TWI238956B - Manufacturing method and the time tables on arranging the yield of each semiconductor factory - Google Patents
Manufacturing method and the time tables on arranging the yield of each semiconductor factory Download PDFInfo
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12389561238956
發明領域 本發明係關於一種工廠的貨物生產排程方法,特別有 關於在一種投產時才指定貨物生產廠別的生產排程方法。 發明背景 ° 對於大型代工半導體廠來說,通常客戶會在數月或幾 季前先給代工廠一筆訂單需求預估(demand forecast), 接著代工廠根據旗下各廠目前的生產排程狀況,由負責接 單人員進行此筆需求的預先排程(Demand planning),而 生產排程在產品碼後編入廠別,因此缺乏彈性。 參見第la-li圖’用以說明一般半導體的訂單製造的 排程。在第la圖中,客戶在數季前預定一筆訂單,該訂單 之數量為1 5單位晶圓,其中每單位為1 〇 〇 〇片晶圓。在接到 該訂單後,如第1 b圖,訂單管理者給該訂單產品一 TM3388A之產品號,接著根據各廠内的生產排程狀況以及 各廠可以處理的技術能力,預先安排製造此筆訂單的廠別 與數分別為2薇4皁位’3廠7單位,5廠4單位。而參見 第lc圓,在訂單管理者進一步根據該預先排程進行詳細配 額計晝(allocation planning)時,卻有時會發現,原來 的分配無法完全達成,5廠只能容納3單位,無法達到4單 位’因此產生超額(non - support demand,NSD)1單位。 δ上述超額情況產生時’參見第Id圖,訂單管理者 重新管理配額(allocation management),查詢廠内的各 筆訂單的優先順序,進行產能交換,如:延後某些優先順 序較低的訂單或測試製程,以容納該筆訂單的所有數量,FIELD OF THE INVENTION The present invention relates to a method for scheduling production of goods in a factory, and more particularly, to a method for scheduling production of another goods in a production factory only when it is commissioned. Background of the Invention ° For large foundry semiconductor factories, customers usually give the foundry a demand forecast for months or seasons, and then the foundry according to the current production schedule of its factories, The person in charge of the order performs the required planning of this demand (Demand planning), and the production schedule is programmed into the factory after the product code, so it is not flexible. Refer to the la-li diagram 'to illustrate the general order manufacturing schedule of semiconductors. In Figure la, the customer orders an order several seasons in advance. The order quantity is 15 units of wafers, of which each unit is 1,000 wafers. After receiving the order, as shown in Figure 1b, the order manager gives the order product a TM3388A product number, and then according to the production schedule in each factory and the technical capabilities that each factory can handle, arrange to make this in advance The factory type and number of the order are 2 units, 4 units, 3 units, 7 units, and 5 units, 4 units. And referring to circle lc, when the order manager further carried out detailed allocation planning according to the pre-scheduled schedule, sometimes it was found that the original allocation could not be fully achieved, and the 5 plant could only accommodate 3 units, which could not be reached. 4 units' therefore results in a non-support demand (NSD) of 1 unit. δ When the above excess occurs, see Figure Id. The order manager re-allocates the allocation (allocation management), queries the priority order of each order in the factory, and exchanges capacity, such as postponing some orders with lower priority. Or test processes to accommodate all the quantities of the order,
