、以及基於從影像處理部12、 不良破認部13和不良標記部14的通信資料控制薄膜承載膠帶輸送的 輸送控制部16。The law, its Tina: threatened the former good health, the thief gave a bad mark to the aforementioned workpiece. According to the inspection apparatus for the printed circuit board for electronic component mounting of the present invention and the method for confirming the pattern defect, the imaging range is divided into a predetermined size, and the viewing means is displayed in order from the imaging range including the defective portion having a large size. In addition, since the imaging range including not only one of the plurality of defective portions is visually determined as a unit, the determination of the true defect and the pseudo-defect can be effectively performed. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 6 is a schematic block diagram showing an inspection apparatus (hereinafter referred to as "inspection apparatus") for a printed circuit board for mounting an electronic component according to an embodiment of the present invention. As shown in the figure, the inspection apparatus includes a printed circuit board for mounting an electronic component in which the wiring pattern of each workpiece in the long-axis direction is defective (see below for TAB tape, etc.). The unwinding portion 1] L of the film-carrying tape for electronic component mounting (hereinafter referred to as an example of the inspection of the film-bearing tape) is used to determine the presence or absence of the wiring pattern for each workpiece of the film-carrying tape by image processing. The image processing unit 12 that has the size of the defective portion in the case of a defective condition, the defective portion detected by the image processing unit 12, or the defect confirmation unit that determines the likelihood of the defect, and the defect confirmation unit 13 The defective mark portion 14 to which the defective signal is applied, the winding portion 15 of the film-carrying tape for the end of the winding inspection, and the communication material control film based on the image processing unit 12, the defective portion 13 and the defective portion 14 A conveyance control unit 16 that carries the tape conveyance.
j捲出部11，介由保護隔離帶使該進行檢查的薄膜承載膠帶捲繞 於捲筒上，固定捲筒的迴轉轴藉馬達驅動而與保護隔離帶一齊捲出 膜承載膠帶。 從捲出♦部11所捲縣娜帶，以惰輪將輸送於影像處3 部12。此薄膜承載膠帶的輸送，以從捲出部的捲筒捲出以及向捲! 部15的捲筒捲取轉行，例如，使設置成與薄膜承載膠帶的扣鍵齒g 咬合而定距輸聊帶的錄於滾輪_驅_輪旋轉驅_進行，^ 輸送控制部16控制此驅動齒輪的驅動。The unwinding portion 11 winds the inspected film-carrying tape around the reel by means of a protective spacer, and the rotary shaft of the fixed reel is driven by the motor to roll off the film-carrying tape together with the protective spacer. From the roll out of the ♦ section 11 of the volume of the county belt, the idler will be transported to the image department 3 12 . The film carries the conveyance of the tape to be unwound from the roll of the take-up portion and to the roll of the roll portion 15, for example, to be engaged with the button teeth g of the film carrying tape. The belt is recorded on the wheel_drive_wheel rotation drive_, and the conveyance control unit 16 controls the drive of the drive gear.
薄膜承載膠帶的各工件經過影像處理部12的不良檢出以及不M 辦^的，確f (真性不良與擬似不良的判_認）之後，就不良品白 2牛在不良標記部14施予由打孔和墨水標記等的不良標記之後，送名 捲取部15。在捲取部15，姓击^ _ ⑺束檢查的囊承娜帶與從捲出部11 ^ 接筒所运出的保麵離帶_齊捲繞鄕筒上。 忐二:a/ 〜5圖而就影像處理部12以及不良確認部13的相 成加以。純歧部12 Μ細去 裝 置之構成。在此影像處理部12，箱Μ^ σ J =⑽〜像處理裝 作為畫綱嫩_,_ ==等:體機:例如以職 IP040087/SF-1051f 1270671 ㈣料進行與主圖案比較的演算處理，判 和絲料料赌财無，且在料不良部分 標資工細位置的座 邱八4置的座輮為刖頭，以尺寸較大的不良 ^ ^置的座標為優先順序輪出至不良確認部13。在不良顧、部Μ， 有的攝影裝置（黑白相機等）不同的攝影裝置的 相機CCD相機於第i圖的薄膜承載膠帶21上，相機頭在工件23内移 在每個有不良的攝影範圍24、24···以攝取工件23内的配線圖案而 構，。此攝影細24區分分設定為例如3咖χ 2_，在此情況，攝 影=圍24、約⑽倍放大影像顯示於顯示面板。但是，攝影範圍^的 尺寸可設定於可看_ 像且可容純行確適當條件。 對不良確認部13輸出不良部分的座標後，藉由設置於不良顧部 13的演算處理裝置等轉料段，紐輸㈣練錄各攝影範圍 24:24···之中的哪-個攝影範圍進行演算處理，算出該攝影麵。在 此异出的各娜劍，亦有同時包含不僅丨個的複數個不良部分。 a其次，在被算出的攝影範圍24内使彩色CCD相機頭移動而攝影該 ，圍。