TW513568B - Method and device for detecting liquid concentration - Google Patents

Abstract

There are provided a method and a device for detecting liquid concentration. At least two kinds of light with different wavelengths having a central wavelength of 1.4 μm to 2.05 μm illuminate on the liquid, so as to detect the light penetration rate of the liquid for the light of each wavelength. Accordingly, it is able to detect the concentrations of at least two ingredients included in the liquid. In accordance with the present invention, it is able to precisely detect the concentrations of multiple ingredients included in the liquid for semiconductor process or liquid substrate process in real time and on line. In addition, in accordance with the present invention, it is able to excellently detect the liquid concentration with simple structure high precision and high reliability.

Description

513568 A7-— ____ _______________ —-5. Description of the Invention (I) & MMM. 1 I ϋ I nnnn · ϋ nn · II (Please read the notes on the back before filling this page) The present invention is generally related to containing various drugs The concentration detection technology of the aqueous solution is particularly relevant for detecting the concentration of a plurality of components in an aqueous solution such as a cleaning solution, an etching solution, or a photoresist stripping solution in a semiconductor process or a liquid crystal substrate process, which can be connected, real-time, and highly accurately. Method and device for detecting liquid concentration. For example, in semiconductor manufacturing or liquid crystal substrate manufacturing, in order to clean silicon wafers or etch Al, Si, and Si02, the photoresist has been removed. Sulfuric acid (H2S〇4) and nitric acid (HN03) are used. , Hydrochloric acid (HC1), phosphoric acid (H3P04), hydrofluoric acid (HF), buffered hydrofluoric acid (BHF), fluorinated nitric acid, ammonium fluoride (NH4F), ammonium hydroxide (NH4〇H), hydrogen peroxide (Hal), RA-Stripper, alkali-based etchant, chromic acid-based etchant, water / organic liquid mixed solution (such as acetic acid aqueous solution), and various kinds of acid and alkaline aqueous solutions (hereinafter, collectively referred to in this specification as these cleaning solutions (Etching solution, photoresist peeling solution, etc. are "chemical solutions").

In order to maintain the performance of these medicinal solutions, their concentrations must be measured and managed. In particular, in order to meet the high-precision requirements of etching, rinsing, or photoresist peeling, or to treat waste liquid, it is best to measure and manage the concentration of the chemical liquid that changes in various ways. As disclosed in Japanese Patent Laid-Open No. 7-113745, the present inventors have proposed a concentration detection device suitable for the above-mentioned purpose for detecting an aqueous solution of an inorganic drug containing a single-component system such as hydrofluoric acid. The inventor has proposed a liquid concentration detecting device disclosed in Japanese Patent Application Laid-Open No. 11-37936. As shown in Figure 11 in this article, this device supplies and supplies liquid along the 3 paper sizes. The Chinese national standard (CNS) A4 specification (21〇X 297 mm) is applicable. 513568 A7 -------___ Β7 _______ 5. Description of the invention ( y) --- 1 ------- ^^ 1 --- (Please read the precautions on the back before filling in this page) The axis of the fluororesin unit 201 is orthogonal, and the configuration is opposite. The light unit 207 and the light receiving unit 208 cause light of a specific wavelength from the light projecting unit 207 transmitted through the liquid flowing in the detection unit 205 to be sensed by the light receiving unit 208 to detect the liquid concentration. In particular, it is disclosed that by projecting light having a wavelength of 1.3 to 1.9 "m, the amount of light received by the optical path 208 is detected to measure the liquid concentration with high accuracy. According to these technologies, it is possible to connect and instantly measure a single liquid Concentration of ingredients. However, there are hydrofluoric acid-nitric acid (HF-HNOO, hydrofluoric acid-hydrochloric acid (HF-HC1), sulfuric acid-hydrochloric acid (HUSCVHCl), phosphoric acid-nitric acid (H3P〇4-HN〇3), etc. In the case of multi-component system mixed liquid medicine, we look forward to being able to connect and measure the concentration of multiple components in these mixed liquid medicines in real time, and manage the concentration of each component.

As far as the present inventors are aware, there has not been found a concentration detection device that can connect, instantly and with high accuracy, measure the concentration of a plurality of components contained in a mixed chemical solution of a multi-component system. Furthermore, the above-mentioned Japanese Patent Application Laid-Open No. 11-37936 discloses that the concentration of a chemical solution of a single-component system is measured with high accuracy by using a test liquid to absorb light in a specific wavelength band (1.3 // m to 1.9 // m). However, according to the present inventor's review, in order to maintain the etching performance of the etching solution in the range of 0 to 10%, the concentration is controlled at ± 0.1%, and in the range of 0 to 1%, the concentration is controlled at ± 0.01%. High precision. Therefore, the purpose of the present invention is to provide online, real-time and high-precision detection of chemical solutions used in semiconductor manufacturing processes or liquid crystal substrate manufacturing processes, such as cleaning solutions. 4 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 513568 A7 _____ B7 _ V. Description of the Invention (々) Liquid concentration detection method and device for the concentration of various components contained in aqueous solutions such as etching solution or photoresist stripping solution ° Furthermore, another object of the present invention The purpose is to provide a liquid concentration detection method and device that can achieve a simplified structure, can detect liquid concentration with high accuracy, and achieve cost reduction. Yet another object of the present invention is to provide a further development of the above-mentioned conventional technology, which can be used with a simple structure to detect the medicinal solution used in the semiconductor process or the liquid crystal substrate process with high accuracy and reliability, such as washing liquid, Liquid concentration detection method and device for concentration of various inorganic drugs contained in aqueous solution such as etching solution or photoresist peeling solution. Disclosure of the invention The present inventors performed near-infrared spectroscopic analysis on hydrochloric acid and sulfuric acid at a concentration of 0, 2.5, 5, 7.5, and 10 wt% (weight percent) of a medicinal solution. As shown in Fig. 6 and Fig. 7, the absorbance at the wavelength of 1.45 / zm, the wavelength band of 1.55 / zm to 1.9 // m, the wavelength of 1.9 to 2.0 Am, and the wavelength of 2.1 to 2.4 // m is significant with the liquid concentration. Variety. Further, an aqueous solution containing hydrofluoric acid (HF) diluted to a concentration of 4 wt% and 10 wt% was prepared, and analyzed by near-infrared spectroscopy. Figure 5 shows that: • In the wavelength band of about 1.3 to 2.0 // m, the absorbance varies with the acid concentration. In particular, near the wavelength, 1.55 / zm to 2.0 // m, the absorbance varies with the liquid. Significant changes in concentration. Although not limited to a specific theory, according to the inventor's review, the absorption of light in the vicinity of a wavelength of 1.45 // m by an aqueous solution has been investigated. It belongs to the oxygen of water-5. X 297 public ") ~ " • ---------------- (Please read the precautions on the back before filling this page)

513568 A7 _B7 ^ _ V. Description of the invention (+) Hydrogen-binding group absorption wavelength band (resonance of 0-H stretching vibration), and the difference in light absorption near the wavelength band 1.55 // m ~ 1.9 // m comes from the aqueous solution Ion hydration, and the difference between the light absorption in the wavelength band of 1.9 // m ~ 2.0 # m is due to the light absorption of the oxygen-hydrogen bonding group (resonance of 0-H stretching vibration and 0-〇 molecular deformation) The synthesis of vibration resonance), the sum of light absorption with ionic hydration (synthesis). It was also found that the near-infrared absorption spectrum with a wavelength band of approximately 1.4 to 2.0 // m is the same for various aqueous solutions (medicine solutions), and the degree of light absorption (absorbance) depends on the type and concentration of the medical solution. The present inventors carefully reviewed based on this result, and the results take into account the novel method and device for measuring the concentration of multiple components in a multi-component system mixed drug solution using the absorption of light in the near-infrared region using an aqueous solution, which can be connected in real time and with high accuracy In short, the first aspect of the present invention is a liquid concentration detection method, which is characterized by irradiating light with at least two different wavelength bands with a central wavelength of 1.4 / zm to 2.05 / zm, and detecting liquid with light in each wavelength band. The amount of transmitted light, thereby detecting the concentration of at least two components contained in the liquid. According to a preferred embodiment of the first aspect of the present invention, the light irradiated to the liquid is selected from at least two of the central wavelengths of 1.42 // m to 1.48 // m, 1.55 / zm to 1.85 / zm,. To 2.05 // m. Light of different wavelength bands. According to a second aspect of the present invention, there is provided a liquid concentration detection device, comprising: a unit for supplying liquid; and irradiating light in at least two different wavelength bands with a central wavelength of 1.4 // m to 2.05 / zm in the aforementioned unit. The mechanism of the liquid; and the detection of light in each wavelength band transmitted through the liquid in the aforementioned unit. 6 This paper size applies to the Chinese National Standard (CNS) A4 specification (210 x 297 mm) '" (Please read the precautions on the back before filling in this (Page) Pack 1Ί · ·

513568 A7 ------- B7 _ V. The light quantity mechanism of the invention (<); it detects the concentration of at least two components contained in the liquid based on the detected light transmission quantity of the liquid. In addition, according to a third aspect of the present invention, there is provided a liquid concentration detecting device, which is provided with a unit for supplying tritium liquid; (b) a first and a second light-emitting section provided with a light source; (c) a beam splitter, a Divides the light emitted by the first and second light-emitting sections respectively into the first direction and the second direction; (the magic-transmitted light-receiving section is provided with a photodetector, and this photodetector is received from the first and second The light emitted from the second light-emitting section is transmitted through the liquid in the cell by the beam splitter pointing in the first direction; and (e) a reference light-receiving section including a reference light detecting section which is received from the foregoing The light emitted from the first and second light-emitting sections is directed to the second direction by the beam splitter; the optical axis of the light emitted from the first and second light-emitting sections is orthogonal to the beam splitter. According to a fourth aspect of the present invention, there is provided a liquid concentration detection device comprising: a unit for supplying liquid; (b) a light-emitting portion provided with a light source; and (c) a beam splitter that emits light from the light-emitting portion. Divide in the first direction and the second direction; (d) the transmitted light receiving part, which A light detector is provided, which receives the light emitted in the first direction by the aforementioned beam splitter; and (e) a reference light receiving unit, which is provided with a reference light detector which receives the aforementioned beam splitter. The light emitted in the second direction is characterized in that it includes a temperature control mechanism for all or a part of the light-projecting section, the beam splitter, the transmitted-light receiving section, and the reference-light receiving section. Fig. 1 is an embodiment of an optical system of a liquid concentration detection device of the present invention. Example 7 This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page).

j ^ 568 A7 ~ --------- V. Sketch map of invention description (b). FIG. 2 is a schematic configuration diagram showing a detection section and a control section of an embodiment of the liquid concentration detection device of the present invention. Fig. 3 is a schematic configuration diagram showing an embodiment of a unit used in the liquid concentration detecting device of the present invention. Fig. 4 shows a schematic configuration section of a detection section of an embodiment of a temperature control mechanism. Fig. 5 is a near-infrared absorption spectrum chart of hydrofluoric acid. Fig. 6 is a near-infrared absorption spectrum chart of hydrochloric acid. Fig. 7 is a near-infrared absorption spectrum chart of sulfuric acid. Figure 8 is a graph showing the relationship between the amount of light transmitted by a liquid (PD output) and the concentration of hydrochloric acid. Figure 9 is a logarithmic graph showing the relationship between the amount of light transmitted by a liquid (PD output) and the concentration of hydrochloric acid. Fig. 10 is a diagram showing a schematic arrangement of an optical system element having a light-emitting portion. Fig. 11 is a diagram for explaining a conventional liquid concentration detecting device. The best-shaped bear to implement the invention is described below with reference to the drawings to explain the liquid concentration detection method and device of the present invention in more detail. Re-application Example 1 Refer to Figure 1 and Figure 2 for one of the liquid concentration detection devices of the present invention. 8 The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -------- ------ (Please read the notes on the back before filling this page) Order ·-

513568 A7 ______B7 _ _ V. Description of the Invention (I) The examples will be explained. ------------ ^^ 1 --- (Please read the precautions on the back before filling this page) According to this embodiment, the liquid concentration detection method of the present invention uses a liquid concentration detection device to make it Specifically, the device is connected to a source of an etching solution or a cleaning device, and can be connected in, for example, a semiconductor process or a liquid crystal substrate process to detect the concentration of components contained in the etching solution and the cleaning solution in real time. The liquid concentration detecting device 1 can detect the concentration of each component contained in a multi-component system chemical liquid, such as hydrofluoric acid-nitric acid (HF-HNOO system etching solution, which is a two-component system chemical liquid. FIG. 1 shows the liquid of this embodiment. The schematic configuration of the optical system 3 provided in the detection section 2 provided in the concentration detection device 1. In addition, FIG. 2 shows the overall configuration of the detection section 2 and the control section 40 including the liquid concentration detection device 1 in this embodiment. In this embodiment, the detection section 2 is housed in a frame body having a dustproof and waterproof mechanism, and is separated from the control section 40.

