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TW523573B - Coolant collector for evaporating solvent and oil molecules of vacuum pump - Google Patents

Coolant collector for evaporating solvent and oil molecules of vacuum pump Download PDF

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Publication number
TW523573B
TW523573B TW91111576A TW91111576A TW523573B TW 523573 B TW523573 B TW 523573B TW 91111576 A TW91111576 A TW 91111576A TW 91111576 A TW91111576 A TW 91111576A TW 523573 B TW523573 B TW 523573B
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TW
Taiwan
Prior art keywords
cooling
oil molecules
vacuum pump
scope
exhaust gas
Prior art date
Application number
TW91111576A
Other languages
Chinese (zh)
Inventor
Tseng-Yao Chen
Jin-Huan Tzeng
Jin-Ming Chen
Shian-Yan Fang
Chen-Yuan Lin
Original Assignee
Ind Tech Res Inst
Jin-Huan Tzeng
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Priority to TW91111576A priority Critical patent/TW523573B/en
Application granted granted Critical
Publication of TW523573B publication Critical patent/TW523573B/en

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Disclosed is a coolant collector for evaporating solvent and oil molecules of a vacuum pump, comprising: a hollow cavity having an exhaust inlet, a cooling air inlet, a filtered exhaust outlet, and a condensed liquid outlet, characterized in that: in the hollow cavity, one or more metal filtering nets are provided between the exhaust inlet and the cooling air inlet and the filtered exhaust outlet, a coolant nozzle provided at the cooling air inlet for injecting a cooling air flow towards and thus cooling the metal filtering nets such that the exhaust containing evaporating solvent and oil molecules entering the hollow cavity through the exhaust inlet may be collected as condensed liquid after being condensed by the cooled metal filtering nets whereby the condensed liquid may drip downwards and then discharged from the hollow cavity through the condensed liquid outlet, and the exhaust filtered by the metal filtering nets is discharged from the hollow cavity through the filtered exhaust outlet.

Description

523573 五、發明說明(1) --- 本發明為關於一種真空泵之蒸發溶劑及油分子的冷卻 捕集器,特別有關於利用在廢氣經過路徑安屬 層:並利用金屬網之冷凝廢編,捕集廢【;:= 或瘵發溶劑之裝置及方法。 在各種需要將腔體抽取腔體真空之製程中,一般皆以 真空泵抽取腔體内之氣體或蒸發溶劑,以達到腔體内高真 =狀態之目的,然而在抽取過程中,所抽取出來的廢氣可 此含有有機蒸發溶劑或真空泵本身運轉潤滑所需之油分 子’而這些蒸發溶劑以及油分子,若直接排放於大氣,將 會造成環礎之污染。故而需要將廢氣先行處理,將不適宜 直接排放於大氣的蒸發溶劑以及油分子適濾收集,再將已 過遽去除蒸發溶劑以及油分子之廢氣排出。將蒸發溶劑或 油分子與一般廢氣分離之方法,通常有雨種,一為利用孔 隙極小的濾網過濾,一為冷凝蒸發溶劑及油分子以為分 離;本發明便是結合兩種傳統方法之特點及便利性但去除 兩傳統方法可能發生之缺點,提出一種真空泵之蒸發溶劑 及油分子的冷卻捕集器。 在習知技術方面,捕集蒸發溶劑及油分子方式有二。 一般迴轉式真空泵,雖設有配套之過濾器,以將一真空供 烤腔體内,因烘烤乾燥所產生之蒸發溶劑或真空油分子^ 以過濾而抽出,但如使用人未依規定期,限更換濾材或因渡 材品質低劣,以致過濾器產生阻塞現象,使真空泵的效率 大為降低,甚或導致真空泵機件的快速磨損,或蒸發溶劑 及油分子洩漏到大氣中,污染環境。另有使用液態氮的低523573 V. Description of the invention (1) --- The present invention relates to a cooling trap for evaporating solvents and oil molecules of a vacuum pump, and particularly relates to the use of an exhaust gas in the safety layer of a path: and the use of condensed waste of a metal mesh, Device and method for trapping waste [;: = or developing solvent. In various processes that need to extract the cavity from the cavity, the vacuum pump is generally used to extract the gas or evaporated solvent in the cavity to achieve the purpose of high truth = state in the cavity. However, during the extraction process, the extracted The exhaust gas may contain organic evaporation solvents or oil molecules needed for the lubrication of the vacuum pump itself. If these evaporated solvents and oil molecules are directly discharged into the atmosphere, it will cause environmental pollution. Therefore, the exhaust gas needs to be processed in advance, and the evaporation solvent and oil molecules that are not suitable for direct discharge to the atmosphere should be collected by filtration, and the exhaust gas that has been removed from the evaporation solvent and oil molecules should be discharged. The method of separating the evaporation solvent or oil molecules from the general exhaust gas usually includes rain species. One is to filter with a very small pore filter, and the other is to condense the evaporation solvent and oil molecules. The present invention combines the characteristics of two traditional methods. And convenience, but to remove the disadvantages that may occur in the two traditional methods, a cooling trap for evaporating solvents and oil molecules of a vacuum pump is proposed. In terms of conventional techniques, there are two ways to capture evaporated solvents and oil molecules. General rotary vacuum pumps, although equipped with a matching filter to supply a vacuum to the baking cavity, evaporate the solvent or vacuum oil molecules generated by baking and drying ^ to filter out, but if the user does not follow the prescribed period It is restricted to replace the filter material or the quality of the filter material is poor, which causes the filter to block, which greatly reduces the efficiency of the vacuum pump, or even causes the rapid wear of the vacuum pump parts, or the evaporation of solvents and oil molecules to the atmosphere, which pollutes the environment. Also low using liquid nitrogen

