TWI258619B - Liquid crystal display device, color filter substrate and protrusion structure thereof, and manufacturing method therefor - Google Patents
Liquid crystal display device, color filter substrate and protrusion structure thereof, and manufacturing method therefor Download PDFInfo
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1258619 15836twf.doc/y 九、發明說明: 【發明所屬之技術領域】 本發明是有關於-種顯示裳置之結#肖其製作方 法’且特別是有關於-種液晶顯示難置之結構與其製作 方法。 、/' 1 【先前技術】 液:顯示器裝置典型上包含一對基板 =行=。絲板間之空間—般被稱為液晶姻 或早το間隙⑽gap)。-液晶材料係介於該兩基板間, =3元間隙中,可回應一外加的電子訊號而改變其之 多個電極係置於該基板之内部表面上,用 用於該液晶材料。某些型式之液晶顯示 益裝置所具有之電極侧,㈣產生-_定的文字或符 號,同時其他型式的液晶顯示器裝置具有電極矩陣,盆形 成^括面,包括極大數量之可個別存取之像素(細!) ^牛待母—個像素元件领選擇性地啟動以形成無限變化 (京:Μ冢。 3 ^了確保液晶顯示器裝置之正確的運作,非常重要的 遍及該整個顯示面上保持單的均勻以及精 品ΐ,單元間隙中甚至極微小的誤差皆會造成顯示面 Μ'从易見且缺陷的外觀(所謂的面板色度不均暇疲, 、陷)。當以一指尖施予甚至極輕微的壓力時,此一 效心亦可輕易的見於習用的液晶顯示器顯示面板中。為回 6 1258619 15836twf.doc/y 應該壓力,在受影響區域之單元間隙將稍微地被減小,造 成暗點、對比的降低、或在該顯示影像中其它不良的缺點。 在一習用技術中,如第1圖所示,該液晶顯示器裝置 包含一薄膜電晶體(Thin Film Transistor ; TFT)基板 61、一 彩色濾光片(Color Filter ; CF)基板71、以及夾在該兩者間 的液晶材料69。該單元間隙係藉提供在該兩基板61,71 間之複數個間隙子79所保持。該間隙子79係為一致的高 φ 度,通书諸如藉由灑佈技術,隨機地置於該單元間隙中。 , 如此通常會導致間隙子局部密度之不均勻分布。為了'確保 置於該顯示面所有區域上之間隙子具有足夠濃度,以維持 適當的單元間隙,必須使用過剩的間隙子。此外,根據此 類用於間隙子配置之習用技術,其係置於該顯示面板之,, 非動態(inactive)’’以及’’動態(active)’’區域上。該,,動態,,區域 係為該液晶材料可被選擇性地啟動之區域,因為其係位於 兩相對電極之間,該電極係配置於該基板之上。該,,非動態,, 區域係該液晶材料無法被選擇性地啟動之區域,因為缺^ 修該基板上之相對電極。 ^ 、 本質上,在於上述習用的間隙子技術中,液晶顯示面 , 板的結構及功犯便存在有幾個不受歡迎的缺點。特別是落 在該動態顯示區域的間隙子,會導致某些缺點,諸如^比 下降,或該間隙子邊緣附近不良的光線放射。 因此,歐洲專利第1,030,211人2號,其併入本 參考,揭示了-液晶顯示器,如第2圖所示,其能夠略 散播間隙子之步驟,並因而避免間隙子的不均勻分佈所產 7 1258619 15836twf.doc/y 生的單元厚度上的差異。此類的液晶顯示器裝置大致上包 含薄膜電晶體(Thin Film Transistor ; TFT)基板30、一彩色 濾光片(Color Filter ; CF)基板40、以及一密封於該兩者間 之液晶材料層49。如第2圖所示,成形於該CF基板40 上之該突出圖案,亦即間隙子45,具有大約4·0μπι的高度, 用以保持一致的單元間隙。 一般而言,液晶顯示器之單元間隙係為該兩基板之配 向膜間之平均距離,且通常大約為兩基板對組後該間隙子 之高度。 然而,在習用技術與前述歐洲專利之該兩液晶顯示器 中之該間隙子45,皆係置於一玻璃基板41上,且該彩色 濾光片層43係配置於該間隙子45和該玻璃基板41兩者之 間。 現在參考第3圖’其描述在室溫下一 2〇 φμη!的柱狀 間隙子直接置於一玻璃基板上,以及該柱狀間隙子與玻璃 基板兩者之間具有一彩色濾光片層之應力_應變圖。請瞭 解,直接置於該玻璃基板上的該間隙子大體上係為彈性 體,如曲線Α所示,然而於該玻璃基板上並具有該彩色濾 光片層介於其間之該間隙子,係部分彈性的,如曲線B所 示,其中於該負載被釋放之後會保有一永久應變d。因此, 若負載在該LCD裝置上之一壓力(或應力)係大至足以產生 該永久的應變,該間隙子與置於該玻璃基板上之該彩色濾 光片層之總高度,將會被改變。換言之,在該LCD面板被 施予一相當大之壓力後,該單元間隙可能會不均勻,並且 81258619 15836twf.doc/y IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a method for displaying a knot of a skirt, a method for producing the same, and particularly relates to a structure in which a liquid crystal display is difficult to Production Method. , /' 1 [Prior Art] Liquid: The display device typically includes a pair of substrates = row =. The space between the silk plates is generally called the liquid crystal marriage or the early το gap (10) gap). - a liquid crystal material is interposed between the two substrates, in a gap of -3 yuan, which can be changed in response to an applied electronic signal. A plurality of electrodes are placed on the inner surface of the substrate for use in the liquid crystal material. Some types of liquid crystal display devices have electrode sides, (4) produce -_ fixed text or symbols, while other types of liquid crystal display devices have electrode matrices, pots forming a face, including a very large number of individually accessible Pixels (thin!) ^Niuwaiting mother--a pixel element is selectively activated to form an infinite change (Beijing: Μ冢. 3 ^ to ensure the correct operation of the liquid crystal display device, it is very important to maintain the entire display surface Uniform and fine ΐ, even very small errors in the cell gap will cause the display surface to be 'visible and defective appearance (so-called panel chromaticity unevenness, fatigue, sinking). When using a fingertip Even with a slight pressure, this effect can easily be seen in the LCD panel of the conventional LCD. For the pressure back to 6 1258619 15836twf.doc/y, the cell gap in the affected area will be slightly reduced. , causing dark spots, contrast reduction, or other undesirable shortcomings in the display image. In a conventional technique, as shown in FIG. 1, the liquid crystal display device includes a thin film electro-crystal a Thin Film Transistor (TFT) substrate 61, a color filter (CF) substrate 71, and a liquid crystal material 69 interposed therebetween. The cell gap is provided on the two substrates 61, 71. The gaps 79 are maintained by a plurality of gaps 79. The gaps 79 are consistently high φ degrees, and the book is randomly placed in the gap of the unit, such as by a sprinkling technique. This usually results in a local density of the spacers. Non-uniform distribution. In order to ensure that the gaps placed on all areas of the display surface are of sufficient concentration to maintain proper cell clearance, excess spacers must be used. Furthermore, according to such conventional techniques for spacer configuration, It is placed on the display panel, in the inactive '' and ''active'' areas. The dynamic, area is the area where the liquid crystal material can be selectively activated. Because the system is located between the two opposite electrodes, the electrode is disposed on the substrate. The non-dynamic, the region is the region where the liquid crystal material cannot be selectively activated, because the substrate is not repaired. The opposite electrode. ^ In essence, in the above-mentioned gap technique, there are several unfavorable disadvantages in the liquid crystal display surface, the structure and the complication of the board. In particular, the gap falling in the dynamic display area , which may cause certain disadvantages, such as a decrease in the ratio, or a poor light emission near the edge of the gap. Therefore, European Patent No. 1,030,211, No. 2, which is incorporated herein by reference, discloses a liquid crystal display, such as the second As shown in the figure, it is possible to slightly spread the step of the gap and thus avoid the difference in the cell thickness of the 7 1258619 15836 twf.doc/y. The liquid crystal display device of this type generally comprises a thin film. A Thin Film Transistor (TFT) substrate 30, a color filter (CF) substrate 40, and a liquid crystal material layer 49 sealed therebetween. As shown in Fig. 2, the protruding pattern formed on the CF substrate 40, that is, the spacer 45 has a height of about 4·0 μm to maintain a uniform cell gap. In general, the cell gap of a liquid crystal display is the average distance between the alignment films of the two substrates, and is usually about the height of the spacer after the pair of substrates. However, the gap 45 in the two liquid crystal displays of the prior art and the above-mentioned European patent is placed on a glass substrate 41, and the color filter layer 43 is disposed on the spacer 45 and the glass substrate. 41 between the two. Referring now to Figure 3, it is described that a columnar spacer of 2 〇φμη at room temperature is directly placed on a glass substrate, and a color filter layer is provided between the column spacer and the glass substrate. Stress_strain diagram. It is understood that the spacer directly placed on the glass substrate is substantially an elastic body, as shown by a curved line, but the spacer on the glass substrate and having the color filter layer interposed therebetween Partially elastic, as shown by curve B, in which a permanent strain d is maintained after the load is released. Therefore, if a pressure (or stress) of the load on the LCD device is large enough to generate the permanent strain, the total height of the spacer and the color filter layer disposed on the glass substrate will be change. In other words, after the LCD panel is subjected to a considerable pressure, the cell gap may be uneven, and 8
於近年來,已經發展出一種更快速充填技術,亦即所 1258619 15836twf.doc/y 该面板色度不均瑕疲(Mura缺陷)可能會產生。 再者,就液晶顯示器中兩基板之結合與液晶材料的充 填製程而言,先前技術業已提供許多的方法。舉例而言, 該顯不器之兩基板首先建構所有必要的薄膜電晶體(Thin Film Transistor ; TFT)、電路、以及彩色濾光片。該兩基板 然後相互對齊,並以大約5微米的距離間隔開,再於其邊 緣處利用環氧樹脂結合在一起。將此一結合基板與一盛滿 液晶材料之液晶皿置於一真空室中,使該結合基板内之間 隙處於一真空狀態。之後,將該結合基板之填充口朝向該 液晶皿,並接觸於該液晶材料上,接著破壞真空,使該結 合基板之填充口藉由毛細效應(capillaryeffect)以及該結 合基板内外部之一壓力差而漸漸吸入該液晶材料。 謂的液晶滴下式(One Drop Fill)技術。於此一技術中,兩基 板結合之前,兩基板中之一基板係容納有液滴填入之液晶 材料。該液滴充填方法可見於1993年11月23號頒予 Teruhisa Ishihara等人之美國專利第5,263,888號,標題為” 液晶顯示器面板之製造方法(Meth〇d 〇f Manufacture 〇fIn recent years, a faster filling technique has been developed, that is, the 1258619 15836twf.doc/y panel unevenness of color (Mura defect) may occur. Furthermore, many methods have been provided in the prior art in connection with the bonding of two substrates in a liquid crystal display and the filling process of a liquid crystal material. For example, the two substrates of the display first construct all necessary thin film transistors (TFTs), circuits, and color filters. The two substrates are then aligned with each other and spaced apart by a distance of about 5 microns and bonded together with epoxy at their edges. The combined substrate and a liquid crystal dish filled with liquid crystal material are placed in a vacuum chamber such that the gap in the bonded substrate is in a vacuum state. Then, the filling port of the bonding substrate faces the liquid crystal dish and contacts the liquid crystal material, and then the vacuum is broken, so that the filling port of the bonding substrate has a capillary effect and a pressure difference between the inside and the outside of the bonding substrate. The liquid crystal material is gradually sucked in. The so-called One Drop Fill technology. In this technique, one of the substrates of the two substrates accommodates the liquid crystal material filled with the droplets before the two substrates are bonded. The method of manufacturing a liquid crystal display panel (Meth〇d 〇f Manufacture 〇f) is disclosed in U.S. Patent No. 5,263,888 issued to Teruhisa Ishihara et al.