First, in the optical system 3 provided in the detection section 2 of the liquid concentration detection device 1, a first light projecting section 4 and a transmitted light receiving section 11 are arranged along a direction orthogonal to the axis of the liquid flow path in the unit 9. The first light projecting section 4 has a first light source 4A, and the liquid light in the transmission unit 9 emitted from the first light source 4A detects the amount of light received by the light detector 11A provided in the transmitted light receiving section 11. In the case of high-precision detection of liquid concentration, it is necessary to always illuminate the unit 9 with light of a certain wavelength and a predetermined wavelength, so that the liquid transmitted light enters the photodetector HA '. It is important to control the light quantity variation of the light source with high precision. As shown in FIG. 2, in the liquid concentration detection device 1 of this embodiment, the first light source 4A passes through the automatic light amount adjustment circuit 44 provided in the control section 40 9 This paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 513568 A7 _B7___ 5. Description of the Invention (i?) Connected to the power supply circuit 42 to supply power from the 100VAC power supply 41. The automatic light amount adjustment circuit 44 can suitably use, for example, MPL-250 manufactured by Wavelength Electronics Corporation for constant current control (ACC) and constant light output control (APC). In addition, the light irradiated from the light source to the sample chemical solution is taken as a part of the reference light, and accordingly, the amount of light detected by the photodetector HA transmitted through the sample chemical solution is compensated. That is, a beam splitter 8 is provided in the optical path from the first light source 4A of the first light projecting section 4 to the unit 9, and the light from the first light source 4A is irradiated to the unit 9 through the beam splitter 8. Thereby, a part of the light from the first light source 4A is taken out by the beam splitter 8 and is sensed by the reference light receiving section 13 including the reference light detector 13A. In this embodiment, the reference light receiving section 13 is arranged in a direction orthogonal to the optical axis of the first light projecting section 4 toward the unit 9 and the transmitted light receiving section 11, and the reference light reflected by the beam splitter 8 at a right angle is The reference is sensed by the photodetector 13A. The beam splitter 8 is a so-called translucent mirror that divides incident light from a light source into two beams of reflected light and transmitted light 1: 1, and it uses an unpolarized stereo beam splitter (ε light) that is unpolarized and has a three-dimensional shape. Machine company). This three-dimensional beam splitter is coated and adhered with a metal film (chromium) or a dielectric multilayer film on the 45 ° right-angled sloping surface of quartz glass (BKK7 Grade A), and further includes an anti-reflection film on the incident surface and the outgoing surface of the light. . If a non-biased person is used as the beam splitter 8, the division ratio of the reflected light and the transmitted light, that is, the division ratio of the light incident on the transmitted light receiving portion 11 and the reference light receiving portion 13 will change with the light amount of the light source. Big changes have taken place. Therefore, it is preferable to use an unpolarized beam splitter as the beam splitter 8. In addition, if the next 10 paper sizes are applicable to China National Standard (CNS) A4 (210 X 297 mm) " (Please read the precautions on the back before filling this page)

513568 A7 ____B7 V. Description of the invention (1) As detailed in the text, the three-dimensional shape of the beam splitter 8 is preferable from the viewpoint of easy temperature control. (Please read the precautions on the back before filling in this page.) A collimator 5 is provided in the first light projecting section 4 and is used to direct the light emitted from the first light source 4A into the beam splitter 8 in a parallel light manner. In addition, the transmitted light receiving section 11 and the reference light receiving section 13 are provided with condenser lenses 10 and 12, respectively, which focus the light directed in various directions by the beam splitter 8 on the photodetector 11A and the reference photodetector 13A, respectively. Photosensitive section. Unit 9 is formed of a material that is resistant to etch fluids such as hydrofluoric acid that has starvation resistance for a long time and has high chemical resistance. In addition, the unit 9 must be capable of transmitting light having a wavelength band of about 1.4 // m to 2.05 // m. Examples of materials that satisfy such conditions include fluororesins. Fluoro resins are suitable for PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer resin), FEP (tetrafluoroethylene-hexafluoropropylene copolymer resin), ETEE (tetrafluoroethylene-ethylene copolymer resin), and ECTFE (trifluorochloride) Ethylene-ethylene copolymer resin), P.TFE (tetrafluoroethylene resin), PLTFE (trifluorochloroethylene resin), PVdF (vinylidene fluoride resin), VDF (fluoroethylene resin), etc. Units made of glass, sapphire, polypropylene resin, polycarbonate resin, poly (ethylene terephthalate), etc. can be used in accordance with the type of liquid to be measured and the conditions of use. In this embodiment, the liquid washing unit 9 shown in FIG. 3 is used. The unit 9 is made of fluororesin FEP. The unit 9 has a flow path 91 for allowing liquid to flow along the inside, and an inlet 92 for introducing liquid into the flow path 91. A flow outlet 93 discharged from the flow path 91 and a detection portion 94 that irradiates light to the liquid flowing inside the flow path. Pipes 96a and 96b respectively connected to the supply source of the etching solution are connected to the connecting mechanisms 95a and 95b. 11 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 513568 A7 ___________B7_____ 5. Description of the invention (/ 〇 connected to Flowing population 92, outflow port 93. This' supplies liquid to the unit 9 and discharges liquid from the unit 9. To prevent the leakage of liquid, a connector with a high-reliability inner diameter collar (such as Flowell ( (Made by Frowell Company)) as the connecting mechanism 95a, 95b. In this embodiment, the optical path length of the medicinal solution flowing in the unit 9 is 2 mm. The positive direction is along the axis of the flow path 91 of the unit 9 The crossing direction penetrates to the side hole 97 of the outflow port 93. A liquid temperature detecting device (liquid temperature sensor) 98 for detecting the temperature of the chemical liquid flowing in the unit is connected through the connecting device 95c. The temperature detection device 98 protrudes into the vicinity of the outflow port 93 so as to contact the liquid flowing in the unit 9. For example, a thermocouple covered with a chemically resistant fluororesin (FEP) (for example, manufactured by Forestry Electric Co., Ltd .: Model R5X (P tl00Q (0 ° C), 2mA, Class A, 3-wire type) as the liquid temperature detector 98. It is possible to use a highly reliable connection device without the risk of liquid leakage (such as F_LOCK 30 manufactured by Frowell Corporation) Series MCT bolts, model 3MCT2-C) are used as the connecting device 95c for connecting the liquid temperature sensor 98 to the unit 9. The output of the liquid temperature sensor 98 is passed through a liquid temperature detection circuit 51 provided in the control section 40 ( Fig. 2), a so-called microcomputer control circuit (hereinafter simply referred to as a "microcomputer") provided with a memory section, a control section, and a calculation section provided in the same control section 40 is used for the calculation processing of the liquid concentration described later in detail The light source used in the present invention is selected according to the near-infrared absorption spectrum characteristics of aqueous solutions such as hydrofluoric acid (HF), hydrochloric acid (HC1), and sulfuric acid (H2SO0) used as an etching solution. As shown in Figs. 5, 6, and 7 In the absorption spectrum of the chemical solution in the wavelength band of about 1.4 // m to 2.0 // m, there are 12 standards of CNS A4 (21G X 297 g) in the paper that depend on the concentration of the chemical solution. (Please read the precautions on the back before filling out this page) 装 丨 丨-513568 A7 ____; _B7_ Explain clearly (丨 1) degree, the area where the absorbance difference appears obviously (near the wavelength 1.45 / zm, the wavelength band 1.55 // m ~ 1.9 // m, the wavelength band 1.9 // m ~ 2.0 / Z m). The shape of the near-infrared absorption spectrum of the medicinal solution with a wavelength band of about 1.4 / zm to 2.0 / zm is the same in various aqueous solutions. The degree of light absorption (absorbance) depends on the type and concentration of the medicinal solution. Therefore, according to the present invention, near-infrared light having a central wavelength of 1.4 / zm to 2.05 // m is irradiated. Preferably, the central wavelength of irradiation is 1.42 # m to 1.48 // m, 1.55 // m to 1.85 // m, 1.9 // m to 2.05 / zm light to liquid. As a light source that emits such light, for example, a commercially available laser diode (LD) and light emitting diode (LED) can be selected. In the case of a single-component medicinal solution, the near-infrared light with a central wavelength of 1.4 // m to 2.05 // m is irradiated, and preferably, the central wavelength of irradiation is 1.42 // m to 1.48 // m, 1.55 / zm to 1.85 / / m, 1.9 // m ~ 2.05 // m in the wavelength band of light to the liquid, to detect the amount of light transmitted by the liquid, thereby detecting the concentration of a single component in the liquid. In the case of a multi-component system chemical solution, the near-infrared light with a central wavelength of 1.4 / zm ~ 2.05 / zm is irradiated, preferably, the central wavelength of irradiation is 1.42 // m ~ 1.48 / zm, 1.55 // m ~ 1.85 / zm The light of at least two wavelength bands of 1.9 // m to 2.05 // m can detect the amount of transmitted light of the liquid, thereby detecting the concentration of each component in the liquid. In this embodiment, as the first light source 4A, a light source having a center wavelength of 1.55 / zm to 1.85 // m which shows a significant difference in absorbance as the concentration difference of the chemical solution is used. In more detail, this embodiment uses a laser diode with a center wavelength of the emitted light of 1.65 ± 0.05 // m, and a wavelength band of 50% of the maximum amount of light, 1.64 # m to 1.66 // m ( LD) (Made by NT Ding Electronics Co., Ltd .: Model 13 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling in this page)) Binding-513568 A7 _ B7___ V. Description of the invention (θ); -------------- Install --- (Please read the precautions on the back before filling this page) NKL 1601 CCA / TOA) (The following is only It is called a light source with a center wavelength of 1.65 / zm). This laser diode can obtain a light amount of about 5mW. Therefore, using a xenon lamp and a spectroscopic filter that emits a wavelength band of 0.16 // m to 2.0 // m, for example, can increase the amount of light at a specific wavelength compared to the case of irradiating light in a desired wavelength band to a sample solution. Accurately detects the difference in absorbance caused by the difference in liquid concentration. A photodiode can be used as the photodetector 11A provided in the transmitted light receiving portion 11 and the reference photodetector 13A provided in the reference light emitting portion 13. In this embodiment, a photodiode (PD) (iNGaAs-PIN photodiode manufactured by Hamamatsu Optoelectronics Co., Ltd., product name G5851-01) with sensitivity to light having a wavelength band of about 1.4 to 2.05 / zm is used as the photodetector 11A. And reference photodetector 13A. The light-receiving light quantity information obtained from the photodetector 11A and the reference photodetector 13A is converted into an electrical signal (voltage signal), and then subjected to A / D conversion ′ into the microcomputer 45. Then, a calculation process of the concentration of the component to be measured in the liquid is performed. As shown in Fig. 2, the photodiodes (PD) of the photodetector 11A and the reference photodetector 13A are respectively connected to a transmitted-light PD amplifier 14a and a reference-light PD amplifier 14b which are amplifier circuits. In this embodiment, the structures of the transmitted light PD amplifier 14a and the reference light PD amplifier 14b are substantially the same; moreover, the transmitted light PD amplifier 14a and the reference light PD amplifier 14b are formed on the same substrate (PD amplification circuit substrate 14). Moreover, these transmitted-light PD amplifiers 14a and reference-light PD amplifiers 14b may not be formed on the same substrate. However, as will be described later, for convenience of temperature control, they are spaced at a distance of 14 from each other. This paper standard applies to the Chinese National Standard (CNS) A4 specification ( (210 X 297 mm) 513568 A7 _________B7 V. Description of the invention (ΓΊ) It is set away from, or preferably, as in this embodiment, formed on the same substrate. 0 ------ J --- U ---- ---- (Please read the precautions on the back before filling in this page) The output of the photodetector 11A and reference photodetector 13A amplified by the transmitted light PD amplifier 14a, reference light PD amplifier 14b is A / D converted A computer (not shown) and a microcomputer 45 provided in the control unit 40. Further, for example, a voltage detection circuit disclosed in Japanese Patent Application Laid-Open No. 4-324328 can be used as a detection circuit for outputting a photodiode by frequency-converting the light amounts detected by the photodetector 11A and the reference photodetector 13A. In this embodiment, the microcomputer 45 has an output corresponding to the amount of light sensed by the photodetector 11A and an output corresponding to the amount of light sensed by the reference photodetector 13A, that is, the output of the transmitted light PD amplifier 14a (transmitted light PD Output) and the output of the reference light PD amplifier 14b (reference light PD output), to perform calculations to correct the fluctuation of the light amount of the first light source 4A. For example, regarding the reference 値 (correction constant) Θ, the reference light PD at a storage liquid temperature of 25 ° C is output in the microcomputer 45 according to the following formula:

Light-receiving system output (detection voltage 値) V = (transmitted light PD output / reference light PD output) x correction constant 6 »... (1) ′ for calculation. The calculation result is used as the detection output of the PD output depending on the liquid concentration, and is used for the concentration calculation processing. The following list is based on the following equation: “PD output” (or light transmittance r) is used as the “PD output” (or light transmittance r). Moreover, in this embodiment, although the PD output is used as the voltage 値 (mv) for processing, the detection signal of the present invention is not limited to this. Further, in the case where the light entering the reference photodetector 13A is too strong in the reference light receiving section 13, a filter may be provided to reduce the amount of the incident light. At 15 paper sizes, the Chinese National Standard (CNS) A4 specification (210 X 297 mm) is applicable. 513568 κ__Β7 V. Description of the invention ([Doo] In this case, the correction constant Θ can be set to the example using the same filter. Output of reference photodetector 13A at 25 ° C. (Please read the precautions on the back before filling in this page.) Here is a description of the concentration calculation method that uses only the first light source of the first light emitting unit 4 to detect the concentration of a single-component system chemical solution. FIG. 8 shows that in the liquid concentration detection device 1 of the present embodiment, 'hydrochloric acid (HC1) whose concentration of the liquid to be measured is changed is introduced into the quartz unit (optical path length 2 mm) instead of the liquid flow unit 9 from the first 1 light source 4A projects near-infrared light with a center wavelength of 1.65 / zm, and measures the PD output characteristics when the amount of transmitted light of the sample liquid is measured. The first light source 4A was driven at a constant current of 90 mA at a measurement temperature of 25 ° C, and the feedback resistances of the transmitted-light PD amplifier 14a and the reference-light PD amplifier 14b were set to 4.3 KΩ for measurement. As shown in the logarithmic table shown in Fig. 9, at a certain temperature, the relationship between the PD output and the liquid concentration follows the Lambert-Beer rule (Equation (2) below). In the example of Fig. 9, R2 of the correlation coefficient between the PD output and the liquid concentration is 0.9997, which shows an excellent correlation. C = K- / 3 ln (V) ···· (2) C: Chemical solution concentration V: PD output (or light transmittance r) (2) All measurements of the chemical solution concentration detection device 1 of the present invention The target medicine and liquid components were established. The coefficients K and / 3 are the intrinsic coefficients of the components of each medicinal solution with respect to light in a predetermined wavelength band. The coefficients K and / 3 are functions of the temperature represented by the following formula. K = at + b ...... (3) / 5 = ct + d ...... (4) 16 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 513568 A7 ------ B7 __ V. Description of the invention (J) t: Liquid temperature is in formulas (3) and (4), a, b, C, and d are relative to the light of a predetermined wavelength band. The determined constant. These constants are determined in advance for each medicinal solution system, and stored in the microcomputer 45 provided in the control unit 40, or determined by a correction circuit 49 provided in the control unit 40 before the measurement according to a predetermined calibration sequence. Therefore, 'Liquid concentration The detection device 1 detects the temperature of the medicinal solution flowing in the unit 9 by the liquid temperature sensor 98, and calculates the coefficients ^ and ^ by the microcomputer 45. Then, according to the formula (2), the concentration of the chemical solution is calculated from the pD output calculated from the output of the photodetector 11A and the reference photodetector 13A. Of course, the order of operations is not limited to this. And, of course, K 値 and / 3 存储 inherent in each medicinal solution may be stored as constants in the microcomputer 45 as needed. In this case, the temperature measurement of the medicinal solution flowing in the unit 9 can be omitted. The concentration unit of the chemical liquid component is not particularly limited, and it is practically applicable to weight% and volume%. Regarding the concentration of chemical liquid components, in the case of measuring the light transmittance or absorbance and applying the concentration calculation formula (Lamberto-Bell formula), the volume calculation is performed based on the volume reference concentration (vol%) due to the volumetric reference. . However, by converting the apparent specific gravity of each component in the medicinal solution, the mass reference concentration (wt%) is obtained. In the case of a single-component system medicinal solution, since the negative component is single, the volume reference concentration (VOi%) or mass reference concentration (wt%) is directly obtained. According to the present invention, in order to detect the concentration of each component of the two-component system mixed chemical liquid, the central wavelength of the liquid irradiation is ~ 2.05 // m, which is equal to or greater than 17. The paper size is applicable to China National Standard (CNS) A4 (210 X 297) %) — --- (Please read the precautions on the back before filling out this page) trt n If · If < 513568 A7 _______B7 __ 5. Description of the invention (1 b) The first kind of light emitted by the first light source 4A The second light of a different wavelength band. The liquid concentration detection device 1 includes a second light emitting section 6 including a second light source 6A in addition to the first light emitting section. This embodiment uses the above-mentioned wavelength band, that is, a light source having a center wavelength of 1.42 / Z m to 1.48 / z m as the second light source 6A of the second light emitting section 6. In more detail, this embodiment uses a laser diode (LD) having a central wavelength of emitted light of 1.45 ± 0.015 // m, and a wavelength band of 50% of the maximum amount of light, which is 1.44 / zm to 1.46 / zm ( Made by NTT Electronics: Model NKL 1402 TOB) (hereinafter referred to as the light source with a center wavelength of 1.45 # m) as the second light source 6A. The output of this laser diode is a high output of more than 10mW (2 10mW), which can accurately detect the difference in absorbance caused by the difference in water volume. With respect to light in this wavelength band, the degree of change in absorbance caused by the difference in liquid concentration is different from the degree of change with respect to the light of the first light source 4A (central wavelength 1.65 // m). By detecting the absorption of light with a central wavelength of 1.42 // m to 1.48 // m, the amount of water itself (water concentration) in the aqueous solution can be detected. According to this embodiment, the second light-emitting section 6 is arranged so that The optical axes of the light emitted from the first light projecting section 4 and the second light projecting section 6 are orthogonal to the beam splitter 8. That is, the light transmitted from the second light source 6A passes through the beam splitter 8 and the light from the first light source 4A reflected by the beam splitter 8 is in the same direction, and is incident on the reference light detector 13A. On the other hand, among the light emitted from the second light source 6A, the light reflected by the beam splitter 8 and the light transmitted through the beam splitter from the first light source 4A are in the same direction, and the light enters the unit 9 and borrows the light detector 11A. Sensing light transmitted through a liquid. As with the first light projecting section, the second light projecting section 6 is also provided with a collimating lens 7 for projecting the light emitted from the light source onto the beam splitter 8 as parallel light. 18 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page).

513568 A7 ____B7 _ V. Description of the invention (β) --------------- (Please read the precautions on the back before filling this page) With the above configuration and structure, it has two light sources. The pair of light projecting sections 4 and 6 can share other optical system components, namely the beam splitter 8, the light detector 11A of the transmitted light receiving section 11, and the reference light detector 13A of the reference light receiving section 13. The output amplifier circuit substrate 14 (transmitted light PD amplifier 14a, reference light PD amplifier 14b) of the photodetector 11A and the reference photodetector 13A formed on the same substrate in the example. This can significantly reduce costs and simplify construction. As described in detail later, by sharing the optical system components with the two light-emitting sections 4, 6, the number of components for temperature control can be reduced, and the temperature control of the optical system components becomes easy. In order to calculate the concentration of each component in the two-component mixed chemical solution, the PD output relative to the light source emitted from the first light source 4A and the second light source 6A must be separately derived.

For example, consider switching on and off the first light source 4A and the second light source 6A at a predetermined time, for example, to alternately light up each light source 4A, 6A, and take out the PD output from each light source 4A, 6A. However, after review by the present inventors, for example, it takes a long time for the light source of the LD to stabilize the output (start to stabilize) since the power supply is started, and it takes several minutes to several ten minutes. Therefore, in the case of detecting the liquid concentration with high accuracy, the light source is repeatedly turned on / off, which has a problem of stability of the light amount. In addition, for example, in the case of LD, repeatedly turning on / off the light source has a problem of short life. Moreover, in the case of obtaining a light source without this problem, it is possible to take out the PD output relative to the light from the two light sources by turning on / off the light source due to a predetermined timing, but as far as the present inventor has seen, no This kind of light source. 19 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 513568 A7 ____ Β7 ____ 5. Description of the invention (J) ------------------ (Please (Read the precautions on the back before filling in this page.) Therefore, in this embodiment, the first light source 4A and the second light source 6A are turned on together, and the light emitted from the light source is mechanically blocked (shielded) at a predetermined timing, and is derived relative to PD output of light from light source. According to this embodiment, a light blocking mechanism 15 is provided on the light path from the second light source 6A to the beam splitter 8 to light up the first light source 4A and the second light source 6A at the same time, and the light emitted from the second light source 6A is cut off at a predetermined timing. Light. In addition, the PD output when the light emitted from the first light source 4A and the second light source 6A enters the photodetector 11A and the reference photodetector 13A at the same time (the second light source 6A is deducted from the (1) correction) The emitted light is mechanically cut off, and only the light output from the first light source 4A when it enters the photodetector 11A and the reference photodetector 13A (derived from (1) correction) is derived separately PD output with respect to light from the two light sources 4A, 6A (the following formula (5)).

Vii = V (i + ii) -Vi ... (5) V !: PD output relative to light from 4A light source only

Vu: PD output with respect to light from the second light source 6A only

V (I + n): The total output with respect to the light from the first light source 4A and the second light source 6A. The light interrupting device 15 is an electric diaphragm that is opened and closed by a pulse signal. It can be applied to an electromagnetic diaphragm (type EC-598.) Manufactured by Copal Corporation, a Newport Corporation. Electronic diaphragm (model 846 HP), etc. Alternatively, a disc with fine slits spaced at appropriate intervals can be arranged on the light path of light emitted from a light source, and the disc can be rotationally driven by a motor, thereby forming a predetermined interval to repeatedly pass through and interrupt the spontaneous transmission. The light structure of the light source (such as a shutter made by Scitec Instniments). For the 20 paper sizes, the Chinese National Standard (CNS) A4 specification (210 X 297 mm) is applicable. 513568 A7 _____B7__ 5. Description of the invention (β) The structure is simpler and the control of the shading interval is easier. It seems that the shading of the diaphragm mechanism Better. This embodiment uses the above-mentioned electromagnetic diaphragm made by the Köpar company as the light blocking mechanism. The diaphragm is controlled by the micro interrupter 45 controlled by the microcomputer 45 of the control unit 40 (illustration omitted). The diaphragm is opened and closed with a pulse of about 20ms (5V), and this state is maintained for 1 to 10 seconds. During this period, wait The output of the photodetector 11A and the reference photodetector 13A is stable. Once the output is stabilized, the light quantity data (output voltage) is stored in the microcomputer 45. In addition, by setting a plurality of light sources, at least two different wavelength bands of light are irradiated to the liquid to detect the concentration of each component in the multi-component system drug solution. In theory, a plurality of optical elements are arranged in the above array, that is, cast The light section, the beam splitter, the transmitted light receiving section, and the reference light receiving section may be configured to irradiate the light source with the liquid flowing in the unit 9 from each light projecting section, and measure the amount of light transmitted by the liquid. For example, the detection section 94 of the unit 9 can be constructed to extend in the direction of liquid flow, and a complex array of optical system components shown in FIG. 10 can be stacked along the direction of liquid flow, that is, the light projection section 4 and the beam splitter 8 are included. The optical system element group of the transmitted light receiving unit 11 and the reference light receiving unit 13 is implemented. However, this embodiment can reduce the number of optical system components and simplify the structure by making the first and second light projection units have the above-mentioned arrangement and structure. Next, a method for calculating the concentration of each component of a two-component system mixed liquid using a first light source 4A (central wavelength 1.65 / zm) and a second light source 6A (central wavelength 1.45 / zm) will be described. In the liquid concentration detection device, it is used for the mixing of the target medicinal solution, so that the components of the medicinal solution do not react to become other substances, or decompose and evaporate. 21 This paper size is applicable to China National Standard (CNS) A4 (210 X 297) (Mm) (Please read the precautions on the back before filling this page) Tr. 513568 A7 _____B7_ V. The description of the invention (/) disappears, and the addition is true. (Please read the notes on the back before filling out this page.) Consider obtaining a special multi-component system liquid by mixing a single * -component system lotion (ingredient). In addition, according to the sum of the absorbances of the components of the light with a predetermined wavelength, the absorbance of the mixed chemical solution of the multi-component system can be derived. formula. Here, any liquid medicine A and liquid medicine B are mixed according to m: η to obtain a two-component system mixed medicine liquid with a capacity of m + η. • About the first kind of light (wavelength 1.65 / zm): ((m + n / m) · Ca = Ka- β aLii (ra) ((m + n / n) · Cb = Kb- / 5 bLii (i * b) • About the second light (wavelength 1.45 // m) ((m + n / m) · Ca = Ka'- / 3 A'Ln (τ * a ') ((m + n / n) · Cb = Kb'- / 3 B'Ln (r b ') If you press m: n to mix liquid A [concentration (m + n / m) · Ca], liquid B [concentration (m + n / nhCB], then The absorbance of the mixed solution [capacity m + n] is: • About the first light-Ln (r) =-{(m / (m + n)) · Ln (τ A) + (n / (m + n)) Ln (τ β)) =-((m / (m + n)) (KA-((m + n) / m · Ca) / β A + (n / (m + n)) (KB -((m + n) / n) · Cb) // 3 b) ... (6) • About the second light_Ln (r ') =-((nV (m + n)) · Ln ( τ * A ') + (n / (m + n)) · Ln (τ: β,)) = > ((m / (m + n)) (KA5-((m + n) / m · Ca ) // 3 A5 + (n / (m + n)) (KB5- 22 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 513568 A7 Γ ______ Β7__ 5. Description of the invention (> 丨) ( (m + n) / n) · Cb) // 5b5} ... (7) From formula (7),