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五、發明說明(2) 但液態氮的 ’凍傷人體 溫冷凝作用,來冷凝收集蒸發溶劑及油分子, 常壓溫度為-1 96 °C,不小心使用時,極易滴賤 或使用儀器碎裂、損壞。 美國專利第539 90 73號揭露一壓縮機單元,利用過渡 材料來收納被冷凝過濾器所過濾的冷凝液;將過濾材料…安 置在拂過壓縮機的熱空氣流路徑中,以使被收納在冷凝液 過濾中的水蒸發。亦即利用濾材,例如滲透性布來吸收水 份及油所組成的冷凝液,並利用拂過壓縮機的熱空氣流來 蒸發水份,而油則被吸收在滲透布中。但是,如果使用人 未依規定期限更換濾材,或因濾材品質低劣,以致過濾器 產生阻基現象,使真空泵的效率大為降低,甚或導致真空 泵機件的快速摩損,或蒸發溶劑及油分子洩漏到大氣中, 仍然造成污染環境。 本發明乃鑒於上述缺點,加以改進,而提供一種用於 真空泵之蒸發溶劑及油分子的冷卻捕集器,不使用液態 氮’而使用由渦漩管來產生冷卻氣流的冷卻槍的冷凝作 用’因此不會有凍傷人體或儀器碎裂損壞的情事;益且由 於不使用滲透性布、塑膠或非金屬的濾材來過濾,則不容 易產生過濾器阻塞的情事。 此真空泵之蒸發溶劑及油分子的冷卻捕集器主要運用 之方法為’將尚未過遽之真空泵廢氣通入一中空腔體;使 尚未過;慮之真空泵廢氣通過一或多層金屬過濾網;通入冷 卻氣流於一或多層金屬過濾網;冷卻此金屬過濾網,當廢 氣通過此冷卻之金屬過濾網時,該冷卻之金屬過濾網即可V. Description of the invention (2) However, the liquid nitrogen's "freeze wounded human body temperature condensation" to condense and collect the evaporation solvent and oil molecules, the atmospheric pressure temperature is -1 96 ° C, when accidentally used, it is easy to be cheap or broken using an instrument Cracked and damaged. U.S. Patent No. 539 90 73 discloses a compressor unit that uses a transition material to store the condensate filtered by the condensation filter; the filter material is placed in the hot air flow path that passes through the compressor so as to be stored in the The water in the condensate was evaporated. That is, the filter material, such as permeable cloth, is used to absorb the condensate composed of water and oil, and the hot air flow passing through the compressor is used to evaporate the water, and the oil is absorbed in the permeable cloth. However, if the user fails to replace the filter material within the prescribed period, or the filter material is of low quality, the filter will have a resistance phenomenon, which will greatly reduce the efficiency of the vacuum pump, or even cause rapid wear of the vacuum pump parts, or the evaporation of solvents and oil molecules. Into the atmosphere, it still causes environmental pollution. The present invention has been improved in view of the above-mentioned disadvantages, and provides a cooling trap for evaporating solvents and oil molecules of a vacuum pump, without using liquid nitrogen, and using a condensing effect of a cooling gun that generates cooling airflow by a vortex tube. Therefore, there will be no frostbite or damage to the instrument; it is not easy to cause filter clogging because it does not use permeable cloth, plastic or non-metal filter materials for filtering. The main method used by the vacuum pump to cool the trap and evaporate the solvent and oil molecules is to 'pass the exhaust gas of the vacuum pump which has not yet passed into a hollow cavity; to pass the exhaust gas of the vacuum pump through one or more layers of metal filters; Into the cooling air flow in one or more layers of metal filter; cooling this metal filter, when the exhaust gas passes through this cooled metal filter, the cooled metal filter can be