Liquid CrystalDisplay Panel),,,其併入本文以為參考。 於此一製程中,間隙子之彈性攸關液晶滴下式(〇ne Drop Fill)技術中,基板上滴入液晶的量的操作區間 (operation window)。當間隙子過少或塑性變形量過大(例如 彈性係數過低)時,相對上液晶的量易於過多,而亦造成重 力色不均勻(gravity mura)。若間隙子過多或彈性變形量過 9 1258619 15836twf.doc/y 低(例如彈^生係數過高)時,相對上液晶的量易於過少,則 易於產生氣泡。在理想彈鋪賴式下,高度越高的間 子,可以獲得越大的操作區間。 、 【發明内容】 、本,明的目的就是在提供一種凸起結構的製作方 ^以藉由遮光圖案的開口大小調整所形成之凸起結構的 南度’而構成不同高度的凸起結構,以作為_子與/或配 向凸起。 •本發明的目的是提供-種液晶顯示器裝置之構造及 其製造方法,可同時製作不同高度之間隙子,以保持液晶 顯示器裝置之均句且精準的單元間隙(eellgap)。 U本發明的目的是提供一種液晶顯示器裝置之構造及 其製造方法,可在製作間隙子的同時形成配向凸起,以簡 化製程,節省製作成本。 θ 基於上述或其他目的,本發明提出一種凸起結構的製 乍方夬首先,長:供一彩色渡光片基板或一薄膜電晶體陣 列基板,其中此彩色濾光片基板或薄膜電晶體陣列基板上 具有一遮光圖案,且此遮光圖案界定多個開口。接著,在 二有遮,圖案之彩色濾光片基板或薄膜電晶體陣列基板上 形成一光阻。紐,以遮光®㈣罩幕,而由彩色渡光片 基,或主動元件陣列基板的另一側對光阻進行背向曝光, 以藉由開口的尺寸來調整開口處之光阻的曝光深度。之 後將光阻顯影,而形成對應於開口的多個凸起結構。 本么明更提出一種液晶顯示器裝置,其包括一第一基 1258619 15836twf.doc/y Γ 一弟二基板:—狹晶盾、夕個第-凸起結構以及多個 第二凸起結構。/、中★,第-基板係與第二基板結合在一起, I腔而第—基板上具有_遮光圖案’ 案界定不同尺寸之多個第-開口與多個第二開口。此外Ώ 液晶層係配置於空腔内。另外,第— 結構係位於空腔内,其中第—凸起結構係職配置^^ 位置上,而第二凸起結構係對應配置於 ===位置上,且第-凸起結構與第二凸 先置之製造方法。首 -遮光圖案,且二=尺c板上具有 多個第二開口。接著,於第:=饰之與 以遮光圖案為罩幕,而由第二基板的另—側對光阻= 向曝光,其中第-開Π處之光阻與第二開σ處之光阻具二 不同的曝光深度。之後’將光阻顯影,而形成對應於^一 開口的多個第-凸起結構以及對應於第二開σ g結構,其中第-凸起結構與第二凸狀構具有不t 本發明提出-種彩色濾光片基板,其主要包括 基板、-黑色矩陣、多個彩色遽光片、多個第 ,及多個第二凸起結構。其中,黑色矩陣係配置= ,上:並裸露出部分之透明基板,以界定多個第^基 夕個第二開口以及多個像素區域’其中第一開口與^二開 11 1258619 15836twf.doc/y 口具有不同之尺寸。此外,彩色濾光片係配 ^另二第-凸起結構與第二凸起結構係配置 構對應於L,以―凸雜構與第 不同之高度。 〇起、%構具有 本發明提出-種彩色渡光片基板的製作方法 提供-透明基板。接著,於透明基板上形成—Liquid Crystal Display Panel),, which is incorporated herein by reference. In this process, in the elastic drop-filling technique of the spacer, the operation window of the amount of liquid crystal is dropped onto the substrate. When the amount of the gap is too small or the amount of plastic deformation is too large (e.g., the modulus of elasticity is too low), the amount of the liquid crystal is relatively large, and the gravity mura is also caused. If there is too much gap or the amount of elastic deformation is too low (for example, if the elastic coefficient is too high), the amount of liquid crystal is relatively small, and bubbles are likely to be generated. In the ideal elastic lay-up, the higher the height, the larger the operating range can be obtained. [Description of the Invention] The purpose of the present invention is to provide a raised structure of a raised structure by providing a convex structure to adjust the south degree of the convex structure formed by the opening size of the light shielding pattern. As a _ sub and / or alignment protrusion. SUMMARY OF THE INVENTION It is an object of the present invention to provide a construction of a liquid crystal display device and a method of fabricating the same that can simultaneously produce spacers of different heights to maintain a uniform and accurate cell gap of the liquid crystal display device. SUMMARY OF THE INVENTION An object of the present invention is to provide a structure of a liquid crystal display device and a method of fabricating the same, which can form alignment protrusions while forming a spacer to simplify the process and save manufacturing costs. θ Based on the above or other objects, the present invention provides a embossing structure for a raised structure. First, a length: for a color light-emitting substrate or a thin film transistor array substrate, wherein the color filter substrate or thin film transistor array The substrate has a light shielding pattern, and the light shielding pattern defines a plurality of openings. Next, a photoresist is formed on the two masked, patterned color filter substrate or thin film transistor array substrate. New, with a blackout® (four) mask, and the back side of the active substrate array substrate or the other side of the active device array substrate is exposed to the photoresist to adjust the exposure depth of the photoresist at the opening by the size of the opening . The photoresist is then developed to form a plurality of raised structures corresponding to the openings. The present invention further provides a liquid crystal display device comprising a first substrate 1258619 15836 twf.doc/y Γ a second substrate: a narrow crystal shield, a first ridge-convex structure and a plurality of second convex structures. /, medium ★, the first substrate is bonded to the second substrate, and the I cavity and the first substrate have a plurality of first openings and a plurality of second openings of different sizes. In addition, the liquid crystal layer is disposed in the cavity. In addition, the first structure is located in the cavity, wherein the first protrusion structure is in the position of the ^^ position, and the second protrusion structure is correspondingly disposed in the === position, and the first protrusion structure and the second structure The method of manufacturing the convex first. The first-light-shielding pattern, and the two-foot c-plate has a plurality of second openings. Then, in the first: = and the light-shielding pattern is used as a mask, and the other side of the second substrate is opposite to the light-resistance = exposure, wherein the photoresist at the first opening and the photoresist at the second opening σ With two different exposure depths. And then developing the photoresist to form a plurality of first-convex structures corresponding to the opening and corresponding to the second open σ g structure, wherein the first-convex structure and the second convex structure have no A color filter substrate mainly comprising a substrate, a black matrix, a plurality of color light-emitting sheets, a plurality of first, and a plurality of second raised structures. Wherein, the black matrix system configuration =, upper: and exposes a portion of the transparent substrate to define a plurality of second base openings and a plurality of pixel regions 'where the first opening and the second opening 11 1258619 15836twf.doc/ The y port has a different size. In addition, the color filter is coupled to the second raised structure and the second raised structure corresponding to L, with a convex structure and a different height. The present invention proposes a method for fabricating a color light-emitting sheet substrate. A transparent substrate is provided. Then, formed on a transparent substrate -
以界定多個第-開口、多個第二開口以 & = ’ 其中第一開口盥第-開口且古课常&域, U-開口具有不同之尺寸,且第一開口與 第一開口暴露部分之該透明基板。織,於像素區域㈣ 成多個彩色濾光片。接著,於透明基板上塗佈一光阻,2 以黑色矩陣與彩色濾、光片為罩幕,而由透明基板的另一側 對光阻進行背向曝光,其中第一開口處之光阻與第二開口 處之光阻具有不同的曝光深度。之後,將光阻顯影,而形 成對應於第一開口的多個第一凸起結構以及對應於第二^ 口的夕個第一凸起結構,其中第一凸起結構與第二凸起結 構具有不同之高度。 本發明提出另一種彩色濾光片基板,主要包括一透明 基板、一黑色矩陣、多個彩色濾光片、多個第一凸起結構 以及多個第二凸起結構。其中,黑色矩陣係配置在透明基 板上’並裸露出部分之透明基板,以界定多個第一開口以 及多個像素區域。此外,彩色濾光片係配置於像素區域内, 其中彩色濾光片具有多個第二開口,且第一開口與第二開 口具有不同之尺寸。另外,第一凸起結構與第二凸起結構 12To define a plurality of first openings, a plurality of second openings to & = ' wherein the first opening 盥 first opening and the old class & field, the U- opening has a different size, and the first opening and the first opening A portion of the transparent substrate is exposed. Weaving, in the pixel area (four) into a plurality of color filters. Next, a photoresist is coated on the transparent substrate, 2 is a black matrix and a color filter, and the light film is used as a mask, and the photoresist is back-exposed by the other side of the transparent substrate, wherein the photoresist at the first opening is It has a different exposure depth from the photoresist at the second opening. Thereafter, the photoresist is developed to form a plurality of first protrusion structures corresponding to the first opening and a first protrusion structure corresponding to the second opening, wherein the first protrusion structure and the second protrusion structure Have different heights. Another color filter substrate is proposed by the present invention, which mainly comprises a transparent substrate, a black matrix, a plurality of color filters, a plurality of first protrusion structures and a plurality of second protrusion structures. Wherein, the black matrix is disposed on the transparent substrate ′ and a portion of the transparent substrate is exposed to define a plurality of first openings and a plurality of pixel regions. Further, the color filter is disposed in the pixel region, wherein the color filter has a plurality of second openings, and the first opening and the second opening have different sizes. In addition, the first raised structure and the second raised structure 12