由攝影所得的該範_影像資料影像顯示於顯示幕等的顯示手 一如第2圖所不’在顯示幕的顯示畫面，以影像顯示攝影麵24且 顯示以滑鼠操作或按鍵操作輸入目視判斷的結果等的輸入部29。檢查 員從顯示於顯示面板的攝影範圍24的影像，就包含於攝影範圍24 ^ 不良部分28、28各別進行判斷為真性不良或擬似不良。此時，藉由以 滑鼠按下或按鍵輸入至輸入部29的放大按鍵的號碼（丨〜9)上更放大 攝影範圍24内的該區分而可詳細顯示而構成，更可正確地進行目視判 斷。例如按下或以鍵輸入號碼6的放大按鍵時，如第3圖所示相當於 攝影範圍24内的號碼6的區分被放大顯示。 田' 就攝影範圍24内的各不良部分28、28進行確認的結果以輸入手 段（滑鼠、鍵盤等）輸入。亦即，在第2圖中，就攝影範圍24内的各 IP040087/SF.1051f 10 1270671 不良部分28、28的至少之一是本炎古t 是否都為擬似不良，進行目視判^性不^雙方的不良部分沈、28 輪入部29的選擇按鍵，確定判斷t果结果猎由以滑鼠按下或鍵輸入至 目視判斷的結果，在攝影笳 之-為真財良的攸，按人44内的各^部分28、28的至少 部12所輪出的不良信號，第 凌因而，細予打孔和墨水標記等的不良標記於此工件23上。 不面，目視判斷的結果，在第2圖的攝影範圍24内的雙方的 皆為擬似不良的情況，按人或鍵人輸人擬似 輸入信號’胁此輸入信號，不良確認部13的顯 旦部分的尺寸為最大的座標26的攝影範圍Μ為 、序，以影像顯不下-攝影範圍24於顯示面板上而控制。 因對含不良座標的攝影範圍24、24...進行目視判斷的結果， 2^絲_林存在真性不良的情況下，設置於不良卻確認部13 確定手段’將自影像處理部12輸㈣不良信號訂正變更確 1良品信號，此工件被資料保存為良品，且在不良標記部14中此 工件被認為良品而不施予不良標記且予以輸送。 又，以第4圖及第5圖為例說明時，包含不良座標沈的影範 圍24 (範圍編號2、18和32)中，包含不良部分的尺寸最大的座標邪 的範圍編號18的攝影範圍24最先顯示於顯示面板（第5圖）。就此範 圍進行上述的目視判斷。目視判斷的結果，在此範圍内的不良部分28 為擬似不良（0K)的情況，按下擬似不良的選擇按鍵或鍵輸入而發送 輸入信號，顯示控制手段基於該輸入信號，以顯示包含不良部分的尺 寸為次大之座標26的範圍編號32的攝影範圍24於顯示面板而控制， 耩此就影像顯示的範圍編號32的攝影範圍24進行上述的目視判別。 目視判別的結果，在此範圍内的不良部份28、28全都為擬似不良的情 況，與上述一樣進行輸入，顯示包含不良部份的尺寸為次大的座標26 的範圍編號2的影像範圍24於顯示面板上，就此範圍進行上述的目視 IP040087/SF-1051f 11 1270671 判別。 如此’因為從包含不良部份的尺寸較大的座標的攝影範圍％順序 地顯不於顯不面板進行目視判斷，所以可從包含真性不良的可能性言 的不良部份的攝影範圍24順序進行目視判斷。 π 更且，並未進行影像處理部12所檢出的不良座標每一個的目視判 斷’由於攝景地圍每-個進行目視爿斷，所以可以以包含不僅一個的 複數個不良座標而得到的攝影範圍為單位進行目視判斷。 因此，若由本實施形態的檢查裝置，大幅減低就i個工件的真性 不良和擬似不良的判斷的次數，例如，比較習知的構成可縮短需要不 良確認的時間30%，可有效率進行不良確認。 以上，雖就本實施形態的影像處理部以及不良確認部的構成加以 祝明，但本發明不限定於此實施形態，可有種種變形和變更。例如， 在影像處理部的比較處理中可得完美精度的情況等，可以以彩色CCD 相機進行在影像處理部的工件的攝影，此情況，就照以影像處理部取 入的攝影資料的原樣放大處理而發送於不良確認部，可成為作為確認 的影像顯示。因此，在此情況攝影裝置可為丨台。 又，不互相獨立設置影像處理裝置和確認裝置，以同一電腦構成 影像處理部和不良確認部亦可。 又，在本實施形態從不良部分的尺寸較大的座標依大小順序對不 良確認部輸出之後，雖藉由設置於不良確認部的算出手段進行演算處 理’但其它’進行在影像處理部設置此算出手段而算出包含不良座標 的攝影範圍的演算處理亦可，又，以任意的順序輸出各不良座標的資 料於不良確認部之後，在不良確認部13按照不良部分的尺寸順序儲存 各座標資料亦可。 以下’參照顯示在第7圖及第8圖的流程圖說明由上述本實施形 態的檢查裝置的檢查處理的步驟。 在第6圖的捲出部11中，捲裝於捲筒的薄膜承載膠帶藉由馬達驅 動裝設於捲筒的旋轉軸捲出，且以驅動齒輪等距送出，已進行檢查的 工件輸送至影像處理部12 (第7圖的S11)。 IP040087/SF-1051f 12 1270671 對影像處理部12所輸送的的工件以相機攝影（S12)，取得此工件 的配線圖案的影像資料，儲存於影像記憶體（S13)。 其次，就所得的影像資料，進行與預先登錄的主圖案的影像資料 比較的演算處理（S14)。此結果，檢出工件内的不良部分的座標位 以及其尺寸。 不良部分的座標資料（不良座標）從不良部分的尺寸較大的座標 依序輸出至不良確認部13 (S15)。 w ^在不良確認部13，藉由算出手段，預先區分設定於工件内的各攝 影範圍之中，從影像處理部12所輸出的不良座標進行算出位在哪一 影範圍的演算（S16)。 包含藉由算出手段所算出的不良座標的攝影範圍以與影像處理部 12的相機不同的彩色相機CCD攝影（S17)，取得該攝影範圍的影像資 料（S18) 〇 基於所得的影像資料，吨含不良部分的尺寸最大的座標攝影範 圍為優先順序，攝影範圍以影像顯示於顯示手段（第8圖的S19)。 其次，從攝影範圍的顯示影像，就包含該攝影範圍的丨或2以上 的不良部分個別進行目視判斷為真性不良或擬似不良（S2〇)。 目視判斷的結果，在至少-個不良部分為不良的情況，以輸 入手段選擇輸入此結果（S31)。 基於此選擇輸入的輸入信號從影像處理部12所輸出的不良信號經 確定’_輸送控制部16使該工件朝不良標記部14輸送後以 V止輸送*控制’藉由打孔和墨水標記等辭不良標記（§32)，其次 此工件輸送向捲取部15，藉由馬達驅動裝著於捲筒的旋轉轴捲取到捲 筒（S51)。 S20的目視判斷的結果’在包含此攝影範圍的全部的不良部分為擬 似不良的情況，以輪入手段選擇輸入此結果（S41)。 其次，就包含此:!1件_不良座標的攝影範圍的全部就是否進行 1視判斷而進仃觸（S42) ’在剩下林進行目視綱的攝影範圍的 情況下’返回S19，於顯示手段以影像顯示下—攝影範圍。另一方面， IP040087/SF-1051f 13 1270671 16 輸送控制部 21 薄膜承載膠帶 23 工件 24 攝影範圍 26 不良部分尺寸最大的座標 28 不良部分 29 輸入部 15 IP040087/SF-1051fAfter each of the workpieces of the film-carrying tape passes through the defective detection of the image processing unit 12 and does not operate, it is confirmed that the defective white 2 cattle are administered in the defective marking portion 14 after the failure of the workpiece (not true or bad). After the defective mark such as the punched hole and the ink mark, the winding portion 15 is sent. In the winding unit 15, the capsule bearing tape of the last name _ (7) bundle inspection and the escaping tape detachment from the winding portion 11 接 are wound on the cylinder. Note 2: The a/to 5 diagrams are combined with the image processing unit 12 and the failure confirmation unit 13. The pure part 12 is finely divided to the structure of the device. In the image processing unit 12, the box Μ^ σ J = (10) ~ the image processing device as the picture frame _, _ ==, etc.: body machine: for example, the job IP040087/SF-1051f 1270671 (four) material to calculate the comparison with the main pattern Processing, judging and silk material gambling, and in the poor part of the standard part of the standard position of the Qiu Qiu 4 set the seat is a hoe, with a larger size of the coordinates of the coordinates set to priority to Defect check unit 13. In the film-carrying tape 21 of the i-th image, the camera head is moved inside the workpiece 23 in each of the defective photographing ranges in the film-carrying tape 21 of the photographing device (the black-and-white camera, etc.). 