Ca = [/ 3 a / 3 a '{Cool BLn (r)-/ 3 B, Ln (r,)} / (/ 3 a Chill B'- / 3 b / 3 〇]-{ηβ A' (KB -K3 ') + m (/ S a, Ka- / S a / 5 B, KV)} / (m + n) (yS a / 5b'-/ 3b cold a,) ... (8)

Cb = [/ 3 b / 3 b5 {β ALn (r)-^ AfLn (r 5)) / (/ 3 b, 5 a5- / 3 a / 5 b5)]-{m ^ β? (Κα-Κα5 ) + π (/ 3 a / 3 β? κβ- ^ A? KB5)} / (m + n) (^ b β β k β Β5) ··· ⑼ Hereby '由 方 令 Κα / Κβ 二 冷 a / / 3 Β (or κα · / 3 Β = Κβ · / 5 A) κα7Κβ '= / 3α' / Θβ '(or fu' · / 3β '= Κβ' · heart ') holds, so it is given by (8) Equation (9), 〇 = {Κλ '· Kb · Say · Ιϋ (τ > κα · Kb, Say · Ln (r,)} / (Κα · κβ, · κα, · Kb) "face", κα LKB'Xmm) · (Κλ H · Kb) & = {Κλ · Kb, · you · Ln (τ > Ka, · Kb ga · Ln (r,)} / (Κλ '· Kb ^ · Kb') < m + n) · Kb · Kb? · (Κα-Κα7 (ιμι) · (Ka5 · K ^ Ka · Kb5) Derived "/ ^, ΚΒ · βΑ · _-ΚΑ · ΚΒ '· βΑ, · ίη ( τ, -ΚΑ · ΚΑ, {ΚΒ-ΚΒ,} A (ΚΑ · Κβ, -ΚΑ, · Κ3) ... (10) ^% ΚΒ-βΒ-Ln (r) -KA ^ KB.fiB'.Ln (T ') ^ KB-KB \ KA ^ KA ^)} B (ΚΑ, · ΚΒ-ΚΑ · ΚΒ,) ... (11) (Description of symbols)

Ca: Concentration of Chinese medicine liquid component A in the two-component system Le Liquid 23 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 x 297 mm) ---------------- -(Please read the notes on the back before filling this page) nn ϋ nn a 0, · n tn n ϋ ϋ 4 513568 A7 _____ _B7_ V. Description of the invention (β)

Cb: Concentration of medicinal solution component B in the two-component medicinal solution r: Light transmittance (or light receiving system output) of the first light (center wavelength 丨 .65 // 111) of the two-component medicinal solution τ • One-component system The light transmittance of the second light (central wavelength 1.45 // m) of the liquid medicine (or the output of the light receiving system) ra · The first light of the single-component system liquid a [concentration ((m + n) / m · Ca]) Transmittance. R β: The first light transmittance of the single component system medicinal solution β [concentration ((m + n) / n) · cB]. R A ': single component system medicinal solution A [concentration ((m + n) / m · The second type of light transmittance of CO. τ B ': The second type of light transmittance of single-component system chemical solution B [concentration ((m + n) / n) · Cb].

Ka, Kb, KV, Kb ', .cold A, / 3 B, /? A ,, / 3 B :: concentration formula of single-component system medicinal solution A, B with respect to each wavelength of light (Formula (2) ) Constant. In addition, as described above, the coefficients K and Θ in the concentration calculation formula are specific coefficients of each chemical solution with respect to light in a predetermined wavelength band. These coefficients K and / 3 are temperature functions (Eqs. (3) and (4)). The constants in this function are determined in advance with respect to each drug solution. They are determined in advance and stored in a microcomputer 45 provided in the control unit 40. Alternatively, it is determined before the measurement by the correction circuit 49 provided in the control unit 40 in accordance with a predetermined correction sequence. Therefore, the liquid concentration detection device 1 uses a liquid temperature sensor 98 to detect the temperature of the liquid medicine flowing in the unit 9, and calculates the coefficients K and / 3 by the microcomputer 45. 24 This paper size applies to China National Standard (CNS) A4 specification (210 X 297 public love) ~ " (Please read the precautions on the back before filling this page)

513568 A7 ____ ___B7_____ 5. Description of the invention () In addition, the microcomputer 45 calculates the mixture from the PD outputs of the light from the first light source 4A and the light from the second light source 6A according to the formulas (10) and (11), respectively. Concentration of A and B components in the medicinal solution. Here, in the case of performing high-precision concentration detection in accordance with each liquid concentration measurement device and measurement environment, it is preferable to perform the actual site using the liquid concentration detection device before the measurement starts, that is, at the device installation time. Correction. The on-site calibration method of the present invention includes, for example, a calibration chemical liquid whose concentration is set to 2 points for each measurement target component and each wavelength band, and whose temperature is set to 2 points for each concentration temperature. The PD output is stored in the microcomputer 45, and the standard corrections of the new coefficients K and Θ are determined. (2) For each component of the measurement object and the light in each wavelength band, the correction liquid for concentration 1 and temperature 2 is set. Cycles in the device, stores the PD output in the microcomputer 45, and determines the new coefficient K formula. On the other hand, the / 3 formula does not change, but simple correction by a presetter is used. Although these constitutional methods are appropriately selected in consideration of the required measurement accuracy, etc., in the case of concentration detection that seeks higher accuracy, it is preferable to correct the concentration calculation formula by standard calibration. And, of course, it is also possible to set each K 値 and 値 値 as constants in the microcomputer 45 as needed, and use them to perform calculations. In this case, the temperature measurement of the medicinal solution slightly flowing in the unit 9 can be omitted. The liquid concentration information calculated by the microcomputer 45 as described above forms a display signal by the display circuit 46, and is displayed by the display portion 47 provided in the liquid concentration detection device 1, such as an LCD panel. Alternatively, the information about the liquid concentration calculated by the microcomputer 45 can be sent to the communication-connectable liquid concentration detection 25 paper sizes ^ using the Chinese National Standard ~ (CNS) A4 specification (210 X 297 mm) "-(Please Read the notes on the back before filling out this page) Binding,

> 13568 A7 ~~ " " ——-B7 V. Description of the invention (& set 1 pen Sa and other external devices (picture omitted), display concentration information on the display of this external device. It can be connected to liquid The printer of the density detection device 丨 (or an external device connected to it) records the density information (printing or drawing, etc.) on the paper. It can also be equipped with an alarm device as required. This embodiment can be set to achieve the concentration of liquid An alarm is issued when the concentration is specified. An alarm setting circuit 48 is provided in the control unit 40. The liquid concentration detection device 1 has a liquid leak sensor 16 in the detection unit 2. The output of the liquid leak sensor 16 is controlled by The liquid leakage detection circuit 50 in the unit 40 detects. The microcomputer 45 displays the liquid concentration detection device 1 or the display of an external device according to the detection information of the leakage detection circuit 50, or issues an alarm sound to notify the user of the liquid leakage. For example, the RS-1000 model manufactured by Toko Chemical Co., Ltd. can be used as the leak sensor 16. The two-component system chemical liquid includes, for example, HF-H202, HF-HC1, and HF used as an etching solution and a cleaning solution. -NHUF, H F-HN〇3, ΝΗ4〇Η-Η202, H2S〇4-H2 02, H2S〇4-HC1, Η3Ρ〇4-ΗΝ〇3, HC1-H2 02, HCl-FeCh, etc. The second is the original The temperature control mechanism provided in the liquid concentration detection device 1 of the embodiment will be described. In terms of proper operation of the liquid concentration detection device 1 of this embodiment, the temperature stability of the detection unit 2 is extremely important. The use environment of the liquid concentration detection device 1 may be in the range of 10 ° C to 40 ° C. As described later, the preferred use temperature of the liquid concentration detection device 1 is 20 ° C to 30 ° C, which is close to normal temperature. ．The factors that affect the accuracy of the measurement are listed as 26. This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling out this page). Installation t ·-513568 A7-— __B7 _ V. Description of the invention (〆 >). As the light source (the first light source 4A, the second light source 6A), for example, the laser diode (LD) used in this embodiment maintains the lighting state and heats itself. It keeps heating and keeps at high temperature (above 60 ° C in the case of LD). That is, the life will be shortened significantly. In general, if the temperature of the light source changes, the amount of luminous light will change. In the case of using LD in this embodiment, as the temperature increases, the amount of luminous light decreases. The temperature characteristics of this light source have become There is a risk of measurement error. Although 'photodiode (PD) is not as serious as the above laser diode (LD), it still has some temperature characteristics. According to the model, the sensitivity temperature changes significantly with the wavelength band. The temperature characteristic of this photodetector 11A (reference photodetector 13A) may also be a factor of measurement error. In the case of the beam splitter 8, although quartz glass (BK7) does not have temperature characteristics, the metal or dielectric used in the reflective film has temperature characteristics, and the distribution ratio of transmitted light / reflected light varies with temperature. Therefore, variations in the Pd output caused by the temperature characteristics of the beam splitter 8 may cause measurement accuracy problems. Furthermore, according to the present inventor's review, the PD amplifiers 14a and 14b also show temperature characteristics. Although this temperature characteristic varies depending on the characteristics and performance of the components included in the amplifier circuit and the circuit configuration, the temperature (transmitted light PD output / reference light PD output) ratio may change significantly without temperature control. This tendency also depends on the difference between the transmitted light PD amplifier 14a and the reference light PD amplifier 14b. Figure 4 shows the detection unit 2 with a temperature control mechanism — an example of a rough structure η This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ------------- -(Please read the notes on the back before filling out this page) Lamp · 513568 A7 ___B7_____ 5. Description of the invention (>). In view of the above-mentioned factors, this embodiment is provided on the first light projecting section 4 ′, the second light projecting section 6, the transmitted light receiving section 11, the reference light receiving section 13, the beam splitter 8, and the PD amplifier circuit substrate 14. Thermal modules of thermally conductive components, temperature control mechanisms, heat dissipation mechanisms, and temperature detection mechanisms. First, the thermal modules 21 and 22 provided in the first light projecting section 4 and the second light projecting section 6 will be described. And in this embodiment, since these thermal modules 21 and 22 have the same structure, only the thermal module 21 of the first light-emitting section 4 is shown in detail in FIG. 4. The first light source 4A (made by NTT Electronics: model NKL 1601 TOB) included in the first light emitting unit 4 and the second light source 6 (made by NTT Electronics: model NKL 1402 TOB) included in the second light emitting unit 6 (both are CAN-type LD) is installed in heat-conducting cases 21a, 22a, which are heat-conducting members, respectively. The bottoms of the laser diodes 4A and 6A (opposite to the light emitting surface) are abutted and fixed to the heat-conducting shells 21a, 22a. In addition, the cooling plate side of the Peltier elements 21b and 22b as the temperature control mechanism abuts the bottom of the heat conducting cases 21a and 22a, and the heat conducting cases 21a and 22a are fixed to the heat dissipating mechanism through the Peltier elements. Heat sinks 21c and 22c. Furthermore, the thermistors 21d and 22d are provided in the heat-conducting casings 21a and 22a as a temperature detecting mechanism to detect the temperatures of the laser diodes 4A and 6A. Adhesives with heat dissipation properties (such as the two-liquid room temperature hardening type epoxy resin adhesives SG-EPO series, EP-007, etc., manufactured by Thermomedine) can be applied to the locations where the thermistor is required to be bonded . It is suitable for heat-dissipating grease (for example, manufactured by Mizutani Electric Industry Co., Ltd., · product name: heat sink, etc.) on the bottom of the laser diodes 4A and 6A and the heat-conducting casings 21a and 22a. Home Standard (CNS) A4 Specification (21Q x 297 male ^! I-(Please read the precautions on the back before filling this page) Install nn H One: OJI nn ϋ ϋ I n II-513568 A7 ____ B7 ______ V. Invention Explanation (d). The thermal modules 23 and 24 provided in the transmitted light receiving section 11 and the reference light receiving section 13 will be described. Since the structures of these thermal modules 23 and 24 are the same, FIG. 4 only The thermal module 23 of the reference light receiving section 1 is shown in detail. The thermal modules 23 and 24 of the transmitted light receiving section 11 and the reference light receiving section 13 have thermal modules that are the same as those of the first and second light projecting sections 4 and 6. 21 and 22 have approximately the same structure. Photodiodes (InGaAs-PIN photodiodes manufactured by Hamamatsu Hartnicks Co., Ltd., trade name G5851-01) are used as photodetectors 11A and reference photodetectors 13A. Embedded and installed in the heat-conducting shells 23a and 24a as heat-conducting members. The bottom of each photodiode 11A and 13A The parts are in contact with and fixed to the thermally conductive shells 23a and 24a. The cooling plate side of the Peltier elements 23b and 24b as the temperature control mechanism abuts the bottom of the thermally conductive shells 23a and 24a, and the thermally conductive shells 23a and 24a pass through This Peltier element is fixed to the heat sinks 23c and 24c as a heat dissipation mechanism. Furthermore, a thermistor as a temperature detection mechanism for detecting the temperature of the photodiodes ha and 13A is provided in the thermally conductive housings 23a and 24a. 23d, 24d. Peltier elements with built-in works as temperature control mechanisms and photodiodes with the same characteristics as the above photodiodes (for example, manufactured by Hamamatsu Hartnicks Corporation: Model G5851-11 ) As the transmitted light to receive light. The photodetector 11A and the reference photodetector 13A 'of the reference light receiving section 13 and the reference photodetector 13A can also be respectively mounted on the heat sinks 23a and 24a as heat dissipation mechanisms. The thermal module 25 provided in the beam splitter 8 will be described. The beam splitter 8 is fixed on a heat conducting table 25a which is in contact with it and serves as a heat conducting member. As a temperature 29, this paper is in accordance with China National Standard (CNS) A4 specifications ( 210 X 297 male A (please read the back of the precautions to fill out this page)

