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TWD172681S - 具有加熱器的基座之部分 - Google Patents

具有加熱器的基座之部分

Info

Publication number
TWD172681S
TWD172681S TW103306751F TW103306751F TWD172681S TW D172681 S TWD172681 S TW D172681S TW 103306751 F TW103306751 F TW 103306751F TW 103306751 F TW103306751 F TW 103306751F TW D172681 S TWD172681 S TW D172681S
Authority
TW
Taiwan
Prior art keywords
view
design
enlarged view
base
heater
Prior art date
Application number
TW103306751F
Other languages
English (en)
Inventor
Gaku Furuta
John M White
Robin L Tiner
Suhail Anwar
Soo Young Choi
Shinichi Kurita
Original Assignee
應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 應用材料股份有限公司 filed Critical 應用材料股份有限公司
Publication of TWD172681S publication Critical patent/TWD172681S/zh

Links

Abstract

【物品用途】;本設計物品係一基座，用以承載基板。;【設計說明】;本設計之設計特點在於基座配置有加熱器。立體圖一及立體圖二是基座的等角立體圖。局部A的放大圖係將仰視圖中標示為A區塊的局部放大圖，而端面B-B’的剖視圖係沿著俯視圖中之B-B’剖面線的端面剖視放大圖，以揭露放大後之孔洞外形輪廓。;圖式所揭露的虛線部分為本案不主張設計的部分。;1.後視圖與前視圖相同，故省略後視圖。;2.右側視圖與左側視圖相同，故省略右側視圖。
TW103306751F 2014-06-23 2014-11-18 具有加熱器的基座之部分 TWD172681S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/494,693 USD716098S1 (en) 2014-06-23 2014-06-23 Susceptor with heater

Publications (1)

Publication Number Publication Date
TWD172681S true TWD172681S (zh) 2015-12-21

Family

ID=51753577

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103306751F TWD172681S (zh) 2014-06-23 2014-11-18 具有加熱器的基座之部分

Country Status (2)

Country Link
US (1) USD716098S1 (zh)
TW (1) TWD172681S (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD784276S1 (en) * 2013-08-06 2017-04-18 Applied Materials, Inc. Susceptor assembly
USD864134S1 (en) * 2018-10-24 2019-10-22 Asm Ip Holding B.V. Susceptor
JP1741173S (ja) * 2022-10-20 2023-04-06 半導体ウェハ及びサセプタ加熱用ヒータ

Also Published As

Publication number Publication date
USD716098S1 (en) 2014-10-28

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