TWD178423S - Substrate supporting arm for semiconductor manufacturing apparatus - Google Patents
Substrate supporting arm for semiconductor manufacturing apparatusInfo
- Publication number
- TWD178423S TWD178423S TW105301188F TW105301188F TWD178423S TW D178423 S TWD178423 S TW D178423S TW 105301188 F TW105301188 F TW 105301188F TW 105301188 F TW105301188 F TW 105301188F TW D178423 S TWD178423 S TW D178423S
- Authority
- TW
- Taiwan
- Prior art keywords
- semiconductor manufacturing
- manufacturing equipment
- support arm
- substrate
- design
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 7
- 238000004519 manufacturing process Methods 0.000 title abstract 5
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 230000000007 visual effect Effects 0.000 abstract 1
Abstract
【物品用途】;本設計係關於一種用於半導體製造設備的基板支撐臂。;【設計說明】;本設計之用於半導體製造設備的基板支撐臂係用於支撐被輸送的基板。如各圖式所示，本設計之用於半導體製造設備的基板支撐臂整體為一鉤狀板片，且在該鉤狀板片上形成有三個斜托部突出以支撐基板。;本設計之用於半導體製造設備的基板支撐臂的外觀造型已顯示於各圖式，整體設計呈現獨特視覺效果之創作性，爰依法提出專利申請。【Item Usage】;This design is about a substrate support arm for semiconductor manufacturing equipment. ;[Design Description];This designed substrate support arm for semiconductor manufacturing equipment is used to support the transported substrate. As shown in the drawings, the substrate support arm of this design for semiconductor manufacturing equipment is a hook-shaped plate as a whole, and three oblique protrusions are formed on the hook-shaped plate to support the substrate. ;The appearance of this designed substrate support arm for semiconductor manufacturing equipment has been shown in each drawing. The overall design presents a unique visual effect of creativity, and a patent application has been filed in accordance with the law.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20160000963 | 2016-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD178423S true TWD178423S (en) | 2016-09-21 |
Family
ID=89165585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105301188F TWD178423S (en) | 2016-01-08 | 2016-03-09 | Substrate supporting arm for semiconductor manufacturing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWD178423S (en) |
-
2016
- 2016-03-09 TW TW105301188F patent/TWD178423S/en unknown
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