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TWD160526S - Dressing pellet for dresser disk - Google Patents

Dressing pellet for dresser disk

Info

Publication number
TWD160526S
TWD160526S TW102302026F TW102302026F TWD160526S TW D160526 S TWD160526 S TW D160526S TW 102302026 F TW102302026 F TW 102302026F TW 102302026 F TW102302026 F TW 102302026F TW D160526 S TWD160526 S TW D160526S
Authority
TW
Taiwan
Prior art keywords
dresser
disc
dressing
pellet
view
Prior art date
Application number
TW102302026F
Other languages
Chinese (zh)
Inventor
Hiroyuki Shinozaki
Original Assignee
荏原製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司 filed Critical 荏原製作所股份有限公司
Publication of TWD160526S publication Critical patent/TWD160526S/en

Links

Abstract

【物品用途】;本設計的物品是修整器碟片用修整塊，為應用於半導體製造用CMP裝置的修整器碟片的修整塊；例如嵌合於設置在圓盤狀的碟片平面部的圓形孔，形成修整器碟片。;【設計說明】;本設計的底面，是作為修整器面。;後視圖、及左側視圖和右側視圖均與前視圖相同，均予省略。[Purpose of the article]; The article of this design is a dressing block for a dresser disc, which is a dressing block for a dresser disc used in a CMP device for semiconductor manufacturing; for example, it is fitted into a circular hole provided on the flat surface of a disc-shaped disc to form a dresser disc. ; [Design description]; The bottom surface of this design is used as a dresser surface. ; The rear view, left side view, and right side view are the same as the front view and are omitted.

TW102302026F 2012-09-26 2013-03-20 Dressing pellet for dresser disk TWD160526S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012023351 2012-09-26

Publications (1)

Publication Number Publication Date
TWD160526S true TWD160526S (en) 2014-05-11

Family

ID=53191123

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102302026F TWD160526S (en) 2012-09-26 2013-03-20 Dressing pellet for dresser disk

Country Status (2)

Country Link
US (1) USD730960S1 (en)
TW (1) TWD160526S (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD757357S1 (en) * 2014-04-29 2016-05-24 Tmfm Llc Smoking pipe bowl having magnetically attached lid
EP3352945B1 (en) * 2015-09-24 2020-05-27 Husqvarna AB Polishing or grinding pad assembly
JP6842859B2 (en) 2016-08-12 2021-03-17 株式会社荏原製作所 Dressing equipment, polishing equipment, holders, housings and dressing methods

Also Published As

Publication number Publication date
USD730960S1 (en) 2015-06-02

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