〇178-7746TWF(N);MRL>P-91〇〇〇7;Rita.ptd〇178-7746TWF (N); MRL >P-91〇〇07; Rita.ptd

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冷凝前述廢氣,因重力作用使油分子或蒸發之溶劑凝液向 下滴落於前述腔體底部,而捕集該廢氣中所包含之油分子 以及蒸發溶劑。此真空泵之蒸發溶劑及油分子的冷卻捕集 器主要裝置為一冷卻搶以及一或多層金屬過壚網,尤指二 種在一中空腔體之接近上端處嵌設有一冷卻搶,以及在中 空腔體中段處安置一金屬過濾網。此冷卻搶係利用一渦旋 五、發明說明(3) 管(Vortex Tube)的原理,經由充入一壓縮氣體,以產生 一冷卻氣流(溫度可達-10X:〜―4 0。〇入於中空腔體内,而 在中空腔體之接近中間處安置有一金屬過濾網層,利用上 述冷卻槍所提供之冷卻氣流予以喷射,使之冷^卩,以便從 金屬過瀘網層之下端進入之含有蒸發溶劑或油分子之廢4氣 被冷卻之金屬過濾網層冷凝,使蒸發溶劑或油^子以冷凝 液的形式被捕集並因重力關係向下滴落於中空腔之^ · 端,再從底端排放,至於經過金屬過濾 =夕裔 經由上端排出。 、應後之廢軋則 依據本發明用於真空泵之 集器,包含一中空腔體具有一 氣排放口,一在接近其頂端部 其中間處之廢氣入口,及一在 口; 一或多層金屬過濾網設在 流入口與廢氣入口中間,並與 一冷卻槍嵌設在該冷卻氣流入 於該金屬過濾網上,使之冷卻 中空腔體内之含有蒸發溶劑或 蒸發溶劑及油分子的冷卻捕 在其頂端部上之經過濾的廢 之冷卻氣流入口,一在接近 其底端部上之冷凝液排放 該中空腔體内,位於冷卻氣 該廢氣入口處直接接觸;及 口處,用來噴射一冷卻氣流 、,以便從該廢氣入口進入該 油分子之廢氣,可被該冷卻The aforementioned exhaust gas is condensed, and the oil molecules or the evaporated solvent condensate drop down to the bottom of the cavity due to the action of gravity, so as to capture the oil molecules and the evaporated solvent contained in the exhaust gas. The main device of the cooling trap for the evaporating solvent and oil molecules of the vacuum pump is a cooling snatch and one or more layers of metal perforated nets, especially two cooling snugs embedded in a hollow cavity near the upper end, and in the hollow A metal filter is placed at the middle of the cavity. This cooling system is based on the principle of a vortex V. (3) Vortex Tube, which is filled with a compressed gas to generate a cooling airflow (temperature up to -10X: ~-4 0. 〇 into the Inside the hollow cavity, a metal filter layer is placed near the middle of the hollow cavity, and the cooling airflow provided by the cooling gun is used to spray and cool it, so that it can enter from the lower end of the metal layer. The waste gas containing evaporated solvent or oil molecules is condensed by the cooled metal filter layer, so that the evaporated solvent or oil is captured in the form of condensate and drips down to the end of the hollow cavity due to gravity. It is then discharged from the bottom end, as it is discharged through the upper end after being filtered by metal. The waste rolling after the application is used for the vacuum pump collector according to the present invention, which includes a hollow cavity with an air exhaust port, near the top end. An exhaust gas inlet in the middle, and one at the mouth; one or more metal filter screens are arranged between the inlet and the exhaust gas inlet, and a cooling gun is embedded in the cooling airflow into the metal filter screen to cool it. The filtered waste cooling air inlet trapped in the cavity containing the evaporating solvent or evaporating solvent and oil molecules is cooled, and a condensate near the bottom end is discharged into the hollow cavity. It is located directly at the exhaust gas inlet of the cooling gas, and the mouth is used to spray a cooling airflow, so that the exhaust gas entering the oil molecules from the exhaust gas inlet can be cooled by the