24, 24... The structure of the wiring pattern in the workpiece 23 is taken up. The photographing detail 24 is set to, for example, 3 curry 2_, in which case, the photographing = circumference 24, and the (10) magnification image are displayed on the display panel. However, the size of the photographing range ^ can be set to a viewable image and can be properly processed. After the failure confirmation unit 13 outputs the coordinates of the defective portion, it is recorded in the processing section of the defective processing unit 13 and the like, and which of the respective shooting ranges 24:24··· is recorded. The range is subjected to arithmetic processing to calculate the photographing surface. In this case, each of the Na Najians also contains a plurality of bad parts that are not only one. a Next, the color CCD camera head is moved in the calculated imaging range 24 to capture the image. The image of the image data obtained by the image is displayed on the display screen of the display screen or the like as shown in FIG. 2, and the display surface of the display screen is displayed on the display surface 24, and the display is displayed by the mouse operation or the key operation. The input unit 29 such as the result of the judgment. The image of the inspector from the photographing range 24 displayed on the display panel is included in the photographing range 24^ and the defective portions 28 and 28 are judged to be genuinely defective or pseudo-defective. In this case, the number of the enlarged button (丨~9) input to the input unit 29 by pressing or pressing the button is further enlarged and displayed in the imaging range 24, and can be displayed in detail, and the visual observation can be performed more accurately. Judge. For example, when the enlargement button of the number 6 is pressed or pressed with a key, the division corresponding to the number 6 in the photographing range 24 as shown in Fig. 3 is enlarged and displayed. The result of confirming each defective portion 28, 28 in the photographing range 24 is input by an input means (mouse, keyboard, etc.). That is, in Fig. 2, at least one of the defective portions 28, 28 of each of the IP040087/SF.1051f 10 1270671 in the imaging range 24 is whether or not the inflammation is a pseudo-likeness, and the visual judgment is not performed. The bad part of the two sides, the selection button of the 28 rounds of the part 29, determine the result of the judgment. The results are judged by the mouse press or key input to the visual judgment result, in the photography of the - - for the real wealth, by people 44 The defective signal that is rotated by at least the portion 12 of each of the inner portions 28, 28 is, for example, a defect such as a fine punch and an ink mark is marked on the workpiece 23. If there is no face, the results of the visual judgment are both in the case of the photographic range 24 in Fig. 2, and the singularity of the defect confirmation unit 13 is determined by the person or the key input. The size of the portion of the largest coordinate 26 is 、, order, and is controlled by the image - the photographic range 24 is displayed on the display panel. As a result of visually judging the photographing ranges 24, 24... containing the bad coordinates, if there is a defect in the true condition of the 2^ silk_lin, the confirmation unit 13 determines