513568 A7 _-__ B7_____ 5. Description of the Invention (β) The cooling side of the Peltier element 25b of the control mechanism abuts on the bottom of this heat conduction stage 25a. The heat conduction stage 25a is fixed to the heat dissipation mechanism through the Peltier element 25b. On the mounting table 25c. A thermistor 25d is provided on the heat-conducting stage 25a, and is used as a temperature detecting mechanism for detecting the temperature of the beam splitter 8. A thermal module 26 is further provided to control the temperature of the PD amplification circuit substrate 14 integrally formed by the transmitted light PD amplifier 14a and the reference light PD amplifier 14b. The PD amplifier circuit board 14 is mounted on a heat conducting plate 26a as a heat conducting member. The cooling plate side of the Peltier element 26b as a temperature control mechanism abuts on the back surface on the opposite side of the substrate of the heat transfer plate 26a, and the heat transfer plate 26a is connected to the heat sink 26c via the Peltier element 26b (provided as a heat dissipation mechanism) The heat sink 26e) is exposed to the outside of the liquid concentration detection device 1. In addition, the fan for improving the heat dissipation effect may be exposed outside the same device 1. Further, a thermistor 26d is provided on the heat-conducting plate 26a, which is used as a temperature detecting mechanism for detecting the temperature of the PD amplifying circuit substrate 14. Thermistors 21d to 26d and Peltier elements 21b are respectively provided in the first, second light projecting sections 4, 6, the transmitted light receiving section 11, the reference light receiving section 13, the beam splitter 8, and the PD amplifier circuit substrate 14. ~ 26b is electrically connected to an automatic temperature control circuit (ATC) 43 (FIG. 2) provided in the control section 40, respectively. In addition, according to the output of each thermistor, the power to the Peltier elements 21b to 26b and the driving of the fan 27 are controlled to perform temperature adjustment. Applicable for example, MPT series manufactured by Wavelength Electronics Co., Ltd. as an automatic temperature control circuit 43 ° With the above temperature control mechanism, the temperature can be adjusted to 1 (TC ~ 4 (30 of TC) This paper size is applicable to China Standard (CNS) A4 Specifications (210 X 297 public love) one by one— "(Please read the precautions on the back before filling this page)

513568 A7 ___B7 _ 5. Description of the invention (4) Scope. Preferably, the optical system element is not easily condensed in the atmosphere, and the temperature is controlled to a temperature close to normal temperature. That is, the temperature can be controlled at 20t ~ 30 ° C, preferably at 25 ° C. In addition, although the automatic temperature control circuit (ATC) can also be provided separately for the optical system components, only the first, second light-emitting part 4, and 6-series heating elements are included in the optical system components, so it can be set relative to this. The ATC 43a of the light sections 4, 6 and the two ATCs of the other optical system components, that is, the ATC 43b of the transmitted light receiving section 11, the reference light receiving section 13, the beam splitter 8, and the PD amplifier circuit substrate 14. Also, although a thermal module is provided for each optical system element (including the PD amplification circuit substrate 14), at least the temperature control mechanism of the light-emitting part of the heating element can be independent of other temperature control mechanisms, The optical system elements share temperature control mechanisms such as a thermally conductive member, a temperature control mechanism, and a heat dissipation mechanism. It is also possible to share a heat-conducting member, a temperature control mechanism, a heat-radiation mechanism, and the like with a plurality of light-emitting sections. In addition, the present invention is not limited to having all the temperature control mechanisms described above. For example, when a component with no temperature characteristics or a small temperature characteristic within a tolerable range can be obtained, the temperature control of the component can be omitted. As described above, the temperature control mechanism of this embodiment can prevent various measurement errors caused by the above-mentioned factors. The measurement can be accurately performed without being affected by changes in ambient temperature or the heating element of the concentration detection device 1. In this way, when the concentration range of the target component in the medicinal solution is 0 ~ lwt% (low concentration liquid), each component is ± 0.01wt%, and in the case of 1 ~ 10wt% (medium concentration liquid), ± 0.05wt%, in the case of more than 10wt% (high-concentration liquid), 31 G-size scale turning towels (CNS) A4 specification (210 X 297 public love) " " " '" (Please read the precautions on the back before filling in this page) Packing ---- 1 order --------- line 513568 A7 _ B7 _ V. Description of the invention (P) The measurement accuracy is O.lwt% , To detect the concentration with high accuracy and reliability. Moreover, in the arrangement structure of the first and second light projection sections 4 and 6 of this embodiment, any light source having a central wavelength of 1.65 vm and 1.45 / zm is arbitrarily arranged as the first light source 4A and the second light source 6A. . According to the above embodiment ′, for example, by connecting to an etching solution supply source or a cleaning device, the concentration of each component of the two-component system chemical solution can be detected online. Embodiment 2 The structure of the liquid concentration detection device of this embodiment is substantially the same as that of the liquid concentration detection device 1 of Embodiment 1, except that the structure of the light-emitting portion is different. Therefore, components with the same structure and function are marked with the same symbols, and detailed descriptions are omitted. In this embodiment, a light source having a center wavelength of 1.9 / zm to 2.05 / zm in the near-infrared region, which exhibits a significant absorbance difference as the concentration of the medicinal solution components contained in the medicinal solution to be measured is used, is used. In more detail, this embodiment uses a laser diode (manufactured by NTT Electronics Co., Ltd.) having a central wavelength of emitted light of 2.0 ± 0.05 / zm and a wavelength band of 50% of the maximum light amount of 2.01 // m to 2.03 // m. : Model KELD 1901 CCA / TOA) (hereinafter referred to as the light source with a center wavelength of 2.0 // m). With respect to light in this wavelength band, the degree of change in absorbance caused by the difference in liquid concentration is different from that of light with a central wavelength of 1.65 // m and a central wavelength of 1.45 # m. The light source with a center wavelength of 2.0 // m can be used to replace the liquid of Example 32. The paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) · 1__1 nnn I ». Nn ^ OJI ϋ Βϋ n ϋ I ϋ n 513568 A7 -------- _B7__ V. Description of the invention U 丨) The center wavelength used in the concentration detection device 1 as the first light source 4A is 1.65 / Light source of zm. In this way, two different wavelength bands of a central wavelength of 2.0 // m and a central wavelength of 1.45 // m can be irradiated to the liquid to measure the concentration of each component in the mixed chemical solution of the two-component system. A light source having a center wavelength of 2_0 // m can be used instead of the light source having a center wavelength of 1.45 # m as the second light source 6A in the liquid concentration detection device 1 of the first embodiment. In this way, light with different wavelength bands of the central wavelength ι · 65 // m and the central wavelength 2.0 # m can be irradiated to the liquid to measure the concentration of each component in the two-component system medicinal solution. The calculation method of the concentration of each component in the two-component system mixed chemical solution can be performed as in the first embodiment. That is, by performing a predetermined chirp or a predetermined correction operation on light of each wavelength, the constants of the coefficients K, / 3 ((3), (4)) or K, A in the concentration calculation formula can be set by (10 ) And (11) calculate the concentration of each component in the two-component system mixed chemical solution. In this way, in the case where a laser diode emitting light with a central wavelength of 2.0 / zm is used as a light source instead of the first light source 4A or the second light source 6A of Embodiment 1, the mixed medicinal solution can be measured online, immediately, and with high accuracy The second is to measure the individual concentrations of the target components. Embodiment 3 In this embodiment, the concentration of each component of a three-component system mixed chemical liquid is detected by irradiating light with a central wavelength L4 at three different wavelength bands of m to 2.05 / z m to a liquid. And because the structure of the detection section and control section of the liquid concentration detection device of this embodiment is basically the same as that of Embodiment 1, the same symbols are used. 33 This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). (Please read the precautions on the back before filling out this page) _ 装 i-Order --------- · 513568 A7 B7 ------ --- ---- Jade, Invention Description (# ) Mark components with the same function and structure, and omit detailed descriptions. In this embodiment, in order to simplify the structure, the two light-emitting sections are configured and configured as described in the first embodiment, and a set of optical element groups is further provided thereon. That is, the detection section 94 (FIG. 3) of the unit 9 extending in the liquid flow direction is provided with the first light projecting section 4 and the second light projecting section 6, the first beam splitter 8, the first transmitted light receiving section 11 and The optical system element group shown in FIG. 1 of the first test light receiving unit 13 includes a third light projecting unit 101, a second beam splitter 103, a second transmitted light receiving unit 105, and a second reference light receiving unit 107. The optical system element group shown in FIG. 10 is stacked along the liquid flow direction, and the light projected from each light-emitting portion is irradiated to the liquid in the unit 9 to measure the amount of light transmitted by the liquid. As in the above embodiment, a collimator 102 is provided in the third light projecting section 101, and a condenser lens 106 is provided in the second transmitted light receiving section 105 and the second reference light receiving section 107. The photodiodes used in the above embodiments are used as the second transmitted light receiving section 105 and the second reference light receiving section 107. This embodiment uses a laser diode (NTT Electronics: model NKL 1601 CCA / TOA) (light source with central wavelength 1.65 / zm) that emits light with a central wavelength of 1.65 // m ± 0.05 // m as the first investment. The first light source 4A included in the optical unit 4 uses a laser diode (manufactured by NTT Electronics: model KELD 1901 CCA / TOA.) That emits light with a center wavelength of 2.0 // m ± 0.05 / zm. (Center wavelength 2.0 # m light source) as the second light source 6A included in the second light emitting unit, a laser diode (NTT Electronics Co., Ltd. model: NKL 1402 ΊΌΒ) that emits light with a center wavelength of 1.45 / zm ± 0.015 / zm is used repeatedly ( A light source having a center wavelength of 1.45 / zm) is used as the third light source provided in the third light projecting section 101. Light absorbing groups of each wavelength band light from the first, second, and third light sources 34 (Please read the precautions on the back before filling this page)