523573 五、發明說明(4) 之金屬過濾網冷凝成冷凝液被捕集,而向下滴落,並從該 出該中空腔體外,且經金屬過渡網過渡的 廢氣則k頂端經過濾的廢氣排放口排放出該中处腔體外。 依發明用於真空果之蒸發溶劑及油分=的冷卻捕 集為,八中中空腔體外部可加以包覆熱絕緣材料,以防止 =外氣體熱交換而產生中空腔體外部冒汗現象造成環 境潮濕。 押依據本發明用於真空泵之蒸發溶劑及油分子的冷卻捕 集器,具有一冷卻槍,此冷卻槍包含一渦漩管(vortex Tube),用來充入一壓縮氣體,以產生一冷卻氣流。 押依據本發明用於真空泵之蒸發溶劑及油分子的冷卻捕 集器,具有一冷凝液排放口,此冷凝液排放口上設有一閥 門,用來控制被捕集之後冷凝液之排放。 實施例: 如第1及2圖所示,係表本發明之一較佳具體實施例, 用於真空泵之蒸發溶劑及油分子的冷卻捕集器,其包含一 :空腔體1 ’外部包覆熱絕緣材料5以防止因為内外氣體熱 交換而產生中空腔體外部冒汗現象造成環境潮濕,在中空 腔體1頂部具有一廢氣排放口丨丨以及冷卻氣流入口12,在 中空腔體1中間處有一廢氣入口 13,及在中空腔體1底部設 置冷凝液排放口 1 4 ;其特徵是在冷卻氣流入口丨2與廢氣入 口 1 3中間設置一或多層金屬過濾網層2,且該金屬過濾網 層2需與該廢氣入口處相接觸,使由廢氣入口丨3流入之廢523573 V. Description of the invention (4) The metal filter screen is condensed into a condensate and is trapped, drips downward, and exits from the hollow cavity, and the exhaust gas that passes through the metal transition net is the filtered exhaust gas at the top. The discharge port discharges out of the middle cavity. According to the invention, the evaporation trapping of the vacuum fruit and the cooling and trapping of the oil content is that the outer cavity of the eighth hollow cavity can be covered with a thermal insulation material to prevent the external sweating of the hollow cavity and the environment caused by the heat exchange of the external gas. moist. The cooling trap for evaporating solvents and oil molecules of a vacuum pump according to the present invention has a cooling gun, and the cooling gun includes a vortex tube for filling a compressed gas to generate a cooling airflow. . The cooling trap for evaporating solvents and oil molecules of a vacuum pump according to the present invention has a condensate discharge port, and the condensate discharge port is provided with a valve for controlling the condensate discharge after being trapped. Example: As shown in Figures 1 and 2, it is a preferred embodiment of the present invention. It is a cooling trap for the evaporation of solvents and oil molecules of a vacuum pump, which includes a cavity 1 ' Cover with thermal insulation material 5 to prevent the environment from being wet due to sweating outside the hollow cavity due to the heat exchange between the inside and outside. There is an exhaust gas outlet on the top of the hollow cavity 1 and a cooling airflow inlet 12 in the middle of the hollow cavity 1 There is an exhaust gas inlet 13 at the bottom, and a condensate discharge opening 14 is provided at the bottom of the hollow cavity 1. It is characterized in that one or more metal filter layers 2 are arranged between the cooling airflow inlet 2 and the exhaust gas inlet 1 3, and the metal filter The mesh layer 2 should be in contact with the exhaust gas inlet, so that the waste flowing from the exhaust gas inlet 3