1238956 五、發明說明(2) 而調整過後所得到得結果是2廠5單位、3廠6單位、而5廠4 單位。之後,參照第1 e圖,以上述配額管理的結果作為該 筆訂單排程(output planning)的編號依據,並在製造執 行系統(manufacture execution system,MES)中根據指 定的廠別排定時程。由於該筆訂單排定分成三批於三個廠 中投產,因此該筆訂單的三批編號分別為TM3388A —NBZ2、 TM3388A-NBZ3與TM3388A-NBZ5,其中尾碼代表投產的廠別 。因此則在Μ E S系統中,排定在2、3與5廠分別生產代號為 ΤΜ3388Α-ΝΒΖ2 、ΤΜ3388Α-ΝΒΖ3 與ΤΜ3388Α-ΝΒΖ5 的5 、6 與4 單位的產品。 ^ 而當客戶確認下單(order entry)且首批投產數量為4 單位,則參見第If圖,先進行投產前的排程(order management),由訂單管理者在MES系統中排定此三廠中可 用的產能,分別排定在2廠生產TM3 388A-NBZ2, 1單位、3 廠TM3388A-NBZ3,2 單位而 5 廠TM3388A-NBZ5, 1 單位,排 定產生的結果如第1 g圖。當排程結果產生時,則實際進行 投產的> 動作,如第lh圖。然而投產的狀況未必與各廠目前 的狀況相符,如第li圖,實際各廠目前可生產的單位數為 2廠1單位、3廠1單位、而5廠2單位。將第lh與li圖對照, 3廠預定投產2單位,然而實際只能容納丨單位。若要將3廠 無法谷納的1單位轉至尚有產能的5廠時,則因為該單位之 編號為TM3388A-NBZ3 ,已限制必須在3廠生產,無法轉移 到5廠。 在上述情況中,由於在進行生產排程時,太早將廠別1238956 V. Description of the invention (2) After adjustment, the results obtained are 2 units and 5 units, 3 units and 6 units, and 5 units and 4 units. Then, referring to Figure 1e, the result of the above quota management is used as the number basis for this order planning (output planning), and the scheduling is scheduled according to the designated factory in the manufacturing execution system (MES) . Since the order is scheduled to be put into production in three batches in three plants, the three batches of the order are TM3388A-NBZ2, TM3388A-NBZ3 and TM3388A-NBZ5, where the last code represents the plant type that was put into production. Therefore, in the MES system, it is scheduled to produce 5, 6, and 4 units of products coded as TM3388A-ΝΒZ2, TM3388A-ΝΒZ3, and TM3388A-ΝΒZO5 in plants 2, 3, and 5, respectively. ^ When the customer confirms the order entry and the first batch of production is 4 units, refer to Figure If, first perform order management before production, and the order manager will schedule these three in the MES system. The available capacity in the plant is scheduled to produce TM3 388A-NBZ2, 1 unit in Plant 2, 3 units of TM3388A-NBZ3, 2 units, and TM3388A-NBZ5, 1 unit in Plant 5, respectively. When the scheduling result is generated, the actual > action of production is performed, as shown in Fig. Lh. However, the status of production may not be consistent with the current status of each plant. As shown in Figure li, the actual number of units that each plant can currently produce is 2 plants, 1 unit, 3 plants, 1 unit, and 5 plants, 2 units. Comparing the lh chart with the li chart, the 3 factories are scheduled to put into production 2 units, but the actual capacity can only accommodate 丨 units. If you want to transfer 1 unit that can't be harvested from plant 3 to plant 5 with capacity, because the unit number is TM3388A-NBZ3, it is restricted to produce in plant 3 and cannot be transferred to plant 5. In the above case, because the factory
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與產品編號結合, 缺乏彈性,因此常 的訂單無法順利完 花費大量力氣進行 與各生產線的產能 發明簡述 導致在實際投產時 常跟實際線上作業 成而延誤交貨。而 訂單管理,以使代 間可以配合。 ,代工廠的生產排程 無法配合,導致預估 訂單管理者往往需要 工廠的中央管理系統 為了使得半導體代工廠的訂單排程更為彈性,本發 以二ΐ ?的在於提供一種半導體製造^生產排程方法,可 產Π口正式投產前才編入生產廠別。 t發明的再一個目的在於提供一種在投產時指定廠別 、生產排程方法,用以隨時彈性調配貨物的製造廠別。 t發明的另一個目的在於提供一種在投產時指定廠 的生產排程方法,避免受到在生產排程時受到廠號限制。 、 本發明,一種在投產時指定廠別的生產排程方法,可 適用於在一具有多個製造廠的公司,如半導體代工公司, 在接單的產品正式投產之前安排一生產計畫,其步驟包括 先由客戶端接收一預訂單(demand forecast),其中預 訂單中會包含客戶所欲下單生產之產品之、產品數量與該 產品的製造要求資料等等,在收到該預定單後,先指定二 產品號給該產品。接著,根據預訂單中預定之製造數量, 在該公司之該複數個製造廠中選擇至少兩個指定廠 (allocation Pianning),而該等指定廠的總產能可容納 生產該既定數量之產品。