1258619 15836twf.doc/y 係配置=透明基板上,其中第—⑽結構對應於第一開 二凸起結構對應於第二開口,且第—凸起結構與 弟一凸起結構具有不同之高度。 本發明提出另—種彩“光片基板的製作方法。首 =,提供-透明基板。接著,於透明基板上形成一黑色矩 陣’以界定多個第一開口與多個像素區域,且第一開口暴 =分^透明基板1後’於像素區域_成多個彩色渡 先片’,、具有多個第二開口,以暴露部分之透明基板,並 中第-開口與第二開口具有不同之尺寸。接著,於透明基 板上塗佈-光阻,並以黑色矩陣與彩色㈣片為罩幕,而 由透明基板的另-側對触進行f向曝光,其中第一開口 處之光阻與第二開口處之光阻具有不同的曝光深度。之 後,將光阻顯影,而形成對應於第—開口的多個第一凸起 結構以及對應於第二開口的多個第二凸起結構,其中第一 凸起結構與第二凸起結構具有不同之高度。 本發明提出又一種彩色濾光片基板,主要包括一透明 基板、-黑色矩陣、多個彩色渡光片、多個第—凸起結構 以及多個第二凸起結構。其巾,黑色矩陣係配置在透明基 板上,並裸露出部分之透明基板,以界定多個 此外,彩色濾光片係配置於像素區域内,其中彩色^片 具有多個第一開口與多個第二開口,且第一開口與^二開 口具有不同之尺寸。另外,第—凸起結構與第二凸起結^ 係配置於透明基板上,其中第一凸起結構對應於第一開 口,而第二凸起結構對應於第二開口,且第—凸起結構^ 13 1258619 15836twf.doc/y 第二凸起結構具有不同之高度。 本發明提出又—卿色濾光片基板的製作方法。首 先,提供-透明基板。接著,於相基板上祕—黑色矩 陣’以界定多個像素區域。⑽,於像素區域内形成多個 衫色濾光片,其具有多個第_開口與多個第二開口,以暴 露部分之透明基板,其中第—開口與第二開口具有不同之 尺寸。接著、’於透明基板上塗佈_光阻,並以黑色矩陣與 彩色慮光片為罩幕’而由透明基板的另—側對光阻進行背 向曝光’其中第-開口處之光阻與第二開口處之光阻具有 不同的曝光深度。之後,將光阻_影,_賴應於第一 開口的夕個弟一凸起結構以及對應於第二開口的多個第二 凸起結構,其中第一凸起結構與第二凸起結構具有不同之 南度。 基於上述,本發明之間隙子係直接置於該玻璃基板 上,並可具有不同之高度,所以在承受了一壓力或力量之 後,该液晶顯示器裝置能夠充分地恢復以及該單元間隙能 夠保持一致。此外,本發明可藉由遮光圖案上之開口尺寸 來調整曝光深度,以同時形成不同高度之凸起結構,其可 作為間隙子或配向凸起,因此有助於簡化製程,降低製作 成本。另外,本發明亦有助於在液晶滴下式…neDr〇pFi⑴ 之加工製程中,進一步加大滴入液晶量的操作區間。 為讓本發明之上述和其他目的、特徵和優點能更明顯 易懂,下文特舉較佳實施例,並配合所附圖式,作詳細說 明如下。 14 1258619 15836twf.doc/y 【實施方式】 參考第4a、4b及4c圖,其顯示根據本發明之一實施 例之一間隙子基板,例如一彩色濾光片(c〇1〇rFilter ;下文 中簡稱為CF)基板1〇〇,係用於一薄膜電晶體(Thin Film1258619 15836twf.doc/y system configuration=transparent substrate, wherein the first (10) structure corresponds to the first open two convex structure corresponding to the second opening, and the first convex structure has a different height from the young one. The invention proposes another coloring method for manufacturing a light sheet substrate. First, providing a transparent substrate. Then, forming a black matrix on the transparent substrate to define a plurality of first openings and a plurality of pixel regions, and first Open turbulence = sub-transparent substrate 1 after 'in the pixel area _ into a plurality of color slabs', having a plurality of second openings to expose a portion of the transparent substrate, and the first opening and the second opening are different Then, the photoresist is coated on the transparent substrate, and the black matrix and the color (four) film are used as the mask, and the other side of the transparent substrate is exposed to the f-direction, wherein the photoresist at the first opening is The photoresist at the second opening has a different exposure depth. Thereafter, the photoresist is developed to form a plurality of first protruding structures corresponding to the first opening and a plurality of second protruding structures corresponding to the second opening, The first raised structure and the second raised structure have different heights. The present invention provides a color filter substrate, which mainly comprises a transparent substrate, a black matrix, a plurality of color light-emitting sheets, and a plurality of first convex portions. Structure and more a second raised structure. The towel, the black matrix is disposed on the transparent substrate, and a portion of the transparent substrate is exposed to define a plurality of colors, and the color filter is disposed in the pixel region, wherein the color film has a plurality of a first opening and a plurality of second openings, and the first opening and the second opening have different sizes. In addition, the first protrusion structure and the second protrusion structure are disposed on the transparent substrate, wherein the first protrusion The structure corresponds to the first opening, and the second raised structure corresponds to the second opening, and the first raised structure ^ 13 1258619 15836twf.doc / y second raised structure has a different height. A method of fabricating a filter substrate. First, a transparent substrate is provided. Next, a plurality of pixel regions are defined on the phase substrate to define a plurality of pixel regions. (10), a plurality of shirt color filters are formed in the pixel region, which have a plurality of first openings and a plurality of second openings to expose a portion of the transparent substrate, wherein the first opening and the second opening have different sizes. Then, 'coating the photoresist on the transparent substrate, and using a black matrix and color The light-receiving sheet is a mask' and the photoresist is back-exposed by the other side of the transparent substrate. The photoresist at the first opening has a different exposure depth from the photoresist at the second opening. Thereafter, the photoresist is _ shadow, _ depends on the first opening of the buddha-a raised structure and a plurality of second raised structures corresponding to the second opening, wherein the first raised structure and the second raised structure have different south degrees Based on the above, the gap sub-system of the present invention is directly placed on the glass substrate and can have different heights, so that after receiving a pressure or a force, the liquid crystal display device can be sufficiently recovered and the cell gap can be kept consistent. In addition, the present invention can adjust the exposure depth by the size of the opening on the light-shielding pattern to simultaneously form convex structures of different heights, which can be used as spacers or alignment protrusions, thereby contributing to simplifying the process and reducing the manufacturing cost. In addition, the present invention also contributes to further increasing the operation interval in which the amount of liquid crystal is dropped in the processing of the liquid crystal dropping type...neDr〇pFi(1). The above and other objects, features and advantages of the present invention will become more <RTIgt; 14 1258619 15836twf.doc/y [Embodiment] Referring to Figures 4a, 4b and 4c, there is shown a spacer sub-substrate, such as a color filter (c〇1〇rFilter; below), in accordance with an embodiment of the present invention. Referred to as CF) substrate 1〇〇, used in a thin film transistor (Thin Film)
Transistor,TFT)液晶顯示器(Liquid Crystal Display ; LCD) 裝置中。Transistor, TFT) Liquid Crystal Display (LCD) device.
如第4a圖所示,其顯示在CF基板loo上之一個像素 φ (Pixel),包含三個次像素(sub-pixel)。該像素係與該LCD • 裝置之TFT基板(圖中未示)上之薄膜電晶體相對應。現在 進一步參考第4b及4c圖,其係第4a圖沿著剖面線4b-4b 及4c-4c之CF基板1〇〇之橫剖面視圖。該CF基板1〇〇具 有一透明基板,諸如一玻璃基板120。一黑色矩陣15〇 一 般係由金屬製成,諸如薄膜形式之鉻(Cr)或氧化鉻 (CrOx),或者黑色樹脂所製成,且係覆蓋於該玻璃基板12〇 上,並裸露出部分之玻璃基板12〇,以界定複數個像素區 域,以及間隙子區域152。 • 該黑色矩陣150以及該間隙子區域152 —般係與該 , LCD裝置之非動態部份相對應之部分上,該部份包括有在 該TFT基板上之源極匯流線、閘極匯流線、輔助電容電極、 • 以及薄膜電晶體。 該像素區域係對應於該LCD裝置之動態部份,其係 與該TFT基板上之像素電極相對應。彩色濾光片16〇,例 如紅色彩色濾光層16〇a、綠色彩色濾、光層160b、以及藍色 彩色濾光層160c,係條狀且交替的對應於該像素區域上。 15 1258619 15836twf.doc/y 精於本技藝者將可瞭解,該彩色濾光片160可排列為各種 不同的圖樣。 一共同電極140,諸如由ITO所製造,係覆蓋該黑色 矩陣150及該彩色濾光片160。複數個間隙子180係配置 於該共同電極140上,該間隙子區域152處。換言之,該 間隙子180係配置於該玻璃基板120上,且該共同電極14〇 係配置於該間隙子180與該玻璃基板120之間。精於本技 藝者將可瞭解,在某些型式的液晶顯示器中,例如平面切 換(In Plane Switching ; IPS)液晶顯示器中,該彩色濾光片 (Color Filter ; CF)基板100並未提供該共同電極14〇。 熟習此技藝者應可了解一配向膜170,例如以聚亞醯 胺所形成,可進一步地塗覆於該玻璃基板120之上,以具 有約0·1μιη的厚度。該配向膜no之表面適於配向該液晶 义子’該配向膜例如係進行摩擦加工(rubbing process)、照 光配向(photo-align),或是其本身分子特性即可使液晶分子 具有一定之排列方向,而不需再進行摩擦加工製程。 在此實施例裡,該黑色矩陣150、彩色濾光片16〇、電極層 140、以及間隙子180分別具有大約〇 、大約1 5μπι、 大約0·15μιη以及大約5·81μιη之厚度。顯而易見的,根據 本發明之該間隙子180之高度大於該單元間隙(cell gap), 而有助於液晶滴下式(〇ne Drop Fill)之加工製程中,進一步 加大操作區間。此外,當根據本發明之間隙子基板應用於 一垂直配向(vertically-aligned ; VA )形式之 LCD 裝置, β玄間隙子基板可具有一區域規制裝置(加咖匕regUlating 16 1258619 15836twf.doc/y means),諸如形成在該基板上之凸起(^加爪以⑽s)或利 用透明電極之狹縫(例如IT〇slit),用以規制液晶的方向。 具有區域規職置之垂直§&向之LCD裝置係揭示在併入 本案參考之該歐洲專利公開第〇,884,626_A2號。 現在參考第5圖,其顯示一根據本發明之[CD裝置 200。该LCD裝置200包括根據本發明之該cf基板1〇〇 與TFT基板220,且該CF基板1〇〇和TFT基板22〇之邊 • 賴黏著在—起,以界定—雜212,絲容賴液晶材 • 料210。該空腔212具有由該複數個間隙子18()所界定之 一均勻且精準的間隙(單元間隙;cell gap)。該TFT基板220 之結構說明如下。在一玻璃基板222之上,分別成形閘極 224、閘極線(掃瞄線)225、以及該輔助電容線226。該閘極 224、閘極線225、以及該辅助電容線226係覆蓋一絕緣膜 23;^。做為TFT(薄膜電晶體)通道之一半導體層227係成形 於母閘極224之上之該絕緣膜233上。再者,做為該τρτ 之源極與汲極區域之金屬層229a、229b係成形於每一半導 _ 體層227的上部部份,並連接至源極線路與像素電極22卜 • 又,,如以ITO所構成之該像素電極228,係覆蓋每一輔 • 助電容線226,且該絕緣膜233係配置於其間。此外,一 配向膜234係形成在該源極與汲極區域229a、22%、以及 該像素電極228上。 本發明進一步提供一種方法用以製造該CF基板 100。首先,參考第6圖,提供具有一平坦表面之一^板 120,例如為一玻璃基板。為滿足光學濃度值(〇ρ^&ι力 17 1258619 15836twf.doc/y 大於3.5,以達到高對比值,形成一黑色矩陣,例如形成 厚度約0·16μιη之鉻膜係在該玻璃基板12〇之上,然後一 光阻係形成在該鉻膜之上。之後,使用一光罩,其具有一 預定圖案,用以將該光阻曝光。經過顯影後,蝕刻該鉻膜 而形成該黑色矩陣150,且該黑色矩陣150具有一間隙子 區域152,諸如圓形狀、八角形、多邊形、四邊形、三角 形或方形狀等。 I 參考第7圖,紅色、綠色以及藍色的彩色濾光片16〇 例如係分別藉著將紅色樹脂、綠色樹脂以及藍色樹脂塗佈 在该玻璃基板120上而成形。該彩色濾光片16〇之厚度依 不同彩色光阻材料與色度需求而有不同厚度,例如係設定 為約1·5μιη。該彩色濾光片ι60與該黑色矩陣15〇於邊緣 處重豐。該彩色濾光片160係成形為一圖案,以暴露出位 於下方的該黑色矩陣15〇及該間隙子區域152。該彩色濾 光片160成形方法例如為一黃光微影製程。 。 .之後,參考第8圖,形成一共同電極140,例如藉由 濺鍍銦錫氧化物(111出11111丁丨11(^(16;1丁〇),約〇.150111厚度 之銦錫氧化物係覆蓋於該彩色濾光片160、該黑色矩陣 150、以及該間隙子區域152上。 然後,參考第9圖,一負光阻182係塗佈在該玻璃基 板120上並且覆1该間隙子區域152。一適於將該光阻 形成固化反應之光線,例如為一紫外光線184係由另一侧 照射該玻璃基板120,用以將該負光阻182曝光。該負光 阻182經過該紫外光線184照射後會產生鍵結(d〇ss 18 1258619 15836twf.doc/y linking)’亦即該負光阻182被該紫外光線184照射後將硬 化,而不溶解顯影劑中。經過顯影及烘烤固化後,該負光 阻182形成一約5·81μηι厚度的高度之該間隙子18〇。熟習 此技藝者可知,該間隙子18〇係可任意形狀,諸如圓錐、 八角柱、八角錐、多邊形角柱、多邊形角錐、或方柱狀等, 並非只限定為圓柱狀。該彩色濾光片16〇對於該紫外光線 184係不透明的,以避免位於彩色濾光片16〇上方之該負 光阻182硬化。在此情況下,該彩色濾光片16〇及該黑色 矩陣150係作用為一光罩,以將該間隙子18〇成形,如第 10圖所示。 於一特定實驗範例中,就現今所使用之彩色濾光片、 ΙΤΟ、及玻璃基板而言,其對應於不同波長之紫外光之透 光率列表如下:As shown in Fig. 4a, it shows a pixel φ (Pixel) on the CF substrate loo, which contains three sub-pixels. The pixel corresponds to a thin film transistor on a TFT substrate (not shown) of the LCD device. Reference is now made to Figures 4b and 4c, which are cross-sectional views of the CF substrate 1A along section lines 4b-4b and 4c-4c in Figure 4a. The CF substrate 1 has a transparent substrate such as a glass substrate 120. A black matrix 15 is generally made of metal, such as chromium (Cr) or chromium oxide (CrOx) in the form of a film, or a black resin, and covers the glass substrate 12, and exposes a portion thereof. The glass substrate 12 is defined to define a plurality of pixel regions, and a gap sub-region 152. • the black matrix 150 and the gap sub-region 152 are generally associated with the non-dynamic portion of the LCD device, the portion including the source bus line and the gate bus line on the TFT substrate , auxiliary capacitor electrode, • and thin film transistor. The pixel area corresponds to a dynamic portion of the LCD device and corresponds to a pixel electrode on the TFT substrate. Color filters 16A, such as a red color filter layer 16a, a green color filter, a light layer 160b, and a blue color filter layer 160c, are strip-shaped and alternately corresponding to the pixel region. 