0178-7746TWF(N);MRL-P-910007;Rita.ptd 第8頁 5235730178-7746TWF (N); MRL-P-910007; Rita.ptd Page 8 523573

五、發明說明(5) 氣叮立刻接觸金屬過濾網層2 ;及一冷卻搶3嵌設在該冷卻 氣流入口 1 2處,用來噴射一冷卻氣流於金屬過濾網2上, 使之冷卻,以便從廢氣入口 1 3進入中空腔體1内之含有蒸 發/合劑或油分子之廢氣,可被冷卻之金屬過濾網冷凝成冷 凝液被捕集,而向下滴落,並從冷凝液排放口丨4排出該中 二腔體1外’且經金屬過濾網過濾的廢氣則從頂端經過淚 的廢氣排放口 1 1排放出該中空腔體1外。 金屬過濾網層2包含一多孔板支架21及一或多層不銹 鋼眼2 2專。多孔板支架2 1係以不銹鋼板沖製成具有多孔較 大孔仏之通孔211的圓板構成’並置於若干焊接在中空腔 體之2上適當局度上的支腳212上。不鱗鋼網眼22係 以適當大小網目或孔徑的不銹鋼製成,可在被冷卻流冷卻 後’將經過之含有蒸發溶劑或油分子之廢氣予以冷凝^冷 凝液,並使之利用本身重力向下滴落,而不堵塞不銹鋼^ 、,冷卻搶3為市面上已知工具,可採用例如商標EXAIr的 美國EXAIR公司所出品的冷卻搶,或其他廠牌之具有相同 喷射冷卻氣流功能之冷卻槍。5. Description of the invention (5) The gas bite immediately contacts the metal filter layer 2; and a cooling grab 3 is embedded in the cooling air inlet 12 to spray a cooling air on the metal filter 2 to cool it. So that the exhaust gas containing evaporation / mixture or oil molecules from the exhaust gas inlet 13 into the hollow cavity 1 can be condensed by the cooled metal filter to be condensed and trapped, then drip down and from the condensate discharge port The exhaust gas discharged out of the second cavity 1 and filtered by the metal filter is exhausted from the top through the tear gas exhaust outlet 11 to the outside of the hollow cavity 1. The metal filter layer 2 includes a perforated plate support 21 and one or more layers of stainless steel eyes 2 2. The perforated plate support 21 is a circular plate formed by punching a stainless steel plate with a through hole 211 having a large perforation, and is placed on a plurality of legs 212 welded to the hollow cavity 2 at an appropriate degree. The non-scale steel mesh 22 is made of stainless steel with a suitable mesh or pore size. After being cooled by a cooling stream, the exhaust gas containing evaporated solvents or oil molecules will be condensed. Dripping without blocking the stainless steel ^, the cooling gun 3 is a known tool in the market, such as the cooling gun produced by the American EXAIR company under the trademark EXAIr, or other brands of cooling guns with the same spray cooling airflow .