當公司確認可以排入該筆預定單 後,則排定一生產計畫(outpui: planning),在各指定廠早In combination with the product number, it lacks flexibility, so regular orders cannot be successfully completed. It takes a lot of effort to carry out the production capacity of each production line. Brief description of the invention leads to delays in delivery due to the actual online operation during actual production. And order management to enable intergenerational coordination. However, the foundry's production schedule cannot be matched, leading to estimated order managers often need the factory's central management system. In order to make the semiconductor foundry's order scheduling more flexible, the purpose of this issue is to provide a semiconductor manufacturing ^ production Scheduling method can be incorporated into the production plant category before the production can be officially put into production. Another object of the invention is to provide a method for specifying a factory type and a production schedule when it is put into production, so as to flexibly allocate the manufacturer type of the goods at any time. Another object of the invention is to provide a production scheduling method for a designated factory when it is put into production, so as not to be restricted by the factory number when it is scheduled for production. The present invention, a production scheduling method for designating a factory at the time of production, can be applied to a company with multiple manufacturing plants, such as a semiconductor foundry company, to arrange a production plan before the product that is ordered is officially put into production. The steps include receiving a demand forecast by the client first, where the booking order will contain the product that the customer wants to produce, the quantity of the product and the manufacturing requirements of the product, etc., upon receiving the booking order Then, first assign the second product number to the product. Then, at least two designated plants (allocation Pianning) are selected among the plurality of manufacturing plants of the company according to the predetermined manufacturing quantity in the order form, and the total capacity of the designated plants can accommodate the production of the predetermined quantity of products. When the company confirms that it can be included in the order, it schedules a production plan (outpui: planning) and
1238956 五、發明說明(4) -- I Ϊ入f產該產品號之產品的預定時程與預定生產量V當 確邁一部份數量之該產 ^ Γ " 八締分 κ说最後’根據該等指定廠當下之生產容量, S攄::Γ欲投產,產品在該各指定*中欲投產之數量,並 盘製果m品編號後的該批次號取代為各廠代號 與I:代碼1以代表在各廠中投產的該產品。 •於本發明在排定各廠可生產的配額(allocation —ng夺’並不將產品所在的廠號編入,而在最後要 二技產前,確認產品所分配到的製造廠與數量後,才將 ® μ編入產品號之後,因此正式投產前的生產排程中,可 調配產品在各廠間分配的數量,不受到廠號的限制 …了讓本發明之上述目的、特徵、及優點能更明顯易懂, 以下配合所附圖式,作詳細說明如下: 圖式簡單說明 第1 a-1 i圖所示為一般半導體的訂單製造的排程流程 示意圖。 第2圖所示為在本發明之一實施例中,在投產時指定 廠別的生產排程系統架構圖。 第3圖所示為依照本發明之一實施例之在投產時指定 廠別的生產排程方法流程圖。 第4a-4h圖所示為依照本發明之一實施例之半導體的 訂單製造的排程流程示意圖。 符號說明 202、204〜製造執行系統;1238956 V. Description of the invention (4)-I enter the scheduled time and production volume of the product produced by the product number V when the product is a certain amount of the product ^ Γ " Ba Difen κ said the last '' According to the current production capacity of these designated factories, S 摅 :: Γ is to be put into production, the number of products to be put into production in each of the specified *, and the batch number after the product m product number is replaced by each factory code and I : Code 1 represents the product put into production in each plant. • In the present invention, the quota (allocation -ng) that can be produced by each factory is not included in the factory number of the product, but before the second technical production is finalized, after confirming the manufacturer and the number of the product, Only after the ® μ has been incorporated into the product number, in the production schedule before formal production, the number of products that can be allocated among the factories is not limited by the factory number ... which allows the above-mentioned objects, features, and advantages of the present invention to It is more obvious and easy to understand, and the following detailed description is given in conjunction with the attached drawings: The drawings are briefly explained. Figures 1 a-1 i show the schematic flow chart of the general order manufacturing process of semiconductors. Figure 2 shows the In one embodiment of the invention, the architecture diagram of the production scheduling system of the designated factory at the time of commissioning is shown in FIG. 3. FIG. 3 shows a flowchart of the method of specifying the production schedule of the factory at the time of commissioning according to an embodiment of the present invention. Figures 4a-4h are schematic diagrams showing the scheduling flow of order manufacturing of a semiconductor according to an embodiment of the present invention. Symbols 202, 204 ~ manufacturing execution system;
0503 -6684TW ;TSMC2001 -0494; peggy. pt d 第8頁 1238956 五、發明說明(5) 206〜訂單管理系統; 2 0 8〜產能資料庫; 2 1 0〜生產排程伺服器; 302-310〜步驟。 實施例 首先參見第2圖,說明在本發明之一實施例中,進行 生產排程的系統架構圖。在多製造廠的半導體公司 個製造廠均有自己的製造執行系統(Manufacture 母0503 -6684TW; TSMC2001 -0494; peggy. ~step. Embodiment First, referring to FIG. 2, a system architecture diagram for production scheduling according to an embodiment of the present invention will be described. Semiconductor companies in multiple manufacturers have their own manufacturing execution systems (Manufacture
Execution System, MES),如:MES 202 與204 ,用以統 合、分配並追蹤各廠中的貨物製造進度與生產資料。另 外,半導體公司中,通常也有一訂單管理系統(〇rder management system,0M),如⑽2 06,用以處理客戶需求 預估或訂單動作。本發明可利用一資料庫,儲存來自mes 與〇M中的製造廠的產能狀況與客戶需求資料,如π資料庫 208,儲存公司裡不同製造廠的目前產能現況(Capacity Information)。而利用一伺服器,根據CI資料庫2〇8中的 各種產能資料,進行本發明之投產時才指定廠別的生產排 程(planning management, PM),如第2圖中的pm伺服器 210。 ° 參見第3圖,以一半導體製造公司的生產排程為例, 說明在投產時才指定廠別的生產排程方法流程。並參見第 4圖,辅助說明在生產排程時,一訂單需求在各階段的分 配狀況。在一具有多個製造廠,以及一MES系統的半導體 公司中’當客戶預先告知一製造需求時,如第“圖首先進Execution System (MES), such as MES 202 and 204, is used to integrate, allocate, and track the manufacturing progress and production data of goods in each factory. In addition, semiconductor companies usually also have an order management system (0M), such as ⑽2 06, for processing customer demand estimates or order actions. The present invention can use a database to store the capacity status and customer demand data from the manufacturing plants in mes and OM, such as the π database 208, which stores the current capacity information of different manufacturing plants in the company. And using a server, according to various capacity data in the CI database 208, when the invention is put into operation, the factory-specific production scheduling (PM) is specified, such as the PM server 210 in Figure 2 . ° Refer to Figure 3, using a semiconductor manufacturing company's production schedule as an example, to explain the method of specifying the factory's production schedule when it is put into production. See Figure 4 for an explanation of the distribution of demand for an order at each stage during production scheduling. In a semiconductor company with multiple manufacturing plants and a MES system, when a customer informs a manufacturing need in advance,