A * ϋ m ϋ nnintm I nm —ϋ —ϋ I · This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm). If A: export C, = (l / A): 513568 A7- --- B7 V. Description of the invention (A) Different basis' The degree of change in absorbance varies with the concentration difference of each drug solution. Furthermore, according to this embodiment, the PD output corresponding to the light from the second light source 6A is the same as that in the first embodiment and is derived according to the formula (5). In addition, the light-emitting unit of the present invention is not limited to the arrangement and structure of the present embodiment, and may be realized by providing a complex array such as the optical system element group shown in Fig. 10 as described above. In addition, the light source of each wavelength band light is not limited to the configuration of the present invention, and can also be set in any three-component system of the light-emitting part. The concentration calculation of each component in the mixed liquid can be mixed with the two-component system described in Example 1. The concentration of the chemical solution is calculated in the same way. .Consider to obtain a three-component system composition by mixing a single-component system chemical solution (ingredient). Based on the light of a given wavelength, the absorbance of each component and the absorbance of a multi-component system mixed chemical solution, a three-component system mixed chemical solution The absorbance is calculated by introducing the calculation formula used to calculate the concentration of each component. Then, 1 ·· m: m: η are used to mix the chemical solution A [((l + m + nVl) · Ca], the chemical solution B [((l + m + n) / m) · Cb], and the chemical solution C [((l + m + n) / n) · Cc] derives the absorbance of the mixed chemical solution [capacity 1 + m + n] with respect to each wavelength of light. In this way, the concentration calculation of each component in the mixed chemical solution is obtained Formula ^ 'βΑ ^ βΒ F 1 / meaning 1 / time F' 1 / fan 1 / fan F, M β, β \ lx, c 35 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ) (Please read the notes on the back before filling this page)

513568 A7 B7 V. Description of the invention (^ (1 / Δ) x here op /// C »c MC op op /// 1 / βΑ ι / βΒ F Ά Ά F, Ά ιΐβΐ F ', \ 〇-Ln (r) F '= ε -Ln (r,) F ”= 5-Ln (r”) and θ = Ka / β A = Kb / β B = Kc / β C £ = Ka β A = Kb / / 3 B = Kc / β C a ^ KbV ^ b ^ KcV / Sc (mark description)

Ca Cb Cc r ΞConcentration of medicinal solution A in three-component system solution Concentration of medicinal solution B in three-component system solution Concentration of medicinal liquid C in three-component system solution First light of three-component medicinal solution (center wavelength 1.65 // m) light transmittance (or light receiving system output) τ • light transmittance (or light receiving system output) of the second light (center wavelength 1.4 // m) of the two-component system music liquid τ ”: three-component system The light transmittance of the third kind of light (central wavelength 2.0 // η) (or the output of the light receiving system) ra · Single-component system liquid A [concentration ((l + m + n) / l) · Ca] 5 36 This paper size applies to China National Standard (CNS) A4 (210 χ 297 public love) (Please read the precautions on the back before filling this page)

513568 A7 V. Description of the invention (W) The first kind of light transmittance (or output of the light receiving system) τ B: the single component system liquid B [concentration ((l + m + n) / m) · CB] Light transmittance of one kind of light (or output of the light receiving system) τ c: light transmittance of the first kind of light (or concentration ((i + m + n) / n) · 〇:] of single component system) (or Output of light receiving system) r /: single-component system medicine liquid a [concentration ((l + m + n) / i) · Ca] light transmittance of the second kind of light (or light-receiving system output) r two single-component system medicine Liquid B [Concentration ((i + m + n) / m) · The light transmittance of the second kind of light (or the output of the light receiving system) τ. ': Single-component system medicinal solution C [Concentration ((1 + m + n) / n) · No. 2 light transmittance of light (or light receiving system output) τ a ”: Single-component system medicinal solution a [ Concentration ((1 + m + n) / 1) · Ca] light transmittance of the third kind of light (or output of the light receiving system) r B. Single component system liquid B [concentration ((i + m + n) / m) · cB] light transmittance of the third kind of light (or output of the light receiving system) τ c • single-component system medicinal solution C [concentration ((i + m + n) / n) · 〇] third kind of light Light transmittance (or light receiving system output)

Ka, Kb, Kc, Ka ', Kb', Kc ', Ka ", Kb", Kc ", / 3 A, / 3 B, no C, no A', point B ', / 5 c', 10,000 A ", Wan B ,,, point c ,,: constants of the single-component system music solution A, B, c with respect to the concentration of each wavelength of light (expression (2)). As in the case where the component liquid is mixed in one of the component systems of Example 1, the predetermined coefficients K, / 5 ((3) and ⑷) in the concentration calculation formula are set by performing predetermined chirping or predetermined calibration operations on light of each wavelength. The constant, or κ, Lu itself, can be 37 paper sizes applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 public love) (Please read the precautions on the back before filling this page), ------- -Order ------- 513568 A7 _____B7 V. Description of the invention (4) (13), (14), (15) Calculate the concentration of each component in the three-component system medicinal solution. The three-component system chemical solution includes, for example, an aqueous solution of HF-HNO3-CH3COOH, H3P04-HNO3-CH3COOH, etc., which are used as an etching solution and a cleaning solution. According to the present invention, the concentration of each measurement target component of the three-component system mixed medicinal solution can be detected online, in real time, and with high accuracy. Embodiment 4 In this embodiment, a wavelength-variable type lightning is used in an optical system including the optical system components shown in FIG. 10, that is, the light projecting section 4, the beam splitter 8, the transmitted light receiving section 11, and the reference light receiving section 13. As the light source 4A of the light projecting section 4, a light source with a variable wavelength such as light is emitted, thereby irradiating light of different wavelength bands from one light projecting section. In this case, the light with a central wavelength of 1.4 // m to 2.05 // m is also switched from the wavelength-variable light source. Preferably, the center wavelengths are switched from 1.42 / zm to 1.48 / zm, 1.55 // m to 1.85 / zm, 1.95 # m ~ 2.05 / zm light of at least two different wavelength bands, irradiate it with the liquid in the unit 9, and sequentially detect the amount of transmitted light of the liquid, which can be calculated by the calculation method described above to detect multiple components The concentration of each component in the system liquid. Of course, it is also possible to use the configuration described in Example 1 to set up two light-emitting sections. One light-emitting section is provided with a wavelength-variable light source, which irradiates light of two different wavelength bands, and irradiates light of a total of three different wavelength bands. The configuration of the light source combined with a fixed wavelength. And 'In addition to the liquid concentration detection device of this embodiment, which has a wavelength of 38, the paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page) --- -'· ---- Order -------- • Line 513568 A7 ---------- B7____ V. Description of the invention (4) The light-emitting part 4 of the deformable light source, the detection part The structure of the control unit is basically the same as that of the liquid concentration detection device of the first embodiment. Since the same calculation method as that of the first to third embodiments can be applied, the foregoing description is referred to here. According to the present invention as described above, by using a wavelength-variable light source, the concentration of multiple components in the medicinal solution to be measured can also be detected online, with high accuracy. Embodiment 5 Next, another embodiment of the liquid concentration detecting device of the present invention will be described. In the arrangement structure of the light projecting section described in the first embodiment, a light source that emits light of the same wavelength band can be used as the first light source 4A and the second light source 6A. In this way, when detecting the concentration of a single-component system drug solution, for example, when the light amount of a light source is insufficient, or when the light amount is increased to lengthen the light path length of the transmitted light of the sample, a sufficient light amount can be increased, and the appropriate increase can be made. The amount of light of the desired wavelength. Moreover, in this case, it is not necessary to use the light blocking mechanism 15 that blocks the light from the second light source 6A at a predetermined timing. As described above, according to the present invention, by arranging the light from the first light projecting section 4 and the second light projecting section 6 to be orthogonal to the beam splitter 8, optical elements other than the light source (beam splitter 8 and transmitted light can receive light). The unit 11, the reference light receiving unit 13, and the PD amplifying circuit substrate 14) share two light sources to increase the amount of light in a predetermined wavelength band, and can simplify the structure and significantly reduce costs.减少 The number of components with the required temperature control is reduced, and the temperature control of the optical system components (including the PD amplifier circuit substrate 14) is easy. And, of course, it can be combined to emit 39 different wavelength bands than the first and second light sources. This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 public ^! ^ &Quot; (Please read the precautions on the back before (Fill in this page) nnnn ^ OJfl nn ϋ nn _513568 A7 _ B7__ V. Description of the Invention (θ) The third light source of light, etc., further add a light source to detect the concentration of each component of the multi-component system mixed liquid medicine. Example 6 The principle of the temperature control mechanism of the optical system element described in Embodiment 1 can also be applied to, for example, as shown in FIG. 10, a unit 9 having a liquid supply, and facing in a direction orthogonal to the axis direction of the liquid flow path in the unit 9. One of the light projecting part 4 and the transmitted light receiving part 11 and a part of the light extracted from the light projecting part 4 to direct the light to the liquid concentration detecting device of the beam splitter 8 of the reference light receiving part 13, namely, a single component system A liquid concentration detection device for a chemical liquid, or a liquid concentration detection device for detecting at least the concentration of two components in an aqueous solution by using a light-emitting unit having a wavelength-variable laser as described above. The industrial availability is as described above. According to the present invention, the concentration of multiple components contained in an aqueous solution such as a cleaning solution, an etching solution, or a photoresist stripping solution used in a semiconductor process or a liquid crystal substrate process can be detected in real time and with high accuracy. According to the present invention, the structure can be simplified, the liquid concentration can be detected with high accuracy, and the cost can be reduced. Furthermore, according to the present invention, the measurement error of the temperature characteristics of each element can be prevented, and the concentration range of the target component can be measured in the chemical solution. Stomach 〇 ~ 1% (low concentration liquid), ± 0.01% for each component, 1 ~ 10% (medium concentration liquid), ± 0.5%, 10% or more (high concentration liquid) ， Detecting the concentration with high accuracy and reliability with a measurement accuracy of ± 0.1%. ^ 40 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before reading) (Fill in this page) -------- Order --------- line 513568 A7 _B7 V. Description of the invention (1) Symbol description 1 Liquid concentration detection device 2 Detection section 3 Optical system 4 First investment Light section 4A First light source 6 Second light projection section 6A 2 light source 8 beam splitter 9 units 10, 12 condenser lens 11 transmitted light receiver 11A photodetector 13 reference light receiver 13A reference light detection 14 PD amplifier circuit board 14a transmission PD amplifier 14b reference light PD amplifier 15 light shield Breaking mechanism 16 Leak sensor 21a, 22a, 23a, 24a Thermally conductive housing 21b, 22b, 23b, 24b, 25b, 26b Peltier element 41 (Please read the precautions on the back before filling this page) Installation 丨!! · Order -------- This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) 21c, 22c, 23c, 24c 21d, 22d, 23d, 24d, 25d Radiator thermistor 2 22, 23, 24, 25, 26 Thermal module 25a Heat transfer stage 25c Mounting stage 26a Heat transfer plate 26c Heat sink 26e Heat sink 40 Control unit 41 100VAL power supply 42 Power supply circuit 43 (43a, 43b) Automatic temperature control circuit (ATC ) 44 Automatic light quantity adjustment circuit 45 Microcomputer 46 Display circuit 47 Display section 48 Alarm setting circuit 49 Correction circuit 91 Flow path 92 Flow inlet 93 Flow outlet 94 Detection section 95a, 95b, 95c Connection device _ 42 513568 A7 _B7 V. Description of the invention (This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)) (Please read the precautions on the back before filling this page)