that the means 'will be transmitted from the image processing unit 12 (4) The defective signal correction is changed to a good product signal, and the workpiece is stored as a good product, and in the defective marking portion 14, the workpiece is regarded as a good product without giving a bad mark and being conveyed. Further, in the case of FIGS. 4 and 5 as an example, in the shadow range 24 (range No. 2, 18, and 32) including the poor coordinate sink, the photographing range of the coordinate range number 18 including the largest size of the defective portion is included. 24 is first displayed on the display panel (Figure 5). The above visual judgment is made in this range. As a result of the visual judgment, in the case where the defective portion 28 in this range is a pseudo-defective (0K), an input signal is transmitted by pressing a pseudo-selective selection button or a key input, and the display control means displays the defective portion based on the input signal. The photographing range 24 of the range number 32 of the next largest coordinate 26 is controlled by the display panel, and the above-described visual discrimination is performed on the photographing range 24 of the range number 32 of the image display. As a result of the visual discrimination, the defective portions 28 and 28 in this range are all pseudo-defective, and input is performed as described above, and the image range 24 of the range number 2 including the second largest coordinate 26 of the defective portion is displayed. On the display panel, the above-mentioned visual IP040087/SF-1051f 11 1270671 discrimination is performed in this range. In this way, since the photographing range % of the coordinates including the large size of the defective portion is sequentially displayed in the visual judgment without the panel, the photographing range 24 including the defective portion of the possibility of the true defect can be sequentially performed. Visual judgment. Further, π is not visually judged for each of the defective coordinates detected by the image processing unit 12, and since the visual field is cut off by the camera, it can be obtained by including a plurality of defective coordinates including not only one. The range of photography is visually judged by the unit. Therefore, according to the inspection apparatus of the present embodiment, the number of times of the true defect and the pseudo-defect of the i-pieces is greatly reduced. For example, the conventional configuration can shorten the time required for the failure confirmation by 30%, and the defect can be efficiently confirmed. . As described above, the configuration of the image processing unit and the failure check unit of the present embodiment is clarified, but the present invention is not limited to the embodiment, and various modifications and changes can be made. For example, when the perfect processing is performed in the comparison processing of the image processing unit, the workpiece in the image processing unit can be imaged by the color CCD camera. In this case, the image data taken by the image processing unit is enlarged as it is. The processing is transmitted to the failure confirmation unit, and can be displayed as a confirmed image. Therefore, in this case, the photographing device can be a downfall. Further, the image processing device and the confirmation device are not provided independently of each other, and the image processing unit and the failure confirmation unit may be configured by the same computer. In addition, in the present embodiment, after the coordinates of the large size of the defective portion are output to the defect confirmation unit in the order of size, the calculation process is performed by the calculation means provided in the defect confirmation unit, but the other process is performed in the