15 1258619 15836twf.doc/y It will be appreciated by those skilled in the art that the color filter 160 can be arranged in a variety of different patterns. A common electrode 140, such as made of ITO, covers the black matrix 150 and the color filter 160. A plurality of spacers 180 are disposed on the common electrode 140 at the gap sub-region 152. In other words, the spacer 180 is disposed on the glass substrate 120, and the common electrode 14 is disposed between the spacer 180 and the glass substrate 120. It will be appreciated by those skilled in the art that in certain types of liquid crystal displays, such as In Plane Switching (IPS) liquid crystal displays, the color filter (CF) substrate 100 does not provide this common The electrode 14 is. One skilled in the art will appreciate that an alignment film 170, such as formed of polyamidamine, can be further applied over the glass substrate 120 to have a thickness of about 0.1 μm. The surface of the alignment film no is suitable for aligning the liquid crystals. The alignment film is subjected to a rubbing process, a photo-aligning process, or a molecular property thereof to make the liquid crystal molecules have a certain arrangement. Direction without the need for a friction machining process. In this embodiment, the black matrix 150, the color filter 16A, the electrode layer 140, and the spacer 180 have a thickness of about 〇, about 15 μm, about 0.15 μm, and about 5.81 μm, respectively. It will be apparent that the height of the spacer 180 according to the present invention is greater than the cell gap, and in the processing of the liquid crystal drop type, the operation interval is further increased. Further, when the spacer sub-substrate according to the present invention is applied to a vertically-aligned (VA) form of the LCD device, the β-spaced sub-substrate may have a regional regulating device (plus regUlating 16 1258619 15836twf.doc/y Means, such as protrusions formed on the substrate (^3), or slits using transparent electrodes (eg, IT〇slit), to regulate the direction of the liquid crystal. The vertical § &amplitude of the LCD device is disclosed in the European Patent Publication No. 884,626_A2, which is incorporated herein by reference. Referring now to Figure 5, there is shown a [CD device 200 in accordance with the present invention. The LCD device 200 includes the cf substrate 1 〇〇 and the TFT substrate 220 according to the present invention, and the CF substrate 1 〇〇 and the TFT substrate 22 〇 • • • , , , , 以 以 以 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 , , Liquid crystal material 210. The cavity 212 has a uniform and precise gap (cell gap) defined by the plurality of spacers 18(). The structure of the TFT substrate 220 will be described below. On a glass substrate 222, a gate 224, a gate line (scanning line) 225, and the auxiliary capacitance line 226 are formed, respectively. The gate 224, the gate line 225, and the auxiliary capacitor line 226 are covered with an insulating film 23; A semiconductor layer 227, which is a TFT (Thin Film Transistor) channel, is formed on the insulating film 233 over the mother gate 224. Furthermore, the metal layers 229a, 229b as the source and drain regions of the τρτ are formed in the upper portion of each semiconductor layer 227, and are connected to the source line and the pixel electrode 22. The pixel electrode 228 composed of ITO covers each of the auxiliary capacitance lines 226, and the insulating film 233 is disposed therebetween. Further, an alignment film 234 is formed on the source and drain regions 229a, 22%, and the pixel electrode 228. The present invention further provides a method for fabricating the CF substrate 100. First, referring to Fig. 6, there is provided a plate 120 having a flat surface, such as a glass substrate. In order to satisfy the optical density value (〇ρ^&ι force 17 1258619 15836twf.doc/y is greater than 3.5, to achieve a high contrast value, a black matrix is formed, for example, a chromium film having a thickness of about 0.16 μm is formed on the glass substrate 12 Above the crucible, a photoresist is formed on the chromium film. Thereafter, a photomask is used which has a predetermined pattern for exposing the photoresist. After development, the chromium film is etched to form the black A matrix 150, and the black matrix 150 has a gap sub-region 152, such as a circular shape, an octagon, a polygon, a quadrangle, a triangle or a square shape, etc. I refer to Fig. 7, red, green, and blue color filters 16 For example, the red resin, the green resin, and the blue resin are respectively formed by coating the glass substrate 120. The thickness of the color filter 16 is different depending on the color resist material and the color requirement. For example, the color filter ι 60 and the black matrix 15 are thick at the edge. The color filter 160 is shaped into a pattern to expose the black matrix 1 located below. 5 and the gap sub-region 152. The color filter 160 is formed by, for example, a yellow lithography process. Thereafter, referring to FIG. 8, a common electrode 140 is formed, for example, by sputtering indium tin oxide (111). 11111 丨 11 (^ (16; 1 〇 〇), about 150 150111 thickness of indium tin oxide covering the color filter 160, the black matrix 150, and the gap sub-region 152. Then, Referring to FIG. 9, a negative photoresist 182 is coated on the glass substrate 120 and covers the gap sub-region 152. A light suitable for forming the photoresist into a curing reaction, for example, an ultraviolet light 184 is used by another The glass substrate 120 is irradiated on one side for exposing the negative photoresist 182. The negative photoresist 182 is irradiated with the ultraviolet light 184 to generate a bond (d〇ss 18 1258619 15836twf.doc/y linking)' The negative photoresist 182 is cured by the ultraviolet light 184 without being dissolved in the developer. After development and baking curing, the negative photoresist 182 forms a spacer of about 5·81 μηι thickness. As can be seen by those skilled in the art, the spacer 18 can be arbitrarily shaped. Such as a cone, an octagonal column, an octagonal cone, a polygonal corner column, a polygonal pyramid, or a square column, etc., is not limited to a cylindrical shape. The color filter 16 is opaque to the ultraviolet light 184 to avoid color filtering. The negative photoresist 182 is cured on the upper side of the sheet 16. In this case, the color filter 16 and the black matrix 150 act as a mask to shape the spacer 18, as shown in FIG. In a specific experimental example, for the color filters, iridium, and glass substrates used today, the transmittances of ultraviolet light corresponding to different wavelengths are as follows:
Wave length (λ) R/ITO R745-4 (2um) G/ITO G772-4 (2um) B/ITO B764-4 (2um) ITO-fglass 0.6mm glass bare glass 0.6 mm J line (335 nm) 0 0 0 54.45% 74.39% I line (365 nm) 7.10% 1.31% 0 66.73% 84.99% H line (405 nm) 5.07% 0.54% 36.51% 70.36% 90.64% G line (437 nm) 1.13% 0.27% 64.92% 81.77% 91.15% 該透光率列表中,第一列係分別排列為紫外光J line (波長 335 nm)、I line (波長 365 nm)、H line (波長 405 nm) 及Gline (波長437 nm),且第一行係分別排列為厚〇 6mm 玻璃上的ITO+紅色負光阻(JSR公司之型號R745_4,厚度 1258619 15836twf.doc/y 2um)、厚0.6mm玻璃上的ITO+綠色負光阻(JSR公司之型 號G772-4,厚度2um)、厚0.6mm玻璃上的ιΤ〇 +藍色負 光阻(JSR 公司之型號 B764-4,厚度 2um)、ITO + barTglas's (厚度為0.6mm)及bare glass (厚度為〇.6mm)在不同波長下 穿透光的吸收值。該紫外光J line (波長335 nm)、Iline (波 長 365 nm)、H line (波長 405 nm)及 G line (波長 437 nm) 係可由一曝光設備所使用USHIO10KW燈管所發出,並使 用紫外光光譜儀(UV Spectrum Meter),諸如機器型號: USHIO Spectroadiometer USR-405 力口 以量測。 如表所示’該紫外光J line (波長335)照射ITO +紅色 負光阻、ITO +綠色負光阻及ITO +藍色負光阻時,其穿透 率雖然最低,但其照射能量最小,將使得該間隙子區域152 上之負光阻182硬化成該間隙子180之製程時間增長。再 者’ A备、外光H line (波長405 nm)及G line (波長437 nm) 照射ITO +藍色負光阻時,其穿透率較高,將使得該間隙 子區域152以外之負光阻182硬化,使容納液晶的空間改 變或無法容納液晶。 