此冷卻搶3主要係利用渦漩管(Vortex Tube)的原理, 包含一渦旋管,經由一壓縮氣體入口31充入一壓縮氣體, 以產生一冷卻氣流(溫度可達—1 〇艺)。冷卻搶所產生之冷 卻氣流係經由冷卻氣流入口 1 2而噴射入於中空腔體i内之 金屬過濾網層2上,以使金屬過濾網層2冷卻到足以使被迴 轉式真空泵所抽出而經過金屬過濾網層之烘烤乾燥所產生This cooling grab 3 is mainly based on the principle of a vortex tube. It includes a vortex tube and is filled with a compressed gas through a compressed gas inlet 31 to generate a cooling airflow (temperature up to -10 °). The cooling airflow generated by the cooling grab is injected into the metal filter layer 2 in the hollow cavity i through the cooling air inlet 12 to cool the metal filter layer 2 sufficiently to be drawn by the rotary vacuum pump and pass through. Generated by baking drying of metal filter layer

523573 五、發明說明(6) 含有蒸發溶劑或油分子之廢氣冷凝的程度。被冷凝之蒸發 溶劑、油分子與水的冷凝液,係向不滴落’而從冷凝液排 放口 1 4排出中空腔體外。至於其他未被冷凝的廢氣則經由 頂端部上之廢氣排放口 11排出中空腔體1外。又,冷卻搶 所產生之熱氣係經由冷卻搶斜上方之熱氣出口 3 2排出冷卻 搶外。 在冷凝液排放口 14上設有一閥4,用來控制冷凝液之 適量排放。 雖然本發明已以較佳實施例揭露如上,然其並非限定 =發明,任何熟習此技藝者,在不脫離本發明之精神和 =内,當可作些許之更動與 圍當視後附之申請專利範圍所界定者為準 保屢粑 第10頁 0178-7746TWF(N);MRL-P-910007;Rita.ptd 523573 圖式簡單說明 為讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂起見,下文特舉一較佳實施例,並配合所附圖面, 作詳細說明。 圖面之簡單說明: 第1圖係表示本發明用於真空泵之蒸發溶劑及油分子 的冷卻捕集器之立體圖。 第2圖係表示本發明用於真空泵之蒸發溶劑及油分子 的冷卻捕集器之縱剖視圖。 元件符號 1〜中空腔體 / 11〜經過濾的廢氣排放口 1 2〜冷卻氣流入口 1 3〜廢氣入口 1 4〜冷凝液排放口 2〜金屬過濾網層 2卜多孔板支架 5〜熱絕緣材料 2 11〜通孔 2 1 2〜支腳 2 2〜不銹鋼網眼 3〜冷卻搶 3 1〜壓縮氣體入口523573 5. Description of the invention (6) The degree of condensation of exhaust gas containing evaporated solvents or oil molecules. The condensed liquid evaporated from the solvent, oil molecules and water is discharged to the outside of the hollow cavity from the condensate discharge port 14 without dripping. As for the other non-condensed exhaust gas, it is discharged out of the hollow cavity 1 through the exhaust gas discharge port 11 on the top portion. In addition, the hot gas generated by the cooling grab is discharged out of the cooling grab via the hot gas outlet 32 above the cooling grab. A valve 4 is provided on the condensate discharge port 14 to control the proper discharge of the condensate. Although the present invention has been disclosed in the preferred embodiment as above, it is not limited to = invention. Any person skilled in the art can make some changes and enclose the application without departing from the spirit and = of the present invention. The scope of the patent is defined as the standard warranty. Page 10 0178-7746TWF (N); MRL-P-910007; Rita.ptd 523573 The diagram simply illustrates that in order to make the above and other objects, features, and advantages of the present invention more For obvious comprehensibility, a preferred embodiment is given below and described in detail with reference to the accompanying drawings. Brief description of the drawings: Fig. 1 is a perspective view showing a cooling trap for evaporating solvents and oil molecules of a vacuum pump according to the present invention. Fig. 2 is a longitudinal sectional view showing a cooling trap for evaporating solvents and oil molecules of a vacuum pump according to the present invention. Symbol 1 ~ Hollow cavity / 11 ~ Filtered exhaust gas discharge port 1 2 ~ Cooling air inlet 1 3 ~ Exhaust gas inlet 1 4 ~ Condensate discharge port 2 ~ Metal filter layer 2Perforated plate holder 5 ~ Heat insulating material 2 11 ~ through hole 2 1 2 ~ foot 2 2 ~ stainless steel mesh 3 ~ cooling grab 3 1 ~ compressed gas inlet