image processing unit. The calculation means for calculating the imaging range including the defective coordinates may be calculated by the calculation means, and the data of each defective coordinate may be outputted in an arbitrary order to the defect confirmation unit, and then the coordinate confirmation unit 13 may store the coordinate data in the order of the size of the defective portion. can. The procedure of the inspection process by the inspection apparatus of the present embodiment described above will be described below with reference to the flowcharts shown in Figs. 7 and 8. In the unwinding portion 11 of Fig. 6, the film-carrying tape wound on the reel is wound by a motor-driven rotating shaft mounted on the reel, and is fed equidistantly with the driving gear, and the inspected workpiece is conveyed to The image processing unit 12 (S11 in Fig. 7). IP040087/SF-1051f 12 1270671 The camera conveys the workpiece conveyed by the image processing unit 12 (S12), and acquires the image data of the wiring pattern of the workpiece, and stores it in the image memory (S13). Next, the obtained image data is subjected to calculation processing in comparison with the image data of the main pattern registered in advance (S14). As a result, the coordinate position of the defective portion in the workpiece and its size are detected. The coordinate data (bad coordinates) of the defective portion is sequentially outputted from the coordinates having a large size of the defective portion to the defect confirmation portion 13 (S15). In the defect confirmation unit 13, the calculation means divides each of the shooting ranges set in the workpiece in advance, and calculates the calculation of which of the image ranges from the defective coordinates outputted by the image processing unit 12 (S16). The photographing range of the defective coordinates calculated by the calculation means is different from the camera of the image processing unit 12 (S17), and the image data of the photographing range is acquired (S18), based on the obtained image data, The photographing range in which the size of the defective portion is the largest is the priority order, and the photographing range is displayed as an image on the display means (S19 in Fig. 8). Next, from the display image of the photographing range, the defective portion including the photographing range or the defective portion of 2 or more is visually judged to be genuinely defective or pseudo-defective (S2〇). As a result of the visual judgment, when at least one defective portion is defective, the result is selected by the input means (S31). The input signal input based on the selection is determined from the defective signal output from the image processing unit 12, and the 'the conveyance control unit 16 causes the workpiece to be conveyed toward the defective mark portion 14 to be conveyed by V* control' by punching and ink marking, etc. The defect mark (§32) is followed, and the workpiece is conveyed to the take-up portion 15, and the drum is wound by the motor to the reel of the reel (S51). The result of the visual judgment of S20 'when all the defective parts including the photographing range are in a similar situation, the result is selected by the rounding means (S41). In the following, it is included in the photographing range of the one-piece _bad coordinates, and it is judged whether or not it is judged by one view (S42) 'When the remaining forest performs the photographing range of the visual outline', the process returns to S19, and is displayed. The means to display the image - the scope of photography. On the other hand, IP040087/SF-1051f 13 1270671 16 Conveying control unit 21 Film-carrying tape 23 Workpiece 24 Photographing range 26 Coordinates with the largest size of the defective part 28 Bad part 29 Input part 15 IP040087/SF-1051f