513568 A7 B7 V. Description of the invention (96a, 96b tube 97 side hole 98 liquid temperature detector 101 third light projection unit 102 collimator 103 second beam splitter 105 second transmitted light receiving unit 106 condenser lens 107 second Reference light receiving section (please read the precautions on the back before filling this page) Loading -------- Order ------- Line _ · This paper size applies to China National Standard (CNS) A4 specifications ( 210 X 297 mm)

Claims (1)

A8B8C8D8 513568 6. Patent application scope pT 1 •] One: two 1. A method for detecting the concentration of a liquid, characterized in that light with a different wavelength band with a central wavelength of 1.4 // m ~ 2.05 vm is irradiated to the liquid and detected. Each The amount of light transmitted by the liquid in the wavelength band is used to detect the concentration of different components contained in the liquid. 2. The liquid concentration detection method according to item 1 of the scope of patent application, wherein the light irradiated to the liquid is selected from the center wavelengths of 1.42 // m to 1.48 // m, 1.55 / zm to 1.85 / zm, 1.9 // m ~ 2.05 // m light of different wavelength bands. 3. If the liquid concentration detection method of item 2 in the scope of the patent application, the first light with a central wavelength of 1.55 // m ~ 1.85 and the second light with a central wavelength of 1.42 // m ~ 1.48 // m Light to liquid. 4. If the liquid concentration detection method of item 3 in the scope of the patent application, the first light with a central wavelength of 1.65 / zm ± 0.05 // m and the central wavelength of 1.45 // m ± 0.015 // m 2 kinds of light to liquid. 5. For the liquid concentration detection method in item 2 of the scope of the patent application, the first light and center irradiated with a central wavelength of 1.9 / zm ~ 2.05 / zm 丨 skin and stomach. 1.42 / zm ~ 1.48 // m 2 kinds of light to liquid. 6. If the liquid concentration detection method of item 5 of the patent application scope is gone, the center wavelength of the radiation is 2.0 ± 0.05 / zm. 1. The light and center wave: ^ is 45 //m±0.015/zm. 2 kinds of light to liquid. 7 · If the liquid concentration detection method in item 2 of the scope of the patent application is gone, the first light and center with an emission center wavelength of 1.55 // m ~ 1.85 / zm 丨 skin and stomach 1.9 " m ~ 2.05 // m The second kind is light on liquid. > 8. If the liquid concentration detection method of item 7 in the scope of the patent application is applied, the first light and center with an emission center wavelength of 1.65 // m ± 0.05 / zm 丨 skin length ^ ---- 1 --- -This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm), ------ installed --------- ^ ----- ordered ------ ---------- Line (Please read the precautions on the back before copying this page) 513568 A8 B8 C8 D8 6. The second type of light applied to liquid is patent application range of 2.0 ± 0.05 // m. 9. As for the liquid concentration detection method in the second scope of the patent application, it is to irradiate one kind of light with a central wavelength of 1.55 // Π1 to 1.85 // Π1, a second kind of light with a central wavelength of ~ 2.05 // m, and a center The third kind of light with a wavelength of 1.42 // m to 1.48 / zm is liquid. 10. If the liquid concentration detection method of item 9 of the scope of patent application is applied, the first light with a central wavelength of 1.65 // m ± 0.05 // m and the second light with a central wavelength of 2.0 / zm ± 0.05 // m are irradiated. Two kinds of light 'and a third kind of light with a center wavelength of 1.45 / zm soil 0.015 / zm on liquid. 11. The method for detecting a liquid concentration according to any one of claims 1 to 10, wherein the liquid system includes an etching solution, a cleaning solution, and a photoresist stripping solution. 12. The liquid concentration detection method according to any one of claims 1 to 10 in the scope of the patent application, wherein the liquid contains a member selected from the group consisting of hydrofluoric acid-hydrogen peroxide (HF-H2O2), hydrofluoric acid-hydrochloric acid (HF -HC1), hydrofluoric acid-ammonium fluoride (HF-NH4F), hydrofluoric acid-nitric acid (HF-HNOO, ammonium hydroxide-hydrogen peroxide (NH4〇H-H20)), sulfuric acid-hydrogen peroxide (H2s〇4-h2〇2), sulfuric acid-hydrochloric acid (H2Sa-HCl), phosphoric acid-nitric acid (H3P04-HNO3), hydrochloric acid-hydrogen peroxide (HCl-H2O2), potassium hydroxide-peroxide Two components of the group consisting of hydrogen oxide (KOH_H2O2) and hydrochloric acid-ferric chloride (HCl-FeCh). 13. For a liquid concentration detection method according to any one of claims 1 to 10 in the scope of patent application, wherein the aforementioned liquid Contains three components selected from the group consisting of hydrofluoric acid-nitric acid-acetic acid (O ^ -HN〇3-CH3COOH), phosphoric acid-shiken acid-acetic acid (H3P〇4-HN〇3-CH3COOOH) . -------------------------- 装 --------- ιϋ, ιτ ----------- ---- • Line (Please read the precautions on the back before filling this page) This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) A8B8C8D8 513568 6. Application for patent scope 14. A liquid concentration The detection device is characterized by comprising: a unit for supplying liquid; a mechanism for irradiating liquid in the aforementioned unit with light having a different wavelength band at a center wavelength of 1.4 / zm to 2.05 / zm; and detecting each wavelength of the liquid passing through the aforementioned unit The light quantity mechanism 9 detects the concentration of different components contained in the liquid based on the detected light transmission quantity of the liquid. 15. The liquid concentration detection device according to item 14 of the scope of patent application, further comprising a mechanism that takes out a portion of the light irradiated to the liquid in the aforementioned unit as a reference light, and corrects based on the light amount of the reference light The amount of light transmitted through the liquid in the cell. 16. If the liquid concentration detection device of the scope of patent application No. _15, it has the first and second light projection units, each with a light source; (b) a beam splitter, will be from the first and the first 2 The light emitted by the light projecting section is divided along the first direction and the second direction, respectively; (c) a transmitted light receiving section, which is provided with a photodetector, and the photodetector is received from the aforementioned first and second The light emitted from the light projection unit and transmitted through the liquid in the unit by the beam splitter pointing in the first direction: and (d) — a reference light receiving unit having a reference photodetector, which is received by the reference photodetector Light emitted from the first and second light projection units and directed to the second direction by the beam splitter. 17. The liquid concentration detection device according to item 15 of the patent application scope, which has (a) the first, second, and third light-emitting sections, each of which has a light source; (b) the first beam splitter, which will be from the aforementioned The light emitted by the 1st and 2nd light-emitting sections are respectively -----. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ----------- --- …… ------- install ......... IΓ! -Order ---------------- line (Please read the precautions on the back first (Written on this page) 513568 Jaw C8 D8 6. The scope of the patent application is divided along the first direction and the second direction; (C) The second beam splitter will be the light emitted from the aforementioned third light emitting section along the first And the second direction are divided; (d) the first transmitted-light receiving section includes a light detecting section, and the light detecting section receives the light emitted from the first and second light-emitting sections and is directed by the first beam splitter; Light passing through the liquid in the unit in the first direction; (e) The first reference light receiving unit includes a reference photodetector. The reference photodetector is received from the first and second light emitting units. By the aforementioned first beam splitter, the light directed in the second direction; (f) the second transmitted light A light unit including a light detector that receives light emitted from the third light-emitting unit and transmitted through the liquid in the unit by the second beam splitter pointing in the first direction; and (g) the 2 The reference light receiving unit is provided with a reference photodetector. The reference light detector receives light emitted from the third light-emitting unit and is directed to the second direction by the second beam splitter. 18. The liquid concentration detection device according to item 16 or 17 of the scope of patent application, wherein the optical axis of the light emitted from the aforementioned first and second light emitting sections is orthogonal to the aforementioned beam splitter. 19. If the liquid concentration detection device according to item 16 or 17 of the patent application scope is further provided with a light blocking mechanism, it blocks the light emitted from one side of the aforementioned first and second light projectors to the aforementioned beam splitter. Light; in a state where the light sources of the aforementioned first and second light-emitting sections are lighted at the same time, the light from a light source is blocked at a predetermined time. 20. If the liquid concentration detection device according to item 16 or 17 of the scope of patent application, further has a light blocking mechanism that blocks light emitted from both sides of the aforementioned first and second light projectors to the aforementioned beam splitter. ; In the aforementioned 1st, this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ......... -------- ri order ---------------- line (please read the precautions on the back before writing this page) A8B8C8D8 513568 6. The scope of patent application 2 When the light sources of the light-emitting part are turned on at the same time, the light from a light source is cut off at a predetermined time. 21-The liquid concentration detection device according to item 19 of the application, wherein the light blocking mechanism includes a shutter mechanism. 22. In the liquid concentration detection device 'according to item 20 of the application, the light blocking mechanism includes a shutter mechanism. 23. The liquid concentration detection device according to item 19 of the scope of patent application, wherein the light interruption interval of the light interruption mechanism is 1 to 10 seconds. 24. As for the liquid concentration detection device of item 20 of the application scope, the light interruption interval of the aforementioned light interruption mechanism is 1 to 10 seconds. 25. If the liquid concentration detection device of item 19 in the scope of the patent application 'wherein, the liquid transmitted light amount of the light emitted from one of the aforementioned first and second light emitting units is obtained by emitting light from the aforementioned first and second light emitting units. The total amount of liquid transmitted light of the light emitted by the two parts is detected by subtracting the amount of liquid transmitted light of the light emitted from a light projecting part. 26. For the liquid concentration detection device according to item 20 of the scope of the patent application, wherein the liquid transmitted light amount of the light emitted from one of the aforementioned first and second light emitting units is obtained by emitting light from the aforementioned first and second light emitting units. The total amount of liquid transmitted light of the light emitted by the two parts is detected by subtracting the amount of liquid transmitted light of the light emitted from a light projecting part. 27. If the liquid concentration detection device according to item 16 or 17 of the scope of patent application, the light source of each of the aforementioned light projection units is selected from the center wavelength of 丨 · 42 "^! ~ 1.48 // m, 1.55 // m ~ 1.85 // m, 1.9 # m ~ 2 · 05 // m light, which emit light with different wavelength bands, respectively. ----- $ ------- This paper size is applicable to China National Standard (CNS) A4 Specifications (210 X 297 mm) .............. • Installed --------- Bu! ... # * ...... line (please read the notes on the back before writing this page) ^ 3568 S88 ------------- VI.Application Patent scope 28. For example, the liquid concentration detection device of the 27th scope of the patent application, wherein the light sources of the aforementioned light projection units are respectively selected from laser diodes that emit light with a central wavelength of 1.45 / zm soil 0.015 // m 2. Laser diode with a center wavelength of 1.65 / im soil 0.05 " m of light and laser diode with a center wavelength of 2_0 // m ± 0.05 // m. 29. If the scope of patent application is 15th The liquid concentration detection device of the item has a tritium light projecting unit, which is provided with a wavelength-variable light source capable of emitting light of different wavelength bands; (b) a beam splitter, which will be The light emitted by the light-emitting section is divided in the first direction and the second direction; (c) the transmitted light-receiving section is provided with a light detector, which is received by the light-emitting section and borrows the beam splitting The detector is directed in the first direction and transmits the light of the liquid in the unit; and (d) a reference light receiving unit including a reference photodetector. The reference photodetector receives the light emitted from the light emitting unit and borrows the light. The beam splitter is directed to the light in the second direction. 30. For example, the liquid concentration detection device in the scope of the patent application No. 29, wherein the center wavelength emitted by the wavelength-variable light source provided in the aforementioned light projection unit is 1.42 / zm ~ 1.48 // m, 1.55 / zm ~ 1.85 / zm, 1.9 / zm ~ 2.05 / zm light in different wavelength bands. 31. For the liquid concentration detection device of the patent application No. 16, 17 or 29, it is for the aforementioned The ratio of the output of the photodetector to the output of the reference photodetector is multiplied by a predetermined reference to correct the output of the photodetector, and then the amount of light transmitted by the liquid is detected. Item of liquid concentration detection device Among them, the aforementioned beam splitter is an unpolarized beam splitter. __---- 6 ---- The size of the clothing paper conforms to the ITS National Standard (CNS) A4 specification (210 X 297 mm) ------- ------------------- Equipment --------- ri order ............ i-line (please read first (Notes on the back are reproduced on this page) 1888) 8 ABCD 513568 6. Application for patent scope 33. For the liquid concentration detection device with the scope of patent application No. 16, 17 or 29, among which the aforementioned beam splitter is a three-dimensional beam splitter . 34. If the liquid concentration detection device according to item 16, 17, or 29 of the scope of patent application, further includes temperature control provided in all of the aforementioned light projection section, the aforementioned beam splitter, the aforementioned transmitted light receiving section, and the aforementioned reference light receiving section Organization 35. If the liquid concentration detection device according to item 16, 17, or 29 of the scope of application for a patent, further includes one of the light-emitting unit, the beam splitter, the transmitted-light receiving unit, and the reference-light receiving unit. Part of the temperature control mechanism. 