0178-7746TWF(N);MRL-P-910007;Rita.ptd 第11頁 523573 圖式簡單說明 32〜熱氣出口 4〜閥 第12頁 0178-7746TWF(N);MRL-P-910007;Rita.ptd0178-7746TWF (N); MRL-P-910007; Rita.ptd page 11 523573 Simple illustration of the drawing 32 ~ hot gas outlet 4 ~ valve page 12 0178-7746TWF (N); MRL-P-910007; Rita.ptd

Claims (1)

523573523573 六、申請專利範圍 ^ 、 1 · 一種用於真空泵之蒸發溶劑及油分子的冷卻捕集 器,包含: 一中空腔體,具有一廢氣入口,一冷卻氣流入口,一 經過濾的廢氣排放口及一冷凝液排放口; 一至少一層金屬過濾網,設置於該腔體内部之該廢氣 入口及冷卻氣流入口及該經過濾的廢氣排放口之間’ 一冷凝液排放口,位於該腔體底部,用以排放冷凝 液;以及 一冷卻槍,設置在該腔體知該冷卻流入口處,用以噴 射一冷卻氣流於該金屬過濾網上,使該金屬過濾網冷卻。 2 ·如申請專利範圍第1項所述之用於真空泵之蒸發溶 劑及油分子的冷卻捕集器,其中該冷卻槍更包含一渦旋管 (Vortex Tube) ’用於充入一壓縮氣體,以產生該冷卻氣 流0 3 ·如申明專利範圍第1項所述之用於真空泵之蒸發溶 劑及油分子的冷卻捕集器,其中更包括一控制閥門、、、,位於 該冷凝液排放口上,用以控制該冷凝液之排放。 4·如申請專利,圍第!項所述之用於真空泵之蒗發溶 劑及油分子的冷卻捕集器中更包含—絕緣…,位於 該中空腔體外部,=以防止因為内外氣體 中 空腔體外部冒汗現象造成環境潮渴。 而產玍T 5 ·如申請專利範圍第1 劑及油分子的冷卻捕集器 體0 項所述之用於真空泵之蒸發溶 其中該中空腔體為一中空腔6. Scope of patent application ^, 1 · A cooling trap for evaporating solvents and oil molecules of a vacuum pump, comprising: a hollow cavity with an exhaust gas inlet, a cooling airflow inlet, a filtered exhaust gas outlet and a A condensate discharge port; at least one layer of a metal filter disposed between the exhaust gas inlet and the cooling airflow inlet and the filtered exhaust gas discharge port inside the cavity; a condensate discharge port, located at the bottom of the cavity, The condensate is discharged; and a cooling gun is arranged at the cavity and the cooling flow inlet, and is used to spray a cooling air flow on the metal filter to cool the metal filter. 2 · The cooling trap for the evaporation solvent and oil molecules of the vacuum pump according to item 1 of the scope of the patent application, wherein the cooling gun further comprises a vortex tube 'for filling a compressed gas, To generate the cooling air current 0 3 · The cooling trap for the evaporation of solvents and oil molecules of the vacuum pump as described in the first item of the declared patent scope, which further includes a control valve, located on the condensate discharge port, Used to control the discharge of this condensate. 4 · If you apply for a patent, round up! The cooling trap for the solvent and oil molecules of the vacuum pump mentioned in the item further includes-insulation ..., located outside the hollow cavity, to prevent thirst from the environment due to the sweating phenomenon inside and outside the hollow cavity of the gas. . The production of T 5 · The evaporation and dissolution for vacuum pumps as described in item 1 of the patent application scope of the cooling agent body and the oil molecule cooling trap body, wherein the hollow cavity is a hollow cavity 523573 六、申請專利範圍 6 ·如申請專利範圍第1項所述之用於真空泵之蒸發溶 劑及油分子的冷卻捕集器,其中該金屬過濾網之材料可為 不鏽鋼。 7 ·如申請專利範圍第1項所述之用於真空泵之蒸發溶 劑及油分子的冷卻捕集器,其中該金屬過濾網之材料可為 不與該蒸發溶劑及油分子反應之金屬材料。 8. 如申請專利範圍第1項所述之用於真空泵之蒸發溶 劑及油分子的冷卻捕集器,更包括一多孔板支架,以支撐 該金屬網層。 .^ 9. 一種用於真空泵之蒸發溶劑及油分子的冷卻捕集之 方法,,包含下列步驟: a) 將尚未過濾之真空泵廢氣通入一中空腔體; b) 使尚未過濾之真空泵廢氣通過至少一層金屬過濾 網; c) 通入一冷卻氣流將該金屬過濾網冷卻,當該廢氣通 過已冷卻之該金屬過濾網時,該冷卻之金屬過濾網即冷凝 前述廢氣,使油分子或蒸發溶劑凝成液滴向下滴落於該腔 體底部。 