TWI233115B - Optical information recording medium and manufacturing method - Google Patents

Abstract

The invention is an optical information recording medium and manufacturing method. To break limits of the diffraction, it uses Super-RENS (super resolution near field structure) for the optical information recording medium. The structure of the medium comprises a polycarbonate substrate, a dielectric layer, an mask layer, an interface layer, an recording layer, an reflective layer, and an UV-curing resin layer. The dielectric layer forms on the polycarbonate substrate by sputtering, and the mask layer, the interface layer, recording layer and the reflective layer forms one by one with the same method. At last, the UV-curing resin layer forms on the reflective layer by spin-on. The characteristic is that the material of the recording layer has high contrast, and high reflection difference between before recording and after recording. This can be used for Super-RENS, and makes the optical information recording medium be higher data density and read/write speed.

Description

1233115 V. Description of the invention (1) r [Technical field] The present invention relates to a recordable optical information recording medium and a manufacturing method thereof, and invents a material, a film structure, and a manufacturing method thereof, particularly through the invention. The material of the recording layer has high contrast characteristics and high reflectance contrast before and after writing. It can provide a recording medium for super-resolution near-field optical read-write signal technology that can achieve high-density and high-speed read-write. [Previous technology] Generally, the higher recording density of the general optical recording medium is the development trend of the storage medium. As the recording density continues to increase, the recording marks will become smaller and smaller. In theory, in an optical recording system, it is a focusing lens that transmits a shorter laser wavelength and a higher NA value to reduce the laser light spot and increase the recording density. [Technical problem to be solved] However, the size of the light spot of the aforementioned optical recording media is limited by the diffraction limit and cannot be reduced indefinitely, making it impossible to detect a s-recorded signal smaller than half the light spot, and As a result, the recording density is limited and cannot be improved. Theoretically, in an optical recording system, the optical diffraction limit that the laser light spot can reduce is about 0.61 / NA. A shorter laser wavelength and a higher value focusing lens can indeed reduce the laser light spot to a smaller size and Effectively increase the recording density. However, the short-wavelength laser with a power of less than 30mw and a lifespan that exceeds loooo hours is expensive and difficult to obtain. On the other hand, a focusing lens with a higher NA value represents its corresponding disc and The optical and mechanical characteristics of the disc player are even more stringent.

Page 6 1233115 V. Description of the invention (2) $$ 'In recent years, there have been bottlenecks in the use of near-field optical super-resolution technology applied to optical recording media to break through the diffraction limit of traditional optics, but the The recording layer is mostly made of materials such as GeSbTe or AglnSbTe, and such materials have low reflection contrast, which makes it impossible to meet the requirements of optical recording media for near-field optical super-resolution technology. Therefore, the present invention is based on the lack of a conventional optical recording medium and the improvement of the material of the recording layer. [Technical means to solve the problem] The method, regarding the present invention, is a recordable optical information recording medium and its manufacturer1: practically solving one or even several of the aforementioned related technologies, the substrate, a dielectric layer, a The above purpose of the mask layer and an interface layer, the present invention provides a recordable optical information f has been used in the method II. It is mainly through the near-field optical super-resolution technology should: record the media first, and break through the diffraction limit Bottleneck, and mainly includes the recording layer :: fί layer L, its characteristics and structure of the mask layer and recording layer Sb, Ag0x, thermochromic organic compound Such as Sb-N element-elemental oxygen-containing material 枓

Sb-N-0-M element composition of the nitrogen-containing oxygen material series # In the composition: M is a metal element in the composition, its,,,

Ag, Au, In, Bi, Pb, Pd, pf, nGe, Te, Bi, Sn, Έ A1 Sl, Ti, v, Cr, Mη 1233115 V. Description of the invention (3), Fe, Co, Ni, Cu '' Zn 'Ta, Ga, Zr, Nb, Mo, Ru, Rh,

