TWD184277S - Showerhead for a semiconductor processing chamber (1) - Google Patents

Abstract

[Use of article]; This design requires originality for a sprinkler head used in a semiconductor processing chamber. ;[Design Description];The rear view, left side view and right side view are exactly the same as the front view and are omitted. ;The partial enlarged view is an enlarged view of the area surrounded by a dotted line in the three-dimensional view. The dotted line itself is not part of the proposed design of this case. ;The cross-sectional view is a cross-sectional view taken based on the section line 6-6 in the top view. ; The partial enlarged view of the section is an enlarged view of the area surrounded by the dotted line in the section view. The dotted line itself is not part of the proposed design of this case.