I 0503-6684TWF;TSMC2001-0494;peggy.ptd 第9頁 1238956I 0503-6684TWF; TSMC2001-0494; peggy.ptd Page 9 1238956
五、發明說明(6) 行步驟2 0 2 ··接收一預訂單,其令該 0 之數量與製造要求資料,如技術x s、早。广含一產品 該既定產&,如TM3389,生’位’ 5指定-產品號給 圓。如第4b圖。藉由該產4,母單位為1000片晶 生產排程。 /產-唬’可用以管理該產品後續的 ,由$ =步驟204 ·根據該預訂單中預定之製造數量 複數個製造廠中選擇至少兩個指定廠,而 的總產能可容納生產該既定數量之產品。在選 接=,首先考慮可以支援該產品製造技術的製造廠 技術條件符合的製造廠中,㈣產能剩餘量足夠 廠列人考量。根據符合的條件各製造廠,找出最適 =的個製造廠,用以承接該批產品,並將該產品之總數 量’根據指定之各廠剩餘產能,分配各廠製造數量。 在上述步驟中,當技術可支援的製造廠產能不足時, 如第4c圖的3、4與5廠,可進行產能管理(allocati〇n management)’利用產能交換的方式,排出可用之產能。 如:延後某些優先順序較低的產品訂單或測試製程, 使得指定的製造廠可以排出產能,以容納該筆訂單的所有 數量,如調整後的第4d圖的3、4、5與6廠,可完全容納該 筆需求。 、μ 之後,進行步驟206 :排定一生產計畫,在該等指定 薇中排入生產該產品號之產品的預定時程與生產量。生產 計晝可在該公司的MES系統中排定,包括該產品所欲分配 的指定製造廠,以及各廠預定生產的數量,如第4e圖,在V. Description of the invention (6) Step 2 0 2 ·· Receive a reservation order, make the quantity of 0 and the manufacturing requirements, such as technology x s, early. A product that contains a wide range of predetermined products & such as TM3389, raw 'bit' 5 designation-product number to round. As shown in Figure 4b. With this production 4, the mother unit is 1000 wafers. Production schedule. / Production-blind 'can be used to manage the follow-up of the product, from $ = step 204 · At least two designated factories are selected from a plurality of manufacturing factories according to the predetermined manufacturing quantity in the order, and the total capacity can accommodate the production of the predetermined quantity Products. In the option =, first consider the manufacturers that can support the manufacturing technology of the product. Among the manufacturers that meet the technical requirements, the remaining capacity of plutonium is sufficient for plant personnel to consider. According to the conditions that meet the requirements, each manufacturer finds the most suitable manufacturer to take over the batch of products, and assigns the total number of products to the manufacturing capacity of each factory according to the designated remaining capacity of each factory. In the above steps, when the production capacity supported by the technology is insufficient, such as the 3, 4 and 5 factories in FIG. 4c, allocating management can be used to exhaust the available capacity. For example: postponing certain lower-priority product orders or test processes, so that the designated manufacturing plant can discharge capacity to accommodate all the quantities of the order, such as 3, 4, 5 and 6 in Figure 4d after adjustment Factory, can fully accommodate this demand. After μ, proceed to step 206: schedule a production plan, and enter the scheduled time and production volume of the product with the product number in the specified Wei. The production schedule can be scheduled in the company's MES system, including the designated manufacturing plant to which the product is to be distributed, and the planned production quantity of each plant, as shown in Figure 4e.