Hf, W, Re, Os, lr, Dy Tb and one or more of these elements. Furthermore, the fabrication of each layer structure is to use a sputtering device to sputter the dielectric layer on the surface of the substrate, and also to sequentially form the mask layer, the interface layer, the recording layer, and the reflection by a sputtering process. Layer, and finally the resin is coated on the surface of the reflective layer by a spin coating method to form the protective layer. '[Effect on the prior art] Based on the aforementioned recordable optical information recording medium of the present invention and its manufacturing method', it can achieve the following functions and effects: 1 · The recordable optical information recording medium of the present invention has a good record And the δ characteristic of the recording layer. In particular, the reflectance comparison between the recording layer material's bef recording and after recording is significantly better than that of the conventional recording layer material. 2 · In the recordable optical information recording medium of the present invention, the contrast characteristics of the record ^ can increase the near-field signal strength, and significantly increase its read signal strength. 3 · Using the super-resolution near-field optical disc made of the recording layer material of the present invention, a mask layer is recorded between the recording layer and the substrate, which can read and write smaller signals in the recording layer And increase the read signal strength to achieve high speed and high recording density discs, and at the same time improve the disc's Carrier-to-noise ratio (CNR) and stable reading characteristics.

1233115 V. Description of the invention (4) [Embodiment] The following will further describe the preferred embodiment of the present invention in conjunction with the accompanying drawings. Referring to FIG. 1, a preferred embodiment of a recordable optical information recording medium and a manufacturing method thereof according to the present invention is shown, which is mainly a layered recording film layer structure and sequentially includes a substrate (1), a substrate The electrical layer (2), a masking layer (3), an interface layer (4), a recording layer (5), a reflective layer (6) and a protective layer (7). In the foregoing recording film layer structure, the substrate (1) is a film layer made of a material having translucency, such as polycarbonate resin (PC); the dielectric layer is directly covered on One side surface of the substrate (1) is a film layer composed of a group of ZnS-SiO2 materials with good dielectric properties; and the masking layer (3) is made of an opaque material (Such as AgOx-based materials), which can produce a very small perforation after being irradiated by the laser beam, and the laser beam passing through this perforation is controlled to a smaller diameter, so it can provide the near field The optical technology is used to read the data; the interface Lu (4) is also a film layer composed of a group of ZnS-Si02 materials with good dielectric properties; the recording layer (5) is mainly composed of a core-based material The structured film is a film layer made of a light emitting material, and is provided to protect the reflective layer from being polluted or corroded. In the description of the film layer structure, the manufacturing of each film layer structure: First, a sputtering device (sputter) is used to form a key on the surface of one of the substrates (1) = f to form a nanometer-scale (17nm) Zns_si surface 1233115 V. Description of the invention (5) The dielectric layer (2), followed by the same sputtering process to sequentially form AgOx (15nm), ZnS-SiO2 (40nm) nanometer-thickness ), SbNx (30 nm) and Ag (90 nm), the masking layer (3), the interface layer (4), the recording layer (5), and the reflecting layer (6) are formed respectively; finally, the spin coating method is used ( spin coating) coating the resin on the other surface of the reflective layer (6) to form the protective layer (7). The aforementioned dielectric layer (2) and the interface layer (4) may be ZnS or SiO2 or 31 ^ or 3 丨 02 or eight 1 core or 8 丨 (: or 3 丨 or 1 ^ 02 or 78 (^ etc or a mixture thereof). , The masking layer (3) may be composed of non-linear optical materials such as Sb, Ag0x, thermochromic organic compounds or phase changeable materials; the material of the recording layer (5) may be inorganic Materials such as 讥 邛 element composition or 讣 N-M το element composition ^ nitrogen-containing material series, Sb-0 element composition or outer-0-M element composition oxygen-containing material series, Sb-N_〇 element composition or Sb — N —〇_M is composed of a series of nitrogen-containing oxygen materials, in which the elbow system in the element composition represents a metal element, which can be Ge, Te, Bi, Sn, Ag, Au, In, Bx, Pb, Pd, Pt, A1, Si, Ti, v々, rib ..., co, Ni, Cu, Zn, Ta, Ga, Zr, Nb, Mo, RU, Rh, Hf, W, Re,