因此,由於波長365 nm的紫外光(I line)之穿透率大 體上介於J line (波長335)、紫外光H Hne (波長405 nm)及 G line (波長437 nm)之間,其具有對於ITO及玻璃基板之 穿透率較高,而對於紅、綠、藍色之彩色濾光片之穿透率 較低’故選用對波長365 nm的紫外光,用以反應該負光 阻182 ’即可利用各種彩色濾光片,例如紅、綠、藍色彩 色滤光片’而自然形成光罩,因此大部分紫外光只能穿透 20Wave length (λ) R/ITO R745-4 (2um) G/ITO G772-4 (2um) B/ITO B764-4 (2um) ITO-fglass 0.6mm glass bare glass 0.6 mm J line (335 nm) 0 0 0 54.45% 74.39% I line (365 nm) 7.10% 1.31% 0 66.73% 84.99% H line (405 nm) 5.07% 0.54% 36.51% 70.36% 90.64% G line (437 nm) 1.13% 0.27% 64.92% 81.77% 91.15% In the transmittance list, the first column is arranged as ultraviolet light J line (wavelength 335 nm), I line (wavelength 365 nm), H line (wavelength 405 nm), and Gline (wavelength 437 nm), and The first line is ITO+red negative photoresist (JSR R745_4, thickness 1258619 15836twf.doc/y 2um) and ITO+green negative photoresist on 0.6mm thick glass (JSR company) Model G772-4, thickness 2um), ιΤ〇+blue negative photoresist on glass 0.6mm (JSR company model B764-4, thickness 2um), ITO + barTglas's (thickness 0.6mm) and bare glass (thickness) It is 吸收.6mm) the absorption value of light transmitted through different wavelengths. The ultraviolet light J line (wavelength 335 nm), Iline (wavelength 365 nm), H line (wavelength 405 nm) and G line (wavelength 437 nm) can be emitted by a USHIO 10KW lamp used in an exposure apparatus, and ultraviolet light is used. UV Spectrum Meter, such as machine model: USHIO Spectroadiometer USR-405 force measurement. As shown in the table, when the UV light J line (wavelength 335) is irradiated with ITO + red negative photoresist, ITO + green negative photoresist and ITO + blue negative photoresist, its transmittance is the lowest, but its irradiation energy is the smallest. The process time for hardening the negative photoresist 182 on the gap sub-region 152 into the spacer 180 is increased. Furthermore, when A, H light (wavelength 405 nm) and G line (wavelength 437 nm) are irradiated with ITO + blue negative photoresist, the transmittance is higher, which will make the gap sub-region 152 negative. The photoresist 182 is hardened to change the space in which the liquid crystal is accommodated or to accommodate the liquid crystal. Therefore, since the transmittance of ultraviolet light (I line) at a wavelength of 365 nm is substantially between J line (wavelength 335), ultraviolet light H Hne (wavelength 405 nm), and G line (wavelength 437 nm), it has For ITO and glass substrates, the transmittance is higher, and for red, green, and blue color filters, the transmittance is lower. Therefore, ultraviolet light with a wavelength of 365 nm is selected to reflect the negative photoresist 182. 'You can use a variety of color filters, such as red, green, and blue color filters' to form a mask naturally, so most of the UV light can only penetrate 20
一 TFT基板220結合,且該CF基板1〇〇和TFT基板220 之邊緣係黏著在一起,以界定一空腔212,用以容納該液 晶材料210。該空腔212具有藉由該複數個間隙子18〇所 界定之一均勻且精準的間隙(單元間隙)。之後,再將一偏 光板分別安裝到該CF基板1〇〇及該TFT基板之後,根據 本發明之LCD裝置便得以完成。該液晶材料210可藉由真 空吸入式技術或液晶滴下式(One Drop Fill)技術,配置於該 兩基板100及220之間。 1258619 15836twf.doc/y 間?子區域將該_子之負光阻材料硬化 ==例’,奸區域以外之區域细;穿透率 係J於7.1/。’而隶佳穿透率係小於ΐ 3ι%。 此外,考量間隙子所用光阻在彩 劑(在此實施例為36_波長之紫 二r色▲光層(在此實_為添加到紅色、綠色彩 色慮先層)中,以確保紫外缸能穿透間隙子區域,而可利 用紅、,綠、藍色彩色滤光片以及黑色矩陣自然形成光罩, 利用光在㈣:子區域自行對位形成_子。最後,成形該 配向膜以復蓋該玻璃基板12〇的表面,如第扑圖所示。 再者,如第5圖所示,該CF基板1〇〇係可進一步與 如前所述,根據本發明之間隙子180係直接配置於該 玻璃基板120上,該間隙子180大體上係彈性的。當該LCD 裝置被施予一外在壓力或一力量時,只有該間隙子180會 變形。因為根據本發明直接置於玻璃基板120上的間隙子 180大體上係彈性的,故當該外在壓力或負載被釋放之 21 1258619 15836twf.doc/y 後,該間隙子180將會回到接近它們原來的大小以維持均 勻且精準的單元間隙,而不會導致面板色度不均瑕疵。再 者,該間隙子180具有較高的高度,故於液晶滴下式(One Drop Fill)之加工製程中,可以進一步加大操作區間。 現請參考第11圖,其顯示根據本發明另一實施例之 一彩色濾光片(Color Filter ; CF)基板500,係用於一薄膜電 晶體(Thin Film Transistor ; TFT)液晶顯示器(Liquid Crystal Display ; LCD)裝置中。該CF基板500係大體上類似於該 CF基板100,其中相似的元件標示相似的圖號。於該CF 基板500中,該間隙子580係配置於該彩色濾光片560中。 於該彩色濾光片基板500之製造過程中,一黑色矩陣550 係覆蓋於該玻璃基板520上,並裸露出部分之玻璃基板 520,以界定複數個像素區域或彩色濾光片區域。複數個彩 色濾光片560係配置於該彩色濾光片區域上,並會具有複 數個開口,裸露出該玻璃基板52〇,並藉以界定複數個該 間隙子區域552。於塗佈並顯影負光阻時,光線會穿過該 間隙子區域552,而將此一部份之該負光阻硬化,藉此形 成複數個間隙子580。由於在此實施例中,間隙子區域位 於像素區域裡面,故用以製造該間隙子580之材料,係可 為該像素區域中之該彩色濾光片區域相同之顏色之材料, 以增加顯示器的透光率。 見明參考第12圖,其顯示根據本發明另一實施例之 一液晶顯示器(Liquid Crystal Display ; LCD)裝置 7〇〇,其 具有一薄膜電晶體(Thin Film Transistor ; TFT)基板 620。 22 1258619 15836twf.doc/y 該液晶顯示器700係大體上類似於該液晶顯示器200,其 中相似的元件標示相似的圖號。該薄膜電晶體基板62〇包 含一透明基板622、一閘極624、一源極629及一像素電極 628(諸如ITO所構成)’该閘極624、該源極629及該像素 電極628以習知之技術形成於該透明基板622上。一般而 言,該閘極624係與掃瞒線路相連接,係由一第一金屬之 微影姓刻製程中所成形’而該源極629係與資料線路相連 接,係由一第二金屬之微影蝕刻製程中所成形。於該薄膜 電晶體基板620中,複數個彩色濾光片66〇係形成於該像 素電極628上,且複數個間隙子68〇係配置於該彩色濾光 片660中。 ^ 於該薄膜電晶體基板620之製造過程中,複數個彩色 濾光片660係形成於該像素電極628上,並裸露出部分之 像素電極628,以界定複數個像素區域。該複數個彩色濾 光片660具有複數個開口,裸露出該像素電極628,並藉 j界定複數個該間隙子區域652。於塗佈並顯影負光阻 日寸,紫外光線會由該透明基板622之外側穿過該間隙子區 域652,而將此一部份之該負光阻硬化,藉此形成複數個 ,隙子680。此外,一配向膜634係形成在該源極629、該 彩色濾光片660及該間隙子680上。 忒薄膜電晶體基板620係可進一步與另一基板623結 合,且該薄膜電晶體基板62〇和該基板623之邊緣係黏著 在起,以界定一空腔612,用以容納一液晶材料61〇,如 此以形成該液晶顯示器裝置7〇〇。該空腔612具有藉由該 23 1258619 15836twf.doc/y 複數個間隙子680所界定之一均勻且精準的間隙(單元間 隙)。精於本技藝者將可瞭解,兩偏光板(圖中未示)會分別 女裝到该薄膜電晶體基板620及該基板623之外側表面上。 現請參考第13圖,其顯示根據本發明另一實施例之一彩色 濾光片(Color Filter ; CF)基板800。該CF基板800係大體 上類似於该CF基板100,其中相似的元件標示相似的圖 號。於该彩色濾光片基板800之製造過程中,一黑色矩陣 | 850係覆蓋於一玻璃基板上,並裸露出部分之玻璃基板, 以界定複數個像素區域或彩色濾光片區域,以及複數個開 口 878。複數個彩色濾光片860a、860b、860c係配置於該 彩色遽光片區域及該開口 878上,並裸露出該玻璃基板, 並藉以界定複數個該間隙子區域852。於塗佈並顯影負光 阻時’光線會穿過該間隙子區域852,而將此一部份之該 負光阻硬化,藉此形成複數個間隙子88〇。再者,精於本 技藝者將可瞭解該間隙子880係可對應於薄膜電晶體基板 >(圖中未示)之薄膜電晶體之位置。 現請參考第14圖,其顯示根據本發明另一實施例之 一彩色濾光片(Color Filter ; CF)基板900。該CF基板900 係大體上類似於該CF基板1〇〇,其中相似的元件標示相似 的圖號。於該彩色濾光片基板9〇〇之製造過程中,一黑色 矩陣950係覆蓋於一玻璃基板上,並裸露出部分之玻璃基 板’以界定複數個像素區域或彩色濾光片區域。複數個彩 色濾光片960a、960b、960c係配置於該彩色濾光片區域 上,並會具有複數個開口,裸露出該玻璃基板,並藉以界 24 1258619A TFT substrate 220 is bonded, and the edges of the CF substrate 1 and the TFT substrate 220 are adhered together to define a cavity 212 for accommodating the liquid crystal material 210. The cavity 212 has a uniform and precise gap (cell gap) defined by the plurality of spacers 18A. Thereafter, after a polarizing plate is separately mounted to the CF substrate 1 and the TFT substrate, the LCD device according to the present invention is completed. The liquid crystal material 210 can be disposed between the two substrates 100 and 220 by a vacuum suction technique or a One Drop Fill technique. 1258619 15836twf.doc/y The sub-region hardens the negative photoresist material of the _ sub-section == case, the area outside the rape area is fine; the penetration rate is J at 7.1/. And the penetration rate is less than ΐ 3ι%. In addition, the photoresist used in the spacer is considered to be in the colorant (in this embodiment, the 36-wavelength violet color ▲ light layer (in this case, added to the red, green color consideration layer) to ensure the ultraviolet cylinder It can penetrate the gap sub-area, and can form a reticle by using red, green, blue color filter and black matrix, and use light to form a _ sub-position in the (4): sub-region. Finally, the alignment film is formed. Covering the surface of the glass substrate 12A, as shown in the first drawing. Further, as shown in Fig. 5, the CF substrate 1 can further be combined with the spacer 180 according to the present invention as described above. Directly disposed on the glass substrate 120, the spacer 180 is substantially elastic. When the LCD device is subjected to an external pressure or a force, only the spacer 180 is deformed because it is directly placed according to the present invention. The spacers 180 on the glass substrate 120 are substantially elastic so that when the external pressure or load is released 21 1258619 15836 twf.doc/y, the spacers 180 will return to their original size to maintain uniformity. And precise cell gap without causing surface The chromaticity of the plate is not uniform. Furthermore, the spacer 180 has a high height, so that the operation interval can be further increased in the processing process of the One Drop Fill. Please refer to FIG. A color filter (CF) substrate 500 according to another embodiment of the present invention is used in a Thin Film Transistor (TFT) liquid crystal display (LCD) device. The CF substrate 500 is substantially similar to the CF substrate 100, wherein similar components are labeled with similar numbers. In the CF substrate 500, the spacer 580 is disposed in the color filter 560. During the manufacturing process of the substrate 500, a black matrix 550 is overlaid on the glass substrate 520, and a portion of the glass substrate 520 is exposed to define a plurality of pixel regions or color filter regions. The plurality of color filters 560 Arranging on the color filter region, and having a plurality of openings, the glass substrate 52 is exposed, and thereby defining a plurality of the spacer sub-regions 552. When coating and developing the negative photoresist, the light is Passing through the gap sub-region 552, and hardening a portion of the negative photoresist, thereby forming a plurality of spacers 580. Since in this embodiment, the spacer sub-region is located inside the pixel region, The material of the spacer 580 is a material of the same color as the color filter region in the pixel region to increase the transmittance of the display. Referring to FIG. 12, there is shown another embodiment in accordance with the present invention. A liquid crystal display (LCD) device 7A has a thin film transistor (TFT) substrate 620. 