0503-6684TWF;TSMC2001-0494;peggy.ptd 第10頁 1238956 五、發明說明(7) 第3、4、5與6廠的MES系統中,排定該筆所需的預定產能 。而在第4a至4e圖中,該批產品需求均以TM3389進行管理 〇 接著’當客戶端確認一部份數量之該產品正式投產時 ,如5單位,進行步驟208 :在該產品編號後編入一流水號 ,用以代表該批欲投產之產品,如TM3389-001。如第4f 圖,5單位的貨物分別分配為3廠2單位、4廠2單位與5廠1 單位’然各廠中的貨物均以TM3389 -00 1做為產品編號進行 管理。 最後’進行步驟210 :根據該等指定廠當下之生產容 量’分配該批欲投產之產品在該各指定廠中欲投產之數量 ’並根據分配結果將該產品編號後的該批次號取代為各廠 代號與製程代號’用以代表在各廠中投產的該產品。如, 第 4g 圖3、4 與5 廠的各編為TM3389-NBZ3、TM3389-NBZ4 與 TM3 389-NBZ5。由於該批貨物的製程均相同,因此製程代 號均為NBZ,其後數字則代表不同廠別。該編號可存入該 公司之MES系統中,作為該產品之製造管理編號。並依照 該結果進行晶圓投產(wafer start),如第4h圖。 藉由上述方法,在進行生產排程時,只編入產品碼與 批次碼,直到正式投產時再根據各指定製造廠的當下產能 進行製造數量的分配,並在產品碼後以廠別代號與製造代 碼取代該流水號。也因為編入廠號的時間在投產之前,因 此在進行最後的生產排程時,不會受限廠號,而可根據各 廠目前的生產狀況,彈性配置各廠間接單生產的數量,使0503-6684TWF; TSMC2001-0494; peggy.ptd Page 10 1238956 V. Description of the invention (7) In the MES system of the 3rd, 4th, 5th, and 6th factory, the predetermined capacity required for the pen is scheduled. And in Figures 4a to 4e, the requirements of the batch of products are managed by TM3389. Then 'When the client confirms that a part of the product is officially put into production, such as 5 units, go to step 208: edit after the product number The first-class water number is used to represent the batch of products to be put into production, such as TM3389-001. As shown in Figure 4f, 5 units of goods are allocated to 3 plants, 2 units, 4 plants, 2 units, and 5 plants, 1 unit. However, the goods in each plant are managed with TM3389-00 1 as the product number. Finally, proceed to step 210: Allocate the quantity of the batch of products to be put into production in each of the designated factories according to the current production capacity of the designated factories, and replace the batch number after the product number is based on the allocation result. Each plant code and process code 'is used to represent the product put into production in each plant. For example, the 4th plant in Figures 3, 4 and 5 are TM3389-NBZ3, TM3389-NBZ4 and TM3 389-NBZ5. Since the batches of the goods are all made in the same process, the process code is NBZ, and the subsequent figures represent different factories. This number can be stored in the company's MES system as the manufacturing management number of the product. Wafer start is performed according to the results, as shown in Figure 4h. With the above method, in the production schedule, only the product code and batch code are programmed, and the production quantity is allocated according to the current production capacity of each designated manufacturing plant until the formal production, and the product code is followed by the factory code The manufacturing code replaces the serial number. It is also because the time of programming the factory number is before the production, so when the final production schedule is carried out, the factory number will not be limited, and the number of indirect single production of each factory can be flexibly configured according to the current production status of each factory, so that
0503 -6684TW ;TSMC2001 -0494; peggy. pt d 第11頁 1238956 五、發明說明(8) 得投產前的生產排程更為靈活。 雖然本發明以較佳實施例揭露如上,然其並非用以限 定本發明,任何熟悉此項技藝者,在不脫離本發明之精神 和範圍内,當可做些許更動與潤飾,因此本發明之保護範 圍當視後附之申請專利範圍所界定者為準。0503 -6684TW; TSMC2001 -0494; peggy. Pt d p. 11 1238956 V. Description of the invention (8) The production schedule before production can be more flexible. Although the present invention is disclosed in the preferred embodiment as above, it is not intended to limit the present invention. Any person skilled in the art can make some modifications and retouching without departing from the spirit and scope of the present invention. The scope of protection shall be determined by the scope of the attached patent application.
0503-6684TWF;TSMC2001 -0494;peggy.p t d 第12頁0503-6684TWF; TSMC2001 -0494; peggy.p t d p. 12
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