One or more elements such as Os, Ir, Dy Tb, etc .; the material of the reflective layer (6) may be composed of Au, Ag, Cu & A1 or an alloy thereof. Each of the foregoing materials having a multi-element composition should not have a specific ratio, and the thickness of the drawer layer and the thickness of the knife should also have a suitable range.堉 窝 = the recordable optical information recording medium of the present invention = the laser beam ⑴ generated by the reading and writing mechanism (not shown in the figure) of the rich optical information recording medium passes through the PC substrate ⑴, and then passes through

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Opening> The dielectric layer (2), the shielding layer (3) and the interface layer forming an optical minute opening or forming a high-intensity light source make the laser beam (10) energy (p〇wer) become Gauss = cloth (reference (Shown in Figure 3), so very fine records can be written on this recording layer (5). Furthermore, because the material of the recording layer (5) has a high contrast characteristic when reflecting signals, it can improve the near-field signal strength.

The recording medium of the present invention has good recording and reading characteristics, especially the recording layer (5) material SbNx series has high contrast characteristics, compared with the traditional GeSbTe phase change recording layer material under the blue light static test system, as shown in FIG. 4 It is shown that the high-density optical disc made of SbNx has a laser pulse of 500 ns, and the reflectance comparison between before and after writing is obviously better than that of high-density optical disc made of GeSbTe. In addition, the recording layer (5) can increase the strength of the near-field signal. As shown in FIG. 5, the recording layer (5) has a different recording trace length from the traditional low-contrast recording layer GeSbTe to read the signal strength. By comparison, it can be seen that the read signal strength of the super-resolution near-field optical disc made of the recording layer sbNx is significantly enhanced regardless of the recording track length (60 nm to 24 nm). The wavelength of the aforementioned laser beam (10) may be red (78 nm, 650 nm, or 635 nm) or blue (405 nm). The test result of the recordable optical information recording medium of the present invention can prove that when the read power is 2.5 mW, the signal-to-noise intensity ratio of the 150nm signal trace is about 45dB, and the signal noise of the 100nm signal trace is The intensity ratio is about 27dB, and the signal trace can be resolved to 60nm (as shown in Figure 6). The above are only used to explain the preferred embodiments of the present invention, and are not intended to limit the present invention in any form. Therefore, where

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Page 1233115 Schematic explanation [Schematic diagram 1 is the surface diagram 2 is the intention 3 is the laser 4 is the layer writing 5 is the layer pair 6 is the long single note] ♦ Show the structure of each layer of the recordable optical information recording medium of the present invention, show the reading and writing of data of the recordable optical information recording medium of the present invention, and show the beam energy diagram of the Gaussian distribution in the recordable optical information recording medium of the present invention ; Show the comparison chart of the difference in reflectance before and after the recording of the present invention and the conventional recordable optical information recording medium; Show the comparison chart of the difference in the recording ratio of the present invention and the conventional recordable optical information recording medium; Show the recordable optical information of the present invention The relationship between the recording level of the recording medium and the intensity of the read signal.

Description of component symbols Reference substrate (1) Dielectric layer (2) Mask layer (3) Interface layer (4) Recording layer (5) Reflective layer (6) Protective layer (7) Laser beam (10) Lens (20) Page 13

Claims (1)