22 1258619 15836 twf.doc/y The liquid crystal display 700 is substantially similar to the liquid crystal display 200, in which like elements are labeled with similar reference numerals. The thin film transistor substrate 62 includes a transparent substrate 622, a gate 624, a source 629, and a pixel electrode 628 (such as ITO). The gate 624, the source 629, and the pixel electrode 628 A known technique is formed on the transparent substrate 622. In general, the gate 624 is connected to the broom line and is formed by a first metal lithography process and the source 629 is connected to the data line by a second metal. Formed in the lithography process. In the thin film transistor substrate 620, a plurality of color filters 66 are formed on the pixel electrode 628, and a plurality of spacers 68 are disposed in the color filter 660. During the fabrication of the thin film transistor substrate 620, a plurality of color filters 660 are formed on the pixel electrode 628, and a portion of the pixel electrodes 628 are exposed to define a plurality of pixel regions. The plurality of color filters 660 have a plurality of openings, the pixel electrodes 628 are exposed, and a plurality of the spacer sub-regions 652 are defined by j. After coating and developing the negative photoresist, ultraviolet light passes through the gap sub-region 652 from the outer side of the transparent substrate 622, and a portion of the negative photoresist is hardened, thereby forming a plurality of gaps. 680. Further, an alignment film 634 is formed on the source electrode 629, the color filter 660, and the spacer 680. The thin film transistor substrate 620 can be further combined with another substrate 623, and the edge of the thin film transistor substrate 62 and the substrate 623 is adhered to define a cavity 612 for accommodating a liquid crystal material 61? Thus, the liquid crystal display device 7 is formed. The cavity 612 has a uniform and precise gap (cell gap) defined by the plurality of spacers 680 of the 23 1258619 15836 twf.doc/y. It will be appreciated by those skilled in the art that two polarizing plates (not shown) will be separately applied to the outer surface of the thin film transistor substrate 620 and the substrate 623. Referring now to Figure 13, there is shown a color filter (CF) substrate 800 in accordance with another embodiment of the present invention. The CF substrate 800 is substantially similar to the CF substrate 100, with like elements being numbered similarly. During the manufacturing process of the color filter substrate 800, a black matrix | 850 is overlaid on a glass substrate, and a portion of the glass substrate is exposed to define a plurality of pixel regions or color filter regions, and a plurality of Opening 878. A plurality of color filters 860a, 860b, and 860c are disposed on the color filter region and the opening 878, and the glass substrate is exposed, thereby defining a plurality of the spacer sub-regions 852. When the negative photoresist is applied and developed, the light passes through the gap sub-region 852, and a portion of the negative photoresist is hardened, thereby forming a plurality of spacers 88. Furthermore, those skilled in the art will appreciate that the spacer 880 can correspond to the position of the thin film transistor of a thin film transistor substrate (not shown). Referring now to Figure 14, there is shown a color filter (CF) substrate 900 in accordance with another embodiment of the present invention. The CF substrate 900 is substantially similar to the CF substrate 1 , wherein like elements are numbered similarly. During the fabrication of the color filter substrate 9A, a black matrix 950 is overlaid on a glass substrate and a portion of the glass substrate is exposed to define a plurality of pixel regions or color filter regions. A plurality of color filters 960a, 960b, and 960c are disposed on the color filter region, and have a plurality of openings to expose the glass substrate, and the boundary is 24 1258619
15836twf.docA15836twf.docA
定複數個該間隙子區域952。於塗佈並顯影負光阻日士 線會穿過該間隙子區域松,而將此—部份之該= 化,藉此形賴數侧隙子_。再者,精於本技 = 可瞭解該間隙子980係可對應於薄膜電晶體基板夫 示)之保持電容區域987,亦即輔助電容電極之位置,如严 線所示。綜前所述,本發明之特徵在於利用液晶顯示 既有之圖案(Pattern),諸如黑色矩陣、彩色濾光片、^目苗 線路或第一金屬(Metal One)、或資料線路或第二金^ (Metal Two),界定間隙子區域。又,這些圖案對於^該間 隙子之光阻曝光之光線,係不透光的,因此該間隙子可由 該液晶顯示器之任一基板之外侧曝光,而成形於該基板 上。如此,根據本發明之間隙子之製造過程中,不需要額 外的光罩,以將該光阻曝光,藉由該圖案上之間隔子區域 便得以直接將該間隙子成形。且本發明之間隙子並不限於 單獨使用,亦可與傳統之球狀間隙子(Ballspacer)或黏著型 間隙子(adhesive spacer)—併混用。此外,任何熟習此技藝 者可知,本發明之間隙子可採用一不透光材質形成(例如二 黑色樹脂),以避免漏光情形發生。 本發明係以CF基板或TFT基板上之不透光膜層製作 遮光圖案’並以背向曝光(back_exp〇sure process)的方式形 成間隙子。值得注意的是,若以上述實施例所揭示之技術 為基礎,本發明更可藉由對遮光圖案所界定之開口尺寸(即 上述之間隙子區域)的設計,來調整對應於開口位置之光阻 的曝光深度,而可同時形成不同高度之間隙子(hybrid 25 1258619 15836twf.doc/y 啊㈣」此具有不同高度之_子的設計將有助於提高液 晶顯不窃面板之抗壓能力,且更有利於增加以液晶 術滴入液晶的操作區間。 請參考第15圖與第16圖,其中第15圖繪示為不同 形狀與尺寸之光糾於其所軸之凸起結構高度的 關係圖,而第16圖繪示為第15圖中不同光罩所定義之開 口尺寸的示意圖。如第15圖所示之橫座標為光罩之開口尺 寸,而縱座標為所形成之凸起結構的高度,其中第15圖列 舉,形、長方形、正方形、八角形等不同形狀之光罩開口, 而第16圖中以標號s標示這些形狀之光罩開口的尺寸。 由第15圖中可以明顯地發現,對應不同的開口尺寸,可形 成不同高度的凸起結構。更詳細的說,藉由光罩開口尺^ 的設計,可以控制其所對應之光阻的曝光深度,因此顯影 後所形成之凸起結構的高度便會有所不同。 結合上述所揭示之背向曝光與調整光罩開口之技 術,本發明將可以在液晶顯示器裝置中同時形成不同高度 之凸起結構’以作為間隙子(hybrid spacer)之用,下文將舉 例说明本發明之用以形成相同或不同高度之凸起結構的方 法’而上述所有實施例之内容均可併入下文中,以作為來 考。 请參考第17A〜17D圖,其依序繪示本發明之凸起牡 構的製作方法。 ^ 首先,如第17A圖所示,提供一基板1〇1〇,其中此 基板1010例如是上述之彩色濾光片基板或薄膜電晶體陣 26 1258619 15836twf.doc/y 列基板,且此基板1010具有相對應之一第一表面1012與 一第二表面1014。此外,基板1010之第一表面1012上具 有遮光圖案1020,此遮光圖案1020例如是上述之黑色矩 陣、彩色濾光片、掃瞄線路或第一金屬層(Metal One)、或 資料線路或第二金屬層(Metal Two),用以界定出多個開口 1022,而此開口 1022例如是上述之間隙子區域。A plurality of the gap sub-regions 952 are defined. After coating and developing the negative photoresist, the line will pass through the gap sub-area, and this part will be replaced by the number of side gaps. Furthermore, it is good to know that the gap 980 can correspond to the retention capacitor region 987 of the thin film transistor substrate, that is, the position of the auxiliary capacitor electrode, as shown by the strict line. As described above, the present invention is characterized in that a liquid crystal is used to display an existing pattern, such as a black matrix, a color filter, a metal line or a first metal (Metal One), or a data line or a second gold. ^ (Metal Two), defines the gap sub-area. Moreover, the patterns are opaque to the light exposed by the photoresist of the gap, so that the spacers can be exposed on the outer side of any of the substrates of the liquid crystal display and formed on the substrate. Thus, in the manufacturing process of the spacer according to the present invention, an additional mask is not required to expose the photoresist, and the spacer can be directly formed by the spacer region on the pattern. Further, the spacer of the present invention is not limited to use alone, and may be mixed with a conventional ball spacer or an adhesive spacer. Moreover, it will be apparent to those skilled in the art that the spacer of the present invention can be formed from an opaque material (e.g., a di-black resin) to avoid light leakage. In the present invention, a light-shielding pattern is formed on a CF substrate or an opaque film layer on a TFT substrate, and a spacer is formed in a back_exp〇sure process. It should be noted that, based on the technology disclosed in the above embodiments, the present invention can adjust the light corresponding to the opening position by designing the opening size defined by the light shielding pattern (ie, the gap sub-region described above). The depth of exposure is blocked, and the gaps of different heights can be formed at the same time (hybrid 25 1258619 15836twf.doc/y (4)". The design with different heights will help to improve the pressure resistance of the liquid crystal display panel. It is more conducive to increasing the operation interval of dropping liquid crystal into the liquid crystal. Please refer to Fig. 15 and Fig. 16, wherein Fig. 15 shows the relationship between the height of the convex structure of the different shapes and sizes of the light. Figure 16 is a schematic view showing the size of the opening defined by the different masks in Fig. 15. The horizontal coordinate shown in Fig. 15 is the opening size of the mask, and the vertical coordinate is the convex structure formed. The height of the figure, wherein the 15th figure lists the reticle openings of different shapes such as a shape, a rectangle, a square, and an octagon, and the size of the reticle opening of these shapes is indicated by the symbol s in Fig. 16. It is obvious from Fig. 15. It has been found that different heights of the protrusion structure can be formed corresponding to different opening sizes. In more detail, by the design of the mask opening ruler, the exposure depth of the corresponding photoresist can be controlled, and thus formed after development. The height of the raised structure may vary. In combination with the above-described techniques of back exposure and adjustment of the reticle opening, the present invention can simultaneously form raised structures of different heights in the liquid crystal display device as a spacer. (Hybrid spacer), the method for forming the convex structure of the same or different heights of the present invention will be exemplified hereinafter, and the contents of all the above embodiments can be incorporated into the following. 17A to 17D, which sequentially illustrate the manufacturing method of the raised ridge structure of the present invention. ^ First, as shown in Fig. 17A, a substrate 1 〇 1 〇 is provided, wherein the substrate 1010 is, for example, the color filter described above. a substrate or a thin film transistor array 26 1258619 15836 twf. doc / y column substrate, and the substrate 1010 has a corresponding one of the first surface 1012 and a second surface 1014. In addition, the first of the substrate 1010 The surface 1012 has a light shielding pattern 1020. The light shielding pattern 1020 is, for example, the black matrix, the color filter, the scan line or the first metal layer (Metal One), or the data line or the second metal layer (Metal Two). The plurality of openings 1022 are defined, and the opening 1022 is, for example, the gap sub-region described above.