36. The liquid concentration detection device according to item 34 of the scope of patent application, further includes a temperature control mechanism for the output amplifier circuit with respect to the aforementioned photodetector and the aforementioned reference photodetector. 37. For example, the liquid concentration detection device in the scope of the patent application No. 35, further has a temperature control mechanism for the output amplifier circuit relative to the aforementioned photodetector and the aforementioned reference photodetector. 38. The liquid concentration detection device according to item 36 of the application, wherein the output amplifier circuit of the aforementioned photodetector and the aforementioned reference photodetector are integrally formed on the same substrate. 39. The liquid concentration detection device according to item 37 of the application, wherein the output amplifier circuits of the aforementioned photodetector and the aforementioned reference photodetector are integrally formed on the same substrate. 40. If the liquid concentration detection device according to item 34 of the patent application scope, wherein the temperature control mechanism is provided with a Peltier element, the paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 2977) Public -------------------------- Install --------- Γ, Γ Order ........ ........ line (Please read the precautions on the back before writing this page) 513568 A8 B8 C8 D8 6. Apply for patent scope cooling mechanism (Please read the precautions on the back before writing this page) 41. For example, the liquid concentration detection device according to item 35 of the patent application, wherein the temperature control mechanism is provided with a cooling mechanism composed of Peltier elements. 42. For example, the liquid concentration detection device according to item 40 of the patent application, The temperature control mechanism is further provided with a thermally conductive member for transmitting heat from the temperature control object to the Peltier element. 43. The liquid concentration detection device according to item 41 of the patent application scope, wherein the temperature control mechanism further includes A thermally conductive member for transferring heat from a temperature-controlled object to the aforementioned Peltier element. 44 For example, the liquid concentration detection device in the scope of patent application No. 34, wherein the temperature control mechanism of the aforementioned light projection unit is independent of the temperature control mechanism for other temperature control objects. Concentration detection device, wherein the temperature control mechanism of the light-emitting part is independent of the temperature control mechanism for other temperature control and manufacturing objects. 46. For example, the liquid concentration detection device of the scope of application for patent No. 14 wherein the aforementioned liquid The system includes an etching solution, a cleaning solution, and a photoresist stripping solution. 47. The liquid concentration detection device according to item 14 of the patent application scope, wherein the aforementioned liquid system includes a member selected from hydrofluoric acid-hydrogen peroxide (HF-H2 02 ), Hydrofluoric acid-hydrochloric acid (HF-HC1), hydrofluoric acid-ammonium fluoride (HF-NEUF), hydrofluoric acid-nitric acid (HF-HN03), ammonium hydroxide-hydrogen peroxide (NH4〇H -H2〇2), sulfuric acid-hydrogen peroxide (H2S (VH2O2), sulfuric acid-hydrochloric acid (HdCVHCl), phosphoric acid-nitric acid (H3P04-HNO3), hydrochloric acid-hydrogen peroxide (HCl-H2〇2 ), Potassium hydroxide-peroxy This paper size applies to China National Standard (CNS) A4 (210 X 297 male) (%) A8B8C8D8 513568 VI. Application for patent scope Two components of the group consisting of hydrogen chloride (ΚΟΗ-Η202), hydrochloric acid-ferric chloride (HCl-FeCh) 48. Liquid concentration detection device such as item 14 of the scope of patent application Wherein, the aforementioned liquid system includes three components selected from the group consisting of hydrofluoric acid-nitric acid-acetic acid (HF-HNCb-CH3COOH) > ^ (H3P〇4-HN〇3.CH3COOH) mi # l ^ group. 49. A liquid concentration detection device, characterized by having a unit for supplying liquid with tritium; (b) first and second light-emitting sections each having a light source; (c) a beam splitter, which will be from the first And the light emitted from the second light projection section are divided along the first direction and the second direction, respectively; (d) —the transmitted light light receiving section, which is provided with a photodetector, and the photodetector is received from the aforementioned first and second The light emitted by the light projecting unit and transmitted through the liquid in the unit by the beam splitter pointing in the first direction; and a reference light receiving unit having a reference photodetector. The photodetector for this test is received from the foregoing. The light emitted from the first and second light-emitting sections and directed to the second direction by the beam splitter; the optical axis of the light emitted from the first and second light-emitting sections is orthogonal to the beam splitter. 50. The liquid concentration detection device of the 49th scope of the patent application, wherein the light sources of the aforementioned first and second light emitting units emit light of different wavelength bands. 51. The liquid concentration detection device of the 49th scope of the patent application. Among them, the light sources of the aforementioned first and second light-emitting sections emit light of the same wavelength band. 52. If the liquid concentration detection device of the 49th scope of the patent application, it is ______9 ------- --- this Paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) .................--------- ii Order the line (please read the precautions on the back before filling in this page) 513568 A8 D8 VI. The scope of patent application for the output of the aforementioned photodetector and the aforementioned reference The ratio of the output of the photodetector is multiplied by a predetermined reference value to correct the output of the aforementioned photodetector, and then the amount of light transmitted by the liquid is detected. 53. The liquid concentration detection device according to item 49 of the application, wherein the aforementioned beam splitter is an unpolarized beam splitter. 54. The liquid concentration detection device according to any one of claims 49 to 53, in which the aforementioned beam splitter is a three-dimensional beam splitter. 55. The liquid concentration detection device according to item 49 of the scope of patent application, further includes a temperature control mechanism provided in all of the aforementioned light projection section, the aforementioned beam splitter, the aforementioned transmitted light receiving section, and the aforementioned reference light receiving section. 56_ The liquid concentration detection device according to item 49 of the scope of patent application, further comprising a temperature control mechanism provided in a part of the aforementioned light projection section, the aforementioned beam splitter, the aforementioned transmitted light receiving section, and the aforementioned reference light receiving section. 57. The liquid concentration detection device according to item 55 of the scope of patent application, further includes a temperature control mechanism for an output amplifier circuit with respect to the aforementioned photodetector and the aforementioned reference photodetector. 58. The liquid concentration detection device according to item 56 of the scope of patent application, further comprising a temperature control mechanism for the output amplifier circuit with respect to the aforementioned photodetector and the aforementioned reference photodetector. 59. The liquid concentration detecting device according to claim 57 of the application, wherein the output amplifier circuits of the aforementioned photodetector and the aforementioned reference photodetector are integrally formed on the same substrate. 60. If the liquid concentration detection device according to item 58 of the scope of patent application, wherein the output amplifier circuit of the aforementioned photodetector and the aforementioned reference photodetector, the paper size is applicable to China National Standard (CNS) A4 specification (210 x 297 mm) ) ................ ^ ----------- !! ix ........ ........ 瘅 (Please read the notes on the back before writing this page) 513568 028895 ABCD ^, and the scope of the patent application is integrated on the same substrate. 61. The liquid concentration detection device according to any one of claims 55 to 58 in the patent application scope, wherein the temperature control mechanism is provided with a cooling mechanism composed of a Peltier element. 62. The liquid concentration detection device according to item 61 of the patent application range, wherein the aforementioned temperature control mechanism further includes a thermally conductive member that transmits heat from the temperature control object to the Peltier element. 63. The liquid concentration detection device according to any one of claims 55 to 60, wherein the temperature control mechanism of the light-emitting section is independent of the temperature control mechanism for other temperature control objects. 64. A liquid concentration detection device, comprising: a unit for supplying liquid; (b) a light-emitting section provided with a light source; (c) a beam splitter, which emits light from the light-emitting section along the direction of .1 and Dividing in the second direction; (d) a transmitted-light receiving section provided with a photodetector that receives light emitted in the first direction by the aforementioned beam splitter; and (e) a reference-light receiving section, which A reference and photodetector is provided. The reference photodetector receives light emitted in the second direction by the beam splitter. The photo detector is provided with the light projection unit, the beam splitter, and the transmitted light. Temperature control mechanism for all of the light receiving section and the aforementioned reference light receiving section. 65. A liquid concentration detection device comprising: a unit for supplying a liquid; (b) a light-emitting portion having a light source; and (c) a beam splitter that emits light from the light-emitting portion along the first direction and the first Divided in two directions; (d) Transmitted light receiving section, which includes a photodetector, which receives light emitted in the first direction by the beam splitter; and ⑹Reference light receiving section, which is provided for reference. _______ u ----- ^ Paper size is suitable ^ Standard (CNS) A4 size (210 X 297 mm) ------------------------- -^ -----------—— 1T ....... iiit (Please read the precautions on the back before writing this page) 513568 g VI. Patent Application Photodetector, this The reference photodetector receives light emitted in the second direction by the beam splitter, and includes a light detector provided in the light projection section, the beam splitter, the transmitted light receiving section, and the reference light receiving section. Part of the temperature control mechanism. 66. If the liquid concentration detection device according to item 64 or 65 of the scope of patent application, it further has a temperature control mechanism for the output amplifying circuit relative to the aforementioned photodetector and the aforementioned reference photodetector. 67. The liquid concentration detection device according to item 66 of the application, wherein the output amplifier circuits of the aforementioned photodetector and the aforementioned reference photodetector are integrally formed on the same substrate. 68. The liquid concentration detection device according to claim 64 or 65, wherein the temperature control mechanism is provided with a cooling mechanism composed of a Peltier element. 69. The liquid concentration detection device according to item 66 of the patent application scope, wherein the temperature control mechanism is provided with a cooling device composed of a Peltier element. 70. The liquid concentration detection device according to item 67 of the application, wherein the temperature control mechanism is provided with a cooling mechanism composed of a Peltier element. 71. The liquid concentration detection device according to item 68 of the patent application range, wherein the temperature control mechanism further includes a thermally conductive member for transmitting heat from the temperature control object to the Peltier element. 72. The liquid concentration detection device according to item 69 of the patent application scope, wherein the aforementioned temperature control mechanism is further provided with a temperature control object ------- L2 .--- ___ Use Chinese National Standard (CNS) A4 Specifications (210 X 297 mm) ..... installed ------------: i order ...... line (please read first Note on the back, please fill in this page again) 513568 A8 D8 VI. Patent application scope Transfers heat to the heat-conducting member of Peltier element. (Please read the precautions on the back before writing this page) 73. For the liquid concentration detection device under the scope of patent application No. 70, the aforementioned temperature control mechanism is further equipped to transfer heat from the temperature control object to Parr Thermally conductive member of the post element. 74. For the liquid concentration detection device with the scope of application for patent No. 64 or 65, wherein the temperature control mechanism of the aforementioned light projection unit is independent of the temperature control mechanism for other temperature control objects. 75. If the liquid concentration detection device according to item 66 of the patent application scope, wherein the temperature control mechanism of the aforementioned light projection unit is independent of the temperature control mechanism for other temperature control objects. 76. If the liquid concentration detection device according to item 67 of the patent application scope, wherein the temperature control mechanism of the light-emitting section is independent of the temperature control mechanism for other temperature control objects. 77. If the liquid concentration detection device under the scope of patent application No. 64 or 65, the ratio of the output of the aforementioned photodetector to the output of the reference used for the detector is multiplied by a predetermined reference 値 to correct the aforementioned photodetector. Output, and then detect the amount of light transmitted by the liquid. 78. If the liquid concentration detection device according to item 64 or 65 of the patent application scope, wherein the aforementioned beam splitter is an unpolarized beam splitter. 79. For a liquid concentration detection device according to the scope of application for patent No. 64 or 65, wherein the aforementioned beam splitter is a three-dimensional beam splitter. 80. The liquid concentration detection device according to item 78 of the application, wherein the aforementioned beam splitter is a three-dimensional beam splitter. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)