1233115 pr :: ':' j; ... 二 '• 丨 _case number η month said __ VI. Patent application scope s' —— i ——- Mody:' One One One Two 1. A recordable optical information The structure of the recording medium includes, in order: a substrate, which is a film layer made of a material having translucency; a dielectric layer, which is immediately adjacent to a side surface of the substrate, and has a dielectric layer. A film layer made of a material with electrical characteristics; a masking layer, which is a film layer made of a translucent material, which can generate a very small penetrator L after being illuminated by a laser beam, or Forming a high-intensity light source; an interface layer is also a film layer made of a material having dielectric properties 9 A recording layer is mainly a film layer made of S b N X 糸 material, a reflective layer is a film layer made of Ag material, and a protective layer is a film layer made of resin material. 2. The structure of a recordable optical information recording medium according to item 1 of the scope of the patent application, wherein the interface layer is composed of 2118 or 3 丨 02 or 31 cores or 8 1 仏 or Si C or Si or Ti 02 or TaOx, etc. Or a mixture of dielectric materials. 3. The structure of the recordable optical information recording medium according to item 1 of the scope of patent application, wherein the mask layer is a film layer composed of a semi-transmissive AgOx-based material. 4. The structure of the recordable optical information recording medium according to item 1 of the scope of patent application, wherein the interface layer is composed of 21 ^ or 8 丨 02 or 8 丨 or 8 ^ or Si C or Si or Ti 02 or TaOx, etc., or a mixture of dielectric materials. 5. The structure of the recordable optical information recording medium according to item 1 of the scope of patent application, wherein the material of the reflective layer is Au or Ag or Cu or A1 or its alloy material. Page 14 Case No. 1T 1233115 Λ_ 6. Scope of patent application 6. According to the recordable structure of item 1 of the patent application scope, in which the material composition of the recording layer and one or two elements of the group consisting of 0. 7. The recordable structure according to item 6 of the scope of the patent application, wherein the material composition of the recording layer and the M element can be Ge, Te, Bi, Pb, Pd, Pt, Al, Si, One or more of Ti, V, Cr, Cu, Zn, Ta, Ga, Zr, Nb, Mo, Ru Os, Ir, Dy and Tb. 8. Recordable structure according to item 6 of the scope of patent application, where The atomic ratio of the material composition of the recording layer Sb: N is between 1: 0.01 to 1: 9. According to the recordable structure of item 7 of the patent application scope, where 'the' material composition of the recording layer includes Sb: N Atomic ratio of 1: 0. 01 Atomic ratio of 1: 0. 0 1 to 1: 1. 10. The recordable structure according to item 6 of the scope of the patent application, wherein the material composition of the recording layer includes an atomic ratio of Sb: N between 1: 0.01 and an atomic ratio of 1: 0.01. 1: 1. 11. The recordable structure according to item 7 of the scope of the patent application, wherein the material composition M of the recording layer, wherein the atomic ratio of Sb: N is between 1: 0: 0 and the atomic ratio of 1: 0. 0 1 To 1: 1 _correction_ The information of the optical information recording medium includes Sb, and the material selected from the N optical information recording medium further includes M elements Sn, Ag, Au, In, Μη, Fe, Co, Ni,, Rh, Hf, W, Re, prime. The contents of the optical information recording medium include Sb and N, and the contents of the 1 ° optical information recording medium include Sb, N, and M, to 1: 1, and the things of the optical information recording medium include Sb, N, and 0, to 1: 1, and Sb: 0 The contents of the optical information recording medium include Sb, N, 0, and .0 1 to 1: 1, and Sb, and Sb: M atoms Page 15 1233115 _ Case No., Weng 81, Jue 2 months, Article _ VI. The scope of patent application is between 1: 0. 01 to 1: 1. 1 2. The structure of the recordable optical information recording medium according to item 1 of the scope of patent application, wherein the thickness of the mask layer is between 5 and 50 nm. 1 3. The structure of the recordable optical information recording medium according to item 1 of the scope of patent application, wherein the thickness of the dielectric layer is between 70 and 200 nm. 1 4. The structure of the recordable optical information recording medium according to item 1 of the scope of patent application, wherein the thickness of the interface layer is between 5 and 50 nm. 1 5. The structure of the recordable optical information recording medium according to item 1 of the scope of patent application, wherein the thickness of the reflective layer is between 70 and 160 nm. 16. A method for manufacturing a recordable optical information recording medium, which at least includes (a) forming a dielectric layer by sputtering on one side surface of the substrate using a sputtering device; (b) through a sputtering process , Sequentially forming a masking layer, an interface layer, a recording layer, and a reflective layer; (c) using a reactive sputtering method that simultaneously passes Ar and N2 (or 02) to produce a recording layer; (d) A resin is applied to the other surface of the reflective layer by a spin coating method to form the protective layer. Page 16