1 0.如申請專利範圍第9項所述之方法,其中該冷卻氣 流係由一冷卻槍提供。 11.如申請專利範圍第9項所述之方法,其中該冷卻槍 包含一滿旋管(Vortex Tube),用於充入一壓縮氣體,以 產生該冷卻氣流。 1 2.如申請專利範圍第9項所述之方法,其中控制該捕523573 6. Scope of patent application 6 · The cooling trap for the evaporation solvent and oil molecules of the vacuum pump as described in item 1 of the scope of patent application, wherein the material of the metal filter can be stainless steel. 7 · The cooling trap for the evaporation solvent and oil molecules of the vacuum pump according to item 1 of the scope of the patent application, wherein the material of the metal filter can be a metal material that does not react with the evaporation solvent and oil molecules. 8. The cooling trap for the evaporation solvent and oil molecules of the vacuum pump according to item 1 of the scope of the patent application, further comprising a perforated plate support to support the metal mesh layer. . ^ 9. A method for cooling trapping of evaporated solvent and oil molecules of a vacuum pump, comprising the following steps: a) passing the unfiltered vacuum pump exhaust gas into a hollow cavity; b) passing the unfiltered vacuum pump exhaust gas through At least one layer of metal filter; c) cooling the metal filter by passing a cooling air stream, and when the exhaust gas passes through the cooled metal filter, the cooled metal filter condenses the aforementioned exhaust gas, so that the oil molecules or the solvent are evaporated The condensed droplets drip down at the bottom of the cavity. 10. The method according to item 9 of the scope of patent application, wherein the cooling air flow is provided by a cooling gun. 11. The method according to item 9 of the scope of patent application, wherein the cooling gun comprises a full spiral tube (Vortex Tube) for filling a compressed gas to generate the cooling airflow. 1 2. The method according to item 9 of the scope of patent application, wherein the arrest is controlled 0178-7746TWF(N);MRL-P-910007;Rita.ptd 第14頁 523573 六、申請專利範圍 集後之油分子或蒸發溶劑冷凝液係由該腔體底部一控制閥 門,控制該捕集後之油分子或蒸發溶劑冷凝液排出。 1 3.如申請專利範圍第9項所述之方法,其中該腔體外 部加以包覆一熱絕緣材料,用以防止因為内外氣體熱交換 而產生中空腔體外部冒汗現象造成環境潮濕。0178-7746TWF (N); MRL-P-910007; Rita.ptd Page 14 523573 VI. The oil molecules or the evaporation solvent condensate after the application of the patent scope are controlled by a control valve at the bottom of the cavity to control the capture Oil molecules or evaporated solvent condensate are discharged. 1 3. The method according to item 9 of the scope of patent application, wherein the outside of the cavity is covered with a thermal insulation material to prevent the environment from being wet due to sweating outside the hollow cavity due to the heat exchange between the inside and the outside of the cavity. 0178-7746TWF(N);MRL-P-910007;Rita.ptd 第15頁0178-7746TWF (N); MRL-P-910007; Rita.ptd Page 15
TW91111576A 2002-05-30 2002-05-30 Coolant collector for evaporating solvent and oil molecules of vacuum pump TW523573B (en)

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