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TWD105861S1 - 半導體製造裝置用晶圓輸送臂 - Google Patents

半導體製造裝置用晶圓輸送臂

Info

Publication number
TWD105861S1
TWD105861S1 TW093303518F TW93303518F TWD105861S1 TW D105861 S1 TWD105861 S1 TW D105861S1 TW 093303518 F TW093303518 F TW 093303518F TW 93303518 F TW93303518 F TW 93303518F TW D105861 S1 TWD105861 S1 TW D105861S1
Authority
TW
Taiwan
Prior art keywords
transport arm
base
semiconductor manufacturing
manufacturing equipment
wafer
Prior art date
Application number
TW093303518F
Other languages
English (en)
Inventor
似鳥弘彌
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TWD105861S1 publication Critical patent/TWD105861S1/zh

Links

Abstract

【物品用途】;本創作係有關於一種半導體製造裝置用晶圓輸送臂之新式樣設計，其主要用途是於半導體裝造裝置中，使用作為搬送晶圓基板的輸送臂。;【創作特點】;該輸送臂的基部(前視圖右側)是被固定於連接在圖未表示的馬達的移動基台，藉此將處理室內的晶圓基板一片片的載置在該輸送臂而搬送到別的處理室；因此，該輸送臂係由一薄板所構成，主要在其一端具有一以兩個尖形部以及圓形凹部形成缺口的固定用透孔(亦即開口端)，以及另一端呈矩形狀之用來固定在移動基台的矩形基部，詳細而言，如第4圖所示，在尖形部的端部以及呈扇形約兩端設有突出的突塊，而在矩形基部上設置圓形及方形的小孔，其周邊形成對稱式的切角；綜上所述，本創作的該些設計雖是功能上的需求，但卻在造形上形成特殊且深具科技感的造形，確為一理想美觀之設計。
TW093303518F 2003-12-17 2004-06-11 半導體製造裝置用晶圓輸送臂 TWD105861S1 (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003037296 2003-12-17

Publications (1)

Publication Number Publication Date
TWD105861S1 true TWD105861S1 (zh) 2005-08-01

Family

ID=36659692

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093303518F TWD105861S1 (zh) 2003-12-17 2004-06-11 半導體製造裝置用晶圓輸送臂

Country Status (2)

Country Link
US (1) USD525408S1 (zh)
TW (1) TWD105861S1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD107385S1 (zh) * 2004-07-20 2005-11-01 東京威力科創股份有限公司 晶圓搬運機
USD567638S1 (en) * 2007-08-09 2008-04-29 Rieder Andrew W Attachment hook back and opposing side and center arm curve clip
TWD127299S1 (zh) * 2007-10-03 2009-02-01 東京威力科創股份有限公司 半導體製造裝置用晶圓運送臂
USD788951S1 (en) * 2016-03-16 2017-06-06 Werner Co. Roof anchor
USD789565S1 (en) * 2016-03-16 2017-06-13 Werner Co. Roof anchor
USD848058S1 (en) * 2017-12-31 2019-05-07 Steven Ellis Richardson Smoking peg
USD968197S1 (en) * 2020-12-07 2022-11-01 Gerox Works, S.L. Fixing bracket

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4138011A (en) * 1976-04-28 1979-02-06 The Laitram Corporation Non-pivotal modular conveyor belt and modular links therefor
USD276586S (en) * 1982-09-20 1984-12-04 Hanna Arthur W Detachable handle for paint cans or the like
USD286932S (en) * 1984-02-06 1986-11-25 The Cambridge Wire Cloth Co. Sprocket for an endless conveyor belt
DE4030222C1 (zh) * 1990-09-25 1991-11-14 Vegla Vereinigte Glaswerke Gmbh, 5100 Aachen, De
USD407174S (en) * 1997-07-28 1999-03-23 Sidney Manufacturing Company Conveyor paddle
US6607065B2 (en) * 2000-08-11 2003-08-19 Rapistan Systems Advertising Corp. High speed baggage diverter
USD479637S1 (en) * 2002-03-06 2003-09-09 Northstar Industries, Inc. Multiple-wheel axle support

Also Published As

Publication number Publication date
USD525408S1 (en) 2006-07-18

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