接著,如第17B圖所示,在基板1010上形成一光阻 1030,其係覆蓋遮光圖案1〇2〇,且此光阻1〇3〇例如是負 光阻。 、 然後,如第17C圖所示,以遮光圖案1〇2〇為罩幕, 而由基板1010之第二表面1014的一側對光阻1〇3〇進行背 向曝光。其中,依據第15圖所繪示之光罩開口尺寸與凸起 結構高度的關係圖,例如可選擇其中一種形狀之光罩設 計,並且對應第15圖中之關係曲線,來設計遮光圖案1〇= 之開口 1G22的形狀與尺寸。在—較佳實施例中,例如可妒 之開口 1G22’並藉由開σ 1G22的尺寸來調整開口/ 1022處之光阻1030的曝光深度。 之後,如第17D圖所示,將光阻1〇3〇顯影,而 對應於開口 1022的多個凸起結構1〇32。 減 構曝光深度’其所形成之凸起結 ◎考第18圖’其緣示為同時具有不同高度之凸起 27 1258619 15836twf.doc/y 、:構的基^。其巾,基板上之遮光圖案1㈣具有不 同^寸之第一開口 1〇22a與第二開口 1〇2沘,而借由這些 ^開,i〇22a與第二開口 i〇22b,便可經過形成光阻、 背向曝光以及顯影等步驟,同時形成具有不同高度之第一 凸起結構l032a與第二凸起結構1032b。舉例而言,第一 凸起結構l〇32a與第二凸起結構1〇32b之高度差例如是 • 叫111 ’而可將這些第-凸起結構1032a與第二凸起結構 ‘ 1 〇32b曰作為間隙子,以形成具有混合間隙子(hybrid Spacers) . 之液晶顯示器面板。以上述之第5圖、第11圖與第12圖 所揭不之液晶顯示器裝置的結構為例,第19〜21圖分別繪 示其具有不同高度之間隙子的示意圖。 如第19圖所示,係以彩色濾光片基板1〇〇上之黑色 矩陣150作為遮光圖案,其中黑色矩陣15〇係界定不同尺 寸^間隙子區域152a與152b,以在進行光阻塗佈、背向 曝光與顯影等步驟之後,於彩色濾光片基板100上形成不 同高度之間隙子18〇&與180b。 鲁 此外,如第20圖所示,係以彩色遽光片56〇作為遮 , 光圖案,其中彩色濾光片560界定不同尺寸之間隙子區域 • 552a與552b,且彩色濾光片560内更例如可添加光吸收 劑,以增加其遮光效果。同理,在進行光阻塗佈、背向曝 光與顯影等步驟之後,便可在彩色濾光片基板5〇〇上形成 不同高度之間隙子580a與580b,其中關於其他構件與其 製作方法的說明請參考上述實施例,在此不再重複贅述。 另外,如第21圖所示之薄膜電晶體基板62〇上製作 28Next, as shown in Fig. 17B, a photoresist 1030 is formed on the substrate 1010, which covers the light-shielding pattern 1〇2〇, and the photoresist 1〇3〇 is, for example, a negative photoresist. Then, as shown in Fig. 17C, the light-shielding pattern 1〇2〇 is used as a mask, and the photoresist 1〇3〇 is back-exposed by the side of the second surface 1014 of the substrate 1010. According to the relationship between the size of the opening of the reticle and the height of the convex structure according to FIG. 15, for example, a reticle design of one of the shapes may be selected, and the opaque pattern is designed corresponding to the relationship curve in FIG. = The shape and size of the opening 1G22. In the preferred embodiment, for example, the opening 1G22' can be opened and the exposure depth of the photoresist 1030 at the opening / 1022 can be adjusted by the size of the opening σ 1G22. Thereafter, as shown in Fig. 17D, the photoresist 1 〇 3 〇 is developed to correspond to the plurality of convex structures 1 〇 32 of the opening 1022. The convex depth formed by the reduction of the exposure depth is shown in Fig. 18, and the edge is shown as a protrusion of 27 1258619 15836twf.doc/y, which is a different height. The towel, the light-shielding pattern 1 (4) on the substrate has different first openings 1〇22a and second openings 1〇2沘, and by means of these openings, i〇22a and the second opening i〇22b, Steps of forming a photoresist, back exposure, and development are performed while forming a first bump structure 103a and a second bump 1032b having different heights. For example, the height difference between the first convex structure 32a and the second convex structure 1b32b is, for example, 111', and the first convex structure 1032a and the second convex structure '1 〇32b曰 is used as a spacer to form a liquid crystal display panel having hybrid spaces. Taking the structure of the liquid crystal display device disclosed in Figs. 5, 11 and 12 as an example, the 19th to 21st drawings respectively show the spacers having different heights. As shown in Fig. 19, the black matrix 150 on the color filter substrate 1 is used as a light-shielding pattern, wherein the black matrix 15 defines different sizes of the spacer sub-regions 152a and 152b for photoresist coating. After the steps of back exposure and development, spacers 18 〇 & and 180 b of different heights are formed on the color filter substrate 100. In addition, as shown in Fig. 20, a color light-receiving sheet 56 is used as a masking and light pattern, wherein the color filter 560 defines gap sub-regions 552a and 552b of different sizes, and the color filter 560 is further For example, a light absorbing agent may be added to increase its light blocking effect. Similarly, after performing the steps of photoresist coating, back exposure and development, spacers 580a and 580b of different heights can be formed on the color filter substrate 5, wherein the description of other members and their fabrication methods is described. Please refer to the above embodiment, and the details are not repeated here. Further, as shown in Fig. 21, the thin film transistor substrate 62 is fabricated 28
1258619 15836twf.doc/y 有彩色濾光片660之結構(積層型彩色濾光片,c〇1〇r on array,COA),其中配置於像素電極628上之彩色濾光 片660同樣可界定出不同尺寸之間隙子區域與 652b,因此可形成不同高度之間隙子68加與68此。” 關於第19〜21圖中所繪示之其他構件與其製作方 法,請參考前述實施例之說明,在此不再重複贅述。 當然’除了上述第19〜21圖所繪示之實施例之外,本發明 亦可同時藉由黑色矩陣與彩色滤光片界定不同尺寸之間隙 子區域。此外,位於黑色矩陣上之間隙子例如可對應於tft 基,上之薄膜電晶體、掃描線路、f料線路等部分,而位 於%色濾、光片上之間Pt子例如謂應於TFT基板上之輔助 電容電極,而不致影響液晶顯示器裝置之開口率(叩恤代 _〇)。換言之,在較佳實施例中,間隙子係位於lcd裝 置之非動態部份相對應之部分上,該部份包括在該tft基 板上之源極匯流線(掃描線路)、閘極匯流線(資料線路)、輔 助電容電極、以及薄膜電晶體。 制’本發明之用以形成凸起結構的技術除可應用於 乂曰子之外,若應用於多域垂直配向㈣咖嶋匕 alignment’MVA)之液晶顯示器裝置時,亦可在製作 地在她^ 29 1258619 15836twf.doc/y 二開口 1132,其中第一開口 1122的尺寸例如約為2〇μιη, 第*一開口 1132的尺寸約為11 μηι,而其所形成之第^一凸起 結構1142與第二凸起結構1144的高度例如分別是斗卜㈤與 1·4μιη,兩者具有約2·6μηι之高度差。當然,形成此高度 差所需之開口的尺寸亦可例如由第15圖所列舉之光罩開 口與凸起結構高度之關係曲線求得。高度為知㈤之第一凸 起結構1142可作為間隙子,而高度為14jLlm之第二凸起 結構1144可作為配向凸起。 請參考第23圖,本發明例如更可在上述之彩色濾光 片1130所界定的第二開口 1132内保留部分之遮光圖案 1150,其例如是彩色濾光片或黑色矩陣,而藉由此保留之 遮光圖案114G可控制第二開口 m2内之光阻的曝光深 度,以調整所形成之第二凸起結構(配向凸起)的高度。 值得一提的是,如第22或23圖所述之黑色矩陣 1120,亦可同時界定多種尺寸之開口,以形成不同高度之 間隙子,進而提供同時具有混合間隙子與配向凸起之液晶 顯示器裝置。此外,上述之製作方式·可應驗薄膜電 晶體基板上之_子與配向凸起之製作n悉此技藝者 應可參考上述實施例與說明,輕易推知,故不再一一資 綜上所述,本發明至少具有下列特徵與優點: ()間隙子係直接置於該玻璃基板上,並且 以在承受了-壓力或力量之後,該液晶顯示器 袭置此夠充分地恢復以及該單元間隙能夠保持一致。 (二)可藉由遮光圖案上之開口尺寸來調整曝光深度, 1258619 15836twf.doc/y 以同時形成不同高度之凸起結構,其可作為間隙子或配向 凸起,因此有助於減少使用之光罩數與製程數,進而提言 生產效率,並可降低製作成本。 阿 (三)不同高度之間隙子有助於在液晶滴下式(〇此 Drop Fill)之加工製程中,進一步加大滴入液晶量的操作區 間,以提高生產良率。 、 雖然本發明已以較佳實施例揭露如上,然其並非用以 _ 限定本發明,任何熟習此技藝者,在不脫離本發明之精神 和範圍内,當可作些許之更動與潤飾,因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 第1圖為一具有球形間隙子之習用LCD裝置之橫剖 面不意圖。 第2圖為一具有突出圖案間隙子之習用lcd裝置之 橫剖面示意圖。 第3圖為該間隙子直接置於一玻璃基板之上,以及其 ’具有一彩色濾光片層介在該間隙子與玻璃基板間之應力_ 應變圖形。 第4a圖為根據本發明之一 LCD裝置之一彩色淚光片 基板之平面示意圖。 第4b圖為沿者第5a圖之剖面線5b-5b之彩色濾、光片 基板之橫剖面示意圖。 第4c圖為沿者第5a圖之剖面線5c-5c之彩色濾、光片 基板之橫剖面示意圖。 31 1258619 15836twf.doc/y 第5圖為根據本發明之一實施例之LCD裝置之部份 橫剖面不意圖。 第6至10圖為根據本發明之一 LCD裝置之一彩色濾 光片基板之之製造方法之剖面示意圖。 第11圖為根據本發明之另一實施例之LCD裝置之部 份橫剖面示意圖。 第12圖為根據本發明之另一實施例之LCD裝置之部 份橫剖面示意圖。 第13圖顯示根據本發明另一實施例之一彩色濾光片 基板800。 第14圖顯示根據本發明另一實施例之一彩色濾光片 (Color Filter ; CF)基板 9〇〇。 " 第15圖繪示為不同形狀與尺寸之光罩開口對應於其 所形成之凸起結構高度的關係圖 第16 _示為第15圖中不同光罩所定義之開口尺寸 的示意圖。 作方ί以〜咖圖’其依精示本發明之凸起結構的製 會:為同時具有不同高度之凸起結構的基板。 ί 22〜Ξ„不同高度之間隙子的示意圖 第 圖4不為本發明之較佳實施 片基板的示意圖。 種和色濾先 第23圖纷不為本發明之較 光片基板的局部俯視示賴。 例之另—種衫色慮 32 1258619 15836twf.doc/y 【主要元件符號說明】1258619 15836twf.doc/y has a color filter 660 structure (stacked color filter, c〇1〇r on array, COA), wherein the color filter 660 disposed on the pixel electrode 628 can also be defined The gap sub-regions of different sizes are combined with 652b, so that gaps 68 and 68 of different heights can be formed. For the other components and the manufacturing method of the first embodiment, please refer to the description of the foregoing embodiments, and the details are not repeated here. Of course, except for the embodiments shown in the above 19th to 21st. In the present invention, the gap sub-regions of different sizes can be defined by the black matrix and the color filter at the same time. In addition, the spacers on the black matrix can correspond to, for example, the tft base, the thin film transistor, the scan line, and the f material. The portion such as the line, and the Pt between the % color filter and the optical sheet, for example, is applied to the auxiliary capacitor electrode on the TFT substrate, without affecting the aperture ratio of the liquid crystal display device. In other words, it is preferable. In an embodiment, the gap sub-system is located on a corresponding portion of the non-dynamic portion of the lcd device, the portion including the source bus line (scanning line), the gate bus line (data line), and the auxiliary on the tft substrate. Capacitor electrode, and thin film transistor. The technique for forming a convex structure of the present invention can be applied to a multi-domain vertical alignment (four) coffee 嶋匕 alignment 'MVA) liquid, in addition to a scorpion. In the case of the display device, the second opening 1132 can also be made at the location of the first opening 1122, for example, the size of the first opening 1122 is about 2 μm, and the size of the first opening 1132 is about 11 μm. The heights of the first raised structure 1142 and the second raised structure 1144 formed by the first raised structure 1142 and the second raised structure 1144 are, for example, a sum of (5) and 1·4 μηη, respectively, which have a height difference of about 2·6 μηι. Of course, it is necessary to form the height difference. The size of the opening can also be obtained, for example, by the relationship between the opening of the reticle and the height of the convex structure as exemplified in Fig. 15. The first convex structure 1142 having a height of (5) can be used as a spacer and the height is 14jLlm. The second raised structure 1144 can serve as an alignment protrusion. Referring to FIG. 23, the present invention can further retain a portion of the light shielding pattern 1150 in the second opening 1132 defined by the color filter 1130, for example, a color filter. The light sheet or the black matrix, and the light-shielding pattern 114G thus retained can control the exposure depth of the photoresist in the second opening m2 to adjust the height of the formed second convex structure (alignment protrusion). Is, as the second The black matrix 1120 described in FIG. 2 or 23 can also define openings of various sizes to form spacers of different heights, thereby providing a liquid crystal display device having both a mixed gap and an alignment protrusion. · Manufacture of _ sub- and alignment protrusions on a thin-film transistor substrate. Those skilled in the art should be able to easily refer to the above embodiments and descriptions, and therefore will not be described in detail, and the present invention has at least the following Features and Benefits: () The gap sub-system is placed directly on the glass substrate, and after being subjected to -pressure or force, the liquid crystal display is sufficiently restored and the cell gap can be kept consistent. (2) The exposure depth can be adjusted by the size of the opening on the shading pattern, 1258619 15836twf.doc/y to form a convex structure of different heights at the same time, which can be used as a gap or a directional protrusion, thereby helping to reduce the use of The number of masks and the number of processes, which in turn leads to production efficiency and lower production costs. A (3) The gaps of different heights help to further increase the production yield of the liquid crystal in the processing process of the liquid drop type (Drop Fill). Although the present invention has been described in the above preferred embodiments, it is not intended to limit the invention, and those skilled in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view of a conventional LCD device having a spherical spacer. Figure 2 is a schematic cross-sectional view of a conventional lcd device having a protruding pattern spacer. Figure 3 is a diagram showing the spacer directly placed on a glass substrate and having a color filter layer interposed between the spacer and the glass substrate. Figure 4a is a plan view of a colored tear film substrate of one of the LCD devices in accordance with the present invention. Fig. 4b is a schematic cross-sectional view of the color filter and the optical sheet substrate along the section line 5b-5b of Fig. 5a. Fig. 4c is a schematic cross-sectional view of the color filter and the optical sheet substrate along the section line 5c-5c of Fig. 5a. 31 1258619 15836 twf.doc/y Fig. 5 is a partial cross-sectional view of an LCD device according to an embodiment of the present invention. 6 to 10 are schematic cross-sectional views showing a method of manufacturing a color filter substrate of an LCD device according to the present invention. Figure 11 is a cross-sectional view showing a portion of an LCD device in accordance with another embodiment of the present invention. Figure 12 is a cross-sectional view showing a portion of an LCD device in accordance with another embodiment of the present invention. Figure 13 shows a color filter substrate 800 in accordance with another embodiment of the present invention. Figure 14 shows a color filter (CF) substrate 9 根据 according to another embodiment of the present invention. " Fig. 15 is a view showing the relationship between the reticle opening of different shapes and sizes corresponding to the height of the convex structure formed therein. Fig. 16 is a schematic view showing the opening size defined by the different masks in Fig. 15. The process of embossing the convex structure of the present invention is a substrate having a convex structure of different heights at the same time. ί 22 Ξ 示意图 示意图 示意图 不同 不同 不同 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图 示意图Lai. Another example - the color of the shirt 32 1258619 15836twf.doc / y [main symbol description]
30 TFT基板 40 41 玻璃基板 43 45 間隙子 49 61 TFT基板 69 71 彩色濾光片基板 79 100 CF基板 120 140電極層 150 152間隙子區域 152a間隙子區域 152b 160彩色濾光片 160a 160b彩色濾光片 160c 170配向膜 180 180a間隙子 180b 182負光阻 184 200 LCD裝置 210液晶材料 212 220 TFT基板 222 224閘極 225 226輔助電容線 227 228像素電極 229a 22%汲極區域之金屬層 233 234配向膜 500 CF基板 520 CF基板 彩色濾光片層 液晶材料層 液晶材料 間隙子 玻璃基板 黑色矩陣 間隙子區域 彩色濾光片 彩色濾光片 間隙子 間隙子 紫外光線 空腔 玻璃基板 閘極線 半導體層 源極區域之金屬層 絕緣膜 玻璃基板 33 1258619 15836twf.doc/y30 TFT substrate 40 41 glass substrate 43 45 spacer 49 61 TFT substrate 69 71 color filter substrate 79 100 CF substrate 120 140 electrode layer 150 152 gap sub-region 152a gap sub-region 152b 160 color filter 160a 160b color filter Sheet 160c 170 alignment film 180 180a spacer 180b 182 negative photoresist 184 200 LCD device 210 liquid crystal material 212 220 TFT substrate 222 224 gate 225 226 auxiliary capacitance line 227 228 pixel electrode 229a 22% drain metal layer 233 234 alignment Film 500 CF substrate 520 CF substrate color filter layer liquid crystal material layer liquid crystal material spacer glass substrate black matrix gap sub-region color filter color filter spacer spacer ultraviolet light cavity glass substrate gate line semiconductor layer source Metal layer insulating film glass substrate of pole region 33 1258619 15836twf.doc/y
550黑色矩陣 552a間隙子區域 560彩色濾光片 580a間隙子 610液晶材料 620薄膜電晶體基板 623基板 624閘極 629源極 652間隙子區域 652a間隙子區域 660彩色濾光片 680a間隙子 700 LCD裝置 800彩色濾光片基板 852間隙子區域 860b彩色濾光片 878 開口 900彩色濾光片基板 952間隙子區域 960b彩色濾光片 980間隙子 S 光罩開口的尺寸 1010基板 552 間隙子區域 552b 間隙子區域 580 間隙子 580b 間隙子 612 空腔 622 透明基板 628 像素電極 634 向膜 652b 間隙子區域 680 間隙子 680b 間隙子 850 黑色矩陣 860a 彩色濾光片 860c 彩色濾光片 880 間隙子 950 黑色矩陣 960a 彩色濾光片 960c 彩色濾光片 987 保持電容區域 1012 第一表面 34 1258619 15836twf.doc/y 1014第二表面 1020 遮光圖案 1022 開口 1022a 第一開口 1022b 第二開口 1030 光阻 1032 凸起結構 1032a 第一凸起結構 1032b第二凸起結構 1120 黑色矩陣 1122 第一開口 1132 第二開口 1142 第一凸起結構 1144 第二凸起結構 1150 遮光圖案 35550 black matrix 552a gap sub-region 560 color filter 580a spacer 610 liquid crystal material 620 thin film transistor substrate 623 substrate 624 gate 629 source 652 gap sub-region 652a gap sub-region 660 color filter 680a spacer 700 LCD device 800 color filter substrate 852 gap sub-region 860b color filter 878 opening 900 color filter substrate 952 gap sub-region 960b color filter 980 spacer S photomask opening size 1010 substrate 552 gap sub-region 552b spacer Region 580 spacer 580b spacer 612 cavity 622 transparent substrate 628 pixel electrode 634 to film 652b gap sub-region 680 spacer 680b spacer 850 black matrix 860a color filter 860c color filter 880 spacer 950 black matrix 960a color Filter 960c Color Filter 987 Retention Capacitor Region 1012 First Surface 34 1258619 15836twf.doc/y 1014 Second Surface 1020 Shading Pattern 1022 Opening 1022a First Opening 1022b Second Opening 1030 Photoresist 1032 Raised Structure 1032a First Raised structure 1032b second raised structure 1120 black matrix 1 122 first opening 1132 second opening 1142 first convex structure 1144 second convex structure 1150 light shielding pattern 35
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TW94103549A TWI258619B (en) | 2005-02-04 | 2005-02-04 | Liquid crystal display device, color filter substrate and protrusion structure thereof, and manufacturing method therefor |
KR1020050012350A KR101121211B1 (en) | 2004-02-17 | 2005-02-15 | Liquid crystal display device, color filter substrate and protruding structure, and manufacturing method thereof |
US11/059,074 US7738067B2 (en) | 2004-02-17 | 2005-02-16 | Method of manufacturing spacers on a color filter substrate |
JP2005039262A JP2005234570A (en) | 2004-02-17 | 2005-02-16 | Liquid crystal display device, color filter substrate, and protruding structure, and manufacturing method thereof |
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TWI258619B true TWI258619B (en) | 2006-07-21 |
TW200628905A TW200628905A (en) | 2006-08-16 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7817239B2 (en) | 2007-11-07 | 2010-10-19 | Au Optronics Corporation | Liquid crystal display panel and manufacturing method thereof |
US8034517B2 (en) | 2007-01-03 | 2011-10-11 | Au Optronics Corporation | Color filter and manufacturing method thereof |
TWI381425B (en) * | 2007-11-26 | 2013-01-01 | Japan Display West Inc | Method of manufacturing electronic device and electronic device |
CN103217826A (en) * | 2013-04-25 | 2013-07-24 | 深圳市华星光电技术有限公司 | Liquid crystal display panel |
TWI459100B (en) * | 2009-08-10 | 2014-11-01 | Innolux Corp | Liquid crystal panel and manufacturing method thereof |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101462061B1 (en) * | 2006-09-29 | 2014-11-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Semiconductor device |
-
2005
- 2005-02-04 TW TW94103549A patent/TWI258619B/en not_active IP Right Cessation
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8034517B2 (en) | 2007-01-03 | 2011-10-11 | Au Optronics Corporation | Color filter and manufacturing method thereof |
US7817239B2 (en) | 2007-11-07 | 2010-10-19 | Au Optronics Corporation | Liquid crystal display panel and manufacturing method thereof |
TWI381425B (en) * | 2007-11-26 | 2013-01-01 | Japan Display West Inc | Method of manufacturing electronic device and electronic device |
TWI459100B (en) * | 2009-08-10 | 2014-11-01 | Innolux Corp | Liquid crystal panel and manufacturing method thereof |
CN103217826A (en) * | 2013-04-25 | 2013-07-24 | 深圳市华星光电技术有限公司 | Liquid crystal display panel |
CN103217826B (en) * | 2013-04-25 | 2016-02-03 | 深圳市华星光电技术有限公司 | Liquid crystal panel |
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Publication number | Publication date |
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TW200628905A (en) | 2006-08-16 |
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